TW201532956A - Module and method of ozone monitoring and ozone generating apparatus - Google Patents

Abstract

A module and method of Ozone monitoring and an Ozone generating apparatus are provided. The module of Ozone monitoring includes a dual-voltage provided unit and a control unit. The dual-voltage provided unit includes an adjustable transformer which receives controlled voltage or current signals and correspondingly outputs a loading voltage. The loading voltage is controlled to be the first or the second voltage; the first voltage renders an ozone generating module to generate a first Ozone concentration after the dual-voltage provided unit is controlled, and the second voltage renders the ozone generating module to be kept ON and to generate the second Ozone concentration before the dual-voltage provided unit is controlled. The second ozone concentration is lower than the first ozone concentration or close to zero. The control unit outputs controlled voltage or current signals to control the adjustable transformer. When the detected ozone concentration is lower than the target concentration, the controlled voltage or current renders the dual-voltage provided unit to output the first voltage, or to output the second voltage on the contrary.

Description

Ozone monitoring module, method and ozone generating device

The invention relates to an ozone monitoring module, a method and an ozone generating device. In particular, there is an ozone monitoring module, method, and ozone generation setting that can control ozone concentration in a process environment.

The use of an ozone generating device for water treatment such as wastewater treatment and water treatment is a known technique. When ozone is blown into water or a liquid to be treated, and ozone is used for sterilization, a large amount of ozone is required to be continuously and continuously generated, and there is currently no equipment for continuously monitoring such an ozone generating device.

The invention provides an ozone monitoring module and a method, which can continuously monitor such high-power and high-concentration ozone generating devices.

The ozone monitoring module and method of the invention can also protect the linear high voltage transformer and the high voltage in the ozone generating module while continuously monitoring the ozone concentration The tubular discharge generator does not reduce the life due to frequent switching.

The present invention also provides an ozone generating apparatus using the ozone monitoring module and method described above.

The ozone monitoring module of the invention is suitable for detecting and controlling the ozone concentration achieved by the ozone generating module in a process environment. The ozone monitoring module includes: a dual voltage power supply unit and a control unit. The dual voltage power supply unit includes an adjustable transformer, and the adjustable transformer receives a control voltage or current and outputs a load output voltage corresponding to the control voltage or current. The load output voltage includes a first voltage or a second voltage, the first voltage causes the ozone generating module to generate a first concentration of ozone, and the second voltage causes the ozone generating module to be electrically conductive and generates a second concentration of ozone, the second concentration The range is from zero to below the first concentration. The control unit is coupled to the dual voltage power supply unit, receives a target concentration input, and outputs a control voltage or current to the adjustable transformer according to a comparison result between the ozone concentration and the target concentration. When the ozone concentration is lower than the target concentration, the control voltage or current output by the control unit causes the dual voltage power supply unit to output the first voltage, and when the ozone concentration is higher than the target concentration, the dual voltage power supply unit outputs the second voltage.

According to other embodiments, the dual voltage power supply unit of the ozone monitoring module of the present invention has: a first power supply circuit that receives an input voltage and outputs a first voltage, and a second power supply circuit that receives the input voltage and outputs the second voltage. . The control unit in the ozone monitoring module of the present invention is coupled to the dual voltage power supply unit, receives a target concentration input, and controls the dual voltage power supply unit according to the comparison result of the ozone concentration and the target concentration, when the ozone concentration is lower than Target concentration The first power supply loop in the dual voltage power supply unit is turned on, and when the ozone concentration is higher than the target concentration, the second power supply loop in the control switching dual voltage power supply unit is turned on, so that the dual voltage power supply unit outputs the first voltage or the second voltage. To the ozone generating module. The first voltage causes the ozone generating module to generate a first concentration of ozone, and the second voltage causes the ozone generating module to be in an electrically conducting state and to generate a second concentration of ozone, the second concentration ranging from near zero to below the first concentration.

The invention provides an ozone generating device comprising an ozone generating module, an ozone analyzing unit and the ozone monitoring module. The ozone generating module comprises: a linear high voltage transformer and a high pressure tubular ozone discharge generator. The ozone generating module receives the first voltage or the second voltage, and is pressurized by the linear high voltage transformer, and then outputted to the high pressure tubular ozone discharge generator to generate a first concentration of ozone corresponding to the first voltage or the second voltage or The second concentration of ozone is in a process environment such that the process environment has a predetermined ozone concentration. An ozone analysis unit that detects the ozone concentration in the process environment.

The invention provides an ozone monitoring method suitable for controlling an ozone concentration achieved by an ozone generating module in a process environment, comprising: detecting an ozone concentration of a process environment; providing a first voltage or a first according to a comparison result between the ozone concentration and the target concentration Two voltages to the ozone generating module. When the ozone concentration is less than the target concentration, the first voltage is supplied to the ozone generating module, so that the ozone generating module generates the first concentration of ozone, and when the ozone concentration is greater than the target concentration, the second voltage is supplied to the ozone generating module to make the ozone The generating module is in an electrically conductive state and produces a second concentration of ozone, the second concentration ranging from near zero to below the first concentration.

In the above ozone monitoring method, the ozone concentration is an average value and is an average value obtained by detecting the ozone concentration at different times.

In the above ozone monitoring method, before the providing the first voltage or the second voltage, the method further comprises: according to the comparison result of the ozone concentration and the target concentration, using a PID control method to obtain a control voltage or current, and corresponding to the control voltage or current output. The first voltage or the second voltage is applied to the ozone generating module.

In the above ozone monitoring method, the control voltage or current can also be limited to a limit. When the control voltage is higher than the upper limit of the limit range, it is limited to the upper limit value, and when it is lower than the lower limit value of the limit range, it is limited to the lower limit value.

In the above ozone monitoring method, it may include gradually outputting an adjusted voltage according to a difference between the ozone concentration and the target concentration until a control voltage or current is reached.

The above described features and advantages of the invention will be apparent from the following description.

100‧‧‧Ozone generating device

110‧‧‧Ozone generating module

112‧‧‧Linear high voltage transformer

114‧‧‧High-pressure tubular ozone discharge generator

120‧‧‧Ozone analysis unit

130‧‧‧Ozone monitoring module

132‧‧‧Double voltage power supply unit

132a‧‧‧First power supply circuit

132a1‧‧‧First relay

132a2‧‧‧First transformer

132b‧‧‧second power supply loop

132b1‧‧‧second relay

132b2‧‧‧Second transformer

132ab‧‧‧Solid State Electric Relay

134‧‧‧Control unit

LPC‧‧‧Linear Power Controller

Steps for S100, S200, S210, S220, S230, S240‧‧‧Ozone monitoring methods

1 is a block diagram of an ozone generating apparatus in accordance with an embodiment of the present invention.

2 is a block diagram of an ozone generating apparatus in accordance with another embodiment of the present invention.

3 through 8, 10, and 12 are block diagrams showing a dual voltage power supply unit and its peripheral connections in accordance with various embodiments of the present invention.

Figure 9 shows the control voltage or current of the PID controller and the dual voltage supply of Figure 8. The correspondence between the load output voltages of the cells.

Figure 11 shows the correspondence between the control voltage or current of the two PID controllers and the load output voltage of the dual voltage supply unit of Figure 10.

FIG. 13 shows the correspondence relationship between the control voltage or current of the PID controller and the load output voltage of the dual voltage power supply unit of FIG.

14 is a flow chart of an ozone monitoring method in accordance with an embodiment of the present invention.

FIG. 15 is a flowchart illustrating the output of the first voltage or the second voltage according to the comparison result of the ozone concentration and the target concentration in FIG. 14.

Referring to FIG. 1 , an ozone generating apparatus 100 according to an embodiment includes an ozone generating module 110 , an ozone analyzing unit 120 , and an ozone monitoring module 130 .

The ozone generating module 110 includes a linear high voltage transformer 112 and a high pressure tubular ozone discharge generator 114. The ozone generating module 110 receives the first voltage or the second voltage, and after being pressurized by the linear high voltage transformer 112, outputs the high voltage tubular ozone discharge generator 114 to generate a first concentration corresponding to the first voltage or the second voltage. The ozone or the second concentration of ozone is in a process environment such that the process environment has a mixed and stable ozone concentration that maintains the ozone concentration of the process ring within a predetermined range. The process environment can be a wet processing environment or a dry processing environment, such as a wastewater treatment environment in a water treatment environment, a water treatment environment, and an optoelectronic semiconductor dry and wet cleaning process environment.

An ozone analysis unit 120, such as an ozone analyzer, detects the process loop The concentration of ozone in the environment and the corresponding voltage signal (or current signal) can be generated. The ozone analyzer is generally commercially available, and according to the detection principle, there are roughly UV ultraviolet absorption method, Fourier transform infrared (FTIR) gas sensor, infrared absorption type (NDIR) gas sensor, and electrochemical type. , ultrasonic gas sensors, etc.

The ozone monitoring module 130 receives the data of the ozone concentration measured by the ozone analyzing unit 120 and compares it with the data of the target concentration, and controls the ozone generating module 110 according to the comparison result. The target concentration is the ozone concentration required for the process environment, such as the ozone concentration required for disinfection in the treatment of people's live water (wastewater treatment environment, water treatment environment, etc.), or in various dry and wet processes. The concentration of ozone required to process the object and the manufacturing conditions.

When the ozone concentration (the ozone concentration of the process environment) is lower than the target concentration (the target concentration of the process environment), the ozone monitoring module 130 receives an input voltage, which may be a mains supply voltage, an industrial grade industrial supply voltage (eg, Is one of the 220, 110, 240, 380 volt AC voltages, or a high voltage output of the voltage setting range, and outputs the first voltage, that is, the ozone generating module 110 continues to generate ozone (the first concentration) Ozone).

When the ozone concentration is higher than the target concentration, the ozone monitoring module 130 receives the input voltage and outputs the second voltage. The second voltage causes the ozone generating module 110 to be in a low voltage output of an electrical conduction state or a voltage setting range and generate the second concentration of ozone, the second concentration ranging from near zero to being lower than the first concentration. That is, the second voltage causes the ozone generating module 110 to remain in an on state, but the second concentration of ozone is equal to generating almost no ozone, or only generating an appropriate amount of ozone, such as It is 1/1000 of the first concentration. Here, 1/1000 is only an example, and it is of course suitable to select the high pressure tubular ozone discharge generator 114. If the ozone generating module 110 is applied to the production of high-concentration ozone, the first concentration can be set to 10,000 or tens of ppm or more, and the second concentration can be 10 ppm or hundreds of ppm of ozone which does not strongly affect the process environment. The concentration changes.

The ozone monitoring module 130 includes a dual voltage power supply unit 132 and a control unit 134. Please refer to FIG. 2, which illustrates an embodiment of an ozone monitoring module.

The dual voltage power supply unit 132 has a first power supply circuit 132a and a second power supply circuit 132b. The first power supply circuit 132a receives the input voltage and outputs the first voltage. The second power supply circuit 132b receives the input voltage and outputs the second voltage. The first power supply circuit 132a includes a first relay 132a1, and the second power supply circuit 132b includes a second relay 132b1 and a transformer 132b2. The transformer 132b2 is a fixed transformer that converts the input voltage into an alternating voltage lower than the first voltage as the second voltage.

The control unit 134, for example, may be a PID controller or a programmable logic controller, coupled to the dual voltage power supply unit 132, and controls one of the first power supply circuit 132a and the second power supply circuit 132b to be turned on according to the ozone concentration. The dual voltage power supply unit 132 outputs the first voltage or the second voltage to the ozone generating module 110. The above PID controller can use the FB and RB series controllers in the temperature controller produced by RKC, such as RB100/400/900, FB100/400/900, etc., but it is not limited thereto, and can be selected according to the control needs. The right controller.

In the above embodiment, the dual voltage power supply unit 132 includes two relays. The devices 132a1 and 132b1 and the one fixed transformer 132b2 are not limited thereto. Hereinafter, various modifications of the above-described dual voltage power supply unit 132 will be described.

Change 1

In order to avoid the overlap of the two relays 132a1, 132b1 during the ON period, the solid state relay can be controlled by one, for example, using the existing ones (such as the toptawa company). A solid-state electric relay 132ab replaces the above two relays, as shown in Figure 3.

Change 2

One input terminal (i.e., the originally short-circuited portion) of the above-described solid state electric relay 132ab can be replaced with another fixed transformer 132a2 according to the control demand, as shown in FIG.

Here, the two fixed transformers 132a2, 132b2 are set to different output voltages, for example, the fixed transformer 132a2 outputs a first voltage, the fixed transformer 132b2 outputs a second voltage, and the two voltage values are appropriately designed, and the subsequent ozone can be Concentration yields a higher precision control. When the difference between the first voltage and the second voltage is large, the fluctuation generated in the control process is also large, so if the first voltage and the second voltage are appropriately selected, the stability of the control can be increased. For example, if the first voltage is 220 VAC and the second voltage is 160 VAC, it can be better controlled for a higher target concentration range; and if the first voltage is 85 VAC and the second voltage is 55 VAC, it can be lower. Target concentration range has better control. Of course, the first and second voltage ranges here are only examples. If the high concentration requirement is required, the appropriate two values are selected as the first and second voltage values in the range of 150-220 VAC, respectively, and the low concentration is For the degree of demand, the appropriate two values can be selected as the first and second voltage values in the range of 20-80 VAC. Of course, this range of 150-220V, 20-80V is only an example, which can be appropriately selected according to actual needs and the performance of the parts.

[Replace the fixed transformer with other components]

In the above-described Modification 2, two fixed transformers 132a2, 132b2 are used in consideration of the control demand, and different control values are used for different control (high-concentration/low-concentration range control), but after installation or setting is completed, The voltage value is fixed. Therefore, the inventor of the present invention further conceived that if the first voltage and the second voltage are made adjustable (for example, using an adjustable transformer), not only the above fixed transformer but also the process demand can be used, and the voltage value can be appropriately adjusted online or in time. Can make control more flexible. The method for adjusting the voltage here may be manual adjustment or automatic modulation. For example, the transformation value may be manually adjusted according to the process requirement, and some conditions and calculation rules may be set in the control unit 134. The output first voltage and the second voltage are controlled by the control unit 134 according to the ozone concentration measured by the ozone analyzing unit 120.

Based on the inventive concept, the inventor of the present invention appropriately replaced the above-described fixed transformer with a linear power controller (LPC), thereby further making the following changes. The inventor of the case found a small electronic voltage regulator from the market, which also has a function of voltage transformation. For example, it is a phase controller of toptawa RPS, which has two voltage output modes, one is a fixed voltage output mode. The other is an adjustable voltage output mode (ie, a load output voltage proportional to the output with a different control voltage or control current).

[Selecting a fixed voltage mode LPC]

When we choose LPC with fixed voltage mode, the above fixed transformer can be easily replaced, as shown in Figure 5 and Figure 6.

Change 3

Fig. 5 exemplifies a case where both of the fixed transformers of Modification 2 are replaced with LPCs.

For example, the LPC is set to a fixed voltage mode, and the output voltage is set according to the ozone concentration range required for the process environment, and then installed in the dual voltage power supply unit 132.

Change 4

Fig. 6 exemplifies a case where the fixed transformer of the first modification is replaced with the LPC.

[Select LPC with adjustable voltage mode]

Further consideration is given below to replace the fixed voltage mode LPC with the adjustable voltage mode LPC. In the adjustable voltage mode, the LPC can correspond to the output of the load output voltage proportional to the input control voltage or control current.

Change 5

FIG. 7 illustrates an LPC in which the LPC of the fixed voltage mode of Modification 4 is replaced with the adjustable voltage mode.

Change 6

FIG. 8 illustrates an LPC in which one of the fixed voltage mode LPCs of Variation 3 is replaced with an adjustable voltage mode.

In order to use this adjustable voltage function, in the variation examples 5 and 6, it is necessary to find a PID controller that can be matched with it, that is, in addition to the general on/off control, it can also output Current or voltage, this output current or voltage can be used as the control current or control voltage at the LPC input of the adjustable voltage mode. In the existing samwontech nova series PID controller with this function, but not limited to only the brand can do this function, it has three output channels, one can output the external power supply voltage and has a relay Function (OUT1), the other two channels can output 4-20mA or 0-30VDC (OUT2), 4-20mA or 0-30VDC (OUT3) respectively, so 0~10V or 1~5V or 4-20mA can be used as control. Current or control voltage, but not limited to this.

Using the PID controller described above, in conjunction with the LPC (for example, the phase controller of the RPT of Toptawa Corporation), this example can be used to output the output power of OUT2 of the PID controller (for example, voltage output of 10V, 24V, 30V) However, it is not limited to this) to control the on/off of the solid state electric relay 132ab, and the voltage of the LPC (regulated) output (ie, the second voltage) can be controlled by the voltage or current of OUT3.

The control relationship between the PID controller and the solid state electric relays 132ab and LPC (regulation) is shown in Fig. 9.

Change 7

Of course, the LPC of the two fixed voltage modes of the variation 3 can also be replaced with the LPC of the adjustable voltage mode, as shown in FIG.

In this case, two PID controllers as described above are used, wherein the first controller selects the OUT1 and OUT2 channels, the second controller selects the OUT2, OUT3 channels, and the LPC (for example, the phase control of the topsawa RPS). In conjunction with the output of the first controller, the output power of OUT1 or OUT2 is used to control the on/off of the solid state electric relay 132ab, and the OUT2 and OUT3 of the second controller. The voltage or current is the voltage used to separately control the output (ie, the first voltage, the second voltage).

The control relationship between the PID controller and the solid state electric relays 132ab and LPC (regulation) is shown in FIG.

The two PID controllers in this example can also be replaced by a general programmable logic controller (PLC) or by a computer.

In the above examples, although the PID controller is taken as an example, these PID controllers can be replaced by programmable logic controllers (PLCs), computers, and the like.

Variation 8

In view of the fact that the dual voltage power supply unit 132 of the present invention functions to drive an output voltage from an input signal, it is also conceivable to apply an adjustable transformer in the dual voltage power supply unit 132 (which can output a corresponding voltage with the input control voltage or current). Load output voltage), and with the control unit 134 and to achieve the above functions, the control unit here can be a PID controller, a programmable logic controller or a computer.

For example, the situation of several possible process environments may be preset in the control unit 134, for example, several concentration ranges, range 1, range 2, range 3, etc., and several groups matching the same are first designed. 1, the second voltage and so on. When the concentration measured by the ozone analysis unit 120 reaches the range 1, the first and second voltages of the first pair are used, and are switched to the ozone generation module 110 as the case may be. That is to say, the control unit 134 outputs corresponding control voltage/current to the LPC (control) according to several scenarios of the design, and the LPC (regulation) outputs the corresponding load output voltage according to the control voltage/current (ie, the first group) The first voltage and the second voltage). Thereby, the above dual voltage switching function can be achieved in an electronic manner similarly, and the voltage output can be dynamically adjusted, as shown in FIG.

Using the PID controller described above, in conjunction with the LPC (for example, the RPT phase controller of Toptawa Corporation), this example can control the voltage or current through the internal electronic control switch of the PID controller and the output of OUT2 or OUT3. To control the output load voltage of the output.

The control relationship between its PID controller and this LPC is shown in Figure 13.

In the above-described variation 8, if a programmable logic controller (PLC) or a computer or the like is used as the control unit 134, more complicated calculation and control can be performed, and thus the control unit 134 directly calculates an appropriate control voltage, or The current is output to the LPC (regulation) to drive the LPC (regulation) to output the corresponding load output voltage (first and second voltages).

In each of the above-described variations, the ozone concentration of the detected process environment may be obtained by a single detection, or may be an average value, that is, an average value obtained by detecting ozone concentrations at different times.

In each of the above variations, the control unit 134 outputs a control voltage or current to the dual voltage power supply unit 132, and outputs a corresponding load output voltage according to the control voltage or current. In order to avoid a large difference between the ozone concentration and the target concentration and cause a short-term increase of the control voltage or current to cause damage to the related hardware, the present invention can output the control voltage and current in a progressive manner according to the voltage and current values of the predetermined output. Until the predetermined voltage and current are reached. For example, if the expected control voltage is to change from 1V to 5V, it can be divided into several times to reach 5V, for example, 4 times, and 5V from 2V, 3V, and 4V. Of course, this is only an example, and the predetermined control voltage (or current) can be achieved by more or less times depending on the hardware condition and the process environment. The predetermined control voltage (or current) is progressively reached at a fixed voltage and current spacing.

In each of the above variations, when outputting the control voltage or current, the control unit 134 may limit it to a limit range, that is, when the control voltage or current exceeds the limit range, the control voltage or current is limited to the limit. The upper and lower limits of the range. For example, the limit range can be set from 0.5V to 6.5V depending on the hardware condition and the process environment, and is calculated according to the gain algorithm controlled by the PID or according to the algorithm built into the programmable logic controller. The predetermined control voltage or current value is 0.3V (too low) to limit it to 0.5V, and when the calculated predetermined control voltage or current value is 7V (too high), it is limited to 6.5V. Of course, this case is only an example, and the appropriate limit range can be set according to the needs of the hardware condition and the process environment.

An ozone monitoring method according to an embodiment will be described below with reference to FIG. An ozone monitoring method according to an embodiment, which is adapted to control the concentration of ozone achieved by the ozone generating module 110 in a process environment, comprising the steps of:

Step S100: Detecting the ozone concentration of the process environment, for example, detecting the ozone concentration by using the ozone analyzer 120 described above.

Step S200: providing a first voltage or a second voltage to the odor generating module 110 according to a comparison result between the ozone concentration and the target concentration.

In the step S200, the following includes: when the ozone concentration is less than the target concentration, providing the first voltage to the ozone generating module 110, so that the ozone generating module 110 generates the first concentration of ozone, that is, The ozone generating module 110 is caused to continue to generate ozone. And when the ozone concentration is greater than the target concentration, the second voltage is supplied to the ozone generating module 110 to enable the ozone generating module 110. An electrically conductive state is generated and a second concentration of ozone is produced, the second concentration being in a range of near zero or less than the first concentration. That is, the second voltage causes the ozone generating module 110 to remain in an on state, but the second concentration of ozone is equal to generating almost no ozone, or generating an appropriate amount of ozone, for example, 1/1000 of the first concentration. Here, 1/1000 is only an example, and it is of course suitable to select the high pressure tubular ozone discharge generator 114. For such a high-concentration and high-power ozone generating module 110, the first concentration is set to 10,000 or tens of ppm or more, and the second concentration may be 10 ppm or hundreds of ppm without significantly affecting the ozone concentration change in the process environment. .

The above step S200 can be achieved, for example, by the above-described dual voltage power supply unit 132 and the control unit 134.

In detail, referring to FIG. 15, the control unit 134 obtains a control voltage or current by the PID control method based on the comparison result of the ozone concentration with the target unit and outputs it to the dual voltage power supply unit 132 (step S210).

In the step of outputting the control voltage or current to the dual voltage power supply unit 132, the control unit 134 may adjust the control voltage or current and progressively output the adjusted voltage or current until the original predetermined control voltage or current is reached ( Step S220). For example, if the expected control voltage is to change from 1V to 5V, it can be divided into several times to reach 5V, for example, 4 times, and 5V from 2V, 3V, and 4V. Of course, this is only an example. The predetermined control voltage (or current) can be achieved by more or less times depending on the hardware condition and the process environment, or the fixed voltage and current spacing can be gradually reached to the predetermined control. Voltage (or current). By this feature, it is possible to avoid a large difference between the ozone concentration and the target concentration, resulting in a short time increase of the control voltage or current to cause the relevant hardware. damage.

In the step of outputting the control voltage or current to the dual voltage power supply unit 132, the control voltage or current may be limited to a limit range (step S230). That is, when the control voltage or current exceeds the limit range, the control voltage or current is limited to the upper and lower limits of the limit range. For example, the limit range can be set from 0.5V to 6.5V depending on the hardware condition and the process environment, and is calculated according to the gain algorithm controlled by the PID or according to the algorithm built into the programmable logic controller. The predetermined control voltage or current value is 0.3V (too low) to limit it to 0.5V, and when the calculated predetermined control voltage or current value is 7V (too high), it is limited to 6.5V. Of course, this case is only an example, and the appropriate limit range can be set according to the needs of the hardware condition and the process environment.

The dual voltage power supply unit 132 outputs a corresponding load voltage (the first voltage or the second voltage) to the ozone generating module 110 according to the control voltage or current (step S240).

In the above ozone monitoring method, a dilution step may also be included, that is, supplying compressed air to the process environment to dilute the ozone concentration.

In the above ozone monitoring method, the ozone concentration of the detected process environment may be obtained by a single detection, or may be an average value, that is, an average value obtained by detecting ozone concentrations at different times.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any one of ordinary skill in the art can make some changes and refinements without departing from the spirit and scope of the present invention. The scope of protection of the present invention It is subject to the definition of the scope of the patent application attached.

100‧‧‧Ozone generating device

110‧‧‧Ozone generating module

112‧‧‧Linear high voltage transformer

114‧‧‧High-pressure tubular ozone discharge generator

120‧‧‧Ozone analysis unit

130‧‧‧Ozone monitoring module

132‧‧‧Double voltage power supply unit

134‧‧‧Control unit

Claims (29)

An ozone monitoring module is adapted to detect and control an ozone concentration achieved by an ozone generating module in a process environment, the ozone monitoring module comprising: a dual voltage power supply unit, including an adjustable transformer, the adjustable transformer receiving a control And outputting a load output voltage corresponding to the control voltage or current, the load output voltage comprising a first voltage or a second voltage, the first voltage causing the ozone generating module to generate a first concentration of ozone, the second The voltage causes the ozone generating module to be in an electrically conducting state and generate a second concentration of ozone, the second concentration ranging from approximately zero to being lower than the first concentration; and the control unit coupled to the dual voltage power supply unit to receive a Inputting a target concentration, and outputting the control voltage or current to the adjustable transformer according to a comparison result of the ozone concentration and the target concentration, when the ozone concentration is lower than the target concentration, the control voltage output by the control unit or The current causes the dual voltage power supply unit to output the first voltage, and when the ozone concentration is higher than the target concentration, the dual voltage is provided Unit outputs the second voltage. The ozone monitoring module of claim 1, wherein the control unit is a programmable logic controller. The ozone monitoring module according to claim 1, wherein the ozone concentration is an average value and is an average value obtained by detecting ozone concentrations at different times. The ozone monitoring module of claim 1, wherein the control unit further comprises limiting the load output voltage within a limit when the control voltage or current is output, when the control voltage or current exceeds the limit. Upper limit of range The upper limit value is limited to the upper limit value, and when it is lower than the lower limit value of the limit range, the lower limit value is limited. The ozone monitoring module of claim 1, wherein outputting the control voltage or current to the adjustable transformer according to the comparison result comprises progressively outputting an adjustment according to a difference between the ozone concentration and the target concentration. The subsequent voltage or current until the control voltage or current is reached. The ozone monitoring module of claim 1, further comprising an ozone analyzing unit that detects the ozone concentration of the process environment and outputs the ozone concentration to the control unit. The ozone monitoring module of claim 1, wherein the ozone generating module comprises: a linear high voltage transformer, a high voltage tubular ozone discharge generator, wherein the first voltage output by the dual voltage power supply unit or the The second voltage is input to the linear high voltage transformer, and after being boosted, is output to the high pressure tubular ozone discharge generator. An ozone monitoring module is adapted to detect and control an ozone concentration achieved by an ozone generating module in a process environment, the ozone monitoring module comprising: a dual voltage power supply unit having: a first power supply loop receiving an input voltage and Outputting a first voltage, and a second power supply circuit, receiving the input voltage and outputting a second voltage; the control unit is coupled to the dual voltage power supply unit, accepting a target concentration input, and according to the ozone concentration and the target concentration The comparison result controls the dual voltage power supply unit, and when the ozone concentration is lower than the target concentration, the double voltage is controlled The first power supply circuit in the power supply unit is turned on, and when the ozone concentration is higher than the target concentration, controlling to switch the second power supply circuit in the dual voltage power supply unit to be turned on, so that the dual voltage power supply unit outputs the first voltage Or the second voltage to the ozone generating module, wherein the first voltage causes the ozone generating module to generate a first concentration of ozone, the second voltage causing the ozone generating module to be in an electrically conducting state and generating a second concentration Ozone, the second concentration ranges from near zero to below the first concentration. The ozone monitoring module of claim 8, wherein the control unit comprises a PID controller or a programmable logic controller. The ozone monitoring module of claim 8, wherein the first power supply circuit comprises a first relay, and the second power supply circuit comprises a second relay and a second transformer. The ozone monitoring module of claim 10, wherein the second transformer is a fixed transformer or an adjustable transformer, and the input voltage is converted into an AC voltage output lower than the first voltage as the second voltage. The ozone monitoring module of claim 10, wherein the first power supply circuit further comprises a first transformer, the first transformer being a fixed transformer or an adjustable transformer. The ozone monitoring module of claim 8, further comprising an ozone analyzing unit that detects the ozone concentration of the process environment and outputs the ozone concentration to the control unit. The ozone monitoring module of claim 8, wherein the ozone generating module comprises: a linear high voltage transformer, a high pressure tubular ozone discharge generator, The first voltage or the second voltage output by the dual voltage power supply unit is used as an input of the linear high voltage transformer, and after being boosted, is output to the high voltage tubular ozone discharge generator. An ozone generating device comprising: an ozone generating module, comprising: a linear high voltage transformer, a high pressure tubular ozone discharge generator, wherein the ozone generating module receives a first voltage or a second voltage and is pressurized by the linear high voltage transformer And outputting to the high-pressure tubular ozone discharge generator to generate a first concentration of ozone or a second concentration of ozone corresponding to the first voltage or the second voltage in a process environment, so that the process environment has an ozone The ozone concentration unit detects the ozone concentration of the process environment; the ozone monitoring module receives the ozone concentration measured by the ozone analysis unit and compares it with the target concentration, and controls the ozone generation module according to the comparison result. Receiving an input voltage and outputting the first voltage when the ozone concentration is lower than the target concentration, receiving the input voltage and outputting the second voltage when the ozone concentration is higher than the target concentration, wherein the second voltage Causing the ozone generating module to be in an electrically conducting state and generating the second concentration of ozone, the second concentration ranging from near zero to below The first concentration. The ozone generating device of claim 15, wherein the ozone monitoring module comprises: a dual voltage power supply unit having: a first power supply circuit, receiving the input voltage and outputting the first voltage, and a second power supply circuit Receiving the input voltage and outputting the second voltage; The control unit is coupled to the dual voltage power supply unit, and controls the first power supply circuit to be electrically connected to one of the second power supply circuits according to the ozone concentration, so that the dual voltage power supply unit outputs the first voltage or the second Voltage to the ozone generating module. The ozone generating device of claim 16, wherein the control unit comprises a PID controller or a programmable logic controller. The ozone generating device of claim 15, wherein the ozone monitoring module comprises: a dual voltage power supply unit, comprising an adjustable transformer, the adjustable transformer receiving a control voltage or current and outputting the control voltage or current Corresponding load output voltage, the load output voltage includes the first voltage or the second voltage; the control unit is coupled to the dual voltage power supply unit, receives an input of a target concentration, and according to the ozone concentration and the target concentration Comparing the result and outputting the control voltage or current to the adjustable transformer, when the ozone concentration is lower than the target concentration, the control voltage or current output by the control unit causes the dual voltage power supply unit to output the first voltage when the When the ozone concentration is higher than the target concentration, the dual voltage power supply unit outputs the second voltage. The ozone generating device of claim 18, wherein the control unit is a programmable logic controller. The ozone generating apparatus according to claim 18, wherein the ozone concentration is an average value and is an average value obtained by detecting ozone concentrations at different times. An ozone generating device as claimed in claim 18, wherein the controlling The unit further includes limiting the control voltage or current within a limit range before outputting the load output voltage, and limiting the upper limit value when the control voltage or current is higher than the upper limit of the limit range. When the lower limit of the limit range is reached, the lower limit value is limited. The ozone generating device of claim 18, wherein outputting the control voltage or current to the adjustable transformer according to the comparison result comprises progressively outputting an adjustment according to a difference between the ozone concentration and the target concentration. The subsequent voltage or current until the control voltage or current is reached. An ozone monitoring method suitable for controlling an ozone concentration achieved by an ozone generating module in a process environment, comprising: detecting the ozone concentration of the process environment; providing a first voltage according to a comparison result between the ozone concentration and a target concentration a second voltage to the ozone generating module, wherein when the ozone concentration is less than the target concentration, the first voltage is supplied to the ozone generating module, so that the ozone generating module generates a first concentration of ozone, when the ozone concentration When the target concentration is greater than the target concentration, the second voltage is supplied to the ozone generating module to make the ozone generating module electrically conductive and generate a second concentration of ozone, wherein the second concentration ranges from near zero to below the first A concentration. The ozone monitoring method according to claim 23, wherein the ozone concentration is an average value and is an average value obtained by detecting ozone concentrations at different times. An ozone monitoring method as described in claim 23, wherein The first voltage or the second voltage further includes: according to the comparison result of the ozone concentration and the target concentration, using a PID control method to obtain a control voltage or current, and outputting the first voltage or the corresponding corresponding to the control voltage or current Two voltages to the ozone generating module. The ozone monitoring method of claim 25, further comprising limiting the control voltage or current within a limit range, and limiting the upper limit to a higher limit of the limit range. The value, when it is below the lower limit of the limit range, is limited to the lower limit value. The ozone monitoring method according to claim 25, further comprising: gradually outputting an adjusted voltage according to a difference between the ozone concentration and the target concentration until the control voltage or current is reached. The ozone monitoring method of claim 23, further comprising supplying compressed air to the process environment to dilute the ozone concentration. The ozone monitoring method of claim 23, wherein the process environment comprises a water treatment environment.