TW201600202A - A multi-micro-wire-cut electrical discharge machining device - Google Patents

Abstract

The present invention provides a multi-micro-wire-cut electrical discharge machining device including a main body, a first axis, a second axis, a twist member, a vibrating module, and at least three line electrodes. The main body has a first end and a second end. The first axis is located at the first end. The second axis is located at the second end, and the second axis is connected to the twist member. The at least three line electrodes are fixed between the first axis and the second axis. The vibrating module is connected to a work piece for the vibration thereof. The at least three line electrodes are cinched by the second axis by twisting the twist member connected thereto. With the vibrating module, the present invention can improve the machining efficiency and clean the trifles caused in the machining process.

Description

Multi-wire thin wire cutting electric discharge machining device

BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to a wire cutting electrical discharge machining apparatus, and more particularly to a wire cutting electrical discharge machining apparatus having a plurality of wire electrodes for wire cutting electrical discharge machining.

The conventional wire-cut electric discharge machining method uses a single metal wire having a diameter of 0.05 mm or more as a cutting electrode, and is cut in a vertical direction, and the processing speed is slow and time-consuming, especially for an arrayed and fine structural object. In the case of cutting, in particular, fine structures for adding high aspect ratio of the tool, such as high aspect ratio fine array probes or punches. Taking an array type micro probe for detecting a 3D-IC circuit as an example, if a single metal wire electrode is used, the number of times of cutting required during the cutting process becomes large, and the discharge residue is more likely to remain between the workpiece and the wire electrode, resulting in a residue. Secondary discharge or even short circuit greatly affects the processing efficiency.

In view of the foregoing problems, the present invention provides a multi-wire thin wire cutting electrical discharge machining apparatus, which performs wire cutting electrical discharge machining by a plurality of wire electrodes to improve processing efficiency, and is in contact with a workpiece to be processed and drives vibrations with a vibration module. The shake-off eliminates the machining residuals remaining between the wire electrode and the workpiece to be processed, thereby avoiding the occurrence of secondary discharge. The multi-wire thin wire cutting electric discharge machining device comprises: a main body, a first shaft, a second shaft, a vibration module, a plurality of line electrodes, a torsion element and a pivoting module.

The main body has an accommodating space, and the accommodating space has a first side and a first On the two sides, the first shaft has a plurality of grooves, and is disposed on the first side, the second shaft has a plurality of grooves, and is disposed on the second side and connected to the torsion element, wherein the two ends of the plurality of line electrodes are respectively accommodated Fixed in the plurality of grooves of the first axis and the second axis. The plurality of wire electrodes are tensioned between the first axis and the second axis by rotating the torsion element to rotate the second shaft. The vibration module is disposed on the surface of a workpiece to be processed (which will be processed into an array probe), and the vibration of the workpiece to be processed is driven by the vibration module, so that the machining process can be performed online, and the machining debris is at a high frequency (1 M Hz). The vibration shake-off is eliminated to avoid secondary discharge; the pivoting module can adjust the tilt angle of the main body according to the user's demand to provide multiple processing directions of the multi-wire thin wire cutting electric discharge machining device.

Compared with the prior art, the multi-wire thin wire cutting electric discharge machining provided by the invention The device can improve the processing efficiency, effectively eliminate the residual chips during processing, and can provide cutting and electric discharge machining in various directions. In addition, since the invention is a small mechanism suitable for processing high aspect ratio array elements, for example, fine The cutting process of components such as array probes or micro-array punches has the advantages of low cost and light weight. It has been confirmed by experiments that the high-frequency (1M Hz) vibration assist provided by the vibration module can effectively improve the problem that the discharge residue is difficult to be removed, and the slenderness ratio of the cut structure can exceed 120.

1‧‧‧Multi-wire fine wire cutting electric discharge machining device

10‧‧‧ Subject

101‧‧‧ accommodating space

1011‧‧‧ first side

1012‧‧‧ second side

102‧‧‧Protruding

11‧‧‧ Third axis

12‧‧‧ first axis

13‧‧‧fourth axis

14‧‧‧second axis

15‧‧‧ fifth axis

16‧‧‧Torque components

17‧‧‧ Sixth axis

18‧‧‧ wire electrode

181‧‧‧Working area

19‧‧‧Clamping members

20‧‧‧Vibration Module

30‧‧‧Workpieces to be machined

40‧‧‧ pivot module

111, 121, 131, 141, 151, 171‧‧‧ trenches

H‧‧‧ height drop

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a specific embodiment of a multi-wire thin wire cutting electrical discharge machining apparatus according to the present invention.

Figure 2 depicts a schematic representation of the preparation of an array probe using the present invention.

Figure 3 depicts a partial cross-sectional view of an embodiment of the present invention.

Figure 4 depicts a partial cross-sectional view of another embodiment of the present invention.

Figure 5 depicts a partial cross-sectional view of yet another embodiment of the present invention.

Figure 6 depicts a partial cross-sectional view of another embodiment of the present invention.

Figure 7 depicts a partial cross-sectional view of yet another embodiment of the present invention.

Figure 8 is a perspective view showing a main portion of a specific embodiment according to Figure 7.

9A to 9C are schematic views respectively showing rotation by a pivotal module according to an embodiment of the present invention, and a corresponding processing method of the array probe.

Figure 10 depicts a schematic representation of the array probe prepared by the present invention, as well as the shape of the probe tip.

The preferred embodiments of the present invention will be described in detail in the following description.

Referring to Figure 1, Figure 1 depicts a perspective view of an embodiment of the present invention. As shown in FIG. 1, the multi-wire thin wire cutting electrical discharge machining apparatus 1 of the present invention comprises at least a main body 10, a first shaft 12, a second shaft 14, a torsion element 16, a plurality of line electrodes 18, and a The basic components such as the vibration module 20 and a pivot module 40.

The main body 10 has an accommodating space 101. The accommodating space 101 has a first side 1011 and a second side 1012. The first shaft 12 has a plurality of grooves 121 for receiving and fixing a plurality of grooves. The wire electrode 18, the outer shape of the first shaft 12 is not limited to a round rod, and as shown in FIG. 1, a round bar is provided with a disk having a diameter larger than the round bar, and the plurality of grooves 121 are disposed on the disk. The second shaft 14 has a plurality of grooves 141, and the function and shape of the second shaft are the same as those of the first shaft 12, which are not described herein; the torque element 16 is connected to the second shaft 14 and is disposed in the present On the outer side of the body 10, the torsion element 16 is a motor for adjusting the wire tension of the plurality of wire electrodes 18 fixed on the first shaft 12 and the second shaft 14; the two ends of the plurality of wire electrodes 18 are respectively embedded in the In the plurality of grooves 121 and 141 of the one shaft 12 and the second shaft 14, the plurality of line electrodes 18 respectively have a working area 181, and the working area 181 is between the first shaft 12 and the second shaft 14 (in FIG. 1) The vibration module 20 is disposed on a surface of a workpiece 30 to be processed (to be processed into an array probe), and the vibration module 20 causes the workpiece 30 to be processed to be vibrated by the vibration module 20 The high frequency (1 M Hz) vibration is generated, and the vibration module 20 is a piezoelectric ceramic vibration component or an ultrasonic vibration component; the pivoting module 40 is connected to the bottom of the main body 10 to adjust the main body according to the user's needs. The inclination angle of 10 is changed, and the direction in which the workpiece to be processed 30 is subjected to wire-cut electrical discharge machining is changed.

As shown in FIG. 1, the multi-wire thin wire cutting electric discharge machining device 1 of the present invention is further integrated. The steps include the remaining components: a third shaft 11, a fourth shaft 13, a fifth shaft 15, a sixth shaft 17, and a holding member 19. The third axis 11 to the sixth axis 17 individually have a plurality of grooves 111, 131, 151, and 171 for accommodating and guiding the plurality of line electrodes 18, and adjusting the plurality of lines The position and tension of the electrode 18 in the accommodating space 101; the pressing member 19 is for applying pressure to the plurality of line electrodes 18 to prevent the plurality of line electrodes 18 from generating unintended vibration.

The first shaft 12 is disposed on the first side 1011, and the second shaft 14 is disposed on the second side 1012. The two ends of the plurality of wire electrodes 18 are respectively fixed in the groove 121 of the first shaft 12 and the groove 141 of the second shaft 14, and the third axis 11 to the sixth axis 17 are disposed on the first shaft 12 and the second shaft 14 Between the holding members 19 is disposed between the third shaft 11 and the fifth shaft 15, and between the second shaft 13 and the sixth shaft 17. The second shaft 14 is driven by the torsion element 16 to tension a plurality of line electrodes 18, which are disposed between the first shaft 12 and the sixth shaft 17, a plurality of line electrodes 18 and a discharge device (not shown) Electrical connection to The workpiece 30 to be processed disposed between the fifth shaft 15 and the sixth shaft 17 (ie, the working area 181) is subjected to wire-cut electrical discharge machining, and the vibration module 20 causes the workpiece 30 to be processed to vibrate to remove the wire cutting discharge. At the time of processing, the residual wire electrode 18 and the residual material of the workpiece 30 to be processed remain. The wire-cut electrical discharge machining method of the present invention is shown in FIG. 2, and FIG. 2 is a schematic view showing the preparation of the array probe by the multi-wire wire-cut electrical discharge machining method of the present invention, which can improve the processing efficiency by simultaneously processing a plurality of wire electrode 18s. .

It should be emphasized that the foregoing vibration module 20 is not limited to being disposed on the workpiece to be processed. The surface of the 30, when necessary, the vibration module 20 can also be disposed under the plurality of line electrodes 18 and in contact with the plurality of line electrodes 18. In application, the vibration module 20 vibrates the plurality of line electrodes 18 to eliminate the shake-off In the wire-cut electrical discharge machining, the residual wire electrode 18 and the residual material of the workpiece 30 to be processed remain.

Then use Figure 3 to Figure 7 to carefully explain the various components of the invention. Set the position. First, please refer to FIG. 3, which shows a partial cross-sectional view of an embodiment of the present invention. As shown in FIG. 3, the multi-wire thin wire cutting electrical discharge machining apparatus 1 of the present invention comprises: a main body 10, a first shaft 12, a second shaft 14, a plurality of line electrodes 18, a vibration module 20, and a pivoting module 40. The basic element, wherein the torsion element 16 is connected to the second shaft 14 at the rear of the second shaft 14 in FIG. 3, is not visible in the cross-sectional view of FIG. The first shaft 12 and the second shaft 14 are disposed in the accommodating space 101 of the main body 10, and are respectively disposed on the first side 1011 and the second side 1012 in the accommodating space 101; the two ends of the plurality of line electrodes 18 The plurality of wire electrodes 18 respectively have a working area 181, and the working area 181 is in the first axis 12 and the second axis 14 respectively. Between the plurality of wire electrodes 18, the tension of the plurality of wire electrodes 18 is rotated by the torsion element 16 to adjust; the workpiece to be processed (to be prepared as an array probe) 30 is disposed on the plurality of wire electrodes 18 Area 181, through an external force F, The workpiece 30 to be processed is brought into contact with the working area 181 to perform a wire-cut electrical discharge machining program, wherein the external force F is derived from a mechanical arm or machine that holds the workpiece 30 to be processed, and the vibration module 20 is disposed on the workpiece 30 to be processed. On the surface, by applying a voltage signal to the vibration module 20, the vibration module 20 generates high frequency (1 M Hz) vibration and drives the workpiece 30 to be synchronously vibrated, and shakes off the wire cutting electrical discharge machining by vibration. Remaining between the plurality of wire electrodes 18 and the workpiece 30 to be processed to avoid secondary discharge; the pivoting module 40 is disposed on the bottom side of the body 10 for adjusting the body 10 according to the needs of the user. The tilt angle is used to change the processing direction of the workpiece 30 to be processed by the multi-wire thin wire electric discharge machining apparatus of the present invention to provide a plurality of array probe preparation requirements.

Referring now to Figure 4, Figure 4 depicts another embodiment in accordance with the present invention. Partial cross-sectional view. As shown in FIG. 4, in this embodiment, a third shaft 11 is further disposed between the first shaft 12 and the workpiece 30 to be processed, and a fourth shaft 13 is further disposed between the second shaft 14 and the workpiece 30 to be processed. The third shaft 11 and the fourth shaft 13 respectively have a plurality of grooves 111 and 131 for receiving and guiding the plurality of line electrodes 18, and the third shaft 11 and the fourth shaft 13 are disposed above the plurality of line electrodes 18, And there is a height drop H between the first shaft 12 and the second shaft 14. The third axis 11 and the fourth axis 13 adjust the position of the plurality of line electrodes 18 in the accommodating space 101 and the line tension of the plurality of line electrodes 18 in such a manner as to increase the traveling path of the plurality of line electrodes 18. The positions and functions of the remaining components are the same as those described in the previous paragraph. Therefore, in this embodiment, the third shaft 11 and the fourth shaft 13 have a relationship between the first shaft 12 and the second shaft 14, respectively. The same height drop H, but the invention is not limited thereto, and the third shaft 11 and the fourth shaft 13 may have different height differences from the first shaft 12 and the second shaft 14, respectively.

Referring to FIG. 5, FIG. 5 depicts a part of another embodiment of the present invention. Sectional view. As shown in FIG. 5, the present embodiment further extends between the third shaft 11 and the workpiece 30 to be processed. A fifth shaft 15 is disposed, and a sixth shaft 17 is further disposed between the fourth shaft 13 and the workpiece 30 to be processed, and the fifth shaft 15 and the sixth shaft 17 respectively have a plurality of grooves 151 and 171 to accommodate and The plurality of line electrodes 18 are guided, and the fifth shaft 15 and the sixth shaft 17 are disposed above the plurality of line electrodes 18, and have a height drop H between the first shaft 12 and the second shaft 14. The fifth axis 15 and the sixth axis 17 adjust the position of the plurality of line electrodes 18 in the accommodating space 101 and the line tension of the plurality of line electrodes 18 in a manner of increasing the traveling route of the plurality of line electrodes 18, wherein the present embodiment In the example, the fifth shaft 15 and the sixth shaft 17 and the third shaft 11 and the fourth shaft 13 are disposed on the same horizontal plane, that is, the third shaft 11 to the sixth shaft 17 are respectively coupled to the first shaft 12 and the second shaft. 14 has the same height drop H, but the invention is not limited thereto, and the positions of the third axis 11 to the sixth axis 17 can be changed according to the use requirements, for example, the third axis 11 and the fifth axis 15 There is another height difference between the two. The positions and functions of the remaining components are the same as those described in the preceding paragraphs, and thus will not be described again.

Please refer to FIG. 6, which depicts a portion of another embodiment in accordance with the present invention. Sectional view. In the present embodiment, a holding member 19 is disposed between the third shaft 11 and the fifth shaft 15 and between the fourth shaft 13 and the sixth shaft 17, and the pressing member 19 applies to the plurality of wire electrodes 18. The pressure is to reduce the vibration of the plurality of wire electrodes 18. The positions and functions of the remaining components are the same as those described in the preceding paragraphs, and thus will not be described again. It should be emphasized that the foregoing manner of the holding member 19 is not limited to that described in this paragraph. In the application, a spring is further disposed between the pressing member 19 and the bottom side of the accommodating space 101 for changing the pressure. The pressure exerted by the member 19 on the plurality of wire electrodes 18 is applied.

Referring to FIG. 7 and FIG. 8 , FIG. 7 depicts another specific embodiment according to the present invention. A partial cross-sectional view of an embodiment; FIG. 8 is a perspective view of a main portion of a specific embodiment according to FIG. The difference between the other embodiment shown in FIG. 7 and the embodiment of FIG. 6 is that the main body 10 is accommodated. The bottom side of the space 101 can optionally include a protrusion 102, and the vibration module 20 is disposed on the protrusion 102 and is in contact with the plurality of line electrodes 18 for generating high frequency of the vibration module 20 ( 1M Hz) vibrates and drives the plurality of wire electrodes 18 to vibrate synchronously, and by removing the wire cutting electric discharge by vibration, the residual wire between the plurality of wire electrodes 18 and the workpiece 30 to be processed is left to avoid the second time. The discharge is generated. It should be emphasized that the protruding portion 102 is not essential, and the vibration module 20 may be disposed on the bottom side surface of the accommodating space of the main body when necessary. 8 is a partial perspective view of the multi-wire thin wire cutting electrical discharge machining apparatus 1 of the present invention in the embodiment of FIG. 7, as shown in FIG.

Please refer to Figure 9A to Figure 9C, and Figure 10, Figure 9A to Figure 9C respectively. A schematic diagram of rotation by a pivotal module according to an embodiment of the present invention, and a schematic diagram of a corresponding array probe processing method are drawn; FIG. 10 depicts an array probe prepared by the present invention, and a probe Schematic diagram of the shape of the tip.

As shown in FIG. 9A to FIG. 9C, the multi-wire thin wire cutting electric discharge machining of the present invention The device 1 adjusts the tilt angle of the main body 10 according to the needs of the user by the pivoting module 40, and processes the workpiece 30 to be processed in various directions, processing depths, angles and the like during the online cutting electrical discharge process; or As shown in FIG. 10, a workpiece 30 (array probe) type with a straight front end and a rear end bent like a serpentine shape, or a different probe tip can be prepared, as shown in the enlarged section of FIG.

In summary, the present invention provides a multi-wire thin wire cutting electrical discharge machining package And rotating, by the torsion element, the second shaft received in the main body, so that the plurality of line electrodes connected to the first shaft and the second shaft are tightened between the first shaft and the second shaft to perform wire cutting discharge Processing; the vibration module is disposed on the workpiece to be processed to be prepared as an array probe, so that the workpiece to be processed resonates with the vibration module, and shakes off the machining waste to avoid secondary discharge; The pivoting module allows the body to oscillate, increasing the machining direction for array probe processing and a wide variety of array probe shapes.

Compared with the prior art, the multi-wire thin wire cutting discharge provided by the invention of the present invention The processing device can improve the processing efficiency by performing wire-cut electrical discharge machining by a plurality of wire electrodes; by contacting the workpiece to be processed by the vibration module and vibrating the workpiece, the machining precision can be improved, and the residual debris during processing can be effectively eliminated to avoid The secondary discharge caused by the residual chips is generated; the invention of the present invention can provide wire-cut electrical discharge machining in various directions by the pivotal module. In addition, since the invention is a small mechanism suitable for fabricating high aspect ratio array elements, such as micro-array probes or micro-array punches, the invention has the advantages of low cost and light weight. .

With the above detailed description of the preferred embodiments, it is desirable to describe this more clearly. The invention is not limited by the specific embodiments disclosed herein. On the contrary, the intention is to cover various modifications and equivalents within the scope of the invention as claimed. Therefore, the scope of the patented scope of the invention should be construed in the broadest

1‧‧‧Multi-wire fine wire cutting electric discharge machining device

10‧‧‧ Subject

101‧‧‧ accommodating space

1011‧‧‧ first side

1012‧‧‧ second side

11‧‧‧ Third axis

12‧‧‧ first axis

13‧‧‧fourth axis

14‧‧‧second axis

15‧‧‧ fifth axis

16‧‧‧Torque components

17‧‧‧ Sixth axis

18‧‧‧ wire electrode

19‧‧‧Clamping members

111, 121, 131, 141, 151, 171‧‧‧ trenches

20‧‧‧Vibration Module

30‧‧‧Workpieces to be machined

40‧‧‧ pivot module

Claims (10)

A multi-wire thin wire cutting electric discharge machining apparatus includes: a main body having an accommodating space, the accommodating space having a first side and a second side; and a first shaft disposed in the accommodating space The surface of the first shaft has a plurality of grooves; the second shaft is disposed at the second side of the accommodating space, and the surface of the second shaft has a plurality of grooves a torsion element coupled to the second axis; and a plurality of line electrodes, the two ends of the line electrodes being respectively embedded in the plurality of grooves of the first axis and the second axis, the lines Each of the electrode systems has a working area between the first axis and the second axis; wherein the user rotates the second axis by rotating the torsion element to adjust the tension of the wire electrodes When applied, a workpiece to be processed is disposed at a working area of the wire electrodes to contact the wire electrodes to form a wire-cut electrical discharge machining program. The multi-wire thin wire cutting electrical discharge machining device according to claim 1, further comprising a pivoting module disposed on a bottom side of the main body, adapted to be adjusted according to a user's needs. The inclination angle of the body. The multi-wire thin wire electric discharge machining apparatus according to claim 1, further comprising a third shaft and a fourth shaft, wherein the third shaft is disposed between the first shaft and the working regions, The surface of the third axis is formed with a plurality of grooves adapted to receive and guide the wire electrodes, the third axis is disposed above the wire electrodes, and the fourth axis is disposed on the surface Between the second axis and the working areas, the surface of the fourth shaft is formed with a plurality of grooves, the plurality of grooves are adapted to receive and guide the wire electrodes, and the fourth axis is disposed on the plurality of grooves Above the wire electrode. The multi-wire thin wire electric discharge machining apparatus according to claim 3, further comprising a fifth shaft and a sixth shaft, wherein the fifth shaft is disposed between the first shaft and the third shaft, The surface of the fifth axis is formed with a plurality of grooves adapted to receive and guide the wire electrodes, the fifth axis is disposed above the wire electrodes, and the sixth axis is disposed on the surface Between the second axis and the fourth axis, the surface of the sixth axis is formed with a plurality of grooves adapted to receive and guide the wire electrodes, and the sixth axis is disposed on the plurality of grooves Above the wire electrode. The multi-wire thin wire electric discharge machining apparatus according to claim 4, wherein the third shaft, the fourth shaft, the fifth shaft, and the sixth shaft system are disposed on the first shaft and the first The two axes are opposite to each other and have a height drop. The multi-wire thin wire electric discharge machining apparatus according to claim 5, further comprising a pressing member disposed between the third shaft and the fifth shaft or the fourth shaft and the The pressing member is disposed above the wire electrodes, wherein the pressing member applies pressure to the wire electrodes to reduce vibration of the wire electrodes. The multi-wire thin wire cutting electrical discharge machining device according to claim 6, further comprising a vibration module, wherein, in application, the vibration module is disposed under the wire electrodes with respect to the first Between the three axes and the fifth axis or between the fourth axis and the sixth axis and in contact with the wire electrodes, wherein, in application, the vibration module vibrates the wire electrodes and excludes the wires Cutting the residual debris generated in the electrical discharge machining program. The multi-wire thin wire cutting electrical discharge machining device according to claim 1, further comprising a vibration module, wherein, in application, the vibration module is adapted to be disposed on a surface of the workpiece to be processed, so that The workpiece to be machined vibrates and removes the residual debris generated in the wire-cut electrical discharge machining program. A multi-wire thin wire cutting electric discharge machining device as described in claim 1 of the patent application, further comprising The utility model comprises a vibration module disposed under and in contact with the wire electrodes, wherein, in application, the vibration module vibrates the wire electrodes and excludes residual debris generated in the wire cutting electrical discharge machining program. The multi-wire thin wire electric discharge machining apparatus according to claim 9, wherein the vibration module comprises a piezoelectric ceramic vibration element or an ultrasonic vibration element.