TW201707976A - Layered body and method for manufacturing same - Google Patents

Layered body and method for manufacturing same Download PDF

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TW201707976A
TW201707976A TW105121714A TW105121714A TW201707976A TW 201707976 A TW201707976 A TW 201707976A TW 105121714 A TW105121714 A TW 105121714A TW 105121714 A TW105121714 A TW 105121714A TW 201707976 A TW201707976 A TW 201707976A
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coupling agent
polymer film
decane coupling
organic polymer
film
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TW105121714A
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Chinese (zh)
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TWI717369B (en
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Tetsuo Okuyama
Toshiyuki Tsuchiya
Issei Kobayashi
Naoki Watanabe
Satoshi Maeda
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Toyo Boseki
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/20Conductive material dispersed in non-conductive organic material
    • H01B1/22Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00Apparatus or processes specially adapted for manufacturing conductors or cables
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/14Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/16Non-insulated conductors or conductive bodies characterised by their form comprising conductive material in insulating or poorly conductive material, e.g. conductive rubber

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Laminated Bodies (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

To provide a layered body including a silicone resin layer and an organic polymer film, the layered body having excellent adhesion (peel strength) and good appearance quality. A layered body having a silane coupling agent layer on at least one surface of an organic polymer film, in which a silicone resin layer having polydimethylsiloxane (PDMS) as a main component thereof is layered via the silane coupling agent layer, the organic polymer film/silicone resin layered body being characterized in that the peel strength of the silicone resin layer and the polymer film is 0.3 N/cm to 15 N/cm.

Description

疊層體及其製造方法Laminate and method of manufacturing same

本發明關於一種包含有機系高分子膜與聚矽氧樹脂層之疊層體,更詳細而言,係關於一種疊層體,其由柔軟並有彈力、且具備耐熱性之聚矽氧樹脂、和彈性模量相對較高且尺寸穩定性良好、此外加工性優良之有機系高分子膜構成,並利用了彼此之長處。The present invention relates to a laminate comprising an organic polymer film and a polyoxyxylene resin layer, and more particularly to a laminate comprising a flexible, elastic, heat-resistant polyoxyxene resin, It is composed of an organic polymer film having a relatively high elastic modulus and excellent dimensional stability and excellent workability, and utilizes the advantages of each other.

聚矽氧樹脂係具有由矽氧烷鍵形成之主骨架之高分子化合物的總稱。已知根據分子量、交聯度、取代基等不同而有各種聚矽氧樹脂,但進行物性調整以使其具有優異的耐熱性、耐水性、耐藥品性、電特性之性質,特別是具有適度之彈性的聚矽氧樹脂稱為聚矽氧橡膠或聚矽氧彈性體,廣泛使用於從要求兼顧柔軟性與耐熱性之墊片、密封材、隔膜、層合機用輥、電子照相用碳粉定影輥、保護構件到醫療用、美容成形用之各種用途。又,由於欠缺接著性,故作為脫模片、緩衝材等亦受到重視。Polyoxymethylene resin is a general term for a polymer compound having a main skeleton formed of a decane bond. It is known that various polyfluorene resins are used depending on the molecular weight, the degree of crosslinking, the substituent, and the like, but the physical properties are adjusted so as to have excellent heat resistance, water resistance, chemical resistance, and electrical properties, and particularly moderate. The elastic polyoxyxylene resin is called polyoxyxene rubber or polyoxyxene elastomer, and is widely used in gaskets, sealing materials, separators, laminating rolls, and electrophotographic carbons which are required to achieve both flexibility and heat resistance. Powder fixing roller and protective member for various purposes such as medical use and cosmetic molding. Moreover, since it lacks adhesiveness, it is also considered as a release sheet, a cushioning material, etc..

雖為具有優異特性之聚矽氧樹脂,但很少使用於電子基板用途。其理由為:欠缺接著性,與銅箔等多種素材的組合困難。又,由於係柔軟素材的原因,以尺寸穩定性的觀點觀之有難處。Although it is a polyoxyl resin having excellent properties, it is rarely used in electronic substrates. The reason is that the lack of adhesion is difficult to combine with various materials such as copper foil. Moreover, due to the soft material, it is difficult to view from the viewpoint of dimensional stability.

聚矽氧樹脂由於柔軟的原因而存在機械強度稍差的缺點。利用聚矽氧樹脂之諸如耐熱性、有彈力性、且脫模性良好之特性的用途,可例示作為壓製加工時之緩衝片材利用。該用途中就聚矽氧樹脂片而言,若太強加壓的話,會有發生沿片之面方向的延伸、聚矽氧樹脂片本身產生破裂、斷裂等的情況。且進一步甚至會有聚矽氧樹脂片斷裂時捲入被壓物而一起斷裂的情況。 為了解決該等問題,有人嘗試於聚矽氧樹脂片摻入補強材。已知有於聚矽氧樹脂片加入玻璃布等補強材而成之製品。藉由將布狀補強材插入片中,可改善機械強度,但布狀補強材為不均質,又,存在因該補強而損及片之柔軟性的缺點。 將聚矽氧樹脂片、與尺寸穩定性良好之金屬箔・金屬板、玻璃板、陶瓷板等之聚矽氧樹脂或玻璃環氧板等硬質基板貼合使用的形態也可同樣獲得補強效果,但由於往往受到對方素材之物性的影響,結果大多會損及柔軟性。 作為利用聚矽氧樹脂之柔軟性的補強素材,可使用有機高分子膜、有機高分子片,但由於聚矽氧樹脂與有機高分子素材的接著性不足,多有使用時產生剝落等的問題。Polyoxymethylene resins have the disadvantage of being less mechanically strong due to softness. The use of a polysiloxane resin such as heat resistance, elasticity, and mold release property can be exemplified as a cushion sheet used in press working. In this application, in the case of a polyoxyxene resin sheet, if the pressure is too strong, there may be a case where the sheet is extended in the direction of the sheet, and the polyoxyacetin sheet itself is cracked or broken. Further, there is a case where the polyacetal resin sheet is entangled with the pressed object and broken together when it is broken. In order to solve these problems, attempts have been made to incorporate a reinforcing material into a polysiloxane sheet. It is known that a polyacetal resin sheet is added to a reinforcing material such as a glass cloth. The mechanical strength can be improved by inserting the cloth-like reinforcing material into the sheet, but the cloth-like reinforcing material is inhomogeneous, and there is a disadvantage that the flexibility of the sheet is impaired by the reinforcing. A reinforcing effect can be obtained in the same manner as in the case of bonding a polyoxyxylene resin sheet to a hard substrate such as a metal foil, a metal plate, a metal plate, a glass plate, a ceramic plate, or the like, or a hard substrate such as a glass epoxy board. However, it is often affected by the physical properties of the other material, and most of the results will impair the softness. An organic polymer film or an organic polymer sheet can be used as the reinforcing material for the flexibility of the polyoxynoxy resin. However, since the adhesion between the polyoxymethylene resin and the organic polymer material is insufficient, there are many problems such as peeling during use. .

例如,專利文獻1中揭示了以下之示例:於加工成無縫帶狀之聚醯亞胺樹脂膜之表面設置聚矽氧樹脂而獲得環狀帶,並將該環狀帶使用在電子照相式印表機之中間轉印帶。例如,專利文獻2中揭示了機材使用聚醯亞胺樹脂膜、黏接劑使用聚矽氧樹脂之黏接片的示例。進一步,專利文獻3中揭示了將由聚醯亞胺樹脂膜與聚矽氧樹脂膜構成之疊層體用於電子照相式印表機之定影膜的示例。 [先前技術文獻] [專利文獻]For example, Patent Document 1 discloses an example in which a polyfluorene resin is provided on the surface of a polyimide film processed into a seamless belt to obtain an endless belt, and the endless belt is used in an electrophotographic type. The intermediate transfer belt of the printer. For example, Patent Document 2 discloses an example in which a polyimide material is used as a material, and an adhesive sheet of a polyoxyxylene resin is used as an adhesive. Further, Patent Document 3 discloses an example in which a laminate composed of a polyimide film and a polyoxymethylene resin film is used for a fixing film of an electrophotographic printer. [Prior Technical Literature] [Patent Literature]

專利文獻1:日本特開2012-159737號公報 專利文獻2:日本特開2007-266558號公報 專利文獻3:日本特開平9-274402號公報Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei.

[發明所欲解決之課題] 以上如例示般,聚矽氧樹脂雖具有諸如兼顧耐熱性、柔軟性之優異特性,但由於其耐藥品性的高低、剝離性的好壞,而被認為是與其他素材疊層等組合困難的素材之一。本發明為了解決如此之課題,旨在提供一種疊層體,包含聚矽氧樹脂層與有機系高分子膜,其接著性(剝離強度)優異且外觀品質良好。 [解決課題之手段][Problems to be Solved by the Invention] As described above, the polyoxyxene resin has excellent properties such as heat resistance and flexibility, but it is considered to be due to its high chemical resistance and peelability. One of the materials that are difficult to combine with other material stacks. In order to solve such a problem, the present invention has been made in an effort to provide a laminate comprising a polyoxyxylene resin layer and an organic polymer film, which are excellent in adhesion (peel strength) and good in appearance quality. [Means for solving the problem]

本案發明人們為了利用有機系高分子膜側之表面處理解決該等問題,進行努力研究的結果,發現在氣相中實施對於聚矽氧樹脂之矽烷偶聯劑塗布,可提供於高分子膜與聚矽氧樹脂層之間無異物介隔且接著性良好的疊層體,結果能以良好的產率製作高精細的撓性電子器件,此外可改善聚矽氧樹脂的再利用性,而完成了本發明。In order to solve such problems by the surface treatment on the side of the organic polymer film, the inventors of the present invention conducted diligent research and found that the application of a decane coupling agent for a polyoxyxylene resin in a gas phase can be provided in a polymer film and A laminate having no foreign matter intervening and good adhesion between the polyoxyalkylene resin layers can produce a high-definition flexible electronic device in a good yield, and can improve the recyclability of the polyoxynoxy resin. The invention has been made.

亦即本發明由以下之構成組成。 1.一種疊層體,係於有機系高分子膜之至少單面具有矽烷偶聯劑層,並介隔該矽烷偶聯劑層具有聚矽氧樹脂層,其特徵為:該聚矽氧樹脂層與該高分子膜之剝離強度為0.3N/cm以上、15N/cm以下。 2.如1之疊層體,其中,該矽烷偶聯劑層中長徑10μm以上之含矽之異物的個數為2000個/m2 以下。 3.如1~2中任一項之疊層體,其中,該矽烷偶聯劑層之厚度為1~500nm之範圍。 4.如1~3中任一項之疊層體,其中,該疊層體之面積為1000cm2 以上。 5.如1~4中任一項之疊層體,其中,該有機系高分子膜為聚醯亞胺膜。 6.一種疊層體之製造方法,係製造如1~5中任一項之疊層體,其特徵為:包含使有機系高分子膜暴露於已氣化之矽烷偶聯劑以形成矽烷偶聯劑層之步驟,且該步驟中不使用真空。 7.如6之疊層體之製造方法,包含以下步驟:使有機系高分子膜暴露於利用鼓泡方式氣化之矽烷偶聯劑,以形成矽烷偶聯劑層。 8.如7之疊層體之製造方法,其中,在該使有機系高分子膜暴露於已氣化之矽烷偶聯劑以形成矽烷偶聯劑層之步驟中,使用露點0℃以下之乾燥氣體作為載流氣體。 9.如6~8中任一項之疊層體之製造方法,其中,在該使有機系高分子膜暴露於已氣化之矽烷偶聯劑以形成矽烷偶聯劑層之步驟中,使露點5℃以上之氣體共存。 10.如6~8中任一項之疊層體之製造方法,其中,在該使有機系高分子膜暴露於已氣化之矽烷偶聯劑以形成矽烷偶聯劑層之步驟中,對於該有機系高分子膜施加電場。 11.如6~9中任一項之疊層體之製造方法,其中,包括在矽烷偶聯劑層形成前,對於有機系高分子膜之矽烷偶聯劑層形成面實施活化處理之步驟。 12.如6~11中任一項之疊層體之製造方法,其中,在該使有機系高分子膜暴露於已氣化之矽烷偶聯劑以形成矽烷偶聯劑層之步驟中,形成之矽烷偶聯劑層表面之3維表面粗糙度(Sa)為5.0nm以下。 [發明之效果]That is, the present invention consists of the following constitution. A laminate having a decane coupling agent layer on at least one side of an organic polymer film and having a polyoxyxylene resin layer interposed therebetween, characterized in that the polyoxyalkylene resin The peel strength between the layer and the polymer film is 0.3 N/cm or more and 15 N/cm or less. 2. The laminate according to 1, wherein the number of the foreign substances containing ruthenium having a major axis of 10 μm or more in the decane coupling agent layer is 2,000/m 2 or less. 3. The laminate according to any one of 1 to 2, wherein the decane coupling agent layer has a thickness of from 1 to 500 nm. 4. The laminate according to any one of 1 to 3, wherein the laminate has an area of 1000 cm 2 or more. 5. The laminate according to any one of 1 to 4, wherein the organic polymer film is a polyimide film. A method of producing a laminate according to any one of items 1 to 5, which comprises exposing an organic polymer film to a gasified decane coupling agent to form a decane coupling. The step of the tie layer, and no vacuum is used in this step. 7. The method for producing a laminate according to 6, comprising the step of exposing the organic polymer film to a decane coupling agent vaporized by bubbling to form a decane coupling agent layer. 8. The method for producing a laminate according to 7, wherein in the step of exposing the organic polymer film to the vaporized decane coupling agent to form a decane coupling agent layer, drying using a dew point of 0 ° C or less is used. The gas acts as a carrier gas. 9. The method for producing a laminate according to any one of 6 to 8, wherein, in the step of exposing the organic polymer film to a gasified decane coupling agent to form a decane coupling agent layer, Gases with a dew point above 5 °C coexist. 10. The method for producing a laminate according to any one of 6 to 8, wherein, in the step of exposing the organic polymer film to the vaporized decane coupling agent to form a decane coupling agent layer, An electric field is applied to the organic polymer film. The method for producing a laminate according to any one of the items 6 to 9, which comprises the step of performing an activation treatment on the surface of the formation of the decane coupling agent layer of the organic polymer film before the formation of the silane coupling agent layer. 12. The method for producing a laminate according to any one of 6 to 11, wherein the step of exposing the organic polymer film to the vaporized decane coupling agent to form a decane coupling agent layer is formed. The three-dimensional surface roughness (Sa) of the surface of the decane coupling agent layer was 5.0 nm or less. [Effects of the Invention]

根據本發明,可獲得在有機系高分子膜與聚矽氧樹脂之間無異物介隔的良好疊層體,就結果而言有機系高分子膜與聚矽氧樹脂的接著強度均質化。 本發明中,更加理想地使用具有高耐熱性之有機系高分子膜的話,能不使用耐熱性差之接著劑、黏接劑而進行貼合,並可在更高溫度範圍使用疊層體,可用於180℃以上,較佳為230℃以上,更佳為260℃以上之高溫範圍的用途,能理想地使用在高溫下之壓製、層合時使用之緩衝材、伴有銲接之電子零件、高溫環境下使用之輸送構件等用途。According to the present invention, a good laminate in which no foreign matter is interposed between the organic polymer film and the polyoxynized resin can be obtained, and as a result, the bonding strength between the organic polymer film and the polyoxymethylene resin is uniformized. In the present invention, when an organic polymer film having high heat resistance is more preferably used, it can be bonded without using an adhesive having a poor heat resistance and an adhesive, and a laminate can be used in a higher temperature range. For use in a high temperature range of 180 ° C or higher, preferably 230 ° C or higher, and more preferably 260 ° C or higher, it is desirable to use a cushioning material used for pressing at high temperature, laminating, electronic parts with soldering, and high temperature. Uses such as conveying members used in the environment.

本發明之疊層體係至少由聚矽氧樹脂層、有機系高分子膜、矽烷偶聯劑層構成之疊層體。The laminate system of the present invention comprises at least a laminate of a polyoxyxylene resin layer, an organic polymer film, and a decane coupling agent layer.

<聚矽氧樹脂> 形成本發明中之聚矽氧樹脂層的聚矽氧樹脂,係指具有由矽氧烷鍵形成之主骨架之矽系高分子化合物中之室溫下為固體狀的物質。本發明中較佳使用之聚矽氧樹脂,宜使用以聚二烷基矽氧烷作為基本骨架,並因應目的對分子量、交聯度、取代基等進行調整之聚矽氧樹脂。就聚矽氧樹脂而言,藉由選擇導入之取代基,進一步使骨架成為環狀或分支結構,可強化或賦予耐熱性或耐化學性、親水性或疏水性等各種機能。 就導入至本發明之聚矽氧樹脂的取代基而言,可例示甲基、乙基、丙基、丁基、苯基、經取代之苯基、聚醚基、環氧基、胺基、含胺基之取代基、羧基、芳烷基等,該等取代基可導入至側鏈或分子末端。 本發明中,宜為以聚二甲基矽氧烷或聚二苯基矽氧烷作為主骨架之聚矽氧樹脂、包含甲基、苯基兩者之聚矽氧烷樹脂較佳。 本發明之聚矽氧樹脂可使用一液型或二液型之聚矽氧樹脂。 二液型聚矽氧樹脂係將主材與作為硬化劑之交聯劑、反應促進劑等分開,並在使用前將兩者混合而使用。作為本發明之聚矽氧樹脂交聯時使用之理想方法及/或觸媒,可列舉縮合觸媒。藉由準備具有適當之反應基的聚矽氧樹脂,可使用其他觸媒及引發劑,例如,可使用矽烷-烯烴加成(矽氫化)觸媒、如過氧化物觸媒之自由基觸媒、熱、及於紫外線輻射之曝露。 就如過氧化物觸媒之自由基觸媒而言,聚矽氧樹脂包含乙烯基時,可作為摻配的硬化劑或觸媒使用。 聚矽氧樹脂於末端位置具有Si-H基時,或樹脂具有末端雙鍵時,矽烷-烯烴加成觸媒係有用。 如包含矽醇封端(末端化)聚二甲基矽氧烷之上述矽醇末端化聚二有機矽氧烷般於其中具有羥基之聚矽氧化合物也可藉由熱進行催化。 較佳之硬化系包含縮合反應。如矽酸四乙酯之矽酸酯,係藉由縮合反應與本發明組成物之二有機矽氧烷之羥基末端基反應。該反應中放出醇,反應係以如例如二月桂酸二丁基錫之金屬皂作為觸媒。 此外,更佳之觸媒為如己酸鋅之有機鋅化合物。據認為如己酸鋅之縮合觸媒促進存在於矽醇末端化聚二有機矽氧烷中之矽醇末端基、和據認為存在於聚二甲基矽氧烷聚合物與甲基苯基倍半矽氧烷中之殘存羥基(矽醇)的縮合反應。<Polyoxygenated Resin> The polyoxyxylene resin forming the polyoxyxylene resin layer in the present invention means a substance which is solid at room temperature in the fluorene-based polymer compound having a main skeleton formed of a decane bond. . The polyoxynoxy resin which is preferably used in the present invention is preferably a polyoxyalkylene resin which has a polydialkylsiloxane as a basic skeleton and which has a molecular weight, a degree of crosslinking, a substituent, and the like adjusted in accordance with the purpose. In the polyoxyxene resin, by selecting a substituent to be introduced, the skeleton is further formed into a cyclic or branched structure, and various functions such as heat resistance, chemical resistance, hydrophilicity, or hydrophobicity can be enhanced or imparted. The substituent introduced into the polyoxymethylene resin of the present invention may, for example, be a methyl group, an ethyl group, a propyl group, a butyl group, a phenyl group, a substituted phenyl group, a polyether group, an epoxy group or an amine group. A substituent containing an amino group, a carboxyl group, an aralkyl group or the like, which may be introduced to a side chain or a molecular terminal. In the present invention, a polyfluorene oxide resin containing polydimethyl siloxane or polydiphenyl siloxane as a main skeleton, and a polyoxy siloxane resin containing both a methyl group and a phenyl group are preferred. The polydecane resin of the present invention may be a one-liquid or two-liquid type polyoxynoxy resin. The two-component polyoxynoxy resin separates the main material from a crosslinking agent, a reaction accelerator, and the like as a curing agent, and mixes the two before use. A preferred method and/or catalyst used for crosslinking the polyoxyxylene resin of the present invention is a condensation catalyst. Other catalysts and initiators can be used by preparing a polyoxyxene resin having a suitable reactive group. For example, a decane-olefin addition (hydrazine hydrogenation) catalyst, a free radical catalyst such as a peroxide catalyst can be used. , heat, and exposure to ultraviolet radiation. In the case of a free radical catalyst such as a peroxide catalyst, when the polyoxyxylene resin contains a vinyl group, it can be used as a blended hardener or catalyst. When the polyoxyxylene resin has a Si-H group at the terminal position, or when the resin has a terminal double bond, a decane-olefin addition catalyst is useful. Polyoxyxides having a hydroxyl group in the above-described sterol-terminated polydiorganotoxime containing a sterol-terminated (terminalized) polydimethyl siloxane can also be catalyzed by heat. A preferred curing system comprises a condensation reaction. For example, a phthalic acid ester of tetraethyl phthalate is reacted with a hydroxyl terminal group of a diorganooxyalkylene of the composition of the present invention by a condensation reaction. In the reaction, an alcohol is evolved, and the reaction is carried out using a metal soap such as, for example, dibutyltin dilaurate as a catalyst. Further, a more preferred catalyst is an organozinc compound such as zinc hexanoate. It is believed that a condensation catalyst such as zinc hexanoate promotes the sterol end group present in the sterol-terminated polydiorganotoxime, and is believed to be present in the polydimethylsiloxane polymer with methyl phenyl times A condensation reaction of a residual hydroxyl group (sterol) in a hemidecane.

<有機系高分子膜> 本發明中之有機系高分子膜可使用聚乙烯、聚丙烯、聚對苯二甲酸乙二酯、聚對苯二甲酸丁二酯、聚萘二甲酸乙二酯、全芳香族聚酯、其他共聚聚酯、聚甲基丙烯酸甲酯、其他共聚丙烯酸酯、聚碳酸酯、聚醯胺、聚碸、聚醚碸、聚醚酮、聚醯胺醯亞胺、聚醚醯亞胺、芳香族聚醯亞胺、脂環族聚醯亞胺、氟化聚醯亞胺、乙酸纖維素、硝酸纖維素、芳香族聚醯胺、聚氯乙烯、聚苯酚、聚芳酯、聚苯硫醚、聚苯醚、聚苯乙烯等膜。本發明之效果特別顯著・有用者為耐熱性100℃以上之高分子,所謂工程塑膠的膜。在此,耐熱性係指玻璃轉移溫度或熱變形溫度。<Organic polymer film> The organic polymer film of the present invention may be polyethylene, polypropylene, polyethylene terephthalate, polybutylene terephthalate or polyethylene naphthalate. All aromatic polyesters, other copolyesters, polymethyl methacrylate, other copolyacrylates, polycarbonates, polyamines, polybenzazoles, polyether oximes, polyether ketones, polyamidoximines, poly Ether quinone imine, aromatic polyimine, alicyclic polyimide, fluorinated polyimine, cellulose acetate, nitrocellulose, aromatic polyamine, polyvinyl chloride, polyphenol, polyaryl Membranes, polyphenylene sulfide, polyphenylene ether, polystyrene and other films. The effect of the present invention is particularly remarkable. The useful one is a polymer having a heat resistance of 100 ° C or higher, and a film of an engineering plastic. Here, heat resistance means a glass transition temperature or a heat distortion temperature.

本發明之有機系高分子膜可藉由針對前述高分子材料中之熱塑性高分子材料進行熔融延伸法而獲得膜。The organic polymer film of the present invention can be obtained by subjecting a thermoplastic polymer material in the above polymer material to a melt-stretching method.

本發明之有機系高分子膜之厚度宜為3μm以上較佳,11μm以上更佳。有機系高分子膜之厚度的上限並無特別限制,就撓性電子器件而言之要求,宜為250μm以下較佳,150μm以下更佳,90μm以下尤佳。 本發明之有機系高分子膜之面積(亦即疊層體之面積),以疊層體或撓性電子器件之生產效率・成本的觀點觀之,宜為大面積較佳。1000cm2 以上較佳,1500cm2 以上更佳,2000cm2 以上尤佳。The thickness of the organic polymer film of the present invention is preferably 3 μm or more, more preferably 11 μm or more. The upper limit of the thickness of the organic polymer film is not particularly limited, and the thickness of the flexible electronic device is preferably 250 μm or less, more preferably 150 μm or less, and particularly preferably 90 μm or less. The area of the organic polymer film of the present invention (that is, the area of the laminate) is preferably a large area from the viewpoint of production efficiency and cost of the laminate or the flexible electronic device. More preferably, it is 1000 cm 2 or more, more preferably 1500 cm 2 or more, and more preferably 2000 cm 2 or more.

本發明中特別適合使用之有機系高分子膜為聚醯亞胺膜,可使用芳香族聚醯亞胺、脂環族聚醯亞胺、聚醯胺醯亞胺、聚醚醯亞胺等。本發明特別是用於製造撓性顯示器元件時,宜使用具有無色透明性之聚醯亞胺系樹脂膜較佳,形成反射型、或自發光型之顯示器之背面元件時,則無特別此限制。The organic polymer film particularly suitable for use in the present invention is a polyimine film, and an aromatic polyimine, an alicyclic polyimine, a polyamidimide, a polyether quinone, or the like can be used. In particular, in the case of manufacturing a flexible display device, it is preferable to use a polyimide film having colorless transparency, and it is preferable to form a back surface element of a reflective or self-luminous type display. .

一般聚醯亞胺膜係藉由將於溶劑中使二胺類與四羧酸類反應而獲得之聚醯胺酸(聚醯亞胺前驅體)溶液塗布在聚醯亞胺膜製作用支持體並乾燥,製成生膜(green film)(亦稱為「前驅體膜」或「聚醯胺酸膜」),進一步於聚醯亞胺膜製作用支持體上、或於已從該支持體剝落之狀態將生膜進行高溫熱處理而使其進行脱水閉環反應以獲得。Generally, a polyimine film is coated on a support for producing a polyimide film by a solution of a polyaminic acid (polyimine precursor) obtained by reacting a diamine with a tetracarboxylic acid in a solvent. Drying to form a green film (also known as a "precursor film" or "polyglycolic acid film"), further on the support for the production of the polyimide film, or having peeled off from the support In the state, the green film is subjected to a high-temperature heat treatment to obtain a dehydration ring-closure reaction.

構成聚醯胺酸之二胺類並無特別限制,可使用聚醯亞胺合成通常使用之芳香族二胺類、脂肪族二胺類、脂環族二胺類等。以耐熱性的觀點觀之,宜為芳香族二胺類較佳,芳香族二胺類中,具有苯并唑結構之芳香族二胺類更佳。使用具有苯并唑結構之芳香族二胺類的話,可展現高耐熱性,同時可展現高彈性模量、低熱收縮性、低線膨脹係數。二胺類可單獨使用,亦可將二種以上併用。The diamine constituting the polyamic acid is not particularly limited, and an aromatic diamine, an aliphatic diamine or an alicyclic diamine which are generally used can be synthesized by using polyimine. From the viewpoint of heat resistance, it is preferred that the aromatic diamine is preferred, and the aromatic diamine has benzoic acid. The aromatic diamines of the azole structure are more preferred. Use with benzo The aromatic diamines of the azole structure exhibit high heat resistance and exhibit high modulus of elasticity, low heat shrinkage, and low coefficient of linear expansion. The diamines may be used singly or in combination of two or more.

具有苯并唑結構之芳香族二胺類並無特別限定,例如,可列舉5-胺基-2-(對胺基苯基)苯并唑、6-胺基-2-(對胺基苯基)苯并唑、5-胺基-2-(間胺基苯基)苯并唑、6-胺基-2-(間胺基苯基)苯并唑、2,2’-對伸苯基雙(5-胺基苯并唑)、2,2’-對伸苯基雙(6-胺基苯并唑)、1-(5-胺基苯并唑并)-4-(6-胺基苯并唑并)苯、2,6-(4,4’-二胺基二苯基)苯并[1,2-d:5,4-d’]雙唑、2,6-(4,4’-二胺基二苯基)苯并[1,2-d:4,5-d’]雙唑、2,6-(3,4’-二胺基二苯基)苯并[1,2-d:5,4-d’]雙唑、2,6-(3,4’-二胺基二苯基)苯并[1,2-d:4,5-d’]雙唑、2,6-(3,3’-二胺基二苯基)苯并[1,2-d:5,4-d’]雙唑、2,6-(3,3’-二胺基二苯基)苯并[1,2-d:4,5-d’]雙唑等。With benzo The aromatic diamine of the azole structure is not particularly limited, and examples thereof include 5-amino-2-(p-aminophenyl)benzo. Azole, 6-amino-2-(p-aminophenyl)benzo Azole, 5-amino-2-(m-aminophenyl)benzo Azole, 6-amino-2-(m-aminophenyl)benzo Azole, 2,2'-p-phenylene bis(5-aminobenzo) Oxazole), 2,2'-p-phenylene bis(6-aminobenzo) Oxazole), 1-(5-aminobenzophenone Oxazo)-4-(6-aminobenzophenone Azolo)benzene, 2,6-(4,4'-diaminodiphenyl)benzo[1,2-d:5,4-d'] Azole, 2,6-(4,4'-diaminodiphenyl)benzo[1,2-d:4,5-d'] Azole, 2,6-(3,4'-diaminodiphenyl)benzo[1,2-d:5,4-d'] Azole, 2,6-(3,4'-diaminodiphenyl)benzo[1,2-d:4,5-d'] Azole, 2,6-(3,3'-diaminodiphenyl)benzo[1,2-d:5,4-d'] Azole, 2,6-(3,3'-diaminodiphenyl)benzo[1,2-d:4,5-d'] Oxazole and the like.

上述具有苯并唑結構之芳香族二胺類以外的芳香族二胺類,例如,可列舉2,2’-二甲基-4,4’-二胺基聯苯、1,4-雙[2-(4-胺基苯基)-2-丙基]苯(雙苯胺)、1,4-雙(4-胺基-2-三氟甲基苯氧基)苯、2,2’-二(三氟甲基)-4,4’-二胺基聯苯、4,4’-雙(4-胺基苯氧基)聯苯、4,4’-雙(3-胺基苯氧基)聯苯、雙[4-(3-胺基苯氧基)苯基]酮、雙[4-(3-胺基苯氧基)苯基]硫醚、雙[4-(3-胺基苯氧基)苯基]碸、2,2-雙[4-(3-胺基苯氧基)苯基]丙烷、2,2-雙[4-(3-胺基苯氧基)苯基]-1,1,1,3,3,3-六氟丙烷、間苯二胺、鄰苯二胺、對苯二胺、間胺基苄胺、對胺基苄胺、3,3’-二胺基二苯醚、3,4’-二胺基二苯醚、4,4’-二胺基二苯醚、3,3’-二胺基二苯基硫醚、3,3’-二胺基二苯基亞碸、3,4’-二胺基二苯基亞碸、4,4’-二胺基二苯基亞碸、3,3’-二胺基二苯碸、3,4’-二胺基二苯碸、4,4’-二胺基二苯碸、3,3’-二胺基二苯甲酮、3,4’-二胺基二苯甲酮、4,4’-二胺基二苯甲酮、3,3’-二胺基二苯基甲烷、3,4’-二胺基二苯基甲烷、4,4’-二胺基二苯基甲烷、雙[4-(4-胺基苯氧基)苯基]甲烷、1,1-雙[4-(4-胺基苯氧基)苯基]乙烷、1,2-雙[4-(4-胺基苯氧基)苯基]乙烷、1,1-雙[4-(4-胺基苯氧基)苯基]丙烷、1,2-雙[4-(4-胺基苯氧基)苯基]丙烷、1,3-雙[4-(4-胺基苯氧基)苯基]丙烷、2,2-雙[4-(4-胺基苯氧基)苯基]丙烷、1,1-雙[4-(4-胺基苯氧基)苯基]丁烷、1,3-雙[4-(4-胺基苯氧基)苯基]丁烷、1,4-雙[4-(4-胺基苯氧基)苯基]丁烷、2,2-雙[4-(4-胺基苯氧基)苯基]丁烷、2,3-雙[4-(4-胺基苯氧基)苯基]丁烷、2-[4-(4-胺基苯氧基)苯基]-2-[4-(4-胺基苯氧基)-3-甲基苯基]丙烷、2,2-雙[4-(4-胺基苯氧基)-3-甲基苯基]丙烷、2-[4-(4-胺基苯氧基)苯基]-2-[4-(4-胺基苯氧基)-3,5-二甲基苯基]丙烷、2,2-雙[4-(4-胺基苯氧基)-3,5-二甲基苯基]丙烷、2,2-雙[4-(4-胺基苯氧基)苯基]-1,1,1,3,3,3-六氟丙烷、1,4-雙(3-胺基苯氧基)苯、1,3-雙(3-胺基苯氧基)苯、1,4-雙(4-胺基苯氧基)苯、4,4’-雙(4-胺基苯氧基)聯苯、雙[4-(4-胺基苯氧基)苯基]酮、雙[4-(4-胺基苯氧基)苯基]硫醚、雙[4-(4-胺基苯氧基)苯基]亞碸、雙[4-(4-胺基苯氧基)苯基]碸、雙[4-(3-胺基苯氧基)苯基]醚、雙[4-(4-胺基苯氧基)苯基]醚、1,3-雙[4-(4-胺基苯氧基)苯甲醯基]苯、1,3-雙[4-(3-胺基苯氧基)苯甲醯基]苯、1,4-雙[4-(3-胺基苯氧基)苯甲醯基]苯、4,4’-雙[(3-胺基苯氧基)苯甲醯基]苯、1,1-雙[4-(3-胺基苯氧基)苯基]丙烷、1,3-雙[4-(3-胺基苯氧基)苯基]丙烷、3,4’-二胺基二苯基硫醚、2,2-雙[3-(3-胺基苯氧基)苯基]-1,1,1,3,3,3-六氟丙烷、雙[4-(3-胺基苯氧基)苯基]甲烷、1,1-雙[4-(3-胺基苯氧基)苯基]乙烷、1,2-雙[4-(3-胺基苯氧基)苯基]乙烷、雙[4-(3-胺基苯氧基)苯基]亞碸、4,4’-雙[3-(4-胺基苯氧基)苯甲醯基]二苯醚、4,4’-雙[3-(3-胺基苯氧基)苯甲醯基]二苯醚、4,4’-雙[4-(4-胺基-α,α-二甲基苄基)苯氧基]二苯甲酮、4,4’-雙[4-(4-胺基-α,α-二甲基苄基)苯氧基]二苯碸、雙[4-{4-(4-胺基苯氧基)苯氧基}苯基]碸、1,4-雙[4-(4-胺基苯氧基)苯氧基-α,α-二甲基苄基]苯、1,3-雙[4-(4-胺基苯氧基)苯氧基-α,α-二甲基苄基]苯、1,3-雙[4-(4-胺基-6-三氟甲基苯氧基)-α,α-二甲基苄基]苯、1,3-雙[4-(4-胺基-6-氟苯氧基)-α,α-二甲基苄基]苯、1,3-雙[4-(4-胺基-6-甲基苯氧基)-α,α-二甲基苄基]苯、1,3-雙[4-(4-胺基-6-氰基苯氧基)-α,α-二甲基苄基]苯、3,3’-二胺基-4,4’-二苯氧基二苯甲酮、4,4’-二胺基-5,5’-二苯氧基二苯甲酮、3,4’-二胺基-4,5’-二苯氧基二苯甲酮、3,3’-二胺基-4-苯氧基二苯甲酮、4,4’-二胺基-5-苯氧基二苯甲酮、3,4’-二胺基-4-苯氧基二苯甲酮、3,4’-二胺基-5’-苯氧基二苯甲酮、3,3’-二胺基-4,4’-二聯苯氧基二苯甲酮、4,4’-二胺基-5,5’-二聯苯氧基二苯甲酮、3,4’-二胺基-4,5’-二聯苯氧基二苯甲酮、3,3’-二胺基-4-聯苯氧基二苯甲酮、4,4’-二胺基-5-聯苯氧基二苯甲酮、3,4’-二胺基-4-聯苯氧基二苯甲酮、3,4’-二胺基-5’-聯苯氧基二苯甲酮、1,3-雙(3-胺基-4-苯氧基苯甲醯基)苯、1,4-雙(3-胺基-4-苯氧基苯甲醯基)苯、1,3-雙(4-胺基-5-苯氧基苯甲醯基)苯、1,4-雙(4-胺基-5-苯氧基苯甲醯基)苯、1,3-雙(3-胺基-4-聯苯氧基苯甲醯基)苯、1,4-雙(3-胺基-4-聯苯氧基苯甲醯基)苯、1,3-雙(4-胺基-5-聯苯氧基苯甲醯基)苯、1,4-雙(4-胺基-5-聯苯氧基苯甲醯基)苯、2,6-雙[4-(4-胺基-α,α-二甲基苄基)苯氧基]苯甲腈、及上述芳香族二胺之芳香環上之氫原子的一部分或全部取代成鹵素原子、碳數1~3之烷基或烷氧基、氰基、或烷基或烷氧基之氫原子之一部分或全部取代成鹵素原子之碳數1~3之鹵化烷基或烷氧基而得的經取代之芳香族二胺等。Benzene Examples of the aromatic diamines other than the aromatic diamines of the azole structure include 2,2'-dimethyl-4,4'-diaminobiphenyl and 1,4-bis[2-(4). -aminophenyl)-2-propyl]benzene (diphenylamine), 1,4-bis(4-amino-2-trifluoromethylphenoxy)benzene, 2,2'-di(trifluoro Methyl)-4,4'-diaminobiphenyl, 4,4'-bis(4-aminophenoxy)biphenyl, 4,4'-bis(3-aminophenoxy)biphenyl , bis[4-(3-aminophenoxy)phenyl]one, bis[4-(3-aminophenoxy)phenyl] sulfide, bis[4-(3-aminophenoxy) Phenyl]anthracene, 2,2-bis[4-(3-aminophenoxy)phenyl]propane, 2,2-bis[4-(3-aminophenoxy)phenyl]-1 1,1,3,3,3-hexafluoropropane, m-phenylenediamine, o-phenylenediamine, p-phenylenediamine, m-aminobenzylamine, p-aminobenzylamine, 3,3'-diamino Diphenyl ether, 3,4'-diaminodiphenyl ether, 4,4'-diaminodiphenyl ether, 3,3'-diaminodiphenyl sulfide, 3,3'-diamine Diphenylarylene, 3,4'-diaminodiphenylarylene, 4,4'-diaminodiphenylarylene, 3,3'-diaminodiphenyl hydrazine, 3,4' -diaminodiphenyl hydrazine, 4,4'-diaminodiphenyl hydrazine, 3,3'-diaminobenzophenone, 3,4'-diaminobenzophenone, 4,4' -diaminodiyl Benzophenone, 3,3'-diaminodiphenylmethane, 3,4'-diaminodiphenylmethane, 4,4'-diaminodiphenylmethane, bis[4-(4- Aminophenoxy)phenyl]methane, 1,1-bis[4-(4-aminophenoxy)phenyl]ethane, 1,2-bis[4-(4-aminophenoxy) Phenyl]ethane, 1,1-bis[4-(4-aminophenoxy)phenyl]propane, 1,2-bis[4-(4-aminophenoxy)phenyl]propane , 1,3-bis[4-(4-aminophenoxy)phenyl]propane, 2,2-bis[4-(4-aminophenoxy)phenyl]propane, 1,1-double [4-(4-Aminophenoxy)phenyl]butane, 1,3-bis[4-(4-aminophenoxy)phenyl]butane, 1,4-bis[4-( 4-aminophenoxy)phenyl]butane, 2,2-bis[4-(4-aminophenoxy)phenyl]butane, 2,3-bis[4-(4-amino) Phenoxy)phenyl]butane, 2-[4-(4-aminophenoxy)phenyl]-2-[4-(4-aminophenoxy)-3-methylphenyl] Propane, 2,2-bis[4-(4-aminophenoxy)-3-methylphenyl]propane, 2-[4-(4-aminophenoxy)phenyl]-2-[ 4-(4-Aminophenoxy)-3,5-dimethylphenyl]propane, 2,2-bis[4-(4-aminophenoxy)-3,5-dimethylbenzene Propane, 2,2-bis[4-(4-aminophenoxy)phenyl]-1,1,1,3,3,3-hexafluoropropane, 1,4-bis(3- Phenoxy group) benzene, 1,3-bis(3-aminophenoxy)benzene, 1,4-bis(4-aminophenoxy)benzene, 4,4'-bis(4-amino group Phenoxy)biphenyl, bis[4-(4-aminophenoxy)phenyl]one, bis[4-(4-aminophenoxy)phenyl]thioether, bis[4-(4 -aminophenoxy)phenyl]anthracene, bis[4-(4-aminophenoxy)phenyl]anthracene, bis[4-(3-aminophenoxy)phenyl]ether, double [4-(4-Aminophenoxy)phenyl]ether, 1,3-bis[4-(4-aminophenoxy)benzylidene]benzene, 1,3-bis[4-( 3-aminophenoxy)benzhydryl]benzene, 1,4-bis[4-(3-aminophenoxy)benzylidene]benzene, 4,4'-bis[(3-amine) Phenyloxy)benzhydryl]benzene, 1,1-bis[4-(3-aminophenoxy)phenyl]propane, 1,3-bis[4-(3-aminophenoxy) Phenyl]propane, 3,4'-diaminodiphenyl sulfide, 2,2-bis[3-(3-aminophenoxy)phenyl]-1,1,1,3,3 , 3-hexafluoropropane, bis[4-(3-aminophenoxy)phenyl]methane, 1,1-bis[4-(3-aminophenoxy)phenyl]ethane, 1, 2-bis[4-(3-aminophenoxy)phenyl]ethane, bis[4-(3-aminophenoxy)phenyl]anthracene, 4,4'-bis[3-( 4-aminophenoxy)benzhydryl]diphenyl ether, 4,4'-bis[3-(3-aminophenoxy)benzylidene Diphenyl ether, 4,4'-bis[4-(4-amino-α,α-dimethylbenzyl)phenoxy]benzophenone, 4,4'-bis[4-(4 -amino-α,α-dimethylbenzyl)phenoxy]diphenyl hydrazine, bis[4-{4-(4-aminophenoxy)phenoxy}phenyl]anthracene, 1,4 - bis[4-(4-aminophenoxy)phenoxy-α,α-dimethylbenzyl]benzene, 1,3-bis[4-(4-aminophenoxy)phenoxy -α,α-dimethylbenzyl]benzene, 1,3-bis[4-(4-amino-6-trifluoromethylphenoxy)-α,α-dimethylbenzyl]benzene, 1,3-bis[4-(4-amino-6-fluorophenoxy)-α,α-dimethylbenzyl]benzene, 1,3-bis[4-(4-amino-6-) Methylphenoxy)-α,α-dimethylbenzyl]benzene, 1,3-bis[4-(4-amino-6-cyanophenoxy)-α,α-dimethylbenzyl Benzo, 3,3'-diamino-4,4'-diphenoxybenzophenone, 4,4'-diamino-5,5'-diphenoxybenzophenone, 3,4'-diamino-4,5'-diphenoxybenzophenone, 3,3'-diamino-4-phenoxybenzophenone, 4,4'-diamine 5-5-phenoxybenzophenone, 3,4'-diamino-4-phenoxybenzophenone, 3,4'-diamino-5'-phenoxybenzophenone, 3,3'-diamino-4,4'-diphenoxybenzophenone, 4,4'-diamino-5,5'-diphenoxydiphenyl Ketone, 3,4'-diamino-4,5'-diphenoxybenzophenone, 3,3'-diamino-4-biphenoxybenzophenone, 4,4' -diamino-5-biphenoxybenzophenone, 3,4'-diamino-4-biphenoxybenzophenone, 3,4'-diamino-5'-biphenyl Oxybenzophenone, 1,3-bis(3-amino-4-phenoxybenzylidene)benzene, 1,4-bis(3-amino-4-phenoxybenzylidene) Benzene, 1,3-bis(4-amino-5-phenoxybenzylidene)benzene, 1,4-bis(4-amino-5-phenoxybenzylidene)benzene, 1 , 3-bis(3-amino-4-biphenoxybenzhydryl)benzene, 1,4-bis(3-amino-4-biphenoxybenzyl)benzene, 1,3 - bis(4-amino-5-biphenoxy benzhydryl)benzene, 1,4-bis(4-amino-5-biphenoxybenzylidene)benzene, 2,6-double [4-(4-Amino-α,α-dimethylbenzyl)phenoxy]benzonitrile, and a part or all of a hydrogen atom on the aromatic ring of the above aromatic diamine is substituted into a halogen atom or a carbon a group of 1 to 3 alkyl or alkoxy, cyano, or a hydrogen atom of an alkyl or alkoxy group which is partially or wholly substituted with a halogenated alkyl or alkoxy group having 1 to 3 carbon atoms of a halogen atom. Substituted aromatic diamines and the like.

前述脂肪族二胺類,例如可列舉1,2-二胺基乙烷、1,4-二胺基丁烷、1,5-二胺基戊烷、1,6-二胺基己烷、1,8-二胺基辛烷等。 前述脂環族二胺類,例如可列舉1,4-二胺基環己烷、4,4’-亞甲基雙(2,6-二甲基環己胺)等。 芳香族二胺類以外之二胺(脂肪族二胺類及脂環族二胺類)之合計量宜為全部二胺類之20質量%以下較佳,10質量%以下更佳,5質量%以下尤佳。換言之,芳香族二胺類為全部二胺類之80質量%以上較佳,90質量%以上更佳,95質量%以上尤佳。Examples of the aliphatic diamines include 1,2-diaminoethane, 1,4-diaminobutane, 1,5-diaminopentane, and 1,6-diaminohexane. 1,8-diaminooctane and the like. Examples of the alicyclic diamines include 1,4-diaminocyclohexane and 4,4'-methylenebis(2,6-dimethylcyclohexylamine). The total amount of the diamines (aliphatic diamines and alicyclic diamines) other than the aromatic diamines is preferably 20% by mass or less, more preferably 10% by mass or less, and 5% by mass based on the total of the diamines. The following is especially good. In other words, the aromatic diamine is preferably 80% by mass or more of all diamines, more preferably 90% by mass or more, and particularly preferably 95% by mass or more.

作為構成聚醯胺酸之四羧酸類,可使用聚醯亞胺合成通常使用之芳香族四羧酸類(包括其酸酐)、脂肪族四羧酸類(包括其酸酐)、脂環族四羧酸類(包括其酸酐)。其中,芳香族四羧酸酐類、脂環族四羧酸酐類為較佳,以耐熱性的觀點觀之,芳香族四羧酸酐類更佳,以透光性的觀點觀之,脂環族四羧酸類更佳。該等為酸酐時,於分子內可具有1個或2個酸酐結構,較佳為具有2個酸酐結構者(二酐)。四羧酸類可單獨使用,亦可將二種以上併用。As the tetracarboxylic acid constituting the polyglycolic acid, polytetraimine can be used to synthesize commonly used aromatic tetracarboxylic acids (including acid anhydrides thereof), aliphatic tetracarboxylic acids (including acid anhydrides thereof), and alicyclic tetracarboxylic acids ( Including its anhydride). Among them, aromatic tetracarboxylic anhydrides and alicyclic tetracarboxylic anhydrides are preferred, and from the viewpoint of heat resistance, aromatic tetracarboxylic anhydrides are more preferable, and from the viewpoint of light transmittance, alicyclic four Carboxylic acids are preferred. When these are acid anhydrides, they may have one or two acid anhydride structures in the molecule, and preferably have two acid anhydride structures (dianhydrides). The tetracarboxylic acids may be used singly or in combination of two or more.

脂環族四羧酸類,例如可列舉環丁烷四羧酸、1,2,4,5-環己烷四羧酸、3,3’,4,4’-雙環己基四羧酸等脂環族四羧酸、及該等之酸酐。該等之中,具有2個酸酐結構之二酐(例如環丁烷四羧酸二酐、1,2,4,5-環己烷四羧酸二酐、3,3’,4,4’-雙環己基四羧酸二酐等)為較佳。此外,脂環族四羧酸類可單獨使用,亦可將二種以上併用。 脂環族四羧酸類,於重視透明性的情況下,例如宜為全部四羧酸類之80質量%以上較佳,90質量%以上更佳,95質量%以上尤佳。Examples of the alicyclic tetracarboxylic acid include alicyclic groups such as cyclobutanetetracarboxylic acid, 1,2,4,5-cyclohexanetetracarboxylic acid, and 3,3',4,4'-dicyclohexyltetracarboxylic acid. Group of tetracarboxylic acids, and such anhydrides. Among these, a dianhydride having two acid anhydride structures (for example, cyclobutane tetracarboxylic dianhydride, 1,2,4,5-cyclohexanetetracarboxylic dianhydride, 3,3', 4,4' - Bicyclohexyltetracarboxylic dianhydride or the like) is preferred. Further, the alicyclic tetracarboxylic acid may be used singly or in combination of two or more. When the alicyclic tetracarboxylic acid is important in transparency, for example, it is preferably 80% by mass or more of all tetracarboxylic acids, more preferably 90% by mass or more, and particularly preferably 95% by mass or more.

芳香族四羧酸類並無特別限定,宜為苯均四酸殘基(亦即具有來自苯均四酸之結構者)較佳,其酸酐更佳。如此之芳香族四羧酸類,例如可列舉苯均四酸二酐、3,3’,4,4’-聯苯四羧酸二酐、4,4’-氧基二鄰苯二甲酸二酐、3,3’,4,4’-二苯甲酮四羧酸二酐、3,3’,4,4’-二苯碸四羧酸二酐、2,2-雙[4-(3,4-二羧基苯氧基)苯基]丙酸酐等。 芳香族四羧酸類,於重視耐熱性的情況下,例如宜為全部四羧酸類之80質量%以上較佳,90質量%以上更佳,95質量%以上尤佳。The aromatic tetracarboxylic acid is not particularly limited, and is preferably a pyromellitic acid residue (that is, a structure having a structure derived from pyromellitic acid), and an acid anhydride is more preferable. Examples of such aromatic tetracarboxylic acids include pyromellitic dianhydride, 3,3',4,4'-biphenyltetracarboxylic dianhydride, and 4,4'-oxydiphthalic dianhydride. , 3,3',4,4'-benzophenonetetracarboxylic dianhydride, 3,3',4,4'-diphenylfluorene tetracarboxylic dianhydride, 2,2-bis[4-(3 , 4-dicarboxyphenoxy)phenyl]propionic anhydride, and the like. When the aromatic tetracarboxylic acid is important in heat resistance, for example, it is preferably 80% by mass or more of all the tetracarboxylic acids, more preferably 90% by mass or more, and particularly preferably 95% by mass or more.

本發明中之有機系高分子膜,玻璃轉移溫度宜為250℃以上較佳,300℃以上更佳,350℃以上尤佳,或宜為在500℃以下之範圍內未觀測到玻璃轉移點較佳。本發明中之玻璃轉移溫度係利用差示熱分析(DSC)求出。In the organic polymer film of the present invention, the glass transition temperature is preferably 250 ° C or more, more preferably 300 ° C or more, more preferably 350 ° C or more, or preferably no glass transition point is observed in the range of 500 ° C or less. good. The glass transition temperature in the present invention is determined by differential thermal analysis (DSC).

本發明之有機系高分子膜之線膨脹係數(CTE)宜為-5ppm/K~+20ppm/K較佳,-5ppm/K~+15ppm/K更佳,1ppm/K~+10ppm/K尤佳。CTE為前述範圍內的話,疊層體全體之實效的線膨脹係數可保持為小,疊層體的尺寸穩定性提高。 本發明中之線膨脹係數係使用30至200℃之間的平均値,但取決於用途,著重的溫度範圍不同,有時考慮於高溫之處理亦會調整為30℃至400℃之範圍、調整為100℃至400℃之範圍,伴有銲接時,有時會調整成50℃至280℃之範圍,應用於汽車零件等時,使用溫度範圍亦可能重視-50℃~150℃之範圍。The organic polymer film of the present invention preferably has a linear expansion coefficient (CTE) of -5 ppm/K to +20 ppm/K, more preferably -5 ppm/K to +15 ppm/K, and particularly preferably 1 ppm/K to +10 ppm/K. When the CTE is within the above range, the effective linear expansion coefficient of the entire laminate can be kept small, and the dimensional stability of the laminate can be improved. The coefficient of linear expansion in the present invention uses an average enthalpy between 30 and 200 ° C, but depending on the application, the temperature range is emphasized, and the treatment at a high temperature is sometimes adjusted to a range of 30 ° C to 400 ° C, and adjustment is made. In the range of 100 ° C to 400 ° C, when welding, it may be adjusted to a range of 50 ° C to 280 ° C. When used in automotive parts, the temperature range may be in the range of -50 ° C to 150 ° C.

本發明中之有機系高分子膜之斷裂強度宜為60MPa以上較佳,120MP以上更佳,240MPa以上尤佳。斷裂強度之上限並無限制,事實上為未達1000MPa左右。此外,此處該有機系高分子膜之斷裂強度係指有機系高分子膜之長度方向與寬度方向之平均値。 本發明中之有機系高分子膜與聚矽氧樹脂之接著強度宜為前述有機系高分子膜之斷裂強度的1/2以下較佳。 假設使用厚度10μm之膜的本發明之疊層體中,膜的接著強度為0.5N/cm。 對於寬度10mm之膜施加之斷裂力成為:0.5N/(10μm×10mm)=0.5N/0.1mm2 =5MPa。如此之情形,若膜有此10倍左右,亦即50MPa以上之斷裂強度的話,將膜剝離時可無問題地進行剝離操作。 該接著強度宜為前述有機系高分子膜之斷裂強度的1/3以下更佳,1/4以下尤佳。The breaking strength of the organic polymer film in the present invention is preferably 60 MPa or more, more preferably 120 MP or more, and particularly preferably 240 MPa or more. There is no limit to the upper limit of the breaking strength, and in fact it is less than about 1000 MPa. In addition, the breaking strength of the organic polymer film here means the average enthalpy of the longitudinal direction and the width direction of the organic polymer film. The adhesive strength of the organic polymer film and the polyoxyxylene resin in the present invention is preferably 1/2 or less of the breaking strength of the organic polymer film. It is assumed that in the laminate of the present invention using a film having a thickness of 10 μm, the film has a bonding strength of 0.5 N/cm. The breaking force applied to the film having a width of 10 mm was: 0.5 N / (10 μm × 10 mm) = 0.5 N / 0.1 mm 2 = 5 MPa. In such a case, if the film has about 10 times, that is, a breaking strength of 50 MPa or more, the peeling operation can be performed without any problem when the film is peeled off. The bonding strength is preferably 1/3 or less of the breaking strength of the organic polymer film, and more preferably 1/4 or less.

本發明中之有機系高分子膜之厚度不均宜為20%以下較佳,12%以下更佳,7%以下尤佳,4%以下特佳。厚度不均超過20%的話,會有難以適用在狹小部的傾向。此外,膜之厚度不均,例如可利用接觸式膜厚計從被測定膜隨機抽樣10點左右的位置並測定膜厚,依下式求出。 膜之厚度不均(%) =100×(最大膜厚-最小膜厚)÷平均膜厚The thickness of the organic polymer film in the present invention is preferably 20% or less, more preferably 12% or less, still more preferably 7% or less, and particularly preferably 4% or less. If the thickness unevenness exceeds 20%, it tends to be difficult to apply to a narrow portion. Further, the thickness of the film is not uniform. For example, a film thickness can be measured by randomly measuring a film at a position of about 10 o'clock from the film to be measured by a contact film thickness meter, and the film thickness can be obtained by the following formula. Uneven thickness of film (%) = 100 × (maximum film thickness - minimum film thickness) ÷ average film thickness

本發明中之有機系高分子膜在製造時,宜以捲繞成寬度為300mm以上、長度為10m以上之長條膜的形態獲得較佳,捲繞於捲繞芯而成之輥狀膜的形態更佳。In the production of the organic polymer film of the present invention, it is preferable to form a long film having a width of 300 mm or more and a length of 10 m or more, and it is preferably wound around a roll-shaped film of a winding core. The shape is better.

有機系高分子膜中,為了確保操作性及生產性,宜於膜中添加・含有滑動材(粒子),賦予有機系高分子膜微細凹凸而確保滑動性較佳。前述滑動材(粒子)宜為由無機物構成的微粒較佳,可使用由金屬、金屬氧化物、金屬氮化物、金屬碳化物、金屬酸鹽、磷酸鹽、碳酸鹽、滑石、雲母、黏土、其他黏土礦物等構成的粒子。宜使用氧化矽、磷酸鈣、磷酸氫鈣、磷酸二氫鈣、焦磷酸鈣、羥基磷灰石、碳酸鈣、玻璃填料等金屬氧化物、磷酸鹽、碳酸鹽較佳。滑動材可只有1種,也可有2種以上。In the organic polymer film, in order to ensure operability and productivity, it is preferable to add and contain a sliding material (particles) to the film, and to impart fine unevenness to the organic polymer film to ensure slidability. The sliding material (particles) is preferably a fine particle composed of an inorganic material, and may be made of a metal, a metal oxide, a metal nitride, a metal carbide, a metal salt, a phosphate, a carbonate, a talc, a mica, a clay, or the like. Particles composed of clay minerals, etc. Metal oxides such as cerium oxide, calcium phosphate, calcium hydrogen phosphate, calcium dihydrogen phosphate, calcium pyrophosphate, hydroxyapatite, calcium carbonate, glass filler, phosphate, and carbonate are preferably used. There are only one type of sliding material, and two or more types may be used.

前述滑動材(粒子)之體積平均粒徑通常為0.001~10μm,0.03~2.5μm較佳,0.05~0.7μm更佳,0.05~0.3μm尤佳。該體積平均粒徑係以利用光散射法獲得之測定値作為基準。粒徑比下限小的話,有機系高分子膜的工業化生產變得困難,又,超過上限的話,表面之凹凸變得過大,貼附強度變弱,實用上有出現問題之虞。The volume average particle diameter of the sliding material (particles) is usually 0.001 to 10 μm, preferably 0.03 to 2.5 μm, more preferably 0.05 to 0.7 μm, and particularly preferably 0.05 to 0.3 μm. The volume average particle diameter is based on the measurement enthalpy obtained by the light scattering method. When the particle size is smaller than the lower limit, the industrial production of the organic polymer film becomes difficult. When the temperature exceeds the upper limit, the unevenness of the surface becomes excessively large, and the adhesion strength is weakened, and there is a problem in practical use.

前述滑動材之添加量,就相對於有機系高分子膜中之高分子成分之添加量而言,為0.02~50質量%,0.04~3質量%較佳,0.08~1.2質量%更佳。滑動材之添加量過少的話,會有難期待滑動材添加之效果、不太能確保滑動性、有機系高分子膜製造出現問題的情況,過多的話,會有膜表面凹凸變得過大、即使可確保滑動性仍會導致平滑性降低、或有機系高分子膜之斷裂強度、斷裂伸長度降低、或CTE上昇等的情況。The amount of the sliding material added is 0.02 to 50% by mass, preferably 0.04 to 3% by mass, and more preferably 0.08 to 1.2% by mass based on the amount of the polymer component in the organic polymer film. When the amount of the sliding material added is too small, the effect of adding the sliding material is difficult to be expected, and the slidability and the production of the organic polymer film are less likely to be ensured. If the amount of the sliding material is too large, the surface unevenness of the film may become too large, and even if it is ensured The slidability still causes a decrease in smoothness, a decrease in the breaking strength of the organic polymer film, a decrease in the elongation at break, or an increase in the CTE.

有機系高分子膜添加・含有滑動材(粒子)時,可製成滑動材均勻分散的單層有機系高分子膜,也可為例如其中一面由含有滑動材之有機系高分子膜構成,另一面由不含滑動材或雖含有滑動材但含量為少量之有機系高分子膜構成的多層有機系高分子膜。如此之多層高分子之膜,可對於其中一層(膜)表面賦予微細凹凸而於該層(膜)確保滑動性,並可確保良好的操作性、生產性。When the organic polymer film is added and the sliding material (particles) is contained, a single-layer organic polymer film in which the sliding material is uniformly dispersed may be used, and for example, one of the organic polymer films containing the sliding material may be used. A multilayer organic polymer film comprising an organic polymer film containing no sliding material or a sliding material but a small amount. In the film of the multilayer polymer, fine unevenness can be imparted to the surface of one layer (film), and slidability can be ensured in the layer (film), and good workability and productivity can be ensured.

多層有機系高分子膜為以熔融延伸製膜法製得之膜時,例如首先使用不含滑動材之有機系高分子膜原料成膜,於該步驟中途在至少膜之單面塗布含有滑動材之樹脂層而獲得。當然也可反之使用含有滑動材之有機系高分子膜原料成膜,於該步驟中途,或成膜結束後,塗布不含滑動材之有機系高分子膜原料而獲得膜。 使用如聚醯亞胺膜之溶液製膜法獲得之有機系高分子膜的情況也同樣,例如可使用滑動材(較佳為平均粒徑0.05~2.5μm左右)之含量相對於聚醯胺酸溶液中之聚合物固體成分為0.02質量%~50質量%(較佳為0.04~3質量%,更佳為0.08~1.2質量%)之聚醯胺酸溶液,與不含滑動材或其含量為少量(較佳為相對於聚醯胺酸溶液中之聚合物固體成分未達0.02質量%,更佳為未達0.01質量%)之2種聚醯胺酸溶液作為聚醯胺酸溶液(聚醯亞胺之前驅體溶液)而進行製造。When the multilayer organic polymer film is a film obtained by a melt-stretch film formation method, for example, first, an organic polymer film material containing no sliding material is used as a film, and in the middle of the step, at least one side of the film is coated with a sliding material. Obtained from the resin layer. Needless to say, the organic polymer film material containing the sliding material may be used as a film, and in the middle of the step or after the film formation is completed, the organic polymer film material containing no sliding material may be applied to obtain a film. In the case of using an organic polymer film obtained by a solution forming method of a polyimide film, for example, a sliding material (preferably having an average particle diameter of about 0.05 to 2.5 μm) can be used with respect to polyglycine. The polymer solid content in the solution is from 0.02% by mass to 50% by mass (preferably 0.04 to 3% by mass, more preferably 0.08 to 1.2% by mass) of the polyaminic acid solution, and the content of the sliding material or the content thereof is a small amount (preferably less than 0.02% by mass, more preferably less than 0.01% by mass relative to the solid content of the polymer in the polyaminic acid solution) as a poly-proline solution (polyamide) The imine precursor solution is produced.

就多層有機系高分子膜之多層化(疊層)方法而言,只要兩層之黏合不產生問題即可,並無特別限定,且只要能不介隔接著劑層等而黏合者即可。The multilayer (lamination) method of the multilayer organic polymer film is not particularly limited as long as the adhesion between the two layers is not problematic, and it is only required to be bonded without interposing an adhesive layer or the like.

聚醯亞胺膜的情況下,例如可例示i)製作其中一聚醯亞胺膜後,在該聚醯亞胺膜上連續塗布另一聚醯胺酸溶液並進行醯亞胺化的方法;ii)將其中一聚醯胺酸溶液流延並製作聚醯胺酸膜後,在該聚醯胺酸膜上連續塗布另一聚醯胺酸溶液後進行醯亞胺化的方法;iii)利用共擠製之方法;iv)在以不含滑動材或滑動材含量為少量之聚醯胺酸溶液形成的膜之上,將含多量滑動材之聚醯胺酸溶液以噴塗、T模塗等進行塗布並醯亞胺化的方法等。本發明中宜使用上述i)、或上述ii)之方法較佳。In the case of a polyimide film, for example, i) a method in which one of the polyimide films is formed, and another polyamine solution is continuously coated on the polyimide film and ruthenium imidized; Ii) a method in which a poly-proline solution is cast and a poly-proline film is formed, and another poly-proline solution is continuously coated on the poly-proline film to carry out hydrazine imidization; iii) use a method of co-extrusion; iv) spraying a polyamic acid solution containing a large amount of sliding material on a film formed of a polyamic acid solution containing no sliding material or a small amount of sliding material, spraying, T-coating, etc. A method of coating and ruthenium imidization or the like. Preferably, the method of the above i) or the above ii) is preferably used in the present invention.

多層有機系高分子膜中之各層之厚度的比率並無特別限定,若令含多量滑動材之高分子層為(a)層、不含滑動材或其含量為少量之高分子層為(b)層的話,(a)層/(b)層宜為0.05~0.95較佳。(a)層/(b)層超過0.95的話,往往會喪失(b)層之平滑性,另一方面,未達0.05時,會有表面特性之改良效果不足、喪失易滑性的情況。The ratio of the thickness of each layer in the multilayer organic polymer film is not particularly limited, and the polymer layer containing a large amount of the sliding material is (a) layer, the sliding material is not contained, or the polymer layer having a small amount is (b) In the case of the layer, the layer (a)/(b) is preferably 0.05 to 0.95. When the layer (a) or layer (b) exceeds 0.95, the smoothness of the layer (b) tends to be lost. On the other hand, when it is less than 0.05, the effect of improving the surface characteristics is insufficient and the slipperiness is lost.

<有機系高分子膜之表面活化處理> 本發明所使用之有機系高分子膜宜進行表面活化處理較佳。藉由該表面活化處理,能將有機系高分子膜表面改質成有官能基存在的狀態(所謂已活化狀態),並提高對於矽烷偶聯劑之接著性。 本發明中之表面活化處理係乾式、或濕式之表面處理。本發明之乾式處理可使用對於表面照射紫外線、電子束、X射線等活性能量射線之處理、電暈處理、真空電漿處理、常壓電漿處理、火燄處理、ITRO處理等。濕式處理可例示使膜表面接觸酸或鹼溶液之處理。本發明中可理想地使用之表面活化處理為電漿處理,為電漿處理與濕式之酸處理的組合。<Surface Activation Treatment of Organic Polymer Film> The organic polymer film used in the present invention is preferably subjected to surface activation treatment. By the surface activation treatment, the surface of the organic polymer film can be reformed to a state in which a functional group exists (so-called activated state), and the adhesion to the decane coupling agent can be improved. The surface activation treatment in the present invention is a dry or wet surface treatment. The dry treatment of the present invention may be carried out by treating the surface with an active energy ray such as ultraviolet rays, electron beams, X-rays, corona treatment, vacuum plasma treatment, normal piezoelectric slurry treatment, flame treatment, ITRO treatment, or the like. The wet treatment can be exemplified by a treatment in which the surface of the membrane is brought into contact with an acid or alkali solution. The surface activation treatment which can be desirably used in the present invention is a plasma treatment, which is a combination of a plasma treatment and a wet acid treatment.

電漿處理並無特別限定,有於真空中之RF電漿處理、微波電漿處理、微波ECR電漿處理、大氣壓電漿處理、電暈處理等,也包括含氟之氣體處理、使用離子源之離子植入處理、使用PBII法之處理、暴露於熱電漿之火燄處理、ITRO處理等。該等之中,於真空中之RF電漿處理、微波電漿處理、大氣壓電漿處理為較佳。The plasma treatment is not particularly limited, and includes RF plasma treatment, microwave plasma treatment, microwave ECR plasma treatment, atmospheric piezoelectric slurry treatment, corona treatment, etc. in a vacuum, and also includes fluorine gas treatment, using an ion source. The ion implantation treatment, the treatment using the PBII method, the flame treatment exposed to the hot plasma, the ITRO treatment, and the like. Among these, RF plasma treatment, microwave plasma treatment, and atmospheric piezoelectric slurry treatment in a vacuum are preferred.

就電漿處理的適當條件而言,宜為利用氧電漿、CF4 、C2 F6 等含氟之電漿等已知化學蝕刻效果高的電漿、或如Ne、Ar、Kr、Xe電漿般將物理性能量供給高分子表面而物理蝕刻效果高的電漿進行的處理較理想。又,CO2 、CO、H2 、N2 、NH4 、CH4 等電漿、及該等之混合氣體、或進一步附加水蒸氣亦較佳。此外,需製作含有選自於由諸如OH、N2 、N、CO、CO2 、H、H2 、O2 、NH、NH2 、NH3 、COOH、NO、NO2 、He、Ne、Ar、Kr、Xe、CH2 O、Si(OCH3 )4 、Si(OC2 H5 )4 、C3 H7 Si(OCH3 )3 、C3 H7 Si(OC2 H5 )3 構成之群組中之至少1種以上之成分作為氣體或作為電漿中之分解物的電漿。目標為於短時間之處理的情況下,宜為電漿之能量密度高、電漿中之離子所具有之動能高者、活性物質之數密度高的電漿較理想,但需要表面平滑性,故能量密度提高方面有其極限。使用氧電漿時,在進行表面氧化、產生OH基的方面雖好,但容易產生原本已欠缺與膜本身之黏合力的表面,且表面的粗糙性(粗糙度)變大,故黏合性也變差。又,使用Ar氣之電漿時,會於表面產生純粹物理性的碰撞的影響,該種情況下表面的粗糙度也變大。綜合考慮該等的話,微波電漿處理、微波ECR電漿處理、利用容易植入高能量之離子的離子源所為之電漿照射、PBII法等也理想。For the appropriate conditions of the plasma treatment, it is preferable to use a plasma having a high chemical etching effect such as oxygen plasma, a fluorine-containing plasma such as CF 4 or C 2 F 6 , or a plasma such as Ne, Ar, Kr or Xe. A plasma-like treatment in which a physical energy is supplied to a polymer surface and a physical etching effect is high is preferable. Further, a plasma such as CO 2 , CO, H 2 , N 2 , NH 4 or CH 4 , and such a mixed gas or further water vapor are also preferred. Further, the preparation needs to be made to be selected from, for example, OH, N 2 , N, CO, CO 2 , H, H 2 , O 2 , NH, NH 2 , NH 3 , COOH, NO, NO 2 , He, Ne, Ar. , Kr, Xe, CH 2 O, Si(OCH 3 ) 4 , Si(OC 2 H 5 ) 4 , C 3 H 7 Si(OCH 3 ) 3 , C 3 H 7 Si(OC 2 H 5 ) 3 At least one or more components in the group are used as a gas or as a plasma of a decomposition product in the plasma. When the target is for a short period of time, it is preferable that the plasma has a high energy density, a high kinetic energy of ions in the plasma, and a high density of the active material, but the surface smoothness is required. Therefore, there is a limit to the improvement of energy density. When oxygen plasma is used, although surface oxidation is performed and OH groups are generated, it is easy to produce a surface which is insufficiently bonded to the film itself, and the surface roughness (roughness) becomes large, so the adhesion is also good. Getting worse. Further, when a plasma of Ar gas is used, a pure physical collision occurs on the surface, and in this case, the surface roughness is also increased. In consideration of these, microwave plasma treatment, microwave ECR plasma treatment, plasma irradiation using an ion source that is easy to implant high-energy ions, PBII method, and the like are also preferable.

該表面活化處理係將高分子表面潔淨化,並進一步生成活性官能基。生成的官能基和偶聯劑層藉由氫鍵或化學反應連結,可將有機系高分子膜層與偶聯劑層牢固地接著。 電漿處理中也可獲得將有機系高分子膜表面蝕刻的效果。尤其於含有相對較多滑動材粒子的有機系高分子膜中,會有滑動材所致之突起妨礙膜與聚矽氧樹脂之接著的情況。此時,利用電漿處理將有機系高分子膜表面蝕刻薄,使滑動材粒子露出一部分後,再以氟酸進行處理的話,可去除膜表面附近的滑動材粒子。The surface activation treatment cleans the surface of the polymer and further generates a reactive functional group. The generated functional group and the coupling agent layer are linked by hydrogen bonding or chemical reaction, and the organic polymer film layer and the coupling agent layer can be firmly adhered. The effect of etching the surface of the organic polymer film can also be obtained in the plasma treatment. In particular, in the organic polymer film containing a relatively large amount of the sliding material particles, there is a case where the protrusion due to the sliding material interferes with the film and the polyoxymethylene resin. At this time, the surface of the organic polymer film is etched thin by the plasma treatment, and after the sliding material particles are partially exposed, and then treated with hydrofluoric acid, the sliding material particles in the vicinity of the surface of the film can be removed.

表面活化處理可只對於有機系高分子膜之單面實施,也可對於兩面實施。對於單面實施電漿處理時,於平行平板型電極之電漿處理,可將有機系高分子膜接觸單側電極上並放置,並只在有機系高分子膜之未與電極接觸側的面實施電漿處理。又,若有機系高分子膜放置成以電性浮於2片電極間之空間的狀態時,可對兩面實施電漿處理。又,也可於有機系高分子膜之單面貼有保護膜之狀態實施電漿處理,以進行單面處理。此外,保護膜可使用附黏接劑之PET膜、烯烴膜等。The surface activation treatment may be carried out only on one side of the organic polymer film, or may be carried out on both sides. When the plasma treatment is performed on one side, the organic polymer film may be placed on the one-side electrode and placed on the surface of the organic polymer film that is not in contact with the electrode. Perform plasma treatment. Further, when the organic polymer film is placed in a state of being electrically floating in a space between the two electrodes, the plasma treatment can be performed on both surfaces. Further, a plasma treatment may be performed in a state in which a protective film is attached to one surface of the organic polymer film to perform one-side treatment. Further, as the protective film, a PET film to which an adhesive is attached, an olefin film, or the like can be used.

<矽烷偶聯劑> 本發明中之矽烷偶聯劑,係指物理性或化學性地介隔在聚矽氧樹脂與有機系高分子膜之間,並具有使兩者間之接著力提高之作用的化合物。 作為矽烷偶聯劑之較佳具體例,可列舉N-2-(胺基乙基)-3-胺基丙基甲基二甲氧基矽烷、N-2-(胺基乙基)-3-胺基丙基三甲氧基矽烷、N-2-(胺基乙基)-3-胺基丙基三乙氧基矽烷、3-胺基丙基三甲氧基矽烷、3-胺基丙基三乙氧基矽烷、3-三乙氧基矽基-N-(1,3-二甲基-亞丁基)丙胺、2-(3,4-環氧環己基)乙基三甲氧基矽烷、3-環氧丙氧基丙基三甲氧基矽烷、3-環氧丙氧基丙基甲基二乙氧基矽烷、3-環氧丙氧基丙基三乙氧基矽烷、乙烯基三氯矽烷、乙烯基三甲氧基矽烷、乙烯基三乙氧基矽烷、2-(3,4-環氧環己基)乙基三甲氧基矽烷、3-環氧丙氧基丙基三甲氧基矽烷、3-環氧丙氧基丙基甲基二乙氧基矽烷、3-環氧丙氧基丙基三乙氧基矽烷、對苯乙烯基三甲氧基矽烷、3-甲基丙烯醯氧丙基甲基二甲氧基矽烷、3-甲基丙烯醯氧丙基三甲氧基矽烷、3-甲基丙烯醯氧丙基甲基二乙氧基矽烷、3-甲基丙烯醯氧丙基三乙氧基矽烷、3-丙烯醯氧丙基三甲氧基矽烷、N-苯基-3-胺基丙基三甲氧基矽烷、N-(乙烯基苄基)-2-胺基乙基-3-胺基丙基三甲氧基矽烷鹽酸鹽、3-脲基丙基三乙氧基矽烷、3-氯丙基三甲氧基矽烷、3-巰基丙基甲基二甲氧基矽烷、3-巰基丙基三甲氧基矽烷、雙(三乙氧基矽基丙基)四硫醚、3-異氰酸酯丙基三乙氧基矽烷、參-(3-三甲氧基矽基丙基)異氰尿酸酯、氯甲基苯乙基三甲氧基矽烷、氯甲基三甲氧基矽烷、胺基苯基三甲氧基矽烷、胺基苯乙基三甲氧基矽烷、胺基苯基胺基甲基苯乙基三甲氧基矽烷、六甲基二矽氮烷等。<Hydrane coupling agent> The decane coupling agent in the present invention means physically or chemically interposed between the polyoxynoxy resin and the organic polymer film, and has an adhesion between the two. The compound of action. Preferred examples of the decane coupling agent include N-2-(aminoethyl)-3-aminopropylmethyldimethoxydecane and N-2-(aminoethyl)-3. -Aminopropyltrimethoxydecane, N-2-(aminoethyl)-3-aminopropyltriethoxydecane, 3-aminopropyltrimethoxydecane, 3-aminopropyl Triethoxy decane, 3-triethoxyindolyl-N-(1,3-dimethyl-butylene)propylamine, 2-(3,4-epoxycyclohexyl)ethyltrimethoxynonane, 3-glycidoxypropyltrimethoxydecane, 3-glycidoxypropylmethyldiethoxydecane, 3-glycidoxypropyltriethoxydecane, Vinyltrichloro Decane, vinyltrimethoxydecane, vinyltriethoxydecane, 2-(3,4-epoxycyclohexyl)ethyltrimethoxydecane, 3-glycidoxypropyltrimethoxydecane, 3-glycidoxypropylmethyldiethoxydecane, 3-glycidoxypropyltriethoxydecane, p-styryltrimethoxydecane, 3-methylpropenyloxypropyl Methyldimethoxydecane, 3-methylpropenyloxypropyltrimethoxydecane, 3-methylpropenyloxypropylmethyldiethoxydecane, 3-methyl Propylene oxypropyl triethoxy decane, 3-propenyl methoxypropyl trimethoxy decane, N-phenyl-3-aminopropyl trimethoxy decane, N-(vinyl benzyl)-2 -Aminoethyl-3-aminopropyltrimethoxydecane hydrochloride, 3-ureidopropyltriethoxydecane, 3-chloropropyltrimethoxydecane, 3-mercaptopropylmethyldi Methoxydecane, 3-mercaptopropyltrimethoxydecane, bis(triethoxymethylpropyl)tetrasulfide, 3-isocyanatepropyltriethoxydecane, gins-(3-trimethoxyfluorene) Isopropyl)isocyanurate, chloromethylphenethyltrimethoxydecane, chloromethyltrimethoxydecane, aminophenyltrimethoxydecane, aminophenethyltrimethoxydecane, amine Phenylaminomethylphenethyltrimethoxydecane, hexamethyldioxane, and the like.

本發明可使用之矽烷偶聯劑,除上述外也可使用正丙基三甲氧基矽烷、丁基三氯矽烷、2-氰基乙基三乙氧基矽烷、環己基三氯矽烷、癸基三氯矽烷、二乙醯氧基二甲基矽烷、二乙氧基二甲基矽烷、二甲氧基二甲基矽烷、二甲氧基二苯基矽烷、二甲氧基甲基苯基矽烷、十二基三氯矽烷、十二基三甲氧基矽烷、乙基三氯矽烷、己基三甲氧基矽烷、十八基三乙氧基矽烷、十八基三甲氧基矽烷、正辛基三氯矽烷、正辛基三乙氧基矽烷、正辛基三甲氧基矽烷、三乙氧基乙基矽烷、三乙氧基甲基矽烷、三甲氧基甲基矽烷、三甲氧基苯基矽烷、戊基三乙氧基矽烷、戊基三氯矽烷、三乙醯氧基甲基矽烷、三氯己基矽烷、三氯甲基矽烷、三氯十八基矽烷、三氯丙基矽烷、三氯十四基矽烷、三甲氧基丙基矽烷、烯丙基三氯矽烷、烯丙基三乙氧基矽烷、烯丙基三甲氧基矽烷、二乙氧基甲基乙烯基矽烷、二甲氧基甲基乙烯基矽烷、三氯乙烯基矽烷、三乙氧基乙烯基矽烷、乙烯基參(2-甲氧基乙氧基)矽烷、三氯-2-氰基乙基矽烷、二乙氧基(3-環氧丙氧基丙基)甲基矽烷、3-環氧丙氧基丙基(二甲氧基)甲基矽烷、3-環氧丙氧基丙基三甲氧基矽烷等。The decane coupling agent which can be used in the present invention may be used, in addition to the above, n-propyltrimethoxydecane, butyltrichlorodecane, 2-cyanoethyltriethoxydecane, cyclohexyltrichlorodecane or decyl group. Trichlorodecane, diethyl methoxy dimethyl decane, diethoxy dimethyl decane, dimethoxy dimethyl decane, dimethoxy diphenyl decane, dimethoxymethyl phenyl decane , dodecyltrichlorodecane, dodecyltrimethoxydecane, ethyltrichlorodecane, hexyltrimethoxydecane,octadecyltriethoxydecane,octadecyltrimethoxydecane, n-octyltrichloro Decane, n-octyltriethoxydecane, n-octyltrimethoxydecane, triethoxyethyldecane, triethoxymethyldecane, trimethoxymethylnonane, trimethoxyphenylnonane, pentane Triethoxy decane, pentyl trichloro decane, triethoxy methoxymethyl decane, trichlorohexyl decane, trichloromethyl decane, trichlorooctadecyl decane, trichloropropyl decane, trichlorotetradecane Base decane, trimethoxy propyl decane, allyl trichloro decane, allyl triethoxy decane, allyl trimethoxy fluorene , diethoxymethyl vinyl decane, dimethoxymethyl vinyl decane, trichlorovinyl decane, triethoxy vinyl decane, vinyl ginseng (2-methoxyethoxy) decane, Trichloro-2-cyanoethyl decane, diethoxy (3-glycidoxypropyl) methyl decane, 3-glycidoxypropyl (dimethoxy) methyl decane, 3 - glycidoxypropyltrimethoxydecane, and the like.

又,矽烷偶聯劑中亦可適當加入其他烷氧基矽烷類,例如四甲氧基矽烷、四乙氧基矽烷等。Further, other alkoxy decane such as tetramethoxy decane or tetraethoxy decane may be appropriately added to the decane coupling agent.

又,矽烷偶聯劑中適當加入其他烷氧基矽烷類,例如四甲氧基矽烷、四乙氧基矽烷等時,或不加入時,可施加混合、加熱操作並使反應進行一些再使用。Further, when other alkoxy decane such as tetramethoxy decane or tetraethoxy decane is appropriately added to the decane coupling agent, or when it is not added, mixing, heating, and some reuse of the reaction may be applied.

該矽烷偶聯劑中,本發明較佳使用之矽烷偶聯劑宜為每一分子偶聯劑具有一個矽原子之化學結構的矽烷偶聯劑。 本發明中,特佳之矽烷偶聯劑可列舉N-2-(胺基乙基)-3-胺基丙基甲基二甲氧基矽烷、N-2-(胺基乙基)-3-胺基丙基三甲氧基矽烷、N-2-(胺基乙基)-3-胺基丙基三乙氧基矽烷、3-胺基丙基三甲氧基矽烷、3-胺基丙基三乙氧基矽烷、3-三乙氧基矽基-N-(1,3-二甲基-亞丁基)丙胺、2-(3,4-環氧環己基)乙基三甲氧基矽烷、3-環氧丙氧基丙基三甲氧基矽烷、3-環氧丙氧基丙基甲基二乙氧基矽烷、3-環氧丙氧基丙基三乙氧基矽烷、胺基苯基三甲氧基矽烷、胺基苯乙基三甲氧基矽烷、胺基苯基胺基甲基苯乙基三甲氧基矽烷等。處理中特別要求高耐熱性時,Si與胺基之間宜以芳香族基連結較理想。 此外,本發明視需要也可併用磷系偶聯劑、鈦酸酯系偶聯劑等。Among the decane coupling agents, the decane coupling agent preferably used in the present invention is preferably a decane coupling agent having a chemical structure of a ruthenium atom per molecule coupling agent. In the present invention, a particularly preferred decane coupling agent is N-2-(aminoethyl)-3-aminopropylmethyldimethoxydecane, N-2-(aminoethyl)-3- Aminopropyltrimethoxydecane, N-2-(aminoethyl)-3-aminopropyltriethoxydecane, 3-aminopropyltrimethoxydecane, 3-aminopropyltri Ethoxy decane, 3-triethoxyindolyl-N-(1,3-dimethyl-butylene)propylamine, 2-(3,4-epoxycyclohexyl)ethyltrimethoxydecane, 3 -glycidoxypropyltrimethoxydecane, 3-glycidoxypropylmethyldiethoxydecane, 3-glycidoxypropyltriethoxydecane, Aminophenyltrimethyl Oxydecane, aminophenethyltrimethoxydecane, aminophenylaminomethylphenethyltrimethoxydecane, and the like. When high heat resistance is required in the treatment, it is preferred that the Si and the amine group be bonded by an aromatic group. Further, the present invention may be used in combination with a phosphorus-based coupling agent, a titanate-based coupling agent, or the like as needed.

<矽烷偶聯劑之塗布方法> 習知技術中,矽烷偶聯劑之塗布係於將矽烷偶聯劑以醇等溶劑進行稀釋而成之溶液狀態進行。但,本發明之特徵為:該矽烷偶聯劑塗布步驟係介由氣相進行。亦即本發明中係使有機系高分子膜暴露於已氣化之矽烷偶聯劑而實施塗布。矽烷偶聯劑塗布亦可換言之稱為矽烷偶聯劑處理。氣化係指矽烷偶聯劑之蒸氣,亦即實質上氣體狀態之矽烷偶聯劑,或微粒狀態之矽烷偶聯劑存在的狀態。暴露係指有機系高分子膜接觸包含前述已氣化之矽烷偶聯劑之氣體或真空狀態。<Coating method of decane coupling agent> In the prior art, the coating of the decane coupling agent is carried out in a solution state in which a decane coupling agent is diluted with a solvent such as an alcohol. However, the present invention is characterized in that the decane coupling agent coating step is carried out through a gas phase. That is, in the present invention, the organic polymer film is exposed to a vaporized decane coupling agent to be applied. The decane coupling agent coating may also be referred to as a decane coupling agent treatment. The gasification means a vapor of a decane coupling agent, that is, a substantially gaseous decane coupling agent, or a state in which a silane coupling agent in a particulate state exists. Exposure means that the organic polymer film is in contact with a gas or vacuum state containing the aforementioned vaporized decane coupling agent.

矽烷偶聯劑之蒸氣可藉由將液體狀態之矽烷偶聯劑加溫到40℃~矽烷偶聯劑之沸點之溫度而輕易獲得。矽烷偶聯劑之蒸氣於沸點以下亦可生成。也可利用矽烷偶聯劑之微粒共存的狀態。又,也可藉由溫度壓力之操作實施提高蒸氣密度之操作。矽烷偶聯劑之沸點根據化學結構而不同,大約為100~250℃之範圍。但200℃以上之加熱會有招致矽烷偶聯劑之有機基側之副反應之虞,故不佳。The vapor of the decane coupling agent can be easily obtained by heating the liquid state decane coupling agent to a temperature of from 40 ° C to the boiling point of the decane coupling agent. The vapor of the decane coupling agent can also be formed below the boiling point. It is also possible to use a state in which the particles of the decane coupling agent coexist. Further, the operation of increasing the vapor density can be carried out by the operation of temperature and pressure. The boiling point of the decane coupling agent varies depending on the chemical structure, and is approximately in the range of 100 to 250 °C. However, heating at 200 ° C or higher may cause a side reaction of the organic side of the decane coupling agent, which is not preferable.

將矽烷偶聯劑加溫之環境可為加壓下、常壓下、減壓下中之任一者,為了促進矽烷偶聯劑之氣化時,宜為約常壓下或減壓下較佳。矽烷偶聯劑大多分類為可燃性液體,故宜於密閉容器內,較佳為將容器內以鈍性氣體置換後再進行氣化作業較佳。 另一方面,以改善生產效率及減低生產設備價格的觀點觀之,宜於不使用真空之環境塗布矽烷偶聯劑較理想。例如,可在常壓下將有機系高分子膜放置於腔室內,使包含已氣化之矽烷偶聯劑之約常壓之載流氣體充滿腔室內,從將矽烷偶聯劑沉積起,到再次回復至無已氣化之矽烷偶聯劑的狀態為止,於大約大氣壓之狀態進行。The environment in which the decane coupling agent is heated may be any one under pressure, under normal pressure and under reduced pressure. In order to promote gasification of the decane coupling agent, it is preferably under normal pressure or under reduced pressure. good. Since the decane coupling agent is mostly classified as a flammable liquid, it is preferably contained in a closed container, and it is preferred to carry out the gasification operation after replacing the inside of the container with a passive gas. On the other hand, in order to improve production efficiency and reduce the price of production equipment, it is preferable to coat the decane coupling agent in an environment where no vacuum is used. For example, the organic polymer film may be placed in a chamber under normal pressure, and a carrier gas containing a gasification decane coupling agent at a normal pressure may be filled in the chamber, from the deposition of the decane coupling agent to The state of returning to the state in which the vaporized decane coupling agent was not returned was carried out at about atmospheric pressure.

有機系高分子膜暴露於已氣化之矽烷偶聯劑的時間並無特別限制,為20小時以內,60分鐘以內較佳,15分鐘以內更佳,1分鐘以內又更佳。 有機系高分子膜暴露於已氣化之矽烷偶聯劑期間的有機系高分子膜溫度,取決於矽烷偶聯劑之種類、與求得之矽烷偶聯劑層之厚度,宜控制在-50℃~200℃之間之適當溫度較佳。The time during which the organic polymer film is exposed to the vaporized decane coupling agent is not particularly limited, and is preferably within 20 hours, preferably within 60 minutes, more preferably within 15 minutes, and even more preferably within 1 minute. The temperature of the organic polymer film during exposure of the organic polymer film to the vaporized decane coupling agent depends on the type of the decane coupling agent and the thickness of the obtained decane coupling agent layer, and is preferably controlled at -50. A suitable temperature between ° C and 200 ° C is preferred.

暴露於已氣化之矽烷偶聯劑之有機系高分子膜較佳為暴露後於70℃~200℃,更佳為75℃~150℃進行加熱。藉由該加熱,有機系高分子膜表面之羥基等與矽烷偶聯劑之烷氧基、矽氮烷基反應,並完成矽烷偶聯劑處理。加熱所需時間為10秒以上10分鐘左右以內。溫度過高、或時間過長時,會發生偶聯劑的劣化。又,時間過短的話,無法獲得處理效果。此外,暴露於矽烷偶聯劑過程中之基板溫度已為80℃以上時,亦可省略事後的加熱。此外,該加熱溫度或時間取決於有機系高分子膜的耐熱性。在改善該等處理的條件自由度的方面,使用高耐熱性之有機系高分子膜較佳。The organic polymer film exposed to the vaporized decane coupling agent is preferably heated at 70 ° C to 200 ° C, more preferably 75 ° C to 150 ° C after exposure. By this heating, the hydroxyl group or the like on the surface of the organic polymer film is reacted with the alkoxy group or the decyl group of the decane coupling agent, and the decane coupling agent treatment is completed. The time required for heating is 10 seconds or more and 10 minutes or less. When the temperature is too high or the time is too long, the coupling agent is deteriorated. Also, if the time is too short, the processing effect cannot be obtained. Further, when the substrate temperature during the exposure to the decane coupling agent is 80 ° C or more, the subsequent heating may be omitted. Further, the heating temperature or time depends on the heat resistance of the organic polymer film. It is preferable to use an organic polymer film having high heat resistance in terms of improving the degree of freedom of the conditions of the treatment.

本發明中,宜將有機系高分子膜之矽烷偶聯劑塗布面朝下固持而暴露於矽烷偶聯劑蒸氣較佳。塗布矽烷偶聯劑之溶液之習知法中,有機系高分子膜之塗布面在塗布過程中及塗布前後必然朝上,故無法否認會有作業環境下之浮游異物等沉積在聚矽氧樹脂表面之可能性。但,本發明中因將有機系高分子膜朝下固持,能大幅減少環境中之異物附著。In the present invention, it is preferred that the decane coupling agent of the organic polymer film is coated with the coating surface facing downward to be exposed to the decane coupling agent vapor. In the conventional method of coating a solution of a decane coupling agent, the coated surface of the organic polymer film is inevitably faced upward during and after the coating process, so that it is impossible to deny that the floating foreign matter in the working environment is deposited on the polyoxyn resin. The possibility of the surface. However, in the present invention, since the organic polymer film is held downward, the adhesion of foreign matter in the environment can be greatly reduced.

又,將包含已氣化之矽烷偶聯劑之氣體導入至使高分子基板暴露之房間時,將2種以上之氣體暫且分離導入的話,2種以上之氣體會在前述房間內碰撞而產生亂流,對於使矽烷偶聯劑分布均勻化之操作等亦為有效。 作為使矽烷偶聯劑氣化之方式,除利用加熱之蒸發氣化以外,於矽烷偶聯劑液中導入氣體而使其產生氣泡的方式亦佳。該方式之後稱為鼓泡。關於鼓泡,單純地將通有氣體之配管放入矽烷偶聯劑液,於配管前端安裝多孔質體並使生成許多微細氣泡者,重疊超音波並促進氣化者亦為有效。 又,已氣化之矽烷偶聯劑常帶電,暴露時藉由對於有機系高分子膜施加電場能使更多的矽烷偶聯劑於短時間沉積,且矽烷偶聯劑具有動能,故能抑制沉積膜成為島狀膜。又,關於使用之載流氣體,已知若包含水分的話,該水分與矽烷偶聯劑會開始反應。因此,露點較低為有效。露點15℃以下較理想,10℃以下更理想,5℃以下更理想。In addition, when a gas containing a gasified decane coupling agent is introduced into a room where the polymer substrate is exposed, when two or more kinds of gases are temporarily separated and introduced, two or more kinds of gases collide in the room to cause disorder. The flow is also effective for the operation of homogenizing the distribution of the decane coupling agent. As a method of vaporizing the decane coupling agent, in addition to vaporization by heating, it is also preferable to introduce a gas into the decane coupling agent liquid to generate bubbles. This mode is hereinafter referred to as bubbling. In the case of bubbling, it is also effective to place a gas-containing pipe in a decane coupling agent liquid, to attach a porous body to the tip of the pipe, and to generate a large number of fine bubbles, and to superimpose the ultrasonic wave and promote vaporization. Moreover, the vaporized decane coupling agent is often charged, and when an electric field is applied to the organic polymer film during exposure, more decane coupling agent can be deposited in a short time, and the decane coupling agent has kinetic energy, so that it can be suppressed. The deposited film becomes an island film. Further, regarding the carrier gas to be used, it is known that when moisture is contained, the moisture and the decane coupling agent start to react. Therefore, the low dew point is effective. The dew point is preferably 15 ° C or less, more preferably 10 ° C or less, and more preferably 5 ° C or less.

進一步,本發明中藉由使載流氣體之露點成為0℃以下,高度抑制水分與矽烷偶聯劑之反應的話,沉積初期之沉積膜之膜厚不均勻之狀態的矽烷偶聯劑反應受到抑制,結果沉積膜之膜厚達到充分均勻後均勻地發生反應,故可抑制表面之極細微之凹凸,並可實現極平滑之表面狀態。Further, in the present invention, when the dew point of the carrier gas is 0° C. or lower and the reaction between the water and the decane coupling agent is highly suppressed, the reaction of the decane coupling agent in a state in which the film thickness of the deposited film is not uniform at the initial stage of deposition is suppressed. As a result, the film thickness of the deposited film is sufficiently uniform and then uniformly reacts, so that extremely fine unevenness of the surface can be suppressed, and an extremely smooth surface state can be achieved.

存在於有機系高分子膜/聚矽氧樹脂疊層體之矽烷偶聯劑層的長徑10μm以上之含矽異物數為2000個/m2 以下,較佳為1000個/m2 以下,更佳為500個/m2 以下的話,是本發明之較佳形態。又,藉由組合前述操作,可達成含矽異物數。The number of the ruthenium-containing foreign matter having a long diameter of 10 μm or more in the decane coupling agent layer of the organic polymer film/polyoxymethylene resin laminate is 2,000/m 2 or less, preferably 1,000/m 2 or less. A preferred embodiment of the present invention is preferably 500/m 2 or less. Further, by combining the above operations, the number of foreign substances containing impurities can be achieved.

關於偶聯劑之塗布量、厚度,理論上為1分子層即足夠,為機械設計上可忽視之水平之厚度即可。一般而言為未達200nm(未達0.2μm),150nm以下(0.15μm以下)較佳,進一步實用上,為100nm以下(0.1μm以下)較佳,50nm以下更佳,10nm以下尤佳。但,計算上為5nm以下之範圍的話,據推測偶聯劑不會成為均勻的塗膜,而以簇集狀存在,為不太理想。矽烷偶聯劑層與聚矽氧樹脂之黏合需要接著。由於並非介隔液體、柔軟的層接觸,而是固體與固體接觸,故首先不接觸的話就不能接著。膜雖有柔軟性,但無法追隨微細的表面粗糙度,表面粗糙度需為5.0nm以下,3.0nm以下較理想,1.0nm以下更理想。 偶聯劑層之膜厚可從利用橢偏測厚法、螢光X射線法、ICP法所為之灰化分析或塗布時之偶聯劑溶液之濃度與塗布量計算求出。Regarding the coating amount and thickness of the coupling agent, it is theoretically sufficient that one molecule layer is sufficient, and the thickness can be neglected at a mechanical design level. In general, it is preferably less than 200 nm (less than 0.2 μm), preferably 150 nm or less (0.15 μm or less), and more preferably 100 nm or less (0.1 μm or less), more preferably 50 nm or less, and even more preferably 10 nm or less. However, when it is calculated to be in the range of 5 nm or less, it is presumed that the coupling agent does not become a uniform coating film but exists in a cluster form, which is not preferable. The bonding of the decane coupling agent layer to the polyoxynoxy resin needs to be carried out. Since the liquid is not in contact with the soft, soft layer, but the solid is in contact with the solid, it cannot be followed without first contacting it. Although the film has flexibility, it cannot follow a fine surface roughness, and the surface roughness needs to be 5.0 nm or less, preferably 3.0 nm or less, and more preferably 1.0 nm or less. The film thickness of the coupling agent layer can be calculated from the concentration of the coupling agent solution and the coating amount at the time of ashing analysis or coating by the ellipsometry method, the fluorescent X-ray method, or the ICP method.

<疊層體製造方法> 本發明中,藉由以下之方法可獲得有機系高分子膜與聚矽氧樹脂之疊層體:於形成有矽烷偶聯劑層之有機系高分子膜的矽烷偶聯劑層側,塗布液狀之二甲基矽氧烷樹脂,之後藉由化學反應使其硬化・固體化。 聚矽氧樹脂之硬化主要是藉由羥基(-OH)與甲氧基(-OCH3 )或羥基彼此發生脫水反應或脫醇反應以高分子量化、交聯化而進行。通常該反應係於200℃~250℃發生,但可藉由硬化觸媒之使用、聚矽氧樹脂之改性而降低。 液狀聚矽氧樹脂之塗布可使用旋塗、浸塗、棒塗、塗抹器、模具塗布機、逗點式塗布機(comma coater)、網版印刷、凹版印刷、毛細管塗布、噴塗等公知的塗布方法。本發明中之聚矽氧樹脂之厚度宜為0.5μm~10mm較佳,2μm~3mm更佳,5μm以上500μm以下又更佳。 又,本發明中,藉由使聚矽氧樹脂之膜或片的表面活化,與矽烷偶聯劑塗布有機系高分子膜重疊並加熱加壓,也可獲得疊層體。此時宜為於聚矽氧樹脂殘存有未反應基之狀態較佳。換言之,使用B階段狀態之聚矽氧樹脂,能以良好的效率獲得疊層體。作為加熱加壓之方法,可使用輥研法、壓製法等,為了獲得無起泡等之精密的疊層體,宜使用真空壓製裝置較佳。 本發明中,聚矽氧樹脂層與高分子膜之剝離強度為0.3N/cm以上、15N/cm以下。剝離強度宜為0.4N/cm以上、12N/cm以下較佳,0.7N/cm以上、10N/cm以下更佳,1.5N/cm以上、8N/cm以下較佳。聚矽氧樹脂層與高分子膜之剝離強度可藉由高分子膜之表面處理、矽烷偶聯劑之塗布條件、塗布量、塗布膜厚、疊層條件進行控制。特別重要之參數為矽烷偶聯劑之厚度,藉由使矽烷偶聯劑層之厚度成為約40nm以下,可使剝離強度為指定之範圍內。<Method for Producing Laminates> In the present invention, a laminate of an organic polymer film and a polyoxyxene resin can be obtained by the following method: a decane couple of an organic polymer film having a decane coupling agent layer formed thereon On the side of the binder layer, a liquid dimethyl sulfoxane resin is applied, and then it is hardened and solidified by a chemical reaction. The hardening of the polyoxyxylene resin is mainly carried out by dehydration reaction or dealcoholization reaction of a hydroxyl group (-OH) with a methoxy group (-OCH 3 ) or a hydroxyl group by high molecular weight and crosslinking. Usually, the reaction occurs at 200 ° C to 250 ° C, but can be reduced by the use of a curing catalyst or modification of a polyoxyxylene resin. The coating of the liquid polyoxyl resin can be carried out by spin coating, dip coating, bar coating, applicator, die coater, comma coater, screen printing, gravure printing, capillary coating, spray coating, and the like. Coating method. The thickness of the polyoxyxene resin in the present invention is preferably from 0.5 μm to 10 mm, more preferably from 2 μm to 3 mm, still more preferably from 5 μm to 500 μm. Further, in the present invention, the surface of the film or sheet of the polyoxyxylene resin is activated, and the organic polymer film is coated with the decane coupling agent, and heated and pressurized to obtain a laminate. In this case, it is preferred that the polyoxyphthalocene resin has an unreacted group remaining. In other words, by using the polyoxymethylene resin in the B-stage state, the laminate can be obtained with good efficiency. As a method of heating and pressurizing, a roll grinding method, a pressing method, or the like can be used, and in order to obtain a compact laminate having no foaming or the like, a vacuum pressing device is preferably used. In the present invention, the peeling strength of the polyoxyxene resin layer and the polymer film is 0.3 N/cm or more and 15 N/cm or less. The peeling strength is preferably 0.4 N/cm or more and 12 N/cm or less, more preferably 0.7 N/cm or more and 10 N/cm or less, and more preferably 1.5 N/cm or more and 8 N/cm or less. The peeling strength of the polyoxyxene resin layer and the polymer film can be controlled by the surface treatment of the polymer film, the coating conditions of the decane coupling agent, the coating amount, the coating film thickness, and the lamination conditions. A particularly important parameter is the thickness of the decane coupling agent. By setting the thickness of the decane coupling agent layer to about 40 nm or less, the peel strength can be made within the specified range.

<疊層體之應用領域> 本發明之疊層體展示倂具聚矽氧樹脂所具有之柔軟性、耐熱性、電特性、化學耐久性、與有機系高分子膜之剛性的優異特性。 於耐熱性且尺寸穩定性優良之有機系高分子膜之兩面配置聚矽氧樹脂而得之疊層體,由於兼顧良好的電特性與良好的尺寸穩定性,故可用作高頻電路基板、高頻天線基板。 將有機系高分子膜形成為無縫管、或無縫帶狀,在其表面形成有聚矽氧樹脂層之無縫管或無縫帶,作為雷射印表機等之碳粉圖像之藉由熱定影之定影帶、用於輸送、重疊靜電圖像之輸送帶係有用。 將本發明之疊層體作為壓製時之緩衝材使用的話,可兼顧厚度方向之良好的緩衝性與面方向之剛直性,進一步亦無如纖維補強體之面方向的不均,故可獲得非常精緻且良好的壓製物。 [實施例]<Application Field of Laminates> The laminate of the present invention exhibits excellent properties of flexibility, heat resistance, electrical properties, chemical durability, and rigidity of an organic polymer film which are possessed by the silicone resin. A laminate obtained by disposing a polyoxymethylene resin on both surfaces of an organic polymer film having excellent heat resistance and dimensional stability can be used as a high-frequency circuit substrate because of good electrical properties and good dimensional stability. High frequency antenna substrate. The organic polymer film is formed into a seamless tube or a seamless strip, and a seamless tube or a seamless belt having a polyoxyxylene resin layer formed on the surface thereof is used as a toner image of a laser printer or the like. A fixing belt for heat fixing, a conveying belt for conveying and superimposing an electrostatic image are useful. When the laminate of the present invention is used as a cushioning material for pressing, both the cushioning property in the thickness direction and the rigidity in the plane direction can be achieved, and the unevenness of the surface direction of the fiber reinforcing body is not obtained, so that it is very Exquisite and good compaction. [Examples]

以下,舉實施例及比較例對本發明進行更加具體地說明,但本發明並不限定於以下之實施例。此外,以下之實施例中的物性評價方法如下。 1.聚醯胺酸之還原黏度(ηsp/C) 將以使聚合物濃度成為0.2g/dl的方式溶解於N-甲基-2-吡咯啶酮(或N,N-二甲基乙醯胺)而得之溶液利用烏氏型黏度管於30℃進行測定。(聚醯胺酸溶液之製備所使用之溶劑為N,N-二甲基乙醯胺的情況下,使用N,N-二甲基乙醯胺溶解聚合物並進行測定。) 2.高分子膜等之厚度 使用測微計(micrometer)(Feinpruf公司製、Millitron 1245D)進行測定。 3.高分子膜之拉伸彈性模量、拉伸斷裂強度及拉伸斷裂伸長度 將測定對象之聚醯亞胺膜在流動方向(MD方向)及寬度方向(TD方向)分別切出100mm×10mm之短條狀,以作為試驗片,使用拉伸試驗機(島津製作所製、Autograph(R) 機種名AG-5000A),以拉伸速度50mm/分、夾頭間距離40mm之條件,就MD方向、TD方向分別測定拉伸彈性模量、拉伸斷裂強度及拉伸斷裂伸長度。 4.90度剝離強度 依照JISK6854-1之90度剝離法,求出聚矽氧樹脂層與高分子膜之剝離強度。 裝置名:島津製作所公司製 Autograph AG-IS 測定溫度:室溫 剝離速度:50mm/min 環境:大氣 測定樣本寬度:1cmHereinafter, the present invention will be more specifically described by way of examples and comparative examples, but the present invention is not limited to the following examples. Further, the physical property evaluation methods in the following examples are as follows. 1. The reduced viscosity (ηsp/C) of polylysine will be dissolved in N-methyl-2-pyrrolidone (or N,N-dimethylacetone in such a way that the polymer concentration becomes 0.2 g/dl). The solution obtained from the amine was measured at 30 ° C using a Ubbelohde viscosity tube. (When the solvent used for the preparation of the polyaminic acid solution is N,N-dimethylacetamide, the polymer is dissolved and measured using N,N-dimethylacetamide.) 2. Polymer The thickness of the film or the like was measured using a micrometer (manufactured by Feinpruf Co., Ltd., Millitron 1245D). 3. Tensile modulus, tensile breaking strength and tensile elongation at break of the polymer film The polyimine film of the measurement object was cut into 100 mm in the flow direction (MD direction) and the width direction (TD direction), respectively. Short strip of 10mm, used as a test piece, using a tensile tester (made by Shimadzu Corporation, Autograph(R) model name AG-5000A), with a tensile speed of 50mm/min and a distance of 40mm between the chucks, MD The tensile modulus, the tensile strength at break, and the tensile elongation at break were measured in the direction and the TD direction, respectively. 4.90-degree peeling strength The peeling strength of the polyfluorene-oxygen resin layer and the polymer film was determined in accordance with the 90-degree peeling method of JIS K6854-1. Device name: manufactured by Shimadzu Corporation Autograph AG-IS Measurement temperature: room temperature Peeling speed: 50 mm/min Environment: Atmosphere Measuring sample width: 1 cm

5.線膨脹係數(CTE) 將測定對象之高分子膜在流動方向(MD方向)及寬度方向(TD方向)依下列條件測定伸縮率,並測定30℃~45℃、45℃~60℃、…之15℃間隔的伸縮率/溫度,實施該測定直至300℃,算出全部測定值之平均值以作為CTE。 設備名:MAC science公司製TMA4000S 試樣長度:20mm 試樣寬度:2mm 升溫開始溫度:25℃ 升溫結束溫度:400℃ 升溫速度:5℃/min 環境:氬氣 初負荷:34.5g/mm2 6.無機粒子之平均粒徑 將測定對象之無機粒子如後述般分散於溶劑中,利用堀場製作所公司製的雷射散射式粒度分布計LB-500求出粒徑分布,並算出重量(體積)平均粒徑與CV値。 7.偶聯劑層厚度之測定法 偶聯層厚度係測定製成Si晶圓之膜厚。 膜厚測定法係利用橢偏測厚儀進行,測定器使用Photal公司製FE-5000。 該測定器之硬體規格如下。 反射角度範圍45~80°、波長範圍250~800nm、波長解析能力1.25nm、點徑1mm、tanΨ測定精度±0.01、cosΔ測定精度±0.01、方式旋轉檢偏鏡法。測定係以偏向子角度45°、入射 70°固定、檢偏鏡之刻度11.25°的條件實施0~360°、250~800nm之測定。 利用非線性最小平方法進行擬合,求出膜厚。此時模型為Air/薄膜/Si之模型,依下式求出波長依存C1~C6。 n=C3/λ4+C2/λ2+C1 k=C6/λ4+C5/λ2+C4 8.高分子膜之評價:輥捲繞性 將長條狀之多層聚醯亞胺膜以2m/分的速度捲繞於捲繞輥(心棒外徑:15cm)時,可不產生皺紋而順利地捲繞時評價為○,部分產生皺紋時評價為△,產生皺紋或附於輥而無法順利地捲繞時評價為×。 9.乾燥氮氣 本實施例中,記載為乾燥氮氣時係使用露點-10℃以下之氮氣。又,氮氣純度為99.9%以上。 10.高分子膜表面粗糙度 本實施例表中之有機系高分子膜表面粗糙度係指於有機系高分子膜塗布矽烷偶聯劑後的3維表面粗糙度Sa。 11.SC層之3維算術平均粗糙度(Sa)係使用非接觸表面・層剖面形狀量測系統(菱化系統公司製「VertScanR2.0」)求出。測定依以下之條件進行。 測定模式:Phase模式 視野大小:640×480 使用濾器:520nm濾器 對物透鏡倍率:×5 變焦透鏡倍率:×1 每1次測定之測定範圍:1.4mm×1.8mm 累積次數:1次 針對以上述條件獲得之原始數據,不實施內插而只實施4次面補正,以作為測定數據。由該測定數據之中依下式計算並求出。5. Linear expansion coefficient (CTE) The polymer film to be measured is measured for the expansion ratio in the flow direction (MD direction) and the width direction (TD direction) under the following conditions, and is measured at 30 ° C to 45 ° C, 45 ° C to 60 ° C, The expansion ratio/temperature of the 15°C interval was measured, and the measurement was carried out up to 300° C., and the average of all the measured values was calculated as the CTE. Equipment name: MMA4000S made by MAC Science Sample length: 20mm Sample width: 2mm Temperature rise temperature: 25°C Temperature rise temperature: 400°C Temperature increase rate: 5°C/min Environment: Argon initial load: 34.5g/mm 2 6 In the average particle diameter of the inorganic particles, the inorganic particles to be measured are dispersed in a solvent as described later, and the particle size distribution is determined by a laser scattering type particle size distribution meter LB-500 manufactured by Horiba, Ltd., and the weight (volume) average is calculated. Particle size and CV 値. 7. Measurement of Thickness of Coupling Agent Layer The thickness of the coupling layer was measured by measuring the film thickness of the Si wafer. The film thickness measurement method was performed using an ellipsometric thickness gauge, and the measuring apparatus used FE-5000 manufactured by Photal Corporation. The hardware specifications of the tester are as follows. The reflection angle range is 45 to 80°, the wavelength range is 250 to 800 nm, the wavelength resolution is 1.25 nm, the spot diameter is 1 mm, the tan Ψ measurement accuracy is ±0.01, and the cos Δ measurement accuracy is ±0.01. The measurement was carried out at 0 to 360° and 250 to 800 nm under the conditions of a deflection angle of 45°, an incident angle of 70°, and a scale of the analyzer of 11.25°. The film thickness was determined by fitting using a nonlinear least squares method. At this time, the model is a model of Air/film/Si, and the wavelength dependence C1 to C6 is obtained by the following equation. n=C3/λ4+C2/λ2+C1 k=C6/λ4+C5/λ2+C4 8. Evaluation of polymer film: roll winding property of a strip-shaped multilayer polyimide film at 2 m/min When the speed was wound around the winding roller (the outer diameter of the mandrel: 15 cm), it was evaluated as ○ when the winding was smoothly wound without wrinkles, and when the wrinkles were partially generated, it was evaluated as Δ, wrinkles were generated, and when it was attached to the roll and could not be smoothly wound. The evaluation is ×. 9. Dry Nitrogen In the present example, it is described that nitrogen gas having a dew point of -10 ° C or less is used in the case of drying nitrogen gas. Further, the nitrogen purity was 99.9% or more. 10. Surface roughness of polymer film The surface roughness of the organic polymer film in the table of the present embodiment refers to the three-dimensional surface roughness Sa after the application of the decane coupling agent to the organic polymer film. 11. The three-dimensional arithmetic mean roughness (Sa) of the SC layer was obtained by using a non-contact surface/layer cross-sectional shape measurement system (VertScan R2.0, manufactured by Ryo Chemical Co., Ltd.). The measurement was carried out under the following conditions. Measurement mode: Phase mode Field of view size: 640 × 480 Filter: 520 nm filter object lens magnification: × 5 Zoom lens magnification: × 1 Measurement range per measurement: 1.4 mm × 1.8 mm Cumulative number: 1 time for the above The raw data obtained by the condition was subjected to only 4 times of surface correction without interpolation, and was used as measurement data. From the measurement data, the following formula is calculated and obtained.

【數學式1】(lx 、ly 分別為x方向與y方向之範圍,Z(x,y)為距平均面之高度)[Math 1] (l x , l y are the range of the x direction and the y direction, respectively, and Z (x, y) is the height from the average plane)

<異物密度> 將100mm×100mm之範圍取樣,利用附有放大100倍之測長功能的顯微鏡觀察取樣範圍,針對於100倍觀察確認之異物,進一步將放大率設定為400倍,測定長徑長度,計算10μm以上之異物的個數,除以觀察面積以作為異物密度。異物密度之單位為(個/m2 )。<Foreign Density> The range of 100 mm × 100 mm is sampled, and the sampling range is observed by a microscope with a length measurement function of 100 times magnification. For the foreign matter confirmed by 100 times observation, the magnification is further set to 400 times, and the length of the long diameter is measured. Calculate the number of foreign matter of 10 μm or more and divide it by the observed area as the foreign matter density. The unit of foreign matter density is (pieces/m 2 ).

<外觀品質> 目視觀察輥的外觀及到距輥外周約2m之範圍,未觀察到傷痕、皺紋、平面性(起伏)等缺點時評價為◎,部分確認到缺點但藉由切開成300mm寬可避免缺點部時評價為○,同樣藉由切開成150mm可避免缺點部時評價為△,藉由切開無法避免可目視確認之缺點時評價為×。<Appearance quality> The appearance of the roll was visually observed and the range from the outer circumference of the roll was about 2 m. When no defects such as scratches, wrinkles, and flatness (undulation) were observed, it was evaluated as ◎, and the defect was partially confirmed, but it was cut into 300 mm width. When the defect portion was avoided, it was evaluated as ○, and when it was cut into 150 mm, the defect portion was evaluated as Δ, and when the defect was unavoidable, it was evaluated as ×.

[製造例1~2] (聚醯胺酸溶液A1~A2之製作) 將配備有氮氣導入管、溫度計、攪拌棒之反應容器內進行氮氣置換後,加入5-胺基-2-(對胺基苯基)苯并唑223質量份、N,N-二甲基乙醯胺4416質量份並使其完全溶解後,加入苯均四酸二酐217質量份、使二氧化矽成為表1之記載量之膠態二氧化矽分散於二甲基乙醯胺而成之Snowtex(DMAC-ST30、日產化學工業製),於25℃之反應溫度進行24小時攪拌,獲得褐色且黏稠的聚醯胺酸溶液A1~A2。[Production Examples 1 and 2] (Preparation of Polyamide Acid Solution A1 to A2) After a nitrogen gas replacement was carried out in a reaction vessel equipped with a nitrogen gas introduction tube, a thermometer, and a stir bar, 5-amino-2-(amine) was added. Phenyl) benzo After 223 parts by mass of azole and 4416 parts by mass of N,N-dimethylacetamide, and completely dissolved, 217 parts by mass of pyromellitic dianhydride was added to make cerium oxide into the colloidal amount of the amount shown in Table 1. Snowtex (DMAC-ST30, manufactured by Nissan Chemical Industries, Ltd.) in which cerium oxide was dispersed in dimethylacetamide was stirred at a reaction temperature of 25 ° C for 24 hours to obtain a brown and viscous polyamine solution A1 to A2.

【表1】 【Table 1】

[製造例3~4] (聚醯胺酸溶液B1~B2之製作) 將配備有氮氣導入管、溫度計、攪拌棒之反應容器內進行氮氣置換後,將作為四羧酸二酐之3,3',4,4'-聯苯四羧酸二酐398質量份、對苯二胺147質量份溶解於4600質量份之N,N-二甲基乙醯胺,並加入使二氧化矽成為表2之記載量之膠態二氧化矽分散於二甲基乙醯胺而成之Snowtex(DMAC-ST30、日產化學工業製),於25℃之反應溫度進行24小時攪拌,獲得褐色且黏稠的聚醯胺酸溶液B1~B2。[Production Examples 3 to 4] (Production of Polyamide Acid Solution B1 to B2) After a nitrogen gas substitution in a reaction vessel equipped with a nitrogen gas introduction tube, a thermometer, and a stir bar, 3, 3 of tetracarboxylic dianhydride was used. 398 parts by mass of '4,4'-biphenyltetracarboxylic dianhydride and 147 parts by mass of p-phenylenediamine were dissolved in 4,600 parts by mass of N,N-dimethylacetamide, and added to make cerium oxide a watch 2, the amount of colloidal cerium oxide dispersed in dimethylacetamide, which is made of Snowtex (DMAC-ST30, manufactured by Nissan Chemical Industry Co., Ltd.), and stirred at a reaction temperature of 25 ° C for 24 hours to obtain a brown and viscous poly Proline solution B1 to B2.

【表2】 【Table 2】

《膜製作例1》 使用逗點式塗布機將聚醯胺酸溶液A1塗覆於聚對苯二甲酸乙二酯製膜A-4100(東洋紡(股)公司製)之無滑動材面上,在110℃進行5分鐘乾燥後,不從支持體剝離而捲繞聚醯胺酸膜。 將獲得之聚醯胺酸膜安裝在製膜機之捲出部,將上述聚醯胺酸溶液A2使用逗點式塗布機塗覆於聚醯胺酸膜面,使聚醯胺酸溶液A1之塗布量成為表3所示之厚度比,在110℃進行20分鐘乾燥,獲得2層構成之聚醯胺酸膜。調整塗布厚度使2層全體之厚度於熱處理後成為表3所示之厚度。 使該多層聚醯胺酸膜通過具有3個熱處理區之針梳拉幅機,實施第1段150℃×2分鐘、第2段220℃×2分鐘、第3段475℃×4分鐘之熱處理,切開成500mm寬,獲得多層聚醯亞胺膜。此時,將於PET膜附有微黏接層之膜(膜A)作為熱處理後捲繞前可剝離之非聚醯亞胺保護膜而層合於聚醯胺酸溶液A1側後,進行捲繞。獲得之聚醯亞胺膜為膜1。該聚醯亞胺膜之特性顯示於表3中。"Film Preparation Example 1" Polyacrylic acid solution A1 was applied to a non-sliding material surface of polyethylene terephthalate film A-4100 (manufactured by Toyobo Co., Ltd.) using a comma-type coater. After drying at 110 ° C for 5 minutes, the polyamic acid film was wound without being peeled off from the support. The obtained polyaminic acid film is mounted on the winding portion of the film forming machine, and the polyamic acid solution A2 is applied to the surface of the polyaminic acid film by using a comma coater to make the polyaminic acid solution A1. The coating amount was a thickness ratio shown in Table 3, and it was dried at 110 ° C for 20 minutes to obtain a two-layered polylysine film. The coating thickness was adjusted so that the thickness of the entire two layers became the thickness shown in Table 3 after the heat treatment. The multilayer poly-proline membrane was subjected to heat treatment in the first stage of 150 ° C × 2 minutes, the second stage of 220 ° C × 2 minutes, and the third stage of 475 ° C × 4 minutes by a pin comber having three heat treatment zones. , cut into a width of 500 mm to obtain a multilayer polyimide film. At this time, the film (film A) having the microadhesive layer attached to the PET film is laminated on the side of the polyaminic acid solution A1 as a non-polyimine protective film which can be peeled off after the heat treatment, and then rolled. Wrap around. The obtained polyimide film was film 1. The properties of the polyimide film are shown in Table 3.

《膜製作例2》 將聚醯胺酸溶液A1、A2之塗覆厚度設定為表3所示之値,除此以外,均和製作例1同樣進行,獲得膜2。其內容和製作例1同樣顯示於表3中。Film Production Example 2 Film 2 was obtained in the same manner as in Production Example 1 except that the coating thicknesses of the polyaminic acid solutions A1 and A2 were set to those shown in Table 3. The contents thereof are also shown in Table 3 in the same manner as in Production Example 1.

《膜製作例3》 將聚醯胺酸溶液B1、B2之塗覆厚度設定為表3所示之値,除此以外,均和製作例1同樣進行,獲得膜3。其內容和製作例1同樣顯示於表3中。Film Production Example 3 A film 3 was obtained in the same manner as in Production Example 1 except that the coating thicknesses of the polyamic acid solutions B1 and B2 were set to those shown in Table 3. The contents thereof are also shown in Table 3 in the same manner as in Production Example 1.

膜4使用100μm厚之聚對苯二甲酸乙二酯膜A4100(東洋紡(股)公司製)。As the film 4, a polyethylene terephthalate film A4100 (manufactured by Toyobo Co., Ltd.) having a thickness of 100 μm was used.

【表3】 【table 3】

<於有機系高分子膜形成偶聯劑層> <塗布例1> 使用具有加熱板之真空室,依以下之條件於有機系高分子膜塗布矽烷偶聯劑。 將矽烷偶聯劑(信越化學工業(股)公司製「KBM-903」:3-胺基丙基三甲氧基矽烷)100質量份填充於淺盤,靜置於加熱板之上。此時加熱板溫度為25℃。然後,在距矽烷偶聯劑之液面沿水平方向分開100mm以上的地方,將350mm×490mm之有機系高分子膜固定於SUS的框並保持垂直,關閉真空室,實施數次抽真空及氮氣導入,重複進行直到於大氣壓之氧濃度成為0.1%以下,然後將腔室內減壓至3×10-1 Pa,將加熱板溫度升溫至60℃,保溫10分鐘,實施於矽烷偶聯劑蒸氣之暴露,之後降低加熱板溫度,同時將潔淨的乾燥氮氣從4處緩和地導入至真空室內並回復到大氣壓,取出固定於框的有機系高分子膜,在潔淨環境下連同SUS的框載置於100℃之加熱板。由於SUS框之厚度,有機系高分子膜並未直接和加熱板接觸而加熱。實施約3分鐘的熱處理,獲得於有機系高分子膜之兩面形成有矽烷偶聯劑層之有機系高分子膜S1。<Coupling Agent Layer Formed in Organic Polymer Film><Coating Example 1 Using a vacuum chamber having a hot plate, a decane coupling agent was applied to the organic polymer film under the following conditions. 100 parts by mass of a decane coupling agent (KBM-903: 3-aminopropyltrimethoxydecane) manufactured by Shin-Etsu Chemical Co., Ltd. was filled in a shallow pan and placed on a hot plate. At this time, the temperature of the hot plate was 25 °C. Then, the organic polymer film of 350 mm × 490 mm was fixed to the frame of SUS and kept vertical in a place separated from the liquid surface of the decane coupling agent by 100 mm or more in the horizontal direction, and the vacuum chamber was closed, and evacuation and nitrogen were performed several times. The introduction is repeated until the oxygen concentration at atmospheric pressure becomes 0.1% or less, and then the pressure in the chamber is reduced to 3 × 10 -1 Pa, and the temperature of the hot plate is raised to 60 ° C, and the temperature is kept for 10 minutes, and the vaporization of the decane coupling agent is carried out. After exposure, the temperature of the hot plate is lowered, and the clean dry nitrogen gas is gently introduced into the vacuum chamber from four places and returned to atmospheric pressure, and the organic polymer film fixed to the frame is taken out and placed in a clean environment together with the frame of SUS. 100 ° C heating plate. Due to the thickness of the SUS frame, the organic polymer film is not directly heated in contact with the heating plate. The heat treatment was performed for about 3 minutes to obtain an organic polymer film S1 having a decane coupling agent layer formed on both surfaces of the organic polymer film.

<塗布例2> 使用放置有機系高分子膜之真空室與使矽烷偶聯劑揮發之裝置,依以下之條件於有機系高分子膜形成矽烷偶聯劑層。有機系高分子膜預先在單面貼附保護膜。並且將該已貼附保護膜之350mm×490mm之有機系高分子膜固定於SUS的框,保持垂直並設置於真空室內。之後關閉真空室,將真空室內減壓至-0.099MPa。之後實施數次氮氣導入與抽真空,重複抽真空及氮氣導入直到於大氣壓之氧濃度成為0.1%以下。將真空室內抽真空後,於邊控制矽烷偶聯劑液溫度邊對於矽烷偶聯劑液面吹送載流氣體的狀態,將矽烷偶聯劑(信越化學工業(股)公司製「KBM-903」:3-胺基丙基三甲氧基矽烷)加入產生矽烷偶聯劑蒸氣之裝置,調溫至30℃後流通純度99.9%以上之氮氣。將含有產生之矽烷偶聯劑的氮氣通過調溫成25℃之配管導入到真空室內直到大約成為大氣壓(真空度成為-0.009MPa)為止,並保持20分鐘。之後將真空室內再次抽真空後,導入氮氣並回復到大氣壓後,將有機系高分子膜從真空室取出,剝除保護膜,於100℃之加熱板進行約3分鐘的熱處理,獲得於有機系高分子膜之單面疊層有矽烷偶聯劑之有機系高分子膜S2。該真空室係設置於調溫成室溫25℃之室內。<Coating Example 2> Using a vacuum chamber in which an organic polymer film was placed and a device for volatilizing a decane coupling agent, a decane coupling agent layer was formed on the organic polymer film under the following conditions. The organic polymer film is attached with a protective film on one side in advance. Further, a 350 mm × 490 mm organic polymer film to which a protective film was attached was fixed to a frame of SUS, and was placed vertically in a vacuum chamber. Thereafter, the vacuum chamber was closed, and the vacuum chamber was depressurized to -0.099 MPa. Thereafter, nitrogen gas introduction and evacuation were carried out several times, and evacuation and nitrogen gas introduction were repeated until the oxygen concentration at atmospheric pressure became 0.1% or less. After vacuuming the inside of the vacuum chamber, the state of the silane coupling agent liquid was controlled while the carrier gas was blown to the liquid surface of the decane coupling agent, and the decane coupling agent (KBM-903, manufactured by Shin-Etsu Chemical Co., Ltd.) was used. : 3-Aminopropyltrimethoxydecane) is added to a device for generating a vapor of a decane coupling agent, and after passing through a temperature adjustment to 30 ° C, a nitrogen gas having a purity of 99.9% or more is passed. The nitrogen gas containing the produced decane coupling agent was introduced into the vacuum chamber through a pipe adjusted to 25 ° C until it reached atmospheric pressure (the degree of vacuum was -0.009 MPa), and it was kept for 20 minutes. After that, the vacuum chamber was evacuated again, and after introducing nitrogen gas and returning to atmospheric pressure, the organic polymer film was taken out from the vacuum chamber, the protective film was peeled off, and heat treatment was performed on a hot plate at 100 ° C for about 3 minutes to obtain an organic system. An organic polymer film S2 having a decane coupling agent is laminated on one side of the polymer film. The vacuum chamber was placed in a room that was tempered to a room temperature of 25 ° C.

<塗布例3> 使用放置有機系高分子膜之真空室與使矽烷偶聯劑揮發之裝置,依以下之條件於有機系高分子膜形成矽烷偶聯劑層。預先於有機系高分子膜單面貼附保護膜。並且將該已貼附保護膜之350mm×490mm之有機系高分子膜固定於SUS的框,保持垂直並設置於真空室內。之後關閉真空室,將真空室內減壓至-0.099MPa。之後實施數次氮氣導入及抽真空,重複抽真空及氮氣導入直到於大氣壓之氧濃度成為0.1%以下。將真空室內抽真空後,邊控制矽烷偶聯劑液溫度,邊於藉由將氣體導入管配置成前端設置於矽烷偶聯劑液中使容易以多孔質陶瓷產生氣泡並將載流氣體吹送到液中以產生矽烷偶聯劑蒸氣的裝置中加入矽烷偶聯劑(信越化學工業(股)公司製「KBM-903」:3-胺基丙基三甲氧基矽烷),調溫成20℃後流通純度99.9%以上之氮氣。將含有產生之矽烷偶聯劑的氮氣通過調溫成25℃之配管導入到真空室內直到真空度成為+0.009MPa,將排氣口打開一次後關閉,成為大約大氣壓並保持20分鐘。之後將真空室內再次抽真空後導入氮氣,回復到大氣壓後將有機系高分子膜從真空室取出,剝除保護膜,於100℃之加熱板進行約3分鐘的熱處理,獲得於有機系高分子膜之單面疊層有矽烷偶聯劑之有機系高分子膜S3。該真空室係設置於調溫成室溫25℃之室內。<Coating Example 3> Using a vacuum chamber in which an organic polymer film was placed and a device for volatilizing a decane coupling agent, a decane coupling agent layer was formed on the organic polymer film under the following conditions. A protective film is attached to one side of the organic polymer film in advance. Further, a 350 mm × 490 mm organic polymer film to which a protective film was attached was fixed to a frame of SUS, and was placed vertically in a vacuum chamber. Thereafter, the vacuum chamber was closed, and the vacuum chamber was depressurized to -0.099 MPa. Thereafter, nitrogen gas introduction and evacuation were carried out several times, and evacuation and nitrogen gas introduction were repeated until the oxygen concentration at atmospheric pressure became 0.1% or less. After evacuating the vacuum chamber, while controlling the temperature of the decane coupling agent liquid, it is easy to generate bubbles in the porous ceramic and blow the carrier gas by arranging the gas introduction tube to be disposed at the tip end in the decane coupling agent liquid. A decane coupling agent ("KBM-903" manufactured by Shin-Etsu Chemical Co., Ltd.: 3-aminopropyltrimethoxydecane) was added to the apparatus to generate a decane coupling agent vapor, and the temperature was adjusted to 20 ° C. Nitrogen gas having a purity of 99.9% or more is passed. The nitrogen gas containing the produced decane coupling agent was introduced into the vacuum chamber through a pipe adjusted to 25 ° C until the degree of vacuum became +0.009 MPa, and the exhaust port was opened once and then closed, and was brought to about atmospheric pressure for 20 minutes. After that, the vacuum chamber was evacuated again, and then nitrogen gas was introduced. After returning to atmospheric pressure, the organic polymer film was taken out from the vacuum chamber, the protective film was peeled off, and heat treatment was performed on a hot plate at 100 ° C for about 3 minutes to obtain an organic polymer. An organic polymer film S3 having a decane coupling agent is laminated on one side of the film. The vacuum chamber was placed in a room that was tempered to a room temperature of 25 ° C.

<塗布例4> 使用放置有機系高分子膜之真空室與使矽烷偶聯劑揮發之裝置,依以下之條件於有機系高分子膜形成矽烷偶聯劑層。預先於有機系高分子膜單面貼附保護膜。並且將該已貼附保護膜之350mm×490mm之有機系高分子膜固定於SUS的框,保持垂直並設置在真空室內。之後關閉真空室,將真空室內減壓至-0.099MPa。之後進行數次氮氣導入與抽真空,重複抽真空及氮氣導入直到於大氣壓之氧濃度成為0.1%以下。將真空室內抽真空後,邊控制矽烷偶聯劑液溫度,邊於藉由將氣體導入管配置成前端設置於矽烷偶聯劑液中使容易以多孔質陶瓷產生氣泡並將載流氣體吹送到液中以產生矽烷偶聯劑蒸氣的裝置中加入矽烷偶聯劑(信越化學工業(股)公司製「KBM-903」:3-胺基丙基三甲氧基矽烷),調溫成20℃後流通純度99.9%以上之氮氣。將含有產生之矽烷偶聯劑的氮氣通過調溫成25℃之配管導入到真空室內,直到真空度成為-0.09MPa並保持5分鐘。之後將真空室內再次抽真空後導入含有矽烷偶聯劑之氮氣,直到真空度成為-0.09MPa並保持5分鐘。重複該操作4次,進行40分鐘的塗布,導入氮氣並回復到大氣壓後,將有機系高分子膜從真空室取出,剝除保護膜,於100℃之加熱板進行約3分鐘的熱處理,獲得於有機系高分子膜之單面疊層有矽烷偶聯劑之有機系高分子膜S4。該真空室係設置在調溫成室溫25℃之室內。<Coating Example 4> Using a vacuum chamber in which an organic polymer film was placed and a device for volatilizing a decane coupling agent, a decane coupling agent layer was formed on the organic polymer film under the following conditions. A protective film is attached to one side of the organic polymer film in advance. Further, a 350 mm × 490 mm organic polymer film to which a protective film was attached was fixed to a frame of SUS, and was placed vertically in a vacuum chamber. Thereafter, the vacuum chamber was closed, and the vacuum chamber was depressurized to -0.099 MPa. Thereafter, nitrogen gas introduction and evacuation were performed several times, and evacuation and nitrogen gas introduction were repeated until the oxygen concentration at atmospheric pressure became 0.1% or less. After evacuating the vacuum chamber, while controlling the temperature of the decane coupling agent liquid, it is easy to generate bubbles in the porous ceramic and blow the carrier gas by arranging the gas introduction tube to be disposed at the tip end in the decane coupling agent liquid. A decane coupling agent ("KBM-903" manufactured by Shin-Etsu Chemical Co., Ltd.: 3-aminopropyltrimethoxydecane) was added to the apparatus to generate a decane coupling agent vapor, and the temperature was adjusted to 20 ° C. Nitrogen gas having a purity of 99.9% or more is passed. Nitrogen containing the produced decane coupling agent was introduced into the vacuum chamber through a pipe adjusted to 25 ° C until the degree of vacuum became -0.09 MPa and held for 5 minutes. Thereafter, the vacuum chamber was again evacuated, and then nitrogen gas containing a decane coupling agent was introduced until the degree of vacuum became -0.09 MPa and held for 5 minutes. This operation was repeated four times, and coating was carried out for 40 minutes. After introducing nitrogen gas and returning to atmospheric pressure, the organic polymer film was taken out from the vacuum chamber, the protective film was peeled off, and heat treatment was performed on a hot plate at 100 ° C for about 3 minutes to obtain a heat treatment. An organic polymer film S4 having a decane coupling agent is laminated on one surface of the organic polymer film. The vacuum chamber was placed in a room that was tempered to a room temperature of 25 °C.

<塗布例5> 在有機系高分子膜之貼附側為相反側設置SUS板,並設定電位為+3kV,除此以外,實施塗布例3之操作,獲得於有機系高分子膜之單面疊層有矽烷偶聯劑之有機系高分子膜S5。 <塗布例6> 將使用之氣體從純度99.9%以上之氮氣變更為潔淨的乾燥空氣,除此以外,實施塗布例3之操作,獲得於有機系高分子膜之單面疊層有矽烷偶聯劑之有機系高分子膜S6。 <塗布例7> 將已放入有機系高分子膜之真空室重複抽真空與氮氣導入直到於大氣壓之氧濃度成為0.1%以下後,另外導入已調整成25℃60%RH之潔淨的乾燥空氣直到-0.19MPa,之後將含有產生之矽烷偶聯劑的潔淨的乾燥空氣通過調溫成25℃之配管導入到真空室內直到真空度成為+0.009MPa,將排氣口打開一次後關閉,成為大約大氣壓並保持20分鐘。除前述以外,實施塗布例3之操作,獲得於有機系高分子膜之單面疊層有矽烷偶聯劑之有機系高分子膜S7。(Coating Example 5) The SUS plate was placed on the side opposite to the side on which the organic polymer film was attached, and the potential was set to +3 kV, and the operation of the coating example 3 was carried out to obtain a single-sided stack of the organic polymer film. The layer is an organic polymer film S5 having a decane coupling agent. (Coating Example 6) The operation of the coating example 3 was carried out except that the gas to be used was changed from a nitrogen gas having a purity of 99.9% or more to a clean dry air, and a decane coupling was obtained on one side of the organic polymer film. The organic polymer film S6 of the agent. <Coating Example 7> The vacuum chamber in which the organic polymer film was placed was repeatedly evacuated and introduced into the nitrogen gas until the oxygen concentration at atmospheric pressure became 0.1% or less, and then clean dry air adjusted to 25° C. and 60% RH was introduced. After -0.19 MPa, the clean dry air containing the produced decane coupling agent was introduced into the vacuum chamber through a pipe adjusted to 25 ° C until the degree of vacuum became +0.009 MPa, and the exhaust port was opened once and then closed. Atmospheric pressure for 20 minutes. In addition to the above, the operation of the coating example 3 was carried out to obtain an organic polymer film S7 having a decane coupling agent laminated on one surface of the organic polymer film.

<塗布例8> 將手套箱內進行乾燥氮氣置換後,邊流通少量乾燥氮氣,邊將矽烷偶聯劑(信越化學工業(股)公司製「KBM-903」:3-胺基丙基三甲氧基矽烷)0.5質量份、異丙醇99.5質量份於潔淨的玻璃容器內攪拌混合而製成矽烷偶聯劑溶液。另一方面,將370mm×470mm、厚度0.7mm之液晶用玻璃板放置在Japan create公司製旋塗機,首先於玻璃中央滴加異丙醇50ml,並以500rpm甩動而實施洗淨,然後,於玻璃板中央滴加之前準備的矽烷偶聯劑溶液約30ml,以500rpm旋轉10秒,然後將轉速提高至1500rpm並旋轉20秒,甩脫矽烷偶聯劑溶液。然後從已停止之旋塗機取出玻璃板,在潔淨環境下使矽烷偶聯劑塗布面朝上放置於100℃之加熱板,進行約3分鐘的熱處理,獲得於有機系高分子膜之單面疊層有矽烷偶聯劑之有機系高分子膜S8。 <塗布例9> 將含有矽烷偶聯劑之氮氣導入到真空室內的時間設定為60分鐘,除此以外,實施塗布例2之操作,獲得於有機系高分子膜之單面疊層有矽烷偶聯劑之有機系高分子膜S9。<Coating Example 8> After the dry nitrogen gas was replaced in the glove box, a small amount of dry nitrogen gas was passed, and a decane coupling agent (KBM-903) manufactured by Shin-Etsu Chemical Co., Ltd.: 3-aminopropyltrimethoxy 0.5 parts by mass of decane) and 99.5 parts by mass of isopropyl alcohol were stirred and mixed in a clean glass vessel to prepare a decane coupling agent solution. On the other hand, a glass plate for liquid crystal of 370 mm × 470 mm and a thickness of 0.7 mm was placed in a spin coater manufactured by Japan Create Co., Ltd., first, 50 ml of isopropyl alcohol was added dropwise to the center of the glass, and the mixture was washed at 500 rpm, and then washed. Approximately 30 ml of the previously prepared decane coupling agent solution was added dropwise to the center of the glass plate, rotated at 500 rpm for 10 seconds, and then the rotation speed was increased to 1500 rpm and rotated for 20 seconds to remove the decane coupling agent solution. Then, the glass plate was taken out from the stopped spin coater, and the decane coupling agent was applied to the hot plate at 100 ° C in a clean environment, and heat treatment was performed for about 3 minutes to obtain a single side of the organic polymer film. An organic polymer film S8 having a decane coupling agent laminated thereon. (Coating Example 9) The operation of the coating example 2 was carried out except that the time for introducing the nitrogen gas containing the decane coupling agent into the vacuum chamber was set to 60 minutes, and the decane couple was laminated on one side of the organic polymer film. The organic polymer film S9 of the crosslinking agent.

<塗布例10> 將放置矽烷偶聯劑之加熱板的溫度設定為60℃,時間設定為60分鐘,除此以外,實施塗布例1之操作,獲得於有機系高分子膜之兩面疊層有矽烷偶聯劑之有機系高分子膜S10。 <塗布例11> 將含有矽烷偶聯劑之氮氣導入到真空室內的時間設定為60分鐘,除此以外,實施塗布例4之操作,獲得於有機系高分子膜之單面疊層有矽烷偶聯劑之有機系高分子膜S11。 <塗布例12> 將含有矽烷偶聯劑之氮氣導入到真空室內的時間設定為60分鐘,除此以外,實施塗布例3之操作,獲得於有機系高分子膜之單面疊層有矽烷偶聯劑之有機系高分子膜S12。In the coating example 10, the temperature of the hot plate on which the decane coupling agent was placed was set to 60 ° C, and the time was set to 60 minutes, and the operation of the coating example 1 was carried out to obtain a laminate on both sides of the organic polymer film. An organic polymer film S10 of a decane coupling agent. (Coating Example 11) The operation of the coating example 4 was carried out except that the time for introducing the nitrogen gas containing the decane coupling agent into the vacuum chamber was set to 60 minutes, and the decane couple was laminated on one side of the organic polymer film. The organic polymer film S11 of the crosslinking agent. (Coating Example 12) The operation of the coating example 3 was carried out except that the time for introducing the nitrogen gas containing the decane coupling agent into the vacuum chamber was set to 60 minutes, and the decane couple was laminated on one side of the organic polymer film. The organic polymer film S12 of the crosslinking agent.

<塗布例13> 在有機系高分子膜之貼附側為相反側設置熔接有水冷管的Cu板,將有機系高分子膜冷卻至5℃後,將使用之氣體從純度99.9%以上之氮氣變更為潔淨的乾燥空氣,此外,將含有矽烷偶聯劑之潔淨的乾燥空氣導入到真空室內的時間設定為60分鐘,除此以外,實施塗布例3之操作,獲得於有機系高分子膜之單面疊層有矽烷偶聯劑之有機系高分子膜S13。<Coating Example 13> A Cu plate to which a water-cooled tube is welded is provided on the side opposite to the side on which the organic polymer film is attached, and the organic polymer film is cooled to 5° C., and the gas to be used is purged with nitrogen having a purity of 99.9% or more. The operation of the coating example 3 was carried out to obtain an organic polymer film, except that the time of introducing the clean dry air containing the decane coupling agent into the vacuum chamber was set to 60 minutes. An organic polymer film S13 having a decane coupling agent laminated on one side.

【表4】 表中SCA意指矽烷偶聯劑,CDA意指潔淨的乾燥空氣。【Table 4】 In the table, SCA means a decane coupling agent, and CDA means clean dry air.

(實施例1~18、比較例1~6) 於獲得之附矽烷偶聯劑層之有機系高分子膜的矽烷偶聯劑層側,利用塗抹器塗布信越化學工業(股)公司製的二液硬化型聚矽氧樹脂SIM-260,並進行150℃30分鐘的熱處理,獲得如表5所示之疊層體。此外,主劑與硬化劑之比率設定為質量比10/1。藉由以下塗布條件改變聚矽氧樹脂層之厚度,獲得如表5所示之疊層體。此外,表5中SC係指矽烷偶聯劑。(Examples 1 to 18, and Comparative Examples 1 to 6) On the side of the decane coupling agent layer of the organic polymer film of the obtained decane coupling agent layer, the second manufactured by Shin-Etsu Chemical Co., Ltd. was applied by an applicator. The liquid-hardened polyoxyloxy resin SIM-260 was heat-treated at 150 ° C for 30 minutes to obtain a laminate as shown in Table 5. Further, the ratio of the main agent to the hardener was set to a mass ratio of 10/1. The thickness of the polyoxyalkylene resin layer was changed by the following coating conditions to obtain a laminate as shown in Table 5. Further, in Table 5, SC means a decane coupling agent.

【表5】 【table 5】

《膜之活化處理例》 使用膜No.1~4,於該膜之不含滑動材側(A2層面或B2層面)使用真空電漿處理實施活化處理,獲得活化處理膜。真空電漿處理係使用平行平板型電極之RIE模式RF電漿所為之處理,於真空室內,以使N2 氣及Ar氣流量成為20SCCM:10SCCM的方式,分別以質流控制器進行流量控制並導入。藉由導入13.56MHz之高頻電力,進行2分鐘的處理。<<Example of activation treatment of film>> Using the film Nos. 1 to 4, activation treatment was carried out by vacuum plasma treatment on the side of the film containing no sliding material (A2 layer or B2 layer) to obtain an activation treatment film. The vacuum plasma processing is performed by using the RIE mode RF plasma of the parallel plate type electrode, and the flow control is performed by the mass flow controller in the vacuum chamber so that the N 2 gas and the Ar gas flow rate are 20 SCCM: 10 SCCM. Import. The process was performed for 2 minutes by introducing high frequency power of 13.56 MHz.

(實施例19~36、比較例7~12) 使用膜之活化處理例所獲得之對應獲得的活化處理膜,除此以外,和實施例1~23、比較例1同樣進行操作。結果顯示於表6中。(Examples 19 to 36 and Comparative Examples 7 to 12) Operations were carried out in the same manner as in Examples 1 to 23 and Comparative Example 1, except that the activation treatment film obtained in accordance with the activation treatment example of the film was used. The results are shown in Table 6.

【表6】 [產業上利用性][Table 6] [Industrial use]

如上所述,使用本發明之塗布方法時,可獲得外觀品質非常良好的有機系高分子膜與聚矽氧樹脂之疊層體。如此之外觀品質良好的疊層體可用作如精密壓製之緩衝材之支撐材料、高頻電路基板等電子零件用基板、需高度重疊精度之熱定影圖像用之定影機、圖像輸送帶等,在資訊電子領域、精密機械加工領域中對於產業界的貢獻大。As described above, when the coating method of the present invention is used, a laminate of an organic polymer film and a polyoxymethylene resin having excellent appearance quality can be obtained. Such a laminate having a good appearance quality can be used as a support material for a cushion material for precision pressing, a substrate for an electronic component such as a high-frequency circuit substrate, a fixing machine for a heat-fixed image requiring high overlapping precision, and an image conveyance belt. In addition, in the field of information electronics and precision machining, the contribution to the industry is great.

1‧‧‧高分子膜
2‧‧‧矽烷偶聯劑
1‧‧‧ polymer film
2‧‧‧ decane coupling agent

【圖1】係利用氣相法將矽烷偶聯劑塗布於有機系高分子膜之裝置的概念圖。Fig. 1 is a conceptual diagram of an apparatus for applying a decane coupling agent to an organic polymer film by a vapor phase method.

no

Claims (12)

一種疊層體,係於有機系高分子膜之至少單面具有矽烷偶聯劑層,並介隔該矽烷偶聯劑層具有聚矽氧樹脂層, 其特徵為: 該聚矽氧樹脂層與該高分子膜之剝離強度為0.3N/cm以上、15N/cm以下。A laminate having a decane coupling agent layer on at least one side of an organic polymer film and having a polyoxyalkylene resin layer interposed therebetween, wherein the polyoxyalkylene resin layer is The peeling strength of the polymer film is 0.3 N/cm or more and 15 N/cm or less. 如申請專利範圍第1項之疊層體,其中,該矽烷偶聯劑層中長徑10μm以上之含矽之異物的個數為2000個/m2 以下。The laminate of the first aspect of the invention, wherein the number of the foreign matter containing ruthenium having a long diameter of 10 μm or more in the decane coupling agent layer is 2,000/m 2 or less. 如申請專利範圍第1至2項中任一項之疊層體,其中,該矽烷偶聯劑層之厚度為1~500nm之範圍。The laminate according to any one of claims 1 to 2, wherein the decane coupling agent layer has a thickness of from 1 to 500 nm. 如申請專利範圍第1至2項中任一項之疊層體,其中,該疊層體之面積為1000cm2 以上。The laminate according to any one of claims 1 to 2, wherein the laminate has an area of 1000 cm 2 or more. 如申請專利範圍第1至2項中任一項之疊層體,其中,該有機系高分子膜為聚醯亞胺膜。The laminate according to any one of claims 1 to 2, wherein the organic polymer film is a polyimide film. 一種疊層體之製造方法,係製造如申請專利範圍第1至5項中任一項之疊層體, 其特徵為: 包含使有機系高分子膜暴露於已氣化之矽烷偶聯劑以形成矽烷偶聯劑層之步驟, 且該步驟中不使用真空。A method of manufacturing a laminate according to any one of claims 1 to 5, which comprises: exposing an organic polymer film to a gasified decane coupling agent; The step of forming a layer of a decane coupling agent, and no vacuum is used in this step. 如申請專利範圍第6項之疊層體之製造方法,包含以下步驟: 使有機系高分子膜暴露於利用鼓泡方式氣化之矽烷偶聯劑,以形成矽烷偶聯劑層。The method for producing a laminate according to claim 6, comprising the steps of: exposing the organic polymer film to a decane coupling agent vaporized by bubbling to form a decane coupling agent layer. 如申請專利範圍第7項之疊層體之製造方法,其中,在該使有機系高分子膜暴露於已氣化之矽烷偶聯劑以形成矽烷偶聯劑層之步驟中,使用露點0℃以下之乾燥氣體作為載流氣體。The method for producing a laminate according to claim 7, wherein in the step of exposing the organic polymer film to the vaporized decane coupling agent to form a decane coupling agent layer, a dew point of 0 ° C is used. The following dry gas acts as a carrier gas. 如申請專利範圍第6至8項中任一項之疊層體之製造方法,其中,在該使有機系高分子膜暴露於已氣化之矽烷偶聯劑以形成矽烷偶聯劑層之步驟中,使露點5℃以上之氣體共存。The method for producing a laminate according to any one of claims 6 to 8, wherein the step of exposing the organic polymer film to the vaporized decane coupling agent to form a decane coupling agent layer In the middle, a gas having a dew point of 5 ° C or more is allowed to coexist. 如申請專利範圍第6至8項中任一項之疊層體之製造方法,其中,在該使有機系高分子膜暴露於已氣化之矽烷偶聯劑以形成矽烷偶聯劑層之步驟中,對於該有機系高分子膜施加電場。The method for producing a laminate according to any one of claims 6 to 8, wherein the step of exposing the organic polymer film to the vaporized decane coupling agent to form a decane coupling agent layer An electric field is applied to the organic polymer film. 如申請專利範圍第6至8項中任一項之疊層體之製造方法,其中,包括在矽烷偶聯劑層形成前,對於有機系高分子膜之矽烷偶聯劑層形成面實施活化處理之步驟。The method for producing a laminate according to any one of claims 6 to 8, wherein the activation treatment is performed on the surface of the decane coupling agent layer of the organic polymer film before the formation of the decane coupling agent layer. The steps. 如申請專利範圍第6至8項中任一項之疊層體之製造方法,其中,在該使有機系高分子膜暴露於已氣化之矽烷偶聯劑以形成矽烷偶聯劑層之步驟中,形成之矽烷偶聯劑層表面之3維表面粗糙度(Sa)為5.0nm以下。The method for producing a laminate according to any one of claims 6 to 8, wherein the step of exposing the organic polymer film to the vaporized decane coupling agent to form a decane coupling agent layer The three-dimensional surface roughness (Sa) of the surface of the decane coupling agent layer formed was 5.0 nm or less.
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