TW201707833A - Optically processing apparatus capable of keeping the flatness of the workpiece in an optically processing apparatus of making a workpiece move to be processed - Google Patents

Abstract

A subject of this invention is that in an optically processing apparatus of making a workpiece move to be processed, the flatness of the workpiece may be kept. A solution of this invention is an optically processing apparatus, comprising a moving means, which makes the workpiece 35 carried on a table surface of a processing table component 53 move; and optically irradiating means 1, 2, which irradiate a portion of the workpiece, which is carried on the table surface of the processing table component, with processing light L. This invention is characterized in having attaching means 57, 58, which make the workpiece attached on the table surface by means of attraction force of attraction holes formed to the table surface of the processing table; and an attachment control means 40, which controls the attaching means to make the workpiece attached on the table surface during predetermined attraction period in moving the workpiece by means of the moving means.

Description

Optical processing device

The present invention relates to an optical processing apparatus.

In the conventional optical processing apparatus, the object to be processed is conveyed, and the processed portion of the object to be processed is relatively moved in the processing region of the optical processing device, and the object to be processed is processed.

For example, Patent Document 1 discloses a laser processing apparatus that irradiates a workpiece with a laser beam (machining light) from a light source, and performs patterning or cutting of an ITO film on a workpiece by a workpiece formed of a thin metal plate. . In the laser processing apparatus, the workpiece is held in the workpiece supply portion in a state of being wound into a roll, and the workpiece is pulled out from the workpiece supply portion to move the processed portion of the workpiece to the processing region of the laser processing apparatus. Then, the laser beam from the light source is scanned in a two-dimensional direction by an electron microscope (optical scanning means), and the processed portion of the workpiece in the processing region is processed. After the processing, the workpiece is pulled out, and the next processed portion is moved to the processing area of the laser processing apparatus to process the next processed portion.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2003-205384

When the object to be processed is displaced in the optical axis direction of the processed light that is applied to the object to be processed, the focus of the processed light on the object to be processed is changed, and the image processing position is not stable. Processing accuracy. Therefore, it is necessary to ensure the flatness of the object to be processed on the processing table member such as the stage for positioning the object to be processed in the optical axis direction.

However, an optical processing apparatus that moves the object to be processed at any time On the other hand, it is difficult to maintain the flatness of the object to be processed.

In order to solve the above problems, an optical processing apparatus according to the present invention includes: a moving means for moving an object to be placed on a surface of a processing table member; and an optical irradiation means for placing the pair of the processing table member The processed object portion is irradiated with the processed light, and is characterized in that: the adsorption means is configured to adsorb the object to be processed by the suction force from the suction hole formed on the surface of the processing table member; The adsorption control means controls the adsorption means to adsorb the object to be applied to the mesa during a predetermined suction period in which the object to be processed is moved by the moving means.

According to the present invention, the flatness of the object to be processed can be maintained in the optical processing apparatus that moves the object to be processed.

1‧‧‧Laser output

2‧‧‧Laser Scanning Department

3‧‧‧Workpiece conveying department

4‧‧‧Control Department

10‧‧‧Laser driver

11‧‧‧Laser oscillator

12‧‧‧ Beam expander

14, 15, 16‧‧ ‧ mirror

20‧‧‧Electric scanner control unit

21‧‧‧Electric scanner

21a‧‧‧Electronic mirror

21b‧‧‧stepper motor

22‧‧‧fθ lens

23‧‧‧Monitoring camera

24‧‧‧Main Scan Control Department

25‧‧‧Carriage

26‧‧‧Stepper motor

27‧‧‧Timed belt

27a‧‧‧Drive pulley

27b‧‧‧driven pulley

28‧‧‧Linear encoder

29‧‧‧Linear guide

30‧‧‧Sub Scan Control Department

31‧‧‧Alignment motor

31a‧‧‧Timed belt

32‧‧‧Alignment roller pair

32a‧‧‧Drive roller

32b‧‧‧ driven roller

33‧‧‧Monitoring camera

34‧‧‧Monitoring camera

35‧‧‧Workpiece

36, 36-1, 36-2‧‧‧ processing area

37‧‧‧ alignment mark

38‧‧‧Alignment brake

39‧‧‧ lens

40‧‧‧Control PC

50‧‧‧Volume Supply Department

51‧‧‧Supply reel

52‧‧‧Inlet guide

53‧‧‧Processing table

54‧‧‧Cutter

55‧‧‧Tray

56‧‧‧Roll-out motor

57‧‧‧The Cavity Department

58‧‧‧Sucking pump

59‧‧‧Rolling powder clutch

60‧‧‧Volume discharge department

62‧‧‧Winding motor

63‧‧‧Rolling powder clutch

64‧‧‧cleaning roller

65‧‧‧Adhesive roller

66‧‧‧ laminated rolls

67‧‧‧Reel reel

70‧‧‧Pulse Engine Division

71‧‧‧ Output fiber

72‧‧‧ Output head

73‧‧‧Pulse generator

74‧‧‧ Seed LD

75‧‧‧Isolator

76‧‧‧Laser LD

77‧‧‧ Coupler

78‧‧‧Fiber

79‧‧‧Bandpass filter

80‧‧‧Laser LD

81‧‧‧ Coupler

82‧‧‧Fiber

83‧‧‧ collimating optical system

91‧‧‧Multi-mirror scanner

91a‧‧‧Multiface mirror

91b‧‧‧Motor

92‧‧‧ lens

93‧‧‧ Optical Sensor

L‧‧‧Laser light

Fig. 1 is a schematic view showing the configuration of a main portion of a laser patterning device of an embodiment.

Fig. 2 is a view showing a configuration example of a laser oscillator of the laser patterning device.

Fig. 3 is a schematic view showing a modification of the optical scanning means of the laser patterning device.

Fig. 4 is a schematic view showing a configuration example of a workpiece conveying portion of the laser patterning device.

Fig. 5 is a plan view of the workpiece conveying portion.

Fig. 6 is a schematic view showing another structure of the workpiece conveying portion of the laser patterning device.

Fig. 7 is an explanatory view showing a light path of the laser light when the carriages of the laser patterning device are respectively located at different positions in the main scanning direction.

Fig. 8 is a flow chart showing an example of a patterning process of the laser patterning device of the embodiment.

Fig. 9 is a flow chart showing an example of the flow of the workpiece feeding process of the embodiment.

Fig. 10 is an explanatory view showing a processing sequence when the processed area on the workpiece is divided into 12 pieces to be processed and processed in order.

Fig. 11 is an explanatory view showing an example of a wiring pattern to be connected between the workpieces to be processed (processed portions).

Hereinafter, an embodiment in which the optical processing apparatus according to the present invention is applied to a laser patterning apparatus will be described.

The object to be processed in the laser patterning apparatus of the present embodiment is a workpiece having an ITO thin film formed on a substrate, and the ITO thin film is partially removed by irradiating the ITO thin film on the workpiece with laser light (processed light). Patterned ITO film. However, the optical processing apparatus according to the present invention is not limited to the laser patterning apparatus according to the present embodiment, and may be applied to an apparatus for performing other patterning processing, an apparatus for performing other processing such as cutting processing, and a non-laser light. It is used as a device for processing light and processing.

Fig. 1 is a schematic view showing the configuration of a main portion of a laser patterning device of the present embodiment.

The laser patterning device of the present embodiment includes a laser output unit 1, a laser scanning unit 2, a workpiece transport unit 3, and a control unit 4.

The laser output unit 1 has a laser oscillator 11 as a light source, and a beam expander 12 that expands the beam diameter of the laser beam L as the processed light output from the laser oscillator 11.

The laser scanning unit 2 includes an electric scanner 21 that rotates the two electron microscopes 21a for scanning the X-axis direction and the Y-axis direction of the reflected laser light L by the stepping motor 21b in the X-axis direction and the Y-axis. An optical scanning means for scanning the laser beam L in the direction, and an fθ lens 22 for collecting the laser light L scanned by the electric scanner 21 on the surface of the workpiece 35 (the surface to be processed) or the interface between the substrate and the ITO film. A concentrating means of the interior (where the workpiece surface is only offset by a predetermined depth).

The laser oscillator 11 of the laser output unit 1 is controlled by the laser driver unit 10. Specifically, the laser driver unit 10 controls the light emission of the laser oscillator 11 in conjunction with the scanning operation of the electric scanner 21 of the laser scanning unit 2. The laser oscillator 11 can use, for example, a pulsed fiber laser which is pulse-oscillated by 100 [ns] or less which is less damaged by the influence of heat on the substrate, but other light sources can also be used.

Fig. 2 is a schematic view showing a configuration example of the laser oscillator 11 of the embodiment.

The laser oscillator 11 of the present embodiment is called a pulsed fiber laser of a MOPA (Master Oscillator Power Amplifier). The laser oscillator 11 includes: a pulse The engine unit 70 causes the seed LD 74 to be pulse-oscillated by the pulse generator 73 to generate seed light, and is amplified in multiple stages by the fiber amplifier; the output fiber 71 guides the laser light L output from the pulse engine unit 70; and the output head 72, which emits the laser light L by forming a substantially parallel beam by the collimating optical system 83 as a parallel beaming means. In the present embodiment, only the output head portion 72 is provided on the laser output unit 1.

The pulse engine unit 70 includes a preamplifier unit having an optical fiber 78, a laser LD 76, and a coupler 77, and a main amplifier unit having an optical fiber 82, a laser LD 80, and a coupler 81. The optical fiber uses a double-clad structure in which a rare earth element is doped in the core, and by absorbing the laser light from the laser LD 76, it is reflected and reflected between the mirrors disposed at the output end and the incident end of the optical fiber to reach the laser oscillation. Reference numeral 75 in Fig. 2 denotes an isolator for blocking reverse light, and reference numeral 79 in Fig. 2 denotes a band pass filter for removing ASE light.

In the present embodiment, the wavelength of the seed LD 74 is 1064 [nm] of near-infrared light, but it may be based on the workpiece material of 532 [nm] of the second harmonic and 355 [nm] of the third harmonic. Choose the appropriate wavelength. Further, the laser oscillator 11 may use a solid laser such as a YVO ₄ laser that irradiates laser light to a laser medium composed of yttrium vanadate crystal to generate laser oscillation.

Each of the stepping motors 21b of the electric scanner 21 of the laser scanning unit 2 is controlled by an electric scanner control unit 20, and each of the stepping motors 21b is configured to scan the respective electron microscopes 21a for X-axis direction scanning and Y-axis direction scanning, respectively. Turn. The electric scanner control unit 20 controls the stepping motor 21b such that the angle of inclination of the reflecting surface of the electron microscope 21a (for the incident reflection surface) in accordance with the line segment element data (the line start point coordinate and the line end point coordinate) constituting the machining pattern. The inclination angle of the reflection surface of the optical axis of the laser light changes in a direction corresponding to the X-axis direction or a direction corresponding to the Y-axis direction. Thereby, the respective electron beams 21a can be rotated from the scanning start tilt angle to the scan end tilt angle in accordance with the X-Y coordinates of the start point and the end point of the line element.

Further, in the present embodiment, the X-axis direction scanning and the Y-axis direction scanning are both constituted by an electric scanner as an optical scanning means. However, the present invention is not limited thereto, and a well-known optical scanning means can be used. Further, the optical scanning means for scanning in the X-axis direction and the optical scanning means for scanning in the Y-axis direction may be optical scanning means having different structures. For example, as shown in Fig. 3, the scanning means for scanning in the Y-axis direction can use the electric scanner 21, and the scanning means for scanning in the X-axis direction can use the polygon mirror scanner 91 which rotates the polygon mirror 91a with the motor 91b. As shown in Figure 3, the X-axis direction The optical scanning control can be performed based on the light receiving timing, which receives the laser light L reflected by the polygon mirror 91a via the lens 92 via the optical sensor 93.

The laser scanning unit 2 is mounted on a carriage 25 that is movable in the main scanning direction (X-axis direction). The carriage 25 is attached to the timing belt 27 which is mounted on the drive pulley 27a and the driven pulley 27b. The timing belt 27 is moved by driving the stepping motor 26 connected to the driving pulley 27a, and the carriage 25 on the timing belt 27 is oriented in the main scanning direction along the linear guide 29 (refer to FIG. 4) extending in the main scanning direction. (X-axis direction) moves. The position of the main scanning direction of the carriage 25 can be detected based on the output signal (address signal) from the linear encoder 28. The stepping motor 26 is controlled by the main scanning control unit 24.

In the present embodiment, the moving means of the carriage 25 on which the laser scanning unit 2 is mounted is a moving means by a time-series belt. However, the present invention is not limited thereto, and a linearly movable means such as a linear frame may be used instead. It is also possible to move by moving it in a two-dimensional direction.

The workpiece transport unit 3 includes a registration roller pair 32 composed of a drive roller 32a and a driven roller 32b, and the drive roller 32a is driven by a registration motor 31 constituted by a stepping motor via a timing belt 31a. The registration motor 31 is controlled by the sub-scanning control unit 30, and can move the workpiece 35 held by the registration roller pair 32 to the target feeding position in the sub-scanning direction (Y-axis direction). Thereby, the processed portion on the workpiece is sequentially sent to the processing region 36 of the scanning range of the laser light L irradiated from the laser scanning portion 2.

Specifically, the workpiece transport unit 3 includes monitoring cameras 33 and 34 that capture alignment marks 37 (reference positions) formed on the surface of the workpiece in the vicinity of both ends in the main scanning direction of the workpiece 35. The sub-scanning control unit 30 sequentially feeds the image data output from the monitoring cameras 33 and 34 while the workpiece 35 is stepwise fed in the workpiece feeding direction B (sub-scanning direction) by the registration motor 31. Then, the alignment mark 37 is detected by pattern matching processing or the like, the workpiece movement amount to the target feeding position is calculated, and the registration motor 31 is controlled based on the calculated result to move the sub-scanning direction position of the workpiece 35 to the target feeding position. .

Fig. 4 is a schematic view showing a structural example of the workpiece conveying unit 3, and Fig. 5 is a plan view thereof.

The workpiece 35 of the present embodiment is held in a roll shape on the supply reel 51 in a roll supply portion 50 as a take-up holding portion, and the workpiece portion rolled up there is aligned along the inlet guide 52. The nip of the roller pair 32 is nipped, and is driven by the registration roller pair 32 to be set on the processing table 53 as a processing table member. The supply reel 51 is connected to the unwinding motor 56 composed of a DC motor via a winding-out particle clutch 59 as a transmission torque changing means, and is configured to be rotatable in a direction in which the workpiece 35 is wound by the driving force of the winding-out motor 56. drive.

The processing table 53 is formed with a light transmitting member that penetrates the laser light L. Thereby, damage of the processing light 53 by the laser light L can be suppressed, and the life of the processing stage 53 can be lengthened.

Further, an innumerable number of pores (suction holes) are formed in the surface (stage) of the processing table 53, and the air formed in the cavity portion 57 formed on the back surface of the processing table 53 is sucked by the suction pump 58 to adsorb the workpiece 35 to the processing table 53. The surface ensures the flatness of the workpiece 35 in the processing zone 36. In the present embodiment, when the workpiece 35 in the state of being adsorbed on the surface of the processing table 53 is processed, the registration roller pair 32 is prevented from rotating by the registration brake 38 composed of the electromagnetic brake serving as the braking means, thereby preventing the workpiece roller 32 from rotating. The workpiece 35 is moved by the registration roller pair 32. Thereby, the workpiece 35 can be prevented from moving by the registration roller pair 32 during the processing, and stable processing can be realized.

The processed workpiece is wound up in a roll shape on the take-up reel 67 and held in the roll discharge portion 60 as a take-up holding portion. The take-up reel 67 is connected to a take-up motor 62 composed of a DC motor via a take-up toner clutch 63 as a torque transmission means, and is configured to be rotatable in a direction in which the workpiece 35 is wound by the driving force of the take-up motor 62. drive.

In the present embodiment, the processed workpiece is configured such that the processed dust adhering to the surface thereof is removed by the pair of cleaning rollers 64, and then wound up on the take-up reel 67. The processed dust adsorbed on the cleaning roller 64 is transferred to the adhesive roller 65 and recovered. Further, in order to protect the surface of the workpiece after processing to prevent scratches such as abrasion, a laminated film is attached to the front surface of the processed workpiece 35, and then wound up on the take-up reel 67. The laminated film is taken up from the laminated roll 66 and taken up into the take-up reel 67 together with the processed workpiece.

Further, in the present embodiment, the processed workpiece is wound into a roll-to-roll roll-to-roll method, but as shown in Fig. 6, the processed workpiece may be sliced. The roll to sheet method of discharge. In the configuration exemplified in Fig. 6, the processed workpiece is cut into individual predetermined sizes by moving the cutter 54 in the main scanning direction, and is discharged to the tray 55.

The control unit 4 includes a unified management and control of the entire laser patterning device. Control system PC40. The control PC 40 is connected to the laser driver unit 10, the electric scanner control unit 20, the main scanning control unit 24, the sub-scanning control unit 30, and the like, and manages each state or controls the processing sequence.

The beam expander 12 of the laser output unit 1 is constituted by a lens composed of a plurality of sheets, and is configured such that the position of the lens 39 of the fθ lens 22 closest to the laser scanning unit 2 on the laser light path can be directed to the optical axis of the laser light. mobile. When the carriage on which the laser scanning unit 2 is mounted stops at the respective stop target positions in the main scanning direction, the position of the lens 39 is moved to finely adjust the condensing distance. That is, the beam expander 12 has a focusing function of finely adjusting the laser light L incident on the electric scanner 21 into a parallel beam.

In the present embodiment, when the scanning range of the laser light L to the workpiece 35, that is, the maximum length L in the X-axis direction and the Y-axis direction of the processing region 36, the focal length of the fθ lens 22 is f, the maximum of each electron microscope 21a is used. The inclination angle θ (for example, ±20°) is obtained by the following formula (1): L = f × θ (1)

As shown in the equation (1), the width of the processing region 36 is limited by the scanning range of the electric scanner 21 (the maximum inclination angle of the electron microscope 21a). Here, since the scanning range of the electric scanner 21 is larger, it is more difficult to appropriately condense on the workpiece 35, so that it is difficult to maintain the processing uniformity in the processing region 36. Therefore, it is also limited to enlarge the scanning range of the electric scanner 21, that is, the maximum inclination angle θ of the electron microscope 21a. Therefore, the scanning range of the electric scanner 21 (the maximum inclination angle θ of the electron microscope 21a) is enlarged to expand the width of the processing region 36 to be limited.

On the other hand, according to the above formula (1), if the focal length f of the fθ lens 22 is lengthened, the width of the processed region 36 can be enlarged. However, as the focal length f is increased, the more the fθ lens 22 needs to be disposed away from the workpiece 35, the problem arises in that the size of the laser patterning device is increased.

Further, the machining resolution σ in the X-axis direction and the Y-axis direction is obtained by the following equation (2) when the number of pulses of the stepping motor 21b is P: σ = f × (2π / P) (2)

As shown in the equation (2), as the focal length f of the fθ lens 22 is lengthened, the processing resolution σ is lower. Therefore, high-precision processing that achieves high processing resolution σ and realization of a wider processing area are in a trade-off relationship. Therefore, when the machining resolution σ is considered, the length of the machining region 36 is limited by lengthening the focal length f.

On the other hand, a method of providing a moving mechanism for moving the workpiece 35 not only in the sub-scanning direction (Y-axis direction) but also to the main scanning by the workpiece conveying portion 3 is also considered. The direction (X-axis direction) moves. According to this method, the processed portion of the workpiece 35 can be sequentially changed in the main scanning direction with respect to the processing region 36, and the processed portion can be processed. Therefore, the workpiece having the length exceeding the main scanning direction of the processing region 36 can be processed. It can also be processed.

However, providing a moving mechanism that moves the workpiece not only in the sub-scanning direction (Y-axis direction) but also in the main scanning direction (X-axis direction) causes an increase in size of the laser patterning device. In particular, in the present embodiment, since the workpiece having the length of the workpiece in the sub-scanning direction exceeds the length of the processing region 36, the larger workpiece 35 is further moved in the main scanning direction (X-axis direction). Moving requires a large mobile mechanism. Further, such a large workpiece 35 has a large weight, so that the inertial force is large, high-speed movement is difficult to achieve, and the problem of low productivity is also generated.

Therefore, in the present embodiment, the main scanning direction (X-axis direction) is configured such that the scanning range of the laser light L is moved in the main scanning direction instead of moving the workpiece 35. Specifically, the laser scanning unit 2 is mounted on the carriage 25, and is configured to be able to move the laser scanning unit 2 in the main scanning direction. Thereby, the range in which the laser light scanned by the electric scanner 21 is scanned on the surface of the workpiece (that is, the processing region 36) can be made to be opposite to the main scanning direction of the workpiece 35 without moving the workpiece 35 in the main scanning direction (X-axis direction). mobile. Thereby, the processed portion of the workpiece 35 can be sequentially moved to the processing region 36 for processing, and even if the width of the processing region 36 in the main scanning direction (X-axis direction) is narrow, a large workpiece exceeding the width can be used. 35 processing.

As a result, the processing of the large workpiece 35 exceeding the processing region 36 can be performed without forcibly expanding the processing region 36, and the high machining resolution σ can be maintained, so that high-precision machining can be realized for the large workpiece 35. Further, in the present embodiment, the load placed on the carriage 25 as a moving means that moves in the main scanning direction (X-axis direction) is substantially only the laser scanning unit 2, that is, substantially only the electric scanner 21 and Fθ lens 22. Since the weight of the load is much lighter than that of the workpiece 35, high-speed movement of the carriage 25 in the main scanning direction can be achieved, and high productivity can be obtained.

Further, the load placed on the carriage 25 may be loaded with at least the fθ lens 22 as a light collecting means. Therefore, the lightest weight configuration is a configuration in which only the fθ lens 22 is mounted on the carriage 25. On the other hand, as long as it is a light component with respect to the workpiece 35, other components may be mounted on the carriage 25 along with the fθ lens 22. For example, in the present embodiment, an optical scanning means such as an electric scanner 21 may be mounted on the carriage, or a part of the laser output unit 1 may be All loaded on the carriage.

Further, in the present embodiment, the optical path through which the carriage 25 moving in the main scanning direction enters the laser light L, that is, the optical path of the laser light L output from the laser output unit 1 is parallel to the X-axis direction. Therefore, as shown in Fig. 7, even if the carriage 25 is moved to any position in the main scanning direction (X-axis direction), the laser light L output from the laser output unit 1 is incident from the same place of the carriage 25. Therefore, even if the carriage 25 moves in the main scanning direction (X-axis direction), the light path of the laser light L incident on the carriage 25 is the same, even in the processing areas 36-1, 36 which are different from each other in the main scanning direction. 2 In the case of processing, the same processing can be realized.

However, in the present embodiment, when the carriage 25 moves, the length of the optical path of the laser light L incident on the carriage 25 changes. Therefore, if the laser light L incident on the carriage 25 is non-parallel convergence, the focus of the laser light L irradiated to the workpiece 35 changes with the position of the carriage 25 in the main scanning direction, and the laser light L on the workpiece 35 The spot diameter changes, etc., which affects the machining accuracy.

In the present embodiment, the laser light L output from the laser oscillator 11 is a substantially parallel light beam, is emitted from the beam expander 12 via the two mirrors 14 and 15, and is reflected by the mirror 16 from the laser output unit 1. The output laser light L is also a slightly parallel beam. Therefore, if the laser light L incident on the carriage 25 converges slightly parallel, even if the carriage 25 moves and the position in the main scanning direction changes, the focus of the laser light L irradiated to the workpiece 35 does not substantially change, and the workpiece 35 does not occur. The influence of the change in the spot diameter of the laser light L on the top. Therefore, even in the case where the processing regions 36-1 and 36-2 having different main scanning directions are processed, it is possible to perform processing with the same machining accuracy without performing operations such as focus adjustment, thereby achieving higher processing. Productive.

However, if it is formed in addition to the laser scanning unit 2, all the members of the laser output unit 1 are also mounted on the carriage 25, that is, if the light source itself such as the laser oscillator 11 is formed on the carriage. With the structure of 25, even if the carriage 25 moves, the focus of the laser light L irradiated to the workpiece 35 does not change. However, since the weight of the load on the carriage 25 becomes large, it is considered that it is difficult to realize the high speed movement of the carriage 25.

Fig. 8 is a flow chart showing an example of a patterning process of the laser patterning device of the embodiment.

The control PC 40 first moves the workpiece 35 in the sub-scanning direction to the workpiece conveying direction B, The workpiece feeding process (S2) is stopped at the target feeding position, but before the workpiece feeding process, the driving of the suction pump 58 is started (S1), and the workpiece 35 is attracted to the processing table 53. Therefore, in the present embodiment, the workpiece feeding process is performed on the workpiece 35 in a state of being attracted to the processing table 53 by the suction force of the suction pump 58. When the workpiece 35 is stopped at the target feeding position by the workpiece feeding process, the state of the workpiece 35 is held so as not to easily move due to the state in which the workpiece 35 is sucked by the suction force of the suction pump 58 on the processing table 53. The specific description of the workpiece feeding process will be described later.

Thereafter, the control PC 40 sets the number N of the processed portion of the workpiece to be processed on the workpiece 35 to 0 (S3), and the stepping motor 26 is controlled by the main scanning control unit 24 to perform the carriage position. Initialization processing: The carriage 25 that stands by at the standby position is moved in the main scanning direction toward the carriage feeding direction A (the direction away from the laser output portion 1) to stop at the predetermined starting position (S4).

In this initialization processing, the control PC 40 acquires the position of the main scanning direction of the carriage 25 stopped at the home position based on the address signal from the linear encoder 28. Specifically, the control PC 40 detects the difference between the managed start position and the position of the actually stopped carriage 25 based on the address signal from the linear encoder 28, and the difference is an offset value for controlling the subsequent The position of the carriage 25 in the main scanning direction.

Next, the control PC 40 sets the processed portion number N of the workpiece 35 to 1 (S5). Thereafter, the control PC 40 controls the stepping motor 26 by the main scanning control unit 24 to move the carriage 25 at the home position to the carriage feeding direction A to stop the processing of the workpiece for processing the initial processing. A first processing position of the first processed portion N = 1 on 35 (S6).

Here, in the present embodiment, in order to achieve a high processing resolution of a positional accuracy of 5 μm or less, the size of the laser light scanning range (that is, the processing region 36) on the workpiece scanned by the electric scanner 21 is set to 150 [mm] × 150 [mm]. Therefore, when the workpiece 35 having a processed region of, for example, 450 [mm] (main scanning direction) × 600 [mm] (sub-scanning direction) is processed, the processed region is divided into three to be processed in the main scanning direction. The piece is divided into four pieces to be processed in the sub-scanning direction. Then, the 12 workpieces to be processed (the processed portions N = 1 to 12) are processed in order, whereby the processing of the entire processed region is performed.

That is, the following actions are repeated: moving the carriage 25 from the starting position to the first The machining position, the second machining position, and the third machining position are processed at the respective machining positions by the corresponding machining portions on the workpiece 35, and after the machining processing at the third machining position is completed, the machining position is returned to the starting position (S5~) S8). On the other hand, in the sub-scanning direction, after the carriage 25 moves to the third machining position and ends the machining process (Yes in S8), the control PC 40 and the process step S2 are the same before the machining process of the first machining position is started next. The workpiece feeding process (S10) of moving the workpiece 35 to the workpiece conveying direction B by only 150 [mm] is performed. Then, the carriage 25 is sequentially moved to the first processing position, the second processing position, and the third processing position, and processing is performed (S4 to S8). After repeating this operation four times (Yes in S9), the processing of the entire processed region of 450 [mm] × 600 [mm] is completed.

In the present embodiment, when the roll-shaped workpiece 35 is partially unwound and processed, the following operations are repeated to the winding end (S2 to S11): the carriage 25 is sequentially moved to the first machining position, and After the second processing position and the third processing position are processed, the workpiece 35 is moved by 150 [mm] in the workpiece conveying direction B. Then, after reaching the volume terminal (YES in S11), the driving of the suction pump 58 is stopped (S12), and the processing is terminated.

Next, the workpiece feeding process for moving the workpiece 35 in the sub-scanning direction will be described.

Fig. 9 is a flow chart showing an example of the flow of the workpiece feeding process of the embodiment.

In the workpiece feeding process of the present embodiment, the control PC 40 first energizes the registration motor 31 composed of the stepping motor to form an exciting state (S21), and starts driving of the winding motor 62 (S22). At this time, the winding clutch 63 is brought into a current state with a predetermined current value, and the desired transmission torque is obtained by the control. Therefore, the winding reel 67 is rotationally driven by the driving torque of the winding motor 62. The workpiece 35 is taken up on the take-up reel 67. By the workpiece winding operation, the workpiece 35 is pulled out from the roll supply unit 50 that holds the workpiece 35 in a roll shape, and the workpiece 35 on the processing table 53 is conveyed in the sub-scanning direction.

Here, in the present embodiment, as described above, the suction pump 58 is already driven before the workpiece feeding process, and the workpiece 35 is sucked on the processing table 53. Therefore, the current value of the flow-to-coil-pulp clutch 63 is set to a conveyance load that resists adsorption, and the following transmission torque can be obtained: a transmission torque that can convey the conveyance force of the workpiece 35 in the sub-scanning direction can be ensured.

Further, in the operation of winding up the workpiece by the winding motor 62, the registration brake 38 is turned OFF, and the excitation is performed. The load of the registration motor 31 in the magnetic state becomes a conveyance load. Therefore, the current value flowing to the take-up fine particle clutch 63 is set to a transmission torque that ensures the transporting force of the transportable workpiece 35 even if the transport load of the registration motor 31 is present.

Further, in the operation of winding up the workpiece by the take-up motor 62, the winding-out particle clutch 59 is also energized at a predetermined current value, controlled to obtain a desired transmission torque, and the unwinding motor 56 is also driven. When the workpiece 35 is unwound from the winding supply unit 50 by the operation of winding the workpiece by the winding motor 62, the tension of the workpiece 35 acting between the winding supply unit 50 and the roll discharge unit 60 may be caused by the roll supply unit 50. The resulting conveying load becomes too large. However, even if there is a conveyance load generated in the roll supply unit 50, as long as the tension acting on the workpiece 35 does not become excessively large, the operation of the unwinding motor 56 to unwind the workpiece is not necessarily required.

The number of revolutions of the unwinding motor 56 and the winding motor 62 is performed not only when the winding motor 62 is wound up by the winding motor 56 but also when the winding motor 56 is wound out of the workpiece, and the workpiece 35 is unwound from the winding supply unit 50. The speed at which the workpiece 35 is taken up by the winding motor 62 by the winding motor 62 is wound at a speed higher than the speed at which the workpiece 35 is unwound from the winding supply unit 50 by the operation of winding the workpiece by the winding motor 56. Slightly faster. Thereby, the workpiece 35 between the roll supply unit 50 and the roll discharge unit 60 can be prevented from being slack in the sub-scanning direction. At this time, the current value flowing to the take-up fine particle clutch 59 and the take-up fine particle clutch 63 is appropriately set so as not to cause excessive occurrence of the workpiece 35 between the roll supply portion 50 and the roll discharge portion 60 in the sub-scanning direction. tension. According to this embodiment, the tension acting on the workpiece 35 can be maintained at an appropriate tension, and as a result, the deterioration of the machining accuracy due to the slack or stretch of the workpiece can be suppressed.

In this manner, the workpiece 35 is taken up from the roll supply unit 50, and the workpiece 35 on the processing table 53 is conveyed only by a predetermined amount in the sub-scanning direction, and then the registration brake 38 is turned on (S23), so that the registration roller pair 32 cannot be made. Rotate. Thereby, the workpiece 35 held by the registration roller pair 32 is prohibited from moving in the sub-scanning direction, and the alignment marks 37 formed on the surface of the workpiece 35 are located in the imaging regions of the monitoring cameras 33 and 34. At this time, by stopping the conveyance of the workpiece 35 by the registration brake 38, the conveyance of the workpiece 35 can be stopped immediately and surely, and the conveyance stop position of the workpiece 35 can be accurately controlled.

After the workpiece 35 is stopped, the control PC 40 detects the alignment mark 37 on the workpiece 35 from the image data of the monitoring cameras 33, 34 of the workpiece 35 on the processing table 53, (S24). Then, the amount of movement of the workpiece to the target feed position is calculated from the detection result of the alignment mark 37 (S25), based on As a result of the calculation, the sub-scanning control unit 30 controls the registration motor 31 (S26). At this time, the registration brake 38 is turned off. Thereby, the workpiece 35 is conveyed to the target feeding position by the registration roller pair 32, and after the workpiece 35 is conveyed by the calculated workpiece movement amount (S27), the registration brake 38 is turned on (S28), so that the workpiece 35 is The delivery stops. As a result, the workpiece 35 is positioned with high precision at a position to be fed toward the target. After the conveyance of the workpiece 35 is stopped, both the registration motor 31 and the winding motor 62 are stopped (S29, S30). Further, the unwinding motor 56 is also stopped as needed.

Here, in the present embodiment, the alignment marks 37 on the workpiece 35 are detected from the image data of the monitoring cameras 33 and 34, and the position detection of the workpiece 35 is performed. In the position detection, if the position of the workpiece 35 in the Z-axis direction, that is, the position of the workpiece 35 in the normal direction of the surface of the processing table 53, changes the position detection error of the workpiece 35, the correct position of the workpiece 35 cannot be detected. . In this case, an error in the amount of movement of the workpiece from the workpiece to the target feed position and the calculation result are generated, and the workpiece 35 cannot be accurately positioned to the target feed position. In particular, according to the present embodiment, since the structure is wound out from the workpiece wound in a roll state, the bending or deflection when wound into a roll shape remains on the workpiece 35 on the processing table 53, and the workpiece 35 is The position in the Z-axis direction is easily changed.

In the present embodiment, the suction pump 58 is already driven before the workpiece feeding process, and the workpiece 35 is sucked on the processing table 53. Therefore, when the alignment marks 37 on the workpiece 35 are imaged by the monitoring cameras 33 and 34, the workpiece 35 is attracted to the processing table 53, and the workpiece 35 in the imaging region often ensures flatness. Thereby, the position of the workpiece 35 in the imaging region in the Z-axis direction does not change. Therefore, the correct position of the workpiece 35 can be detected based on the image data of the monitoring cameras 33 and 34, and the workpiece 35 can be positioned with high precision at the target feeding position.

Further, in the present embodiment, the detection of the position of the workpiece 35 is detected from the image data of the monitoring cameras 33 and 34. However, the position detection of the workpiece 35 may be performed by another means. For example, means for detecting marks on a workpiece by means of an electrical, magnetic or optical sensor can also be used. Even when the position detection of the workpiece 35 is performed by other means, since the position detection error may occur due to the positional change of the workpiece 35 in the Z-axis direction, the workpiece is attracted to the processing table during the movement of the workpiece and the flatness is ensured. Effective.

Fig. 10 is an explanatory view showing a processing sequence when the processed area on the workpiece is divided into 12 pieces to be processed and processed in order.

In Fig. 10, the numbers shown in the processed parts 36-1 to 36-24 indicate the processing order. sequence.

If the machined portions on the workpiece are separate, the respective machining positions of the carriage 25 may be spaced apart at each of the machining regions 36. However, if the processed portion is not an individual and a plurality of processed portions are formed into one processing object, the processing positions of the carriage 25 are set such that the respective processing regions 36 are adjacent or partially overlapped. In particular, in the case of the patterning process in which the wiring patterns are connected between the processed portions, the wiring patterns to be connected between the processed portions are prevented from being shifted and are not connected.

In the present embodiment, the carriage 25 is reciprocated, and there is a case where the carriage direction is orthogonal to the movement direction (main scanning direction), and the so-called pitch error is generated every time the carriage 25 is stopped. The machining position of the direction is offset. Further, the position of the workpiece 35 in the sub-scanning direction also has an error. If the processing is performed in a state in which such an error occurs, the wiring pattern to be connected between the processed portions may be offset and may not be connected.

Therefore, in the present embodiment, an overlapping area of several tens [μm] is set between 12 workpieces (processed portions), and each workpiece to be processed (processed portion) is set to an adjacent processed portion. Partially overlapping each other. By providing such an overlapping region, even if some error occurs, it is possible to suppress the wiring pattern from becoming disconnected.

Further, in the present embodiment, as shown in Fig. 1, the monitor camera 23 is provided on the carriage 25, and the processed pattern of the overlap region between the workpieces (the processed portions) can be observed. In the present embodiment, the monitor camera 23 captures the processed pattern of the overlap region, compares the captured image data with the target processed material, and detects the offset of the processed pattern from the target processing position. By the result of the detection, the X-Y coordinate offset value at the time of processing the processed portion is finely adjusted, and the processed portion is a pattern including the pattern connected to the processed portion. By such fine adjustment, in addition to correcting the positional shift of the stop target of the carriage 25, the machining position shift accompanying the positional error of the carriage 25 is also corrected, and high machining accuracy can be realized.

Fig. 11 is an explanatory view showing an example of a wiring pattern to be connected between the workpieces to be processed (processed portions).

Fig. 11 illustrates a wiring pattern of each workpiece to be processed across the processed portion numbers N = 1, N = 2, and N = 4. The area indicated by oblique lines in Fig. 11 is an overlapping area, and the broken line in Fig. 11 indicates an ideal processing position based on the target processing data, and the solid line in Fig. 11 is added for processing. The actual wiring pattern after the workpiece (processed portion) of the work part number N=1.

As shown in Fig. 11, the workpiece N = 1 adjacent to the main scanning direction (X-axis direction) for the workpiece to be machined N = 2 and the workpiece to be machined N = 2 adjacent to the main scanning direction (X-axis direction) The workpiece to be processed N=3, the offset of the Y-axis coordinate is set, and the position of the sub-scanning direction of the workpiece 35 is corrected. On the other hand, regarding the workpiece N=1 adjacent to the sub-scanning direction (Y-axis direction) to be processed N=4 and the workpiece N=7, 10 to be processed side by side with the workpiece N=4, set X The offset of the axis coordinates corrects the position of the main scanning direction of the carriage 25. These offset values are written in advance to the memory of the control PC 40, and are read out during the processing of each workpiece to offset the coordinate origin of the processed material.

Furthermore, the workpiece to be processed arranged in the main scanning direction, in other words, the workpiece to be processed which is fed by the same carriage, is ensured to straight straight by the straightness of the linear guide 29, so the deviation of the Y-axis coordinate Move to the same. On the other hand, regarding the workpiece to be processed arranged in the sub-scanning direction, since the orientation of the carriage 25 is shifted, it is preferable to capture the processed pattern of the workpiece to be processed adjacent to the sub-scanning direction by the monitor camera 23. Updates the offset of the X-axis coordinates written to the memory to the latest value based on the offset value newly obtained based on the captured image.

As described above, in the present embodiment, the processed pattern (reference position) of the overlapping area between the workpieces (the processed portions) is captured by the monitor camera 23 on the carriage 25, and the processed pattern is detected for the target processing position. Offset. Therefore, when the position of the workpiece 35 in the imaging region of the monitoring camera 23 in the Z-axis direction, that is, the position of the workpiece 35 in the normal direction of the surface of the processing table 53, is changed, the position of the processed pattern cannot be accurately detected. In this case, it is not possible to set an appropriate offset value for correcting the position in the sub-scanning direction or the position in the main scanning direction of the workpiece 35, and it is difficult to achieve high machining accuracy. In particular, according to the present embodiment, when the bending or deflection at the time of winding in a roll shape is left on the workpiece 35 on the processing table 53, the position of the workpiece 35 in the Z-axis direction is easily changed, and it is more difficult to achieve high machining accuracy.

In the present embodiment, when the monitoring camera 23 captures the processed pattern of the overlap region, the workpiece 35 is attracted to the processing table 53, and the workpiece 35 in the imaging region often ensures flatness. Thereby, since the position of the workpiece 35 in the Z-axis direction in the imaging region does not change, the correct position of the processed pattern can be detected based on the image data of the monitoring camera 23, and high machining accuracy can be realized.

An example of the present embodiment is as follows, which is patterned by laser light scanning. When each of the processed portions of the workpiece 35 is processed, the workpiece 35 and the carriage 25 are processed in a stopped state. However, the workpiece 35 that is moving in the sub-scanning direction may be processed, and the workpiece 25 may be processed while moving the carriage 25 in the main scanning direction.

When the workpiece 35 that is moving in the sub-scanning direction is processed, if the position of the workpiece 35 in the Z-axis direction in the processing region changes, the focus position of the machining light on the object to be processed fluctuates, and stable machining accuracy cannot be obtained. In the workpiece transport unit 3 described in the present embodiment, even when the workpiece 35 is sucked onto the processing table 53 by the suction pump, the movement of the workpiece 35 in the sub-scanning direction can be realized. Therefore, when the workpiece 35 that is moving in the sub-scanning direction is processed, the machining process can be performed without changing the position of the workpiece 35 in the Z-axis direction in the machining region, and stable machining accuracy can be obtained.

Further, in the present embodiment, in order to stably adsorb the workpiece 35 on the processing table 53, it is preferable to control the suction force of the suction pump 58 in accordance with the type (thickness, material, rigidity, and the like) of the workpiece 35. For example, the thicker the workpiece 35 or the stronger the rigidity, the more attractive it is to be stably adsorbed on the processing table 53. However, if the suction force is too large, the flatness of the thin workpiece 35 or the like cannot be ensured. Therefore, it is preferable to control the suction pump 58 to an appropriate suction force in accordance with the type of the workpiece 35.

On the other hand, if the suction force of the suction pump 58 changes, the conveying load when the workpiece 35 is conveyed also changes, so that the workpiece 35 can be stably conveyed, and the torque required to maintain the tension of the workpiece 35 in an appropriate range is also Variety. Therefore, when controlling the suction force of the suction pump 58, it is preferable to control the current value of the take-up fine particle clutch 59 or the take-up fine particle clutch 63 in accordance with the suction force.

Further, as the workpiece 35 is conveyed, the winding diameter of the workpiece 35 held by the winding supply portion 50 becomes smaller and smaller, and the winding diameter of the workpiece 35 held by the winding discharge portion 60 becomes larger and larger. If the winding diameter changes, the load during the conveyance of the workpiece 35 changes, so the torque required to maintain the tension of the workpiece 35 in an appropriate range changes. Therefore, it is preferable to control the take-up fine particle clutch 59 or the take-up fine particle clutch in accordance with the winding diameter of the workpiece 35 held by the roll supply portion 50 or the change in the winding diameter of the workpiece 35 held by the roll discharge portion 60. The current value of 63.

The above description is an example, and each of the following aspects has a unique effect.

(Form A)

The optical processing device such as the laser patterning device has a moving means such as a workpiece transporting unit 3 that moves an object to be processed such as a workpiece 35 placed on the surface of the processing table member such as the processing table 53; An optical irradiation means for irradiating the laser output unit 1 such as laser light L or the like and the laser scanning unit 2, which is disposed on the surface of the processing table member, and having an optical irradiation means such as The attraction force of the suction hole such as the pores on the surface of the processing table member, the adsorption means for adsorbing the object to be processed on the cavity portion 57 of the table surface, the suction pump 58, and the like; and moving the object to be processed by the moving means In the predetermined suction period, the adsorption control means for controlling the adsorption means to adsorb the object to be processed on the table surface, such as the control PC 40.

According to this aspect, the object to be processed can be adsorbed on the table member table surface during the predetermined suction period in which the object to be processed is moved by the moving means. Therefore, the optical processing apparatus that moves the object to be processed can maintain the flatness of the object to be processed.

Further, various problems caused by not adhering the object to be processed to the processing table member in advance in the movement of the object to be processed can be solved.

Further, regarding various problems, for example, the following problems can be mentioned.

In the direction orthogonal to the optical axis direction of the processed light irradiated to the object to be processed (the X-axis direction and the Y-axis direction in the present embodiment), in order to accurately position the object to be processed in the processing region, it may be based on As a result of detecting the position of the object to be processed, the object to be processed is moved, and the object to be processed is positioned at the target position. In this case, it is desirable to detect the position of the object to be processed as close as possible to the processing area. The position where the position of the object to be processed is detected is farther away from the processing area, and the positioning error is caused by the expansion and contraction of the object to be processed between the place and the processing area. Therefore, it is preferable to perform position detection of the object to be processed on the processing table member close to the processing region. However, in this case, when the object to be processed is displaced in the optical axis direction of the processed light that is irradiated onto the object to be processed, an error occurs in the position detection, and the positioning accuracy of the object to be processed is deteriorated. Therefore, when the position of the object to be processed is detected on the processing table member close to the processing region, and the object to be processed is moved, and the object to be processed is positioned at the target position, the object to be processed is not adsorbed to the processing table beforehand. When the member is placed on the member, there is a problem that the positioning accuracy of the object to be processed is deteriorated.

In addition, in the optical processing apparatus which performs the processing while moving the object to be processed, if the object to be processed is not adsorbed to the processing table member in advance during the movement, the problem of stable processing accuracy cannot be obtained.

In addition, the optical processing apparatus that feeds the object to be processed from the roll of the object to be wound into a roll and transports it to the processing area may not substantially give the object to be processed in the roll-to-roll method as shown in Fig. 6 In the conveyance direction, the front end side transmits the force, and the object to be processed is conveyed by the force of the object to be processed. In this case, the bending or the deflection when the roll is wound is left in the portion to be processed which is fed by the roll, and for this reason, the conveyance abnormality of the object to be processed is likely to occur. Therefore, when the object to be processed is not adsorbed to the processing table member in advance during the conveyance of the object to be processed, the problem of abnormal conveyance of the object to be processed is likely to occur due to bending or deflection of the object to be processed.

This form can also solve such various problems.

(Form B)

In the above aspect A, the position detecting means of the monitoring cameras 23, 33, 34 and the like for detecting the position of the object to be processed placed on the table surface in a direction parallel to the table surface of the processing table member is provided. And the sub-scanning control unit 30 of the moving means and the movement control means such as the control PC 40 are controlled based on the detection result of the position detecting means.

With this, it is possible to solve the problem that the accuracy of the movement control of the object to be processed is deteriorated among the problems caused by the fact that the object to be processed is not adsorbed on the processing table member in advance during the movement of the object to be processed.

(Form C)

In the above-described aspect B, the position detecting means captures the reference mark of the alignment mark 37 or the processed pattern of the object to be processed placed on the table surface by the imaging means such as the monitoring cameras 23, 33, 34, and the like. The position is used to detect the position of the object to be processed from the obtained captured image data.

Thereby, the position of the object to be processed can be detected with high precision.

(Form D)

In any one of the above aspects A to C, the adsorption control means performs control for changing the magnitude of the attraction force of the adsorption means.

When the type (thickness, material, rigidity, and the like) of the object to be processed changes, the attractive force required to stably adsorb the object to be processed on the table member is always changed. According to this aspect, even if the type (thickness, material, rigidity, and the like) of the object to be processed changes, the object to be processed can be stably adsorbed on the processing table member.

(Form E)

In any one of the above aspects, the moving means includes a winding motor 56, a winding motor 62, and the like, and conveys the object to be processed so that the processed portion of the object is sequentially The processing table member moves on the table top.

Thereby, when the object to be processed is conveyed so that the processed portion of the object to be processed is sequentially moved on the table member table surface, the problem that the object to be processed is not adsorbed to the table member can be solved.

(Form F)

In the above-described aspect E, the transporting means includes a take-up holding portion such as a roll supply portion 50 that holds the object to be processed in a roll-like state, and a roll that is held by the take-up holding portion The first driving means such as the winding-out motor 56 and the winding-out powder clutch 59 that are rotationally driven in the winding-out direction; the processing object that is unwound from the winding-out holding portion and passes through the processing table member The take-up holding portion of the roll discharge portion 60 and the like held in a roll-like state, and the take-up motor 62 and the take-up that rotationally drive the object to be wound in the take-up holding portion in the winding direction A second driving means such as the powder clutch 63; and a driving control means for controlling the first driving means and the sub-scanning control unit 30 of the second driving means.

With this configuration, the object to be processed before and after the processing can be held in a roll shape, so that it is possible to save space in the installation space of the optical processing apparatus including the object to be processed before and after the processing.

(Form G)

In the above-described aspect F, the driving means for at least one of the first driving means and the second driving means includes a winding-out particle clutch 59 or a winding-up particle clutch 63 that can change the transmission torque. In the transmission torque changing means, the drive control means controls the transmission torque changing means to maintain the tension of the object to be processed between the winding-out holding portion and the winding-up holding portion within the target range.

Thereby, the tension of the object to be processed between the take-up holding portion and the take-up holding portion can be stably maintained in the target range, and the deflection or stretching of the object to be processed can be suppressed, and stable machining accuracy can be achieved.

(Form H)

In the above-described aspect G, the drive control means controls the transmission torque changing means in accordance with the winding diameter of the rolled object to be rotationally driven by the driving means of the at least one of the driving means.

The winding diameter of the object to be processed held by the take-up holding portion or the take-up holding portion gradually changes in accordance with the conveyance of the object to be processed. When the winding diameter changes, the load during the conveyance of the object is changed. Therefore, the torque required to maintain the tension of the object in an appropriate range is always changed. According to this aspect, the torque change means is controlled in accordance with the winding diameter of the object to be processed held by the take-up holding portion or the take-up holding portion. Therefore, even if the winding diameter changes, the tension of the object to be processed can be maintained in an appropriate range. Therefore, it is possible to suppress the deflection or stretching of the object to be processed, and to achieve stable processing accuracy.

(Form I)

In the above-described aspect G or H, the adsorption control means controls the magnitude of the attraction force of the adsorption means, and the drive control means controls the transmission torque changing means in accordance with the magnitude of the suction force of the adsorption means.

When the magnitude of the suction force of the adsorption means is changed, the conveyance load when the object to be processed is transported also changes. Therefore, the torque required to achieve stable conveyance of the object to be processed and the tension of the object to be processed is maintained in an appropriate range is always changing. . According to this aspect, the transmission torque changing means is controlled in accordance with the magnitude of the attraction force of the adsorption means, and the tension of the object to be processed can be maintained in an appropriate range even if the attraction force of the adsorption means changes. Therefore, it is possible to suppress the deflection or stretching of the object to be processed, and to achieve stable processing accuracy.

(Form J)

In any one of the above aspects, the adsorption control means controls the adsorption means to adsorb the object to be processed while irradiating the object to be irradiated with the processed light by the optical irradiation means. In the above-described mesa, the driving control means stops the first driving means and the second driving means from rotating the object to be processed during the light irradiation period.

With this, it is possible to prevent the object to be processed from being moved by the first driving means or the second driving means during the light irradiation period (during processing) of irradiating the processed object with the processed light, thereby achieving stable processing accuracy.

(Form K)

In any one of the above aspects A to J, the processing table member is formed of a light transmitting member that penetrates the processed light.

Thereby, damage to the processing table member by the processing light can be suppressed, and the life of the processing table member can be extended.

21‧‧‧Electric scanner

22‧‧‧fθ lens

25‧‧‧Carriage

29‧‧‧Linear guide

31‧‧‧Alignment motor

32‧‧‧Alignment roller pair

33‧‧‧Monitoring camera

34‧‧‧Monitoring camera

35‧‧‧Workpiece

38‧‧‧Alignment brake

50‧‧‧Volume Supply Department

51‧‧‧Supply reel

52‧‧‧Inlet guide

56‧‧‧Roll-out motor

57‧‧‧The Cavity Department

58‧‧‧Sucking pump

59‧‧‧Rolling powder clutch

60‧‧‧Volume discharge department

62‧‧‧Winding motor

63‧‧‧Rolling powder clutch

64‧‧‧cleaning roller

65‧‧‧Adhesive roller

66‧‧‧ laminated rolls

67‧‧‧Reel reel

Claims (11)

An optical processing apparatus comprising: a moving means for moving an object to be placed on a surface of a processing table member; and an optical irradiation means for a part of the object to be placed on the surface of the processing table member Irradiating the processed light, comprising: an adsorption means for adsorbing the object to be processed by the suction force from the suction hole formed on the surface of the processing table member; and the adsorption control means The predetermined suction period in the object to be processed is moved by the moving means, and the adsorption means is controlled to adsorb the object to be applied to the table. The optical processing apparatus according to claim 1, further comprising: a position detecting means for detecting a position of the object to be processed placed on the table surface in a direction parallel to the table surface of the processing table member And a movement control means that controls the movement means based on the detection result of the position detecting means. The optical processing apparatus according to claim 2, wherein the position detecting means detects a reference position of the processing target portion placed on the table surface by a photographing means, and detects the aforementioned photographed image data. The position of the object to be processed. The optical processing apparatus according to any one of claims 1 to 3, wherein the adsorption control means performs control for changing the magnitude of attraction of the adsorption means. The optical processing apparatus according to any one of claims 1 to 4, wherein the moving means includes a conveying means for sequentially moving the processed portion of the processing object to the surface of the processing table member. The object to be processed is conveyed in a manner. The optical processing apparatus according to claim 5, wherein the conveying means includes a winding-out holding portion that holds the object to be processed in a roll-like state, and the first driving means holds the same The object to be wound in the roll-out holding portion is rotationally driven in the unwinding direction, and the take-up holding portion is wound up from the take-up holding portion and passed through the object to be processed on the table member surface of the processing table member. a roll-like state is maintained; a second driving means that causes the roll to be taken in the aforementioned roll The object to be processed of the holding portion is rotationally driven in the winding direction; and a drive control means that controls the first driving means and the second driving means. The optical processing apparatus according to claim 6, wherein the driving means of at least one of the first driving means and the second driving means includes a transmission torque changing means capable of changing a transmission torque, and the driving control means controls the The torque changing means is transmitted so that the tension of the object to be processed between the winding-out holding portion and the winding-up holding portion is maintained within the target range. The optical processing apparatus according to claim 7, wherein the drive control means controls the transmission torque changing means in accordance with a winding diameter of a roll-shaped object to be rotationally driven by at least one of the driving means. The optical processing apparatus according to claim 7 or 8, wherein the adsorption control means controls the magnitude of the attraction force of the adsorption means, and the drive control means controls the amount of the suction force of the adsorption means. Communicate the torque change means. The optical processing apparatus according to any one of the sixth aspect, wherein the adsorption control means controls the adsorption means during irradiation of light that irradiates the processing object with the processing light by the optical irradiation means. The driving control means stops the first driving means and the second driving means from rotating the object to be processed in the light irradiation period in order to adsorb the object to be processed on the mesa. The optical processing apparatus according to any one of claims 1 to 10, wherein the processing table member is formed of a light transmitting member that penetrates the processed light.