TW201520691A - Photosensitive resin composition - Google Patents

Photosensitive resin composition Download PDF

Info

Publication number
TW201520691A
TW201520691A TW102143692A TW102143692A TW201520691A TW 201520691 A TW201520691 A TW 201520691A TW 102143692 A TW102143692 A TW 102143692A TW 102143692 A TW102143692 A TW 102143692A TW 201520691 A TW201520691 A TW 201520691A
Authority
TW
Taiwan
Prior art keywords
meth
parts
acrylate
solvent
acid
Prior art date
Application number
TW102143692A
Other languages
Chinese (zh)
Inventor
Hiroyuki Miura
Ryuichi Matsuura
Original Assignee
Sumitomo Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Chemical Co filed Critical Sumitomo Chemical Co
Priority to TW102143692A priority Critical patent/TW201520691A/en
Publication of TW201520691A publication Critical patent/TW201520691A/en

Links

Landscapes

  • Materials For Photolithography (AREA)

Abstract

This invention provides a photosensitive resin composition, containing a binder resin (A), a polymerizable compound (B), a polymerization initiator (C), an extender pigment (D) and a solvent (E), wherein the solvent (E) contains 70 to 99 mass% of a solvent (E1) with respect to the solvent (E), which has a solubility parameter of 8.0 to 9.1(cal /cm3)<SP>1/2</SP>, and contains 1 to 30 mass% of a solvent (E2) with respect to the solvent (E), which has a solubility parameter of 9.2 to 11.0(cal/cm3)<SP>1/2</SP>.

Description

感光性樹脂組成物 Photosensitive resin composition

本發明有關感光性樹脂組成物。 The present invention relates to a photosensitive resin composition.

在液晶顯示面板、致電發光面板、電漿顯示面板、電子紙等顯示裝置中所使用的彩色濾光片等之圖案(pattern),係使用感光性樹脂組成物而製造。具體上,係藉由在基板上塗布感光性樹脂組成物後,乾燥,將得到之乾燥膜選擇性地曝光後,顯像來形成圖案。 A pattern such as a color filter used in a display device such as a liquid crystal display panel, a light-emitting panel, a plasma display panel, or an electronic paper is manufactured using a photosensitive resin composition. Specifically, the photosensitive resin composition is applied onto a substrate, dried, and the obtained dried film is selectively exposed, and then developed to form a pattern.

作為如此的感光性樹脂組成物者,例如在日本特開2011-221310號公報中,係揭示含有黏合劑(binder)樹脂、聚合性化合物、聚合起始劑、體質顏料及溶劑的感光性樹脂組成物,且揭示使用丙二醇單甲基醚乙酸酯作為前述溶劑的例子。 For example, Japanese Laid-Open Patent Publication No. 2011-221310 discloses a photosensitive resin composition containing a binder resin, a polymerizable compound, a polymerization initiator, an extender pigment, and a solvent. And propylene glycol monomethyl ether acetate was used as an example of the aforementioned solvent.

由前述以往的感光性樹脂組成物所得到之乾燥膜,其低黏性(tack)有不一定能夠滿足的情形,又,由前述以往的感光性樹脂組成物所得到之圖案,其之硬度有不一定能夠滿足的情形。 The dry film obtained from the conventional photosensitive resin composition described above may not necessarily have a low tack, and the pattern obtained by the conventional photosensitive resin composition may have a hardness. A situation that cannot be satisfied.

為了解決前述課題,本發明提供以下之[1]。 In order to solve the aforementioned problems, the present invention provides the following [1].

[1]一種感光性樹脂組成物,含有黏合劑樹脂(A)、聚合性化合物(B)、聚合起始劑(C)、體質顏料(D)及溶劑(E),其中,前述溶劑(E),係含有相對於前述溶劑(E)為70至99質量%之溶解度參數為8.0至9.1(cal/cm3)1/2的溶劑(E1),且含有相對於前述溶劑(E)為1至30質量%之溶解度參數為9.2至11.0(cal/cm3)1/2之溶劑(E2)。 [1] A photosensitive resin composition comprising a binder resin (A), a polymerizable compound (B), a polymerization initiator (C), an extender pigment (D), and a solvent (E), wherein the solvent (E) And a solvent (E1) having a solubility parameter of from 8.0 to 9.1 (cal/cm 3 ) 1/2 with respect to the solvent (E) of 70 to 99% by mass, and containing 1 relative to the aforementioned solvent (E) The solubility parameter to 30% by mass is 9.2 to 11.0 (cal/cm 3 ) 1/2 of the solvent (E2).

又,本發明提供以下之[2]至[10]。 Further, the present invention provides the following [2] to [10].

[2]如前述[1]所述之感光性樹脂組成物,其中,前述聚合起始劑(C)是肟化合物。 [2] The photosensitive resin composition according to the above [1], wherein the polymerization initiator (C) is a ruthenium compound.

[3]如前述[1]或[2]所述之感光性樹脂組成物,其中,前述黏合劑樹脂(A)的酸價是50至180mg-KOH/g。 [3] The photosensitive resin composition according to the above [1], wherein the acid value of the binder resin (A) is from 50 to 180 mg-KOH/g.

[4]如前述[1]至[3]中任一項所述之感光性樹脂組成物,其中,前述黏合劑樹脂(A)的含量,相對於前述黏合劑樹脂(A)及前述聚合性化合物(B)的合計量100質量份,係30至80質量份。 [4] The photosensitive resin composition according to any one of the above [1], wherein the content of the binder resin (A) is relative to the binder resin (A) and the polymerizability. The total amount of the compound (B) is 100 parts by mass, and is 30 to 80 parts by mass.

[5]如前述[1]至[4]中任一項所述之感光性樹脂組成物,其中,前述體質顏料(D)為氧化矽。 [5] The photosensitive resin composition according to any one of [1] to [4] wherein the extender pigment (D) is cerium oxide.

[6]如前述[1]至[5]中任一項所述之感光性樹脂組成物,其更含有著色劑。 [6] The photosensitive resin composition according to any one of [1] to [5] further comprising a coloring agent.

[7]如前述[6]所述之感光性樹脂組成物,其中,著色劑是含有顏料的著色劑。 [7] The photosensitive resin composition according to the above [6], wherein the colorant is a pigment-containing coloring agent.

[8]如前述[6]或是[7]所述之感光性樹脂組成物,其中,著色劑是含有染料的著色劑。 [8] The photosensitive resin composition according to the above [6], wherein the colorant is a dye-containing coloring agent.

[9]一種圖案,係藉由如前述[1]至[8]中任一項所述之 感光性樹脂組成物所形成者。 [9] A pattern according to any one of the above [1] to [8] A person formed by a photosensitive resin composition.

[10]一種顯示裝置,含有如前述[9]所述之圖案。 [10] A display device comprising the pattern as described in [9] above.

若依本發明,可以提供一種感光性樹脂組成物,其賦與有可滿足之低黏性之乾燥膜,並且,賦與有可滿足之硬度之圖案。 According to the present invention, it is possible to provide a photosensitive resin composition which is imparted with a dry film which can satisfy a low viscosity and which is provided with a pattern having a hardness which can be satisfied.

本發明的感光性樹脂組成物,係含有黏合劑樹脂(A)、聚合性化合物(B)、聚合起始劑(C)、體質顏料(D)及溶劑(E)。 The photosensitive resin composition of the present invention contains a binder resin (A), a polymerizable compound (B), a polymerization initiator (C), an extender pigment (D), and a solvent (E).

黏合劑樹脂(A)較佳含有:在具有源自不飽 和羧酸之結構單元的加成聚合物(a)(以下,有稱為「(a)」的情形)中,與有環氧基之不飽和化合物(b)(以下,有稱為「(b)」的情形)反應之黏合劑樹脂(Aa)。 The binder resin (A) preferably contains: In the addition polymer (a) of the structural unit of a carboxylic acid (hereinafter referred to as "(a)"), an epoxy group-containing unsaturated compound (b) (hereinafter, referred to as "( In the case of b), the adhesive resin (Aa) is reacted.

作為(a)者,例如,可以列舉,使不飽和羧 酸(a1)(以下,有稱為「(a1)」的情形),與可與(a1)加成聚合的具有不飽和鍵之單體(a2)(以下,有稱為「(a2)」的情形),加成聚合而得到之加成聚合物。 As (a), for example, an unsaturated carboxylic acid can be exemplified Acid (a1) (hereinafter, referred to as "(a1)"), and monomer (a2) having an unsaturated bond which can be polymerized and polymerized with (a1) (hereinafter, referred to as "(a2)" In the case of an addition polymer obtained by addition polymerization.

作為(a1)者,例如可以列舉:(甲基)丙烯酸、 巴豆酸、鄰-乙烯基苯甲酸、間-乙烯基苯甲酸、對-乙烯基苯甲酸等不飽和單羧酸類; As (a1), for example, (meth)acrylic acid, An unsaturated monocarboxylic acid such as crotonic acid, o-vinylbenzoic acid, m-vinylbenzoic acid or p-vinylbenzoic acid;

馬來酸、富馬酸、檸康酸、中康酸、衣康酸、3-乙烯 基鄰苯二甲酸、4-乙烯基鄰苯二甲酸、3,4,5,6-四氫鄰苯二甲酸、1,2,3,6-四氫鄰苯二甲酸、二甲基四氫鄰苯二甲酸、1,4-環己烯二羧酸等不飽和二羧酸類;甲基-5-降冰片烯-2,3-二羧酸、5-羧基雙環[2.2.1]庚-2-烯、5,6-二羧基雙環[2.2.1]庚-2-烯、5-羧基-5-甲基雙環[2.2.1]庚-2-烯、5-羧基-5-乙基雙環[2.2.1]庚-2-烯、5-羧基-6-甲基雙環[2.2.1]庚-2-烯、5-羧基-6-乙基雙環[2.2.1]庚-2-烯等含有羧基之雙環不飽和化合物類;琥珀酸單[2-(甲基)丙烯醯基氧基乙基]酯、鄰苯二甲酸單[2-(甲基)丙烯醯基氧基乙基]酯等2元以上的多元羧酸不飽和單[(甲基)丙烯醯基氧基烷基]酯類;α-(羥基甲基)丙烯酸等在同一分子中含有羥基及羧基之不飽和化合物類等。 Maleic acid, fumaric acid, citraconic acid, mesaconic acid, itaconic acid, 3-ethylene Phthalic acid, 4-vinylphthalic acid, 3,4,5,6-tetrahydrophthalic acid, 1,2,3,6-tetrahydrophthalic acid, dimethyltetrahydrogen Unsaturated dicarboxylic acids such as phthalic acid and 1,4-cyclohexene dicarboxylic acid; methyl-5-norbornene-2,3-dicarboxylic acid, 5-carboxybicyclo[2.2.1]heptane- 2-ene, 5,6-dicarboxybicyclo[2.2.1]hept-2-ene, 5-carboxy-5-methylbicyclo[2.2.1]hept-2-ene, 5-carboxy-5-ethyl Bicyclo[2.2.1]hept-2-ene, 5-carboxy-6-methylbicyclo[2.2.1]hept-2-ene, 5-carboxy-6-ethylbicyclo[2.2.1]hept-2- a bicyclic unsaturated compound containing a carboxyl group such as a olefin; a mono[2-(methyl)propenyloxyethyl] succinate; a mono[2-(methyl)propenyloxyethyl phthalate; a polyvalent carboxylic acid unsaturated mono[(methyl) propylene fluorenyloxyalkyl] ester having two or more esters such as an ester; an unsaturated compound containing a hydroxyl group and a carboxyl group in the same molecule such as α-(hydroxymethyl)acrylic acid; Classes, etc.

其中,從共聚合反應性之觀點或是鹼溶解性之觀點而言適合使用(甲基)丙烯酸。 Among them, (meth)acrylic acid is suitably used from the viewpoint of copolymerization reactivity or alkali solubility.

因此,在本說明書中,「(甲基)丙烯酸」是表示選自丙烯酸及甲基丙烯酸所成群組中至少1種。「(甲基)丙烯醯基」及「(甲基)丙烯酸酯」等記載也有同樣的意思。 Therefore, in the present specification, "(meth)acrylic acid" means at least one selected from the group consisting of acrylic acid and methacrylic acid. The descriptions of "(meth)acrylonitrile" and "(meth)acrylate" have the same meaning.

作為(a2)者,例如可以列舉:(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸正丁酯、(甲基)丙烯酸二級丁酯、(甲基)丙烯酸三級丁酯等(甲基)丙烯酸烷酯類;(甲基)丙烯酸環己酯、(甲基)丙烯酸2-甲基環己酯、(甲基)丙烯酸三環[5.2.1.02.6]癸-8-酯(在該技術領域,是以(甲 基)丙烯酸二環戊酯當作慣用名)、(甲基)丙烯酸二環戊基氧基乙酯、(甲基)丙烯酸異冰片酯等(甲基)丙烯酸環狀烷酯類;(甲基)丙烯酸苯酯、(甲基)丙烯酸苯甲酯等(甲基)丙烯酸芳酯或芳烷酯類;馬來酸二乙酯、富馬酸二乙酯、依康酸二乙酯等二羧酸二酯;(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸2-羥基丙酯等羥基烷酯類;雙環[2.2.1]庚-2-烯、5-甲基雙環[2.2.1]庚-2-烯、5-乙基雙環[2.2.1]庚-2-烯、5-羥基雙環[2.2.1]庚-2-烯、5-羥基甲基雙環[2.2.1]庚-2-烯、5-(2’-羥基乙基)雙環[2.2.1]庚-2-烯、5-甲氧基雙環[2.2.1]庚-2-烯、5-乙氧基雙環[2.2.1]庚-2-烯、5,6-二羥基雙環[2.2.1]庚-2-烯、5,6-二(羥基甲基)雙環[2.2.1]庚-2-烯、5,6-二(2’-羥基乙基)雙環[2.2.1]庚-2-烯、5,6-二甲氧基雙環[2.2.1]庚-2-烯、5,6-二乙氧基雙環[2.2.1]庚-2-烯、5-羥基-5-甲基雙環[2.2.1]庚-2-烯、5-羥基-5-乙基雙環[2.2.1]庚-2-烯、5-羥基甲基-5-甲基雙環[2.2.1]庚-2-烯、5-三級丁氧基羰基雙環[2.2.1]庚-2-烯、5-環己氧基羰基雙環[2.2.1]庚-2-烯、5-苯氧基羰基雙環[2.2.1]庚-2-烯、5,6-雙(三級丁氧基羰基)雙環[2.2.1]庚-2-烯、5,6-雙(環己氧基羰基)雙環[2.2.1]庚-2-烯等雙環不飽和化合物類;N-苯基馬來醯亞胺、N-環己基馬來醯亞胺、N-苯甲基馬來醯亞胺、3-馬來醯亞胺苯甲酸N-琥珀醯亞胺酯、4-馬 來醯亞胺丁酸N-琥珀醯亞胺酯、6-馬來醯亞胺己酸N-琥珀醯亞胺酯、3-馬來醯亞胺丙酸N-琥珀醯亞胺酯、N-(9-吖啶基)馬來醯亞胺等二羰基醯亞胺衍生物類;苯乙烯、α-甲基苯乙烯、間-甲基苯乙烯、對-甲基苯乙烯、乙烯基甲苯、對-甲氧基苯乙烯、丙烯腈、甲基丙烯腈、氯化乙烯、氯化亞乙烯、丙烯醯胺、甲基丙烯醯胺、乙酸乙烯酯、1,3-丁二烯、異戊二烯、2,3-二甲基-1,3-丁二烯等。 Examples of (a2) include methyl (meth)acrylate, ethyl (meth)acrylate, n-butyl (meth)acrylate, n-butyl (meth)acrylate, and (meth)acrylic acid. Intermediate (meth)acrylic acid alkyl ester such as butyl acrylate; cyclohexyl (meth) acrylate, 2-methylcyclohexyl (meth) acrylate, tricyclo(methyl) acrylate [5.2.1.0 2.6 ]癸-8-ester (in the technical field, dicyclopentyl (meth)acrylate is used as a customary name), dicyclopentyloxyethyl (meth)acrylate, isobornyl (meth)acrylate, etc. (meth)acrylic acid cyclic alkyl esters; (meth)acrylic acid phenyl esters, (meth)acrylic acid benzyl esters and the like (meth)acrylic acid aryl esters or arylalkyl esters; diethyl maleate, Fumar Dicarboxylic acid diesters such as diethyl acid and diethyl isonate; hydroxyalkyl esters such as 2-hydroxyethyl (meth)acrylate and 2-hydroxypropyl (meth)acrylate; bicyclo [2.2.1 Hept-2-ene, 5-methylbicyclo[2.2.1]hept-2-ene, 5-ethylbicyclo[2.2.1]hept-2-ene, 5-hydroxybicyclo[2.2.1]heptane- 2-ene, 5-hydroxymethylbicyclo[2.2.1]hept-2-ene, 5-(2'-hydroxyethyl)bicyclo[2.2.1]hept-2-ene, 5-methoxybicyclo[ 2. 2.1] Hept-2-ene, 5-ethoxybicyclo[2.2.1]hept-2-ene, 5,6-dihydroxybicyclo[2.2.1]hept-2-ene, 5,6-di(hydroxyl Methyl)bicyclo[2.2.1]hept-2-ene, 5,6-bis(2'-hydroxyethyl)bicyclo[2.2.1]hept-2-ene, 5,6-dimethoxybicyclo[ 2.2.1] hept-2-ene, 5,6-diethoxybicyclo[2.2.1]hept-2-ene, 5-hydroxy-5-methylbicyclo[2.2.1]hept-2-ene, 5-hydroxy-5-ethylbicyclo[2.2.1]hept-2-ene, 5-hydroxymethyl-5-methylbicyclo[2.2.1]hept-2-ene, 5-tertiarybutoxycarbonyl Bicyclo[2.2.1]hept-2-ene, 5-cyclohexyloxycarbonylbicyclo[2.2.1]hept-2-ene, 5-phenoxycarbonylbicyclo[2.2.1]hept-2-ene, 5 , 6-bis(tris-butoxycarbonyl)bicyclo[2.2.1]hept-2-ene, 5,6-bis(cyclohexyloxycarbonyl)bicyclo[2.2.1]hept-2-ene, etc. Saturated compounds; N-phenylmaleimide, N-cyclohexylmaleimide, N-benzylmaleimide, 3-maleimide benzoate N-succinimide Ester, 4-maleimide butyric acid N-succinimide, 6-maleimide caproic acid N-succinimide, 3-maleimide propionic acid N-amber Dicarbonyl ruthenium imide derived from amine ester, N-(9-acridinyl) maleimide Class; styrene, α-methylstyrene, m-methylstyrene, p-methylstyrene, vinyl toluene, p-methoxystyrene, acrylonitrile, methacrylonitrile, vinyl chloride, Vinylene chloride, acrylamide, methacrylamide, vinyl acetate, 1,3-butadiene, isoprene, 2,3-dimethyl-1,3-butadiene, and the like.

(a2)是以具有選自三環癸烷骨架及三環癸烯骨架所成群組中之至少1種骨架,與乙烯性不飽和鍵之化合物(a2-1)(以下有稱為(a2-1)的情形)為佳。(a2)是(a2-1)的情形,可以抑制顯像所致之圖案之膜減少。 (a2) is a compound (a2-1) having at least one skeleton selected from the group consisting of a tricyclodecane skeleton and a tricyclodecene skeleton, and an ethylenically unsaturated bond (hereinafter referred to as (a2) -1) The situation is better. (a2) is the case of (a2-1), and it is possible to suppress the film reduction of the pattern due to development.

在此,本說明書中之「三環癸烷骨架」及「三環癸烯骨架」分別是指以下之結構(各個鍵結鍵是在任意點)。 Here, the "tricyclodecane skeleton" and the "tricyclic terpene skeleton" in the present specification mean the following structures (each bonding key is at any point).

作為(a2-1)者,可以列舉:(甲基)丙烯酸二環戊酯、(甲基)丙烯酸二環戊烯酯、(甲基)丙烯酸二環戊基氧基乙酯、(甲基)丙烯酸二環戊烯基氧基乙酯。此等可以分別單獨或是組合2種以上而使用。 Examples of (a2-1) include dicyclopentanyl (meth)acrylate, dicyclopentenyl (meth)acrylate, dicyclopentyloxyethyl (meth)acrylate, and (methyl). Dicyclopentenyloxyethyl acrylate. These may be used alone or in combination of two or more.

作為(b)者,例如可以列舉:具有鏈式烯烴 經環氧化的結構與乙烯性不飽和鍵之單體(b-1)(以下有稱為「(b-1)」的情形)、具有環烯烴經環氧化的結構與乙烯性不飽和鍵之單體(b-2)(以下有稱為「(b-2)」的情形)。作為(b)者,從反應性的觀點而言是以(b-1)為佳。 As (b), for example, there may be mentioned chain olefins The epoxidized structure and the ethylenically unsaturated bond monomer (b-1) (hereinafter referred to as "(b-1)"), the cyclic olefin epoxidized structure and the ethylenically unsaturated bond Monomer (b-2) (hereinafter referred to as "(b-2)"). As (b), (b-1) is preferable from the viewpoint of reactivity.

作為(b-1)者,可以列舉:(甲基)丙烯酸縮水 甘油酯、(甲基)丙烯酸β-甲基縮水甘油酯、(甲基)丙烯酸β-乙基縮水甘油酯、縮水甘油基乙烯基醚、鄰-乙烯基苯甲基縮水甘油基醚、間-乙烯基苯甲基縮水甘油基醚、對-乙烯基苯甲基縮水甘油基醚、α-甲基-鄰-乙烯基苯甲基縮水甘油基醚、α-甲基-間-乙烯基苯甲基縮水甘油基醚、α-甲基-對-乙烯基苯甲基縮水甘油基醚、2,3-雙(縮水甘油基氧基甲基)苯乙烯、2,4-雙(縮水甘油基氧基甲基)苯乙烯、2,5-雙(縮水甘油基氧基甲基)苯乙烯、2,6-雙(縮水甘油基氧基甲基)苯乙烯、2,3,4-參(縮水甘油基氧基甲基)苯乙烯、2,3,5-參(縮水甘油基氧基甲基)苯乙烯、2,3,6-參(縮水甘油基氧基甲基)苯乙烯、3,4,5-參(縮水甘油基氧基甲基)苯乙烯、2,4,6-參(縮水甘油基氧基甲基)苯乙烯、日本特開平7-248625號公報中所記載的化合物等。 As (b-1), it can be cited that: (meth)acrylic acid shrinks Glyceride, β-methylglycidyl (meth)acrylate, β-ethylglycidyl (meth)acrylate, glycidyl vinyl ether, o-vinylbenzyl glycidyl ether, m- Vinyl benzyl glycidyl ether, p-vinyl benzyl glycidyl ether, α-methyl-o-vinyl benzyl glycidyl ether, α-methyl-m-vinyl benzoyl Glycidyl ether, α-methyl-p-vinylbenzyl glycidyl ether, 2,3-bis(glycidyloxymethyl)styrene, 2,4-bis(glycidyloxy) Methyl)styrene, 2,5-bis(glycidyloxymethyl)styrene, 2,6-bis(glycidyloxymethyl)styrene, 2,3,4-parameter (shrinkage) Glyceryloxymethyl)styrene, 2,3,5-gin (glycidyloxymethyl)styrene, 2,3,6-gin (glycidyloxymethyl)styrene, 3, 4,5-glycol (glycidyloxymethyl)styrene, 2,4,6-glycol (glycidyloxymethyl)styrene, a compound described in JP-A-H07-248625, etc. .

作為(b-2)者,可以列舉:乙烯基環己烯單 氧化物、1,2-環氧基-4-乙烯基環己烷(例如,Celloxide2000;Daicel(股)公司製)、丙烯酸3,4-環氧基環己基甲酯(例如,Cyclomer-A400;Daicel(股)公司製)、甲基丙烯酸3,4-環氧基環己基甲酯(例如,Cyclomer-M100;Daicel(股)公司製)、式(I)所示化合物、式(II)所示化合物等。 As (b-2), one can cite: vinyl cyclohexene Oxide, 1,2-epoxy-4-vinylcyclohexane (for example, Celloxide 2000; manufactured by Daicel Co., Ltd.), 3,4-epoxycyclohexylmethyl acrylate (for example, Cyclomer-A400; Daicel (manufactured by Daicel Co., Ltd.), 3,4-epoxycyclohexylmethyl methacrylate (for example, Cyclomer-M100; manufactured by Daicel Co., Ltd.), a compound represented by the formula (I), and a formula (II) Show compounds and the like.

[式(I)及式(II)中,R1及R2互相獨立表示氫原子、或是碳數1至4的烷基,在該烷基中所含的氫原子可以被羥基取代。 In the formulae (I) and (II), R 1 and R 2 each independently represent a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and a hydrogen atom contained in the alkyl group may be substituted with a hydroxyl group.

X1及X2互相獨立表示單鍵、-R3-、*-R3-O-、*-R3-S-、*-R3-NH-。 X 1 and X 2 each independently represents a single bond, -R 3 -, * - R 3 -O -, * - R 3 -S -, * - R 3 -NH-.

R3表示碳數1至6的烷二基。 R 3 represents an alkanediyl group having 1 to 6 carbon atoms.

*表示與O的鍵結鍵]。 * indicates the bond key with O].

黏合劑樹脂(Aa)可經過二階段步驟而製造。此情形,例如,可參考在文獻「高分子合成的實驗法」(大津隆行著發行所;化學同人(股)第1版第1刷1972年3月1日發行)中記載的方法,及在日本特開2001-89533號公報中記載的方法等而製造。 The binder resin (Aa) can be produced through a two-stage process. In this case, for example, reference may be made to the method described in the "Experimental Method for Polymer Synthesis" (Otsuka Ryokan, Ltd.; Chemical Co., Ltd., 1st Edition, 1st Brush, March 1, 1972), and It is produced by the method and the like described in JP-A-2001-89533.

黏合劑樹脂(Aa)的製造中,首先,作為第一階段,得到(a1)與(a2)的加成聚合物(a)。具體上,例示如:將預定量的(a1)及(a2)、聚合起始劑與溶劑等放入反應容器中,藉由氮氣取代氧氣,於脫氧的環境中,攪拌、加熱、保溫的方法。在此使用的聚合起始劑與溶劑等,並無特別限定,可以使用該領域技術通常使用者中的任何一種。作為聚合起始劑者,例如,可以列舉:偶氮化合物(2,2’-偶氮雙異丁腈、2,2’-偶氮雙(2,4-二甲基戊腈)等)或有機過氧化物(苯甲醯過氧化物等),作為溶劑者,只要可以溶解各單體者即可,可以使用後述溶劑等作為著色感光性樹脂組成 物的溶劑。 In the production of the binder resin (Aa), first, as the first stage, the addition polymer (a) of (a1) and (a2) is obtained. Specifically, for example, a predetermined amount of (a1) and (a2), a polymerization initiator, a solvent, and the like are placed in a reaction vessel, and oxygen is substituted for oxygen, and the mixture is stirred, heated, and kept warm in a deoxidizing environment. . The polymerization initiator, the solvent and the like used herein are not particularly limited, and any of the usual users of the art can be used. As a polymerization initiator, for example, an azo compound (2,2'-azobisisobutyronitrile, 2,2'-azobis(2,4-dimethylvaleronitrile), etc.) or An organic peroxide (such as benzamidine peroxide) may be used as a solvent, and any solvent may be dissolved as a solvent. The solvent of the substance.

又,得到之加成聚合物,可以直接使用反 應後的溶液,也可以使用經濃縮或是稀釋的溶液,也可以使用以再沉澱等方法作成固體(粉體)而取出者。 Moreover, the addition polymer obtained can be directly used as a counter As the solution to be used, a solution which is concentrated or diluted may be used, or a solid (powder) may be used by a method such as reprecipitation to take it out.

源自(a1)及(a2)的結構單元之比率,相對於 構成加成聚合物(a)之全結構單元之合計莫耳數,以在下述範圍為佳。 The ratio of structural units derived from (a1) and (a2), as opposed to The total number of moles of the entire structural unit constituting the addition polymer (a) is preferably in the following range.

源自(a1)的結構單元:5至50莫耳%,更佳的是10至45莫耳% The structural unit derived from (a1): 5 to 50 mol%, more preferably 10 to 45 mol%

源自(a2)的結構單元:50至95莫耳%,更佳的是55至90莫耳% Structural unit derived from (a2): 50 to 95% by mole, more preferably 55 to 90% by mole

其次,作為第2階段者,將得到之加成聚合物所具有的源自(a1)之結構單元中之羧基的一部分,與(b)反應。因為反應性高,未反應的(b)不易殘留,故作為(b)者是以(b-1)為佳。 Next, as a second stage, a part of the carboxyl group derived from the structural unit of (a1) which the obtained addition polymer has is obtained is reacted with (b). Since the reactivity is high and the unreacted (b) is not easily left, it is preferable that (b) is (b-1).

具體上,持續上述,將燒瓶內之環境氣體 的氮氣以空氣取代,將(b)設成相對於(a1)的莫耳數為5至80莫耳%,將反應觸媒(例如參(二甲基胺基甲基)酚等)設成相對於(a1)、(b)及(a2)的合計量為0.001至5質量%,並且將聚合禁止劑(例如,氫醌等)設成相對於(a1)、(b)及(a2)的合計量為0.001至5質量%,置入燒瓶內,通常,在60至130℃,反應1至10小時,可以得到黏合劑樹脂(Aa)。又,與聚合條件同樣,可以考慮製造設備、由聚合產生的發熱量等,適當調整置入方法及反應溫度。 Specifically, continuing the above, the ambient gas in the flask The nitrogen gas is replaced by air, and (b) is set to be 5 to 80 mol% with respect to the molar number of (a1), and a reaction catalyst (for example, dimethylaminomethylphenol) is set. The total amount of (a1), (b), and (a2) is 0.001 to 5% by mass, and a polymerization inhibitor (for example, hydroquinone or the like) is set to be relative to (a1), (b), and (a2). The total amount is 0.001 to 5% by mass, and it is placed in a flask. Usually, at 60 to 130 ° C for 1 to 10 hours, a binder resin (Aa) can be obtained. Further, similarly to the polymerization conditions, the production method, the calorific value generated by the polymerization, and the like can be considered, and the introduction method and the reaction temperature can be appropriately adjusted.

又,此時,(b)的莫耳數,相對於(a1)的莫耳數,是以設成10至75莫耳%為佳,更佳是15至70莫耳%。藉由將(b)的莫耳數設成在此範圍內,有保存安定性、耐溶劑性及耐熱性的平衡性變良好之傾向。 Further, at this time, the number of moles of (b) is preferably 10 to 75 mol%, more preferably 15 to 70 mol%, with respect to the number of moles of (a1). When the number of moles of (b) is within this range, the balance of storage stability, solvent resistance, and heat resistance tends to be good.

作為黏合劑樹脂(Aa)者,可以列舉:(甲基)丙烯酸/(甲基)丙烯酸二環戊酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應的樹脂、(甲基)丙烯酸/(甲基)丙烯酸苯甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/(甲基)丙烯酸環己酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/苯乙烯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/(甲基)丙烯酸甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/N-環己基馬來醯亞胺的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、巴豆酸/(甲基)丙烯酸二環戊酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、巴豆酸/(甲基)丙烯酸苯甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、巴豆酸/(甲基)丙烯酸環己酯共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、巴豆酸/苯乙烯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、巴豆酸/巴豆酸甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、巴豆酸/N-環己基馬來醯亞胺的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂;馬來酸/(甲基)丙烯酸二環戊酯共聚合物與(甲基)丙 烯酸縮水甘油酯反應之樹脂、馬來酸/(甲基)丙烯酸苯甲酯共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、馬來酸/(甲基)丙烯酸環己酯共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、馬來酸/苯乙烯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、馬來酸/馬來酸甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、馬來酸/N-環己基馬來醯亞胺的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂; (甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸二環戊酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸苯甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸環己酯共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/苯乙烯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/N-環己基馬來醯亞胺的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂; (甲基)丙烯酸/(甲基)丙烯酸二環戊酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/(甲基)丙烯酸苯甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/(甲基)丙烯酸環己酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯 反應之樹脂、(甲基)丙烯酸/苯乙烯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/(甲基)丙烯酸甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/N-環己基馬來醯亞胺的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂; 巴豆酸/(甲基)丙烯酸二環戊酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、巴豆酸/(甲基)丙烯酸苯甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、巴豆酸/(甲基)丙烯酸環己酯共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、巴豆酸/苯乙烯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、巴豆酸/巴豆酸甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、巴豆酸/N-環己基馬來醯亞胺的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂; 馬來酸/(甲基)丙烯酸二環戊酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、馬來酸/(甲基)丙烯酸苯甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、馬來酸/(甲基)丙烯酸環己酯共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、馬來酸/苯乙烯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、馬來酸/馬來酸甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、馬來酸/N-環己基 馬來醯亞胺的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂; (甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸二環戊酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸苯甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸環己酯共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/苯乙烯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/N-環己基馬來醯亞胺的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂; 再者,作為黏合劑樹脂(Aa)者,係以在和(a1)與(a2-1)與(a2-1)以外的(a2)共聚合而得到之加成聚合物中,與(b)反應而得之樹脂為更佳。黏合劑樹脂(Aa)藉由上述之結構,而所得到之圖案有與基板的密著性及耐溶劑性優良之傾向。 Examples of the binder resin (Aa) include a resin obtained by reacting a copolymer of (meth)acrylic acid/dicyclopentanyl (meth)acrylate with glycidyl (meth)acrylate, and (meth)acrylic acid/ A copolymer of a copolymer of benzyl (meth)acrylate and a glycidyl (meth)acrylate, a copolymer of (meth)acrylic acid/cyclohexyl (meth)acrylate and a (meth)acrylic acid shrinkage a resin reacted with a glyceride, a copolymer of (meth)acrylic acid/styrene, a resin reacted with glycidyl (meth)acrylate, a copolymer of (meth)acrylic acid/methyl (meth)acrylate and Resin of methyl glycidyl methacrylate reaction, copolymer of (meth)acrylic acid/N-cyclohexylmaleimide and resin of glycidyl (meth)acrylate, crotonic acid/(methyl) a resin obtained by reacting a copolymer of dicyclopentanyl acrylate with glycidyl (meth)acrylate, a copolymer of crotonic acid/benzyl methacrylate, and a resin reacted with glycidyl (meth)acrylate, Crotonic acid/cyclohexyl (meth)acrylate copolymer and glycidyl (meth)acrylate Resin, a resin of crotonic acid/styrene, a resin reacted with glycidyl (meth)acrylate, a copolymer of crotonic acid/methyl crotonate, and a resin reacted with glycidyl (meth)acrylate, croton Resin of acid/N-cyclohexylmaleimide copolymer reacted with glycidyl (meth)acrylate; maleic acid/dicyclopentyl (meth)acrylate copolymer and (meth) propyl Resin of methacrylate reaction, resin of maleic acid / benzyl (meth) acrylate copolymerized with glycidyl (meth) acrylate, maleic acid / cyclohexyl (meth) acrylate Copolymerization of a resin reacted with glycidyl (meth)acrylate, a copolymer of maleic acid/styrene and a resin reacted with glycidyl (meth)acrylate, maleic acid/methyl maleate a resin reacted with glycidyl (meth)acrylate, a copolymer of maleic acid/N-cyclohexylmaleimide and a resin reacted with glycidyl (meth)acrylate; (meth)acrylic acid / maleic anhydride / dicyclopentanyl (meth) acrylate copolymer reacted with glycidyl (meth) acrylate resin, (meth) acrylic acid / maleic anhydride / (methyl) Resin copolymerized with benzyl acrylate and glycidyl (meth)acrylate, (meth)acrylic acid/maleic anhydride/cyclohexyl (meth)acrylate copolymer and glycidol (meth)acrylate Ester-reactive resin, (meth)acrylic acid/maleic anhydride/styrene copolymer and (meth)acrylic acid glycidyl ester-reactive resin, (meth)acrylic acid/maleic anhydride/(meth)acrylic acid A copolymer of an ester copolymer and a glycidyl (meth)acrylate, a copolymer of (meth)acrylic acid/maleic anhydride/N-cyclohexylmaleimide and glycidyl (meth)acrylate Reactive resin; Resin (meth)acrylic acid/(meth)acrylic acid benzene reacted with a copolymer of (meth)acrylic acid/dicyclopentanyl (meth)acrylate and 3,4-epoxycyclohexylmethyl methacrylate Resin of methyl ester copolymer reacted with 3,4-epoxycyclohexylmethyl methacrylate, copolymer of (meth)acrylic acid/cyclohexyl (meth)acrylate and methacrylic acid 3,4 -Epoxycyclohexylmethyl ester Reaction resin, resin of (meth)acrylic acid/styrene copolymer with 3,4-epoxycyclohexylmethyl methacrylate, and (meth)acrylic acid/methyl (meth)acrylate Resin reacting polymer with 3,4-epoxycyclohexylmethyl methacrylate, copolymer of (meth)acrylic acid/N-cyclohexylmaleimide and 3,4-epoxy methacrylate a resin reacted with a cyclohexylmethyl ester; Copolymer of crotonic acid/dicyclopentanyl (meth) acrylate copolymer with 3,4-epoxycyclohexyl methacrylate, co-polymer of crotonic acid/benzyl methacrylate Resin reacted with 3,4-epoxycyclohexylmethyl methacrylate, reacted with crotonic acid/cyclohexyl (meth)acrylate copolymer and 3,4-epoxycyclohexylmethyl methacrylate Copolymer of resin, crotonic acid/styrene copolymer reacted with 3,4-epoxycyclohexylmethyl methacrylate, co-polymer of crotonic acid/methylcrotonate and 3,4-cyclomethacrylate a resin reacted with oxycyclohexylmethyl ester, a copolymer of crotonic acid/N-cyclohexylmaleimide and a resin reacted with 3,4-epoxycyclohexylmethyl methacrylate; Copolymer of maleic acid/dicyclopentanyl (meth)acrylate and 3,4-epoxycyclohexylmethyl methacrylate reacted with maleic acid/benzyl methacrylate Resin reacting polymer with 3,4-epoxycyclohexylmethyl methacrylate, maleic acid/cyclohexyl (meth) acrylate copolymer and 3,4-epoxycyclohexyl methacrylate Resin for ester reaction, copolymer of maleic acid/styrene with 3,4-epoxycyclohexylmethyl methacrylate, copolymer of maleic acid/methyl maleate and methyl group Resin for the reaction of 3,4-epoxycyclohexylmethyl acrylate, maleic acid/N-cyclohexyl a resin in which a copolymer of maleimide and 3,4-epoxycyclohexylmethyl methacrylate is reacted; Resin (meth)acrylic acid/Malay reacted with a copolymer of (meth)acrylic acid/maleic anhydride/dicyclopentanyl (meth)acrylate and 3,4-epoxycyclohexylmethyl methacrylate Resin of anhydride/benzyl methacrylate acrylate and 3,4-epoxycyclohexylmethyl methacrylate, (meth)acrylic acid/maleic anhydride/(meth)acrylic acid cyclohexane Resin copolymerized with 3,4-epoxycyclohexylmethyl methacrylate, copolymer of (meth)acrylic acid/maleic anhydride/styrene and 3,4-epoxy methacrylate a resin reacted with a cyclohexylmethyl ester, a copolymer of (meth)acrylic acid/maleic anhydride/methyl (meth)acrylate and a resin reacted with 3,4-epoxycyclohexylmethyl methacrylate, (a) a resin which reacts with a copolymer of acrylic acid/maleic anhydride/N-cyclohexylmaleimine and 3,4-epoxycyclohexylmethyl methacrylate; Further, as the binder resin (Aa), an addition polymer obtained by copolymerization with (a2) and (a2-1) and (a2) other than (a2), and (b) The resin obtained by the reaction is more preferable. The adhesive resin (Aa) has a structure in which the obtained pattern tends to have excellent adhesion to a substrate and solvent resistance.

在加成聚合物(a)為由(a1)與(a2-1)與(a2-1) 以外之(a2)所成的情形,源自(a2-1)及(a2-1)以外之(a2)的結構單元比率(源自(a2-1)之結構單元:源自(a2-1)以外之(a2)之結構單元)是以10:90至60:40為佳,以10:90至40:60為較佳,以10:90至30:70為更佳。 The addition polymer (a) is composed of (a1) and (a2-1) and (a2-1) In the case of (a2), the structural unit ratio derived from (a2) and (a2-1) (a2) is derived from (a2-1) structural unit: derived from (a2-1) The structural unit other than (a2) is preferably 10:90 to 60:40, more preferably 10:90 to 40:60, and even more preferably 10:90 to 30:70.

在將(a1)與(a2-1)與(a2-1)以外之(a2)共聚合而得到之加成聚合物中,與(b)反應而得到之樹脂者,可以列舉:(甲基)丙烯酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸苯甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸環己酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/(甲基)丙烯酸二環戊酯/苯乙烯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/(甲基)丙烯酸二環戊酯/N-環己基馬來醯亞胺的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂;巴豆酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸苯甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、巴豆酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸環己酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、巴豆酸/(甲基)丙烯酸二環戊酯/苯乙烯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、巴豆酸/(甲基)丙烯酸二環戊酯/巴豆酸甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、巴豆酸/(甲基)丙烯酸二環戊酯/N-環己基馬來醯亞胺的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂;馬來酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸苯甲 酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、馬來酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸環己酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、馬來酸/(甲基)丙烯酸二環戊酯/苯乙烯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、馬來酸/(甲基)丙烯酸二環戊酯/馬來酸甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、馬來酸/(甲基)丙烯酸二環戊酯/N-環己基馬來醯亞胺的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂; (甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸苯甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸環己酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸二環戊酯/苯乙烯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸二環戊酯/N-環己基馬來醯亞胺的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂; (甲基)丙烯酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸苯甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸環己酯的共聚合物與甲基丙烯酸3,4-環氧基環 己基甲酯反應之樹脂、(甲基)丙烯酸/(甲基)丙烯酸二環戊酯/苯乙烯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/(甲基)丙烯酸二環戊酯/N-環己基馬來醯亞胺的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂; 巴豆酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸苯甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、巴豆酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸環己酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、巴豆酸/(甲基)丙烯酸二環戊酯/苯乙烯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、巴豆酸/(甲基)丙烯酸二環戊酯/巴豆酸甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、巴豆酸/(甲基)丙烯酸二環戊酯/N-環己基馬來醯亞胺的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂; 馬來酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸苯甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、馬來酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸環己酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、馬來酸/(甲基)丙烯酸二環戊酯/苯乙烯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、馬來酸/(甲基)丙烯酸二環戊酯/馬來酸甲酯的共聚合物與甲 基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、馬來酸/(甲基)丙烯酸二環戊酯/N-環己基馬來醯亞胺的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂; (甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸苯甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸環己酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸二環戊酯/苯乙烯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸二環戊酯/N-環己基馬來醯亞胺的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂; 此等黏合劑樹脂(A),可以分別單獨使用,也可以組合2種以上而使用。 In the addition polymer obtained by copolymerizing (a1) and (a2-1) and (a2) other than (a2-1), the resin obtained by the reaction with (b) may be exemplified by (methyl) a resin obtained by reacting a copolymer of acrylic acid/dicyclopentyl (meth)acrylate/benzyl methacrylate with glycidyl (meth)acrylate, (meth)acrylic acid/(meth)acrylic acid Copolymerization of a copolymer of cyclopentyl ester/cyclohexyl (meth)acrylate with glycidyl (meth)acrylate, copolymerization of (meth)acrylic acid/dicyclopentanyl (meth)acrylate/styrene Resin reacting with glycidyl (meth)acrylate, copolymer of (meth)acrylic acid/dicyclopentyl (meth)acrylate/methyl (meth)acrylate and glycidyl (meth)acrylate Reaction resin, resin of (meth)acrylic acid/dicyclopentyl (meth)acrylate/N-cyclohexylmaleimide and resin reacted with glycidyl (meth)acrylate; crotonic acid/( Resin of (meth)acrylic acid dicyclopentyl acrylate / benzyl (meth) acrylate copolymer with glycidyl (meth) acrylate, crotonic acid / dicyclopentyl (meth) acrylate / ( Resin of a copolymer of cyclohexyl acrylate and glycidyl (meth)acrylate, a copolymer of crotonic acid/dicyclopentyl (meth)acrylate/styrene and glycidol (meth)acrylate Ester-reactive resin, co-polymer of crotonic acid/dicyclopentyl (meth)acrylate/methyl crotonate and resin reacted with glycidyl (meth)acrylate, crotonic acid/dicyclopentyl (meth)acrylate a resin in which a copolymer of ester/N-cyclohexylmaleimide is reacted with glycidyl (meth)acrylate; maleic acid/dicyclopentyl (meth)acrylate/benzoic acid (meth)acrylate Resin of ester copolymer reacted with glycidyl (meth)acrylate, copolymer of maleic acid/dicyclopentyl (meth)acrylate/cyclohexyl (meth)acrylate and (meth)acrylic acid a resin of a glycidyl ester reaction, a copolymer of maleic acid/dicyclopentyl (meth)acrylate/styrene, a resin reacted with glycidyl (meth)acrylate, maleic acid/(meth)acrylic acid Resin of cyclopentyl ester/methyl maleate copolymer reacted with glycidyl (meth)acrylate, maleic acid/dicyclopentanyl (meth)acrylate/N-cyclohexylmaleimide a resin in which a copolymer is reacted with glycidyl (meth)acrylate; Resin (meth)acrylic acid (meth)acrylic acid/maleic anhydride/dicyclopentyl (meth)acrylate/benzyl methacrylate acrylate and glycidyl (meth)acrylate /Reagents of maleic anhydride/dicyclopentyl (meth)acrylate/cyclohexyl (meth)acrylate reacted with glycidyl (meth)acrylate, (meth)acrylic acid/maleic anhydride/ Resin (meth)acrylic acid/maleic anhydride/dicyclopentanyl (meth)acrylate/(co)polymer of dicyclopentyl (meth)acrylate/styrene reacted with glycidyl (meth)acrylate Resin copolymerized with methyl methacrylate and glycidyl (meth)acrylate, (meth)acrylic acid/maleic anhydride/dicyclopentanyl (meth)acrylate/N-cyclohexylmalanium a resin in which a copolymer of an imine is reacted with glycidyl (meth)acrylate; Resin (meth)acrylic acid/dicyclopentyl (meth)acrylate/benzyl methacrylate acrylate and 3,4-epoxycyclohexylmethyl methacrylate a copolymer of acrylic acid/dicyclopentyl (meth)acrylate/cyclohexyl (meth)acrylate and a 3,4-epoxy ring of methacrylic acid a resin reacted with hexylmethyl ester, a copolymer of (meth)acrylic acid/dicyclopentyl (meth)acrylate/styrene, and a resin reacted with 3,4-epoxycyclohexylmethyl methacrylate, (a) (meth)acrylic acid / (meth)acrylic acid / methacrylic acid / (meth) acrylate / methacrylic acid methacrylate / methacrylic acid 3, 4- epoxy cyclohexyl methyl ester a resin obtained by reacting a copolymer of dicyclopentanyl (meth)acrylate/N-cyclohexylmaleimide with 3,4-epoxycyclohexylmethyl methacrylate; Resin for the reaction of crotonic acid/dicyclopentyl (meth)acrylate/benzyl methacrylate with 3,4-epoxycyclohexylmethyl methacrylate, crotonic acid/(methyl a resin obtained by reacting a copolymer of dicyclopentyl acrylate/cyclohexyl (meth) acrylate with 3,4-epoxycyclohexylmethyl methacrylate, crotonic acid / dicyclopentanyl (meth) acrylate /Resin copolymer of styrene and 3,4-epoxycyclohexylmethyl methacrylate, co-polymer of m-crotonic acid / dicyclopentyl (meth) acrylate / methyl crotonate and methyl 3,4-Epoxycyclohexylmethyl acrylate-reactive resin, co-polymer of crotonic acid/dicyclopentanyl (meth)acrylate/N-cyclohexylmaleimide and methacrylic acid 3,4- a resin reactive with epoxycyclohexylmethyl ester; Resin of maleic acid/dicyclopentyl (meth)acrylate/benzyl (meth)acrylate reacted with 3,4-epoxycyclohexylmethyl methacrylate, maleic acid/( Resin of methylene)dicyclopentyl acrylate/cyclohexyl (meth) acrylate copolymer with 3,4-epoxycyclohexyl methacrylate, maleic acid/(meth)acrylic acid Resin of cyclopentyl ester/styrene copolymer reacted with 3,4-epoxycyclohexylmethyl methacrylate, maleic acid/dicyclopentyl (meth)acrylate/methyl maleate Polymer and nail a copolymer of 3,4-epoxycyclohexylmethyl acrylate, a copolymer of maleic acid/dicyclopentanyl (meth)acrylate/N-cyclohexylmaleimide and methacrylic acid 3, a resin reacted with 4-epoxycyclohexylmethyl ester; Resin reacting a copolymer of (meth)acrylic acid/maleic anhydride/dicyclopentyl (meth)acrylate/benzyl methacrylate with 3,4-epoxycyclohexylmethyl methacrylate a (meth)acrylic acid/maleic anhydride/dicyclopentyl (meth)acrylate/cyclohexyl (meth)acrylate copolymer with 3,4-epoxycyclohexylmethyl methacrylate Resin, (meth)acrylic acid/maleic anhydride/dicyclopentyl (meth)acrylate/styrene copolymer and 3,4-epoxycyclohexylmethyl methacrylate resin, (methyl a resin which reacts acrylic acid/maleic anhydride/dicyclopentyl (meth)acrylate/methyl (meth)acrylate with 3,4-epoxycyclohexylmethyl methacrylate, (methyl) a resin in which a copolymer of acrylic acid/maleic anhydride/dicyclopentanyl (meth)acrylate/N-cyclohexylmaleimide is reacted with 3,4-epoxycyclohexylmethyl methacrylate; These binder resins (A) may be used alone or in combination of two or more.

黏合劑樹脂(A)的聚苯乙烯換算之重量平均 分子量(Mw),較佳是8×103至100×103,更佳是10×103至50×103。黏合劑樹脂(A)的重量平均分子量(Mw),在前述的範圍內時,感光性樹脂組成物的塗布性及乾燥膜之低黏性有變更良好的傾向,且在顯像時不易發生膜減少,再者,有在顯像時非畫素部分的移除性良好之傾向。 The polystyrene-equivalent weight average molecular weight (Mw) of the binder resin (A) is preferably from 8 × 10 3 to 100 × 10 3 , more preferably from 10 × 10 3 to 50 × 10 3 . When the weight average molecular weight (Mw) of the binder resin (A) is within the above range, the coating property of the photosensitive resin composition and the low viscosity of the dried film tend to be improved, and the film is less likely to occur during development. Reduction, in addition, there is a tendency for the removal of the non-pixel portion to be good at the time of development.

黏合劑樹脂(A)的酸價,較佳是30至 200mg-KOH/g,更佳是40至190mg-KOH/g,再更佳是50至180mg-KOH/g。酸價是測定作為用以中和1g黏合劑樹脂(A)而必需的氫氧化鉀量(mg)之值,可使用氫氧化鉀水溶液藉由滴定而求得。 The acid value of the binder resin (A) is preferably 30 to 200 mg-KOH/g, more preferably 40 to 190 mg-KOH/g, still more preferably 50 to 180 mg-KOH/g. The acid value is a value obtained by measuring the amount (mg) of potassium hydroxide necessary for neutralizing 1 g of the binder resin (A), and can be determined by titration using an aqueous potassium hydroxide solution.

黏合劑樹脂(A),雖是以只由前述之黏合劑 樹脂(Aa)所構成者為佳,但也可以含有其他樹脂。作為如此之樹脂者,可以列舉:環氧樹脂、丙烯酸樹脂、胺基甲酸乙酯(urethane)樹脂、聚酯樹脂、聚醯亞胺樹脂、聚烯烴樹脂、酚醛清漆樹脂、聚胺樹脂等。 Adhesive resin (A), although only by the aforementioned adhesive The resin (Aa) is preferably formed, but may contain other resins. As such a resin, an epoxy resin, an acrylic resin, an urethane resin, a polyester resin, a polyimide resin, a polyolefin resin, a novolak resin, a polyamine resin, etc. are mentioned.

在黏合劑樹脂(A)含有黏合劑樹脂(Aa)以外 的樹脂之情形,黏合劑樹脂(Aa)的含量,相對於黏合劑樹脂(A),是以20至99質量%為佳,以50至99質量%為更佳。 In addition to the binder resin (A), the binder resin (A) In the case of the resin, the content of the binder resin (Aa) is preferably from 20 to 99% by mass, more preferably from 50 to 99% by mass, based on the binder resin (A).

聚合性化合物(B),只要為可藉由因光或是 熱的作用而由聚合起始劑(C)產生之活性自由基、酸等開始聚合之化合物即可,無特別限定者。作為聚合性化合物(B)者,可以列舉具有聚合性的碳-碳不飽和鍵之化合物等,較佳是使用單官能單體、2官能單體、3官能以上的多官能單體。又,作為聚合性化合物(B)者,是以使用不具酸性基之化合物為佳。 Polymerizable compound (B), as long as it can be light or The compound which starts to polymerize by the active radical, the acid, etc. which are produced by the polymerization initiator (C) by the action of heat is not particularly limited. The polymerizable compound (B) may, for example, be a compound having a polymerizable carbon-carbon unsaturated bond, and a monofunctional monomer, a bifunctional monomer or a trifunctional or higher polyfunctional monomer is preferably used. Further, as the polymerizable compound (B), it is preferred to use a compound having no acidic group.

作為單官能單體者,可以列舉:壬基苯基 卡必醇(甲基)丙烯酸酯、(甲基)丙烯酸2-羥基-3-苯氧基丙酯、2-乙基己基卡必醇(甲基)丙烯酸酯、(甲基)丙烯酸2-羥基乙酯、N-乙烯基吡咯啶酮等。 As a monofunctional monomer, a mercaptophenyl group can be mentioned. Carbitol (meth) acrylate, 2-hydroxy-3-phenoxypropyl (meth) acrylate, 2-ethylhexyl carbitol (meth) acrylate, 2-hydroxyl (meth) acrylate Ethyl ester, N-vinylpyrrolidone, and the like.

作為2官能單體者,可以列舉:1,6-己烷二 醇二(甲基)丙烯酸酯、乙二醇二(甲基)丙烯酸酯、新戊二醇二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、雙酚A的雙(丙烯醯氧基乙基)醚、3-甲基戊烷二醇二(甲基)丙烯酸酯、三環癸烷二甲醇二(甲基)丙烯酸酯等。 As the bifunctional monomer, there may be mentioned 1,6-hexane two Alcohol di(meth)acrylate, ethylene glycol di(meth)acrylate, neopentyl glycol di(meth)acrylate, triethylene glycol di(meth)acrylate, bisphenol A double ( Propylene methoxyethyl ether, 3-methylpentane diol di(meth) acrylate, tricyclodecane dimethanol di(meth) acrylate, and the like.

作為3官能以上的多官能單體者,可以列 舉:三羥甲基丙烷三(甲基)丙烯酸酯、新戊四醇三(甲基)丙烯酸酯、新戊四醇四(甲基)丙烯酸酯、二新戊四醇五(甲基)丙烯酸酯、二新戊四醇六(甲基)丙烯酸酯、新戊四醇三(甲基)丙烯酸酯與酸酐的反應物、二新戊四醇五(甲基)丙烯酸酯與酸酐的反應物、大阪有機化學工業(股)製的V#1000、V#802、STAR-501,及共榮社化學(股)製的UA-306H、UA-306T、UA-306I,第一工業製藥(股)製的New Frontier R-1150等胺基甲酸乙酯丙烯酸酯等。其中,以使用2官能單體、3官能以上的多官能單體為佳。 As a trifunctional or higher polyfunctional monomer, it can be listed For example: trimethylolpropane tri (meth) acrylate, neopentyl alcohol tri (meth) acrylate, neopentyl alcohol tetra (meth) acrylate, dipentaerythritol penta (meth) acrylate a reaction product of an ester, dipentaerythritol hexa(meth) acrylate, neopentyl alcohol tri(meth) acrylate and an acid anhydride, dipentaerythritol penta (meth) acrylate and an acid anhydride, V#1000, V#802, STAR-501, manufactured by Osaka Organic Chemical Industry Co., Ltd., and UA-306H, UA-306T, UA-306I, manufactured by Kyoeisha Chemical Co., Ltd., First Industrial Pharmaceutical Co., Ltd. Amino acrylate such as New Frontier R-1150. Among them, a bifunctional monomer or a trifunctional or higher polyfunctional monomer is preferably used.

又,作為聚合性化合物(B)者,也可以使用 下述的聚合性化合物。 Further, as the polymerizable compound (B), it is also possible to use The following polymerizable compound.

此等聚合性化合物(B),可以分別單獨使 用,也可以組合2種以上來使用。 These polymerizable compounds (B) can be individually used It is also possible to use two or more types in combination.

聚合性化合物(B)的含量,相對於感光性樹 脂組成物的固形分,以1至50質量%為佳,以5至30質量%為更佳。又,黏合劑樹脂(A)的含量,相對於黏合劑性樹脂(A)及聚合性化合物(B)的合計量100質量份,以30至80質量份為佳。 The content of the polymerizable compound (B) relative to the photosensitive tree The solid content of the lipid composition is preferably from 1 to 50% by mass, more preferably from 5 to 30% by mass. In addition, the content of the binder resin (A) is preferably 30 to 80 parts by mass based on 100 parts by mass of the total of the binder resin (A) and the polymerizable compound (B).

在此,固形分是指除去在感光性樹脂組成 物中所含有的溶劑之總成分。 Here, the solid component means that the composition is removed in the photosensitive resin. The total composition of the solvent contained in the product.

黏合劑樹脂(A)的含量在前述範圍時,由於 乾燥膜的黏性更被抑制,且有得到無色不均之彩色濾光片的傾向故而為佳。 When the content of the binder resin (A) is within the aforementioned range, The viscosity of the dried film is more suppressed, and it is preferable to obtain a color filter having no color unevenness.

聚合起始劑(C),係用以開始聚合聚合性化 合物(B)之產生活性自由基、酸等之化合物,且可為藉由光的作用而產生活性自由基、酸等的光聚合起始劑,也可為藉由熱的作用而產生活性自由基、酸等的熱聚合起始劑,但以光聚合起始劑為佳,以藉由光的作用而產生活性自由基之光自由基聚合起始劑為更佳。 Polymerization initiator (C) for starting polymerization polymerization The compound (B) produces a compound such as an active radical or an acid, and may be a photopolymerization initiator which generates an active radical, an acid or the like by the action of light, or may be active by the action of heat. A thermal polymerization initiator such as a radical or an acid, but a photopolymerization initiator is preferred, and a photoradical polymerization initiator which generates an active radical by the action of light is more preferable.

聚合起始劑(C),係以肟化合物為佳。藉由 使用此種聚合起始劑,感光性樹脂組成物變高感度,又使 用此等形成的膜在解像度及耐溶劑性優良之圖案良好。再者,藉由併用聚合起始助劑(C-1),得到之感光性樹脂組成物變更高感度,使用此等形成彩色濾光片之際的生產性提高,故佳。 The polymerization initiator (C) is preferably a ruthenium compound. By By using such a polymerization initiator, the photosensitive resin composition becomes highly sensitive, and The film formed by such a film is excellent in a pattern excellent in resolution and solvent resistance. In addition, it is preferable to change the high sensitivity of the photosensitive resin composition obtained by using the polymerization initiation auxiliary (C-1) in combination, and to improve the productivity when forming a color filter.

作為肟化合物者,可以列舉:N-苯甲醯基氧 基-1-(4-苯基硫基苯基)丁烷-1-酮-2-亞胺、N-乙醯氧基-1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]乙烷-1-亞胺、N-乙醯氧基-1-[9-乙基-6-{2-甲基-4-(3,3-二甲基-2,4-二氧雜環戊基甲基氧基)苯甲醯基}-9H-咔唑-3-基]乙烷-1-亞胺等。也可以使用Irgacure(註冊商標)OXE-01、OXE-02(以上,日本BASF(股)製)、N-1919(ADEKA(股)製)等市售品。其中是以N-苯甲醯氧基-1-(4-苯基硫基苯基)辛烷-1-酮-2-亞胺(下式)為佳。 As the bismuth compound, it can be mentioned that N-benzhydryloxy 1-(4-phenylthiophenyl)butan-1-one-2-imine, N-acetoxy-1-[9-ethyl-6-(2-methylbenzoate) Mercapto)-9H-carbazol-3-yl]ethane-1-imine, N-acetoxy-1-[9-ethyl-6-{2-methyl-4-(3,3 -Dimethyl-2,4-dioxolylmethyloxy)benzimidyl}-9H-indazol-3-yl]ethane-1-imine and the like. Commercial products such as Irgacure (registered trademark) OXE-01, OXE-02 (above, Japanese BASF Co., Ltd.), and N-1919 (made by ADEKA Co., Ltd.) can also be used. Among them, N-benzylideneoxy-1-(4-phenylthiophenyl)octane-1-one-2-imine (the following formula) is preferred.

又,作為肟化合物以外的聚合起始劑者, 可以列舉:聯咪唑化合物、苯烷基酮(alkylphenone)化合物、三化合物、醯基膦氧化合物等。 Further, examples of the polymerization initiator other than the ruthenium compound include a biimidazole compound, an alkylphenone compound, and three. a compound, a mercaptophosphine oxide, or the like.

作為聯咪唑化合物者,可以列舉:2,2’-雙(2- 氯苯基)-4,4’,5,5’-四苯基聯咪唑、2,2’-雙(2,3-二氯苯基)-4,4’,5,5’-四苯基聯咪唑(例如,參考日本特開平6-75372號公報、日本特開平6-75373號公報等)、2,2’-雙(2-氯苯基)- 4,4’,5,5’-四苯基聯咪唑、2,2’-雙(2-氯苯基)-4,4’,5,5’-四(烷氧基苯基)聯咪唑、2,2’-雙(2-氯苯基)-4,4’,5,5’-四(二烷氧基苯基)聯咪唑、2,2’-雙(2-氯苯基)-4,4’,5,5’-四(三烷氧基苯基)聯咪唑(例如,參照日本特公昭48-38403號公報、日本特開昭62-174204號公報等)、4,4’,5,5’-位的苯基為由烷氧羰基所取代的咪唑化合物(例如,參考日本特開平7-10913號公報等)等。較佳可以列舉:2,2’-雙(2-氯苯基)-4,4’,5,5’-四苯基聯咪唑、2,2’-雙(2,3-二氯苯基)-4,4’,5,5’-四苯基聯咪唑、2,2’-雙(2,4-二氯苯基)-4,4’,5,5’-四苯基聯咪唑。 As the biimidazole compound, there can be mentioned 2, 2'-bis (2- Chlorophenyl)-4,4',5,5'-tetraphenylbiimidazole, 2,2'-bis(2,3-dichlorophenyl)-4,4',5,5'-tetraphenyl The benzyl imidazole (for example, refer to JP-A-6-75372, JP-A-6-75373, etc.), 2,2'-bis(2-chlorophenyl)- 4,4',5,5'-tetraphenylbiimidazole, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetrakis(alkoxyphenyl)biimidazole , 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetrakis(dialkoxyphenyl)biimidazole, 2,2'-bis(2-chlorophenyl) -4,4',5,5'-tetrakis(trialkoxyphenyl)biimidazole (for example, refer to Japanese Patent Publication No. Sho 48-38403, JP-A-62-174204, etc.), 4, 4 The phenyl group at the '5,5'-position is an imidazole compound substituted with an alkoxycarbonyl group (for example, refer to JP-A-7-10913, etc.). Preferably, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenylbiimidazole, 2,2'-bis(2,3-dichlorophenyl) -4,4',5,5'-tetraphenylbiimidazole, 2,2'-bis(2,4-dichlorophenyl)-4,4',5,5'-tetraphenylbiimidazole .

作為苯烷基酮化合物者,可以列舉:二乙 氧基苯乙酮、2-甲基-2-(N-嗎啉基)-1-(4-甲基硫基苯基)丙烷-1-酮、2-二甲基胺基-1-(4-(N-嗎啉基)苯基)-2-苯甲基丁烷-1-酮、2-二甲基胺基-1-(4-(N-嗎啉基)苯基)-2-(4-甲基苯基甲基)丁烷-1-酮、2-羥基-2-甲基-1-苯基丙烷-1-酮、苯甲基二甲基縮醛、2-羥基-2-甲基-1-[4-(2-羥基乙氧基)苯基]丙烷-1-酮、1-羥基環己基苯基酮、2-羥基-2-甲基-1-(4-異丙烯基苯基)丙烷-1-酮的寡聚物等,較佳是2-甲基-2-(N-嗎啉基)-1-(4-甲基硫基苯基)丙烷-1-酮、2-二甲基胺基-1-(4-(N-嗎啉基)苯基)-2-苯甲基丁烷-1-酮等。也可以使用Irgacure(註冊商標)369、907(以上,日本BASF(股)製)等市售品。 As a phenylalkyl ketone compound, it can be cited as: Oxyacetophenone, 2-methyl-2-(N-morpholinyl)-1-(4-methylthiophenyl)propan-1-one, 2-dimethylamino-1- 4-(N-morpholinyl)phenyl)-2-benzylidenebutan-1-one, 2-dimethylamino-1-(4-(N-morpholinyl)phenyl)-2 -(4-methylphenylmethyl)butan-1-one, 2-hydroxy-2-methyl-1-phenylpropan-1-one, benzyldimethylacetal, 2-hydroxy- 2-methyl-1-[4-(2-hydroxyethoxy)phenyl]propan-1-one, 1-hydroxycyclohexyl phenyl ketone, 2-hydroxy-2-methyl-1-(4- An oligomer or the like of isopropenylphenyl)propan-1-one, preferably 2-methyl-2-(N-morpholinyl)-1-(4-methylthiophenyl)propane-1 a ketone, 2-dimethylamino-1-(4-(N-morpholinyl)phenyl)-2-benzylbutane-1-one or the like. Commercial products such as Irgacure (registered trademark) 369, 907 (above, Japanese BASF Co., Ltd.) can also be used.

作為三化合物者,可以列舉:2,4-雙(三氯 甲基)-6-(4-甲氧基苯基)-1,3,5-三、2,4-雙(三氯甲基)-6-(4-甲氧基萘基)-1,3,5-三、2,4-雙(三氯甲基)-6-胡椒基-1,3,5-三、2,4-雙(三氯甲基)-6-(4-甲氧基苯乙烯基)- 1,3,5-三、2,4-雙(三氯甲基)-6-[2-(5-甲基呋喃-2-基)乙烯基]-1,3,5-三、2,4-雙(三氯甲基)-6-[2-(呋喃-2-基)乙烯基]-1,3,5-三、2,4-雙(三氯甲基)-6-[2-(4-二乙基胺基-2-甲基苯基)乙烯基]-1,3,5-三、2,4-雙(三氯甲基)-6-[2-(3,4-二甲氧基苯基)乙烯基]-1,3,5-三等。 As three As the compound, there may be mentioned: 2,4-bis(trichloromethyl)-6-(4-methoxyphenyl)-1,3,5-three , 2,4-bis(trichloromethyl)-6-(4-methoxynaphthyl)-1,3,5-three , 2,4-bis(trichloromethyl)-6-piperonyl-1,3,5-three , 2,4-bis(trichloromethyl)-6-(4-methoxystyryl)-1,3,5-three , 2,4-bis(trichloromethyl)-6-[2-(5-methylfuran-2-yl)vinyl]-1,3,5-three , 2,4-bis(trichloromethyl)-6-[2-(furan-2-yl)vinyl]-1,3,5-three , 2,4-bis(trichloromethyl)-6-[2-(4-diethylamino-2-methylphenyl)vinyl]-1,3,5-three , 2,4-bis(trichloromethyl)-6-[2-(3,4-dimethoxyphenyl)vinyl]-1,3,5-three Wait.

作為醯基膦氧化物化合物者,可以列舉 2,4,6-三甲基苯甲醯基二苯基膦氧化物等。也可以使用Irgacure(註冊商標)819(日本BASF(股)製)等市售品。 As a mercaptophosphine oxide compound, it can be enumerated 2,4,6-trimethylbenzimidyldiphenylphosphine oxide or the like. Commercial products such as Irgacure (registered trademark) 819 (manufactured by BASF Co., Ltd.) can also be used.

又,作為肟化合物、聯咪唑化合物、苯烷 基酮化合物、三化合物及醯基膦氧化物以外的聚合起始劑(C)者,可以列舉:苯偶姻、苯偶姻甲基醚、苯偶姻乙基醚、苯偶姻異丙基醚、苯偶姻異丁基醚等苯偶姻化合物;二苯甲酮、鄰-苯甲醯基苯甲酸甲酯、4-苯基二苯甲酮、4-苯甲醯基-4’-甲基二苯基硫化物、3,3’,4,4’-四(三級丁基過氧羰基)二苯甲酮、2,4,6-三甲基二苯甲酮等二苯甲酮化合物;9,10-菲醌、2-乙基蒽醌、樟腦醌等醌化合物;10-丁基-2-氯吖啶酮、二苯甲醯、苯基乙醛酸甲酯、二茂鈦化合物等。 Further, as a ruthenium compound, a biimidazole compound, a phenylalkyl ketone compound, and three Examples of the polymerization initiator (C) other than the compound and the mercaptophosphine oxide include benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, and benzoin. Benzoin compounds such as isobutyl ether; benzophenone, methyl o-benzhydrylbenzoate, 4-phenylbenzophenone, 4-benzylidene-4'-methyldiphenyl a benzophenone compound such as sulfide, 3,3',4,4'-tetrakis(tertiary butylperoxycarbonyl)benzophenone or 2,4,6-trimethylbenzophenone; An anthraquinone compound such as 10-phenanthrenequinone, 2-ethylhydrazine, camphorquinone; 10-butyl-2-chloroacridone, benzhydrin, methyl phenylglyoxylate, a titanocene compound, and the like.

此等聚合起始劑(C),可以分別單獨使用, 也可以組合2種以上使用。 These polymerization initiators (C) can be used separately, It is also possible to use two or more types in combination.

聚合起始劑(C)的含量,相對於樹脂(A)及聚 合性化合物(B)的合計量100質量份,較佳是0.1至80質量份,更佳是1至60質量份。聚合起始劑的合計量在此範圍內時,可以高感度地形成圖案,圖案的耐藥品性、機械強 度、表面平滑性有變良好之傾向。 The content of the polymerization initiator (C) relative to the resin (A) and the polymerization The total amount of the compound (B) is 100 parts by mass, preferably 0.1 to 80 parts by mass, more preferably 1 to 60 parts by mass. When the total amount of the polymerization initiator is within this range, the pattern can be formed with high sensitivity, and the chemical resistance and mechanical strength of the pattern are strong. The degree of surface smoothness tends to be good.

聚合起始劑(C)是以與聚合起始助劑(C-1) (尤其是胺類)組合而使用為佳。聚合起始助劑(C-1)是用以促進藉由聚合起始劑(C)而開始聚合的聚合性化合物的聚合而使用的化合物,或是增感劑。 The polymerization initiator (C) is a polymerization initiator (C-1) It is preferred to use (in particular, an amine) in combination. The polymerization initiation aid (C-1) is a compound used to promote polymerization of a polymerizable compound which starts polymerization by polymerization initiator (C), or a sensitizer.

作為聚合起始助劑(C-1)者,可以列舉:胺 化合物、噻唑啉化合物、烷氧基蒽化合物、噻噸酮(thioxanthone)化合物、羧酸化合物、硫醇化合物等。 As the polymerization initiation aid (C-1), an amine can be exemplified a compound, a thiazoline compound, an alkoxyquinone compound, a thioxanthone compound, a carboxylic acid compound, a thiol compound, or the like.

作為胺化合物者,可以列舉:三乙醇胺、 甲基二乙醇胺、三異丙醇胺、4-二甲基胺基苯甲酸甲酯、4-二甲基胺基苯甲酸乙酯、4-二甲基胺基苯甲酸異戊酯、苯甲酸2-二甲基胺基乙酯、4-二甲基胺基苯甲酸2-乙基己酯、N,N-二甲基對甲苯胺、4,4’-雙(二甲基胺)二苯甲酮(通稱米希勒酮)、4,4’-雙(二乙基胺)二苯甲酮、4,4’-雙(乙基甲基胺基)二苯甲酮等,其中以4,4’-雙(二乙基胺)二苯甲酮為佳。也可以使用EAB-F(保土谷化學工業(股)製)等市售品。 As an amine compound, a triethanolamine, Methyldiethanolamine, triisopropanolamine, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, isoamyl 4-dimethylaminobenzoate, benzoic acid 2-Dimethylaminoethyl ester, 2-ethylhexyl 4-dimethylaminobenzoate, N,N-dimethyl-p-toluidine, 4,4'-bis(dimethylamine) Benzophenone (commonly known as michelone), 4,4'-bis(diethylamine)benzophenone, 4,4'-bis(ethylmethylamino)benzophenone, etc. 4,4'-bis(diethylamine)benzophenone is preferred. Commercial products such as EAB-F (manufactured by Hodogaya Chemical Industry Co., Ltd.) can also be used.

作為噻唑啉化合物者,可以列舉式(III-1)至 式(III-3)所示化合物等。 As the thiazoline compound, the formula (III-1) can be enumerated A compound represented by the formula (III-3) and the like.

作為烷氧基蒽化合物者,可以列舉:9,10- 二甲氧基蒽、2-乙基-9,10-二甲氧基蒽、9,10-二乙氧基蒽、2-乙基-9,10-二乙氧基蒽、9,10-二丁氧基蒽、2-乙基-9,10-二丁氧基蒽等。 As the alkoxy oxime compound, it can be mentioned that: 9,10- Dimethoxy hydrazine, 2-ethyl-9,10-dimethoxy hydrazine, 9,10-diethoxy hydrazine, 2-ethyl-9,10-diethoxy hydrazine, 9,10- Dibutoxy fluorene, 2-ethyl-9,10-dibutoxy fluorene, and the like.

作為噻噸酮化合物者,可以列舉:2-異丙基 噻噸酮、4-異丙基噻噸酮、2,4-二乙基噻噸酮、2,4-二氯噻噸酮、1-氯-4-丙氧基噻噸酮等。 As the thioxanthone compound, a 2-isopropyl group can be cited. Thioxanthone, 4-isopropylthioxanthone, 2,4-diethylthioxanthone, 2,4-dichlorothioxanthone, 1-chloro-4-propoxythioxanthone, and the like.

作為羧酸化合物者,可以列舉:苯基硫基 乙酸、甲基苯基硫基乙酸、乙基苯基硫基乙酸、甲基乙基苯基硫基乙酸、二甲基苯基硫基乙酸、甲氧基苯基硫基乙酸、二甲氧基苯基硫基乙酸、氯苯基硫基乙酸、二氯苯基硫基乙酸、N-苯基甘胺酸、苯氧基乙酸、萘基硫乙酸、N-萘基甘胺酸、萘氧基乙酸等。 As the carboxylic acid compound, a phenylthio group can be cited. Acetic acid, methylphenylthioacetic acid, ethylphenylthioacetic acid, methylethylphenylthioacetic acid, dimethylphenylthioacetic acid, methoxyphenylthioacetic acid, dimethoxy Phenylthioacetic acid, chlorophenylthioacetic acid, dichlorophenylthioacetic acid, N-phenylglycine, phenoxyacetic acid, naphthylthioacetic acid, N-naphthylglycine, naphthyloxy Acetic acid, etc.

作為硫醇化合物者,可以列舉:2-硫基 唑、2-硫基噻唑、2-硫基苯并咪唑、2-硫基苯并噻唑、2-硫基苯并唑、2-硫基菸鹼酸、2-硫基吡啶、2-硫基吡啶-3- 醇、2-硫基吡啶、2-硫基吡啶-3-醇、2-硫基吡啶-N-氧化物、4-胺基-6-羥基-2-硫基嘧啶、4-胺基-6-羥基-2-硫基嘧啶、4-胺基-2-硫基嘧啶、6-胺基-5-亞硝基-2-硫尿嘧啶、4,5-二胺基-6-羥基-2-硫基嘧啶、4,6-二胺基-2-硫基嘧啶、2,4-二胺基-6-硫基嘧啶、4,6-二羥基-2-硫基嘧啶、4,6-二甲基-2-硫基嘧啶、4-羥基-2-硫基-6-甲基嘧啶、4-羥基-2-硫基-6-丙基嘧啶、2-硫基-4-甲基嘧啶、2-硫基嘧啶、2-硫尿嘧啶、3,4,5,6-四氫嘧啶-2-硫醇、4,5-二苯基咪唑-2-硫醇、2-硫基咪唑、2-硫基-1-甲基咪唑、4-胺基-3-聯胺基-5-硫基-1,2,4-三唑、3-胺基-5-硫基-1,2,4-三唑、2-甲基-4H-1,2,4-三唑-3-硫醇、4-甲基-4H-1,2,4-三唑-3-硫醇、3-硫基-1H-1,2,4-三唑-3-硫醇、2-胺基-5-硫基-1,3,4-噻二唑、5-胺基-1,3,4-噻二唑-2-硫醇、2,5-二硫基-1,3,4-噻二唑、(呋喃-2-基)甲烷硫醇、2-硫基-5-噻唑酮、2-硫基噻唑啉、2-硫基-4(3H)-喹唑啉酮、1-苯基-1H-四唑-5-硫醇、2-喹啉硫醇、2-硫基-5-甲基苯并咪唑、2-硫基-5-硝基苯并咪唑、6-胺基-2-硫基苯并噻唑、5-氯-2-硫基苯并噻唑、6-乙氧基-2-硫基苯并噻唑、6-硝基-2-硫基苯并噻唑、2-硫基萘并咪唑、2-硫基萘并唑、3-硫基-1,2,4-三唑、4-胺基-6-硫基吡唑并[2,4-d]吡啶、2-胺基-6-嘌呤硫醇、6-硫基嘌呤、4-硫基-1H-吡唑并[2,4-d]嘧啶、己烷二硫醇、癸烷二硫醇、1,4-雙(甲基硫基)苯、丁二醇雙(3-硫基丙酸酯)、丁二醇雙(3-硫基乙酸酯)、乙二醇雙(3-硫基乙酸酯)、三羥甲基丙烷參(3-硫基乙酸酯)、丁二醇雙(3-硫基丙酸酯)、三羥甲基丙烷參(3-硫基丙酸酯)、三羥甲 基丙烷參(3-硫基乙酸酯)、新戊四醇肆(3-硫基丙酸酯)、新戊四醇肆(3-硫基乙酸酯)、參羥基乙基參(3-硫基丙酸酯)、新戊四醇肆(3-硫基丁酸酯)、1,4-雙(3-硫基丁基氧基)丁烷等。 As the thiol compound, a 2-thio group can be cited. Oxazole, 2-thiothiazole, 2-thiobenzimidazole, 2-thiobenzothiazole, 2-thiobenzophenone Oxazole, 2-thionicotinic acid, 2-thiopyridine, 2-thiopyridin-3-ol, 2-thiopyridine, 2-thiopyridin-3-ol, 2-thiopyridine-N- Oxide, 4-amino-6-hydroxy-2-thiopyrimidine, 4-amino-6-hydroxy-2-thiopyrimidine, 4-amino-2-thiopyrimidine, 6-amino-5 - nitroso-2-thiouracil, 4,5-diamino-6-hydroxy-2-thiopyrimidine, 4,6-diamino-2-thiopyrimidine, 2,4-diamino -6-thiopyrimidine, 4,6-dihydroxy-2-thiopyrimidine, 4,6-dimethyl-2-thiopyrimidine, 4-hydroxy-2-thio-6-methylpyrimidine, 4 -hydroxy-2-thio-6-propylpyrimidine, 2-thio-4-methylpyrimidine, 2-thiopyrimidine, 2-thiouracil, 3,4,5,6-tetrahydropyrimidine-2 -thiol, 4,5-diphenylimidazole-2-thiol, 2-thioimidazole, 2-thiol-1-methylimidazole, 4-amino-3-linked amino-5-thio -1,2,4-triazole, 3-amino-5-thio-1,2,4-triazole, 2-methyl-4H-1,2,4-triazole-3-thiol, 4-methyl-4H-1,2,4-triazole-3-thiol, 3-thio-1H-1,2,4-triazole-3-thiol, 2-amino-5-sulfur Base-1,3,4-thiadiazole, 5-amino-1,3,4-thiadiazole-2-thiol, 2,5-dithio-1,3,4-thiadiazole, (furan-2-yl)methanethiol, 2-thio-5- Thiazolone, 2-thiothiazoline, 2-thio-4(3H)-quinazolinone, 1-phenyl-1H-tetrazole-5-thiol, 2-quinoline thiol, 2-sulfur 5-methylbenzimidazole, 2-thio-5-nitrobenzimidazole, 6-amino-2-thiobenzothiazole, 5-chloro-2-thiobenzothiazole, 6- Ethoxy-2-thiobenzothiazole, 6-nitro-2-thiobenzothiazole, 2-thionaphthazolyl, 2-thionaphthyl Oxazole, 3-thio-1,2,4-triazole, 4-amino-6-thiopyrazolo[2,4-d]pyridine, 2-amino-6-anthracenethiol, 6- Thioquinone, 4-thio-1H-pyrazolo[2,4-d]pyrimidine, hexanedithiol, decanedithiol, 1,4-bis(methylthio)benzene, dibutyl Alcohol bis(3-thiopropionate), butanediol bis(3-thioacetate), ethylene glycol bis(3-thioacetate), trimethylolpropane ginseng (3-sulfuric acid) Acetate), butanediol bis(3-thiopropionate), trimethylolpropane ginseng (3-thiopropionate), trimethylolpropane ginseng (3-thioacetate) ), neopentyl alcohol oxime (3-thiopropionate), neopentyl sterol oxime (3-thioacetate), hydroxyethyl ginseng (3-thiopropionate), neopentyl Alcohol oxime (3-thiobutyrate), 1,4-bis(3-thiobutyloxy)butane, and the like.

在使用聚合起始助劑(C-1)的情形,其含 量,相對於樹脂(A)及聚合性化合物(B)的合計量100質量份,較佳是0.01至50質量份,更佳是0.1至40質量份。 又,相對於每1莫耳聚合起始劑(C),較佳是含有0.01至10莫耳,更佳是0.01至5莫耳。聚合起始助劑(C-1)的含量在此範圍內時,可以更高感度地形成圖案,有提高圖案的生產性之傾向。 In the case of using a polymerization starting aid (C-1), it contains The amount is preferably 0.01 to 50 parts by mass, more preferably 0.1 to 40 parts by mass, per 100 parts by mass of the total of the resin (A) and the polymerizable compound (B). Further, it is preferably 0.01 to 10 moles, more preferably 0.01 to 5 moles per 1 mole of the polymerization initiator (C). When the content of the polymerization initiation aid (C-1) is within this range, the pattern can be formed with higher sensitivity, and the productivity of the pattern tends to be improved.

體質顏料(D)雖無特別限定,但可以使用選 自氧化矽、硫酸鋇、氧化鈦、氧化鋅、氧化鋁、氧化鎂及碳酸鈣所成群組中之至少一種。又,從透明性的觀點而言,體質顏料的平均粒徑是以在500nm以下為佳。其中,從可信度與乾燥膜的低黏性的觀點而言是以氧化矽為佳。 The body pigment (D) is not particularly limited, but can be used. At least one selected from the group consisting of cerium oxide, cerium sulfate, titanium oxide, zinc oxide, aluminum oxide, magnesium oxide, and calcium carbonate. Further, from the viewpoint of transparency, the average particle diameter of the extender pigment is preferably 500 nm or less. Among them, cerium oxide is preferred from the viewpoint of reliability and low viscosity of the dried film.

體質顏料(D)的含量,相對於樹脂(A)及聚合 性化合物(B)的合計量100質量份,較佳是0.1至80質量份,更佳是1至30質量份。體質顏料的含量在此範圍內時,有乾燥膜的低黏性及耐溶劑性變良好之傾向。 The content of the extender pigment (D) relative to the resin (A) and polymerization The total amount of the compound (B) is 100 parts by mass, preferably 0.1 to 80 parts by mass, more preferably 1 to 30 parts by mass. When the content of the extender pigment is within this range, the low viscosity of the dried film and the solvent resistance tend to be good.

本發明的感光性樹脂組成物,是含有溶解 度參數為8.0至9.1(cal/cm3)1/2的溶劑(E1),與溶解度參數為9.2至11.0(cal/cm3)1/2的溶劑(E2)。藉由使用含有此種預定的溶劑之感光性組成物,可以得到有能滿足之低黏 性之乾燥膜,且,可以得到有能滿足之硬度之圖案。 The photosensitive resin composition of the present invention is a solvent (E1) having a solubility parameter of 8.0 to 9.1 (cal/cm 3 ) 1/2 and a solvent having a solubility parameter of 9.2 to 11.0 (cal/cm 3 ) 1/2 . (E2). By using a photosensitive composition containing such a predetermined solvent, a dried film having a low viscosity which can be satisfied can be obtained, and a pattern having a hardness which can be satisfied can be obtained.

作為溶解度參數為8.0至9.1(cal/cm3)1/2 的溶劑(E1)者,於括弧中記載而附上其之溶解度參數((cal/cm3)1/2)時,可以列舉:乙二醇單異丁基醚(8.9)、二乙二醇單2-乙基己基醚(8.4)、二丙二醇單正丙基醚(8.8)、二丙二醇單正丁基醚(8.5)、三丙二醇單正丙基醚(8.5)、三丙二醇單正丁基醚(8.2)、乙二醇二甲基醚(8.6)、二乙二醇二甲基醚(8.6)、二乙二醇二乙基醚(8.6)、二乙二醇二正丁基醚(8.3)、三乙二醇二甲基醚(8.4)、二乙二醇乙基甲基醚(8.6)、二乙二醇單正丁基醚乙酸酯(9.0)、丙二醇單甲基醚乙酸酯(9.0)、二丙二醇單甲基醚乙酸酯(8.1)、乙基-3-乙氧基丙酸酯(9.1)、乙酸正丙酯(8.6)、丙酸正丙酯(8.6)、丙酸正丁酯(8.3)、丙酸正戊酯(8.4)、乙酸乙酯(9.1)、乙酸丁酯(8.3)等。 其中,從溶解度的觀點而言,以如丙二醇單甲基醚乙酸酯的二醇單醚之醯酯(acylate)為佳,以如伸烷二醇、二伸烷二醇或是三伸烷二醇的單烷基醚的烷酸酯(alkanoate)為更佳。 When the solvent (E1) having a solubility parameter of 8.0 to 9.1 (cal/cm 3 ) 1/2 is described in parentheses and the solubility parameter ((cal/cm 3 ) 1/2 ) is attached, it is exemplified: Ethylene glycol monoisobutyl ether (8.9), diethylene glycol mono-2-ethylhexyl ether (8.4), dipropylene glycol mono-n-propyl ether (8.8), dipropylene glycol mono-n-butyl ether (8.5), three Propylene glycol mono-n-propyl ether (8.5), tripropylene glycol mono-n-butyl ether (8.2), ethylene glycol dimethyl ether (8.6), diethylene glycol dimethyl ether (8.6), diethylene glycol diethyl Ethyl ether (8.6), diethylene glycol di-n-butyl ether (8.3), triethylene glycol dimethyl ether (8.4), diethylene glycol ethyl methyl ether (8.6), diethylene glycol single positive Butyl ether acetate (9.0), propylene glycol monomethyl ether acetate (9.0), dipropylene glycol monomethyl ether acetate (8.1), ethyl-3-ethoxypropionate (9.1), N-propyl acetate (8.6), n-propyl propionate (8.6), n-butyl propionate (8.3), n-amyl propionate (8.4), ethyl acetate (9.1), butyl acetate (8.3), and the like. Among them, from the viewpoint of solubility, it is preferred to use an acylate of a diol monoether such as propylene glycol monomethyl ether acetate, such as an alkylene glycol, a dialkylene glycol or a tri-alkylene. The alkanoate of the monoalkyl ether of the diol is more preferred.

作為溶解度參數為9.2至11.0(cal/cm3)1/2 的溶劑(E2)者,於括弧中記載而附上其之溶解度參數((cal/cm3)1/2)時,可以列舉:乙二醇單丙基醚(10.6)、乙二醇單異丙基醚(9.2)、乙二醇單正丁基醚(10.2)、乙二醇單己基醚(9.4)、乙二醇單苯基醚(10.9)、乙二醇單苯甲基醚(10.8)、乙二醇單烯丙基醚(9.8)、二乙二醇單甲基醚(10.7)、二乙二醇單正丁基醚(10.0)、二乙二醇單己基醚(9.7)、二乙二醇單 2-乙基己基醚(9.2)、二乙二醇單苯甲基醚(9.6)、三乙二醇單甲基醚(10.2)、三乙二醇單乙基醚(9.9)、三乙二醇單正丁基醚(9.3)、聚乙二醇單甲基醚(9.2)、丙二醇單甲基醚(10.7)、丙二醇單正丙基醚(9.7)、丙二醇單正丁基醚(9.3)、丙二醇單三級丁基醚(9.7)、丙二醇單苯基醚(11.0)、二丙二醇單甲基醚(9.6)、三丙二醇單甲基醚(9.4)、乙二醇單正丁基醚乙酸酯(10.3)、丙二醇二乙酸酯(9.6)、甲基3-甲氧基丙酸酯(9.5)、乳酸甲酯(10.7)、乳酸丁酯(9.8)、環己酮(9.9)、4-羥基-4-甲基-2-戊酮(別名二丙酮醇)(10.2)、1-丁醇(11.4)、二烷(10.0)、氯仿(9.3)、丙酮(9.9)、1,1,2,2-四氯乙烷(9.7)等。其中,從溶解性的觀點而言,以羥基化合物為佳,以如丙二醇單甲基醚的二醇單醚、或如4-羥基-4-甲基-2-戊酮的羥基酮為更佳,以伸烷二醇、二伸烷二醇、或是三伸烷二醇的單烷基醚、或羥基烷酮為更佳。 When the solvent (E2) having a solubility parameter of 9.2 to 11.0 (cal/cm 3 ) 1/2 is described in parentheses and the solubility parameter ((cal/cm 3 ) 1/2 ) is attached, it is exemplified: Ethylene glycol monopropyl ether (10.6), ethylene glycol monoisopropyl ether (9.2), ethylene glycol mono-n-butyl ether (10.2), ethylene glycol monohexyl ether (9.4), ethylene glycol monobenzene Ether (10.9), ethylene glycol monomethyl ether (10.8), ethylene glycol monoallyl ether (9.8), diethylene glycol monomethyl ether (10.7), diethylene glycol mono-n-butyl Ether (10.0), diethylene glycol monohexyl ether (9.7), diethylene glycol mono 2-ethylhexyl ether (9.2), diethylene glycol monobenzyl ether (9.6), triethylene glycol monomethyl Ether (10.2), triethylene glycol monoethyl ether (9.9), triethylene glycol mono-n-butyl ether (9.3), polyethylene glycol monomethyl ether (9.2), propylene glycol monomethyl ether (10.7 ), propylene glycol mono-n-propyl ether (9.7), propylene glycol mono-n-butyl ether (9.3), propylene glycol mono-tert-butyl ether (9.7), propylene glycol monophenyl ether (11.0), dipropylene glycol monomethyl ether (9.6) ), tripropylene glycol monomethyl ether (9.4), ethylene glycol mono-n-butyl ether acetate (10.3), propylene glycol diacetate (9.6), methyl 3-methoxypropionic acid (9.5), methyl lactate (10.7), butyl lactate (9.8), cyclohexanone (9.9), 4-hydroxy-4-methyl-2-pentanone (alias diacetone alcohol) (10.2), 1- Butanol (11.4), two Alkane (10.0), chloroform (9.3), acetone (9.9), 1,1,2,2-tetrachloroethane (9.7), and the like. Among them, from the viewpoint of solubility, a hydroxy compound is preferred, and a diol monoether such as propylene glycol monomethyl ether or a hydroxy ketone such as 4-hydroxy-4-methyl-2-pentanone is more preferred. More preferably, it is a monoalkyl ether or a hydroxyalkanone of an alkylene glycol, a dialkylene glycol or a trialkylene glycol.

溶解度參數為8.0至9.1(cal/cm3)1/2的溶劑 (E1)含量,相對於溶劑(E),是70至99質量%,較佳是70至97質量%,溶解度參數為9.2至11.0(cal/cm3)1/2的溶劑(E2)含量,相對於溶劑(E),是1至30質量%,較佳是3至30質量%。溶劑的質量%之比率在前述範圍時,溶解性、塗布時的平坦性有變良好的傾向。又,溶劑(E),雖也可以含有溶劑(E1)及溶劑(E2)以外的溶劑,但其之含量,相對於溶劑(E),通常是20質量%以下,較佳是10質量%以下。 The solvent (E1) content of the solubility parameter of 8.0 to 9.1 (cal/cm 3 ) 1/2 is 70 to 99% by mass, preferably 70 to 97% by mass, based on the solvent (E), and the solubility parameter is 9.2 to The solvent (E2) content of 11.0 (cal/cm 3 ) 1/2 is 1 to 30% by mass, preferably 3 to 30% by mass based on the solvent (E). When the ratio of the mass % of the solvent is within the above range, the solubility and flatness at the time of coating tend to be improved. In addition, the solvent (E) may contain a solvent other than the solvent (E1) and the solvent (E2), but the content thereof is usually 20% by mass or less, preferably 10% by mass or less based on the solvent (E). .

又,溶解度參數是由下述式求得。 Further, the solubility parameter was obtained by the following formula.

溶解度參數=(△E/V)1/2 Solubility parameter = (ΔE/V) 1/2

△E:凝集能量(蒸發焓(enthalpy))、V:莫耳體積 △E: agglutination energy (enthalpy), V: molar volume

溶劑(E)可以在合成黏合劑樹脂(A)之際使用。 The solvent (E) can be used in the synthesis of the binder resin (A).

溶劑(E)的含量,相對於感光性樹脂組成物,較佳是60至95質量%,更佳是70至90質量%。換言之,感光性樹脂組成物的固形物,較佳是5至40質量%,更佳是10至30質量%。溶劑(E)的含量在前述範圍時,塗布時的平坦性有變良好的傾向。 The content of the solvent (E) is preferably from 60 to 95% by mass, more preferably from 70 to 90% by mass, based on the photosensitive resin composition. In other words, the solid content of the photosensitive resin composition is preferably from 5 to 40% by mass, more preferably from 10 to 30% by mass. When the content of the solvent (E) is in the above range, the flatness at the time of coating tends to be good.

本發明的感光性樹脂組成物,係以更含有著色劑(F)為佳。作為此種著色劑(F)者,可以列舉顏料及染料,但從圖案之耐熱性及耐光性的觀點而言,以含有顏料為佳,從圖案之透光性的觀點而言,以含有染料為佳,以含有顏料及染料為更佳。 The photosensitive resin composition of the present invention preferably contains a coloring agent (F). Examples of such a coloring agent (F) include a pigment and a dye. From the viewpoint of heat resistance and light resistance of the pattern, it is preferable to contain a pigment, and from the viewpoint of light transmittance of the pattern, a dye is contained. It is preferred to contain pigments and dyes as better.

作為顏料者,係列舉有機顏料及無機顏料,可以列舉在彩色指數(The Society of Dyers and Colourists出版)中分類為顏料的化合物。 As the pigment, examples of organic pigments and inorganic pigments include compounds classified as pigments in the color index (published by The Society of Dyers and Colourists).

作為有機顏料者,係列舉:C.I.顏料黃1、3、12、13、14、15、16、17、20、24、31、53、83、86、93、94、109、110、117、125、128、137、138、139、147、148、150、153、154、166、173、194、214等黃色顏料;C.I.顏料橘13、31、36、38、40、42、43、51、55、59、61、64、65、71、73等橘色顏料;C.I.顏料紅9、97、105、122、123、144、149、166、168、176、177、180、192、209、215、216、224、242、254、 255、264、265等紅色顏料;C.I.顏料藍15、15:3、15:4、15:6、60等藍色顏料;C.I.顏料紫1、19、23、29、32、36、38等紫色顏料;C.I.顏料綠7、36、58等綠色顏料;C.I.顏料褐23、25等褐色顏料;C.I.顏料黑1、7等黑色顏料等。 As an organic pigment, the series: CI Pigment Yellow 1, 3, 12, 13, 14, 15, 16, 17, 20, 24, 31, 53, 83, 86, 93, 94, 109, 110, 117, 125 Yellow pigments such as 128, 137, 138, 139, 147, 148, 150, 153, 154, 166, 173, 194, 214; CI pigments orange 13, 13, 36, 38, 40, 42, 43, 51, 55 , 59, 61, 64, 65, 71, 73 and other orange pigments; CI pigment red 9, 97, 105, 122, 123, 144, 149, 166, 168, 176, 177, 180, 192, 209, 215, 216, 224, 242, 254, 255, 264, 265 and other red pigments; CI pigment blue 15, 15:3, 15:4, 15:6, 60 and other blue pigments; CI pigment purple 1, 19, 23, 29, 32, 36, 38 and other purple Pigment; CI pigment green 7, 36, 58 and other green pigments; CI pigment brown 23, 25 and other brown pigments; CI pigment black 1, 7 and other black pigments.

其中,以C.I.顏料黃138、139、150,C.I.顏料紅177、242、254,C.I.顏料紫23,C.I.顏料藍15:3、15:6,C.I.顏料綠7、36、58為佳。 Among them, C.I. Pigment Yellow 138, 139, 150, C.I. Pigment Red 177, 242, 254, C.I. Pigment Violet 23, C.I. Pigment Blue 15:3, 15:6, C.I. Pigment Green 7, 36, 58 are preferred.

此等顏料,可以單獨也可以混合2種以上而使用。 These pigments may be used singly or in combination of two or more.

前述顏料,可因應需要施以下述處理:松脂處理、使用經導入酸性基或是鹼性基之顏料衍生物或顏料分散劑等之表面處理、藉由高分子化合物等而對顏料表面的接枝處理、藉由硫酸微粒化法等之微粒化處理、或是為了除去雜質而藉由有機溶劑或水等之洗淨處理、藉由離子性雜質的離子交換法等的除去處理等。又,顏料是以有均勻粒徑為佳。藉由含有顏料分散劑進行分散處理,可以得到顏料在溶液中均勻分散之狀態的顏料分散液。 The pigment may be subjected to the following treatments as needed: rosin treatment, surface treatment using a pigment derivative or a pigment dispersant introduced with an acidic group or a basic group, grafting of a pigment surface by a polymer compound or the like. The treatment is performed by a micronization treatment such as a sulfuric acid micronization method, a cleaning treatment by an organic solvent or water to remove impurities, a removal treatment by an ion exchange method using an ionic impurity, or the like. Further, the pigment is preferably a uniform particle size. By dispersing the pigment dispersant, a pigment dispersion in a state in which the pigment is uniformly dispersed in the solution can be obtained.

作為前述顏料分散劑者,可以使用市售的界面活性劑,可以列舉:矽氧系、氟系、酯系、陽離子系、陰離子系、非離子系、兩性、聚酯系、聚胺系、丙烯酸系等界面活性劑等。作為前述界面活性劑者,可以列舉:聚氧乙烯烷基醚類、聚氧乙烯烷基苯基醚類、聚乙二醇二酯 類、山梨糖醇酐脂肪酸酯類、脂肪酸改質聚酯類、3級胺改質聚胺基甲酸乙酯類、聚乙烯亞胺類等之外,商品名方面可以列舉KP(信越化學工業(股)製)、Flowlen(共榮社化學(股)製)、Solsperse(Zeneca(股)製)、EFKA(日本BASF(股)製)、Ajisper(註冊商標)(味之素精緻科技(股)製)、Disperbyk(BYK公司製)等。此等,可以分別單獨使用,也可以組合2種以上來使用。 As the pigment dispersant, commercially available surfactants can be used, and examples thereof include an anthracene oxygen system, a fluorine system, an ester system, a cationic system, an anionic system, a nonionic system, an amphoteric acid, a polyester system, a polyamine system, and an acrylic acid. Such as surfactants and the like. Examples of the surfactant include polyoxyethylene alkyl ethers, polyoxyethylene alkylphenyl ethers, and polyethylene glycol diesters. In addition to the class, sorbitan fatty acid esters, fatty acid modified polyesters, tertiary amine modified polyurethanes, polyethyleneimine, etc., the trade name can be listed as KP (Shin-Etsu Chemical Industry ( Stocks), Flowlen (Kyoeisha Chemical Co., Ltd.), Solsperse (Zeneca), EFKA (Japan BASF), Ajisper (registered trademark) (Ajinomoto Exquisite Technology) System), Disperbyk (BYK company), etc. These may be used alone or in combination of two or more.

在使用顏料分散劑的情形,其使用量,相對於顏料,較佳是100質量%以下,更佳是5至50質量%。顏料分散劑的使用量在前述之範圍內時,有可以得到均勻分散狀態之顏料分散液的傾向。 In the case of using a pigment dispersant, the amount thereof to be used is preferably 100% by mass or less, more preferably 5 to 50% by mass based on the pigment. When the amount of the pigment dispersant used is within the above range, there is a tendency that a pigment dispersion liquid in a uniformly dispersed state can be obtained.

作為著色劑(F)者,可以使用公知的染料,作為染料者,可以列舉:油溶性染料、酸性染料等。 As the coloring agent (F), a known dye can be used, and examples of the dye include oil-soluble dyes and acid dyes.

此等染料,係配合對溶劑的溶解度以及使用含有該染料的著色硬化性樹脂組成物而形成彩色濾光片之圖案時之光褪色耐性或分光光譜而適當地選擇。 These dyes are appropriately selected in accordance with the solubility in a solvent and the light fading resistance or the spectral spectrum when a color filter composition containing the dye is used to form a pattern of a color filter.

染料無特別限定,可以使用公知的染料,例如,可以列舉:溶劑染料、酸性染料、直接染料、媒染染料等。作為染料者,例如,可以列舉在彩色指數(The Society of Dyers and Colourists出版)中分類為顏料以外之有色相者的化合物,或在染色筆記(色染公司)中記載之習知染料。又,依化學結構的話,可以列舉:偶氮染料、菁染料(cyanine dye)、三苯基甲烷染料、呫噸(xanthene)染料、酞菁染料、蒽醌染料、萘醌染料、醌亞胺染料、次甲基染 料、偶氮次甲基染料、方酸菁染料(Squarylium Dyes)、吖啶染料、苯乙烯基染料、香豆素染料、喹啉染料、及硝基染料等。其中以有機溶劑可溶性染料為佳。 The dye is not particularly limited, and a known dye can be used. For example, a solvent dye, an acid dye, a direct dye, a mordant dye, or the like can be given. As the dye, for example, a compound classified as a colored phase other than a pigment in a color index (published by The Society of Dyers and Colourists) or a conventional dye described in a dyeing note (color dyeing company) can be cited. Further, depending on the chemical structure, there may be mentioned azo dyes, cyanine dyes, triphenylmethane dyes, xanthene dyes, phthalocyanine dyes, anthraquinone dyes, naphthoquinone dyes, quinone imine dyes. Hypomethyl dye Materials, azo methine dyes, squarylium dyes (Squarylium Dyes), acridine dyes, styryl dyes, coumarin dyes, quinoline dyes, and nitro dyes. Among them, organic solvent-soluble dyes are preferred.

具體上,可以列舉:C.I.溶劑黃4、14、15、23、24、38、62、63、68、82、94、98、99、117、162、163、167、189;C.I.溶劑紅45、49、111、125、130、143、145、146、150、151、155、168、169、172、175、181、207、218、222、227、230、245、247;C.I.溶劑橘2、7、11、15、26、56、77、86;C.I.溶劑紫11、13、14、26、31、36、37、38、45、47、48、51、59、60;C.I.溶劑藍4、5、14、18、35、36、37、45、58、59、59:1、63、67、68、69、70、78、79、83、90、94、97、98、100、101、102、104、105、111、112、122、128、132、136、139;C.I.溶劑綠1、3、4、5、7、28、29、32、33、34、35等C.I.溶劑染料;C.I.酸性黃1、3、7、9、11、17、23、25、29、34、36、38、40、42、54、65、72、73、76、79、98、99、111、112、113、114、116、119、123、128、134、135、138、139、140、144、150、155、157、160、161、163、168、169、172、177、178、179、184、190、193、196、197、199、202、203、204、205、207、212、214、220、221、228、230、232、235、238、 240、242、243、251;C.I.酸性紅1、4、8、14、17、18、26、27、29、31、33、34、35、37、40、42、44、50、51、52、57、66、73、76、80、87、88、91、92、94、95、97、98、103、106、111、114、129、133、134、138、143、145、150、151、155、158、160、172、176、182、183、195、198、206、211、215、216、217、227、228、249、252、257、258、260、261、266、268、270、274、277、280、281、289、308、312、315、316、339、341、345、346、349、382、383、388、394、401、412、417、418、422、426;C.I.酸性橘6、7、8、10、12、26、50、51、52、56、62、63、64、74、75、94、95、107、108、169、173;C.I.酸性紫6B、7、9、15、16、17、19、21、23、24、25、30、34、38、49、72、102;C.I.酸性藍1、3、5、7、9、11、13、15、17、18、22、23、24、25、26、27、29、34、38、40、41、42、43、45、48、51、54、59、60、62、70、72、74、75、78、80、82、83、86、87、88、90、90:1、91、92、93、93:1、96、99、100、102、103、104、108、109、110、112、113、117、119、120、123、126、127、129、130、131、138、140、142、143、147、150、151、154、158、161、166、167、168、170、171、175、182、183、184、187、192、199、203、204、205、210、213、229、234、236、242、243、256、259、267、269、278、280、285、290、296、315、324:1、335、340; C.I.酸性綠1、3、5、6、7、8、9、11、13、14、15、16、22、25、27、28、41、50、50:1、58、63、65、80、104、105、106、109等C.I.酸性染料;C.I.直接黃2、33、34、35、38、39、43、47、50、54、58、68、69、70、71、86、93、94、95、98、102、108、109、129、136、138、141;C.I.直接紅79、82、83、84、91、92、96、97、98、99、105、106、107、172、173、176、177、179、181、182、184、204、207、211、213、218、220、221、222、232、233、234、241、243、246、250;C.I.直接橘26、34、39、41、46、50、52、56、57、61、64、65、68、70、96、97、106、107;C.I.直接紫47、52、54、59、60、65、66、79、80、81、82、84、89、90、93、95、96、103、104;C.I.直接藍1、2、3、6、8、15、22、25、28、29、40、41、42、47、52、55、57、71、76、77、78、80、81、84、85、86、90、93、94、95、97、98、99、100、101、106、107、108、109、113、114、115、117、119、120、137、149、150、153、155、156、158、159、160、161、162、163、164、165、166、167、168、170、171、172、173、188、189、190、192、193、194、195、196、198、199、200、201、202、203、207、209、210、212、213、214、222、225、226、228、229、236、237、238、242、243、244、245、246、247、248、249、250、251、252、256、257、259、260、268、274、275、293; C.I.直接綠25、27、31、32、34、37、63、65、66、67、68、69、72、77、79、82等C.I.直接染料;C.I.分散黃51、54、76;C.I.分散紫26、27;C.I.分散藍1、14、56、60等C.I.分散染料;C.I.鹼性紅1、10;C.I.鹼性藍1、3、5、7、9、19、21、22、24、25、26、28、29、40、41、45、47、54、58、59、60、64、65、66、67、68、81、83、88、89;C.I.鹼性紫2;C.I.鹼性紅9;C.I.鹼性綠1;等C.I.鹼性染料(Basic dye);C.I.反應性黃2、76、116;C.I.反應性橘16;C.I.反應性紅36;等C.I.反應性染料;C.I.媒染黃5、8、10、16、20、26、30、31、33、42、43、45、56、61、62、65;C.I.媒染紅1、2、3、4、9、11、12、14、17、18、19、22、23、24、25、26、27、29、30、32、33、36、37、38、39、41、42、43、45、46、48、52、53、56、62、63、71、74、76、78、85、86、88、90、94、95;C.I.媒染橘3、4、5、8、12、13、14、20、21、23、24、28、29、32、34、35、36、37、42、43、47、48;C.I.媒染紫1、1:1、2、3、4、5、6、7、8、10、11、 14、15、16、17、18、19、21、22、23、24、27、28、30、31、32、33、36、37、39、40、41、44、45、47、48、49、53、58;C.I.媒染藍1、2、3、7、8、9、12、13、15、16、19、20、21、22、23、24、26、30、31、32、39、40、41、43、44、48、49、53、61、74、77、83、84;C.I.媒染綠1、3、4、5、10、13、15、19、21、23、26、29、31、33、34、35、41、43、53等C.I.媒染染料(Mordant dye)。 Specifically, CI solvent yellow 4, 14, 15, 23, 24, 38, 62, 63, 68, 82, 94, 98, 99, 117, 162, 163, 167, 189; CI solvent red 45, 49, 111, 125, 130, 143, 145, 146, 150, 151, 155, 168, 169, 172, 175, 181, 207, 218, 222, 227, 230, 245, 247; CI solvent orange 2, 7 , 11, 15, 26, 56, 77, 86; CI solvent violet 11, 13, 14, 26, 31, 36, 37, 38, 45, 47, 48, 51, 59, 60; CI solvent blue 4, 5 , 14, 18, 35, 36, 37, 45, 58, 59, 59: 1, 63, 67, 68, 69, 70, 78, 79, 83, 90, 94, 97, 98, 100, 101, 102 , 104, 105, 111, 112, 122, 128, 132, 136, 139; CI solvent green 1, 3, 4, 5, 7, 28, 29, 32, 33, 34, 35 and other CI solvent dye; CI acid Yellow 1, 3, 7, 9, 11, 17, 23, 25, 29, 34, 36, 38, 40, 42, 54, 65, 72, 73, 76, 79, 98, 99, 111, 112, 113 , 114, 116, 119, 123, 128, 134, 135, 138, 139, 140, 144, 150, 155, 157, 160, 161, 163, 168, 169, 172, 177, 178, 179, 184, 190 193, 196, 197, 199, 202, 203, 204, 205, 207, 212, 214, 220, 221, 228, 230, 232, 235, 238, 240, 242, 243, 251; CI acid red 1, 4, 8, 14, 17, 18, 26, 27, 29, 31, 33, 34, 35, 37, 40, 42, 44, 50, 51, 52 , 57, 66, 73, 76, 80, 87, 88, 91, 92, 94, 95, 97, 98, 103, 106, 111, 114, 129, 133, 134, 138, 143, 145, 150, 151 , 155, 158, 160, 172, 176, 182, 183, 195, 198, 206, 211, 215, 216, 217, 227, 228, 249, 252, 257, 258, 260, 261, 266, 268, 270 , 274, 277, 280, 281, 289, 308, 312, 315, 316, 339, 341, 345, 346, 349, 382, 383, 388, 394, 401, 412, 417, 418, 422, 426; CI Acid Orange 6,6,8,10,12,26,50,51,52,56,62,63,64,74,75,94,95,107,108,169,173; CI Acid Violet 6B, 7 , 9, 15, 16, 17, 19, 21, 23, 24, 25, 30, 34, 38, 49, 72, 102; CI Acid Blue 1, 3, 5, 7, 9, 11, 13, 15, 17, 18, 22, 23, 24, 25, 26, 27, 29, 34, 38, 40, 41, 42, 43, 45, 48, 51, 54, 59, 60, 62, 70, 72, 74, 75, 78, 80, 82, 83, 86, 87, 88, 90, 9 0: 1, 91, 92, 93, 93: 1, 96, 99, 100, 102, 103, 104, 108, 109, 110, 112, 113, 117, 119, 120, 123, 126, 127, 129, 130, 131, 138, 140, 142, 143, 147, 150, 151, 154, 158, 161, 166, 167, 168, 170, 171, 175, 182, 183, 184, 187, 192, 199, 203, 204, 205, 210, 213, 229, 234, 236, 242, 243, 256, 259, 267, 269, 278, 280, 285, 290, 296, 315, 324: 1, 335, 340; CI Acid Green 1, 3, 5, 6, 7, 8, 9, 11, 13, 14, 15, 16, 22, 25, 27, 28, 41, 50, 50:1, 58, 63, 65, 80 , 104, 105, 106, 109 and other CI acid dyes; CI direct yellow 2, 33, 34, 35, 38, 39, 43, 47, 50, 54, 58, 68, 69, 70, 71, 86, 93, 94, 95, 98, 102, 108, 109, 129, 136, 138, 141; CI Direct Red 79, 82, 83, 84, 91, 92, 96, 97, 98, 99, 105, 106, 107, 172 , 173, 176, 177, 179, 181, 182, 184, 204, 207, 211, 213, 218, 220, 221, 222, 232, 233, 234, 241, 243, 246, 250; CI Direct Orange 26, 34, 39, 41, 46, 50, 52, 56, 57, 61, 64, 65, 68, 70, 96, 97, 106, 107; CI Direct Violet 47, 52, 54, 59, 60, 65, 66 , 79, 80, 81, 82, 84, 89, 90, 93, 95, 96, 103, 104; CI direct blue 1, 2, 3, 6, 8, 15, 22, 25, 28, 29, 40, 41, 42, 47, 52, 55, 57, 71, 76, 77, 78, 80, 81, 84, 85, 86, 90, 93, 94, 95, 97, 98, 99, 100, 101, 106, 107, 108, 109, 113, 114, 115, 117, 119, 120 137, 149, 150, 153, 155, 156, 158, 159, 160, 161, 162, 163, 164, 165, 166, 167, 168, 170, 171, 172, 173, 188, 189, 190, 192, 193, 194, 195, 196, 198, 199, 200, 201, 202, 203, 207, 209, 210, 212, 213, 214, 222, 225, 226, 228, 229, 236, 237, 238, 242, 243, 244, 245, 246, 247, 248, 249, 250, 251, 252, 256, 257, 259, 260, 268, 274, 275, 293; CI direct green CI direct dyes such as 25, 27, 31, 32, 34, 37, 63, 65, 66, 67, 68, 69, 72, 77, 79, 82; CI disperse yellow 51, 54, 76; CI dispersion Violet 26, 27; CI disperse blue 1, 14, 56, 60 and other CI disperse dyes; CI alkaline red 1, 10; CI alkaline blue 1, 3, 5, 7, 9, 19, 21, 22, 24, 25,26,28,29,40,41,45,47,54,58,59,60,64,65,66,67,68,81,83,88,89; CI alkaline violet 2; CI base Sex red 9; CI alkaline green 1; equal CI basic dye (Basic dye); CI reactive yellow 2, 76, 116; CI reactive orange 16; CI reactive red 36; iso-CI reactive dye; Yellow 5, 8, 10, 16, 20, 26, 30, 31, 33, 42, 43, 45, 56, 61, 62, 65; CI mordant red 1, 2, 3, 4, 9, 11, 12, 14, 17, 18, 19, 22, 23, 24, 25, 26, 27, 29, 30, 32, 33, 36, 37, 38, 39, 41, 42, 43, 45, 46, 48, 52, 53, 56, 62, 63, 71, 74, 76, 78, 85, 86, 88, 90, 94, 95; CI mordant orange 3, 4, 5, 8, 12, 13, 14, 20, 21, 23 , 24, 28, 29, 32, 34, 35, 36, 3 7, 42, 43, 47, 48; C.I. mordant purple 1, 1:1, 2, 3, 4, 5, 6, 7, 8, 10, 11, 14, 15, 16, 17, 18, 19, 21, 22, 23, 24, 27, 28, 30, 31, 32, 33, 36, 37, 39, 40, 41, 44, 45, 47, 48, 49, 53, 58; CI mordant blue 1, 2, 3, 7, 8, 9, 12, 13, 15, 16, 19, 20, 21, 22, 23, 24, 26, 30, 31, 32, 39 , 40, 41, 43, 44, 48, 49, 53, 61, 74, 77, 83, 84; CI mord green 1, 3, 4, 5, 10, 13, 15, 19, 21, 23, 26, 29, 31, 33, 34, 35, 41, 43, 53 and other CI mordant dyes (Mordant dye).

C.I.還原綠1等C.I.還原染料(Vat dye;又稱為甕染料)等。 C.I. Reduction of green 1, etc. C.I. vat dye (Vat dye; also known as anthraquinone dye).

此等染料,只要配合所期望之彩色濾光片的分光光譜而適當選擇即可。 These dyes may be appropriately selected in accordance with the spectral spectrum of a desired color filter.

染料是以含有在分子內具有呫噸骨架的化合物為佳。 The dye is preferably a compound containing a xanthene skeleton in the molecule.

著色劑(F)的含量,相對於感光性樹脂組成物的固形分,較佳是5至60質量%,更佳是5至45質量%。著色劑(F)的含量在前述之範圍內時,可以得到所期望之分光或色濃度。 The content of the colorant (F) is preferably from 5 to 60% by mass, more preferably from 5 to 45% by mass, based on the solid content of the photosensitive resin composition. When the content of the colorant (F) is within the above range, the desired spectral or color concentration can be obtained.

本發明的感光性樹脂組成物,可以含有界面活性劑。作為界面活性劑者,可以列舉:矽氧系界面活性劑、氟系界面活性劑、有氟原子之矽氧系界面活性劑等。藉由含有界面活性劑,有塗布時的平坦性變良好之傾向。 The photosensitive resin composition of the present invention may contain a surfactant. Examples of the surfactant include a ruthenium-based surfactant, a fluorine-based surfactant, and a ruthenium-based surfactant having a fluorine atom. When the surfactant is contained, the flatness at the time of coating tends to be good.

作為矽氧系界面活性劑者,可以列舉:有 矽氧烷鍵之界面活性劑。具體上,可以列舉:Toray silicon DC3PA、同SH7PA、同DC11PA、同SH21PA、同SH28PA、同SH29PA、同SH30PA、聚醚改質矽油SH8400(東麗道康寧(Toray Dow Corning)(股)製),KP321、KP322、KP323、KP324、KP326、KP340、KP341(信越化學工業(股)製),TSF400、TSF401、TSF410、TSF4300、TSF4440、TSF4445、TSF-4446、TSF4452、TSF4460(日本Momentive Performance Materials合同公司製)等。 As the oxime-based surfactant, one can cite: A surfactant for the siloxane coupling. Specifically, Toray silicon DC3PA, the same SH7PA, the same DC11PA, the same SH21PA, the same SH28PA, the same SH29PA, the same SH30PA, the polyether modified oyster oil SH8400 (Toray Dow Corning (stock) system), KP321 , KP322, KP323, KP324, KP326, KP340, KP341 (Shin-Etsu Chemical Co., Ltd.), TSF400, TSF401, TSF410, TSF4300, TSF4440, TSF4445, TSF-4446, TSF4452, TSF4460 (made by Japan Momentive Performance Materials Contracting Co., Ltd.) Wait.

作為氟系界面活性劑者,可以列舉有氟碳 鏈之界面活性劑。具體上,可以列舉:Fluorinert(註冊商標)FC430、同FC431(住友3M(股)製),Megafac(註冊商標)F142D、同F171、同F172、同F173、同F177、同F183、同R30(DIC(股)製),EFTOP(註冊商標)EF301、同EF303、同EF351、同EF352(三菱材料電子化成(股)製),Surflon(註冊商標)S381、同S382、同SC101、同SC105(旭硝子(股)製),E5844(Daikin工業(股)製)等。 As a fluorine-based surfactant, fluorocarbon can be cited Chain surfactant. Specifically, Fluorinert (registered trademark) FC430, FC431 (Sumitomo 3M (share) system), Megafac (registered trademark) F142D, F171, F172, F173, F177, F183, R30 (DIC) (share) system, EFTOP (registered trademark) EF301, EF303, EF351, EF352 (Mitsubishi Materials Electronics Co., Ltd.), Surflon (registered trademark) S381, same as S382, same as SC101, with SC105 (Asahi Glass ( Shares), E5844 (Daikin Industrial Co., Ltd.), etc.

作為有氟原子之矽氧系界面活性劑者,可 以列舉:有矽氧烷鍵及氟碳鏈之界面活性劑。具體上,可以列舉:Megafac(註冊商標)R08、同BL20、同F475、同F477、同F443(DIC(股)製)等。較佳可列舉Megafac(註冊商標)F475。 As a fluorene-based surfactant having a fluorine atom, To name: a surfactant having a siloxane chain and a fluorocarbon chain. Specific examples include Megafac (registered trademark) R08, BL30, F475, F477, and F443 (DIC). Preferably, Megafac (registered trademark) F475 is mentioned.

界面活性劑,相對於感光性樹脂組成物, 較佳是0.001質量%至0.2質量%,更佳是0.002質量%至0.1質量%,特佳是0.01質量%至0.05質量%。藉由含有界 面活性劑在此範圍,可以使塗膜的平坦性變成良好。 a surfactant, relative to the photosensitive resin composition, It is preferably 0.001% by mass to 0.2% by mass, more preferably 0.002% by mass to 0.1% by mass, particularly preferably 0.01% by mass to 0.05% by mass. By inclusion In the range of the surfactant, the flatness of the coating film can be made good.

本發明的感光性樹脂組成物,可因應需要 而含有填充劑、其他的高分子化合物、密著促進劑、抗氧化劑、紫外線吸收劑、光安定劑、鏈轉移劑等各種添加劑。 The photosensitive resin composition of the present invention can be used as needed Further, various additives such as a filler, another polymer compound, an adhesion promoter, an antioxidant, an ultraviolet absorber, a photostabilizer, and a chain transfer agent are contained.

本發明的感光性樹脂組成物,可藉由混合 黏合劑樹脂(A)、聚合性化合物(B)、聚合起始劑(C)、體質顏料(D)、溶劑(E)及因應必要的著色劑(F)或其他的成分而得到。 The photosensitive resin composition of the present invention can be mixed by The binder resin (A), the polymerizable compound (B), the polymerization initiator (C), the extender pigment (D), the solvent (E), and the necessary coloring agent (F) or other components are obtained.

又,作為著色劑(F)而混合顏料的情形,例 如,以依照以下的順序調製為佳。 Moreover, as a case where a pigment is mixed as a coloring agent (F), an example For example, it is preferable to modulate in the following order.

首先,將顏料預先與溶劑(E)混合,使用珠 粒研磨機(bead mill)等分散,直到顏料之平均粒徑變成0.2μm以下左右。此時,可因應必要調配顏料分散劑、黏合劑樹脂(A)的一部分或全部。在得到的顏料分散液中,將剩餘的黏合劑樹脂(A)、聚合性化合物(B)、聚合起始劑(C)、體質顏料(D)、及因應必要而使用的其他成分、還有因應必要而追加之溶劑(E),以變成預定之濃度之方式而添加,而可以得到感光性樹脂組成物。 First, the pigment is previously mixed with the solvent (E), and the beads are used. It is dispersed by a grain mill or the like until the average particle diameter of the pigment becomes about 0.2 μm or less. At this time, a part or all of the pigment dispersant and the binder resin (A) may be blended as necessary. In the obtained pigment dispersion liquid, the remaining binder resin (A), the polymerizable compound (B), the polymerization initiator (C), the extender pigment (D), and other components used as necessary, and The solvent (E) which is added as necessary is added so as to become a predetermined concentration, and a photosensitive resin composition can be obtained.

作為本發明之感光性樹脂組成物對基板之 塗布方法者,可以列舉:擠出塗布法、直接凹版塗布法、反轉凹版塗布法、CAP塗布法、模具塗布法等。又,也可以使用浸漬塗布機、輥筒塗布機、棒塗布機、旋轉塗布機、狹縫&旋轉塗布機、狹縫塗布機(也有稱為模具塗布機、簾流塗布機、無旋轉塗布機之情形)、噴墨等塗布裝置塗布。 其中,以使用狹縫塗布機、旋轉塗布機、輥筒塗布機等塗布為佳。 As the photosensitive resin composition of the present invention, the substrate Examples of the coating method include an extrusion coating method, a direct gravure coating method, a reverse gravure coating method, a CAP coating method, and a die coating method. Further, a dip coater, a roll coater, a bar coater, a spin coater, a slit & spin coater, or a slit coater (also referred to as a die coater, a curtain coater, or a spin coater) may be used. In the case of a coating device such as an inkjet. Among them, it is preferred to use a slit coater, a spin coater, a roll coater or the like.

作為在基板上塗布感光性樹脂組成物而得 到之塗膜的乾燥方法者,可以列舉:加熱乾燥、自然乾燥、通風乾燥、減壓乾燥等方法。也可以組合複數種方法來進行。 As a result of coating a photosensitive resin composition on a substrate The method of drying the coating film may be, for example, heating, drying, natural drying, air drying, and drying under reduced pressure. It is also possible to combine a plurality of methods.

乾燥溫度是以10至120℃為佳,以25至100 ℃為更佳。又,加熱時間,以10秒鐘至60分鐘為佳,以30秒鐘至30分鐘為更佳。 Drying temperature is preferably from 10 to 120 ° C, from 25 to 100 °C is better. Further, the heating time is preferably from 10 seconds to 60 minutes, more preferably from 30 seconds to 30 minutes.

減壓乾燥是以在50至150Pa的壓力下,20 至25℃的溫度範圍中進行為佳。 Drying under reduced pressure is at a pressure of 50 to 150 Pa, 20 It is preferably carried out in a temperature range of up to 25 °C.

將塗膜乾燥而得到之乾燥膜的膜厚,並無 特別限定,可以藉由使用的材料、用途等而適當調整,通常,是0.1至20μm,而以1至6μm為佳。 The film thickness of the dried film obtained by drying the coating film is not It is specifically limited and can be suitably adjusted by the material to be used, use, etc., and is usually 0.1 to 20 μm, and preferably 1 to 6 μm.

乾燥膜隔著用以形成目的圖案之光罩而曝 光。此時光罩上之圖案形狀並無特別限定,可使用因應作為目的之用途之圖案形狀。又,作為聚合起始劑(C)而使用熱聚合起始劑的情形,係藉由曝光而使乾燥膜加熱,此熱作用在熱聚合起始劑。 The dried film is exposed through the reticle used to form the target pattern Light. At this time, the shape of the pattern on the photomask is not particularly limited, and a pattern shape for the purpose of the purpose can be used. Further, in the case where a thermal polymerization initiator is used as the polymerization initiator (C), the dried film is heated by exposure, and this heat acts on the thermal polymerization initiator.

作為在曝光所使用的光源者,係以產生250 至450nm波長之光的光源為佳。例如,將未達350nm的光,使用遮斷此波長區域的濾光片來遮斷,或者將436nm附近、408nm附近、365nm附近的光,使用取出此等波長區域的帶通濾光片(band pass filter)選擇性地取出。作為光源 者,可列舉:水銀燈、發光二極管、金屬鹵素燈、鹵素燈等。 As the light source used in the exposure, to produce 250 A light source of light having a wavelength of 450 nm is preferred. For example, light having a wavelength of less than 350 nm is blocked by using a filter that blocks the wavelength region, or light having a wavelength range of around 436 nm, around 408 nm, and around 365 nm is used. Pass filter) Selectively remove. As a light source For example, mercury lamps, light-emitting diodes, metal halide lamps, halogen lamps, and the like can be cited.

為了可以對曝光面全體均勻地照射平行光 線,或將光罩與基材對齊正確位置,係以使用光罩對準器、步進器等裝置為佳。 In order to uniformly illuminate the entire surface of the exposure surface It is preferable to use a reticle aligner, a stepper, etc. for the wire, or to align the reticle to the correct position of the substrate.

使曝光乾燥膜而得到之曝光膜與顯像液接 觸,而溶解預定部分(例如,未曝光部分),顯像,藉此可以得到圖案。作為顯像液者,雖可以使用有機溶劑,但由於曝光膜的曝光部分不易因顯像液而溶解或澎潤,且可以得到良好形狀的圖案,故以使用鹼性化合物的水溶液為佳。 Exposing the exposed film obtained by exposing the dried film to the developing solution By touching, a predetermined portion (for example, an unexposed portion) is dissolved, developed, whereby a pattern can be obtained. As the developer, an organic solvent can be used. However, since the exposed portion of the exposed film is less likely to be dissolved or wetted by the developing solution, and a pattern having a good shape can be obtained, an aqueous solution using a basic compound is preferred.

顯像方法,可為覆液法、浸漬法、噴霧法 等中任何一種。再者,於顯像時可以將基板傾斜成任意之角度。 Development method, which can be liquid coating method, dipping method, spray method Any of the others. Furthermore, the substrate can be tilted at an arbitrary angle during development.

顯像後,以水洗為佳。 After the development, it is better to wash with water.

作為前述鹼性化合物者,可以列舉:氫氧化鈉、氫氧化鉀、磷酸氫二鈉、磷酸二氫鈉、磷酸氫二銨、磷酸二氫銨、磷酸二氫鉀、矽酸鈉、矽酸鉀、碳酸鈉、碳酸鉀、碳酸氫鈉、碳酸氫鉀、硼酸鈉、硼酸鉀、氨等無機鹼性化合物;四甲基銨氫氧化物、2-羥基乙基三甲基銨氫氧化物、單甲基胺、二甲基胺、三甲基胺、單乙基胺、二乙基胺、三乙基胺、單異丙基胺、二異丙基胺、乙醇胺等有機鹼性化合物。 Examples of the basic compound include sodium hydroxide, potassium hydroxide, disodium hydrogen phosphate, sodium dihydrogen phosphate, diammonium hydrogen phosphate, ammonium dihydrogen phosphate, potassium dihydrogen phosphate, sodium citrate, and potassium citrate. , inorganic basic compounds such as sodium carbonate, potassium carbonate, sodium hydrogencarbonate, potassium hydrogencarbonate, sodium borate, potassium borate, ammonia; tetramethylammonium hydroxide, 2-hydroxyethyltrimethylammonium hydroxide, single An organic basic compound such as methylamine, dimethylamine, trimethylamine, monoethylamine, diethylamine, triethylamine, monoisopropylamine, diisopropylamine or ethanolamine.

其中,以氫氧化鉀、碳酸氫鈉、四甲基銨氫氧化物為 佳。 Among them, potassium hydroxide, sodium hydrogencarbonate, tetramethylammonium hydroxide good.

此等無機及有機鹼性化合物的水溶液中之 濃度,較佳是0.01至10質量%,以0.03至5質量%為更佳。 In an aqueous solution of such inorganic and organic basic compounds The concentration is preferably from 0.01 to 10% by mass, more preferably from 0.03 to 5% by mass.

前述鹼性化合物的水溶液,也可以含有界 面活性劑。 The aqueous solution of the aforementioned basic compound may also contain a boundary Surfactant.

作為界面活性劑者,可以列舉:聚氧乙烯 烷基醚、聚氧乙烯芳基醚、聚氧乙烯烷基芳基醚、其他的聚氧乙烯衍生物、氧乙烯/氧丙烯嵌段共聚合物、山梨糖醇酐脂肪酸酯、聚氧乙烯山梨糖醇酐脂肪酸酯、聚氧乙烯山梨糖醇脂肪酸酯、甘油脂肪酸酯、聚氧乙烯脂肪酸酯、聚氧乙烯烷基胺等非離子系界面活性劑; 月桂醇硫酸酯鈉、油醇硫酸酯鈉、月桂基硫酸鈉、月桂基硫酸銨、十二烷基苯磺酸鈉、十二烷基萘磺酸鈉等陰離子系界面活性劑; 硬脂胺鹽酸鹽、月桂基三甲基銨氯化物等陽離子系界面活性劑等。 As a surfactant, a polyoxyethylene can be cited. Alkyl ether, polyoxyethylene aryl ether, polyoxyethylene alkyl aryl ether, other polyoxyethylene derivatives, oxyethylene/oxypropylene block copolymer, sorbitan fatty acid ester, polyoxyethylene Nonionic surfactants such as sorbitan fatty acid ester, polyoxyethylene sorbitan fatty acid ester, glycerin fatty acid ester, polyoxyethylene fatty acid ester, polyoxyethylene alkylamine; An anionic surfactant such as sodium lauryl sulfate, sodium oleyl sulfate, sodium lauryl sulfate, ammonium lauryl sulfate, sodium dodecylbenzenesulfonate or sodium dodecyl naphthalenesulfonate; A cationic surfactant such as stearylamine hydrochloride or lauryl trimethylammonium chloride.

鹼性化合物的水溶液中之界面活性劑濃度,較佳是0.01至10質量%,更佳是0.05至8質量%,特佳是0.1至5質量%。 The concentration of the surfactant in the aqueous solution of the basic compound is preferably from 0.01 to 10% by mass, more preferably from 0.05 to 8% by mass, particularly preferably from 0.1 to 5% by mass.

藉由將如上述方式所得到之圖案進一步的烘烤,可以得到經熱硬化之圖案。作為烘烤溫度者,通常是25℃以上230℃以下,較佳是25℃以上200℃以下,更佳是25℃以上160℃以下,再更佳是25℃以上120℃以下。作為烘烤時間者,通常是1至300分鐘,較佳是1至180 分鐘,更佳是1至60分鐘。 The pattern which is thermally hardened can be obtained by further baking the pattern obtained as described above. The baking temperature is usually 25 ° C or more and 230 ° C or less, preferably 25 ° C or more and 200 ° C or less, more preferably 25 ° C or more and 160 ° C or less, and still more preferably 25 ° C or more and 120 ° C or less. As the baking time, it is usually 1 to 300 minutes, preferably 1 to 180. Minutes, preferably 1 to 60 minutes.

如上述方式所得到之圖案,例如,可以有 用於在液晶顯示裝置中所使用的感光間隙材料(photo spacer)、可圖案化的保護塗膜、彩色濾光片。又,本發明的感光性樹脂組成物,可適合利用於用以形成作為液晶顯示裝置或是圖像感測器(image sensor)的畫素之膜或圖案等,可利用在將此等膜或圖案作為其構成零組件之一部分而具備的彩色濾光片、陣列基板、再者,可利用在具備此等彩色濾光片及/或是陣列基板等之顯示裝置,例如,液晶顯示裝置、有機EL裝置、固體攝影裝置等。 The pattern obtained as described above, for example, may have A photo spacer used for a liquid crystal display device, a patternable protective coating film, and a color filter. Further, the photosensitive resin composition of the present invention can be suitably used for forming a film or a pattern of a pixel which is a liquid crystal display device or an image sensor, and can be utilized in such a film or A color filter or an array substrate provided as a part of the components, and a display device including such a color filter and/or an array substrate, for example, a liquid crystal display device or an organic EL device, solid state imaging device, and the like.

(實施例) (Example)

以下,藉由實施例更詳細說明本發明之著色感光性樹脂組成物。例中之「%」及「份」若無特別論述,是表示質量%及質量份。 Hereinafter, the colored photosensitive resin composition of the present invention will be described in more detail by way of examples. The "%" and "parts" in the examples are % and mass parts unless otherwise stated.

〈黏合劑樹脂(A1)溶液的合成〉 <Synthesis of Binder Resin (A1) Solution>

在具備攪拌裝置、滴下漏斗、冷凝器、溫度計、氣體導入管的燒瓶中,放入67份之丙二醇單甲基醚乙酸酯、33份之丙二醇單甲基醚,一面以氮氣取代一面攪拌,昇溫到120℃。其次,在由11份之丙烯酸二環戊酯、31份之甲基丙烯酸苯甲酯、23份之甲基丙烯酸所成單體混合物中,以相對於單體混合物100份為1份之比率添加Perbutyl O。將此自滴下漏斗花2小時滴到燒瓶中,進一步,在120℃攪拌2小時,得到共聚合物。其次,將燒瓶內以空氣取代,將甲基丙烯酸縮水甘油酯10份、三苯基膦0.46份、及甲 基氫醌0.08份投入上述共聚合物之溶液中,在120℃持續反應直到固形分酸價變成150mg-KOH/g時停止反應,加入75份的丙二醇單甲基醚乙酸酯、5份之丙二醇單甲基醚,藉此可得到含有30質量%之重量平均分子量(Mw)為30×103,酸價為150mg-KOH/g的黏合劑樹脂(A1)的溶液。黏合劑樹脂(A1)是具有下述之結構單元者。 In a flask equipped with a stirring device, a dropping funnel, a condenser, a thermometer, and a gas introduction tube, 67 parts of propylene glycol monomethyl ether acetate and 33 parts of propylene glycol monomethyl ether were placed, and the mixture was stirred while being replaced with nitrogen. Warm up to 120 °C. Next, in a monomer mixture of 11 parts of dicyclopentanyl acrylate, 31 parts of benzyl methacrylate, and 23 parts of methacrylic acid, it is added in a ratio of 1 part by weight relative to 100 parts of the monomer mixture. Perbutyl O. This was dropped from the dropping funnel for 2 hours into a flask, and further stirred at 120 ° C for 2 hours to obtain a copolymer. Next, the flask was replaced with air, and 10 parts of glycidyl methacrylate, 0.46 parts of triphenylphosphine, and 0.08 parts of methylhydroquinone were put into the solution of the above copolymer, and the reaction was continued at 120 ° C until solid content. When the acid value became 150 mg-KOH/g, the reaction was stopped, and 75 parts of propylene glycol monomethyl ether acetate and 5 parts of propylene glycol monomethyl ether were added, whereby a weight average molecular weight (Mw) of 30% by mass was obtained. 30 × 10 3 , a solution of the binder resin (A1) having an acid value of 150 mg-KOH/g. The binder resin (A1) is one having the following structural unit.

〈黏合劑樹脂(A2)溶液的合成〉 <Synthesis of Binder Resin (A2) Solution>

在具備攪拌裝置、滴下漏斗、冷凝器、溫度計、氣體導入管的燒瓶中,放置67份之丙二醇單甲基醚乙酸酯、33份之丙二醇單甲基醚,一面以氮氣取代一面攪拌,昇溫到120℃。其次,在由10份之丙烯酸二環戊酯、34份甲基丙烯酸苯甲酯、20份之甲基丙烯酸所成單體混合物中,以相對於單體混合物100份為1份之比率添加Perbutyl O。將此自滴下漏斗花2小時滴到燒瓶中,進一步,在120℃攪拌2小時,得到共聚合物。其次,將燒瓶內以空氣取代,將甲基丙烯酸縮水甘油酯10份、三苯基膦0.44份、及甲基氫醌0.08份投入上述共聚合物之溶液中,在120℃持續反應直到固形分酸價變成130mg-KOH/g時停止反應,加入74份的丙二醇單甲基醚乙酸酯、5份之丙二醇單甲基醚,藉 此可得到含有30質量%之重量平均分子量(Mw)為30×103,酸價為130mg-KOH/g的黏合劑樹脂(A2)之溶液。黏合劑樹脂(A2)是具有下述之結構單元者。 In a flask equipped with a stirring device, a dropping funnel, a condenser, a thermometer, and a gas introduction tube, 67 parts of propylene glycol monomethyl ether acetate and 33 parts of propylene glycol monomethyl ether were placed, and the mixture was stirred while being replaced with nitrogen gas. To 120 ° C. Next, in a monomer mixture of 10 parts of dicyclopentanyl acrylate, 34 parts of benzyl methacrylate, and 20 parts of methacrylic acid, Perbutyl is added in a ratio of 1 part by weight relative to 100 parts of the monomer mixture. O. This was dropped from the dropping funnel for 2 hours into a flask, and further stirred at 120 ° C for 2 hours to obtain a copolymer. Next, the flask was replaced with air, and 10 parts of glycidyl methacrylate, 0.44 parts of triphenylphosphine, and 0.08 parts of methylhydroquinone were put into the solution of the above copolymer, and the reaction was continued at 120 ° C until solid content. When the acid value was changed to 130 mg-KOH/g, the reaction was stopped, and 74 parts of propylene glycol monomethyl ether acetate and 5 parts of propylene glycol monomethyl ether were added, whereby a weight average molecular weight (Mw) of 30% by mass was obtained. 30 × 10 3 , a solution of the binder resin (A2) having an acid value of 130 mg-KOH/g. The binder resin (A2) is one having the following structural unit.

〈黏合劑樹脂(A3)溶液的合成〉 <Synthesis of Binder Resin (A3) Solution>

在具備攪拌機、溫度計、回流冷卻管、滴下漏斗、及氣體導入管的燒瓶中,放入413份之丙二醇單甲基醚乙酸酯。之後,將氮氣經由氣體導入管導入燒瓶內,將燒瓶內環境取代成氮氣,添加144份之甲基丙烯酸苯甲酯、30份之丙烯酸二環戊酯、35份之甲基丙烯酸及5.2份之偶氮雙異丁腈,在100℃攪拌5小時。之後冷卻到室溫,得到含有33.6質量%之重量平均分子量(Mw)為10×103,酸價為110mg-KOH/g的黏合劑樹脂(A3)之溶液。樹脂(A3)是具有下述之結構單元者。 In a flask equipped with a stirrer, a thermometer, a reflux cooling tube, a dropping funnel, and a gas introduction tube, 413 parts of propylene glycol monomethyl ether acetate was placed. Thereafter, nitrogen gas was introduced into the flask through a gas introduction tube, the atmosphere in the flask was replaced with nitrogen, and 144 parts of benzyl methacrylate, 30 parts of dicyclopentyl acrylate, 35 parts of methacrylic acid, and 5.2 parts were added. Azobisisobutyronitrile was stirred at 100 ° C for 5 hours. Thereafter, the mixture was cooled to room temperature to obtain a solution containing 33.6 mass% of a binder resin (A3) having a weight average molecular weight (Mw) of 10 × 10 3 and an acid value of 110 mg-KOH/g. The resin (A3) is one having the following structural unit.

〈黏合劑樹脂(A4)溶液的合成〉 <Synthesis of Binder Resin (A4) Solution>

在具備回流冷卻管、滴下漏斗、及攪拌機的1L燒瓶 內,適量流入氮氣而取代成氮氣環境,放入371份的丙二醇單甲基醚乙酸酯,一面攪拌一面加熱到85℃。其次,將54份的丙烯酸、丙烯酸3,4-環氧基三環[5.2.1.02.6]癸烷-8-酯及丙烯酸3,4-環氧基三環[5.2.1.02.6]癸烷-9-酯的混合物225份、乙烯基甲苯(異構物混合物)81份、丙二醇單甲基醚乙酸酯80份的混合溶液花4小時滴下。另一方面,將使聚合起始劑2,2-偶氮雙(2,4-二甲基戊腈)30份溶解到丙二醇單甲基醚乙酸酯160份中之溶液花5小時滴下。起始劑溶液滴下終止後,維持在同溫度4小時後,冷卻至室溫為止,可得到含有37.5質量%之重量平均分子量(Mw)為10×103,酸價為115mg-KOH/g的黏合劑樹脂(A4),且B型黏度(23℃)為246mPas之溶液。黏合劑樹脂(A4)是具有下述之結構單元者。 In a 1 L flask equipped with a reflux cooling tube, a dropping funnel, and a stirrer, an appropriate amount of nitrogen gas was introduced to replace the nitrogen atmosphere, and 371 parts of propylene glycol monomethyl ether acetate was placed, and the mixture was heated to 85 ° C while stirring. Next, 54 parts of acrylic acid, 3,4-epoxytricyclo[5.2.1.0 2.6 ]decane-8-acrylate and 3,4-epoxytricyclo[5.2.1.0 2.6 ]decane-acrylic acid- A mixed solution of 225 parts of a 9-ester mixture, 81 parts of a vinyl toluene (isomer mixture), and 80 parts of propylene glycol monomethyl ether acetate was dropped for 4 hours. On the other hand, a solution in which 30 parts of the polymerization initiator 2,2-azobis(2,4-dimethylvaleronitrile) was dissolved in 160 parts of propylene glycol monomethyl ether acetate was dropped for 5 hours. After the completion of the dropwise addition of the starter solution, the temperature was maintained at the same temperature for 4 hours, and after cooling to room temperature, the weight average molecular weight (Mw) containing 37.5 mass% was 10×10 3 and the acid value was 115 mg-KOH/g. Binder resin (A4), and B type viscosity (23 ° C) is a solution of 246 mPas. The binder resin (A4) is one having the following structural unit.

合成例所得到之樹脂之重量平均分子量(Mw)及數量平均分子量(Mn)的測定,係使用GPC法,用以下的條件進行。 The measurement of the weight average molecular weight (Mw) and the number average molecular weight (Mn) of the resin obtained in the synthesis example was carried out under the following conditions using a GPC method.

裝置:K2479(島津製作所(股)製) Device: K2479 (Shimadzu Corporation (stock) system)

管柱:SHIMADZU Shim-pack GPC-80M Column: SHIMADZU Shim-pack GPC-80M

管柱溫度:40℃ Column temperature: 40 ° C

溶劑:THF(四氫呋喃) Solvent: THF (tetrahydrofuran)

流速:1.0ml/min Flow rate: 1.0ml/min

檢測器:RI Detector: RI

〈式(F1)所示化合物的合成〉 <Synthesis of a compound represented by the formula (F1)>

將式(IV-1)所示化合物40.5份與2,6-二甲基苯胺(東京化成(股)製)60.5份在遮光條件下混合,在N-甲基吡啶酮200份中,於150℃攪拌8小時。將得到之反應液冷卻到室溫後,添加到水1200份、35%鹽酸75份的混合液中,在室溫攪泮1小時時,析出結晶。將析出之結晶當作吸引過濾之殘渣而取得並以甲醇100份洗淨後,在60℃減壓乾燥1晚,得到式(IV-2)所示化合物49份。收率是85%。 40.5 parts of the compound of the formula (IV-1) and 60.5 parts of 2,6-dimethylaniline (manufactured by Tokyo Chemical Industry Co., Ltd.) were mixed under light-shielding conditions, and 200 parts of N-methylpyridone at 150 parts. Stir at °C for 8 hours. After the obtained reaction liquid was cooled to room temperature, it was added to a mixed liquid of 1200 parts of water and 75 parts of 35% hydrochloric acid, and when it was stirred at room temperature for 1 hour, crystals were precipitated. The precipitated crystal was obtained as a residue for suction filtration, washed with 100 parts of methanol, and then dried under reduced pressure at 60 ° C for one night to obtain 49 parts of the compound of the formula (IV-2). The yield was 85%.

其次,將(IV-2)所示化合物28.8份,與1- 溴丙烷21.6份及碳酸鉀24.2份加到N-甲基吡啶酮144份中,於90℃攪拌4小時,將得到之反應液冷卻到室溫後濃縮,添加到水560份中,在10至15℃攪拌1小時時,會析出結晶。將生成之結晶當作吸引過濾之殘渣而取得後乾燥,以離子交換水1000份洗淨後,在60℃減壓乾燥1晚,得到式(F1)所示化合物30.0份。收率是91%。 Next, 28.8 parts of the compound represented by (IV-2), and 1- 21.6 parts of bromopropane and 24.2 parts of potassium carbonate were added to 144 parts of N-methylpyridone, and stirred at 90 ° C for 4 hours, and the obtained reaction liquid was cooled to room temperature, concentrated, and added to 560 parts of water, at 10 to When stirred at 15 ° C for 1 hour, crystals were precipitated. The resulting crystal was taken as a residue for suction filtration, dried, and washed with 1000 parts of ion-exchanged water, and then dried under reduced pressure at 60 ° C for 1 night to obtain 30.0 parts of a compound represented by the formula (F1). The yield was 91%.

式(F1)所示化合物的鑑定 Identification of compounds represented by formula (F1)

(質量分析)離子化模式=ESI+:m/z=[M+H]+659.3精確質量(Exact Mass):658.3 (mass analysis) ionization mode = ESI +: m / z = [M + H] + 659.3 accurate mass (Exact Mass): 658.3

實施例1 Example 1 [感光性樹脂組成物1的調製] [Modulation of Photosensitive Resin Composition 1]

將下述者混合:著色劑(F):C.I.顏料紅242 15份著色劑(F):C.I.顏料紅177 20份丙烯酸系顏料分散劑 14份黏合劑樹脂(A1)溶液 33.3份(黏合劑樹脂(A1) 10份)及溶劑(E):丙二醇單甲基醚乙酸酯 191份,並使用珠粒研磨機充分分散顏料而得到顏料分散液;將該顏料分散液與下述者混合而得到感光性樹脂組成物1:黏合劑樹脂(A1)溶液 254份(黏合劑樹脂(A1) 76.2份);聚合性化合物(B):甘油1,3-二甘油酯二丙烯酸酯(GDDA;Aldrich公司製) 37份; 聚合起始劑(C):N-苯甲醯氧基-1-(4-苯基硫基苯基)辛烷-1-酮-2-亞胺(Irgacure(註冊商標)OXE-01;日本BASF(股)製) 3.7份;聚合起始劑(C):雙(2,4,6-三甲基苯甲醯基)苯膦氧化物(Irgacure(註冊商標)819;日本BASF(股)製) 7.4份:聚合起始助劑(C):二乙基噻噸酮(KAYACURE(註冊商標)DETX-S;日本化藥(股)製) 3.7份;體質顏料(D)分散液:PMA-ST;日產化學(股)製(氧化矽30質量%、丙二醇單乙基醚乙酸酯69.5質量%及甲醇0.5質量%)(以下相同) 41份;溶劑(E):丙二醇單甲基醚乙酸酯 398份;以及界面活性劑:聚醚改質矽油(Toray silicon SH8400:東麗道康寧(股)製) 0.5份。 The following are mixed: colorant (F): CI Pigment Red 242 15 parts Colorant (F): CI Pigment Red 177 20 parts Acrylic Pigment Dispersant 14 parts Binder Resin (A1) Solution 33.3 parts (Binder Resin (A1) 10 parts) and solvent (E): 191 parts of propylene glycol monomethyl ether acetate, and the pigment dispersion liquid is fully dispersed by using a bead mill, and the pigment dispersion liquid is mixed with the following. Photosensitive resin composition 1: 254 parts of a binder resin (A1) solution (76.2 parts of a binder resin (A1)); a polymerizable compound (B): 1,3-diglyceride diacrylate (GDDA; Aldrich Co., Ltd.) System) 37 copies; Polymerization initiator (C): N-benzylideneoxy-1-(4-phenylthiophenyl)octane-1-one-2-imine (Irgacure (registered trademark) OXE-01; Japan BASF (manufactured by BASF) 3.7 parts; polymerization initiator (C): bis(2,4,6-trimethylbenzylidene) phenylphosphine oxide (Irgacure (registered trademark) 819; Japan BASF (share) 7.4 parts: polymerization starting aid (C): diethyl thioxanthone (KAYACURE (registered trademark) DETX-S; manufactured by Nippon Chemical Co., Ltd.) 3.7 parts; extender pigment (D) dispersion: PMA -ST; Nissan Chemical Co., Ltd. (30% by mass of cerium oxide, hexadecyl propylene monoethyl ether acetate, and 6.5% by mass of methanol) (the same applies hereinafter) 41 parts; solvent (E): propylene glycol monomethyl ether 398 parts of acetate; and surfactant: Polyether modified oyster sauce (Toray silicon SH8400: manufactured by Toray Dow Corning Co., Ltd.) 0.5 parts.

在得到之感光性樹脂組成物1中的全溶劑(E)中佔有的丙二醇單甲基醚乙酸酯(溶劑(E1))之比率是93.3質量%,丙二醇單甲基醚(溶劑(E2))的比率是6.7質量%。又,黏合劑樹脂(A1)與聚合性化合物(B)的質量比率(黏合劑樹脂(A1)/聚合性化合物(B))是70/30。 The ratio of propylene glycol monomethyl ether acetate (solvent (E1)) which is contained in the total solvent (E) in the obtained photosensitive resin composition 1 was 93.3 mass%, propylene glycol monomethyl ether (solvent (E2) The ratio is 6.7% by mass. Further, the mass ratio of the binder resin (A1) to the polymerizable compound (B) (the binder resin (A1) / the polymerizable compound (B)) was 70/30.

實施例2 Example 2 [感光性樹脂組成物2的調製] [Modulation of Photosensitive Resin Composition 2]

將下述者混合:著色劑(F):C.I.顏料綠58 43份著色劑(F):C.I.顏料黃138 24份丙烯酸系顏料分散劑 12份 黏合劑樹脂(A1)溶液 86.7份(黏合劑樹脂(A1) 26份),及溶劑(E):丙二醇單甲基醚乙酸酯 390份,並使用珠粒研磨機充分分散顏料而得到顏料分散液;將該顏料分散液與下述者混合而得到感光性樹脂組成物2:黏合劑樹脂(A1)溶液 117份(黏合劑樹脂(A1) 35.1份);聚合性化合物(B):二新戊四醇六丙烯酸酯(KAYARAD(註冊商標);DPHA;日本化藥(股)製) 41份;聚合起始劑(C):N-苯甲醯氧基-1-(4-苯基硫基苯基)辛烷-1-酮-2-亞胺(Irgacure(註冊商標)OXE-01;日本BASF(股)製) 10份;聚合起始劑(C):雙(2,4,6-三甲基苯甲醯基)苯膦氧化物(Irgacure(註冊商標)819;日本BASF(股)製) 8.1份:聚合起始助劑(C):二乙基噻噸酮(KAYACURE(註冊商標)DETX-S;日本化藥(股)製) 10份;體質顏料(D)分散液:PMA-ST;日產化學(股)製 34份;溶劑(E):丙二醇單甲基醚乙酸酯 307份;以及界面活性劑:聚醚改質矽油(Toray silicon SH8400:東麗道康寧(股)製) 0.5份。 Mix the following: colorant (F): C.I. Pigment Green 58 43 parts Colorant (F): C.I. Pigment Yellow 138 24 parts Acrylic Pigment Dispersant 12 parts 86.7 parts of binder resin (A1) solution (26 parts of binder resin (A1)), and solvent (E): 390 parts of propylene glycol monomethyl ether acetate, and the pigment was dispersed by using a bead mill to obtain pigment dispersion. The pigment dispersion liquid was mixed with the following to obtain a photosensitive resin composition 2: 117 parts of a binder resin (A1) solution (35.1 parts of a binder resin (A1)); a polymerizable compound (B): two new Pentaerythritol hexaacrylate (KAYARAD (registered trademark); DPHA; manufactured by Nippon Chemical Co., Ltd.) 41 parts; polymerization initiator (C): N-benzylideneoxy-1-(4-phenylsulfide) Phenyl)octane-1-one-2-imine (Irgacure (registered trademark) OXE-01; manufactured by BASF Co., Ltd.) 10 parts; polymerization initiator (C): double (2, 4, 6 -Trimethyl benzhydryl)phenylphosphine oxide (Irgacure (registered trademark) 819; manufactured by BASF Co., Ltd.) 8.1 parts: polymerization starting aid (C): diethyl thioxanthone (KAYACURE (registered) Trademark) DETX-S; Nippon Chemical Co., Ltd.) 10 parts; Body pigment (D) dispersion: PMA-ST; Nissan Chemical Co., Ltd. 34 parts; Solvent (E): Propylene glycol monomethyl ether acetate 307 parts ester; and surfactant: polyether modified oyster sauce (T Oray silicon SH8400: Toray Road Corning (stock) system 0.5 parts.

在得到之感光性樹脂組成物2中的全溶劑(E)中佔有的丙二醇單甲基醚乙酸酯(溶劑(E1))的比率是96.9質量%,丙二醇單甲基醚(溶劑(E2))的比率是3.1質量%。又,黏合劑樹脂(A1)與聚合性化合物(B)的質量比率(黏合劑樹脂(A1) /聚合性化合物(B))是60/40。 The ratio of propylene glycol monomethyl ether acetate (solvent (E1)) which is contained in the total solvent (E) in the obtained photosensitive resin composition 2 is 96.9 mass%, propylene glycol monomethyl ether (solvent (E2) The ratio is 3.1% by mass. Further, the mass ratio of the binder resin (A1) to the polymerizable compound (B) (adhesive resin (A1) The /polymerizable compound (B)) is 60/40.

實施例3 Example 3 [感光性樹脂組成物3的調製] [Modulation of Photosensitive Resin Composition 3]

將下述者混合:著色劑(F):C.I.顏料藍15:6 27份著色劑(F):C.I.顏料紫23 0.5份丙烯酸系顏料分散劑 10份黏合劑樹脂(A1)溶液 27.7份(黏合劑樹脂(A1) 8.3份)及溶劑(E):丙二醇單甲基醚乙酸酯 140份,並使用珠粒研磨機充分分散顏料而得到顏料分散液;將該顏料分散液與下述者混合而得到感光性樹脂組成物3:黏合劑樹脂(A1)溶液 227份(黏合劑樹脂(A1) 68.1份);聚合性化合物(B):二新戊四醇六丙烯酸酯(KAYARAD(註冊商標)DPHA;日本化藥(股)製) 32份;聚合起始劑(C):N-苯甲醯氧基-1-(4-苯基硫基苯基)辛烷-1-酮-2-亞胺(Irgacure(註冊商標)OXE-01;日本BASF(股)製) 5.4份;聚合起始劑(C):雙(2,4,6-三甲基苯甲醯基)苯膦氧化物(Irgacure(註冊商標)819;日本BASF(股)製) 8.6份:聚合起始助劑(C):二乙基噻噸酮(KAYACURE(註冊商標)DETX-S;日本化藥(股)製) 4.3份;體質顏料(D)分散液:PMA-ST;日產化學(股)製 36份; 溶劑(E):丙二醇單甲基醚乙酸酯 497份;以及界面活性劑:聚醚改質矽油(Toray silicon SH8400:東麗道康寧(股)製) 0.5份。 Mix the following: Colorant (F): CI Pigment Blue 15: 6 27 parts Colorant (F): CI Pigment Violet 23 0.5 part Acrylic Pigment Dispersant 10 parts Binder Resin (A1) Solution 27.7 parts (bonding Resin (A1) 8.3 parts) and solvent (E): 140 parts of propylene glycol monomethyl ether acetate, and fully disperse the pigment using a bead mill to obtain a pigment dispersion; the pigment dispersion is mixed with Thus, a photosensitive resin composition 3: 227 parts of a binder resin (A1) solution (68.1 parts of a binder resin (A1)); a polymerizable compound (B): dipentaerythritol hexaacrylate (KAYARAD (registered trademark)) DPHA; manufactured by Nippon Chemical Co., Ltd.) 32 parts; polymerization initiator (C): N-benzylideneoxy-1-(4-phenylthiophenyl)octane-1-one-2- Imine (Irgacure (registered trademark) OXE-01; manufactured by BASF Co., Ltd.) 5.4 parts; polymerization initiator (C): bis(2,4,6-trimethylbenzylidene)phenylphosphine oxide (Irgacure (registered trademark) 819; Japan BASF Co., Ltd.) 8.6 parts: polymerization starting aid (C): diethyl thioxanthone (KAYACURE (registered trademark) DETX-S; Nippon Chemical Co., Ltd. ) 4.3 parts; body pigment (D) dispersion: PMA- ST; Nissan Chemical (share) system 36; Solvent (E): 497 parts of propylene glycol monomethyl ether acetate; and surfactant: Polyether modified eucalyptus oil (Toray silicon SH8400: manufactured by Toray Dow Corning Co., Ltd.) 0.5 parts.

在得到之感光性樹脂組成物3的全溶劑(E)中佔有之丙二醇單甲基醚乙酸酯(溶劑(E1))的比率是94.2質量%,丙二醇單甲基醚(溶劑(E2))的比率是5.8質量%,又,黏合劑樹脂(A1)與聚合性化合物(B)的質量比率(黏合劑樹脂(A1)/聚合性化合物(B))是70/30。 The ratio of propylene glycol monomethyl ether acetate (solvent (E1)) in the total solvent (E) of the obtained photosensitive resin composition 3 was 94.2% by mass, and propylene glycol monomethyl ether (solvent (E2)) The ratio is 5.8 mass%, and the mass ratio of the binder resin (A1) to the polymerizable compound (B) (the binder resin (A1) / the polymerizable compound (B)) is 70/30.

實施例4 Example 4 [感光性樹脂組成物4的調製] [Modulation of Photosensitive Resin Composition 4]

將下述者混合:著色劑(F):C.I.顏料藍15:6 27份著色劑(F):C.I.顏料紫23 0.5份丙烯酸系顏料分散劑 10份黏合劑樹脂(A2)溶液 24.7份(黏合劑樹脂(A2) 7.4份)及溶劑(E):丙二醇單甲基醚乙酸酯 140份,並使用珠粒研磨機充分分散顏料而得到顏料分散液;將該顏料分散液與下述者混合而得到感光性樹脂組成物4:黏合劑樹脂(A2)溶液 191份(黏合劑樹脂(A2) 57.3份);聚合性化合物(B):二新戊四醇六丙烯酸酯(KAYARAD(註冊商標)DPHA;日本化藥(股)製) 43份;聚合起始劑(C):N-苯甲醯氧基-1-(4-苯基硫基苯基)辛烷-1- 酮-2-亞胺(Irgacure(註冊商標)OXE-01;日本BASF(股)製) 5.4份;聚合起始劑(C):雙(2,4,6-三甲基苯甲醯基)苯膦氧化物(Irgacure(註冊商標)819;日本BASF(股)製) 8.6份:聚合起始助劑(C):二乙基噻噸酮(KAYACURE(註冊商標)DETX-S;日本化藥(股)製) 4.3份;體質顏料(D)分散液:PMA-ST;日產化學(股)製 36份;溶劑(E):丙二醇單甲基醚乙酸酯 530份;以及界面活性劑:聚醚改質矽油(Toray silicon SH8400:東麗道康寧(股)製) 0.5份。 Mix the following: Colorant (F): CI Pigment Blue 15: 6 27 parts Colorant (F): CI Pigment Violet 23 0.5 part Acrylic Pigment Dispersant 10 parts Binder Resin (A2) Solution 24.7 parts (bonding Resin (A2) 7.4 parts) and solvent (E): 140 parts of propylene glycol monomethyl ether acetate, and fully disperse the pigment using a bead mill to obtain a pigment dispersion; the pigment dispersion is mixed with Thus, a photosensitive resin composition 4: 191 parts of a binder resin (A2) solution (57.3 parts of a binder resin (A2)); a polymerizable compound (B): dipentaerythritol hexaacrylate (KAYARAD (registered trademark)) DPHA; manufactured by Nippon Chemical Co., Ltd.) 43 parts; polymerization initiator (C): N-benzylideneoxy-1-(4-phenylthiophenyl)octane-1- Ketone-2-imine (Irgacure (registered trademark) OXE-01; manufactured by BASF Co., Ltd.) 5.4 parts; polymerization initiator (C): bis(2,4,6-trimethylbenzylidene) Benzene phosphine oxide (Irgacure (registered trademark) 819; manufactured by BASF Co., Ltd.) 8.6 parts: polymerization starting aid (C): diethyl thioxanthone (KAYACURE (registered trademark) DETX-S; Nippon Chemical (share) system) 4.3 parts; body pigment (D) dispersion: PMA-ST; Nissan Chemical Co., Ltd. 36 parts; solvent (E): propylene glycol monomethyl ether acetate 530 parts; and surfactant: Polyether modified oyster sauce (Toray silicon SH8400: manufactured by Toray Silicon Corning Co., Ltd.) 0.5 parts.

在得到之感光性樹脂組成物中的全溶劑(E)中佔有之丙二醇單甲基醚乙酸酯(溶劑(E1))的比率是95.1質量%,丙二醇單甲基醚(溶劑(E2))之比率是4.9質量%。又,黏合劑樹脂(A2)與聚合性化合物(B)的質量比率(黏合劑樹脂(A2)/聚合性化合物(B))是60/40。 The ratio of propylene glycol monomethyl ether acetate (solvent (E1)) in the total solvent (E) in the obtained photosensitive resin composition was 95.1% by mass, and propylene glycol monomethyl ether (solvent (E2)) The ratio is 4.9 mass%. Further, the mass ratio of the binder resin (A2) to the polymerizable compound (B) (the binder resin (A2) / the polymerizable compound (B)) was 60/40.

實施例5 Example 5 [感光性樹脂組成物5的調製] [Modulation of Photosensitive Resin Composition 5]

將下述者混合:著色劑(F):C.I.顏料藍15:6 27份著色劑(F):C.I.顏料紫23 0.5份丙烯酸系顏料分散劑 10份黏合劑樹脂(A1)溶液 24.7份(黏合劑樹脂(A1) 7.4份)及溶劑(E):丙二醇單甲基醚乙酸酯 140份 ,並使用珠粒研磨機充分分散顏料而得到顏料分散液;將該顏料分散液與下述者混合而得到感光性樹脂組成物5:黏合劑樹脂(A1)溶液 245份(黏合劑樹脂(A1) 73.5份);聚合性化合物(B):二新戊四醇六丙烯酸酯(KAYARAD(註冊商標)DPHA;日本化藥(股)製) 27份;聚合起始劑(C):N-苯甲醯氧基-1-(4-苯基硫基苯基)辛烷-1-酮-2-亞胺(Irgacure(註冊商標)OXE-01;日本BASF(股)製) 5.4份;聚合起始劑(C):雙(2,4,6-三甲基苯甲醯基)苯膦氧化物(Irgacure(註冊商標)819;日本BASF(股)製) 8.6份:聚合起始助劑(C):二乙基噻噸酮(KAYACURE(註冊商標)DETX-S;日本化藥(股)製) 4.3份;體質顏料(D)分散液:PMA-ST;日產化學(股)製 36份;溶劑(E):丙二醇單甲基醚乙酸酯 307份;以及界面活性劑:聚醚改質矽油(Toray silicon SH8400:東麗道康寧(股)製) 0.5份。 Mix the following: Colorant (F): CI Pigment Blue 15: 6 27 parts Colorant (F): CI Pigment Violet 23 0.5 part Acrylic Pigment Dispersant 10 parts Binder Resin (A1) Solution 24.7 parts (bonding Resin (A1) 7.4 parts) and solvent (E): 140 parts of propylene glycol monomethyl ether acetate And using a bead mill to sufficiently disperse the pigment to obtain a pigment dispersion; the pigment dispersion is mixed with the following to obtain a photosensitive resin composition 5: 245 parts of a binder resin (A1) solution (adhesive resin (A1) 73.5 parts); polymerizable compound (B): dipentaerythritol hexaacrylate (KAYARAD (registered trademark) DPHA; manufactured by Nippon Chemical Co., Ltd.) 27 parts; polymerization initiator (C): N-benzene Methoxy-1-(4-phenylthiophenyl)octane-1-one-2-imine (Irgacure (registered trademark) OXE-01; manufactured by BASF Co., Ltd.) 5.4 parts; Starting agent (C): bis(2,4,6-trimethylbenzylidene) phenylphosphine oxide (Irgacure (registered trademark) 819; manufactured by BASF Co., Ltd.) 8.6 parts: polymerization starting aid ( C): diethyl thioxanthone (KAYACURE (registered trademark) DETX-S; manufactured by Nippon Chemical Co., Ltd.) 4.3 parts; body pigment (D) dispersion: PMA-ST; Nissan Chemical Co., Ltd. 36 parts Solvent (E): 307 parts of propylene glycol monomethyl ether acetate; and surfactant: Polyether modified eucalyptus oil (Toray silicon SH8400: manufactured by Toray Dow Corning Co., Ltd.) 0.5 parts.

在得到之感光性樹脂組成物中的全溶劑(E)中佔有之丙二醇單甲基醚乙酸酯(溶劑(E1))的比率是93.8質量%,丙二醇單甲基醚(溶劑(E2))的比率是6.2質量%,又,黏合劑樹脂(A1)與聚合性化合物(B)的質量比率(黏合劑樹脂(A1)/聚合性化合物(B))是75/25。 The ratio of propylene glycol monomethyl ether acetate (solvent (E1)) in the total solvent (E) in the obtained photosensitive resin composition was 93.8 mass%, and propylene glycol monomethyl ether (solvent (E2)) The ratio is 6.2% by mass, and the mass ratio of the binder resin (A1) to the polymerizable compound (B) (the binder resin (A1) / the polymerizable compound (B)) is 75/25.

實施例6 Example 6 [感光性樹脂組成物6的調製] [Modulation of Photosensitive Resin Composition 6]

將下述者混合:著色劑(F):C.I.顏料藍15:6 27份著色劑(F):C.I.顏料紫23 0.5份丙烯酸系顏料分散劑 10份黏合劑樹脂(A1)溶液 27.7份(黏合劑樹脂(A1) 8.3份)及溶劑(E):丙二醇單甲基醚乙酸酯 140份,並使用珠粒研磨機充分分散顏料而得到顏料分散液;將該顏料分散液與下述者混合而得到感光性樹脂組成物6:黏合劑樹脂(A1)溶液 227份(黏合劑樹脂(A1) 68.1份);聚合性化合物(B):二新戊四醇六丙烯酸酯(KAYARAD(註冊商標)DPHA;日本化藥(股)製) 32份;聚合起始劑(C):N-苯甲醯氧基-1-(4-苯基硫基苯基)辛烷-1-酮-2-亞胺(Irgacure(註冊商標)OXE-01;日本BASF(股)製) 5.8份;聚合起始劑(C):雙(2,4,6-三甲基苯甲醯基)苯膦氧化物(Irgacure(註冊商標)819;日本BASF(股)製) 9.4份:聚合起始助劑(C):二乙基噻噸酮(KAYACURE(註冊商標)DETX-S;日本化藥(股)製) 4.7份;體質顏料(D)分散液:PMA-ST;日產化學(股)製 36份;溶劑(E):丙二醇單甲基醚 190份;溶劑(E):丙二醇單甲基醚乙酸酯 317份;以及界面活性劑:聚醚改質矽油(Toray silicon SH8400: 東麗道康寧(股)製) 0.5份。 Mix the following: Colorant (F): CI Pigment Blue 15: 6 27 parts Colorant (F): CI Pigment Violet 23 0.5 part Acrylic Pigment Dispersant 10 parts Binder Resin (A1) Solution 27.7 parts (bonding Resin (A1) 8.3 parts) and solvent (E): 140 parts of propylene glycol monomethyl ether acetate, and fully disperse the pigment using a bead mill to obtain a pigment dispersion; the pigment dispersion is mixed with Thus, a photosensitive resin composition 6: 227 parts of a binder resin (A1) solution (68.1 parts of a binder resin (A1)); a polymerizable compound (B): dipentaerythritol hexaacrylate (KAYARAD (registered trademark)) DPHA; manufactured by Nippon Chemical Co., Ltd.) 32 parts; polymerization initiator (C): N-benzylideneoxy-1-(4-phenylthiophenyl)octane-1-one-2- Imine (Irgacure (registered trademark) OXE-01; manufactured by BASF Co., Ltd.) 5.8 parts; polymerization initiator (C): bis(2,4,6-trimethylbenzylidene)phenylphosphine oxide (Irgacure (registered trademark) 819; Japan BASF Co., Ltd.) 9.4 parts: polymerization starting aid (C): diethyl thioxanthone (KAYACURE (registered trademark) DETX-S; Nippon Chemical Co., Ltd. ) 4.7 parts; body pigment (D) dispersion: PMA- ST; Nissan Chemical Co., Ltd. 36 parts; solvent (E): propylene glycol monomethyl ether 190 parts; solvent (E): propylene glycol monomethyl ether acetate 317 parts; and surfactant: polyether modified eucalyptus oil (Toray silicon SH8400: Toray Dow Corning (share) system) 0.5 parts.

在得到之感光性樹脂組成物6中的全溶劑(E)中佔有之丙二醇單甲基醚乙酸酯(溶劑(E1))的比率是71.2質量%,丙二醇單甲基醚(溶劑(E2))的比率是28.9質量%,又,黏合劑樹脂(A1)與聚合性化合物(B)的質量比率(黏合劑樹脂(A1)/聚合性化合物(B))是70/30。 The ratio of propylene glycol monomethyl ether acetate (solvent (E1)) in the total solvent (E) in the obtained photosensitive resin composition 6 was 71.2% by mass, and propylene glycol monomethyl ether (solvent (E2) The ratio of the binder resin (A1) to the polymerizable compound (B) (the binder resin (A1) / the polymerizable compound (B)) is 70/30.

比較例1 Comparative example 1 [感光性樹脂組成物7的調製] [Modulation of Photosensitive Resin Composition 7]

依日本特開2011-221310號公報實施例1而得到感光性樹脂組成物7。 The photosensitive resin composition 7 was obtained in Example 1 of JP-A-2011-221310.

實施例7 Example 7 [感光性樹脂組成物8的調製] [Modulation of Photosensitive Resin Composition 8]

將下述者混合:著色劑(F):C.I.顏料藍15:6 26份著色劑(F):式(F1)所示化合物 6.4份丙烯酸系顏料分散劑 9.0份黏合劑樹脂(A4)溶液 26.7份(黏合劑樹脂(A4) 10份)溶劑(E):4-羥基-4-甲基-2-戊酮 31份及溶劑(E):丙二醇單甲基醚乙酸酯 282份,並使用珠粒研磨機充分分散顏料而得到顏料分散液;將該顏料分散液與下述者混合而得到感光性樹脂組成物8:黏合劑樹脂(A3)溶液 108份(黏合劑樹脂(A3) 36.3份); 聚合性化合物(B):二新戊四醇六丙烯酸酯(KAYARAD(註冊商標)DPHA;日本化藥(股)製) 47份;聚合起始劑(C):N-苯甲醯氧基-1-(4-苯基硫基苯基)辛烷-1-酮-2-亞胺(Irgacure(註冊商標)OXE-01;日本BASF(股)製)9.3份;聚合起始劑(C):2-甲基-2-(N-嗎啉基)-1-(4-甲基硫基苯基)丙烷-1-酮(Irgacure 907;日本BASF(股)製) 1.9份;聚合起始助劑(C):二乙基噻噸酮(KAYACURE(註冊商標)DETX-S;日本化藥(股)製) 5.6份;體質顏料(D)分散液:PMA-ST;日產化學(股)製 37份;溶劑(E):4-羥基-4-甲基-2-戊酮 168份溶劑(E):丙二醇單甲基醚乙酸酯 260份;以及界面活性劑:聚醚改質矽油(Toray silicon SH8400:東麗道康寧(股)製) 0.1份。 The following were mixed: colorant (F): CI Pigment Blue 15: 6 26 parts of colorant (F): Compound of formula (F1) 6.4 parts of acrylic pigment dispersant 9.0 parts of binder resin (A4) solution 26.7 Parts (10 parts of binder resin (A4)) Solvent (E): 4-hydroxy-4-methyl-2-pentanone 31 parts and solvent (E): 282 parts of propylene glycol monomethyl ether acetate, and used The bead mill sufficiently disperses the pigment to obtain a pigment dispersion; the pigment dispersion is mixed with the following to obtain a photosensitive resin composition 8: 108 parts of a binder resin (A3) solution (adhesive resin (A3) 36.3 parts) ); Polymerizable compound (B): dipentaerythritol hexaacrylate (KAYARAD (registered trademark) DPHA; manufactured by Nippon Chemical Co., Ltd.) 47 parts; polymerization initiator (C): N-benzyl methoxy group- 1-(4-phenylthiophenyl)octane-1-one-2-imine (Irgacure (registered trademark) OXE-01; manufactured by BASF Co., Ltd.) 9.3 parts; polymerization initiator (C) : 2-methyl-2-(N-morpholinyl)-1-(4-methylthiophenyl)propan-1-one (Irgacure 907; manufactured by BASF, Japan) 1.9 parts; polymerization initiation Additive (C): diethyl thioxanthone (KAYACURE (registered trademark) DETX-S; manufactured by Nippon Chemical Co., Ltd.) 5.6 parts; extender pigment (D) dispersion: PMA-ST; Nissan Chemical Co., Ltd. 37 parts; solvent (E): 4-hydroxy-4-methyl-2-pentanone 168 parts solvent (E): propylene glycol monomethyl ether acetate 260 parts; and surfactant: polyether modified eucalyptus oil (Toray silicon SH8400: Toray Silicon Corning Co., Ltd.) 0.1 parts.

在得到之感光性樹脂組成物8中的全溶劑(E)中佔有之丙二醇單甲基醚乙酸酯(溶劑(E1))的比率是75.7質量%,4-羥基-4-甲基-2-戊酮(溶劑(E2))的比率是24.3質量%,又,黏合劑樹脂(A3)與黏合劑樹脂(A4)與聚合性化合物(B)的質量比率(黏合劑樹脂(A3)/黏合劑樹脂(A4)/聚合性化合物(B))是11/39/50。 The ratio of propylene glycol monomethyl ether acetate (solvent (E1)) in the total solvent (E) in the obtained photosensitive resin composition 8 was 75.7 mass%, 4-hydroxy-4-methyl-2 - the ratio of the pentanone (solvent (E2)) is 24.3% by mass, and the mass ratio of the binder resin (A3) to the binder resin (A4) to the polymerizable compound (B) (adhesive resin (A3) / bonding The resin (A4) / the polymerizable compound (B)) was 11/39/50.

實施例8 Example 8 [感光性樹脂組成物9的調製] [Modulation of Photosensitive Resin Composition 9]

將下述者混合:著色劑(F):C.I.顏料藍15:6 26份 著色劑(F):式(F1)所示化合物 6.4份丙烯酸系顏料分散劑 9.0份黏合劑樹脂(A4)溶液 26.7份(黏合劑樹脂(A4) 10份)溶劑(E):4-羥基-4-甲基-2-戊酮 31份及溶劑(E):丙二醇單甲基醚乙酸酯 282份,並使用珠粒研磨機充分分散顏料而得到顏料分散液;將該顏料分散液與下述者混合而得到感光性樹脂組成物9:黏合劑樹脂(A4)溶液 97份(黏合劑樹脂(A4) 36.4份);聚合性化合物(B):二新戊四醇六丙烯酸酯(KAYARAD(註冊商標)DPHA;日本化藥(股)製) 47份;聚合起始劑(C):N-苯甲醯氧基-1-(4-苯基硫基苯基)辛烷-1-酮-2-亞胺(Irgacure(註冊商標)OXE-01;日本BASF(股)製) 9.3份;聚合起始劑(C):2-甲基-2-(N-嗎啉基)-1-(4-甲基硫基苯基)丙烷-1-酮(Irgacure 907;日本BASF(股)製) 1.9份;聚合起始助劑(C):二乙基噻噸酮(KAYACURE(註冊商標)DETX-S;日本化藥(股)製) 5.6份;體質顏料(D)分散液:PMA-ST;日產化學(股)製 37份;溶劑(E):4-羥基-4-甲基-2-戊酮 168份溶劑(E):丙二醇單甲基醚乙酸酯 272份;以及界面活性劑:聚醚改質矽油(Toray silicon SH8400:東麗道康寧(股)製) 0.1份。 在得到之感光性樹脂組成物9中的全溶劑(E)中佔有之丙二醇單甲基醚乙酸酯(溶劑(E1))的比率是75.7質量%,4-羥基-4-甲基-2-戊酮(溶劑(E2))的比率是24.3質量%。又,黏合劑樹脂(A4)與聚合性化合物(B)的質量比率(黏合劑樹脂(A4)/聚合性化合物(B))是50/50。 Mix the following: colorant (F): C.I. Pigment Blue 15: 6 26 parts Colorant (F): Compound of formula (F1): 6.4 parts of acrylic pigment dispersant 9.0 parts of binder resin (A4) solution 26.7 parts (binder resin (A4) 10 parts) Solvent (E): 4-hydroxy- 31 parts of 4-methyl-2-pentanone and solvent (E): 282 parts of propylene glycol monomethyl ether acetate, and the pigment dispersion liquid was sufficiently dispersed by using a bead mill to obtain a pigment dispersion; The photosensitive resin composition 9 was obtained by mixing as described above: 97 parts of a binder resin (A4) solution (36.4 parts of a binder resin (A4)); a polymerizable compound (B): dipentaerythritol hexaacrylate (KAYARAD ( Registered trademark) DPHA; Nippon Chemical Co., Ltd.) 47 parts; polymerization initiator (C): N-benzylideneoxy-1-(4-phenylthiophenyl)octane-1-one -2-imine (Irgacure (registered trademark) OXE-01; manufactured by BASF Co., Ltd.) 9.3 parts; polymerization initiator (C): 2-methyl-2-(N-morpholinyl)-1- (4-methylthiophenyl)propan-1-one (Irgacure 907; manufactured by BASF Co., Ltd.) 1.9 parts; polymerization starting aid (C): diethyl thioxanthone (KAYACURE (registered trademark) DETX-S; Nippon Chemical Co., Ltd.) 5.6 parts; Body pigment (D) dispersion: PMA-ST; Chemical (stock) 37 parts; solvent (E): 4-hydroxy-4-methyl-2-pentanone 168 parts solvent (E): propylene glycol monomethyl ether acetate 272 parts; and surfactant: poly Ether modified oyster sauce (Toray silicon SH8400: manufactured by Toray Silicon Corning Co., Ltd.) 0.1 part. The ratio of propylene glycol monomethyl ether acetate (solvent (E1)) in the total solvent (E) in the obtained photosensitive resin composition 9 was 75.7 mass%, 4-hydroxy-4-methyl-2 The ratio of pentanone (solvent (E2)) was 24.3% by mass. Further, the mass ratio of the binder resin (A4) to the polymerizable compound (B) (adhesive resin (A4) / polymerizable compound (B)) was 50/50.

比較例2 Comparative example 2 [感光性樹脂組成物10的調製] [Modulation of Photosensitive Resin Composition 10]

將下述者混合:著色劑(F):C.I.顏料藍15:6 26份著色劑(F):式(F1)所示化合物 6.4份丙烯酸系顏料分散劑 4.3份黏合劑樹脂(A4)溶液 32份(黏合劑樹脂(A4) 12份)溶劑(E):4-羥基-4-甲基-2-戊酮 29份及溶劑(E):丙二醇單甲基醚乙酸酯 243份,並使用珠粒研磨機充分分散顏料而得到顏料分散液;將該顏料分散液與下述者混合而得到感光性樹脂組成物10:黏合劑樹脂(A4)溶液 121份(黏合劑樹脂(A4) 45.4份);聚合性化合物(B):二新戊四醇六丙烯酸酯(KAYARAD(註冊商標)DPHA;日本化藥(股)製) 52份;聚合起始劑(C):N-苯甲醯氧基-1-(4-苯基硫基苯基)辛烷-1-酮-2-亞胺(Irgacure(註冊商標)OXE-01;日本BASF(股)製) 11份; 聚合起始劑(C):2-甲基-2-(N-嗎啉基)-1-(4-甲基硫基苯基)丙烷-1-酮(Irgacure 907;日本BASF(股)製) 2.1份;聚合起始助劑(C):二乙基噻噸酮(KAYACURE(註冊商標)DETX-S;日本化藥(股)製) 6.3份;溶劑(E):4-羥基-4-甲基-2-戊酮 168份溶劑(E):丙二醇單甲基醚乙酸酯 320份;以及界面活性劑:聚醚改質矽油(Toray silicon SH8400:東麗道康寧(股)製) 0.1份。 The following were mixed: colorant (F): CI Pigment Blue 15: 6 26 parts of colorant (F): Compound of formula (F1) 6.4 parts of acrylic pigment dispersant 4.3 parts of binder resin (A4) solution 32 Parts (Binder Resin (A4) 12 parts) Solvent (E): 4-hydroxy-4-methyl-2-pentanone 29 parts and solvent (E): propylene glycol monomethyl ether acetate 243 parts, and used The bead mill sufficiently disperses the pigment to obtain a pigment dispersion liquid; and the pigment dispersion liquid is mixed with the following to obtain a photosensitive resin composition 10: 121 parts of a binder resin (A4) solution (45.4 parts of a binder resin (A4)) ); polymerizable compound (B): dipentaerythritol hexaacrylate (KAYARAD (registered trademark) DPHA; manufactured by Nippon Kayaku Co., Ltd.) 52 parts; polymerization initiator (C): N-benzonitrile 1-(4-phenylthiophenyl)octane-1-one-2-imine (Irgacure (registered trademark) OXE-01; manufactured by BASF Co., Ltd.) 11 parts; Polymerization initiator (C): 2-methyl-2-(N-morpholinyl)-1-(4-methylthiophenyl)propan-1-one (Irgacure 907; manufactured by BASF Japan) ) 2.1 parts; polymerization starting aid (C): diethyl thioxanthone (KAYACURE (registered trademark) DETX-S; manufactured by Nippon Chemical Co., Ltd.) 6.3 parts; solvent (E): 4-hydroxy-4 -Methyl-2-pentanone 168 parts solvent (E): 320 parts of propylene glycol monomethyl ether acetate; and surfactant: polyether modified oyster sauce (Toray silicon SH8400: manufactured by Toray Dow Corning Co., Ltd.) 0.1 Share.

在得到之感光性樹脂組成物10中的全溶劑(E)中佔有之丙二醇單甲基醚乙酸酯(溶劑(E1))的比率是75.8質量%,4-羥基-4-甲基-2-戊酮(溶劑(E2))的比率是24.2質量%,又,黏合劑樹脂(A4)與聚合性化合物(B)的質量比率(黏合劑樹脂(A4)/聚合性化合物(B))是50/50。 The ratio of propylene glycol monomethyl ether acetate (solvent (E1)) in the total solvent (E) in the obtained photosensitive resin composition 10 was 75.8 mass%, 4-hydroxy-4-methyl-2 The ratio of the pentanone (solvent (E2)) is 24.2% by mass, and the mass ratio of the binder resin (A4) to the polymerizable compound (B) (the binder resin (A4) / the polymerizable compound (B)) is 50/50.

〈圖案的製作〉 <Production of patterns>

在2吋見方的玻璃基板上,以旋轉塗布法塗布感光性樹脂組成物後,於100℃預烘烤3分鐘形成乾燥膜。放冷後,在前述基板上所形成的乾燥膜,隔著以與此乾燥膜之間隔成為100μm之方式所配置的石英玻璃製光罩,使用曝光機(TME-150RSK;TOPCON(股)製)於大氣環境下,以50mJ/cm2的曝光量(365nm為基準)施行光照射。作為光罩者,係使用形成有50μm線間隔(line and space)圖案者。光照射後,將得到之曝光膜,在含有非離子系界面活性劑0.12%與碳酸鈉2%之水系顯像液中,於24℃浸漬顯像60秒鐘,水洗後,於烘烤爐中,於230℃進行30分鐘後烘烤, 得到圖案。 The photosensitive resin composition was applied onto a glass substrate of 2 square meters by spin coating, and then prebaked at 100 ° C for 3 minutes to form a dried film. After cooling, the dried film formed on the substrate was exposed to a quartz glass mask which was placed at a distance of 100 μm from the dried film, and an exposure machine (TME-150RSK; TOPCON) was used. Light irradiation was performed at an exposure amount of 50 mJ/cm 2 (based on 365 nm) in an atmospheric environment. As the reticle, those having a line pattern of 50 μm line and space were used. After the light irradiation, the obtained exposed film was immersed and imaged at 24 ° C for 60 seconds in a water-based developing solution containing 0.12% of a nonionic surfactant and 2% of sodium carbonate, washed with water, and then baked in a baking oven. After baking at 230 ° C for 30 minutes, a pattern was obtained.

〈解像度評詁〉 <Resolution rating>

將得到的圖案使用雷射顯微鏡(Axio Imager MAT蔡司公司製)觀察,將解像的最小尺寸當作解像度。解像度愈高,愈可以在高精細的彩色濾光片的製造中使用。 The obtained pattern was observed using a laser microscope (manufactured by Axio Imager MAT Zeiss), and the minimum size of the image was taken as the resolution. The higher the resolution, the more it can be used in the manufacture of high-definition color filters.

〈顯像不均評詁〉 <Inconsistent evaluation of imaging>

將得到的圖案使用雷射顯微鏡(Axio Imager MAT蔡司公司製)觀察,在圖案上無水漬者評估為○(看不到顯像不均),有水漬者評估為×(看到顯像不均)。在看得到顯像不均的情形,在使用於製造彩色濾光片之際,產生色不均。 The obtained pattern was observed using a laser microscope (manufactured by Axio Imager MAT Zeiss), and it was evaluated as ○ on the pattern without water staining (no uneven imaging was observed), and those with water stains were evaluated as × (seeing the image is not observed) All). In the case where the development unevenness is observed, color unevenness occurs when used for manufacturing a color filter.

〈耐溶劑性評詁〉 <Solvent resistance evaluation>

在前述基板上所形成的圖案中,滴下丙二醇單甲基醚乙酸酯1m1,靜止30秒鐘後,使用旋轉塗布機以旋轉數1000rpm旋轉10秒鐘,將圖案上之丙二醇單甲基醚乙酸酯振離。由測定與丙二醇單甲基醚乙酸酯接觸前後之膜厚值,依下述式計算膜厚保持率。膜厚保持率愈高硬化性愈良好,在使用於製造彩色濾光片之際,可以防止混色,改善顯像不均。 In the pattern formed on the substrate, propylene glycol monomethyl ether acetate 1 ml was dropped, and after standing for 30 seconds, the pattern was propylene glycol monomethyl ether B by using a spin coater at a rotation of 1000 rpm for 10 seconds. Acid ester shake-off. From the film thickness values before and after the contact with propylene glycol monomethyl ether acetate, the film thickness retention ratio was calculated according to the following formula. The higher the film thickness retention ratio, the better the hardenability, and when used in the production of a color filter, color mixing can be prevented, and development unevenness can be improved.

(膜厚保持率)(%)=(接觸後之膜厚)/(接觸前之膜厚)〈全面曝光顯像膜之製作〉 (film thickness retention ratio) (%) = (film thickness after contact) / (film thickness before contact) <production of full-exposure development film>

在2吋見方的玻璃板上黏貼PET薄膜(東麗公司製Lumirror 75-T60)並製作基板。在基板的PET薄膜側,將感光性樹脂組成物藉由旋轉塗布法塗布,於熱盤上,於80℃預烘烤2分鐘。放冷後,對前述基板上所形成之乾燥膜的 全面,使用曝光機(TME-150RSK;TOPCON(股)製),於大氣環境下,以150mJ/cm2的曝光量(365nm為基準)施行光照射。光照射後,在含有非離子系界面活性劑0.12%與氫氧化鉀0.04%之水系顯像液中,於23℃浸漬50秒鐘顯像,以純水洗淨,而得到全面曝光顯像膜。將得到之全面曝光顯像膜,使用膜厚測定裝置(DEKTAK 3;ULVAC公司(股)製)測定時是2μm。 A PET film (Lumirror 75-T60 manufactured by Toray Industries, Inc.) was adhered to a glass plate of 2 square meters to prepare a substrate. On the PET film side of the substrate, the photosensitive resin composition was applied by a spin coating method, and prebaked on a hot plate at 80 ° C for 2 minutes. After cooling, the entire surface of the dried film formed on the substrate was subjected to an exposure apparatus (TME-150RSK; TOPCON) to conduct an exposure amount of 150 mJ/cm 2 (based on 365 nm) in an atmosphere. Light irradiation. After light irradiation, the image was immersed in a water-based developing solution containing 0.12% of a nonionic surfactant and 0.04% of potassium hydroxide at 23 ° C for 50 seconds, and washed with pure water to obtain a full-exposure developing film. . The obtained full-exposure development film was 2 μm when measured by a film thickness measuring device (DEKTAK 3; manufactured by ULVAC Co., Ltd.).

〈十字切割(cross cut)試驗〉 <cross cut test>

針對得到之全面曝光顯像膜,根據JIS K5600-5-6進行膠帶剝離試驗(十字切割試驗),評估與PET薄膜的密著性。將結果在表1中顯示。 With respect to the obtained full-exposure development film, a tape peeling test (cross-cut test) was carried out in accordance with JIS K5600-5-6, and the adhesion to the PET film was evaluated. The results are shown in Table 1.

〈鉛筆硬度〉 <pencil hardness>

針對得到之全面曝光顯像膜,根據JIS-K5400,使用鉛筆刮痕硬度試驗機(安田精機製作所有限公司製)進行鉛筆硬度測定。又,負重是設為1,000g。 For the obtained full-exposure development film, pencil hardness measurement was performed according to JIS-K5400 using a pencil scratch hardness tester (manufactured by Yasuda Seiki Co., Ltd.). Also, the load is set to 1,000g.

〈黏性評估〉 <Adhesion Assessment>

在5cm見方PET薄膜(東麗(股)製Lumirror 75-T60),將感光性樹脂組成物使用薄膜塗布機(film applicator)(太佑機材(股)製AP75)塗布,在熱盤上,於80℃預烘烤2分鐘。放冷後,在前述5cm見方PET薄膜上形成的乾燥膜,壓附另外的5cm見方PET薄膜(東麗(股)製Lumirror 75-T60)後,剝離該壓附之PET薄膜。在乾燥膜上沒有不均且剝離之PET薄膜上無轉印者評估為○(看不到黏性),在乾燥膜上有不均且剝離之PET薄膜上有轉印者評估為×(看得到黏 性)。看得到有黏性的情形,在使用於製造彩色濾光片之際,會產生色不均。 The photosensitive resin composition was coated on a 5 cm square PET film (Lumirror 75-T60, manufactured by Toray Industries, Inc.) using a film applicator (AP75 manufactured by Taiyo Kogyo Co., Ltd.) on a hot plate at 80 Pre-bake for 2 minutes at °C. After cooling, the dried film formed on the above-mentioned 5 cm square PET film was pressed with another 5 cm square PET film (Lumirror 75-T60 manufactured by Toray Co., Ltd.), and the pressed PET film was peeled off. In the non-uniform and peeled PET film on the dried film, no transfer was evaluated as ○ (viscosity was not observed), and unevenness on the dried film and peeling on the PET film was evaluated as × (see Getting sticky Sex). When the viscosity is observed, color unevenness occurs when used to manufacture a color filter.

依本發明的話,可以提供賦與具有可以滿 足之低黏性之乾燥膜,並且,賦與具有可以滿足之硬度之圖案的感光性樹脂組成物。 According to the invention, it can be provided that the assignment can be full A low-viscosity dry film of the foot, and a photosensitive resin composition having a pattern having a hardness that can be satisfied.

藉由使用本發明的感光性樹脂組成物,可 以得到改善顯像不均之解像度高的圖案。藉由本發明得到之圖案,有用於作為在液晶顯示裝置、有機EL顯示裝置、或電子紙顯示裝置等所用之顯示用彩色濾光片。 By using the photosensitive resin composition of the present invention, In order to obtain a pattern with high resolution which improves the unevenness of development. The pattern obtained by the present invention is useful as a color filter for display used in a liquid crystal display device, an organic EL display device, or an electronic paper display device.

Claims (10)

一種感光性樹脂組成物,係含有黏合劑樹脂(A)、聚合性化合物(B)、聚合起始劑(C)、體質顏料(D)及溶劑(E),其中,前述溶劑(E)係含有相對於前述溶劑(E)為70至99質量%之溶解度參數為8.0至9.1(cal/cm3)1/2的溶劑(E1),且含有相對於前述溶劑(E)為1至30質量%之溶解度參數為9.2至11.0(cal/cm3)1/2的溶劑(E2)。 A photosensitive resin composition comprising a binder resin (A), a polymerizable compound (B), a polymerization initiator (C), an extender pigment (D), and a solvent (E), wherein the solvent (E) is The solvent (E1) having a solubility parameter of from 8.0 to 9.1 (cal/cm 3 ) 1/2 with respect to the solvent (E) of 70 to 99% by mass, and containing 1 to 30 by mass with respect to the aforementioned solvent (E) The solubility parameter of % is 9.2 to 11.0 (cal/cm 3 ) 1/2 of solvent (E2). 如申請專利範圍第1項所述之感光性樹脂組成物,其中,前述聚合起始劑(C)是肟化合物。 The photosensitive resin composition according to claim 1, wherein the polymerization initiator (C) is an anthracene compound. 如申請專利範圍第1或2項所述之感光性樹脂組成物,其中,前述黏合劑樹脂(A)的酸價是50至180mg-KOH/g。 The photosensitive resin composition according to claim 1 or 2, wherein the binder resin (A) has an acid value of 50 to 180 mg-KOH/g. 如申請專利範圍第1至3項中任一項所述之感光性樹脂組成物,其中,前述黏合劑樹脂(A)的含量,相對於前述黏合劑樹脂(A)及前述聚合性化合物(B)的合計量100質量份,係30至80質量份。 The photosensitive resin composition according to any one of claims 1 to 3, wherein the content of the binder resin (A) is relative to the binder resin (A) and the polymerizable compound (B). The total amount of 100 parts by mass is 30 to 80 parts by mass. 如申請專利範圍第1至4項中任一項所述之感光性樹脂組成物,其中,前述體質顏料(D)是氧化矽。 The photosensitive resin composition according to any one of claims 1 to 4, wherein the extender pigment (D) is cerium oxide. 如申請專利範圍第1至5項中任一項所述之感光性樹脂組成物,更含有著色劑。 The photosensitive resin composition as described in any one of Claims 1 to 5 further contains a coloring agent. 如申請專利範圍第6項所述的感光性樹脂組成物,其中,著色劑是含有顏料的著色劑。 The photosensitive resin composition according to claim 6, wherein the colorant is a pigment-containing coloring agent. 如申請專利範圍第6或是7項所述的感光性樹脂組成物,其中,著色劑是含有染料的著色劑。 The photosensitive resin composition according to claim 6 or 7, wherein the colorant is a dye-containing coloring agent. 一種圖案,藉由如申請專利範圍第1至8項中任一項所述之感光性樹脂組成物所形成者。 A pattern formed by the photosensitive resin composition according to any one of claims 1 to 8. 一種顯示裝置,含有如申請專利範圍第9項所述之圖案。 A display device comprising the pattern as described in claim 9 of the patent application.
TW102143692A 2013-11-29 2013-11-29 Photosensitive resin composition TW201520691A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW102143692A TW201520691A (en) 2013-11-29 2013-11-29 Photosensitive resin composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW102143692A TW201520691A (en) 2013-11-29 2013-11-29 Photosensitive resin composition

Publications (1)

Publication Number Publication Date
TW201520691A true TW201520691A (en) 2015-06-01

Family

ID=53934979

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102143692A TW201520691A (en) 2013-11-29 2013-11-29 Photosensitive resin composition

Country Status (1)

Country Link
TW (1) TW201520691A (en)

Similar Documents

Publication Publication Date Title
JP6303436B2 (en) Photosensitive resin composition
TWI578105B (en) Coloring the photosensitive resin composition
JP2012181505A (en) Colored photosensitive resin composition
KR20160005312A (en) Colored curable resin composition
TWI570511B (en) Coloring the photosensitive resin composition
JP6019596B2 (en) Colored photosensitive resin composition
TWI613518B (en) Colored photosensitive resin composition
KR20170003404A (en) Colored photosensitive resin composition, color filter and display device
JP2017128708A (en) Colored curable resin composition
JP2012098712A (en) Colored photosensitive composition
JP2012173549A (en) Colored photosensitive resin composition
TW201413382A (en) Photosensitive resin composition
JP7374985B2 (en) Cyan colored curable composition
JP2021152145A (en) Colored curable resin composition
JP2013003284A (en) Colored photosensitive resin composition
JP2017186547A (en) Colored curable resin composition, color filter and display device comprising the same
CN103217866A (en) Photosensitive resin composition
TWI588606B (en) Photosensitive resin composition
TW201303489A (en) Photosensitive resin composition
JP7020791B2 (en) Color filters and display devices
CN101604120B (en) Photosensitive composition
JP6722442B2 (en) Compound, colored curable resin composition, color filter and liquid crystal display device
JP2014052401A (en) Photosensitive resin composition
JP2014048607A (en) Photosensitive resin composition
JP7180994B2 (en) Curable resin composition and cured film