TW201519725A - Semifinished electric device, electric device and menufacturing method thereof - Google Patents

Semifinished electric device, electric device and menufacturing method thereof Download PDF

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Publication number
TW201519725A
TW201519725A TW102141472A TW102141472A TW201519725A TW 201519725 A TW201519725 A TW 201519725A TW 102141472 A TW102141472 A TW 102141472A TW 102141472 A TW102141472 A TW 102141472A TW 201519725 A TW201519725 A TW 201519725A
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Taiwan
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electronic component
substrate
layer
film layer
group
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TW102141472A
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Chinese (zh)
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Guan-Ren Wang
Cheng-Yi Cheng
Tai-Yen Lai
Chi-Jen Lin
Chien-Min Tsai
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Wintek Corp
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Priority to TW102141472A priority Critical patent/TW201519725A/en
Priority to CN201410006636.7A priority patent/CN104640381A/en
Publication of TW201519725A publication Critical patent/TW201519725A/en

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0213Electrical arrangements not otherwise provided for

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials For Photolithography (AREA)
  • Laminated Bodies (AREA)

Abstract

A manufacturing method of an electric device includes following steps. A carrying plate is provided. A thin film is formed on the carrying plate. A substrate is formed on the thin film. An electric device layer is formed on the substrate. The thin film is dissolved by a solvent, wherein the solvent can dissolve the thin film and can't dissolve the substrate. Moreover, a semifinished electric device and an electric device manufactured by the manufacturing method are also provided.

Description

電子元件半成品、電子元件及其製造方法 Electronic component semi-finished product, electronic component and manufacturing method thereof

本發明是有關於一種電子元件半成品、電子元件及其製造方法。 The present invention relates to an electronic component semi-finished product, an electronic component, and a method of manufacturing the same.

由於可撓式電子元件具有輕巧性、耐衝擊性、可撓曲性、可穿戴性與攜帶方便等優勢,目前已儼然成為新一代前瞻技術。然而,在目前的可撓式電子元件製程中,主要技術瓶頸在於如何將電子元件層製作於軟性基板上。 Due to its advantages of light weight, impact resistance, flexibility, wearability and portability, flexible electronic components have become a new generation of forward-looking technology. However, in the current process of flexible electronic components, the main technical bottleneck is how to make the electronic component layer on the flexible substrate.

在習知技術中,多利用離型膜將軟性基板貼附於剛性基板上,待軟性基板上的電子元件層製作完成後,才將電子元件層及軟性基板自剛性基板取下,以完成可撓式電子元件。然而,在電子元件層及軟性基板自剛性基板取下的過程中,電子元件層可能會受到撓曲而易受損。此外,當軟性基板(例如薄玻璃基板)與剛性基板(例如硬玻璃基板)的材質相同時,上述利用離型膜製作可撓 式電子元件恐無法實施。 In the prior art, the flexible substrate is attached to the rigid substrate by using the release film. After the electronic component layer on the flexible substrate is completed, the electronic component layer and the flexible substrate are removed from the rigid substrate to complete. Flexible electronic components. However, in the process of removing the electronic component layer and the flexible substrate from the rigid substrate, the electronic component layer may be flexed and easily damaged. In addition, when the material of the flexible substrate (for example, a thin glass substrate) and the rigid substrate (for example, a hard glass substrate) are the same, the above-mentioned release film is made flexible. Electronic components may not be implemented.

本發明提供一種電子元件的製造方法,利用所述電子元件的製造方法可分離材質相同或相異的基板與載板,進而製作出多樣的電子元件。 The present invention provides a method of manufacturing an electronic component in which a substrate having the same or different materials and a carrier are separated by the method of manufacturing the electronic component, thereby producing various electronic components.

本發明的一種電子元件的製造方法,包括下列步驟。提供載板。在載板上形成膜層。在膜層上形成基板。在基板上形成電子元件層。利用溶劑溶解膜層,其中溶劑能溶解膜層而無法溶解基板。電子元件層可以是由一道或是多道的製程所形成,例如是黃光微影製程、噴墨或是印刷製程。換句話說,電子元件可以是由多層的圖案化膜層所堆疊架構而形成。電子元件層例如是觸控感測電路(touch sensor circuit)或是顯示電路(display circuit)。 A method of manufacturing an electronic component of the present invention comprises the following steps. A carrier board is provided. A film layer is formed on the carrier. A substrate is formed on the film layer. An electronic component layer is formed on the substrate. The solvent layer dissolves the film layer in which the solvent dissolves the film layer and does not dissolve the substrate. The electronic component layer can be formed by one or more processes, such as a yellow lithography process, an inkjet process, or a printing process. In other words, the electronic component can be formed by a stacked architecture of multiple layers of patterned film layers. The electronic component layer is, for example, a touch sensor circuit or a display circuit.

本發明的一種電子元件半成品,包括載板、配置於載板上的基板、配置於載板與基板之間的膜層以及電子元件層。基板配置於電子元件層與膜層之間。膜層能夠溶解於溶劑,而基板無法溶解於所述溶劑。所述溶劑用於電子元件半成品的後續製程。 An electronic component semi-finished product according to the present invention includes a carrier, a substrate disposed on the carrier, a film layer disposed between the carrier and the substrate, and an electronic component layer. The substrate is disposed between the electronic component layer and the film layer. The film layer can be dissolved in the solvent, and the substrate cannot be dissolved in the solvent. The solvent is used in subsequent processes of electronic component semi-finished products.

本發明的一種電子元件包括基板、配置於基板上的電子元件層以及殘留的膜層。基板配置於電子元件層與殘留的膜層之間,而殘留的膜層為感光型聚醯亞胺。 An electronic component of the present invention includes a substrate, an electronic component layer disposed on the substrate, and a residual film layer. The substrate is disposed between the electronic component layer and the remaining film layer, and the remaining film layer is a photosensitive polyimide.

本發明的一種電子元件,包括可撓性基板、電子元件層以及感光材料。可撓性基板的厚度介於5微米(μm)至100微米。可撓性基板具有表面以及相對於表面的另一表面。電子元件層配 置於可撓性基板的表面上。感光材料位於可撓性基板的另一表面上。 An electronic component of the present invention includes a flexible substrate, an electronic component layer, and a photosensitive material. The thickness of the flexible substrate ranges from 5 micrometers (μm) to 100 micrometers. The flexible substrate has a surface and another surface opposite the surface. Electronic component layer Placed on the surface of the flexible substrate. The photosensitive material is on the other surface of the flexible substrate.

在本發明的一實施例中,上述的感光材料是殘留的膜層。可撓性基板配置於電子元件層與殘留的膜層之間。殘留的膜層為感光型聚醯亞胺。 In an embodiment of the invention, the photosensitive material is a residual film layer. The flexible substrate is disposed between the electronic component layer and the remaining film layer. The residual film layer is a photosensitive polyimide.

在本發明的一實施例中,上述的電子元件層是由複數層的圖案化薄膜層所堆疊架構形成。 In an embodiment of the invention, the electronic component layer is formed by a stacked structure of a plurality of patterned thin film layers.

在本發明的一實施例中,上述的電子元件層是觸控感測電路或是顯示電路。 In an embodiment of the invention, the electronic component layer is a touch sensing circuit or a display circuit.

在本發明的一實施例中,上述的電子元件藉由黏著層貼附於硬質基板上。 In an embodiment of the invention, the electronic component is attached to the rigid substrate by an adhesive layer.

在本發明的一實施例中,上述的硬質基板是覆蓋板。覆蓋板面向電子元件層的至少一側表面上設有裝飾層。 In an embodiment of the invention, the hard substrate is a cover sheet. A decorative layer is provided on at least one side surface of the cover sheet facing the electronic component layer.

在本發明的一實施例中,上述的硬質基板是強化玻璃基板或是塑膠基板。 In an embodiment of the invention, the hard substrate is a tempered glass substrate or a plastic substrate.

在本發明的一實施例中,上述的硬質基板面對黏著層的表面的至少部分區域是具有弧度的表面。 In an embodiment of the invention, at least a portion of the surface of the hard substrate facing the adhesive layer is a curved surface.

在本發明的一實施例中,上述的載板具有至少一貫孔,而在載板上形成膜層的步驟為:在載板上形成覆蓋貫孔的膜層。 In an embodiment of the invention, the carrier plate has at least a uniform hole, and the step of forming a film layer on the carrier plate is: forming a film layer covering the through hole on the carrier plate.

在本發明的一實施例中,上述的利用溶劑溶解膜層的步驟為:令溶劑自貫孔滲入膜層。 In an embodiment of the invention, the step of dissolving the film layer by the solvent is such that the solvent penetrates the film layer from the through hole.

在本發明的一實施例中,上述的令溶劑自貫孔滲入膜層 的步驟為:令載板以及至少一貫孔沒入溶劑而電子元件層未沒入溶劑。 In an embodiment of the invention, the solvent penetrates the film from the through hole The steps are as follows: the carrier and at least the consistent holes are immersed in the solvent and the electronic component layer is not immersed in the solvent.

在本發明的一實施例中,上述的利用溶劑溶解膜層的步驟為:令載板、膜層、基板以及電子元件層一起沒入溶劑。 In an embodiment of the invention, the step of dissolving the film layer by the solvent is such that the carrier, the film layer, the substrate, and the electronic component layer are not mixed with the solvent.

在本發明的一實施例中,上述的在膜層上形成基板的步驟為:利用黏著層將基板貼附於膜層上;或直接地在膜層上形成基板。 In an embodiment of the invention, the step of forming the substrate on the film layer is: attaching the substrate to the film layer by using an adhesive layer; or directly forming the substrate on the film layer.

在本發明的一實施例中,上述的電子元件的製造方法更包括:在利用溶劑溶解膜層之後,去除黏著層。 In an embodiment of the invention, the method of manufacturing the electronic component further includes removing the adhesive layer after dissolving the film layer with a solvent.

在本發明的一實施例中,上述的膜層為具有下式(I)的感光型聚醯亞胺,,其中A為含有至少一個修飾基團R1的四價有機基團,B及D為相同或不同的二價有機基團,C為不含有修飾基團R1的四價有機基團,m為大於0的整數,n為等於0或大於0的整數,其中修飾基團R1為選自下列基團所構成的群組: In an embodiment of the invention, the film layer is a photosensitive polyimide having the following formula (I), Wherein A is a tetravalent organic group containing at least one modifying group R 1 , B and D are the same or different divalent organic groups, and C is a tetravalent organic group not containing a modifying group R 1 , m An integer greater than 0, n is an integer equal to 0 or greater than 0, wherein the modifying group R 1 is a group selected from the group consisting of:

,其中R2為含有乙稀基的不飽和 基團。 Wherein R 2 is an ethylenically unsaturated group.

在本發明的一實施例中,上述的膜層為具有下式(Ⅱ)的感光型聚醯亞胺,,其中B及D可為相同或不同,各自獨立為二價有機基團;A為含有至少一個修飾基團R'之四價有機基團,J為不具有修飾基團R'之四價有機基團,n等於0或為大於0的整數,m為大於0的整數,R'係選自以下基團: ,其中R代表含有乙烯基的不飽和基團或為選自下述的基團: 其中R1為經取代或未經取代的具有C1-C20之飽和或不飽和有機基團,而R2為含有乙烯 基的不飽和基團。 In an embodiment of the invention, the film layer is a photosensitive polyimide having the following formula (II), Wherein B and D may be the same or different, each independently being a divalent organic group; A is a tetravalent organic group containing at least one modifying group R', and J is a tetravalent organic having no modifying group R' a group, n is equal to 0 or an integer greater than 0, m is an integer greater than 0, and R' is selected from the group consisting of: Wherein R represents an unsaturated group containing a vinyl group or a group selected from the group consisting of: Wherein R1 is a substituted or unsubstituted saturated or unsaturated organic group having C1-C20, and R2 is an unsaturated group containing a vinyl group.

在本發明的一實施例中,上述的膜層為具有下式(Ⅲ)的感光型聚醯亞胺,,其中A及C可相同或不同,各自獨立為四價有機基團;B為含有至少一個選自: 的二價有機基團,其中R為選自下述的基團: 其中R1為經取代或未經取代的具有C1-C20之飽和或不飽和有機基團,及R2為含有乙烯基的不飽和基團;D各獨立為二價有機基團;n為大於0之整數,及m等於0或為大於0的整數。 In an embodiment of the invention, the film layer is a photosensitive polyimide having the following formula (III), Wherein A and C may be the same or different and each independently is a tetravalent organic group; and B is at least one selected from the group consisting of: a divalent organic group, wherein R is a group selected from the group consisting of: Wherein R1 is a substituted or unsubstituted C1-C20 saturated or unsaturated organic group, and R2 is a vinyl-containing unsaturated group; D is independently a divalent organic group; n is greater than 0 An integer, and m equals 0 or an integer greater than zero.

在本發明的一實施例中,上述的基板包括下式(Ⅳ)記載的 材料,,其中x為大於192的整數,使上述基板的材料為分子量超過80,000以上的高分子量薄膜,至於最大分子量的上下則依賴單體繼續反應的程度,並無限制。 In an embodiment of the invention, the substrate includes the material described in the following formula (IV). Wherein x is an integer greater than 192 such that the material of the substrate is a high molecular weight film having a molecular weight of more than 80,000 or more, and the upper and lower molecular weights are dependent on the extent to which the monomer continues to react, and are not limited.

在本發明的一實施例中,上述的基板包括下式(V)記載的材料, ,其中n為大於104的整數的整數,使上述基板的材料為分子量超過80,000以上的高分子量薄膜,至於最大分子量的上限則依賴單體繼續反應的程度,並無限制。 In an embodiment of the invention, the substrate includes the material described in the following formula (V). Wherein n is an integer of an integer greater than 104 such that the material of the substrate is a high molecular weight film having a molecular weight of more than 80,000 or more, and the upper limit of the maximum molecular weight depends on the extent to which the monomer continues to react, and is not limited.

在本發明的一實施例中,上述的基板包括下式(Ⅵ)記載的材料, ---(Ⅵ),其中m為大於216的整數,使上述基板的材料為分子量超過80,000以上的高分子量薄膜,至於最大分子量的上限則依賴單體繼續反應的程度,,並無限制。 In an embodiment of the invention, the substrate includes the material described in the following formula (VI). --- (VI), wherein m is an integer greater than 216, such that the material of the above substrate is a high molecular weight film having a molecular weight of more than 80,000 or more, and the upper limit of the maximum molecular weight depends on the extent to which the monomer continues to react, and is not limited.

在本發明的一實施例中,上述的溶劑為具有酮類的有機溶劑。 In an embodiment of the invention, the solvent is an organic solvent having a ketone.

在本發明的一實施例中,上述的載板具有至少一貫孔,而膜層覆蓋貫孔。 In an embodiment of the invention, the carrier plate has at least a uniform aperture, and the film layer covers the through hole.

在本發明的一實施例中,上述的電子元件半成品更包括配置於基板與膜層之間的黏著層。 In an embodiment of the invention, the electronic component semi-finished product further includes an adhesive layer disposed between the substrate and the film layer.

基於上述,在本發明一實施例的電子元件製造方法中,利用能夠溶解膜層而無法溶解基板的溶劑去除至少部份的膜層,而使基板與載板分離,進而完成電子元件。由於所述溶劑去除膜 層的步驟與基板及載板的特性無關,因此本發明一實施例的電子元件製造方法可用於分離材質相同或不相同的基板與載板,進而製造出多樣的電子元件。 In the electronic component manufacturing method according to the embodiment of the present invention, at least a part of the film layer is removed by a solvent capable of dissolving the film layer and the substrate cannot be dissolved, and the substrate is separated from the carrier, thereby completing the electronic component. Due to the solvent removal film The step of the layer is independent of the characteristics of the substrate and the carrier. Therefore, the electronic component manufacturing method according to an embodiment of the present invention can be used to separate a substrate or a carrier having the same or different materials, thereby manufacturing various electronic components.

為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。 The above described features and advantages of the invention will be apparent from the following description.

110‧‧‧載板 110‧‧‧ Carrier Board

110a‧‧‧貫孔 110a‧‧‧Tongkong

120‧‧‧膜層 120‧‧‧ film layer

130‧‧‧黏著層 130‧‧‧Adhesive layer

200‧‧‧電子元件 200‧‧‧Electronic components

210‧‧‧基板 210‧‧‧Substrate

210a、210b‧‧‧表面 210a, 210b‧‧‧ surface

220‧‧‧電子元件層 220‧‧‧Electronic component layer

222‧‧‧圖案化薄膜層 222‧‧‧ patterned film layer

300‧‧‧黏著層 300‧‧‧Adhesive layer

400‧‧‧硬質基板 400‧‧‧hard substrate

400a‧‧‧表面 400a‧‧‧ surface

410‧‧‧裝飾層 410‧‧‧Decorative layer

500‧‧‧驅動線路 500‧‧‧ drive line

L‧‧‧溶劑 L‧‧‧Solvent

S、S’‧‧‧電子元件半成品 S, S’‧‧‧ semi-finished electronic components

圖1A至圖1F為本發明第一實施例的電子元件製造方法的剖面示意圖。 1A to 1F are schematic cross-sectional views showing a method of manufacturing an electronic component according to a first embodiment of the present invention.

圖1G本發明一實施例的電子元件的示意圖。 Figure 1G is a schematic illustration of an electronic component in accordance with an embodiment of the present invention.

圖2A至圖2G為本發明第二實施例的電子元件製造方法的剖面示意圖。 2A to 2G are schematic cross-sectional views showing a method of manufacturing an electronic component according to a second embodiment of the present invention.

圖3A至圖3F為本發明第三實施例的電子元件製造方法的剖面示意圖。 3A to 3F are schematic cross-sectional views showing a method of manufacturing an electronic component according to a third embodiment of the present invention.

第一實施例First embodiment

圖1A至圖1F為本發明第一實施例的電子元件製造方法的剖面示意圖。請參照圖1A,首先,提供載板110。在本實施例中,載板110可具有貫孔110a。貫孔110a可用電腦數值控制(computer numerical control,CNC)方法或其他適當方法形成。此 外,貫孔110a的數量不限於圖1所繪,貫孔110a的數量可視實際的需求而定,例如基板的面積越大則可設置越多的貫孔110a。本實施例的載板110可為剛性載板,其材質例如為玻璃。然而,本發明不限於此,在其他實施例中,載板110的材質亦可為不銹鋼、石英、晶圓、陶瓷、或其它適當的材料。 1A to 1F are schematic cross-sectional views showing a method of manufacturing an electronic component according to a first embodiment of the present invention. Referring to FIG. 1A, first, a carrier 110 is provided. In this embodiment, the carrier 110 may have a through hole 110a. The through hole 110a can be formed by a computer numerical control (CNC) method or other suitable method. this In addition, the number of the through holes 110a is not limited to that depicted in FIG. 1. The number of the through holes 110a may be determined according to actual needs. For example, the larger the area of the substrate, the more the through holes 110a may be disposed. The carrier 110 of this embodiment may be a rigid carrier, and the material thereof is, for example, glass. However, the present invention is not limited thereto. In other embodiments, the material of the carrier 110 may be stainless steel, quartz, wafer, ceramic, or other suitable materials.

請參照圖1B,接著,在載板110上形成膜層120。詳言之,在本實施例中,可在載板110上形成覆蓋貫孔110a的膜層120。本實施例的膜層120可為感光材料。更進一步地說,本實施例的膜層120可為具有下式(I)的感光型聚醯亞胺,,其中A為含有至少一個修飾基團R1的四價有機基團,B及D為相同或不同的二價有機基團,C為不含有修飾基團R1的四價有機基團,m為大於0的整數,n為等於0或大於0的整數,其中修飾基團R1為選自下列基團所構成的群組: Referring to FIG. 1B, a film layer 120 is formed on the carrier 110. In detail, in the present embodiment, the film layer 120 covering the through hole 110a can be formed on the carrier 110. The film layer 120 of the present embodiment may be a photosensitive material. Further, the film layer 120 of the present embodiment may be a photosensitive polyimine having the following formula (I). Wherein A is a tetravalent organic group containing at least one modifying group R 1 , B and D are the same or different divalent organic groups, and C is a tetravalent organic group not containing a modifying group R 1 , m An integer greater than 0, n is an integer equal to 0 or greater than 0, wherein the modifying group R 1 is a group selected from the group consisting of:

,其中R2為含有乙稀基的不飽和基團。然而,本發明不限於此,在另一實施例中,膜層120亦可 為具有下式(Ⅱ)的感光型聚醯亞胺、感光型光阻或其他適當材料,,其中B及D可為相同或不同,各自獨立為二價有機基團;A為含有至少一個修飾基團R'之四價有機基團,J為不具有修飾基團R'之四價有機基團,n等於0或為大於0的整數,m為大於0的整數,R'係選自以下基團: ,其中R代表含有乙烯基的不飽和基團或為選自下述的基團: 其中R1為經取代或未經取代的具有C1-C20之飽和或不飽和有機基團,而R2為含有乙烯基的不飽和基團。在又一實施例中,膜層120亦可為具有下式(Ⅲ)的感光型聚醯亞胺, ,其中A及C可相同或不同,各自獨立為四價有機基團;B為含有至少一個選自: 的二價有機基團,其中R為選自下述的基團: 其中R1為經取代或未經取代的具有C1-C20之飽和或不飽和有機基團,及R2為含有乙烯基的不飽和基團;D各獨立為二價有機基團;n為大於0之整數,及m等於0或為大於0的整數。需說明的是,上述膜層120的材料是用於舉例說明,而非用以限制本發明的膜層材料,在其他實施例中,膜層120亦可為其他適當材料。 Wherein R 2 is an ethylenically unsaturated group. However, the present invention is not limited thereto. In another embodiment, the film layer 120 may also be a photosensitive polyimide, a photosensitive photoresist or other suitable material having the following formula (II). Wherein B and D may be the same or different, each independently being a divalent organic group; A is a tetravalent organic group containing at least one modifying group R', and J is a tetravalent organic having no modifying group R' a group, n is equal to 0 or an integer greater than 0, m is an integer greater than 0, and R' is selected from the group consisting of: Wherein R represents an unsaturated group containing a vinyl group or a group selected from the group consisting of: Wherein R1 is a substituted or unsubstituted saturated or unsaturated organic group having C1-C20, and R2 is an unsaturated group containing a vinyl group. In still another embodiment, the film layer 120 may also be a photosensitive polyimine having the following formula (III). Wherein A and C may be the same or different and each independently is a tetravalent organic group; and B is at least one selected from the group consisting of: a divalent organic group, wherein R is a group selected from the group consisting of: Wherein R1 is a substituted or unsubstituted C1-C20 saturated or unsaturated organic group, and R2 is a vinyl-containing unsaturated group; D is independently a divalent organic group; n is greater than 0 An integer, and m equals 0 or an integer greater than zero. It should be noted that the material of the film layer 120 is for illustrative purposes, and is not intended to limit the film material of the present invention. In other embodiments, the film layer 120 may also be other suitable materials.

請參照圖1C,接著,在膜層120上形成基板210。在本實施例中,可直接在膜層120上形成基板210。具體而言,可將適當溶液直接塗佈在膜層120上,接著再固化所述溶液,以形成基 板210。簡言之,可利用成膜方式形成基板210。在本實施例中,基板210的材質與載板110可相異。然而,本發明不限於此,基板210的材質與亦可與載板110相同,舉例而言,在其他實施例中,載板110可為厚玻璃,而基板210可為薄玻璃。本實施例的基板210例如為可撓性基板,其材質可為塑膠或其他適當材料,其厚度可介於5微米(μm)至100微米。進一步而言,本實施例的基板210可為下式(Ⅳ)記載的材料,,其中x為大於192的整數,使基板210的材料為分子量超過80,000以上的高分子量薄膜,至於最大分子量的上限則依賴單體繼續反應的程度,並無限制。然而,本發明不限於此,在另一實施例中,基板210亦可為下式(V)記載的材料, ,其中n為大於104的整數,使上述基板的材料為分子量超過80,000以上的高分子量薄 膜,至於最大分子量的上限則依賴單體繼續反應的程度,並無限制。然而,本發明不限於此,在又一實施例中,基板210亦可為下式(Ⅵ)記載的材料, ---(Ⅵ),其中m為大於216的整數,使基板210的材料為分子量超過80,000以上的高分子量薄膜,至於最大分子量的上限則依賴單體繼續反應的程度,並無限制。需說明的是,上述基板210的材料及厚度是用於舉例說明,而非用以限制本發明的基板材料。在其他實施例中,基板210亦可為剛性基板,其材質可為玻璃、石英、晶圓、陶瓷、或其它適當的材料。 Referring to FIG. 1C, next, a substrate 210 is formed on the film layer 120. In the present embodiment, the substrate 210 can be formed directly on the film layer 120. Specifically, a suitable solution may be directly coated on the film layer 120, followed by curing the solution to form the substrate 210. In short, the substrate 210 can be formed by a film formation method. In this embodiment, the material of the substrate 210 and the carrier 110 may be different. However, the present invention is not limited thereto, and the material of the substrate 210 may be the same as that of the carrier 110. For example, in other embodiments, the carrier 110 may be thick glass, and the substrate 210 may be thin glass. The substrate 210 of the present embodiment is, for example, a flexible substrate, which may be made of plastic or other suitable material and may have a thickness of 5 micrometers (μm) to 100 micrometers. Further, the substrate 210 of the present embodiment may be a material described in the following formula (IV). Where x is an integer greater than 192 such that the material of the substrate 210 is a high molecular weight film having a molecular weight of more than 80,000 or more, and the upper limit of the maximum molecular weight depends on the extent to which the monomer continues to react, and is not limited. However, the present invention is not limited thereto. In another embodiment, the substrate 210 may also be a material described in the following formula (V). Wherein n is an integer greater than 104 such that the material of the substrate is a high molecular weight film having a molecular weight of more than 80,000 or more, and the upper limit of the maximum molecular weight depends on the extent to which the monomer continues to react, and is not limited. However, the present invention is not limited thereto. In still another embodiment, the substrate 210 may be a material described in the following formula (VI). --- (VI), wherein m is an integer greater than 216, such that the material of the substrate 210 is a high molecular weight film having a molecular weight of more than 80,000 or more, and the upper limit of the maximum molecular weight depends on the extent to which the monomer continues to react, and is not limited. It should be noted that the material and thickness of the substrate 210 are for illustrative purposes, and are not intended to limit the substrate material of the present invention. In other embodiments, the substrate 210 can also be a rigid substrate made of glass, quartz, wafer, ceramic, or other suitable material.

請參照圖1D,接著,在基板210上形成電子元件層220,進而構成電子元件半成品S。本實施例的電子元件半成品S包括載板110、配置於載板110上的基板210、配置於載板110與基板 210之間的膜層120以及電子元件層220,其中基板210配置於電子元件層220與膜層120之間。在本實施例中,在本實施例中,電子元件層220是由複數層的圖案化薄膜層222所堆疊形成。圖案化薄膜層222可是觸控感測電路(touch sensor circuit)、顯示電路(display circuit)或其組合。然而,本發明不限於此,在其他實施例中,電子元件層220亦可為其他種類的電子元件層。 Referring to FIG. 1D, an electronic component layer 220 is formed on the substrate 210 to form an electronic component blank S. The electronic component semi-finished product S of the present embodiment includes a carrier 110, a substrate 210 disposed on the carrier 110, and a carrier 110 and a substrate. The film layer 120 between the 210 and the electronic component layer 220 are disposed between the electronic component layer 220 and the film layer 120. In the present embodiment, in the present embodiment, the electronic component layer 220 is formed by stacking a plurality of patterned thin film layers 222. The patterned film layer 222 can be a touch sensor circuit, a display circuit, or a combination thereof. However, the present invention is not limited thereto. In other embodiments, the electronic component layer 220 may also be other types of electronic component layers.

請參照圖1E及圖1F,接著,利用溶劑L溶解膜層120,其中溶劑L能夠溶解膜層120而無法溶解基板210。在本實施例中,溶劑L可為具有酮(ketone)類的有機溶劑,例如丙酮、N-甲基吡咯酮(NMP)、二甲基乙醯胺(DMAC)、二甲基甲醯胺(DMF)、二甲基亞碸(DMSO)、甲苯(toluene)、二甲苯(xylene)或其組合。然而,本發明不限於此,溶劑L的材料可視膜層120及基板210的材料而適當地選用。舉例而言,若膜層120的材質為感光型光阻,例如單甲基醚丙二醇乙酸酯(1-Methoxy-2-propanol acetate),則溶劑L(即剝膜液)可對應地選用為丙酮、酒精或其他適當材料。 Referring to FIG. 1E and FIG. 1F, next, the film layer 120 is dissolved by the solvent L, in which the solvent L can dissolve the film layer 120 and the substrate 210 cannot be dissolved. In the present embodiment, the solvent L may be an organic solvent having a ketone type such as acetone, N-methylpyrrolidone (NMP), dimethylacetamide (DMAC), dimethylformamide ( DMF), dimethyl hydrazine (DMSO), toluene, xylene or a combination thereof. However, the present invention is not limited thereto, and the material of the solvent L is appropriately selected depending on the material of the film layer 120 and the substrate 210. For example, if the material of the film layer 120 is a photosensitive photoresist, such as 1-Methoxy-2-propanol acetate, the solvent L (ie, the stripping solution) can be correspondingly selected as Acetone, alcohol or other suitable material.

如圖1F所示,當膜層120溶解時,載板110便可自然地與基板210分離,進而完成電子元件200。電子元件200包括基板210以及配置於基板210上的電子元件層220。當膜層120未完全溶解時,電子元件200可包括殘留的膜層120。即使,膜層120幾乎完全被溶解而肉眼不可見時,仍可透過適當儀器,例如質譜檢測器(Gas chromatography-mass spectrometry,GC-MS),檢測出膜層120曾經配置於電子元件200基板110表面210b上的證據。 基板210配置於電子元件層220與殘留的膜層120之間。換言之,基板210具有相對的二表面210a、210b。電子元件層220配置於表面210a上,而與殘留的膜層120配置於表面210b上。殘留的膜層120暴露出部份的基板210。 As shown in FIG. 1F, when the film layer 120 is dissolved, the carrier 110 can be naturally separated from the substrate 210, thereby completing the electronic component 200. The electronic component 200 includes a substrate 210 and an electronic component layer 220 disposed on the substrate 210. When the film layer 120 is not completely dissolved, the electronic component 200 may include a residual film layer 120. Even if the film layer 120 is almost completely dissolved and is invisible to the naked eye, the film layer 120 is once disposed on the substrate 110 of the electronic component 200 through a suitable instrument such as a gas chromatography-mass spectrometry (GC-MS). Evidence on surface 210b. The substrate 210 is disposed between the electronic component layer 220 and the remaining film layer 120. In other words, the substrate 210 has opposing two surfaces 210a, 210b. The electronic component layer 220 is disposed on the surface 210a, and the remaining film layer 120 is disposed on the surface 210b. The residual film layer 120 exposes a portion of the substrate 210.

值得一提的是,利用貫孔110a,溶劑L可有效地溶解膜層120以分離載板110與基板210,而不易損傷電子元件層220。詳言之,如圖1E所示,在本實施例中,可令載板110以及貫孔110a沒入溶劑L而電子元件層220未沒入溶劑L。此時,溶劑L可自貫孔110a滲入膜層120,進而溶解之。透過貫孔110a的設計,溶劑L在溶解膜層120的同時,可不與電子元件層220接觸,而不易損傷電子元件層220。 It is worth mentioning that, by using the through hole 110a, the solvent L can effectively dissolve the film layer 120 to separate the carrier 110 and the substrate 210 without damaging the electronic component layer 220. In detail, as shown in FIG. 1E, in the present embodiment, the carrier 110 and the through hole 110a can be immersed in the solvent L and the electronic component layer 220 is not immersed in the solvent L. At this time, the solvent L can be infiltrated into the film layer 120 from the through hole 110a, and further dissolved. Through the design of the through hole 110a, the solvent L may not be in contact with the electronic component layer 220 while dissolving the film layer 120, and the electronic component layer 220 may not be damaged.

然而,在其他實施例中,載板110可不具有貫孔110a,因此在載板110不具貫孔110a之實施例中溶解膜層120時,需使膜層120至少沒入溶劑L,藉由溶劑L從膜層120外露的側邊溶解膜層120以分離載板110與基板210。 However, in other embodiments, the carrier 110 may not have the through hole 110a. Therefore, when the film layer 120 is dissolved in the embodiment in which the carrier 110 does not have the through hole 110a, the film layer 120 needs to be at least immersed in the solvent L by the solvent. L dissolves the film layer 120 from the exposed side of the film layer 120 to separate the carrier 110 from the substrate 210.

圖1G本發明一實施例的電子元件的示意圖。請參照圖1G,圖1F所示的電子元件200可藉由黏著層300貼附於硬質基板400上。當電子元件200貼附於硬質基板400時,黏著層300位於硬質基板400與電子元件層220之間,電子元件層220位於黏著層300與基板210之間。換言之,電子元件200是以基板210承載電子元件層220的表面210b面向硬質基板400的方式貼附於硬質基板400上。另外,需說明的是,圖1G省略圖1F殘留在基板 210表面210b的殘留膜層120的繪示。理由是,殘留膜層120實際上是肉眼不可見的,而不易影響使用者使用電子元件200時視覺觀感。雖殘留膜層120可能是肉眼不可見的,但透過上述適當儀器仍可檢測出。 Figure 1G is a schematic illustration of an electronic component in accordance with an embodiment of the present invention. Referring to FIG. 1G , the electronic component 200 shown in FIG. 1F can be attached to the rigid substrate 400 by the adhesive layer 300 . When the electronic component 200 is attached to the rigid substrate 400, the adhesive layer 300 is located between the rigid substrate 400 and the electronic component layer 220, and the electronic component layer 220 is located between the adhesive layer 300 and the substrate 210. In other words, the electronic component 200 is attached to the rigid substrate 400 such that the surface 210b of the substrate 210 carrying the electronic component layer 220 faces the rigid substrate 400. In addition, it should be noted that FIG. 1G omits FIG. 1F remaining on the substrate. 210 depicts the residual film layer 120 of the surface 210b. The reason is that the residual film layer 120 is actually invisible to the naked eye and does not easily affect the visual perception of the user when using the electronic component 200. Although the residual film layer 120 may be invisible to the naked eye, it can still be detected by the appropriate apparatus described above.

在本實施例中,硬質基板400可為覆蓋板。覆蓋板的面向電子元件層220的至少一側表面400a上設有裝飾層410。裝飾層410可遮蔽與電子元件層220電性連接的驅動線路500,且暴露電子元件層220。硬質基板400可為強化玻璃基板、塑膠基板或其他適當材質的基板。硬質基板400面對黏著層300的一表面410a的至少部分區域可選擇性地為具有弧度的表面。但本發明不限於此,在其他實施例中,表面410a亦可選擇性地為平面。 In the embodiment, the rigid substrate 400 may be a cover plate. A decorative layer 410 is disposed on at least one side surface 400a of the cover sheet facing the electronic component layer 220. The decorative layer 410 can shield the driving line 500 electrically connected to the electronic component layer 220 and expose the electronic component layer 220. The hard substrate 400 may be a reinforced glass substrate, a plastic substrate, or another substrate of a suitable material. At least a portion of the surface 410a of the rigid substrate 400 facing the adhesive layer 300 may optionally be a curved surface. However, the invention is not limited thereto, and in other embodiments, the surface 410a may also be selectively planar.

第二實施例Second embodiment

圖2A至圖2G為本發明第二實施例的電子元件製造方法的剖面示意圖。本實施例的電子元件製造方法與第一實施例的電子元件製造方法類似,因此相同或相對應的元件以相同或相對應的標號表示。本實施例的電子元件製造方法與第一實施例主要差異在於:形成基板的方法不同。以下說明二者相異處,二者相同處便不再重述。 2A to 2G are schematic cross-sectional views showing a method of manufacturing an electronic component according to a second embodiment of the present invention. The electronic component manufacturing method of the present embodiment is similar to the electronic component manufacturing method of the first embodiment, and therefore the same or corresponding components are denoted by the same or corresponding reference numerals. The main difference between the electronic component manufacturing method of the present embodiment and the first embodiment is that the method of forming the substrate is different. The following illustrates the difference between the two, the two will not be repeated.

請參照圖2A,首先,提供載板110。請參照圖2B,接著,在載板110上形成膜層120。請參照圖2C,接著,在膜層120上形成基板210。與第一實施例不同的是,在本實施例中,可利用黏 著層130將基板210貼附於膜層120上。請參照圖2D,接著,在基板210上形成電子元件層220,進而構成電子元件半成品S’。本實施例的電子元件半成品S’包括載板110、配置於載板110上的基板210、配置於載板110與基板210之間的膜層120以及電子元件層220,其中基板210配置於電子元件層220與膜層120之間。與第一實施例不同的是,電子元件半成品S’更包括配置於基板210與膜層120之間的黏著層130。 Referring to FIG. 2A, first, a carrier 110 is provided. Referring to FIG. 2B, next, a film layer 120 is formed on the carrier 110. Referring to FIG. 2C, next, a substrate 210 is formed on the film layer 120. Different from the first embodiment, in this embodiment, the adhesive can be utilized. The layer 130 attaches the substrate 210 to the film layer 120. Referring to Fig. 2D, an electronic component layer 220 is formed on the substrate 210 to form an electronic component blank S'. The electronic component semi-finished product S' of the present embodiment includes a carrier 110, a substrate 210 disposed on the carrier 110, a film layer 120 disposed between the carrier 110 and the substrate 210, and an electronic component layer 220, wherein the substrate 210 is disposed in the electronic device Between the element layer 220 and the film layer 120. Unlike the first embodiment, the electronic component blank S' further includes an adhesive layer 130 disposed between the substrate 210 and the film layer 120.

請參照圖2E及圖2F,接著,利用溶劑L溶解膜層120。如圖2F所示,當膜層120溶解時,載板110便可自然地與基板210分離。請參照圖2G,接著,可去除黏著層130。具體而言,在本實施例中,可利用能溶解黏著層130的溶劑[例如丙二醇甲醚乙酸酯(PGMEA)],溶解黏著層130,而自基板210上去除黏著層130。於此,便完成本實施的電子元件200。 Referring to FIG. 2E and FIG. 2F, the film layer 120 is dissolved by the solvent L. As shown in FIG. 2F, when the film layer 120 is dissolved, the carrier 110 can be naturally separated from the substrate 210. Referring to FIG. 2G, the adhesive layer 130 can be removed. Specifically, in the present embodiment, the adhesive layer 130 can be dissolved by the solvent capable of dissolving the adhesive layer 130 [for example, propylene glycol methyl ether acetate (PGMEA)], and the adhesive layer 130 can be removed from the substrate 210. Here, the electronic component 200 of the present embodiment is completed.

第三實施例Third embodiment

圖3A至圖3F為本發明第三實施例的電子元件製造方法的剖面示意圖。本實施例的電子元件製造方法與第一實施例的電子元件製造方法類似,因此相同或相對應的元件以相同或相對應的標號表示。本實施例的電子元件製造方法與第一實施例的主要差異在於:溶解膜層的方法不同。以下說明二者相異處,二者相同處便不再重述。 3A to 3F are schematic cross-sectional views showing a method of manufacturing an electronic component according to a third embodiment of the present invention. The electronic component manufacturing method of the present embodiment is similar to the electronic component manufacturing method of the first embodiment, and therefore the same or corresponding components are denoted by the same or corresponding reference numerals. The main difference between the electronic component manufacturing method of the present embodiment and the first embodiment is that the method of dissolving the film layer is different. The following illustrates the difference between the two, the two will not be repeated.

請參照圖3A,首先,提供載板110。與第一實施例不同 的是,在本實施例中,載板110可不具貫孔。請參照圖3B,接著,在載板110上形成膜層120。請參照圖3C,接著,在膜層120上形成基板210。請參照圖3D,接著,在基板210上形成電子元件層220,進而構成電子元件半成品S。請參照圖3E及圖3F,接著,利用溶劑L溶解膜層120。與第一實施例不同的是,當溶劑L不易損傷電子元件層220時,可令載板110、膜層120、基板210以及該電子元件層220(即電子元件半成品S整體)一起沒入溶劑L。如圖3F所示,當膜層120溶解時,載板110便可自然地與基板210分離,進而完成電子元件200。 Referring to FIG. 3A, first, a carrier 110 is provided. Different from the first embodiment In this embodiment, the carrier 110 may have no through holes. Referring to FIG. 3B, next, a film layer 120 is formed on the carrier 110. Referring to FIG. 3C, next, a substrate 210 is formed on the film layer 120. Referring to FIG. 3D, an electronic component layer 220 is formed on the substrate 210 to form an electronic component blank S. Referring to FIG. 3E and FIG. 3F, the film layer 120 is then dissolved by the solvent L. Different from the first embodiment, when the solvent L is not easily damaged by the electronic component layer 220, the carrier 110, the film layer 120, the substrate 210, and the electronic component layer 220 (ie, the electronic component semi-finished product S) may be immersed in a solvent together. L. As shown in FIG. 3F, when the film layer 120 is dissolved, the carrier 110 can be naturally separated from the substrate 210, thereby completing the electronic component 200.

綜上所述,在本發明一實施例的電子元件製造方法中,利用能夠溶解膜層而無法溶解基板的溶劑去除至少部份的膜層,而使基板與載板分離,進而完成電子元件。由於所述溶劑去除膜層的步驟與基板及載板的特性無關,因此本發明一實施例的電子元件製造方法可用於分離材質相同或不相同的基板與載板,進而製造多樣的電子元件。 As described above, in the electronic component manufacturing method according to the embodiment of the present invention, at least a part of the film layer is removed by a solvent capable of dissolving the film layer and the substrate cannot be dissolved, and the substrate is separated from the carrier, thereby completing the electronic component. Since the step of removing the film layer by the solvent is independent of the characteristics of the substrate and the carrier, the electronic component manufacturing method according to an embodiment of the present invention can be used to separate a substrate or a carrier having the same or different materials, thereby manufacturing various electronic components.

此外,在本發明另一實施例的電子元件製造方法中,溶劑是利用載板的貫孔滲至膜層進而溶解之。透過所述貫孔,溶劑在溶解膜層時可不與電子元件層接觸,因此溶劑不易損傷電子元件層,而使本發明一實施例的電子元件具有高良率。 Further, in the electronic component manufacturing method according to another embodiment of the present invention, the solvent is infiltrated into the film layer by the through hole of the carrier and further dissolved. Through the through holes, the solvent does not contact the electronic component layer when the film layer is dissolved, so that the solvent does not easily damage the electronic component layer, and the electronic component of one embodiment of the present invention has high yield.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,故本發明之保護範圍 當視後附之申請專利範圍所界定者為準。 Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of protection of the present invention This is subject to the definition of the scope of the patent application.

110‧‧‧載板 110‧‧‧ Carrier Board

110a‧‧‧貫孔 110a‧‧‧Tongkong

120‧‧‧膜層 120‧‧‧ film layer

210‧‧‧基板 210‧‧‧Substrate

210a、210b‧‧‧表面 210a, 210b‧‧‧ surface

220‧‧‧電子元件層 220‧‧‧Electronic component layer

222‧‧‧圖案化薄膜層 222‧‧‧ patterned film layer

L‧‧‧溶劑 L‧‧‧Solvent

Claims (24)

一種電子元件的製造方法,包括:提供一載板;在該載板上形成一膜層;在該膜層上形成一基板;在該基板上形成一電子元件層;以及利用一溶劑溶解該膜層,其中該溶劑能溶解該膜層而無法溶解該基板。 A method of manufacturing an electronic component, comprising: providing a carrier; forming a film on the carrier; forming a substrate on the film; forming an electronic component layer on the substrate; and dissolving the film with a solvent a layer in which the solvent dissolves the film layer and does not dissolve the substrate. 如申請專利範圍第1項所述的電子元件的製造方法,其中該載板具有至少一貫孔,而在該載板上形成該膜層的步驟為:在該載板上形成覆蓋該至少一貫孔的該膜層。 The method of manufacturing an electronic component according to claim 1, wherein the carrier has at least a uniform hole, and the step of forming the film on the carrier is: forming a cover on the carrier to cover the at least one hole The film layer. 如申請專利範圍第2項所述的電子元件的製造方法,其中利用該溶劑溶解該膜層的步驟為:令該溶劑自該至少一貫孔滲入該膜層。 The method for producing an electronic component according to claim 2, wherein the solvent is used to dissolve the film layer by allowing the solvent to infiltrate the film layer from the at least uniform pores. 如申請專利範圍第3項所述的電子元件的製造方法,其中令該溶劑自該至少一貫孔滲入該膜層的步驟為:令該載板以及該至少一貫孔沒入該溶劑而該電子元件層未沒入該溶劑。 The method of manufacturing an electronic component according to claim 3, wherein the step of allowing the solvent to infiltrate the film layer from the at least a uniform hole is: displacing the carrier and the at least one of the consistent holes into the solvent The layer did not enter the solvent. 如申請專利範圍第1項所述的電子元件的製造方法,其中利用該溶劑溶解該膜層的步驟為:令該載板、該膜層、該基板以及該電子元件層一起沒入該溶 劑。 The method of manufacturing an electronic component according to claim 1, wherein the step of dissolving the film layer by using the solvent is such that the carrier, the film layer, the substrate, and the electronic component layer are not dissolved together. Agent. 如申請專利範圍第1項所述的電子元件的製造方法,其中在該膜層上形成該基板的步驟為:利用一黏著層將該基板貼附於該膜層上;或直接地在該膜層上形成該基板。 The method of manufacturing an electronic component according to claim 1, wherein the step of forming the substrate on the film layer is: attaching the substrate to the film layer with an adhesive layer; or directly on the film The substrate is formed on the layer. 如申請專利範圍第6項所述的電子元件的製造方法,其中在該膜層上形成該基板的步驟為:利用該黏著層將該基板貼附於該膜層上,而該電子元件的製造方法更包括:在利用該溶劑溶解該膜層之後,去除該黏著層。 The method of manufacturing an electronic component according to claim 6, wherein the step of forming the substrate on the film layer is: attaching the substrate to the film layer by using the adhesive layer, and manufacturing the electronic component The method further includes removing the adhesive layer after dissolving the film layer using the solvent. 如申請專利範圍第1項所述的電子元件的製造方法,其中該膜層為具有下式(I)的感光型聚醯亞胺,,其中A為含有至少一個修飾基團R1的四價有機基團,B及D為相同或不同的二價有機基團,C為不含有修飾基團R1的四價有機基團,m為大於0的整數,n為等於0或大於0的整數,其中修飾基團R1為選自下列基團所構成的群組: ,其中R2為含有乙稀基的不飽和 基團。 The method for producing an electronic component according to claim 1, wherein the film layer is a photosensitive polyimide having the following formula (I), Wherein A is a tetravalent organic group containing at least one modifying group R 1 , B and D are the same or different divalent organic groups, and C is a tetravalent organic group not containing a modifying group R 1 , m An integer greater than 0, n is an integer equal to 0 or greater than 0, wherein the modifying group R 1 is a group selected from the group consisting of: Wherein R 2 is an ethylenically unsaturated group. 如申請專利範圍第1項所述的電子元件的製造方法,其中該膜層為具有下式(Ⅱ)的感光型聚醯亞胺,,其中B及D可為相同或不同,各自獨立為二價有機基團;A為含有至少一個修飾基團R'之四價有機基團,J為不具有修飾基團R'之四價有機基團,n等於0或為大於0的整數,m為大於0的整數,R'係選自以下基團: ,其中R代表含有乙烯基的不飽和基團或為選自下述的基團: 其中R1為經取代或未經取代的具有C1-C20之飽和或不飽和有機基團,而R2為含有乙烯基的不飽和基團。 The method for producing an electronic component according to claim 1, wherein the film layer is a photosensitive polyimide having the following formula (II), Wherein B and D may be the same or different, each independently being a divalent organic group; A is a tetravalent organic group containing at least one modifying group R', and J is a tetravalent organic having no modifying group R' a group, n is equal to 0 or an integer greater than 0, m is an integer greater than 0, and R' is selected from the group consisting of: Wherein R represents an unsaturated group containing a vinyl group or a group selected from the group consisting of: Wherein R1 is a substituted or unsubstituted saturated or unsaturated organic group having C1-C20, and R2 is an unsaturated group containing a vinyl group. 如申請專利範圍第1項所述的電子元件的製造方法,其中該膜層為具有下式(Ⅲ)的感光型聚醯亞胺,,其中A及C可相同或不同,各自獨立為四價有機基團;B為含有至少一個選自: 的二價有機基團,其中R為選自下述的基團: 其中R1為經取代或未經取代的具有C1-C20之飽和或不飽和有機基團,及R2為含有乙烯基的不飽和基團;D各獨立為二價有機基團;n為大於0之整數,及m等於0或為大於0的整數。 The method for producing an electronic component according to claim 1, wherein the film layer is a photosensitive polyimide having the following formula (III), Wherein A and C may be the same or different and each independently is a tetravalent organic group; and B is at least one selected from the group consisting of: a divalent organic group, wherein R is a group selected from the group consisting of: Wherein R1 is a substituted or unsubstituted C1-C20 saturated or unsaturated organic group, and R2 is a vinyl-containing unsaturated group; D is independently a divalent organic group; n is greater than 0 An integer, and m equals 0 or an integer greater than zero. 如申請專利範圍第1項所述的電子元件的製造方法,其中該溶劑為具有酮類的有機溶劑。 The method for producing an electronic component according to claim 1, wherein the solvent is an organic solvent having a ketone. 一種電子元件半成品,包括:一載板;一基板,配置於該載板上;一膜層,配置於該載板與該基板之間;以及一電子元件層,該基板配置於該電子元件層與該膜層之間,其中該膜層能夠溶解於一溶劑,而該基板無法溶解於該溶劑。 An electronic component semi-finished product comprising: a carrier board; a substrate disposed on the carrier board; a film layer disposed between the carrier board and the substrate; and an electronic component layer disposed on the electronic component layer Between the film layer and the film layer, the film layer can be dissolved in a solvent, and the substrate cannot be dissolved in the solvent. 如申請專利範圍第12項所述的電子元件半成品,其中該載板具有至少一貫孔,而該膜層覆蓋該至少一貫孔。 The electronic component semi-finished product of claim 12, wherein the carrier has at least a uniform aperture, and the membrane layer covers the at least consistent aperture. 如申請專利範圍第12項所述的電子元件半成品,更包括:一黏著層,配置於該基板與該膜層之間。 The electronic component semi-finished product according to claim 12, further comprising: an adhesive layer disposed between the substrate and the film layer. 一種電子元件,包括:一可撓性基板,該可撓性基板的厚度介於5微米至100微米,該可撓性基板具有一表面以及相對於該表面的另一表面;一電子元件層,配置於該可撓性基板的該表面上;以及一感光材料,位於該可撓性基板的該另一表面上。 An electronic component comprising: a flexible substrate having a thickness of between 5 micrometers and 100 micrometers, the flexible substrate having a surface and another surface opposite to the surface; an electronic component layer, Disposed on the surface of the flexible substrate; and a photosensitive material on the other surface of the flexible substrate. 如申請專利範圍第15項所述的電子元件,其中該感光材料是一殘留的膜層,該可撓性基板配置於該電子元件層與該殘留的膜層之間,而該殘留的膜層為感光型聚醯亞胺。 The electronic component according to claim 15, wherein the photosensitive material is a residual film layer disposed between the electronic component layer and the residual film layer, and the residual film layer It is a photosensitive polyimine. 如申請專利範圍第15項所述的電子元件,其中該電子元件層是由複數層的圖案化薄膜層所堆疊架構形成。 The electronic component of claim 15, wherein the electronic component layer is formed by a stacked structure of a plurality of patterned thin film layers. 如申請專利範圍第17項所述的電子元件,其中該電子元件層是觸控感測電路或是顯示電路。 The electronic component of claim 17, wherein the electronic component layer is a touch sensing circuit or a display circuit. 如申請專利範圍第18項所述的電子元件,藉由一黏著層貼附於一硬質基板上。 The electronic component according to claim 18 is attached to a rigid substrate by an adhesive layer. 如申請專利範圍第19項所述的電子元件,其中該硬質基板是一覆蓋板,該覆蓋板面向該電子元件層的至少一側表面上設有一裝飾層。 The electronic component of claim 19, wherein the rigid substrate is a cover plate, and the cover plate is provided with a decorative layer on at least one side surface of the electronic component layer. 如申請專利範圍第19項所述的電子元件,其中該硬質基板是一強化玻璃基板或是一塑膠基板。 The electronic component of claim 19, wherein the rigid substrate is a tempered glass substrate or a plastic substrate. 如申請專利範圍第19項所述的電子元件,其中該硬質基板面對該黏著層的一表面的至少部分區域是具有弧度的表面。 The electronic component of claim 19, wherein at least a portion of a surface of the rigid substrate facing the adhesive layer is a curved surface. 如申請專利範圍第15項所述的電子元件,其中該感光材料是光阻。 The electronic component of claim 15, wherein the photosensitive material is a photoresist. 如申請專利範圍第23項所述的電子元件,其中該光阻之成分包含單甲基醚丙二醇乙酸酯。 The electronic component of claim 23, wherein the component of the photoresist comprises monomethyl ether propylene glycol acetate.
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