TW201515991A - Oxygen-containing gas manufacturing apparatus - Google Patents
Oxygen-containing gas manufacturing apparatus Download PDFInfo
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- TW201515991A TW201515991A TW103108531A TW103108531A TW201515991A TW 201515991 A TW201515991 A TW 201515991A TW 103108531 A TW103108531 A TW 103108531A TW 103108531 A TW103108531 A TW 103108531A TW 201515991 A TW201515991 A TW 201515991A
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Abstract
Description
本發明涉及一種製備含氧氣體的含氧氣體製備裝置，該含氧氣體在載氣中含有預定濃度的氧氣。 The present invention relates to an oxygen-containing gas producing apparatus for preparing an oxygen-containing gas, which contains a predetermined concentration of oxygen in a carrier gas.
在氣體精製、半導體製備工藝、通過無氧化爐進行的鋼鐵．金屬等的熱處理、特殊金屬焊接、食品包裝等領域，使用高純度氣體。在氬氣、氮氣、氦氣等高純度氣體中，需要以ppb的等級正確測定氧氣濃度。在這種情況下，需要ppb水準的氧氣濃度的校準氣體。然而，氧氣濃度小於1ppm的校準氣體在市場上沒有銷售。因此，在現場，通過像日本專利第4406392號公報公開的那樣的含氧氣體製備裝置製備氣體。 In the gas refining, semiconductor preparation process, steel through the non-oxidation furnace. High-purity gases are used in the fields of heat treatment of metals, special metal welding, food packaging, and the like. In high-purity gases such as argon, nitrogen, and helium, it is necessary to accurately measure the oxygen concentration at a level of ppb. In this case, a calibration gas of ppb level oxygen concentration is required. However, calibration gases with oxygen concentrations less than 1 ppm are not commercially available. Therefore, at the site, a gas is prepared by an oxygen-containing gas producing apparatus as disclosed in Japanese Patent No. 4,403,392.
日本專利第4406392號公報中公開的含氧氣體製備裝置構成為，使載氣依次從載氣主流路、除氧機構、流量控制機構通過後導入到氧氣生成機構。根據在該文獻中公開的含氧氣體製備裝置，存在於載氣內的氧氣被除氧機構去除，從而製備氧氣濃度為零的載氣。 The oxygen-containing gas producing apparatus disclosed in Japanese Patent No. 4,064,392 is configured such that the carrier gas is sequentially introduced from the carrier gas main passage, the oxygen scavenging mechanism, and the flow rate control mechanism, and then introduced into the oxygen generating mechanism. According to the oxygen-containing gas production apparatus disclosed in this document, oxygen present in the carrier gas is removed by the oxygen scavenging mechanism, thereby preparing a carrier gas having a zero oxygen concentration.
然而，上述的含氧氣體製備裝置由於具備除氧機構，所以裝置整體大型化、高重量化。另外，需要定期更換在除氧機構中填充的金屬銅等。另一方面，含氧氣體製備裝置有時用於在發動機、鍋爐、工業用爐等設備機器中設置的氧感測器的校準。因此，希望有一種小型、輕量、且 便攜的含氧氣體製備裝置。 However, since the oxygen-containing gas preparation device described above includes the oxygen removal mechanism, the entire device is increased in size and weight. In addition, it is necessary to periodically replace the metal copper or the like filled in the deaerator. On the other hand, an oxygen-containing gas preparation device is sometimes used for calibration of an oxygen sensor provided in an equipment machine such as an engine, a boiler, or an industrial furnace. Therefore, I hope to have a small, lightweight, and Portable oxygen-containing gas preparation device.
本發明的目的在於，提供一種小型且輕量的含氧氣體製備裝置。 It is an object of the present invention to provide a small and lightweight oxygen-containing gas preparation apparatus.
為了解決上述課題，根據本發明的第一方式，提供一種含氧氣體製備裝置，製備在載氣中含有預定濃度的氧氣的含氧氣體。含氧氣體製備裝置具備：載氣流動的氣體流路；被設置于氣體流路、生成氧氣的氧氣生成部；相對于氧氣生成部可切換地連接的電壓儀和恒流電源；以及對氧氣生成部進行控制的控制部。當向氣體流路導入載氣時，控制部將氧氣生成部連接到電壓儀，從而使氧氣生成部作為氧感測器發揮作用，監視氧氣生成部的單元電動勢，由電壓儀取得單元電動勢的監視完成時的監視電壓值，根據由監視電壓值計算出的載氣氧濃度與設定氧氣濃度之差來設定泵浦電流。並且，控制部將氧氣生成部的連線物件從電壓儀切換到恒流電源，從而使氧氣生成部作為氧氣泵發揮作用，將通過泵浦電流而由氧氣生成部生成的氧氣混合到載氣，從而製備被控制為設定氧氣濃度的含氧氣體。 In order to solve the above problems, according to a first aspect of the present invention, an oxygen-containing gas producing apparatus for producing an oxygen-containing gas containing a predetermined concentration of oxygen in a carrier gas is provided. The oxygen-containing gas preparation device includes: a gas flow path through which a carrier gas flows; an oxygen generation unit provided in the gas flow path to generate oxygen; a voltage meter and a constant current power source switchably connected to the oxygen generation unit; and oxygen generation The control unit that controls the department. When the carrier gas is introduced into the gas flow path, the control unit connects the oxygen generating unit to the voltage meter, thereby causing the oxygen generating unit to function as an oxygen sensor, monitoring the unit electromotive force of the oxygen generating unit, and monitoring the unit electromotive force by the voltage meter. The monitored voltage value at the time of completion sets the pump current based on the difference between the carrier gas oxygen concentration calculated from the monitored voltage value and the set oxygen concentration. Further, the control unit switches the connected object of the oxygen generating unit from the voltage meter to the constant current source, thereby causing the oxygen generating unit to function as an oxygen pump, and mixing the oxygen generated by the oxygen generating unit by the pumping current to the carrier gas. Thereby, an oxygen-containing gas controlled to set the oxygen concentration is prepared.
2,105‧‧‧流量調整部 2,105‧‧‧Flow Adjustment Department
33‧‧‧外側電極 33‧‧‧Outer electrode
4‧‧‧電壓儀 4‧‧‧Voltage meter
35‧‧‧加熱器 35‧‧‧heater
6‧‧‧控制部 6‧‧‧Control Department
G1‧‧‧載氣 G1‧‧‧ carrier gas
8‧‧‧操作部 8‧‧‧Operation Department
F1,F2‧‧‧氣體流路 F1, F2‧‧‧ gas flow path
102,103‧‧‧分析儀 102,103‧‧‧Analyzer
3‧‧‧氧氣生成部 3‧‧‧Oxygen Generation Department
31‧‧‧筒狀體(鋯管) 31‧‧‧Cylinder (Zirconium Tube)
5‧‧‧恒流電源 5‧‧‧Constant current source
7‧‧‧顯示部 7‧‧‧Display Department
34‧‧‧氧氣生成單元 34‧‧‧Oxygen generating unit
100‧‧‧通信線 100‧‧‧Communication line
P1,P2‧‧‧電磁閥 P1, P2‧‧‧ solenoid valve
20‧‧‧含氧製備裝置 20‧‧‧Oxygen preparation device
G2‧‧‧含氧氣體 G2‧‧‧Oxygen gas
32‧‧‧內側電極 32‧‧‧Inside electrode
101‧‧‧檢測部 101‧‧‧Detection Department
10‧‧‧氣體分析裝置 10‧‧‧Gas analysis device
S11~S20‧‧‧步驟 S11~S20‧‧‧Steps
41,107‧‧‧氣體感測器 41,107‧‧‧ gas sensor
S21~S36‧‧‧步驟 S21~S36‧‧‧Steps
G3‧‧‧排氣 G3‧‧‧Exhaust
7a‧‧‧七段顯示器 7a‧‧‧Seven-segment display
7b‧‧‧狀態表示LED 7b‧‧‧ Status indicates LED
8a‧‧‧預置按鈕 8a‧‧‧Preset button
8b‧‧‧M按鈕 8b‧‧‧M button
8c‧‧‧”MODE”按鈕 8c‧‧‧"MODE" button
8d‧‧‧”AUTOCAL”按鈕 8d‧‧‧"AUTOCAL" button
8e‧‧‧”CLEAR”按鈕 8e‧‧‧"CLEAR" button
8f‧‧‧上下左右鍵 8f‧‧‧Up and down buttons
8g‧‧‧”ENTER”按鈕 8g‧‧‧"ENTER" button
104‧‧‧泵 104‧‧‧ pump
106‧‧‧適配器 106‧‧‧Adapter
71‧‧‧配管 71‧‧‧Pipe
K‧‧‧煙道 K‧‧‧ flue
80‧‧‧壓力調整閥 80‧‧‧pressure adjustment valve
81‧‧‧氮氣瓶 81‧‧‧Nitrogen bottle
圖1是表示將本發明的含氧氣體製備裝置應用於氣體分析裝置的校準的構成的示意圖。 Fig. 1 is a schematic view showing a configuration in which the oxygen-containing gas producing apparatus of the present invention is applied to calibration of a gas analyzer.
圖2是表示含氧氣體製備裝置的概要結構的框圖。 Fig. 2 is a block diagram showing a schematic configuration of an oxygen-containing gas producing apparatus.
圖3是表示含氧氣體製備裝置的顯示部和操作部的示意圖。 Fig. 3 is a schematic view showing a display unit and an operation unit of the oxygen-containing gas producing apparatus.
圖4是表示通過含氧氣體製備裝置進行的暖機處理的流程圖。 Fig. 4 is a flow chart showing warm-up processing by an oxygen-containing gas producing apparatus.
圖5是表示通過含氧氣體製備裝置進行的校準處理的流程圖。 Fig. 5 is a flow chart showing a calibration process by an oxygen-containing gas producing apparatus.
圖6是表示含氧氣體製備裝置的其他應用例的框圖。 Fig. 6 is a block diagram showing another application example of the oxygen-containing gas producing apparatus.
參照圖1~圖5，說明含氧氣體製備裝置的一實施方式。 An embodiment of an oxygen-containing gas producing apparatus will be described with reference to Figs. 1 to 5 .
如圖1所示，含氧氣體製備裝置20用於氣體分析裝置10的校準。氣體分析裝置10被安裝到發動機、鍋爐、工業用爐等的排氣管。在排氣管內的煙道K中流過作為被測定氣體的排氣G3。氣體分析裝置10對排氣G3中含有的O2氣體等檢測氣體進行檢測以及分析。 As shown in FIG. 1, the oxygen-containing gas producing device 20 is used for calibration of the gas analyzing device 10. The gas analysis device 10 is attached to an exhaust pipe of an engine, a boiler, an industrial furnace, or the like. The exhaust gas G3 as the gas to be measured flows through the flue K in the exhaust pipe. The gas analyzer 10 detects and analyzes a detection gas such as O 2 gas contained in the exhaust gas G3.
氣體分析裝置10具備檢測部101和與檢測部101電氣連接的分析儀102。檢測部101對排氣G3中含有的檢測氣體的濃度進行檢測。檢測部101被插入以及固定到煙道K內。分析儀102被設置於煙道K的外部。分析儀102經由通信線100與含氧氣體製備裝置20連接。 The gas analysis device 10 includes a detection unit 101 and an analyzer 102 electrically connected to the detection unit 101. The detecting unit 101 detects the concentration of the detection gas contained in the exhaust gas G3. The detecting portion 101 is inserted and fixed into the flue K. The analyzer 102 is disposed outside the flue K. The analyzer 102 is connected to the oxygen-containing gas producing device 20 via a communication line 100.
在檢測部101內固定有氣體感測器41。在氣體感測器41的頂端安裝有供給含氧氣體的校準氣體供給用配管71。在氣體感測器41的內部設置有高溫作動型的氣體感測器元件。氣體感測器元件將氧離子傳導性固體電解質形成為板狀或棒狀。在校準氣體供給用配管71上連接有製備預定濃度的含氧氣體G2的含氧氣體製備裝置20。含氧氣體製備裝置20經由壓力調整閥80與氮氣瓶81連接。作為載氣G1的氮氣從氮氣瓶81供給到含氧氣體製備裝置20。 A gas sensor 41 is fixed in the detecting unit 101. A calibration gas supply pipe 71 for supplying an oxygen-containing gas is attached to the tip end of the gas sensor 41. A gas sensor element of a high temperature operation type is provided inside the gas sensor 41. The gas sensor element forms the oxygen ion conductive solid electrolyte into a plate shape or a rod shape. An oxygen-containing gas producing device 20 for preparing a predetermined concentration of the oxygen-containing gas G2 is connected to the calibration gas supply pipe 71. The oxygen-containing gas producing device 20 is connected to the nitrogen gas bottle 81 via a pressure regulating valve 80. Nitrogen gas as the carrier gas G1 is supplied from the nitrogen gas bottle 81 to the oxygen-containing gas producing device 20.
含氧氣體製備裝置20向從氮氣瓶81供給的氮氣G1內供給氧 氣，從而製備N2-O2的含氧氣體G2。含氧氣體G2從含氧氣體製備裝置20經由校準氣體供給用配管71供給到氣體感測器41的頂端，作為校準氣體使用。 The oxygen-containing gas producing apparatus 20 supplies oxygen gas into the nitrogen gas G1 supplied from the nitrogen gas cylinder 81, thereby preparing an oxygen-containing gas G2 of N 2 -O 2 . The oxygen-containing gas G2 is supplied from the oxygen-containing gas preparation device 20 to the tip end of the gas sensor 41 via the calibration gas supply pipe 71, and is used as a calibration gas.
如圖2所示，含氧氣體製備裝置20製備在載氣G1中含有預定濃度的氧氣的含氧氣體G2。含氧氣體製備裝置20具備作為載氣G1的流路的氣體流路F1、對載氣G1的流量進行調整的流量調整部2、以及生成氧氣的氧氣生成部3。電磁閥P1在氣體流路F1上設置於流量調整部2的上游側。電磁閥P2在氣體流路F1上設置于氧氣生成部3的下游側。 As shown in FIG. 2, the oxygen-containing gas producing apparatus 20 prepares an oxygen-containing gas G2 containing a predetermined concentration of oxygen in the carrier gas G1. The oxygen-containing gas preparation device 20 includes a gas flow path F1 as a flow path of the carrier gas G1, a flow rate adjustment unit 2 that adjusts the flow rate of the carrier gas G1, and an oxygen generation unit 3 that generates oxygen. The solenoid valve P1 is provided on the upstream side of the flow rate adjusting unit 2 in the gas flow path F1. The electromagnetic valve P2 is provided on the downstream side of the oxygen generating unit 3 in the gas flow path F1.
含氧氣體製備裝置20具備電壓儀4、恒流電源5、控制部6、顯示部7以及操作部8。電壓儀4以及恒流電源5可電切換地與氧氣生成部3連接。控制部6對流量調整部2、氧氣生成部3、電磁閥P1、P2等進行控制。顯示部7以及操作部8與控制部6連接。 The oxygen-containing gas preparation device 20 includes a voltage meter 4, a constant current source 5, a control unit 6, a display unit 7, and an operation unit 8. The voltage meter 4 and the constant current source 5 are electrically connected to the oxygen generating unit 3. The control unit 6 controls the flow rate adjustment unit 2, the oxygen generation unit 3, the electromagnetic valves P1, P2, and the like. The display unit 7 and the operation unit 8 are connected to the control unit 6.
流量調整部2是品質流量控制器(Mass Flow Controller：MFC)。品質流量控制器根據電信號使流量控制閥工作，將載氣G1的流量始終調整為設定流量。 The flow rate adjustment unit 2 is a mass flow controller (Mass Flow Controller: MFC). The quality flow controller operates the flow control valve according to the electrical signal, and the flow rate of the carrier gas G1 is always adjusted to the set flow rate.
氧氣生成部3作為氧氣感測器發揮作用，並且作為氧氣供給泵發揮作用。氧氣生成部3具備筒狀體(鋯管)31、氧氣生成單元(cell)34、以及設置于氧氣生成單元34的外側的加熱器35。筒狀體31由固體電解質材料構成，並且與氣體流路F1連通。氧氣生成單元34由配置於筒狀體31的內表面的內側電極32和配置於筒狀體31的外表面的外側電極33構成。氧氣生成單元34在與電壓儀4連接的情況下作為濃淡電池型的氧氣感測器發揮作用。氧氣生成單元34在與恒流電源5連接的情況下作為氧氣泵發揮作用。 The oxygen generating unit 3 functions as an oxygen sensor and functions as an oxygen supply pump. The oxygen generating unit 3 includes a cylindrical body (zirconium tube) 31, an oxygen generating unit (cell) 34, and a heater 35 provided outside the oxygen generating unit 34. The cylindrical body 31 is composed of a solid electrolyte material and communicates with the gas flow path F1. The oxygen generating unit 34 is composed of an inner electrode 32 disposed on the inner surface of the cylindrical body 31 and an outer electrode 33 disposed on the outer surface of the cylindrical body 31. The oxygen generating unit 34 functions as a rich-light battery type oxygen sensor when connected to the voltage meter 4. The oxygen generating unit 34 functions as an oxygen pump when connected to the constant current source 5.
如圖3所示，顯示部7具備5位元以及3位元的七段顯示器7a和通過點亮而表示狀態的狀態表示LED7b。5位元的七段顯示器7a顯示生成氧氣濃度和裝置內的通道資料。3位元的七段顯示器7a顯示模式表示和通道號碼。狀態表示LED7b具備“POWER”、“READY”、“ALARM”的各LED。“POWER”表示向裝置供電的電源處於接通狀態。“READY”表示載氣的置換已完成。“ALARM”表示裝置處於異常狀態。 As shown in FIG. 3, the display unit 7 includes a 5-bit display and a 3-bit seven-segment display 7a, and a state indicating the state by lighting to indicate the LED 7b. The 5-bit seven-segment display 7a displays the generated oxygen concentration and channel data within the device. The 3-bit seven-segment display 7a displays the mode representation and channel number. The state indicator LED 7b includes LEDs of "POWER", "READY", and "ALARM". "POWER" means that the power supply to the device is on. "READY" indicates that the replacement of the carrier gas has been completed. "ALARM" indicates that the device is in an abnormal state.
操作部8具備4個預置按鈕(preset button)8a和1個M按鈕8b。預置按鈕8a在生成了預定的氧氣濃度時被操作。M按鈕8b在產生了人設(manual)的氧氣濃度時被操作。另外，操作部8具備在模式變更時被操作的“MODE”按鈕8c、進行自動校準動作時被操作的“AUTOCAL”按鈕8d、以及取消各操作時被操作的CLEAR按鈕8e。此外，操作部8具備在數值變更時被操作的上下左右鍵8f和在數值輸入的確定以及各動作的開始．停止時被操作的“ENTER”按鈕8g。操作部8相當於選擇部。 The operation unit 8 includes four preset buttons 8a and one M button 8b. The preset button 8a is operated when a predetermined oxygen concentration is generated. The M button 8b is operated when a human oxygen concentration is generated. Further, the operation unit 8 includes a "MODE" button 8c that is operated when the mode is changed, an "AUTOCAL" button 8d that is operated when the automatic calibration operation is performed, and a CLEAR button 8e that is operated when the respective operations are canceled. Further, the operation unit 8 includes upper and lower left and right keys 8f that are operated when the numerical value is changed, and determination of numerical input and start of each operation. The "ENTER" button 8g that is operated when stopped. The operation unit 8 corresponds to a selection unit.
接著，參照圖4，說明含氧氣體製備裝置20的暖機處理。 Next, the warm-up process of the oxygen-containing gas producing apparatus 20 will be described with reference to Fig. 4 .
如圖4所示，含氧氣體製備裝置20在電源開關被接通時開始暖機(步驟S11)。也就是說，控制部6使顯示部7的“POWER”的LED點亮。控制部6使設置於裝置內部的排氣風扇作動，使加熱器35工作，從而使氧氣生成單元34升溫。另外，控制部6使電磁閥P1、P2全開。此外，控制部6將流量調整部2的電源接通，並且為了氣體吹掃(gas purge)，而將流量調整部2全開10秒鐘。然後，流量調整部2開始進行流量調整動作。 As shown in FIG. 4, the oxygen-containing gas producing device 20 starts warming up when the power switch is turned on (step S11). In other words, the control unit 6 lights up the "POWER" LED of the display unit 7. The control unit 6 operates the exhaust fan provided inside the device to operate the heater 35 to raise the temperature of the oxygen generating unit 34. Further, the control unit 6 causes the electromagnetic valves P1 and P2 to be fully opened. Moreover, the control unit 6 turns on the power of the flow rate adjustment unit 2, and turns on the flow rate adjustment unit 2 for gas purge for 10 seconds. Then, the flow rate adjustment unit 2 starts the flow rate adjustment operation.
而且，控制部6使氧氣生成部3與電壓儀4電氣連接，開始單元電動勢的測定。與電壓儀4連接的氧氣生成部3作為氧感測器發揮作用。 控制部6開始與分析儀102進行通信。當氧氣生成單元34升溫至850℃以上時，控制部6開始單元電動勢的監視(步驟S12)。將在從含氧氣體製備裝置20的電源接通起至氧氣生成單元34升溫到預定溫度(例如850℃)為止的期間進行的處理設為暖機處理。預定溫度是氧氣生成單元34的單元電動勢穩定的溫度，只要是700℃以上即可。 Further, the control unit 6 electrically connects the oxygen generating unit 3 and the voltage meter 4 to start measurement of the unit electromotive force. The oxygen generating unit 3 connected to the voltage meter 4 functions as an oxygen sensor. The control unit 6 starts communication with the analyzer 102. When the temperature of the oxygen generating unit 34 is raised to 850 ° C or higher, the control unit 6 starts monitoring of the unit electromotive force (step S12). The process performed during the period from the power-on of the oxygen-containing gas producing apparatus 20 to the time when the oxygen generating unit 34 is heated to a predetermined temperature (for example, 850 ° C) is a warm-up process. The predetermined temperature is a temperature at which the cell electromotive force of the oxygen generating unit 34 is stable, and may be 700 ° C or more.
控制部6在從電源接通起經過了120分鐘之後，判斷單元電動勢是否為300mV以上(步驟S13)。也就是說，氧氣生成部3利用電壓儀4測定內側電極32與外側電極33之間的電壓，根據電壓的測定值，計算導入到氧氣生成部3的載氣G1的氧氣濃度。在此，在氧氣生成單元34為850℃的情況下，從電源接通起經過了120分鐘之後，判斷單元電動勢是否為300mV以上。替代于此，只要氧氣生成單元34為700℃以上，則也可以根據設定溫度，適當變更經過時間、單元電動勢的值。在判斷為單元電動勢小於300mV的情況下(步驟S13：否)，控制部6在顯示部7上顯示錯誤，結束處理流程(步驟S20)。而且，控制部6將顯示部7的“ALARM”的LED點亮。由此，含氧氣體製備裝置20通報氧氣生成單元34的異常．故障。 The control unit 6 determines whether or not the unit electromotive force is 300 mV or more after 120 minutes have elapsed since the power is turned on (step S13). In other words, the oxygen generating unit 3 measures the voltage between the inner electrode 32 and the outer electrode 33 by the voltage meter 4, and calculates the oxygen concentration of the carrier gas G1 introduced into the oxygen generating unit 3 based on the measured value of the voltage. Here, when the oxygen generating unit 34 is 850 ° C, it is determined whether or not the unit electromotive force is 300 mV or more after 120 minutes have elapsed since the power is turned on. Alternatively, as long as the oxygen generating unit 34 is 700 ° C or higher, the values of the elapsed time and the unit electromotive force may be appropriately changed according to the set temperature. When it is determined that the unit electromotive force is less than 300 mV (step S13: NO), the control unit 6 displays an error on the display unit 7, and ends the processing flow (step S20). Further, the control unit 6 lights up the LED of "ALARM" of the display unit 7. Thus, the oxygen-containing gas preparation device 20 notifies the abnormality of the oxygen generating unit 34. malfunction.
另外，在經過了120分鐘之後判斷為單元電動勢為300mV以上的情況下(步驟S13：是)，控制部6繼續進行單元電動勢的監視(步驟S14)。接著，控制部6判斷單元電動勢的10分鐘的變化量是否為2mV以下(步驟S15)。而且，在判斷為單元電動勢的10分鐘的變化量大於2mV的情況下(步驟S15：否)，控制部6轉移到步驟S14，繼續進行單元電動勢的監視。 In addition, when it is determined that the unit electromotive force is 300 mV or more after 120 minutes have elapsed (step S13: YES), the control unit 6 continues the monitoring of the unit electromotive force (step S14). Next, the control unit 6 determines whether or not the amount of change in the unit electromotive force for 10 minutes is 2 mV or less (step S15). When it is determined that the amount of change in the unit electromotive force for 10 minutes is greater than 2 mV (step S15: NO), the control unit 6 proceeds to step S14 and continues to monitor the unit electromotive force.
另外，在判斷為單元電動勢的10分鐘的變化量為2mV以下的情況下(步驟S15：是)，控制部6結束單元電動勢的監視(步驟S16)。也就 是說，在單元電動勢的10分鐘的變化量為2mV以下的情況下，控制部6判斷為氣體流路F1被載氣G1淨化。於是，控制部6檢測單元電動勢監視時的單元電動勢，由單元電動勢計算載氣G1中的氧氣濃度，進行登記(步驟S17)。載氣G1中的氧氣濃度相當於載氣氧濃度。 When it is determined that the amount of change in the unit electromotive force for 10 minutes is 2 mV or less (step S15: YES), the control unit 6 ends the monitoring of the unit electromotive force (step S16). Also In other words, when the amount of change in the unit electromotive force for 10 minutes is 2 mV or less, the control unit 6 determines that the gas flow path F1 is purified by the carrier gas G1. Then, the control unit 6 detects the cell electromotive force at the time of monitoring the cell electromotive force, calculates the oxygen concentration in the carrier gas G1 from the cell electromotive force, and registers it (step S17). The oxygen concentration in the carrier gas G1 is equivalent to the carrier gas oxygen concentration.
控制部6通過單元電動勢監視的結束和載氣氧濃度的登記而判斷載氣G1的置換已完成(步驟S18)。而且，控制部6將氧氣生成部3的連線物件從電壓儀4切換到恒流電源5(步驟S19)，從而使氧氣生成部3作為氧氣泵發揮作用。另外，控制部6將顯示部7的“READY”的LED點亮。 The control unit 6 determines that the replacement of the carrier gas G1 has been completed by the completion of the unit electromotive force monitoring and the registration of the carrier gas oxygen concentration (step S18). Then, the control unit 6 switches the wired object of the oxygen generating unit 3 from the voltage meter 4 to the constant current source 5 (step S19), thereby causing the oxygen generating unit 3 to function as an oxygen pump. Moreover, the control unit 6 lights up the LED of "READY" of the display unit 7.
接著，參照圖5來說明分析儀102的校準處理。 Next, the calibration process of the analyzer 102 will be described with reference to FIG. 5.
如圖5所示，顯示部7的“READY”的LED點亮時，含氧氣體製備裝置20能夠開始校準處理。最初，作業者按下操作部8的預置按鈕8a，進行校準濃度設定操作。由此，控制部6開始進行校準點的確認以及修正。在具有校準濃度設定操作的情況下，控制部6在顯示部7的七段顯示器7a上顯示表示有無校準設定的數值(步驟S21)。例如，在校準點為4點的情況下，控制部6將4位元的數值顯示到七段顯示器7a上。校準設定的有無用“1”或“0”表示，“1”表示有設定，“0”表示無設定。具體地講，表示為“1110”，從左側起，依照從最低濃度氧氣至高濃度氧氣的順序顯示。此時，校準點數可通過按下操作部8的上下左右鍵8f而變更。作業者在輸入了校準點數之後，按下操作部8的“ENTER”按鈕8g，確定校準點數。 As shown in FIG. 5, when the "READY" LED of the display unit 7 is turned on, the oxygen-containing gas preparation device 20 can start the calibration process. Initially, the operator presses the preset button 8a of the operation unit 8 to perform a calibration density setting operation. Thereby, the control unit 6 starts the confirmation and correction of the calibration point. When the calibration density setting operation is performed, the control unit 6 displays a numerical value indicating whether or not there is a calibration setting on the seven-segment display 7a of the display unit 7 (step S21). For example, in the case where the calibration point is 4 points, the control unit 6 displays the value of 4 bits on the seven-segment display 7a. The use of the calibration setting is indicated by "1" or "0", "1" means there is a setting, and "0" means no setting. Specifically, it is expressed as "1110", and is displayed from the left side in the order from the lowest concentration of oxygen to the high concentration of oxygen. At this time, the number of calibration points can be changed by pressing the up, down, left and right keys 8f of the operation unit 8. After inputting the number of calibration points, the operator presses the "ENTER" button 8g of the operation unit 8 to determine the number of calibration points.
接著，控制部6按照從最低濃度氧氣向高濃度氧氣的氧氣濃度增高的順序開始設定氧氣濃度的顯示。控制部6設定為N=1(步驟S22)，顯示第N次的設定氧氣濃度(步驟S23)。作業者確認被顯示的設定氧氣濃 度。如果需要進行設定氧氣濃度的再設定，作業者按下操作部8的上下左右鍵8f，變更數值。如果無需進行設定氧氣濃度的設定，則作業者按下操作部8的“ENTER”按鈕8g，在每個校準點進行設定結束操作。控制部6判斷是否進行了設定結束操作(步驟S24)。在判斷為沒有進行設定結束操作的情況下(步驟S24：否)，控制部6待機直至進行設定結束操作。 Next, the control unit 6 starts the display of the oxygen concentration in the order from the lowest concentration of oxygen to the oxygen concentration of the high-concentration oxygen. The control unit 6 sets N=1 (step S22), and displays the set oxygen concentration for the Nth time (step S23). The operator confirms that the set oxygen is displayed degree. When it is necessary to reset the set oxygen concentration, the operator presses the up, down, left and right keys 8f of the operation unit 8 to change the value. If it is not necessary to set the oxygen concentration, the operator presses the "ENTER" button 8g of the operation unit 8 to perform the setting end operation at each calibration point. The control unit 6 determines whether or not the setting end operation has been performed (step S24). When it is determined that the setting end operation has not been performed (step S24: NO), the control unit 6 stands by until the setting end operation is performed.
在判斷為進行了設定結束操作的情況下(步驟S24：是)，控制部6確認全部的設定氧氣濃度的設定已結束，所以判斷是否為N=4(步驟S25)。在判斷為不是N=4的情況下(步驟S25：否)，控制部6對N加1(N=N+1)(步驟S35)，轉移至步驟S23。 When it is determined that the setting end operation has been performed (step S24: YES), the control unit 6 confirms that the setting of all the set oxygen concentration has been completed, and therefore determines whether or not N=4 (step S25). When it is determined that it is not N=4 (step S25: No), the control unit 6 adds 1 to N (N=N+1) (step S35), and the process proceeds to step S23.
在判斷為N=4的情況下(步驟S25：是)，控制部6自動開始校準動作(步驟S26)。也就是說，針對最後的高氧氣濃度，按下“ENTER”按鈕8g，設定結束操作完成時，控制部6自動開始氣體感測器41的校準。 When it is determined that N=4 (step S25: YES), the control unit 6 automatically starts the calibration operation (step S26). That is, the "ENTER" button 8g is pressed for the last high oxygen concentration, and when the setting end operation is completed, the control unit 6 automatically starts the calibration of the gas sensor 41.
控制部6按照從最低濃度氧氣至高濃度氧氣的順序自動開始設定氧氣濃度的校準。具體地講，控制部6設定為N=1(步驟S27)，設定相當於第N次的設定氧氣濃度的泵浦電流(步驟S28)。也就是說，控制部6根據由監視電壓值計算的載氣氧濃度與設定氧氣濃度之差，設定泵浦電流。具體地講，控制部6設定從第N次的設定氧氣濃度減去了載氣氧濃度得到的值再乘以係數a得到的泵浦電流(pumping current)。係數是出廠時設定的調整值。 The control unit 6 automatically starts the calibration of the oxygen concentration in the order from the lowest concentration of oxygen to the high concentration of oxygen. Specifically, the control unit 6 sets N=1 (step S27), and sets a pump current corresponding to the Nth set oxygen concentration (step S28). That is, the control unit 6 sets the pump current based on the difference between the carrier gas oxygen concentration calculated from the monitored voltage value and the set oxygen concentration. Specifically, the control unit 6 sets a pumping current obtained by subtracting the value obtained by subtracting the carrier gas oxygen concentration from the Nth set oxygen concentration and multiplying the coefficient a. The coefficient is the adjustment value set at the factory.
泵浦電流(mA)=係數a×(設定氧氣濃度-載氣氧濃度) Pump current (mA) = coefficient a × (set oxygen concentration - carrier gas oxygen concentration)
控制部6對電壓進行PID控制，使得氧氣生成單元34具有第N次的設定氧氣濃度(步驟S29)。也就是說，控制部6對電壓進行PID控制， 以便設定為相當於第N次的設定氧氣濃度的泵浦電流。氧氣生成部3在其連線物件切換到恒流電源5之後作為氧氣泵發揮作用。載氣G1在通過流量調整部2被控制成恒定量(例如、500mL/min)。之後，從氧氣生成部3生成的氧氣混合到載氣G1。這樣，得到將載氣G1內的氧氣濃度精密地控制為預定濃度的含氧氣體G2。在這種情況下，含氧氣體G2的氧氣濃度根據由恒流電源5控制的電流值來決定。 The control unit 6 performs PID control on the voltage so that the oxygen generating unit 34 has the Nth set oxygen concentration (step S29). That is, the control unit 6 performs PID control on the voltage. In order to set the pump current corresponding to the Nth set oxygen concentration. The oxygen generating unit 3 functions as an oxygen pump after the connected object is switched to the constant current source 5. The carrier gas G1 is controlled to a constant amount (for example, 500 mL/min) by the flow rate adjusting unit 2. Thereafter, the oxygen generated from the oxygen generating unit 3 is mixed into the carrier gas G1. In this way, the oxygen-containing gas G2 that precisely controls the oxygen concentration in the carrier gas G1 to a predetermined concentration is obtained. In this case, the oxygen concentration of the oxygen-containing gas G2 is determined according to the current value controlled by the constant current source 5.
接著，控制部6確認要校準的氣體感測器41的電動勢值(步驟S30)。控制部6按照從最低氧氣濃度至高氧氣濃度的氧氣濃度降低的順序自動進行電動勢值的確認。例如，在氧氣濃度為1ppm的情況下，控制部6判斷30分鐘的變化量是否在0.4mV以下(步驟S31)。 Next, the control unit 6 confirms the electromotive force value of the gas sensor 41 to be calibrated (step S30). The control unit 6 automatically confirms the electromotive force value in the order of decreasing the oxygen concentration from the lowest oxygen concentration to the high oxygen concentration. For example, when the oxygen concentration is 1 ppm, the control unit 6 determines whether or not the amount of change in 30 minutes is 0.4 mV or less (step S31).
該情況下的預定時間以及變化量分別被設定為氣體感測器41穩定的值。在判斷為30分鐘的變化量大於0.4mV的情況下(步驟S31：否)，控制部6待機直至30分鐘的變化量達到0.4mV以下。 The predetermined time and the amount of change in this case are respectively set to values at which the gas sensor 41 is stable. When it is determined that the amount of change in 30 minutes is larger than 0.4 mV (step S31: No), the control unit 6 stands by until the amount of change in 30 minutes reaches 0.4 mV or less.
另外，在判斷為30分鐘的變化量為0.4mV以下的情況下(步驟S31：是)，控制部6結束要校準的氧感測器的電動勢值的確認。然後，控制部6對登記到分析儀102上的氣體感測器41的電動勢進行改寫之後，實施校準(步驟S32)。此改寫經由通信線100進行。在此，在氧氣生成單元34為850℃的情況下，判斷30分鐘的變化量是否為0.4mV以下。替代于此，只要氧氣生成單元34為700℃以上，則可以根據設定溫度，適當變更經過時間、單元電動勢的變化量。 When it is determined that the amount of change in 30 minutes is 0.4 mV or less (step S31: YES), the control unit 6 ends the confirmation of the electromotive force value of the oxygen sensor to be calibrated. Then, the control unit 6 rewrites the electromotive force of the gas sensor 41 registered in the analyzer 102, and then performs calibration (step S32). This rewriting is performed via the communication line 100. Here, when the oxygen generating unit 34 is 850 ° C, it is determined whether or not the amount of change in 30 minutes is 0.4 mV or less. Alternatively, as long as the oxygen generating unit 34 is 700 ° C or higher, the amount of change in the elapsed time and the unit electromotive force can be appropriately changed according to the set temperature.
之後，這樣實施步驟S31，變更為下述數值，同樣地進行判斷。例如，在氧氣濃度為9ppm的情況下，控制部6判斷20分鐘的變化量是否 為0.2mV以下。另外，在氧氣濃度為90ppm的情況下，控制部6判斷10分鐘的變化量是否為0.1mV以下。在氧氣濃度為900ppm的情況下，控制部6判斷10分鐘的變化量是否為0.05mV以下。 Thereafter, step S31 is carried out in this manner, and the following values are changed, and the determination is performed in the same manner. For example, when the oxygen concentration is 9 ppm, the control unit 6 determines whether the amount of change in 20 minutes is It is 0.2mV or less. In addition, when the oxygen concentration is 90 ppm, the controller 6 determines whether the amount of change in 10 minutes is 0.1 mV or less. When the oxygen concentration is 900 ppm, the controller 6 determines whether the amount of change in 10 minutes is 0.05 mV or less.
為了確認是否對全部的設定氧氣濃度結束了控制，控制部6判斷是否為N=4(步驟S33)。在判斷為不是N=4的情況下(步驟S33：否)，控制部6對N加1(N=N+1)(步驟S36)，轉移到步驟S28。接著，按照下面的高設定氧氣濃度的順序進行改寫之後，實施校準。 In order to confirm whether or not the control is completed for all the set oxygen concentrations, the control unit 6 determines whether or not N=4 (step S33). When it is judged that it is not N=4 (step S33: NO), the control unit 6 adds 1 to N (N=N+1) (step S36), and the process proceeds to step S28. Then, after the rewriting is performed in the order of the high set oxygen concentration below, the calibration is performed.
在判定為N=4的情況下(步驟S33：是)，控制部6將校準動作結束(步驟S34)，將改寫校準處理全部結束。此時，控制部6停止氧氣生成單元34的控制，將流量調整部2的電源斷開，使電磁閥P1、P2全閉。另外，控制部6結束與分析儀102之間的通信，在顯示部7上顯示校準結束。從顯示起經過了30分鐘之後，控制部6使裝置內部的排氣風扇停止工作。 When it is determined that N=4 (step S33: YES), the control unit 6 ends the calibration operation (step S34), and ends all of the rewrite calibration processing. At this time, the control unit 6 stops the control of the oxygen generating unit 34, turns off the power of the flow rate adjusting unit 2, and completely closes the electromagnetic valves P1 and P2. Further, the control unit 6 ends the communication with the analyzer 102, and displays the end of the calibration on the display unit 7. After 30 minutes have elapsed from the display, the control unit 6 stops the operation of the exhaust fan inside the apparatus.
以上，根據本實施方式，能夠發揮以下的效果。 As described above, according to the present embodiment, the following effects can be exhibited.
(1)含氧氣體製備裝置20包括流動有載氣G1的氣體流路F1、設置于氣體流路F1且生成氧氣的氧氣生成部3、相對于氧氣生成部3可切換地連接的電壓儀4和恒流電源5、以及對氧氣生成部3進行控制的控制部6。也就是說，含氧氣體製備裝置20不具備從載氣G1除去氧氣的機構。因此，含氧氣體製備裝置20被小型化以及輕量化、可便攜。由此，能夠在現場實施在發動機、鍋爐、工業用爐等設備機器上設置的氧感測器的校準。另外，由於沒有從載氣G1除去氧氣的機構，所以無需像以往那樣更換構成除氧機構的消耗品。此外，無需具有不同的多個氧氣濃度的校準氣體(標準氣體)。另外，能夠容易地製備校準氣體。 (1) The oxygen-containing gas producing apparatus 20 includes a gas flow path F1 through which the carrier gas G1 flows, an oxygen generating unit 3 which is provided in the gas flow path F1 and generates oxygen, and a voltage meter 4 which is switchably connected to the oxygen generating unit 3 And a constant current source 5 and a control unit 6 that controls the oxygen generating unit 3. That is, the oxygen-containing gas producing apparatus 20 does not have a mechanism for removing oxygen from the carrier gas G1. Therefore, the oxygen-containing gas preparation device 20 is miniaturized, lightweight, and portable. Thereby, it is possible to perform calibration of an oxygen sensor provided on an equipment such as an engine, a boiler, or an industrial furnace on site. Further, since there is no mechanism for removing oxygen from the carrier gas G1, it is not necessary to replace consumables constituting the oxygen scavenging mechanism as in the related art. In addition, calibration gases (standard gases) having different multiple oxygen concentrations are not required. In addition, the calibration gas can be easily prepared.
(2)向氣體流路F1導入載氣G1時，氧氣生成部3與電壓儀4連接，所以作為氧感測器發揮作用。由此，氧氣生成部3的單元電動勢被監視，由電壓儀4取得單元電動勢的監視完成時的監視電壓值。接著，根據由監視電壓值計算出的載氣氧濃度與設定氧氣濃度之差來設定泵浦電流。接著，通過泵浦電流而由氧氣生成部3生成的氧氣被混合到載氣G1，得到被控制為設定氧氣濃度的含氧氣體G2。也就是說，即使使用含有低濃度氧氣的載氣，通過由與設定氧氣濃度之間的濃度差設定的泵浦電流，能夠校準氧氣濃度。也就是說，由於能夠在沒有除去氧氣的機構的狀況下減少從氧氣生成部3生成的氧氣量，所以即使載氣G1含有低濃度的氧氣，也能夠將含氧氣體G2的氧氣濃度設為正確的值。 (2) When the carrier gas G1 is introduced into the gas flow path F1, the oxygen generating unit 3 is connected to the voltage meter 4, and thus functions as an oxygen sensor. Thereby, the cell electromotive force of the oxygen generating unit 3 is monitored, and the voltage value is obtained by the voltage meter 4 when the monitoring of the cell electromotive force is completed. Next, the pump current is set based on the difference between the carrier gas oxygen concentration calculated from the monitored voltage value and the set oxygen concentration. Next, the oxygen generated by the oxygen generating unit 3 by the pumping current is mixed into the carrier gas G1 to obtain the oxygen-containing gas G2 controlled to set the oxygen concentration. That is, even if a carrier gas containing a low concentration of oxygen is used, the oxygen concentration can be calibrated by the pump current set by the difference in concentration from the set oxygen concentration. In other words, since the amount of oxygen generated from the oxygen generating unit 3 can be reduced without the mechanism for removing oxygen, the oxygen concentration of the oxygen-containing gas G2 can be set correctly even if the carrier gas G1 contains a low concentration of oxygen. Value.
(3)控制部6按照從低濃度氧氣至高濃度氧氣的順序實施分析儀102的校準。因此，與作業者依次實施校準的情況相比，能夠以短時間實施分析儀102的校準。 (3) The control unit 6 performs calibration of the analyzer 102 in the order from low-concentration oxygen to high-concentration oxygen. Therefore, the calibration of the analyzer 102 can be performed in a short time as compared with the case where the operator sequentially performs calibration.
(4)含氧氣體製備裝置20具備顯示生成氧氣濃度、校準內容的顯示部7。根據此結構，作業者能夠通過顯示部7來確認生成氧氣濃度、校準內容。另外，能夠抑制由作業者進行誤設定。 (4) The oxygen-containing gas preparation device 20 is provided with a display unit 7 that displays the generated oxygen concentration and the calibration content. According to this configuration, the operator can confirm the generated oxygen concentration and the calibration content by the display unit 7. In addition, it is possible to suppress erroneous setting by the operator.
另外，也可以採用如下方式變更上述實施方式。 Further, the above embodiment may be modified as follows.
．在上述實施方式中，將含氧氣體製備裝置20用於對在發動機、鍋爐、工業用爐等的排氣管內的煙道K中流動的排氣G3中的O2氣體進行分析的分析儀102的校準。替代於此，也可以將含氧氣體製備裝置20用於圖6所示的分析儀103的校準。也就是說，如圖6所示，分析儀103具備作為樣品氣體G4的流路的氣體流路F2、抽吸樣品氣體G4的泵104、以及對樣品 氣體G4的流量進行調整的流量調整部105。另外，分析儀103在泵104與流量調整部105之間具備適配器106。在適配器106上固定有測定氧氣濃度的氣體感測器107。分析儀103具備對泵104以及流量調整部105等進行控制的控制部6。分析儀103經由通信線100與含氧氣體製備裝置20連接。即使在該情況下，也能夠得到與上述實施方式相同的作用效果。 . In the above embodiment, the oxygen-containing gas producing apparatus 20 is used for an analyzer for analyzing O 2 gas in the exhaust gas G3 flowing in the flue K in the exhaust pipe of an engine, a boiler, an industrial furnace, or the like. Calibration of 102. Instead of this, the oxygen-containing gas producing device 20 can also be used for the calibration of the analyzer 103 shown in FIG. That is, as shown in FIG. 6, the analyzer 103 includes a gas flow path F2 as a flow path of the sample gas G4, a pump 104 that sucks the sample gas G4, and a flow rate adjustment unit 105 that adjusts the flow rate of the sample gas G4. . Further, the analyzer 103 is provided with an adapter 106 between the pump 104 and the flow rate adjusting unit 105. A gas sensor 107 for measuring the oxygen concentration is fixed to the adapter 106. The analyzer 103 includes a control unit 6 that controls the pump 104, the flow rate adjustment unit 105, and the like. The analyzer 103 is connected to the oxygen-containing gas producing device 20 via a communication line 100. Even in this case, the same operational effects as those of the above embodiment can be obtained.
．在上述構成中，也可以在操作部8上設置作為選擇部的選擇按鈕。也就是說，通過在顯示部7的“READY”的LED點亮之後按下選擇按鈕，從而可以從預先設定的初始設定濃度值和在分析儀102中設定的分析設定濃度值中選擇用於校準的氧氣濃度值。在這種情況下，只要選擇分析儀102的分析設定濃度值，就能夠向含氧氣體製備裝置20取入分析儀102的分析設定濃度值，所以能夠省略設定變更的手續。 . In the above configuration, a selection button as a selection unit may be provided in the operation unit 8. That is, by pressing the selection button after the "READY" LED of the display portion 7 is turned on, it is possible to select for calibration from among the preset initial setting density value and the analysis setting density value set in the analyzer 102. Oxygen concentration value. In this case, by selecting the analysis set concentration value of the analyzer 102, the analysis set concentration value of the analyzer 102 can be taken in the oxygen-containing gas preparation device 20, so that the procedure for setting the change can be omitted.
．在上述構成中，也可以在顯示部7上設置手動設定變更按鈕。也就是說，在顯示部7的“READY”的LED點亮之後按下手動設定變更按鈕，從而將校準中使用的氧氣濃度值、預先設定的初始設定濃度值變更為任意的濃度值。在這種情況下，能夠在含氧氣體製備裝置中設定任意的濃度值。 . In the above configuration, the manual setting change button may be provided on the display unit 7. In other words, after the "READY" LED of the display unit 7 is turned on, the manual setting change button is pressed, and the oxygen concentration value used for calibration and the preset initial setting density value are changed to an arbitrary density value. In this case, an arbitrary concentration value can be set in the oxygen-containing gas preparation device.
．在上述構成中，也可以在氣體流路F1上設置測定含氧氣體的氧氣濃度的氧氣濃度測定部。具體地講，在含氧氣體製備裝置20的含氧氣體的排出側設置氧氣濃度確認用的氧氣濃度測定部，根據來自氧氣濃度測定部的信號來控制氧氣生成部3。在這種情況下，能夠製備更加正確地控制了氧氣濃度的含氧氣體。 . In the above configuration, the oxygen flow rate measuring unit that measures the oxygen concentration of the oxygen-containing gas may be provided in the gas flow path F1. Specifically, an oxygen concentration measuring unit for confirming the oxygen concentration is provided on the discharge side of the oxygen-containing gas in the oxygen-containing gas producing apparatus 20, and the oxygen generating unit 3 is controlled based on a signal from the oxygen concentration measuring unit. In this case, it is possible to prepare an oxygen-containing gas that more accurately controls the oxygen concentration.
．在上述實施方式中，作為載氣G1使用了氮氣，然而也可以 使用氬氣等惰性氣體。 . In the above embodiment, nitrogen gas is used as the carrier gas G1, but it is also possible An inert gas such as argon is used.
．在上述實施方式中，氧氣生成部3具備筒狀體31、分別設置於筒狀體31的內外表面的內側電極32以及外側電極33。替代於此，只要是能夠泵浦氧氣的構成，則也可以使用其他形狀的氧氣生成部。 . In the above embodiment, the oxygen generating unit 3 includes the tubular body 31 and the inner electrode 32 and the outer electrode 33 which are respectively provided on the inner and outer surfaces of the cylindrical body 31. Alternatively, as long as it is a structure capable of pumping oxygen, an oxygen generating portion of another shape may be used.
．在上述實施方式中，在氣體感測器41的內部設置了將氧離子傳導性固體電解質形成為板狀或棒狀的高溫作動型的氣體感測器元件。替代於此，氣體感測器元件可以是板狀或棒狀以外的形狀，也可以是高溫作動型以外的氣體感測器元件。 . In the above embodiment, a gas sensor element in which the oxygen ion conductive solid electrolyte is formed into a plate shape or a rod shape is provided inside the gas sensor 41. Alternatively, the gas sensor element may have a shape other than a plate shape or a rod shape, or may be a gas sensor element other than a high temperature operation type.
．在上述實施方式中，控制部6從最低濃度氧氣向高濃度氧氣的氧氣濃度變高的順序開始氧氣濃度的顯示，然而也可以從最高濃度氧氣向低濃度氧氣的順序開始顯示。 . In the above embodiment, the control unit 6 starts the display of the oxygen concentration from the lowest concentration of oxygen to the oxygen concentration of the high-concentration oxygen gas. However, the display may be started from the highest concentration of oxygen to the low-concentration oxygen.
．在上述實施方式中，控制部6從最低濃度氧氣向高濃度氧氣的氧氣濃度變高的順序自動進行校準，然而也可以從最高濃度氧氣向低濃度氧氣的氧氣濃度降低的順序自動進行校準。 . In the above embodiment, the control unit 6 automatically performs calibration from the lowest concentration of oxygen to the oxygen concentration of the high-concentration oxygen gas. However, the control unit 6 may automatically perform calibration from the highest concentration of oxygen to the oxygen concentration of the low-concentration oxygen.
2‧‧‧流量調整部 2‧‧‧Flow Adjustment Department
3‧‧‧氧氣生成部 3‧‧‧Oxygen Generation Department
4‧‧‧電壓儀 4‧‧‧Voltage meter
5‧‧‧恒流電源 5‧‧‧Constant current source
6‧‧‧控制部 6‧‧‧Control Department
7‧‧‧顯示部 7‧‧‧Display Department
8‧‧‧操作部 8‧‧‧Operation Department
100‧‧‧通信線 100‧‧‧Communication line
102‧‧‧分析儀 102‧‧‧Analyzer
20‧‧‧含氧製備裝置 20‧‧‧Oxygen preparation device
31‧‧‧筒狀體(鋯管) 31‧‧‧Cylinder (Zirconium Tube)
32‧‧‧內側電極 32‧‧‧Inside electrode
33‧‧‧外側電極 33‧‧‧Outer electrode
34‧‧‧氧氣生成單元 34‧‧‧Oxygen generating unit
35‧‧‧加熱器 35‧‧‧heater
P1,P2‧‧‧電磁閥 P1, P2‧‧‧ solenoid valve
G1‧‧‧載氣 G1‧‧‧ carrier gas
G2‧‧‧含氧氣體 G2‧‧‧Oxygen gas
F1‧‧‧氣體流路 F1‧‧‧ gas flow path
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| JP2013227203A JP5674898B1 (en) | 2013-10-31 | 2013-10-31 | Oxygen-containing gas production equipment |
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| TW201515991A true TW201515991A (en) | 2015-05-01 |
| TWI492897B TWI492897B (en) | 2015-07-21 |
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| KR (1) | KR101704730B1 (en) |
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| TWI808994B (en) * | 2017-09-19 | 2023-07-21 | 日商堀場Ｓｔｅｃ股份有限公司 | Concentration control apparatus and material gas supply system |
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| CN107291009A (en) * | 2017-06-27 | 2017-10-24 | 合肥康居人智能科技有限公司 | A kind of Domestic oxygen erator intelligence control system and its control method |
| KR102150163B1 (en) * | 2018-10-17 | 2020-08-31 | 손양순 | Gas guided type oxygen analyzer |
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| CN117418925B (en) * | 2023-12-19 | 2024-02-13 | 四川智感蔚蓝科技有限公司 | Pump oxygen control method, device, medium and equipment of nitrogen-oxygen sensor |
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