TW201522172A - Apparatus and method for direct contact pressure dispensing using floating liquid extraction element - Google Patents

Abstract

A direct contact pressure dispensing apparatus including a skimmer arranged to float on liquid within a container and defining at least one liquid extraction opening positioned below an upper level of liquid in the container, and a material extraction hose coupled between the skimmer and an outlet port of the container. Withdrawal of liquid proximate to a gas-liquid interface reduces or inhibits saturation of liquid with pressurization gas. The skimmer can translate along a vertical support rod. A pressurizable reservoir can be arranged between the pressure dispensing container and a locus of use for the liquid.

Description

Device and method for direct contact with pressure distribution using a floating liquid extraction element law [Priority statement]

The present application claims the benefit of U.S. Provisional Patent Application Serial No. 61/899,060, filed on Nov. 1, 2013, which is hereby incorporated by reference.

SUMMARY OF THE INVENTION The present invention relates to fluid handling and dispensing systems, for example, for use with a pressurized gas dispensing container. More specifically, the present invention relates to direct contact pressure distribution of liquid or liquid-containing materials of liner-less containers in which such liquid-containing materials are in direct contact with pressurized gas while reducing pressurized gas Dissolution of the liquid to be dispensed, as well as relevant disclosures regarding the manufacture, use and deployment of such systems.

In many industrial applications, chemical reagents and compositions are required to be supplied in a high purity state, and special packaging has been developed to ensure that the supplied material remains in the entire package filling, storage, shipping, and final dispensing operations. Pure and suitable form. Examples of materials that may require high purity packaging include pharmaceuticals, medical materials, biological materials, radioactive materials, nanomaterials, food materials, and materials used in manufacturing and/or industrial manufacturing processes.

In the field of microelectronic devices and display panel manufacturing, for various liquids and liquids The need for proper packaging of the composition is particularly critical, as any contaminants in the packaging material and/or environmental contaminants entering the package may be made from such liquids or liquid compositions. Electronic devices and display panel products have an adverse effect, which in turn leads to defects in the product or even its intended use.

In view of such considerations, liquid and liquid-containing compositions used in the manufacture of microelectronic devices and display panels, such as photoresists, etchants, chemical vapor deposition reagents, solvents, wafer and tool cleaning formulations, chemical mechanical polishing Many types of high-purity packages have been developed for compositions, color filter chemicals, overcoats, liquid crystal materials, and the like.

A first type of high purity package comprises a rigid glass, metal, or plastic bucket or bottle to hold the material to be dispensed (ie, without the use of a flexible liner). Stainless steel vessels of rated pressure are usually used because they are able to withstand elevated pressures and meet stringent cleanliness specifications. Material can be dispensed from such containers using a dispensing pump. Unfortunately, pumps for high purity materials are not only expensive, but are also known to be detached from their bellows, diaphragms, and/or check valves. And cause pollution. In order to avoid the need for expensive pumps, direct contact pressure distribution structures have been developed in which a pressurized drive gas is used to directly contact the high purity liquid to be dispensed and to discharge the liquid from a container. . However, according to this configuration, the driving gas can be forced into the dispensed liquid, thereby causing the formation of microbubbles in the liquid. When the resulting liquid is used in various applications (e.g., depositing materials on a microelectronic device structure), the presence of microbubbles in the deposition liquid may result in defects in the deposited layer and/or subsequent deposited layers. Whether using a pump or direct pressure distribution, the applicability of the aforementioned types of dispensing systems is limited because of the expensive nature of the barrels or bottles, which must be strictly cleaned and transported to a chemical filling facility. Such containers can be reused to amortize these containers in multiple fill, transport and use cycles The cost.

A second type of high purity package has been developed comprising a flexible liner or pouch disposed in a substantially rigid outer container (also referred to as an overpack) to which pressurized gas is supplied A space between the liner and the outer container pressurizes the contents of the liner and promotes dispensing of the contents. Such packaging is often referred to as "bag-in-can (BIC)", "bag-in-bottle (BIB)", and "bag-in-bag""drum;BID)" packaging. This type of packaging is generally available from Advanced Technology Materials Co., Ltd. (Advanced Technology Materials, Inc.) ( Danbury, Conn. (Danbury, Connecticut, USA)) is commercially available (for example, commercially available under the trademark NOWPak ^®). A flexible gasket can be provided by a polymer film material (for example, polytetrafluoroethylene (PTFE), low density polyethylene, medium density polyethylene, PTFE based laminate, polyamide, poly A polyester, polyurethane, or the like, forming a pre-cleaned, sterile, collapsible bag selected to be a material (eg, a liquid) to be contained in the liner. Inert. Multilayer laminates can also be used, wherein the exemplary constituent materials further comprise: metallized films, foils, polymers/copolymers, laminates, extrusions, composite extrusions (co-extrusion) ), as well as blown and cast film.

When dispensing a liquid using a pad-based package, a liquid is typically dispensed from the liner by attaching a dispensing assembly comprising a catheter or short probe to one of the pads and allowing the catheter to be immersed In the liquid. Applying a fluid (eg, gas) pressure to the outer surface of the liner (ie, in the space between the liner and a surrounding container) to gradually collapse the flexible liner and thereby force the liquid to drain through the dispensing assembly to The associated flow path to flow to an end use tool or location. The pad-based pressure distribution system limits or prevents direct contact between the liquid to be dispensed and the pressurized gas, thereby limiting the likelihood of pressurized gas being dissolved in the liquid to be dispensed. lining The pads are typically configured for single use, while the outer package can be configured for single use or (more generally) configured for multiple use. To facilitate reuse, an outer package can be shipped to a manufacturer or broker, mated with a new liner (without rigorous cleaning of the outer or outer container), and thereafter refilled at a chemical filling facility. Unfortunately, flexible liners may experience gas leakage through pinholes and/or seams along them, leading to potential problems with pinhole leakage, weld tearing, and overflow.

Conventional rigid containers containing packages for use with flexible liners may also have disadvantages, such that the rigid container/outer package typically has only a single static expansion state, ie, whether the container is empty or full, The containers all have the same shape and therefore occupy the same size space. Thus, when empty containers are shipped from a container manufacturer to a supplier for filling, the containers disadvantageously occupy the same shipping volume as the shipping volume occupied when they are full. Many conventional rigid containers/outer packages cannot collapse to a relatively small size in the absence of air, and/or cannot be effectively packed together to effectively utilize the transportation space, which can increase transportation costs and ultimately increase Material cost of transportation.

A third type of container for storing and dispensing high purity materials has recently been developed which comprises a substantially rigid collapsible container (for example, as disclosed in International Publication No. WO 2012/051093) and substantially rigid foldable The above-mentioned applications are assigned to the same assignee as the present application, for example, in the U.S. Patent Application Publication No. 2014/0307042 A1. The liquid can be dispensed from a substantially rigid collapsible and/or collapsible container using a pump, pressurized gas (eg, direct pressure distribution) or vacuum, such as by using a dip tube mounted from the top. A top-mounted port draws liquid for dispensing. A substantially rigid molded collapsible container can include a fold line or fold pattern to define a configuration whereby the container can be selectively collapsed or held in a free-standing state, thereby allowing for a tolerance The device collapses in an empty condition to reduce the transport volume and reduce transportation costs. The resulting rigid collapsible container can be used as a freestanding container without the need for an outer container and without the need for a flexible liner disposed therein. The container may be blow-molded into a unitary piece that includes creases or pre-folds to enable the container to collapse to a relatively flat position. Seams and/or welds in rigid collapsible containers can be substantially eliminated to substantially reduce or eliminate problems associated with pinholes, weld tears, and overflow. The desired constituent materials include polyethylene terephthalate (PET), polyethylene naphthalate (PEN), and polybutylene naphthalate (poly(butylene 2, 6). -naphthalate); PBN), polyethylene (PE), linear low-density polyethylene (LLDPE), low-density polyethylene (LDPE), medium density polyethylene (medium- Density polyethylene; MDPE), high-density polyethylene (HDPE), and/or polypropylene (PP).

A substantially rigid collapsible container may comprise: four side walls; a top surface connected to one end of each of the four side walls and defining a square or rectangular cone; and a bottom surface connected to each of the four side walls The opposite end defines a square or rectangular cone. An accessory can be located at the apex of the top surface. Each of the four side walls may have a plurality of fold lines extending radially from a central region of the corresponding side wall. In some cases, the radially extending fold lines may intersect at a central region, while in other cases, the central region may include a stress relief limiter. Exemplary thicknesses of such materials may range from about 0.05 millimeters (mm) to about 3 millimeters thick, preferably from 1.0 millimeters to about 2 millimeters thick; however, the desired wall thickness may vary from one factor to another: among other factors In addition, such factors include the volume of the container, the intended content, the intended method of distribution, or the intended application. In general, a substantially rigid container can have sufficient wall thickness and rigidity to substantially reduce or eliminate the occurrence of pinholes.

While a substantially rigid collapsible or collapsible container may provide some benefit relative to a pad-based pressure dispensing container, when the container is used for direct contact with pressure dispensing (where pressurized gas contacts the liquid to be dispensed) There is still a problem that the driving gas dissolves in the liquid to be dispensed, which in turn causes the presence of microbubbles, which can cause defects when the liquid layer is deposited on a target surface.

Accordingly, it is desirable to overcome the limitations associated with conventional pressure distribution devices and methods.

This invention relates to fluid handling and dispensing systems and methods for overcoming the various problems found in conventional systems. Various embodiments of the present invention relate to improved fluid handling devices and methods for direct contact pressure distribution of a liquid using pressurized gas while reducing dissolution of the pressurized gas in the liquid to be dispensed.

In one embodiment, a skimmer is configured to float on a liquid or liquid-containing material in the interior of a container and define at least one liquid extraction opening, the at least one liquid extraction opening being located within the container Or below an upper level of the liquid material, and using a material extraction hose coupled to the separator and one of the outlet ports of the container to receive liquid or liquid material from the at least one liquid extraction opening Delivered to the exit port. In some embodiments, the container may have no liner and be used to receive pressurized gas in direct contact with the liquid or liquid-containing material within the container for pressure distribution of the liquid or liquid-containing material. In certain embodiments, the container can comprise a rigid collapsible or rigid collapsible container. Using a separator to draw liquid from the container near the gas/liquid interface promotes (eg, continuous) removal of the liquid having the highest dissolved gas concentration. If the liquid is drawn faster along the gas/liquid interface than the gas diffuses into the liquid (e.g., using a separator), the entire liquid will not reach a state in which the pressurization gas is saturated. In addition, If mixing occurs between the upper layer and the lower layer of the liquid in the container, the gas saturation will also be suppressed. The container, separator and related components can be made of metal.

In one embodiment, a liquid dispensing device is configured to extract a liquid or liquid containing material from a pressure dispensing container for receiving pressurized gas in direct contact with the liquid or liquid containing material, the liquid dispensing The apparatus includes: a separator configured to float on the liquid or liquid-containing material inside one of the containers and defining at least one liquid extraction opening, the at least one liquid extraction opening being located in the container with a liquid or liquid-containing material One of the lower water levels; and a material extraction hose coupled between the separator and one of the outlet ports of the container and configured to deliver liquid or liquid-containing material received from the at least one liquid extraction opening to the Export 埠.

In certain embodiments, a fluid processing method is disclosed, comprising: providing a first pressure dispensing container defining an interior and having a separator, and inserting at least a portion of a material extraction hose into the interior The first pressure dispensing container houses a liquid or liquid containing material, the separator being configured to float on the liquid or liquid containing material within the first pressure dispensing container and define at least one liquid extraction opening, the at least one The liquid extraction opening is located below the upper water level of one of the liquid or liquid containing material in the container, the material extraction hose being coupled between the separator and one of the outlet ports of the container and configured to draw the opening from the at least one liquid Receiving a liquid or liquid-containing material to the outlet port; supplying a pressurized gas to the interior of the first pressure dispensing container to contact the liquid or liquid-containing material; and extracting through the at least one liquid extraction opening and the material A hose draws liquid from the interior of the first pressure dispensing container.

In various embodiments, a fluid processing method is disclosed, comprising: providing a first pressure dispensing container defining an interior and having a separator, and At least a portion of a material extraction hose is received in the interior, the first pressure distribution container containing a liquid or liquid-containing material, the separator being configured to float on the liquid or liquid-containing material within the first pressure distribution container and Defining at least one liquid extraction opening, the at least one liquid extraction opening being located below an upper water level of one of the liquid or liquid containing material in the container, the material extraction hose being coupled between the separator and one of the outlet ports of the container and Configuring to deliver liquid or liquid-containing material received from the at least one liquid extraction opening to the outlet port; and providing a set of instructions on a tangible medium, the instructions comprising: • supplying a pressurized gas to The interior of the first pressure dispensing container contacts the liquid or liquid-containing material; and • the liquid is withdrawn from the interior of the first pressure dispensing container via the at least one liquid extraction opening and the material extraction hose.

In one embodiment, the set of instructions includes attaching a container closure member to the container adjacent the outlet port, the container closure member being configured to permit passage of liquid or liquid-containing material received from the material extraction hose. The set of instructions may further include: detecting a state in which the liquid or liquid-containing material of the first pressure dispensing container is depleted or nearly exhausted, and terminating the interior of the first pressure dispensing container in response to the detecting Drain the liquid. In one embodiment, the detecting in the instructions indicates that the liquid or liquid-containing material of the first pressure dispensing container is in a depleted or near-depleted state, the step of detecting: indicating that the separator is in proximity to or in contact with the pressure A state in which one of the bottom walls or the bottom of the container is dispensed. In one embodiment, the instructions include: removing the separator and the material extraction hose from the first pressure dispensing container; inserting the separator and the material extraction hose into one of a liquid or liquid containing material a second pressure distribution container; supplying a pressurized gas to the interior of the second pressure distribution container to contact the liquid or liquid-containing material contained therein; and extracting the hose from the at least one liquid extraction opening and the material The inside of the second pressure distribution container The part draws liquid.

Such instructions on a tangible medium may include, but are not limited to, a printed document or label, or a computer readable recording medium (eg, a compact disc or a remote server accessible via the Internet) Description on the computer memory).

In various embodiments, a method for dispensing a liquid or liquid-containing material using a pressure dispensing container for receiving a pressurized gas in direct contact with the liquid or liquid-containing material is disclosed. The method comprises: comparing a desired volumetric dispensing rate of one of the liquid or liquid-containing materials with a value indicating a rate at which one of the pressurized gas diffuses into the liquid or the liquid-containing material or is derived from the rate; And selecting the pressure dispensing container, the pressure dispensing container having a cross-sectional area sized to permit immersion extraction from at least one of the separators in the container adjacent to a liquid/gas interface using a floatable separator The opening draws a liquid or liquid-containing material such that the level of the liquid or liquid-containing material in the container drops at a rate that is more variable than the pressure of the pressurized gas in the liquid or liquid-containing material.

Any one or more of the features of the embodiments disclosed herein can be combined to provide additional advantages. Other aspects, features, and embodiments will be more fully apparent from the disclosure and appended claims.

100‧‧‧Traditional direct contact pressure distribution system

110‧‧‧ container

111‧‧‧ top wall

112‧‧‧ bottom wall

113‧‧‧ side wall

116‧‧‧ gas inlet埠

118‧‧‧ catheter

119‧‧‧ openings

120‧‧‧ Pressurized gas

123‧‧‧ gas/liquid interface

125‧‧‧Liquid

125A‧‧‧Liquid sublayer

125B‧‧‧Liquid Sublayer

125C‧‧‧Liquid Sublayer

200‧‧‧Material delivery system

210‧‧‧Direct contact with pressure distribution container

213‧‧‧ side wall

214‧‧‧The liquid collection department with reduced width

215‧‧‧ container neck

216‧‧‧Export

220‧‧‧ gas

221‧‧‧上壁

222‧‧‧ Lower wall

223‧‧‧ gas/liquid interface

225‧‧‧Liquid or liquid containing materials

250‧‧‧Separator

251‧‧‧ upper surface

252‧‧‧ lower surface

255‧‧‧Liquid extraction opening

268‧‧‧material extraction hose

270‧‧‧ container closure

281‧‧‧ pressurized gas source

282‧‧‧ Pressurized gas pipeline

284‧‧‧Drainage line

285‧‧‧pressure relief valve

285A‧‧‧Overpressure drain hole

286‧‧‧ sensor

288‧‧‧ Balance

290‧‧‧ valve

292‧‧‧Downstream state detection sensor

294‧‧‧Storage

296‧‧‧Downstream liquid utilization process

299‧‧‧ Controller

350‧‧‧Separator

351‧‧‧ upper surface

352‧‧‧Bottom

353‧‧‧Sloping wall surface

354‧‧‧ sidewall surface

355A‧‧‧Liquid extraction opening

355B‧‧‧Liquid extraction opening

356‧‧‧Internal channel for horizontal configuration

357‧‧‧ upper

358‧‧‧ lower

365‧‧‧Vertical channel

368‧‧‧ material extraction hose

450‧‧‧Separator

451‧‧‧ upper surface

452‧‧‧Bottom

453‧‧‧inclined lower wall surface

454‧‧‧ sidewall surface

455A‧‧‧Liquid extraction opening

455B‧‧‧Liquid extraction opening

456A‧‧‧ inclined channel

456B‧‧‧ inclined channel

465‧‧‧Vertical channel

468‧‧‧material extraction hose

487‧‧‧ Heavy objects and / or magnets or magnetically responsive materials

550‧‧‧Separator

551‧‧‧ upper surface

552‧‧‧Bottom

553‧‧‧inclined lower wall surface

554‧‧‧ sidewall surface

555A‧‧‧Liquid extraction opening

555B‧‧‧Liquid extraction opening

557‧‧‧Upper

558‧‧‧ lower

559‧‧‧Liquid extraction opening

561‧‧ ‧ Collecting Department

567‧‧‧Bottom

568‧‧‧material extraction hose

605‧‧‧Liquid distribution device

643‧‧‧Retractable tether

644‧‧‧ Plugs or other removable components

645‧‧‧ Telescopic components

650‧‧‧Separator

651‧‧‧ upper surface

652‧‧‧Bottom

653‧‧‧inclined lower wall surface

654‧‧‧ sidewall surface

655A‧‧‧Liquid extraction opening

655B‧‧‧Liquid extraction opening

656‧‧‧Internal channel for horizontal configuration

668‧‧‧material extraction hose

670‧‧‧Container closure

671‧‧‧ upper surface

672‧‧‧Threaded surface

682‧‧‧Gas gas inlet埠

684‧‧‧ Pressure release exit

705‧‧‧Liquid distribution device

740‧‧‧ Vertically arranged support rods

741‧‧‧Upper/support rod

742‧‧‧ Widened travel stop end

750‧‧‧Separator

751‧‧‧ upper surface

752‧‧‧Bottom/bottom

752A‧‧‧ Groove

754‧‧‧ sidewall surface

755‧‧‧Liquid extraction opening

759‧‧‧Liquid extraction opening

761‧‧‧Internal collection department

763‧‧‧ openings

767‧‧‧Bottom

768‧‧‧ material extraction hose

771‧‧‧Container closure

805‧‧‧Liquid distribution device

823‧‧‧ gas/liquid interface

840‧‧‧ Vertically arranged support rods

842‧‧‧ Widening travel stop lower end

850‧‧‧Separator

851‧‧‧ upper surface

852‧‧‧Bottom

854‧‧‧ sidewall surface

855‧‧‧ upper (primary) liquid extraction opening

859‧‧‧Small (auxiliary) liquid extraction opening

861‧‧‧Internal liquid collection department

863‧‧‧ openings

866‧‧‧Connector/Extension

867‧‧‧Bottom

868‧‧‧ material extraction hose

870‧‧‧Container closure

907‧‧‧Material Distribution System

910‧‧‧Direct contact with pressure distribution container

911‧‧‧ top wall

914‧‧‧liquid collection department

915‧‧‧ container neck

916‧‧‧Export

920‧‧‧ Pressurized gas

922‧‧‧The lower wall

923‧‧‧ gas/liquid interface

925‧‧‧ liquid

931‧‧‧High water level sensor

932‧‧‧Low water level sensor

950‧‧‧Separator

951‧‧‧ upper surface

952‧‧‧ lower surface

955‧‧‧At least one liquid extraction opening

968‧‧‧Material extraction hose

970‧‧‧Container closure components

981‧‧‧ pressurized gas source

981A‧‧‧ pressurized gas source

982‧‧‧ pipeline

986‧‧‧Pressure relief valve and / or discharge hole

986A‧‧‧vacuum source

993‧‧‧Liquid water level / liquid or liquid containing material

994‧‧‧ Pressurizable reservoir

996‧‧‧Use point

V1‧‧‧ valve

V2‧‧‧ valve

V3‧‧‧ downstream valve

V4‧‧‧ gas valve

V5‧‧‧Vacuum valve

1 is a simplified schematic diagram of a conventional direct contact pressure distribution system illustrating the phenomenon of gas dissolution in a liquid near a gas/liquid interface; and FIG. 2 is a diagram illustrating material delivery in accordance with an embodiment of the present invention. Simplified representation of the system The material delivery system comprises a direct contact pressure dispensing container, the direct contact pressure dispensing container comprising: a separator configured to float on the liquid within the container, and the separator comprising at least one liquid extraction An opening, the at least one liquid extraction opening being located below an upper water level of the liquid in the container; and a material extraction hose coupled between the separator and one of the outlet ports of the container; FIG. 3 is in accordance with the present invention A side cross-sectional view of one of the separators of one embodiment, the separator comprising a different upper material portion and a lower material portion; and FIG. 4 is a side cross-sectional view of the separator according to an embodiment of the present invention, the separator A liquid extraction opening disposed along a wall portion of the inclined lower portion thereof; and FIG. 5 is a side cross-sectional view of the separator according to an embodiment of the present invention, the separator including one of a main liquid extraction opening and an auxiliary liquid extraction Opening and including a material extraction opening configured to supply liquid to an internal collection portion, the material is extracted soft The liquid distribution device comprises a separator, a material extraction hose, and a liquid extraction device according to an embodiment of the invention. And a container closure member configured to be removably attached to a container adjacent an outlet port, wherein the separator includes at least one liquid extraction opening disposed along a side wall thereof, and wherein the device Containing a tether attached to one of the separators; Figure 7 is a side cross-sectional view of a liquid dispensing device according to one embodiment of the present invention, the liquid dispensing device comprising: a container closure member configured to be in close proximity An outlet port removably attached to a container; a vertically disposed support rod suspended from the container closure member; a material extraction hose; and a separator configured to travel along the support rod, wherein The separator contains a large a plurality of different liquid extraction openings configured to supply liquid to an internal liquid collection portion configured to receive the liquid extraction hose; FIG. 8A is a diagram in accordance with the present invention A perspective view of a liquid dispensing device of the embodiment, the liquid dispensing device comprising: a container closure member configured to be removably attached to a container adjacent an outlet port; a vertically disposed support rod from the container a closure element suspension; a material extraction hose; and a separator configured to travel along the support rod, wherein the separator includes an upper liquid extraction opening, the upper liquid extraction opening comprising a plurality of slots and a a lower lower liquid extraction opening, the slots and the lower liquid extraction opening are configured to supply liquid to an internal header, the internal header being configured to receive the material extraction hose; Figure 8B Is a top perspective view of a portion of the liquid dispensing device shown in Figure 8A, comprising a separator and a portion including a support rod and a material extraction hose; Figure 8C is shown in Figure 8B. a perspective view of the portion of the liquid dispensing device; FIG. 8D is a perspective view of the lower portion of the portion of the liquid dispensing device shown in FIGS. 8B through 8C; and FIG. 9 is a simplified schematic view of a material dispensing system, The material dispensing system includes a separator disposed in a direct contact pressure dispensing container and includes a reservable reservoir disposed between the container and a point of use.

Referring to Fig. 1, a simplified schematic diagram of a conventional direct contact pressure distribution system 100 is shown to provide a background for the present invention, which illustrates the phenomenon of gas dissolution in a liquid near the gas/liquid interface. The vessel 110 having a top wall 111, a bottom wall 112, and at least one side wall 113 includes a gas inlet port 116 configured to supply pressurized gas 120 to an upper portion of the interior of the vessel 110. A conduit 118 is configured to permit removal of pressurized liquid from the container, wherein one of the openings 119 of the conduit 118 is submerged in the liquid 125 and is disposed proximate the bottom wall 112 of the container 110. When the pressurized gas 120 is supplied into the vessel 110, the gas pressure is provided to move the gas to a gradient in the liquid 125 according to the following equation (1): (1) t = x ² / (2D) , where t For time (in seconds), x is the distance (in centimeters) and D is the diffusion coefficient (in square centimeters per second (cm ² /sec)). The Stokes-Einstein equation can be used (when the diameter of the colloidal particles is larger than the diameter of the fluid, it is strictly applicable to colloidal particles in the fluid, but also used as a predictor for small molecules in a liquid One of the diffusion equations in the model equation provides the same magnitude of the diffusion coefficient as the experimentally measured diffusion coefficient to obtain an estimate of the diffusion coefficient; the equation (2) is listed below: (2) D = ( kT ) /( 3 π μ d ), where k is the Boltzmann constant, T is the absolute temperature, d is the diameter of the diffused molecule, and μ is the viscosity of the suspended fluid. Since the extent to which the gas diffuses into the liquid at any particular time depends on the distance, there is one stratification of the gas concentration in the liquid adjacent to the gas/liquid interface 123; such a layer is schematically illustrated as having a different gas concentration therein. In the form of liquid sub-layers 125A, 125B, 125C, a higher gas concentration is closest to the gas/liquid interface 123, and as the distance from the gas/liquid interface 123 increases, the gas concentration decreases. Since the liquid 125 is withdrawn from the container via a conduit opening 119 located adjacent the bottom wall 112 of the container 110, the concentration of gas continues to rise near and beyond the gas-liquid interface 123 and may reach a saturation value unless liquid The distribution from the container 110 is very rapid.

In a typical application, the rate of liquid distribution depends on a fluid utilization system. Cheng's needs. In certain embodiments, a floatable separator and material extraction hose, as disclosed herein, can be used to remove a pressure dispensing container from a pressure dispensing gas that is in direct contact with the liquid to be dispensed. The liquid or liquid-containing material is such that the level of the liquid or liquid-containing material in the container drops more rapidly than the rate at which the pressurized gas in the liquid or liquid-containing material is otherwise saturated.

In some embodiments, a rigid (or substantially rigid) collapsible or collapsible container can be used, and the container can have no liner and be used to receive direct contact with liquid or liquid-containing material within the container. Pressurized gas. As used herein, the term "rigid" or "substantially rigid" is intended to also encompass an object or material that retains its shape and/or volume substantially in a first pressure environment. However, the shape and/or volume may be changed in an environment where the pressure is increased or decreased. The amount of pressure increase or decrease required to change the shape and/or volume of an object or material may depend on the desired application of the material or object and may vary from application to application. In one embodiment, a rigid or substantially rigid collapsible or collapsible container may be made of a material having a sufficient thickness and composition to self-support the container when filled with liquid. A rigid or substantially rigid collapsible container may have single or multi-wall features and comprise a polymeric material. Laminated composites formed from a multilayer polymeric material and/or other materials (e.g., laminated by application of heat and/or pressure) may be used. A rigid or substantially rigid collapsible container can be formed by any one or more suitable steps including molding, molding, lamination, extrusion, and welding steps. A rigid or substantially rigid collapsible container can comprise a substantially rigid opening or weir that is integrally formed with the container.

For semiconductor manufacturing applications, the liquid or liquid containing material contained in one of the pressure dispensing containers disclosed herein should have a particle size of 0.20 microns or greater at the fill point of the liner of less than 75 particles per milliliter; In certain embodiments, less than 50 particles per milliliter; In certain embodiments, less than 35 particles per milliliter; and in certain embodiments, less than 20 particles per milliliter. The container liquid should have a total organic carbon (TOC) of less than 30 parts per billion (ppb); in some embodiments, less than 15 parts per billion of total organic carbon. Various embodiments propose a metal extractable level of less than 10 parts per trillion for each critical element (eg, calcium, cobalt, copper, chromium, iron, molybdenum, manganese, sodium, nickel, and tungsten). Extractable level) and having less than 150 parts per billion of iron and copper extractable levels for each element of hydrogen fluoride, hydrogen peroxide, and ammonium hydroxide contained in the liner, in line with the Semiconductor Industry Association, the international semiconductor technology development route Figure (Semiconductor Industry Association, International Technology Roadmap for Semiconductors; SIA, ITRS) 1999 version of the specifications.

The disclosed containers, devices, and systems can be used to store and dispense chemical agents and compositions having a wide variety of characteristics. Although the embodiments are set forth below primarily with reference to the storage and distribution of liquid or liquid containing compositions for the manufacture of microelectronic device products, it should be understood that the use of such embodiments is not limited thereto but extends to and encompasses Various other applications and materials. For example, such liquid containment systems are used in many other applications where liquid media or liquid materials require packaging, including but not limited to medical and pharmaceutical products, construction and construction materials, food and beverage products, biological materials, radioactive materials. , nanomaterials, fossil fuels and oils, agrochemicals, materials used in manufacturing and / or industrial production processes, biopharmaceuticals, solar energy, paints, and automobiles.

The term "microelectronic device" as used herein refers to a semiconductor substrate, a flat panel display, a thin film recording head, a microelectromechanical system, an LED substrate, and other advanced microelectronic components. The microelectronic device can comprise a patterned germanium wafer, a flat panel display substrate, a polymer substrate, or a microporous/hollow inorganic solid.

In one embodiment, a liquid dispensing device is configured to extract a liquid or liquid-containing material from a pressure dispensing container for receiving pressurized gas in direct contact with the liquid or liquid-containing material, the device comprising a separator configured to float on the liquid or liquid-containing material inside one of the containers and define at least one liquid extraction opening located in an upper water level of one of the liquid or liquid-containing material in the container And a material extraction hose coupled between the separator and one of the outlet ports of the container and configured to deliver liquid or liquid-containing material received from the at least one liquid extraction opening to the outlet port.

A separator may comprise any suitable shape or configuration that allows a separator to float on a surface of a liquid or liquid-containing material in a container such that the separator can follow the liquid level in a container as it passes through the separator The liquid is removed (distributed) to cause a downward displacement. In certain embodiments, a separator and associated material extraction hose are configured for opening through a container (eg, a container outlet port, the container outlet port being disposed along one of the container walls) And removably inserted into the container. In some embodiments, a material extraction hose is disposed between a separator and a container closure member, the container closure member being configured to be adjacent to a container opening (eg, a container outlet port and/or container port) Removably engage (eg, manually engage) to a container. In some embodiments, a container opening can include a male threaded surface, and a container closure member can include a female threaded surface configured to engage a neck or mouth of a container. In an alternate embodiment, a container opening can include a female threaded surface, and a container closure member can include a male threaded surface configured to engage the container neck or mouth.

In certain embodiments, a separator is sized and shaped to substantially conform to a bottom surface of one of the containers of the separator to enhance removal of liquid or liquid-containing material from a container. In some embodiments, the bottom of one of the separators can be substantially flat (eg, horizontally matched) And a bottom wall of one of the containers containing the separator includes a bottom wall that is also substantially flat and configured to receive one of the bottom surfaces of the separator. In some embodiments, one of the bottoms of one of the containers may include a rounded surface, and one of the bottoms of one of the separators may include a circular portion sized and shaped to conform to the bottom of the corresponding container. . In some embodiments, one of the bottoms of a container can include a liquid collection portion (eg, a portion of the width or cross-sectional area reduced relative to one of the body portions of the container), and at least a portion of a separator can be It is configured to fit in the liquid collecting portion. In some embodiments, one of the bottoms of a container (or a liquid collection portion thereof) can comprise a tapered or frustoconical shape (ie, a truncated cone), and at least a portion of a separator can comprise a Corresponding to a tapered or frustoconical shape, the corresponding tapered or frustoconical shape is configured to fit over or against the bottom of the container.

In certain embodiments, a separator can comprise one or more materials. In some embodiments, the lower portion of one of the separators comprises a larger density material than the upper portion of the separator (wherein the configuration preferably operates in a manner similar to a keel) to enable the separation The device maintains a desired (eg, upright) tendency to float on a liquid or liquid containing material. In certain embodiments, at least the surface of the separator that contacts the liquid can comprise one or more constituent materials that are the same as the container in which the separator is housed. Desirable materials of a separator configured to contact the surface of a liquid include, but are not limited to, polymers (eg, polyethylene, polypropylene, polyether ether ketone (PEEK), etc.) and fluorinated polymers (for example, polytetrafluoroethylene).

In some embodiments, a floatable separator includes at least one or more liquid extraction openings that are submerged below a water level of one of the liquid or liquid-containing material in a container. In certain embodiments, at least one liquid extraction opening (or at least a portion thereof) is disposed within 3 millimeters of the water level above the liquid or liquid containing material in the container. In some embodiments, a separator includes at least one first immersed liquid extraction opening disposed at a first vertical level and includes at least one of being disposed at a second vertical level The second is immersed in the liquid extraction opening, the second vertical level being below the first vertical level. In some embodiments, the at least one second liquid extraction opening includes one of a diameter or a cross-sectional area that is less than a diameter or a cross-sectional area of the at least one first liquid extraction opening.

In some embodiments, a separator can include at least one channel or recess defined in one of the upper surfaces of the separator, wherein the lower boundary of one of the at least one channel or groove is configured to be located within the container The liquid or liquid material is below an upper water level and the at least one extraction opening is configured to receive a liquid or liquid-containing material from the at least one channel or groove. In some embodiments, a separator includes a second liquid extraction opening defined in one of a lower surface or a side surface of the separator, the second liquid extraction opening being disposed below a vertical level of the first liquid extraction opening One of the vertical levels, and/or one of the cross-sectional areas is smaller than the cross-sectional area of one of the first liquid extraction openings.

In certain embodiments, a separator can define or include an internal sump configured to receive a liquid or liquid-containing material from at least one liquid extraction opening defined in the separator, and The material extraction hose (or an extension thereof) can be configured to draw liquid or liquid-containing material from the inner sump (in some embodiments, from a lower portion of the inner sump). In some embodiments, a separator can include an upper liquid extraction opening configured to supply a liquid or liquid-containing material to the inner sump and can include a lower liquid extraction opening, the lower liquid The extraction opening is configured to supply a liquid or liquid-containing material to the inner sump, wherein the lower liquid extraction opening has a cross-sectional area smaller than the upper liquid extraction opening, and the lower liquid extraction opening is disposed in the upper liquid Extract one of the vertical levels below one of the vertical levels.

In certain embodiments, a material extraction hose can be flexible or removable to allow a reliable fluid connection between the separator and one of the outlet ports of the container, although one is required. The floating separator changes the position (e.g., height) within the container as the level of liquid in the container with the separator drops. In certain embodiments, a material extraction hose usefully includes a flexible self-coiling hose. In certain embodiments, at least the liquid contacting surface of the material extraction hose can comprise one or more of the constituent materials as the container in which the hose is received. Preferred materials for use in a material extraction hose configured to contact a liquid surface include, but are not limited to, polymers (eg, polyethylene, polypropylene, polyetheretherketone (PEEK), etc.) and fluorinated polymers. (for example, polytetrafluoroethylene). In certain embodiments, a material extraction hose may be reinforced with fibers, wires, and/or other materials to promote strength and/or durability enhancement.

In certain embodiments, a container closure member is configured to be removably attached to the container adjacent an outlet port, and the container closure member is configured to permit passage of liquid or liquid containing material received from the material extraction hose . A container closure member can include a threaded surface configured to engage a corresponding threaded surface along or adjacent a container outlet weir. Any of various types of removal connectors (which can be manually removed) can be disposed between a container closure member and a corresponding container. In certain embodiments, a container closure member can include its connector for pressurized gas, for a material extraction hose, and for a pressure relief valve (or configured to a gas gasket that is in fluid communication with the pressure relief valve). In certain embodiments, a container closure member can have a support rod associated therewith, a retractable tether, and/or another for providing a mechanism between the container closure member and the separator. The mechanical element to be connected (the auxiliary element of the material extraction hose) may, for example, facilitate removal of the separator without applying excessive stress to the material extraction hose. In certain embodiments, a retractable tether can be implemented as a wire or flexible wire (similar to a fishing line) and can be coupled to a telescoping mechanism (eg, a spool that can be wound (eg, a spool) Spool) or reel to enable the tether to be selectively elongated or shortened. Shorten a line when removing a separator from a container Ropes (i.e., shortening to a length shorter than one of the material hoses) may be advantageous to avoid applying excessive stress to a material extraction hose.

In some embodiments, a material dispensing device includes a rigid vertical support member (eg, a rod) suspended within the container, and a separator is configured to be vertically displaced along the vertical support member. In some embodiments, a separator includes a vertically aligned opening or opening configured to receive the vertical support member, wherein the vertically aligned opening and the vertical support received therein The mutual fit between the rods allows for vertical displacement of the separator and at the same time limits lateral displacement of the separator relative to the container. In certain embodiments, a container closure element is configured to be removably attached to the container adjacent one of the outlet ports of the container, and a vertical support rod is attached to the container closure element.

In certain embodiments, a material dispensing device comprises a separator, a material extraction hose, and a container closure member, all of which are disclosed herein, wherein the device is configured for use with a first container until The contents of the first container are depleted and such a device can then be removed from the first container and subsequently used with a second container to continue dispensing liquid or liquid containing material. In some embodiments, a container outlet port, a separator, and a material extraction hose are sized and shaped to allow the separator and the material extraction hose to be inserted into one of the containers via the outlet port and This internal removal of the container, in turn, causes the material dispensing device to be reused with the plurality of containers. In certain embodiments, a material dispensing device can include at least one support element (eg, a support bar and/or a retractable tether), at least one sensor, and/or any other feature as disclosed herein or element.

In some embodiments, one or more sensors and/or sensor-responsive elements can be configured in or along a splitter and configured in one of the containers Configuring in or along the corresponding portion (eg, along the bottom wall of a container and/or Or the container side wall configuration) to sense the level of the separator as a proxy for determining the liquid level (or determining whether the liquid or liquid containing material of the container is depleted or nearly exhausted). In some embodiments, at least one of a magnet or a magnetically responsive material can be disposed in or on a lower surface or side surface of a separator, and a corresponding magnetically responsive or magnetic material can be disposed in a container Between one of the lower wall surfaces or the side wall surface or along the lower wall surface or the side wall surface, the crucible can sense the proximity of the separator to the bottom wall of the container, thereby sensing a magnetic material and a magnetic property close to each other The interaction of the responsive materials produces an output signal indicative of the depletion or near depletion of the liquid or liquid containing material of the container. Other types of sensors and/or interactive materials or devices can be provided at one or more locations for determining when a separator is near a lower wall surface or a sidewall surface of a container (eg, a floating device or an ultrasound A detector) to help determine if a liquid or liquid containing material in a container is depleted or nearly exhausted.

In certain embodiments, a pressurizable reservoir can be configured to receive a liquid or liquid-containing material from a pressure dispensing container, as disclosed herein, the pressure dispensing container comprising a separator and a material extraction hose, wherein The pressurizable reservoir is configured to supply a liquid or liquid containing material to a downstream liquid utilization process or process tool. In certain embodiments, one of the pressurizable reservoirs containing the liquid or liquid-containing material is configured to be pressurized (eg, using a pressurized gas, a piston, or any suitable pressurized element) to above pressure The pressure of the container is dispensed to thereby increase the pressure of the liquid or liquid containing material to be received by the downstream process or process tool. Thus, a pressurizable reservoir can be used in a manner similar to a delivery pump to increase the pressure of a liquid or liquid containing material. In certain embodiments, the volume of a pressurizable reservoir is substantially less than the volume of the upstream pressure dispensing container. One of the advantages of using one of the larger volume pressure dispensing containers and the point of use (e.g., a process tool) to pressurize the reservoir is that it avoids the need to operate a larger volume of pressure dispensing container at high pressure. Since the force on the wall of the container can be calculated as the product of pressure and area, it is possible to operate the container with a large volume of pressure at a low pressure. Low requirements for the wall thickness of the material of this container. In addition, when a smaller volume of the pressurizable reservoir is disposed between a larger volume of the pressure dispensing container and a point of use, the pressurized gas and the liquid or liquid material in the pressurizable reservoir can be shortened. The contact time, in turn, limits the chance of gas being dissolved into the reservoir or liquid containing material. Thus, a separator may not be required in a small volume of pressurized reservoir (although a separator may be used in this case in certain embodiments). In some embodiments, a volume ratio of a compressible reservoir to a volume of a corresponding pressure dispensing container can be less than about one-quarter (as disclosed herein), the corresponding pressure dispensing container being disposed in the storage Upstream of the device and in a fluid-donating relationship with the reservoir. In certain embodiments, the volume ratio is less than about one-eighth; in some embodiments, the volume ratio is less than about one-twelfth; in some embodiments, the volume ratio is less than about one-sixteenth; And in certain embodiments, the volume ratio is less than about one-twentieth. In certain embodiments, a pressurizable reservoir can be pressurized to a pressure ratio that is at least twice the pressure level within a pressure dispensing container (as disclosed herein), the pressure dispensing container Located upstream of the reservoir and in fluid relationship with the reservoir. In certain embodiments, the pressure ratio is at least four; in certain embodiments, the pressure ratio is at least eight; in certain embodiments, the pressure ratio is at least 12; and in certain embodiments, the pressure ratio is At least 20. For these embodiments, the pressure ratio does not exceed 25.

In some embodiments, a fluid processing method includes: providing a first pressure dispensing container defining an interior and having a separator, and inserting at least a portion of a material extraction hose into the interior, The first pressure dispensing container houses a liquid or liquid containing material, the separator being configured to float on the liquid or liquid containing material within the first pressure dispensing container and define at least one liquid extraction opening, the at least one liquid extraction The opening is located below an upper water level of one of the liquid or liquid containing material in the container, the material extraction hose being coupled between the separator and one of the outlet ports of the container and configured to receive from the at least one liquid extraction opening Delivering a liquid or liquid-containing material to the outlet port; supplying pressurized gas to the first pressure point The interior of the container is configured to contact the liquid or liquid-containing material; and the liquid is drawn from the interior of the first pressure dispensing container via the at least one liquid extraction opening and the material extraction hose. In certain embodiments, the method can further include attaching a container closure member to the container adjacent the outlet, wherein the container closure member is configured to permit liquid or containment from the material extraction hose The liquid material passes.

In some embodiments, a fluid processing method as disclosed herein may include: detecting a state in which a liquid or a liquid-containing material of the first pressure dispensing container is depleted or nearly depleted, and in response to the detecting And terminating the internal extraction liquid from the first pressure distribution container. In some embodiments, the detecting a step of indicating that the liquid or liquid-containing material of the first pressure dispensing container is depleted or nearly depleted may include: detecting a signal indicating that the separator is in proximity to or in contact with the pressure distribution The state of the bottom or bottom of one of the containers.

In some embodiments, a fluid processing method as disclosed herein can include: removing a separator and a material extraction hose from a first pressure dispensing container; inserting the separator and the material extraction hose into the housing a second pressure dispensing container in one of a liquid or a liquid-containing material; supplying pressurized gas to the interior of the second pressure dispensing container to contact a liquid or liquid-containing material contained therein; and through the at least one liquid extraction opening and the A material extraction hose draws liquid from the interior of the second pressure dispensing container.

In certain embodiments, a fluid processing method as disclosed herein can include delivering a liquid or liquid-containing material received from the first pressure dispensing container to a process tool, the process tool being configured to utilize the liquid or Contains liquid materials. In some embodiments, the process tool can include a semiconductor or microelectronic device fabrication tool. In some embodiments, a method as disclosed herein may further comprise: fabricating at least a portion of a semiconductor or microelectronic device using a semiconductor or microelectronic device fabrication tool.

In some embodiments, a method for dispensing a liquid or liquid-containing material can utilize a pressure dispensing container for receiving pressurized gas in direct contact with the liquid or liquid-containing material, and the method can include The following steps: comparing a desired volumetric dispensing rate of a liquid or a liquid-containing material to a value indicating a rate at which a pressurized gas diffuses into the liquid or liquid-containing material or is derived from the rate And selecting the pressure dispensing container, the pressure dispensing container having a cross-sectional area sized to permit immersion of at least one of the separators within the container from a liquid/gas interface using a floatable separator The extraction opening draws a liquid or liquid-containing material such that the level of the liquid or liquid-containing material in the container drops at a rate that is more variable than the pressurized gas in the liquid or liquid-containing material by other means of variable saturation. In some embodiments, a method can further include: supplying a pressurized gas to the pressure dispensing container, and via (i) the at least one extraction opening of the separator in the container adjacent to the liquid/gas interface, and ( Ii) a material extraction hose coupled between the separator and one of the outlets of the container for withdrawing liquid or liquid-containing material from the container such that the liquid level of the liquid or liquid-containing material in the container is greater than the liquid or The pressurized gas in the liquid material drops at a rate that is variable in saturation by other means.

Further details of the example embodiments are set forth below in conjunction with the drawings.

Referring to Fig. 2, a material delivery system 200 is illustrated in an embodiment of the invention comprising a direct contact pressure dispensing container 210, the direct contact pressure dispensing container 210 including a separator 250, the separator 250 being configured to be in the container 210 floats on liquid 225. The separator 250 can include at least one liquid extraction opening 255, the at least one liquid extraction opening 255 being located below an upper water level (i.e., a gas/liquid interface 223) of the liquid in the container 210, wherein a material extraction hose 268 is coupled to the separation The device 250 is interposed between one of the outlets 216 (defined by the container neck 215) of the container 210. The container 210 includes an upper wall 221, a lower wall 222, at least one side wall 213, and A liquid collecting portion 214 having a reduced width near one of the lower walls 222. The container 210 can be implemented as a rigid collapsible or rigid collapsible container. The separator 250 includes an upper surface 251 that can be disposed above the gas/liquid interface 223, and a lower surface 252 that is disposed below the gas/liquid interface 223, wherein the at least one liquid extraction opening 255 is submerged in the gas/liquid Interface 223 or less. A container closure member 270 is removably coupled to the neck 215 of the container 210. The container closure element 270 is configured to allow liquid or liquid-containing material from the container 210 to pass through the material extraction hose 268, configured to allow pressurized gas (supplied by the pressurized gas source 281) to enter the container via a pressurized gas line 282. 210, and configured to allow pressurized gas to be expelled from the vessel 210 via a vent line 284 coupled to a pressure relief valve 285 and an optional overpressure vent 285A.

With continued reference to FIG. 2, the container 210 can have at least one sensor 286 associated therewith, at least one sensor 286 configured to sense the proximity of the separator 250; the at least one sensor 286 can be positioned to The liquid collecting portion 214 is adjacent to the lower wall 222. Alternatively, or in addition, the container 210 can be configured on a day 288 that is configured to sense the weight of the container 210 and the liquid 225 contained therein. Alternatively, or in addition, the material extraction hose 268 can be in fluid communication with the downstream empty state detection sensor 292. The downstream empty state detection sensor 292 can be implemented as a first bubble detector, capacitive sensing. , or other sensors. The at least one sensor 286, the balance 288, and/or the downstream sensor 292 can be utilized to detect at least one condition indicating that the liquid or liquid-containing material 225 in the container 210 is depleted or nearly depleted. When such a condition is detected, liquid dispensing can be terminated and a pressure dispensing device (e.g., including container closure member 270, material extraction hose 268, and separator 250) can be removed from container 210 and can be attached Another container (not shown) is used to continue dispensing the liquid or liquid-containing material to a downstream liquid utilization process 296.

In operation, gas may be supplied from a pressurized gas source 281 via pressurized gas line 282 and vessel closure element 270 to one of the vessels 210 for direct contact with the liquid contained therein. Body or liquid containing material 225. This gas 220 increases the pressure of the liquid or liquid-containing material 225 in the vessel 210 and forces the liquid or liquid-containing material 225 through the at least one liquid extraction opening 255 of the separator 250 into the material extraction hose 268 (which extends through the outlet) 216 and container closure element 270) to exit container 210. In certain embodiments, the liquid or liquid-containing material can be dispensed via a valve 290 to a reservoir 294, which can be implemented as a pressurizable reservoir configured to increase the liquid or The pressure of the liquid-containing material, and/or can be implemented as a dischargeable reservoir to facilitate removal of the gas entrained in the liquid or liquid-containing material received from the vessel 210. The operation of the various components of material distribution system 200 can be controlled by a controller 299.

Referring to Figure 3, a separator 350 is illustrated in one embodiment of the invention. The separator 350 includes an upper surface 351, a lower end 352, a sidewall surface 354, and an inclined lower wall surface 353 that is not perpendicular to the sidewall surface 354. The separator 350 can also include an upper portion 357 that includes a different material than the lower portion 358, wherein the lower portion 358 optionally contains a higher density material to cause the separator 350 to float in a container of liquid or liquid containing material. A desired (e.g., upright) tendency is maintained while the separator is configured to cause the liquid extraction openings 355A, 355B to be submerged below the upper water level of one of the liquid or liquid containing material when performing the dispensing operation. As shown in FIG. 3, the liquid extraction openings 355A, 355B are disposed along one of the sidewall surfaces 354 of the separator 350 and are in fluid communication with a horizontally disposed internal passage 356. The liquid extraction openings 355A, 355B are in fluid communication with a vertical channel 365 for delivering liquid or liquid containing material to a material extraction hose 368.

Referring to Figure 4, a separator 450 is illustrated in one embodiment of the invention. The separator 450 includes an upper surface 451, a lower end 452, a sidewall surface 454, and an inclined lower wall surface 453 that is not perpendicular to the sidewall surface 454. The separator 450 can maintain a desired (eg, upright) tendency when floating on a liquid or liquid containing material in a container, wherein The separator 450 is configured to cause the liquid draw 455A, 455B to be submerged below the upper level of the liquid or liquid containing material when performing the dispensing operation. As depicted in FIG. 4, the liquid extraction openings 455A, 455B are disposed along the inclined lower wall surface 453 of the separator 450 and allow liquid to enter the inclined channels 456A, 456B in fluid communication with a vertical passage 465 which will liquid or The liquid containing material is delivered to a material extraction hose 468. The separator 450 further includes a weight and/or magnet or magnetically responsive material 487 disposed adjacent the lower end 452. If the element 487 is implemented as a magnet or a magnetically responsive material, the element 487 can be configured to interact with a corresponding magnetically responsive material or magnet that is configured to be adjacent to one for containment At least one wall of the container of the vessel 450 senses the proximity and/or position of the floatable separator 450, which can be used to determine when the liquid or liquid containing material of the container is depleted or nearly exhausted.

Referring to Figure 5, a separator 550 is illustrated in an embodiment of the invention. The separator 550 includes an upper surface 551, a lower end 552, a sidewall surface 554, and an inclined lower wall surface 553 that is not perpendicular to the sidewall surface 554. The separator 550 can also include an upper portion 557 that includes a different material than the lower portion 558, wherein the lower portion optionally contains a higher density material to cause the separator 550 to float on a liquid or liquid containing material within a container. A desired (e.g., upright) tendency is maintained wherein the separator 550 is configured to cause the liquid extraction openings 555A, 555B, 559 to be submerged below the upper level of the liquid or liquid containing material when performing the dispensing operation. As depicted in FIG. 5, the primary liquid extraction openings 555A, 555B are disposed adjacent one of the interface between the sidewall surface 554 and the sloped lower wall surface 553 and permit liquid to enter at least one passage in fluid communication with an internal header 561. . The internal sump 561 is also configured to receive liquid from at least one auxiliary liquid extraction opening 559 that is disposed at a vertical level that is lower than one of the primary liquid extraction outlets 555A-555B Vertical level. The second auxiliary liquid extraction opening may define a cross-sectional area that is less than one of the primary liquid extraction openings 555A-555B to ensure that a majority of the liquid or liquid-containing material is closer to a gas/liquid in the container The location of the body interface is extracted from the container while the presence of the auxiliary liquid extraction opening also allows for the removal of a greater amount of liquid or liquid containing material from a container (and thereby reducing non-recyclable residual waste at the end of material dispensing). A lower end 567 of one of the material extraction hoses 568 (or an extension of one of the material extraction hoses) can be configured to draw liquid or liquid-containing material from a lower portion of the sump portion 561.

Referring to Figure 6, a liquid dispensing device 605 is illustrated in an embodiment of the invention. The liquid dispensing device 605 includes a separator 650, a material extraction hose 668, and a container closure member 670 that is configured to be removably attached adjacent an outlet port (not shown) To a container. The separator 650 can also include an upper surface 651, a lower end 652, a sidewall surface 654, and a sloped lower wall surface 653 that is not perpendicular to the sidewall surface 654. The liquid extraction openings 655A-655B are disposed along one of the side walls 654 of the separator 650 and are in fluid communication with a horizontally disposed internal passage 656 that leads to a material extraction hose 668 (or it is within the separator 650) One extension). The container closure member 670 includes an upper surface 671 extending through the upper surface 671, ie, a material extraction hose 668, a pressurized gas inlet port 682 (configured to be in fluid communication with a source of pressurized gas), and A pressure relief outlet 684 (configured to be in fluid communication with a pressure relief valve). The container closure member 670 includes a threaded surface 672 (e.g., a female threaded surface) to permit the container closure member 670 to removably engage one of the container necks (not shown) corresponding to the threaded surface. The container closure member further includes a plug or other removable member 644, a retractable tether 643 extending through the plug or other removable member 644, wherein the tether 643 is secured to the separator 650 and Coupled to a telescoping member 645, the telescoping member 645 can include a spool or spool. In certain embodiments, the tether 643 can be selectively shortened (ie, shortened to less than one length of a material extraction hose) with the telescoping member 645 to prepare the separator 650 to be removed from a container, thereby Avoid applying excessive stress to the material extraction hose 668. Device 605 is configured for use with a first pressure dispensing container until its contents are depleted and then transferred to a second pressure dispensing container for continued dispensing of liquid or liquid containing material.

Referring to Figure 7, a liquid dispensing device 705 is illustrated in an embodiment of the invention. The liquid dispensing device 705 includes a container closure member 771 configured to be removably attached to a container adjacent an outlet thereof; a vertically disposed support rod 740 suspended from the container closure member 771 (along the rod An upper end 741 of the 740; a material extraction hose 768; and a separator 750 configured to travel along the support rod 741. The separator 750 can include a plurality of liquid extraction openings 755, 759 of different sizes, the liquid extraction openings 755, 759 configured to supply liquid to an internal header 761 configured to receive the material extraction hose 768 One of the lower ends 767 or an extension thereof. The separator 750 can also include an upper surface 751, a lower end 752, a sidewall surface 754, and an opening 763 through which the support rod 741 extends. The interaction between the vertically aligned opening 763 and the vertical support bar 740 received therein permits vertical translation of the separator 750 within a container while simultaneously limiting lateral translation of the separator 750 relative to the container and also allows for separation. The 750 is rigidly supported during removal from one container and inserted into another container without applying excessive stress to the (flexible) material extraction hose 768. One of the bottom surfaces 752 of the separator 750 defines a recess 752A that is configured to receive a widened travel stop end portion 742 of one of the support rods 740. A primary liquid extraction opening 755 is defined in one of the side walls 754 of the separator 750 and is configured to supply a liquid or liquid containing material into the sump 761. An auxiliary liquid extraction opening 759 is also configured to supply a liquid or liquid-containing material to the sump portion 761, the auxiliary liquid extraction opening 759 being disposed at a level below a vertical level of the main extraction opening 759 and including a primary extraction opening 759 is the small cross-sectional area. The (larger and higher) primary liquid extraction opening 755 ensures that most of the liquid or liquid-containing material is withdrawn from the container at a location in the container closer to a gas/liquid interface, with (smaller or lower) assistance The presence of the liquid extraction opening also allows for the removal of a greater amount of liquid or liquid-containing material from the vicinity of the bottom of a container (and thereby reducing non-recyclable residual waste at the end of material dispensing). A lower end 767 of one of the material extraction hoses 768 (or an extension of one of the hoses 768) is configured to draw liquid or liquid-containing material from a lower portion of the inner collection portion 761. Device The 705 is configured for use with a first pressure dispensing container until its contents are depleted, and then transferred to a second pressure dispensing container to continue dispensing liquid or liquid containing material.

Referring to Figures 8A through 8D, a liquid dispensing device 805 is illustrated in an embodiment of the invention. The liquid dispensing device 805 includes a container closure member 870 configured to be removably attached to a container adjacent an outlet port (not shown); a vertically disposed support rod 840 from the container closure member 870 is suspended; a material extraction hose 868; and a separator 850 configured to travel along the support rod 840. 8B to 8D illustrate portions of the support rod 840 and the material extraction hose 868 shown in Fig. 8A, and Fig. 8B provides an upper perspective view of one of the separators 850, and Fig. 8C provides a perspective view of one of the separators 850. FIG. 8D provides a lower perspective view of one of the separators 850.

The separator 850 includes an upper surface 851, a lower end 852, a side wall surface 854, and an opening 863 through which the support rod 840 extends. The interaction between the vertically aligned apertures 863 and the vertical support bars 840 received therein allows for vertical displacement of the separator 850 within a container while simultaneously limiting lateral translation of the separator 850 relative to the container, and also permits the separator The 850 is rigidly supported during removal from one container and inserted into another container without applying excessive stress to the (flexible) material extraction hose 868. The travel of the separator 850 along the support rod 840 can be limited by the travel stop lower end 842 which is widened by one of the rods 840. The separator 850 includes a plurality of upper (primary) liquid extraction openings 855 including channels or slots defined in the upper surface 851; and a smaller (auxiliary) liquid extraction opening 859, wherein the openings 855, 859 are configured to The liquid is supplied to an internal sump 861 that is configured to receive a material extraction hose 868 (or one of the hose 868 extensions 866, a material extraction hose 868 (or one of the hose 868 extensions 866) A fitting 866 can be included that is secured to the separator 850. (Although four channels or slots are shown in the upper surface 851, it should be understood that any suitable number of one or more channels or slots can be provided.) One of the lower ends 867 of the material extraction hose 868 or the extension 866 is disposed under one of the internal collecting portions 861 Used to extract liquid or liquid-containing materials. The separator 850 can float on a liquid or liquid-containing material in such a manner that each lower liquid extraction opening or a lower portion of the slot 855 is disposed in a gas/liquid interface 823 (ie, the uppermost water level of the liquid or liquid-containing material). the following. Although the liquid dispensing device 805 is illustrated with the separator 850 in a lowermost position relative to the support rod 840, it should be understood that the separator 850 can be vertically translated along the support rod 840 to float along a gas/liquid interface 823, causing the separator to The vertical position of the 850 varies following the vertical water level of the liquid or liquid containing material in the container (not shown) into which the separator 850 is inserted.

In operation of the liquid dispensing device 805, the separator 850 is configured to float on a liquid or liquid containing material in a container with a gas/liquid interface 823 located above one of the bottom surfaces of the upper liquid extraction opening 855. When a pressurized gas is supplied to the container to pressurize the liquid or liquid-containing material, such material is withdrawn from the container via the sump 861 and the material extraction hose 868, and the material extraction hose 868 extends through the container closure member 870. To flow to a point of use. When the liquid or liquid-containing material of the container is sufficiently depleted to lower the liquid level below the upper liquid extraction opening 855, the liquid continues to flow through the lower liquid extraction opening 859 and into the sump 861 to be drawn through the material extraction hose. It is withdrawn until the liquid level in the container drops below the bottom of the sump 861. Device 805 can be removed from the pressure dispensing container and then transferred to a second pressure dispensing container to continue dispensing liquid or liquid containing material.

Referring to Figure 9, a material dispensing system 907 is illustrated in one embodiment of the invention. The material dispensing system 907 includes a separator 950 disposed in a direct contact pressure dispensing container 910 and including a pressurizable reservoir 994, the pressurizable reservoir 994 being disposed in the container 910 and a Use point 996 (for example, a process tool). The separator 950 includes at least one liquid extraction opening 955 that is located below one of the upper water levels of the liquid in the container 910 (ie, a gas/liquid interface 923) and a material extraction hose 968 coupled Between the separator 950 and one of the outlet ports 916 (defined by the container neck 915) 916 of the container 910, the outlet port 916 is disposed along one of the top walls 911 of the container 910. The separator 950 includes an upper surface 951 that can be disposed above the gas/liquid interface 923 and a lower surface 952 that is disposed below the gas/liquid interface 923, wherein the at least one liquid extraction opening 955 is submerged Below the gas/liquid interface 923. A container closure element 970 is removably coupled to the neck 915 of the container 910. The container closure element 970 is configured to allow liquid or liquid-containing material from the container 910 to pass through the material extraction hose 968, allowing pressurized gas 920 to enter the container 910 from a pressurized gas source 981 via line 982, and may also allow Pressurized gas is discharged from the vessel 910 via a pressure relief valve and/or drain 986. At least one valve V1 can be disposed between the pressurized gas source 981 and the container 910. In one embodiment, a sump 914 can be disposed along a lower wall 922 of the container 910, wherein the sump 914 is compatible with the size and shape of the separator 950 to allow the separator 950 to be configured to be close to or against the collection. The bottom of one of the portions 914, thereby maximizing the removal of the liquid 925 from the container 910.

The liquid or liquid-containing material can be dispensed from the container 910 via a valve V2 to reach a pressurizable reservoir 994 disposed between the container 910 and a point of use (eg, process tool) 996. A liquid level 993 in the pressurizable reservoir 994 can be monitored by the high water level sensor 931 and the low water level sensor 932. The pressurizable reservoir 994 is selectively in fluid communication with a pressurized gas source 981A via a gas valve V4 and is selectively in fluid communication with a vacuum source 986A via a vacuum valve V5 as desired. The liquid can be delivered from reservoir 994 to a point of use 996 via a downstream valve V3. The interior of one of the pressurizable reservoirs 994 is configured to be pressurized to a pressure above the pressure dispensing container 910 to increase the liquid or liquid containing material 993 prior to supplying the liquid or liquid containing material to the point of use 996. pressure. Thus, reservoir 994 can operate as a delivery pump and can define a substantially smaller volume than the volume of upstream container 910.

In operation of system 907, pressurized gas 920 may be supplied from gas source 981 for The liquid 925 in the pressure distribution reservoir 910, in turn, pressurizes the liquid to cause the liquid to be drawn through the separator 950 and the material extraction hose 968. This liquid is delivered to reservoir 994 and a valve between reservoir 994 and container 910 can be closed. Pressurized gas may be supplied from gas source 981A to reservoir 994 to contact liquid 993, thereby increasing the pressure of the liquid and then supplying the liquid to point of use 996 via the valve. When the low water level sensor 932 senses a low liquid level in the reservoir 994, additional liquid is supplied from the pressure dispensing container 910 to the reservoir 994 to continue dispensing to the point of use 996. The gas source 986A can be used to remove gas from the reservoir 994 when the reservoir does not dispense liquid to the point of use 996. In some embodiments, additionally or alternatively, vacuum source 986A can be used to deliver (or facilitate delivery) liquid from container 910 to storage by establishing a pressure differential between container 910 and reservoir 994. The 994, in turn, is reduced in pressure to otherwise maintain the container 910 in order to achieve delivery of the liquid to the reservoir 994.

Embodiments disclosed herein may provide one or more of the following beneficial effects: reducing the dissolution of pressurized gas in the liquid to be dispensed; the ability to use rigid collapsible or rigid collapsible containers without the use of a collapsed liner; and the ability to reuse the liquid dispensing assembly with a plurality of containers.

Although the exemplified embodiments are disclosed herein, it is to be understood that the invention is not limited thereto, but extends to many other variations, modifications, and alternative implementations that are apparent to those of ordinary skill in the art to which the invention pertains. example. Any one or more of the features set forth in connection with one or more embodiments are contemplated to be combined with one or more features of any other embodiment, unless explicitly stated to the contrary. Therefore, the invention as set forth below is intended to be construed as being limited to the scope of the invention.

After reading this disclosure, various retouchings of various embodiments of the present invention are cooked It will be obvious to those skilled in the art. For example, it will be apparent to those skilled in the art that the various features described in the various embodiments may be combined, split, and recombined with other features, either individually or in various combinations. Also, the various features described above are to be considered as illustrative and not restrictive.

It will be apparent to those skilled in the art that the various embodiments may include fewer features than those illustrated in any of the various embodiments described above. The various embodiments described herein are not intended to be exhaustive of the description of the various features. Thus, it will be understood by those of ordinary skill in the art that the embodiments are not a combination of features that are mutually exclusive; rather, the scope of the present application may include a combination of different features selected from the various embodiments.

In addition to the expression definitions contained therein, the following is incorporated herein by reference: filed on October 10, 2011, entitled "Substantially rigid collapsible liners, containers and/or replacement glass bottles International Publication No. WO 2012/051093 by Substantially Rigid Collapsible Liner (Container and/or Liner for Replacing Glass Bottles, and Enhanced Flexible Liners); on March 15, 2013 U.S. Patent Application Publication No. 2014/0307042 A1, the entire disclosure of which is incorporated herein by reference. Any document incorporated herein by reference is not limited to the subject matter of the disclosure. Any of the above-referenced documents are hereby incorporated by reference in their entirety to the extent of the extent of the disclosure of the disclosures of Any document incorporated by reference in its entirety is limited to the extent that it is not expressly incorporated herein by reference.

References to the "embodiments", "disclosed content", "the invention", "the embodiments of the invention", "the disclosed embodiments" and similar terms used herein are not considered to be The specification of the patent application of the technology (the text 1 contains the scope of the patent application, and the drawings).

In order to explain the scope of the patent application, it is explicitly stated that the specific term "means for" or "step for" is not used unless the corresponding term is referred to in the corresponding claim. 35 USC 112(f).

200‧‧‧Material delivery system

210‧‧‧Direct contact with pressure distribution container

213‧‧‧ at least one side wall

214‧‧‧The liquid collection department with reduced width

215‧‧‧ container neck

216‧‧‧Export

220‧‧‧ gas

221‧‧‧上壁

222‧‧‧ Lower wall

223‧‧‧ gas/liquid interface

225‧‧‧Liquid

250‧‧‧Separator

251‧‧‧ upper surface

252‧‧‧ lower surface

255‧‧‧At least one liquid extraction opening

268‧‧‧material extraction hose

270‧‧‧ container closure

281‧‧‧ pressurized gas source

282‧‧‧ Pressurized gas pipeline

284‧‧‧Drainage line

285‧‧‧pressure relief valve

285A‧‧‧Optional overpressure drain hole

286‧‧‧At least one sensor

288‧‧‧ Balance

290‧‧‧ valve

292‧‧‧Downstream state detection sensor

294‧‧‧Storage

296‧‧‧Downstream liquid utilization process

299‧‧‧ Controller

Claims (38)

A liquid dispensing device configured to extract a liquid or liquid-containing material from a pressure dispensing container for receiving a pressurized gas in direct contact with the liquid or liquid-containing material, the device comprising: A skimmer configured to float on the liquid or liquid-containing material inside one of the containers and define at least one liquid extraction opening, the at least one liquid extraction opening being located in the liquid or liquid-containing material within the container An upper level below the upper level; and a material extraction hose coupled between the separator and one of the outlet ports of the container and configured to receive liquid or liquid from the at least one liquid extraction opening Material is delivered to the exit port. The apparatus of claim 1 wherein one of the lower portions of the separator comprises a higher density material than an upper portion of the separator. The device of claim 1 wherein the material extraction hose comprises a flexible self-coiling hose. The device of claim 1, wherein the at least one liquid extraction opening is disposed within the container within 3 millimeters of the upper water level of the liquid or liquid-containing material. The device of claim 1 further comprising a vertical support member suspended within the container, wherein the separator includes a vertically aligned opening or opening, the vertically aligned opening or opening configured to receive the The support member is configured to simultaneously permit vertical displacement of the separator and to limit lateral displacement of the separator relative to the container. The device of claim 5, further comprising a container closure member, the container closure member being configured Removably attached to the container proximate the exit port, wherein the vertical support member is attached to the container closure member, and wherein the container closure member is configured to permit receipt of liquid from the material extraction hose or The liquid containing material passes. The device of claim 1 wherein: the separator comprises at least one channel defined in an upper surface of the separator, wherein a lower boundary of the at least one channel is configured to be a liquid or a liquid within the container An upper portion of the liquid material below the water level; and the at least one liquid extraction opening includes a first liquid extraction opening configured to receive the liquid or liquid-containing material from the at least one channel. The device of claim 7, wherein the at least one liquid extraction opening comprises a second liquid extraction opening, the second liquid extraction opening (i) being defined in a lower surface or side of the separator, and (ii) It is disposed at a vertical water level that is lower than a vertical water level of the first liquid extraction opening. The device of claim 8, wherein the second liquid extraction opening has a cross-sectional area that is smaller than a cross-sectional area of the first liquid extraction opening. The device of claim 1, further comprising at least one of a magnet or a magnetically interactive material disposed in a lower surface or a side of the separator, or on the lower surface or the side surface . The device of claim 1 further comprising a container closure member configured to be removably attached to the container adjacent the outlet, wherein the container closure member is configured to permit the material The liquid or liquid-containing material received by the extraction hose passes. The device of claim 11, wherein the container closure member comprises at least one of the following features a: (i) the container closure member includes a threaded surface configured to mate with a threaded neck of the container, and (ii) the container closure member is configured to permit pressurized gas in the container The interior passes between a pressurized gas source or a vent. A pressure dispensing container comprising the liquid dispensing device of claim 1, wherein the pressure dispensing container is for receiving pressurized gas in direct contact with the liquid or liquid-containing material, and the pressure dispensing container comprises an outlet port, The outlet port is configured to receive liquid or liquid containing material from the material extraction hose. The pressure dispensing container of claim 13 which does not have a liner and is adapted to receive pressurized gas in direct contact with the liquid or liquid containing material in the container. The pressure dispensing container of claim 13 wherein the container comprises a rigid collapsible or rigid foldable container. The pressure distribution container of claim 13, wherein a bottom portion of the container comprises a sump region of reduced width, and a bottom of one of the separators is sized and shaped to substantially conform to the sump region A collection area with a reduced width. The pressure dispensing container of claim 13, wherein one of the bottoms of the container comprises a liquid collecting region having a tapered or frustoconical shape, and one of the bottoms of the separator comprises a tapered or frustoconical shape, and The bottom of the separator is configured to fit within the collection region. The pressure distribution container of claim 13, wherein the outlet port, the separator, and the material extraction hose are sized and shaped to allow the separator and the material extraction hose to be inserted into the container via the outlet port. An internal and internal removal from the container. A material delivery system comprising the pressure dispensing container of claim 13 and further comprising a pressurized reservoir configured to receive a liquid or liquid-containing material from the pressure dispensing container, wherein one of the pressurizable reservoir containing the liquid or liquid-containing material is internally configured to be pressurized Up to a pressure higher than one of the pressure distribution vessels. The material delivery system of claim 19, wherein the pressurizable reservoir is in fluid communication with a process tool configured to receive the liquid or liquid containing material. The device of claim 1, wherein: the separator defines an internal liquid collection portion; the at least one liquid extraction opening includes an upper liquid extraction opening configured to supply a liquid or liquid-containing material to the An inner sump portion; the at least one extraction opening includes a lower liquid extraction opening configured to supply a liquid or liquid-containing material to the inner sump portion, the lower liquid extraction opening being disposed at a vertical water level, The vertical water level is lower than a vertical water level of the upper liquid extraction opening; and the material extraction hose or an extension thereof is configured to draw liquid or liquid-containing material from a lower portion of the inner liquid collection portion. The device of claim 21, wherein the lower liquid extraction opening defines a cross-sectional area that is smaller than the upper liquid extraction opening. A fluid processing method comprising: providing a first pressure distribution container, the first pressure distribution container defining an interior and having a separator, and at least a portion of a material extraction hose inserted into the interior, the first pressure distribution container Containing a liquid or liquid-containing material, the separator being configured to float on the liquid or liquid-containing material within the first pressure dispensing container and defining at least one liquid extraction opening, At least one liquid extraction opening is located below an upper level of the liquid or liquid containing material in the container, the material extraction hose being coupled between the separator and one of the outlet ports of the container and configured to be at least Delivering a liquid or liquid-containing material received by a liquid extraction opening to the outlet port; supplying pressurized gas to the interior of the first pressure distribution container to contact the liquid or liquid-containing material; and extracting the opening through the at least one liquid The material extraction hose draws liquid from the interior of the first pressure dispensing container. The method of claim 23, further comprising: attaching a container closure member to the container adjacent to the outlet port, wherein the container closure member is configured to permit liquid or liquid-containing material received from the material extraction hose by. The method of claim 23, further comprising: detecting a state in which the liquid or liquid-containing material of the first pressure distribution container is depleted or nearly exhausted, and terminating from the first pressure in response to the detecting The internal extraction liquid of the dispensing container. The method of claim 25, wherein the detecting a means that the liquid or liquid-containing material of the first pressure dispensing container is depleted or nearly depleted comprises: detecting a sign indicating that the separator is in proximity to or in contact with the The state of the bottom wall or bottom of one of the pressure distribution containers. The method of claim 25, further comprising: removing the separator and the material extraction hose from the first pressure distribution container; inserting the separator and the material extraction hose into a liquid or liquid containing material a second pressure distribution container; supplying pressurized gas to the interior of the second pressure distribution container to contact the contents thereof a liquid or liquid-containing material; and extracting liquid from the interior of the second pressure dispensing container via the at least one liquid extraction opening and the material extraction hose. The method of claim 23, further comprising: delivering the liquid or liquid-containing material received from the first pressure dispensing container to a process tool, the process tool being configured to utilize the liquid or liquid-containing material. The method of claim 28, wherein the process tool comprises a semiconductor or microelectronic device fabrication tool. The method of claim 29, further comprising: fabricating at least a portion of a semiconductor or microelectronic device using the semiconductor or microelectronic device fabrication tool. The method of claim 30, wherein the at least a portion of the semiconductor or microelectronic device is a flat panel display substrate. A method for dispensing a liquid or liquid-containing material using a pressure dispensing container for receiving pressurized gas in direct contact with the liquid or liquid-containing material, the method comprising: comparing a liquid or a liquid-containing material a desired volumetric dispensing rate and a value indicating a rate at which a pressure from a pressurization gas diffuses into the liquid or liquid-containing material or derived therefrom; and selecting the pressure distribution a container having a cross-sectional area sized to permit liquid or liquid-containing material to be withdrawn from the container by a floatable separator from a liquid/gas interface within the container At least one of the immersed extraction openings for extracting liquid or liquid-containing material such that the water level of the liquid or liquid-containing material in the container is The pressurized gas in the liquid or liquid-containing material drops at a rate that is variable in saturation by other means. The method of claim 32, further comprising: supplying a pressurized gas to the pressure dispensing container and via (i) the at least one extraction opening of the separator in the container adjacent to the liquid/gas interface, and (ii) a material extraction hose coupled between the separator and one of the outlet ports of the container, the liquid or liquid-containing material being withdrawn from the container such that the water level of the liquid or liquid-containing material in the container is greater than the liquid Or the pressurized gas in the liquid-containing material drops at a rate that is more saturated by other means. A fluid processing method comprising: providing a first pressure distribution container, the first pressure distribution container defining an interior and having a separator, and at least a portion of a material extraction hose inserted into the interior, the first pressure distribution container Containing a liquid or liquid-containing material, the separator being configured to float on the liquid or liquid-containing material within the first pressure dispensing container and defining at least one liquid extraction opening, the at least one liquid extraction opening being located within the container Or an upper water level containing the liquid material, the material extraction hose being coupled between the separator and one of the outlet ports of the container, and configured to convey the liquid or liquid material received from the at least one liquid extraction opening And providing a set of instructions on a tangible medium, the instructions comprising: supplying the pressurized gas to the interior of the first pressure dispensing container to contact the liquid or liquid-containing material; And drawing the interior of the first pressure dispensing container via the at least one liquid extraction opening and the material extraction hose Liquid. The method of claim 34, wherein the set of instructions comprises: attaching a container closure member to the container adjacent to the outlet port, the container closure member being configured to permit receipt of liquid or material from the material extraction hose The liquid material passes. The method of claim 34, wherein the group of instructions comprises: detecting a state in which the liquid or liquid-containing material of the first pressure distribution container is depleted or nearly exhausted, and terminating from the detection The interior of the first pressure dispensing container draws liquid. The method of claim 36, wherein the detecting, wherein the detecting a liquid or liquid-containing material of the first pressure dispensing container is depleted or nearly exhausted comprises: detecting a separator The state of approaching or contacting the bottom wall or bottom of one of the pressure distribution containers. The method of claim 36, wherein the instructions include: removing the separator and material extraction hose from the first pressure dispensing container; inserting the separator and material extraction hose into a liquid or liquid containing material a second pressure distribution container; supplying pressurized gas to the interior of the second pressure distribution container to contact the liquid or liquid-containing material contained therein; and extracting the hose through the at least one liquid extraction opening and the material The liquid is drawn from the interior of the second pressure dispensing container.