TW201544472A - Scribing head and scribing device - Google Patents

Scribing head and scribing device Download PDF

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Publication number
TW201544472A
TW201544472A TW104103596A TW104103596A TW201544472A TW 201544472 A TW201544472 A TW 201544472A TW 104103596 A TW104103596 A TW 104103596A TW 104103596 A TW104103596 A TW 104103596A TW 201544472 A TW201544472 A TW 201544472A
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Taiwan
Prior art keywords
scribing
scribing head
cutter wheel
substrate
mounting shaft
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TW104103596A
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Chinese (zh)
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TWI649281B (en
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Yasutomo Okajima
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Mitsuboshi Diamond Ind Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/027Scoring tool holders; Driving mechanisms therefor
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033Apparatus for opening score lines in glass sheets

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)

Abstract

The present invention provides a scribing head which is capable of inhibiting horizontal swaying of a cutting wheel to improve linear movement and a scribing device using the same. A scribing head 10 provided by this invention has a cutting wheel 11 which presses the surface of a substrate W and moves simultaneously to form scribing lines on the surface of the substrate W. The scribing head comprises a holder 13, the lower part of which is installed with a cutting wheel 11; a holder joint 15 which freely rotates to support the holder 13 through an installation shaft 12 of the holder 13; a holding component 16 which keeps the holder joint 15 liftable, in which the installation shaft 12 tilts, relative to a vertical line L1, toward the back of the moving direction of the scribing head 10, and a cutting wheel shaft 11a is installed in a position, relative to a vertical line L2 which extends from the axis of the installation shaft 12, towards the back of the moving direction of the scribing head 10.

Description

劃線頭及劃線裝置 Dash head and scribing device

本發明係關於一種具備用以於玻璃等脆性材料基板之表面加工劃線(分斷用之切割槽)之刀輪(亦稱作刻劃輪)之劃線頭以及使用該劃線頭之劃線裝置。 The present invention relates to a scribing head having a cutter wheel (also referred to as a scoring wheel) for processing a scribing (cutting groove for cutting) on a surface of a brittle material substrate such as glass, and a scribing head using the scribing head Line device.

先前以來,眾所周知有一種劃線裝置,其係於脆性材料基板(以下簡稱為「基板」)之表面,利用刀輪沿著預定劃線而加工劃線(例如參照專利文獻1、專利文獻2)。 In the prior art, a scribing device is known which is attached to a surface of a brittle material substrate (hereinafter simply referred to as "substrate"), and is processed by a cutter wheel along a predetermined scribe line (see, for example, Patent Document 1 and Patent Document 2). .

通常,刀輪被保持器支持,保持器安裝於劃線頭之保持器接頭。而且,先前多使用以發揮所謂「後傾效果」之方式構成之裝置,上述「後傾效果」係於使劃線頭行進時產生作用,欲使刀輪始終返回至該行進方向之線上(例如參照專利文獻3、專利文獻4)。 Typically, the cutter wheel is supported by a retainer that is mounted to a retainer joint of the scribing head. Further, in the past, a device configured to exhibit a so-called "backward tilting effect" has been used, and the "backward tilting effect" is applied to cause the scribing head to travel, and the cutter wheel is always returned to the traveling direction line (for example, Refer to Patent Document 3 and Patent Document 4).

圖3係表示具有上述「後傾效果」之先前之刀輪之安裝構造之說明圖。 Fig. 3 is an explanatory view showing a mounting structure of a conventional cutter wheel having the above-described "rearward tilting effect".

於下端保持刀輪21之保持器22經由垂直之安裝軸23而可自由旋轉地安裝於劃線頭24之保持器接頭25。刀輪21之接地點處於相對於將垂直之安裝軸23之軸心延長所得之線L3向劃線頭24之行進方向後方側偏移距離S1之位置。因此,於使劃線頭24行進時,欲使追隨之刀輪21始終返回至行進方向之線上之力矩發揮作用,可獲得刀輪之直進性。 The holder 22 holding the cutter wheel 21 at the lower end is rotatably attached to the holder joint 25 of the scribing head 24 via the vertical mounting shaft 23. The grounding point of the cutter wheel 21 is at a position shifted by a distance S1 from the line L3 obtained by extending the axis of the vertical mounting shaft 23 to the rear side in the traveling direction of the scribing head 24. Therefore, when the scribing head 24 is moved, the torque that follows the line in which the cutter wheel 21 is always returned to the traveling direction is exerted, and the straightness of the cutter wheel can be obtained.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]國際公開WO2007/063979號公報 [Patent Document 1] International Publication WO2007/063979

[專利文獻2]日本專利特開2011-218815號公報 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2011-218815

[專利文獻3]日本專利特開平8-217476號公報 [Patent Document 3] Japanese Patent Laid-Open No. Hei 8-217476

[專利文獻4]日本專利特開2010-260757號公報 [Patent Document 4] Japanese Patent Laid-Open Publication No. 2010-260757

藉由上述「後傾效果」而實現之刀輪之直進性係根據偏移量而變化。再者,亦視刀輪之移動速度而變化,但於偏移量較大之情形時,雖然直進性提高,但相對於左右振動變得較弱,會容易自沿著劃線頭之行進方向之線上向外側搖擺。 The straightness of the cutter wheel achieved by the "backward tilting effect" described above varies depending on the amount of shift. In addition, depending on the moving speed of the cutter wheel, when the offset is large, the straightness is improved, but the vibration is weaker with respect to the left and right, and it is easy to travel from the direction of the scribing head. The line swings to the outside.

另一方面,於自行車或摩托車等之把手軸與車輪中,組裝有後傾角及被稱為軌跡(亦稱作trail)之構成。所謂後傾角,如圖4所示,係指把手軸26之旋轉軸心L5相對於垂直之線L4之傾斜角β,所謂軌跡係指車輪27之接地點P3與使把手軸26之旋轉軸心L5延長至與上述接地點P3相同之水平線所得之地點P4之間之距離T1。把手軸26之傾斜越大,軌跡(T1)變得越長,直進性穩定,但把手操作變得遲鈍。 On the other hand, in the handle shaft and the wheel of a bicycle or a motorcycle, a caster angle and a structure called a trail (also called a trail) are assembled. The back inclination angle, as shown in FIG. 4, refers to the inclination angle β of the rotation axis L5 of the handle shaft 26 with respect to the vertical line L4, and the so-called trajectory refers to the ground point P3 of the wheel 27 and the rotation axis of the handle shaft 26. L5 is extended to a distance T1 between the points P4 obtained by the same horizontal line as the above-mentioned ground point P3. The larger the inclination of the handle shaft 26, the longer the trajectory (T1) becomes, the straightness is stabilized, but the handle operation becomes dull.

本發明之目的在於提供一種考慮到如上所述之方面,組合上述偏移與軌跡之構成,藉此可一面抑制刀輪向左右之搖擺,一面提高直進性之劃線頭、以及使用該劃線頭之劃線裝置。 It is an object of the present invention to provide a scribing head which can improve the straightness while suppressing the swing of the cutter wheel to the right and left, and the use of the scribing, in consideration of the above-described aspect, by combining the above-described offset and trajectory. Head line device.

為了解決上述課題,於本發明中,採用如下技術手段。即,本發明係一種劃線頭,其具備刀輪,該刀輪一面壓抵基板表面,一面相對地移動,藉此於基板表面加工劃線,上述劃線頭包括:保持器,其於下部具有刀輪;保持器接頭,其係經由設置於該保持器之上部之安裝軸,而以可繞該安裝軸自由旋動之方式支持上述保持器;以及支持構件,其將該保持器接頭可升降地保持;且設為如下構成:上述安裝 軸係相對於垂直之線向上述劃線頭之行進方向後方側傾斜而形成,上述刀輪之輪軸係設置於相對於使上述安裝軸之軸心延長所得之線向上述劃線頭之行進方向後方側偏移之位置。 In order to solve the above problems, in the present invention, the following technical means are employed. That is, the present invention is a scribing head having a cutter wheel that is pressed against the surface of the substrate while being relatively moved, thereby processing a scribing line on the surface of the substrate, the scribing head including: a retainer, the lower portion Having a cutter wheel; a retainer joint that supports the retainer in a manner rotatable about the mounting shaft via a mounting shaft disposed on an upper portion of the retainer; and a support member that can hold the retainer joint Hold up and down; and set as follows: above installation The shaft system is formed to be inclined with respect to a vertical line toward the rear side in the traveling direction of the scribing head, and the wheel axle of the cutter wheel is disposed in a traveling direction of the scribing head with respect to a line extending from an axial center of the mounting shaft. The position of the rear side offset.

而且,本發明之特徵亦在於一種劃線裝置,其構成為:具備上述劃線頭,該劃線頭保持於機框之樑,使該劃線頭之刀輪一面壓抵於載置於平台上之基板表面,一面沿著基板表面相對地移動。 Furthermore, the present invention is also characterized in that the scribing device is configured to include the scribing head, and the scribing head is held by the beam of the frame so that the cutter wheel of the scribing head is pressed against the platform. The surface of the upper substrate is relatively moved along the surface of the substrate.

於本發明中,較佳為上述刀輪之直徑為1~3mm,上述安裝軸之軸心與垂直之線之傾斜角為10~25°,上述刀輪之輪軸與使上述安裝軸之軸心延長所得之線之偏移量為1~4mm,上述刀輪相對於基板之接地點與使上述安裝軸之軸心延長所得之線與上述基板相交之地點之軌跡量成為2~5mm。 Preferably, in the present invention, the diameter of the cutter wheel is 1 to 3 mm, and the inclination angle of the axis of the mounting shaft and the vertical line is 10 to 25°, and the axle of the cutter wheel and the axis of the mounting shaft are The offset of the obtained line is 1 to 4 mm, and the amount of the track where the line of the cutter wheel with respect to the substrate and the line obtained by extending the axis of the mounting shaft intersects the substrate is 2 to 5 mm.

根據本發明,藉由因使保持器之安裝軸傾斜而產生之軌跡,刀輪之直進性提高,並且傾斜之安裝軸與垂直地安裝之情況相比,旋轉之自由度受到限制,故直進性穩定,可有效地抑制因振動等而導致之搖擺。 According to the present invention, the straightness of the cutter wheel is improved by the trajectory generated by tilting the mounting shaft of the retainer, and the degree of freedom of rotation is limited as compared with the case where the tilted mounting shaft is vertically mounted, so the straightness is improved. Stable, it can effectively suppress the sway caused by vibration and the like.

進而,刀輪之輪軸設置於相對於使傾斜之安裝軸之軸心延長所得之線向劃線頭之行進方向後方側偏移之位置,故而可按照該偏移量,延長軌跡量,進而可提高直進性。 Further, since the wheel shaft of the cutter wheel is disposed at a position shifted toward the rear side in the traveling direction of the scribing head with respect to the axis extending the axis of the inclined mounting shaft, the amount of the trajectory can be extended according to the offset amount, and further Improve straightforwardness.

而且,刻劃時對刀輪之加壓與普通兩輪車之把手軸不同,係於刀輪之刀尖中心位置,垂直地施加,故而有可容易地進行刀輪之加壓控制之效果。 Further, the pressing of the cutter wheel at the time of scribing is different from that of the conventional two-wheeled vehicle, and is applied vertically at the center of the cutting edge of the cutter wheel, so that the effect of the pressure control of the cutter wheel can be easily performed.

1‧‧‧平台 1‧‧‧ platform

2‧‧‧軌道 2‧‧‧ Track

3‧‧‧螺旋軸 3‧‧‧Spiral axis

4‧‧‧旋轉驅動部 4‧‧‧Rotary drive department

5‧‧‧支持柱 5‧‧‧Support column

6‧‧‧樑 6‧‧‧ beams

7‧‧‧機框 7‧‧‧Machine frame

8‧‧‧導件 8‧‧‧ Guides

9‧‧‧馬達 9‧‧‧Motor

10‧‧‧劃線頭 10‧‧‧ Scribe head

11‧‧‧刀輪 11‧‧‧Cutter wheel

11a‧‧‧輪軸 11a‧‧·Axle

12‧‧‧安裝軸 12‧‧‧Installation shaft

13‧‧‧保持器 13‧‧‧ Keeper

14‧‧‧軸承 14‧‧‧ bearing

15‧‧‧保持器接頭 15‧‧‧Retainer connector

16‧‧‧支持構件 16‧‧‧Support components

21‧‧‧刀輪 21‧‧‧Cutter wheel

22‧‧‧保持器 22‧‧‧ Keeper

23‧‧‧安裝軸 23‧‧‧Installation shaft

24‧‧‧劃線頭 24‧‧‧Drawing head

25‧‧‧保持器接頭 25‧‧‧Retainer connector

26‧‧‧把手軸 26‧‧‧Handle shaft

27‧‧‧車輪 27‧‧‧ Wheels

L1‧‧‧線 L1‧‧‧ line

L2‧‧‧線 L2‧‧‧ line

L3‧‧‧線 L3‧‧‧ line

L4‧‧‧線 L4‧‧‧ line

L5‧‧‧旋轉軸心 L5‧‧‧Rotary axis

P1‧‧‧接地點 P1‧‧‧ Grounding point

P2‧‧‧地點 P2‧‧‧Location

P3‧‧‧接地點 P3‧‧‧ Grounding point

P4‧‧‧地點 P4‧‧‧Location

S‧‧‧偏移間隔 S‧‧‧ offset interval

S1‧‧‧距離 S1‧‧‧ distance

T‧‧‧軌跡 T‧‧‧ track

T1‧‧‧距離 T1‧‧‧ distance

W‧‧‧基板 W‧‧‧Substrate

X‧‧‧方向 X‧‧‧ direction

α‧‧‧傾斜角(後傾角) Α‧‧‧ Tilt angle (post rake angle)

β‧‧‧傾斜角 ‧‧‧‧Tilt angle

圖1係表示本發明之劃線裝置之一例之概略性前視圖。 Fig. 1 is a schematic front view showing an example of a scribing device of the present invention.

圖2係本發明之劃線頭之前視圖。 Figure 2 is a front elevational view of the scribing head of the present invention.

圖3係表示先前之劃線頭之一例之前視圖。 Fig. 3 is a front view showing an example of a preceding scribing head.

圖4係普通兩輪車中之後傾角與軌跡之說明圖。 Fig. 4 is an explanatory view of the rear inclination angle and the trajectory in the ordinary two-wheeled vehicle.

以下,基於圖1及圖2所示之實施例,對本發明之劃線頭以及具備該劃線頭之劃線裝置之詳情進行說明。 Hereinafter, details of the scribing head of the present invention and the scribing apparatus including the scribing head will be described based on the embodiments shown in FIGS. 1 and 2.

圖1係表示本發明之劃線裝置之圖,具備載置並保持基板W之平台1。於平台1之表面設置有多個空氣抽吸孔(圖示省略),與設置於外部之真空泵等空氣抽吸源(圖示省略)連通。 Fig. 1 is a view showing a scribing apparatus of the present invention, which is provided with a stage 1 on which a substrate W is placed and held. A plurality of air suction holes (not shown) are provided on the surface of the platform 1, and communicate with an air suction source (not shown) such as a vacuum pump provided outside.

又,平台1可沿水平之軌道2於Y方向(圖1之前後方向)移動,藉由利用馬達(圖示省略)而旋轉之螺旋軸3被驅動。而且,平台1係藉由內置馬達之旋轉驅動部4而可於水平面內旋動。 Further, the stage 1 is movable along the horizontal track 2 in the Y direction (the front and rear directions in Fig. 1), and the screw shaft 3 that is rotated by a motor (not shown) is driven. Further, the platform 1 is rotatable in a horizontal plane by a rotary drive unit 4 having a built-in motor.

具備夾著平台1而設置之兩側之支持柱5、5、以及於X方向上水平地延伸之樑(橫桿)6之機框7係以橫跨於平台1上之方式設置。於樑6,設置有於X方向水平地延伸之導件8,於該導件8,安裝有可藉由馬達9而於X方向上移動之本發明之劃線頭10。 The frame 7 having the support columns 5, 5 provided on both sides of the platform 1 and the beam (crossbar) 6 extending horizontally in the X direction is disposed across the platform 1. The guide beam 8 is horizontally extended in the X direction, and the guide head 8 is provided with a scribing head 10 of the present invention which is movable in the X direction by the motor 9.

如圖2中詳細地表示般,劃線頭10包括:保持器13,其於下部具備刀輪11,並且於上部具備安裝軸12;保持器接頭15,其以可繞安裝軸12自由旋動之方式,經由安裝軸12及軸承14而支持保持器13;以及支持構件16,其將該保持器接頭15可升降地保持。 As shown in detail in FIG. 2, the scribing head 10 includes a retainer 13 having a cutter wheel 11 at a lower portion and a mounting shaft 12 at an upper portion thereof, and a retainer joint 15 that is freely rotatable about the mounting shaft 12. In this manner, the retainer 13 is supported via the mounting shaft 12 and the bearing 14; and a support member 16 that holds the retainer joint 15 up and down.

保持器接頭15可藉由設置於支持構件16之液壓缸等升降機構(圖示省略),而與保持器13一同升降。而且,安裝於保持器13之刀輪11可使用直徑為1~3mm之刀輪。 The holder joint 15 can be raised and lowered together with the holder 13 by a lifting mechanism (not shown) such as a hydraulic cylinder provided in the support member 16. Further, the cutter wheel 11 attached to the holder 13 can use a cutter wheel having a diameter of 1 to 3 mm.

保持器13之安裝軸12係相對於垂直之線L1向劃線頭10之行進方向(圖2之箭頭方向)之後方側傾斜角度α而形成。該傾斜角(後傾角)α較佳為設為10~25°。 The mounting shaft 12 of the retainer 13 is formed at an inclination angle α with respect to the vertical line L1 toward the traveling direction of the scribing head 10 (the direction of the arrow in FIG. 2). The inclination angle (back inclination angle) α is preferably set to 10 to 25°.

又,由於安裝軸12之傾斜,於刀輪11向基板W之接地點P1與將安裝軸12之軸心延長所得之線L2與基板W相交之地點P2之間,產生軌跡 T。該軌跡T之長度較佳為設定為2~5mm。 Further, due to the inclination of the mounting shaft 12, a trajectory is generated between the ground point P1 of the cutter wheel 11 to the ground point P1 of the substrate W and the point P2 at which the axis L2 of the mounting shaft 12 is extended to the substrate W. T. The length of the track T is preferably set to 2 to 5 mm.

進而,刀輪11之輪軸11a設置於相對於使傾斜之安裝軸12之軸心延長所得之線L2向劃線頭10之行進方向後方側偏移間隔S之位置。該偏移量、即間隔S較佳為設為1~4mm。 Further, the wheel shaft 11a of the cutter wheel 11 is provided at a position shifted by a distance S from the line L2 obtained by extending the axis of the inclined mounting shaft 12 toward the rear side in the traveling direction of the scribing head 10. The offset amount, that is, the interval S is preferably set to 1 to 4 mm.

於本實施例中,於使用直徑為2mm之刀輪,且將安裝軸12之傾斜角α設為17°,將偏移間隔S設為2.5mm時,軌跡T之長度成為2.92mm。因此,軌跡T形成為長於使安裝軸12垂直之情形時之偏移量2.5mm。 In the present embodiment, when a cutter wheel having a diameter of 2 mm is used, and the inclination angle α of the attachment shaft 12 is set to 17°, and the offset interval S is set to 2.5 mm, the length of the trajectory T becomes 2.92 mm. Therefore, the trajectory T is formed to be longer than the displacement of the mounting shaft 12 by 2.5 mm.

上述劃線裝置係一面將刀輪11壓抵於基板W之表面,一面使劃線頭10朝圖2之箭頭方向上移動,藉此於基板W之表面加工劃線。 The scribing device moves the scribing head 11 against the surface of the substrate W while moving the scribing head 10 in the direction of the arrow in FIG. 2 to process the scribing on the surface of the substrate W.

於該加工時,藉由因使安裝軸12傾斜而產生之軌跡T,刀輪11之直進性提高,並且傾斜之安裝軸12與垂直之情況相比,旋轉之自由度受到限制,故直進性穩定,可有效地抑制因振動等而導致之搖擺。 At the time of the machining, the straightness of the cutter wheel 11 is improved by the trajectory T generated by tilting the mounting shaft 12, and the degree of freedom of rotation is limited as compared with the case where the tilted mounting shaft 12 is vertical, so the straightness is improved. Stable, it can effectively suppress the sway caused by vibration and the like.

進而,刀輪11之輪軸11a設置於相對於使傾斜之安裝軸12之軸心延長所得之線L2向劃線頭10之行進方向後方側偏移間隔S之位置,故而可以相當於該間隔S之量,延長上述軌跡T,從而可進一步提高直進性。 Further, the wheel shaft 11a of the cutter wheel 11 is disposed at a position shifted from the line L2 which is extended by the axial center of the inclined mounting shaft 12 to the rear side in the traveling direction of the scribing head 10, and thus can correspond to the interval S. The amount of the above-mentioned trajectory T is extended, so that the straightness can be further improved.

而且,刻劃時對刀輪11之加壓與開頭部分所述之兩輪車之把手軸不同,於刀輪11之刀尖中心位置垂直地施加,故而可容易地進行加壓控制。 Further, the pressing of the cutter wheel 11 at the time of scribing is different from the handle shaft of the two-wheeled vehicle described at the beginning, and is applied perpendicularly to the center position of the cutting edge of the cutter wheel 11, so that the pressure control can be easily performed.

以上,對本發明之代表性實施例進行了說明,但本發明未必僅特定於上述實施例構造,可於達成其目的,而且不脫離權利要求書之範圍內,適當進行修正、變更。 The representative embodiments of the present invention have been described above, but the present invention is not limited to the structures of the above-described embodiments, and may be modified and changed as appropriate without departing from the scope of the claims.

[工業上之可利用性] [Industrial availability]

本發明可應用於在玻璃等脆性材料基板之表面加工劃線之劃線頭以及使用該劃線頭之劃線裝置。 The present invention can be applied to a scribing head for scribing a surface of a brittle material substrate such as glass, and a scribing device using the scribing head.

10‧‧‧劃線頭 10‧‧‧ Scribe head

11‧‧‧刀輪 11‧‧‧Cutter wheel

11a‧‧‧輪軸 11a‧‧·Axle

12‧‧‧安裝軸 12‧‧‧Installation shaft

13‧‧‧保持器 13‧‧‧ Keeper

14‧‧‧軸承 14‧‧‧ bearing

15‧‧‧保持器接頭 15‧‧‧Retainer connector

16‧‧‧支持構件 16‧‧‧Support components

L1‧‧‧線 L1‧‧‧ line

L2‧‧‧線 L2‧‧‧ line

P1‧‧‧接地點 P1‧‧‧ Grounding point

P2‧‧‧地點 P2‧‧‧Location

T‧‧‧軌跡 T‧‧‧ track

α‧‧‧傾斜角(後傾角) Α‧‧‧ Tilt angle (post rake angle)

Claims (3)

一種劃線頭,其具備刀輪,該刀輪一面壓抵基板表面,一面相對地移動,藉此於基板表面加工劃線,上述劃線頭包括:保持器,其於下部具有刀輪;保持器接頭,其係經由設置於該保持器之上部之安裝軸,而以可繞該安裝軸自由旋動之方式,支持上述保持器;以及支持構件,其將該保持器接頭可升降地保持;且上述安裝軸係相對於垂直之線向上述劃線頭之行進方向後方側傾斜而形成,上述刀輪之輪軸設置於相對於使上述安裝軸之軸心延長所得之線向上述劃線頭之行進方向後方側偏移之位置。 A scribing head having a cutter wheel that presses against a surface of a substrate and moves relative to each other to thereby perform scribing on the surface of the substrate. The scribing head includes: a retainer having a cutter wheel at a lower portion; a joint that supports the retainer by being rotatably rotatable about the mounting shaft via a mounting shaft disposed on an upper portion of the retainer; and a support member that holds the retainer joint up and down; The mounting shaft is formed to be inclined with respect to a vertical line toward the rear side in the traveling direction of the scribing head, and the wheel shaft of the cutter wheel is disposed on the scribing head with respect to a line extending from an axial center of the mounting shaft. The position where the traveling direction is shifted to the rear side. 如請求項1之劃線頭,其中上述刀輪之直徑為1~3mm,上述安裝軸之軸心與垂直之線之傾斜角為10~25°,上述刀輪之輪軸與使上述安裝軸之軸心延長所得之線之偏移量為1~4mm,上述刀輪相對於基板之接地點與使上述安裝軸之軸心延長所得之線與上述基板相交之地點之軌跡量為2~5mm。 The scribing head of claim 1, wherein the diameter of the cutter wheel is 1 to 3 mm, and the inclination angle of the axis of the mounting shaft and the vertical line is 10 to 25°, and the axle of the cutter wheel and the mounting shaft are The offset of the axis obtained by the axial extension is 1 to 4 mm, and the amount of the track where the wire of the cutter wheel with respect to the substrate and the line obtained by extending the axis of the mounting shaft intersects the substrate is 2 to 5 mm. 一種劃線裝置,其構成為:具備如請求項1或2之劃線頭,該劃線頭保持於機框之樑,使該劃線頭之刀輪一面壓抵於載置於平台上之基板表面,一面沿著基板表面相對地移動。 A scribing device is provided with a scribing head according to claim 1 or 2, wherein the scribing head is held on the beam of the frame so that the scissor wheel of the scribing head is pressed against the platform. The surface of the substrate moves relative to each other along the surface of the substrate.
TW104103596A 2014-05-30 2015-02-03 Scribing head and scribing device TWI649281B (en)

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JP6331707B2 (en) 2018-05-30
KR20150137982A (en) 2015-12-09

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