TW201512418A - Sputtering target for forming magnetic thin film - Google Patents

Abstract

This sintered-body sputtering target has, as main components thereof, an Fe-Pt alloy and a non-magnetic material, and is characterized by: including at least 50 but not more than 5000 ppm by mass of an element which forms an oxide having a lower standard free energy of formation of an oxide per 1 mol of oxygen than CO (carbon monoxide); and including, as the non-magnetic material, at least one from among carbon, a carbide, and a nitride. The present invention addresses the problem of providing a sputtering target which comprises an Fe-Pt alloy and a non-magnetic material, and with which the amount of particles generated during sputtering is significantly reduced.

Description

Sputter target for magnetic film formation

The present invention relates to a sintered body sputtering target for forming a magnetic thin film in a magnetic recording medium.

In the field of magnetic recording represented by a hard disk drive machine, a material of a magnetic film of a magnetic recording medium has been mainly made of a material having a ferromagnetic metal Co, Fe or Ni as a base. For example, a magnetic film of a hard disk using a horizontal magnetic recording method is a Co-Cr-based or Co-Cr-Pt-based ferromagnetic alloy containing Co as a main component.

Further, a magnetic material of a hard disk having a perpendicular magnetic recording method which has been put into practical use in recent years is often a composite material composed of a Co-Cr-Pt-based ferromagnetic alloy having a main component of Co and an oxide. Further, since the magnetic properties are high, the magnetic thin film is often produced by sputtering a sputtering target having the above-mentioned material as a component by a magnetron sputtering apparatus.

On the other hand, the recording density of hard disks has rapidly increased year by year, surpassing 1Tbit/in ² . If the recording density reaches 1 Tbit/in ² , the size of the recording bit will be less than 10 nm, and it is expected that superparamagnetization caused by thermal fluctuations in this case will become a problem. It is also expected that the material of the magnetic recording medium used today, for example, a material in which Pt is added to a Co-based alloy to increase crystal magnetic anisotropy is not sufficient. The reason for this is that magnetic particles which are stably magnetized with a size of 10 nm or less are required to have higher crystal magnetic anisotropy.

For the above reasons, an Fe-Pt alloy having an L1 ₀ structure has been attracting attention as a material for an ultrahigh-density recording medium. The Fe-Pt alloy having the L1 ₀ structure not only has high crystal magnetic anisotropy, but also has excellent corrosion resistance and oxidation resistance, and therefore is expected to be suitable as a material for a magnetic recording medium.

Further, when a Fe-Pt alloy having an L1 ₀ structure is used as a material for an ultrahigh-density recording medium, development of a technique for forming a Fe-Pt magnetic particle having a L1 ₀ structure in a magnetically isolated state is required. The direction is as high as possible and the direction is uniform and dispersed.

Therefore, a granular magnetic film having an isolated structure of Fe-Pt magnetic particles having an L1 ₀ structure is proposed as a non-magnetic material such as C (carbon) or oxide, and is proposed as a next generation hard using a thermally assisted magnetic recording method. The magnetic recording medium of the disc is used. The granular magnetic film has a structure in which a magnetic interaction between magnetic particles is blocked by surrounding a magnetic particle with a non-magnetic material.

A magnetic recording medium having a magnetic film having a granular structure and a related document related thereto include Patent Document 1, Patent Document 2, Patent Document 3, Patent Document 4, and Patent Document 5.

The granular magnetic thin film having the Fe-Pt magnetic particles having the L1 ₀ structure described above, and the magnetic thin film containing C as a non-magnetic material is attracting attention because of its particularly high magnetic properties. However, if a sputtering target composed of an Fe-Pt alloy and C is to be sputtered, there is a problem in that C is inadvertently detached during sputtering to generate a large amount of particles (attached to the substrate). dust). In order to solve this problem, it is necessary to provide a sputtering target in which the adhesion of the Fe-Pt alloy to C is improved. Further, although a magnetic thin film containing a carbide or a nitride instead of C is used, an excellent magnetic thin film can be obtained, but in this case, there is also a problem that a large amount of particles are generated at the time of sputtering.

Patent Document 1: Japanese Laid-Open Patent Publication No. 2000-306228

Patent Document 2: Japanese Laid-Open Patent Publication No. 2000-311329

Patent Document 3: Japanese Laid-Open Patent Publication No. 2008-59733

Patent Document 4: Japanese Laid-Open Patent Publication No. 2008-169464

Patent Document 5: Japanese Patent Laid-Open Publication No. 2004-152471

An object of the present invention is to provide a sintered body sputtering target comprising a Fe-Pt alloy and a non-magnetic material, which greatly reduces the amount of particles generated during sputtering.

In order to solve the above-mentioned problems, the inventors of the present invention have found that an element which forms an oxide of the following oxide is formed by adding a trace amount, that is, a standard free energy of formation of an oxide of 1 mol oxygen is lower than that of CO (carbon monoxide). The oxide is used to obtain a sputtering target in which the amount of particles generated during sputtering is greatly reduced.

Based on this insight, the present invention provides:

1) A sputtering target which is a sintered body sputtering target having a Fe-Pt alloy and a non-magnetic material as a main component, and is characterized in that it contains 50 mass ppm or more and 5000 mass ppm or less of an element which forms the following oxide. That is, an oxide having a free energy lower than CO (carbon monoxide) is formed for an oxide of 1 mol oxygen, and at least one of carbon, carbide, and nitride is contained as a nonmagnetic material.

2) The sputtering target according to the above 1), wherein the element which forms an oxide having a standard free energy of formation of 1 mol of oxygen lower than CO (carbon monoxide) is Al, Mg, Ti, Y, Zr .

(3) The sputtering target according to the above 1) or 2), which further comprises, besides Fe, Pt, a material selected from the group consisting of Ag, Au, B, Co, Cr, Cu, Ga, Ge, Ir, Mn, Mo, Nb Any one or more of Ni, Pd, Re, Rh, Ru, Si, Sn, Ta, W, V, and Zn is used as a metal component.

The sputtering target according to any one of the above 1 to 3, further comprising an oxide as a non-magnetic material.

According to the present invention, it is possible to provide a sputtering target which greatly reduces the amount of particles generated at the time of sputtering. Thereby, there is an excellent effect that the yield at the time of film formation can be remarkably improved.

The sputtering target of the present invention contains a Fe-Pt alloy and a non-magnetic material composed of any one or more of C (carbon), carbide, and nitride as a main component. These components are required for the magnetic recording medium, and the blending ratio is not particularly limited as long as it can maintain the characteristics as an effective magnetic recording medium.

As the composition of the Fe-Pt alloy, a ratio of Pt of 35% or more and 55% or less and a balance of Fe in terms of a molecular weight ratio can be usually used.

In the present invention, it is especially important to contain a trace amount of an element which forms an oxide having the following standard free energy: the standard free energy of formation is lower than the standard free energy of CO (carbon monoxide) to 1 mol oxygen oxide. .

These elements having a large oxygen affinity react with oxygen contained in the Fe powder or the Fe-based alloy powder during sintering to form a stable oxide. As a result, the gas components (CO, CO ₂ , NO, and NO ₂ ) generated by the reaction of carbon, carbide, and nitride with the above-described oxygen are reduced, and the adhesion between the Fe-Pt alloy and the non-magnetic material is improved. By the improvement of the adhesion, the generation of particles due to the detachment of the non-magnetic material can be suppressed.

Further, the oxide of the above-mentioned trace element contains standard free energy, as long as the temperature region at the time of sintering is lower than the standard generation free energy of CO (carbon monoxide). That is, the sintering temperature of the sputtering target (sintered body) of the present invention, since only up to about 1500 ° C, the formation of such oxide standards The free energy is sufficient if the temperature in the temperature region below about 1500 ° C is lower than the standard free energy of CO (carbon monoxide).

The content of the element having an oxide standard generation free energy lower than that of CO (carbon monoxide) is formed to be 50 mass ppm or more and 5000 mass ppm or less. The reason is that if the content is less than 50 ppm by mass, even if an oxide of such an element is formed during sintering, since a considerable amount of oxygen reacts with the non-magnetic material, the Fe-Pt alloy cannot be expected to be densely bonded to the non-magnetic material. On the other hand, if the content exceeds 5,000 ppm by mass, not only the desired magnetic properties may not be obtained, but also the oxides of these elements may grow during sintering to form coarse oxides ( For the reason of the particles).

In addition to the use of an element which forms an oxide having a free energy lower than CO (carbon monoxide) to form an oxide of 1 mol oxygen as a component required for a magnetic recording medium, the content of these elements must be suppressed to 5000 ppm by mass. the following. Further, in the present invention, these elements can be added in the form of metal powder, and the means for adding them is not particularly limited as long as it is contained in the target at the end.

In the present invention, a known material such as Al, Mg, Ti, Y, Zr, or Pr can be used as the element which forms an oxide having an oxide standard free energy lower than that of CO (carbon monoxide). Among them, the oxides of Al, Mg, Ti, Y, and Zr are very stable, so that it is difficult to be a source of particles, and is preferable. Further, two or more of these elements may be contained. In this case, the total content of these elements in the target must be 50 ppm by mass or more and 5,000 ppm by mass or less.

Further, the sputtering target of the present invention may further contain, besides Fe and Pt, be selected from the group consisting of Ag, Au, B, Co, Cr, Cu, Ga, Ge, Ir, Mn, Mo, Nb, Ni, Pd, Re, One or more elements of Rh, Ru, Si, Sn, Ta, W, V, and Zn are used as the metal component. These elements are mainly added to reduce the heat treatment temperature in order to visualize the L1 ₀ structure. The blending ratio is not particularly limited as long as it can maintain the characteristics as an effective magnetic recording medium.

Further, the sputtering target of the present invention may contain an oxide as a non-magnetic material in addition to the above-described carbon, carbide or nitride. Since the magnetic film obtained from such a sputtering target has a structure in which magnetic particles are magnetically insulated from each other in the same manner as carbon, carbide, or nitride, good magnetic properties can be expected.

The sputtering target of the present invention is produced by a powder sintering method, for example, by the following method.

First, Fe powder, Pt powder, Al powder, or the like is prepared as a metal powder. As the metal powder, not only a single element metal powder but also an alloy powder can be used. These metal powders should preferably be used in a particle size range of 1 to 10 μm. When the particle diameter is 1 to 10 μm, it can be more uniformly mixed, and segregation and coarse crystallization can be prevented. When the particle diameter of the metal powder is larger than 10 μm, sometimes the non-magnetic material may not be uniformly dispersed, and when it is less than 1 μm, the following problem sometimes occurs: the target is caused by the oxidation of the metal powder. Composition is not the desired composition. In addition, the particle size range is only a preferred range, and it should be understood that the scope of the invention is not negated.

Further, C powder, carbide powder, nitride powder or the like is prepared as a nonmagnetic material powder. The non-magnetic material powder should preferably be used in a particle size range of 1 to 30 μm. When the particle diameter is 1 to 30 μm, the non-magnetic material powders are less likely to aggregate with each other when mixed with the metal powder described above, and can be uniformly dispersed. As the C powder in the non-magnetic material, those having a crystal structure such as graphite and a nanotube and an amorphous one represented by carbon black may be used.

Next, the raw material powder is weighed into a desired composition, and mixed and pulverized by a known method such as a ball mill. At this time, it is preferred to incorporate an inert gas into the pulverization container to suppress oxidation of the raw material powder as much as possible.

The mixed powder obtained in the above manner is molded and sintered by a hot press method in a vacuum atmosphere or an inert gas atmosphere. Further, in addition to the above-described hot pressing, various pressure sintering methods such as a plasma discharge sintering method can also be used. In particular, the hot hydrostatic sintering method is effective for increasing the density of the sintered body. The holding temperature at the time of sintering depends on the constituent components of the target, but most of the cases are in the temperature range of 800 ° C to 1500 ° C.

Then, the sintered body obtained is processed into a desired shape by a lathe, whereby the sputtering target of the present invention can be produced.

The sputtering target of the present invention can be produced by the above method. The sputtering target produced in this manner has an excellent effect of reducing the amount of particles generated at the time of sputtering and improving the yield at the time of film formation.

Example

Hereinafter, it demonstrates based on an Example and a comparative example. In addition, this embodiment is merely an example and is not limited by this illustration. That is, the present invention is limited only by the scope of the patent application, and includes various modifications other than the embodiments included in the invention.

(Example 1)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, and C powder (graphite powder) having an average particle diameter of 10 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 2,600 g.

Weighing composition (molecular weight ratio): 30Fe-30Pt-40C

Further, in Example 1, 2.6 g of Al powder having an average particle diameter of 10 μm was weighed (an amount equivalent to 0.1% of the above weight).

Then, we put all the powder weighed together with the SUS grinding ball of the pulverizing medium. A 10 liter ball mill pot was mixed and pulverized by rotating for 16 hours in an Ar environment. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1500 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut piece was used to carry out the analysis of Al. As a result of analysis using an ICP-AES apparatus, the content of Al was 1030 ppm by mass. Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target.

This target was mounted on a magnetron sputtering apparatus (CON-10 AN-C-3010 sputtering system) for sputtering. The sputtering conditions were 1 kW of input electric power and 1.7 Pa of Ar gas pressure, and after pre-sputtering of 2 kWhr, film formation was performed on a 4 吋 diameter ruthenium substrate for 20 seconds. The number of particles attached to the substrate is then measured with a particle counter. The number of particles at this time was 321 .

(Comparative Example 1)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, and C powder (graphite powder) having an average particle diameter of 10 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 2,600 g.

Weighing composition (molecular weight ratio): 30Fe-30Pt-40C

Further, in Comparative Example 1, no Al powder was added.

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. Make The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1500 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut piece was used to carry out the analysis of Al. As a result of analysis using an ICP-AES apparatus, the content of Al was less than 50 ppm by mass (lower detection limit). Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 871, which was larger than that of Example 1.

(Comparative Example 2)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, and C powder (graphite powder) having an average particle diameter of 10 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 2,600 g.

Weighing composition (molecular weight ratio): 30Fe-30Pt-40C

Further, in Comparative Example 2, 26.0 g of an Al powder having an average particle diameter of 10 μm was weighed (an amount equivalent to 1% of the above weight).

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1500 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut piece was used to carry out the analysis of Al. As a result of analysis using an ICP-AES apparatus, the content of Al was 9,960 mass ppm. Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 538, which was larger than that of Example 1. Since the amount of Al added is large, coarse oxides are formed and become a source of particles.

(Example 2)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, and C powder (graphite powder) having an average particle diameter of 10 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 3000 g.

Weighing composition (molecular weight ratio): 40Fe-40Pt-20C

Further, in Example 2, 1.5 g of Fe ₃ Zr powder having an average particle diameter of 100 μm was weighed (an amount equivalent to 0.05% of the above weight).

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1400 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut piece was used to carry out the analysis of Zr. As a result of analysis using an ICP-AES apparatus, the content of Zr was 170 ppm by mass. Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 166.

(Comparative Example 3)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, and C powder (graphite powder) having an average particle diameter of 10 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 3000 g.

Weighing composition (molecular weight ratio): 40Fe-40Pt-20C

Further, in Comparative Example 3, Fe ₃ Zr powder was not added.

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1400 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut piece was used to carry out the analysis of Zr. As a result of analysis using an ICP-AES apparatus, the content of Zr was less than 50 ppm by mass (the lower limit of detection). Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 410, which was increased compared with Example 2.

(Comparative Example 4)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, and C powder (graphite powder) having an average particle diameter of 10 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 3000 g.

Weighing composition (molecular weight ratio): 40Fe-40Pt-20C

Further, in Comparative Example 4, 60.0 g of Fe ₃ Zr powder having an average particle diameter of 100 μm was weighed (the amount corresponding to 2% of the above weight).

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1400 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut piece was used to carry out the analysis of Zr. As a result of analysis using an ICP-AES apparatus, the content of Zr was 7,100 ppm by mass. Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 489, which was larger than that of Example 2. This is because the amount of Zr added is large, so that coarse oxides are formed and become the source of the particles.

(Example 3)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, and C powder (graphite powder) having an average particle diameter of 10 μm were prepared as raw material powders. Then weigh the total weight by the following composition ratio 3000g.

Weighing composition (molecular weight ratio): 37.5Fe-37.5Pt-25C

Further, in Example 3, 3.0 g of Ti powder having an average particle diameter of 40 μm was weighed (an amount equivalent to 0.1% of the above weight).

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1400 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut piece was used to carry out analysis of Ti. As a result of analysis using an ICP-AES apparatus, the content of Ti was 1010 ppm by mass. Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 281.

(Comparative Example 5)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, and C powder (graphite powder) having an average particle diameter of 10 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 3000 g.

Weighing composition (molecular weight ratio): 37.5Fe-37.5Pt-25C

Further, in Comparative Example 5, Ti powder was not added.

Then, we put all the powder weighed together with the SUS grinding ball of the pulverizing medium. A 10 liter ball mill was mixed and pulverized in an Ar environment for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1400 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut piece was used to carry out analysis of Ti. As a result of analysis using an ICP-AES apparatus, the content of Ti was less than 50 mass ppm (the lower limit of detection). Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 491, which was increased compared with Example 3.

(Comparative Example 6)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, and C powder (graphite powder) having an average particle diameter of 10 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 3000 g.

Weighing composition (molecular weight ratio): 37.5Fe-37.5Pt-25C

Further, in Comparative Example 6, 18.0 g of Ti powder having an average particle diameter of 40 μm (corresponding to an amount equivalent to 0.6% of the above weight) was weighed.

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions for hot pressing are vacuum environment, heating rate 300 ° C / hour, holding temperature 1400 ° C, holding time For 2 hours, pressurization was carried out at 30 MPa from the start of the temperature rise to the end of the hold. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut piece was used to carry out analysis of Ti. As a result of analysis using an ICP-AES apparatus, the content of Ti was 5,960 ppm by mass. Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 454, which was larger than that of Example 3. This is because the amount of Ti added is large, so that a large oxide is formed and the source of the particles is obtained.

(Example 4)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, and C powder (graphite powder) having an average particle diameter of 10 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 2,800 g.

Weighing composition (molecular weight ratio): 35Fe-35Pt-30C

Further, in Example 4, 2.8 g of Fe ₁₇ Pr ₂ powder having an average particle diameter of 50 μm was weighed (an amount equivalent to 0.1% of the above weight).

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1500 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut piece was used to carry out analysis of Pr. As a result of analysis using an ICP-AES apparatus, the content of Pr was 230 ppm by mass. Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 378.

(Comparative Example 7)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, and C powder (graphite powder) having an average particle diameter of 10 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 2,800 g.

Weighing composition (molecular weight ratio): 35Fe-35Pt-30C

Further, in Comparative Example 7, Fe ₁₇ Pr ₂ powder was not added.

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1500 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut piece was used to carry out analysis of Pr. As a result of analysis using an ICP-AES apparatus, the content of Pr was less than 50 ppm by mass (the lower limit of detection). Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. Particles at this time The number is 566, which is larger than that of the fourth embodiment.

(Comparative Example 8)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, and C powder (graphite powder) having an average particle diameter of 10 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 2,800 g.

Weighing composition (molecular weight ratio): 35Fe-35Pt-30C

Further, in Comparative Example 8, 112 g of Fe ₁₇ Pr ₂ powder having an average particle diameter of 50 μm was weighed (the amount corresponding to 4.0% of the above weight).

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1500 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut piece was used to carry out analysis of Pr. As a result of analysis using an ICP-AES apparatus, the content of Pr was 9870 mass ppm. Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 411, which was increased compared with Example 4. This is because the amount of Pr added is large, so that a large oxide is formed and the source of the particles is obtained.

(Example 5)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, and C powder (graphite powder) having an average particle diameter of 10 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 2,700 g.

Weighing composition (molecular weight ratio): 32.5Fe-32.5Pt-35C

Further, in Example 5, 2.7 g of Mg powder having an average particle diameter of 100 μm (in an amount corresponding to 0.1% by weight) and 5.4 g of Fe ₃ Zr powder having an average particle diameter of 40 μm were respectively weighed (corresponding to 0.2 of the above weight). % amount).

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1500 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut pieces were used to carry out analysis of Mg and Zr. As a result of analysis using a glow discharge mass spectrometer, the content of Mg was 1000 ppm by mass, and the content of Zr was 700 ppm by mass. Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 275.

(Comparative Example 9)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, and C powder (graphite powder) having an average particle diameter of 10 μm were prepared as raw material powders. Then weigh the total weight by the following composition ratio 2700g.

Weighing composition (molecular weight ratio): 32.5Fe-32.5Pt-35C

Further, in Comparative Example 9, neither Mg powder nor Fe ₃ Zr powder was added.

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1500 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut pieces were used to carry out analysis of Mg and Zr. As a result of analysis using a glow discharge mass spectrometer, Mg was 8 mass ppm and Zr was 17 mass ppm. Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 720, which was increased compared with Example 5.

(Comparative Example 10)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, and C powder (graphite powder) having an average particle diameter of 10 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 2,700 g.

Weighing composition (molecular weight ratio): 32.5Fe-32.5Pt-35C

Further, in Comparative Example 10, 27 g of Mg powder having an average particle diameter of 100 μm (in an amount corresponding to 1.0% of the above weight) and 10.3 g of Fe ₃ Zr powder having an average particle diameter of 40 μm (corresponding to 0.4% of the above-mentioned weight) were weighed. Quantity).

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1500 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut pieces were used to carry out analysis of Mg and Zr. As a result of analysis using a glow discharge mass spectrometer, the content of Mg was 99,000 ppm by mass, and the content of Zr was 1,400 ppm by mass. Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 988, which was larger than that of Example 5. Since the amount of Mg and Zr added is large, coarse oxides are formed and become a source of particles.

(Example 6)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, and C powder (graphite powder) having an average particle diameter of 10 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 2,400 g.

Weighing composition (molecular weight ratio): 27.5Fe-27.5Pt-45C

Further, in Example 6, 4.8 g of Al powder having an average particle diameter of 10 μm (corresponding to 0.2% by weight) and 4.8 g of Ti powder having an average particle diameter of 40 μm (corresponding to 0.2% of the above weight) were weighed. The amount of Fe ₃ Zr powder having an average particle diameter of 100 μm was 4.8 g (corresponding to 0.2% by weight).

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1500 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut pieces were used to carry out analysis of Al, Ti, and Zr. As a result of analysis using a glow discharge mass spectrometer, the content of Al was 2000 ppm by mass, the content of Ti was 1900 ppm by mass, and the content of Zr was 700 ppm by mass. Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 385.

(Comparative Example 11)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, and C powder (graphite powder) having an average particle diameter of 10 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 2,400 g.

Weighing composition (molecular weight ratio): 27.5Fe-27.5Pt-45C

Further, in Comparative Example 11, Al powder, Ti powder, and Fe ₃ Zr powder were not added.

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. Make The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1500 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut pieces were used to carry out analysis of Al, Ti, and Zr. As a result of analysis using a glow discharge mass spectrometer, Al was 0.5 mass ppm, Ti was 0.4 mass ppm, and Zr was 13 mass ppm. Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 804, which was larger than that of Example 6.

(Comparative Example 12)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, and C powder (graphite powder) having an average particle diameter of 10 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 2,400 g.

Weighing composition (molecular weight ratio): 27.5Fe-27.5Pt-45C

Further, in Comparative Example 12, 7.2 g of Al powder having an average particle diameter of 10 μm (corresponding to an amount corresponding to 0.3% by weight) and 7.2 g of Ti powder having an average particle diameter of 40 μm (corresponding to 0.3% of the above-mentioned weight) were weighed. The amount of Fe ₃ Zr powder having an average particle diameter of 100 μm was 9.6 g (an amount equivalent to 0.4% of the above weight).

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions for hot pressing are vacuum environment, heating rate 300 ° C / hour, holding temperature 1500 ° C, holding time For 2 hours, pressurization was carried out at 30 MPa from the start of the temperature rise to the end of the hold. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut pieces were used to carry out analysis of Al, Ti, and Zr. As a result of analysis using a glow discharge mass spectrometer, the content of Al was 3,100 ppm by mass, the content of Ti was 3,000 ppm by mass, and the content of Zr was 1,400 ppm by mass. Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 485, which was increased compared with Example 6. Since the addition amount of Al, Ti, and Zr is large, a coarse oxide is formed and the source of the particles is obtained.

(Example 8)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, and TaC powder having an average particle diameter of 5 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 3,200 g.

Weighing composition (molecular weight ratio): 46.20Fe-30.80Pt-23TaC

Further, in Example 8, 6.4 g of Mg powder having an average particle diameter of 100 μm (an amount equivalent to 0.2% of the above weight) was weighed.

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1200 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut piece was used to carry out the analysis of Mg. As a result of analysis using an ICP-AES apparatus, the content of Mg was 2070 mass ppm. Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 138.

(Comparative Example 15)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, and TaC powder having an average particle diameter of 5 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 3,200 g.

Weighing composition (molecular weight ratio): 46.20Fe-30.80Pt-23TaC

Further, in Comparative Example 15, no Mg powder was added.

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1200 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut piece was used to carry out the analysis of Mg. As a result of analysis using an ICP-AES apparatus, the content of Mg was less than 50 mass ppm (the lower limit of detection). Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, it was mounted on a magnetron sputtering apparatus, sputtered under the same conditions as in Example 1, and then attached to the substrate by a particle counter measurement. The number of particles. The number of particles at this time was 408, which was larger than that of Example 8.

(Comparative Example 16)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, and TaC powder having an average particle diameter of 5 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 3,200 g.

Weighing composition (molecular weight ratio): 46.20Fe-30.80Pt-23TaC

Further, in Comparative Example 16, 32.0 g of Mg powder having an average particle diameter of 100 μm was weighed (an amount equivalent to 1% of the above weight).

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1200 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut piece was used to carry out the analysis of Mg. As a result of analysis using an ICP-AES apparatus, the content of Mg was 10100 ppm by mass. Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 227, which was larger than that of Example 8. This is because the amount of Mg added is large, so that a large oxide is formed and becomes a source of particles.

(Example 9)

Prepare Fe powder with an average particle diameter of 3 μm, Pt powder with an average particle diameter of 3 μm, and an average particle diameter of 10 μ. The BN powder of m is used as a raw material powder. Then, the following composition ratio was weighed to a total weight of 2,400 g.

Weighing composition (molecular weight ratio): 35Fe-35Pt-30BN

Further, in Example 9, 0.48 g of Ti powder having an average particle diameter of 40 μm was weighed (corresponding to 0.02% of the above weight).

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1200 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut piece was used to carry out analysis of Ti. As a result of analysis using an ICP-AES apparatus, the content of Ti was 190 ppm by mass. Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 178.

(Comparative Example 17)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, and BN powder having an average particle diameter of 10 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 2,400 g.

Weighing composition (molecular weight ratio): 35Fe-35Pt-30BN

Further, in Comparative Example 17, no Ti powder was added.

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. then, The powder taken out from the pot was filled in a carbon mold, and molded and sintered using a hot press device. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1200 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the amount of Ti was analyzed using the cut piece. As a result of analysis using an ICP-AES apparatus, the content of Ti was less than 50 mass ppm (the lower limit of detection). Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, it was mounted on a magnetron sputtering apparatus, sputtered under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured by a particle counter. The number of particles at this time was 370, which was larger than that of Example 9.

(Comparative Example 18)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, and BN powder having an average particle diameter of 10 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 2,400 g.

Weighing composition (molecular weight ratio): 35Fe-35Pt-30BN

Further, in Comparative Example 18, 24.0 g of Ti powder (having an amount equivalent to 1% of the above weight) having an average particle diameter of 40 μm was weighed.

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1200 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut piece was used to carry out analysis of Ti. As a result of analysis using an ICP-AES apparatus, the content of Ti was 10,000 ppm by mass. Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 328, which was larger than that of Example 9.

This is because the amount of Ti added is large, so that a large oxide is formed and the source of the particles is obtained.

(Embodiment 10)

Fe-Pt powder having an average particle diameter of 10 μm (composition of 50Fe to 50 Pt in terms of molecular weight ratio), C powder (graphite powder) having an average particle diameter of 10 μm, and SiO ₂ powder having an average particle diameter of 1 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 2,500 g.

Weighing composition (molecular weight ratio): 35Fe-35Pt-25C-5SiO ₂

Further, in Example 10, 2.5 g of Fe ₃ Y powder having an average particle diameter of 50 μm (corresponding to an amount equivalent to 0.1% of the above weight) was weighed.

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1150 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut piece was used to carry out the analysis of Y. As a result of analysis using an ICP-AES apparatus, the content of Y was 350 mass ppm. Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 113.

(Comparative Example 19)

Fe-Pt powder having an average particle diameter of 10 μm (composition of 50Fe to 50 Pt in terms of molecular weight ratio), C powder (graphite powder) having an average particle diameter of 10 μm, and SiO ₂ powder having an average particle diameter of 1 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 2,500 g.

Weighing composition (molecular weight ratio): 35Fe-35Pt-25C-5SiO ₂

Further, in Comparative Example 19, Fe ₃ Y powder was not added.

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1150 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut amount was used to carry out analysis of the amount of Y. As a result of analysis using an ICP-AES apparatus, the content of Y was less than 50 mass ppm (the lower limit of detection). Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, it was mounted on a magnetron sputtering apparatus, sputtered under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured by a particle counter. The number of particles at this time was 221, which was larger than that of Example 10.

(Comparative Example 20)

Fe-Pt powder having an average particle diameter of 10 μm (composition of 50Fe to 50 Pt in terms of molecular weight ratio), C powder (graphite powder) having an average particle diameter of 10 μm, and SiO ₂ powder having an average particle diameter of 1 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 2,500 g.

Weighing composition (molecular weight ratio): 35Fe-35Pt-25C-5SiO ₂

Further, in Comparative Example 20, 50 g of Fe ₃ Y powder having an average particle diameter of 50 μm (corresponding to an amount equivalent to 2% of the above weight) was weighed.

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1150 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut piece was used to carry out the analysis of Y. As a result of analysis using an ICP-AES apparatus, the content of Y was 6910 ppm by mass. Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 351, which was larger than that of Example 10. This is because the amount of Y added is large, so that coarse oxides are formed and become a source of particles.

(Example 11)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, C powder having an average particle diameter of 10 μm, and Si ₃ N ₄ powder having an average particle diameter of 1 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 2,600 g.

Weighing composition (molecular weight ratio): 38Fe-38Pt-20C-4Si ₃ N ₄

Further, in Example 11, 1.3 g of Al powder having an average particle diameter of 10 μm (corresponding to 0.05% by weight) and 1.3 g of Ti powder having an average particle diameter of 40 μm (corresponding to 0.05% of the above weight) were respectively weighed. the amount).

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a nitrogen atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1100 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut pieces were used to carry out analysis of Al and Ti. As a result of analysis using a glow discharge mass spectrometer, the content of Al was 520 ppm by mass, and the content of Ti was 510 ppm by mass. Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 169.

(Comparative Example 21)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, C powder having an average particle diameter of 10 μm, and Si ₃ N ₄ powder having an average particle diameter of 1 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 2,600 g.

Weighing composition (molecular weight ratio): 38Fe-38Pt-20C-4Si ₃ N ₄

Further, in Comparative Example 21, neither Al powder nor Ti powder was added.

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a nitrogen atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1100 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut pieces were used to carry out analysis of Al and Ti. As a result of analysis using a glow discharge mass spectrometer, the content of Al was 0.4 mass ppm, and the content of Ti was 0.3 mass ppm. Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 401, which was larger than that of Example 11.

(Comparative Example 22)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, C powder having an average particle diameter of 10 μm, and Si ₃ N ₄ powder having an average particle diameter of 1 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 2,600 g.

Weighing composition (molecular weight ratio): 38Fe-38Pt-20C-4Si ₃ N ₄

Further, in Comparative Example 22, 26.0 g of Al powder having an average particle diameter of 10 μm (in an amount corresponding to 1% by weight) and 26.0 g of Ti powder having an average particle diameter of 40 μm (corresponding to 1% of the above-mentioned weight) were respectively weighed. the amount).

Then, we put all the powder weighed together with the SUS grinding ball of the pulverizing medium. A 10 liter ball mill was mixed and pulverized in an Ar environment for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a nitrogen atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1100 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut pieces were used to carry out analysis of Al and Ti. As a result of analysis using a glow discharge mass spectrometer, the content of Al was 10,000 ppm by mass, and the content of Ti was 10,000 ppm by mass. Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 456, which was larger than that of Example 11. Since the amount of addition of Al and Ti is large, a coarse oxide is formed and the source of the particles is obtained.

(Embodiment 12)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, Cu powder having an average particle diameter of 5 μm, and C powder (graphite powder) having an average particle diameter of 10 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 2,500 g.

Weighing composition (molecular weight ratio): 27Fe-27Pt-6Cu-40C

Further, in Example 12, 0.5 g of Fe ₃ Zr powder having an average particle diameter of 200 μm (corresponding to an amount equivalent to 0.02% of the above weight) was weighed.

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. Make The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1200 ° C, and a holding time of 2 hours, and pressurization was performed at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut piece was used to carry out the analysis of Zr. As a result of analysis using an ICP-AES apparatus, the content of Zr was 70 ppm by mass. Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time is 255.

(Comparative Example 23)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, Cu powder having an average particle diameter of 5 μm, and C powder (graphite powder) having an average particle diameter of 10 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 2,500 g.

Weighing composition (molecular weight ratio): 27Fe-27Pt-6Cu-40C

Further, in Comparative Example 23, Fe ₃ Zr powder was not added.

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1200 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut piece was used to carry out an analysis of the amount of Zr. As a result of analysis using an ICP-AES device, the Zr content is less than 50 mass. Ppm (lower limit of detection). Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 438, which was larger than that of Example 12.

(Comparative Example 24)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, Cu powder having an average particle diameter of 5 μm, and C powder (graphite powder) having an average particle diameter of 10 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 2,500 g.

Weighing composition (molecular weight ratio): 27Fe-27Pt-6Cu-40C

Further, in Comparative Example 24, 50.0 g of Fe ₃ Zr powder having an average particle diameter of 200 μm (corresponding to an amount equivalent to 2% of the above weight) was weighed.

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1200 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut piece was used to carry out the analysis of Zr. As a result of analysis using an ICP-AES apparatus, the content of Zr was 7210 ppm by mass. Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time is 464 Increased compared to Example 12. This is because the amount of Zr added is large, so that coarse oxides are formed and become the source of the particles.

(Example 13)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, BN powder having an average particle diameter of 10 μm, and Cr ₂ O ₃ powder having an average particle diameter of 2 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 2,500 g.

Weighing composition (molecular weight ratio): 38Fe-38Pt-20BN-4Cr ₂ O ₃

Further, in Example 13, 12.5 g of Mg powder having an average particle diameter of 100 μm was weighed (an amount equivalent to 0.5% of the above weight).

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1150 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut piece was used to carry out the analysis of Mg. As a result of analysis using an ICP-AES apparatus, the content of Mg was 4,890 ppm by mass. Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 129.

(Comparative Example 25)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, BN powder having an average particle diameter of 10 μm, and Cr ₂ O ₃ powder having an average particle diameter of 2 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 2,500 g.

Weighing composition (molecular weight ratio): 38Fe-38Pt-20BN-4Cr ₂ O ₃

Further, in Comparative Example 25, no Mg powder was added.

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1150 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut amount was used to carry out analysis of the amount of Mg. As a result of analysis using an ICP-AES apparatus, the content of Mg was less than 50 mass ppm (the lower limit of detection). Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 546, which was larger than that of Example 13.

(Comparative Example 26)

Fe powder having an average particle diameter of 3 μm, Pt powder having an average particle diameter of 3 μm, BN powder having an average particle diameter of 10 μm, and Cr ₂ O ₃ powder having an average particle diameter of 2 μm were prepared as raw material powders. Then, the following composition ratio was weighed to a total weight of 2,500 g.

Weighing composition (molecular weight ratio): 38Fe-38Pt-20BN-4Cr ₂ O ₃

Further, in Comparative Example 26, 15.0 g of Mg powder having an average particle diameter of 100 μm (corresponding to an amount equivalent to 0.6% of the above weight) was weighed.

Next, the entire amount of the powder was placed in a ball mill having a capacity of 10 liters together with a SUS grinding ball of a pulverizing medium, and the mixture was rotated and pulverized in an Ar atmosphere for 16 hours. Then, the powder taken out from the pot was filled in a carbon mold, and it was molded and sintered using a hot press apparatus. The conditions of the hot pressing were a vacuum atmosphere, a temperature increase rate of 300 ° C / hour, a holding temperature of 1150 ° C, and a holding time of 2 hours, and the pressure was applied at 30 MPa from the start of the temperature rise to the end of the holding. After the end of the stay, it is naturally cooled directly in the chamber.

Next, a part of the produced sintered body was cut out, and the cut piece was used to carry out the analysis of Mg. As a result of analysis using an ICP-AES apparatus, the content of Mg was 5,990 ppm by mass. Further, using a lathe, the sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm to obtain a disk-shaped target. Using this target, sputtering was carried out under the same conditions as in Example 1, and then the number of particles attached to the substrate was measured with a particle counter. The number of particles at this time was 177, which was larger than that of Example 13. This is because the amount of Mg added is large, so that a large oxide is formed and becomes a source of particles.

As described above, in any of the embodiments, by adding a trace amount of the following element, that is, an element having a free energy lower than CO (carbon monoxide) is generated for the oxide standard of 1 mol oxygen, which can reduce the occurrence of sputtering. The amount of particles increases the yield when filming. Therefore, it is understood that the inclusion of an element which forms an oxide having an oxide standard generation free energy lower than that of CO (carbon monoxide) plays a very important role in suppressing generation of particles.

[Table 1]

Industrial utilization

The sputtering target of the present invention has an excellent effect of reducing the amount of particles generated at the time of sputtering and improving the yield at the time of film formation. Therefore, it is suitable as a sputtering target for forming a granular structure type magnetic thin film.

Claims (4)

A sputtering target is a sintered body sputtering target having a Fe-Pt alloy and a non-magnetic material as a main component, and is characterized in that it contains 50 mass ppm or more and 5000 mass ppm or less of an element which forms an oxide, that is, 1 Mox Oxide Standard generates an oxide having a lower free energy than CO (carbon monoxide) and contains at least one of carbon, carbide, and nitride as a nonmagnetic material. A sputtering target according to the first aspect of the patent application, wherein the element which forms an oxide having a standard free energy of formation of 1 mole of oxygen lower than CO (carbon monoxide) is Al, Mg, Ti, Y, Zr . The sputtering target according to claim 1 or 2, wherein, in addition to Fe and Pt, it further comprises Ag, Au, B, Co, Cr, Cu, Ga, Ge, Ir, Mn, Mo, Nb, Any one or more of Ni, Pd, Re, Rh, Ru, Si, Sn, Ta, W, V, and Zn is used as a metal component. A sputtering target according to any one of claims 1 to 3, which further contains an oxide as a non-magnetic material.