TW201448658A - Metal heating element and heating structure - Google Patents

Abstract

A metal heating element and a heating structure can heat the processing target at s high temperature within a short time, suppress permanent expansion, and have a long life and a high degree of freedom with respect to forming. The metal heating element has a hollow linear shape that is formed by helically winding a long flat metal sheet, the vertical cross-sectional diameter of the metal heating element with respect to the longitudinal direction being 0.5 to 10 times the width of the flat metal sheet and equal to or more than 5 times the thickness of the flat metal sheet, and being 35 mm or less.

Description

Metal heating element and heating structure

The present invention relates to a metal heating element and a heat generating structure.

In the manufacturing process of semiconductors, etc., a flat-plate heater is used for the heat-generating structure system for firing electronic components (for example, refer to Citation 1 (Japanese Patent Laid-Open Publication No. 2001-273973)), a cylindrical heater [ For example, refer to Patent Document 2 (Japanese Patent Laid-Open No. Hei 5-215473).

In the above-described flat heater and cylindrical heater, a metal wire (heating wire) belonging to a metal heating element is often a round wire having a circular cross section made of a metal such as a nickel-chromium alloy, and the round wire is known to have a cross-sectional diameter of 0.1. A thin line of ~4mm or so and a thick line with a cross-sectional diameter of about 5mm~10mm.

Since the thin wire is easily bent and processed, it can be closely arranged in accordance with the shape of the base body to be placed. For example, as shown in FIG. 8, the round wire 11 is formed into a coil shape and embedded in the wall surface of the base body 12 composed of the heat insulating material. The slit S is provided and fixed, or as shown in FIG. 9, the round wire 11 is formed into a wave shape, and is fixed to the wall surface of the base body 12 made of a heat insulating material by the wire fixing member 13, and is then supplied to the object to be processed. Heat treatment.

On the other hand, the above-mentioned thick line is lower than the thin line, and since the degree of freedom of forming is inferior, for example, it is fixed to the wall surface or the like in a state of spirally surrounding the inner wall surface of the cylindrical heater, and the object to be treated is heated. deal with.

The above-mentioned metal thin wire and thick wire are rounded in section, so each unit will be The surface area of the weight is maximized, and the object to be treated can be efficiently heated.

[Previous Technical Literature] [Patent Literature]

Patent Document 1: Japanese Patent Laid-Open No. Hei 5-215473

Patent Document 2: Japanese Patent Laid-Open Publication No. 2001-273973

In recent years, with the growth of the semiconductor industry, it has been desired to heat the heat-generating structure of the object to be processed in accordance with high temperature and for a short period of time.

In order to heat the object to be treated in a short time, it is considered to increase the number of windings when forming the thin wire into a coil shape as shown in FIG. 8, or by forming the above-mentioned fine wire into a waveform as shown in FIG. The method of reducing the gap width provided between the round lines (thin lines), increasing the density of the thin lines, and increasing the surface area.

However, when the number of windings is increased when the thin wire is formed into a coil shape, or the gap width is narrowed when the thin wire is formed into a wave shape, the length of the thin wire is increased. The resistance R[Ω] of the thin wire is such that when the resistivity of the same thin wire is ρ [Ω‧m], the length is L[m], and the cross-sectional area is A[m ² ], R=ρ(L/ A) indicates that if the length L of the thin wire increases, the resistance R of the thin wire also increases. When the voltage P (W) at the time of energization is V (V), the relationship between the electric resistance and the resistance R [Ω] is expressed by P = V ² /R, and thus the thin wire resistance R is increased. It means that the power P(W) is lowered, that is, the work (heat generation) per unit time caused by the energized electric energy is lowered, so that it is difficult to perform high temperature and short-time heating.

On the other hand, as described above, the above-described thick line has a low degree of freedom in forming, and it is difficult to perform free deformation processing corresponding to the shape of the base (low shape tracking property), and it is difficult to use the installation form. The change achieves a heating boost.

Further, although the above-mentioned metal wire is also proposed to have a long strip-shaped metal flat plate (belt line), the above-mentioned strip line is smaller than the round line, and since the surface area per unit weight is small, consideration of heating property or the like is considered. There will be a situation in which it is difficult to use as a metal wire.

Further, the belt line system is similar to the thick line described above, and generally has a lower degree of freedom in forming than the thin line. Therefore, as shown in Fig. 10, the fixing method of the wall surface of the base body 12 made of a heat insulating material is limited. In the method of cutting out the flat plate F and processing the corrugated plate 11 into a corrugated plate 11 by the wire fixing member 13, it is known from the review by the inventors of the present invention that the corrugated plate 11 is repeatedly subjected to the heating-cooling process. Thermal expansion and thermal contraction occur in the longitudinal direction, and particularly when heating is performed at a high temperature, permanent expansion and warpage due to the permanent expansion are likely to occur in the longitudinal direction of the corrugated plate.

Therefore, the wavy flat plate is easily detached from the wall surface due to permanent expansion, for example, or the ridge portions adjacent to the corrugated plate are caused to be in an overheated state due to the occurrence of an overheating state between the ridge portions, thereby causing the life of the wavy plate to be lowered and difficult to be uniform. heating.

Under such circumstances, an object of the present invention is to provide a metal heating element and a heat generating structure which are capable of heating a workpiece at a higher temperature and for a short period of time, suppressing permanent expansion, and having a long life and high degree of freedom in molding.

In order to achieve the above object, the inventors of the present invention have conducted intensive studies, and the results have been completely unexpected. It has been found that even a conventional metal flat plate having a low degree of freedom in forming can be wound into a spiral shape and hollow. In the case of the metal heating element which is formed by winding the spiral-shaped flat plate into a spiral shape and hollowing out, it is possible to solve the technical problem of a thin wire or a thick wire metal heating element.

On the other hand, according to the review by the inventors of the present invention, it is known that the above-mentioned elongated metal is flat. The metal heating element in which the plate is wound into a spiral shape and hollowed out is thermally expanded and thermally contracted every time the heating-cooling process is repeated, and the degree of thermal expansion and heat shrinkage is in accordance with a metal wound into a spiral shape. Since the inner peripheral side and the outer peripheral side of the flat plate are different, the metal flat plate is cracked due to thermal expansion and thermal contraction.

The inventors of the present invention have further examined and found that the relationship between the vertical cross-sectional diameter in the longitudinal direction (the outer diameter of the vertical cross-section) and the thickness of the metal flat plate and the thickness can be suppressed by a predetermined relationship. The present invention was first completed in accordance with the findings based on the occurrence of cracks due to thermal expansion and thermal contraction between the inner peripheral side and the outer peripheral side of the metal flat plate.

That is, the present invention provides the following: (1) A metal heating element which is formed by winding a long metal flat plate into a spiral shape to form a hollow line; the vertical cross-sectional diameter in the longitudinal direction is the above The metal heating element according to the above (1), wherein the thickness of the metal plate is 0.5 to 10 times the width of the metal plate, and the thickness of the metal plate is 5 times or more, and the length is 35 mm or less. The metal heating element according to the above aspect (1), wherein the metal flat plate has a lateral width of 5 to 30 mm, and the metal flat plate has a thickness of 0.3 to 3.0 mm; (4) The metal heating element according to the above aspect, wherein the metal flat plate has a width of 5 to 30 mm, and the metal flat plate has a thickness of 0.3 to 3.0 mm; (5) the above (1) to (1) (4) The metal heating element according to any one of the preceding claims, wherein the gap width formed between the metal flat plates wound in a spiral shape is 0.2 to 4 times the lateral width of the metal flat plate; (6) a heat generating structure The body is provided with: a base body composed of a heat insulating material; and a long strip of gold fixed by the base body Spirally winding a flat plate, so that all the hollow (7) The heat generating structure according to the above aspect (6), wherein the metal heat generating system is fixed to a trench having a width extending from the inside toward the surface of the base wall surface; (8) as described above (6) The metal heat generating body according to any one of the above (1) to (5), wherein the metal heat generating body according to the above (6) or (7) A heat generating structure in which the heating structure system heating device is used.

According to the present invention, since the metal heat-generating system is wound into a spiral shape by a long strip-shaped metal flat plate (belt line), even if the length of the strip line is long, the thermal expansion force generated along the longitudinal direction of the strip line is obtained. The dispersion is dispersed in the central axis direction of the spiral metal heating element or in the vertical cross-sectional direction (cross-sectional diameter direction) of the longitudinal direction of the metal heating element, and the permanent expansion can be effectively suppressed even if heated at a high temperature.

Further, according to the present invention, since the vertical cross-sectional diameter in the longitudinal direction of the metal heating element is defined in accordance with the relationship between the width and the thickness of the metal flat plate, the inner peripheral side of the metal flat plate can be effectively suppressed. Cracking due to poor thermal expansion and thermal contraction on the outer peripheral side occurs.

Further, according to the present invention, since the metal heat-generating system is formed by winding a long metal-shaped flat plate (belt line) into a spiral shape and hollow-lined, it is bent under a thick line having the same cross-sectional diameter. When the processability is improved, the degree of freedom of processing can be effectively improved.

Further, according to the present invention, since the metal heating element is not composed of a thin wire but a wide metal flat plate (belt line), not only the surface area per unit length is increased, but also the sectional area A is increased, so that even with a thin wire roll Winding the same number of windings (even if the length L is the same), but according to the formula R = ρ (L / A), the resistance R will decrease, so according to the formula P = V ² / R, the power P (work per unit time) will Increase, heating can be performed in a short time and at a high temperature.

Therefore, according to the present invention, it is possible to provide a metal heating element and a heat generating structure which can heat the object to be processed at a high temperature and for a short period of time, can suppress permanent expansion, have a long life, and have high degree of freedom in molding.

1‧‧‧Metal heating element

2‧‧‧Substrate consisting of insulation

2a, 2b‧‧‧ substrate

4‧‧‧Substrate surface

5‧‧‧ Ditch hole

11‧‧‧Electric heating line

12‧‧‧Substrate consisting of insulating materials

13‧‧‧Wire fixings

F‧‧‧ tablet

H‧‧‧Electric heating line open flat panel heater

S‧‧ slit

Fig. 1 is a view showing an example of a metal heating element of the present invention.

Fig. 2 is a front view showing an example of the metal heating element of the present invention and (b) a vertical cross section of the x-x' line of the front view (a vertical cross section of the longitudinal direction of the metal heating element 1).

3 is a schematic cross-sectional view showing a heat generating structure of the present invention, (a) a schematic view of a metal heating element fixed in a U-shaped groove provided in the base, and (b) a schematic cross-sectional view of the metal heating element fixed in the V-shaped groove provided in the base, And (c) a schematic cross-sectional view of the embedded metal heating element embedded in the substrate.

Fig. 4 is a view showing an example of a heat generating structure of the present invention.

Fig. 5 is a perspective view showing an example of a heat generating structure of the present invention.

Fig. 6 is a schematic cross-sectional view showing the heat generating structure shown in Fig. 5.

Fig. 7 is a view showing an example of a heat generating structure of the present invention.

Fig. 8 is an explanatory view showing a method of setting a thin wire pair base.

Fig. 9 is an explanatory view showing a method of setting a thin wire pair base.

Fig. 10 is an explanatory view showing a method of setting a base plate of a conventional metal plate.

First, the metal heating element of the present invention will be described.

The metal heat-generating system of the present invention is formed by winding a long metal-shaped flat plate into a spiral shape and forming a hollow line, and is characterized by a vertical cross-sectional diameter in a longitudinal direction. It is 0.5 to 10 times the width of the above-mentioned metal flat plate, and 5 times or more the thickness of the above-mentioned metal flat plate, and is 35 mm or less.

An example of the metal heating element of the present invention is shown in Fig. 1. As illustrated in Fig. 1, the metal heating element 1 of the present invention is formed by winding a long metal flat plate F into a spiral shape and having a hollow line.

Fig. 2 is a front view of (a) a front view and (b) a front view of the metal heating element 1 of the present invention, and a cross section of the x-x' line (a vertical cross section in the longitudinal direction of the metal heating element 1).

As shown in Fig. 2(a), the metal heating element of the present invention preferably has a lateral width W of 5 to 30 mm, more preferably 5 to 25 mm.

As shown in Fig. 2(b), the metal heating element of the present invention preferably has a thickness T of a strip-shaped metal flat plate F of 0.3 to 3.0 mm, more preferably 0.4 to 2.0 mm, and particularly preferably 0.5 to 1.0 mm.

Further, in the metal heating element of the present invention, the lateral width and thickness of the elongated metal flat plate are values measured by a vernier caliper.

In the metal heating element of the present invention, the width and thickness of the elongated metal flat plate are within the above range, so that the processing of the spiral shape is facilitated, and the operability (operational comprehensiveness) can be easily improved. When used for heating, high temperature and short time heating can be easily performed.

In the metal heating element of the present invention, the length in the longitudinal direction of the elongated metal flat plate is matched with the length of the metal heating element, the vertical cross-sectional diameter of the metal heating element, the number of windings of the metal flat plate, and the formation between adjacent metal plates. The width of the gap is appropriately determined.

In the metal heating element of the present invention, the constituent material of the elongated metal flat plate is removed before it is usually used as a heating wire constituent material, and the rest thereof is not particularly limited, and for example, a material containing Ni and Cr as an essential component may be contained. Those containing Ni, Cr, and Fe as essential components, those containing Fa, Cr, and Al as essential components, and containing Pt as an essential component, There are those who take W as an essential component.

The constituent material containing Ni and Cr as essential components may contain, for example, Ni: 70 to 90% by mass and Cr: 10 to 30% by mass, and the total content of Ni and Cr in the above-described range is preferably 100. quality%.

The constituent material containing Ni, Cr, and Fe as essential components may contain, for example, Ni: 30 to 65 mass%, Cr: 10 to 25 mass%, and Fe: 20 to 50 mass%, and Ni in the above-mentioned range The total content of Cr and Fe is preferably 100% by mass.

The constituent material containing Fe, Cr, and Al as essential components may, for example, contain Fe: 65 to 85% by mass, Cr: 12 to 25% by mass, and Al: 3 to 7 mass%, and Fe in the above-mentioned range The total content of Cr and Al is preferably 100% by mass.

The constituent material containing Pt as an essential component may contain, for example, Pt: 80 to 100% by mass.

The constituent material containing W as an essential component may be, for example, W: 90 to 100% by mass, and preferably only W.

In the metal heating element of the present invention, the vertical cross-sectional diameter (outer cross-sectional outer diameter) in the longitudinal direction of the component symbol D in Fig. 2(b) is 35 mm or less, preferably 4 to 35 mm, more preferably 5 to 25 mm. , especially good 6~25mm.

In the metal heating element of the present invention, as shown by the symbol D in Fig. 2, the vertical cross-sectional diameter (outer cross-sectional outer diameter) in the longitudinal direction is 0.5 to 10 times the lateral width of the metal flat plate, preferably a metal. 0.5 to 5 times the width of the plate.

In the metal heating element of the present invention, as shown by the reference symbol D in Fig. 2(b), the vertical cross-sectional diameter (outer cross-sectional outer diameter) in the longitudinal direction is five times or more the thickness of the metal flat plate, and the metal plate is preferably used. 5 to 50 times the thickness, and 8 to 27 times the thickness of the metal plate.

The metal heat-generating system of the present invention is within the above range by the vertical cross-sectional diameter in the longitudinal direction, and when used as a heating wire, permanent expansion can be suppressed, and high-temperature and short-time heating can be easily performed for a long period of time.

According to the present invention, since the vertical cross-sectional diameter in the longitudinal direction of the metal heating element is defined in accordance with the relationship between the lateral width and the thickness of the metal flat plate, the inner peripheral side and the outer peripheral side of the flat plate made of metal can be effectively suppressed. Cracks caused by poor thermal expansion and heat shrinkage.

In the metal heating element of the present invention, as shown by the reference symbol G in Fig. 2(a), a gap width is formed between the metal flat plates wound in a spiral shape, preferably 0.2 to 4 times the width of the metal flat plate F. Preferably, it is 0.5 to 2 times, more preferably 0.8 to 1.2 times.

In the metal heating element of the present invention, the distance between the metal flat plates wound in a spiral shape as shown by the symbol P in Fig. 2(a) is 0.2 to 4 times the width of the metal flat plate, preferably 0.5 to 2 Times.

Further, in the present specification, the vertical cross-sectional diameter in the longitudinal direction, the gap width formed between the metal flat plates wound in a spiral shape, and the distance between the metal flat plates wound in a spiral shape are measured by a vernier caliper. value.

In the metal heat generating system of the present invention, the gap width formed between the metal flat plates wound in a spiral shape or the distance between the metal flat plates wound in a spiral shape is set within the above range, and when used as a heating wire It can suppress permanent expansion and can easily perform high temperature and short-time heating for a long period of time.

The method for producing the metal heating element of the present invention is, for example, a long metal plate made of a desired metal material and having a desired width and thickness, and a metal round bar having a desired cross-sectional diameter at a desired interval. It can be made by the number of volumes.

In the metal heat-generating system of the present invention, a long strip-shaped metal flat plate (belt line) is wound into a spiral shape and hollowed out, whereby the strip length can be made even if the length of the strip line is long. The thermal expansion force generated in the longitudinal direction of the wire is dispersed in the cross-sectional diameter direction of the metal heating element, and the permanent expansion can be effectively suppressed even if heated at a high temperature.

Furthermore, the metal heat-generating system of the present invention winds a long strip-shaped metal flat plate (belt line) into a spiral shape and hollows out, so that it is bent under processing compared to a thick line having the same cross-sectional diameter. The processability is improved, so that the degree of freedom of processing can be effectively improved.

Furthermore, since the metal heating element of the present invention uses a wide metal flat plate (belt line) instead of a thin wire, not only the surface area per unit length is increased, but also the cross-sectional area A is increased, even with the thin wire winding. The same number of windings (even if the length L is the same), but the resistance R according to the formula R = ρ (L / A) will decrease, so the power P (work per unit time) according to the formula P = V ² / R will increase It can be heated in a short time and at a high temperature.

The metal heat-generating system of the present invention is suitably used as a heating wire, and it is preferable to use a heating wire used for a heat-generating structure.

Next, the heat generating structure of the present invention will be described.

The heat generating structure according to the present invention is characterized in that it includes a base body made of a heat insulating material, and a metal heat generating body fixed to the base body by a long metal flat plate spirally wound and hollowed out.

The heat generating structure of the present invention is preferably a heating device, and the heating device may be, for example, a plate heater or a cylindrical heater, preferably a flat plate heater.

In the heat-generating structure of the present invention, the substrate composed of the heat insulating material is not particularly limited, and it is preferred to use a desired heat insulating material as a target shape.

The base system composed of the above-mentioned heat insulating material may, for example, contain inorganic fibers as a main material, and more preferably contain inorganic particles and inorganic binders, and preferably inorganic fibers and inorganic binders.

The above inorganic fibers may be, for example, from aluminum silicate fibers and mullite fibers. One or more of the vitamins, alumina fibers, and the like are selected, and among them, aluminum silicate fibers are excellent in heat resistance at 1200 ° C and low in cost, and thus are suitable for use.

The inorganic particles may be, for example, one or more selected from the group consisting of CaO powder, SiO ₂ powder, ettringite powder, alumina powder, mullite powder, and zirconia powder, wherein the alumina powder is highly heat-resistant. Sexual and low cost, so it is suitable for use.

The inorganic binder may be one or more selected from the group consisting of colloidal cerium oxide and alumina sol, for example.

In the case where the substrate composed of the heat insulating material contains the inorganic fiber and the inorganic binder, the heat insulating material preferably contains 100 to 300 parts by mass of the inorganic fiber based on 100 parts by mass of the inorganic binder.

The heat insulating material constituting the above-mentioned substrate contains, for example, 50 to 95% by mass (preferably 50 to 90% by mass) of the inorganic fibers, 5 to 30% by mass of the inorganic binder, and 0 to 30% of the particulate heat-resistant inorganic material (inorganic powder). %, preferably 5 to 30 parts by mass.

In the heat-generating structure of the present invention, the heat insulating material constituting the substrate preferably has a void ratio of 50% or more, more preferably 70 to 98%, and particularly preferably 80 to 95%.

In the present specification, the above-described void ratio means a value calculated by the following formula based on the ratio of the total volume of voids present in the heat insulating material to the volume of the heat insulating material.

Void ratio (%) = [1 - the specific gravity of the insulation material / the true specific gravity of the insulation material] × 100

When the porosity of the heat insulating material is within the above range, a heat generating structure having a small heat capacity, a low thermal conductivity, a light weight, and a strong thermal shock can be easily obtained.

In the heat generating structure of the present invention, the bulk density of the heat insulating material constituting the substrate is preferably 1.5 g/cm ³ or less, more preferably 0.1 to 1.2 g/cm ³ , and particularly preferably 0.15 to 0.7 g/cm ³ .

If the bulk density exceeds 1.5 g/cm ³ , the thermal conductivity and the heat capacity become large, which makes it difficult to apply as a heat insulating material.

In the heat-generating structure of the present invention, the thermal expansion coefficient of the heat insulating material constituting the substrate is preferably 10 × 10 ^-6 / ° C or less, more preferably 8 × 10 ^-6 / ° C or less. If the coefficient of thermal expansion exceeds 10 × 10 ^-6 / ° C, the thermal shock is likely to be weak.

In the present specification, the coefficient of thermal expansion refers to a value measured in accordance with JIS-R1618 "Method for Measuring Thermal Expansion of Precision Ceramics According to Thermal Mechanical Analysis".

In the heat generating structure of the present invention, the bending strength of the heat insulating material constituting the substrate is preferably 0.7 MPa or more, and more preferably 1.0 MPa or more.

Further, in the present specification, the bending strength means a value measured in accordance with JIS A9510.

The heat generating structure of the present invention is preferably constructed by fixing the metal heating element of the present invention to a substrate.

The details of the metal heating element of the present invention are as described above.

The heat generating structure system of the present invention is formed by fixing a metal heat generating body to a wall surface of a base material made of a heat insulating material. Specifically, for example, a metal heat generating body may be embedded (or embedded) in a trench portion provided on a base wall surface made of a heat insulating material. Or a metal heating element is fixed to a surface of a base wall surface made of a heat insulating material by a fixing device or the like.

In the heat-generating structure of the present invention, it is preferable that the metal heat-generating body is detached, and it is preferable to embed (or embed) the metal heat-generating body in the groove portion provided on the base wall surface made of the heat insulating material.

When the heat generating structure system of the present invention is formed by embedding a metal heating element in a trench portion provided with a heat insulating material, the shape of the trench portion is not particularly limited, as shown in the cross-sectional view of FIG. 3(a), the metal The heating element 1 is fixed to a U-shaped ditch having a cross section formed on the wall surface of the base 2 made of a heat insulating material.

In this case, the heating structure system can be embedded in the trench only by the metal heating element 1 The metal heating element 1 may be embedded and fixed in the trench by a fixing means such as a pin.

In the heat generating structure system of the present invention, in the case where the metal heating element is fixed to the groove portion provided in the wall surface of the heat insulating material, the heat generating structure of the present invention is preferably provided with the metal heating element fixed to the base wall surface from the inside. In the ditches with an enlarged width toward the surface. The trench system having an enlarged width from the inside to the surface can be, for example, as shown in a cross-sectional view in Fig. 3(b), and the metal heating element 1 is embedded in a trench provided in a wall surface of the base 2 composed of a heat insulating material and having a V-shaped cross section.

In this case, in the heat generating structure system, the metal heating element 1 can be embedded and fixed only in the trench, or the metal heating element 1 can be embedded and fixed in the trench by a fixing means such as a pin.

In the heat-generating structure of the present invention, the metal heat-generating body is fixed to the wall surface of the base body and provided with an enlarged-width groove from the inside toward the surface, so that heat can be efficiently radiated from the metal heat-generating body toward the outside of the base body.

In the heat generating structure system of the present invention, when the metal heating element is fixed to the trench portion provided on the base wall surface of the heat insulating material, the heat generating structure of the present invention is, for example, schematically shown in Fig. 3(c). The metal heating element 1 may be embedded in the inside of the slightly tunnel-shaped trench provided inside the wall surface of the base 2 and having an opening in the top plate portion.

In this case, the metal heating element 1 can be embedded and fixed only in the trench, or the metal heating element 1 can be embedded in the trench, and can be fixed in the trench by using a fixing device such as a pin. It can still be fully fixed to the wall.

In the heat-generating structure system of the present invention, when the metal heat generating body is fixed to the wall surface of the base body made of the heat insulating material by a fixing device or the like, the metal heat generating body is preferably fixed to the wall surface of the base body made of the heat insulating material by a pin or the like.

The heat generating structure system of the present invention may be, for example, a cylindrical heater, a plate heater or the like.

Fig. 4 is a perspective view showing a configuration of a cylindrical heater of the heat generating structure system of the present invention (a perspective view).

The cylindrical heater h shown in Fig. 4 is a heating device or the like which is a diffusion furnace. In the same figure, the cylindrical heater h is provided with a base 2 made of a heat insulating material and a metal heating element of the present invention. The coil-shaped heating wire 1 is a structure in which a base member 2 made of a heat insulating material has a holding member (support member) that is housed inside the heating wire 1 and accommodated therein.

As shown in the enlarged view in the lower left circle of Fig. 4, the present embodiment is wound on a spiral surface of the inner surface of the base 2 made of a heat insulating material to fix the coiled heating wire 1 composed of the metal heating element of the present invention, as shown in Fig. 4. As shown in the figure, the base 2 composed of a heat insulating material has a function of a holding member (support member) that is housed inside the heating wire 1 and accommodated therein.

In the aspect shown in Fig. 4, the heating wire 1 is held (supported) by being covered with the base member 2 made of a heat insulating material. However, as the cylindrical heater, the electric wire 1 can be used (not shown) for the wire fixing member. It is fixedly held on the inner side surface of the base 2 composed of a heat insulating material.

In addition, FIG. 5 and FIG. 6 show a structural example in the case where the heat generating structure of the present invention is a flat panel heater.

Fig. 5 is an external view (a perspective view) of the electric heating wire open type flat heater, and Fig. 6 is a partially cutaway side view showing the assembly method in the manufacturing process of the flat plate heater.

Further, Fig. 7 is a side cross-sectional view showing the electric heating wire embedded type flat heater.

The electric heating wire open type flat heater h shown in FIG. 5 and FIG. 6 is formed by winding a long metal flat plate into a spiral shape by using a heating wire to form a metal heating element having a hollow line. The other structure has the same structure as the electrothermal heater described in Japanese Laid-Open Patent Publication No. 2001-273973, and includes a base body 2a and 2b made of a heat insulating material, a trench hole 5 formed in the vicinity of the surface portion 4 of the heat insulating material 2a, and A heating wire disposed in the trench hole 5 and composed of a metal heating element.

As shown in FIG. 5 and FIG. 6, the trench holes 5 are formed in parallel with a plurality of spacers at an appropriate pitch, and a heat releasing trench portion (opening portion) for releasing heat to the outside is formed on the surface portion 4 of the base 2a made of a heat insulating material. And the formation of open ditches.

In addition, FIG. 7 is a side cross-sectional view of a heater-embedded flat-plate heater. In FIG. 7, the same components as those in FIGS. 5 and 6 are denoted by the same reference numerals, and the description is omitted, and only the differences are explained. .

That is, the electric heating wire embedded type flat heater shown in Fig. 7 has a different shape of the trench hole 5 formed by the base 2c made of a heat insulating material than the electric heating wire open type flat heater shown in Figs. 5 and 6 . As shown in FIG. 7, the trench hole 5 does not have a heat release opening. In the electric wire embedded type flat panel heater shown in Fig. 7, the thinner the thickness t of the surface portion 4, the higher the heat release efficiency. Further, in the heater-embedded flat panel heater shown in Fig. 7, since the surface portion 4 is a planar heat generating body, the temperature rise characteristic is lowered as compared with the heater-opening flat panel heater shown in Figs. 5 and 6 . However, the radiation efficiency after heating is increased.

The electric heating wire open type flat panel heater shown in FIG. 5 and FIG. 6 and the electric heating wire embedded type flat panel heater shown in FIG. 7 are in the vicinity of the surface portion of the heat resistant base material which is a position at which the groove portion is formed. The position of the heat generating structure such as a heater is not particularly limited, and may be the same as the electric heating coil installation position of the conventional hot wire open type flat heater or the electric wire buried type flat heater.

In the electric heating wire open type flat heater shown in Fig. 5 and Fig. 6, the base bodies 2a and 2b made of a heat insulating material may be made of the same material or may be made of different materials. Further, in the heater-embedded flat panel heater shown in Fig. 7, the base members 2c and 2b made of a heat insulating material may be made of the same material or may be made of different materials.

Further, the electric heating wire open type flat heater shown in FIG. 5 and FIG. 6 and the electric heating wire embedded type flat heater shown in FIG. 7 fix the heating element to the base body made of the heat insulating material. The shape is not particularly limited, and as described later, after the base having the trench portion is formed, the metal heating element is embedded in the trench portion, and the wire fixing member may be used after the base having the trench portion is formed. When the fixing tool is fixed, it is also possible to integrally form the slurry for forming the substrate and the metal heating element into an integrated product and fix it in the molding die.

Next, a method of producing the heat generating structure of the present invention will be described.

In the method of producing the heat-generating structure of the present invention, for example, after the inorganic fiber-containing slurry is subjected to dehydration molding to form a molded body, the obtained molded body is subjected to a drying treatment to prepare a substrate composed of a heat insulating material, and then fixed. A method of heating a metal body.

In addition to the inorganic fibers, the inorganic fiber-containing slurry may contain inorganic particles, an inorganic binder, and the like, and may further contain a coagulant or a coacervation auxiliary material as necessary.

The liquid medium for forming the slurry is not particularly limited, and may be, for example, water or a polar organic solvent, and the polar organic solvent may be, for example, a monohydric alcohol such as ethanol or propanol or a glycol such as ethylene glycol. In the liquid medium, water is preferably used in consideration of the working environment, environmental load, and the like. Further, the water is not particularly limited and may be, for example, distilled water, ion-exchanged water, tap water, ground water, industrial water, or the like.

The blending amount of each raw material in the slurry is appropriately determined, and the slurry concentration (that is, the total content of the molded material in the slurry) is preferably 0.1 to 10% by weight, more preferably 0.5 to 5% by weight. By setting the slurry concentration within the above range, it can be easily formed.

In the present specification, the slurry is also a medium other than water in the liquid medium. In the present specification, the case where the liquid medium other than water is removed is also referred to as "dehydration molding".

The dehydration forming method is not particularly limited, for example, a mesh is provided at the bottom. A suction dehydration molding method, a pressure dehydration molding method, a suction pressure dehydration method, and the like which flow into the slurry in the mold and suction the liquid medium such as water.

The dehydrated product obtained by the above-described dehydration molding method preferably has a corresponding shape of the substrate to be obtained, and is, for example, a cylindrical shape, a bottomed cylindrical shape, or a flat plate shape.

The obtained dehydrated molded product is dried using a suitable dryer or the like. The drying temperature is preferably 40 to 180 ° C, more preferably 60 to 150 ° C, and particularly good 80 to 120 ° C. Further, the drying time is preferably 6 to 48 hours, more preferably 8 to 40 hours, and particularly good for 10 to 36 hours. Further, the ambient gas during drying may be, for example, an air ambient gas, an oxygen ambient gas, a nitrogen ambient gas or the like.

The dried dehydrated product may be provided as a substrate as it is, or may be provided as a substrate after being fixed to a trench portion or the like of a metal heating element or the like by mechanical processing such as cutting or cutting.

Further, the formed body may be subjected to a calcination treatment after the above drying or mechanical processing to provide a substrate.

The calcination temperature at the time of calcination is preferably 600 to 1300 ° C, more preferably 700 to 900 ° C. Further, the ambient gas during calcination is not particularly limited, and is preferably an air ambient gas, an oxygen ambient gas or a nitrogen ambient gas. The calcination time is preferably 0.5 to 4 hours.

By performing the calcination treatment, it is possible to prevent the molded product from being degreased and shrinkage in actual use.

The method of fixing the metal heating element to the wall surface of the base body made of the heat insulating material obtained by the above method is not particularly limited, and it may be embedded in a wall surface of the base material which is made of a heat insulating material, or fixed by a fixing means.

Specifically, for example, as shown in FIG. 5 and FIG. 6 , the base bodies 2 a and 2 b made of a heat insulating material are separately formed as individual members, and then the back surface of the base body 2 a made of a heat insulating material is placed in the trench hole 5 . The heating wire 1 composed of the metal heating element is then fixed by assembling the base 2b made of a heat insulating material.

Further, by using a fixing means such as a wire fixing member (not shown), the metal heating element may be fixed to a wall surface of the base body made of a heat insulating material.

In the method of producing the heat generating structure of the present invention, for example, after preparing a slurry containing a material for forming a heat insulating material, the slurry may be injected into a forming mold in which a metal heating element is fixed, and subjected to dehydration forming and drying treatment to form a fixed portion. A metal heating element and a method of forming a substrate from a heat insulating material, and a base body made of a heat insulating material may be formed in the manufacturing process of the heat generating structure.

In the method, the metal heating element is coexisted in the case where the substrate is made of a heat insulating material, and the slurry is prepared in the same manner as in the above method, and the target heat generating structure is obtained by dehydration molding and drying treatment.

Since the heat generating structure system of the present invention uses a metal heating element in which a long strip-shaped metal flat plate is spirally wound to form a hollow line, the permanent expansion of the metal heating element can be suppressed, and the long-term expansion can be performed. The object to be treated is heated at a higher temperature and for a short time.

In the following, the present invention will be described with reference to the embodiments, but the present invention is not limited by the examples, and the present invention is not limited by the embodiments.

(Example 1) (1) Production of metal heating element

A metal heating element having the form shown in Fig. 2 was produced.

That is, an iron-chromium-aluminum alloy long strip-shaped metal flat plate F having a width W of 10 mm as shown in Fig. 2(a) and a thickness T of 0.5 mm as shown in Fig. 2(b) is spirally wound into a spiral shape. Then, the gap width formed by the vertical cross-sectional diameter D (the vertical cross-sectional outer diameter) in the longitudinal direction shown in FIG. 2(b) is 10 mm, and the metal flat plate wound in a spiral shape as shown in FIG. 2(b) is obtained. G is 10mm, Figure 2(b) The metal heating element 1 in which the distance P between the metal flat plates wound in a spiral shape is 20 mm and the whole is hollowed out is shown.

At this time, the vertical cross-sectional diameter D (10 mm) in the longitudinal direction of the metal heating element 1 corresponds to 1.0 times the horizontal width W (10 mm) of the metal flat plate, and corresponds to 20 times the thickness T (0.5 mm) of the metal flat plate. . In addition, the width G (10 mm) of the gap formed between the metal flat plates F which are formed in a spiral shape by the metal heating element 1 corresponds to 1.0 times the lateral width W (10 mm) of the above-mentioned metal flat plate F.

(2) Fabrication and heat release test of heating structure

The cylindrical form shown in FIG. 4 is composed of a heat insulating material containing 80% by mass of aluminum silicate fiber, 55% by mass of colloidal ceria belonging to an inorganic binder, and 15% by mass of alumina particles, and has The inner surface of the base body 2 having an inner diameter of 400 mm, an outer diameter of 500 mm, and a length of 600 mm is wound into a spiral shape by the metal heating element 1 obtained in (1), and fixed by a wire fixing member to obtain a heat generating structure ( Cylindrical heater h).

Then, heat is applied from both ends of the metal heating element to release heat, and as a result, the internal temperature of the substrate 2 can be raised to 1000 ° C in 20 minutes.

The metal heating element which is formed in the spiral structure by the heat generating structure (cylindrical heater h) is energized at both ends, heated to 1200 ° C and heated, and then naturally cooled to room temperature to heat-cool The treatment was set to one cycle, and after performing a heating-cooling treatment for 500 cycles, the surface state of each of the metal heating elements was observed, and as a result, no abnormality was observed.

(Example 2) (1) Production of metal heating element

A metal heating element having the form shown in Fig. 2 was produced.

An iron-chromium-aluminum alloy long strip-shaped metal flat plate F having a width W of 6 mm and a thickness T of 0.5 mm as shown in Fig. 2(a) is spirally wound. The gap width G formed by the vertical cross-sectional diameter D (the vertical cross-sectional outer diameter) in the longitudinal direction shown in Fig. 2(b) is 5 mm, and the metal flat plate wound in a spiral shape as shown in Fig. 2(b) is obtained. 10 mm, and the metal heating element 1 in which the distance P between the metal flat plates wound in a spiral shape is 20 mm and which is hollow in the whole is shown in Fig. 2 (b).

At this time, the vertical cross-sectional diameter D (5 mm) in the longitudinal direction of the metal heating element 1 corresponds to 0.8 times the horizontal width W (6 mm) of the metal flat plate, and corresponds to 10 times the thickness T (0.5 mm) of the metal flat plate. . In addition, the width G (10 mm) of the gap formed between the metal flat plates F which are formed in a spiral shape by the metal heating element 1 corresponds to 1.67 times the lateral width W (6 mm) of the above-mentioned metal flat plate F.

(2) Fabrication and heat release test of heating structure

A heat generating structure (cylindrical heater h) was produced in the same manner as in Example 1 (2) except that the metal heating element 1 obtained in the above (1) was used, and then heat was applied from both ends of the metal heating element to release heat. As a result, the internal temperature of the substrate 2 can be raised to 1000 ° C in 30 minutes.

The metal heating element which is formed in the spiral structure by the heat generating structure (cylindrical heater h) is energized at both ends, heated to 1200 ° C and heated, and then naturally cooled to room temperature to heat-cool The treatment was set to one cycle, and after performing a heating-cooling treatment for 500 cycles, the surface state of each of the metal heating elements was observed, and as a result, no abnormality was observed.

(Example 3) (1) Production of metal heating element

A metal heating element having the form shown in Fig. 2 was produced.

An iron-chromium-aluminum alloy long strip-shaped metal flat plate F having a width W of 20 mm as shown in Fig. 2(a) and a thickness T of 1.0 mm as shown in Fig. 2(b) is spirally wound. The gap width G of the vertical cross-sectional diameter D (the vertical cross-sectional outer diameter) in the longitudinal direction shown in Fig. 2(b) is 20 mm, and the gap width G formed between the metal flat plates wound in a spiral shape as shown in Fig. 2(b) is obtained. 15 mm and the metal heating element 1 having a hollow line in the distance P of 30 mm between the metal flat plates wound in a spiral shape as shown in Fig. 2 (b).

At this time, the vertical cross-sectional diameter D (20 mm) in the longitudinal direction of the metal heating element 1 corresponds to 1.0 times the horizontal width W (20 mm) of the metal flat plate, and corresponds to 20 times the thickness T (1.0 mm) of the metal flat plate. . Moreover, the width G (15 mm) of the gap formed between the metal flat plates F which are wound in a spiral shape constituting the metal heating element 1 corresponds to 0.75 times the lateral width W (20 mm) of the above-mentioned metal flat plate F.

(2) Fabrication and heat release test of heating structure

A heat generating structure (cylindrical heater h) was produced in the same manner as in Example 1 (2) except that the metal heating element 1 obtained in the above (1) was used, and then heat was applied from both ends of the metal heating element to release heat. As a result, the internal temperature of the substrate 2 can be raised to 1000 ° C in 15 minutes.

The metal heating element which is formed in the spiral structure by the heat generating structure (cylindrical heater h) is energized at both ends, heated to 1200 ° C and heated, and then naturally cooled to room temperature to heat-cool The treatment was set to one cycle, and after performing a heating-cooling treatment for 500 cycles, the surface state of each of the metal heating elements was observed, and as a result, no abnormality was observed.

(Reference example 1) (1) Production of metal heating element

A metal heating element having the form shown in Fig. 2 was produced.

The iron-chromium-aluminum alloy long strip-shaped metal flat plate F having a width W of 20 mm and a thickness T of 2.5 mm as shown in Fig. 2(a) is spirally wound. The gap width G of the vertical cross-sectional diameter D (the vertical cross-sectional outer diameter) in the longitudinal direction shown in Fig. 2(b) is 10 mm, and the gap width G formed between the metal flat plates wound in a spiral shape as shown in Fig. 2(b) is obtained. 15 mm and the metal heating element 1 having a hollow line in the distance P of 30 mm between the metal flat plates wound in a spiral shape as shown in Fig. 2 (b).

At this time, the vertical cross-sectional diameter D (10 mm) in the longitudinal direction of the metal heating element 1 corresponds to 0.5 times the lateral width W (20 mm) of the metal flat plate, and corresponds to four times the thickness T (2.5 mm) of the metal flat plate. . Moreover, the width G (15 mm) of the gap formed between the metal flat plates F which are wound in a spiral shape constituting the metal heating element 1 corresponds to 0.75 times the lateral width W (20 mm) of the above-mentioned metal flat plate F.

(2) Fabrication and heat release test of heating structure

A heat generating structure (cylindrical heater h) was produced in the same manner as in Example 1 (2) except that the metal heating element 1 obtained in the above (1) was used, and then heat was applied from both ends of the metal heating element to release heat. As a result, the internal temperature of the substrate 2 can be raised to 1000 ° C in 20 minutes.

The metal heating element which is formed in the spiral structure by the heat generating structure (cylindrical heater h) is energized at both ends, heated to 1200 ° C and heated, and then naturally cooled to room temperature to heat-cool The treatment was set to one cycle, and after performing a heating-cooling treatment for 500 cycles, the surface state of each of the metal heating elements was observed, and as a result, cracks appeared on the surface of the metal heating element.

(Comparative Example 1)

A long round wire (fine wire) of an iron-chromium-aluminum alloy having an outer diameter of 2 mm was used as a metal heating element.

The same procedure as in Example 1 (2) was carried out except that the above-described metal heating element 1 was used. The heat generating structure (cylindrical heater h) was then energized from both ends of the metal heating element to release heat, and as a result, the internal temperature of the substrate 2 took 45 minutes to raise the temperature to 1000 °C.

The metal heating element which is formed in the spiral structure by the heat generating structure (cylindrical heater h) is energized at both ends, heated to 1200 ° C and heated, and then naturally cooled to room temperature to heat-cool The treatment was set to one cycle, and a heating-cooling treatment was performed for 500 cycles. As a result, the metal heating element was broken at the heating-cooling treatment of the 100th cycle, and then heating could not be performed.

In each of the above embodiments and comparative examples, the lateral width W (mm) and the thickness T (mm) of the metal flat plate constituting the metal heating element, and the vertical cross-sectional diameter D (mm) of the metal heating element, and the distance P between the metal flat plates ( Mm), the width G (mm) of the gap formed between the metal flat plates, the vertical cross-sectional diameter D (mm) of the metal heating element, and the lateral width W (mm) (D/W) of the metal flat plate constituting the metal heating element And the vertical cross-sectional diameter D (mm) of the metal heating element / the thickness T (mm) of the metal flat plate (D/T), the width G (mm) of the gap formed between the metal plates / the metal constituting the metal heating element Time (minutes) and time required for the internal temperature of the heat generating structure (cylindrical heater h) using the metal heating element to be heated to 1000 ° C, and the transverse width W (mm) (G/W) of the flat plate The results of the exothermic test of 500 cycles were performed as shown in Table 1.

In the first to third embodiments, the metal heating element can be produced with high formability by winding a long metal flat plate into a spiral shape so as to have a hollow shape.

Further, from Table 1, it is understood that the metal heating elements obtained in the first to third embodiments have a vertical cross-sectional diameter D in the longitudinal direction, and are 0.5 to 10 times the width W of the metal flat plate, and are made of metal. When the thickness T of the flat plate is more than 5 times and less than 35 mm, the object to be treated can be heated to a high temperature in a short time, and even if the heating-cooling treatment for 500 cycles is repeated, the surface does not abnormal, thereby suppressing permanent expansion. And it has a long life.

On the other hand, it is understood from Table 1 that although the metal heating element obtained in Reference Example 1 can be heated in a short time, the vertical cross-sectional diameter D in the longitudinal direction is less than five times the thickness T of the metal plate, and is repeated 500. When the cycle is heated-cooled, cracks may appear on the surface.

Furthermore, the metal heating element obtained in Comparative Example 2 is known from Table 1, because It is composed of a thin wire having an outer diameter of 2 mm, so that it takes a long time to raise the temperature to 1000 ° C, and when 500 cycles of heating-cooling treatment is performed, breakage occurs at the heating-cooling treatment of the 100th cycle, which is a short life.

(industrial availability)

According to the present invention, it is possible to provide a metal heating element and a heat generating structure which are capable of heating a workpiece at a higher temperature and for a short period of time and capable of suppressing permanent expansion and having a long life and high degree of freedom of molding.

1‧‧‧Metal heating element

F‧‧‧ tablet

Claims (9)

A metal heating element is formed by winding a long metal flat plate into a spiral shape to form a hollow line; the vertical cross-sectional diameter in the longitudinal direction is 0.5 to 10 times the lateral width of the metal flat plate, and It is 5 times or more of the thickness of the above-mentioned metal plate, and is 35 mm or less. The metal heating element according to the first aspect of the patent application, wherein the vertical cross-sectional diameter in the longitudinal direction is 4 to 35 mm. The metal heating element according to claim 1, wherein the metal flat plate has a width of 5 to 30 mm, and the metal flat plate has a thickness of 0.3 to 3.0 mm. The metal heating element according to claim 2, wherein the metal flat plate has a width of 5 to 30 mm, and the metal flat plate has a thickness of 0.3 to 3.0 mm. The metal heating element according to any one of claims 1 to 4, wherein a gap width formed between the metal flat plates wound in a spiral shape is 0.2 to 4 times the lateral width of the metal flat plate. A heat generating structure comprising: a base body made of a heat insulating material; and a metal heat generating body in which the entire elongated metal flat plate fixed by the base body is spirally wound to form a hollow line. The heat-generating structure according to claim 6, wherein the metal heat-generating system is fixed to a trench provided on the wall surface of the base body and having an enlarged width from the inside toward the surface. The heat generating structure of claim 6, wherein the metal heat generating system is a metal heating element according to any one of claims 1 to 5. The heat generating structure according to claim 6 or 7, wherein the heating structure system heating device.