TW201619401A - Copper powder - Google Patents

Copper powder Download PDF

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TW201619401A
TW201619401A TW104132604A TW104132604A TW201619401A TW 201619401 A TW201619401 A TW 201619401A TW 104132604 A TW104132604 A TW 104132604A TW 104132604 A TW104132604 A TW 104132604A TW 201619401 A TW201619401 A TW 201619401A
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copper powder
copper
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raw material
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TW104132604A
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TWI659114B (en
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Takashi Mukuno
Yoshihito Goto
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Mitsui Mining & Smelting Co
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C9/00Alloys based on copper
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/20Conductive material dispersed in non-conductive organic material
    • H01B1/22Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00Non-insulated conductors or conductive bodies characterised by their form

Abstract

The copper powder according to the present invention has an X-ray photoelectron spectroscopy (XPS) spectrum, which is obtained by measuring the surface of copper particles using an X-ray photoelectron spectroscope, in which the ratio P2/(P1+P0), which is the ratio of the peak intensity P1 of Cu(I) and the peak intensity P0 of Cu(0) to the peak intensity P2 of Cu(II), is 0.15-1. The proportional content of oxygen is preferably 0.15-1.2 mass%. The volume accumulation particle diameter D50 at an accumulation volume of 50 vol.%, as measured by the light scattering particle sizing technique, is preferably 0.3-10 [mu]m.

Description

銅粉 Copper powder

本發明係關於一種銅粉。 The present invention relates to a copper powder.

銅粉現適用作導電性膏等導電性組合物之原料。導電性組合物係於包含黏合劑樹脂及有機溶劑之媒劑中分散銅粉而成者。導電性組合物係用於例如電路之形成、或陶瓷電容器之外部電極之形成等。 Copper powder is now used as a raw material for a conductive composition such as a conductive paste. The conductive composition is obtained by dispersing copper powder in a medium containing a binder resin and an organic solvent. The conductive composition is used, for example, for formation of a circuit, formation of an external electrode of a ceramic capacitor, or the like.

近年來,隨著電路等向微間距化方向發展,導電性組合物用之銅粉亦被微粉化,銅粉之比表面積不斷增大。由此,銅粉逐步成為更容易氧化之狀態。因此,提出各種用以防止銅粉之氧化之技術。例如提出有如下技術,於藉由霧化法而製造銅粉時,添加相對於銅為0.01~0.1重量%之硼,藉此減少氧化膜之產生(參照專利文獻1)。專利文獻2中記載有含有Al、Mg、Ge及Ga中之任一者的銅粉。 In recent years, as circuits and the like have progressed in the direction of micro-pitching, copper powder for conductive compositions has also been micronized, and the specific surface area of copper powder has been increasing. As a result, the copper powder gradually becomes a state of being more easily oxidized. Therefore, various techniques for preventing oxidation of copper powder have been proposed. For example, when copper powder is produced by the atomization method, boron is added in an amount of 0.01 to 0.1% by weight based on copper, thereby reducing the occurrence of an oxide film (see Patent Document 1). Patent Document 2 describes copper powder containing any of Al, Mg, Ge, and Ga.

先前技術文獻 Prior technical literature 專利文獻 Patent literature

專利文獻1:日本專利特開2008-95169號公報 Patent Document 1: Japanese Patent Laid-Open Publication No. 2008-95169

專利文獻2:日本專利特開2011-6739號公報 Patent Document 2: Japanese Patent Laid-Open No. 2011-6739

於上述專利文獻1及2中記載之銅粉中,藉由使銅粉中含有銅以外之元素,而防止銅之氧化。因此,由包含該銅粉之導電性組合物所形成之導體中會殘存銅粉中所含之元素。根據導體之使用態樣或使用部位,該元素有時會對接合可靠性或導通特性產生不良影響,故而有 銅粉之使用場合受限之情況。 In the copper powder described in the above Patent Documents 1 and 2, oxidation of copper is prevented by including an element other than copper in the copper powder. Therefore, the element contained in the copper powder remains in the conductor formed of the conductive composition containing the copper powder. Depending on the state of use of the conductor or the location of use, this element may adversely affect joint reliability or continuity characteristics. The use of copper powder is limited.

因此,本發明之課題在於銅粉之改良,更詳細而言在於提供即便未使用異種元素,表面之穩定性亦優異,與導電性組合物之緻密性或與含氧絕緣材料材料之密接性、分佈之均勻性優異的銅粉。 Therefore, an object of the present invention is to improve copper powder, and more particularly to provide excellent surface stability even when no different element is used, and the denseness of the conductive composition or the adhesion to the oxygen-containing insulating material, Copper powder with excellent uniformity of distribution.

本發明提供一種銅粉,其於使用X射線光電子分光裝置(XPS)測定表面所獲得之X射線光電子分光光譜中,Cu(II)之波峰強度P2相對於Cu(I)之波峰強度P1及Cu(0)之波峰強度P0之比率即P2/(P0+P1)之值為0.15以上且1以下。 The present invention provides a copper powder having a peak intensity P 2 of Cu(II) relative to a peak intensity P 1 of Cu(I) in an X-ray photoelectron spectroscopy spectrum obtained by measuring a surface using an X-ray photoelectron spectroscopy device (XPS). The ratio of the peak intensity P 0 of Cu(0), that is, the ratio of P 2 /(P 0 +P 1 ) is 0.15 or more and 1 or less.

又,本發明作為上述銅粉之適宜之製造方法,而提供如下方法: 於相對濕度為40%RH以上且80%RH以下,且溫度為20℃以上且120℃以下之大氣環境下,將經乾燥之原料銅粉靜置20分鐘以上且650分鐘以下而進行氧化處理。 Further, the present invention provides the following method as a suitable method for producing the above copper powder: The dried raw material copper powder is allowed to stand for 20 minutes or more and 650 minutes or less in an atmosphere having a relative humidity of 40% RH or more and 80% RH or less and a temperature of 20° C. or more and 120° C. or less.

以下,基於此較佳實施形態對本發明進行說明。本發明之銅粉係包含銅粒子之集合體者。本發明之銅粉雖然實質上僅包含銅粒子,但容許含有不可避免之雜質。又,本發明之銅粉中視需要亦可含有除此以外之粉體等。 Hereinafter, the present invention will be described based on the preferred embodiments. The copper powder of the present invention contains a collection of copper particles. Although the copper powder of the present invention contains substantially only copper particles, it is allowed to contain unavoidable impurities. Further, the copper powder of the present invention may contain other powders or the like as needed.

本發明之銅粉之特徵之一為銅粒子之表面所存在之銅之氧化狀態。詳細而言,構成本發明之銅粉之銅粒子成為銅粒子之表面之金屬銅(即Cu(0))、一價銅(即Cu(I))及二價銅(即Cu(II))之存在比率為特異性者。該等各種價數之銅之存在比率可使用X射線光電子分光裝置(XPS)進行測定。根據XPS測定,獲得各種元素之X射線光電子分光光譜。於XPS中,可對自銅粒子之表面至約十nm為止之深度之元素成分 進行定量分析。於藉由XPS測定構成本發明之銅粉之銅粒子之表面狀態所獲得之X射線光電子分光光譜中,Cu(II)之波峰強度P2相對於Cu(I)之波峰強度P1及Cu(0)之波峰強度P0之比率即P2/(P0+P1)之值較佳為0.15以上且1以下,進而較佳為0.3以上且0.9以下,進而較佳為0.4以上且0.7以下。以下,將P2/(P1+P0)之值稱為「銅氧化率」。再者,所謂波峰強度係指波峰之高度。 One of the characteristics of the copper powder of the present invention is the oxidation state of copper present on the surface of the copper particles. Specifically, the copper particles constituting the copper powder of the present invention become metallic copper (i.e., Cu(0)), monovalent copper (i.e., Cu(I)), and divalent copper (i.e., Cu(II)) on the surface of the copper particles. The ratio of existence is specific. The ratio of the presence of these various valences of copper can be measured using an X-ray photoelectron spectroscopy device (XPS). X-ray photoelectron spectroscopy spectra of various elements were obtained according to XPS measurement. In XPS, the elemental composition from the surface of the copper particles to a depth of about ten nm can be quantitatively analyzed. In the X-ray photoelectron spectroscopy spectrum obtained by measuring the surface state of the copper particles constituting the copper powder of the present invention by XPS, the peak intensity P 2 of Cu(II) is relative to the peak intensity P 1 and Cu of Cu(I). The ratio of the peak intensity P 0 of 0), that is, the value of P 2 /(P 0 +P 1 ) is preferably 0.15 or more and 1 or less, more preferably 0.3 or more and 0.9 or less, still more preferably 0.4 or more and 0.7 or less. . Hereinafter, the value of P 2 /(P 1 +P 0 ) is referred to as "copper oxidation rate". Furthermore, the so-called peak intensity refers to the height of the peak.

於X射線光電子分光光譜中,Cu(II)之波峰主要源自CuO及Cu(OH)2,於934.0eV以上且936.0eV以下之範圍內觀察到。該等波峰由於在同一位置觀察到,故而無法區分兩者。Cu(I)之波峰主要源自Cu2O。又,Cu(0)之波峰源自金屬銅。Cu(I)之波峰及Cu(0)之波峰由於在930.0eV以上且933.5eV以下之範圍之同一位置觀察到,故而無法分離兩者。因此,於本發明中,將銅氧化率定義為如上所述。 In the X-ray photoelectron spectroscopy spectrum, the peak of Cu(II) is mainly derived from CuO and Cu(OH) 2 , and is observed in the range of 934.0 eV or more and 936.0 eV or less. These peaks cannot be distinguished because they are observed at the same position. The peak of Cu(I) is mainly derived from Cu 2 O. Further, the peak of Cu(0) is derived from metallic copper. The peak of Cu(I) and the peak of Cu(0) are observed at the same position in the range of 930.0 eV or more and 933.5 eV or less, so that it is impossible to separate the two. Therefore, in the present invention, the copper oxidation rate is defined as described above.

關於包含銅氧化率為上述範圍內之銅粒子的銅粉,與銅粒子表面所存在之Cu(I)及Cu(0)之合計量相比,Cu(II)之量較少或相同程度。藉由恰當地設定Cu(II)之量,能夠將由含有本發明之銅粉之導電性組合物所獲得之導體製成緻密之結構。又,由於導電性組合物與含氧絕緣材料之親和性較高,故而與電子零件之基材或介電材料之密接性提高,能夠獲得密接可靠性較高之電子零件。因此,使用本發明之銅粉,能夠適宜地製造電子零件用電極。進而,於導電性組合物中包含玻璃料之情形時,當使用導電性組合物作為陶瓷電子零件之電極時,由於銅粒子與陶瓷材料與玻璃料之親和性變得良好,故而於作為需要進行燒結之陶瓷電子零件用之導電性組合物而使用之情形時,有效地防止燒結過程中玻璃成分發生偏析之情況。由此,亦能夠將導體製成緻密之結構。又,本發明之銅粉由於實質上不含銅以外之異種元素,故而於使用場合之限制較少之方面亦具有優點。所謂「實質上不含異種元素」係指對銅粉進行元素分析時,銅及氧以外之異種元素之 含有比例之合計為0.1質量%以下。關於滿足上述銅氧化率之銅粉之適宜製造方法,於下文進行說明。 The amount of Cu(II) is less or the same as the total amount of Cu(I) and Cu(0) present on the surface of the copper particles in the copper powder containing copper particles having a copper oxidation rate within the above range. The conductor obtained from the conductive composition containing the copper powder of the present invention can be made into a dense structure by appropriately setting the amount of Cu(II). Moreover, since the affinity between the conductive composition and the oxygen-containing insulating material is high, the adhesion to the substrate or the dielectric material of the electronic component is improved, and an electronic component having high adhesion reliability can be obtained. Therefore, the electrode for an electronic component can be suitably manufactured using the copper powder of this invention. Further, when the conductive composition contains a glass frit, when the conductive composition is used as the electrode of the ceramic electronic component, since the affinity between the copper particles and the ceramic material and the glass frit is good, it is required as needed. When it is used as a conductive composition for sintered ceramic electronic parts, it is possible to effectively prevent segregation of glass components during sintering. Thereby, it is also possible to form the conductor into a dense structure. Further, since the copper powder of the present invention does not substantially contain a different element other than copper, it has an advantage in that it is less restrictive in use. The term "substantially free of heterogeneous elements" means heterogeneous elements other than copper and oxygen when performing elemental analysis on copper powder. The total content ratio is 0.1% by mass or less. A suitable production method of the copper powder satisfying the above copper oxidation rate will be described below.

又,關於上述波峰強度P0、P1及P2,P2:(P0+P1)之比率為15:85~50:50,特別是23:77~47:53,尤其是29:71~41:59時,就提高銅粉之耐氧化性之觀點亦較佳。 Further, the ratio of the peak intensities P 0 , P 1 and P 2 , P 2 :(P 0 + P 1 ) is 15:85 to 50:50, particularly 23:77 to 47:53, especially 29: From 71 to 41:59, the viewpoint of improving the oxidation resistance of copper powder is also preferable.

藉由XPS所進行之銅粒子之銅氧化率之測定方法如下。裝置可使用例如ULVAC-PHI股份有限公司製造之Quantum 2000。X射線源可使用Al-Kα線(1486.8eV)。X射線源之條件例如可設為17kV×0.023A。帶電修正可將SiO2之鍵能設為103.2eV而進行。又,光束直徑設為200微米(40W),於約300×900微米之範圍內進行測定。關於上述波峰強度P0、P1及P2,Cu(II)係於934.0eV以上且936.0eV以下之範圍,Cu(0)及Cu(I)係於930.0eV以上且933.5eV以下之範圍內由最高之計數數量(c/s)算出。該等除了能夠測定銅粒子單獨體以外,亦能夠測定與導電性組合物之黏合劑成分之混合體。於該情形時,於利用松脂醇等醇有機溶劑進行清洗而使銅粒子露出之狀態下進行測定即可。又,於形成有下述電子零件用之電極之情形時可對經如下處理者進行測定:對於銅粒子未經燒結、熔融、熔接之電極,將電極構件於中性之有機溶劑(醚、酮、內酯、芳香族烴、松脂醇、卡必醇乙酸酯等)之混合溶液中,於高溫高壓下煮沸而使樹脂膨潤,藉此使銅粒子之表面露出,將該表面露出之銅粒子單獨體取出,進行過濾、風乾。 The method for measuring the copper oxidation rate of copper particles by XPS is as follows. The device can use, for example, Quantum 2000 manufactured by ULVAC-PHI Co., Ltd. The X-ray source can use an Al-Kα line (1486.8 eV). The condition of the X-ray source can be, for example, 17 kV × 0.023 A. The charge correction can be performed by setting the bond energy of SiO 2 to 103.2 eV. Further, the beam diameter was set to 200 μm (40 W), and the measurement was carried out in the range of about 300 × 900 μm. Regarding the peak intensities P 0 , P 1 and P 2 , Cu(II) is in the range of 934.0 eV or more and 936.0 eV or less, and Cu(0) and Cu(I) are in the range of 930.0 eV or more and 933.5 eV or less. It is calculated from the highest count number (c/s). In addition to the measurement of the copper particle alone, it is also possible to measure a mixture with the binder component of the conductive composition. In this case, it may be measured by washing with an alcohol organic solvent such as rosin alcohol to expose the copper particles. Further, in the case where the electrode for the following electronic component is formed, it can be measured by the following processor: the electrode member is made of a neutral organic solvent (ether, ketone) for the electrode in which the copper particles are not sintered, melted, or welded. a mixed solution of lactone, aromatic hydrocarbon, rosinol, carbitol acetate, etc., which is boiled under high temperature and high pressure to swell the resin, thereby exposing the surface of the copper particles, and exposing the copper particles on the surface The individual bodies were taken out, filtered, and air dried.

關於本發明之銅粉,除了銅粒子之表面氧化狀態如上所述以外,氧之含有比例較低亦為特徵之一。詳細而言,本發明之銅粉較佳為氧之含有比例為0.15質量%以上且1.2質量%以下,進而較佳為0.4質量%以上且1.0質量%以下。若使用氧之含有比例為此範圍內的本發明之銅粉而製備導電性組合物,並由該導電性組合物形成導體,則該導體成為焙燒膜中孔隙較少之緻密者。又,使用氧之含有比例於此範圍 內之本發明之銅粉的導電性組合物氧係與含氧絕緣材料之親和性較高,密接性容易變高。又,於導電性組合物中含有玻璃料之情形時,銅粒子與玻璃料之親和性良好,導體中之玻璃之存在容易變得均勻。作為上述含氧絕緣體之例,可列舉氧化物陶瓷。作為氧化物陶瓷,例如可列舉:氧化鋁、氧化鋯、氧化鈦、鐵氧體、氧化鎂、氧化矽等單一金屬種之氧化物陶瓷或該等之混合物、此外之鈦酸鋇或鈦酸鍶等複合金屬氧化物陶瓷等。作為其他含氧絕緣體之例,可列舉結構中包含氧之樹脂。作為含氧樹脂,例如可列舉:環氧樹脂、氰酸酯樹脂、雙順丁烯二醯亞胺三樹脂(BT樹脂)、聚苯醚樹脂、酚樹脂、聚醯亞胺樹脂或聚醯胺樹脂、不飽和聚酯樹脂、液晶聚合物、聚對苯二甲酸乙二酯樹脂、聚乙烯萘樹脂等絕緣樹脂。此外,於樹脂中含有包含氧化矽或氧化鋁等各種氧化物之填料粒子等之情形時,該樹脂係與使用本發明之銅粉之導電性組合物之接著性良好。 Regarding the copper powder of the present invention, in addition to the surface oxidation state of the copper particles as described above, the low content ratio of oxygen is also one of the characteristics. Specifically, the copper powder of the present invention preferably has an oxygen content of 0.15% by mass or more and 1.2% by mass or less, more preferably 0.4% by mass or more and 1.0% by mass or less. When a conductive composition is prepared using the copper powder of the present invention in which the oxygen content ratio is within this range, and a conductor is formed from the conductive composition, the conductor becomes a denser having less voids in the calcined film. Further, the conductive composition of the copper powder of the present invention in which the oxygen content is contained in this range is high in affinity with the oxygen-containing insulating material, and the adhesion is likely to be high. Further, when the glass frit is contained in the conductive composition, the affinity between the copper particles and the glass frit is good, and the presence of the glass in the conductor is likely to be uniform. An oxide ceramic is exemplified as an example of the oxygen-containing insulator. Examples of the oxide ceramics include oxide ceramics of a single metal species such as alumina, zirconia, titania, ferrite, magnesia, and cerium oxide, or a mixture thereof, and barium titanate or barium titanate. Such as composite metal oxide ceramics. Examples of other oxygen-containing insulators include resins containing oxygen in the structure. Examples of the oxygen-containing resin include an epoxy resin, a cyanate resin, and a bis-n-butylene diimide. Resin (BT resin), polyphenylene ether resin, phenol resin, polyimide resin or polyamide resin, unsaturated polyester resin, liquid crystal polymer, polyethylene terephthalate resin, polyethylene naphthalene resin, etc. Insulating resin. In addition, when a filler particle containing various oxides such as cerium oxide or aluminum oxide is contained in the resin, the resin is excellent in adhesion to the conductive composition using the copper powder of the present invention.

本發明之銅粉中之氧之含有比例係藉由如下方法進行測定。作為裝置,例如可藉由使用堀場製作所股份有限公司製造之氧/氮分析裝置EMGA-620。稱取銅粉0.1g,放入至鎳膠囊中後,於石墨坩堝內使之燃燒,而求出氧之含有比例。 The content ratio of oxygen in the copper powder of the present invention is measured by the following method. As the apparatus, for example, an oxygen/nitrogen analyzer EMGA-620 manufactured by Horiba, Ltd. can be used. 0.1 g of copper powder was weighed and placed in a nickel capsule, and then burned in a graphite crucible to determine the oxygen content ratio.

關於本發明之銅粉,較佳為藉由雷射繞射散射式粒度分佈測定法所測得之累積體積50體積%下之體積累積粒徑D50為0.3μm以上且10μm以下,尤其是1.0μm以上且5.5μm以下。若構成銅粉之銅粒子之粒徑減小至該程度,則因比表面積增大而使銅粒子變得容易被氧化,關於本發明之銅粉,由於銅粒子之表面之銅之氧化狀態被控制為恰當,故而能夠防止因經時變化引起之氧化。 With respect to the copper powder of the present invention, it is preferred that the volume cumulative particle diameter D 50 at 50% by volume of the cumulative volume measured by the laser diffraction scattering particle size distribution measurement is 0.3 μm or more and 10 μm or less, especially 1.0. Μm or more and 5.5 μm or less. When the particle diameter of the copper particles constituting the copper powder is reduced to such an extent, the copper particles are easily oxidized due to an increase in the specific surface area. With regard to the copper powder of the present invention, the oxidation state of the copper on the surface of the copper particles is The control is appropriate, so that oxidation due to changes over time can be prevented.

上述體積累積粒徑D50之測定可藉由例如以下方法而進行。將0.1g之測定試樣與六偏磷酸鈉之20mg/L水溶液100ml混合,利用超音波均化器(日本精機製作所製造之US-300T)分散10分種。其後,使用雷 射繞射散射式粒度分佈測定裝置、例如日機裝公司製造之Microtrac MT-3000而測定粒度分佈。 The measurement of the volume cumulative particle diameter D 50 described above can be carried out, for example, by the following method. 0.1 g of the measurement sample was mixed with 100 ml of a 20 mg/L aqueous solution of sodium hexametaphosphate, and dispersed by an ultrasonic homogenizer (US-300T manufactured by Nippon Seiki Co., Ltd.) for 10 minutes. Thereafter, the particle size distribution is measured using a laser diffraction scattering type particle size distribution measuring apparatus, for example, Microtrac MT-3000 manufactured by Nikkiso Co., Ltd.

關於本發明之銅粉,可將其燒結而使用,或者亦可於未經燒結之粉體之狀態下使用。於將本發明之銅粉燒結而使用之情形時,該銅粉較佳為收縮開始溫度為480℃以上且620℃以下。尤佳為500℃以上且580℃以下。若使用收縮開始溫度為該範圍內之本發明之銅粉而製備導電性組合物,並由該導電性組合物形成導體,則能夠形成因低溫收縮引起之焙燒膜之「凹痕」、或相反因焙燒不足引起之「頸縮不良」較少之焙燒膜。其結果為,焙燒膜成為孔隙較少之緻密者。又,於導電性組合物中含有玻璃料之情形時,銅粒子與玻璃料之親和性變得良好,容易獲得導體中之軟化之玻璃之存在變得均勻之焙燒膜。收縮開始溫度可利用熱機械分析裝置(TMA)而測定。關於測定裝置,例如可使用Seiko Instruments公司製造之EXSTAR6000 TMA/SS6200。作為用以測定收縮開始溫度之試樣,例如使用圓柱成形體,該圓柱成形體係將預先稱取之銅粉0.2g放入至內徑3.8mm之鋁盒中,施加4835N之負載而形成者。將該圓柱成形體安裝於熱機械分析裝置(TMA),監控於負載98mN、氮氣環境下、以10℃/min之速度升溫時之縱向之熱膨脹率(%),測定膨脹行為初次自正轉為負之溫度(℃)。可將該溫度定義為收縮開始溫度。 The copper powder of the present invention may be used by sintering it or may be used in the state of an unsintered powder. When the copper powder of the present invention is used for sintering, the copper powder preferably has a shrinkage start temperature of 480 ° C or more and 620 ° C or less. More preferably, it is 500 ° C or more and 580 ° C or less. When a conductive composition is prepared using the copper powder of the present invention having a shrinkage start temperature within the range, and a conductor is formed from the conductive composition, a "dent" of the baked film due to low-temperature shrinkage can be formed, or vice versa. A calcined film having less "neck failure" due to insufficient calcination. As a result, the calcined film becomes a denser with less pores. Further, when the glass frit is contained in the conductive composition, the affinity between the copper particles and the glass frit is good, and it is easy to obtain a baked film in which the presence of the softened glass in the conductor is uniform. The shrinkage onset temperature can be measured using a thermomechanical analysis device (TMA). As the measuring device, for example, EXSTAR 6000 TMA/SS6200 manufactured by Seiko Instruments Co., Ltd. can be used. As a sample for measuring the shrinkage start temperature, for example, a cylindrical formed body in which 0.2 g of pre-weighed copper powder is placed in an inner diameter of 3.8 mm is used. In the aluminum case, a load of 4835 N is applied to form. The cylindrical molded body was attached to a thermomechanical analysis device (TMA), and the thermal expansion coefficient (%) in the longitudinal direction when the temperature was raised at a rate of 10 ° C/min under a nitrogen atmosphere and a nitrogen atmosphere was measured, and the expansion behavior was measured from the first to the positive Negative temperature (°C). This temperature can be defined as the shrinkage start temperature.

構成本發明之銅粉之銅粒子之形狀並無特別限制,例如可使用球狀、薄片狀、板狀、樹枝狀等各種形狀。使用何種形狀之銅粒子可根據本發明之銅粉之具體用途而恰當地判斷。銅粒子之形狀一般取決於其製造方法。球狀之銅粒子例如可藉由霧化法或濕式還原法而製造。薄片狀之粒子例如可藉由使球狀之粒子機械地塑性變形之方法而製造。板狀之粒子例如可藉由濕式還原法而製造。樹枝狀之銅粒子例如可藉由電解法而製造。本發明之銅粉亦可為各種形狀之銅粒子之混 合體。 The shape of the copper particles constituting the copper powder of the present invention is not particularly limited, and various shapes such as a spherical shape, a flake shape, a plate shape, and a dendritic shape can be used. The shape of the copper particles to be used can be appropriately judged according to the specific use of the copper powder of the present invention. The shape of the copper particles generally depends on the method of manufacture. The spherical copper particles can be produced, for example, by an atomization method or a wet reduction method. The flaky particles can be produced, for example, by a method of mechanically plastically deforming spherical particles. The plate-like particles can be produced, for example, by a wet reduction method. The dendritic copper particles can be produced, for example, by electrolysis. The copper powder of the invention can also be a mixture of copper particles of various shapes. Fit.

再者,所謂構成本發明之銅粉之銅粒子呈現上述各形狀意指藉由電子顯微鏡觀察(例如1000倍)而觀察本發明之銅粉時,呈現上述各形狀之粒子以個數基準占80%以上之情況。 In addition, the copper particles constituting the copper powder of the present invention have the above-described respective shapes, and when the copper powder of the present invention is observed by an electron microscope observation (for example, 1000 times), the particles having the above-described respective shapes occupy 80 on a number basis. More than %.

其次,對本發明之銅粉之適宜之製造方法進行說明。本發明之銅粉係使藉由各種方法所製造之原料銅粉於特定環境下,以恰當之條件進行氧化而適宜地製造。原料銅粉之製造方法雖無特別限制,但於製造包含球狀之銅粒子的銅粉之情形時,適宜為使用例如霧化法,於製造平均粒徑3μm以下之微粒之銅粉之情形時,適宜為濕式法。 Next, a suitable method for producing the copper powder of the present invention will be described. The copper powder of the present invention is suitably produced by subjecting the raw material copper powder produced by various methods to oxidation under appropriate conditions under appropriate conditions. The method for producing the raw material copper powder is not particularly limited. However, in the case of producing a copper powder containing spherical copper particles, it is preferable to use, for example, an atomization method to produce a copper powder of fine particles having an average particle diameter of 3 μm or less. Suitable for wet method.

作為霧化法,可較佳地採用氣體霧化法或水霧化法。於謀求粒子形狀之勻整化之情形時,較佳為採用氣體霧化法。另一方面,於謀求粒子之微細化之情形時,較佳為採用水霧化法。於氣體霧化法及水霧化法中,根據高壓霧化法由於可微細且均勻地製造粒子,故而尤佳。所謂高壓霧化法係於水霧化法中以50MPa以上且150MPa以下之程度之水壓力下進行霧化之方法。氣體霧化法係以0.5MPa以上且3MPa以下之程度之氣體壓力進行霧化之方法。 As the atomization method, a gas atomization method or a water atomization method can be preferably employed. In the case where the particle shape is uniformized, it is preferred to use a gas atomization method. On the other hand, in the case of purifying the particles, it is preferred to employ a water atomization method. In the gas atomization method and the water atomization method, it is particularly preferable because the high-pressure atomization method can produce particles finely and uniformly. The high-pressure atomization method is a method in which atomization is performed under a water pressure of 50 MPa or more and 150 MPa or less in a water atomization method. The gas atomization method is a method of atomizing at a gas pressure of about 0.5 MPa or more and 3 MPa or less.

作為濕式法,可採用還原析出法,其係向於銅鹽水溶液中添加有鹼性水溶液之漿料中添加還原劑。於謀求特定微粒銅粉之情形時,較佳為向漿料中添加還原糖或次磷酸、亞硫酸鈉等第一還原劑而製備氧化亞銅漿料後,添加水合肼、硫酸肼等肼化合物或硼氫化鈉等強鹼性還原劑的二階段還原法等。 As the wet method, a reduction precipitation method may be employed in which a reducing agent is added to a slurry in which an aqueous alkaline solution is added to a copper salt aqueous solution. In the case of obtaining a specific particulate copper powder, it is preferred to add a reducing agent such as reducing sugar or hypophosphorous acid or sodium sulfite to prepare a cuprous oxide slurry, and then add a cerium compound such as cerium hydrate or barium sulfate or boron. A two-stage reduction method such as a strong alkaline reducing agent such as sodium hydride.

對於原料銅粉,亦可在供於氧化處理前對其進行分級。該分級可藉由以作為目標粒度成為中心之方式,使用恰當之分級裝置,自所獲得之原料銅粉中分離粗粉或微粉而較容易地實施。分級較佳為以原料銅粉之D50之值成為先前說明之範圍之方式進行。 The raw material copper powder may also be classified before being subjected to oxidation treatment. This classification can be easily carried out by separating the coarse powder or the fine powder from the obtained raw material copper powder by using an appropriate classification device in such a manner as to be the target particle size. The classification is preferably carried out in such a manner that the value of D 50 of the raw material copper powder is within the range described above.

將如此而獲得之原料銅粉供於氧化處理。作為適宜之氧化條 件,例如可列舉於相對濕度為40%RH以上且80%RH以下,且溫度為60℃以上且120℃以下之大氣環境下靜置之條件作為工業之處理條件。銅粉之氧化處理之均一性保持、及防止因過剩處理引起之Cu(II)之增加所伴隨之粒子凝聚之觀點而言,關於處理時間,以大氣環境之條件為上述範圍內作為條件,較佳為20分鐘以上且650分鐘以下,進而較佳為30分鐘以上且600分鐘以下,更佳為30分鐘以上且180分鐘以下。於相對濕度較低之情形時,由於有氧化速度較慢之傾向,故而於此種情形時,較高地設定溫度即可。例如,相對濕度為40%以上且60%以下之情形,處理溫度較佳為70℃以上且130℃以下,相對濕度為超過60%且80%以下之情形,處理溫度較佳為60℃以上且90℃以下。處理中,較佳為將大氣環境之相對濕度及溫度保持固定,即恆溫恆濕,但視需要亦可一面使相對濕度及/或溫度變化一面進行處理。 The raw material copper powder thus obtained is supplied to the oxidation treatment. Suitable as an oxide strip The material may be, for example, a condition in which the relative humidity is 40% RH or more and 80% RH or less, and the temperature is 60° C. or more and 120° C. or less in an atmosphere to be left as an industrial processing condition. From the viewpoint of uniformity of oxidation treatment of copper powder and prevention of particle agglomeration accompanying an increase in Cu(II) due to excessive treatment, the conditions of the atmospheric environment are within the above range as conditions. It is preferably 20 minutes or longer and 650 minutes or shorter, more preferably 30 minutes or longer and 600 minutes or shorter, and still more preferably 30 minutes or longer and 180 minutes or shorter. In the case where the relative humidity is low, since the oxidation rate tends to be slow, in this case, the temperature may be set higher. For example, when the relative humidity is 40% or more and 60% or less, the treatment temperature is preferably 70° C. or higher and 130° C. or lower, and the relative humidity is more than 60% and 80% or less, and the treatment temperature is preferably 60° C. or higher. Below 90 °C. In the treatment, it is preferred to keep the relative humidity and temperature of the atmospheric environment constant, that is, constant temperature and humidity, but it is also possible to treat the relative humidity and/or temperature as needed.

作為成為氧化處理之對象之銅粉,例如可使用含水分比例較低之乾燥粉。於該情形時,含水分比例可設為例如0.1質量%以下。於相對濕度較低之情形時,雖然有氧化速度較慢之傾向,但可藉由對銅粉添加水分而提高氧化速度。例如可在相對於乾燥銅粉之質量於1質量%以上且5質量%之範圍內添加水分之狀態下進行銅粉之氧化處理。 As the copper powder to be subjected to the oxidation treatment, for example, a dry powder having a low moisture content can be used. In this case, the moisture content ratio can be set to, for example, 0.1% by mass or less. In the case where the relative humidity is low, although the oxidation rate tends to be slow, the oxidation rate can be increased by adding water to the copper powder. For example, the oxidation treatment of the copper powder can be carried out in a state where water is added in a range of 1% by mass or more and 5% by mass based on the mass of the dry copper powder.

藉由以上之方法,能夠始終順利地製造目標銅粉。如此而獲得之銅粉以維持銅粒子表面之氧化狀態為目的,較佳為密封至非透濕性材料之容器內,並於室溫(25℃)以下之溫度下進行保存。 By the above method, the target copper powder can be manufactured smoothly and smoothly. The copper powder obtained in this manner is preferably sealed in a container of a moisture impermeable material and kept at a temperature of room temperature (25 ° C) or less for the purpose of maintaining the oxidation state of the surface of the copper particles.

本發明之銅粉於導電特性方面優異,耐氧化性較高,又,與玻璃料之親和性良好,因此能夠適宜地作為導電性膏或導電性接著劑等導電性樹脂組合物、或導電性塗料等各種導電性材料之主要構成材料而使用。 The copper powder of the present invention is excellent in electrical conductivity, has high oxidation resistance, and has good affinity with a glass frit. Therefore, it can be suitably used as a conductive resin composition such as a conductive paste or a conductive adhesive or conductivity. It is used as a main constituent material of various conductive materials such as paints.

例如為了製備導電性膏,將本發明之銅粉與黏合劑及溶劑混合即可。如此,能夠獲得高溫焙燒型導電性膏。或者,亦可將本發明之 銅粉與黏合劑及溶劑,進而視需要之硬化劑或偶合劑、硬化促進劑等加以混合,而製備樹脂硬化型導電性膏。 For example, in order to prepare a conductive paste, the copper powder of the present invention may be mixed with a binder and a solvent. Thus, a high-temperature baking type conductive paste can be obtained. Alternatively, the invention may also be The copper powder is mixed with a binder and a solvent, and further, if necessary, a hardener or a coupling agent, a hardening accelerator, or the like, to prepare a resin-curable conductive paste.

作為上述黏合劑,雖然可列舉液狀之環氧樹脂、丙烯酸系樹脂、酚樹脂、不飽和聚酯樹脂等,但並不限定於該等。作為溶劑,可列舉:松脂醇、乙基卡必醇、卡必醇乙酸酯、丁基溶纖素、丁基卡必醇乙酸酯等。作為硬化劑,可列舉2-乙基-4-甲咪唑等。作為硬化促進劑,可列舉:三級胺類、三級胺鹽類、咪唑類、膦類、鏻鹽類等。 Examples of the above-mentioned binder include a liquid epoxy resin, an acrylic resin, a phenol resin, and an unsaturated polyester resin, but are not limited thereto. Examples of the solvent include rosin alcohol, ethyl carbitol, carbitol acetate, butyl cellosolve, and butyl carbitol acetate. Examples of the curing agent include 2-ethyl-4-methylimidazole and the like. Examples of the curing accelerator include tertiary amines, tertiary amine salts, imidazoles, phosphines, and phosphonium salts.

進而,於將導電性膏用於需要燒結之氧化物陶瓷電子零件之情形時,為了提高對氧化物陶瓷之密接性,較佳為於導電性膏中進而混合玻璃料。作為玻璃料,可列舉對以氧化矽作為必須成分且添加有選自由氧化鋁、氧化硼、碳酸鈣、氧化鈦、氧化鋅、氧化鉍、氧化釩、磷酸、氧化銻、氧化鐵、氧化碲、氧化錫、氧化鈰、氧化鑭及氧化錫構成之群之至少1種氧化物的混合物進行加熱使之熔融,並進行粉碎而成者等。 Further, when the conductive paste is used for an oxide ceramic electronic component to be sintered, it is preferable to further mix the glass frit in the conductive paste in order to improve the adhesion to the oxide ceramic. Examples of the glass frit include cerium oxide as an essential component and addition of aluminum oxide, boron oxide, calcium carbonate, titanium oxide, zinc oxide, cerium oxide, vanadium oxide, phosphoric acid, cerium oxide, iron oxide, cerium oxide, and the like. A mixture of at least one oxide of a group consisting of tin oxide, cerium oxide, cerium oxide, and tin oxide is heated, melted, and pulverized.

含有本發明之銅粉之導電性膏能夠適宜地作為例如藉由網版印刷之導體電路形成用、或各種電子零件之電性接點構件用而使用。例如可列舉:積層陶瓷電容器之內部電極、電感器或暫存器等晶片零件、單板電容器電極、鉭電容器電極、樹脂多層基板、低溫同時焙燒陶瓷(LTCC)多層基板、天線開關模組、PA模組或高頻主動濾波器等模組。作為陶瓷電子零件之絕緣材料,可列舉:氧化鋁、氧化鋯、氧化鈦、鐵氧體、氧化鎂、氧化矽等氧化物陶瓷、此外之鈦酸鋇、鈦酸鍶等陶瓷複合氧化物等。又,除了可用於使用樹脂作為絕緣材料之電子零件之軟性印刷基板(FPC)、堆疊多層配線板等印刷配線板用電極以外,亦可用於PDP(plasma display panel,電漿顯示器面板)前面板及背面板或PDP彩色濾光片用電磁屏蔽濾光片、結晶型太陽電池表面電極及背面引出電極、導電性接著劑、EMI(electro magnetic interference,電磁干擾)屏蔽、RF-ID(radio-frequency identification,射頻識別)、及PC(personal computer,個人電腦)鍵盤等之膜片開關、各向異性導電膜(ACF/ACP)等。於使用樹脂作為絕緣材料之情形時,作為具體樹脂之例,可列舉:環氧樹脂、氰酸酯樹脂、雙順丁烯二醯亞胺三樹脂(BT樹脂)、聚苯醚樹脂、酚樹脂、聚醯亞胺樹脂或聚醯胺樹脂、不飽和聚酯樹脂、液晶聚合物、聚對苯二甲酸乙二酯樹脂、聚乙烯萘樹脂等絕緣樹脂。又,亦可列舉樹脂中含有包含氧化矽或氧化鋁等各種氧化物無機粒子之填料粒子等之情形。 The conductive paste containing the copper powder of the present invention can be suitably used, for example, for forming a conductor circuit for screen printing or an electrical contact member for various electronic parts. For example, an internal electrode of a multilayer ceramic capacitor, a wafer component such as an inductor or a temporary memory, a single-plate capacitor electrode, a tantalum capacitor electrode, a resin multilayer substrate, a low-temperature simultaneous-fired ceramic (LTCC) multilayer substrate, an antenna switch module, and a PA Modules such as modules or high frequency active filters. Examples of the insulating material of the ceramic electronic component include oxide ceramics such as alumina, zirconia, titania, ferrite, magnesia, and cerium oxide, and ceramic composite oxides such as barium titanate and barium titanate. In addition, it can be used for a PDP (plasma display panel) front panel and a flexible printed circuit board (FPC) for electronic components using a resin as an insulating material, and an electrode for a printed wiring board such as a stacked multilayer wiring board. Electromagnetic shielding filter for back panel or PDP color filter, surface electrode and back electrode of crystalline solar cell, conductive adhesive, EMI (electromagnetic interference) shielding, RF-ID (radio-frequency identification) , radio frequency identification), and PC (personal computer, personal computer) keyboard and other membrane switches, anisotropic conductive film (ACF / ACP). In the case where a resin is used as the insulating material, examples of the specific resin include epoxy resin, cyanate resin, and bis-cis-butylimine. Resin (BT resin), polyphenylene ether resin, phenol resin, polyimide resin or polyamide resin, unsaturated polyester resin, liquid crystal polymer, polyethylene terephthalate resin, polyethylene naphthalene resin, etc. Insulating resin. Further, a case where a filler particle containing various oxide inorganic particles such as cerium oxide or aluminum oxide is contained in the resin may be mentioned.

[實施例] [Examples]

以下,藉由實施例更詳細地說明本發明。然而,本發明之範圍不限於該等實施例。於實施例及比較例之前,先對原料銅粉之製造進行說明。 Hereinafter, the present invention will be described in more detail by way of examples. However, the scope of the invention is not limited to the embodiments. Prior to the examples and comparative examples, the production of the raw material copper powder will be described.

(原料銅粉A之製造) (Manufacture of raw material copper powder A)

於燃氣爐中對電解銅(銅純度:Cu99.95%)進行加熱而製成熔液。繼而,向水霧化裝置中之餵槽中注入上述熔液100kg,一面自餵槽底部之噴嘴(口徑5mm)流下熔液,一面自全錐型之噴嘴(口徑26mm)之噴射孔,將水以成為倒圓錐狀之水流形狀之方式噴射(水壓100MPa,水量350L/min)至上述熔液,進行水霧化,藉此製造銅粉。 Electrolytic copper (copper purity: Cu 99.95%) was heated in a gas furnace to prepare a melt. Then, 100 kg of the melt was poured into the feed tank in the water atomizing device, and the molten metal was poured from the nozzle (caliber of 5 mm) at the bottom of the feed tank, and the water was sprayed from the nozzle of the full-cone type nozzle (bore diameter: 26 mm). The molten metal was sprayed (water pressure: 100 MPa, water amount: 350 L/min) to the molten metal in the shape of an inverted cone shape, and water atomization was carried out to produce copper powder.

其次,將所獲得之銅粉利用分級裝置(日清工程股份有限公司製造之「Turbo Classifier(商品名)TC-25(型號)」)進行分級,使用經分級者作為原料銅粉A。原料銅粉A為球狀之乾燥粉,其D50及氧之含有比例如以下之表1所示。 Then, the copper powder obtained was classified by the classification apparatus (Turbo Classifier (trade name) TC-25 (model)) manufactured by Nissin Engineering Co., Ltd.), and the graded person was used as the raw material copper powder A. The raw material copper powder A is a spherical dry powder, and the ratio of D 50 to oxygen is shown, for example, in Table 1 below.

(原料銅粉B之製造) (Manufacture of raw copper powder B)

於原料銅粉A之製造中,變更分級裝置之分級點,除此以外,與原料銅粉A同樣地獲得原料銅粉B。原料銅粉B為球狀之乾燥粉,其D50及氧之含有比例如以下之表1所示。 In the production of the raw material copper powder A, the raw material copper powder B was obtained in the same manner as the raw material copper powder A except that the classification point of the classifying device was changed. The raw material copper powder B is a spherical dry powder, and the ratio of D 50 to oxygen is shown, for example, in Table 1 below.

(原料銅粉C之製造) (Manufacture of raw material copper powder C)

於原料銅粉A之製造中,變更分級裝置之分級點,除此以外,與原料銅粉A同樣地獲得原料銅粉C。原料銅粉C為球狀之乾燥粉,其D50及氧之含有比例如以下之表1所示。 In the production of the raw material copper powder A, the raw material copper powder C was obtained in the same manner as the raw material copper powder A except that the classification point of the classifying device was changed. The raw material copper powder C is a spherical dry powder, and the ratio of D 50 to oxygen is shown, for example, in Table 1 below.

(原料銅粉D之製造) (Manufacture of raw material copper powder D)

使硫酸銅(五水鹽)100kg溶解而製成200L之水溶液,一面將其維持於60℃,一面添加25質量%氫氧化鈉水溶液125L及450g/L之葡萄糖水溶液80L,而生成氧化亞銅漿料。向漿料中進而添加20重量%水合肼100L,藉此獲得原料銅粉D。原料銅粉D為球狀之乾燥粉,其D50及氧之含有比例如以下之表1所示。 After dissolving 100 kg of copper sulfate (pentahydrate salt) to prepare an aqueous solution of 200 L, while maintaining this at 60 ° C, 125 L of a 25 mass% sodium hydroxide aqueous solution and 80 L of a 450 g/L glucose aqueous solution were added to form a cuprous oxide slurry. material. Further, 20% by weight of hydrazine hydrate 100 L was further added to the slurry, whereby the raw material copper powder D was obtained. The raw material copper powder D is a spherical dry powder, and the ratio of D 50 to oxygen is shown, for example, in Table 1 below.

(實施例1) (Example 1)

將1000g原料銅粉A於調溫、調濕至80℃˙80%RH之恆溫恆濕槽內靜置30分鐘,於大氣環境下進行氧化處理。如此獲得目標銅粉。 1000 g of the raw material copper powder A was allowed to stand in a constant temperature and humidity chamber adjusted to 80 ° C ̇ 80% RH for 30 minutes, and subjected to oxidation treatment in an atmospheric environment. The target copper powder is obtained in this way.

(實施例2至10) (Examples 2 to 10)

於以下之表2所示之條件下,進行同表所示之原料銅粉之氧化處理,除此以外,與實施例1同樣地獲得目標銅粉。 The target copper powder was obtained in the same manner as in Example 1 except that the oxidation treatment of the raw material copper powder shown in the same table was carried out under the conditions shown in Table 2 below.

(實施例11及12) (Examples 11 and 12)

在相對於表2所示之原料銅粉之質量添加3質量%之水分而使該原料銅粉濕潤之狀態下,於同表所示之條件下進行氧化處理,除此以 外,與實施例1同樣地獲得目標銅粉。 In the state where the raw material copper powder is wetted by adding 3 mass% of water to the mass of the raw material copper powder shown in Table 2, the oxidation treatment is performed under the conditions shown in the same table, and The target copper powder was obtained in the same manner as in Example 1.

(實施例13) (Example 13)

在相對於表2所示之原料銅粉之質量添加1質量%之水分而使該原料銅粉濕潤之狀態下,於同表所示之條件下進行氧化處理,除此以外,與實施例1同樣地獲得目標銅粉。 In the state in which 1% by mass of water was added to the mass of the raw material copper powder shown in Table 2, and the raw material copper powder was wetted, oxidation treatment was carried out under the conditions shown in the same table, and Example 1 was carried out. The target copper powder is obtained in the same manner.

(比較例1至4) (Comparative Examples 1 to 4)

直接使用原料銅粉A至D。 Raw material copper powders A to D are used directly.

(比較例5至7) (Comparative Examples 5 to 7)

於以下之表2所示之條件下,進行同表所示之原料銅粉之氧化處理,除此以外,與實施例1同樣地獲得目標銅粉。 The target copper powder was obtained in the same manner as in Example 1 except that the oxidation treatment of the raw material copper powder shown in the same table was carried out under the conditions shown in Table 2 below.

(比較例8) (Comparative Example 8)

在相對於以下之表2所示之原料銅粉之質量添加3質量%之水分而使該原料銅粉濕潤之狀態下,於同表所示之條件下進行氧化處理,除此以外,與實施例1同樣地獲得目標銅粉。 In the state in which the raw material copper powder was wetted by adding 3 mass% of water to the mass of the raw material copper powder shown in the following Table 2, the oxidation treatment was carried out under the conditions shown in the same table, and other methods were carried out. Example 1 obtained the same target copper powder.

(評價) (Evaluation)

藉由上述方法測定實施例及比較例中所獲得之銅粉之銅氧化率、氧之含有比例及D50。又,藉由以下之方法,測定收縮開始溫度,並評價焙燒膜之緻密性及焙燒膜中之玻璃均一性。又,亦進行綜合評價。將其結果示於以下之表2。 The copper oxide ratio, the oxygen content ratio, and D 50 of the copper powder obtained in the examples and the comparative examples were measured by the above methods. Moreover, the shrinkage start temperature was measured by the following method, and the compactness of the baked film and the glass uniformity in the baked film were evaluated. Also, a comprehensive evaluation was conducted. The results are shown in Table 2 below.

(收縮開始溫度) (shrinkage start temperature)

藉由熱機械分析(TMA),藉由上述方法測定銅粉之收縮開始溫度。 The shrinkage initiation temperature of the copper powder was measured by the above method by thermomechanical analysis (TMA).

(焙燒膜之緻密性I) (The compactness of the calcined film I)

對實施例及比較例中所獲得之銅粉添加松脂醇及丙烯酸系樹脂並混合,而製備導電性膏(1)。銅粉於該導電性膏(1)中所占之比例為70質量%,松脂醇之比例為25質量%,丙烯酸系樹脂之比例為5質量 %。於氧化鋁基板上以膜厚50μm塗佈該導電性膏而形成塗膜。將塗膜於氮氣環境下,於845℃下焙燒20分鐘而獲得焙燒膜。利用掃描型電子顯微鏡(1000倍)放大所獲得之焙燒膜之表面,拍攝10個視野之影像。解析該10個視野之影像,基於以下之基準評價緻密性。再者,所謂孔隙面積比係藉由影像解析求出1個視野中所含之孔隙(5μm以上)之面積,並將該10個視野之值算術平均化而獲得之值。若孔隙面積過大,則緻密性不足,相反若過少,則緻密性過高,對下述玻璃分佈均一性產生不良影響。緻密性之好壞係基於以下3個等級進行評價。 To the copper powder obtained in the examples and the comparative examples, rosin alcohol and an acrylic resin were added and mixed to prepare a conductive paste (1). The proportion of copper powder in the conductive paste (1) is 70% by mass, the ratio of rosinol is 25% by mass, and the ratio of acrylic resin is 5 mass. %. The conductive paste was applied to an alumina substrate at a film thickness of 50 μm to form a coating film. The coating film was baked at 845 ° C for 20 minutes under a nitrogen atmosphere to obtain a baked film. The surface of the obtained calcined film was magnified by a scanning electron microscope (1000 times), and images of 10 fields of view were taken. The images of the 10 fields of view were analyzed, and the compactness was evaluated based on the following criteria. In addition, the pore area ratio is obtained by image analysis to obtain an area of pores (5 μm or more) included in one field of view, and arithmetically average the values of the ten fields of view. If the pore area is too large, the denseness is insufficient, and if it is too small, the denseness is too high, which adversely affects the uniformity of the glass distribution described below. The quality of the compactness is evaluated based on the following three levels.

◎:孔隙面積比為3%以上且7%以下。 ◎: The pore area ratio is 3% or more and 7% or less.

○:孔隙面積比為1%以上且未達3%,或超過7%且為10%以下。 ○: The void area ratio is 1% or more and less than 3%, or more than 7% and 10% or less.

×:孔隙面積比為未達1%,或超過10%。 ×: The pore area ratio is less than 1%, or more than 10%.

(焙燒膜之密接性II) (Adhesion of baked film II)

對於上述焙燒膜,基於另一觀點評價密接性。詳細而言,將焙燒膜連同基板一併浸漬於超音波清洗機30秒後,利用掃描型電子顯微鏡(1000倍)觀察焙燒膜之表面,基於以下3個等級對約100μm見方之觀察視野中之焙燒膜之密接性之好壞進行評價。 With respect to the above calcined film, the adhesion was evaluated based on another viewpoint. Specifically, the calcined film was immersed in the ultrasonic cleaning machine together with the substrate for 30 seconds, and the surface of the baked film was observed by a scanning electron microscope (1000 times), and was observed in the observation field of about 100 μm square based on the following three levels. The adhesion of the baked film was evaluated.

◎:完全未觀察到焙燒膜之剝離。 ◎: Peeling of the baked film was not observed at all.

○:焙燒膜面積之70%以上密接。 ○: 70% or more of the area of the calcined film was in close contact with each other.

×:密接之焙燒膜面積未達30%。 ×: The area of the baked film which is in close contact is less than 30%.

(焙燒膜中之玻璃分佈均一性) (glass distribution uniformity in the calcined film)

對實施例及比較例中所獲得之銅粉添加松脂醇、丙烯酸系樹脂(大成精緻化學品製造之KWE-250T)及玻璃料(旭硝子製造之ASF1891F)並混合,而製備導電性膏(2)。銅粉於該導電性膏(2)中所占之比例為70質量%,松脂醇之比例為22質量%,丙烯酸系樹脂之比例為3質量%,玻璃料之比例為5質量%。除此以外,與上述焙燒膜之緻密性之評價同樣地操作,而獲得焙燒膜。對於焙燒膜之表面,以視野 約100μm見方、1000倍獲得影像,對該影像進行EDX(energy dispersive X-ray,能量色散X射線)分析,根據源自玻璃料之Si量而評價玻璃分佈均一性。評價基準如下。再者,Si量係Si×100/(Si+Cu)所定義之量。式中,Si及Cu表示EDX分析中之Si及Cu之波峰強度。 To the copper powder obtained in the examples and the comparative examples, rosin alcohol, an acrylic resin (KWE-250T manufactured by Daisei Fine Chemicals Co., Ltd.), and a glass frit (ASF1891F manufactured by Asahi Glass Co., Ltd.) were added and mixed to prepare a conductive paste (2). . The proportion of the copper powder in the conductive paste (2) was 70% by mass, the ratio of rosinol was 22% by mass, the ratio of the acrylic resin was 3% by mass, and the ratio of the glass frit was 5% by mass. Except for this, the calcined film was obtained in the same manner as the evaluation of the compactness of the above calcined film. For the surface of the baked film, with a field of view The image was obtained at about 100 μm square and 1000 times, and EDX (energy dispersive X-ray) analysis was performed on the image, and the glass distribution uniformity was evaluated based on the amount of Si derived from the glass frit. The evaluation criteria are as follows. Further, the amount of Si is an amount defined by Si × 100 / (Si + Cu). In the formula, Si and Cu represent the peak intensities of Si and Cu in the EDX analysis.

◎:Si量為1%以上且10%以下。 ◎: The amount of Si is 1% or more and 10% or less.

○:Si量為0.5%以上且未達1%,或超過10%且為20%以下。 ○: The amount of Si is 0.5% or more and less than 1%, or more than 10% and 20% or less.

×:Si量未達0.5%,或超過20%. ×: The amount of Si is less than 0.5%, or more than 20%.

(綜合評價) (Overview)

上述評價中,進行下述評價作為綜合評價。 In the above evaluation, the following evaluation was performed as a comprehensive evaluation.

◎:緻密性I、緻密性II及均一性評價中,2項以上為◎。 ◎: In the evaluation of compactness I, compactness II, and homogeneity, two or more were ◎.

○:緻密性I、緻密性II及均一性評價中,1項以上為○。 ○: In the evaluation of the compactness I, the compactness II, and the uniformity, one or more of them were ○.

×:緻密性I、緻密性II及均一性評價中,於1項以上有×。 ×: In the evaluation of the density I, the compactness II, and the uniformity, there are × in one or more items.

由表2所示之結果明確可知,各實施例所獲得之銅粉係與比較例之銅粉相比,氧化開始溫度更高,耐氧化性更優異。又,可知以各實施例所獲得之銅粉作為原料而製造之焙燒膜係與以比較例之銅粉作為原料而製造之焙燒膜相比,膜之緻密性更高,而且銅粉與玻璃之親和性變得更良好。 As is clear from the results shown in Table 2, the copper powder obtained in each of the examples had higher oxidation initiation temperature and more excellent oxidation resistance than the copper powder of the comparative example. Moreover, it is understood that the calcined film produced by using the copper powder obtained in each of the examples as a raw material has a higher density of the film than the calcined film produced by using the copper powder of the comparative example as a raw material, and the copper powder and the glass are more Affinity has become better.

[產業上之可利用性] [Industrial availability]

根據本發明,可提供收縮溫度控制優異之銅粉。該銅粉由於與焙燒時之玻璃料之親和性變得良好,故而藉由使用該銅粉能夠獲得緻密性優異之焙燒膜。又,該銅粉於製成導電性組合物時,與含氧絕緣材料之親和性較高,能夠獲得密接可靠性較高之電子零件。 According to the present invention, copper powder excellent in shrinkage temperature control can be provided. Since the copper powder has a good affinity with the glass frit at the time of baking, a baked film excellent in compactness can be obtained by using the copper powder. Further, when the copper powder is used as a conductive composition, the affinity with the oxygen-containing insulating material is high, and an electronic component having high adhesion reliability can be obtained.

Claims (7)

一種銅粉,其於使用X射線光電子分光裝置(XPS)測定表面所獲得之X射線光電子分光光譜中,Cu(II)之波峰強度P2相對於Cu(I)之波峰強度P1及Cu(0)之波峰強度P0之比率即P2/(P0+P1)之值為0.15以上且1以下。 A copper powder having a peak intensity P 2 of Cu(II) relative to a peak intensity P 1 and Cu of Cu(I) in an X-ray photoelectron spectroscopy spectrum obtained by measuring a surface using an X-ray photoelectron spectroscopy device (XPS) The ratio of the peak intensity P 0 of 0), that is, the value of P 2 /(P 0 + P 1 ) is 0.15 or more and 1 or less. 如請求項1之銅粉,其氧之含有比例為0.15質量%以上且1.2質量%以下。 The copper powder according to claim 1 has a oxygen content of 0.15% by mass or more and 1.2% by mass or less. 如請求項1之銅粉,其藉由雷射繞射散射式粒度分佈測定法所獲得之累積體積50體積%下之體積累積粒徑D50為0.3μm以上且10μm以下。 The copper powder according to claim 1 which has a volume cumulative particle diameter D 50 of 50% by volume cumulative volume obtained by a laser diffraction scattering particle size distribution measurement of 0.3 μm or more and 10 μm or less. 一種導電性組合物,其含有如請求項1至3中任一項之銅粉、與黏合劑。 A conductive composition comprising the copper powder according to any one of claims 1 to 3, and a binder. 一種電子零件用電極,其含有如請求項1至3中任一項之銅粉。 An electrode for an electronic component, comprising the copper powder according to any one of claims 1 to 3. 一種如請求項1之銅粉之製造方法,其係於相對濕度為40%RH以上且80%RH以下,且溫度為20℃以上且120℃以下之大氣環境下,將經乾燥之原料銅粉靜置20分鐘以上且650分鐘以下而進行氧化處理。 A method for producing a copper powder according to claim 1, which is characterized in that the dried raw material copper powder is in an atmosphere having a relative humidity of 40% RH or more and 80% RH or less and a temperature of 20 ° C or more and 120 ° C or less. Oxidation treatment was carried out by allowing to stand for 20 minutes or more and 650 minutes or less. 如請求項6之銅粉之製造方法,其中於相對於原料銅粉之質量以1質量%以上且3質量%之範圍添加水分之狀態下進行氧化處理。 The method of producing copper powder according to claim 6, wherein the oxidation treatment is carried out in a state where water is added in an amount of 1% by mass or more and 3% by mass based on the mass of the raw material copper powder.
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