TW201520516A - Multi-link rotation mechanism - Google Patents

Abstract

The present invention relates to a multi-link rotation mechanism, which comprises: a frame, having at least one arc-shaped rail; a linear module, mounted on the frame and configured with a slide seat while allowing the slide seat to be driven to move reciprocatingly in a first direction; a rotation module, configured with a rotation assembly, a carrier and a rotation rail in a manner that the two ends of the rotary assembly is connected respectively to the slide seat and the rotation rail, and the carrier is mounted on the rotation rail and the arc-shaped rail for allowing the carrier to rotate on the arc-shaped rail with the rotation of the slide seat, as well as bringing along the rotation rail to rotate.

Description

Multi-link rotating mechanism

The present disclosure relates to a multi-link rotating mechanism, and more particularly to a multi-link rotating mechanism suitable for measuring large objects and providing rotational freedom without restricting the moving stroke of the object.

Traditionally, the design of the rotating mechanism is often directly connected by a rotating motor (stepping motor or servo motor) or connected to the object through the gear set. Therefore, when the motor rotates, the object also rotates with the center point of the motor or the axis of the gear set. This type of design must limit the size of the object and the travel path because the center point of rotation is on the solid axis, otherwise it will cause the entity to collide with the machine. For example, if applied to a general processing machine or an optical inspection machine, the center point of rotation is the focus point of the tool or the focus of the optical lens. As mentioned earlier, in order to operate properly, it is necessary to limit the size of the workpiece. This design is completely infeasible when it comes to R2R (Roll to Roll) process or large-size LCD panel inspection.

In one embodiment, the present disclosure provides a multi-link rotating mechanism including a main body, a linear module, and a rotating module. The main body has at least one curved track; the linear module is disposed on the main body and has a sliding seat. The sliding block is driven to reciprocate in a first direction; the rotating module comprises a rotating component, a loading platform and a rotating track, the two ends of the rotating component are respectively connected with the sliding seat and the rotating track, and the loading platform is hooked on the rotating track and The curved track rotates the stage on the curved track when the carriage moves, and the rotating track rotates at one end of the rotating assembly.

In order to make your reviewer have a better understanding and recognition of this disclosure, please refer to the detailed description of the illustration as follows.

10, 10A‧‧‧ ontology

11‧‧‧First curved edge

12‧‧‧Second curved edge

13‧‧‧ hole

20A‧‧‧First curved track

20B‧‧‧Second curved track

30, 30A‧‧‧ Linear Module

31‧‧‧Slide

311‧‧‧ Groove

32‧‧‧Motor

33‧‧‧Coupling

34‧‧‧ bearing housing

35, 35A‧‧‧ lead screw

351A‧‧‧First thread segment

352A‧‧‧second thread segment

36‧‧‧Rotating nut

37‧‧‧linear orbit

38‧‧‧L seat

40, 40A, 40B, 40C‧‧‧ rotating module

41‧‧‧Rotating components

411‧‧‧Lock nut

412‧‧‧ bearing

413‧‧‧Sleeve

414‧‧‧Rotating shaft rod

42, 42C‧‧‧ stage

421‧‧‧ first hook

422‧‧‧Second hook

43‧‧‧Rotating orbit

431‧‧‧Arc groove

50‧‧‧Substrate

C‧‧‧ Center

F1‧‧‧ first direction

L‧‧‧ center line

R1~R4‧‧‧Second distance

X1~X4‧‧‧ first distance

α 1~α 4‧‧‧ first angle

Θ‧‧‧ fixed angle

θ 1~θ 4‧‧‧second angle

FIG. 1 is a schematic front view of a front view of the present disclosure.

FIG. 2 is a schematic perspective view of the rear view of the present disclosure.

2A is an enlarged view of the structure of the portion A of FIG. 2.

FIG. 3 is a schematic structural diagram of a combination of the linear modules of the present disclosure.

FIG. 4 is a schematic diagram of a combined structure of a rotating module according to the present disclosure.

FIG. 5 is a schematic structural diagram of a combination of a rotating module connecting slider and a second hook according to the present disclosure.

6A-6D are schematic diagrams of continuous operations of the present disclosure.

7 to 10 illustrate aspects of different embodiments of the present disclosure.

The technical means and efficacy of the present disclosure for achieving the purpose will be described below with reference to the accompanying drawings, and the embodiments listed in the following drawings are only for the purpose of explanation, and are to be understood by the reviewing committee, but the technical means of the present invention are not Limited to the listed figures.

Please refer to the embodiment of the multi-link rotating mechanism provided by the present disclosure, which includes a main body 10, a first curved track 20A, a second curved track 20B, a linear module 30 and a rotating die. Group 40.

The body 10 is exemplified in a fan shape, and the body 10 has a first curved edge 11 and a second curved edge 12. The first curved track 20A and the second curved track 20B are respectively disposed on the main body 10, and the first curved track 20A Provided on the first curved edge 11, the second curved track 20B is disposed on the second curved edge 12, that is, the first curved track 20A and the second curved track 20B have the same center, the first curved track The radius of 20A is greater than the radius of the second curved track 20B. The body 10 can also be of any shape and designed as desired.

The linear module 30 is disposed on the main body 10. The linear module 30 has a sliding seat 31, a motor 32, a coupling 33, two bearing blocks 34, a lead screw 35, a rotating nut 36, and the same length and mutual The parallel linear rail 37 is connected to the rotating nut 36. In this embodiment, the sliding seat 31 and the rotating nut 36 are connected through an L-shaped seat 38, but the sliding seat 31 can be combined with the L-shaped seat 38. Integral, or the slider 31 is integrated with the rotating nut 36 and the L-shaped seat 38, and is not limited thereto. The bearing housing 34 and the linear rail 37 are disposed on the main body 10, and the longitudinal direction of the linear rail 37 is parallel to a first direction F1. The motor 32 is used to provide power, and the coupling 33 is coupled to the motor 32, and each bearing block 34 A bearing (not shown) is disposed, and the lead screw 35 is disposed between the two bearing seats 34. The axial direction of the lead screw 35 is parallel to the length direction of the two linear rails 37 (ie, the first direction F1), and the lead screw 35 is provided. The two ends of the lead screw 35 are respectively disposed on a bearing block 34. One end of the lead screw 35 is connected to the coupling 33, and the rotating nut 36 is sleeved on the lead screw 35. Two grooves 311 are formed on the surface of the sliding block 31 facing the two linear rails 37. Each of the grooves 311 is corresponding to and fitted to a linear rail 37, so that the sliding block 31 can move on the linear rail 37.

The rotating module 40 includes a rotating component 41, a loading table 42 and a rotating rail 43. The rotating component 41 includes a locking nut 411, a plurality of bearings 412, a sleeve 413 and a rotating shaft 414. The 414 is provided with a locking nut 411, a plurality of bearings 412, and a sleeve 413. The main body 10 is provided with a hole 13 (refer to FIG. 1 and FIG. 2). The rotating shaft 414 is disposed in the hole 13. The opposite ends of the rotating shaft 414 are respectively connected to the rotating rail 43 located on opposite sides of the main body 10, and The sliding shaft 31 is fixedly coupled to the rotating rail 43 , and the rotating shaft 414 is pivotally connected to the sliding seat 31 by means of a locking nut 411 , a bearing 412 , a sleeve 413 , and the like, that is, the rotating rail 43 can be The axis of the rotating shaft 414 is rotated centrally. The stage 42 is coupled to the rotating rail 43 and hooked to the first curved rail 20A and the second curved rail 20B. As shown in FIG. 2A, the stage 42 is provided with a first hook 421 hooked on the first curved rail 20A, and a corresponding concave and convex structure is disposed between the first hook 421 and the first curved rail 20A. A hook 421 is coupled to the stage 42 so that the stage 42 can be hooked to the first curved track 20A. Similarly, the stage 42 and the second curved track 20B can be the same or similar to the above-mentioned hooks. And the concave and convex structure to match. In addition, as shown in FIG. 5, the loading block 42 is provided with a second hook 422, and the second hook 422 is engaged with the arcuate groove 431 of the rotating rail 43 opposite to the upper and lower sides, and the second hook 422 Since it is connected to the stage 42, the stage 42 can be connected to the rotating rail 43.

With the above configuration, when the motor 32 rotates, the power is transmitted to the lead screw 35 and the rotating nut 36 through the coupling 33, thereby driving the carriage 31 to move along the linear track 37, that is, the carriage 31 is driven and Moving parallel to the first direction F1. Since the sliding block 31 is connected to the rotating shaft 414, the sliding seat 31 can drive the loading table 42 and the rotating rail 43 to move together, so that the loading table 42 simultaneously along the rotating track 43, the first curved track 20A. Or sliding with the second curved track 20B, and the stage 42 and the rotating track 43 are synchronously rotated by the center C of the first curved track 20A and the second curved track 20B.

Referring to Figures 6A to 6D, the mode of motion of this embodiment will be described. Since the stage 42 is coupled with the rotating track 43, the stage 42 and the rotating track 43 are maintained at a fixed angle θ, and the fixed angle θ can be set as desired. For example, it can be a right angle or an arbitrary angle. The following description will be given by a right angle. But not limited to this.

Assuming that the initial position is shown in Fig. 6A, the stage 42 has a first angle α 1 with the center line L passing through the center C. The carriage 31 (i.e., the rotating shaft 414) has a first distance X1 from the center line L. A second distance R1 between the carriage 31 and the stage 42 has a second angle θ 1 between the rotating track 43 and the linear module 30 (corresponding to the lead screw 35 or the first direction F1 shown in FIG. 3). The first direction F1 can be perpendicular to the center line L, but the deviation of the small angle can be tolerated for driving.

As shown in FIG. 6A to FIG. 6D, when the slider 31 slides to the left side, the first distance X1 gradually changes to X4, and the slider 31 drives the rotation module 40 to rotate counterclockwise, and the first angle α 1~α 4 The second distances R1 to R4 and the second angles θ 1 to θ 4 also change. That is, the change in the distance R can be achieved by the displacement of the slider 31 on the lead screw 35. The change of the second angle θ 1 θ θ 4 can be accomplished by the rotation of the rotating shaft 414. The first distances X1 to X4, the first angles α 1 to α 4 , the second distances R1 to R4 , and the second angles θ 1 to θ 4 have a corresponding relationship, so that the first distances X1 to X4 can be changed to achieve the desired The angle of the first angle α 1 ~ α 4 . By analogy, when the carriage 31 is driven and reciprocated in parallel, the carriage 42 can be rotated to reciprocately rotate, for example, from FIG. 6A to FIG. 6D, and then from FIG. 6D to FIG. 6A, so as to repeat.

It is to be noted that the state shown in Figs. 1 and 2 is in a state between Fig. 6B and Fig. 6C, that is, when the carriage 31 is driven to the center position of the rotating rail 43.

Referring to FIG. 7 , the embodiment has a main body 10 , a first curved track 20A , a linear module 30 , and a rotating module 40 . The main difference between the embodiment and the embodiment of FIG. 1 is that the first embodiment is omitted. Two curved rails 20B (see Figure 1). With the embodiment of Fig. 1, since there is a first curved track 20A and a second curved track 20B, a more stable static and moment balance can be provided. And the embodiment shown in Figure 7, The rotating track 43 in the rotating module 40 itself can be used as the carrying track of the stage 42 in addition to the rotation of the driving stage 42. For cost requirements or space constraints, only one curved track is needed as shown in FIG. The entire system can be statically balanced.

Referring to FIG. 8 , the embodiment has a main body 10 , a first curved track 20A , a second curved track 20B , a linear module 30A and two rotating modules 40A and 40B . The lead screw 35A has two first thread segments 351A and a second thread segment 352A which are mutually symmetrical but differently guided, for example, a left thread and a right thread, and the first thread segment 351A and the second thread segment 352A. A rotation module 40A, 40B is respectively disposed, and the two rotation modules 40A, 40B are symmetrically arranged. When the lead screw 35A rotates, the two rotation modules 40A, 40B can be driven to rotate relative to each other, that is, the center C is simultaneously approached or separated. This embodiment can be applied to an ellipsometer or a scatterometer. In addition, the combination of the lead screw and the motor can be changed to a linear motor, that is, one stator is matched with two movers, and each of the two movers is combined with a rotary module, so that the two rotary modules 40A can be simultaneously driven. The purpose of 40B relative movement.

Referring to FIG. 9 , the embodiment has a main body 10A, two first curved rails 20A, a second curved rail 20B, a linear module 30 and a rotating module 40C. The two first curved shapes are shown. The track 20A is disposed relative to the center C of the first curved track 20A, and the stage 42C is connected to the center C and simultaneously connected to the two first curved tracks 20A. The shape of the body 10A may be a circular body or designed as desired. It can accommodate two first curved tracks 20A. This embodiment is suitable for a large-sized stage 42C, such as a rotary alignment of a large liquid crystal panel, especially in a process machine that requires light transmission.

Please refer to the embodiment shown in FIG. 10 for use on the R2R machine. By utilizing the characteristics of the solid-free axis, the substrate 50 can be passed through without hindrance. Various instruments can be used for various purposes. For example, when the substrate 50 is a brightness enhancement film (BEF), the stage 42 can be mounted with a white light interferometer (not shown) to measure the diaphragm at multiple angles. Establish a 3D topography.

In summary, the present disclosure provides a multi-link rotating mechanism capable of providing rotational freedom, which comprises one or more curved tracks, a linear module with a power source and linear motion, and a belt. The rotating module with the rotating track uses the linear module to drive the rotating module to perform linear motion, and the link mechanism is used to make the object connected with the rotating module rotate around the center of the curved track. Due to the use of routine Linear mechanical components, so the cost can be significantly reduced. In addition, the architecture of the present disclosure is to apply a multi-link mechanism that provides the desired rotational motion of the system with a simple linear motion. Since the axis of the rotational motion is not solid, the aforementioned collision interference phenomenon can be completely avoided, so that the workpiece size and the displacement stroke on the rotating shaft are not restrained, and thus the maximum design flexibility can be enjoyed.

However, the above description is only for the embodiments of the present disclosure, and the scope of the disclosure should not be limited thereto; therefore, the simple equivalent changes and modifications made by the scope of the application and the contents of the specification should be It is still within the scope of this disclosure.

10‧‧‧ Ontology

11‧‧‧First curved edge

12‧‧‧Second curved edge

13‧‧‧ hole

20A‧‧‧First curved track

20B‧‧‧Second curved track

40‧‧‧Rotary Module

42‧‧‧ stage

43‧‧‧Rotating orbit

F1‧‧‧ first direction

Claims (7)

A multi-link rotating mechanism includes: a main body having at least one curved track; a linear module disposed on the main body, having a sliding seat, the sliding seat being driven to reciprocate in a first direction; and a The rotating module includes a rotating component, a loading platform and a rotating track, the two ends of the rotating component are respectively connected to the sliding seat and the rotating track, and the loading platform is hooked on the rotating track and the curved track, when When the carriage moves, the stage is rotated on the curved track, and the rotating track rotates at one end of the rotating component. The multi-link rotating mechanism of claim 1, wherein the linear module comprises: a motor for supplying power; a coupling for connecting with the motor; and two bearing seats each having a bearing, and Separately disposed on the main body; a lead screw, the two ends of which respectively pass through the bearing seat, one end of which is connected to the coupling; a rotating nut is sleeved on the lead screw and connected to the sliding seat; A linear track is disposed on the body to cause the slider to move on the linear track. The multi-link rotating mechanism of claim 1, wherein the rotating assembly comprises a locking nut, a plurality of bearings, a sleeve and a rotating shaft, the rotating shaft piercing the locking screw The cap, the plurality of bearings and the sleeve, the two ends of the rotating shaft are respectively connected to the linear track and the sliding seat. The multi-link rotating mechanism according to claim 1, wherein the body further has a second curved track, the second curved track and the curved track have the same center, and the loading platform is hooked. And the curved track and the second curved track. A multi-link rotating mechanism includes: a main body having at least one curved track; a linear module disposed on the main body, having a sliding seat and a lead screw, the sliding seat being driven in a first direction Moving, the lead screw has a first screw a rotation segment and a second thread segment; and a plurality of rotation modules, wherein the first thread segment and the second thread segment are respectively provided with a rotation module, each of the rotation modules comprising a rotation assembly and a loading platform; a rotating track, the two ends of the rotating component are respectively connected to the sliding seat and the rotating track, the loading table is hooked on the rotating track and the curved track, and when the sliding seat moves, the loading platform is arranged in the curved shape The track rotates and the rotating track rotates at one end of the rotating assembly. The multi-link rotating mechanism of claim 5, wherein the first thread segment and the second thread segment are symmetric with each other but differently guided, and are disposed on the first thread segment and the second thread segment. The rotating module is symmetrically arranged, and the guiding screw rotates to drive the two rotating modules to move relative to each other. A multi-link rotating mechanism includes: a main body having two first curved tracks and a second curved track, the two first curved tracks being disposed with respect to a center of the first curved track; a linear The module is disposed on the main body, has a sliding seat and a lead screw, the sliding seat is driven to reciprocate in a first direction; and a rotating module, the rotating module includes a rotating component, a loading platform, and a rotating track, the stage spans the center of the circle and is simultaneously connected to the two first curved tracks, the two ends of the rotating component are respectively connected to the sliding seat and the rotating track, and the loading table is hooked on the rotating track And the curved track, when the sliding seat moves, the stage is rotated on the curved track, and the rotating track rotates at one end of the rotating component.