TW201710681A - Chip structure for microfluidic transportation and detection of biological specimen comprising a bottom plate, a biochip, a cover plate and a silica gel dry film to greatly simplify the chip structure - Google Patents

Chip structure for microfluidic transportation and detection of biological specimen comprising a bottom plate, a biochip, a cover plate and a silica gel dry film to greatly simplify the chip structure Download PDF

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TW201710681A
TW201710681A TW104130435A TW104130435A TW201710681A TW 201710681 A TW201710681 A TW 201710681A TW 104130435 A TW104130435 A TW 104130435A TW 104130435 A TW104130435 A TW 104130435A TW 201710681 A TW201710681 A TW 201710681A
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dry film
top surface
silicone
sample
wafer
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TW104130435A
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TWI579564B (en
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Zhi-Xi Hu
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Zhi-Xi Hu
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Abstract

This invention relates to a chip structure for microfluidic transportation and detection of a biological specimen. The chip structure comprises a bottom plate provided with a chip mounting hole in its top surface; a biochip which is mounted in the chip mounting hole and has a top surface flush with a top surface of the bottom plate as well as implanted with a biological probe on its top surface; a cover plate on which a specimen inlet and a specimen outlet are provided, wherein the specimen inlet and the specimen outlet respectively penetrate through the top surface and the bottom surface of the cover plate; and a silica gel dry film made of a low Young's modulus heat-resistant polymer polymerized by silica gel and aromatic hydrocarbons, a microfluidic channel penetrating through the top surface and the bottom surface of the silica gel dry film is disposed in the silica gel dry film, the silica gel dry film is melted and fixed between the top surface of the bottom plate and the bottom surface of the cover plate by means of hot melting, such that both ends of the microfluidic channel can respectively correspond to the specimen inlet and the specimen outlet and a path of the microfluidic channel can correspond to the chip mounting hole.

Description

微流傳送及檢測生物檢體之晶片結構 Microfluidic transfer and detection of wafer structure of biopsy

本發明係一種生物檢體之檢測結構,尤指一種微流傳送及檢測生物檢體之晶片結構,以期大幅簡化該晶片結構之製程,令其能在無需透過極精密設備及極繁複製程之前提下,快速量產出具備精準且理想之微流通道。 The invention relates to a detection structure of a biological sample, in particular to a micro-flow transmission and detection of a wafer structure of a biological sample, in order to greatly simplify the process of the structure of the wafer, so that it can be carried out without the need to pass through extremely precise equipment and extremely complicated reproduction process. The fast volume yields a precise and ideal microfluidic channel.

一般言,生物晶片(biochip)依功能可分為二種,分別為感測型晶片與微處理型晶片,其中,感測型晶片上種植有不同的生物探針,該生物探針可為基因片段、短鏈核酸,以形成基因晶片,若該生物探針為蛋白質,則形成蛋白質晶片,近年來,尚開發出其他類型之生物感測型晶片,如:酵素晶片用以取代以試管進行生物化學反應;微處理型晶片則是將檢體前處理程序或分析程序在一微小化的空間進行,視晶片用途已有檢體前處理晶片、毛細管電泳分析(capillary electrophoresis,簡稱CE)晶片及多功能處理晶片(Lab-on-a-Chip)等。 Generally speaking, biochips can be divided into two types according to functions, namely, a sensing type wafer and a micro processing type wafer, wherein different types of biological probes are implanted on the sensing type wafer, and the biological probe can be a gene. Fragment, short-chain nucleic acid to form a gene wafer, if the bio-probe is a protein, a protein wafer is formed. In recent years, other types of bio-sensing wafers have been developed, such as an enzyme wafer to replace a biological tube in a test tube. Chemical reaction; micro-processed wafers are carried out in a miniaturized space. For wafer applications, pre-processed wafers, capillary electrophoresis (CE) wafers, and many Functional processing wafer (Lab-on-a-Chip) and the like.

由於,本發明係就生物感測型晶片之應用,進行研發,茲僅以其中之蛋白質晶片為例,說明如下。按,請參閱第1圖所示,蛋白質晶片10是以蛋白質、抗原或抗體作為生物探針,固定在一基板12上,以形成該蛋白質晶片10,並藉該蛋白質晶片10上抗原與抗體之間的專一性質,來檢測特定蛋白質檢體,如:用來檢驗某些疾病中特殊抗原抗體的濃度,作為疾病的診斷依據,其製作原理係先將第一級抗體20作為生物探針,固定在該基板12之頂面上,然後,加入待測檢體,令該待測檢體中的特定抗原21與該第一級抗體20相結合,接著,加入第二級抗體22,且令該第二級抗體22與第一級抗體20-特定抗原21的結合物相結合;此時,由於,該第二級抗體22的一端已先固定了特定螢光酵素23,因此,待測檢體中的 特定抗原21就會被該結合物末端的特定螢光酵素23所催化,而釋放出或轉換成有色物,嗣,利用特定螢光燈照射該蛋白質晶片10表面,就能根據螢光顯影之範圍大小及螢光強弱,量測出待測檢體中所含特定抗原21的濃度,因此,此種蛋白質晶片10能檢測出特定蛋白質檢體中是否含有可與該蛋白質晶片10上之第一級抗體20相結合的抗原21及其濃度。 Since the present invention has been developed for the application of a biosensing type wafer, only the protein wafer therein will be exemplified as follows. According to FIG. 1 , the protein wafer 10 is immobilized on a substrate 12 by using a protein, an antigen or an antibody as a biological probe to form the protein wafer 10, and the antigen and the antibody on the protein wafer 10 are used. The specific nature of the test, to detect specific protein samples, such as: used to test the concentration of specific antigens and antibodies in certain diseases, as a diagnostic basis for the disease, the production principle is to first use the first antibody 20 as a biological probe, fixed On the top surface of the substrate 12, then, the sample to be tested is added, the specific antigen 21 in the sample to be tested is combined with the first-stage antibody 20, and then the second-stage antibody 22 is added, and the The second-stage antibody 22 binds to the conjugate of the first-stage antibody 20-specific antigen 21; at this time, since one end of the second-stage antibody 22 has previously immobilized the specific fluorescent enzyme 23, the sample to be tested is middle The specific antigen 21 is catalyzed by a specific fluorescent enzyme 23 at the end of the conjugate, and is released or converted into a colored substance, and the surface of the protein wafer 10 is irradiated with a specific fluorescent lamp to be in accordance with the range of fluorescence development. The size and the intensity of the fluorescence are measured, and the concentration of the specific antigen 21 contained in the sample to be tested is measured. Therefore, the protein wafer 10 can detect whether the specific protein sample contains the first level on the wafer 10 with the protein. Antibody 20 binds to antigen 21 and its concentration.

此外,為使檢體中所含抗原21能充分地螢光酵素所催化,而釋放出或轉換成有色物,該蛋白質晶片10均係被安裝在一微流體(micro flow)結構中,以形成一微流傳送及檢測檢體之生物晶片(micro flow-through sampling chip)結構,請參閱第2圖所示,該生物晶片結構A包括一底板31、一蛋白質晶片10及一蓋板41,其中,請參閱第3a圖所示,該底板31之製作過程係在玻璃或高分子塑膠製成之一基板30之頂面先均勻披覆一層負型(或正型)感光性樹脂32;接著,以一具有微流通道圖樣331之光罩33遮蔽該負型(或正型)感光性樹脂32,並對該負型(或正型)感光性樹脂32進行顯影,俟該負型(或正型)感光性樹脂32顯影硬化後,去除其上未顯影硬化之部份,即會在已硬化之該負型(或正型)感光性樹脂32中形成一微流通道圖樣321;嗣,對該基板30之上表面對應於該微流通道圖樣321之部位,反覆進行蝕刻,俟蝕刻該基板30之上表面達預定之深度後,去除硬化之該負型(或正型)感光性樹脂32,即能在該基板30之上表面形成一微流通道311;最後,在該基板30上對應於該微流通道311路徑之位置,開設一晶片安裝孔312,且在該晶片安裝孔312內安裝一蛋白質晶片10後,即形成該底板31。 Further, in order to allow the antigen 21 contained in the sample to be sufficiently catalyzed by the fluorescent enzyme to be released or converted into a colored substance, the protein wafer 10 is mounted in a micro flow structure to form A micro flow-through sampling chip structure, as shown in FIG. 2, the biochip structure A includes a bottom plate 31, a protein wafer 10, and a cover 41. Referring to FIG. 3a, the bottom plate 31 is formed by uniformly coating a negative (or positive) photosensitive resin 32 on the top surface of one of the substrates 30 made of glass or polymer plastic; The negative (or positive) photosensitive resin 32 is shielded by a photomask 33 having a microfluidic channel pattern 331, and the negative (or positive) photosensitive resin 32 is developed, and the negative type (or positive) After the photosensitive resin 32 is developed and cured, the undeveloped hardened portion thereof is removed, and a microfluidic channel pattern 321 is formed in the hardened negative (or positive) photosensitive resin 32; The upper surface of the substrate 30 corresponds to the portion of the microfluidic channel pattern 321 and is repeatedly performed. After etching and etching the upper surface of the substrate 30 to a predetermined depth, the hardened negative (or positive) photosensitive resin 32 is removed, that is, a microfluidic channel 311 can be formed on the upper surface of the substrate 30; finally, A wafer mounting hole 312 is formed on the substrate 30 at a position corresponding to the path of the microfluidic channel 311, and the substrate 31 is formed after the protein wafer 10 is mounted in the wafer mounting hole 312.

請參閱第3b圖所示,該蓋板41之製作過程則係在另一基板40上鑽設至少二貫穿孔,其中,一貫穿孔為檢體入口411,另一貫穿孔則為檢體出口412,即形成該蓋板41;最後,復請參閱第2圖所示,將該底板31之頂面與該蓋板41之底面相互黏接或熔接成一體,且令該檢體入口411及檢體出口412分別對應於該微流通道311之兩端,並分別與該微流通道311相連通,即製成一微流傳送及檢測檢體之生物晶片結構A。 Referring to FIG. 3b, the cover 41 is formed by drilling at least two through holes on the other substrate 40, wherein the through hole is the sample inlet 411 and the other through hole is the sample outlet 412. That is, the cover plate 41 is formed; finally, as shown in FIG. 2, the top surface of the bottom plate 31 and the bottom surface of the cover plate 41 are bonded or welded to each other, and the sample inlet 411 and the sample are made. The outlets 412 respectively correspond to the two ends of the microfluidic channel 311, and are respectively connected to the microfluidic channel 311, thereby forming a microfluidic structure A for transmitting and detecting the sample.

如此,復請參閱第1及2圖所示,當一待測檢體被加壓導入至該檢體入口411後,該待測檢體即能沿著該微流通道311,依序流經該蛋 白質晶片10之頂面,使該待測檢體中所含特定抗原21能在該蛋白質晶片10上充分地被特定螢光酵素23所催化,而釋放出或轉換成有色產物,並藉由對該蛋白質晶片10照射特定螢光,即能據以檢測出該待測檢體中是否含有能與該蛋白質晶片10上第一級抗體20相結合的抗原21及其濃度。 Thus, referring to FIGS. 1 and 2, when a sample to be tested is pressurized and introduced into the sample inlet 411, the sample to be tested can sequentially flow along the microfluidic channel 311. The egg The top surface of the white matter wafer 10 is such that the specific antigen 21 contained in the sample to be tested can be sufficiently catalyzed by the specific luminescent enzyme 23 on the protein wafer 10 to be released or converted into a colored product, and The protein wafer 10 is irradiated with specific fluorescence, that is, it can be detected whether or not the sample to be tested contains the antigen 21 capable of binding to the first-stage antibody 20 on the protein wafer 10 and its concentration.

惟,由於該微流通道311之深度極淺,僅數十至數百微米,因此,無論以前述蝕刻方式,或其它射出成型方式,若非使用極為精密的設備及透過繁複的製程,顯然無法在該底板31頂面上製作出理想之微流通道311,反之,透過精密設備及繁複製程,卻只是導致目前該種微流傳送及檢測檢體之生物晶片結構A的製造成本及市場售價始終居高不下之主要原因。 However, since the depth of the microfluidic channel 311 is extremely shallow, only tens to hundreds of micrometers, it is obviously impossible to use the above-mentioned etching method or other injection molding methods without using extremely precise equipment and through complicated processes. The ideal microfluidic channel 311 is formed on the top surface of the bottom plate 31. Conversely, through the precision equipment and the complicated reproduction process, it only leads to the manufacturing cost and the market price of the biochip structure A of the microfluidic transmission and detection sample. The main reason for being high.

雖然,亦有業者試圖透過在一傳統矽膠乾膜上,先成形出所需之微流通道,再將該矽膠乾膜組裝至一底板及一蓋板間,以形成另一種類型之生物晶片結構,但是,由於傳統矽膠乾膜在厚度極薄之狀態下,不僅極為柔軟而不易定形,導致在對其進行微流通道加工的過程中,經常無法維持該微流通道之精準度,或在將其組裝至該底板及蓋板間的過程中,必需使用液態黏膠,而發生黏膠溢流堵塞微流通道之瑕疵,造成該種生物晶片結構始終效能不彰。 Although there are also attempts to form a desired microfluidic channel on a conventional silicone dry film, the silicone dry film is assembled between a substrate and a cover to form another type of biochip structure. However, due to the extremely thin thickness of the traditional silicone dry film, it is not only extremely soft but not easy to shape, which leads to the inability to maintain the precision of the microfluidic channel during the microfluidic channel processing. In the process of assembling between the bottom plate and the cover plate, liquid glue must be used, and the adhesive overflow overflows to block the microfluidic channel, so that the structure of the biochip is always ineffective.

據此,如何設計出一種微流傳送及檢測生物檢體之晶片結構,以大幅減化製程,且在無需透過極精密設備及極繁複製程之情形下,能在該底板31頂面製作出精準且理想之微流通道311,即成為本發明在此亟欲解決的重要問題。 According to this, how to design a micro-flow transmission and detection of the wafer structure of the biological sample to greatly reduce the process, and to make accurate on the top surface of the bottom plate 31 without using extremely precise equipment and extremely complicated reproduction process. The ideal microfluidic channel 311 is an important problem to be solved by the present invention.

本發明之一目的,係提供一種微流傳送及檢測生物檢體之晶片結構,該晶片結構包括一底板、一生物晶片、一蓋板及一第一矽膠乾膜,其中,該底板係由玻璃或高分子塑膠製成之板體,該底板之頂面開設有一晶片安裝孔;該生物晶片係安裝在該晶片安裝孔內,該生物晶片之頂面係與該底板之頂面齊平,且其上植有複數個生物探針;該蓋板亦係由玻璃或高分子塑膠製成之板體,該蓋板上開設有至少一檢體入口及一檢體出口,該檢體入口及檢體出口係分別貫穿該蓋板之頂面及底面;該第一矽膠乾膜 係由矽膠與芳香族碳氫化合物(Aromatic Hydrocarbon)聚合而成之一低楊氏模組且耐熱之聚合物(low Young's modulus and heat-resistant polymer)製成,且具有低溫固化、高溫溶融及高溫交鏈作用(cross linking)的特性,因此,能在該第一矽膠乾膜處於低溫固化狀態下,在其內精準地開設至少一微流通道,該微流通道係貫穿該第一矽膠乾膜之頂面及底面,該微流通道之深度等於該第一矽膠乾膜之厚度,嗣,該第一矽膠乾膜即能藉熱烘烤,高溫溶融,且藉高溫產生交鏈作用(cross linking),精準地交鏈固著在該底板之頂面及該蓋板之底面間,以使三者膠合成一體,且使該微流通道之兩端分別對應於該檢體入口及該檢體出口,而能分別與該檢體入口及該檢體出口相連通,且令該微流通道之路徑能對應於該晶片安裝孔。如此,當一待測生物檢體被加壓導入至該檢體入口後,該生物檢體即能沿著該微流通道,依序流經該生物晶片之頂面,使該生物檢體中所含特定抗原能在該生物晶片上充分地被特定螢光酵素所催化,而釋放出或轉換成有色產物,嗣,藉由對該生物晶片照射特定螢光,即能據以檢測出該生物檢體中是否含有能與該生物晶片上第一級抗體相結合的抗原及其濃度。 An object of the present invention is to provide a microfluidic transfer and detection of a wafer structure of a biological sample, the wafer structure comprising a bottom plate, a biochip, a cover plate and a first silicone dry film, wherein the bottom plate is made of glass Or a polymer body made of a polymer, the top surface of the bottom plate is provided with a wafer mounting hole; the biochip is mounted in the wafer mounting hole, and the top surface of the biochip is flush with the top surface of the bottom plate, and The plurality of biological probes are implanted thereon; the cover plate is also a plate body made of glass or polymer plastic, and the cover plate is provided with at least one sample inlet and a sample outlet, the sample inlet and the inspection The body outlets respectively penetrate the top surface and the bottom surface of the cover plate; the first silicone dry film It is made of a low Young's modulus and heat-resistant polymer which is polymerized from aromatic and carbonic acid (Aromatic Hydrocarbon) and has low temperature curing, high temperature melting and high temperature. a cross-linking property, so that at least one microfluidic channel can be accurately opened in the first silicone dry film in a low-temperature curing state, and the micro-fluid channel penetrates the first silicone dry film The top surface and the bottom surface, the depth of the microfluidic channel is equal to the thickness of the first silicone dry film, and the first silicone dry film can be baked by heat, melted at a high temperature, and crosslinked by high temperature (cross linking) The precise cross-linking is fixed between the top surface of the bottom plate and the bottom surface of the cover plate to integrate the three rubbers, and the two ends of the micro-flow channel respectively correspond to the sample inlet and the sample The outlets are respectively connectable to the sample inlet and the sample outlet, and the path of the microfluidic channel can correspond to the wafer mounting hole. In this way, when a biological sample to be tested is pressurized and introduced into the entrance of the sample, the biological sample can sequentially flow through the top surface of the biochip along the microfluidic channel, so that the biological sample is in the biological sample. The specific antigen contained can be sufficiently catalyzed by the specific fluorescing enzyme on the biochip to be released or converted into a colored product, and by irradiating the biochip with specific fluorescence, the organism can be detected. Whether the sample contains an antigen capable of binding to the first-stage antibody on the biochip and its concentration.

本發明之另一目的,係該蓋板(或該底板)上尚包括一閘孔及一第二矽膠乾膜,其中,該閘孔係貫穿該蓋板之頂面及底面,且對應於該微流通道之路徑;該第二矽膠乾膜係由矽膠聚合物製成,具有高溫溶融的特性,其上對應於該檢體入口及該檢體出口之位置分別貫穿有一通孔,該第二矽膠乾膜係藉熱烘烤,高溫溶融後固著在該蓋板之底面與該第一矽膠乾膜之頂面間(或溶融固著在該底板之頂面與該第一矽膠乾膜之底面間)。如此,當一加壓空氣被導入至該閘孔後,該第二矽膠乾膜對應於該閘孔之部位即會朝該微流通道之方向變形,以遮蔽該微流通道之路徑,進而使該微流通道路徑中之該生物檢體停止流動或減緩流動速度,以令該生物檢體與該生物晶片間能充分地發生生化反應。 Another object of the present invention is that the cover (or the bottom plate) further includes a gate hole and a second silicone dry film, wherein the gate hole extends through the top surface and the bottom surface of the cover plate, and corresponds to the a path of the microfluidic channel; the second silicone dry film is made of a silicone polymer and has a high-temperature melting property, wherein a through hole is respectively penetrated through a position corresponding to the inlet of the sample and the outlet of the sample, the second The silicone dry film is baked by heat, fixed at a high temperature and fixed between the bottom surface of the cover and the top surface of the first silicone dry film (or melted and fixed on the top surface of the bottom plate and the first silicone dry film) Between the bottom surfaces). In this way, when a pressurized air is introduced into the gate hole, the portion of the second silicone dry film corresponding to the gate hole is deformed toward the microfluidic channel to shield the path of the microfluidic channel, thereby The biological sample in the microfluidic channel path stops flowing or slows down the flow rate to enable a sufficient biochemical reaction between the biological sample and the biochip.

為便 貴審查委員能對本發明之技術、結構特徵及其目的有更進一步的認識與理解,茲舉實施例配合圖式,詳細說明如下: For the sake of review, the reviewer can have a further understanding and understanding of the technical, structural features and purposes of the present invention. The embodiments are described in conjunction with the drawings, which are described in detail as follows:

〔習知〕 [study]

10‧‧‧蛋白質晶片 10‧‧‧protein wafer

12、30、40‧‧‧基板 12, 30, 40‧‧‧ substrates

20‧‧‧第一級抗體 20‧‧‧First-level antibody

21‧‧‧抗原 21‧‧‧ antigen

22‧‧‧第二級抗體 22‧‧‧second-level antibody

23‧‧‧螢光酵素 23‧‧‧Fluorescent Enzymes

31‧‧‧底板 31‧‧‧floor

311‧‧‧微流通道 311‧‧‧Microflow channel

312‧‧‧晶片安裝孔 312‧‧‧ wafer mounting holes

32‧‧‧感光性樹脂 32‧‧‧Photosensitive resin

321、331‧‧‧微流通道圖樣 321, 331‧‧‧ microfluidic channel pattern

33‧‧‧光罩 33‧‧‧Photomask

41‧‧‧蓋板 41‧‧‧ Cover

411‧‧‧檢體入口 411‧‧ ‧ entrance to the body

412‧‧‧檢體出口 412‧‧‧Exam export

A‧‧‧生物晶片結構 A‧‧‧Biowafer structure

〔本發明〕 〔this invention〕

10‧‧‧生物晶片 10‧‧‧Biochip

50‧‧‧底板 50‧‧‧floor

51‧‧‧第一晶片安裝孔 51‧‧‧First wafer mounting hole

60‧‧‧蓋板 60‧‧‧ cover

61‧‧‧檢體入口 61‧‧‧Inspection entrance

62‧‧‧檢體出口 62‧‧‧Exam export

63‧‧‧第二晶片安裝孔 63‧‧‧Second wafer mounting hole

64‧‧‧閘孔 64‧‧‧ gate hole

70‧‧‧第一矽膠乾膜 70‧‧‧First silicone dry film

71‧‧‧微流通道 71‧‧‧Microflow channel

80‧‧‧第二矽膠乾膜 80‧‧‧Second silicone dry film

81、82‧‧‧通孔 81, 82‧‧‧through holes

B‧‧‧晶片結構 B‧‧‧ wafer structure

第1圖係習知生物晶片與抗原間生化反應之示意圖;第2圖係習知微流傳送及檢測檢體生物晶片結構之分解示意圖;第3a及3b圖係習知微流傳送及檢測檢體生物晶片結構之製程示意圖;第4圖係本發明之一較佳實施例之分解示意圖;第5圖係第一矽膠乾膜之分子結構示意圖;第6圖係第4圖所示較佳實施例之組立結構之B-B剖面示意圖;及第7圖係本發明之另一較佳實施例之組立結構之剖面示意圖。 Figure 1 is a schematic diagram of a biochemical reaction between a conventional biochip and an antigen; Figure 2 is a schematic diagram of the decomposition of a conventional microfluidic transfer and detection biochip structure; and Figures 3a and 3b are conventional microfluidic transmission and detection FIG. 4 is a schematic exploded view of a preferred embodiment of the present invention; FIG. 5 is a schematic view showing the molecular structure of the first silicone dry film; and FIG. 6 is a preferred embodiment shown in FIG. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 7 is a schematic cross-sectional view of a group structure of another preferred embodiment of the present invention.

在本發明之一最佳實施例中,係提供一種微流傳送及檢測生物檢體之晶片結構,請參閱第4圖所示,該晶片結構B包括一底板50、一第一生物晶片10、一蓋板60及一第一矽膠乾膜70,其中,該底板50係由玻璃或高分子塑膠製成之板體,該底板50之頂面開設有一第一晶片安裝孔51;該第一生物晶片10係安裝在該第一晶片安裝孔51內,該第一生物晶片10之頂面係與該底板50之頂面齊平,且其上植有複數個生物探針;該蓋板60亦係由玻璃或高分子塑膠製成之板體,該蓋板60上開設有至少一檢體入口61及一檢體出口62,該檢體入口61及檢體出口62係分別貫穿該蓋板60之頂面及底面;該第一矽膠乾膜70係由矽膠與芳香族碳氫化合物(Aromatic Hydrocarbon)聚合而成之一低楊氏模組且耐熱之聚合物(low Young’s modulus and heat-resistant polymer)製成,其楊氏模組值介於0.01~0.1GPa(Gpa,十億帕斯卡)或1,500-15,000lbf/in2(lbf/in2,磅力每平方英吋),相當於橡膠之材料硬度及彈性,且具有低溫固化、高溫溶融及高溫交鏈作用(cross linking)的特性,其分子結構如第5圖所示。如此,即能在該第一矽膠乾膜70處於低溫固化狀態下,精準地在其內開設至少一微流通道71,該微流通道71係貫穿該第一矽膠乾膜70之頂面及底面,該微流通道71之深度等於該第一矽膠乾膜70之厚度,嗣,該第一矽膠乾膜70係藉熱烘烤,高溫溶融,且藉高溫所產生之交鏈作用(cross linking),精準地交鏈固著在該底板50之頂面及該蓋板60之底面間,以使三者膠合成一體,嗣,該微流通道71之兩端能分別對應於該檢體入口61及該檢體出口62,且能分別與該檢體入口61及該檢體出口62相連通,該微流通道71之路徑則能 對應於該第一晶片安裝孔51。 In a preferred embodiment of the present invention, a microfluidic transfer and detection of a wafer structure of a biosample is provided. Referring to FIG. 4, the wafer structure B includes a bottom plate 50, a first biochip 10, a cover plate 60 and a first silicone dry film 70, wherein the bottom plate 50 is a plate made of glass or polymer plastic, and a top wafer mounting hole 51 is defined in a top surface of the bottom plate 50; The wafer 10 is mounted in the first wafer mounting hole 51. The top surface of the first biochip 10 is flush with the top surface of the bottom plate 50, and a plurality of biological probes are implanted thereon; The plate body is made of glass or polymer plastic, and the cover plate 60 is provided with at least one sample inlet 61 and a sample outlet 62. The sample inlet 61 and the sample outlet 62 respectively penetrate the cover plate 60. The top surface and the bottom surface; the first silicone dry film 70 is a low Young's modulus and heat-resistant polymer which is polymerized from silicone and aromatic hydrocarbons (Aromatic Hydrocarbon). Made of, the Young's module value is between 0.01~0.1GPa (Gpa, 1 billion Pascal) or 1 , 500-15,000 lbf / in 2 (lbf / in 2 , pounds per square inch), equivalent to the hardness and elasticity of rubber materials, and has the characteristics of low temperature curing, high temperature melting and high temperature cross linking. Its molecular structure is shown in Figure 5. In this way, at least one microfluidic channel 71 can be precisely opened in the first silicone dry film 70 in a low temperature curing state, and the microfluidic channel 71 penetrates the top surface and the bottom surface of the first silicone dry film 70. The depth of the microfluidic channel 71 is equal to the thickness of the first silicone dry film 70. The first silicone dry film 70 is baked by heat, melted at a high temperature, and cross-linked by high temperature. The precise cross-linking is fixed between the top surface of the bottom plate 50 and the bottom surface of the cover plate 60 to integrate the three rubbers. The two ends of the micro-flow passage 71 can respectively correspond to the sample inlet 61. The sample outlet 62 is connected to the sample inlet 61 and the sample outlet 62, respectively, and the path of the microfluidic channel 71 corresponds to the first wafer mounting hole 51.

在此需特別一提者,在前述實施例中,由於該第一矽膠乾膜70係由矽膠與芳香族碳氫化合物聚合而成之低楊氏模組的耐熱聚合物製成,具有低溫固化、高溫溶融及高溫交鏈作用的特性,因此,當該聚合物中含感光性材料時,即能在低溫固化的狀態下,以光罩曝光及顯影方式,在該第一矽膠乾膜70上,精準地形成該微流通道71;反之,當該聚合物中不含感光性材料時,亦能在低溫固化的狀態下,以雷射或刀具裁切方式,在該第一矽膠乾膜70上,精準且快速地形成該微流通道71;嗣,在低溫固化的狀態下,將該第一矽膠乾膜70精準地置放在該底板50及蓋板60之間;接著,透過加熱烘烤,即能令該第一矽膠乾膜70之表面溶融且精準地交鏈固著至該底板50及蓋板60,且在該底板50及蓋板60間形成精準且理想之微流通道71,供傳輸該生物檢體,令該生物檢體能與該生物晶片10充分地發生生化反應。 In particular, in the foregoing embodiment, since the first silicone dry film 70 is made of a heat-resistant polymer of a low Young's module obtained by polymerizing a silicone and an aromatic hydrocarbon, it has a low temperature curing. The characteristics of high-temperature melting and high-temperature interlinking, therefore, when the polymer contains a photosensitive material, it can be exposed to a low temperature, in a reticle exposure and development manner, on the first silicone dry film 70. The microfluidic channel 71 is formed accurately; conversely, when the polymer does not contain a photosensitive material, the first silicone dry film 70 can also be cut in a low temperature curing state by laser or knife cutting. The microfluidic channel 71 is formed accurately and rapidly; 嗣, in a low temperature curing state, the first silicone dry film 70 is accurately placed between the bottom plate 50 and the cover plate 60; Bake, the surface of the first silicone dry film 70 is melted and precisely bonded to the bottom plate 50 and the cover 60, and a precise and ideal microfluidic channel 71 is formed between the bottom plate 50 and the cover 60. For transmitting the biological specimen, enabling the biological specimen to interact with the biological The wafer 10 is sufficiently biochemically reacted.

如此,請參閱第6圖所示,係第4圖所示較佳實施例之組立結構顏B-B剖面線之剖面示意圖,當一待測生物檢體被加壓導入至該檢體入口61後,該生物檢體即能沿著該微流通道71,依序流經該第一生物晶片10之頂面,使該生物檢體中所含特定抗原能在該第一生物晶片10上充分地被特定螢光酵素所催化,而釋放出或轉換成有色產物,嗣,藉由對該第一生物晶片10照射特定螢光,即能據以檢測出該生物檢體中是否含有能與該第一生物晶片10上第一級抗體相結合的抗原及其濃度。 Thus, referring to FIG. 6, a cross-sectional view of the BB section line of the assembled structure of the preferred embodiment shown in FIG. 4, when a biological sample to be tested is pressurized and introduced into the sample inlet 61, The biological sample can sequentially flow through the top surface of the first biochip 10 along the microfluidic channel 71, so that the specific antigen contained in the biological sample can be sufficiently fully on the first biochip 10. By catalyzing a specific fluorescent enzyme, releasing or converting into a colored product, by irradiating the first biochip 10 with a specific fluorescent light, it can be detected whether the biological sample contains the first and the first The antigen bound to the first-stage antibody on the biochip 10 and its concentration.

以上所述,僅為本發明之一較佳實施例,惟,本發明在實際施作時,並不侷限於此。按,凡相關技術領域之人士,在參酌本發明之技術內容後,若欲更精準地檢測該生物檢體中是否含有特定抗原及其濃度,尚能在該蓋板60上增設一第二晶片安裝孔63及一第二生物晶片10,其中,該第二晶片安裝孔63係開設在該蓋板60之底面,且對應於該微流通道71之路徑;該第二生物晶片10係安裝在該第二晶片安裝孔63內,其底面係與該蓋板60之底面齊平,且其底面上植有複數個生物探針。如此,當該生物檢體沿著該微流通道71,流經該第二生物晶片10之底面時,該生物檢體中所含特定抗原即能在該第二生物晶片10上充分地被特定螢光酵素所催 化,而釋放出或轉換成有色產物,嗣,藉由對該第二生物晶片10照射特定螢光,即能據以檢測出該生物檢體中是否含有能與該第二生物晶片10上第一級抗體相結合的抗原及其濃度。據此,綜合該第一及二生物晶片10所測得之數據,即能更精準地判斷出該生物檢體中是否含有能與該等生物晶片10上第一級抗體相結合的抗原及其濃度。 The above description is only a preferred embodiment of the present invention, but the present invention is not limited thereto when it is actually applied. According to the person skilled in the relevant art, after considering the technical content of the present invention, if it is desired to more accurately detect whether the biological sample contains a specific antigen and its concentration, a second wafer can be added to the cover 60. a mounting hole 63 and a second biochip 10, wherein the second wafer mounting hole 63 is formed on a bottom surface of the cover 60 and corresponds to a path of the micro flow channel 71; the second biochip 10 is mounted on The bottom surface of the second wafer mounting hole 63 is flush with the bottom surface of the cover plate 60, and a plurality of biological probes are implanted on the bottom surface thereof. As such, when the biosample passes along the microfluidic channel 71 and flows through the bottom surface of the second biochip 10, the specific antigen contained in the biosample can be sufficiently specified on the second biochip 10. Phosphorescent enzymes By releasing or converting into a colored product, 嗣, by irradiating the second biochip 10 with a specific fluorescent light, it can be detected whether the biological sample contains the same energy and the second biochip 10 The primary antibody binds to the antigen and its concentration. Accordingly, by synthesizing the data measured by the first and second biochips 10, it is possible to more accurately determine whether the biological sample contains an antigen capable of binding to the first-order antibody on the biochip 10 and concentration.

另,在本發明之實際施作過程中,該第一晶片安裝孔51亦能被設計成貫穿該底板50之頂面及底面,俾據以調整該第一生物晶片10之安裝位置,以確保該第一生物晶片10之頂面能與該底板50之頂面齊平;同理,該第二晶片安裝孔63亦能被設計成貫穿該蓋板60之頂面及底面,俾據以調整該第二生物晶片10之安裝位置,以確保該第二生物晶片10之底面能與該蓋板60之底面齊平,進而確保該生物檢體能與該生物晶片10間發生正確的生化反應。 In addition, during the actual implementation of the present invention, the first wafer mounting hole 51 can also be designed to penetrate the top surface and the bottom surface of the bottom substrate 50 to adjust the mounting position of the first biochip 10 to ensure The top surface of the first bio-chip 10 can be flush with the top surface of the bottom plate 50. Similarly, the second wafer mounting hole 63 can also be designed to penetrate the top surface and the bottom surface of the cover plate 60. The second biochip 10 is mounted to ensure that the bottom surface of the second biochip 10 is flush with the bottom surface of the cover plate 60, thereby ensuring that the biofilm can be properly biochemically reacted with the biochip 10.

在本發明之另一最佳實施例中,請參閱第7圖所示,為了能使該微流通道71路徑中流動之該生物檢體暫停流動或減緩流速,以期該生物檢體與該生物晶片10間能發生充分的生化反應,該蓋板60上尚包括一閘孔64及一第二矽膠乾膜80,其中,該閘孔64係貫穿該蓋板60之頂面及底面,且對應於該微流通道71之路徑;該第二矽膠乾膜80亦係由矽膠聚合物(Silicone Polymer)製成,具有高溫溶融的特性,其上對應於該檢體入口61及該檢體出口62之位置分別貫穿有一通孔81、82,該第二矽膠乾膜80能藉熱烘烤,溶融固著在該蓋板60之底面與該第一矽膠乾膜70之頂面間。如此,在檢測過程中,若檢測人員欲延長該生物檢體與該生物晶片10間發生生化反應之期間,即能將一加壓空氣導入至該閘孔64,此時,該第二矽膠乾膜80對應於該閘孔64之部位(如第7圖中虛線所示)即會因自身彈性,朝該微流通道71之方向變形,以遮蔽該微流通道71之路徑,進而使該微流通道71路徑中之該生物檢體停止流動或減緩流動速度,令該生物檢體能與該生物晶片10發生充分的生化反應。 In another preferred embodiment of the present invention, as shown in FIG. 7, in order to suspend or slow the flow rate of the biological sample flowing in the path of the microfluidic channel 71, the biological specimen and the living organism are expected to be A sufficient biochemical reaction can occur between the wafers 10. The cover 60 further includes a gate hole 64 and a second silicone dry film 80. The gate hole 64 extends through the top surface and the bottom surface of the cover plate 60, and corresponds to The second silicone dry film 80 is also made of Silicone Polymer and has a high temperature melting property corresponding to the sample inlet 61 and the sample outlet 62. The second silicone dry film 80 can be baked by heat, and is fixed between the bottom surface of the cover 60 and the top surface of the first silicone dry film 70 by heat baking. In this way, during the detection process, if the detecting person wants to extend the period of biochemical reaction between the biological specimen and the biochip 10, a pressurized air can be introduced into the gate hole 64. At this time, the second silicone rubber is dried. The portion of the film 80 corresponding to the gate hole 64 (as indicated by the broken line in FIG. 7) is deformed toward the microfluidic channel 71 by its own elasticity to shield the path of the microfluidic channel 71, thereby making the micro The biosample in the path of the flow channel 71 stops flowing or slows down the flow rate, enabling the biosample to undergo a sufficient biochemical reaction with the biochip 10.

茲需特別聲明者,該第二矽膠乾膜80無論是否與該第一矽膠乾膜70為相同之矽膠聚合物,只要令該第二矽膠乾膜80在受熱烘烤後,其表面能溶融固著在該蓋板60之底面與該第一矽膠乾膜70之頂面間者, 均係本發明在此所謂之矽膠聚合物。此外,在本發明之其它實施例(圖中未示)中,該閘孔及第二矽膠乾膜亦能視實際需求,被設計在該底板50上,其中,該閘孔係貫穿該底板50之頂面及底面,且對應於該微流通道71之路徑;該第二矽膠乾膜上對應於該檢體入口61及該檢體出口62之位置分別貫穿有一通孔,該第二矽膠乾膜係藉熱烘烤,溶融固著在該底板50之頂面與該第一矽膠乾膜70之底面間。 It is necessary to specifically declare that the second silicone dry film 80 is the same silicone polymer as the first silicone dry film 70, so that the surface of the second silicone dry film 80 can be melted after being baked by heat. On the bottom surface of the cover plate 60 and the top surface of the first silicone dry film 70, Both are the so-called silicone polymers herein. In addition, in other embodiments of the present invention (not shown), the gate hole and the second silicone dry film can also be designed on the bottom plate 50 according to actual needs, wherein the gate hole penetrates the bottom plate 50. a top surface and a bottom surface corresponding to the path of the microfluidic channel 71; a position corresponding to the sample inlet 61 and the sample outlet 62 of the second silicone dry film respectively through a through hole, the second silicone dry The film is baked by heat, and is fixed between the top surface of the bottom plate 50 and the bottom surface of the first silicone dry film 70.

以上所述,僅為本發明之若干實施例,本發明之技術特徵並不侷限於此,凡相關技術領域之人士,在參酌本發明之技術內容後,所能輕易思及的等效變化,均應不脫離本發明之保護範疇。 The above description is only a few embodiments of the present invention, and the technical features of the present invention are not limited thereto, and those skilled in the relevant art, after considering the technical content of the present invention, can easily think about the equivalent changes. They should not depart from the scope of protection of the present invention.

10‧‧‧生物晶片 10‧‧‧Biochip

50‧‧‧底板 50‧‧‧floor

51‧‧‧第一晶片安裝孔 51‧‧‧First wafer mounting hole

60‧‧‧蓋板 60‧‧‧ cover

61‧‧‧檢體入口 61‧‧‧Inspection entrance

62‧‧‧檢體出口 62‧‧‧Exam export

70‧‧‧第一矽膠乾膜 70‧‧‧First silicone dry film

71‧‧‧微流通道 71‧‧‧Microflow channel

B‧‧‧晶片結構 B‧‧‧ wafer structure

Claims (8)

一種微流傳送及檢測生物檢體之晶片結構,包括:一底板,其頂面開設有一第一晶片安裝孔;一第一生物晶片,係安裝在該第一晶片安裝孔內,其頂面係與該底板之頂面齊平,且其頂面上植有複數個生物探針;一蓋板,其上開設有至少一檢體入口及一檢體出口,該檢體入口及檢體出口係分別貫穿該蓋板之頂面及底面;及一第一矽膠乾膜,係由矽膠與芳香族碳氫化合物聚合而成之一低楊氏模組的耐熱聚合物製成,其楊氏模組值介於0.01~0.1GPa,且具有低溫固化、高溫溶融及高溫交鏈作用的特性,在低溫固化的狀態下,於其內開設至少一微流通道,該微流通道係貫穿該第一矽膠乾膜之頂面及底面,該微流通道之深度等於該第一矽膠乾膜之厚度,該第一矽膠乾膜係藉熱烘烤,溶融且交鏈固著在該底板之頂面及該蓋板之底面間,以使三者結合成一體,且令該微流通道之兩端分別對應於該檢體入口及該檢體出口,且分別與該檢體入口及該檢體出口相連通,該微流通道之路徑則對應於該第一晶片安裝孔。 A microfluidic transmission and detection of a wafer structure of a biological sample, comprising: a bottom plate having a first wafer mounting hole on a top surface thereof; a first biochip mounted in the first wafer mounting hole, the top surface of the substrate It is flush with the top surface of the bottom plate, and a plurality of biological probes are implanted on the top surface thereof; a cover plate is provided with at least one sample inlet and one sample outlet, and the sample inlet and the sample outlet are Passing through the top surface and the bottom surface of the cover plate respectively; and a first dry film of silicone rubber, which is made of a heat-resistant polymer of low Young's module which is polymerized with silicone and aromatic hydrocarbons, and the Young's module The value is between 0.01 and 0.1 GPa, and has the characteristics of low temperature curing, high temperature melting and high temperature interlinking. In the low temperature curing state, at least one microfluidic channel is opened therein, and the microfluidic channel penetrates the first silicone The top surface and the bottom surface of the dry film, the depth of the micro flow channel is equal to the thickness of the first silicone dry film, the first silicone dry film is baked by heat, melted and crosslinked to the top surface of the bottom plate and Between the bottom surfaces of the cover plates, so that the three are integrated into one body, and Ends of the flow channel are corresponding to the sample inlet and the sample outlet, and respectively with the inlet and a sample outlet communicating this sample, the path of the microfluidic channel of the wafer corresponding to the first mounting hole. 如請求項1所述之晶片結構,其中,該蓋板上尚包括:一第二晶片安裝孔,係開設在該蓋板之底面,且對應於該微流通道之路徑;及 一第二生物晶片,係安裝在該第二晶片安裝孔內,其底面係與該蓋板之底面齊平,且其底面上植有複數個生物探針。 The wafer structure of claim 1, wherein the cover further comprises: a second wafer mounting hole formed on a bottom surface of the cover and corresponding to the path of the micro flow channel; A second biochip is mounted in the second wafer mounting hole, the bottom surface of which is flush with the bottom surface of the cover plate, and a plurality of biological probes are implanted on the bottom surface thereof. 如請求項2所述之晶片結構,其中,該第一晶片安裝孔係貫穿該底板之頂面及底面。 The wafer structure of claim 2, wherein the first wafer mounting hole extends through a top surface and a bottom surface of the bottom plate. 如請求項3所述之晶片結構,其中,該第二晶片安裝孔係貫穿該蓋板之頂面及底面。 The wafer structure of claim 3, wherein the second wafer mounting hole extends through the top surface and the bottom surface of the cover. 如請求項4所述之晶片結構,其中,當該第一矽膠乾膜中含感光性材料時,能在低溫固化的狀態下,以光罩曝光及顯影方式,在該第一矽膠乾膜上,形成該微流通道。 The wafer structure according to claim 4, wherein when the first silicone dry film contains a photosensitive material, the film can be exposed and developed in a low temperature curing state on the first silicone dry film. Forming the microfluidic channel. 如請求項4所述之晶片結構,其中,當該第一矽膠乾膜中不含感光性材料時,能在低溫固化的狀態下,以雷射或刀具裁切方式,在該第一矽膠乾膜上,形成該微流通道。 The wafer structure according to claim 4, wherein when the first silicone dry film does not contain a photosensitive material, the first silicone can be dried in a low temperature curing state by laser or cutter cutting. The microfluidic channel is formed on the membrane. 如請求項1、2、3、4、5或6所述之晶片結構,其中,該蓋板上尚包括:一閘孔,係貫穿該蓋板之頂面及底面,且對應於該微流通道之路徑;及一第二矽膠乾膜,係由矽膠聚合物製成,具有高溫溶融的特性,其上對應於該檢體入口及該檢體出口之位置分別貫穿有一通孔,該第二矽膠乾膜係藉熱烘烤,溶融固著在該蓋板之底面與該第一矽膠乾膜之頂面間。 The wafer structure of claim 1, 2, 3, 4, 5 or 6, wherein the cover plate further comprises: a gate hole extending through the top surface and the bottom surface of the cover plate, and corresponding to the micro flow And a second silicone dry film, which is made of a silicone polymer and has a high-temperature melting property, wherein a through hole is respectively penetrated through a position corresponding to the inlet of the sample and the outlet of the sample, and the second The silicone dry film is baked by heat, and is fixed between the bottom surface of the cover and the top surface of the first silicone dry film. 如請求項1、2、3、4、5或6所述之晶片結構,其中,該底板上尚包括: 一閘孔,係貫穿該底板之頂面及底面,且對應於該微流通道之路徑;及一第二矽膠乾膜,係由矽膠聚合物製成,具有高溫溶融的特性,其上對應於該檢體入口及該檢體出口之位置分別貫穿有一通孔,該第二矽膠乾膜係藉熱烘烤,溶融固著在該底板之頂面與該第一矽膠乾膜之底面間。 The wafer structure of claim 1, 2, 3, 4, 5 or 6, wherein the substrate further comprises: a gate hole penetrating through the top surface and the bottom surface of the bottom plate and corresponding to the path of the microfluidic channel; and a second silicone dry film made of a silicone polymer having high temperature melting characteristics corresponding to The sample inlet and the outlet of the sample respectively penetrate through a through hole, and the second silicone dry film is baked by heat, and is fixed between the top surface of the bottom plate and the bottom surface of the first silicone dry film.
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