TW201620001A - Detecting instrument and detecting method thereof - Google Patents

Abstract

A detecting instrument including a vacuum chamber, an electronic scanning module, an optical microscope module and a transmission module is provided. The detecting instrument is adapted to detect a sample. The vacuum chamber has an accommodating space. The sample is disposed in the accommodating space. The electronic scanning module has an electronic scanning axis. The optical microscope module includes a first objective lens. The electronic scanning module and the optical microscope module are disposed on the same side of the vacuum chamber opposite to the sample. In a first optical observation mode, the transmission module transmits the sample, so that the sample is at the position on the axis of the first objective lens. In an electronic observation mode, the transmission module transmits the sample, so that the sample is at the position on the electronic scanning axis, and the sample is fixed at the position by a leaning force. A detecting method is also provided.

Description

Testing instrument and its detecting method

The invention relates to a detecting instrument and a detecting method thereof.

In general, the most commonly used tool for observing samples is Optical Microscopes (OM). However, optical microscopes are limited by the diffraction of light wavelengths, and the resolution is only about 10 ^-6 m. In order to observe the finer structure of the sample (such as the ultramicrostructure of cells), the development of Electron Microscopes (EM) has begun in recent decades.

Since the electron has a wavelength much smaller than the wavelength of the photon, its resolution can reach about 10 ^-10 m. Although the resolution of an electron microscope is much larger than that of an optical microscope, an electron microscope can only look at the physical surface information, and cannot display the color image information of the sample, nor can it detect the sampled function (such as a fluorescent reaction). In addition, because of its high magnification, an electron microscope often causes an observation position where it is difficult to find a sample when the user operates. In comparison, an optical microscope can present the color of the sample and its structural information. In the field of biological research, optical microscopy provides a lot of important information about the dynamic changes of cells.

At present, optical microscopes and electron microscopes belong to two separate detection platforms, which are suitable for different types of observations due to their respective advantages and disadvantages. For example, an optical microscope is suitable for low-preview and for fluorescent observation of a calibrated sample, while an electron microscope is suitable for observing physical surface information at high magnification. In the actual detection of the sample, the sample must be placed on the two detection platforms of the optical microscope and the electron microscope according to the physicochemical properties of the sample or different detection requirements, or even multiple or repeated detection. Resulting in low measurement performance.

The invention provides a detecting instrument which has the functions of low magnification preview and high magnification resolution on the same platform, and has good measuring performance.

The invention provides a detection method, which can realize low magnification preview and high magnification analysis on the same platform, and improve measurement performance.

The detection instrument of the present invention is adapted to detect the same. The detecting instrument comprises a vacuum chamber, an electronic scanning module, an optical microscope module and a transmission module. The vacuum chamber has an accommodation space. The sample is placed in the accommodating space. The electronic scanning module has an electronic scanning axis. The optical microscope module includes a first objective lens. The electronic scanning module and the optical microscope module are disposed on the same side of the vacuum chamber relative to the sample. The transmission module is disposed in the accommodating space for transmitting the sample. The detection instrument has a first optical observation mode and an electronic observation mode. In the first optical viewing mode, the drive module transmits the sample such that the sample is positioned on the optical axis of the first objective lens. In the electronic observation mode, the drive module transmits the sample so that the sample is on the electronic scan axis. The upper position and the sample position is fixed by a bearing force.

In an embodiment of the invention, the transmission module includes a first motor, a carrier, and a transmission rail. The carrying portion is used to carry the sample. The transfer rail has at least one transfer shaft and at least one stop. Each of the stoppers is disposed at a position where the conveying shaft corresponds to the electronic scanning axis. The first motor drives the carrier in a first positioning mode to transport the sample along the transport track. When the instrument is in the electronic observation mode, the first motor drives the carrier to transport the sample such that the sample is on the electronic scan axis. When the sample is in a position on the electronic scanning axis, the first motor outputs a bearing force against the carrier portion against at least one of the stops to fix the sample position.

In an embodiment of the invention, the transmission module further includes a carrier and a second motor. The stage is used to carry the sample, and the carrier carries the stage. When the first motor outputs the bearing force against the at least one stop to fix the sample position, the second motor drives the stage in a second positioning mode to move according to a correction value to position the sample on the electronic scanning axis. s position.

In an embodiment of the invention, the first motor is driven in a first positioning mode to transmit a sample such that the position of the sample on the electronic scanning axis has a first positioning accuracy. The second positioning accuracy is driven according to the second motor being driven in the second positioning mode to position the sample on the electronic scanning axis according to the correction value. The second positioning accuracy is greater than the first positioning accuracy.

In an embodiment of the invention, the second motor is a piezoelectric (PZT) motor or a voice coil motor (VCM).

In an embodiment of the invention, the first motor is a servo motor (Servomotor).

In an embodiment of the invention, the at least one transmission shaft is a plurality of transmission shafts, and the at least one stopper is a plurality of stops.

In an embodiment of the invention, the optical microscope module further includes a second objective lens. The detection instrument has a second optical observation mode. In the second optical viewing mode, the drive module transmits the sample such that the sample is positioned on the optical axis of the second objective lens.

In an embodiment of the invention, the magnification of the second objective lens is greater than or equal to the magnification of the first objective lens.

In an embodiment of the invention, the optical microscope module further includes at least one objective lens. The detection instrument further has at least one optical observation mode. Each optical observation mode corresponds to an objective lens. In each optical observation mode, the drive module transmits the sample so that the sample is on the optical axis of the objective lens.

In an embodiment of the invention, the sample produces the same excitation light based on an incident light. The optical microscope module detects the light based on the received sample excitation light.

In an embodiment of the invention, the optical microscope module further includes a filter module for filtering a portion of the wavelength band of the incident light or a portion of the wavelength band of the sample excitation light.

In an embodiment of the invention, the optical microscope module further includes a charge-coupled device or a complementary metal-oxide-semiconductor (CMOS) photosensitive element.

In an embodiment of the invention, the electronic scanning module is a scanning electron microscope (SEM).

The detection method of the present invention is suitable for detecting the same. The detecting method includes disposing the sample in an accommodating space of a vacuum chamber. An electronic scanning module and an optical microscope module are disposed on the vacuum chamber with respect to the same side of the sample. In a first optical viewing mode, the sample is transferred such that the sample is positioned on the optical axis of a first objective lens of the optical microscope module. In an electronic observation mode, the sample is transferred so that the sample is located on an electronic scanning axis of the electronic scanning module, and the sample position is fixed by a bearing force.

In an embodiment of the invention, in the detecting method, a transmission module is disposed in the accommodating space. The drive module is used to transfer samples. A carrier portion of the drive module is used to carry the sample and transport the sample. The detecting method further includes driving the carrying portion to transport the sample along a transport rail in a first positioning mode. The transfer rail has at least one transfer shaft and at least one stop. Each of the stoppers is disposed at a position where the conveying shaft corresponds to the electronic scanning axis. In the electronic observation mode, the drive carrier transmits the sample so that the sample is located on the electronic scan axis. When the sample is in a position on the electronic scanning axis, the output bearing force causes the carrier portion to abut against at least one of the stops to fix the sample position.

In an embodiment of the invention, a first motor of the transmission module drives the carrier along the transport rail in a first positioning mode. The first motor is a servo motor.

In an embodiment of the present invention, the step of the output bearing force abutting the bearing portion against the at least one stopper to fix the sample position further includes: according to a correction value, A stage movement is driven in a second positioning mode to position the sample on the electronic scanning axis. The stage carries the sample and the carrier carries the stage.

In an embodiment of the invention, the first positioning mode is driven to transmit the sample such that the position of the sample on the electronic scanning axis has a first positioning accuracy. Driving according to the second positioning mode to position the sample on the electronic scanning axis according to the correction value has a second positioning accuracy. The second positioning accuracy is greater than the first positioning accuracy.

In an embodiment of the invention, a second motor of the transmission module drives the stage to move in a second positioning mode according to the correction value to position the sample on the electronic scanning axis. The second motor is a piezoelectric motor or a voice coil motor.

In an embodiment of the invention, the detecting method further includes a second optical observation mode, wherein the transmission module transmits the sample such that the sample is located on an optical axis of a second objective lens of the optical microscope module.

In an embodiment of the invention, the detecting method, wherein, in the at least one optical observation mode, each optical observation mode corresponds to an objective lens of at least one objective lens of the optical microscope module. The detection method is further included in each optical observation mode, the transmission module transmits the sample so that the sample is located on the optical axis of the objective lens of the optical microscope module.

In an embodiment of the invention, the detecting method further comprises causing the sample to generate the same excitation light according to an incident light. The sample is detected based on the received sample excitation light.

In an embodiment of the invention, the detecting method, wherein the step of generating a sample of the same excitation light according to an incident light further comprises transmitting a filter mode The group filters out a portion of the band of incident light or a portion of the band of sample excitation light.

Based on the above, when the detecting instrument of the embodiment of the present invention is in the first optical observation mode, the transmission module transmits the sample so that the sample is located on the optical axis of the first objective lens. In the electronic observation mode, the transmission module transmits the sample so that the sample is located on the electronic scanning axis, and the sample position is fixed by the bearing force. Therefore, the detection instrument has a low magnification preview and a high magnification analysis function on the same platform, and has good measurement performance. In addition, the detecting method of the embodiment of the invention includes, when in the first optical observation mode, transmitting the sample such that the sample is located on the optical axis of the first objective lens of the optical microscope module. In the electronic observation mode, the sample is transferred so that the sample is located on an electronic scanning axis of the electronic scanning module, and the sample position is fixed by a bearing force. Therefore, the detection method can realize low-magnification preview and high-rate analysis on the same platform, and improve measurement performance.

The above described features and advantages of the invention will be apparent from the following description.

100,400‧‧‧Testing instruments

110, 410‧‧‧ vacuum chamber

120, 420‧‧‧ electronic scanning module

122, 422‧‧ ‧ electromagnetic lens group

124,424‧‧‧Electronic microscope module

126, 426‧‧‧ Receiver

128, 428‧‧‧ pumping pump

130, 430‧‧‧ Optical microscope module

132, 432‧‧‧ first objective

434‧‧‧Second objective

135, 435‧‧‧ tube mirror

136, 436‧‧ ‧ focusing lens

137, 437, 439_2‧‧ ‧ beamsplitter

138, 438‧‧‧Photosensitive elements

439‧‧‧Filter module

439_1‧‧‧Filter

140, 240, 240a, 440‧‧‧ drive modules

142, 242, 242a, 442‧‧ ‧ carrying parts

144, 244, 244a, 444‧‧‧ transmission tracks

145, 445‧‧‧ transmission shaft

146, 446‧‧ ‧ blocks

148, 248, 248a, 448‧‧‧

A1‧‧‧ optical axis

AS‧‧‧ accommodating space

Amp‧‧‧Amplification Circuit Block

AP‧‧‧Location Point

AM‧‧ Alignment mark

B(s)‧‧‧correction signal

C(s)‧‧‧ output signal

CP‧‧‧ Comparator Circuit Block

E(s)‧‧‧compensation error signal

EL, EL', EL’’‧‧‧ sample excitation light

ESA‧‧‧Electronic scanning axis

F‧‧‧Responsibility

FEB‧‧‧ Focused electron beam

G(s)‧‧‧ system circuit block

H(s)‧‧‧correction circuit block

IL, IL’‧‧‧ incident light

M‧‧‧Motor Circuit Block

O‧‧‧ Center Point

Pos‧‧‧ Position Circuit Block

Pos_c‧‧‧ positional instructions

R(s)‧‧‧ input signal

RU, RU1, RU2, RU3‧‧‧ resolution unit

S‧‧‧ sample

SP‧‧‧Setpoint

SS‧‧‧ scan signal

Torque‧‧‧Torque Circuit Block

Torque_c‧‧‧ Torque Command

Vel‧‧‧Speed Circuit Block

Vel_c‧‧‧ speed command

X‧‧‧X axis

△X1, △X2‧‧‧X-axis offset

Y‧‧‧Y axis

△Y1, △Y2‧‧‧Y axis offset

Steps of the detection method of S500, S510, S520, S530, S540, S542, S544, S550, S560, S570, S572‧‧

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic illustration of a testing apparatus in accordance with an embodiment of the present invention.

2A is a schematic block diagram of a closed loop control architecture of a general positioning system.

2B is a schematic diagram of a servo dither of the positioning system of FIG. 2A.

2C is a schematic diagram of a drive module of a comparative embodiment.

2D is a schematic diagram of the drive module of the embodiment of FIG. 2C positioned in a stacked architecture Outline block diagram.

2E is a schematic diagram of a drive module of another comparative embodiment.

3A is a schematic diagram of the detecting instrument of the embodiment of FIG. 1 in a first optical observation mode.

3B is a schematic diagram of the detecting instrument of the embodiment of FIG. 1 in an electronic observation mode.

3C to 3E are schematic diagrams showing the correction values calculated by the detecting instrument of the embodiment of Fig. 1.

4A is a schematic diagram of a detecting instrument in a first optical observation mode according to another embodiment of the present invention.

4B is a schematic diagram of the detecting instrument of the embodiment of FIG. 4A in a second optical viewing mode.

4C is a schematic diagram of the detecting instrument of the embodiment of FIG. 4A in an electronic observation mode.

FIG. 5 is a flow chart showing the steps of a detecting method according to an embodiment of the present invention.

1 is a schematic view of a detecting instrument according to an embodiment of the present invention, please refer to FIG. 1. In the present embodiment, the detecting instrument 100 is adapted to detect the same S. The detecting device 100 includes a vacuum chamber 110, an electronic scanning module 120, an optical microscope module 130, and a transmission module 140. The vacuum chamber 110 has an accommodating space AS, and the transmission module 140 and the sample S are disposed in the accommodating space AS. In this embodiment, the electronic scanning module 120 and the optical microscope module 130 are disposed on the same side of the vacuum chamber 110 with respect to the sample S. The electronic scanning module 120 has an electronic scanning axis ESA. When the sample S is located on the electronic scanning axis ESA, the electronic scanning module 120 can The sample S located on the electronic scanning axis ESA is detected. In addition, the optical microscope module 130 includes a first objective lens 132, and the first objective lens 132 has an optical axis A1. When the sample S is located at the position on the optical axis A1 of the first objective lens 132, the optical microscope module 130 can detect the sample S located on the optical axis A1 of the first objective lens 132.

In one embodiment, the electronic scanning module 120 can be, for example, a scanning electron microscope (SEM). In other embodiments, the electronic scanning module 120 can also be a Transmission Electron Microscopy (TEM), an Energy Filtered Transmission Electron Microscopy (EFTEM), or a scanning transmission electron. Microscope (Scanning Transmission Electron Microscopy, STEM), the present invention is not limited thereto. In another embodiment, the optical microscope module 130 can be, for example, an optical microscope (OM) or other instrument or device having optical detection functions. The detecting device 100 may be, for example, a Correlative Light and Electron Microscope (CLEM), or other instrument or device that combines optical and electronic detecting functions, and the present invention is not limited thereto.

With reference to FIG. 1 , in the embodiment, the transmission module 140 includes a bearing portion 142 and a carrier 148 . The stage 148 is used to carry the sample S, and the carrier 142 carries the stage 148. In one embodiment, the carrier portion 142 passes through the carrier platform 148 while carrying the sample S. In one embodiment, the transmission module 140 further includes a first motor (not shown), a second motor (not shown), and a transmission rail 144. The first motor is used to drive the carrying portion 142 to move along the transport rail 144 and transmit the sample S, and the first The two motors are used to drive the stage 148 to move on the carrying portion 142. In one embodiment, by moving the first motor drive carrier 142 along the transport rail 144 and the second motor drive carrier 148 moving over the carrier 142, the sample S can be moved to, for example, an electronic scan axis ESA. The position is either the position on the optical axis A1 of the first objective lens 132. Additionally, the carrier portion 142 can also be moved to any position on the transfer rail 144, while the carrier 148 can be moved anywhere above the carrier portion 142. In this regard, the sample S may also correspond to the movement of the carrier portion 142 on the transport rail 144 and the movement of the carrier 148 on the carrier portion 142 to other locations.

In an embodiment, the transfer rail 144 has a transfer shaft 145 and a stop 146. The stopper 146 is disposed at a position where the conveying shaft 145 corresponds to the electronic scanning axis ESA. In one embodiment, the stop 146 of the present embodiment limits the movement of a portion of the carrier portion 142 on the transfer rail 144. When the carrier portion 142 is moved to a position on the transport rail 144 that it contacts the stopper 146, the sample S carried by the carrier portion 142 is located at the position on the electronic scanning axis ESA. In some embodiments, the transfer rail 144 can also have a plurality of transfer shafts 145 and a plurality of stops 146. Each of the stoppers 146 is disposed at a position where the conveying shaft 145 corresponds to the electronic scanning axis ESA. The number of the transfer shafts 145 may be adjusted according to the requirements of the bearing portion 142 for carrying the stability of the sample S, or other design requirements, and the present invention is not limited thereto.

2A is a schematic block diagram of a closed loop control architecture of a general positioning system, please refer to FIG. 1 and FIG. 2A. In one embodiment, the first motor drives the carrier portion 142 to transport the sample S along the transport rail 144 in a first positioning mode, and the second motor drives the carrier 148 to move in a second positioning mode. In an embodiment, the first positioning The mode may, for example, be a closed loop control architecture to control the position of the carrier 142 on the transfer rail 144, while the second positioning mode may also control the position of the stage 148, for example, in a closed loop control architecture. In general, closed loop control is a high precision positioning control system. In the schematic block diagram of the closed loop control architecture, the correction circuit block H(s) generates a correction signal B(s) based on the output signal C(s). The comparator circuit block CP outputs the compensation error signal E(s) to the system circuit block G(s) by receiving the input signal R(s) and the correction signal B(s), and is output by the system circuit block G(s). Corresponding to the adjusted output signal C(s). Therefore, the closed loop control architecture has the function of self-correcting errors. In other embodiments of the present invention, the first positioning mode and the second positioning mode may also be provided with other types of control architectures. In addition, the transmission module can also cooperate with the control structure of the first positioning mode and the second positioning mode, and has other motor components or other components related to the control architecture, and the invention is not limited thereto.

2B is a schematic diagram of servo dither of the positioning system of FIG. 2A, please refer to FIG. 2A and FIG. 2B. In general, the position control system controlled by the closed loop has a set point SP that is intended to be positioned such that a predetermined area or a partial area of the predetermined object is accurately positioned at the set point SP. However, the positioning control system has its own non-linear factors, such as the friction of the screw or the wire rail during the positioning process, or the friction and vibration of other components. In addition, the positioning control system may also receive interference from its operating environment during operation, such as earthquakes, or other minor displacements caused by unexpected factors. Therefore, at the microscopic level, the positioning control system cannot maintain the predetermined position object accurately positioned at the set point SP. In general, because the closed loop control architecture has the function of self-correcting error, the positioning control system The system is a dynamic system. That is to say, the positioning control system is continuously corrected back and forth within the range of one resolution unit RU. On average, the actual positioning position of the positioning control system is corrected back and forth within a range of one-half of the resolution units RU before and after the set point SP to form a fine servo dither. Furthermore, the size of the resolution unit RU of the positioning control system can affect the imaging quality of the detection instrument. Taking the detecting instrument 100 of the embodiment of FIG. 1 as an example, the size of the resolution unit of the positioning control system used by the transmission module 140 affects the imaging quality of the optical microscope module 130 or the electronic scanning module 120, for example.

2C is a schematic diagram of a drive module of a comparative embodiment, please refer to FIG. 2C. In the present embodiment, the transmission module 240 is similar to the transmission module 140 of one embodiment of the present invention of FIG. The transmission module 240 includes a carrier portion 242, a transmission rail 244, and a carrier 248. The carrying portion 242 carries the carrier 148, and the carrier 148 is used to carry the same (not shown). In one embodiment, a first motor (not shown) of the transmission module 240 drives the carrying portion 242 to move along the transport rail 244 and transmits the sample, and a second motor (not shown) of the transmission module 240 The drive stage 248 moves on the carrier 242. In the present embodiment, in a normal operation, the distance that the first motor drive carrier 242 moves to transport the sample is greater than the distance that the second motor drive carrier 248 moves on the carrier 242. In addition, in an embodiment, the first motor uses a motor of a general precision, such as a servo motor (Servomotor), and the second motor uses a motor of higher precision, such as a piezoelectric (Piezoelectric, PZT) motor or a voice coil. Motor (Voice Coil Motor, VCM). In addition, in other embodiments, other types of motors may be employed for the first motor and the second motor.

2D is a schematic block diagram of the positioning of the transmission module of the embodiment of FIG. 2C in a stacked architecture. Please refer to FIG. 2C and the corresponding reference FIG. 2D. In this embodiment, the transmission module 240 can continuously correct the error through the closed loop control architecture, and output, for example, the output signal C(s) adjusted corresponding to the error to a stacked architecture to operate the first motor or the second. The motor is positioned. In an embodiment, the stacked architecture includes a position circuit block Pos, a speed circuit block Vel, a torque circuit block Torque, an amplification circuit block Amp, and a motor circuit block M. In this embodiment, the output signal C(s) includes at least one of a position command Pos_c, a speed command Vel_c, and a torque command Torque_c. The position circuit block Pos outputs a signal to the speed circuit block Vel according to the position command Pos_c. The speed circuit block Vel outputs a signal to the torque circuit block Torque according to the signal output from the speed command Vel_c or the position circuit block Pos. The torque circuit block Torque outputs a signal to the amplifying circuit block Amp according to the signal output by the torque command Torque_c or the speed circuit block Vel. The amplifying circuit block Amp outputs a signal to the motor circuit block M according to the signal outputted by the torque circuit block Torque. In one embodiment, the motor circuit block M operates the first motor or the second motor for positioning based on the signal output from the amplifying circuit block Amp. For example, the torque command Torque_c does not need to be input to the position circuit block Pos or the speed circuit block Vel. The torque command Torque_c is directly input to the torque circuit block Torque, thereby causing the motor circuit block M to operate the first motor or the second motor for positioning.

In this embodiment, the positioning control system of the first motor of the transmission module 240 has a resolution unit RU1, and the positioning control of the second motor of the transmission module 240 The system has a resolution unit RU2. In one embodiment, the accuracy of the second motor is greater than the accuracy of the first motor, so the resolution unit RU1 is greater than the resolution unit RU2. That is to say, the second motor cannot compensate for the error generated when the first motor operates by continuously correcting the error. Furthermore, the absolute accuracy and precision of the second motor are limited by the first motor.

2E is a schematic diagram of a drive module of another comparative embodiment, please refer to FIG. 2E. In the present embodiment, the transmission module 240a is similar to the transmission module 240 of the embodiment of FIG. 2C. The components and functions of the transmission module 240a can be referred to the relevant description of the transmission module 240, and will not be described herein. The difference between the transmission module 240a and the transmission module 240 is that the first motor (not shown) of the transmission module 240a has the same precision as the second motor (not shown). That is to say, the first motor and the second motor of the transmission module 240a have a common resolution unit RU3. Therefore, the accuracy of one of the first motor and the second motor (for example, absolute accuracy and repeatability) is not limited by the accuracy of the other. In addition, in the present embodiment, the resolution unit RU3 and the resolution unit RU2 are the same, and the first motor and the second motor of the transmission module 240a use a piezoelectric motor, a voice coil motor or other types of motors, for example. .

In one embodiment, the first motor and the second motor of the transmission module 240a have a common resolution unit RU3, and the resolution unit RU3 is smaller than the resolution unit RU1 of the first motor of the transmission module 240 of the embodiment of FIG. 2C. That is to say, the accuracy of the first motor and the second motor of the transmission module 240a is greater than the accuracy of the first motor of the transmission module 240. Therefore, the first motor and the second motor of the transmission module 240a adopt a higher precision motor, so that the cost of the transmission module 240a is higher.

FIG. 3A is a schematic diagram of the detecting instrument of the embodiment of FIG. 1 in a first optical observation mode, please refer to FIG. 3A and continue to refer to FIG. 1. In this embodiment, the positioning mode of the transmission module 140 is similar to the positioning mode of the transmission module 240 of FIG. 2C. The transmission module 140 can continuously correct the error through the closed loop control architecture, and output an output signal adjusted, for example, corresponding to the error, to its stacked architecture to operate the first motor or the second motor of the transmission module 140 for positioning. In addition, the first motor and the second motor of the transmission module 140 are similar to the first motor and the second motor of the transmission module 240 of FIG. 2C, respectively. That is to say, the first motor of the transmission module 140 uses a motor of a general precision, such as a servo motor, and the second motor uses a motor of higher precision, such as a piezoelectric motor or a voice coil motor. In other embodiments, other types of motors may be used for the first motor and the second motor, and the invention is not limited thereto.

In this embodiment, the optical microscope module 130 further includes a tube mirror 135, a focusing lens 136, a beam splitter 137, and a photosensitive element 138. In one embodiment, the detection instrument 100 has a first optical observation mode and an electronic observation mode. In the first optical observation mode, the transmission module 140 transmits the sample S by the driving of the first motor, so that the sample S is located at the position on the optical axis A1 of the first objective lens 132 of the optical microscope module 130. In addition, the transmission module 140 can also transmit the sample S by the driving of the first motor and the second motor at the same time. In one embodiment, when the sample S is at the position of the optical axis A1, one of the positioning points AP on the sample S is also located on the optical axis A1. Next, an incident light IL is incident on the optical microscope module 130 and is focused by the focus lens 136. Thereafter, the incident light IL is split by the beam splitter 137 to enter the first objective lens 132, and coincides with the optical axis A1. Again, the sample S receives the first object The incident light IL of the mirror 132, and the sample S generates the same present excitation light EL according to the incident light IL. The sample excitation light EL is emitted from the first objective lens 132 in a direction opposite to the incident light IL, and the light path of the sample excitation light EL emitted from the first objective lens 132 coincides with the optical axis A1. Next, the sample excitation light EL enters the photosensitive element 138 through the tube mirror 135. The photosensitive element 138 of the optical microscope module 130 detects the sample S based on the received sample excitation light EL. It is to be noted that in FIG. 3A, in order to clearly illustrate the light path of the incident light IL and the sample excitation light EL, the incident light IL, the sample excitation light EL, and the optical axis A1 split by the beam splitter 137 are depicted as being separated. . However, in essence, the incident light IL, the sample excitation light EL, and the optical axis A1 which are split by the beam splitter 137 are coincident.

In one embodiment, the optical microscope module 130 has a low-preview function. When the positioning point AP on the sample S is located on the optical axis A1, the user can observe the feature of the positioning point AP or the feature of the vicinity of the positioning point AP through a viewing window (not shown) of the optical microscope module 130. . When the sample S is accurately positioned at the position on the optical axis A1, the user can observe that the positioning point AP substantially falls in the center of the screen through the observation window. In some embodiments, the optical microscope module 130 can also set the position of the positioning point AP on the screen when the sample S is accurately positioned on the optical axis A1 according to different settings. Do not set limits. In addition, in this embodiment, the photosensitive element 138 of the optical microscope module 130 is, for example, a charge-coupled device or a complementary metal-oxide-semiconductor (CMOS) photosensitive element. However in some other In the embodiment, the photosensitive element 138 may also be other types of photosensitive elements, and the invention is not limited thereto.

In this embodiment, the accuracy of the first motor and the second motor of the transmission module 140 are greater than the detection resolution of the optical microscope module 130. That is, the resolution unit of the positioning control system of the first motor and the second motor is smaller than the resolution unit of the optical microscope module 130. The servo control of the first motor and the second motor positioning control system, which is continuously corrected in the range of one of the resolution units, falls within the range of one resolution unit of the optical microscope module 130. Therefore, the optical microscope module 130 does not affect its imaging quality due to the aforementioned servo chatter or other slight moving factors.

FIG. 3B is a schematic diagram of the detecting instrument of the embodiment of FIG. 1 in an electronic observation mode, please refer to FIG. 3B. In this embodiment, the electronic scanning module 120 further includes an electromagnetic lens group 122, an electron microscope module 124, a receiver 126, and an air pump 128. At least in the process of the electronic observation mode, the pumping pump 128 can be continuously activated, and the air in the internal space of the electron microscope module 124 and the accommodating space AS of the vacuum chamber 110 can be removed to maintain the internal space of the electron microscope module 124. And the accommodating space AS of the vacuum chamber 110 is vacuum or close to vacuum. During the process of the electronic observation mode, the transmission module 140 transmits the sample S such that the sample S is located at the position on the electronic scanning axis ESA, and the position of the sample S is fixed by a bearing force F. In one embodiment, the transmission module 140 is configured to drive the sample S by the first motor drive carrier 142 to position the sample S on the electronic scanning axis ESA. When the sample S is located at the position on the electronic scanning axis ESA, the first motor can output the bearing force F to cause the bearing portion 142 to abut against the stopper 146, the sample S position is fixed, such as continuous, successive or intermittent output bearing force F. In addition, in some embodiments, the transmission module 140 can also transmit the sample S by the driving of the first motor and the second motor, and the invention is not limited thereto.

In this embodiment, when the first motor output bearing force F of the transmission module 140 causes the bearing portion 142 to abut against the stopper 146 to fix the position of the sample S, the second motor of the transmission module 140 is positioned by a second position. The mode drive stage 148 is moved in accordance with a correction value to position the sample S at a position on the electronic scanning axis ESA. In one embodiment, when the sample S is located at the position of the electronic scanning axis ESA, the positioning point AP on the sample S is also located at the position on the electronic scanning axis ESA. Next, at least one focused electron beam FEB from the electron microscope module 124 is guided by the electromagnetic lens group 122 to focus on the surface of the sample S on the electronic scanning axis ESA. The sample S receives the focused electron beam FEB to generate a scan signal SS. The scan signal SS is diverged outward from the surface of the sample S, and at least a portion of the scan signal SS is received by the receiver 126. The electronic scanning module 120 detects the sample S according to the receiver 126 receiving the scanning signal SS.

In one embodiment, the electronic scanning module 120 has a function of observing the physical surface information of the sample S at a high magnification. When the positioning point AP on the sample S is located on the electronic scanning axis ESA, the user can observe the feature or the positioning point of the positioning point AP through the screen displayed by a display (not shown) of the electronic scanning module 120. Characteristics of the area near the AP. When the sample S is accurately positioned on the electronic scanning axis ESA, the user can observe that the positioning point AP substantially falls in the center of the screen through the above display of the electronic scanning module 120. However, in some embodiments, the electronic scanning module 120 can also set the sample S accurately according to different settings. When the position on the electronic scanning axis ESA is located, the positioning point AP should fall on the position on the screen, and the present invention is not limited thereto.

In this embodiment, the first motor of the transmission module 140 is driven in the first positioning mode to transmit the sample S, so that the position of the sample S on the electronic scanning axis ESA has a first positioning accuracy. In addition, the second positioning motor is driven in the second positioning mode according to the second motor of the transmission module 140 to have a second positioning accuracy at a position where the sample S is positioned on the electronic scanning axis ESA according to the correction value. The first positioning accuracy is the accuracy of the first motor, and the second positioning accuracy is the accuracy of the second motor. In one embodiment, the second motor accuracy of the transmission module 140 is greater than the first motor accuracy of the transmission module 140, and the detection resolution of the electronic scanning module 120 falls on the first motor accuracy of the transmission module 140 and the second Between motor precision. That is, the resolution unit of the electronic scanning module 120 falls between the resolution units of the positioning control systems of the first motor and the second motor. In the embodiment, the second motor positioning control system is configured to be continuously corrected within a range of one of the resolution units to form a servo chatter that falls within a range of a resolution unit of the electronic scanning module 120. However, the first motor positioning control system described above is continuously corrected within the range of one of the resolution units to form a servo chatter that exceeds the range of one resolution unit of the electronic scanning module 120.

Please refer to FIG. 2C, 2D and FIG. 3B at the same time. The transmission module 140 of the present embodiment uses a stacked structure similar to the transmission module 240 to operate the first motor of the transmission module 140 or the second motor of the transmission module 140 for positioning. For a related description of the stacked architecture, reference may be made to the related description of FIG. 2D. In this embodiment, When the sample S is located at the position on the electronic scanning axis ESA, the first motor can output the bearing force F so that the bearing portion 142 abuts against the stopper 146, so that the sample S is fixed in position, for example, continuous, intermittent or intermittent output bearing force F . In one embodiment, the first motor of the transmission module 140 directly receives the torque command Torque_c corresponding to the bearing force F by the output bearing force F. Since the first motor of the transmission module 140 outputs the bearing force F, the position of the sample S is more fixed by the bearing force F and the reaction force of the stopper 146 corresponding to the bearing force F. That is to say, in the present embodiment, the position of the sample S does not change due to the nonlinear factor of the first motor of the transmission module 140 itself or due to the interference of the operating environment. In some embodiments, the range of position variation of the sample S is smaller than the range of one resolution unit of the electronic scanning module 120. In the present embodiment, due to the second motor positioning control system, the servo flutter formed by continuously correcting the range of one of the resolution units falls within the range of one resolution unit of the electronic scanning module 120. The electronic scanning module 120 does not affect its imaging quality due to the aforementioned servo chatter or other slight moving factors.

3C to 3E are schematic diagrams showing the correction values calculated by the detecting instrument of the embodiment of Fig. 1. 3C corresponds to the first optical observation mode of the detection instrument of FIG. 3A, and FIGS. 3D and 3E correspond to the electronic observation mode of the detection instrument of FIG. 3B. Please refer to FIGS. 3A, 3B and 3C to 3E. In the present embodiment, the sample S includes an alignment mark AM on its surface for correcting the detecting instrument 100, and the positioning point AP is located at the center of the alignment mark AM. In the first optical observation mode, the transmission module 140 transmits the sample S to the position on the optical axis A1 of the first objective lens 132 by the driving of the first motor. The alignment mark AM can be observed by the user through the observation window of the optical microscope module 130. Yu Yishi In the embodiment, in the screen of the observation window, the alignment mark AM falls on a plane constructed by an X-axis X and a Y-axis Y. The X-axis X and the Y-axis Y are perpendicular to each other, and the intersection point center point O of the two is the center of the screen of the observation window. In some embodiments, the center point O can also be set to other positions of the screen of the observation window according to different detection settings of the optical microscope module 130, and the present invention is not limited thereto. In the present embodiment, the anchor point AP (the center of the alignment mark AM) coincides with the center point O. In some embodiments, when there is a distance between the positioning point AP and the center point O, the adjustment stage 148 moves along the X-axis X and the Y-axis Y direction, so that the positioning point AP of the sample S carried by the stage 148 is AP. It coincides with the center point O as shown in Fig. 3C.

Next, in the electronic observation mode, the transmission module 140 transmits the sample S such that the sample S is located at the position on the electronic scanning axis ESA, and the position of the sample S is fixed by the bearing force F. Moreover, the magnification of the electronic scanning module 120 is adjusted to be the same as that of the optical microscope module 130. In this embodiment, the user can observe that there is a small difference between the positioning point AP (the center of the alignment mark AM) and the center point O through the screen displayed by the display (not shown) of the electronic scanning module 120. The distance is shown in Figure 3D. In an embodiment, the positioning point AP and the center point O have an X-axis offset ΔX1 in the X-axis X direction, and the positioning point AP and the center point O have a Y in the Y-axis Y direction. Axis offset ΔY1. Next, the stage 148 is adjusted based on the above-described X-axis shift amount ΔX1 and the Y-axis shift amount ΔY1 so that the positioning point AP of the sample S carried by the stage 148 coincides with the center point O.

Then please refer to Figure 3E. When the adjusted stage 148, the positioning point AP of the sample S and the center point O coincide, the magnification of the electronic scanning module 120 is increased. In this embodiment, the user can observe through the display of the electronic scanning module 120 that there is substantially a slight distance between the positioning point AP and the center point O, as shown in FIG. 3E. In one embodiment, the small distance cannot be observed by the display of the electronic scanning module 120 corresponding to the magnification of the optical microscope module 130. The above-mentioned minute distance must be observed through the display of the electronic scanning module 120 whose magnification has been increased. In an embodiment, between the positioning point AP and the center point O in FIG. 3E, there is an X-axis offset ΔX2 in the X-axis X direction, and the positioning point AP and the center point O are in the Y-axis Y. There is a Y-axis offset ΔY2 in the direction. Next, the stage 148 is adjusted based on the X-axis shift amount ΔX2 and the Y-axis shift amount ΔY2 described above, so that the positioning point AP of the sample S carried by the stage 148 and the center point O are overlapped.

In the present embodiment, since the sample S carried by the stage 148 is adjusted in the X-axis X direction and the Y-axis Y direction via the stage 148, the positioning point AP and the center point O are overlapped. In an embodiment, in the calibration process of the detecting instrument 100, the correction value in the X-axis X direction is calculated according to the X-axis offset amount ΔX1 and the X-axis offset amount ΔX2, and the Y-axis Y The correction value in the direction is calculated based on the Y-axis offset amount ΔY1 and the Y-axis offset amount ΔY2. In the present embodiment, the detecting instrument 100 detects the sample S after the above-described correction process. When the detecting instrument 100 is switched from the first optical observation mode to the electronic observation mode, the first motor output bearing force F of the transmission module 140 causes the bearing portion 142 to abut against the stopper 146 to fix the position of the sample S. Next, the second motor of the transmission module 140 drives the stage 148 in the second positioning mode to move the sample S to the electronic scanning axis according to the above-mentioned correction value in the X-axis X direction and the correction value in the Y-axis Y direction. The location on the ESA. In one implementation In the mode, since the stage 148 is moved according to the above-described correction value, the positioning point AP of the sample S carried by the stage 148 and the center point O are superimposed on the display of the electronic scanning module 120 having the high magnification. In some embodiments, the calibration may be performed once before each sample is detected, or may be detected multiple times after one calibration, according to the design and use requirements of the testing instrument 100, and the present invention is not limited thereto.

In the present embodiment, the positioning point AP of the sample S coincides with the center point O when the detecting instrument 100 is in the first optical observation mode, that is, the center point of the sample S is positive in the screen of the observation window of the optical microscope module 130. central. Therefore, the sample S is adapted to be detected by the optical microscope module 130. In addition, when the detecting device 100 is in the electronic observation mode, the positioning point AP of the sample S also coincides with the center point O, that is, the center point of the sample S is in the center of the display screen of the electronic scanning module 120 of the adjusted high magnification. . Therefore, the sample S is adapted to be detected by the electronic scanning module 120. In one embodiment, the optical microscope module 130 can, for example, perform a low magnification preview on the sample S, and the electronic scanning module 120 can be, for example, a high magnification analysis of the sample S. In this way, the detecting instrument 100 has the functions of low magnification preview and high magnification resolution on the same platform, and has good measurement performance.

4A is a schematic diagram of a detecting instrument in a first optical observation mode according to another embodiment of the present invention. Please refer to FIG. 4A. In the present embodiment, the detecting device 400 is similar to the detecting device 100 of the embodiment of FIG. 1. The related components and functions may be referred to the related description of the detecting device 100, and will not be described herein. The difference between the detecting instrument 400 and the detecting instrument 100 is that the optical microscope module 430 of the detecting instrument 400 further includes a second objective lens 434. In an embodiment, the second objective lens 434 has a magnification greater than the first objective lens. Magnification of 432. Corresponding to the second objective lens 434, the detecting instrument 400 further has a second optical observation mode. In the second optical viewing mode, the transmission module 440 transmits the sample S such that the sample S is located on the optical axis A2 of the second objective lens 434.

In some embodiments, the magnification of the second objective lens 434 may also be equal to the magnification of the first objective lens 432. The detecting instrument 400 can set the first objective lens 432 and the second objective lens 434 suitable for the magnification according to the relevant design of the instrument and the detection requirements of the user. In addition, in some embodiments, the optical microscope module further includes at least one objective lens, and the detecting instrument further has at least one optical observation mode, and each optical observation mode corresponds to an objective lens. In one embodiment, in each optical viewing mode, the drive module transmits the sample such that the sample is positioned on the optical axis of the objective lens. That is to say, the present invention does not limit the number of objective lenses and their corresponding optical observation modes, and the detecting instrument 400 can set the appropriate number of objective lenses according to the relevant design of the instrument and the detection requirements of the user.

In addition, in the embodiment, the optical microscope module 430 further includes a filter module 439. In an embodiment, the filter module 439 can be disposed on the detected light path corresponding to the first objective lens 432, the second objective lens 434, or other disposed objective lens. The filter module 439 includes two filters 439_1 and a beam splitter 439_2. The two filters 439_1 are respectively used to filter a part of the wavelength band of the incident light IL and a part of the wavelength band of the sample excitation light EL. In some embodiments, the number of the filters 439_1 may be one or more than one, and the number of the beamsplitters 439_2 may be plural. Alternatively, the filter module 439 may not include the beam splitter 439_2. The number of filters 439_1 and the beam splitter 439_2 can be dependent on the filtering requirements and the guiding light. The requirements, and corresponding adjustments, are not limited by the invention.

Please continue to refer to Figure 4A. In the present embodiment, in the first optical observation mode, the transmission module 440 transmits the sample S by a driving method similar to that of the transmission module 140, so that the sample S is located at the first objective lens 432 of the optical microscope module 430. The position on the optical axis A1. In one embodiment, the optical microscope module 430 of the transmission module 440 is detected in a manner similar to that of the optical microscope module 130 of the transmission module 140. The difference between the above two detection methods is that the optical microscope module 430 guides the sample excitation light EL through a different number of beamsplitters 437. The sample excitation light EL enters the photosensitive element 438 through the tube mirror 435 via the guidance of the beam splitter 437. The photosensitive element 438 of the optical microscope module 430 detects the sample S based on the received sample excitation light EL.

4B is a schematic diagram of the detecting instrument of the embodiment of FIG. 4A in a second optical observation mode, please refer to FIG. 4B. In the present embodiment, in the second optical observation mode, the transmission module 440 transmits the sample S such that the sample S is located on the optical axis A2 of the second objective lens 434 of the optical microscope module 430. In one embodiment, incident light IL is incident on optical microscope module 430 and is focused by focusing lens 436. The focused incident light IL then passes through the filter 439_1, and the filter 439_1 filters out a portion of the wavelength band of the incident light IL to pass the incident light IL' having the remaining partial wavelength band. Next, the incident light IL' is split by the beam splitter 439_2 to enter the second objective lens 434, and coincides with the optical axis A2. Further, the sample S receives the incident light IL' passing through the second objective lens 434, and the sample S generates the same present excitation light EL' according to the incident light IL'. The sample excitation light EL' is emitted from the second objective lens 134 in the opposite direction to the incident light IL', and is coupled to the optical axis A2 coincides. The sample excitation light EL' is then passed through the filter 439_1, and the filter 439_1 filters out a part of the wavelength band of the sample excitation light EL', and passes the sample excitation light EL'' having the remaining partial wavelength band. Next, the sample excitation light EL'' enters the photosensitive element 438 through the tube mirror 435. The photosensitive element 438 of the optical microscope module 430 detects the sample S based on the received sample excitation light EL''.

In one embodiment, since the optical microscope module 430 has a filter module 439, the optical microscope module 430 can make the calibration sample by filtering a part of the wavelength band of the incident light or a part of the wavelength band of the sample excitation light. Partialized features are more obvious. Therefore, the optical microscope module 430 can detect the chemical function of the sample S, for example, a fluorescence reaction.

4C is a schematic diagram of the detecting instrument of the embodiment of FIG. 4A in an electronic observation mode, please refer to FIG. 4C. In the embodiment, during the process of the electronic observation mode, the transmission module 440 transmits the sample S by a driving method similar to that of the transmission module 140, so that the sample S is located on the electronic scanning axis ESA, and A bearing force F fixes the position of the sample S. For the driving manners of the first motor and the second motor of the transmission module 440, reference may be made to the related description of the transmission module 140, and details are not described herein again. In addition, in an embodiment, the detection mode of the electronic scanning module 420 of the transmission module 440 is similar to the detection mode of the electronic scanning module 130 of the transmission module 140. The detection mode of the electronic scanning module 420 can refer to the detection mode of the electronic scanning module 130, and details are not described herein again. In addition, in the present embodiment, the detecting instrument 400 is also applicable to the correcting method described in FIGS. 3C to 3E, and the detecting instrument 400 is in the first optical observation mode, the second optical observation mode, and the electronic observation mode, respectively. , the positioning of the sample S The point AP coincides with the center point O.

In the present embodiment, when the detecting instrument 400 is in the first optical observation mode, the transmission module 440 transmits the sample S such that the sample S is located at the position on the optical axis A1 of the first objective lens 432. When the instrument 400 is in the second optical viewing mode, the transmission module 440 transmits the sample S such that the sample S is located on the optical axis A2 of the second objective lens 434. When the detecting instrument 400 is in the electronic observation mode, the transmission module 440 transmits the sample S such that the sample S is located at the position on the electronic scanning axis ESA, and the position of the sample S is fixed by the bearing force F. Therefore, the detecting instrument 100 has the functions of low magnification preview, chemical function detection and high magnification analysis on the same platform, and has good measurement performance. In one embodiment, the inspection instrument 100 can achieve micrometer (μm) resolution to nanometer (nm) resolution measurements on the same platform.

FIG. 5 is a flow chart showing the steps of the detecting method according to an embodiment of the present invention. Please refer to FIG. 5. The detection method is at least, for example, the detection instrument 100 applied to FIGS. 1, 3A, and 3B and the detection instrument 400 of FIGS. 4A, 4B, and 4C. The detection method is as follows. In step S500, the sample is placed in the accommodating space of the vacuum chamber. Next, in step S510, the electronic scanning module and the optical microscope module are disposed on the same side of the vacuum chamber with respect to the sample. Thereafter, in step S520, the carrier is driven in the first positioning mode to transport the sample along the transport track.

In step S530, in the first optical observation mode, the sample is transferred such that the sample is positioned on the optical axis of the first objective lens of the optical microscope module. In step S540, in the electronic observation mode, the drive carrier transmits the sample so that the sample is located on the electronic scanning axis of the electronic scanning module. Next, in step S542, when When the sample is in the position on the electronic scanning axis, the output bearing force causes the bearing portion to abut against at least one of the stops to fix the sample position. Thereafter, in step S544, the stage movement is driven in the second positioning mode in accordance with the correction value to position the sample on the electronic scanning axis.

In step S550, in the second optical observation mode, the transmission module transmits the sample such that the sample is located on the optical axis of the second objective lens of the optical microscope module. In step S560, in each optical observation mode, the transmission module transmits the sample so that the sample is located on the optical axis of the objective lens of the optical microscope module. In step S570, the sample is caused to generate sample excitation light according to the incident light, and the sample is detected based on the received sample excitation light. Next, in step S572, the filter module filters out a portion of the wavelength band of the incident light or a portion of the wavelength band of the sample excitation light.

In addition, the detection method of the embodiment of the present invention can obtain sufficient teaching, suggestion and implementation description from the description of the embodiment of FIG. 1 to FIG. 4C, and therefore will not be described again.

In summary, in the embodiment of the present invention, when the detecting instrument is in the first optical observation mode, the transmission module transmits the sample so that the sample is located on the optical axis of the first objective lens. In the electronic observation mode, the transmission module transmits the sample so that the sample is located on the electronic scanning axis, and the sample position is fixed by the bearing force. Therefore, the detection instrument has a low magnification preview and a high magnification analysis function on the same platform, and has good measurement performance. In addition, the detecting method of the embodiment of the invention includes, when in the first optical observation mode, transmitting the sample such that the sample is located on the optical axis of the first objective lens of the optical microscope module. In the electronic observation mode, the sample is transferred so that the sample is located on an electronic scanning axis of the electronic scanning module, and the sample position is made by a bearing force. fixed. Therefore, the detection method can realize low-magnification preview and high-rate analysis on the same platform, and improve measurement performance.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any one of ordinary skill in the art can make some changes and refinements without departing from the spirit and scope of the present invention. The scope of the invention is defined by the scope of the appended claims.

100‧‧‧Testing instruments

110‧‧‧vacuum chamber

120‧‧‧Electronic scanning module

122‧‧‧Electromagnetic lens group

124‧‧‧Electronic microscope module

126‧‧‧ Receiver

128‧‧‧Exhaust pump

130‧‧‧Optical microscope module

132‧‧‧First objective

135‧‧‧tube mirror

136‧‧‧focus lens

137‧‧‧beam splitter

138‧‧‧Photosensitive elements

140‧‧‧Drive Module

142‧‧‧Loading Department

144‧‧‧Transport

145‧‧‧Transport axis

146‧‧ ‧block

148‧‧‧ stage

A1‧‧‧ optical axis

AS‧‧‧ accommodating space

AP‧‧‧Location Point

ESA‧‧‧Electronic scanning axis

F‧‧‧Responsibility

FEB‧‧‧ Focused electron beam

S‧‧‧ sample

SS‧‧‧ scan signal

Claims (28)

The invention is characterized in that: the detection device comprises: a vacuum chamber having an accommodating space, the sample being disposed in the accommodating space; an electronic scanning module having an electronic scanning axis; an optical The microscope module includes a first objective lens, wherein the electronic scanning module and the optical microscope module are disposed on the same side of the vacuum cavity with respect to the sample; and a transmission module is disposed in the accommodating space For transmitting the sample, the detecting instrument has a first optical observation mode and an electronic observation mode, wherein in the first optical observation mode, the transmission module transmits the sample such that the sample is located at the first objective lens The position on the optical axis, in the electronic observation mode, the transmission module transmits the sample so that the sample is located on the electronic scanning axis, and the sample position is fixed by a bearing force. The detecting instrument of claim 1, wherein the transmission module comprises a first motor, a carrying portion and a conveying rail, the carrying portion is configured to carry the sample, the conveying rail has at least one conveying shaft and at least a stop, each of the stops being disposed at a position corresponding to the electronic scan axis of the transfer shaft, wherein the first motor drives the load bearing portion to transport the sample along the transfer track in a first positioning mode, when the detecting When the instrument is in the electronic observation mode, the first motor drives the carrier to transmit the sample to position the sample on the electronic scanning axis, and the first motor outputs when the sample is located on the electronic scanning axis The bearing force causes the bearing portion to abut against the at least one stop to fix the sample position. The detecting instrument of claim 2, wherein the transmission module further comprises a carrier and a second motor, the carrier is configured to carry the sample, and the carrier carries the carrier, wherein The first motor outputs the bearing force to abut the at least one stop, and when the sample position is fixed, the second motor drives the stage in a second positioning mode to move according to a correction value to make the sample Positioned on the electronic scan axis. The detecting instrument of claim 3, wherein the first motor is driven in the first positioning mode to transmit the sample, so that the position of the sample on the electronic scanning axis has a first positioning accuracy, according to The second motor is driven in the second positioning mode to have a second positioning accuracy at a position where the sample is positioned on the electronic scanning axis according to the correction value, wherein the second positioning accuracy is greater than the first positioning accuracy . The detecting instrument of claim 3, wherein the second motor is a piezoelectric (PZT) motor or a voice coil motor (VCM). The detecting instrument of claim 2, wherein the first motor is a servo motor (Servomotor). The detecting instrument of claim 2, wherein the at least one transmission shaft is a plurality of transmission shafts, and the at least one stopper is a plurality of stoppers. The detecting instrument of claim 1, wherein the optical microscope module further comprises a second objective lens, and the detecting instrument further has a second optical observation a mode, wherein in the second optical observation mode, the transmission module transmits the sample such that the sample is located on an optical axis of the second objective lens. The detecting instrument of claim 8, wherein the second objective lens has a magnification greater than or equal to a magnification of the first objective lens. The detection instrument of claim 8, wherein the optical microscope module further comprises at least one objective lens, the detection instrument further has at least one optical observation mode, and each of the optical observation modes corresponds to an objective lens, wherein each In the optical viewing mode, the drive module transmits the sample such that the sample is located on the optical axis of the objective lens. The detecting instrument of claim 1, wherein the sample generates the same excitation light according to an incident light, and the optical microscope module detects the sample according to the received excitation light of the sample. The detection instrument of claim 11, wherein the optical microscope module further comprises a filter module for filtering a portion of the wavelength band of the incident light or a portion of the wavelength band of the sample excitation light. The detecting instrument of claim 1, wherein the optical microscope module further comprises a charge-coupled device or a complementary metal-oxide-semiconductor (CMOS) photosensitive element. The detecting instrument according to claim 1, wherein the electronic scanning module is a scanning electron microscope (SEM). A detection method is suitable for detecting the same. The detecting method comprises: arranging the sample in an accommodating space of a vacuum chamber; and arranging an electronic scanning module and an optical microscope module on the vacuum chamber Relative to the same side of the sample; in a first optical observation mode, the sample is transferred such that the sample is located on the optical axis of a first objective lens of the optical microscope module; and in an electronic observation mode, The sample is transferred such that the sample is located on an electronic scanning axis of the electronic scanning module, and the sample position is fixed by a bearing force. The detection method of claim 15, wherein a transmission module is disposed in the accommodating space, and the transmission module is configured to transmit the sample, wherein a bearing portion of the transmission module is configured to carry the sample And transmitting the sample, the detecting method further comprising: driving the carrying portion to transport the sample along a transport rail in a first positioning mode, wherein the transport rail has at least one transfer shaft and at least one stop, each of the stop configurations And the position of the transmission axis corresponding to the electronic scanning axis; in the electronic observation mode, driving the carrier to transmit the sample to position the sample on the electronic scanning axis; and when the sample is located in the electronic scanning When the position is on the shaft, the bearing force is output such that the bearing portion abuts against the at least one stopper to fix the sample position. The detecting method of claim 16, wherein a first motor of the transmission module drives the carrying portion to transport the sample along the conveying rail in the first positioning mode, wherein the first motor is a servo motor (Servomotor). The detecting method of claim 16, wherein the step of outputting the bearing force to the bearing portion against the at least one stopper to fix the sample position further comprises: according to a correction value, The second positioning mode drives a stage movement to position the sample on the electronic scanning axis, wherein the stage carries the sample and the carrier carries the stage. The detection method of claim 18, wherein the first positioning mode is driven to transmit the sample such that the position of the sample on the electronic scanning axis has a first positioning accuracy, according to the second positioning The mode is driven to have a second positioning accuracy at a position where the sample is positioned on the electronic scanning axis according to the correction value, wherein the second positioning accuracy is greater than the first positioning accuracy. The detecting method of claim 18, wherein a second motor of the transmission module drives the stage to move in the second positioning mode according to the correction value, so that the sample is positioned on the electronic scanning axis. The position of the second motor is a piezoelectric (Piezoelectric, PZT) motor or a voice coil motor (VCM). The detecting method of claim 16, wherein the at least one transmission shaft is a plurality of transmission shafts, and the at least one stopper is a plurality of stoppers. The detection method described in claim 15 of the patent scope further includes: In a second optical observation mode, the transmission module transmits the sample such that the sample is located on the optical axis of a second objective lens of the optical microscope module. The detection method of claim 22, wherein the magnification of the second objective lens is greater than or equal to the magnification of the first objective lens. The detection method of claim 22, wherein in the at least one optical observation mode, each of the optical observation modes corresponds to one of the at least one objective lens of the optical microscope module, and the detection method further comprises And in each of the optical observation modes, the transmission module transmits the sample such that the sample is located on an optical axis of the objective lens of the optical microscope module. The detecting method of claim 15, further comprising: causing the sample to generate the same excitation light according to an incident light; and detecting the sample according to receiving the sample excitation light. The detecting method according to claim 25, wherein the step of causing the sample to generate the same excitation light according to an incident light further comprises filtering a part of the wavelength band of the incident light or the sample through a filter module. A part of the band that excites light. The detection method of claim 15, wherein the optical microscope module further comprises a charge-coupled device or a complementary metal-oxide-semiconductor (CMOS) photosensitive element. The detection method of claim 15, wherein the electronic scanning module is a scanning electron microscope (SEM).