TW201447721A - Inspection apparatus, calibration and inspection method of the inspection apparatus - Google Patents

Abstract

The invention provides an inspection apparatus for inspecting objects such as sensor panels, the apparatus being capable of achieving calibration that cancels out errors introduced by cable stray capacitance and the like, and capable of measuring the capacitance of sensor panels on a very small scale with favorable accuracy. In a state in which the sensor panel is removed, a calibration section 46 of a sensor panel inspection apparatus 1 supplies an alternating current signal from a signal section 11 to at least one of a plurality of second cables 37, while adjusting the voltage and phase of AC power sources in a calibration signal section 42 that correspond with ammeters in a current detection section 41 electrically connected to first cables 36, so that the output of the ammeters is zero. When the output of an ammeter is zero, the voltage and phase of the AC power source at that time are recorded. When inspecting a sensor panel, alternating current signals are generated in the AC power sources in the calibration signal section 42 based on the recorded voltage and phase.

Description

Inspection device, calibration method and inspection method

The present invention is mainly directed to an inspection apparatus for an object to be inspected by an electrostatic capacitance type sensor plate or the like.

Conventionally, as one type of touch panel device for detecting a touch position, a so-called electrostatic capacitance method has been known. The sensor panel of the capacitive touch panel device has a structure in which a first pattern transparent conductive layer and a second pattern transparent conductive layer are provided on a transparent substrate formed of, for example, glass. For example, a film is formed using Indium Tin Oxide (ITO), whereby the patterned transparent conductive layer can be formed.

The two pattern transparent conductive layers are arranged perpendicularly to each other and used as electrodes, respectively. Further, in the following, the first and second patterned transparent conductive layers may be referred to as a first electrode and a second electrode. The first electrode and the second electrode are disposed to face each other with a gap in the thickness direction of the sensor plate.

According to the above configuration, a capacitor is formed at the intersection of the first electrode and the second electrode, and the capacitance of the capacitor is changed by contact or contact with a conductive object (for example, a human body). The touch panel device can detect the position of the touch sensor panel by detecting the change of the electrostatic capacitance. This method is called a so-called projection type electrostatic capacitance method, and is excellent in that it can detect a touch position with high precision.

Moreover, it is extremely important for the manufacturer of the touch panel device to check the sensor panel in order to avoid the incorporation of defective products and ensure product quality.

As one of the inspection methods, conventionally, the contact head formed by the needle-shaped conduction probe is in direct contact with each electrode disposed in the longitudinal and lateral directions, or the wiring is connected thereto, and each electrode (wiring) is inspected for conduction or the like. Whether the electrode (wiring) is short-circuited.

However, in the method of inspecting the contact head in direct contact, the above-mentioned electrode and the contact head formed of the ITO film are not stable, and the electrical characteristics cannot be accurately measured due to the instability of the contact resistance caused by the oxide film. Further, since the contact head directly contacts the electrode of the inspection object or the like, there is a problem that the scratch is formed and the quality is lowered.

On the other hand, as disclosed in Patent Document 1, in order to accurately detect a predetermined touch input position on an assembled touch panel, a method of checking the electrical characteristics of the resistance value of the touch panel as a whole has been advocated.

Further, in addition to those disclosed in Patent Document 1, an inspection signal is supplied to the electrodes, and the contact head contacts the electrode intersection portion, and the electrode or the like is inspected based on the detection signal of the contact head.

[Previous Technical Literature]

[Patent Document]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2005-274225

However, in such an inspection method, it is necessary to contact all the intersection portions of the electrodes arranged in the longitudinal and lateral directions to contact the contact head for inspection. Therefore, if the number of electrodes is increased, it takes a long time to move the contact head, and the inspection time is remarkably increased.

Further, although the electrostatic capacitance in the intersection of the first electrode and the second electrode is measured in consideration of the inspection process, the electrostatic capacitance is at most about 10 pF, whereas the unintended capacitance component of the circuit of the inspection device is The so-called floating capacitance is about 100pF, and this floating capacitance is a major cause of reducing the measurement accuracy. Therefore, from the viewpoint of improving the accuracy of inspection, the industry requires that the influence of the floating capacitance be appropriately excluded.

In view of the above, an object of the present invention is to enable correction of errors caused by floating capacitance of a cable, etc., in an inspection apparatus for inspecting an object such as a sensor plate, and to measure the sensor plate with good precision. Tiny electrostatic capacitance.

[Means and effects of solving the problem]

The subject to be solved by the present invention is as described above, and the means for solving the problem and the effects thereof will be described next.

According to a first aspect of the present invention, there is provided an inspection apparatus for inspecting an inspection object, wherein the inspection object has a flat shape, and a plurality of first conductors arranged side by side and a plurality of second conductive materials arranged side by side The inspection device includes a plurality of first wiring bodies electrically connected to the first conductors during inspection, and a plurality of second wiring bodies are respectively inspected at the time of inspection. The second conductor is electrically connected; the signal portion is an alternating current power source that supplies an alternating current signal; and the signal supply switching unit switches between the plurality of second conductors via the second wiring body, and supplies or blocks the signal portion. The current detecting unit has a plurality of galvanometers that can detect a current flowing through the first conductor; and the detecting switching unit can switch between the first wiring and the first conductive body via the first wiring body. The body and the current meter and the correction signal unit have a plurality of AC power sources that can respectively supply an AC signal to the ammeter; and the voltage and phase of each of the AC power sources of the correction signal unit can be changed.

Thereby, the correction of the error caused by the floating capacitance of the cable or the like can be eliminated. Further, the AC power supply of the correction signal portion is controlled to eliminate the current caused by the floating capacitance, etc., so that the current meter of the current detecting portion can detect the current itself of the electrostatic capacitance according to the intersection of the first conductor and the second conductor. Therefore, the range of the ammeter can be appropriately determined, whereby the minute electrostatic capacitance of the sensor plate can be measured with good precision.

In the inspection apparatus, the following configuration is preferred. That is, the inspection device includes at least a correction unit that controls the signal portion, the current detecting portion, and the correction signal portion. The correction unit supplies an alternating current signal of the signal portion to at least one of the second wiring bodies when the correction of the inspection target object is removed, and adjusts the voltage of the alternating current power source corresponding to the current meter to the correction signal portion and a phase, a current of the current meter of the current detecting portion of the first wiring body is zero, and a voltage and a phase of the alternating current power supply to the correction signal portion when the output of the current meter is zero, that is, The calibration parameter is obtained and memorized. When the object to be inspected is inspected, the AC power source of the correction signal portion generates an AC signal based on the corrected calibration parameter.

Thereby, the voltage and phase of the AC power supply for correcting the signal portion of the current caused by the floating capacitance are automatically determined, so that the trouble of correction can be reduced.

In the inspection apparatus, the following configuration is preferred. In other words, the correction unit switches the state of the signal supply switching unit, changes the state of the second wiring body to which the signal of the signal unit is supplied, and supplies the signal to the switching unit and the correction. The parameter is stored in response to the parameter, and when the object to be inspected is inspected, the AC power source of the correction signal unit generates an AC signal based on the correction parameter that is memorized in response to the state of the signal supply switching unit.

With this configuration, even if the second wiring body is changed in accordance with the floating capacitor or the like, the correction can be performed accordingly, so that the measurement accuracy can be favorably maintained.

In the inspection apparatus, the correction unit preferably controls the detection switching unit to simultaneously connect the plurality of first wiring bodies and the current meter corresponding to the current detecting unit.

Thereby, the correction operation for the galvanometer of the plurality can be performed in parallel at the same time, so that the time required for the correction can be effectively shortened.

In the inspection apparatus, the following configuration is preferred. In other words, the inspection device includes at least an inspection unit that controls the signal unit, the current detection unit, the signal supply switching unit, and the detection switching unit. When the inspection object is inspected, the inspection unit controls the signal supply switching. a unit that supplies an AC signal to the signal portion selected from one of the plurality of second conductors, controls the detection switching unit, and connects one of the plurality of first conductors selected from the plurality of first conductors. And the current meter corresponding to the current detecting unit detects the current by the current meter, thereby measuring the end of the alternating current signal supplied to the signal portion from the selected second conductor, that is, the supply end, via When the intersection of the selected second conductor and the selected first conductor reaches the end of the selected first conductor connected to one side of the ammeter, that is, the measuring end, the circuit is formed. And forming a circuit measurement value as a circuit resistance of the resistor forming the circuit, and a current phase offset which is an offset of a phase of a current flowing through the circuit, and forming the circuit measurement value according to the obtained circuit Checking the first conductor and the Exception of the conductor 2.

Thereby, it is possible to form a circuit measurement value to determine whether or not the first conductor and the second conductor are uniformly formed. Moreover, the non-contact inspection without using a contact head can be realized, so that the working time can be greatly shortened.

In the inspection apparatus, the inspection unit preferably measures the formed circuit measurement value and measures the capacitance in the intersection of the selected first conductor and the second conductor.

Thereby, the inspection time can be utilized efficiently for inspection, so that the work time can be further shortened.

In the inspection apparatus, it is preferable that the selected first conductors are common, and the selected second conductors sequentially change from one side to the other side in the longitudinal direction of the first conductors, and the inspection unit determines that: Along with this change, whether the circuit resistance or the current phase shift of the circuit is monotonously increased or decreased, thereby checking the abnormality of the first conductor and the second conductor.

In the inspection apparatus, it is preferable that the selected second conductors are common, and the selected first conductors sequentially change from one side to the other side of the second conductor, and the inspection unit determines With this change, whether the circuit resistance or the current phase shift of the circuit is monotonously increased or decreased, thereby checking the abnormality of the first conductor and the second conductor.

Thereby, it is possible to reasonably determine whether or not the shapes of the first conductor and the second conductor are uniform.

The inspection device may have the following configuration. That is, the inspection unit checks the abnormality of the first conductor and the second conductor by determining whether the circuit resistance or the current phase offset is equal between the following two circuits: the first forming circuit, that is, Selecting the first conductor and the second conductor to form the circuit; In the second forming circuit, even if the first conductor is selected, the first conductor selected in the first forming circuit is shifted by one direction away from the supply end of the second conductor; The selection of the second conductor is performed by shifting one of the second conductors selected by the first forming circuit toward the measuring end of the first conductor, thereby forming the second conductor. Circuit.

Thereby, it is possible to reasonably determine whether the shapes of the first conductor and the second conductor are uniform.

According to a second aspect of the present invention, there is provided a method of calibrating an inspection apparatus for inspecting an object to be inspected, wherein the object to be inspected is in the form of a flat plate, and the plurality of first conductors arranged side by side are The plurality of second conductors arranged in parallel are disposed so as to intersect each other when viewed in the thickness direction of the flat plate. The inspection apparatus includes: a plurality of first wiring bodies, and the first conductors are electrically connected to each other during inspection; The wiring body is electrically connected to the second conductor, and the signal portion is an AC power source that supplies an AC signal, and the signal supply switching unit switches between the plurality of second conductors via the second wiring body. Supplying or blocking an AC signal of the signal portion; the current detecting portion has a plurality of current meters capable of detecting a current flowing through the first conductor; and the detecting switching portion is switchable via the first wiring body and connected Or blocking the first electric conductor and the galvanometer; and the correction signal portion, and having a plurality of alternating current power sources capable of supplying an alternating current signal to the galvanometer; and changing the alternating current power supply of the correction signal portion And phase voltage; the correction method is characterized in that the inspection apparatus comprising: The signal condition adjustment program supplies an AC signal of the signal portion to at least one of the second wiring bodies while the object to be inspected is being removed, and adjusts the voltage of the AC power source corresponding to the current meter to the correction signal portion. And the phase, the output of the current meter of the current detecting portion electrically connected to the first wiring body is zero; the signal condition memory program, the voltage of the alternating current power supply to the correction signal portion when the output of the current meter is zero And the parameter of the phase, that is, the calibration parameter, is obtained and memorized; and the correction signal generating program, when checking the object to be inspected, causes the AC power source of the correction signal portion to generate an AC signal according to the corrected calibration parameter.

Thereby, the correction of the error caused by the floating capacitance of the cable or the like can be eliminated. Further, the AC power supply of the correction signal portion is controlled to eliminate the current caused by the floating capacitance, etc., so that the current meter of the current detecting portion can detect the current itself of the electrostatic capacitance according to the intersection of the first conductor and the second conductor. Therefore, the range of the ammeter can be appropriately determined, whereby the minute electrostatic capacitance of the sensor plate can be measured with good precision. Moreover, the voltage and phase of the AC power supply for correcting the signal portion of the current caused by the floating capacitance are automatically determined, so that the trouble of correction can be alleviated.

According to a third aspect of the present invention, there is provided an inspection method for inspecting an inspection object, wherein the inspection object has a flat shape, and a plurality of first electric conductors arranged side by side are arranged. And the second electric conductors arranged in parallel with each other, the crucibles intersecting each other when viewed in the thickness direction of the flat plate. The inspection device includes a plurality of first wiring bodies, and electrically connected to the first electric conductors during inspection; and the plurality of second wirings Body, electrically connected to the second electrical conductor during inspection; The signal unit, that is, the AC power source that supplies the AC signal; and the signal supply switching unit is configured to switch the signal unit to each of the plurality of the second conductors via the second wiring body. An AC signal; the current detecting unit has a plurality of galvanometers that can detect a current flowing through the first conductor; and the detecting switching unit can switch between: connecting the first wiring body or the first wiring body Each of the first electric conductor and the galvanometer and the correction signal unit are provided with a plurality of alternating current power sources that can respectively supply an alternating current signal to the galvanometer; and the voltage and phase of each of the alternating current power sources of the correction signal unit can be changed. The inspection method in the inspection apparatus includes a switching program that controls the signal supply switching unit, and supplies an AC signal to the signal portion selected from one of the plurality of second conductors, and controls the detection. The switching unit is configured to select one of the plurality of first conductors to be connected to the galvanometer corresponding to the current detecting unit; to form a circuit measurement value obtaining program, and to select the self-selected The end portion of the second conductor in which the AC signal is supplied from the signal portion, that is, the supply terminal, passes through the intersection of the selected second conductor and the selected first conductor, and reaches the selected first conductor. When the circuit connecting one end of the galvanometer, that is, the measuring end, forms a circuit, measuring the current by using the galvanometer, measuring the circuit forming value including any one of the following a circuit resistance as a resistance of the circuit, and a current phase shift as a phase shift of a current flowing through the circuit; and a determination program for inspecting the first conductor based on the obtained circuit measurement value obtained And whether the second conductor has an abnormality.

Thereby, it is possible to form a circuit measurement value to determine whether or not the first conductor and the second conductor are uniformly formed. Moreover, the non-contact inspection without using a contact head can be realized, so that the working time can be greatly shortened.

1‧‧‧Sensor plate inspection device (inspection device)

11‧‧‧Signal Department

31‧‧‧Signal supply switching unit

32‧‧‧Detection Switching Department

36‧‧‧1st cable (1st wiring body)

37‧‧‧2nd cable (2nd wiring body)

41‧‧‧ Current Detection Department

42‧‧‧Correction Signal Department

45‧‧‧Controller unit (control unit)

46‧‧‧Correction Department

47‧‧‧ Inspection Department

50‧‧‧Sensor plate (inspection object)

51‧‧‧1st electrode (1st conductor)

52‧‧‧2nd electrode (2nd conductor)

56‧‧‧1st tab wiring part

57‧‧‧2nd tab wiring part

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a conceptual view showing the overall configuration of a sensor flat panel inspection apparatus according to an embodiment of the present invention.

Fig. 2 is a view showing a state in which the sensor flat plate inspection device is corrected in a state where the sensor plate is removed.

Fig. 3 is a graph showing the relationship between the voltage phase of the signal portion and the phase of the current detected by the current meter of the current detecting portion.

Figure 4 is a circuit diagram showing the formation of the position (1, 4) in the sensor slab by the sensor slab inspection device.

Fig. 5 is a view schematically showing the formation of a circuit.

Fig. 6 is a table showing the relationship between the coordinates of the position to be inspected and the resistance value of the formed circuit.

Fig. 7 is a vector diagram showing the relationship between the resistance value of the forming circuit and the phase of the current.

Next, an embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a conceptual view showing the overall configuration of a sensor flat panel inspection apparatus 1 according to an embodiment of the present invention. Figure 2 shows the removal of the sensor flat A diagram of the situation in which the sensor plate inspection device 1 is corrected in the state of the board. Fig. 3 is a graph showing the relationship between the voltage phase of the signal portion 11 and the phase of the current detected by the galvanometer of the current detecting portion 41.

The sensor flat panel inspection apparatus 1 shown in Fig. 1 can inspect the sensor panel 50 as an inspection object. FIG. 1 shows a state in which the sensor panel 50 is set to the sensor flat panel inspection apparatus 1.

The sensor plate 50 is a main component of the touch panel device, and a plurality of first electrodes (first conductors) 51 elongated in the longitudinal direction on a transparent substrate made of glass or the like, and plural numbers elongated in the lateral direction The second electrodes (second conductors) 52 are arranged to intersect each other.

When the first electrode 51 and the second electrode 52 are viewed in the thickness direction of the sensor flat plate 50, they are vertically intersecting each other and arranged in a matrix. Specifically, the first electrodes 51 are arranged at equal intervals in the lateral direction of FIG. 1 , and the second electrodes are arranged at equal intervals in the longitudinal direction of FIG. 1 . Further, in the following description, the direction in which the first electrodes 51 are arranged side by side is referred to as the x direction, and the direction in which the second electrodes 52 are arranged side by side is the y direction.

As a result, a matrix of M × N is formed by the two electrodes 51 and 52. Further, although FIG. 1 is drawn in a plan view, a predetermined gap is formed between the first electrode 51 and the second electrode 52 in the thickness direction of the sensor flat plate 50.

The shapes of the first electrode 51 and the second electrode 52 are each a diamond-shaped puncture pattern having a small size and a certain size, and the wide portion and the narrow portion are repeated in the longitudinal direction to alternately appear. First electrode 51 and second electric The poles 52 are in a portion of the narrow portion described above and intersect each other in plan view. Thereby, the first electrode 51 and the second electrode 52 are coated with substantially the entire area of the region where the touch position can be detected (hereinafter sometimes referred to as the touch region).

In the touch region described above, the sensor coordinate system is set in the relationship between the first electrode 51 and the second electrode 52 arranged in a matrix. This coordinate system can be represented by the coordinates of the x direction and the y direction described above. Specifically, the intersection of the two electrodes in the left-hand corner of the touch area in FIG. 1 is set to (1, 1), and the intersection of the upper right-hand side is set to (M, N).

Further, in the sensor panel 50 of FIG. 1, the number of the first electrode 51 and the second electrode 52 is four (M=4, N=4), but the present invention is not limited to this example, and may be appropriately increased or decreased. Further, the shapes of the first electrode 51 and the second electrode 52 are not limited to the above, and for example, an electrode having a shape having a constant width can be changed.

The first electrode 51 and the second electrode 52 are formed by forming a patterned transparent conductive layer by a known method such as sputtering or vapor deposition using the above-described ITO. However, the material of the electrode is not limited to the use of ITO, and various materials such as indium zinc oxide (Indium Zinc Oxide, IZO) can be used.

The first tab wiring portion 56 and the second tab wiring portion 57 are formed on the substrate, and the first electrode 51 and the second electrode 52 are connected to each other. The first tab wiring portion 56 and the second tab wiring portion 57 are formed at positions avoiding the touch region, and are electrically connectable to the driving circuits of the first electrode 51 and the second electrode 52 and the touch panel device ( Figure omitted).

In the present embodiment, the first tab wiring portion 56 and the second tab wiring portion 57 are formed by screen printing using a conductive gel-like material (specifically, silver paste). However, it is not limited to this configuration, and silver paste may not be used, and instead, for example, copper paste may be used, or screen printing may be omitted, and other printing methods such as inkjet printing may be used instead. Further, after the various metal films having conductivity are vapor-deposited, the etching can be selectively performed, whereby the patterns of the first tab wiring portion 56 and the second tab wiring portion 57 can be formed.

The sensor flat panel inspection apparatus 1 of the present embodiment is for checking whether the electrostatic capacitance of the electrode intersection portion in the sensor flat panel 50 is as designed, and checking whether the electrodes 51, 52 are correctly formed. The sensor flat panel inspection apparatus 1 includes, as a main configuration, a first cable (first wiring body) 36, a second cable (second wiring body) 37, a signal portion 11, a signal supply switching unit 31, and a detection switching. The unit 32, the current detecting unit 41, the correction signal unit 42, and a controller unit (control unit) 45.

The first cable 36 and the second cable 37 are formed of electrically conductive wires. After the sensor flat panel 50 is set in the sensor flat panel inspection apparatus 1, the first cable 36 is electrically connected to the first electrode 51 via the first tab wiring portion 56 of the sensor panel 50, and the second cable 37 is passed through the second cable 37. The second tab wiring portion 57 of the sensor plate 50 is electrically connected to the second electrode 52.

The signal unit 11 is an AC power source that supplies an AC signal of a predetermined voltage. The AC signal supplied from the signal portion 11 can be set, for example, the frequency is in the range of 10 kHz to 1000 kHz, and the effective value of the voltage is in the range of 1 V to 10 V. One end of the signal portion 11 is grounded, and the other end is electrically connected to the signal supply switching portion 31.

The signal unit 11 is connected to the controller unit 45, and an AC signal can be generated based on a control command from the controller unit 45.

The signal supply switching unit 31 can select all or part of the second electrode 52 from the plurality of electrodes, and electrically connect the selected second electrode 52 and the signal portion 11. This signal supply switching unit 31 has a plurality of switches respectively corresponding to the second electrode 52. In the figure, the numbers "1" to "4" are assigned to the switches, and the numbers correspond to the y coordinates in the sensor coordinate system described above. Each of the switches can be turned ON/OFF, and the corresponding second electrode 52 is electrically connected via the second cable 37 and the second tab wiring portion 57.

The signal supply switching unit 31 is connected to the controller unit 45, and can switch ON/OFF of the switch in accordance with a control command from the controller unit 45.

The detection switching unit 32 can select all or part of the first electrode 51 from the plurality of electrodes, and electrically connect the selected first electrode 51 and the current detecting unit 41. The detection switching unit 32 has a plurality of switches respectively corresponding to the first electrodes 51. Further, in the drawing, the numbers of the switches "1" to "4" are assigned, and the numbers correspond to the x coordinates in the above-described sensor coordinate system. These switches can be turned ON/OFF, and the corresponding first electrode 51 is electrically connected via the first cable 36 and the first tab wiring portion 56.

Similarly to the signal supply switching unit 31, the detection switching unit 32 is connected to the controller unit 45, and can switch ON/OFF of the switch in accordance with a control command from the controller unit 45.

The current detecting unit 41 includes a plurality of galvanometers, and is configured to correspond to the plurality of first electrodes 51, respectively. Each galvanometer sends the detected current value to controller unit 45.

The correction signal unit 42 includes a plurality of AC power sources, and is configured to correspond to the current meter of the current detecting unit 41, respectively. In this AC power supply, one end is grounded and the other end is connected to the ammeter.

This AC power source can generate an AC signal of a frequency consistent with the aforementioned signal portion 11. Moreover, each AC power source can independently change the voltage and phase of the output AC signal according to the control command from the controller unit 45.

The controller unit 45 is configured as a microcomputer, and includes a CPU as a computing unit (not shown), a ROM, a RAM, and the like as a storage unit. Further, in the ROM of the controller unit 45, a program for operating the sensor tablet inspection device 1 is stored.

The program includes a correction program for implementing the calibration method according to the embodiment by the sensor tablet inspection device 1. Further, the program includes an inspection program for implementing the inspection method according to the embodiment by the sensor tablet inspection device 1.

This correction method will be described in detail later, and includes a signal condition adjustment program, a signal condition memory program, and a correction signal generation program. Therefore, the correction program corresponds to each program, including a signal condition adjustment step, a signal condition memory step, and a correction signal generation step.

The inspection method will be described in detail later, and includes a switching program, a circuit measurement value acquisition program, and a determination program. Therefore, the inspection program corresponds to each program, including the switching step, the forming circuit measurement value obtaining step, and the determining step.

Further, the hardware cooperates with the software, whereby the controller unit 45 can be used as the correction unit 46 and the inspection unit 47.

The correcting unit 46 performs the following operations: as a pre-inspection stage, the signal unit 11, the signal supply switching unit 31, the detection switching unit 32, the current detecting unit 41, and the correction signal unit 42 are supplied with control signals for control, and the correction station is determined. Required parameters. This operation is performed with the sensor plate 50 removed.

The detecting unit 47 sets the signal unit 11, the signal supply switching unit 31, the detection switching unit 32, the current detecting unit 41, and the correction signal unit 42 in a state where the sensor flat plate 50 is set in the sensor flat panel inspection device 1. The sensor plate 50 is inspected by conveying control signals to control it.

First, a correction operation will be described with reference to Fig. 2 . This calibration work is usually performed when the sensor flat panel inspection apparatus 1 is used for the first time, or when the installation position of the apparatus is changed.

The sensor tablet inspection device 1 includes an operation unit (not shown) that is instructed to perform inspection or correction. The controller unit 45 (correction unit 46) performs control after the user instructs the correction operation in a state where the sensor plate 50 is not mounted in the state of FIG. 2 of the sensor plate inspection device 1, and an AC signal is generated in the signal portion 11. In the state, one of the four switches constituting the signal supply switching unit 31 is turned ON, and the remaining three are One is OFF. The controller unit 45 turns ON one of the four switches constituting the detection switching unit 32, and the remaining three are OFF. In the description of the present invention, the switch of "1" in the signal supply switching unit 31 is turned ON, and the switch of "1" in the detection switching unit 32 is turned ON.

Further, in a state where the second cable 37 corresponding to the switch of "1" of the signal supply switching unit 31 is connected to the signal portion 11, the signal portion 11 generates an alternating current signal. In the galvanometer of the current detecting unit 41 corresponding to the switch of the "1" in the detection switching unit 32, the current is affected by the floating capacitance caused by the first cable 36 connected to the switch of "1". flow.

In the calibration operation in the sensor plate inspection device 1 of the present embodiment, the condition for determining the control correction signal portion 42 is included, and the influence of the current on the current meter is eliminated. Specifically, this condition determines the operation, and the controller unit 45 (correction unit 46) reads the output of the galvanometer of the switch of the "1" in the connection detecting switching unit 32, and simultaneously corrects the signal portion 42 to match the current. Calculate the voltage and phase change of the AC power supply, and find the condition that the output of the ammeter is zero (signal condition adjustment procedure).

Further, assuming that the current flowing to the current detecting portion 41 during the correction is caused only by the influence of the floating capacitance, the phase of the waveform detected by the ammeter is as indicated by a broken line in FIG. 3, and the voltage phase with respect to the signal portion 11 is Properly advance by 90°. However, the phase shift of the waveform of the ammeter which actually flows to the current detecting portion 41 is a value smaller than 90, which is difficult to calculate. This is affected by the resistance of the wiring or switch constituting the circuit (for example, the resistance of the first cable 36 or the ON resistance of the switch of the switching portion 32). Therefore, in order to appropriately eliminate the influence of this current, it is necessary to finely adjust the voltage of the AC power source in the correction signal portion 42, and to finely adjust the phase.

When the output of the ammeter in the current detecting unit 41 is zero, the controller unit 45 memorizes the condition (the parameter of the voltage and the phase) to which the AC power is supplied at this time in the above-mentioned memory unit (RAM or the like) (signal condition memory program).

In the above operation, the switch that turns ON in the detection switching unit 32 is switched from "1" to "2", "3", and "4" in order, and is repeated. In the state where the switch of "1" is turned ON in the signal supply switching unit 31, it is necessary to eliminate the influence of the floating capacitance such as the first cable 36, and the AC power supply to the correction signal portion 42 is required. The voltage and phase parameters (hereinafter sometimes referred to as calibration parameters).

However, the operation of obtaining the above-described correction parameters may be performed simultaneously in parallel with the plurality of galvanometers of the current detecting unit 41. Specifically, the controller unit 45 reads the output of the galvanometer of the current detecting unit 41 respectively connected to the switch in a state where the plurality of (for example, all four) switches of the detecting switching unit 32 are ON, and simultaneously Corresponding to the voltage and phase change of the AC power source of the correction signal unit 42. Further, the controller unit 45 sets the parameters of the voltage and phase to be supplied to the respective AC power sources to zero in the output of the galvanometer, and stores them in the memory unit. With this configuration, the time required for the correction can be significantly shortened.

After the correction parameters are obtained for all the ammeters (the AC power supply of the correction signal unit 42) of the current detecting unit 41, the switch that turns ON the signal supply switching unit 31 from "1" to "2" and "3". , "4" is switched in order, and the same operation as above is repeated. Thereby, the state of the four switches corresponding to the signal supply switching unit 31 can be obtained, and the correction parameters of the AC power supplies of the correction signal unit 42 should be given.

Further, in the present embodiment, as described above, the correction signal unit 42 constituted by the AC voltage generating source that controls the common mode of the galvanometer is corrected. Such an analog correction is remarkably superior to the (digital) correction of the value of the operation value from the measured value offset to the inspection accuracy. In other words, in the inspection of the sensor plate inspection device 1 of the present embodiment, the capacitance is measured at the intersection of the first electrode 51 and the second electrode 52, and the capacitance is at most about 10 pF. On the other hand, the above-mentioned floating capacitance has an effect of even about 100 pF. Therefore, in the digital calibration method in which the capacitance is measured in the form of a floating capacitor, and the floating capacitance is calculated by the offset calculation, the range of the ammeter of the current detecting unit 41 needs to be set, and the measurement can be performed at 110 pF or more. On the other hand, according to the calibration method of the present embodiment, the floating capacitance is eliminated at the stage of current measurement, so that the electrostatic capacitance can be smoothly measured as long as it can be measured up to about 20 pF. Therefore, the measurement range of the high degree of analysis of the ammeter can be utilized, and the minute electrostatic capacitance can be measured with good precision.

The operation required for the above correction is completed, and secondly, the inspection of the sensor plate 50 is explained. 4 is a circuit diagram showing the formation of the position (1, 4) in the sensor flat panel 50 by the sensor flat panel inspection apparatus 1. Fig. 5 is a view schematically showing the formation of a circuit. Fig. 6 is a table showing the relationship between the coordinates of the position to be inspected and the resistance value of the formed circuit. Fig. 7 is a vector diagram showing the relationship between the resistance value of the forming circuit and the phase of the current.

First, the manner of thinking about the inspection will be described with reference to FIG. In addition to measuring the electrostatic capacitance in the intersection of the first electrode 51 and the second electrode 52, the sensor flat panel inspection apparatus 1 of the present embodiment is also based on the resistance values of the first electrode 51 and the second electrode 52 (or the corresponding resistance). The value of the value change) is checked for the uniformity of the shapes of the first electrode 51 and the second electrode 52. This correspondence can not only properly check the conduction/short circuit of the electrode, but also increase the demand for the thickness of the electrode to be appropriately checked.

The details will be described below. The first electrode 51 and the second electrode 52 disposed on the sensor plate 50 cross each other at M×N. As described above, since a gap is formed between the first electrode 51 and the second electrode 52, it is conceivable that a capacitor is formed at the intersection portion described above.

Further, the first electrode 51 and the second electrode 52 are formed of the ITO conductive film as described above. Although the ITO exhibits an excellent low electrical resistivity in relation to other transparent electrode materials, it exhibits a corresponding electrical resistance value. Therefore, when M×N intersection portions formed by the first electrode 51 and the second electrode 52 are in the eye, it is conceivable that the intersection portion is between the intersection portion and the other intersection portion adjacent to the intersection portion in the x direction or the y direction. There is one resistor separately. In the following description, the resistance may be referred to as "unit resistance".

As described above, the first electrode 51 and the second electrode 52 have a pattern shape in which a plurality of rhombic patterns are repeated, but the shape of the rhombus is constant regardless of the first electrode 51 and the second electrode 52. The interval between the first electrodes 51 is equal to the interval between the second electrodes 52. Therefore, the shape of the first electrode 51 and the second electrode 52 is uniformly formed as long as the shape of the first electrode 51 and the second electrode 52 is not present (for example, the thickness of the electrode is thin/thick), and is regarded as a resistance value of a resistance between the intersection portion and the intersection portion. The direction should be constant regardless of the x direction or the y direction.

It is also conceivable that there is a resistance between the connection portion between the first electrode 51 and the first tab wiring portion 56 and the intersection portion closest to the connection portion. The shape of the first electrode 51 in the vicinity of the connection portion is set, and the resistance value of the resistor is equal to the resistance value of the unit resistance described above. This is also the same for the second electrode 52.

As is apparent from the above description, as shown by a broken line or a solid line in FIG. 4, it can be considered that a large number of resistors (unit resistance) having a constant resistance value are arranged in the first electrode 51 and the second electrode 52.

Here, imagine the case of (1, 4) in the sensor coordinate system described above. In this case, the inspection unit 47 selects the first electrode 51 corresponding to the x coordinate of the inspection target from the first electrode 51 in the group, and selects the y coordinate corresponding to the inspection object from the second electrode 52 in the group of four. The second electrode 52 controls the detection switching unit 32 and the signal supply switching unit 31, and the electrodes are the inspection targets (switching programs). Specifically, the inspection unit 47 causes the switch of the detection switching unit 32 "1" to be ON, and the switch of the signal supply switching unit 31 "4" to be ON.

Thereby, the galvanometer of the signal portion 11 and the current detecting portion 41 is connected by an L-shaped circuit indicated by a thick line in FIG. The circuit drawn by the thick line reaches the first electrode 51 and the first convex portion via the electrode intersection portion indicated by the above (1, 4) from the connection portion between the second electrode 52 and the second tab wiring portion 57. A connecting portion of the sheet wiring portion 56.

Further, the end portion of the second electrode 52 and the second tab wiring portion 57 connected to one side is supplied with the end portion of the alternating current signal from the signal portion 11, and therefore, it will be referred to as a supply end as will be described below. The end portion on the side connected to the first electrode 51 and the first tab wiring portion 56 is connected to the end portion on the one side of the ammeter of the current detecting portion 41. Therefore, the following description is sometimes referred to as the measuring end. .

As shown in Fig. 4, the L-shaped circuit corresponding to the coordinates (1, 4) includes five resistors connected in series, and a capacitor formed at the intersection of the electrodes.

Thus, the inspection of the coordinates (x, y) is performed by flowing an AC signal to a circuit in which the coordinates are bent in an L shape. Hereinafter, this circuit is sometimes referred to as "forming a circuit." This forming circuit corresponds to the coordinates of the check in a one-to-one correspondence. In the present embodiment, the coordinates to be inspected are M × N, so that there are also M × N formed circuits.

Fig. 5 shows, in a model manner, the state in which the circuit-connected sensor flat panel inspection apparatus 1 in the sensor panel 50 is formed (in this figure, the correction signal portion 42 is omitted). The alternating current i flowing through the circuit is measured by the galvanometer of the current detecting unit 41.

Further, since the formation circuit has various coordinates (x, y) corresponding to the position to be inspected, the resistance value of the formed circuit is also different. In consideration of this, the inspection unit 47 calculates the resistance value of the circuit for forming an arbitrary coordinate (x, y) in advance, and stores it in the RAM or the like described above. An example of the memory content is shown in Fig. 6. According to the table, the resistance value of the circuit formed at (1, 4) is 5 minutes of the unit resistance, and the resistance value of the circuit formed at (1, 1) is 2 unit resistance. Minute.

The detecting unit 47 calculates the output phase of the current meter of the current detecting unit 41 in a state where the signal is generated by the signal unit 11, thereby obtaining the capacitance in the circuit and the resistance of the circuit. Value (forms a circuit measurement).

Further, at this time, the AC signal generated by the signal unit 11 is the same as that of the correction described with reference to FIG. The AC power supply of the correction signal unit 42 is controlled by the correction unit 46, and an AC signal (the correction signal generation program in the correction method of the present embodiment) is generated based on the above-described correction parameters stored in the state of the corresponding signal supply switching unit 31. Therefore, the accuracy of the electrostatic capacitance obtained from the output of the ammeter is good.

The electrostatic capacitance thus obtained is compared with a predetermined determination reference value, and is judged to be defective when it exceeds the allowable range. When the obtained resistance value is compared with a predetermined determination reference value and is outside the allowable range, it is determined that the shape of the electrodes 51 and 52 is abnormal (decision program).

The electrostatic capacitance and the resistance value of the formed circuit are obtained by the coordinates of the position to be inspected as (1, 1), (1, 2), ‧ ‧ , (M-1, N), (M, N) Switch and proceed on all coordinates. However, the order of the coordinates to be inspected is not limited to the above, and may be appropriately determined.

Further, the method of determining the good/bad product is not limited to the above. For example, the resistance value of the formed circuit may not be obtained by phase detection, and instead, the circuit measurement value may be used to obtain the output phase of the current detected by the current meter. As shown in the vector diagram of Fig. 7, as long as the electrostatic capacitance C of the circuit is formed, the offset θ between the phase of the detected current and the voltage phase of the signal portion 11 decreases as the resistance value of the forming circuit increases. Therefore, it is also possible to determine whether or not the shapes of the electrodes 51 and 52 are abnormal based on the phase.

Further, it is also possible to determine whether or not the shape of the electrodes 51 and 52 is abnormal by the relationship between the resistance value of the circuit forming the circuit (or the value corresponding to the resistance value) obtained by switching the coordinates of the position to be inspected and repeating the measurement. Based on.

For example, as can be seen from Fig. 6, the y coordinate is constant, and after increasing the x coordinate one by one, the resistance value of the circuit is formed, that is, the unit resistance is increased by one minute. It is also possible to use this to correct the shape of the electrodes 51, 52 by investigating, for example, the coordinates (1, 1), (2, 1), (3, 1), (4, 1), and fixing the y coordinate. When the x coordinate is added, it is determined whether or not the resistance value of the forming circuit is monotonously increased (or whether the phase shift of the current is monotonously decreased).

As described above, the x coordinate is constant, and when the y coordinate is added one by one, the resistance value of the formed circuit is also increased by one unit by one. Therefore, by investigating, for example, the coordinates (3, 1), (3, 2), (3, 3), (3, 4), the x coordinate is fixed, and the y coordinate is added, and the resistance of the circuit is formed along with this. Whether the value is monotonously increased (or whether the phase shift of the current is monotonously decreased) determines the correctness of the shape of the electrodes 51, 52.

As can be seen from Fig. 6, the coordinates (x, y) and (x+1, y-1) have the same resistance value of the formed circuit. It is also possible to investigate whether or not the resistance values (or the phase shifts of the currents) forming the circuit are equal to each other, for example, coordinates (2, 4), (3, 3), (4, 2), whereby the determination electrode 51 The correctness of the shape of 52.

As described above, the sensor flat panel inspection apparatus 1 of the present embodiment uses the sensor flat panel 50 as an inspection target, and the sensor flat panel 50 is provided with a plurality of first electrodes 51 arranged side by side, and a plurality of side by side The two electrodes 52 cross each other as viewed in the thickness direction of the flat plate. Further, the sensor tablet inspection device 1 includes a first cable 36, a second cable 37, a signal unit 11, a signal supply switching unit 31, and a current detecting unit 41. The switching unit 32 and the correction signal unit 42 are detected. The plurality of first cables 36 are included, and the first electrodes 51 are electrically connected to each other during inspection. A plurality of second cables 37 are included, and the second electrodes 52 are electrically connected to each other during inspection. The signal unit 11 is an AC power source that supplies an AC signal. The signal supply switching unit 31 can switch whether or not the AC signal of the signal unit 11 is supplied to or disconnected from the plurality of second electrodes 52 via the second cable 37. The current detecting unit 41 includes a plurality of galvanometers that can detect the current flowing to the first electrode 51. The detection switching unit 32 can switch whether or not the first electrode 51 is connected or disconnected from the galvanometer via the first cable 36, respectively. The correction signal unit 42 includes a plurality of alternating current power sources that can supply an alternating current signal to the current meter. Each of the AC power sources of the correction signal unit 42 can change its voltage and phase.

Thereby, the correction of the error caused by the floating capacitance of the first cable 36 or the like can be eliminated. And the AC power supply of the correction signal unit 42 is controlled to eliminate the current caused by the floating capacitance or the like, so that the current meter of the current detecting unit 41 can detect the current of the electrostatic capacitance according to the intersection of the first electrode 51 and the second electrode 52. . Therefore, by appropriately determining the range of the ammeter, the minute electrostatic capacitance of the sensor panel 50 can be measured with good precision.

Further, the sensor tablet inspection device 1 of the present embodiment includes at least the control signal unit 11, the current detecting unit 41, and the correction unit 46 of the correction signal unit 42. The correction unit 46 supplies the AC signal of the signal unit 11 to at least one of the second cables 37 when the sensor plate 50 is removed, and adjusts the voltage of the AC power source corresponding to the current meter to the correction signal unit 42. And the phase, the output of the ammeter of the current detecting portion 41 electrically connected to the first cable 36 is zero. The correction unit 46 acquires and stores a correction parameter which is a parameter of the voltage and phase of the AC power supplied to the correction signal unit 42 when the output of the ammeter is zero. Again, the correction department When the sensor panel 50 is inspected, the AC power of the correction signal portion 42 is caused to generate an AC signal based on the memorized correction parameters.

Thereby, the voltage and phase of the AC power supply for correcting the signal portion of the current caused by the floating capacitance are automatically determined by the correcting unit 46. Therefore, the trouble of correction can be alleviated.

In the correction unit 46 of the sensor plate inspection device 1 of the present embodiment, the state of the switching signal supply switching unit 31 is switched, and the second cable 37 to be supplied as the signal of the signal unit 11 is changed. The state in which the signal is supplied to the switching unit 31 is stored in association with the obtained correction parameter. Further, the correction unit 46 causes the AC power supply of the correction signal unit 42 to generate an AC signal based on the correction parameter stored in the state of the corresponding signal supply switching unit 31 during the inspection of the sensor panel 50.

As a result, the floating capacitor or the like can be corrected in accordance with which of the second cable 37 signal supply targets are changed, so that the measurement accuracy can be satisfactorily maintained.

The correcting unit 46 of the sensor flat panel inspection apparatus 1 of the present embodiment can control the detection switching unit 32 to simultaneously connect the plurality of first cables 36 and the current corresponding to the current detecting portion 41 during the correction. meter.

Thereby, the correction operation for the galvanometer of the plural can be performed in parallel at the same time, so that the time required for the correction can be effectively shortened.

Further, the sensor tablet inspection device 1 of the present embodiment includes at least a control signal unit 11, a current detecting unit 41, a signal supply switching unit 31, and an inspection unit 47 of the detection switching unit 32. The inspection unit 47 controls the signal supply switching unit 31 to control the detection switching unit 32 by selecting an AC signal selected from one of the four second electrodes 52 to be supplied to the signal unit 11, and the connection is selected from four firsts. One of the electrodes 51 and the galvanometer of the corresponding current detecting portion 41. The inspection unit 47 passes the intersection of the selected second electrode 52 and the selected first electrode 51 from the supply end of the end portion of the AC signal supplied from the signal portion 11 to the selected second electrode 52. When the circuit of the measuring end of the selected first electrode 51 connected to the end of one side of the ammeter is formed, the current is detected by the ammeter, thereby forming the circuit measuring value. The circuit resistance as the resistance of the circuit is formed, or the current phase offset as the offset of the phase of the current flowing into the circuit. Further, the inspection unit 47 checks the abnormalities of the first electrode 51 and the second electrode 52 based on the obtained circuit measurement value.

Thereby, it is possible to determine whether or not the pattern shape of the first electrode 51 and the second electrode 52 is uniformly formed by forming a circuit measurement value (a resistance value or a value corresponding to the resistance value). Moreover, the non-contact inspection without using a contact head can be realized, so that the working time can be greatly shortened.

In the sensor flat panel inspection apparatus 1 of the present embodiment, the inspection unit 47 measures the capacitance measurement value and measures the capacitance in the intersection of the selected first electrode 51 and the second electrode 52.

Thereby, the inspection time can be utilized efficiently for inspection, so that the work time can be further shortened.

Further, in the sensor flat panel inspection apparatus 1 of the present embodiment, the selected first electrode 51 is common, and the selected second electrode 52 is sequentially changed from the longitudinal side to the other side of the first electrode 51. (In other words, the x coordinate of the fixed inspection position, the y coordinate changes sequentially from the side to the other side), and the inspection unit 47 determines whether the circuit resistance or the current phase shift of the circuit is monotonously increased or decreased along with the aforementioned change. Thereby, the abnormality of the first electrode 51 and the second electrode 52 can be inspected.

Further, the selected second electrode 52 is common, and the selected first electrode 51 is sequentially changed from the long side direction of the second electrode 52 toward the other side (in other words, the y coordinate of the fixed inspection position, x coordinate from The one side is sequentially changed toward the other side. With this change, the inspection unit 47 determines whether the circuit resistance or the current phase shift of the circuit is monotonously increased or decreased, whereby the first electrode 51 and the second electrode can be inspected. Abnormality of the electrode 52.

Thereby, it is possible to reasonably determine whether or not the pattern shapes of the first electrode 51 and the second electrode 52 are uniform.

Further, the inspection unit 47 determines that the first forming circuit is formed by selecting the first electrode 51 and the second electrode 52 (in other words, selecting the inspection position (x, y)), and the first electrode 51 is selected. The first electrode 51 selected by the first forming circuit is shifted by one direction away from the supply end of the second electrode 52, and the selection of the second electrode 52 is selected with respect to the first forming circuit. The second electrode 52 is shifted toward the measurement end of the first electrode 51 (in other words, the inspection position (x+1, y-1) is selected), thereby forming the circuit, that is, the first (2) Whether the circuit resistance or the current phase shift is equal between the circuits, the abnormality of the first electrode 51 and the second electrode 52 can be checked.

Thereby, it is possible to reasonably determine whether or not the pattern shapes of the first electrode 51 and the second electrode 52 are uniform.

Although the preferred embodiment of the present invention has been described above, the above configuration can be changed, for example, as follows.

The calibration method and the inspection method of the above embodiment are not limited to being combined with each other. That is, the correction method of the above embodiment may be combined with other inspection methods, for example, an inspection method for measuring only the capacitance without measuring the resistance value of the circuit. Further, the inspection method of the above embodiment may be combined with other correction methods, for example, a digital correction method for offset calculation values.

The object to be inspected is not limited to the sensor flat plate 50 of the touch panel device. In other words, the present invention can be widely applied to a case where a plurality of parallel first conductors are inspected, and a plurality of side-by-side second conductors are arranged to intersect each other when viewed in the thickness direction of the flat plate.

1‧‧‧Sensor plate inspection device (inspection device)

11‧‧‧Signal Department

31‧‧‧Signal supply switching unit

32‧‧‧Detection Switching Department

36‧‧‧1st cable (1st wiring body)

37‧‧‧2nd cable (2nd wiring body)

41‧‧‧ Current Detection Department

42‧‧‧Correction Signal Department

45‧‧‧Controller unit (control unit)

46‧‧‧Correction Department

47‧‧‧ Inspection Department

Claims (11)

An inspection apparatus for inspecting an inspection object, wherein the inspection object has a flat shape, and the plurality of first conductors arranged side by side and the plurality of second conductors arranged side by side are arranged such that they are along the thickness direction of the flat plate The inspection apparatus is characterized in that it includes a plurality of first wiring bodies, and each of the first conductors is electrically connected to each of the plurality of first wiring bodies during inspection, and the second wiring body is electrically connected to each of the second wiring bodies during inspection. a conductor; a signal portion, that is, an AC power source that supplies an AC signal; and a signal supply switching unit that switches between each of the plurality of the second conductors via the second wiring body. An alternating current signal of the signal portion; the current detecting portion has a plurality of current meters capable of detecting a current flowing through the first conductive body; and the detecting switching portion is switchable by: respectively switching the first wiring body And connecting or disconnecting each of the first electric conductor and the galvanometer; and the correction signal unit having a plurality of alternating current power sources capable of supplying an alternating current signal to each of the galvanometers; and the correction signal unit may be changed Since the voltage and phase of the AC power supply. The inspection apparatus according to claim 1, wherein the inspection unit includes at least a correction unit that controls the signal unit, the current detection unit, and the correction signal unit; and the correction unit: when the correction of the inspection object is removed, At least one of the second wiring bodies supplies an alternating current signal of the signal portion, and is adjusted to a voltage and a phase of the alternating current power source corresponding to the current meter of the correction signal portion, and electrically connects the current of the first wiring body The output of the galvanometer of the detecting part is zero; When the output of the ammeter is zero, the voltage and phase parameters of the AC power supply to the correction signal unit, that is, the correction parameters are acquired and memorized; and when the inspection object is inspected, the corrected parameter is stored according to the memory. And causing the AC power of the correction signal portion to generate an AC signal. The inspection apparatus according to the second aspect of the invention, wherein the correction unit switches the state of the signal supply switching unit to change the state of the signal supply unit to the second wiring body to which the signal of the signal unit is supplied. The state of the signal supply switching unit is stored in association with the correction parameter, and when the inspection object is inspected, the correction signal is stored based on the correction parameter stored in response to the state of the signal supply switching unit. The AC power supply of the department generates an AC signal. The inspection device of claim 2 or 3, wherein: the correction unit controls the detection switching unit to simultaneously connect the plurality of first wiring bodies and the current detection corresponding thereto when performing the correction Department of galvanometer. The inspection apparatus according to any one of claims 1 to 4, further comprising: an inspection unit, the inspection unit controlling at least the signal portion, the current detecting portion, the signal supply switching portion, and the detecting switching portion; When the inspection object is inspected, the inspection unit controls the signal supply switching unit to supply an alternating current signal of the signal portion to one of the plurality of second conductors; and Controlling the detection switching unit to connect one of the plurality of first conductors and the current meter corresponding to the current detecting unit; and supply the current conductor from the selected second conductor The end of the AC signal of the signal portion, that is, the supply end, passes through the intersection of the selected second conductor and the selected first conductor, and reaches the side of the selected first conductor that is connected to the galvanometer. The circuit at the end, that is, the measuring terminal, is formed by measuring the current by the galvanometer, and measuring the circuit forming value including any one of the following: as the resistance of the forming circuit The circuit resistance and the phase shift of the phase as the current flowing through the circuit forming phase are shifted; and the abnormality of the first conductor and the second conductor is checked based on the obtained circuit measurement value. The inspection apparatus of claim 5, wherein the inspection unit measures the formed circuit measurement value and measures the electrostatic capacitance of the selected intersection of the first electrical conductor and the second electrical conductor. The inspection apparatus of claim 5 or 6, wherein the selected first conductor is common, and the selected second conductor is from one side of the long side of the first conductor to the other side In order to change sequentially, the inspection unit determines whether or not the circuit resistance or the current phase shift of the circuit is monotonously increased or decreased with the change, thereby checking the abnormality of the first conductor and the second conductor. An inspection apparatus according to any one of claims 5 to 7, wherein: The selected second conductors are common to each other, and the selected first conductors are sequentially changed from one side to the other side of the second conductor, and the inspection unit determines that the change is accompanied by the change. Whether the circuit resistance or the current phase shift of the circuit is monotonously increased or decreased, thereby detecting an abnormality of the first conductor and the second conductor. The inspection apparatus according to any one of claims 5 to 8, wherein the inspection unit checks the first electric conductor by determining whether the circuit resistance or the current phase offset is equal between the following two circuits. And the abnormality of the second conductor: the first forming circuit, that is, the forming circuit configured by selecting the first conductor and the second conductor; and the second forming circuit, even if the first conductor is Selecting, in relation to the first conductor selected in the first forming circuit, shifting away from the supply end of the second conductor by one; and selecting the second conductor with respect to The second conductor selected by the first forming circuit is shifted by one in a direction approaching the measuring end of the first conductor, and thus the circuit is formed. A method for calibrating an inspection apparatus for inspecting an object to be inspected, wherein the object to be inspected has a flat shape, and a plurality of first conductors arranged side by side and a plurality of second conductors arranged side by side are arranged The inspection device includes a plurality of first wiring bodies that are electrically connected to each other during inspection, and a plurality of second wiring bodies are electrically connected to each other during inspection. a second conductor; a signal portion, that is, an AC power source that supplies an AC signal; The signal supply switching unit is configured to switch the AC signal of the signal portion to and from the plurality of second conductors via the second wiring body, and the current detecting unit has a detectable flow through the first conductor a plurality of current meters of the current; the detection switching unit is switchable to connect or disconnect the first conductor and the ammeter via the first wiring body; and the correction signal portion is configured to supply an alternating current to the current meter And a plurality of alternating current power sources of the signal; and the voltage and phase of each of the alternating current power sources of the correction signal unit are changed; the method for correcting the inspection device includes: a signal condition adjustment program for removing the object to be inspected, The AC signal of the signal portion is supplied to at least one of the second wiring bodies, and the voltage and phase of the AC power source corresponding to the current meter are adjusted in the correction signal portion, and the current of the first wiring body is electrically connected The output of the galvanometer of the detecting unit is zero; the signal condition memory program, when the output of the galvanometer is zero, the voltage and phase parameters of the alternating current power supply to the correction signal portion are also The positive parameter is obtained and memorized; and the correction signal generating program causes the AC power source of the correction signal portion to generate an AC signal according to the corrected calibration parameter when the object to be inspected is inspected. An inspection method for inspecting an inspection object, wherein the inspection object has a flat shape, and a plurality of first electric conductors arranged side by side and a plurality of second electric conductors arranged side by side are arranged The plurality of first wiring bodies are electrically connected to each other when inspecting the thickness direction of the flat plate, and the second wiring body is electrically connected to each other during inspection. 2 electrical conductors; The signal unit, that is, the AC power source that supplies the AC signal; and the signal supply switching unit is configured to switch the signal unit to each of the plurality of the second conductors via the second wiring body. An AC signal; the current detecting unit has a plurality of galvanometers that can detect a current flowing through the first conductor; and the detecting switching unit can switch between: connecting the first wiring body or the first wiring body Each of the first electric conductor and the galvanometer and the correction signal unit are provided with a plurality of alternating current power sources that can respectively supply an alternating current signal to the galvanometer; and the voltage and phase of each of the alternating current power sources of the correction signal unit can be changed. The inspection method in the inspection apparatus includes a switching program that controls the signal supply switching unit, and supplies an AC signal to the signal portion selected from one of the plurality of second conductors, and controls the detection. The switching unit is configured to select one of the plurality of first conductors to be connected to the galvanometer corresponding to the current detecting unit; to form a circuit measurement value obtaining program, and to select the self-selected The end portion of the second conductor in which the AC signal is supplied from the signal portion, that is, the supply terminal, passes through the intersection of the selected second conductor and the selected first conductor, and reaches the selected first conductor. When the circuit connecting one end of the galvanometer, that is, the measuring end, forms a circuit, measuring the current by using the galvanometer, measuring the circuit forming value including any one of the following a circuit resistance as a resistance of the circuit, and a current phase shift as a phase shift of a current flowing through the circuit; and a determination program for inspecting the first conductor based on the obtained circuit measurement value obtained And whether the second conductor has an abnormality.