TW201439020A - Microwave dielectric glass ceramic composition and material thereof - Google Patents

Abstract

This invention provides a microwave dielectric glass ceramic composition, which comprising: a glass ceramic ingredient with a structural formula of CaxAySizO(x+y+z), wherein A is selected from the group consisting of magnesium (Mg), barium (Ba), potassium (K), sodium (Na) and aluminum (Al), where the content of the glass ceramic ingredient is greater than 0 wt% and less than or equal to 80 wt% based on the total weight of the microwave dielectric glass ceramic composition; and a first class ceramic ingredient with a content of greater than 0 wt% and less than or equal to 60 wt% based on the total weight of the microwave dielectric glass ceramic composition. This invention further provides a microwave dielectric glass ceramic material formed by sintering the microwave dielectric glass ceramic composition at a temperature ranging from 700 DEG C to 1000 DEG C.

Description

Microwave dielectric glass ceramic composition and material thereof

The present invention relates to a microwave dielectric glass ceramic composition, and more particularly to a microwave dielectric glass ceramic composition suitable for low temperature sintering. The invention also relates to a microwave dielectric glass ceramic material, in particular to a microwave dielectric glass ceramic material having a low dielectric constant and a high quality factor.

As technology advances, the size of electronic products is shrinking, and components for electronic products, such as multilayer ceramic components, are also moving toward miniaturization, thinning, and multi-layering. In addition, as the operating frequency of components continues to increase, conventional high-melting-point precious metals such as silver-palladium mixed powders, platinum, etc., do not meet the demand, but electrode materials suitable for high frequency such as silver or copper have a significantly lower melting point. Therefore, it is not suitable for the traditional high-temperature co-fired ceramic technology. Therefore, in order to conform to the current development trend and to use electrodes with lower melting points such as gold, silver or copper as electrodes, the most eye-catching technology is low temperature. Low temperature co-fired ceramic (LTCC) method, so it can be applied to low temperature co-fired ceramic technology and can be applied to high frequency regions, and has developed low sintering temperature, low dielectric constant and high quality factor. Microwave dielectric materials are one of the focuses of today's research.

The prior art microwave dielectric materials are listed below: U.S. Patent No. 6,649,550 B2 discloses a glass ceramic dielectric material comprising CaMgSi ₂ O ₆ and CaZnSi ₂ O ₇ , the glass ceramic dielectric material having a low sintering temperature and The advantage of low dielectric constant (between 7 and 9), however, the application frequency range of this kind of glass ceramic dielectric material is 0.1 gigahertz (GHz), so the glass ceramic dielectric material cannot be applied to high The frequency range does not have a high quality factor and is therefore not an ideal microwave dielectric material.

Taiwan Patent No. 584867 discloses a microwave dielectric material which is a zinc titanate system having high quality factors and low sintering temperature. However, the dielectric constant of the microwave dielectric material is The invention is between 21 and 27; Taiwan Patent No. I240713 discloses a microwave dielectric material which is sintered from Zn ₃ Nb ₂ O ₈ powder and a liquid phase sintering additive, and the microwave dielectric material is obtained. It also has the advantages of high quality factor and low sintering temperature. However, the dielectric constant of the microwave dielectric material is between 16 and 22; the invention patent No. I248429 discloses a low temperature sintered microwave dielectric ceramic. a bulk substrate having a series of n(Zr _x ,Sn _y )Ti _z O ₄ -(1-n)MO and a glass substrate added to the bulk material, the low temperature sintered microwave dielectric ceramic having a low The advantage of the sintering temperature, however, the dielectric constant of the low-temperature sintered microwave dielectric ceramic is between 20 and 30. The materials disclosed in the above-mentioned Taiwan patent case are not ideal microwave dielectric materials because they have too high a dielectric constant and cannot effectively shorten the delay time of the signal when applied to a high frequency region.

Therefore, it is necessary to develop a microwave dielectric material which can be applied to a low-temperature co-fired ceramic technology and has a high dielectric constant such as a low dielectric constant and a high quality factor when applied to a high frequency region.

In view of the shortcomings of the microwave dielectric materials of the prior art, the present invention The main purpose of the present invention is to provide a microwave dielectric glass ceramic composition which can be applied to low temperature co-fired ceramic technology and has high frequency characteristics such as low dielectric constant and high quality factor when applied to a high frequency region.

In order to achieve the foregoing object, the present invention provides a microwave dielectric glass ceramic composition comprising: a glass ceramic component having a structural formula of Ca _x A _y Si _z O _(x+y+2z) , Wherein A is selected from the group consisting of magnesium (Mg), barium (Ba), potassium (K), sodium (Na), and aluminum (Al), wherein the total of the elements of the glass-ceramic component The number of ears is the reference, the x is greater than 0% of the mole and less than or equal to 50% of the percentage, the y is between 0% and 50%, and the z is greater than 0 and less than or equal to 50% by mole, wherein The glass ceramic component is greater than 0 weight percent (wt%) and less than or equal to 80 wt% based on the total weight of the microwave dielectric glass ceramic composition; and a first type of ceramic component selected from Groups of the following: aluminum niobate (Al ₂ Si ₂ O ₇ ), zirconium silicate (ZrSiO ₄ ), potassium aluminum citrate (KAlSi ₃ O ₈ ), sodium aluminum citrate (NaAlSi ₃ O8), tannic acid Aluminum aluminum (CaAl ₂ Si ₂ O ₈ ), magnesium citrate (Mg ₂ SiO ₄ ), magnesium zirconium titanate (MgZrSrTiO ₆ ), magnesium aluminate (MgAl ₂ O ₄ ), magnesium titanate (MgTiO ₃ ), bismuth acid (Zn ₂ SiO _4), barium titanium silicate (BaTiSi ₃ O _9), four barium titanate (BaTi ₄ O _9), calcium tungstate (CaWO _4), n samarium niobate (SmNbO _4), LaNbO4 (LaNbO ₄ ) and combinations thereof, wherein the content of the first type of ceramic component is greater than 0 weight percent (wt%) and less than or equal to 60 wt% based on the total weight of the microwave dielectric glass ceramic composition.

According to the present invention, the glass-ceramic component of the present invention refers to a polycrystalline solid material containing a glass phase, which is produced, for example, by melting a matrix material such as cerium oxide at a high temperature to form a glass, and then adding an oxide such as calcium oxide (CaO). Magnesium oxide (MgO), aluminum oxide (Al ₂ O ₃ ), barium oxide (BaO), potassium oxide (K ₂ O) or sodium oxide (Na ₂ O) as a modifier, followed by sintering, so that Crystallization occurs in the glass to form a polycrystalline solid to produce a glass-ceramic component, wherein the modifier is used to increase the crystallinity of the overall glass-ceramic component.

According to the present invention, the particle size of the glass-ceramic component of the present invention can be adjusted by itself, such as, but not limited to, between 1 micrometer and 10 micrometers or less than 1 micrometer.

According to the present invention, the particle size of the first type of ceramic component of the present invention can be adjusted by itself, such as, but not limited to, between 1 micrometer and 10 micrometers or less than 1 micrometer.

Since the microwave dielectric glass-ceramic composition of the present invention contains a glass-ceramic component and a first-class ceramic component, the microwave dielectric glass-ceramic composition of the present invention has the advantage of low sintering temperature, and thus can be at a temperature and a melting point of 1000 ° C or lower. a lower metal co-firing, for example, co-firing with a noble metal such as gold, silver, or the like, or co-firing with a base metal under a reducing atmosphere, such as copper, nickel, etc. Therefore, the microwave dielectric glass ceramic composition of the present invention can be applied to a low temperature co-fired ceramic technology.

Further, the microwave dielectric glass ceramic material formed by the microwave dielectric glass ceramic composition of the present invention has the advantages of low dielectric constant in a high frequency environment and high in containing a first type of ceramic component. The microwave dielectric glass ceramic composition of the present invention can be used to prepare a desired microwave dielectric material.

In accordance with the present invention, the high frequency environment of the present invention refers to a frequency between 4 and 10 gigahertz (GHz). Preferably, the frequency is between 7 and 10 gigahertz (GHz).

Preferably, the glass ceramic component is present in an amount between 50% and 80% by weight.

Preferably, the glass ceramic component is present in an amount between 70% and 80% by weight.

Preferably, the content of the first type of ceramic component is between 20% and 30% by weight.

According to the present invention, the microwave dielectric glass ceramic of the present invention is used when the content of the glass ceramic component is between 70% by weight and 80% by weight and the content of the first type ceramic component is between 20% by weight and 30% by weight. The composition not only has a low sintering temperature, but also a microwave dielectric glass ceramic material formed after low-temperature sintering has a good quality factor (greater than 16000 GHz and up to nearly 25,000) and a low dielectric constant in a high frequency environment ( Less than 10).

Preferably, the microwave dielectric glass ceramic composition comprises a second type of ceramic component selected from the group consisting of calcium titanate (CaTiO ₃ ) and zirconium titanate. a combination of (ZrTiO ₄ ), titanium dioxide (TiO ₂ ), and the like, wherein the content of the glass ceramic component is greater than 0% by weight and less than or equal to 70% by weight based on the total weight of the microwave dielectric glass ceramic composition. The content of one type of ceramic component is more than 0% by weight and less than or equal to 50% by weight, and the content of the second type of ceramic component is more than 0% by weight and less than or equal to 20% by weight.

According to the present invention, the first type of ceramic component of the present invention is And the second type of ceramic component refers to an inorganic oxide powder which has a specific phase structure after a calcination process.

According to the present invention, since the microwave dielectric glass ceramic composition further comprises a specific proportion of the second type ceramic component, the microwave dielectric glass ceramic composition of the present invention not only has the aforementioned advantages, but also forms a microwave dielectric after low temperature sintering. The electro-optic ceramic material has the advantages of low capacitance temperature coefficient and good high frequency characteristics such as low temperature frequency coefficient, so the microwave dielectric glass ceramic composition of the invention can be used for preparing a more ideal microwave dielectric material.

Preferably, the glass ceramic component is present in an amount between 50% and 80% by weight.

According to the present invention, when the content of the glass ceramic component is between 50% by weight and 80% by weight, in the microwave dielectric glass ceramic composition of the present invention, the glass ceramic component is a main phase component, which is more effective in reducing The sintering temperature of the microwave dielectric glass ceramic composition makes the microwave dielectric glass ceramic composition more suitable for low temperature co-fired ceramic technology.

More preferably, the glass ceramic component is present in an amount between 70% and 80% by weight.

According to the present invention, when the content of the glass ceramic component is between 70% by weight and 80% by weight, the microwave dielectric glass ceramic composition can have a suitable low temperature sintering temperature, thereby applying the low temperature co-fired ceramic technology. The microwave dielectric glass ceramic material prepared by sintering the microwave dielectric glass ceramic composition at a low temperature maintains a certain density and crystallinity.

Preferably, the content of the first type of ceramic component is between 10% and 25% by weight.

According to the present invention, when the content of the first type of ceramic component is introduced The microwave dielectric glass ceramic material prepared by the microwave dielectric glass ceramic composition of the present invention has a better quality factor after being sintered at a temperature of between 10% by weight and 25% by weight.

More preferably, the content of the first type of ceramic component is between 15% and 23% by weight.

According to the present invention, when the content of the first type ceramic component is between 15% by weight and 23% by weight, the microwave dielectric glass ceramic material of the present invention has a microwave dielectric glass ceramic material prepared by low temperature sintering. A better quality factor (eg greater than 16000 GHz).

Preferably, the content of the second type of ceramic component is between 5 wt% and 15 wt%.

According to the present invention, when the content of the second type ceramic component is between 5 wt% and 15 wt%, the microwave dielectric glass ceramic composition of the present invention has a microwave dielectric glass ceramic material prepared by low temperature sintering. Lower capacitance temperature coefficient and lower temperature frequency coefficient.

Preferably, the content of the second type of ceramic component is between 5 wt% and 10 wt%.

According to the present invention, when the content of the second type ceramic component is between 5% by weight and 10% by weight, the microwave dielectric glass ceramic material of the present invention has a microwave dielectric glass ceramic material prepared by low temperature sintering. A lower temperature coefficient of capacitance and a lower temperature frequency coefficient.

Preferably, the glass-ceramic component is selected from the group consisting of calcium magnesium citrate (CaMgSi ₂ O ₆ ), calcium silicate (CaSiO ₃ ), and combinations thereof.

Preferably, the second type of ceramic component is calcium titanate.

The invention also provides a microwave dielectric glass ceramic material which is obtained by sintering the microwave dielectric glass ceramic composition described above at a temperature between 700 ° C and 1000 ° C.

Preferably, wherein the temperature is between 900 and 1000 °C.

Preferably, the microwave dielectric glass ceramic material has a dielectric constant of less than 15 at a frequency between 7 and 10 gigahertz (GHz).

According to the present invention, since the dielectric constant of the microwave dielectric glass ceramic material of the present invention is less than 15 at a frequency between 7 and 10 gigahertz (GHz), the component produced is applied to a high frequency environment. It can greatly shorten the delay time of the signal.

Preferably, the microwave dielectric glass ceramic material has a quality factor greater than 13000 GHz at a frequency between 7 and 10 gigahertz (GHz).

According to the present invention, since the quality factor of the microwave dielectric glass ceramic material of the present invention is greater than 13,000 GHz at a frequency between 7 and 10 gigahertz (GHz), the components produced are used in a high frequency environment. It can greatly reduce the dielectric loss and shorten the signal delay time, thereby improving the signal quality.

More preferably, the microwave dielectric glass ceramic material of the present invention has the advantages of a dielectric constant of less than 15 and a quality factor of more than 13,000 GHz in a high frequency environment.

Preferably, the microwave dielectric glass ceramic material has a temperature frequency coefficient of ±15 ppm/° C. at a frequency between 7 and 10 gigahertz (GHz) and between -55 ° C and 125 ° C. between.

According to the invention, due to 7 to 10 gigahertz (GHz) The frequency of the microwave dielectric glass ceramic material of the present invention is between ±15 ppm/° C., and the fabricated components are applied to the high frequency at a frequency between -55 ° C and 125 ° C. Good thermal stability in the environment.

Preferably, the microwave dielectric glass ceramic material has a temperature coefficient of capacitance between ±55 ppm/° C. at a temperature between -55 ° C and 125 ° C.

According to the present invention, since the temperature coefficient of capacitance of the microwave dielectric glass ceramic material of the present invention is between ±30 ppm/°C due to the temperature between -55 ° C and 125 ° C, the capacitance of the fabricated component has a good Thermal stability.

More preferably, the microwave dielectric glass ceramic material of the present invention has a dielectric constant of less than 15, a quality factor of more than 13,000 GHz, a temperature coefficient coefficient of ±15 ppm/° C., and a temperature coefficient of capacitance in a high frequency environment. The advantage is between ±30ppm/°C.

Preferably, the microwave dielectric glass ceramic material has a dielectric constant of less than 10 at a frequency between 7 and 10 gigahertz (GHz).

More preferably, the microwave dielectric glass ceramic material of the present invention has a dielectric constant of less than 10, a quality factor of more than 13,000 GHz, a temperature coefficient coefficient of ±15 ppm/° C., and a temperature coefficient of capacitance in a high frequency environment. The advantage is between ±30ppm/°C.

Preferably, the microwave dielectric glass ceramic material has a quality factor between 13000 GHz and 25000 GHz at a frequency between 7 and 10 gigahertz (GHz).

In order to understand the technical features and practical functions of the present invention in detail, and in accordance with the contents of the specification, the drawings and preferred embodiments are further described to illustrate the technical means for the purpose of the present invention.

Examples 1 to 30

In the first embodiment, the different glass ceramic components and the first ceramic component are mixed in different proportions to form a microwave dielectric glass ceramic composition, and then the microwave dielectric glass ceramic composition and the copper material are successively heated at a temperature of 1000 ° C. And co-sintering in a nitrogen atmosphere to obtain microwave dielectric glass ceramic materials of various embodiments, wherein the copper material forms an electrode after co-sintering. After preparing the microwave dielectric glass ceramic materials of the respective examples, the dielectric constant and quality factor of each material were measured at a frequency between 7 and 10 GHz. The composition, ratio, dielectric constant and quality factor of the microwave dielectric glass ceramic materials of Examples 1 to 30 are shown in Table 1.

It can be seen from Table 1 that the microwave dielectric glass ceramic materials of the embodiments have a dielectric constant of less than 10 and a quality factor of more than 16,000 in a high frequency environment (7 to 10 GHz), so that the present invention can be known. The microwave dielectric glass ceramic material has the advantages of low dielectric constant and high quality factor when applied to a high frequency environment.

Further, since each embodiment is prepared by co-firing each microwave dielectric glass ceramic composition with a copper material at a temperature of 1000 ° C and in a reducing atmosphere, the microwave dielectric glass ceramic of the present invention can be known. The composition has a low sintering temperature and can be co-fired with a metal having a lower melting point such as a noble metal such as gold or silver or a base metal such as copper. Therefore, it can be applied to a low-temperature co-fired ceramic technology, and a microwave dielectric glass ceramic obtained after sintering. When the material is applied to a high frequency environment and has the advantages of good high frequency characteristics such as low dielectric constant and high quality factor, the microwave dielectric glass ceramic composition of the present invention is an ideal microwave dielectric material.

Examples 31 to 60

In Examples 31 to 60, different glass ceramic components, first ceramic components and second ceramic components are mixed in different proportions to form a microwave dielectric glass ceramic composition, and then each microwave dielectric glass ceramic composition is combined with copper. The material is co-sintered at a temperature of 1000 ° C and under a nitrogen atmosphere to obtain a microwave dielectric glass ceramic material of each embodiment, wherein the copper material forms an electrode after co-sintering, and the components and ratios of the examples are as shown in Table 2, for example. Show.

Table 2. Compositions and ratios of the microwave dielectric glass ceramic materials of Examples 31 to 60

After the microwave dielectric glass ceramic materials of Examples 1 to 30 were prepared, the dielectric constant and quality factor of each material were measured at a frequency between 7 and 10 GHz, at a frequency between 7 and 10 GHz and - The temperature frequency coefficient of each material is measured at a temperature between 55 ° C and 125 ° C, and the temperature coefficient of capacitance (TCC) of each material is measured at a temperature between -55 ° C and 125 ° C. The dielectric constant, quality factor, temperature frequency coefficient, and temperature coefficient of capacitance are shown in Table 3.

Table 3. Dielectric Constants, Quality Factor, Temperature Frequency Coefficient, and Temperature Coefficient of Capacitance of Microwave Dielectric Glass Ceramic Materials of Examples 31 to 60

It can be seen from Table 3 that the microwave dielectric glass ceramic materials of Examples 31 to 60 have a dielectric constant of less than 10 and a quality factor of more than 13,000 in a high frequency environment (7 to 10 GHz), and the temperature frequency coefficient is Both are between ±15ppm/°C, and the temperature coefficient of capacitance of each material is between ±30ppm/°C and even between ±28ppm/°C, which is in line with the Electronic Industries Association (EIA). Standard COG (Ultra Stable) material grade (within the temperature range between -55 ° C and 125 ° C, the capacitance of each material does not vary by more than ± 30 ppm / ° C).

Further, since each embodiment is prepared by co-firing each microwave dielectric glass ceramic composition with a copper material at a temperature of 1000 ° C and in a reducing atmosphere, the microwave dielectric glass ceramic of the present invention can be known. The composition has a low sintering temperature and can be co-fired with a metal having a lower melting point such as a noble metal such as gold or silver or a base metal such as copper. Therefore, it can be applied to a low-temperature co-fired ceramic technology, and a microwave dielectric glass ceramic obtained after sintering. Material applied to high frequency ring The microwave dielectric glass ceramic composition of the present invention is an ideal microwave dielectric material, and has the advantages of low dielectric constant, high quality factor, low capacitance temperature coefficient, and low temperature frequency coefficient. .

Claims (21)

A microwave dielectric glass ceramic composition comprising: a glass ceramic component, the structural formula of the glass ceramic component is Ca _x A _y Si _z O _(x+y+2z) , wherein the A is selected from the following The group formed is: magnesium (Mg), barium (Ba), potassium (K), sodium (Na), and aluminum (Al), wherein the x-number is greater than the total number of moles of the elements of the glass-ceramic component. 0 mole percent and less than or equal to 50 mole percentage, y is between 0 mole percentage to 50 mole percentage, and z system is greater than 0 mole percentage and less than or equal to 50 mole percentage, wherein the microwave dielectric Based on the total weight of the glass ceramic composition, the content of the glass ceramic component is more than 0% by weight (wt%) and less than or equal to 80% by weight; and a first type of ceramic component selected from the group consisting of group: aluminum silicate _{(Al 2 Si 2 O 7)} , zirconium silicate (ZrSiO _4), potassium aluminum silicate (KAlSi ₃ O _8), sodium aluminum silicate (NaAlSi ₃ O _8), sodium aluminum silicate (of CaAl ₂ Si ₂ O ₈ ), magnesium citrate (Mg ₂ SiO ₄ ), magnesium zirconate titanate (MgZrSrTiO ₆ ), magnesium aluminate (MgAl ₂ O ₄ ), magnesium titanate (MgTiO ₃ ), zinc antimonate (Zn) ₂ SiO _4), silicon Fresnoite (BaTiSi ₃ O _9), four barium titanate (BaTi ₄ O _9), calcium tungstate (CaWO _4), n-niobium (SmNbO _4), LaNbO4 (LaNbO ₄₎ and combinations thereof, etc., samarium acid The content of the first type of ceramic component is greater than 0 weight percent (wt%) and less than or equal to 60 wt%, based on the total weight of the microwave dielectric glass ceramic composition. The microwave dielectric glass ceramic composition according to claim 1, wherein the glass ceramic component is contained in an amount of from 50% by weight to 80% by weight. The microwave dielectric glass ceramic composition according to claim 2, wherein the glass ceramic component is contained in an amount of from 70% by weight to 80% by weight. The microwave dielectric glass ceramic composition according to claim 3, wherein the microwave dielectric glass ceramic composition The content of the first type of ceramic component is between 20% and 30% by weight. The microwave dielectric glass ceramic composition according to claim 1, which comprises a second type ceramic component selected from the group consisting of calcium titanate (CaTiO3), a combination of zirconium titanate (ZrTiO ₄ ), titanium dioxide (TiO ₂ ), and the like, wherein the content of the glass ceramic component is greater than 0% by weight and less than or equal to 70% by weight based on the total weight of the microwave dielectric glass ceramic composition. The content of the first type ceramic component is more than 0% by weight and less than or equal to 50% by weight, and the content of the second type ceramic component is more than 0% by weight and less than or equal to 20% by weight. The microwave dielectric glass ceramic composition according to claim 5, wherein the glass ceramic component is contained in an amount of from 50% by weight to 80% by weight. The microwave dielectric glass ceramic composition according to claim 6, wherein the glass ceramic component is contained in an amount of from 70% by weight to 80% by weight. The microwave dielectric glass ceramic composition according to claim 7, wherein the content of the first type ceramic component is between 10% by weight and 25% by weight. The microwave dielectric glass ceramic composition according to claim 8, wherein the content of the first type ceramic component is between 15% by weight and 23% by weight. The microwave dielectric glass-ceramic composition according to claim 9, wherein the content of the second-type ceramic component is between 5 wt% and 15 wt%. The microwave dielectric glass ceramic composition of claim 10, wherein the second type of ceramic component is present in an amount between 5 wt% and 10 wt%. The microwave dielectric glass-ceramic composition according to any one of claims 1 to 11, wherein the glass-ceramic component is selected from the group consisting of calcium magnesium citrate (CaMgSi ₂ O ₆ ), cerium Calcium acid (CaSiO ₃ ) and combinations thereof. The microwave dielectric glass ceramic composition of claim 12, wherein The second type of ceramic component is calcium titanate. A microwave dielectric glass-ceramic material obtained by sintering the microwave dielectric glass-ceramic composition according to any one of claims 1 to 13 at a temperature between 700 ° C and 1000 ° C. The microwave dielectric glass ceramic material of claim 14, wherein the temperature is between 900 and 1000 °C. The microwave dielectric glass ceramic material according to claim 14 or 15, wherein the dielectric constant is less than 15 at a frequency between 7 and 10 gigahertz (GHz). The microwave dielectric glass ceramic material of claim 16 having a quality factor greater than 13,000 GHz at a frequency between 7 and 10 gigahertz (GHz). The microwave dielectric glass ceramic material according to claim 17, wherein the temperature frequency coefficient is between ± 7 gigahertz (GHz) and between -55 ° C and 125 ° C. Between 15 ppm/°C. The microwave dielectric glass ceramic material of claim 18, wherein the temperature coefficient of capacitance is between ±55 ppm/°C at a temperature between -55 ° C and 125 ° C. The microwave dielectric glass ceramic material according to claim 19, which has a dielectric constant of less than 10 at a frequency between 7 and 10 gigahertz (GHz). The microwave dielectric glass ceramic material of claim 20, having a quality factor between 1 and 10 GHz to 25,000 GHz at a frequency between 7 and 10 gigahertz (GHz).