TW201508095A - Electroplating apparatus for manufacturing flexible printed circuit board - Google Patents

Electroplating apparatus for manufacturing flexible printed circuit board Download PDF

Info

Publication number
TW201508095A
TW201508095A TW102131339A TW102131339A TW201508095A TW 201508095 A TW201508095 A TW 201508095A TW 102131339 A TW102131339 A TW 102131339A TW 102131339 A TW102131339 A TW 102131339A TW 201508095 A TW201508095 A TW 201508095A
Authority
TW
Taiwan
Prior art keywords
plating solution
electroplating apparatus
plated
electroplating
anode
Prior art date
Application number
TW102131339A
Other languages
Chinese (zh)
Other versions
TWI513859B (en
Inventor
Sui-Ho Tsai
Original Assignee
Intech Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intech Electronics Co Ltd filed Critical Intech Electronics Co Ltd
Priority to TW102131339A priority Critical patent/TWI513859B/en
Priority to JP2013246562A priority patent/JP5774669B2/en
Priority to KR20140003441A priority patent/KR20150026728A/en
Publication of TW201508095A publication Critical patent/TW201508095A/en
Application granted granted Critical
Publication of TWI513859B publication Critical patent/TWI513859B/en

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0085Apparatus for treatments of printed circuits with liquids not provided for in groups H05K3/02 - H05K3/46; conveyors and holding means therefor
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/008Current shielding devices
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • H05K3/188Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by direct electroplating
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/06Wires; Strips; Foils
    • C25D7/0614Strips or foils
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/06Wires; Strips; Foils
    • C25D7/0614Strips or foils
    • C25D7/0657Conducting rolls

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

The present disclosure provides an electro-plating apparatus. The electro-plating apparatus comprises a bath, a plurality of rolls, at least one electro-plating electrode, and a separation trough. In which, the separation trough is positioned in the bath, and at least one side-surface of the separation through has a plurality of holes. An electro-plating solution feeds into the bath through the separation trough or the bottom of the bath, and essentially spreads toward an object to be plated near an electro-plating electrode.

Description

製造可撓性印刷電路板的電鍍設備 Electroplating equipment for manufacturing flexible printed circuit boards

本發明係關於一種製造可撓性印刷電路板的電鍍設備,特別是關於一種具有分隔槽的電鍍設備。 The present invention relates to an electroplating apparatus for manufacturing a flexible printed circuit board, and more particularly to an electroplating apparatus having a separation groove.

傳統用於製造可撓性印刷電路板的電鍍設備通常具有卷對卷(roll-to-roll)結構,即待鍍件係在上述電鍍設備中,利用複數個導輪以水平或垂直方式連續輸送。由於盛裝於電鍍槽體內的電鍍溶液會隨著電鍍時間愈長,降低電鍍溶液中金屬離子的濃度,因此需要持續灌注新鮮的電鍍溶液於電鍍槽體中,以形成一連續式的電鍍設備。 Conventional electroplating equipment for manufacturing flexible printed circuit boards generally has a roll-to-roll structure in which a part to be plated is attached to the above electroplating apparatus, and is continuously conveyed horizontally or vertically by a plurality of guide wheels. . Since the plating solution contained in the plating bath will reduce the concentration of metal ions in the plating solution as the plating time is longer, it is necessary to continuously inject a fresh plating solution into the plating tank to form a continuous plating apparatus.

舉例來說,一般傳統的鍍銅線製程係大部分製作於可撓性軟板上。其中,無論是水平或垂直的電鍍方式,在形成盲孔或加厚銅膜時,通常槽內只有一或二電鍍陽極,即僅電鍍軟板之單面或同時電鍍軟板之雙面。然而上述電鍍方式往往需要較長的電鍍時間,增加時間和設備的成本。 For example, most conventional copper plating processes are mostly made on flexible flexible boards. Among them, whether it is a horizontal or vertical plating method, when forming a blind hole or a thick copper film, there is usually only one or two plated anodes in the groove, that is, only one side of the plated soft board or both sides of the plated soft board. However, the above plating methods often require longer plating times, increasing the time and equipment cost.

再者,一般可撓性待鍍件包含聚對苯二甲酸乙二酯(PET)或聚亞醯胺(polyimide,PI),其係經由蒸鍍 (evaporation)、濺鍍(sputtering)或化學沉積法(chemical deposition)形成一導電層,用以做為電鍍的導電前端材料。然而,由於導電層係為一極薄的金屬層(例如銅膜),因此無法如傳統製程使用夾具固定待鍍件,而需要使用陰極輪,形成輸送帶及提供陰極電性。 Furthermore, the generally flexible material to be plated comprises polyethylene terephthalate (PET) or polyimide (PI), which is vapor-deposited. Evaporation, sputtering, or chemical deposition forms a conductive layer for use as an electroconductive front end material for electroplating. However, since the conductive layer is a very thin metal layer (for example, a copper film), it is not possible to fix the object to be plated using a jig as in the conventional process, and it is necessary to use a cathode wheel to form a conveyor belt and provide cathode electrical properties.

在傳統的電鍍設備中,舊電鍍溶液及新鮮電鍍溶液之間會產生金屬離子濃度的差異。且使用攪拌裝置對解決上述問題的成效有限。另一方面,以攪拌裝置混合新、舊電鍍溶液時,不易控制電鍍溶液中金屬離子的正確濃度,以及待鍍件的二側係屬於高電流區,可能造成不同批次的電鍍層厚度不均,因此提升金屬離子的濃度均勻性更顯為重要。 In conventional electroplating equipment, a difference in metal ion concentration occurs between the old plating solution and the fresh plating solution. Moreover, the use of a stirring device has limited effectiveness in solving the above problems. On the other hand, when mixing new and old plating solutions with a stirring device, it is difficult to control the correct concentration of metal ions in the plating solution, and the two sides of the parts to be plated belong to a high current area, which may result in uneven thickness of plating layers of different batches. Therefore, it is more important to increase the uniformity of the concentration of metal ions.

因此,目前亟需一種新的製造可撓性印刷電路板的電鍍設備,以解決傳統電鍍設備所產生的缺失。 Therefore, there is a need for a new electroplating apparatus for manufacturing flexible printed circuit boards to solve the defects caused by conventional electroplating equipment.

本發明係提供一種電鍍設備,用以解決傳統電鍍設備的缺失,並且達到電鍍溶液均勻混合及提升電鍍效率的目的。 The invention provides an electroplating device for solving the defect of the conventional electroplating equipment and achieving the purpose of uniformly mixing the plating solution and improving the electroplating efficiency.

本發明之一態樣在於提供一種電鍍設備。此電鍍設備包含一槽體、複數個導輪、至少一陰極輪、至少一電鍍陽極、以及一分隔槽。其中,槽體係用以盛裝一電鍍溶液,且當電鍍溶液盛裝於槽體中時具有一液面。 One aspect of the present invention is to provide an electroplating apparatus. The electroplating apparatus comprises a tank body, a plurality of guide wheels, at least one cathode wheel, at least one plated anode, and a dividing groove. Wherein, the tank system is used to hold a plating solution, and has a liquid level when the plating solution is contained in the tank.

諸導輪係設置於槽體中,且以一輸送路徑連續輸送 一待鍍件。其中待鍍件在出輸送路徑之至少一部份中係浸於電鍍溶液之液面下。 The guide wheels are arranged in the trough body and continuously conveyed by a conveying path A piece to be plated. The portion to be plated is immersed in the liquid surface of the plating solution in at least a portion of the delivery path.

陰極輪係設置於槽體中且電鍍溶液之液面上,且不接觸電鍍溶液。陰極輪係提供陰極電性於該待鍍件,還原電鍍溶液中的金屬離子,形成金屬層於待鍍件上。 The cathode wheel train is disposed in the tank body and on the liquid surface of the plating solution, and does not contact the plating solution. The cathode wheel train provides cathode electrical properties to the material to be plated, and reduces metal ions in the plating solution to form a metal layer on the member to be plated.

電鍍陽極係設置於輸送路徑上,且浸於電鍍溶液之液面下。其中電鍍陽極係平行或垂直設置於待鍍件之平面上。電鍍陽極係氧化產生金屬離子於電鍍溶液中,使金屬離子於具有陰極電性的待鍍件還原,形成金屬層。 The plating anode is disposed on the transport path and immersed under the liquid surface of the plating solution. The electroplating anodes are arranged in parallel or perpendicular to the plane of the member to be plated. The electroplating anode is oxidized to generate metal ions in the plating solution, and the metal ions are reduced in the cathode to be plated to form a metal layer.

分隔槽係設置於槽體中,且分隔槽之至少一側面具有複數個通孔。其中電鍍溶液係經由分隔槽通入槽體之中,且實質上係噴射向靠近電鍍陽極的待測件。 The separation groove is disposed in the groove body, and at least one side surface of the separation groove has a plurality of through holes. The plating solution is introduced into the tank through the separation groove, and is substantially sprayed toward the device to be tested near the plating anode.

根據本發明之一實施例,上述輸送路徑包含U字型、V字形或三角形。 According to an embodiment of the invention, the transport path comprises a U-shape, a V-shape or a triangle.

根據本發明之一實施例,上述輸送路徑為U字型。 According to an embodiment of the invention, the transport path is U-shaped.

根據本發明之一實施例,上述導輪係呈水平、垂直或與液面具有一夾角。 According to an embodiment of the invention, the guide wheel is horizontal, vertical or at an angle to the liquid mask.

根據本發明之一實施例,上述陰極輪之材料係為金屬,或金屬與非金屬所組成的複合材料。 According to an embodiment of the invention, the material of the cathode wheel is a metal or a composite material composed of a metal and a non-metal.

根據本發明之一實施例,上述陰極輪之材料係為不鏽鋼、銅、鈦、或上述金屬與非金屬所組成的複合材料。 According to an embodiment of the invention, the material of the cathode wheel is stainless steel, copper, titanium, or a composite material of the above metal and non-metal.

根據本發明之一實施例,上述陰極輪係呈水平、或與液面具有一夾角。 According to an embodiment of the invention, the cathode wheel train is horizontal or at an angle to the liquid mask.

根據本發明之一實施例,上述電鍍設備更包含至少 一減壓槽,且設置於槽體中,用以減少待鍍件被電鍍溶液沖擊產生擾動,而影響鍍膜層厚度的均勻性。 According to an embodiment of the invention, the electroplating apparatus further comprises at least A pressure reducing groove is disposed in the tank body to reduce the disturbance of the plating material to be impacted by the plating solution, and affect the uniformity of the thickness of the coating layer.

根據本發明之一實施例,上述減壓槽具有複數個通孔。 According to an embodiment of the invention, the pressure reducing groove has a plurality of through holes.

根據本發明之一實施例,上述減壓槽的諸通孔係通入電鍍溶液至槽體中,用以減少待鍍件被電鍍溶液沖擊產生擾動,而影響鍍膜層厚度的均勻性。 According to an embodiment of the invention, the through holes of the pressure reducing groove are introduced into the plating solution to reduce the disturbance of the plating solution to be affected by the plating solution, and affect the uniformity of the thickness of the coating layer.

根據本發明之一實施例,上述減壓槽的諸通孔係用以形成複數個氣泡於電鍍溶液中,用以均勻混合電鍍溶液。 According to an embodiment of the invention, the through holes of the pressure reducing groove are used to form a plurality of bubbles in the plating solution for uniformly mixing the plating solution.

根據本發明之一實施例,上述減壓槽之材質包含一耐酸鹼材質。 According to an embodiment of the invention, the material of the pressure reducing groove comprises an acid and alkali resistant material.

根據本發明之一實施例,上述減壓槽之材質包含聚氯乙烯(PVC)、聚丙烯(PP)或聚乙烯(PE)。 According to an embodiment of the invention, the material of the pressure reducing groove comprises polyvinyl chloride (PVC), polypropylene (PP) or polyethylene (PE).

根據本發明之一實施例,上述電鍍陽極係為一金屬。 According to an embodiment of the invention, the electroplating anode is a metal.

根據本發明之一實施例,上述電鍍陽極係為銅、不鏽鋼或鈦。 According to an embodiment of the invention, the electroplating anode is copper, stainless steel or titanium.

根據本發明之一實施例,上述電鍍陽極係為一鈦網或一鈦板。 According to an embodiment of the invention, the electroplating anode is a titanium mesh or a titanium plate.

根據本發明之一實施例,上述電鍍陽極的表面更包含氧化銥、氧化鉭或其組合。 According to an embodiment of the invention, the surface of the electroplating anode further comprises ruthenium oxide, ruthenium oxide or a combination thereof.

根據本發明之一實施例,上述電鍍陽極係為二電鍍陽極,分別設置於輸送路徑之二端,且浸於電鍍溶液之該液面下。 According to an embodiment of the invention, the plating anode is a two-electroplating anode, which is respectively disposed at two ends of the conveying path and immersed under the liquid surface of the plating solution.

根據本發明之一實施例,上述電鍍陽極對分別設置於U字型輸送路徑之二端,且浸於電鍍溶液之液面下。 According to an embodiment of the invention, the pair of plating anodes are respectively disposed at two ends of the U-shaped conveying path and immersed under the liquid surface of the plating solution.

根據本發明之一實施例,上述分隔槽之剖面係呈方形、倒三角形、三角形、或複數個管狀結構。 According to an embodiment of the invention, the partitioning groove has a square, an inverted triangle, a triangle, or a plurality of tubular structures.

根據本發明之一實施例,上述分隔槽的諸通孔為圓孔狀或蜂巢狀。 According to an embodiment of the present invention, the through holes of the partitioning groove are in the shape of a circular hole or a honeycomb.

根據本發明之一實施例,上述待鍍件包含一軟性印刷電路基板。 According to an embodiment of the invention, the member to be plated comprises a flexible printed circuit board.

100、200a、200b、300、400a、400b‧‧‧電鍍設備 100, 200a, 200b, 300, 400a, 400b‧‧‧ plating equipment

110、310、410‧‧‧槽體 110, 310, 410‧‧‧

120、320、420‧‧‧導輪 120, 320, 420‧‧·guide wheels

121、321、421‧‧‧陰極輪 121, 321, 421‧‧‧ cathode wheel

130、330、430‧‧‧電鍍陽極 130,330,430‧‧‧Electroplating anode

140、340、440a、440b、500a、500b‧‧‧分隔槽 140, 340, 440a, 440b, 500a, 500b‧‧‧ separate slots

141、212、441、510a、510b‧‧‧通孔 141, 212, 441, 510a, 510b‧‧‧ through holes

150、350、450‧‧‧電鍍溶液 150, 350, 450‧‧‧ plating solution

151、451‧‧‧液面 151, 451‧‧ ‧ liquid level

160、360、460‧‧‧待鍍件 160, 360, 460‧‧‧ to be plated

210a、210b‧‧‧減壓槽 210a, 210b‧‧‧Relief tank

211‧‧‧開口 211‧‧‧ openings

A、B、C‧‧‧箭號 A, B, C‧‧‧ arrows

第1圖係根據本發明之一實施例所繪示之電鍍設備剖面示意圖;第2A及2B圖係根據本發明之一實施例所繪示之電鍍設備剖面示意圖,其中包含減壓槽;第3A圖係繪示第1圖之電鍍設備的俯視圖;第3B圖係根據本發明之一實施例所繪示之電鍍設備的俯視圖;第4A圖係根據本發明之一實施例所繪示之電鍍設備剖面示意圖,其中分隔槽之剖面呈倒三角形;第4B圖係根據本發明之一實施例所繪示之電鍍設備剖面示意圖,其中分隔槽之剖面呈三角形;以及第5A及5B圖係根據本發明之一實施例所繪示之分隔槽的通孔圖形。 1 is a schematic cross-sectional view of an electroplating apparatus according to an embodiment of the present invention; and 2A and 2B are cross-sectional views of a plating apparatus according to an embodiment of the present invention, including a pressure reducing groove; 1A is a top view of a plating apparatus according to an embodiment of the present invention; FIG. 4A is a plating apparatus according to an embodiment of the present invention; A cross-sectional view in which the cross section of the partition groove is an inverted triangle; FIG. 4B is a schematic cross-sectional view of the electroplating apparatus according to an embodiment of the present invention, wherein the cross section of the partition groove is triangular; and FIGS. 5A and 5B are according to the present invention. The through hole pattern of the separation groove shown in one embodiment.

接著以實施例並配合圖式以詳細說明本發明,在圖式或描述中,相似或相同的部分係使用相同之符號或編號。在圖式中,實施例之形狀或厚度可能擴大,以簡化或方便標示,而圖式中元件之部分將以文字描述之。可瞭解的是,未繪示或未描述之元件可為熟習該項技藝者所知之各種樣式。 The invention will be described in detail by way of example and with reference to the accompanying drawings In the drawings, the shape or thickness of the embodiments may be expanded to simplify or facilitate the labeling, and the parts of the elements in the drawings will be described in the text. It will be appreciated that elements not shown or described may be in a variety of styles known to those skilled in the art.

第1圖係根據本發明之一實施例所繪示之電鍍設備100之剖面示意圖。在第1圖中,電鍍設備100包含一槽體110、複數個導輪120、至少一陰極輪121、至少一電鍍陽極130、以及一分隔槽140。 1 is a schematic cross-sectional view of a plating apparatus 100 according to an embodiment of the present invention. In FIG. 1 , the electroplating apparatus 100 includes a tank body 110 , a plurality of guide wheels 120 , at least one cathode wheel 121 , at least one plated anode 130 , and a dividing groove 140 .

槽體110係用以盛裝一電鍍溶液150。其中電鍍溶液150盛裝於槽體110時,電鍍溶液150具有一液面151。在本發明之一實施例中,槽體係由一底板、二側板、及二溢流板所組成。在本發明之一實施例中,電鍍溶液包含一金屬離子,其中金屬離子可為銅離子、鈷離子、鎳離子、鋅離子、錫離子或銀離子,但不以此為限制。 The tank 110 is used to hold a plating solution 150. When the plating solution 150 is contained in the tank body 110, the plating solution 150 has a liquid surface 151. In an embodiment of the invention, the trough system consists of a bottom plate, two side plates, and two overflow plates. In an embodiment of the invention, the plating solution comprises a metal ion, wherein the metal ion may be copper ion, cobalt ion, nickel ion, zinc ion, tin ion or silver ion, but is not limited thereto.

導輪120係設置於槽體110中。其中,導輪120係在槽體中排列形成一輸送路徑,且以輸送路徑連續輸送一待鍍件160。在本發明之一實施例中,導輪係呈水平、垂直、或與液面具有一夾角。 The guide wheel 120 is disposed in the tank body 110. The guide wheels 120 are arranged in the tank body to form a conveying path, and a conveying member 160 is continuously conveyed by the conveying path. In one embodiment of the invention, the guide wheel is horizontal, vertical, or at an angle to the liquid mask.

待鍍件160在輸送路徑之至少一部份中係浸於電鍍溶液150之液面151下。在本發明之一實施例中,輸送路徑例如可為U字型、V字形或三角形,但不以此為限制。 在本發明之另一實施例中,輸送路徑係為U字型,如第1圖所示,其中一部分的輸送路徑係沉浸於電鍍溶液之液面下。在本發明之一實施例中,待鍍件包含可撓性印刷電路板(FPC)或可撓性銅箔基板(FCCL),但不以此為限制。 The plate to be plated 160 is immersed in the liquid surface 151 of the plating solution 150 in at least a portion of the conveying path. In an embodiment of the invention, the transport path may be, for example, a U-shape, a V-shape or a triangle, but is not limited thereto. In another embodiment of the invention, the transport path is U-shaped, as shown in Figure 1, wherein a portion of the transport path is immersed under the liquid level of the plating solution. In an embodiment of the invention, the member to be plated comprises a flexible printed circuit board (FPC) or a flexible copper foil substrate (FCCL), but is not limited thereto.

陰極輪121設置於槽體110中,且於電鍍溶液150之液面151上,未接觸電鍍溶液150。其中,陰極輪121係提供陰極電性於待鍍件160上,用以還原電鍍溶液150中的金屬離子,且形成金屬層於待鍍件上160。在本發明之一實施例中,陰極輪之材料係為金屬,例如可為不鏽鋼、銅、鈦或上述金屬與非金屬所組成的複合材料,但不以此為限制。在本發明之另一實施例中,陰極輪之表面係經過研磨拋光處理。 The cathode wheel 121 is disposed in the tank body 110 and is not in contact with the plating solution 150 on the liquid surface 151 of the plating solution 150. The cathode wheel 121 is provided with a cathode electrically connected to the member to be plated 160 for reducing metal ions in the plating solution 150 and forming a metal layer on the member to be plated 160. In an embodiment of the present invention, the material of the cathode wheel is metal, for example, stainless steel, copper, titanium or a composite material of the above metal and non-metal, but is not limited thereto. In another embodiment of the invention, the surface of the cathode wheel is subjected to a lapping and polishing process.

電鍍陽極130係設置於輸送路徑上,且浸於電鍍溶液150之液面151下。其中,電鍍陽極130係平行設置於待鍍件160之平面上。並且電鍍陽極130係提供陽極電性,且氧化產生金屬離子於電鍍溶液150中。在本發明之一實施例中,電鍍陽極係為二電鍍陽極,其係分別設置於輸送路徑之相異二端,且浸於電鍍溶液之液面下。在本發明之另一實施例中,二電鍍陽極係分別設置於U字型輸送路徑之相異二端,且浸於電鍍溶液之液面下,如第1圖所示。在本發明之又一實施例中,電鍍陽極係為一金屬,例如可為銅、不鏽鋼或鈦,但不以此為限制。在本發明之一實施例中,電鍍陽極係為一鈦網或一鈦板,其上更包含氧化銥、氧化鉭或其組合。 The plating anode 130 is disposed on the transport path and immersed under the liquid surface 151 of the plating solution 150. The plating anodes 130 are disposed in parallel on the plane of the member to be plated 160. And the plating anode 130 provides anode electrical properties and oxidizes to produce metal ions in the plating solution 150. In an embodiment of the invention, the electroplating anode is a two-electroplating anode which is respectively disposed at different ends of the conveying path and immersed under the liquid surface of the plating solution. In another embodiment of the present invention, the two electroplating anodes are respectively disposed at different ends of the U-shaped transport path and immersed under the liquid surface of the plating solution, as shown in FIG. In still another embodiment of the present invention, the plating anode is a metal, such as copper, stainless steel or titanium, but is not limited thereto. In an embodiment of the invention, the electroplating anode is a titanium mesh or a titanium plate, and further comprises cerium oxide, cerium oxide or a combination thereof.

分隔槽140係設置於槽體110中,且分隔槽140之至少一側面具有複數個通孔141。其中,電鍍溶液150係經由分隔槽140通入槽體110之中,且實質上係噴射向靠近電鍍陽極130的待鍍件160。在本發明之一實施例中,分隔槽之剖面係呈方形、倒三角形、三角形、或複數個管狀結構。 The partitioning groove 140 is disposed in the tank body 110, and at least one side surface of the partitioning groove 140 has a plurality of through holes 141. The plating solution 150 is introduced into the tank body 110 through the separation groove 140, and is substantially sprayed toward the material to be plated 160 near the plating anode 130. In an embodiment of the invention, the section of the dividing groove is square, inverted triangle, triangular, or a plurality of tubular structures.

在第1圖中,電鍍溶液150係依箭號A之方向注入分隔槽140中,且依箭號B之方向由通孔141噴射向靠近電鍍陽極130的待鍍件160。並且,過多的電鍍溶液150之液面151會高出槽體110,而如箭號C所示溢流出槽體110。 In Fig. 1, the plating solution 150 is injected into the separation groove 140 in the direction of the arrow A, and is ejected toward the plated member 160 to be plated near the plated anode 130 by the through hole 141 in the direction of the arrow B. Moreover, the liquid level 151 of the excess plating solution 150 will rise above the tank body 110 and overflow out of the tank body 110 as indicated by the arrow C.

第2A圖係根據本發明之一實施例所繪示之電鍍設備200a剖面示意圖,其中包含減壓槽210a。在第2A圖中,電鍍設備200a之結構組成與第1圖相似,惟額外設置一減壓槽210a、二陰極輪121以及二電鍍陽極130,於電鍍設備200a中。 2A is a schematic cross-sectional view of a plating apparatus 200a according to an embodiment of the present invention, including a pressure reducing groove 210a. In Fig. 2A, the electroplating apparatus 200a has a structural composition similar to that of Fig. 1, except that a pressure reducing groove 210a, two cathode wheels 121, and two plating anodes 130 are additionally provided in the plating apparatus 200a.

減壓槽210a係設置於槽體110之底部。其中,減壓槽210a具有一開口211,用以通入新鮮的電鍍溶液。並且,減壓槽210a亦具有複數個通孔212朝向槽體110之內部,用以均勻混合槽體110內之電鍍溶液。 The pressure reducing groove 210a is provided at the bottom of the tank body 110. The pressure reducing groove 210a has an opening 211 for introducing a fresh plating solution. Moreover, the pressure reducing groove 210a also has a plurality of through holes 212 facing the inside of the groove body 110 for uniformly mixing the plating solution in the tank body 110.

於待鍍件160之二端,分別具有四陰極輪121及四電鍍陽極130。如此一來,便可同時電鍍待鍍件160之相異二表面,以加速電鍍效率,提升產能。 At the two ends of the plate to be plated 160, there are four cathode wheels 121 and four plated anodes 130, respectively. In this way, the opposite surfaces of the plated member 160 can be simultaneously plated to accelerate the plating efficiency and increase the productivity.

第2B圖係根據本發明之一實施例所繪示之電鍍設 備200b剖面示意圖,其中包含減壓槽210b。在第2B圖中,電鍍設備200b之結構組成與第2A圖相似,惟減壓槽210b係延伸至槽體110之二側。 2B is a plating apparatus according to an embodiment of the present invention A schematic cross-sectional view of the apparatus 200b includes a pressure relief tank 210b. In Fig. 2B, the electroplating apparatus 200b has a structural composition similar to that of Fig. 2A, except that the pressure reducing grooves 210b extend to both sides of the tank body 110.

由於減壓槽210b延伸至槽體110之二側,因此可藉由減壓槽210b上的通孔212,將新鮮的電鍍溶液噴射向靠近電鍍陽極的待鍍件,以減少待鍍件被電鍍溶液沖擊產生擾動,而影響鍍膜層厚度的均勻性。在本發明之一實施例中,減壓槽之材質包含一耐酸鹼材料。在本發明之另一實施例中,減壓槽之材質包含聚氯乙烯(PVC)、聚丙烯(PP)或聚乙烯(PE)。 Since the pressure reducing groove 210b extends to the two sides of the tank body 110, the fresh plating solution can be sprayed toward the plated portion to be plated by the through hole 212 on the pressure reducing groove 210b to reduce the plating of the material to be plated. The solution impact creates a disturbance that affects the uniformity of the thickness of the coating layer. In an embodiment of the invention, the material of the pressure reducing groove comprises an acid and alkali resistant material. In another embodiment of the invention, the material of the pressure reducing groove comprises polyvinyl chloride (PVC), polypropylene (PP) or polyethylene (PE).

在本發明之一實施例中,藉由設置於待鍍件二端陰極輪與電鍍陽極的組合,可加速電鍍效率,並大幅提升產能。在本發明之一實施例中,待鍍件的電鍍速率可提升200%。 In one embodiment of the present invention, by combining the two-terminal cathode wheel to the plated anode to be plated, the plating efficiency can be accelerated and the productivity can be greatly improved. In an embodiment of the invention, the plating rate of the parts to be plated can be increased by 200%.

一方面,本發明之實施例所提供的電鍍設備皆具有分隔槽,用以供應新鮮且濃度準確的電鍍溶液至槽體中。由於電鍍溶液會隨著電鍍時間愈長,而降低電鍍溶液中金屬離子的濃度。因此在本發明之實施例中,藉由分隔槽上之通孔,可將新鮮且濃度準確的電鍍溶液噴射向靠近電鍍陽極的待鍍件,以有效提升待鍍件的鍍層品質。 In one aspect, the electroplating apparatus provided by the embodiments of the present invention has a separation groove for supplying a fresh and accurate plating solution into the tank. Since the plating solution has a longer plating time, the concentration of metal ions in the plating solution is lowered. Therefore, in the embodiment of the present invention, by separating the through holes in the groove, a fresh and accurate plating solution can be sprayed toward the plate to be plated near the plated anode to effectively improve the plating quality of the member to be plated.

另一方面,本發明之實施例所提供的電鍍設備皆具有二電鍍陽極,用以增加電鍍效率,提升產出效能。由於在電鍍設備中,待鍍件需靠近電鍍陽極才具有電鍍效果。因此在本發明之實施例中,藉由設置二電鍍陽極於輸送路 徑之相異二端,一方面可避免電場相互影響,另一方面可縮短相同鍍層厚度的電鍍時間,以提升產出效能。 On the other hand, the electroplating equipment provided by the embodiments of the present invention all have two electroplating anodes for increasing electroplating efficiency and improving output efficiency. Since in the electroplating equipment, the material to be plated needs to be close to the electroplated anode to have an electroplating effect. Therefore, in the embodiment of the present invention, by providing two electroplated anodes on the conveying path The different ends of the diameter can avoid the interaction of the electric fields on the one hand, and shorten the plating time of the same plating thickness on the other hand to improve the output efficiency.

第3A圖係繪示第1圖之電鍍設備100的俯視圖。在第3A圖中,待鍍件160順著位於槽體110二側的導輪120浸入電鍍溶液150中。分隔槽140係位於槽體110之中央處,其中分隔槽140二側的通孔141係依箭號B之方向,噴射新鮮的電鍍溶液150於待鍍件160上。 Fig. 3A is a plan view showing the plating apparatus 100 of Fig. 1. In FIG. 3A, the member to be plated 160 is immersed in the plating solution 150 along the guide wheels 120 on both sides of the tank body 110. The partitioning groove 140 is located at the center of the tank body 110. The through holes 141 of the two sides of the partitioning groove 140 are sprayed with a fresh plating solution 150 on the object to be plated 160 in the direction of the arrow B.

第3B圖係根據本發明之一實施例所繪示之電鍍設備300的俯視圖。在第3B圖中,電鍍設備300包含一槽體310、複數個導輪320、至少一陰極輪321、至少一電鍍陽極330、以及一分隔槽340。其中,槽體310係用以盛裝一電鍍溶液350。導輪320係在槽體中排列形成一輸送路徑,且以輸送路徑連續輸送一待鍍件360。電鍍陽極330係設置於輸送路徑上,且平行設置於待鍍件360之平面上。 3B is a top plan view of a plating apparatus 300 in accordance with an embodiment of the present invention. In FIG. 3B, the electroplating apparatus 300 includes a tank body 310, a plurality of guide wheels 320, at least one cathode wheel 321, a plated anode 330, and a partition groove 340. The tank 310 is used to hold a plating solution 350. The guide wheels 320 are arranged in the tank body to form a conveying path, and a conveying member 360 is continuously conveyed by the conveying path. The plated anodes 330 are disposed on the conveying path and are disposed in parallel on the plane of the member to be plated 360.

分隔槽340係位於槽體310之中央處,其中分隔槽340二側的通孔係依箭號B之方向,噴射新鮮的電鍍溶液350於待鍍件360上。 The separation groove 340 is located at the center of the groove body 310. The through holes on both sides of the separation groove 340 are sprayed with the fresh plating solution 350 on the object to be plated 360 in the direction of the arrow B.

與第3A圖相異之處在於,第3B圖中電鍍設備300的導輪320及陰極輪321皆垂直於電鍍溶液350的液面。其中,導輪320係設置於槽體310中,且位於電鍍溶液350的液面下;而陰極輪321則設置於槽體310外,未接觸電鍍溶液350。當待鍍件360設置於輸送路徑上時,待鍍件360係位於電鍍溶液350下,且垂直於電鍍溶液350的液面。 The difference from FIG. 3A is that the guide wheel 320 and the cathode wheel 321 of the electroplating apparatus 300 in FIG. 3B are perpendicular to the liquid level of the plating solution 350. The guide wheel 320 is disposed in the tank body 310 and located under the liquid surface of the plating solution 350. The cathode wheel 321 is disposed outside the tank body 310 and is not in contact with the plating solution 350. When the object to be plated 360 is disposed on the conveying path, the portion to be plated 360 is located under the plating solution 350 and perpendicular to the liquid level of the plating solution 350.

第4A圖係根據本發明之一實施例所繪示之電鍍設 備400a剖面示意圖,其中分隔槽440a之剖面呈倒三角形。在第4A圖中,電鍍設備400a包含一槽體410、複數個導輪420、至少一陰極輪421、至少一電鍍陽極430、以及一分隔槽440a。 4A is a plating apparatus according to an embodiment of the present invention. A schematic cross-sectional view of the device 400a, wherein the partition groove 440a has an inverted triangle shape. In FIG. 4A, the plating apparatus 400a includes a tank body 410, a plurality of guide wheels 420, at least one cathode wheel 421, at least one plated anode 430, and a partition groove 440a.

電鍍設備400a之導輪420係形成一V字型輸送路徑,並且藉由V字型輸送路徑連續輸送一待鍍件460。其中,由於輸送路徑係呈V字型,因此分隔槽440a之剖面則呈倒三角形。新鮮的電鍍溶液450係依箭號A之方向,藉由分隔槽440a上的通孔441,將電鍍溶液450依箭號B之方向,噴射至靠近電鍍陽極430的待鍍件460上。並且,由於過多的電鍍溶液450之液面451會依箭號C之方向,溢流出槽體410。 The guide wheel 420 of the plating apparatus 400a forms a V-shaped conveying path, and continuously conveys a sheet to be plated 460 by a V-shaped conveying path. Among them, since the conveying path is V-shaped, the cross section of the dividing groove 440a is an inverted triangle. The fresh plating solution 450 is sprayed in the direction of the arrow A by the through hole 441 in the partition groove 440a to spray the plating solution 450 in the direction of the arrow B to the member to be plated 460 adjacent to the plated anode 430. Moreover, since the liquid level 451 of the excessive plating solution 450 will overflow the tank body 410 in the direction of the arrow C.

其中,陰極輪421係提供陰極電性於待鍍件460上,用以還原電鍍溶液450中的金屬離子,且形成金屬層於待鍍件上460。並且電鍍陽極430係提供陽極電性,且氧化產生金屬離子於電鍍溶液450中。 The cathode wheel 421 is provided with a cathode electrically connected to the member to be plated 460 for reducing metal ions in the plating solution 450 and forming a metal layer on the member to be plated 460. And the plated anode 430 provides anodic electrical properties and oxidizes to produce metal ions in the plating solution 450.

在本發明之一實施例中,陰極輪之材料係為金屬,例如可為不鏽鋼、銅或鈦,但不以此為限制。在本發明之另一實施例中,陰極輪之表面係經過研磨拋光處理。在本發明之又一實施例中,電鍍陽極係為一金屬,例如可為銅、不鏽鋼或鈦,但不以此為限制。在本發明之一實施例中,電鍍陽極係為一鈦網或一鈦板,其上更包含氧化銥、氧化鉭或其組合。 In an embodiment of the invention, the material of the cathode wheel is metal, such as stainless steel, copper or titanium, but is not limited thereto. In another embodiment of the invention, the surface of the cathode wheel is subjected to a lapping and polishing process. In still another embodiment of the present invention, the plating anode is a metal, such as copper, stainless steel or titanium, but is not limited thereto. In an embodiment of the invention, the electroplating anode is a titanium mesh or a titanium plate, and further comprises cerium oxide, cerium oxide or a combination thereof.

第4B圖係根據本發明之一實施例所繪示之電鍍設 備400b剖面示意圖,其中分隔槽440b之剖面呈三角形。在第4B圖中,電鍍設備400b包含一槽體410、複數個導輪420、至少一電鍍陽極430、以及一分隔槽440b。 4B is a plating apparatus according to an embodiment of the present invention. A schematic cross-sectional view of the 400b, wherein the partition groove 440b has a triangular cross section. In FIG. 4B, the plating apparatus 400b includes a tank 410, a plurality of guide wheels 420, at least one plated anode 430, and a partition groove 440b.

電鍍設備400a之導輪420係形成一三角形輸送路徑,並且藉由三角形輸送路徑連續輸送一待鍍件460。其中,由於輸送路徑係呈三角形,因此分隔槽440b之剖面則呈三角形。新鮮的電鍍溶液450係依箭號A之方向,藉由分隔槽440b上的通孔441,將電鍍溶液450依箭號B之方向,噴射至靠近電鍍陽極430的待鍍件460上。並且,由於過多的電鍍溶液450之液面451會依箭號C之方向,溢流出槽體410。 The guide wheel 420 of the electroplating apparatus 400a forms a triangular conveying path, and a sheet to be plated 460 is continuously conveyed by a triangular conveying path. Wherein, since the conveying path is triangular, the section of the dividing groove 440b is triangular. The fresh plating solution 450 is sprayed in the direction of the arrow A by the through hole 441 in the partition groove 440b to spray the plating solution 450 in the direction of the arrow B to the member to be plated 460 adjacent to the plated anode 430. Moreover, since the liquid level 451 of the excessive plating solution 450 will overflow the tank body 410 in the direction of the arrow C.

其中,陰極輪421係提供陰極電性於待鍍件460上,用以還原電鍍溶液450中的金屬離子,且形成金屬層於待鍍件上460。並且電鍍陽極430係提供陽極電性,且氧化產生金屬離子於電鍍溶液450中。 The cathode wheel 421 is provided with a cathode electrically connected to the member to be plated 460 for reducing metal ions in the plating solution 450 and forming a metal layer on the member to be plated 460. And the plated anode 430 provides anodic electrical properties and oxidizes to produce metal ions in the plating solution 450.

在本發明之一實施例中,陰極輪之材料係為金屬,例如可為不鏽鋼、銅或鈦,但不以此為限制。在本發明之另一實施例中,陰極輪之表面係經過研磨拋光處理。在本發明之又一實施例中,電鍍陽極係為一金屬,例如可為銅、不鏽鋼或鈦,但不以此為限制。在本發明之一實施例中,電鍍陽極係為一鈦網或一鈦板,其上更包含氧化銥、氧化鉭或其組合。 In an embodiment of the invention, the material of the cathode wheel is metal, such as stainless steel, copper or titanium, but is not limited thereto. In another embodiment of the invention, the surface of the cathode wheel is subjected to a lapping and polishing process. In still another embodiment of the present invention, the plating anode is a metal, such as copper, stainless steel or titanium, but is not limited thereto. In an embodiment of the invention, the electroplating anode is a titanium mesh or a titanium plate, and further comprises cerium oxide, cerium oxide or a combination thereof.

第5A及5B圖係根據本發明之一實施例所繪示之分隔槽500a及500b的通孔510a及510b圖形。一般來說, 分隔槽上的通孔圖形例如可為圓孔狀、蜂巢狀、三角形、方形、或其他幾何圖形,但不以此為限制。在本發明之一實施例中,分隔槽500a上的通孔510a圖形係為圓孔狀,如第5A圖所示。在本發明之另一實施例中,分隔槽500b上的通孔510b圖形係為蜂巢狀,如第5B圖所示。 5A and 5B are diagrams showing the through holes 510a and 510b of the separation grooves 500a and 500b according to an embodiment of the present invention. Generally speaking, The through hole pattern on the separation groove may be, for example, a circular hole shape, a honeycomb shape, a triangle shape, a square shape, or other geometric shapes, but is not limited thereto. In an embodiment of the present invention, the through hole 510a pattern on the partition groove 500a is a circular hole shape as shown in FIG. 5A. In another embodiment of the present invention, the through hole 510b pattern on the partition groove 500b is honeycomb-shaped as shown in FIG. 5B.

在本發明之實施例中,由於分隔槽可直接供應新鮮且濃度準確的電鍍溶液於靠近電鍍陽極的待鍍件上,因此可明顯提升鍍層的品質。另外,藉由設置減壓槽於電鍍設備上,可取代傳統攪拌式的混合法,達到快速均勻混合的效果,並且亦可補充新鮮的電鍍溶液於槽體中。另一方面,藉由設置二電鍍陽極於待鍍件的輸送路徑上,可縮短相同鍍層厚度的電鍍時間,且大幅提升電鍍設備的產能。 In the embodiment of the present invention, since the separation groove can directly supply the fresh and accurate concentration plating solution on the member to be plated close to the plated anode, the quality of the plating layer can be remarkably improved. In addition, by providing a pressure reducing groove on the plating equipment, the conventional stirring mixing method can be used to achieve the effect of rapid and uniform mixing, and a fresh plating solution can be added to the tank. On the other hand, by providing the two electroplated anodes on the transport path of the member to be plated, the plating time of the same plating thickness can be shortened, and the productivity of the electroplating apparatus can be greatly improved.

雖然本發明之實施例已揭露如上,然其並非用以限定本發明,任何熟習此技藝者,在不脫離本發明之精神和範圍內,當可做些許之更動與潤飾,因此本發明之保護範圍當以後附之申請專利範圍所界定為準。 Although the embodiments of the present invention have been disclosed as above, it is not intended to limit the present invention, and any person skilled in the art can make some modifications and retouchings without departing from the spirit and scope of the present invention. The scope is defined as defined in the scope of the patent application.

100‧‧‧電鍍設備 100‧‧‧Electroplating equipment

110‧‧‧槽體 110‧‧‧ tank

120‧‧‧導輪 120‧‧‧guide wheel

121‧‧‧陰極輪 121‧‧‧Cathode wheel

130‧‧‧電鍍陽極 130‧‧‧Electroplated anode

140‧‧‧分隔槽 140‧‧‧Separation slot

141‧‧‧通孔 141‧‧‧through hole

150‧‧‧電鍍溶液 150‧‧‧ plating solution

151‧‧‧液面 151‧‧‧ liquid level

160‧‧‧待鍍件 160‧‧‧To be plated

A、B、C‧‧‧箭號 A, B, C‧‧‧ arrows

Claims (21)

一種電鍍設備,包含:一槽體,用以盛裝一電鍍溶液,其中該電鍍溶液盛裝於該槽體中時具有一液面;複數個導輪,設置於該槽體中;至少一陰極輪,設置於該槽體中且該電鍍溶液之該液面上,且不接觸該電鍍溶液,其中該陰極輪與該些導輪形成一輸送路徑連續輸送一待鍍件,其中該待鍍件在該輸送路徑之至少一部分中係浸於該電鍍溶液之該液面下;至少一電鍍陽極,設置於該輸送路徑上,且浸於該電鍍溶液之該液面下,其中該電鍍陽極係平行設置於該待鍍件之平面上;以及一分隔槽,係設置於該槽體中,該分隔槽之至少一側面具有複數個通孔,其中該電鍍溶液係經由該分隔槽通入該槽體之中,且實質上係噴射向靠近該電鍍陽極的該待鍍件。 An electroplating apparatus comprising: a tank body for containing a plating solution, wherein the plating solution has a liquid surface when being contained in the tank body; a plurality of guide wheels are disposed in the tank body; at least one cathode wheel, Provided in the tank body and on the liquid surface of the plating solution, and not contacting the plating solution, wherein the cathode wheel and the guide wheels form a conveying path for continuously conveying a to-be-plated part, wherein the to-be-plated part is At least a portion of the transport path is immersed in the liquid surface of the plating solution; at least one plating anode is disposed on the transport path and immersed under the liquid surface of the plating solution, wherein the plating anode is disposed in parallel a plane of the member to be plated; and a partitioning groove is disposed in the groove body, the at least one side of the dividing groove has a plurality of through holes, wherein the plating solution is introduced into the groove body through the dividing groove And substantially injecting the article to be plated close to the plated anode. 如請求項1所述之電鍍設備,其中該輸送路徑包含U字型、V字型或三角形。 The electroplating apparatus of claim 1, wherein the transport path comprises a U-shape, a V-shape, or a triangle. 如請求項1所述之電鍍設備,其中該輸送路徑為U字型。 The electroplating apparatus according to claim 1, wherein the conveying path is U-shaped. 如請求項3所述之電鍍設備,其中該些電鍍陽極分別設置於該U字型輸送路徑之相異二端,且浸於該電鍍溶液之該液面下。 The electroplating apparatus according to claim 3, wherein the electroplating anodes are respectively disposed at different ends of the U-shaped conveying path and immersed under the liquid surface of the plating solution. 如請求項1所述之電鍍設備,其中該些導輪係呈水平、垂直、或與該液面具有一夾角。 The electroplating apparatus of claim 1, wherein the guide wheels are horizontal, vertical, or at an angle to the liquid mask. 如請求項1所述之電鍍設備,其中該陰極輪之材料係為金屬、或金屬與非金屬所組成之複合材料。 The electroplating apparatus according to claim 1, wherein the material of the cathode wheel is a metal or a composite material composed of a metal and a non-metal. 如請求項6所述之電鍍設備,其中該陰極輪之材料係為不鏽鋼、銅、鈦、或該些金屬與非金屬所組成之複合材料。 The electroplating apparatus of claim 6, wherein the material of the cathode wheel is stainless steel, copper, titanium, or a composite material of the metal and non-metal. 如請求項1所述之電鍍設備,其中該陰極輪係呈水平、垂直或與液面具有一夾角。 The electroplating apparatus of claim 1, wherein the cathode wheel train is horizontal, vertical or at an angle to the liquid mask. 如請求項1所述之電鍍設備,更包含至少一減壓槽,設置於該槽體中,用以減少待鍍件被電鍍溶液沖擊產生擾動。 The electroplating apparatus according to claim 1, further comprising at least one pressure reducing groove disposed in the tank body for reducing the disturbance of the object to be plated by the impact of the plating solution. 如請求項9所述之電鍍設備,其中該減壓槽具有複數個通孔。 The electroplating apparatus of claim 9, wherein the decompression tank has a plurality of through holes. 如請求項10所述之電鍍設備,其中該減壓槽的該些通孔係通入該電鍍溶液至該槽體中,用以減少待鍍件被電鍍溶液沖擊產生擾動。 The electroplating apparatus of claim 10, wherein the through holes of the decompression tank pass into the plating solution into the tank body to reduce the disturbance of the object to be plated by the impact of the plating solution. 如請求項9所述之電鍍設備,其中該減壓槽之材質包含一耐酸鹼材質。 The electroplating apparatus according to claim 9, wherein the material of the decompression tank comprises an acid and alkali resistant material. 如請求項12所述之電鍍設備,其中該耐酸鹼材質包含聚氯乙烯(PVC)、聚丙烯(PP)或聚乙烯(PE)。 The electroplating apparatus of claim 12, wherein the acid and alkali resistant material comprises polyvinyl chloride (PVC), polypropylene (PP) or polyethylene (PE). 如請求項1所述之電鍍設備,其中該電鍍陽極係為一金屬。 The electroplating apparatus of claim 1, wherein the electroplated anode is a metal. 如請求項1所述之電鍍設備,其中該電鍍陽極係為銅、不鏽鋼或鈦。 The electroplating apparatus of claim 1, wherein the electroplating anode is copper, stainless steel or titanium. 如請求項15所述之電鍍設備,其中該電鍍陽極係為一鈦網或一鈦板。 The electroplating apparatus according to claim 15, wherein the electroplating anode is a titanium mesh or a titanium plate. 如請求項16所述之電鍍設備,其中該電鍍陽極之表面具有氧化銥、氧化鉭或其組合。 The electroplating apparatus of claim 16, wherein the surface of the electroplated anode has ruthenium oxide, ruthenium oxide or a combination thereof. 如請求項1所述之電鍍設備,其中該電鍍陽極係為二電鍍陽極,分別設置於該輸送路徑之二端,且浸於該電鍍溶液之該液面下。 The electroplating apparatus according to claim 1, wherein the electroplating anode is a two electroplating anode, which are respectively disposed at two ends of the conveying path and immersed under the liquid surface of the plating solution. 如請求項1所述之電鍍設備,其中該分隔槽之剖面係呈方形、倒三角形、三角形、或複數個管狀結構。 The electroplating apparatus according to claim 1, wherein the partitioning groove has a square, an inverted triangle, a triangular shape, or a plurality of tubular structures. 如請求項1所述之電鍍設備,其中該分隔槽的該些通孔為圓孔狀或蜂巢狀。 The electroplating apparatus according to claim 1, wherein the through holes of the separation groove are round holes or honeycomb. 如請求項1所述之電鍍設備,其中該待鍍件包含一軟性印刷電路基板。 The electroplating apparatus of claim 1, wherein the member to be plated comprises a flexible printed circuit board.
TW102131339A 2013-08-30 2013-08-30 Electroplating apparatus for manufacturing flexible printed circuit board TWI513859B (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
TW102131339A TWI513859B (en) 2013-08-30 2013-08-30 Electroplating apparatus for manufacturing flexible printed circuit board
JP2013246562A JP5774669B2 (en) 2013-08-30 2013-11-28 Plating equipment for manufacturing flexible printed circuit boards
KR20140003441A KR20150026728A (en) 2013-08-30 2014-01-10 Electroplating apparatus for manufacturing flexible printed circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW102131339A TWI513859B (en) 2013-08-30 2013-08-30 Electroplating apparatus for manufacturing flexible printed circuit board

Publications (2)

Publication Number Publication Date
TW201508095A true TW201508095A (en) 2015-03-01
TWI513859B TWI513859B (en) 2015-12-21

Family

ID=49943239

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102131339A TWI513859B (en) 2013-08-30 2013-08-30 Electroplating apparatus for manufacturing flexible printed circuit board

Country Status (3)

Country Link
JP (1) JP5774669B2 (en)
KR (1) KR20150026728A (en)
TW (1) TWI513859B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104775146A (en) * 2015-03-06 2015-07-15 东莞宇宙电路板设备有限公司 Reel-to-reel continuous horizontal high-current electroplating system
TWI563130B (en) * 2015-09-21 2016-12-21 Triumphant Gate Ltd

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108699696B (en) * 2016-01-12 2020-11-17 株式会社Jcu Wet processing device for resin film
TWI580817B (en) * 2016-05-31 2017-05-01 Pomiran Metalization Research Co Ltd Flexible continuous chemical plating method and apparatus for flexible substrate
CN107723766A (en) * 2016-08-10 2018-02-23 凯基有限公司 The two-sided electrolytic copper plating device of volume to volume and its copper electroplating method for flexible circuit board
KR102197865B1 (en) * 2018-11-29 2021-01-05 삼원액트 주식회사 Method for producing FCCL

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02228492A (en) * 1989-03-02 1990-09-11 Nkk Corp Production of zinc alloy electroplated steel sheet
JPH09241886A (en) * 1996-03-06 1997-09-16 Kawasaki Steel Corp Method for preventing pressed flaw in electroplated metalllic strip and device therefor
JP4759834B2 (en) * 2001-04-25 2011-08-31 凸版印刷株式会社 Electroplating equipment for film carriers
KR101022445B1 (en) * 2003-12-29 2011-03-15 주식회사 포스코 System for ing for and method for

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104775146A (en) * 2015-03-06 2015-07-15 东莞宇宙电路板设备有限公司 Reel-to-reel continuous horizontal high-current electroplating system
TWI563130B (en) * 2015-09-21 2016-12-21 Triumphant Gate Ltd

Also Published As

Publication number Publication date
JP2015048532A (en) 2015-03-16
JP5774669B2 (en) 2015-09-09
KR20150026728A (en) 2015-03-11
TWI513859B (en) 2015-12-21

Similar Documents

Publication Publication Date Title
TWI513859B (en) Electroplating apparatus for manufacturing flexible printed circuit board
US6238529B1 (en) Device for electrolytic treatment of printed circuit boards and conductive films
TWI716130B (en) Electroplating device
KR20070041227A (en) Jig for electroplating and electroplating equipments comprising the same
JP5673582B2 (en) Pretreatment method for electroplating and method for producing copper clad laminated resin film by electroplating method including the pretreatment method
JP7107190B2 (en) Method for manufacturing copper-clad laminate
US6979391B1 (en) Method and device for the electrolytic treatment of electrically conducting structures which are insulated from each other and positioned on the surface of electrically insulating film materials and use of the method
JP7070012B2 (en) Electroplating equipment and method for manufacturing metal-clad laminates
CN104775146A (en) Reel-to-reel continuous horizontal high-current electroplating system
JP6367664B2 (en) Partial plating method and apparatus
CN104514028A (en) Electroplating equipment
KR100762048B1 (en) Metal thin film Electrolysing machine for manufacturing metal thin film capable of reducing transverse deviation of weight
JP4225919B2 (en) Plating line and method by conveyor for electrolytic metal plating of processed products
KR200430588Y1 (en) Shielding panel for Uniform plating
KR200358909Y1 (en) Electroplating apparatus obtain two-sided uniform plated layer
KR100727270B1 (en) Plating electrode structure for manufacturing printed circuit board and electroplating device thereof
KR20230015910A (en) Plating bath, plating device and electrolytic plating method
TWM460879U (en) Plating device
JP6893849B2 (en) Plating equipment for printed wiring boards and metal jigs
JP2007224365A (en) Electroplating method and electroplating device
KR20230154010A (en) Distribution system for process fluids for chemical and/or electrolytic surface treatment of substrates
KR19980014624A (en) Spray electroplating method
WO2023106914A1 (en) Device and method for electrolytic treatment of substrates
KR20210008772A (en) An apparatus for a horizontal plating
JP2004176102A (en) Electroplating apparatus and method for forming electroplated film

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees