TW201538038A - Electrode element and manufacturing method thereof applicable to plasma etching - Google Patents

Abstract

An electrode element and the manufacturing method thereof applicable to plasma etching adopt an installation layer and a flexible connection layer for constituting a connection layer disposed between an electrode and a supporting component in which the material of the said installation layer is the same as the material of the said material or the said supporting component. The said installation layer is mechanically connected with a joint face having the material same as that of the installation layer, and the flexible connection layer is firmly connected with a joint face that is not connected with the said installation layer, so as to realize the detachable connection between the supporting component and the said electrode. The said flexible connection layer is able to enlarge the effective contact area between the electrode and the supporting component, thereby reduces the contact thermal resistance between the electrode and the supporting component, and further allows the relative movement between the said electrode and the said supporting component caused by thermal expansion, so as to prevent the problem of curvature or breaking of the electrode caused by the thermal expansion coefficient difference between the electrode and the supporting component and extend the service life of the electrode.

Description

Electrode element for plasma etching and method of manufacturing same

The present invention relates to the field of plasma processing technology, and more particularly to the field of internal components for plasma processing, and more particularly to an electrode component for plasma processing and a method of fabricating the same.

It is well known that plasma chambers are used in semiconductor fabrication processes to deposit and etch various layers of material on a semiconductor substrate, substrate or wafer. In order to generate a plasma in the plasma reaction chamber, the interior of the plasma reaction chamber needs to be evacuated, then a precursor gas is injected, and RF energy is coupled into the plasma reaction chamber. In general, plasma etching chambers fall into two broad categories: inductive-coupled plasma chambers and capacitive-coupled plasma chambers. In an inductively coupled plasma reaction chamber, RF energy is mainly coupled into the plasma in an inductively coupled manner, while in a capacitively coupled plasma reaction chamber, the RF is mainly passed through a radio frequency discharge surface, such as a gas nozzle (shower) A head or a cathode is coupled into the plasma by a capacitive discharge.

In the plasma treatment, the processing temperature inside the reaction chamber, such as the reaction gas temperature or the plasma temperature, must be strictly controlled. This can be achieved, in part, by controlling the temperature of the electrodes that simultaneously act as gas nozzles. Usually, the electrodes are connected to a support member. It has also been used to directly connect the electrodes to a temperature control element that simultaneously acts as a support member. The temperature control element is usually made of a metal such as aluminum or other material having high thermal conductivity, and a plurality of heating coils or liquid cooling gas passages or gas cooling gas passages are provided inside. In order to control the temperature of the electrodes, the temperature control elements are connected to the electrodes by mechanical connection or other means. However, it has been found that during the plasma treatment, since the support member and the electrode material are hard, the contact faces are difficult to completely conform to, resulting in a decrease in heat conduction efficiency, and at the same time, due to different thermal expansion/contraction between the electrode and the support member, This causes the electrode to be deformed or bent, and moreover, the electrode is broken, thereby affecting the uniformity and processing stability of the plasma treatment.

It is disclosed in the prior art that a soft connecting layer can be provided between the support member and the electrode, which can allow relative movement of the electrode and the support member, avoiding possible cracking of the electrode, however, since the electrode is in a plasma environment Working in a certain period of time will be damaged by plasma bombardment or corrosion, and need to be replaced, in order to reduce waste and save cost, usually choose only to replace the electrode, but the electrode with the connecting layer is difficult to get from The supporting member is detached. If the supporting member and the electrode are placed together in a high temperature environment to melt the connecting layer, since the supporting member is usually made of aluminum, and the melting point of aluminum is low, the supporting member may also be caused. Damage, therefore, is difficult to operate.

In order to solve the above problems, the present invention discloses an electrode component for plasma processing, comprising: a support member having a first bonding surface, the support member being made of a metal material; and an electrode having a function of cooperating with the first bonding surface a second joint surface; one disposed on the support portion a connecting layer between the member and the electrode, the connecting layer comprises an elastic connecting layer and a mounting layer, the material of the mounting layer is the same as the material of the supporting member or the same as the electrode material, the mounting layer The first bonding surface of the support member or the second bonding surface of the electrode is fixedly coupled, and the elastic connecting layer is fixedly coupled to the other bonding surface.

Preferably, the material of the mounting layer is the same as that of the metal component, and is a metal layer. The mounting layer and the first bonding surface of the supporting component are fixedly coupled, and the elastic connecting layer and the electrode are The two joint surfaces are fixedly combined.

Preferably, the first bonding surface of the supporting member is made of aluminum or aluminum alloy, and the material of the mounting layer is the same as the material of the supporting member.

Preferably, the material of the mounting layer is the same as the material of the electrode, the mounting layer is fixedly coupled to the second bonding surface of the electrode, and the elastic connecting layer is fixed to the first bonding surface of the supporting member. Combine.

Preferably, the material of the electrode is one of tantalum, tantalum carbide, quartz or aluminum, and the material of the mounting layer is the same as the material of the electrode.

Preferably, the electrode element is a gas nozzle type electrode, a first group of gas injection holes are disposed on the support member, a second group of gas injection holes are disposed on the electrode, and the connection layer is provided with a first group of gas injection holes. And a gas passage through which the second group of gas jet holes pass.

Preferably, the gas passage on the connection layer is disposed as a third group of gas injection holes matching the first group of gas injection holes and the second group of gas injection holes, and the diameter of the third group of gas injection holes is greater than or equal to the first A set of gas orifices and an aperture of the second set of gas injection holes.

Preferably, the gas passage on the connecting layer is disposed to surround a narrow slit of the first group of gas injection holes and the second group of gas injection holes, the width of the slit is larger than the first group of gas injection holes And an aperture of the second set of gas injection holes.

Preferably, a temperature adjustment system is disposed inside or above the support member, and the elastic connection layer has good thermal conductivity.

Preferably, the material of the elastic connecting layer is an organic silicone rubber, and the organic silicone rubber comprises a heat conductive material such as aluminum oxide or aluminum nitride.

Preferably, the material of the elastic connecting layer is a fusible fluoropolymer, and the fluoropolymer comprises one of the following materials: PFA, PTFE, ETFE, FEP, PEEK, PCTFE.

Preferably, the thickness of the mounting layer is less than or equal to 0.5 mm, and the thickness of the elastic connecting layer is less than or equal to 3 mm.

Further, the present invention also discloses a method for manufacturing an electrode member, comprising the steps of: providing a support member having a first joint surface, and providing a first set of gas injection holes on the support member; and providing a second joint surface An electrode on the electrode is provided with a second set of gas injection holes matching the first group of gas injection holes; a connection layer is provided, a set of gas channels is disposed on the connection layer, and the connection layer comprises an installation a layer and an elastic connecting layer, wherein the material of the mounting layer is the same as the material of the supporting member or the electrode; and the mounting layer and the supporting member or the electrode of the same material are fixedly combined The elastic connecting layer is fixedly coupled to a joint surface not connected to the mounting layer, and the first group of gas passage holes, the gas passage and the second group of gas passage holes are penetrated.

Preferably, the mounting layer is the same material as the support member, and the elasticity The connecting layer has adhesiveness, and the first bonding surface of the mounting layer and the supporting member are fixedly combined, one side of the elastic connecting layer is adhered to the mounting layer, and the other side is combined with the second electrode of the electrode. The surface connection is fixed.

Preferably, the support member and the electrode are mechanically clamped, and the mounting layer is clamped to the support member by the mechanical means.

Preferably, the mounting layer is the same material as the supporting member, the elastic connecting layer is not viscous, and the mounting layer is placed close to the supporting member, and the elastic connecting layer is placed close to the electrode, and The support member and the electrode are mechanically clamped to mechanically bond the mounting layer and the elastic connecting layer between the support member and the electrode.

Preferably, the mounting layer is made of the same material as the electrode, the elastic connecting layer has adhesiveness, and the mounting layer and the second bonding surface of the electrode are fixedly combined, and one side of the elastic connecting layer is The mounting layer is bonded, and the other surface is fixedly connected to the first bonding surface of the support member.

Preferably, the support member and the electrode are mechanically clamped, and the mounting layer is clamped to the support member by the mechanical means.

Preferably, the mounting layer is made of the same material as the electrode, the elastic connecting layer is not viscous, the mounting layer is placed close to the electrode, and the elastic connecting layer is placed close to the supporting member, A support member and the electrode are mechanically clamped to mechanically bond the mounting layer and the elastic connecting layer between the support member and the electrode.

Preferably, the thickness of the mounting layer is less than or equal to 0.5 mm, and the thickness of the elastic connecting layer is less than or equal to 3 mm.

The invention adopts a mounting layer and an elastic connecting layer to form a connecting layer, and is disposed between an electrode and a supporting member, and the material of the mounting layer is the same as that of one of the electrode and the supporting member, and The mounting layer is fixedly coupled with an electrode of the same material or a supporting member of the same material, and the elastic connecting layer is fixedly coupled with a bonding surface not connected to the mounting layer to realize detachable support member and the electrode. connection. The elastic connecting layer allows relative movement between the electrode and the support member due to thermal expansion, thereby avoiding the problem of bending or cracking of the electrode due to a difference in thermal expansion coefficient between the electrode and the support member, and prolonging The electrode life is reduced, the use cost is reduced, and the stability of the plasma reaction chamber is improved. When a replacement component such as an electrode is required, the electrode can be easily replaced and replaced with a new electrode, and at the same time, the elastic connecting layer and the mounting layer The constituent connection layer can improve heat conduction between the support member and the electrode, enabling better temperature control.

110, 110’‧‧‧Support components

111, 111’‧‧‧ first joint

115, 115'‧‧‧ first group of fumaroles

120, 120’‧‧‧Installation layer

130, 130'‧‧‧elastic connection layer

140, 140'‧‧‧ electrodes

141, 141’‧‧‧ second joint

145, 145’‧‧‧ second group of fumaroles

150, 150’‧‧‧ connection layer

155, 155’‧‧‧ third group of fumaroles

210, 210'‧‧‧ Supporting parts

211, 211’‧‧‧ first joint

215, 215’ ‧ ‧ first set of fumaroles

220, 220’‧‧‧Installation layer

230, 230'‧‧‧elastic connection layer

240, 240'‧‧‧ electrodes

241, 241’‧‧‧ second joint

245, 245’ ‧ ‧ second group of fumaroles

250, 250’‧‧‧ connection layer

255, 255’‧‧‧ third group of fumaroles

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a front cross-sectional view showing a specific embodiment of an electrode member of the present invention.

Fig. 2a is a front cross-sectional view showing another embodiment of the electrode member of the present invention.

Figure 2b is a bottom cross-sectional view of the embodiment of Figure 2a with the electrodes not connected.

Fig. 3 is a front cross-sectional view showing another embodiment of the electrode member of the present invention.

Figure 4 is a front cross-sectional view showing another embodiment of the electrode member of the present invention

For a better understanding of the contents of the present invention, further description will be made below in conjunction with the specific embodiments. 1 is a front cross-sectional view showing a specific embodiment of an electrode member of the present invention. In the embodiment, the electrode member is a gas nozzle electrode, and the gas nozzle electrode member includes a support member 110, an electrode 140, and a connecting layer 150 between the supporting member 110 and the electrode 140. The supporting member 110 includes a first bonding surface 111. The first sealing hole 115 is disposed on the supporting member 110. The electrode 140 includes a second bonding surface 141. Two sets of fumaroles 145. The connection layer 150 includes an elastic connection layer 130 and a mounting layer 120. The connection layer 150 is provided with a gas passage for allowing the first group of gas injection holes 115 and the second group of gas injection holes 145 to pass through. The structure of the gas passage may be a third group of gas injection holes 155 for abutting the first group of gas injection holes 115 and the second group of gas injection holes 145, or a slit for surrounding the first group of gas injection holes and the second group of gas injection holes, Introduce it in detail. The material of the mounting layer 120 may be the same as the material of the support member 110, or may be the same as the material of the electrode 140. In the embodiment, the support member 110 is made of a metal material, and the material of the mounting layer 120 is the same as that of the support member 110. A metal layer having a thickness of between 0.05 mm and 0.5 mm, preferably, the metal layer is an aluminum layer. At this time, the aluminum mounting layer 120 is mechanically fixedly coupled to the support member 110, and the elastic connecting layer 130 is fixedly coupled to the second bonding surface 141 of the electrode 140.

The material of the electrode 140 is usually 矽, graphite, tantalum carbide, quartz or aluminum, and the material of the support member is usually made of metal. A temperature adjustment device (not shown) can be usually disposed inside or above the support member 110. For the temperature adjustment of the electrode 140, since the support member and the electrode material are hard, the contact surface is difficult to completely conform, and the heat inside or above the support member is transferred to the electrode, and the heat conduction efficiency is lowered, and if the material of the electrode 140 is 矽One of graphite, tantalum carbide, and quartz, which has different thermal expansion/contraction between the electrode 140 and the support member 110, which causes deformation or bending of the electrode, and more, causes the electrode to rupture, thereby Affects the uniformity of plasma treatment and processing stability. Working in a plasma environment, the electrode 140 is often subjected to physical bombardment of the plasma and chemical etching of the reactive gas. After a certain period of time, the electrode 140 needs to be replaced; and the supporting member connected to the electrode 140 is not in the plasma environment. The loss is small, and in order to save cost, it is desirable to conveniently disassemble and assemble the electrode 140 from the support member 110.

Based on the above technical problem, the embodiment of the present invention disclosed in FIG. 1 can conveniently solve the above problem. Specifically, the aluminum mounting layer 120 can be selected to achieve mechanical connection with the support member 110, and at the same time, due to the material and support of the mounting layer 120. The components 110 are made of the same material, which avoids deformation or bending of the electrode 140 which may be caused by different thermal expansion coefficients due to different materials, and may cause problems such as cracking of the electrode 140. Separating and replacing the electrode 140 and the support member 110 under the mounting layer 120 is facilitated by mechanically connecting the mounting layer 120 to the support member 110. At the same time, since the aluminum mounting layer 120 is fixedly connected to the electrode 140 through the elastic connecting layer 130, the elastic connecting layer 130 can maintain the relative movement between the electrode 140 and the aluminum mounting layer 120, thereby preventing the electrode and the mounting layer from being thermally expanded due to different materials. Deformation or bending of the electrode that occurs in different situations, and even more, causes problems such as cracking of the electrode. Since the elastic connecting layer 130 is soft in material, it can completely conform to the contact surface of the mounting layer 120 and the electrode 140, and the heat transfer efficiency between the supporting member 110 and the electrode 140 is improved.

In the present embodiment, the connection layer 150 is provided with a third group of gas injection holes 155 matching the first group of gas injection holes 115 and the second group of gas injection holes 145, in order to prevent the elastic connection layer 130 from being thermally deformed to cause the third group of gas injection holes. A deformation blockage occurs in 155. Generally, the aperture of the third group of gas injection holes 155 is generally greater than or equal to the apertures of the first group of gas injection holes 115 and the second group of gas injection holes 145. In the present invention, the material of the elastic connecting layer 130 may be viscous or non-sticky. In this embodiment, the material of the elastic connecting layer 130 is selected to have viscosity, and the electrode element of the embodiment is used. for: A support member 110 having a first joint surface 111 is provided, a first set of gas injection holes 115 is disposed on the support member 110, and an electrode 140 having a second joint surface 141 is provided, and the first group of gas injection holes 115 are disposed on the electrode 140. a matching second set of air holes 145; a mounting layer 120 and an elastic connecting layer 130 are provided and fixedly connected to form a connecting layer 150, and the first set of air holes 115 are disposed on the fixed connecting layer 150 The second set of air holes 155 matched with the second set of air holes 145, the side of the elastic connecting layer 130 not connected to the mounting layer 120 is bonded and fixed to the electrode 140, and the mounting layer 120 is mechanically connected with the supporting member 110, such as by screws. The method of tightening or the like is fixed by the connection; since the thickness of the mounting layer 120 is small, it is difficult to withstand the screwing of the screw, and the electrode 140 and the supporting device 110 can be mounted together by mechanical means to achieve a fixed combination of the mounting layer 120 and the supporting member 110. It should be noted that when the mounting layer 120 is mechanically fixed to the support member, and the electrode 140 is fixedly coupled to the elastic connecting layer 130, the first group of the gas injection holes 115, the third group of the gas injection holes 155, and the second group of the jets are required. The holes 145 are vertically aligned in order to allow the reaction gas to enter the reaction chamber through the gas nozzle electrode. In another embodiment, the elastic connecting layer 130 is not viscous, so when the electrode member is mounted, the mounting layer 130 is placed close to the supporting member 110, the elastic connecting layer 120 is placed close to the electrode 140, and the supporting member 110 and the electrode 140 are passed. Mechanically clamping the connection, mechanically securing the mounting layer 120 and the resilient connection layer 130 between the support member 110 and the electrode 140.

With the technical solution described in this embodiment, when the electrode 140 needs to be replaced, the electrode 140 can be easily released from the support member 110 together with the connection layer 150 by releasing the mechanical connection between the mounting layer 120 and the support member 110. Replacement of new electrodes. In this embodiment, the support member 110 can realize the replacement and replacement of the plurality of electrodes 140, which greatly reduces the equipment cost compared with the replacement of the support member 110 in the prior art.

2a-2b are schematic cross-sectional views of an electrode element according to another embodiment of the present invention, 2a is a schematic cross-sectional view of the electrode member of the present embodiment. The material of the support member 110' and the mounting layer 120' of the present embodiment is the same as that of the above embodiment, except that the first group of fumarole holes are provided on the connection layer 150'. The gas passage through which 115' and the second set of gas injection holes 145' pass is a plurality of slits, and the slits are disposed around the first group of gas injection holes 115' and the second group of gas injection holes 145'. 2b is a bottom cross-sectional view of the connecting layer 150' of the present embodiment when it is not connected to the electrode 140'. As can be clearly seen from FIG. 2b, since the first group of the air holes 115' are densely arranged, the narrow slits may be At least one set of fumarole holes (e.g., third set of fumaroles 155') is included, and other technical features are the same as in the above embodiments.

3 is a front cross-sectional view showing another embodiment of the electrode member of the present invention. In this embodiment, the material of the mounting layer 220 of the connecting layer 250 is the same as that of the electrode 240. The material of the electrode 240 is usually tantalum, graphite, carbonization. For materials such as tantalum and quartz, since the mounting layer 220 is in direct contact with the electrode 240, in order to avoid deformation, bending or cracking of the electrode 240 caused by different thermal expansion coefficients of different materials, the material of the mounting layer 220 is also selected as material such as tantalum, graphite or tantalum carbide. . Similar to the embodiment shown in FIG. 1, a first set of air holes 215 are disposed on the support member 210, and a second set of air holes 245 are disposed on the electrode 240, and the elastic connecting layer 230 is fixedly connected to the mounting layer 220, and is disposed thereon. The third group of air holes 255, the mounting layer 220 is mechanically fixedly connected to the electrode 240, and the elastic connecting layer 230 is fixedly connected to the supporting member 210, and holds the first group of the air holes 215, the third group of the air holes 255 and the second when the connection is fixed. The group of gas injection holes 245 are vertically penetrated in order. In order to prevent the elastic deformation of the elastic connecting layer 230 from causing deformation and blockage of the third group of the gas injection holes 255, the diameter of the third group of the gas injection holes 255 is generally greater than or equal to the diameters of the first group of the gas injection holes 215 and the second group of the gas injection holes 245.

The electrode component of the embodiment is provided by: providing a support member 210 having a first joint surface 211, and providing a first set of gas injection holes 215 on the support member 210; An electrode 240 having a second bonding surface 241 is disposed on the electrode 240 with a second set of air holes 245 matching the first group of air holes 215; a mounting layer 220 having the same material as the electrode 240 and an elastic connecting layer 230 are provided. In the present invention, the material of the elastic connecting layer 230 may be viscous or non-sticky. In this embodiment, the material of the elastic connecting layer 230 is selected to have adhesiveness, and the mounting layer 220 and the elastic connecting layer 230 are connected. A connection layer 250 is fixedly formed, and a third group of gas injection holes 255 matching the first group of gas injection holes 215 and the second group of gas injection holes 245 are disposed on the connection and fixing connection layer 250, and the mounting layer 220 is mechanically connected to the electrode 240. If the fixing can be performed by screwing or the like, since the thickness of the mounting layer 220 is small, it is difficult to bear the screwing of the screw, and the electrode 240 and the supporting device 210 can be mounted together by mechanical means to realize the mounting layer 220 and the supporting member 210. Fixed bonding. The support member 210 is then attached and fixed to the side of the elastic connecting layer 230 facing away from the mounting layer 220. It should be noted that when the mounting layer 220 is mechanically fixed to the electrode 240, and the supporting member 210 is fixedly coupled to the elastic connecting layer 230, the first group of the air holes 215, the third group of the air holes 255, and the second group are required. The gas injection holes 245 are vertically aligned in order to allow the reaction gas to enter the reaction chamber through the gas nozzle electrode. Obviously, when the electrode component is fabricated, the connecting layer 150 and the supporting component 210 may be firstly fixed and fixed, and then mechanically fixed to the electrode 240. When fixing, it is also necessary to consider three sets of gas jet holes to be sequentially aligned. In another embodiment, the elastic connecting layer 230 is not viscous, so when the electrode member is mounted, the mounting layer 230 is placed close to the electrode 240, and the elastic connecting layer 220 is placed close to the supporting member 210, and the supporting member 210 and the electrode 240 are passed. Mechanically clamping the connection, mechanically securing the mounting layer 220 and the resilient connection layer 230 between the support member 210 and the electrode 240.

The advantage of the embodiment shown in FIG. 1 is that the elastic connecting layer 230 is in contact with the supporting member 210 which is usually made of metal, and has good heat conduction efficiency, and the temperature of the supporting member 210 can be instantaneous and effective. Passed to the electrode 240 through the mounting layer 220, Moreover, at the time of replacement, only the mechanical connection between the electrode 240 and the mounting layer 220 needs to be released, and the purpose of replacing only the electrode 240 is achieved. In this embodiment, the support member 210, the elastic connecting layer 230, and the mounting layer 220 can be reused, thereby minimizing equipment cost.

4 is a front cross-sectional view showing another embodiment of the electrode member of the present invention. The material of the mounting layer 220' and the electrode 240' of the present embodiment is the same as that of the above embodiment, except that the setting on the connection layer 250' is allowed. The gas passage through which the first set of gas passage holes 215' and the second group of gas injection holes 245' pass is a plurality of slits, and the slits are disposed around the first group of gas injection holes 215' and the second group of gas injection holes 245'. Since the first group of gas injection holes 215' are densely arranged, at least one set of gas injection holes (e.g., the third group of gas injection holes 255') may be included between them, and other technical features are the same as those of the above embodiment.

In other embodiments, the electrode may also be made of a metal material such as aluminum. To avoid plasma corrosion of the electrode, a plasma corrosion resistant coating may be applied to the surface of the electrode made of aluminum. Although the electrode material is the same as the material of the support member, since the joint faces of the two metal members have strong hardness, it is difficult to completely conform to each other, causing heat to be reduced in efficiency when being transported from the support member to the electrode, and unevenness is caused. Therefore, the technical solution according to the invention can also be used. The mounting layer can be combined with the first bonding surface of the support member or with the second bonding surface of the electrode. Other technical features are the same as the above embodiments.

It is to be understood that the foregoing description of the preferred embodiments of the present invention The electrode member for plasma treatment of the invention avoids bending or cracking of the electrode, prolongs the service life of the electrode, reduces the use cost, improves the stability of the plasma reaction chamber, and has a firm combination, and the manufacturing method thereof is simple in operation. The separation method is simple in operation, convenient in component replacement, and low in cost, and is suitable for large-scale industrial production.

In this specification, the invention has been described with reference to specific embodiments thereof. However, it will be apparent that various modifications and changes can be made without departing from the spirit and scope of the invention. Accordingly, the specification and drawings are to be regarded as

110‧‧‧Support parts

111‧‧‧ first joint

115‧‧‧First set of fumaroles

120‧‧‧Installation layer

130‧‧‧Flexible connection layer

140‧‧‧electrode

141‧‧‧Second junction

145‧‧‧Second group of fumaroles

150‧‧‧Connection layer

155‧‧‧The third group of fumaroles

Claims (20)

An electrode member for plasma treatment, comprising: a support member having a first bonding surface, the support member being made of a metal material; an electrode having a second bonding surface mated with the first bonding surface; The connecting layer between the supporting member and the electrode, the connecting layer comprises an elastic connecting layer and a mounting layer, and the material of the mounting layer is the same as the material of the supporting member or the same as the electrode material. The mounting layer is fixedly coupled to the first bonding surface of the support member or the second bonding surface of the electrode, and the elastic connecting layer is fixedly coupled to the other bonding surface. The electrode component according to claim 1 , wherein the mounting layer is made of the same material as the metal component, and is a metal layer, and the mounting layer and the first bonding surface of the supporting component are fixedly coupled. The elastic connecting layer is fixedly coupled to the second bonding surface of the electrode. The electrode element according to claim 2, wherein the first bonding surface of the supporting member is made of aluminum or an aluminum alloy, and the material of the mounting layer is the same as the material of the supporting member. The electrode member according to claim 1, wherein the mounting layer is made of the same material as the electrode, the mounting layer is fixedly coupled to the second bonding surface of the electrode, and the elastic connecting layer and the support are The first bonding surface of the component is fixedly bonded. The electrode member according to claim 4, wherein the electrode is made of one of tantalum, tantalum carbide, quartz or aluminum, and the material of the mounting layer is the same as that of the electrode. The electrode member according to any one of claims 1 to 5, wherein the electrode member is a gas nozzle type electrode, the support member is provided with a first group of gas injection holes, and the electrode is provided with a second group a gas passage hole, wherein the connection layer is provided with a gas passage allowing the first group of gas injection holes and the second group of gas passage holes to pass through. The electrode member according to claim 6, wherein a gas passage on said connection layer is provided as a third group of gas injection holes matching said first group of gas injection holes and said second group of gas injection holes, said third group a hole diameter of the gas injection hole is greater than or equal to a hole of the first group of gas injection holes and the second group of gas injection holes path. The electrode member according to claim 6, wherein a gas passage on said connection layer is provided to surround a slit of said first group of gas injection holes and said second group of gas injection holes, said slit having a width larger than The apertures of the first set of gas injection holes and the second set of gas injection holes. The electrode member according to claim 6, wherein a temperature adjustment system is provided inside or above the support member, and the elastic connection layer has good thermal conductivity. The electrode member according to claim 9, wherein the material of the elastic connecting layer is an organic silicone rubber, and the organic silicone rubber comprises a heat conductive material such as aluminum oxide or aluminum nitride. The electrode member according to claim 9, wherein the material of the elastic connecting layer is a fusible fluoropolymer, and the fluoropolymer comprises one of the following materials: PFA, PTFE, ETFE, FEP, PEEK PCTFE. The electrode member according to any one of claims 1 to 5, wherein the thickness of the mounting layer is 0.5 mm or less, and the thickness of the elastic connecting layer is 3 mm or less. A method of manufacturing an electrode member, comprising the steps of: providing a support member having a first bonding surface, disposing a first group of gas injection holes on the support member; and providing an electrode having a second bonding surface on the electrode Providing a second set of gas injection holes matched with the first set of gas injection holes; providing a connection layer, and providing a set of gas passages on the connection layer, the connection layer comprising a mounting layer and an elastic connection layer The material of the mounting layer is the same as the material of the supporting member or the electrode; the mounting layer and the supporting member or the electrode of the same material are fixedly combined, and the elastic connecting layer and the unbonded layer are A bonding surface of the mounting layer connection is fixedly coupled and passes through the first group of gas injection holes, the gas passages and the second group of gas injection holes. The method of manufacturing an electrode member according to claim 13, wherein the mounting layer is made of the same material as the support member, the elastic connecting layer has adhesiveness, and the mounting layer and the The first bonding surface of the supporting member is fixedly coupled, and one surface of the elastic connecting layer is adhered to the mounting layer, and the other surface is fixedly connected to the second bonding surface of the electrode. The method of manufacturing an electrode member according to claim 14, wherein the support member and the electrode are mechanically clamped, and the mounting layer is clamped and coupled to the support member by the mechanical means. The method of manufacturing an electrode member according to claim 13, wherein the mounting layer is made of the same material as the supporting member, the elastic connecting layer is not viscous, and the mounting layer is placed close to the supporting member. The elastic connecting layer is placed adjacent to the electrode, mechanically clamping and connecting the supporting member and the electrode, and mechanically fixing the mounting layer and the elastic connecting layer to the supporting member and the electrode between. The method of manufacturing an electrode member according to claim 13, wherein the mounting layer is made of the same material as the electrode, the elastic connecting layer has a viscosity, and the mounting layer and the second bonding surface of the electrode are fixed. In combination, one side of the elastic connecting layer is bonded to the mounting layer, and the other side is fixedly connected to the first bonding surface of the support member. The method of manufacturing an electrode member according to claim 17, wherein the support member and the electrode are mechanically clamped, and the mounting layer is clamped and coupled to the support member by the mechanical means. The method of manufacturing an electrode member according to claim 13, wherein the mounting layer is made of the same material as the electrode, the elastic connecting layer is not viscous, and the mounting layer is placed close to the electrode, the elasticity A connection layer is placed adjacent to the support member, the support member and the electrode are mechanically clamped, and the mounting layer and the elastic connection layer are mechanically fixedly coupled between the support member and the electrode. The method of manufacturing an electrode member according to claim 13, wherein the thickness of the mounting layer is 0.5 mm or less, and the thickness of the elastic connecting layer is 3 mm or less.