TW201436679A - Method of applying a stress relieving material to an embedded magnetic component - Google Patents

Method of applying a stress relieving material to an embedded magnetic component Download PDF

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Publication number
TW201436679A
TW201436679A TW102141016A TW102141016A TW201436679A TW 201436679 A TW201436679 A TW 201436679A TW 102141016 A TW102141016 A TW 102141016A TW 102141016 A TW102141016 A TW 102141016A TW 201436679 A TW201436679 A TW 201436679A
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Taiwan
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substrate
cavity
core
forming
hole
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TW102141016A
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Chinese (zh)
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Ciprian Marcoci
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Multi Fineline Electronix Inc
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Priority claimed from PCT/US2013/032667 external-priority patent/WO2014051701A1/en
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Publication of TW201436679A publication Critical patent/TW201436679A/en

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Abstract

A method of manufacturing a substrate includes providing a substrate with a cavity and a post in the cavity, dispensing an elastic filling material in the cavity, inserting a magnetic core including a core hole such the post extends through the core hole, curing the elastic filling material, forming holes in the substrate outside of the cavity and in the post, and forming via-in-via structures in the holes.

Description

將應力消除材料施用於嵌入式磁性元件的方法 Method of applying a stress relief material to an embedded magnetic component

本發明係關於具有嵌入式磁性元件之基板。更特定言之,本發明係關於具有由應力消除材料圍繞之嵌入式磁性元件之基板。 This invention relates to substrates having embedded magnetic components. More particularly, the present invention relates to substrates having embedded magnetic components surrounded by stress relief materials.

已知藉由將磁心206(亦稱作鐵氧體磁心)嵌入印刷電路板202中及藉由使用導體208及通路210形成圍繞磁心206之繞組來提供變壓器,如例如本申請案之圖21中所示,對應於美國專利第8,203,418號中之圖式。 It is known to provide a transformer by embedding a core 206 (also referred to as a ferrite core) in a printed circuit board 202 and by forming a winding around the core 206 using conductors 208 and vias 210, as in, for example, FIG. 21 of the present application. The figure corresponds to the pattern in U.S. Patent No. 8,203,418.

美國專利第8,203,418號提供一種積體平面變壓器及電子元件,其包括至少一個安置於平面基板中之寬頻平面變壓器。美國專利第8,203,418號使用圓柱形空腔204以固持磁心206。磁心206具有環形形狀,其中間具有孔洞。在磁心206中間之孔洞填充有環氧材料,鑽通該環氧材料形成通路。美國專利第8,203,418號中之空腔204為圓柱形的以使得磁心206之中心部分由環氧材料支撐且暴露於層壓負荷,該等層壓負荷為在層壓製程期間黏合不同層時施用於平面基板及磁心206之壓縮負荷。由於磁心206之中心部分為環氧材料,因此在磁心206之中心部分產生通路較為困難。平面基板及中心核心中所用之材料之熱膨脹係數(CTE)的失配將產生 熱應力,其將導致通路及/或其中所用之介電材料被破壞。 U.S. Patent No. 8,203,418 provides an integrated planar transformer and electronic component including at least one broadband planar transformer disposed in a planar substrate. U.S. Patent No. 8,203,418 uses a cylindrical cavity 204 to hold the core 206. The core 206 has a ring shape with a hole therebetween. The hole in the middle of the core 206 is filled with an epoxy material, and the epoxy material is drilled to form a passage. The cavity 204 of U.S. Patent No. 8,203,418 is cylindrical such that the central portion of the core 206 is supported by an epoxy material and exposed to a laminating load applied to the different layers during the lamination process. The compressive load of the planar substrate and the core 206. Since the central portion of the core 206 is an epoxy material, it is difficult to create a path in the central portion of the core 206. The mismatch in the coefficient of thermal expansion (CTE) of the materials used in the planar substrate and the center core will result Thermal stress, which will cause the via and/or the dielectric material used therein to be destroyed.

美國專利第7,271,697號提供小型電路及電感器元件,其中在平面基板之每一側上形成多層印刷電路。美國專利第7,271,697號使用預浸漬之複合纖維材料(預浸物材料)以填充圍繞磁心之空間。美國專利第7,271,697號中使用預浸物材料之原因在於其有助於製造製程且預浸物材料之熱膨脹係數與平面基板相同,因為預浸物及平面基板由相同材料製成。然而,本申請案之發明者隨後發現,預浸物材料在層壓期間順應空間且對磁心賦予一定量之壓力,其會因磁致伸縮而負面地影響磁心之磁導率性質。 U.S. Patent No. 7,271,697 provides a small circuit and inductor component in which a multilayer printed circuit is formed on each side of a planar substrate. U.S. Patent No. 7,271,697 uses a pre-impregnated composite fiber material (prepreg material) to fill the space surrounding the core. The reason for using the prepreg material in U.S. Patent No. 7,271,697 is that it contributes to the manufacturing process and the prepreg material has the same coefficient of thermal expansion as the planar substrate because the prepreg and the planar substrate are made of the same material. However, the inventors of the present application subsequently found that the prepreg material conforms to the space during lamination and imparts a certain amount of pressure to the core which negatively affects the magnetic permeability properties of the core due to magnetostriction.

美國專利申請公開案第2008/0816124號教示一種無線電感裝置及製造此種電感裝置之方法。美國專利申請公開案第2008/0816124號中之製造方法包括在兩個基板(頂部及底部)上形成導體及在兩個基板之間用磁心連接該兩個基板以產生電感裝置。美國專利公開案第2008/0816124號未使用緩衝材料來防止在製造製程期間對磁心之壓縮,該壓縮會導致磁心損壞且亦會因磁致伸縮而負面地影響磁心之磁導率性質。 U.S. Patent Application Publication No. 2008/0816124 teaches a wireless inductive device and a method of making such an inductive device. The manufacturing method of U.S. Patent Application Publication No. 2008/0816124 includes forming a conductor on two substrates (top and bottom) and magnetically connecting the two substrates between the two substrates to produce an inductive device. U.S. Patent Publication No. 2008/0816124 does not use a cushioning material to prevent compression of the core during the manufacturing process, which can result in damage to the core and also negatively affect the magnetic permeability properties of the core due to magnetostriction.

美國專利第8,234,778號教示基板電感裝置及用以製造電感裝置之方法,該電感裝置包含三個基板:頂部、底部及中間。頂部及底部基板含有導體且中間基板含有具有電接頭之磁心。三個基板經連接或組裝以產生裝置。此配置難以在大規模生產中製造且提供較低通路孔密度。 U.S. Patent No. 8,234,778 teaches a substrate inductive device and a method for fabricating an inductive device that includes three substrates: a top, a bottom, and a middle. The top and bottom substrates contain conductors and the intermediate substrate contains a core with electrical contacts. The three substrates are connected or assembled to create a device. This configuration is difficult to manufacture in mass production and provides a lower via hole density.

為解決上文所述之問題,本發明之較佳具體實例提供一種提供基板之方法,該基板具有由應力消除材料圍繞之嵌入式磁性元件,該應力消除材料保護磁性元件免受機械應力且消除對磁性元件之磁致伸縮效 應。 In order to solve the problems described above, a preferred embodiment of the present invention provides a method of providing a substrate having an embedded magnetic member surrounded by a stress relief material that protects the magnetic member from mechanical stress and eliminates Magnetostrictive effect on magnetic components should.

根據本發明之一個較佳具體實例之製造基板之方法包括提供具有空腔及於空腔中之柱體的基板,將彈性填充材料分配於空腔中,插入包括核心孔之磁心以使得柱體貫穿核心孔,固化彈性填充材料,在基板中於空腔外及柱體內形成孔洞,及在孔洞中形成孔中孔結構。 A method of manufacturing a substrate according to a preferred embodiment of the present invention includes providing a substrate having a cavity and a pillar in the cavity, dispensing the elastic filler material into the cavity, and inserting a core including the core hole to cause the cylinder Through the core hole, the elastic filling material is solidified, holes are formed in the substrate outside the cavity and in the column body, and a hole mesoporous structure is formed in the hole.

該方法較佳進一步包括形成連接至孔中孔結構之導體。導體及孔中孔結構較佳提供變壓器之一次及二次繞組。 The method preferably further includes forming a conductor connected to the pore structure in the pore. The conductor and the hole-to-hole structure preferably provide primary and secondary windings of the transformer.

根據本發明之一個較佳具體實例之製造基板之方法包括提供具有空腔及於空腔中之柱體的基板,插入包括彈性填充材料塗層及核心孔之磁心以使得柱體貫穿核心孔,在基板中於空腔外及柱體內形成孔洞,及在孔洞中形成孔中孔結構。 A method of manufacturing a substrate according to a preferred embodiment of the present invention includes providing a substrate having a cavity and a pillar in the cavity, inserting a core including a coating of an elastic filler material and a core hole such that the pillar penetrates the core hole, A hole is formed in the substrate outside the cavity and in the column body, and a hole mesoporous structure is formed in the hole.

該方法較佳進一步包括在插入磁心之步驟之前在空腔中提供預浸物環。該方法較佳進一步包括形成連接至孔中孔結構之導體。導體及孔中孔結構較佳提供變壓器之一次及二次繞組。 Preferably, the method further comprises providing a prepreg ring in the cavity prior to the step of inserting the core. The method preferably further includes forming a conductor connected to the pore structure in the pore. The conductor and the hole-to-hole structure preferably provide primary and secondary windings of the transformer.

形成孔中孔結構之步驟較佳包括在孔洞中形成金屬層。形成孔中孔結構之步驟較佳進一步包括在孔洞中之金屬層之上形成絕緣塗層。形成孔中孔結構之步驟較佳進一步包括在絕緣塗層之上形成金屬層。 The step of forming the pore structure in the pore preferably includes forming a metal layer in the pore. The step of forming the pore structure in the pore preferably further includes forming an insulating coating over the metal layer in the pore. The step of forming the pore structure in the pore preferably further comprises forming a metal layer over the insulating coating.

本發明之上述及其他特徵、組件、步驟、特性及優點將自本發明之較佳具體實例之以下詳細描述參考附圖而變得更加顯而易見。 The above and other features, components, steps, features and advantages of the present invention will become more apparent from

10‧‧‧基板 10‧‧‧Substrate

11‧‧‧空腔 11‧‧‧ cavity

12‧‧‧柱體 12‧‧‧Cylinder

13‧‧‧彈性填充材料 13‧‧‧Flexible filling material

14‧‧‧磁心 14‧‧‧Magnetic core

15‧‧‧銅箔 15‧‧‧ copper foil

16‧‧‧通路孔 16‧‧‧ access hole

17‧‧‧鍍銅 17‧‧‧ Copper plating

18‧‧‧導體 18‧‧‧Conductor

19‧‧‧聚對二甲苯塗層 19‧‧‧Polypylene coating

20a‧‧‧預鑽孔之黏著劑 20a‧‧‧Pre-drilled adhesive

20b‧‧‧銅層/銅箔 20b‧‧‧Bronze/copper foil

21‧‧‧通路孔開口 21‧‧‧ access hole opening

22‧‧‧鍍銅 22‧‧‧ copper plating

23‧‧‧導體 23‧‧‧Conductors

30‧‧‧基板 30‧‧‧Substrate

31‧‧‧空腔 31‧‧‧ cavity

32‧‧‧柱體 32‧‧‧Cylinder

33‧‧‧彈性材料塗層 33‧‧‧Elastic material coating

34‧‧‧磁心 34‧‧‧Magnetic core

34a‧‧‧預浸物環 34a‧‧‧Prepreg ring

34b‧‧‧預浸物層 34b‧‧‧Prepreg layer

35‧‧‧銅箔 35‧‧‧ copper foil

36‧‧‧通路孔 36‧‧‧ access hole

37‧‧‧鍍銅 37‧‧‧copper plating

38‧‧‧導體 38‧‧‧Conductors

202‧‧‧印刷電路板 202‧‧‧Printed circuit board

204‧‧‧圓柱形空腔 204‧‧‧ cylindrical cavity

206‧‧‧磁心 206‧‧‧Magnetic core

208‧‧‧導體 208‧‧‧ conductor

210‧‧‧通路 210‧‧‧ pathway

圖1-12展示根據本發明之第一較佳具體實例之製造具有嵌入式磁性元 件之基板的方法。 1-12 show the fabrication of an embedded magnetic element in accordance with a first preferred embodiment of the present invention The method of the substrate.

圖1為具有空腔11之基板10的透視圖。 1 is a perspective view of a substrate 10 having a cavity 11.

圖2為展示插入空腔11中之磁心14的剖面側視圖。 2 is a cross-sectional side view showing the core 14 inserted into the cavity 11.

圖3為具有磁心14之基板10的透視圖。 3 is a perspective view of a substrate 10 having a magnetic core 14.

圖4為展示層壓至基板10之銅箔15的剖面側視圖。 4 is a cross-sectional side view showing the copper foil 15 laminated to the substrate 10.

圖5為展示在基板10中鑽出之通路孔16的剖面側視圖。 FIG. 5 is a cross-sectional side view showing the via hole 16 drilled in the substrate 10.

圖6為展示在基板10上及通路孔16內之鍍銅17的剖面側視圖。 FIG. 6 is a cross-sectional side view showing copper plating 17 on the substrate 10 and in the via hole 16.

圖7為展示在基板10上之導體18的透視圖。 FIG. 7 is a perspective view of conductor 18 shown on substrate 10.

圖8為展示在基板10上之聚對二甲苯塗層19的側面剖視圖。 FIG. 8 is a side cross-sectional view showing the parylene coating 19 on the substrate 10.

圖9為展示層壓於基板10上之預鑽孔之黏著劑20a及銅層20b的側面剖視圖。 Fig. 9 is a side cross-sectional view showing the pre-drilled adhesive 20a and the copper layer 20b laminated on the substrate 10.

圖10為展示形成於基板10上之銅箔20b中之通路孔開口21的側面剖視圖。 FIG. 10 is a side cross-sectional view showing the via hole opening 21 in the copper foil 20b formed on the substrate 10.

圖11為展示形成於基板10上及通路孔16內之鍍銅22的側面剖視圖。 FIG. 11 is a side cross-sectional view showing the copper plating 22 formed on the substrate 10 and in the via hole 16.

圖12為展示形成於基板10上之導體23的透視圖。 FIG. 12 is a perspective view showing the conductor 23 formed on the substrate 10.

圖13-20展示根據本發明之第二較佳具體實例之製造具有嵌入式磁性元件之基板的方法。 13-20 show a method of fabricating a substrate having an embedded magnetic component in accordance with a second preferred embodiment of the present invention.

圖13為具有空腔31之基板30的透視圖。 FIG. 13 is a perspective view of a substrate 30 having a cavity 31.

圖14為展示插入空腔31中之磁心34的剖面側視圖。 FIG. 14 is a cross-sectional side view showing the core 34 inserted into the cavity 31.

圖15為具有預塗磁心34之基板30的透視圖。 15 is a perspective view of a substrate 30 having a pre-coated core 34.

圖16為展示在基板30上之預浸物層34b及銅箔35的剖面側視圖。 FIG. 16 is a cross-sectional side view showing the prepreg layer 34b and the copper foil 35 on the substrate 30.

圖17為展示層壓至基板30之預浸物層34b及銅箔35的剖面側視圖。 17 is a cross-sectional side view showing the prepreg layer 34b and the copper foil 35 laminated to the substrate 30.

圖18為展示在基板30中鑽出之通路孔36的剖面側視圖。 FIG. 18 is a cross-sectional side view showing the via hole 36 drilled in the substrate 30.

圖19為展示在基板30上及通路孔36內之鍍銅37的剖面側視圖。 19 is a cross-sectional side view showing copper plating 37 on substrate 30 and via holes 36.

圖20為展示在基板30上之導體38的透視圖。 FIG. 20 is a perspective view of conductor 38 shown on substrate 30.

圖21展示將磁心嵌入印刷電路板中之已知方法。 Figure 21 shows a known method of embedding a magnetic core in a printed circuit board.

圖1-12展示根據本發明之第一較佳具體實例之製造具有嵌入式磁性元件之基板的方法。圖13-20展示根據本發明之第二較佳具體實例之製造具有嵌入式磁性元件之基板的方法。 1-12 show a method of fabricating a substrate having an embedded magnetic component in accordance with a first preferred embodiment of the present invention. 13-20 show a method of fabricating a substrate having an embedded magnetic component in accordance with a second preferred embodiment of the present invention.

與美國專利第8,203,418號形成對比,本發明之較佳具體實例包括環形空腔,該環形空腔包括安置於環形空腔中間的平面基板之支撐柱體。支撐柱體降低磁心上之層壓負荷。在本發明之較佳具體實例中,在磁心中心之通路形成於平面基板之支撐柱體中,且不形成於如美國專利第8,203,418號之環氧材料中。由於在本發明之較佳具體實例中通路形成於支撐柱體而非環氧材料中,因此可更可靠地形成通路。由於通路安置於平面基板之大部分均質材料中,因此可顯著降低並防止熱應力,此係因為平面基板與環氧材料之間的熱膨脹係數不存在失配。環形空腔顯著降低及防止任何應力作用於磁心。平面基板之支撐柱體將吸收在層壓電路層期間所賦予之壓縮負荷,從而顯著降低施加於磁心之壓縮力。 In contrast to U.S. Patent No. 8,203,418, a preferred embodiment of the invention includes an annular cavity comprising a support cylinder disposed on a planar substrate intermediate the annular cavity. The support cylinder reduces the lamination load on the core. In a preferred embodiment of the invention, the via in the center of the core is formed in the support pillar of the planar substrate and is not formed in an epoxy material such as U.S. Patent No. 8,203,418. Since the passage is formed in the support cylinder instead of the epoxy material in the preferred embodiment of the present invention, the passage can be formed more reliably. Since the vias are disposed in a majority of the homogeneous material of the planar substrate, thermal stress can be significantly reduced and prevented because there is no mismatch in the coefficient of thermal expansion between the planar substrate and the epoxy material. The annular cavity significantly reduces and prevents any stress from acting on the core. The support cylinder of the planar substrate will absorb the compressive load imparted during lamination of the circuit layer, thereby significantly reducing the compressive force applied to the core.

本發明之較佳具體實例藉由降低在形成變壓器之製造步驟期間施加於磁心之負荷來解決關於美國專利第7,271,697號之方法的問題。本發明之較佳具體實例使用分配於圍繞磁心之空間中的精確體積之彈性填充材料以防止磁性材料之壓縮及消除空隙。已知空隙會導致在製造製程期 間分層。彈性填充材料較佳為具有低黏度之矽材料;然而,亦可使用其他適合材料,包括可耐受製造製程之條件(諸如溫度)的其他彈性體材料。典型地,在製造開始之前確定彈性填充材料之體積。可使用例如表面掃描來確定空腔及磁心之體積。接著,可藉由自空腔體積扣除磁心體積來確定彈性填充材料之體積,同時考慮彈性填充材料之性質,諸如在任何固化製程期間的膨脹或收縮。較佳精確地確定彈性填充材料之體積,因為過多彈性填充材料會引起破裂。彈性填充材料之體積在製造公差內等於或實質上等於空腔體積減去磁心體積。製造公差包括與形成空腔及磁心相關及與所用彈性填充材料類型之特定性質相關之公差。 A preferred embodiment of the present invention solves the problems associated with the method of U.S. Patent No. 7,271,697 by reducing the load applied to the core during the manufacturing steps of forming the transformer. A preferred embodiment of the present invention uses an elastomeric filler material dispensed in a precise volume around the space of the core to prevent compression of the magnetic material and to eliminate voids. Known voids can lead to manufacturing processes Layered. The elastomeric filler material is preferably a low viscosity crucible material; however, other suitable materials can be used, including other elastomeric materials that can withstand the conditions of the manufacturing process, such as temperature. Typically, the volume of the elastomeric fill material is determined prior to the start of manufacture. Surface scanning can be used, for example, to determine the volume of the cavity and core. The volume of the elastomeric filler material can then be determined by subtracting the core volume from the cavity volume, taking into account the properties of the elastomeric filler material, such as expansion or contraction during any curing process. The volume of the elastomeric filler material is preferably accurately determined because excessive elastic filler material can cause cracking. The volume of the elastomeric fill material is equal to or substantially equal to the cavity volume minus the core volume within manufacturing tolerances. Manufacturing tolerances include tolerances associated with the formation of cavities and cores and the specific properties of the type of elastomeric fill material used.

藉由使用受控體積之彈性填充材料,本發明之較佳具體實例確保彈性填充材料僅位於圍繞磁心之空間中且不遷移至將形成通路之電路區域。待分配之彈性填充材料之體積等於或實質上等於環形空腔體積減去磁心體積。使用自動分配設備施用彈性填充材料消除含有磁心之空腔填充過度/不足之可能性。此亦防止彈性填充材料遷移至通路孔區域。 By using a controlled volume of elastomeric filler material, a preferred embodiment of the present invention ensures that the elastomeric filler material is only located in the space surrounding the core and does not migrate to the circuit region where the via will be formed. The volume of the elastomeric fill material to be dispensed is equal to or substantially equal to the annular cavity volume minus the core volume. The use of an automatic dispensing device to apply the elastomeric filler material eliminates the possibility of overfilling/deficient cavity containing the core. This also prevents the elastic fill material from migrating to the via hole area.

本發明之較佳具體實例包括將磁性材料嵌入平面基板中之方法。更特定言之,本發明之較佳具體實例包括將磁心嵌入印刷電路板或剛撓性電路(rigid flex circuit)內之方法。本發明之較佳具體實例之方法達成產生具有高功能可靠性及具有用於電感器或變壓器之嵌入式磁心之小型電路的高良率製造製程。嵌入製程及電路組態能夠有效並可重複地製造具有高電壓、高電流容量以及對物理應力之高耐受性的小型電路及小型磁性裝置。用於填充環形空腔之彈性填充材料保護磁心免受機械應力且消除對磁心之磁致伸縮效應。 Preferred embodiments of the invention include a method of embedding a magnetic material in a planar substrate. More specifically, preferred embodiments of the present invention include a method of embedding a magnetic core in a printed circuit board or a rigid flex circuit. The method of the preferred embodiment of the present invention achieves a high yield manufacturing process that produces small circuits with high functional reliability and embedded cores for inductors or transformers. The embedded process and circuit configuration enable efficient and reproducible fabrication of small circuits and small magnetic devices with high voltage, high current capacity, and high resistance to physical stress. The elastomeric filler material used to fill the annular cavity protects the core from mechanical stress and eliminates the magnetostrictive effect on the core.

本發明之一些較佳具體實例較佳包括孔中孔結構,其中通路共用同一通路孔,該通路孔顯著降低並防止變壓器之一次繞組與二次繞組之間的漏電感且可減少通路孔之總數,由此允許進一步小型化。美國專利第8,203,418 B2號及/或美國專利公開案第2008/0186124 A1號未使用孔中孔結構,且由此無法達成可能由孔中孔結構獲得之較高佈線密度。 Some preferred embodiments of the present invention preferably include a hole-to-hole structure in which the vias share the same via hole, the via hole significantly reducing and preventing leakage inductance between the primary winding and the secondary winding of the transformer and reducing the total number of via holes Thereby allowing further miniaturization. U.S. Patent No. 8,203,418 B2 and/or U.S. Patent Publication No. 2008/0186124 A1 does not utilize the pore mesoporous structure, and thus the higher wiring density that may be obtained by the pore structure in the pores cannot be achieved.

在使用孔中孔結構之本發明之較佳具體實例中,在磁心附近在平面基板中鑽出之通路孔的壁上製造多個同軸獨立導體。平面基板典型地為印刷電路板或剛撓性電路。印刷電路板可由FR-4環氧層壓片或任何其他適合材料製成。可使用任何適合材料,包括例如基於聚醯亞胺之包層、包銅聚醯亞胺、環氧樹脂、丙烯酸類黏著劑、包銅環氧層壓材料。 In a preferred embodiment of the invention in which the aperture structure is used, a plurality of coaxial independent conductors are fabricated on the walls of the via holes drilled in the planar substrate near the core. The planar substrate is typically a printed circuit board or a rigid flexible circuit. The printed circuit board can be made of FR-4 epoxy laminate or any other suitable material. Any suitable material may be used including, for example, a polyimide-based cladding, a copper-coated polyimide, an epoxy resin, an acrylic adhesive, a copper-clad epoxy laminate.

圖1-12展示根據本發明之第一較佳具體實例之製造具有嵌入式磁性元件之基板的方法。 1-12 show a method of fabricating a substrate having an embedded magnetic component in accordance with a first preferred embodiment of the present invention.

為根據本發明之第一較佳具體實例製造具有嵌入式磁性元件之基板,提供基板10。基板10較佳具有平面形狀。基板10典型地為印刷電路板,例如FR-4環氧層壓片。如圖1中所示,使用數值控制(numerically controlled;NC)之受控深度佈線機在基板10中形成空腔11。空腔11較佳具有環形形狀,其中柱體12在空腔11之中心。可使用產生空腔之任何其他適合方法,包括例如壓花及模製。可使用之可能方法視所用基板之類型而定。替代具有圓形周界,空腔11之周界可具有任何適合形狀,包括例如橢圓形或正方形形狀。 A substrate 10 having an embedded magnetic component is fabricated in accordance with a first preferred embodiment of the present invention. The substrate 10 preferably has a planar shape. Substrate 10 is typically a printed circuit board, such as an FR-4 epoxy laminate. As shown in FIG. 1, a cavity 11 is formed in the substrate 10 using a numerically controlled (NC) controlled depth wiring machine. The cavity 11 preferably has an annular shape with the cylinder 12 at the center of the cavity 11. Any other suitable method of creating a cavity can be used including, for example, embossing and molding. The possible methods that can be used depend on the type of substrate used. Instead of having a circular perimeter, the perimeter of the cavity 11 can have any suitable shape including, for example, an elliptical or square shape.

接著,如圖2中所示,使用受控體積自動分配設備將彈性填充材料13分配至空腔11中。彈性填充材料13較佳為低黏度矽材料。亦 可使用可耐受製造製程之條件(諸如溫度)的任何其他彈性體材料。 Next, as shown in FIG. 2, the elastic fill material 13 is dispensed into the cavity 11 using a controlled volume automatic dispensing device. The elastic filler material 13 is preferably a low viscosity tantalum material. also Any other elastomeric material that can withstand the conditions of the manufacturing process, such as temperature, can be used.

將磁心14插入空腔11中。較佳使用取放設備;然而,可使用任何適合方法(包括手動插入)將磁心14插入空腔11中。磁心14典型地為鐵氧體;然而,亦可使用其他適合磁導性材料,諸如粉末鐵心。磁心14之材料的選擇影響可用於彈性填充材料13之材料的類型。 The core 14 is inserted into the cavity 11. Preferably, the pick and place device is used; however, the core 14 can be inserted into the cavity 11 using any suitable method, including manual insertion. The core 14 is typically ferrite; however, other suitable magnetically permeable materials, such as powder cores, may also be used. The choice of material for the core 14 affects the type of material that can be used for the elastomeric fill material 13.

將額外彈性填充材料13分配於磁心14之頂部。使用用於將原始彈性填充材料13分配於空的空腔11中之相同受控體積自動分配設備來分配額外彈性填充材料13。然而,可使用不同設備分配額外彈性填充材料13。 An additional elastic fill material 13 is dispensed on top of the core 14. The additional elastic fill material 13 is dispensed using the same controlled volume automatic dispensing device for dispensing the original elastic fill material 13 into the empty cavity 11. However, additional elastic fill material 13 can be dispensed using different equipment.

接著熱固化所有彈性填充材料13。用於熱固化彈性填充材料之條件(包括時間及溫度)視用於彈性填充材料之材料而定。固化產生如圖3中所示具有插入空腔11中之磁心14的基板10。 All of the elastic filler material 13 is then thermally cured. The conditions (including time and temperature) used to thermally cure the elastomeric filler material depend on the material used for the elastomeric filler material. Curing produces a substrate 10 having a magnetic core 14 inserted into the cavity 11 as shown in FIG.

如圖4中所示,將銅箔15層壓於基板10之頂部及底部表面上。較佳使用真空層壓製程層壓銅箔15;然而,亦可使用其他適合製程。儘管層壓銅為較佳的,但可使用其他適合導電材料及使用提供導電材料之其他適合方法。舉例而言,替代使用銅,可使用諸如銀或鋁之其他導電材料;且替代層壓銅,可印刷導電墨水。 As shown in FIG. 4, copper foil 15 is laminated on the top and bottom surfaces of substrate 10. It is preferred to use a vacuum lamination process to laminate the copper foil 15; however, other suitable processes may be used. While laminated copper is preferred, other suitable electrically conductive materials can be used and other suitable methods of providing electrically conductive materials can be used. For example, instead of using copper, other conductive materials such as silver or aluminum can be used; and instead of laminated copper, conductive ink can be printed.

圖5展示在磁心14周圍及在柱體12內在基板10中鑽出之通路孔16。較佳使用NC鑽孔機鑽出通路孔16;然而,可使用任何適合方法或機器形成通路孔16。 FIG. 5 shows via holes 16 drilled in the substrate 10 around the core 14 and within the cylinder 12. The via hole 16 is preferably drilled using an NC drill; however, the via hole 16 can be formed using any suitable method or machine.

圖6展示用鍍銅17電鍍基板10之頂部及底部表面以及通路孔16。 6 shows the top and bottom surfaces of the substrate 10 and the via holes 16 plated with copper plating 17.

在圖7中,在基板10之頂部及底部表面上形成導體18。較佳使用標準PCB製程印刷並蝕刻導體18。導體18可用作例如變壓器之繞組。 In FIG. 7, conductors 18 are formed on the top and bottom surfaces of substrate 10. The conductor 18 is preferably printed and etched using a standard PCB process. The conductor 18 can be used as, for example, a winding of a transformer.

接著,如圖8中所示,將聚對二甲苯塗層19施用於基板10之頂部及底部表面上以及通路孔16內以形成絕緣體,由此可形成孔中孔結構。環氧化物、聚合物、液體聚醯胺或任何其他絕緣材料可替代聚對二甲苯使用。 Next, as shown in FIG. 8, a parylene coating 19 is applied to the top and bottom surfaces of the substrate 10 and into the via holes 16 to form an insulator, whereby a hole mesoporous structure can be formed. Epoxides, polymers, liquid polyamines or any other insulating material can be used in place of parylene.

如圖9中所示,將預鑽孔之黏著劑與銅層20層壓於基板10之頂部及底部表面上。較佳使用真空層壓來層壓預鑽孔之黏著劑與銅層20;然而,可使用其他適合製程。 As shown in FIG. 9, the pre-drilled adhesive and copper layer 20 are laminated on the top and bottom surfaces of the substrate 10. Vacuum lamination is preferred to laminate the pre-drilled adhesive with copper layer 20; however, other suitable processes can be used.

如圖10中所示,在基板10之頂部及底部表面上形成通路孔開口21。較佳使用標準PCB製程印刷並蝕刻通路孔開口21。 As shown in FIG. 10, via hole openings 21 are formed on the top and bottom surfaces of the substrate 10. The via opening 21 is preferably printed and etched using a standard PCB process.

接著,如圖11中所示,將鍍銅22電鍍於基板10之頂部及底部表面上以及通路孔16內以形成孔中孔結構。 Next, as shown in FIG. 11, copper plating 22 is plated on the top and bottom surfaces of the substrate 10 and in the via holes 16 to form a via-hole structure.

最後,在圖12中,在基板10之頂部及底部表面上形成導體23。較佳使用標準PCB製程印刷並蝕刻導體23。導體23可為匝比為5:1之變壓器之二次繞組。 Finally, in FIG. 12, conductors 23 are formed on the top and bottom surfaces of the substrate 10. The conductor 23 is preferably printed and etched using a standard PCB process. The conductor 23 can be a secondary winding of a transformer having a turns ratio of 5:1.

圖13-20展示根據本發明之第二較佳具體實例之製造具有嵌入式磁性元件之基板的方法。本發明之第一較佳具體實例與第二較佳具體實例之間的一個差異在於磁心34預塗有彈性材料且使用預浸漬(預浸物)環來填充空腔31。第二較佳具體實例去除彈性填充材料13分配步驟及固化步驟且防止在基板30之表面上產生聚矽氧,由此增加良率。 13-20 show a method of fabricating a substrate having an embedded magnetic component in accordance with a second preferred embodiment of the present invention. One difference between the first preferred embodiment of the present invention and the second preferred embodiment is that the core 34 is pre-coated with an elastomeric material and the pre-impregnated (prepreg) ring is used to fill the cavity 31. The second preferred embodiment removes the dispensing step and the curing step of the elastic filler material 13 and prevents the generation of polyfluorene oxide on the surface of the substrate 30, thereby increasing the yield.

為根據本發明之第二較佳具體實例製造具有嵌入式磁性元件之基板,提供基板30。如同基板10,基板30較佳具有平面形狀。基板30典型地為印刷電路板,例如FR-4環氧層壓片。如圖13中所示,使用NC受控深度佈線機在基板30中形成空腔31。空腔31較佳具有環形形狀,其中柱體32在空腔31之中心。可使用產生空腔之任何其他適合方法,包括例如壓花及模製。可使用之可能方法視所用基板之類型而定。替代具有圓形周界,空腔31之周界可具有任何適合形狀,包括例如橢圓形或正方形形狀。 In order to fabricate a substrate having an embedded magnetic component in accordance with a second preferred embodiment of the present invention, a substrate 30 is provided. Like the substrate 10, the substrate 30 preferably has a planar shape. Substrate 30 is typically a printed circuit board, such as an FR-4 epoxy laminate. As shown in FIG. 13, a cavity 31 is formed in the substrate 30 using an NC controlled depth wiring machine. The cavity 31 preferably has an annular shape with the cylinder 32 at the center of the cavity 31. Any other suitable method of creating a cavity can be used including, for example, embossing and molding. The possible methods that can be used depend on the type of substrate used. Instead of having a circular perimeter, the perimeter of the cavity 31 can have any suitable shape including, for example, an elliptical or square shape.

接著,如圖14及15中所示,提供具有彈性材料塗層33之磁心34。彈性材料塗層33較佳為低黏度矽材料。亦可使用可耐受製造製程之條件(諸如溫度)的任何其他彈性體材料。亦提供預浸物環34a。預浸物環34a較佳為經樹脂浸漬之複合纖維織物。較佳材料為中等或高Tg環氧預浸物。 Next, as shown in Figures 14 and 15, a core 34 having a coating 33 of elastomeric material is provided. The elastomeric coating 33 is preferably a low viscosity tantalum material. Any other elastomeric material that can withstand the conditions of the manufacturing process, such as temperature, can also be used. A prepreg ring 34a is also provided. The prepreg ring 34a is preferably a resin impregnated composite fiber fabric. Preferred materials are medium or high Tg epoxy prepregs.

將預浸物環34a插入空腔31中,接著將磁心34插入空腔31中。較佳使用取放設備將預浸物環34a插入空腔32中;然而,可依任何適合方式(包括手動插入)將預浸物環34a插入空腔31中。較佳使用取放設備將磁心34a插入空腔31中;然而,可依任何適合方式(包括手動插入)將磁心34插入空腔31中。磁心34典型地為鐵氧體;然而,亦可使用其他適合磁導性材料,諸如粉末鐵心。磁心34之材料的選擇影響可用於彈性材料塗層33之材料的類型。 The prepreg ring 34a is inserted into the cavity 31, and then the core 34 is inserted into the cavity 31. The prepreg ring 34a is preferably inserted into the cavity 32 using a pick and place device; however, the prepreg ring 34a can be inserted into the cavity 31 in any suitable manner, including manual insertion. The core 34a is preferably inserted into the cavity 31 using a pick and place device; however, the core 34 can be inserted into the cavity 31 in any suitable manner, including manual insertion. The core 34 is typically ferrite; however, other suitable magnetically permeable materials, such as powder cores, may also be used. The choice of material for the core 34 affects the type of material that can be used for the elastomeric coating 33.

如圖16中所示,較佳將在銅箔35之頂部成層之預浸物層34b的組合層壓至基板30之頂部。預浸物環34a及預浸物層34b較佳由相同材料製成。如圖17中所示,較佳在指定壓力下及指定溫度下將預浸物層34b 及銅箔35層壓至基板30之頂部表面。亦可使用其他適合製程。儘管層壓銅為較佳的,但可使用其他適合導電材料及使用提供導電材料之其他適合方法。舉例而言,替代使用銅,可使用諸如銀或鋁之其他導電材料;且替代層壓銅,可印刷導電墨水。亦可使用環氧黏著劑將銅箔35層壓至基板30。在層壓製程期間,來自預浸物環34a及預浸物層34b之熔融樹脂填充磁心34與基板30之間的空腔中之空隙。 As shown in FIG. 16, a combination of prepreg layers 34b layered on top of copper foil 35 is preferably laminated to the top of substrate 30. The prepreg ring 34a and the prepreg layer 34b are preferably made of the same material. As shown in Figure 17, the prepreg layer 34b is preferably at a specified pressure and at a specified temperature. And the copper foil 35 is laminated to the top surface of the substrate 30. Other suitable processes can also be used. While laminated copper is preferred, other suitable electrically conductive materials can be used and other suitable methods of providing electrically conductive materials can be used. For example, instead of using copper, other conductive materials such as silver or aluminum can be used; and instead of laminated copper, conductive ink can be printed. The copper foil 35 may also be laminated to the substrate 30 using an epoxy adhesive. The molten resin from the prepreg ring 34a and the prepreg layer 34b fills the voids in the cavity between the core 34 and the substrate 30 during the lamination process.

圖18展示在磁心34周圍及在柱體32內在基板30中鑽出之通路孔36。較佳使用NC鑽孔機鑽出通路孔36;然而,可使用任何適合方法或機器形成通路孔36。 FIG. 18 shows via holes 36 drilled in the substrate 30 around the core 34 and within the post 32. The via hole 36 is preferably drilled using an NC drill; however, the via hole 36 can be formed using any suitable method or machine.

圖19展示用鍍銅37電鍍基板30之頂部及底部表面以及通路孔36。 19 shows the top and bottom surfaces of the substrate 30 and the via holes 36 plated with copper plating 37.

在圖20中,在基板30之頂部及底部表面上形成導體38。較佳使用標準PCB製程印刷並蝕刻導體38。導體38可用作例如變壓器之繞組。 In FIG. 20, conductors 38 are formed on the top and bottom surfaces of substrate 30. The conductor 38 is preferably printed and etched using a standard PCB process. The conductor 38 can be used as, for example, a winding of a transformer.

可使用上文針對圖8-12所論述之步驟在基板30中形成孔中孔結構。 A hole mesoporous structure can be formed in the substrate 30 using the steps discussed above with respect to Figures 8-12.

應瞭解,以上描述僅說明本發明。在不脫離本發明之情況下可由熟習此項技術者作出各種替代及修改。因此,本發明欲涵蓋屬於隨附申請專利範圍之範疇內的所有該等替代、修改及變化。 It should be understood that the above description is only illustrative of the invention. Various substitutions and modifications can be made by those skilled in the art without departing from the invention. Accordingly, the present invention is intended to embrace all such alternatives, modifications and

10‧‧‧基板 10‧‧‧Substrate

11‧‧‧空腔 11‧‧‧ cavity

12‧‧‧柱體 12‧‧‧Cylinder

Claims (13)

一種製造基板之方法,其包含:提供具有空腔及該空腔中之柱體的基板;將彈性填充材料分配於該空腔中;插入包括核心孔之磁心以使得該柱體貫穿該核心孔;固化該彈性填充材料;在該基板中於該空腔外及該柱體內形成孔洞;及在該等孔洞中形成孔中孔結構。 A method of manufacturing a substrate, comprising: providing a substrate having a cavity and a pillar in the cavity; distributing an elastic filling material into the cavity; inserting a core including a core hole such that the cylinder penetrates the core hole Curing the elastic filling material; forming a hole in the substrate outside the cavity and in the column; and forming a hole mesoporous structure in the holes. 如申請專利範圍第1項之方法,其進一步包含形成連接至該等孔中孔結構之導體。 The method of claim 1, further comprising forming a conductor connected to the pore structure in the pores. 如申請專利範圍第2項之方法,其中該等導體及該等孔中孔結構提供變壓器之一次及二次繞組。 The method of claim 2, wherein the conductors and the mesoporous structures of the holes provide primary and secondary windings of the transformer. 如申請專利範圍第1項之方法,其中形成孔中孔結構之步驟包括在該等孔洞中形成金屬層。 The method of claim 1, wherein the step of forming the pore structure in the pores comprises forming a metal layer in the pores. 如申請專利範圍第4項之方法,其中形成孔中孔結構之步驟進一步包括在該等孔洞中之該金屬層之上形成絕緣塗層。 The method of claim 4, wherein the step of forming the pore structure in the pores further comprises forming an insulating coating over the metal layer in the pores. 如申請專利範圍第5項之方法,其中形成孔中孔結構之步驟進一步包括在該絕緣塗層之上形成金屬層。 The method of claim 5, wherein the step of forming the pore structure in the pore further comprises forming a metal layer over the insulating coating. 一種製造基板之方法,其包含:提供具有空腔及該空腔中之柱體的基板;插入包括彈性填充材料塗層及核心孔之磁心以使得該柱體貫穿該核心孔; 在該基板中於該空腔外及該柱體內形成孔洞;及在該等孔洞中形成孔中孔結構。 A method of manufacturing a substrate, comprising: providing a substrate having a cavity and a pillar in the cavity; inserting a core including a coating of an elastic filler material and a core hole such that the pillar penetrates the core hole; Forming a hole in the substrate outside the cavity and in the column; and forming a hole-hole structure in the holes. 如申請專利範圍第7項之方法,其進一步包含在插入該磁心之步驟之前在該空腔中提供預浸物環。 The method of claim 7, further comprising providing a prepreg ring in the cavity prior to the step of inserting the core. 如申請專利範圍第7項之方法,其進一步包含形成連接至該等孔中孔結構之導體。 The method of claim 7, further comprising forming a conductor connected to the pore structure in the pores. 如申請專利範圍第9項之方法,其中該等導體及該等孔中孔結構提供變壓器之一次及二次繞組。 The method of claim 9, wherein the conductors and the mesoporous structures of the holes provide primary and secondary windings of the transformer. 如申請專利範圍第7項之方法,其中形成孔中孔結構之步驟包括在該等孔洞中形成金屬層。 The method of claim 7, wherein the step of forming the pore structure in the pores comprises forming a metal layer in the pores. 如申請專利範圍第11項之方法,其中形成孔中孔結構之步驟進一步包括在該等孔洞中之該金屬層之上形成絕緣塗層。 The method of claim 11, wherein the step of forming the pore structure in the pores further comprises forming an insulating coating over the metal layer in the pores. 如申請專利範圍第12項之方法,其中形成孔中孔結構之步驟進一步包括在該絕緣塗層之上形成金屬層。 The method of claim 12, wherein the step of forming the pore structure in the pore further comprises forming a metal layer over the insulating coating.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10204733B2 (en) 2015-07-21 2019-02-12 Taiyo Yuden Co., Ltd. Module substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10204733B2 (en) 2015-07-21 2019-02-12 Taiyo Yuden Co., Ltd. Module substrate

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