TW201534874A - Multi-function laser detecting device - Google Patents
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Abstract
Description
本發明係關於一種多功能雷射量測裝置，尤其是一種可量測各種功率之雷射的雷射量測裝置。 The invention relates to a multifunctional laser measuring device, in particular to a laser measuring device capable of measuring lasers of various powers.
現有雷射測量技術中有許多雷射測量儀器，包括示波器、二極體偵測器、自相干干涉儀等，然而這些雷射測量儀器都僅只能測量雷射的單一性質，且適用的雷射範圍都有一定的限制。 There are many laser measuring instruments in the existing laser measuring technology, including oscilloscopes, diode detectors, self-coherent interferometers, etc. However, these laser measuring instruments can only measure the single nature of the laser, and the applicable laser The scope has certain limits.
一般測量同一雷射之多個雷射性質的方法是使用適用於雷射的各種不同性質之測量儀器依序測量，例如若要測量雷射的功率、波形、序列三種特性，就必須分三次測量，而每次測量前都必須校準光路避免測量誤差，然而校準費工費時且提高了損壞儀器的機率，此外，因為多次測量不是使用相同的光路，獲得之數據的誤差率相對也較高，如果要測量同一雷射的更多特性則大幅增加作業上的時間與難度。 Generally, the method of measuring multiple laser properties of the same laser is to measure sequentially using various measuring instruments suitable for laser. For example, to measure the power, waveform, and sequence characteristics of the laser, it is necessary to measure three times. However, the optical path must be calibrated before each measurement to avoid measurement error. However, the calibration takes time and increases the probability of damage to the instrument. In addition, since the multiple measurements are not using the same optical path, the error rate of the obtained data is relatively high. If you want to measure more features of the same laser, it will greatly increase the time and difficulty of the job.
職是之故，申請人鑑於習知技術中所產生之缺失，經過悉心試驗與研究，並一本鍥而不捨之精神，終構思出本案「多功能雷射量測裝置」，能夠克服上述缺點，以下為本案之簡要說明。 For the sake of his position, the applicant has conceived the "multi-function laser measuring device" in the present case, based on the lack of knowledge in the prior art, through careful testing and research, and the spirit of perseverance. A brief description of the case.
本發明之一面向係提供一種多功能雷射量測裝置，包括：一分光裝置，用於將一入射雷射光束分成一第一雷射光束、一第二雷射光束 以及一第三雷射光束；一第一量測器，用於接收該第一雷射光束；一第二量測器，用於接收該第二雷射光束；以及一第三量測器，用於接收該第三雷射光束，其中該分光裝置具有一切角分光鏡。 One aspect of the present invention provides a multifunctional laser measuring apparatus comprising: a beam splitting device for splitting an incident laser beam into a first laser beam and a second laser beam And a third laser beam; a first measuring device for receiving the first laser beam; a second measuring device for receiving the second laser beam; and a third measuring device, For receiving the third laser beam, wherein the beam splitting device has an angular splitter.
本發明之另一面向係提供一種多功能雷射量測方法，該方法包括：提供一具有一切角分光鏡的一光路調整裝置；使用該光路調整裝置將一入射光路分成一第一光路、一第二光路以及一第三光路；將一第一量測器設置在該第一光路上；將一第二量測器設置在該第二光路上；以及將一第三量測器設置在該第三光路上。 Another aspect of the present invention provides a multi-function laser measuring method, the method comprising: providing an optical path adjusting device having all angle beamsplitters; and using the optical path adjusting device to divide an incident light path into a first optical path, a second optical path and a third optical path; a first measuring device disposed on the first optical path; a second measuring device disposed on the second optical path; and a third measuring device disposed thereon The third light path.
本發明之又一面向係提供一種多功能雷射量測裝置，包括：一分光裝置，具一切角分光鏡，用於將一入射雷射光束分成三雷射光束；以及三量測器，用於同時量測該三雷射光束所具備該入射雷射光數之三個特徵。 A further aspect of the present invention provides a multi-function laser measuring device, comprising: a beam splitting device having a prismatic beam splitter for splitting an incident laser beam into three laser beams; and a three-dimensional measuring device for The three characteristics of the three laser beams having the incident laser light are simultaneously measured.
10‧‧‧多功能雷射量測裝置 10‧‧‧Multifunctional laser measuring device
105‧‧‧雷射光源 105‧‧‧Laser light source
110‧‧‧可調式反射鏡片 110‧‧‧Adjustable Reflective Lenses
115‧‧‧切角分光鏡 115‧‧‧Chamfered beamsplitter
120‧‧‧分光鏡片 120‧‧‧Splitting lens
125‧‧‧光校正器 125‧‧‧Light corrector
130‧‧‧光衰減片 130‧‧‧Light Attenuator
135‧‧‧光功率計 135‧‧‧ optical power meter
140‧‧‧光纖接頭 140‧‧‧Fiber Optic Connector
145‧‧‧光偵測器 145‧‧‧Photodetector
11‧‧‧入射光路 11‧‧‧Incoming light path
12‧‧‧第一光路 12‧‧‧First light path
13‧‧‧第二光路 13‧‧‧Second light path
14‧‧‧第三光路 14‧‧‧The third light path
106‧‧‧雷射光 106‧‧‧Laser light
126‧‧‧分光校正點 126‧‧ ‧ Spectral correction point
15‧‧‧校正光路 15‧‧‧Corrected light path
20‧‧‧多功能雷射量測裝置 20‧‧‧Multifunctional laser measuring device
205‧‧‧雷射光源 205‧‧‧Laser light source
210‧‧‧可調式反射鏡片 210‧‧‧Adjustable Reflective Lenses
215‧‧‧切角分光鏡 215‧‧‧Cut angle beam splitter
220‧‧‧第二分光鏡片 220‧‧‧Second spectroscopic lens
214‧‧‧第一分光鏡片 214‧‧‧First Spectroscopic Lens
230‧‧‧光衰減片 230‧‧‧Light Attenuator
225‧‧‧光校正器 225‧‧‧Light corrector
240‧‧‧光纖接頭 240‧‧‧Fiber Optic Connector
235‧‧‧光功率計 235‧‧‧ optical power meter
21‧‧‧入射光路 21‧‧‧Incoming light path
245‧‧‧光偵測器 245‧‧‧Photodetector
22‧‧‧第一光路 22‧‧‧First light path
21a‧‧‧透射光路 21a‧‧‧Transmission path
24‧‧‧第三光路 24‧‧‧The third light path
23‧‧‧第二光路 23‧‧‧Second light path
206‧‧‧雷射光 206‧‧‧Laser light
226‧‧‧分光校正點 226‧‧‧ Spectral correction point
從以下關於較佳實施例的描述中可以更詳細地瞭解本發明，這些較佳實施例是作為實例給出的，並且是結合附圖而被理解的，其中：第1圖，其揭示依照本發明實施例之多功能雷射量測裝置示意圖；以及第2圖，其揭示依照本發明實施例之多功能雷射量測裝置示意圖。 The invention will be understood in more detail in the following description of the preferred embodiments, which are given by way of example only, and in which FIG. A schematic diagram of a multifunctional laser measuring device according to an embodiment of the invention; and a second drawing showing a schematic view of a multifunctional laser measuring device according to an embodiment of the invention.
本案將可由以下的實施例說明而得到充分瞭解，使得熟習本技藝之人士可以據以完成之，然本案之實施並非可由下列實施案例而被限 制其實施型態。 This case will be fully understood by the following examples, so that those skilled in the art can complete it, but the implementation of this case is not limited by the following implementation cases. The implementation type.
本文中用語“較佳”是非排他性的，應理解成“較佳為但不限於”，任何說明書或請求項中所描述或者記載的任何步驟可按任何順序執行，而不限於請求項中所述的順序，本發明的範圍應僅由所附請求項及其均等方案確定，不應由實施方式示例的實施例確定。 The term "preferred" as used herein is non-exclusive and should be understood as "preferably, but not limited to", and any steps described or recited in any specification or claim can be performed in any order, and are not limited to the claim The order of the present invention should be determined only by the accompanying claims and their equivalents, and should not be determined by the embodiments of the embodiments.
用語“包括”及其變化出現在說明書和請求項中時，是一個開放式的用語，不具有限制性含義，並不排除其他特徵或步驟。 The term "comprising" and its variations when used in the specification and claims are an open term and are not intended to be limiting, and do not exclude other features or steps.
請參閱第1圖，其揭示依照本發明實施例之多功能雷射量測裝置示意圖。在第1圖中，多功能雷射量測裝置10包括雷射光源105、可調式反射鏡片110、切角分光鏡115、分光鏡片120、光校正器125、光衰減片130、光功率計135、光纖接頭140以及光偵測器145，其中雷射光源105與切角分光鏡115間具有入射光路11，可調式反射鏡片110設置於入射光路11上，其將雷射光源105的雷射光106導向切角分光鏡115並藉由調整入射光路11與可調式反射鏡片110的夾角來調整入射光路11與切角分光鏡115的夾角。較佳的，切角分光鏡115將入射光路11分成第一光路12、第二光路13以及第三光路14。較佳的，切角分光鏡115具有光路調整的功能，即其為光路調整裝置。 Please refer to FIG. 1 , which illustrates a schematic diagram of a multifunctional laser measuring device according to an embodiment of the invention. In FIG. 1 , the multifunctional laser measuring device 10 includes a laser light source 105 , an adjustable reflecting lens 110 , a chamfer beam splitting mirror 115 , a beam splitting lens 120 , a light correcting unit 125 , an optical attenuating sheet 130 , and an optical power meter 135 . The fiber optic connector 140 and the photodetector 145, wherein the laser source 105 and the chamfer beam splitter 115 have an incident optical path 11 disposed on the incident optical path 11 and the laser light 106 of the laser source 105. The angle-cutting beam splitter 115 is guided and the angle between the incident light path 11 and the chamfered beam splitter 115 is adjusted by adjusting the angle between the incident light path 11 and the adjustable reflecting lens 110. Preferably, the chamfering beam splitter 115 divides the incident optical path 11 into a first optical path 12, a second optical path 13, and a third optical path 14. Preferably, the chamfering beam splitter 115 has a function of adjusting the optical path, that is, it is an optical path adjusting device.
根據本發明之某些實施例，切角分光鏡115具有第一反射面與第二反射面，入射光路11經切角分光鏡115的第一反射面反射後形成第一光路12，接著經切角分光鏡115的第二反射面反射後形成第二光路13，再穿透出切角分光鏡115而形成第三光路14。較佳的，光偵測器145係配置在第一光路12上用以量測雷射光106，光纖接頭140係配置在第二光路13上用以量測雷射光106，光功率計135係配置在第三光路14上用以量測 雷射光106。較佳的，第一光路12、第二光路13以及第三光路14上可分別配置光偵測器、光纖接頭、光功率計、示波器、自相干干涉儀、機械接頭或其他雷射光量測裝置。較佳的，在第一光路12上具有光衰減片130配置於光偵測器145前以衰減雷射光106，其可避免雷射光106損壞光偵測器145。 According to some embodiments of the present invention, the chamfering beam splitter 115 has a first reflecting surface and a second reflecting surface. The incident light path 11 is reflected by the first reflecting surface of the chamfering beam splitter 115 to form a first optical path 12, and then cut. The second reflecting surface of the angular beam splitter 115 reflects the second optical path 13 and then passes through the chamfering beam splitter 115 to form a third optical path 14. Preferably, the photodetector 145 is disposed on the first optical path 12 for measuring the laser light 106, and the optical fiber connector 140 is disposed on the second optical path 13 for measuring the laser light 106, and the optical power meter 135 is configured. Used to measure on the third optical path 14 Laser light 106. Preferably, the first optical path 12, the second optical path 13 and the third optical path 14 are respectively provided with a photodetector, an optical fiber connector, an optical power meter, an oscilloscope, an autocorrelation interferometer, a mechanical joint or other laser light measuring device. . Preferably, the light attenuating sheet 130 is disposed on the first optical path 12 in front of the photodetector 145 to attenuate the laser light 106, which can prevent the laser light 106 from damaging the photodetector 145.
在本發明的某些實施例中，本發明的多功能雷射量測裝置可依不同波長的入射雷射光配置具有不同材料的光偵測器，舉例來說，若入射雷射光為長波長入射雷射光，例如波長在0.8m至1.7m的範圍內，則配置具有InGaAs材料的光偵測器，若為短波長入射雷射光，例如波長在0.5m至0.9m的範圍內，則配置具有GaAs材料的光偵測器，而上述配置可使光偵測器可偵測的重複率達10GHz，其中若是極短波長的入射雷射光則可配置具有矽材料的光偵測器，其可偵測的重複率為4GHz。較佳的，第一光路12、第二光路13以及第三光路14上可配置具有相同材料的光偵測器或具有不同材料的光偵測器。 In some embodiments of the present invention, the multifunctional laser measuring device of the present invention can configure photodetectors having different materials according to incident laser light of different wavelengths, for example, if incident laser light is incident at a long wavelength. Laser light, for example, having a wavelength in the range of 0.8 m to 1.7 m, is configured with a photodetector having an InGaAs material, and if it is a short-wavelength incident laser light, for example, having a wavelength in the range of 0.5 m to 0.9 m, the GaAs is disposed. The photodetector of the material, and the above configuration enables the photodetector to detect a repetition rate of 10 GHz, wherein if the incident laser light of a very short wavelength is used, a photodetector with a germanium material can be configured to detect The repetition rate is 4 GHz. Preferably, the first optical path 12, the second optical path 13, and the third optical path 14 may be configured with photodetectors of the same material or photodetectors having different materials.
在本發明的某些實施例中，本發明的多功能雷射量測裝置可依不同波長的入射雷射光配置不同規格的光功率計，例如波長在0.25μm至11μm範圍內的入射雷射光，可採用0W至20W、0W至50W或0W至100W的光功率計。較佳的，本發明所使用的光功率計為熱感應功率計。 In some embodiments of the present invention, the multifunctional laser measuring device of the present invention can configure optical power meters of different specifications according to incident laser light of different wavelengths, for example, incident laser light having a wavelength in the range of 0.25 μm to 11 μm. An optical power meter of 0 W to 20 W, 0 W to 50 W, or 0 W to 100 W can be used. Preferably, the optical power meter used in the present invention is a thermal induction power meter.
根據本發明之某些實施例，本發明的多功能雷射量測裝置使用分光鏡片120以及光校正器125對於入射雷射光進行光路校正，其中光校正器125具有分光校正點126。分光鏡片120係設置在第一光路12上，其將第一光路12上的部份雷射光導向光校正器125形成校正光路15，而分光校正點126已預先經由光路設計之計算設置於預先估計之位置，若經由 分光鏡片120反射的部份雷射光在光校正器125顯示的位置與分光校正點126預先估計之位置相符，則表示本發明的多功能雷射量測裝置中的其他光路皆準確地導向其預先估計之位置，若光校正器125顯示經由分光鏡片120反射的部份雷射光並未對準在分光校正點126上，則可透過可調式反射鏡片110調整入射光路11與可調式反射鏡片110的夾角，進而校正所有的光路。藉由光校正器125可以確保本發明的多功能雷射量測裝置中的所有光路皆無偏差，而各光路上的量測裝置也能獲得更準確的數據。 In accordance with certain embodiments of the present invention, the multi-function laser metrology apparatus of the present invention performs optical path correction for incident laser light using a beam splitting lens 120 and a light corrector 125, wherein the light corrector 125 has a spectral correction point 126. The spectroscopic lens 120 is disposed on the first optical path 12, and guides a portion of the laser light on the first optical path 12 to the optical corrector 125 to form a correcting optical path 15, and the spectral correction point 126 has been previously estimated by the calculation of the optical path design. Location, if via The portion of the laser light reflected by the spectroscopic lens 120 at the position displayed by the optical corrector 125 coincides with the position estimated by the spectroscopic correction point 126, indicating that the other optical paths in the multi-function laser measuring device of the present invention are accurately directed to the pre-predetermined position. The estimated position, if the light corrector 125 displays that part of the laser light reflected by the spectroscopic lens 120 is not aligned on the spectroscopic correction point 126, the incident optical path 11 and the adjustable reflective lens 110 can be adjusted through the adjustable reflective lens 110. Angle, which in turn corrects all light paths. The optical corrector 125 can ensure that all optical paths in the multi-function laser measuring device of the present invention are unbiased, and the measuring devices on the optical paths can obtain more accurate data.
請參閱第2圖，其揭示依照本發明實施例之多功能雷射量測裝置示意圖。在第2圖中，多功能雷射量測裝置20包括雷射光源205、可調式反射鏡片210、切角分光鏡215、第一分光鏡片214、第二分光鏡片220、光校正器225、光衰減片230、光功率計235、光纖接頭240以及光偵測器245，其中雷射光源205與切角分光鏡214間具有入射光路21，可調式反射鏡片210設置於入射光路21上，其將雷射光源205的雷射光206導向第一分光鏡片214並藉由調整入射光路21與可調式反射鏡片210的夾角來調整入射光路21與切角分光鏡215的夾角。較佳的，透過第一分光鏡片214的部份反射，入射光路21形成第一光路22與透射光路21a，而穿透光路21a經由切角分光鏡215形成第二光路23以及第三光路24。 Please refer to FIG. 2, which shows a schematic diagram of a multifunctional laser measuring device according to an embodiment of the invention. In FIG. 2, the multifunctional laser measuring device 20 includes a laser light source 205, an adjustable reflecting lens 210, a chamfer beam splitter 215, a first beam splitting lens 214, a second beam splitting lens 220, a light correcting device 225, and light. The attenuating sheet 230, the optical power meter 235, the optical fiber connector 240, and the photodetector 245, wherein the laser light source 205 and the chamfer beam splitter 214 have an incident optical path 21, and the adjustable reflective lens 210 is disposed on the incident optical path 21, which will The laser light 206 of the laser light source 205 is directed to the first beam splitting lens 214 and adjusts the angle between the incident light path 21 and the chamfered beam splitter 215 by adjusting the angle between the incident light path 21 and the adjustable reflecting mirror 210. Preferably, the portion of the first spectroscopic lens 214 is reflected, the incident optical path 21 forms the first optical path 22 and the transmitted optical path 21a, and the transparent optical path 21a forms the second optical path 23 and the third optical path 24 via the chamfered beam splitter 215.
在本發明的某些實施例中，第一分光鏡片214在入射光路21上，其與入射光路21的夾角為45°，入射光路21經第一分光鏡片214反射和透射後分別形成第一光路22與透射光路21a。切角分光鏡215具有一反射面，透射光路21a經切角分光鏡215的反射面反射後形成第二光路23，接著穿透出切角分光鏡215而形成第三光路24。較佳的，光偵測器245係配置在第一光路22上用以量測雷射光206，光纖接頭240係配置在第二 光路23上用以量測雷射光206，光功率計235係配置在第三光路24上用以量測雷射光206。較佳的，第一光路22、第二光路23以及第三光路24上可分別配置光偵測器、光纖接頭、光功率計、示波器、自相干干涉儀、機械接頭或其他雷射光量測裝置。較佳的，在第一光路22上具有光衰減片230配置於光偵測器245前以衰減雷射光206，其可避免高功率雷射光損壞光偵測器245。 In some embodiments of the present invention, the first beam splitting lens 214 is on the incident light path 21, and the angle between the first beam splitting lens 214 and the incident light path 21 is 45°, and the incident light path 21 is reflected and transmitted by the first beam splitting lens 214 to form a first light path. 22 and the transmitted light path 21a. The chamfering beam splitter 215 has a reflecting surface. The transmitted optical path 21a is reflected by the reflecting surface of the chamfering beam splitter 215 to form a second optical path 23, and then passes through the chamfering beam splitter 215 to form a third optical path 24. Preferably, the photodetector 245 is disposed on the first optical path 22 for measuring the laser light 206, and the optical fiber connector 240 is disposed in the second The optical path 23 is used to measure the laser light 206, and the optical power meter 235 is disposed on the third optical path 24 for measuring the laser light 206. Preferably, the first optical path 22, the second optical path 23, and the third optical path 24 are respectively configured with a photodetector, a fiber optic connector, an optical power meter, an oscilloscope, a self-coherent interferometer, a mechanical connector or other laser light measuring device. . Preferably, the light attenuating sheet 230 is disposed on the first optical path 22 in front of the photodetector 245 to attenuate the laser light 206, which can prevent the high power laser light from damaging the photodetector 245.
根據本發明之某些實施例，本發明的多功能雷射量測裝置可依據所需的量測器之數量配置對應的切角分光鏡與分光鏡之數量以及選擇要用以量測的光路，舉例來說，若光路調整裝置中配置一個切角分光鏡以及二個分光鏡，則入射光路可被分成五個光路，使用者可以依雷射光性質或量測條件在四個光路或五個光路上配置量測器。較佳的，光路調整裝置中的分光鏡可皆為平行分光鏡。 According to some embodiments of the present invention, the multifunctional laser measuring device of the present invention can configure the number of corresponding chamfer beamsplitters and beamsplitters according to the number of required measuring instruments and select the optical path to be measured. For example, if a chamfer beam splitter and two beam splitters are arranged in the optical path adjusting device, the incident optical path can be divided into five optical paths, and the user can be in four optical paths or five depending on the laser light property or measurement condition. A gauge is placed on the light path. Preferably, the beam splitters in the optical path adjusting device are all parallel spectroscopes.
根據本發明之某些實施例，本發明採用的切角分光鏡僅以拋光方式處理外表面而不進行鍍膜處理。前述未鍍膜的切角分光鏡適用於各種波長的雷射光，且可避免因鍍膜處理造成切角分光鏡受損所導致的量測誤差。較佳的，切角分光鏡的第一反射面與第二反射面之夾角為2°。 In accordance with certain embodiments of the present invention, the chamfered beamsplitter employed in the present invention treats the outer surface only in a polished manner without performing a coating process. The aforementioned uncoated chamfered beam splitter is suitable for laser light of various wavelengths, and can avoid measurement errors caused by damage of the chamfered beam splitter due to coating treatment. Preferably, the angle between the first reflecting surface and the second reflecting surface of the chamfering beam splitter is 2°.
本發明的多功能雷射量測裝置可依入射雷射光的性質選擇不同性質或材料的元件，例如，若入射雷射光的波長範圍為800nm至1700nm，則針對波長範圍800nm至1700nm對可調式反射鏡片進行高反射鍍膜處理、選用具有InGaAs材料且可量測重複率10GHz的光偵測器以及選用100W的熱感應功率計；若入射雷射光的波長範圍為500nm至900nm，則針對波長範圍400nm至1000nm對可調式反射鏡片進行高反射鍍膜處理、選用具有GaAs材料且可量測重複率10GHz的光偵測器以及選用100W的 熱感應功率計；以及若入射雷射光的波長範圍為300nm至900nm，則針對波長範圍300nm至1000nm對可調式反射鏡片進行高反射鍍膜處理、選用具有矽材料且可量測重複率4GHz的光偵測器以及選用100W的熱感應功率計。 The multifunctional laser measuring device of the present invention can select components of different properties or materials depending on the nature of the incident laser light, for example, if the incident laser light has a wavelength range of 800 nm to 1700 nm, the adjustable reflection is performed for the wavelength range of 800 nm to 1700 nm. The lens is highly reflective coated, and a photodetector with InGaAs material and a repeatability of 10 GHz is selected, and a 100 W thermal induction power meter is selected. If the incident laser light has a wavelength range of 500 nm to 900 nm, the wavelength range is 400 nm. High-reflection coating treatment for adjustable reflective lenses at 1000nm, selection of photodetectors with GaAs material and measuring repetition rate of 10GHz, and selection of 100W Thermal induction power meter; and if the incident laser light has a wavelength range of 300 nm to 900 nm, the reflective mirror is highly reflective coated for the wavelength range of 300 nm to 1000 nm, and the optical detection with a germanium material and a repeatable rate of 4 GHz is selected. The detector and a 100W thermal induction power meter are used.
本發明的多功能雷射量測裝置具有以下優點，首先，多功能雷射量測裝置的量測器均可更換，只要將多功能雷射量測裝置裝設完畢並經由微調、校正功能將光路最佳化並記錄在功率計後即可依據入射雷射光的性質更換適合的量測器，使用者無須在更換測器重複進行微調或校正的動作。在本發明的實施例中，使用者可一次量測同一雷射光在各種不同量測器中的數據，達到省時又準確的效果。 The multifunctional laser measuring device of the invention has the following advantages. Firstly, the measuring device of the multifunctional laser measuring device can be replaced, as long as the multifunctional laser measuring device is installed and fine-tuned and corrected. After the optical path is optimized and recorded in the power meter, the appropriate measuring instrument can be replaced according to the nature of the incident laser light, and the user does not need to repeat the fine adjustment or correction action in the replacement measuring device. In the embodiment of the present invention, the user can measure the data of the same laser light in various different measuring instruments at one time, thereby achieving a time-saving and accurate effect.
實施例 Example
1.一種雷射量測裝置，包括：一分光裝置，用於將一入射雷射光束分成一第一雷射光束、一第二雷射光束以及一第三雷射光束；一第一量測器，用於接收該第一雷射光束；一第二量測器，用於接收該第二雷射光束；以及一第三量測器，用於接收該第三雷射光束，其中該分光裝置具有一切角分光鏡。 A laser measuring device comprising: a beam splitting device for dividing an incident laser beam into a first laser beam, a second laser beam and a third laser beam; a first measurement For receiving the first laser beam; a second measuring device for receiving the second laser beam; and a third measuring device for receiving the third laser beam, wherein the beam splitting The device has an angular splitter.
2.如實施例1所述之方法，更包括一光源校正裝置，用於調整該入射雷射光束進入該分光裝置的方向與角度，其中該光源校正裝置具有一可調式反射鏡片。 2. The method of embodiment 1, further comprising a light source correcting device for adjusting a direction and an angle of the incident laser beam entering the spectroscopic device, wherein the light source correcting device has an adjustable reflecting lens.
3.如實施例1或2所述之方法，更包括一分光校正裝置，用於檢測及校準該第一雷射光束，其中該分光校正裝置具有一校正元件以及一分光元件。 3. The method of embodiment 1 or 2, further comprising a spectroscopic correction device for detecting and calibrating the first laser beam, wherein the spectroscopic correction device has a correction element and a beam splitting element.
4.如實施例1~3其中之一所述之方法，其中該校正元件包 括一近紅外光感光材料。 4. The method of any one of embodiments 1 to 3, wherein the correction component package A near-infrared photosensitive material is included.
5.如實施例1~4其中之一所述之方法，其中該第一量測器、第二量測器或第三量測器可選自一光偵測器、一光纖接頭、一光功率計、一示波器、一自相干干涉儀、一機械接頭或一雷射光量測裝置。 5. The method of any one of embodiments 1 to 4, wherein the first measuring device, the second measuring device or the third measuring device is selected from the group consisting of a photodetector, a fiber optic connector, and a light. A power meter, an oscilloscope, a self-coherent interferometer, a mechanical joint or a laser light measuring device.
6.如實施例1~5其中之一所述之方法，其中該光路調整裝置具有一平行分光鏡。 6. The method of any one of embodiments 1 to 5, wherein the optical path adjusting device has a parallel beam splitter.
7.如實施例1~6其中之一所述之方法，更具有一光衰減片設置用於緩衝進入該第一量測器的該第一雷射光束。 7. The method of any of embodiments 1 to 6, further comprising a light attenuating sheet arranged to buffer the first laser beam entering the first measuring device.
8.一種雷射量測方法，該方法包括：提供一具有一切角分光鏡的一光路調整裝置；使用該光路調整裝置將一入射光路分成一第一光路、一第二光路以及一第三光路；將一第一量測器設置在該第一光路上；將一第二量測器設置在該第二光路上；以及將一第三量測器設置在該第三光路上。 A laser measuring method, comprising: providing an optical path adjusting device having an angular splitter; using the optical path adjusting device to divide an incident optical path into a first optical path, a second optical path, and a third optical path Setting a first measuring device on the first optical path; setting a second measuring device on the second optical path; and positioning a third measuring device on the third optical path.
9.如實施例8所述之方法，更包括將一分光元件配置於該光路調整裝置中；以該分光元件產生一第四光路；以及將該第一量測裝置移至該第四光路上。 9. The method of embodiment 8, further comprising: arranging a beam splitting element in the optical path adjusting device; generating a fourth optical path by the beam splitting element; and moving the first measuring device to the fourth optical path .
10.一種雷射量測裝置，包括：一分光裝置，具一切角分光鏡，用於將一入射雷射光束分成三雷射光束；以及三量測器，用於同時量測該三雷射光束所具備該入射雷射光數之三個特徵。 10. A laser measuring device comprising: a beam splitting device having an angular splitter for splitting an incident laser beam into three laser beams; and a three measuring device for simultaneously measuring the three lasers The beam has three characteristics of the number of incident laser light.
以上所述僅為本發明之最佳實施例，當不能以之限定本發明所實施之範圍，本發明之範圍應以申請專利範圍為準，即大凡依本發明申請專利範圍所作之均等變化與修飾，皆應仍屬於本發明專利涵蓋之範圍內，謹請 貴審查委員明鑑，並祈惠准，是所至禱。 The above is only the preferred embodiment of the present invention, and the scope of the present invention should be limited to the scope of the patent application, that is, the equivalent variation of the patent application scope of the present invention. Modifications should still fall within the scope of the patents of the invention. I would like to ask your review committee to give a clear understanding and pray for the best.
10‧‧‧多功能雷射量測裝置 10‧‧‧Multifunctional laser measuring device
105‧‧‧雷射光源 105‧‧‧Laser light source
110‧‧‧可調式反射鏡片 110‧‧‧Adjustable Reflective Lenses
115‧‧‧切角分光鏡 115‧‧‧Chamfered beamsplitter
120‧‧‧分光鏡片 120‧‧‧Splitting lens
125‧‧‧光校正器 125‧‧‧Light corrector
130‧‧‧光衰減片 130‧‧‧Light Attenuator
135‧‧‧光功率計 135‧‧‧ optical power meter
140‧‧‧光纖接頭 140‧‧‧Fiber Optic Connector
145‧‧‧光偵測器 145‧‧‧Photodetector
11‧‧‧入射光路 11‧‧‧Incoming light path
12‧‧‧第一光路 12‧‧‧First light path
13‧‧‧第二光路 13‧‧‧Second light path
14‧‧‧第三光路 14‧‧‧The third light path
106‧‧‧雷射光 106‧‧‧Laser light
126‧‧‧分光校正點 126‧‧ ‧ Spectral correction point
15‧‧‧校正光路 15‧‧‧Corrected light path
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