TW201525064A - Photosensitive resin composition, photosensitive resin, and organic light emitting diode display device - Google Patents

Photosensitive resin composition, photosensitive resin, and organic light emitting diode display device Download PDF

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TW201525064A
TW201525064A TW102146409A TW102146409A TW201525064A TW 201525064 A TW201525064 A TW 201525064A TW 102146409 A TW102146409 A TW 102146409A TW 102146409 A TW102146409 A TW 102146409A TW 201525064 A TW201525064 A TW 201525064A
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formula
photosensitive resin
resin composition
photosensitive
group
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TW102146409A
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Hung-Yu Chen
Hsin-Hung Lee
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Daxin Materials Corp
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Abstract

A photosensitive resin composition includes a polybenzoxazole precursor and a photoactive compound. The photosensitive resin composition can be employed to form a photosensitive resin which can be applied to an organic light emitting diode display device. Light leakages occurred between pixels can be reduced so as to enhance a contrary ratio of the organic light emitting diode display device. Accordingly, the image quality of the organic light emitting diode display device is enhanced.

Description

感光樹脂組成物、感光樹脂及有機發光二極體顯示元件 Photosensitive resin composition, photosensitive resin, and organic light emitting diode display element

本發明是有關於一種感光樹脂組成物及其所製成之感光樹脂及有機發光二極體顯示元件。 The present invention relates to a photosensitive resin composition and a photosensitive resin and an organic light emitting diode display device produced therefrom.

有機發光二極體(Organic Light Emitting Diode,OLED)顯示元件,又稱為有機電激發光(Organic Electroluminescence,OEL)顯示元件,具有自發光、廣視角、解析度佳、反應快速、低操作電壓、高亮度、可撓曲、無影像殘影等優點,此外,因其不需背光及液晶夾層,另具有輕薄、易攜性等優點,而成為平面顯示器的新趨勢。 Organic Light Emitting Diode (OLED) display element, also known as Organic Electroluminescence (OEL) display element, has self-luminous, wide viewing angle, good resolution, fast response, low operating voltage, High brightness, flexibility, no image sticking, etc. In addition, because it does not require backlight and liquid crystal interlayer, it has the advantages of lightness, portability and the like, and has become a new trend of flat panel displays.

然而,隨著OLED顯示元件畫素日益精細化,不同畫素間的間距越來越小,易造成畫素之間產生漏光,減低OLED顯示元件的對比度,進而影響OLED顯示元件的成像品質。 However, as the pixels of OLED display elements become more and more refined, the spacing between different pixels is getting smaller and smaller, which is easy to cause light leakage between pixels, reducing the contrast of OLED display elements, and thus affecting the imaging quality of OLED display elements.

本發明之一目的是在提供一種感光樹脂組成物,將此感光樹脂組成物所製成的感光樹脂應用於OLED顯示元件,可避免畫素之間產生漏光,故可提升OLED顯示元件的對比度,進而提升OLED顯示元件的成像品質。此外,本發明的感光樹脂組成物所製成的感光樹脂可耐高溫,其可承受OLED顯示元件蒸鍍製程中高達300℃以上的高溫。 An object of the present invention is to provide a photosensitive resin composition, and a photosensitive resin made of the photosensitive resin composition is applied to an OLED display element, thereby avoiding light leakage between pixels, thereby improving the contrast of the OLED display element. Thereby improving the imaging quality of the OLED display element. Further, the photosensitive resin produced by the photosensitive resin composition of the present invention can withstand high temperatures, and can withstand high temperatures of up to 300 ° C or more in the evaporation process of the OLED display element.

依據本發明之一態樣之一實施方式是在提供一種感光樹脂組成物,感光樹脂組成物包含聚苯噁唑前驅物以及至少一感光性化合物。 According to one embodiment of the present invention, there is provided a photosensitive resin composition comprising a polybenzoxazole precursor and at least one photosensitive compound.

聚苯噁唑前驅物具有如式(I)所示之結構: 式(I)中,X與E係各自獨立為二價基團,且n為5至60的整數。 The polybenzoxazole precursor has a structure as shown in formula (I): In the formula (I), each of the X and E groups is independently a divalent group, and n is an integer of from 5 to 60.

感光性化合物具有如式(II)、式(III)、式(IV)、式(V)、式(VI)或式(VII)所示之結構: 式(II)~式(VII)中,R1至R20係各自獨立為氫、式(i)或式(ii)所示之基團,R1至R4中至少一者為式(i)或式(ii)所示之基團,R5至R7中至少一者為式(i)或式(ii)所示之基團,R8至R10中至少一者為式(i)或式(ii)所示之基團,R11至R13中至少一者為式(i)或式(ii)所示之基團,R14至R16中至少一者為式(i)或式(ii)所示之基團,R17至R20中至少一者為式(i)或式(ii)所示之基團。 The photosensitive compound has a structure represented by formula (II), formula (III), formula (IV), formula (V), formula (VI) or formula (VII): In the formulae (II) to (VII), R 1 to R 20 are each independently a hydrogen group, a group represented by the formula (i) or the formula (ii), and at least one of R 1 to R 4 is a formula (i). Or a group represented by the formula (ii), at least one of R 5 to R 7 is a group represented by the formula (i) or the formula (ii), and at least one of R 8 to R 10 is a formula (i) Or a group represented by the formula (ii), at least one of R 11 to R 13 is a group represented by the formula (i) or the formula (ii), and at least one of R 14 to R 16 is a formula (i) Or a group represented by the formula (ii), at least one of R 17 to R 20 is a group represented by the formula (i) or the formula (ii).

式(i)及式(ii)如下所示: (i)、(ii)。 Equations (i) and (ii) are as follows: (i), (ii).

依據前述之感光樹脂組成物,X可為-C(CF3)2-、-C(CH3)2-、-O-或-S-。 According to the aforementioned photosensitive resin composition, X may be -C(CF 3 ) 2 -, -C(CH 3 ) 2 -, -O- or -S-.

依據前述之感光樹脂組成物,E可為 -(CH2)m-、 ,其中,R21至R24係各自獨立為碳數1至3的烷基、碳數3至7的芳香基或環烷基,m為0至10的整數,r為1至10的整數。 According to the aforementioned photosensitive resin composition, E may be -(CH 2 )m-, , , Wherein R 21 to R 24 are each independently an alkyl group having 1 to 3 carbon atoms, an aromatic group having 3 to 7 carbon atoms or a cycloalkyl group, m is an integer of 0 to 10, and r is an integer of 1 to 10.

依據前述之感光樹脂組成物,感光性化合物與聚苯噁唑前驅物的重量比值為MR1,其可滿足下列條件:0.15MR11。較佳地,其可滿足下列條件:0.2MR10.51。 According to the foregoing photosensitive resin composition, the weight ratio of the photosensitive compound to the polybenzoxazole precursor is MR1, which satisfies the following condition: 0.15 MR1 1. Preferably, it satisfies the following conditions: 0.2 MR1 0.51.

依據前述之感光樹脂組成物,可更包含顯影促進劑。顯影促進劑與感光性化合物的重量比值為MR2,其可滿足下列條件:0MR20.9。較佳地,其可滿足下列條件:0MR20.7。更佳地,其可滿足下列條件:0MR20.4。 The development accelerator may be further included in accordance with the aforementioned photosensitive resin composition. The weight ratio of the development accelerator to the photosensitive compound is MR2, which satisfies the following conditions: MR2 0.9. Preferably, it satisfies the following conditions: 0 MR2 0.7. More preferably, it satisfies the following conditions: 0 MR2 0.4.

依據本發明之一態樣之另一實施方式是在提供一種感光樹脂,其係由前述之感光樹脂組成物經加熱步驟所形成,藉加熱步驟使聚苯噁唑前驅物環化以形成聚苯噁唑。 According to another embodiment of the present invention, there is provided a photosensitive resin formed by the above-mentioned photosensitive resin composition subjected to a heating step, wherein a polybenzoxazole precursor is cyclized by a heating step to form polyphenylene. Oxazole.

依據前述之感光樹脂,其中加熱步驟可於150℃至350℃進行1小時至5小時。 According to the aforementioned photosensitive resin, the heating step can be carried out at 150 ° C to 350 ° C for 1 hour to 5 hours.

依據前述之感光樹脂,其中感光樹脂對波長小於或等於400nm的光穿透率小於11%。 According to the foregoing photosensitive resin, the photosensitive resin has a light transmittance of less than 11% for a wavelength of less than or equal to 400 nm.

依據本發明之一態樣之再一實施方式是在提供一種OLED顯示元件,OLED顯示元件包含基板、薄膜電晶體以及前述的感光樹脂。薄膜電晶體設置於基板上方,感光樹脂設置於薄膜電晶體上方。 Still another embodiment in accordance with an aspect of the present invention is to provide an OLED display element comprising a substrate, a thin film transistor, and the aforementioned photosensitive resin. The thin film transistor is disposed above the substrate, and the photosensitive resin is disposed above the thin film transistor.

依據前述之OLED顯示元件,其中薄膜電晶體可為非晶矽電晶體(Amorphous Si TFT)、低溫多晶矽電晶體(Low Temperature Poly-Si TFT)或銦鎵鋅氧化物薄膜電晶體(Indium Gallium Zinc Oxide TFT)。 According to the foregoing OLED display device, wherein the thin film transistor can be an amorphous silicon oxide (Amorphous Si TFT), a low temperature polycrystalline silicon (Low Temperature Poly-Si TFT) or an indium gallium zinc oxide thin film transistor (Indium Gallium Zinc Oxide) TFT).

100‧‧‧基板 100‧‧‧Substrate

200‧‧‧薄膜電晶體 200‧‧‧film transistor

210‧‧‧閘極 210‧‧‧ gate

220‧‧‧閘極絕緣層 220‧‧‧ gate insulation

230‧‧‧反應層 230‧‧‧Reaction layer

240‧‧‧蝕刻阻擋層 240‧‧‧etch barrier

250‧‧‧汲極 250‧‧‧汲polar

260‧‧‧源極 260‧‧‧ source

300‧‧‧保護層 300‧‧ ‧ protective layer

400‧‧‧畫素定義層 400‧‧‧ pixel definition layer

500‧‧‧陽極 500‧‧‧Anode

600‧‧‧有機發光層 600‧‧‧Organic light-emitting layer

700‧‧‧陰極 700‧‧‧ cathode

800‧‧‧箭頭 800‧‧‧ arrow

900‧‧‧箭頭 900‧‧‧ arrow

M‧‧‧畫素分界線 M‧‧‧ pixel boundary

第1圖係繪示依照本發明一實施方式的一種OLED顯示元件的局部剖面示意圖。 1 is a partial cross-sectional view showing an OLED display element in accordance with an embodiment of the present invention.

第2圖係繪示第1圖之OLED顯示元件的另一局部剖面示意圖。 FIG. 2 is another partial cross-sectional view showing the OLED display element of FIG. 1.

第3圖係繪示依照本發明實施例1至4以及對照例1’與2’的光穿透率與波長的關係圖。 Fig. 3 is a graph showing the relationship between light transmittance and wavelength in Examples 1 to 4 and Comparative Examples 1' and 2' according to the present invention.

感光樹脂組成物Photosensitive resin composition

感光樹脂組成物包含聚苯噁唑前驅物以及至少一感光性化合物。此外,感光樹脂組成物可更包含溶劑,且可選擇地更包含催化劑及/或添加劑。 The photosensitive resin composition contains a polybenzoxazole precursor and at least one photosensitive compound. Further, the photosensitive resin composition may further contain a solvent, and optionally further contains a catalyst and/or an additive.

聚苯噁唑前驅物可具有如式(I)所示之結構: 式(I)中,X與E係各自獨立為二價基團,且n為5至60的整數。 The polybenzoxazole precursor may have a structure as shown in formula (I): In the formula (I), each of the X and E groups is independently a divalent group, and n is an integer of from 5 to 60.

當n小於5時,以感光樹脂組成物所形成的感光樹脂用作光阻時,無法阻擋顯影劑如氫氧化四甲基銨(tetramethylammonium hydroxide,TMAH),易於顯影時發生感光樹脂剝離(peeling)的現象。當n大於60時,感光樹脂組成物不易溶解於溶劑中而不利於塗佈,此外,以感光樹脂組成物所形成的感光樹脂用作光阻時,於顯影時其曝光區不易去除。 When n is less than 5, when a photosensitive resin formed of a photosensitive resin composition is used as a photoresist, a developer such as tetramethylammonium hydroxide (TMAH) cannot be blocked, and peeling of photosensitive resin occurs when developing is easy. The phenomenon. When n is more than 60, the photosensitive resin composition is not easily dissolved in a solvent and is not favorable for coating. Further, when a photosensitive resin formed of a photosensitive resin composition is used as a photoresist, the exposed region thereof is not easily removed at the time of development.

依據前述之感光樹脂組成物,X可為-C(CF3)2-、-C(CH3)2-、-O-或-S-。 According to the aforementioned photosensitive resin composition, X may be -C(CF 3 ) 2 -, -C(CH 3 ) 2 -, -O- or -S-.

依據前述之感光樹脂組成物,E可為 -(CH2)m-、 ,其中,R21至R24係各自獨立為碳數1至3的烷基、碳數3至7的芳香基或環烷基,m為0至10的整數,r為1至10的整數。 According to the aforementioned photosensitive resin composition, E may be -(CH 2 )m-, , , Wherein R 21 to R 24 are each independently an alkyl group having 1 to 3 carbon atoms, an aromatic group having 3 to 7 carbon atoms or a cycloalkyl group, m is an integer of 0 to 10, and r is an integer of 1 to 10.

例如,聚苯噁唑前驅物可為但不限於式(I-1)、式(I-2)與式(I-3)所示之結構: For example, the polybenzoxazole precursor can be, but is not limited to, the structures of formula (I-1), formula (I-2), and formula (I-3):

感光性化合物具有如式(II)、式(III)、式(IV)、式(V)、式(VI)或式(VII)所示之結構: 式(II)~式(VII)中,R1至R20係各自獨立為氫、式(i)或式(ii)所示之基團,R1至R4中至少一者為式(i)或式(ii)所示之基團,R5至R7中至少一者為式(i)或式(ii)所示之基團,R8至R10中至少一者為式(i)或式(ii)所示之基團,R11至R13中至少一者為式(i)或式(ii)所示之基團,R14至R16中至少一者為式(i)或式(ii)所示之基團,R17至R20中至少一者為式(i)或式(ii)所示之基團。 The photosensitive compound has a structure represented by formula (II), formula (III), formula (IV), formula (V), formula (VI) or formula (VII): In the formulae (II) to (VII), R 1 to R 20 are each independently a hydrogen group, a group represented by the formula (i) or the formula (ii), and at least one of R 1 to R 4 is a formula (i). Or a group represented by the formula (ii), at least one of R 5 to R 7 is a group represented by the formula (i) or the formula (ii), and at least one of R 8 to R 10 is a formula (i) Or a group represented by the formula (ii), at least one of R 11 to R 13 is a group represented by the formula (i) or the formula (ii), and at least one of R 14 to R 16 is a formula (i) Or a group represented by the formula (ii), at least one of R 17 to R 20 is a group represented by the formula (i) or the formula (ii).

式(i)及式(ii)如下所示: Equations (i) and (ii) are as follows:

例如,前述感光性化合物可為但不限於式(II-1)、式(III-1)、式(III-2)、式(III-3)、式(IV-1)、式(V-1)、式(VI-1)或式(VII-1)所示之結構,如下表一所示: For example, the photosensitive compound may be, but not limited to, the formula (II-1), the formula (III-1), the formula (III-2), the formula (III-3), the formula (IV-1), and the formula (V-). 1), the structure shown in formula (VI-1) or formula (VII-1), as shown in Table 1 below:

依據前述之感光樹脂組成物,感光性化合物與聚苯噁唑前驅物的重量比值為MR1,其可滿足下列條件:0.15MR11。較佳地,其可滿足下列條件:0.2MR10.51。當MR1小於0.15,則以感光樹脂組成物所製備之感光樹脂無法有效阻擋波長小於或等於400nm的光穿透。 According to the foregoing photosensitive resin composition, the weight ratio of the photosensitive compound to the polybenzoxazole precursor is MR1, which satisfies the following condition: 0.15 MR1 1. Preferably, it satisfies the following conditions: 0.2 MR1 0.51. When MR1 is less than 0.15, the photosensitive resin prepared by the photosensitive resin composition cannot effectively block light penetration of a wavelength of less than or equal to 400 nm.

感光樹脂組成物可更包含溶劑,可使用的溶劑可為但不限於γ-丁內酯(gamma-butyl lactone,GBL)、丙二醇甲基醚醋酸酯(propylene glycol monomethyl ether acetate,PGMEA)、丙二醇甲醚(propylene glycol methyl ether,PGME)、乳酸乙酯(ethyl lactate)、乙酸正丁酯(n-butyl acetate)、環己酮(cyclohexanone)、3-乙氧基丙酸乙酯(ethyl 3-ethoxypropionate)、二乙二醇二甲醚(dimethyl diethylene glycol)、N-甲基吡咯酮(N-methyl pyrrolidinone,NMP)或2-庚酮(2-heptanone,又稱Methyl Amyl Ketone,MAK)。 The photosensitive resin composition may further comprise a solvent, and the solvent that can be used may be, but not limited to, gamma-butyl lactone (GBL), propylene glycol monomethyl ether acetate (PGMEA), and propylene glycol. Propylene glycol methyl ether (PGME), ethyl lactate, n-butyl acetate, cyclohexanone, ethyl 3-ethoxypropionate 3-ethoxypropionate), dimethyl diethylene glycol, N-methyl pyrrolidinone (NMP) or 2-heptanone (also known as Methyl Amyl Ketone, MAK) .

感光樹脂組成物可選擇地更包含催化劑及/或添加劑。催化劑有助於聚苯噁唑前驅物環化以形成聚苯噁唑,可使用的催化劑可為但不限於對甲苯磺酸甲酯(mthyl p-toluenesulfonate,MPTS)。添加劑可為但不限於表面修飾劑(surface modifier)或顯影促進劑(development promoter)。表面修飾劑有助於使感光樹脂組成物表面平坦且膜厚均勻,可使用的表面修飾劑可為但不限於氟化丙烯酸樹脂(Fluorinated Acrylic Resin,商品名稱為F561,購買自DIC Co.,Ltd)。顯影促進劑有助於減少製程時間。顯影促進劑與感光性化合物的重量比值為MR2,其可滿足下列條件:0<MR20.9,藉此,可適當提高MR1的大小,又可降低最低曝光量(threshold exposure dose,Eth)。可使用的顯影促進劑可為但不限於多酚類(Multiphenol),可使用的多酚類如表二中式(VIII-1)至式(VIII-7)所示之結構:。 The photosensitive resin composition may optionally further comprise a catalyst and/or an additive. The catalyst facilitates the cyclization of the polybenzoxazole precursor to form polybenzoxazole. The catalyst that can be used can be, but is not limited to, mthyl p-toluenesulfonate (MPTS). Additives can be, but are not limited to, surface modifiers or development promoters. The surface modifier helps to make the surface of the photosensitive resin composition flat and uniform in film thickness. The surface modifier which can be used is, but not limited to, Fluorinated Acrylic Resin (trade name F561, purchased from DIC Co., Ltd.). ). Development accelerators help reduce process time. The weight ratio of the development accelerator to the photosensitive compound is MR2, which satisfies the following conditions: 0 < MR2 0.9, whereby the size of MR1 can be appropriately increased, and the threshold exposure dose (Eth) can be lowered. The development accelerator which can be used may be, but not limited to, a polyphenol, and the polyphenols which can be used are as shown in the formula (VIII-1) to (VIII-7) in Table 2:

感光樹脂Photosensitive resin

感光樹脂係由前述之感光樹脂組成物經加熱步驟所形成,藉加熱步驟使聚苯噁唑前驅物環化形成聚苯噁唑,以得到感光樹脂。前述加熱步驟可於150℃至350℃進行1小時至5小時。 The photosensitive resin is formed by the above-mentioned photosensitive resin composition by a heating step, and the polybenzoxazole precursor is cyclized to form polyphenyloxazole by a heating step to obtain a photosensitive resin. The aforementioned heating step can be carried out at 150 ° C to 350 ° C for 1 hour to 5 hours.

具體言之,備製感光樹脂包含以下步驟:首先,進行一攪拌步驟,係將感光樹脂組成物(意即聚苯噁唑前驅物、感光性化合物、溶劑、催化劑(非必要成份)與添加劑(非必要成份))在常溫下混合攪拌,在一實施例中係將前述成份放置於容器中並使用攪拌器以120rpm的轉速攪拌約1小時。 Specifically, preparing the photosensitive resin comprises the steps of: first, performing a stirring step of forming a photosensitive resin composition (ie, a polybenzoxazole precursor, a photosensitive compound, a solvent, a catalyst (non-essential component), and an additive ( The optional component)) is mixed and stirred at normal temperature. In one embodiment, the aforementioned components are placed in a container and stirred at 120 rpm for about 1 hour using a stirrer.

之後,進行一過濾步驟,係將前述攪拌過的感光樹脂組成物過濾並取濾液,在一實施例中係使用0.45μm的聚四氟乙烯(PTFE)濾膜以約4kg/cm2的壓力進行。 Thereafter, a filtration step is carried out in which the stirred photosensitive resin composition is filtered and the filtrate is taken, and in one embodiment, a 0.45 μm polytetrafluoroethylene (PTFE) filter is used at a pressure of about 4 kg/cm 2 . .

接著,進行一塗佈步驟,係將前述所得濾液塗佈於基板上以形成一塗覆層,基板的材質可為玻璃,塗佈的方法包含但不限於滾輪塗佈法、旋轉塗佈法及印刷法,以形成厚度為3.5μm至4.0μm的塗覆層。 Next, a coating step is performed, and the obtained filtrate is applied onto a substrate to form a coating layer. The material of the substrate may be glass, and the coating method includes, but is not limited to, a roller coating method, a spin coating method, and A printing method is used to form a coating layer having a thickness of from 3.5 μm to 4.0 μm.

最後,對塗覆層進行加熱烘烤,使聚苯噁唑前驅物環化以形成聚苯噁唑,以得到感光樹脂。 Finally, the coating layer is baked by heating to cyclize the polybenzoxazole precursor to form polybenzoxazole to obtain a photosensitive resin.

OLED顯示元件OLED display element

請參照第1圖,其係繪示依照本發明一實施方式的一種OLED顯示元件的局部剖面示意圖。OLED顯示元件包含基板100、薄膜電晶體200、保護層(passivation)300、畫素定義層(pixel defined layer)400、陽極500、有機發光層600以及陰極700。薄膜電晶體200設置於基板100上方,保護層300設置薄膜電晶體200上方,畫素定義層400設置於保護層300上方,其中保護層300及/或畫素定義層400可為本發明之感光樹脂。 Please refer to FIG. 1 , which is a partial cross-sectional view showing an OLED display element according to an embodiment of the invention. The OLED display element includes a substrate 100, a thin film transistor 200, a passivation 300, a pixel defining layer 400, an anode 500, an organic light emitting layer 600, and a cathode 700. The thin film transistor 200 is disposed above the substrate 100, and the protective layer 300 is disposed above the thin film transistor 200. The pixel defining layer 400 is disposed above the protective layer 300, wherein the protective layer 300 and/or the pixel defining layer 400 can be the photosensitive layer of the present invention. Resin.

薄膜電晶體200包含閘極210、閘極絕緣層220、反應層230、蝕刻阻擋層240、汲極250、源極260,其中,反應層230可為非晶矽(Amorphous)、低溫多晶矽(Low Temperature Poly-Si)或銦鎵鋅氧化物(Indium Gallium Zinc Oxide),換言之,薄膜電晶體200可為非晶矽電晶體、低溫多晶矽電晶體或銦鎵鋅氧化物薄膜電晶體。 The thin film transistor 200 includes a gate 210, a gate insulating layer 220, a reactive layer 230, an etch stop layer 240, a drain 250, and a source 260. The reactive layer 230 may be amorphous or low temperature polysilicon (Low). Temperature Poly-Si) or Indium Gallium Zinc Oxide, in other words, the thin film transistor 200 may be an amorphous germanium transistor, a low temperature polycrystalline germanium transistor, or an indium gallium zinc oxide thin film transistor.

請參照第2圖,其係繪示第1圖之OLED顯示元件的另一局部剖面示意圖。第2圖中,當保護層300為本發明之感光樹脂時,有助於降低有機發光層600所發出的光線沿箭頭800的方向通過畫素分界線M,意即可避免畫素之間產生漏光。當畫素定義層400為本發明之感光樹脂時,有助於降低有機發光層600所發出的光線沿箭頭900的方 向通過畫素分界線M,意即可避免畫素之間產生漏光。因此,保護層300及/或畫素定義層400為本發明之感光樹脂時,皆可避免畫素之間產生漏光,而可提升OLED顯示元件的對比度,進而可提升OLED顯示元件的成像品質。 Please refer to FIG. 2 , which is another partial cross-sectional view of the OLED display element of FIG. 1 . In the second figure, when the protective layer 300 is the photosensitive resin of the present invention, it helps to reduce the light emitted by the organic light-emitting layer 600 through the pixel boundary line M in the direction of the arrow 800, thereby avoiding the generation of pixels. Light leaks. When the pixel defining layer 400 is the photosensitive resin of the present invention, it helps to reduce the light emitted by the organic light emitting layer 600 along the arrow 900. By passing the pixel boundary line M, it is possible to avoid light leakage between the pixels. Therefore, when the protective layer 300 and/or the pixel defining layer 400 are the photosensitive resin of the present invention, light leakage between pixels can be avoided, and the contrast of the OLED display element can be improved, thereby improving the imaging quality of the OLED display element.

感光樹脂的性質的量測方法Method for measuring the properties of photosensitive resin

(一)最低曝光量(Eth)的量測方法:將感光樹脂組成物經攪拌步驟、過濾步驟後,塗佈於玻璃基板形成3.8μm~4.0μm的塗覆層,玻璃基板可選用康寧公司(Corning Inc.)所生產的0.63mm厚的EXG玻璃,或日本電氣硝子公司(Nippon Electric Glass Co,Ltd)所生產的0.63mm厚的OA-10玻璃,將塗覆層進行加熱烘烤得到感光樹脂後,進行不同能量的曝光(G,H,L Line)以及顯影,其中顯影係以TMAH作為顯影劑進行60秒,之後,觀察在何種能量下無殘膜,所得的能量即為Eth。Eth較佳為小於、等於175mJ/cm2,更佳為小於130mJ/cm2,若Eth大於175mJ/cm2,會導致製程曝光時間過久。 (1) Measurement method of minimum exposure amount (Eth): After the photosensitive resin composition is subjected to a stirring step and a filtration step, it is coated on a glass substrate to form a coating layer of 3.8 μm to 4.0 μm, and the glass substrate can be selected from Corning ( 0.63mm thick EXG glass produced by Corning Inc., or 0.63mm thick OA-10 glass produced by Nippon Electric Glass Co., Ltd., and the coating layer is heated and baked to obtain a photosensitive resin. Thereafter, exposure (G, H, L Line) of different energies and development were carried out, wherein the development was carried out using TMAH as a developer for 60 seconds, after which it was observed at which energy there was no residual film, and the obtained energy was Eth. Eth is preferably less than or equal to 175 mJ/cm 2 , more preferably less than 130 mJ/cm 2 , and if Eth is greater than 175 mJ/cm 2 , the process exposure time is too long.

(二)光穿透率的測量方法(T%):將覆蓋有感光樹脂的玻璃基板(形成方法與Eth的量測方法中相同),以紫外光-可見光光譜儀(型號為:Perkin-Elmer Lamda 25)量測穿透率,光譜儀經校正後,將玻璃基板置於光譜儀中,掃描範圍由800nm到350nm,量測此一區間的穿透率。 (2) Method for measuring light transmittance (T%): A glass substrate covered with a photosensitive resin (formation method is the same as in the measurement method of Eth), and an ultraviolet-visible spectrometer (Model: Perkin-Elmer Lamda) 25) Measure the penetration rate. After the spectrometer is calibrated, place the glass substrate in the spectrometer. The scanning range is from 800 nm to 350 nm, and the transmittance of this interval is measured.

(三)顯影損失(dark erosion)的量測方法:將覆蓋有感光樹脂的玻璃基板(形成方法與Eth的量測方法中相 同),進行厚度量測,得到厚度t1,之後將此玻璃基板在不經曝光的情況下,直接以2.38wt% TMAH顯影60秒,再進行一次厚度量測,得到厚度t2,顯影損失為t1-t2。顯影損失較佳的範圍為0μm~0.18μm,更佳的範圍為0μm~0.1μm。 (3) Measurement method of dark erosion: a glass substrate covered with a photosensitive resin (the formation method and the phase measurement method of Eth) The same), thickness measurement was performed to obtain a thickness t1, and then the glass substrate was directly developed with 2.38 wt% TMAH for 60 seconds without exposure, and then a thickness measurement was performed to obtain a thickness t2, and the development loss was t1. -t2. The development loss is preferably in the range of 0 μm to 0.18 μm, and more preferably in the range of 0 μm to 0.1 μm.

根據上述實施方式,以下提出具體實施例予以詳細說明。 According to the above embodiment, the specific embodiments will be described in detail below.

聚苯噁唑前驅物(I-1)的合成Synthesis of Polybenzoxazole Precursor (I-1)

取2,2-双(3-氨基-4-羥基苯基)六氟丙烷(2,2-Bis-(3 amino-4-hydroxyphenyl)hexafluoropropane)91.57克、吡啶(pyridine)39.55克以及363毫升的NMP加入容積為1公升的四頸瓶中,待2,2-双(3-氨基-4-羥基苯基)六氟丙烷溶解後,以冰浴降溫至0℃,再以加料漏斗滴加入間苯二醯氯(isophthaloyl chloride)的NMP溶液(45.68克的間苯二醯氯溶於168毫升的NMP),滴加完畢後,於室溫反應3小時,再加入2公升的去離子水,將產物沈澱析出、過濾,最後在烘箱以60℃烘烤72小時以得到聚苯噁唑前驅物(I-1)。 Take 2,2-bis(3-amino-4-hydroxyphenyl)hexafluoropropane (91.57 g, pyridine 39.55 g and 363 ml) NMP was added to a four-necked flask with a volume of 1 liter. After 2,2-bis(3-amino-4-hydroxyphenyl)hexafluoropropane was dissolved, it was cooled to 0 ° C in an ice bath, and then added dropwise with an addition funnel. An NMP solution of isophthaloyl chloride (45.68 g of m-benzoic acid chloride dissolved in 168 ml of NMP), after completion of the addition, react at room temperature for 3 hours, then add 2 liters of deionized water. The product precipitated, filtered, and finally baked in an oven at 60 ° C for 72 hours to obtain a polybenzoxazole precursor (I-1).

聚苯噁唑前驅物(I-2)的合成Synthesis of polybenzoxazole precursor (I-2)

將聚苯噁唑前驅物(I-1)的合成中45.68克的間苯二醯氯置換成46.37克的1,4-環己二醯氯(1,4-Cyclohexanedicarbonyl dichloride),其餘步驟皆相同,可得到聚苯噁唑前驅物(I-2)。 45.68 g of m-xylylene chloride in the synthesis of the polybenzoxazole precursor (I-1) was replaced with 46.37 g of 1,4-cyclohexanedicarbonyl dichloride, and the remaining steps were the same. A polybenzoxazole precursor (I-2) is obtained.

聚苯噁唑前驅物(I-3)的合成Synthesis of polybenzoxazole precursor (I-3)

將聚苯噁唑前驅物(I-1)的合成中45.68克的間苯二醯氯置換成66.40克的4,4-氯甲醯基苯醚(4,4'-Oxybisbenzoyl chloride),其餘步驟皆相同,可得到聚苯噁唑前驅物(I-3)。 45.68 g of meta-xylylene chloride in the synthesis of polybenzoxazole precursor (I-1) was replaced with 66.40 g of 4,4'-Oxybisbenzoyl chloride. All of the same, a polybenzoxazole precursor (I-3) was obtained.

實施例1~6與對照例1’~4’之感光樹脂組成物Photosensitive resin compositions of Examples 1 to 6 and Comparative Examples 1' to 4'

將聚苯噁唑前驅物與感光性化合物依照表三與表四所示的成份與用量,與1克的GBL、5.5克的PGMEA、0.15克的MPTS以及0.25克的F561在常溫下混合攪拌,即可形成實施例1~6與對照例1’~4’之感光樹脂組成物。 The polybenzoxazole precursor and the photosensitive compound are mixed and stirred at a normal temperature with 1 g of GBL, 5.5 g of PGMEA, 0.15 g of MPTS, and 0.25 g of F561 according to the components and amounts shown in Tables 3 and 4. The photosensitive resin compositions of Examples 1 to 6 and Comparative Examples 1' to 4' were formed.

表四中N740為苯酚酚醛型環氧樹脂(Phenol Novolac Type Epoxy Resin,購買自DIC Co.,Ltd),重量平均分子量(Mw)約為1,400,其結構如下所示: In Table 4, N740 is a phenol novolac type epoxy resin (Phenol Novolac Type Epoxy Resin, purchased from DIC Co., Ltd.), and has a weight average molecular weight (Mw) of about 1,400, and its structure is as follows:

將前述感光樹脂組成物以旋轉塗佈法塗佈於 100mm×100mm的玻璃基板,調整轉速形成3.8μm的塗覆層,再使用加烘箱以250℃加熱1小時,使塗覆層固化形成感光樹脂,並以紫外光-可見光光譜儀量測光穿透率,所得結果如第3圖以及表五。 Applying the aforementioned photosensitive resin composition to a spin coating method 100 mm × 100 mm glass substrate, adjusting the rotation speed to form a coating layer of 3.8 μm, and then heating at 250 ° C for 1 hour using an oven, curing the coating layer to form a photosensitive resin, and measuring the light transmittance by an ultraviolet-visible spectrometer The results obtained are shown in Figure 3 and Table 5.

請參照第3圖,其係繪示依照本發明實施例1至4 以及對照例1’與2’的光穿透率與波長的關係圖。由第3圖可知,依照本發明的實施例1至4感光樹脂組成物所形成的感光樹脂與對照例1’與2’相較,皆具有較低的光穿透率,因此,當以本發明的感光樹脂組成物用作OLED顯示元件中的保護層及/或畫素定義層,可有效避免畫素之間產生漏光,而可提升OLED顯示元件的對比度,進而可提升OLED顯示元件的成像品質。 Please refer to FIG. 3, which illustrates Embodiments 1 to 4 according to the present invention. And the relationship between the light transmittance and the wavelength of Comparative Examples 1' and 2'. As is apparent from Fig. 3, the photosensitive resin formed by the photosensitive resin compositions of Examples 1 to 4 according to the present invention has lower light transmittance than Comparative Examples 1' and 2', and therefore, The photosensitive resin composition of the invention is used as a protective layer and/or a pixel defining layer in the OLED display element, which can effectively avoid light leakage between pixels, and can improve the contrast of the OLED display element, thereby improving imaging of the OLED display element. quality.

細觀第3圖,可知本發明實施例1至4感光樹脂組成物所形成的感光樹脂,對於阻擋波長小於或等於400nm 的光穿透的效果格外顯著,且其對波長小於或等於400nm的光穿透率皆小於11%。 Referring to FIG. 3, it is understood that the photosensitive resin formed by the photosensitive resin compositions of Examples 1 to 4 of the present invention has a blocking wavelength of less than or equal to 400 nm. The effect of light penetration is particularly remarkable, and its light transmittance for wavelengths less than or equal to 400 nm is less than 11%.

請同時參照表五,由表五可知,本發明實施例1至 6中,對波長小於或等於400nm的光穿透率最大為6.6%、最小為0.29%,皆小於11%,且皆逺小於對照例1’至4’對波長小於或等於400nm的光穿透率。 Please refer to Table 5 at the same time. As shown in Table 5, Embodiment 1 of the present invention In 6 , the transmittance of light having a wavelength of less than or equal to 400 nm is at most 6.6% and the minimum is 0.29%, both being less than 11%, and both are smaller than the light penetration of the light of the wavelength of less than or equal to 400 nm in Comparative Examples 1' to 4'. rate.

目前已有文獻指出,當OLED發光二極體顯示元件中的薄膜電晶體為銦鎵鋅氧化物薄膜電晶體時,銦鎵鋅氧化物薄膜電晶體受到波長小於、等於400nm的光線照射後,會造成汲極電流-閘極電壓曲線圖(Id-Vg Curve)中的次臨界擺幅(sub-threshold swing,SS)產生變化,而影響供給OLED的電流,進而造成亮度變化與影響OLED發光二極體顯示元件的成像品質。由第3圖與表五可知,若使用本發明的感光樹脂作為OLED發光二極體顯示元件中的保護層及/或畫素定義層,不僅可避免畫素之間產生漏光,更可有效阻擋波長小於、等於400nm的光線進入銦鎵鋅氧化物薄膜電晶體,而可維持OLED發光二極體顯示元件的成像品質。 At present, it has been pointed out that when the thin film transistor in the OLED light-emitting diode display element is an indium gallium zinc oxide thin film transistor, the indium gallium zinc oxide thin film transistor is irradiated with light having a wavelength of less than or equal to 400 nm, The sub-threshold swing (SS) in the drain current-gate voltage curve (Id-Vg Curve) changes, which affects the current supplied to the OLED, which in turn causes brightness changes and affects the OLED light-emitting diode. The body displays the imaging quality of the component. It can be seen from FIG. 3 and Table 5 that if the photosensitive resin of the present invention is used as a protective layer and/or a pixel defining layer in the OLED light emitting diode display element, not only light leakage between pixels but also light blocking can be effectively prevented. Light having a wavelength of less than or equal to 400 nm enters the indium gallium zinc oxide thin film transistor, and the image quality of the OLED light emitting diode display element can be maintained.

請參照表六,依照表六的成份與用量,在常溫下混 合攪拌,即可形成實施例7~19與對照例5’~6’感光樹脂組成物,以表六中實施例8的成份用量,再添加0.1克的十二烷基硫醇,在常溫下混合攪拌,以形成對照例7’,並以表六中實施例8的成份用量,再添加0.15克的5-苯基四唑,在常溫下混合攪拌,以形成對照例8’。 Please refer to Table VI, according to the composition and dosage of Table 6, mixed at room temperature With stirring, the photosensitive resin compositions of Examples 7 to 19 and Comparative Examples 5' to 6' were formed, and the amount of the component of Example 8 in Table 6 was further added, and 0.1 g of dodecyl mercaptan was further added at room temperature. The mixture was stirred to form Comparative Example 7', and 0.15 g of 5-phenyltetrazole was further added in an amount of the component of Example 8 in Table 6, and mixed and stirred at normal temperature to form Comparative Example 8'.

將實施例7~19以及對照例5’~8’的感光樹脂組成物製備感光樹脂,再量測各感光樹脂對波長小於或等於400nm的光穿透率、最低曝光量以及顯影損失,將實施例7~19以及對照例5’~8’的MR1與MR2以及前述量測結果記錄於表七。 Photosensitive resins were prepared from the photosensitive resin compositions of Examples 7 to 19 and Comparative Examples 5' to 8', and the light transmittance, minimum exposure amount, and development loss of each photosensitive resin for a wavelength of less than or equal to 400 nm were measured, and the implementation was carried out. MR1 and MR2 of Examples 7 to 19 and Comparative Examples 5' to 8' and the above measurement results are shown in Table 7.

由表七可知,實施例7~19對波長小於或等於400nm的光穿透率皆小於、等於11%,顯見本發明感光樹脂組成物可使有效阻擋波長小於或等於400nm的光穿透。 It can be seen from Table 7 that the light transmittances of the examples 7 to 19 for the wavelength of less than or equal to 400 nm are all less than or equal to 11%, and it is apparent that the photosensitive resin composition of the present invention can penetrate light having an effective blocking wavelength of less than or equal to 400 nm.

由實施例7~11可知,MR1越大,感光樹脂對波長小於或等於400nm的光穿透率越小,最低曝光量越大。由實施例7~11與實施例12~16可知,添加適當量的顯影促進 劑可降低最低曝光量,但若添加過量的顯影促進劑(MR2>0.9),如對照例5’~6’,會導致顯影後感光樹脂剝離,換言之,本發明之感光樹脂組成物在單獨使用的情況下,即可有效阻擋波長小於或等於400nm的光穿透,且MR1越大,阻擋效果越好。此外,本發明之感光樹脂組成物可添加適量的添加劑,以提升其它性質,例如,在當MR1值較高時,可添加適當量的顯影促進劑,使所製成的感光樹脂兼具有較低的最低曝光量,以符合實際產線需求。 As is apparent from Examples 7 to 11, the larger the MR1 is, the smaller the light transmittance of the photosensitive resin with respect to a wavelength of 400 nm or less, and the smaller the minimum exposure amount. It can be seen from Examples 7 to 11 and Examples 12 to 16 that an appropriate amount of development promotion is added. The agent can reduce the minimum exposure amount, but if an excessive amount of development accelerator (MR2>0.9) is added, such as Comparative Example 5'~6', the photosensitive resin is peeled off after development, in other words, the photosensitive resin composition of the present invention is used alone. In the case, the light penetration of the wavelength less than or equal to 400 nm can be effectively blocked, and the larger the MR1, the better the blocking effect. In addition, the photosensitive resin composition of the present invention may be added with an appropriate amount of additives to enhance other properties. For example, when the MR1 value is high, an appropriate amount of the development accelerator may be added to make the photosensitive resin produced. Low minimum exposure to meet actual line requirements.

由實施例8與對照例7’可知,添加硫醇類化合物如十二烷基硫醇,會造成未曝光區的感光樹脂顯影損失過高,故不建議使用。 From Example 8 and Comparative Example 7', the addition of a thiol compound such as dodecyl mercaptan causes the development loss of the photosensitive resin in the unexposed area to be excessively high, and thus it is not recommended.

由實施例8與對照例8’可知,添加四唑衍生物如5-苯基四唑,會造成未曝光區的感光樹脂顯影損失過高,需要塗佈較高厚度的感光樹脂才能補足損失的厚度,故不建議使用。 It can be seen from Example 8 and Comparative Example 8' that the addition of a tetrazole derivative such as 5-phenyltetrazole causes the development loss of the photosensitive resin in the unexposed area to be too high, and it is necessary to apply a higher thickness of the photosensitive resin to make up the loss. Thickness, it is not recommended.

實施例8、實施例17、實施例18與實施例19所使用的感光性化合物不同,感光性化合物(III-3)、感光性化合物(V-1)、感光性化合物(VI-1)與感光性化合物(VII-1)皆可有效降低對波長小於或等於400nm的光穿透率。 In Example 8, Example 17, Example 18, and the photosensitive compound used in Example 19, the photosensitive compound (III-3), the photosensitive compound (V-1), and the photosensitive compound (VI-1) and The photosensitive compound (VII-1) can effectively reduce the light transmittance to a wavelength of less than or equal to 400 nm.

雖然本發明已以實施方式揭露如上,然其並非用以限定本發明,任何熟習此技藝者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。 Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and the present invention can be modified and modified without departing from the spirit and scope of the present invention. The scope is subject to the definition of the scope of the patent application attached.

300‧‧‧保護層 300‧‧ ‧ protective layer

400‧‧‧畫素定義層 400‧‧‧ pixel definition layer

500‧‧‧陽極 500‧‧‧Anode

600‧‧‧有機發光層 600‧‧‧Organic light-emitting layer

700‧‧‧陰極 700‧‧‧ cathode

800‧‧‧箭頭 800‧‧‧ arrow

900‧‧‧箭頭 900‧‧‧ arrow

M‧‧‧畫素分界線 M‧‧‧ pixel boundary

Claims (12)

一種感光樹脂組成物,包含:聚苯噁唑前驅物,其具有如式(I)所示之一結構: 其中該X與該E係各自獨立為二價基團,且該n為5至60的整數;以及至少一感光性化合物,其具有如式(II)、式(III)、式(IV)、式(V)、式(VI)或式(VII)所示之一結構: 其中,該R1至該R20係各自獨立為氫、式(i)或式(ii)所示之基團,該R1至該R4中至少一者為該式(i)或該式(ii)所示之基團,該R5至該R7中至少一者為該式(i)或該式(ii)所示之基團,該R8至該R10中至少一者為該式(i)或該式(ii)所示之基團,該R11至該R13中至少一者為該式(i)或該式(ii)所示之基團,該R14至該R16中至少一者為該式(i)或該式(ii)所示之基團,該R17至該R20中至少一者為該式(i)或該式(ii)所示之基團,該式(i)及該式(ii)如下所示: A photosensitive resin composition comprising: a polybenzoxazole precursor having a structure represented by the formula (I): Wherein the X and the E series are each independently a divalent group, and the n is an integer of 5 to 60; and at least one photosensitive compound having the formula (II), the formula (III), the formula (IV), One of the structures shown in formula (V), formula (VI) or formula (VII): Wherein R 1 to R 20 are each independently a group represented by hydrogen, formula (i) or formula (ii), and at least one of R 1 to R 4 is the formula (i) or the formula (ii) the group shown, wherein at least one of R 5 to R 7 is a group represented by the formula (i) or the formula (ii), and at least one of the R 8 to the R 10 is Or a group represented by the formula (i) or the formula (ii), wherein at least one of R 11 to R 13 is a group represented by the formula (i) or the formula (ii), and the R 14 is At least one of the R 16 is a group represented by the formula (i) or the formula (ii), and at least one of the R 17 to the R 20 is represented by the formula (i) or the formula (ii) The group (i) and the formula (ii) are as follows: 如請求項1之感光樹脂組成物,其中該X為-C(CF3)2-、-C(CH3)2-、-O-或-S-。 The photosensitive resin composition of claim 1, wherein the X is -C(CF 3 ) 2 -, -C(CH 3 ) 2 -, -O- or -S-. 如請求項1之感光樹脂組成物,其中該E為 -(CH2)m-、 其中,該R21至該R24係各自獨立為碳數1至3的烷基、碳數3至7的芳香基或環烷基,該m為0至10的整數,該r為1至10的整數。 The photosensitive resin composition of claim 1, wherein the E is -(CH 2 )m-, , , Wherein R 21 to R 24 are each independently an alkyl group having 1 to 3 carbon atoms, an aromatic group having 3 to 7 carbon atoms or a cycloalkyl group, and m is an integer of 0 to 10, and the ratio of r is 1 to 10 The integer. 如請求項1之感光樹脂組成物,其中該感光性化合物與該聚苯噁唑前驅物的重量比值為MR1,其滿足下列條件:0.15MR11。 The photosensitive resin composition of claim 1, wherein the weight ratio of the photosensitive compound to the polybenzoxazole precursor is MR1, which satisfies the following condition: 0.15 MR1 1. 如請求項4之感光樹脂組成物,其中該感光性化合物與該聚苯噁唑前驅物的重量比值為MR1,其滿足下列條件: The photosensitive resin composition of claim 4, wherein a weight ratio of the photosensitive compound to the polybenzoxazole precursor is MR1, which satisfies the following conditions: 如請求項4之感光樹脂組成物,更包含顯影促進劑。 The photosensitive resin composition of claim 4 further comprising a development accelerator. 如請求項6之感光樹脂組成物,其中該顯影促進劑與該感光性化合物的重量比值為MR2,其滿足下列條件:0<MR20.9。 The photosensitive resin composition of claim 6, wherein a weight ratio of the development accelerator to the photosensitive compound is MR2, which satisfies the following condition: 0 < MR2 0.9. 一種感光樹脂,其係由如請求項1至請求項7任一項之感光樹脂組成物經加熱步驟所形成,藉該加熱步驟使該聚苯噁唑前驅物環化以形成聚苯噁唑。 A photosensitive resin formed by a heating step of the photosensitive resin composition according to any one of claims 1 to 7, wherein the polybenzoxazole precursor is cyclized to form polybenzoxazole. 如請求項8之感光樹脂,其中該加熱步驟係於150℃至350℃進行1小時至5小時。 The photosensitive resin of claim 8, wherein the heating step is carried out at 150 ° C to 350 ° C for 1 hour to 5 hours. 如請求項8之感光樹脂,其中該感光樹脂對波長小於或等於400nm的光穿透率小於11%。 The photosensitive resin of claim 8, wherein the photosensitive resin has a light transmittance of less than 11% for a wavelength of less than or equal to 400 nm. 一種有機發光二極體顯示元件,包含:一基板;一薄膜電晶體,該薄膜電晶體設置於該基板上方;以及如請求項8之感光樹脂,該感光樹脂設置於該薄膜電晶體上方。 An organic light emitting diode display device comprising: a substrate; a thin film transistor disposed on the substrate; and the photosensitive resin according to claim 8, wherein the photosensitive resin is disposed above the thin film transistor. 如請求項11之有機發光二極體顯示元件,其中該薄膜電晶體為非晶矽電晶體(Amorphous Si TFT)、低溫多晶矽電晶體(Low Temperature Poly-Si TFT)或銦鎵鋅氧化物薄膜電晶體(Indium Gallium Zinc Oxide TFT)。 The organic light emitting diode display device of claim 11, wherein the thin film transistor is an amorphous silicon (Amorphous Si TFT), a low temperature poly-Si TFT, or an indium gallium zinc oxide film. Indium Gallium Zinc Oxide TFT.
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