TW201616545A - Inductively coupled plasma processing device and heating part thereof - Google Patents

Abstract

The present invention provides an inductively coupled plasma processing device and the heating part thereof, so as to reduce or even completely avoid weakening of plasma dissociation effect of an electric heating wire above the dielectric window to an inductive coil. The heating part is configured to control the temperature of the dielectric window at a top of a reaction chamber. The heating part includes the electric heating wire arranged on an upper surface of the dielectric window. The entire of the electric heating wire is centrally symmetric. The electric heating wire has two contacts configured to be electrically connected to a heating power supply for forming a loop. The electric heating wire circularly forms multiple patterns, and each pattern is opposite to a heating current direction in the center of the symmetric pattern.

Description

Inductively coupled plasma processing device and heating element thereof

The present invention relates to an inductive coupled plasma (ICP) processing device, such as an ICP etching device, an ICP thin film deposition device, etc., and more particularly to the use of a dielectric window for the top of a reaction chamber in the above device. Temperature controlled heating unit.

In recent years, with the development of semiconductor manufacturing processes, the integration and performance requirements of components have become higher and higher, and plasma processes are widely used in the manufacture of semiconductor components. The main plasma processing devices include capacitive coupling type (CCP) and inductive coupling type (ICP). Among them, the inductive coupling type plasma processing device has the advantages of high plasma concentration and fast etching rate.

As shown in FIG. 1, the inductively coupled plasma processing apparatus generally includes a reaction chamber 100, and a susceptor 20 for placing a substrate to be processed, a low frequency bias RF power source (such as 2Mhz) is disposed under the inside of the reaction chamber 100. /400 KHz) is connected to the base 20 through a matching network 1. An exhaust device (not shown) is connected to the periphery of the susceptor 20 to evacuate the newly generated gas during the reaction and some of the reaction gas that is expected to participate in the reaction to control the gas pressure in the reaction chamber 100. The top of the reaction chamber 100 is an insulating window 110. Since it is made of an electrically insulating material, the upper electromagnetic field can pass through the reaction chamber 100 to excite the reaction gas in the reaction chamber 100 to dissociate to form a plasma. Process processing.

Since the temperature difference between different regions in the insulating window 110 affects the uniformity of the reaction speed in the reaction chamber 100, even if the temperature gradient is too large, the insulating window 110 may be cracked and damaged, and thus the upper surface of the insulating window 110 is provided with heating. The component, which is typically a heating wire (also referred to as an electric heating coil) 120, controls the temperature of the insulating window 110. The heating wire 120 is connected by wires to a heating power source (which can be either an AC power source or a DC power source).

Above the heating wire 120, at least one induction coil 140 is disposed, and the induction coil 140 is connected to a high frequency RF power source (such as 13 MHz) through a matching network 2. The induction coil 140 generates a high frequency electromagnetic field after being applied with high frequency radio frequency power. The high frequency electromagnetic field passes through the heating wire 120 and the insulating window 110 into the reaction chamber 100 to excite the reaction gas in the reaction chamber 100 to be generated. Maintain the required plasma.

However, when the heating wire 120 forms a closed loop to heat the insulating window 110, it induces an electromagnetic field that is opposite to the high-frequency electromagnetic field of the induction coil 140 under the action of the high-frequency electromagnetic field generated by the induction coil 140. When the reverse electromagnetic field acts inside the reaction chamber 100, it cancels the effect of a part of the high frequency electromagnetic field generated by the induction coil 140 (corresponding to canceling the energy of a part of the high frequency RF power coupled to the reaction chamber 100), thereby reducing the Plasma density.

It is an object of the present invention to improve or even completely avoid the weakening of the effect of the heating wire above the insulating window on the dissociation of the induction coil from the plasma.

According to an aspect of the invention, there is provided an inductively coupled plasma processing apparatus comprising: a reaction chamber having an insulating window disposed at a top thereof; a heating member, wherein the heating member comprises a insulating window disposed a heating wire on the upper surface, the heating wire is entirely centrally symmetrical, and the heating wire has two contacts for electrically connecting with a heating power source to form a loop; the heating wire surrounds forming a plurality of graphics, each graphic The direction of the heating current is opposite to the direction of the heating current in the pattern symmetrical with the center of the pattern; the induction coil is disposed above the heating wire and electrically connected to the RF power source; the electromagnetic field generated by the induction coil is The magnetic flux in the area where a pattern is located is always equal to the magnetic flux in the area where the pattern is symmetric with the center of the figure.

Optionally, the induction coil has a circular shape, and a center of the circle is a symmetric center of the heating wire.

Optionally, the heating wire comprises a plurality of parallel lateral extensions and a connection connecting adjacent lateral extensions.

Optionally, the end of the lateral extension is located at an edge of the insulating window such that the heating wire occupies a larger area on the insulating window.

Alternatively, the distance between adjacent lateral extensions is equal.

Optionally, the heating wire comprises two layers, wherein the lateral extension and the extension are located near a lower layer of the insulating window, and a vertical portion is located at an upper layer away from the insulating window; One end of the portion is connected to a lateral extension or connection of the lower layer, and the other end is connected to one of the two contacts.

Optionally, the lateral extension or connection portion connected to the vertical portion, and the contact point connected to the vertical portion are respectively located at two ends of the heating wire.

Optionally, the heating wire is entirely located in the same layer, and the heating wire entity passes through its symmetrical center.

Optionally, the heating power source is an alternating current power source or a direct current power source.

Optionally, the heating wire is distributed on the upper surface of the insulating window in such a manner that two directions perpendicular to each other, that is, a P direction and a Q direction, are defined in a plane where the insulating window is located or a plane parallel to the plane. The heating wire extends from one side of the insulating window in the P direction to the opposite side of the insulating window, and then extends to the other side in the Q direction to another position; in the other position Wherein, the heating wire extends in the opposite direction from the P direction from the other side of the insulating window to the one side; in this manner, the heating wire is gradually extended from one end in the Q direction to the other end. .

Optionally, the heating wire is folded back to the one end in the Q direction from the other end in the Q direction; the electric heating wire that is folded back and the heating wire before the turning point are not in the same plane. .

Optionally, the folded electric heating wire is linear.

Optionally, the two contacts are located at the one end in the Q direction.

Optionally, the folded heating wire is insulated from the heating wire before the turning point by an insulating material.

Optionally, the folded electric heating wire is a core wire covering the outer sheath.

Optionally, the electrically conductive wire of the folded back wire is superior to the electric heating wire before the turning point.

Optionally, the folded electric heating wire is insulated from the heating wire before the turning point by an insulating material.

Optionally, the folded electric heating wire is suspended above the heating wire before the turning point.

Optionally, the heating wire is entirely located in the same layer, and includes an upper left portion, an upper right portion, a lower left portion, and a lower right portion disposed in different regions of the insulating window; wherein the lower right portion is at a center of symmetry and the upper left portion The portions are connected, the upper left portion is connected to the upper right portion, and the upper right portion is connected to the lower left portion at a center of symmetry.

Optionally, any one or all of the upper left portion, the upper right portion, the lower left portion, and the lower right portion of the heating wire are disposed in such a manner as to be defined in a plane in which the insulating window is located or a plane parallel to the plane Two directions perpendicular to each other, that is, a P direction and a Q direction; the heating wire extends from one side of the insulating window in the P direction to the opposite side of the insulating window, and then to the other side along the Q direction Extending to another location; at the other location, the heating wire extends in a direction opposite to the P direction from the other side of the insulating window to the one side; in this manner, The heating wire is gradually extended from one end in the Q direction to the other end.

According to another aspect of the present invention, there is provided a heating component for an inductively coupled plasma processing apparatus for temperature control of an insulating window at a top of a reaction chamber, the heating component comprising a heating wire on the upper surface of the insulating window, the heating wire is entirely centrally symmetrical, and the heating wire has two contacts for electrically connecting with a heating power source to form a loop; the heating wire surrounds forming a plurality of patterns, The direction of the heating current in each of the patterns and the pattern symmetrical with respect to the center of the pattern is opposite.

Optionally, the induction coil has a circular shape, and a center of the circle is a symmetric center of the heating wire.

Optionally, the heating wire comprises a plurality of parallel lateral extensions and a connection connecting adjacent lateral extensions.

Optionally, the end of the lateral extension is located at an edge of the insulating window such that the heating wire occupies a larger area on the insulating window.

Alternatively, the distance between adjacent lateral extensions is equal.

Optionally, the heating wire comprises two layers, wherein the lateral extension and the extension are located near a lower layer of the insulating window, and a vertical portion is located at an upper layer away from the insulating window; One end of the portion is connected to a lateral extension or connection of the lower layer, and the other end is connected to one of the two contacts.

Optionally, the lateral extension or connection portion connected to the vertical portion, and the contact point connected to the vertical portion are respectively located at two ends of the heating wire.

Optionally, the heating wire is entirely located in the same layer, and the heating wire entity passes through its symmetrical center.

Optionally, the heating power source is an alternating current power source or a direct current power source.

Optionally, the heating wire is disposed in such a manner that two directions perpendicular to each other, that is, a P direction and a Q direction are defined in one plane; the heating wire extends from one side to the other side in the P direction, and then Extending from the other side in the Q direction to another position; at the other position, the heating wire extends in the opposite direction of the P direction from the other side to the one side; In one mode, the heating wire gradually extends from one end in the Q direction to the other end.

Optionally, the heating wire is folded back to the one end in the Q direction from the other end in the Q direction; the electric heating wire that is folded back and the heating wire before the turning point are not in the same plane. .

Optionally, the folded electric heating wire is linear.

Optionally, the two contacts are located at the one end in the Q direction.

Optionally, the folded heating wire is insulated from the heating wire before the turning point by an insulating material.

Optionally, the folded electric heating wire is a core wire covering the outer sheath.

Optionally, the electrically conductive wire of the folded back wire is superior to the electric heating wire before the turning point.

Optionally, the material of the folded electric heating wire comprises aluminum alloy or copper.

Optionally, the folded electric heating wire is insulated from the heating wire before the turning point by an insulating material.

Optionally, the insulating material comprises Teflon or KAPTON.

Optionally, the folded electric heating wire is suspended above the heating wire before the turning point.

Optionally, the distance between the folded heating wire and the heating wire before the turning point is greater than or equal to 5 mm.

Optionally, the heating wire is entirely located in the same layer, and includes an upper left portion, an upper right portion, a lower left portion, and a lower right portion disposed in different regions of the insulating window; wherein the lower right portion is at a center of symmetry and the upper left portion The portions are connected, the upper left portion is connected to the upper right portion, and the upper right portion is connected to the lower left portion at a center of symmetry.

Optionally, any one or all of the upper left portion, the upper right portion, the lower left portion, and the lower right portion of the heating wire are disposed in such a manner as to be defined in a plane in which the insulating window is located or a plane parallel to the plane Two directions perpendicular to each other, that is, a P direction and a Q direction; the heating wire extends from one side of the insulating window in the P direction to the opposite side of the insulating window, and then to the other side along the Q direction Extending to another location; at the other location, the heating wire extends in a direction opposite to the P direction from the other side of the insulating window to the one side; in this manner, The heating wire is gradually extended from one end in the Q direction to the other end.

Optionally, the electromagnetic field generated by the induction coil is perpendicular to the magnetic flux in the region where each of the patterns is located, and the magnetic flux in the region where the pattern is symmetric with the center of the pattern.

Hereinafter, the inductively coupled plasma processing apparatus and the heating member of the present invention will be described with reference to the accompanying drawings. It is emphasized that the description herein is merely exemplary and that other embodiments that utilize the invention are not excluded.

First embodiment of a heating component

2 to 6 are structural schematic views of a first embodiment of a heating member (particularly, a heating wire) applied to an inductively coupled plasma processing apparatus for temperature control of an insulating window at the top of its reaction chamber. The structure of the inductively coupled plasma processing apparatus (except the heating wire) is the same as that in FIG. 1, please refer to the description of FIG. 1 above, and details are not described herein. The following focuses on the detailed structure of the heating wire and the components associated therewith.

Fig. 2 is a wiring pattern diagram of a heating wire used for a heating member of the above processing apparatus. The dotted line frame in Fig. 2 outlines the shape of the insulating window 110 (which is a circle), and the solid line shows the wiring shape of the heating wire 120 attached to the upper surface of the insulating window 110. The two end points T1 and T2 of the heating wire 120 are respectively connected to the positive and negative electrodes of the heating power source (which may be an alternating current power source or a direct current power source) to enable the heating wire 120 to form a closed loop after the heating power source is closed; The terminals T1, T2 may also be referred to as contacts that are electrically connected to the heating source. The entire heating wire 120 can be viewed as a path map of the heating current being transmitted from one end (e.g., T1) to the other end (e.g., T2). The heating wire 120 is substantially evenly distributed over the entire area of the insulating window 110, and the heating uniformity of the heating wire 120 to the insulating window 110 can be substantially ensured, and the occurrence of a large temperature gradient is prevented.

For the convenience of the following description, the heating wire 120 in this embodiment is roughly divided into three types according to the difference in shape: (1), a plurality of horizontally extending portions parallel to each other (such as a line segment HH); (2) Connecting adjacent lateral extensions or connecting portions for connecting joints (such as T1) and lateral extensions (such as line segments HI); and (3) for connecting the uppermost N points with the lowermost connection Point the vertical portion NT2 of T2. Wherein, the vertical portion NT2 and the plurality of laterally extending portions both face each other, that is, the vertical portion NT2 and the laterally extending portion do not make electrical contact at the intersection of the figure.

With continued reference to FIG. 2, the heating wire 120 is entirely centrally symmetric, and the center of symmetry is the center O of the insulating window 110. Since the induction coil 140 (see FIG. 1) is also circular, and its center will coincide with the center of the insulating window when placed, the center of symmetry of the heating wire 120 is also the center O of the induction coil 140.

When the heating wire 120 is arranged around the insulating window 110, a plurality of (i.e., two or more) patterns (the areas occupied by them are correspondingly referred to as drawing areas) are surrounded. These graphics can be closed graphics, such as P11, P12, or non-closed graphics, such as P21, P21. Since the heating wire 120 is entirely centrally symmetrical, each pattern must also have a pattern symmetrical with its center (ie, a symmetrical pattern); the areas of the two are equal. Also, since the center of the induction coil 140 is their symmetrical center, the high-frequency electromagnetic field generated by the induction coil 140 is equal in the magnetic flux in each of the pair of mutually symmetrical regions (here, the symmetry refers to the center symmetry, the same below).

At a certain moment, the circulation of the heating current in the heating wire 120 is indicated by the arrow in the figure: the heating current enters from the contact point T1, and then passes through the plurality of lateral extensions and the connecting portion in turn, reaches the uppermost point N, and finally passes through the vertical Straight NT2 returns to contact T2, completing a loop. Throughout the flow, it can be seen that the current direction of each pair of symmetric drawing areas is reversed (Note: the current direction referred to herein refers to clockwise and counterclockwise directions). For example, the current in the drawing area P11 is counterclockwise, and its symmetrical drawing area P12 is clockwise; the current in the drawing area P21 is clockwise, and its symmetric drawing area P22 is counterclockwise. In summary, the magnetic flux of each pair of symmetric drawing areas is equal, and the current directions are opposite, so that their magnetic fluxes can completely cancel each other. Since the entire heating wire 120 can be formed by combining one or more pairs of symmetric drawing areas, and the magnetic flux of each pair of symmetric areas is zero, the total magnetic flux of the entire heating wire 120 is zero, so that the height of the induction coil 140 is high. A reverse electromagnetic field is not induced in the frequency electromagnetic field.

To illustrate, since the pattern or drawing area here corresponds to the clockwise current direction and the counterclockwise current direction, it is not considered as a graphic or drawing area where it is impossible to judge whether the internal current is clockwise or counterclockwise. A graphic or drawing area as defined by the present invention.

The two end points (ie, the starting and ending points) of each lateral extension (such as HH, etc.) are located at the edge of the insulating window 110 (ie, as close as possible to the dashed box in the figure), so that the graphics can be spread as large as possible, occupying As large as possible the area of the insulating window 110. In addition, the distance between the lateral extensions (i.e., the spacing of adjacent lateral extensions) is also kept as equal as possible to enhance the uniformity of heating.

3 and 4 are cross-sectional views taken along line A-A and B-B of Fig. 2, respectively. As shown in FIG. 3 and FIG. 4, the underlying structure of the heating wire 120 (the bottom structure mainly includes a lateral extending portion and a connecting portion; the lateral extending portion is shown in the drawing) is attached to the upper surface of the insulating window 110, and is heated. The main structure. The underlying structure is covered with a layer of insulating material 125, and the vertical portion NT2 is disposed above the layer of insulating material 125. The N point at the uppermost portion of the heating wire 120 is electrically connected to the vertical portion NT2 through a conductive structure C passing through the insulating material layer 125.

5 is a schematic view of the underlying structure of the heating wire 120 of FIG. 2 (referring to the layer closest to the lower insulating window 110). As shown in FIG. 5, the underlying structure includes all of the structures of the heating wire 120 except for the vertical portion NT2.

As shown in FIG. 5, the underlying structure of the heating wire 120 is distributed over the upper surface of the insulating window 110 in such a manner that two directions perpendicular to each other are defined in a plane in which the insulating window 110 is located or a plane parallel to the plane, that is, P The direction and the Q direction; the direction opposite to the P and Q directions is denoted as the P', Q' direction. Correspondingly, the upper and upper ends in the figure can be expressed as Q end, and the lower and lower ends in the figure can be expressed as Q' end; the left side and the left side in the figure can be expressed as P' side, and the right side and the right side in the figure can be Expressed as the P side. For example, starting from point R in the figure, the heating wire 120 extends from the side of the insulating window 110 (ie, the P' side, or the left side in the drawing) to the opposite side of the insulating window 110 in the P direction (ie, P). Side, or the right side of the figure, such as point S; and then on the other side (ie, the P side) extends in the Q direction to another position (or another height), such as point T; At another location (or at the other height), the opposite direction of the heating wire 120 in the P direction (ie, the P' direction) extends from the other side of the insulating window 110 (ie, the P side) to the One side (ie, the P' side), such as the U point in the figure; in this way, the heating wire 120 gradually extends from one end in the Q direction (ie, the lower end in the figure, the Q' end) to the other end (ie, in the figure) The upper end, Q end), and is substantially filled with almost the entire insulating window 110.

In the description and the claims, the one end and the other end, one side and the other side are only to indicate the relative positions of the two; "one end" and "the other end" (and, "one side" and "The other side" only has a true and specific meaning when it appears in pairs. For example, as referred to herein, "the heating wire 120 extends from one side of the insulating window 110 (such as point R) in the P direction to the opposite side of the insulating window 110 (such as point S)", just to indicate the starting point here. There is a relative distance between the starting point R point and the ending point S point in the P direction. That is, "R point is on the left side of the insulating window, S point is on the right side of the insulating window". There is no need to express "R point must be located at the leftmost edge of the insulating window, and point S must be located at the rightmost edge of the insulating window. "This positional relationship, but just to express "in the left and right direction, the point R is more left than the S point".

In addition, there may be many other options for the P direction and the Q direction defined herein; alternatively, the P direction and the Q direction may be arbitrarily selected as long as the two are perpendicular. Because the coordinate system established by the P direction and the Q direction here is only for the convenience of describing the shape of the heating wire, etc.; using other coordinate systems or simply not using the coordinate system to describe the characteristics of the heating wire, the actual shape of the heating wire is not changed. The points are only a matter of difficulty or trouble. In Fig. 5, the shape of the heating wire is described by taking the direction of the vertical direction in the paper surface as the Q direction and the direction of the right direction as the P direction. It is conceivable that the coordinate system description heating wire can also be established in the opposite direction (i.e., the P direction in Fig. 5 as the P direction, the Q' direction as the Q direction) or other means.

In the preparation of the heating wire 120, the underlying structure as shown in FIG. 5 can be formed by hollowing out a thin metal plate (also by bending a metal strip). A layer of insulating material 125 is then formed (e.g., by injection molding) on the underlying structure. When the insulating material layer 125 is prepared, it is preferable to keep the N point and the contact T1 and the like exposed without being covered by the insulating material; of course, when the points N and T1 are covered by the insulating material layer 125, the hole can be punctured. They are exposed. Finally, a vertical portion NT2 is provided on the insulating material layer 125, and the vertical portion NT2 is joined to the N point of the underlying structure.

In order to simplify the manufacturing process of the heating wire 120, a cable with an insulating sheath (the cable includes at least two layers: a core wire located at the center and serving as an electrical conductor, and an insulating sheath covering the circumference of the core wire) as a vertical portion NT2 . After forming the underlying structure, the cables can be placed directly on the underlying structure and their relative positions adjusted to make the cable perpendicular to the lateral extension. Thereafter, one end of the cable is electrically connected to the N point of the underlying structure (for example, by soldering or winding the wire). Finally, a layer of insulating material 125 is formed over the underlying structure and the cable.

The temperature on the insulating window 110 is affected by the arrangement density of the heating wire 120, and the more the heating wire 120 is present in the unit area, the more heat is generated. As shown in the figure, there are a plurality of intersections between the vertical portion NT2 and the lateral extension portion; if the heating wire 120 in the entire heating wire 120 is uniformly heated, the heat generated at the position of the intersection point will be other Double the area, which will generate hot spots, which is not conducive to the uniform distribution of the temperature of the insulating window 110. To avoid this problem, a material having higher conductivity can be selected as the material of the vertical portion NT2 (or the vertical portion NT2 is hardly heated so that it exists only as an excellent conductor). For example, a nickel-cadmium alloy or a tungsten alloy is used as the material of the above-mentioned underlayer structure, and an aluminum alloy or copper having better conductivity is used as the material of the vertical portion NT2. Thus, the resistance of the vertical portion NT2 is significantly smaller than that of other regions, and the heat generation per unit length is also significantly smaller than other regions, and thus the amount of heat generated at the intersection position is also close to other regions.

In addition to the materials described above that utilize different resistivities, other methods can be used to address the problem of reducing the amount of heat at the intersection.

For example, an insulating material (which corresponds to the insulating material layer 125 shown in FIG. 3 and FIG. 4) may be used to isolate the upper and lower electric heating wires at the intersection; when the thickness of the insulating material is sufficiently large, the insulating material may be tightly insulated only The heat generated by the heating wire of the window 110 (i.e., the above-mentioned underlying structure) can be diffused to the insulating window 110, and the heat generated by the upper heating wire (ie, the vertical portion NT2) is blocked by the insulating material and does not belong to the lower portion. The insulating window 110 has a significant effect. Insulation materials can be selected from Teflon or KAPTON (polyimide tape) to achieve electrical insulation and heat transfer.

For another example, the vertical portion NT2 may be suspended above the entire insulating window 110; generally, it is ensured that the lower surface height of the vertical portion NT2 is more than 5 mm above the upper surface of the laterally extending portion to effectively prevent excess heat. Conducted to the underlying insulating window 110.

Moreover, when the underlying structure and the vertical portion NT2 are made of the same resistive material, the heat generation amount can also be changed by changing the cross section of the electric heating wire at different portions.

Figure 6 is an enlarged view of a pair of special symmetrical figures or symmetric drawing areas of Figure 2. The D1 area contains two contacts T1 and T2 connected to the heating power source. Since T1 and T2 cannot be directly connected together, D1 is not completely closed. D2 (see Figure 2), which is symmetric with the center of D1, is a closed figure, so there are subtle differences in the graphics. This makes D1 and D2 not completely symmetrical in the center. It is emphasized here that this situation still constitutes the "central symmetry" referred to in the present invention. That is to say, the degree of such non-absolute central symmetry can be regarded as the present invention as long as it can satisfy the fact that the magnetic fluxes of the two are substantially the same (the industry believes that there are slight differences in the magnetic flux between the two, but the difference is almost meaningless). The so-called "central symmetry", because as long as their current direction is opposite, the magnetic flux of the two can be roughly canceled completely, achieving the purpose of the invention.

Second embodiment of a heating component

Fig. 7 is a view showing another wiring pattern of the heating wire used for the heating member of the above processing apparatus. As shown in FIG. 7, the heating wire 220 is also centrally symmetric as a whole, and the center of symmetry is the center of the insulating window 110. Since the induction coil 140 (see FIG. 1) is also circular, and its center coincides with the center of the insulating window when placed, the center of symmetry of the heating wire 220 is also the center of the induction coil 140.

Similar to the previous embodiment, the heating wire 220 also includes a plurality of mutually parallel lateral extensions, and a connection for joining adjacent lateral extensions or for connecting the contacts (e.g., T1, T2) to the lateral extensions. However, the length of one of its lateral extensions is only about half of the corresponding portion of the previous embodiment, and the two lateral extensions on the same line are joined together to be equivalent to one of the previous embodiments.

The winding mode of the heating wire 220 (or the path of the heating current in the heating wire 220) will be described below. For convenience of description, the heating wire 220 and the insulating window 110 are divided into four parts by two imaginary straight lines passing through the symmetry center O: an upper left part, an upper right part, a lower left part, and a lower right part. As shown in the figure, the heating wire 220 completes the winding (or wiring) of the area in the quarter-circular area in the lower right from the contact point T1, and then enters the upper left quarter by the center of the circle. a circular area; after completing the winding of the upper left area, the winding of the upper right area is started; after the winding of the upper right area is completed, the winding of the lower left area is again passed through the center of the circle, and another Contact T2.

Any one or all of the upper left portion, the upper right portion, the lower left portion, and the lower right portion of the heating wire 220 are disposed in corresponding regions of the upper surface of the insulating window 110 in a manner similar to that in the embodiment of FIG. 2: where the insulating window 110 is located The plane or the plane parallel to the plane defines two directions perpendicular to each other, that is, the P direction and the Q direction; and the directions opposite to the P and Q directions are denoted as P' and Q' directions. Correspondingly, the upper and upper ends in the figure can be expressed as Q end, and the lower and lower ends in the figure can be expressed as Q' end; the left side and the left side in the figure can be expressed as P' side, and the right side and the right side in the figure can be Expressed as the P side. For example, starting from the point R' in the figure, the heating wire 220 extends from the side of the insulating window 110 (ie, the P' side, or the left side in the drawing) to the opposite side of the insulating window 110 in the P direction (ie, The P side, or the right side in the figure), such as the S' point; and then the other side (ie, the P side) extends in the Q direction to another position (or another height), such as the T' point; At the other position (or at the other height), the heating wire 220 extends in the opposite direction of the P direction (ie, the P' direction) from the other side of the insulating window 110 (ie, the P side). To the side (ie, the P' side), such as the U' point in the figure; in this manner, the heating wire 120 is gradually extended from one end in the Q direction (ie, the lower end in the figure, the Q' end) to the other end. (ie the upper end of the figure, Q end), and roughly fill the area.

This wiring not only allows the heating wire 220 to retain the main advantages of the heating wire 120 in the previous embodiment, but also gives it some unique effects. For example, the heating wire 220 (except the intersection point O) is generally located in the same plane. As another example, it no longer requires a separate vertical portion NT2. - The vertical portion NT2 is not located in the same layer (or in the same plane) as the lateral extension, the connection portion, etc., and thus its presence increases the complexity and cost of manufacture.

It should be noted that the heating wire 220 also has an intersection point (located at the center O). In order to prevent the intersection from becoming a hot spot in the heating process, it may be treated in the same manner as in the previous embodiment; for example, a heat insulating material or the like is used. In addition, the descriptions in the foregoing embodiments and many measures are also mostly applicable thereto, and the description thereof will not be repeated here.

In the description of the present invention, it should be noted that the terms "connected" and "electrically connected" are to be understood broadly, and may be directly connected or indirectly connected through an intermediate medium, unless otherwise specifically defined and defined. For those of ordinary skill in the art, the specific meaning of the above terms in the present invention can be understood in specific circumstances.

Although the present invention has been described in detail by the preferred embodiments thereof, it should be understood that the foregoing description should not be construed as limiting. Various modifications and alterations of the present invention will be apparent to those of ordinary skill in the art. Accordingly, the scope of the invention should be defined by the appended claims.

1, 2‧‧‧ matching network
100‧‧‧reaction chamber
110‧‧‧Insulated window
120‧‧‧Electrical wire
125‧‧‧Insulation layer
140‧‧‧Induction coil
20‧‧‧ Pedestal
220‧‧‧Electric heating wire
C‧‧‧Electrical structure
D1, D2‧‧‧ area
N‧‧ points
NT2‧‧‧ vertical
O‧‧‧ Center
P, P'‧‧‧ direction
P11, P21‧‧‧ drawing area
P12, P22‧‧ symmetrical drawing area
Q, Q'‧‧‧ direction
R, R'‧‧‧ points
S, S'‧‧‧
T, T'‧‧‧ points
T1, T2‧‧‧ points
U, U'‧‧‧ points

Other features, objects, and advantages of the present invention will become more apparent from the detailed description of the accompanying drawings <RTIgt; Fig. 2] is a schematic view showing a wiring structure of a heating wire used for a heating member of the above processing apparatus; [Fig. 3] is a schematic sectional view of [Fig. 2] along line AA; [Fig. 4] is a section [Fig. 2] along line BB [FIG. 5] is a schematic diagram of the underlying wiring structure of the electric heating wire shown in [FIG. 2]; [FIG. 6] is a partial enlarged view of [FIG. 2]; [FIG. 7] is a heating member for the above-described processing apparatus. Another schematic diagram of the wiring structure of the heating wire.

110‧‧‧Insulated window

120‧‧‧Electrical wire

D1, D2‧‧‧ area

N‧‧ points

O‧‧‧ Center

P11, P21‧‧‧ drawing area

P12, P22‧‧ symmetrical drawing area

T1, T2‧‧‧ points

Claims (25)

An inductively coupled plasma processing apparatus comprising: a reaction chamber having an insulating window disposed at a top thereof; a heating member, the heating member comprising an electric heating wire disposed on an upper surface of the insulating window, The heating wire is entirely centrally symmetrical, and the heating wire has two contacts for electrically connecting with the heating power source to form a loop; the heating wire surrounds forming a plurality of patterns, each of which is symmetrical with the center of the pattern The heating current in the pattern is opposite in direction; the induction coil is disposed above the heating wire and electrically connected to the RF power source; the electromagnetic field generated by the induction coil is in the magnetic flux in the area where each of the patterns is located The magnetic flux in the region of the pattern symmetrical with the center of the pattern is always equal. The inductively coupled plasma processing apparatus according to claim 1, wherein the induction coil has a circular shape whose center is a symmetrical center of the heating wire. The inductively coupled plasma processing apparatus according to claim 1, wherein the heating wire comprises a plurality of laterally extending portions extending parallel to each other and a connecting portion connecting adjacent laterally extending portions. The inductively coupled plasma processing apparatus of claim 3, wherein an end point of the lateral extension is located at an edge of the insulating window such that the heating wire occupies a large portion on the insulating window region. The inductively coupled plasma processing apparatus of claim 3, wherein the distance between the adjacent lateral extensions is equal. The inductively coupled plasma processing apparatus of claim 3, wherein the heating wire comprises two layers, wherein the lateral extension and the extension are located adjacent to a lower layer of the insulating window, a vertical portion Located at an upper layer remote from the insulating window; one end of the vertical portion is connected to a lateral extension or connection of the lower layer, and the other end is connected to one of the two contacts. The inductively coupled plasma processing apparatus of claim 6, wherein the lateral extension or connection portion connected to the vertical portion, and the contact point connected to the vertical portion are respectively located Both ends of the heating wire. The inductively coupled plasma processing apparatus of claim 3, wherein the heating wire is entirely located in the same layer, and the heating wire entity passes through its symmetrical center. The inductively coupled plasma processing apparatus according to claim 1, wherein the heating wire is distributed over the upper surface of the insulating window in such a manner that a plane in which the insulating window is located or a plane parallel to the plane Defining two directions perpendicular to each other, that is, a P direction and a Q direction; the heating wire extending from one side of the insulating window to the opposite side of the insulating window in the P direction, and then to the other side edge Q The direction extends to another position; at the other position, the opposite direction of the heating wire in the P direction extends from the other side of the insulating window to the one side; The electric heating wire is gradually extended from one end in the Q direction to the other end. The inductively coupled plasma processing apparatus according to claim 9, wherein the electric heating wire is folded back to the one end in the Q direction from the other end in the Q direction; The wire before the return point is not in the same plane. The inductively coupled plasma processing apparatus according to claim 10, wherein the folded electric heating wire is linear. The inductively coupled plasma processing apparatus of claim 10, wherein the two contacts are located at the one end in the Q direction. The inductively coupled plasma processing apparatus according to claim 10, wherein the folded electric heating wire is insulated from the heating wire before the turning point by an insulating material. The inductively coupled plasma processing apparatus according to claim 10, wherein the folded electric heating wire is a core wire covering the outer sheath. The inductively coupled plasma processing apparatus according to claim 10, wherein the electrical conductivity of the folded electric heating wire is superior to the electric heating wire before the turning point. The inductively coupled plasma processing apparatus according to claim 10, wherein the folded electric heating wire and the electric heating wire before the turning point are separated by a heat insulating material. The inductively coupled plasma processing apparatus of claim 10, wherein the folded electric heating wire is suspended above the heating wire before the turning point. The inductively coupled plasma processing apparatus according to claim 1, wherein the heating wire is entirely located in the same layer, and includes an upper left portion, an upper right portion, a lower left portion, and a lower right portion disposed in different regions of the insulating window; The lower right portion is connected to the upper left portion at a center of symmetry, and the upper left portion is connected to the upper right portion, and the upper right portion is connected to the lower left portion at a center of symmetry. The inductively coupled plasma processing apparatus according to claim 18, wherein any one or all of the upper left portion, the upper right portion, the lower left portion, and the lower right portion of the heating wire are disposed in such a manner as to be insulated The plane in which the window is located or the plane parallel to the plane defines two directions perpendicular to each other, that is, the P direction and the Q direction; the heating wire extends from one side of the insulating window to the opposite side of the insulating window in the P direction. The other side, and then extending to the other side in the Q direction to another position; at the other position, the heating wire in the opposite direction of the P direction is again from the other of the insulating window The side extends to the one side; in this manner, the heating wire is gradually extended from one end in the Q direction to the other end. a heating member for inductively coupling a plasma processing apparatus for temperature control of an insulating window at a top of a reaction chamber, the heating member including an electric heating wire disposed on an upper surface of the insulating window, The electric heating wire is entirely centrally symmetrical, and the heating wire has two contacts for electrically connecting with a heating power source to form a loop; the heating wire surrounds forming a plurality of patterns, each of which is symmetrical with the center of the pattern The heating current in the pattern is in the opposite direction. The heating member of claim 20, wherein the heating wire comprises a plurality of mutually parallel lateral extensions in the same plane and a connection connecting adjacent lateral extensions. The heating member according to claim 20, wherein the heating wire is disposed in such a manner that two directions perpendicular to each other, that is, a P direction and a Q direction, are defined in one plane; the heating wire is from the P direction The side extends to the other side and then extends to the other side in the Q direction to another position; at the other position, the opposite direction of the heating wire in the P direction extends from the other side To the one side; in this manner, the heating wire is gradually extended from one end in the Q direction to the other end. The heating member according to claim 20, wherein the heating wire is entirely located in the same layer, and includes an upper left portion, an upper right portion, a lower left portion, and a lower right portion disposed in different regions; wherein the lower right portion is symmetric The center is connected to the upper left portion, the upper left portion is connected to the upper right portion, and the upper right portion is connected to the lower left portion at the center of symmetry. The heating member according to claim 23, wherein any one or all of the upper left portion, the upper right portion, the lower left portion, and the lower right portion of the heating wire are disposed in such a manner as to define mutually perpendicular in a plane Two directions, namely a P direction and a Q direction; the heating wire extends from one side to the other side in the P direction, and then extends in the Q direction to another position on the other side; At the position, the heating wire extends from the other side to the one side in the opposite direction of the P direction; in this manner, the heating wire gradually extends from one end in the Q direction to the other end. The heating unit of claim 20, wherein the electromagnetic field generated by the induction coil is in a magnetic flux in an area where each of the patterns is located, and a magnetic flux in a region where the pattern is symmetric with the center of the pattern, both of which are always equal.