TW201603999A - A flexible glassy thin film structure - Google Patents
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本發明係有關於一種玻璃膜結構，特別係關於一種可撓式玻璃膜結構，其使用有機薄膜/無機薄膜/有機薄膜形成三明治夾層薄膜，具有相當良好之透光性、散熱能力、疏水性與摩氏硬度等特性。 The invention relates to a glass film structure, in particular to a flexible glass film structure, which uses an organic film/inorganic film/organic film to form a sandwich interlayer film, which has relatively good light transmittance, heat dissipation capability, hydrophobicity and Characteristics such as Mohs hardness.
近年來，各類電子產品，如行動通訊裝置、平板電腦或筆記型電腦等，所具有之功能愈加豐富。例如，觸控面板(Touch panel)是利用接收來接觸頭輸入訊號來感應式顯示裝置的一種面板。當接觸了螢幕上的圖形按鈕時，螢幕上的觸覺反饋系統可根據預先編程的程式驅動各種連結裝置，可用以取代機械式的按鈕面板，並藉由顯示畫面製造出生動的影音效果。觸控螢幕的用途非常廣泛，從常見的提款機、到工業用的觸控電腦。因為觸控螢幕具有親切且生動的人機介面，愈來愈多智慧型顯示裝置多採用了觸控螢幕。 In recent years, various electronic products, such as mobile communication devices, tablets, or notebook computers, have become more and more abundant. For example, a touch panel is a type of panel that uses an inductive display device that receives a contact input signal. When touched on the graphic button on the screen, the on-screen tactile feedback system can drive various linkage devices according to a pre-programmed program, which can be used to replace the mechanical button panel and create a live sound and video effect through the display screen. Touch screens are used in a wide range of applications, from common cash machines to industrial touch computers. Because touch screens have an intimate and vivid human-machine interface, more and more smart display devices use touch screens.
目前的觸控電子產品的功能越來越強大，其裝置所累積之熱量也逐漸升高。典型的觸控電子產品，通常是採用玻璃或塑膠基板作為外層封裝結構，這兩種基板通常無法同時達到良好的透光性、疏水性與摩氏硬度等特性。過去的作法是，在玻璃或塑膠基板表面在進行一層玻璃膜的披覆。然而披覆玻璃膜的玻璃或塑膠基板作為外層封裝結構，造成內部的散熱能力降低，其裝置內所累積之熱量無法快速移出。此外，為了增加玻 璃膜硬度，通常在玻璃膜中加入二氧化矽(SiO2)。但加入二氧化矽材料會使玻璃膜表面具有親水性，隨著時間增長，二氧化矽材料會產生劣化現象。 The current touch electronic products are becoming more and more powerful, and the heat accumulated by the devices is gradually increasing. Typical touch electronic products usually use a glass or plastic substrate as the outer package structure. These two substrates usually cannot achieve good light transmittance, hydrophobicity and Mohs hardness at the same time. In the past, a glass film was applied to the surface of a glass or plastic substrate. However, the glass or plastic substrate coated with the glass film serves as an outer package structure, which causes the internal heat dissipation capability to be lowered, and the heat accumulated in the device cannot be quickly removed. Further, in order to increase the hardness of the glass film, cerium oxide (SiO 2 ) is usually added to the glass film. However, the addition of the cerium oxide material makes the surface of the glass film hydrophilic, and the cerium oxide material deteriorates with time.
有鑑於此，有必要提出一種可撓式玻璃膜結構，可以解決傳統電子產品所採用之玻璃或塑膠基板之上述問題，包含良好的光穿透性、散熱能力、疏水性與摩氏硬度不足等問題。 In view of this, it is necessary to propose a flexible glass film structure, which can solve the above problems of the glass or plastic substrate used in the conventional electronic products, including good light transmittance, heat dissipation capability, hydrophobicity and insufficient Mohs hardness. problem.
本發明之主要目的在於提出一種可撓式玻璃膜結構，透過多孔有機矽石玻璃薄膜之堆疊架構增加基板之散熱效能與疏水性質，並以二氧化矽薄膜夾層方式提高該可撓式薄膜之摩氏硬度。 The main object of the present invention is to provide a flexible glass film structure, which increases the heat dissipation performance and hydrophobic property of the substrate through the stacking structure of the porous organic vermiculite glass film, and improves the flexible film by sandwiching the ruthenium dioxide film. Hardness.
為達上述之主要目的，本發明提出一種可撓式玻璃膜結構，其主要包含：一可撓式基板與一三明治夾層薄膜。該三明治夾層薄膜係堆疊於該可撓式基板之上，且包含一第一有機薄膜；一無機薄膜；與一第二有機薄膜。 In order to achieve the above main object, the present invention provides a flexible glass film structure, which mainly comprises: a flexible substrate and a sandwich interlayer film. The sandwich interlayer film is stacked on the flexible substrate and comprises a first organic film; an inorganic film; and a second organic film.
該三明治夾層薄膜包含：一第一有機薄膜，用以增強該三明治夾層薄膜與該可撓式基板之間的附著力；一無機薄膜，堆疊於該第一有機薄膜之上，用以增強該三明治夾層薄膜之硬度；以及一第二有機薄膜，堆疊於該無機薄膜之上，用以增強該三明治夾層薄膜之表面之疏水性；其中該第一有機薄膜與該第二有機薄膜皆含有矽、氧、碳、氫、氟等元素。 The sandwich interlayer film comprises: a first organic film for enhancing adhesion between the sandwich interlayer film and the flexible substrate; an inorganic film stacked on the first organic film to enhance the sandwich a hardness of the interlayer film; and a second organic film stacked on the inorganic film to enhance the hydrophobicity of the surface of the sandwich film; wherein the first organic film and the second organic film both contain bismuth and oxygen , carbon, hydrogen, fluorine and other elements.
根據本發明之一特徵，該第一有機薄膜與該第二有機薄膜係由氫氟矽氧烷化合物(SiaObCcHdFe)所構成，a、b、c、d、e分別表示各元素所佔原子百分比，其中a介於10%至30%，b介於10%至30%，c介於 10%至30%，d介於10%至30%，e介於10%至30%，且a+b+c+d+e=1。 According to a feature of the invention, the first organic film and the second organic film are composed of a hydrofluoromethoxy siloxane compound (Si a O b C c H d F e ), a, b, c, d, e Represents the atomic percentage of each element, where a is between 10% and 30%, b is between 10% and 30%, c is between 10% and 30%, d is between 10% and 30%, and e is between 10 % to 30%, and a+b+c+d+e=1.
根據本發明之一特徵，該第一有機薄膜之厚度係介於5nm至300nm之間；該第二有機薄膜之厚度係介於5nm至300nm之間。 According to a feature of the invention, the thickness of the first organic film is between 5 nm and 300 nm; and the thickness of the second organic film is between 5 nm and 300 nm.
根據本發明之一特徵，該無機薄膜係由二氧化矽(SiO2)所構成，其薄膜厚度係介於10nm至500nm之間。 According to a feature of the invention, the inorganic film is composed of cerium oxide (SiO 2 ) having a film thickness of between 10 nm and 500 nm.
根據本發明之一特徵，該可撓式基板係聚乙烯對苯二甲酸酯(PET)、聚醯亞胺(PI)、聚氯乙烯(PVC)與碳酸酯(PC)之一材料所構成 According to one feature of the present invention, the flexible substrate is composed of a material of polyethylene terephthalate (PET), polyimine (PI), polyvinyl chloride (PVC) and carbonate (PC).
根據本發明之一特徵，該可撓式玻璃膜結構具有70%至95%之透光度；該可撓式玻璃膜結構之摩氏硬度達到8H；且該三明治夾層薄膜之表面具有一大於110度之疏水角度。 According to a feature of the present invention, the flexible glass film structure has a transmittance of 70% to 95%; the Mohs hardness of the flexible glass film structure reaches 8H; and the surface of the sandwich film has a diameter greater than 110 The degree of hydrophobicity.
綜上所述，本發明之一種可撓式玻璃膜結構具有以下之功效： In summary, the flexible glass film structure of the present invention has the following effects:
1.透過多孔有機矽石玻璃薄膜之堆疊架構，呈現良好之透光性與疏水性。 1. Through the stacking structure of porous organic vermiculite glass film, it exhibits good light transmittance and hydrophobicity.
2.透過二氧化矽薄膜夾層方式，提高可撓式薄膜之摩氏硬度與散熱能力。 2. Improve the Mohs hardness and heat dissipation of the flexible film through the interlayer of ruthenium dioxide film.
100‧‧‧可撓式玻璃膜結構 100‧‧‧Flexible glass membrane structure
110‧‧‧可撓式基板 110‧‧‧Flexible substrate
120‧‧‧三明治夾層薄膜 120‧‧‧ Sandwich laminated film
121‧‧‧第一有機薄膜 121‧‧‧First organic film
122‧‧‧無機薄膜 122‧‧‧Inorganic film
123‧‧‧第二有機薄膜 123‧‧‧Second organic film
第1圖說明本發明中可撓式玻璃膜結構100之一實施例。 Figure 1 illustrates an embodiment of a flexible glass film structure 100 in accordance with the present invention.
雖然本發明可表現為不同形式之實施例，但附圖所示者及於下文中說明者係為本發明可之較佳實施例，並請瞭解本文所揭示者係考量 為本發明之一範例，且並非意圖用以將本發明限制於圖示及/或所描述之特定實施例中。 The present invention may be embodied in various forms, and the embodiments shown in the drawings and the following description are preferred embodiments of the present invention. It is an exemplification of the invention and is not intended to limit the invention to the particular embodiments illustrated and/or described.
現請參考第1圖，係為本發明之可撓式玻璃膜結構100之一實施例。該可撓式玻璃膜結構100，其主要包含：一可撓式基板110與一三明治夾層薄膜120。 Referring now to Figure 1, an embodiment of a flexible glass film structure 100 of the present invention is shown. The flexible glass film structure 100 mainly comprises: a flexible substrate 110 and a sandwich interlayer film 120.
在實施例中，該可撓式基板110係由具有可撓特性之基板，例如不鏽鋼金屬或透明的塑膠軟性基板。較佳地，該可撓式基板110係由為透明的軟性基板，該透明的軟性基板版為下列選自下列材質之一，如聚乙烯對苯二甲酸酯(Polyethylene terephthalate，PET)、聚醯亞胺(polyimides，PI)、聚氯乙烯(Polyvinylchloride，PVC)，碳酸酯(Polycarbonate，PC)等。 In an embodiment, the flexible substrate 110 is comprised of a substrate having flexible properties, such as a stainless steel metal or a transparent plastic flexible substrate. Preferably, the flexible substrate 110 is made of a transparent flexible substrate, and the transparent flexible substrate is one of the following materials selected from the group consisting of polyethylene terephthalate (PET) and poly. Polyimides (PI), polyvinyl chloride (PVC), carbonate (Polycarbonate, PC), and the like.
其中該三明治夾層薄膜120係沈積堆疊於該可撓式基板110之上，且包含一第一有機薄膜121，一無機薄膜122，一第二有機薄膜123。該第一有機薄膜121，用以增強該三明治夾層薄膜120與該可撓式基板110之間的附著力；該無機薄膜122，堆疊於該第一有機薄膜121之上，用以增強該三明治夾層薄膜120之硬度；以及該第二有機薄膜123，堆疊於該無機薄膜122之上，用以增強該三明治夾層薄膜120之表面之疏水性。其中該第一有機薄膜121與該第二有機薄膜123皆含有矽、氧、碳、氫、氟等元素。 The sandwich interlayer film 120 is deposited on the flexible substrate 110 and includes a first organic film 121, an inorganic film 122, and a second organic film 123. The first organic film 121 is used to enhance the adhesion between the sandwich film 120 and the flexible substrate 110. The inorganic film 122 is stacked on the first organic film 121 to enhance the sandwich layer. The hardness of the film 120; and the second organic film 123 are stacked on the inorganic film 122 to enhance the hydrophobicity of the surface of the sandwich film 120. The first organic film 121 and the second organic film 123 both contain elements such as germanium, oxygen, carbon, hydrogen, fluorine and the like.
該第一有機薄膜121係由氫氟矽氧烷化合物所構成(SiaObCcHdFe)，a、b、c、d、e分別表示各元素所佔原子百分比。其中，a介於10%至30%，b介於10%至30%，c介於10%至30%，d介於10%至30%，e介於10%至30%，且a+b+c+d+e=1。該第一有機薄膜121係用以增 強該三明治夾層薄膜120與該可撓式基板110之間的附著力。較佳地，a介於10%至30%，b介於10%至20%，c介於10%至20%，d介於15%至20%，e介於15%至25%，且a+b+c+d+e=1。亦即是，該第一有機薄膜121係為富碳、氫、氟等元素之材料，可形成多孔有機矽石玻璃薄膜。 The first organic thin film 121 is composed of a hydrofluorofluorene oxide compound (Si a O b C c H d F e ), and a, b, c, d, and e respectively represent atomic percentages of the respective elements. Where a is between 10% and 30%, b is between 10% and 30%, c is between 10% and 30%, d is between 10% and 30%, and e is between 10% and 30%, and a+ b+c+d+e=1. The first organic film 121 is used to enhance the adhesion between the sandwich film 120 and the flexible substrate 110. Preferably, a is between 10% and 30%, b is between 10% and 20%, c is between 10% and 20%, d is between 15% and 20%, and e is between 15% and 25%, and a+b+c+d+e=1. That is, the first organic thin film 121 is a material rich in elements such as carbon, hydrogen, fluorine, etc., and can form a porous organic vermiculite glass film.
該無機薄膜122係由二氧化矽(SiO2)或氮氧化矽(SiON)所構成，其厚度介於10nm至500nm之薄膜，具有相當良好之硬度特性。較佳地，該該無機薄膜122係由二氧化矽(SiO2)所構成，在常溫常壓下，二氧化矽構成之該第一有機薄膜121為固態，且薄膜構成鍵節(Si-O)的鍵能相當高，具有相當良好之堅韌特性，故該第一有機薄膜121可提昇該三明治夾層薄膜120之摩氏硬度，且該三明治夾層薄膜120之摩氏硬度可達到8H。較佳地，該無機薄膜122之厚度介於20nm至50nm之間，且該三明治夾層薄膜120之摩氏硬度可達到9H。硬度的增加可提高該可撓式玻璃膜結構100的防刮和耐磨能力，該可撓式玻璃膜結構100的表面具有9H的硬度，比普通的聚乙烯對苯二甲酸酯(PET)基板薄膜強三倍。即使是尖銳的物體，如鑰匙和刀具等都不會劃傷該可撓式玻璃膜結構100之表面。 The inorganic thin film 122 is composed of cerium oxide (SiO 2 ) or cerium oxynitride (SiON), and has a thickness of 10 nm to 500 nm, and has quite good hardness characteristics. Preferably, the inorganic thin film 122 is composed of cerium oxide (SiO 2 ). The first organic thin film 121 composed of cerium oxide is solid at normal temperature and pressure, and the thin film constitutes a bond (Si-O). The bond energy of the sandwich film 120 can be increased by a high hardness and has a relatively good toughness, so that the sandwich film 120 can have a Mohs hardness of 8H. Preferably, the thickness of the inorganic thin film 122 is between 20 nm and 50 nm, and the sandwich interlayer film 120 has a Mohs hardness of 9H. The increase in hardness can improve the scratch and abrasion resistance of the flexible glass film structure 100. The surface of the flexible glass film structure 100 has a hardness of 9H, which is higher than ordinary polyethylene terephthalate (PET). The substrate film is three times stronger. Even sharp objects such as keys and knives do not scratch the surface of the flexible glass film structure 100.
該第二有機薄膜123係由氫氟矽氧烷化合物所構成(SiaObCcHdFe)，a、b、c、d、e分別表示各元素所佔原子百分比。其中，a介於10%至30%，b介於10%至30%，c介於10%至30%，d介於10%至30%，e介於10%至30%，且a+b+c+d+e=1。該第二有機薄膜123，堆疊於該無機薄膜122之上，用以增強該三明治夾層薄膜120之表面之疏水性。較佳地，a介於10%至30%，b介於10%至20%，c介於10%至20%，d介於15%至20%，e介於15%至25%，且a+b+c+d+e=1。亦即是，該第一有 機薄膜121係為富碳、氫、氟等元素之材料，可形成多孔有機矽石玻璃薄膜。 The second organic film 123 is composed of a hydrofluoromethoxy siloxane compound (Si a O b C c H d F e ), and a, b, c, d, and e respectively represent atomic percentages of the respective elements. Where a is between 10% and 30%, b is between 10% and 30%, c is between 10% and 30%, d is between 10% and 30%, and e is between 10% and 30%, and a+ b+c+d+e=1. The second organic film 123 is stacked on the inorganic film 122 to enhance the hydrophobicity of the surface of the sandwich film 120. Preferably, a is between 10% and 30%, b is between 10% and 20%, c is between 10% and 20%, d is between 15% and 20%, and e is between 15% and 25%, and a+b+c+d+e=1. That is, the first organic thin film 121 is a material rich in elements such as carbon, hydrogen, fluorine, etc., and can form a porous organic vermiculite glass film.
該三明治夾層薄膜120內部之各層薄膜係透過一種化學氣相沈積(Chemical Vapor Deposition，CVD)製程成長。透過調整化學氣相沈積(Chemical Vapor Deposition，CVD)製程所採用之有機矽前驅物之類型，該第一有機薄膜121與該第二有機薄膜123將形成多孔性結構，用以改善該三明治夾層薄膜120之散熱性能與疏水性能。較佳地，該有機矽前驅物係為甲基矽烷類，特別是四甲基矽烷，化學式為Si(CH3)4。 Each of the layers of the sandwich interlayer film 120 is grown by a chemical vapor deposition (CVD) process. The first organic film 121 and the second organic film 123 form a porous structure to improve the sandwich film by adjusting the type of the organic germanium precursor used in the chemical vapor deposition (CVD) process. 120 heat dissipation performance and hydrophobic properties. Preferably, the organic ruthenium precursor is methyl decane, especially tetramethyl decane, and has the chemical formula Si(CH 3 ) 4 .
在實施例中，該化學氣相沈積製程係選自電漿輔助化學氣相沈積(Plasma-Enhanced Chemical Vapor Deposition，PECVD)、低壓化學氣相沉積(Low-pressure CVD，LPCVD)、電感耦合電漿(Inductive Coupled Plasma，ICP)化學氣相沈積等之一。較佳地，該化學氣相沈積製程係為電感耦合電漿化學氣相沈積。 In an embodiment, the chemical vapor deposition process is selected from the group consisting of Plasma-Enhanced Chemical Vapor Deposition (PECVD), Low-pressure CVD (LPCVD), and inductively coupled plasma. (Inductive Coupled Plasma, ICP) one of chemical vapor deposition. Preferably, the chemical vapor deposition process is inductively coupled plasma chemical vapor deposition.
大氣中的水分或溼氣，容易使得一些喜歡水的材料產生劣化現象。該三明治夾層薄膜120中之該無機薄膜122係由二氧化矽(SiO2)所構成。二氧化矽材料具有相當優越之物理與化學特性，經常運用於各種化學合成物中。但是，純二氧化矽材質化學合成物表面非常喜歡吸附水。隨著時間增長，二氧化矽材料會產生劣化現象。這是由於以二氧化矽為主的化合物，發生化學反應的位置(官能基)為親水(Hydrophilic)的氫氧鍵。本身表面官能基為喜歡水(親水性)的官能基。因此，在與空氣接觸進行大氣乾燥時，會因為巨大的表面張力收縮而使得以二氧化矽為主的化合物破裂，導致材料使用壽命縮短。因此，在本發明中，藉由該第二有機薄膜123 堆疊於該無機薄膜122之上，用以增強該三明治夾層薄膜120之表面之疏水性。 Moisture or moisture in the atmosphere can easily cause deterioration of some materials that like water. The inorganic thin film 122 in the sandwich interlayer film 120 is composed of cerium oxide (SiO 2 ). Ceria materials have quite superior physical and chemical properties and are often used in a variety of chemical compositions. However, the surface of a pure cerium oxide chemical composition likes to adsorb water. As time goes on, the cerium oxide material will deteriorate. This is due to the fact that the ruthenium dioxide-based compound has a chemically reactive position (functional group) which is a hydrophilic (hydrophilic) hydrogen-oxygen bond. The surface functional group itself is a functional group that prefers water (hydrophilic). Therefore, when it is exposed to air for atmospheric drying, the cerium oxide-based compound is broken due to the large surface tension shrinkage, resulting in a shortened material life. Therefore, in the present invention, the second organic film 123 is stacked on the inorganic film 122 to enhance the hydrophobicity of the surface of the sandwich film 120.
疏水性質主要以接觸角的大小來的評估。當物質與水滴的接觸角越大，疏水性越高；物質與水滴的接觸角越小，親水性越高。此外，氣體與固體兩者間的表面張力稱為表面自由能(Surface Free Energy)；當表面自由能越大時，表面能可吸附的液體(液滴)能力就越大，液體吸附面積也越大，導致表面接觸角越小。亦即是，該第二有機薄膜123降低了該三明治夾層薄膜120之表面自由能。該三明治夾層薄膜120之表面具有一大於110度之疏水角度。較佳地，該三明治夾層薄膜120之表面之疏水角度係介於110度至160度之間。表面經過疏水的塗層處理，可使得指紋及油污不易沾附在可撓式玻璃膜結構100的表面，擦拭及清潔更容易，同時也提供超滑順的觸動靈敏度性。 The hydrophobic nature is primarily assessed by the size of the contact angle. The greater the contact angle of the substance with the water droplet, the higher the hydrophobicity; the smaller the contact angle of the substance with the water droplet, the higher the hydrophilicity. In addition, the surface tension between gas and solid is called Surface Free Energy; when the surface free energy is larger, the liquid (droplet) capacity that the surface energy can adsorb is larger, and the liquid adsorption area is also higher. Large, resulting in a smaller surface contact angle. That is, the second organic film 123 reduces the surface free energy of the sandwich film 120. The surface of the sandwich film 120 has a hydrophobic angle greater than 110 degrees. Preferably, the surface of the sandwich film 120 has a hydrophobic angle of between 110 and 160 degrees. The surface is treated with a hydrophobic coating to make fingerprints and oils less likely to adhere to the surface of the flexible glass film structure 100, making it easier to wipe and clean, while also providing ultra-smooth touch sensitivity.
此發明之第一有機薄膜121與該第二有機薄膜122之厚度皆介於5nm至300nm之間，因此該可撓式玻璃膜結構100具有相當良好之透光度，其透光度介於70%至95%。較佳地，第一有機薄膜121與該第二有機薄膜122之厚度皆介於5nm至50nm之間，且該無機薄膜122之厚度介於10nm至50nm之間。更佳地，第一有機薄膜121與該第二有機薄膜122之厚度皆介於5nm至10nm之間，且該無機薄膜122之厚度介於10nm至50nm之間。因此該可撓式玻璃膜結構100具有相當良好之透光度，其透光度介於80%至95%。 The thickness of the first organic film 121 and the second organic film 122 of the invention are both between 5 nm and 300 nm, so the flexible glass film structure 100 has a relatively good transmittance, and the transmittance is 70. % to 95%. Preferably, the thickness of the first organic film 121 and the second organic film 122 are between 5 nm and 50 nm, and the thickness of the inorganic film 122 is between 10 nm and 50 nm. More preferably, the thickness of the first organic film 121 and the second organic film 122 are between 5 nm and 10 nm, and the thickness of the inorganic film 122 is between 10 nm and 50 nm. Therefore, the flexible glass film structure 100 has a relatively good transmittance and a transmittance of 80% to 95%.
在一具體實施例中，該第一有機薄膜與該第二有機薄膜係由氫氟矽氧烷化合物(SiaObCcHdFe)所構成，a、b、c、d、e分別表示各元素 所佔原子百分比。a介於10%至30%，b介於10%至20%，c介於10%至20%，d介於15%至20%，e介於15%至25%，且a+b+c+d+e=1。該第一有機薄膜之厚度係介於10nm至12nm之間。該第二有機薄膜之厚度係介於10nm至12nm之間。該無機薄膜係由二氧化矽(SiO2)所構成，其薄膜厚度係為50nm。該可撓式基板係聚乙烯對苯二甲酸酯(PET)所構成。該三明治夾層薄膜係透過電感耦合電漿化學氣相沈積製程所成長，使用的有機矽前驅物為四甲基矽烷，化學式為Si(CH3)4，製程中搭配氧氣與氮氣做為製程氣體。該可撓式玻璃膜結構具有75%至85%之透光度：摩氏硬度達到8H；且表面具有一110度至之130度之之疏水角度。 In a specific embodiment, the first organic film and the second organic film are composed of a hydrofluoromethoxy siloxane compound (Si a O b C c H d F e ), a, b, c, d, e Represents the atomic percentage of each element. a between 10% and 30%, b between 10% and 20%, c between 10% and 20%, d between 15% and 20%, e between 15% and 25%, and a+b+ c+d+e=1. The thickness of the first organic film is between 10 nm and 12 nm. The thickness of the second organic film is between 10 nm and 12 nm. The inorganic thin film was composed of cerium oxide (SiO 2 ) and had a film thickness of 50 nm. The flexible substrate is composed of polyethylene terephthalate (PET). The sandwich interlayer film is grown by an inductively coupled plasma chemical vapor deposition process using an organic germanium precursor of tetramethyl decane and a chemical formula of Si(CH 3 ) 4 . The process is combined with oxygen and nitrogen as a process gas. The flexible glass film structure has a transmittance of 75% to 85%: a Mohs hardness of 8H; and the surface has a hydrophobic angle of 110 degrees to 130 degrees.
綜上所述，本發明之可撓式玻璃膜結構100具有以下之功效： In summary, the flexible glass film structure 100 of the present invention has the following effects:
1.透過多孔有機矽石玻璃薄膜之堆疊架構，呈現良好之透光性與疏水性。 1. Through the stacking structure of porous organic vermiculite glass film, it exhibits good light transmittance and hydrophobicity.
2.透過二氧化矽薄膜夾層方式，提高可撓式薄膜之摩氏硬度與散熱能力。 2. Improve the Mohs hardness and heat dissipation of the flexible film through the interlayer of ruthenium dioxide film.
雖然本發明已以前述較佳實施例揭示，然其並非用以限定本發明，任何熟習此技藝者，在不脫離本發明之精神和範圍內，當可作各種之更動與修改。如上述的解釋，都可以作各型式的修正與變化，而不會破壞此發明的精神。因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。 While the present invention has been described in its preferred embodiments, it is not intended to limit the scope of the invention, and various modifications and changes can be made without departing from the spirit and scope of the invention. As explained above, various modifications and variations can be made without departing from the spirit of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.
100‧‧‧可撓式玻璃膜結構 100‧‧‧Flexible glass membrane structure
110‧‧‧可撓式基板 110‧‧‧Flexible substrate
120‧‧‧三明治夾層薄膜 120‧‧‧ Sandwich laminated film
121‧‧‧第一有機薄膜 121‧‧‧First organic film
122‧‧‧無機薄膜 122‧‧‧Inorganic film
123‧‧‧第二有機薄膜 123‧‧‧Second organic film
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