TW201425594A - Recycling method of copper-indium-gallium-selenium residual target - Google Patents
Recycling method of copper-indium-gallium-selenium residual target Download PDFInfo
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本發明係有關於一種銅銦鎵硒殘餘靶材之回收方法,特別係指一種快速與簡易之製程,藉由破碎研磨、過篩、氣氛溶解等程序製備,其中利用低成本回收技術,於CIGS溶解過程中通入空氣氣氛,使氧化劑添加量大幅下降,同時在溶蝕過程後會先行產生硒粉之沉澱,使而後僅添加少量還原劑即可將Se離子製成硒粉並分離,銅銦鎵離子混合溶液仍可再次製備CIGS粉末。 The invention relates to a method for recovering a copper indium gallium selenide residual target, in particular to a rapid and simple process, which is prepared by a process such as crushing and grinding, sieving, and atmosphere dissolution, wherein a low-cost recycling technology is used in CIGS. The air atmosphere is introduced into the dissolution process, so that the amount of oxidant added is greatly reduced. At the same time, the precipitation of selenium powder is generated first after the dissolution process, so that Se ions can be made into selenium powder and separated only by adding a small amount of reducing agent, and copper indium gallium is separated. The ion mixed solution can still be used to prepare the CIGS powder again.
銅銦硒(CIS)與銅銦鎵硒(CIGS)均屬I-Ⅲ-Ⅵ2族化合物半導體,由於其高光電效率及低成本材料,與非晶矽薄膜太陽能電池其光裂化的效應(Staebler-Wronski effect)相比,銅銦鎵硒(CIGS)光伏元件的穩定度與抗輻射特性備受青睞,若與碲化鎘(CdTe)太陽能電池比較,CIGS材料沒有鎘的劇毒污染問題,對於環境亦較為友善。 Both copper indium selenide (CIS) and copper indium gallium selenide (CIGS) are I-III-VI 2 compound semiconductors, due to their high photoelectric efficiency and low cost materials, and the photocracking effect of amorphous germanium thin film solar cells (Staebler Compared with the -Wronski effect, the stability and radiation resistance of copper indium gallium selenide (CIGS) photovoltaic elements are favored. If compared with cadmium telluride (CdTe) solar cells, CIGS materials have no toxic pollution problem of cadmium. Also more friendly.
目前薄膜太陽能電池多層膜組多以濺鍍方式製備而成,因此濺鍍靶材優劣直接影響了各膜層性質,故靶材製作研究與技術為最關鍵的製程,與蒸發法相比,濺鍍法具有許多優點,如(1)組成控制較容易;(2)薄膜之緻密性高,附著力是蒸發法製做薄膜之數倍;(3)原材料利用率高,不需要沉積薄膜的地方加以屏蔽,可減少對真空室之污染;(4)薄膜之均勻性較好,適合大面積生產;然而,以濺鍍法製備銅銦鎵硒(CIGS)薄膜型太陽能電池之製造過程中所使 用靶材的使用率僅約30%,加上銦鎵金屬為稀有貴重金屬,因此殘餘約70%仍需回收再利用,因此,許多國內外上游至下游之靶材使用,並回收精煉再製,亦成為國內外永續發展技術關鍵之一。 At present, the thin film solar cell multilayer film group is mostly prepared by sputtering, so the sputtering target has a direct impact on the properties of each film layer, so the target production research and technology is the most critical process, compared with the evaporation method, the sputtering The method has many advantages, such as (1) composition control is easy; (2) the film has high compactness, and the adhesion is several times that of the evaporation method; (3) the raw material utilization rate is high, and the film is not required to be deposited. Shielding can reduce the pollution of the vacuum chamber; (4) The uniformity of the film is good, suitable for large-area production; however, the manufacturing process of copper indium gallium selenide (CIGS) thin film solar cell by sputtering method The use rate of the target is only about 30%, and the indium gallium metal is a rare precious metal. Therefore, about 70% of the residue still needs to be recycled. Therefore, many upstream and downstream targets are used at home and abroad, and recycled and reprocessed. It has also become one of the key technologies for sustainable development at home and abroad.
根據世界與美國專利顯示,少數已提出CIS/CIGS模組回收專案,而在學術論文中並無CIS/CIGS回收之相關研究,現今已有許多學者對淋蝕黃銅礦結構CuFeS2的相關研究,藉由添加氯化鐵來還原銅,也有其他學者以氯化鈉與硫酸來侵蝕銅,亦有人提出氯化鈉與氯化鉀均可促進黃銅礦粉體之侵蝕反應;除此之外,亦有許多回收方法亦可選擇,例如:將Ag2Se透過氣氛熱處理(300℃-650℃),此目的欲先使其結構變得較為鬆散,並可透過不同氧分壓藉以形成Ag金屬與SeO2;或以硝酸將CIS溶解後,先經電解分離出Cd、Cu與Se元素,再由氧化與蒸餾製成其氧化物,電解後ZnO/InO之溶解溶液經由蒸餾形成ZnO/InO混合粉末;或以鹽酸與過氧化氫將CIGS完全溶解後,首先添加聯胺藉以分離出Se粉,其次將銅粉置於CIG金屬溶解溶液中,藉以還原出In金屬,之後再通過離子交換膜以分離出Ga離子,以達成簡易回收程序,此外,亦有其他學者藉由溶液萃取法藉以回收金屬貴金屬之相關研究。 According to the world and US patents, a few have proposed CIS/CIGS module recycling projects, and there is no CIS/CIGS recycling related research in academic papers. Nowadays, many scholars have studied the corrosion of chalcopyrite structure CuFeS 2 . By adding ferric chloride to reduce copper, other scholars have used sodium chloride and sulfuric acid to attack copper. It has also been suggested that both sodium chloride and potassium chloride can promote the erosion reaction of chalcopyrite powder; There are also many recycling methods to choose from. For example, Ag 2 Se is heat-treated through an atmosphere (300 ° C - 650 ° C). The purpose is to make the structure looser and to form Ag metal through different oxygen partial pressures. After dissolving CIS with SeO 2 or nitric acid, the elements of Cd, Cu and Se are separated by electrolysis, and then the oxide is formed by oxidation and distillation. After the electrolysis, the dissolved solution of ZnO/InO is formed into a ZnO/InO mixture by distillation. Powder; or completely dissolve CIGS with hydrochloric acid and hydrogen peroxide, first add hydrazine to separate Se powder, and then place copper powder in CIG metal dissolution solution, thereby reducing In metal, and then passing through ion exchange membrane Separate Ga Son, to achieve simple recycling program, in addition, there are also other scholars by solution extraction method whereby the relevant research metal precious metals recycling.
不論利用電解、分子螯合或萃取等回收方法,均會使整體製程複雜化,若直接將回收溶液之金屬陽離子溶液與硒粉分離,而後再透過溶液合成法重新製備CIGS粉末,並製成CIGS濺鍍用靶材,可使其程序簡化並大幅降低成本; 而在CIGS黃銅礦結構粉體不易溶解於酸性溶液中,根據Se於水中的Eh-pH關係圖可知,此元素於低pH環境下具有較高的氧化電位,故易於粉體表面生成富硒之阻隔層,即使增加溫度或時間易無法將此阻隔層溶解,造成反應不易進行,因此,在溶解過程中需額外添加強氧化劑,藉以促進反應的發生,然而,大量的強氧化劑同時會增加回收程序的成本,故本發明採用低成本回收法進行銅銦鎵硒(CIGS)之溶解程序,利用環境氣氛與少量氧化劑添加控制濺鍍靶材之溶解,而後以還原劑分離出硒粉與陽離子。 Whether using electrolysis, molecular chelation or extraction, etc., the overall process is complicated. If the metal cation solution of the recovered solution is directly separated from the selenium powder, the CIGS powder is re-prepared by solution synthesis and made into CIGS splash. Plating targets can simplify the process and significantly reduce costs; However, the CIGS chalcopyrite structure powder is not easily dissolved in the acidic solution. According to the Eh-pH relationship diagram of Se in water, this element has a high oxidation potential in a low pH environment, so it is easy to form selenium-rich on the surface of the powder. The barrier layer is easy to dissolve the barrier layer even if the temperature or time is increased, so that the reaction is not easy to carry out. Therefore, a strong oxidizing agent is additionally added during the dissolution process to promote the reaction, however, a large amount of strong oxidizing agent also increases the recovery. The cost of the program, the present invention uses a low-cost recovery method for the dissolution process of copper indium gallium selenide (CIGS), using the ambient atmosphere and a small amount of oxidant to control the dissolution of the sputtering target, and then separating the selenium powder and cation with a reducing agent.
為了使銅銦鎵硒殘餘靶材完全溶解於溶液中,進而獲得高回收率,本發明透過酸溶方式使其完全溶解,而後再將溶解溶液中的硒離子製成硒粉(Se powder)並于以分離,可再將此分離回收濾液轉換為高單價之CIGS奈米粉末。 In order to completely dissolve the copper indium gallium selenide residual target in the solution, thereby obtaining high recovery, the present invention completely dissolves by the acid solution method, and then the selenium ion in the dissolved solution is made into selenium powder (Se powder). After separation, the separated recovered filtrate can be converted into a high unit price CIGS nano powder.
本發明之目的係在提供一種低成本、簡易以及高回收率之製程,開發針對廢料回收殘餘靶材,回收分離技術,其相對於轉換為一元之金屬較為節省能源製程簡化,建廠成本低,且轉換為CIGS奈米粉末之資源化產品附加價值高。 The object of the present invention is to provide a low-cost, simple and high-recovery process, and to develop a waste-recovering residual target, a recovery and separation technology, which is more energy-saving than a one-to-one metal, and has a low plant-making cost. And the resource value of the converted CIGS nano powder is high.
本發明之銅銦鎵硒殘餘靶材之回收方法,其方法如下:將銅銦鎵硒四元靶材研磨過篩後,將該金屬粉體浸於硫酸溶液中,其中硫酸濃度為3M-6M;該混合溶液包含硫酸與過氧化氫;將該混合溶液通以空氣並於50℃反應一小時,使得銅 銦鎵硒粉體完全溶解於硫酸溶液中,形成銅銦鎵硒溶解濾液;將亞硫酸鈉加入該銅銦鎵硒溶解濾液,藉由濾液中選擇性還原出硒粉,予以分離後獲得銅銦鎵溶解濾液與固態硒粉。 The method for recovering the copper indium gallium selenide residual target of the invention is as follows: after the copper indium gallium selenide quaternary target is ground and sieved, the metal powder is immersed in a sulfuric acid solution, wherein the sulfuric acid concentration is 3M-6M The mixed solution contains sulfuric acid and hydrogen peroxide; the mixed solution is passed through air and reacted at 50 ° C for one hour to make copper The indium gallium selenide powder is completely dissolved in the sulfuric acid solution to form a copper indium gallium selenium dissolving filtrate; the sodium sulfite is added to the copper indium gallium selenium dissolving filtrate, and the selenium powder is selectively reduced by the filtrate, and separated to obtain copper indium gallium dissolving. Filtrate and solid selenium powder.
本發明之銅銦鎵硒殘餘靶材之回收方法,其中,該金屬粉體浸於硫酸溶液中,該混合溶液亦包含過氧化氫;將該混合溶液置於水熱反應下以120℃~160℃並持溫一~四小時,使得溶液中包含銅銦鎵硒溶解溶液與部分被還原之固態硒粉;加入少量亞硫酸鈉將剩餘銅銦鎵硒溶解溶液中的硒還原出來,並予以分離,獲得銅銦鎵濾液與固態硒粉,該硫酸濃度為3M~6M。 The method for recovering a copper indium gallium selenide residual target according to the present invention, wherein the metal powder is immersed in a sulfuric acid solution, the mixed solution also contains hydrogen peroxide; and the mixed solution is placed under a hydrothermal reaction at 120 ° C to 160 °C and holding the temperature for one to four hours, so that the solution contains copper indium gallium selenium solution and some of the reduced solid selenium powder; adding a small amount of sodium sulfite to reduce the remaining selenium in the copper indium gallium selenium solution and separate it. The copper indium gallium filtrate and the solid selenium powder have a sulfuric acid concentration of 3M~6M.
本發明之銅銦鎵硒殘餘靶材之回收方法,其中,該混合溶液之硫酸與過氧化氫之體積比為30:1~10:1。 The method for recovering a copper indium gallium selenide residual target according to the present invention, wherein a volume ratio of sulfuric acid to hydrogen peroxide of the mixed solution is 30:1 to 10:1.
本發明之銅銦鎵硒殘餘靶材之回收方法,其中,該亞硫酸鈉之當量約2~5之亞硫酸鈉。 The method for recovering a copper indium gallium selenide residual target of the present invention, wherein the sodium sulfite has an equivalent weight of about 2 to 5 sodium sulfite.
本發明之銅銦鎵硒殘餘靶材之回收方法,其中,該空氣流量為100ml/min~300ml/min。 The method for recovering a copper indium gallium selenide residual target according to the present invention, wherein the air flow rate is from 100 ml/min to 300 ml/min.
本發明之銅銦鎵硒殘餘靶材之回收方法,其中,該硒粉還原置換分兩階段分離,第一階段在密閉水熱反應中形成,第二階段以加入亞硫酸鈉,使該濾液中僅存在銅銦鎵溶解溶液。 The method for recovering a copper indium gallium selenide residual target according to the present invention, wherein the selenium powder reduction and replacement is divided into two stages, the first stage is formed in a closed hydrothermal reaction, and the second stage is added with sodium sulfite to make the filtrate only exist. Copper indium gallium dissolution solution.
藉由低濃度硫酸與通入空氣氣氛可使銅銦鎵硒殘餘靶材完全溶解,並在該濾液中發現存在硒粉之沉澱物,並以 亞硫酸鈉將硒離子還原為硒粉,其硒粉分離率可達99%,所獲得銅銦鎵混合離子溶液仍可作為製備CIGS奈米粉體之前驅溶液,本發明不需高溫製程進行除硒與純化製程,因而降低成本、施工容易,即可達到高回收與分離效果,並可達到資源永續之目的。 The copper indium gallium selenide residual target is completely dissolved by the low concentration of sulfuric acid and the air atmosphere, and the precipitate of the selenium powder is found in the filtrate, and Sodium sulfite reduces the selenium ion to selenium powder, and the selenium powder separation rate can reach 99%. The obtained copper indium gallium mixed ion solution can still be used as a precursor solution for preparing CIGS nano powder. The present invention does not require high temperature process for selenium removal and purification. The process, thus reducing the cost and the ease of construction, can achieve high recovery and separation effects, and can achieve the goal of sustainable resources.
在回收高緻密性銅銦鎵硒殘餘靶材之製程中,請參閱第一圖所示,首先,將該塊材研磨成粉,經過200目篩分後獲得較為均一的粉徑,主要利用硫酸進行溶解,其中粉與硫酸之比例約為1g:0.2L,過程中添加入少量之過氧化氫(H2O2),過氧化氫與硫酸體積比例約為1:30,於適當溫度下反應一小時,並於反應溶液中通入適當流量之空氣氣氛,反應後之濾液以離心分離出硒粉之沉澱物,而後添加入亞硫酸鈉至該澄清濾液中,即可獲得硒粉之沉澱,將該硒粉沉澱物以6000rpm轉速下離心水洗後,並保存CIG離子澄清溶液,可提供合成CIGS奈米粉末之前驅溶液。 In the process of recovering high-density copper indium gallium selenide residual target, please refer to the first figure. First, the block is ground into powder, and after 200 mesh screening, a relatively uniform powder diameter is obtained, mainly using sulfuric acid. Dissolving, wherein the ratio of powder to sulfuric acid is about 1g: 0.2L, a small amount of hydrogen peroxide (H 2 O 2 ) is added during the process, and the volume ratio of hydrogen peroxide to sulfuric acid is about 1:30, and the reaction is carried out at a suitable temperature. After one hour, an appropriate air flow atmosphere is introduced into the reaction solution, and the filtrate after the reaction is centrifuged to separate the precipitate of the selenium powder, and then sodium sulfite is added to the clear filtrate to obtain a precipitate of the selenium powder. The selenium powder precipitate is centrifuged and washed at 6000 rpm, and the CIG ion clear solution is stored to provide a solution for synthesizing the CIGS nanopowder.
另外將3M硫酸濃度添加入微量過氧化氫,並置於水熱反應中反應140℃持溫四小時下,而後以離心分離出濾液與硒粉沉澱物,即可獲得硒粉之沉澱,將該硒粉沉澱物以6000rpm轉速下離心水洗後,並保存CIG離子澄清溶液,可提供合成CIGS奈米粉末之前驅溶液。 In addition, the 3M sulfuric acid concentration is added to a trace amount of hydrogen peroxide, and the reaction is carried out in a hydrothermal reaction at 140 ° C for four hours, and then the filtrate and the selenium powder precipitate are separated by centrifugation to obtain a selenium powder precipitate. After the powder precipitate is washed by centrifugation at 6000 rpm, and the CIG ion clear solution is stored, a solution for synthesizing the CIGS nanopowder can be provided.
根據本發明所運用之技術且可達到之成效,茲舉出實施參數說明如下: According to the technology applied by the present invention and the achievable results, the implementation parameters are as follows:
本實施例將濺鍍後之CIGS殘餘靶材進行酸蝕溶解,經過粉碎過篩後,於不同濃度硫酸(1M,3M,6M與12M)反應一小時後,將未溶解之粉粒進行過濾水洗,並乾燥後量測其回收率分析,第二圖為不同濃度硫酸經酸蝕下所獲得之回收率變化量,表示在硫酸濃度增加後期,回收率變化量會獲得趨緩之現象,然而在不同硫酸濃度下之溫度及時間之變化並無明顯改變,此外,於低硫酸濃度(1M)並於50℃下反應一小時比較空氣氣氛之影響(如表一所示)。 In this embodiment, the CIGS residual target after sputtering is subjected to acid etching dissolution, and after being pulverized and sieved, after reacting for different concentrations of sulfuric acid (1M, 3M, 6M and 12M) for one hour, the undissolved powder is filtered and washed. And after drying, the recovery rate is measured. The second figure shows the change of recovery rate obtained by acid etching of different concentrations of sulfuric acid, indicating that the recovery rate will be slowed down in the later stage of increasing sulfuric acid concentration, however, The change in temperature and time at different sulfuric acid concentrations did not change significantly. In addition, the effect of the air atmosphere was compared at low sulfuric acid concentration (1 M) and reacted at 50 ° C for one hour (as shown in Table 1).
當在硫酸濃度為3M下添加不同含量過氧化氫,其回收率變化量如第三圖所示,反應後之溶液經離心分離出濾液與沉澱物,以XRD(X光繞射)確認該沉澱物大部分為硒之相成分與少量未完全溶解CIGS粉末(如第四圖所示),顯示在低硫酸濃度與低過氧化氫添加量,即可使其回收率達90%,同時通予空氣氣氛時可使其回收率達99%。 When different levels of hydrogen peroxide were added at a sulfuric acid concentration of 3 M, the amount of recovery was as shown in the third figure, and the solution after the reaction was centrifuged to separate the filtrate and the precipitate, and the precipitate was confirmed by XRD (X-ray diffraction). Most of the materials are selenium phase components and a small amount of incompletely dissolved CIGS powder (as shown in the fourth figure), which shows that the low sulfuric acid concentration and the low hydrogen peroxide addition amount can make the recovery rate reach 90%. The air atmosphere can be recovered to 99%.
當在硫酸濃度為3M下添加微量過氧化氫,並於水熱反應器中以140℃持溫四小時,將該濾液與沉澱物離心分離後,以XRD確認該沉澱物為硒之相成分(如第四圖所示),而後再添加亞硫酸鈉至該澄清濾液中,將硒殘餘在濾液中置換回硒粉,如第五、六、七圖所示。 When a trace amount of hydrogen peroxide was added at a sulfuric acid concentration of 3 M, and the temperature was maintained at 140 ° C for four hours in a hydrothermal reactor, the filtrate and the precipitate were centrifuged, and the precipitate was confirmed to be a phase component of selenium by XRD. As shown in the fourth figure, then sodium sulfite is added to the clarified filtrate, and the selenium residue is replaced in the filtrate back to the selenium powder, as shown in the fifth, sixth and seventh figures.
綜上所述,本發明確實已達到所預期之使用目的與功效,且更較習知者為之理想、實用,惟,上述實施例僅係針對本發明之較佳實施例進行具體說明而已,該實施例並非用以限定本發明之申請專利範圍,舉凡其它未脫離本發明所揭示之技術手段下所完成之均等變化與修飾,均應包含於本發明所涵蓋之申請專利範圍中。 In view of the above, the present invention has achieved the intended use and efficacy, and is more desirable and practical than the prior art, but the above embodiments are only specifically described for the preferred embodiment of the present invention. The present invention is not intended to limit the scope of the invention, and all other equivalents and modifications may be included in the scope of the invention covered by the invention.
第一圖所示係為本發明回收方法之流程圖。 The first figure shows a flow chart of the recycling method of the present invention.
第二圖所示係為本發明實施例不同硫酸濃度酸蝕後之回收率變化量。 The second figure shows the amount of change in recovery after acid etching of different sulfuric acid concentrations in the examples of the present invention.
第三圖所示係為本發明實施例於3M硫酸濃度添加不同過氧化氫含量之回收率變化量。 The third figure shows the amount of change in recovery of different hydrogen peroxide contents added to the 3M sulfuric acid concentration in the examples of the present invention.
第四圖所示係為本發明實施例分別於常壓與水熱反應中獲得沉澱物之XRD(X光繞射)圖。 The fourth figure shows an XRD (X-ray diffraction) pattern obtained by obtaining a precipitate in a normal pressure and a hydrothermal reaction, respectively, according to an embodiment of the present invention.
第五圖所示係為本發明實施例於溶解濾液添加亞硫酸鈉後沉澱物之XRD圖。 The fifth figure shows the XRD pattern of the precipitate after adding sodium sulfite to the dissolved filtrate in the embodiment of the present invention.
第六圖所示係為本發明實施例於溶解濾液添加亞硫酸鈉後SEM(二次電子影像)圖。 Figure 6 is a SEM (secondary electron image) diagram showing the addition of sodium sulfite to the dissolved filtrate in the examples of the present invention.
第七圖所示係為本發明實施例於溶解濾液添加亞硫酸鈉後 EDS(能量散佈)圖。 The seventh figure shows the addition of sodium sulfite to the dissolved filtrate after the embodiment of the present invention. EDS (energy dispersion) map.
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WO2017124890A1 (en) * | 2016-01-21 | 2017-07-27 | 汉能新材料科技有限公司 | Recovery method for copper-indium-gallium-selenium material |
WO2017124891A1 (en) * | 2016-01-21 | 2017-07-27 | 汉能新材料科技有限公司 | Method for recycling copper indium gallium selenium materials |
WO2017124892A1 (en) * | 2016-01-21 | 2017-07-27 | 汉能新材料科技有限公司 | Method for recycling copper indium gallium selenium materials |
WO2017124893A1 (en) * | 2016-01-21 | 2017-07-27 | 汉能新材料科技有限公司 | Method for recycling copper indium gallium selenium materials |
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TWI405855B (en) * | 2010-05-18 | 2013-08-21 | Solar Applied Mat Tech Corp | Method for recovery of copper, indium, gallium, and selenium |
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WO2017124890A1 (en) * | 2016-01-21 | 2017-07-27 | 汉能新材料科技有限公司 | Recovery method for copper-indium-gallium-selenium material |
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WO2017124892A1 (en) * | 2016-01-21 | 2017-07-27 | 汉能新材料科技有限公司 | Method for recycling copper indium gallium selenium materials |
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