TW201422419A - Copper foil with carrier - Google Patents

Copper foil with carrier Download PDF

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Publication number
TW201422419A
TW201422419A TW102126636A TW102126636A TW201422419A TW 201422419 A TW201422419 A TW 201422419A TW 102126636 A TW102126636 A TW 102126636A TW 102126636 A TW102126636 A TW 102126636A TW 201422419 A TW201422419 A TW 201422419A
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Taiwan
Prior art keywords
layer
resin
carrier
copper foil
weight
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TW102126636A
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Chinese (zh)
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TWI490113B (en
Inventor
Tomota Nagaura
Kazuhiko Sakaguchi
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Jx Nippon Mining & Metals Corp
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/01Layered products comprising a layer of metal all layers being exclusively metallic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04Interconnection of layers
    • B32B7/06Interconnection of layers permitting easy separation
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C18/00Alloys based on zinc
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C19/00Alloys based on nickel or cobalt
    • C22C19/03Alloys based on nickel or cobalt based on nickel
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/022Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/20Properties of the layers or laminate having particular electrical or magnetic properties, e.g. piezoelectric
    • B32B2307/206Insulating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Laminated Bodies (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)

Abstract

Provided is a copper foil with a carrier, in which an ultrathin copper layer is not released from the carrier before a process of lamination on an insulating substrate but the ultrathin copper layer can be released after the process of lamination on an insulating substrate. A copper foil with a carrier, which is provided with a copper foil carrier, an intermediate layer that is laminated on the copper foil carrier, and an ultrathin copper layer that is laminated on the intermediate layer. The intermediate layer is configured of an Ni layer that is in contact with the interface with the copper foil carrier and a Cr layer that is in contact with the interface with the ultrathin copper layer. The amount of adhered Ni in the intermediate layer is 1,000-40,000 mug/dm2 and the amount of adhered Cr in the intermediate layer is 10-100 mug/dm2, while Zn additionally adheres to the intermediate layer in an amount of 1-70 mug/dm2.

Description

附載體銅箔 Carrier copper foil

本發明係關於一種附載體銅箔。更詳細而言,本發明係關於一種用作印刷配線板之材料之附載體銅箔。 The present invention relates to a copper foil with a carrier. More specifically, the present invention relates to a copper foil with a carrier used as a material for a printed wiring board.

印刷配線板通常經過如下步驟而製造:於使絕緣基板與銅箔接著而製成覆銅積層板之後,藉由蝕刻而於銅箔面形成導體圖案。隨著近年來之電子機器之小型化、高性能化需求之增大,而推進搭載零件之高密度構裝化或訊號之高頻化,從而對印刷配線板要求導體圖案之微細化(窄間距(fine pitch)化)或高頻應對等。 The printed wiring board is usually produced by forming a conductor pattern on the copper foil surface by etching after the insulating substrate and the copper foil are bonded to each other to form a copper clad laminate. With the increase in the demand for miniaturization and high performance of electronic devices in recent years, the high-density mounting of components and the high frequency of signals have been promoted, and the conductor pattern has been required to be miniaturized (narrow pitch). (fine pitch) or high frequency response.

最近,因應窄間距化而要求厚度9μm以下、進而厚度5μm以下之銅箔,但此種極薄之銅箔之機械強度較低而容易於印刷配線板之製造時破裂或者產生褶皺,因此出現一種將具有厚度之金屬箔用作載體,於其上隔著剝離層電沈積極薄銅層而成之附載體銅箔。附載體銅箔之通常之使用方法為:於使極薄銅層之表面貼合於絕緣基板並進行熱壓接之後,隔著剝離層將載體剝離。 Recently, a copper foil having a thickness of 9 μm or less and a thickness of 5 μm or less is required in order to narrow the pitch. However, such an extremely thin copper foil has low mechanical strength and is liable to be broken or wrinkled during the manufacture of a printed wiring board. A metal foil having a thickness is used as a carrier, and a copper foil with a carrier on which an extremely thin copper layer is electrodeposited via a peeling layer is formed. The carrier copper foil is usually used by bonding the surface of the ultra-thin copper layer to the insulating substrate and thermocompression bonding, and then peeling the carrier through the peeling layer.

先前,作為剝離層,已知以Cr、Ni、Co、Fe、Mo、Ti、W、P或該等之合金或該等之水合物形成。進而,於謀求加熱加壓等高溫使用環境中之剝離性之穩定化方面,亦記載有若於剝離層之基底設置Ni、Fe或該等之合金層則有效(日本特開2010-006071號公報、日本特開2007-007937 號公報)。 Previously, as the release layer, it has been known to form Cr, Ni, Co, Fe, Mo, Ti, W, P or the like alloys or the like. Further, in order to stabilize the peeling property in a high-temperature use environment such as heating and pressurization, it is also described that it is effective to provide Ni, Fe or the alloy layer on the base of the peeling layer (JP-A-2010-006071) , Japan Special Open 2007-007937 Bulletin).

於該等文獻中,對剝離層上之鍍敷因其剝離性故而非常難以進行均勻之鍍敷,因此,基於鍍敷條件所形成之極薄銅箔會有針孔(pin hole)之數量變多之情況。因此,亦記載有:首先於剝離層上進行試鍍銅(strike copper plating),於試鍍層上進而鍍銅,藉此,可於剝離層上實施均勻之鍍敷,從而可明顯減少極薄銅箔之針孔之數量。 In these documents, it is extremely difficult to perform uniform plating on the plating on the peeling layer due to the peeling property, and therefore, the extremely thin copper foil formed based on the plating conditions may have a number of pin holes. More circumstances. Therefore, it is also described that: first, copper copper plating is performed on the peeling layer, and copper is further plated on the test plating layer, whereby uniform plating can be performed on the peeling layer, thereby significantly reducing extremely thin copper. The number of pinholes in the foil.

[專利文獻1]日本特開2010-006071號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2010-006071

[專利文獻2]日本特開2007-007937號公報 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2007-007937

於附載體銅箔中,於向絕緣基板之積層步驟前必須避免極薄銅層自載體剝離,另一方面,於向絕緣基板之積層步驟後極薄銅層必須可自載體剝離。又,於附載體銅箔中,於極薄銅層側之表面存在針孔會引起印刷配線板之性能不良,從而欠佳。 In the copper foil with a carrier, it is necessary to prevent the ultra-thin copper layer from being peeled off from the carrier before the step of laminating the insulating substrate, and on the other hand, the ultra-thin copper layer must be peeled off from the carrier after the lamination step to the insulating substrate. Further, in the copper foil with a carrier, the presence of pinholes on the surface of the extremely thin copper layer side causes poor performance of the printed wiring board, which is not preferable.

關於該等方面,先前技術未進行充分之研究,尚留有改善之餘地。因此,本發明之課題在於提供一種於向絕緣基板之積層步驟前極薄銅層未自載體剝離,另一方面,於向絕緣基板之積層步驟後極薄銅層可自載體剝離的附載體銅箔。進而,本發明之課題亦在於提供一種抑制於極薄銅層側表面產生針孔之附載體銅箔。 Regarding these aspects, the prior art has not been sufficiently studied and there is still room for improvement. Therefore, an object of the present invention is to provide a carrier copper which can be peeled off from a carrier after the step of laminating to an insulating substrate, and the ultra-thin copper layer can be peeled off from the carrier after the lamination step to the insulating substrate. Foil. Further, another object of the present invention is to provide a copper foil with a carrier which suppresses the occurrence of pinholes on the side surface of an extremely thin copper layer.

為達成上述目的,本發明人等反覆深入研究,結果發現,極為有效的是使用銅箔作為載體,並於極薄銅層與載體之間形成由Ni層及極薄之Cr層之2層所構成之中間層,進而於中間層添加微量之Zn。 In order to achieve the above object, the present inventors have conducted intensive studies and found that it is extremely effective to use a copper foil as a carrier, and to form a layer of a Ni layer and an extremely thin Cr layer between the ultra-thin copper layer and the carrier. The intermediate layer is formed, and a trace amount of Zn is further added to the intermediate layer.

本發明係基於上述見解而完成者,本發明之一態樣係一種附載體銅箔,其具備銅箔載體、積層於銅箔載體上之中間層、及積層於中間 層上之極薄銅層,中間層係由接觸於與銅箔載體之界面的Ni層及接觸於與極薄銅層之界面的Cr層構成,中間層中之Ni的附著量為1000~40000μg/dm2,中間層中之Cr的附著量為10~100μg/dm2,於中間層進一步以1~70μg/dm2之附著量存在Zn。 The present invention has been completed based on the above findings. One aspect of the present invention is a copper foil with a carrier provided with a copper foil carrier, an intermediate layer laminated on the copper foil carrier, and an extremely thin copper layer laminated on the intermediate layer. The intermediate layer is composed of a Ni layer contacting the interface with the copper foil carrier and a Cr layer contacting the interface with the ultra-thin copper layer, and the adhesion amount of Ni in the intermediate layer is 1000 to 40000 μg/dm 2 , in the middle layer the deposition amount of Cr is 10 ~ 100μg / dm 2, the presence of Zn in the further intermediate layer 1 ~ 70μg / dm 2 amount of adhesion.

於本發明之附載體銅箔之一實施形態中,Ni之附著量為2000~10000μg/dm2,Cr之附著量為20~40μg/dm2In one embodiment, a copper foil with a carrier of the present invention, the amount of deposition of Ni is 2000 ~ 10000μg / dm 2, the deposition amount of Cr 20 ~ 40μg / dm 2.

於本發明之附載體銅箔之另一實施形態中,存在於中間層之Zn相對於Cr之質量比的值為0.01~5之範圍。 In another embodiment of the copper foil with a carrier of the present invention, the mass ratio of Zn to Cr present in the intermediate layer is in the range of 0.01 to 5.

於本發明之附載體銅箔之進而另一實施形態中,Cr係藉由電解鉻酸鹽而附著。 In still another embodiment of the copper foil with a carrier of the present invention, Cr is adhered by electrolytic chromate.

於本發明之附載體銅箔之進而另一實施形態中,上述載體係以電解銅箔或壓延銅箔形成。 In still another embodiment of the copper foil with a carrier of the present invention, the carrier is formed of an electrolytic copper foil or a rolled copper foil.

於本發明之附載體銅箔之進而另一實施形態中,於上述極薄銅層表面具有粗化處理層。 In still another embodiment of the copper foil with a carrier of the present invention, the surface of the ultra-thin copper layer has a roughened layer.

於本發明之附載體銅箔之進而另一實施形態中,上述粗化處理層係由選自由銅、鎳、鈷、磷、鎢、砷、鉬、鉻及鋅組成之群中之任一單質構成、或由含有選自該群中之任1種以上元素之合金構成的層。 In still another embodiment of the copper foil with a carrier of the present invention, the roughening treatment layer is any one selected from the group consisting of copper, nickel, cobalt, phosphorus, tungsten, arsenic, molybdenum, chromium, and zinc. A layer composed of an alloy containing any one or more elements selected from the group.

於本發明之附載體銅箔之進而另一實施形態中,於上述粗化處理層之表面,具有選自由耐熱層、防銹層、鉻酸鹽處理層及矽烷偶合處理層組成之群中之1種以上的層。 In still another embodiment of the copper foil with a carrier of the present invention, the surface of the roughened layer has a layer selected from the group consisting of a heat resistant layer, a rust preventive layer, a chromate treatment layer, and a decane coupling treatment layer. One or more layers.

於本發明之附載體銅箔之進而另一實施形態中,於上述極薄銅層之表面,具有選自由耐熱層、防銹層、鉻酸鹽處理層及矽烷偶合處理層組成之群中之1種以上的層。 In still another embodiment of the copper foil with a carrier of the present invention, the surface of the ultra-thin copper layer is selected from the group consisting of a heat-resistant layer, a rust-preventing layer, a chromate-treated layer, and a decane coupling treatment layer. One or more layers.

於本發明之附載體銅箔之進而另一實施形態中,於上述極薄銅層上具備樹脂層。 In still another embodiment of the copper foil with a carrier of the present invention, the ultra-thin copper layer is provided with a resin layer.

於本發明之附載體銅箔之進而另一實施形態中,於上述粗化處理層上具備樹脂層。 In still another embodiment of the copper foil with a carrier of the present invention, a resin layer is provided on the roughened layer.

於本發明之附載體銅箔之進而另一實施形態中,於上述選自由耐熱層、防銹層、鉻酸鹽處理層及矽烷偶合處理層組成之群中之1種以上的層上具備樹脂層。 In still another embodiment of the copper foil with a carrier of the present invention, the resin is provided on one or more layers selected from the group consisting of a heat-resistant layer, a rust-preventing layer, a chromate-treated layer, and a decane coupling treatment layer. Floor.

於本發明之附載體銅箔之進而另一實施形態中,上述樹脂層係以接著用樹脂形成。 In still another embodiment of the copper foil with a carrier of the present invention, the resin layer is formed of a resin.

於本發明之附載體銅箔之進而另一實施形態中,上述樹脂層係以半硬化狀態之樹脂形成。 In still another embodiment of the copper foil with a carrier of the present invention, the resin layer is formed of a resin in a semi-hardened state.

於本發明之附載體銅箔之進而另一實施形態中,上述樹脂層含有介電體。 In still another embodiment of the copper foil with a carrier of the present invention, the resin layer contains a dielectric.

本發明之另一態樣係一種印刷配線板,其係使用本發明之附載體銅箔製造而成。 Another aspect of the present invention is a printed wiring board manufactured using the copper foil with a carrier of the present invention.

本發明之進而另一態樣係一種印刷電路板,其係使用本發明之附載體銅箔製造而成。 Still another aspect of the present invention is a printed circuit board manufactured using the carrier-attached copper foil of the present invention.

本發明之進而另一態樣係一種覆銅積層板,其係使用本發明之附載體銅箔製造而成。 Still another aspect of the present invention is a copper clad laminate which is produced using the copper foil with a carrier of the present invention.

本發明之進而另一態樣係一種印刷配線板之製造方法,其包括如下步驟:準備本發明之附載體銅箔與絕緣基板,積層上述附載體銅箔與絕緣基板,於積層上述附載體銅箔與絕緣基板後,剝離上述附載體銅箔之載體,經過如上步驟形成覆銅積層板,其後,藉由半加成(semi-additive)法、減成(subtractive)法、部分加成(partly-additive)法或改進型半加成(modified semi-additive)法中任 一種方法而形成電路。 Still another aspect of the present invention provides a method of manufacturing a printed wiring board, comprising the steps of: preparing a copper foil and an insulating substrate with a carrier of the present invention, laminating the copper foil and the insulating substrate with the carrier, and laminating the copper with the carrier After the foil and the insulating substrate, the carrier with the carrier copper foil is peeled off, and a copper clad laminate is formed through the above steps, and then subjected to a semi-additive method, a subtractive method, a partial addition ( Partial-additive method or modified semi-additive method A method to form a circuit.

本發明之進而另一態樣係一種印刷配線板之製造方法,其包括如下步驟:於本發明之附載體銅箔之上述極薄銅層側表面形成電路;以埋沒上述電路之方式於上述附載體銅箔之上述極薄銅層側表面形成樹脂層;於上述樹脂層上形成電路;於在上述樹脂層上形成電路後,使上述載體剝離;及於使上述載體剝離後,去除上述極薄銅層,藉此,使已形成於上述極薄銅層側表面之埋沒於上述樹脂層的電路露出。 Still another aspect of the present invention is a method of manufacturing a printed wiring board, comprising the steps of: forming a circuit on a side surface of the ultra-thin copper layer of the copper foil with a carrier of the present invention; and attaching the circuit to the above a side surface of the ultra-thin copper layer of the carrier copper foil is formed with a resin layer; an electric circuit is formed on the resin layer; after the circuit is formed on the resin layer, the carrier is peeled off; and after the carrier is peeled off, the ultra-thin is removed The copper layer is thereby exposed to the circuit buried in the resin layer on the side surface of the ultra-thin copper layer.

於本發明之印刷配線板之製造方法之一實施形態中,於上述樹脂層上形成電路之步驟係如下步驟:於上述樹脂層上自極薄銅層側貼合另一附載體銅箔,並使用貼合於上述樹脂層之附載體銅箔形成上述電路。 In one embodiment of the method for producing a printed wiring board according to the present invention, the step of forming a circuit on the resin layer is a step of laminating another carrier copper foil from the side of the ultra-thin copper layer on the resin layer, and The above circuit is formed using a copper foil with a carrier attached to the above resin layer.

於本發明之印刷配線板之製造方法之另一實施形態中,於上述樹脂層上貼合之另一附載體銅箔為本發明之附載體銅箔。 In another embodiment of the method for producing a printed wiring board according to the present invention, the other carrier copper foil bonded to the resin layer is the copper foil with a carrier of the present invention.

於本發明之印刷配線板之製造方法之進而另一實施形態中,於上述樹脂層上形成電路之步驟係藉由半加成法、減成法、部分加成法或改進型半加成法中任一種方法而進行。 In still another embodiment of the method for producing a printed wiring board according to the present invention, the step of forming a circuit on the resin layer is performed by a semi-additive method, a subtractive method, a partial addition method or a modified semi-additive method. Perform any of the methods.

於本發明之印刷配線板之製造方法之進而另一實施形態中,於上述表面形成電路之附載體銅箔於該附載體銅箔之載體的表面具有基板或樹脂層。 In still another embodiment of the method for producing a printed wiring board according to the present invention, the copper foil with a carrier on the surface forming circuit has a substrate or a resin layer on the surface of the carrier on which the carrier copper foil is attached.

本發明之附載體銅箔於向絕緣基板之積層步驟前可獲得載體與極薄銅層之間所必需之密接性,另一方面,於向絕緣基板之積層步驟後極薄銅層可容易自載體剝離。又,本發明之附載體銅箔抑制了針孔之產 生,故而可穩定地供給高品質之極薄銅層。 The copper foil with carrier of the present invention can obtain the necessary adhesion between the carrier and the ultra-thin copper layer before the step of laminating the insulating substrate, and on the other hand, the ultra-thin copper layer can be easily obtained after the lamination step to the insulating substrate. Carrier peeling. Moreover, the copper foil with carrier of the present invention inhibits the production of pinholes It is a raw material, so it can stably supply a high-quality ultra-thin copper layer.

圖1之A~C係使用有本發明之附載體銅箔之印刷配線板之製造方法之具體例的電路鍍敷.阻劑(resist)去除之前之步驟中之配線板剖面的模式圖。 Fig. 1A to C are circuit plating using a specific example of a method of manufacturing a printed wiring board with a copper foil with a carrier of the present invention. Resist removes the pattern diagram of the wiring board profile in the previous step.

圖2之D~F係使用有本發明之附載體銅箔之印刷配線板之製造方法之具體例的樹脂及第2層附載體銅箔積層至雷射開孔之步驟中之配線板剖面的模式圖。 D to F of Fig. 2 is a cross section of a wiring board in which a resin of a specific example of a method for producing a printed wiring board with a copper foil with a carrier of the present invention and a second layer of a carrier-attached copper foil are laminated to a laser opening. Pattern diagram.

圖3之G~I係使用有本發明之附載體銅箔之印刷配線板之製造方法之具體例的填孔(via-filling)形成至第1層之載體剝離之步驟中之配線板剖面的模式圖。 G to I of FIG. 3 is a via-filling of a specific example of a method for producing a printed wiring board with a copper foil with a carrier of the present invention, and a cross section of the wiring board in the step of peeling off the carrier of the first layer is formed. Pattern diagram.

圖4之J~K係使用有本發明之附載體銅箔之印刷配線板之製造方法之具體例的快速蝕刻(flash etching)至凸塊(bump).銅柱(copper pillar)形成之步驟中之配線板剖面的模式圖。 Fig. 4, J to K are flash etching to bump using a specific example of a method for manufacturing a printed wiring board with a copper foil with a carrier of the present invention. A schematic view of a cross section of a wiring board in the step of forming a copper pillar.

<1.載體> <1. Carrier>

作為可用於本發明之載體係使用銅箔。典型而言,載體係以壓延銅箔或電解銅箔之形態提供。通常,電解銅箔係自硫酸銅鍍浴於鈦或不鏽鋼之桶(drum)上電解析出銅而製造,壓延銅箔係反覆進行利用壓延輥之塑性加工與熱處理而製造。作為銅箔之材料,除精銅(tough-pitch copper)或無氧銅等高純度之銅以外,亦可使用例如摻有Sn之銅、摻有Ag之銅、添加有Cr、Zr或Mg等之銅合金、添加有Ni及Si等之卡遜系銅合金之類之銅合金。再者,當於本說明書中單獨使用用語「銅箔」時亦包含銅合金箔。 A copper foil is used as a carrier which can be used in the present invention. Typically, the support is provided in the form of a rolled copper foil or an electrolytic copper foil. Usually, the electrolytic copper foil is produced by electroplating copper from a copper or copper stainless steel drum, and the rolled copper foil is repeatedly produced by plastic working and heat treatment using a calender roll. As a material of the copper foil, in addition to high-purity copper such as tough-pitch copper or oxygen-free copper, for example, copper doped with Sn, copper doped with Ag, added with Cr, Zr or Mg, or the like may be used. A copper alloy or a copper alloy to which a Cason copper alloy such as Ni or Si is added. Further, when the term "copper foil" is used alone in the present specification, a copper alloy foil is also included.

關於可用於本發明之載體之厚度,並無特別限制,只要於能 發揮作為載體之作用的條件下適當調節成合適之厚度即可,例如可設為12μm以上。然而,若過厚則生產成本變高,故而通常較佳為設為35μm以下。因此,載體之厚度典型而言為12~70μm,更典型而言為18~35μm。 Regarding the thickness of the carrier usable in the present invention, there is no particular limitation as long as it can The thickness may be appropriately adjusted to a suitable thickness under the action of the carrier, and may be, for example, 12 μm or more. However, if the production cost becomes too large, it is usually preferably 35 μm or less. Therefore, the thickness of the carrier is typically from 12 to 70 μm, more typically from 18 to 35 μm.

<2.中間層> <2. Middle layer>

於銅箔載體之單面或雙面上設置由Ni及Cr之2層所構成之中間層。以Ni層接觸於與銅箔載體之界面、Cr層接觸於與極薄銅層之界面的方式積層。如下所述,Ni與Cu之接著力高於Cr與Cu之接著力,故而於剝離極薄銅層時,於極薄銅層與Cr層之界面剝離。中間層中之Ni層被期待具有防止Cu成分自載體向極薄銅箔擴散之障壁效果。於僅於單面設置中間層之情形時,較佳為於銅箔載體之相反面設置鍍Ni層等防銹層。又,於使用電解銅箔作為載體之情形時,就減少針孔之觀點而言較佳為於閃亮(shiny)面設置中間層。 An intermediate layer composed of two layers of Ni and Cr is provided on one or both sides of the copper foil carrier. The layer is laminated such that the Ni layer is in contact with the interface with the copper foil carrier and the Cr layer is in contact with the interface with the ultra-thin copper layer. As described below, the adhesion between Ni and Cu is higher than the adhesion between Cr and Cu, so that when the ultra-thin copper layer is peeled off, the interface between the ultra-thin copper layer and the Cr layer is peeled off. The Ni layer in the intermediate layer is expected to have a barrier effect of preventing the Cu component from diffusing from the carrier to the ultra-thin copper foil. In the case where the intermediate layer is provided only on one side, it is preferable to provide a rust-proof layer such as a Ni plating layer on the opposite side of the copper foil carrier. Further, in the case of using an electrolytic copper foil as a carrier, it is preferable to provide an intermediate layer on a shiny surface from the viewpoint of reducing pinholes.

構成中間層之Ni層可藉由例如電鍍、無電電鍍及浸漬鍍敷 之類之濕式鍍敷,或濺鍍、CVD及PDV之類之乾式鍍敷而獲得。就成本之觀點而言較佳為電鍍。 The Ni layer constituting the intermediate layer can be plated by electroplating, electroless plating, and immersion plating, for example. Such as wet plating, or dry plating such as sputtering, CVD, and PDV. Electroplating is preferred from the viewpoint of cost.

中間層中之Cr層較薄地存在於極薄銅層之界面一事於獲得 如下特性之方面極為重要:於向絕緣基板之積層步驟前極薄銅層未自載體剝離,另一方面,於向絕緣基板之積層步驟後極薄銅層可自載體剝離。於未設置Ni層而使Cr層存在於載體與極薄銅層之邊界之情形時,剝離性幾乎未提高,於無Cr層而直接積層Ni層與極薄銅層之情形時,剝離強度會對應Ni層中之Ni量而過強或過弱,從而無法獲得適當之剝離強度。 The Cr layer in the intermediate layer is thinly present at the interface of the extremely thin copper layer. It is extremely important that the extremely thin copper layer is not peeled off from the carrier before the lamination step to the insulating substrate, and on the other hand, the ultra-thin copper layer can be peeled off from the carrier after the lamination step to the insulating substrate. When the Ni layer is not provided and the Cr layer is present at the boundary between the carrier and the ultra-thin copper layer, the peeling property is hardly improved, and when the Ni layer and the ultra-thin copper layer are directly laminated without the Cr layer, the peel strength is It is too strong or too weak corresponding to the amount of Ni in the Ni layer, so that appropriate peel strength cannot be obtained.

又,若Cr層存在於載體與Ni層之邊界,則於極薄銅層之剝離時中間層亦隨之被剝離,即,於載體與中間層之間產生剝離,故而欠佳。此種狀況不僅於將Cr層設置於與載體之界面之情形產生,而且即便將Cr 層設置於與極薄銅層之界面,若Cr量過多則亦可能產生。可認為其原因在於:Cu與Ni容易固溶,故而若該等接觸則因相互擴散而使接著力變高從而變得不易剝離,另一方面,Cr與Cu不易固溶而不易產生相互擴散,故而於Cr與Cu之界面接著力較弱從而容易剝離。又,於中間層之Ni量不足之情形時,於載體與極薄銅層之間僅存在微量之Cr故而兩者密接而不易剝離。 Further, when the Cr layer is present at the boundary between the carrier and the Ni layer, the intermediate layer is also peeled off when the ultra-thin copper layer is peeled off, that is, peeling occurs between the carrier and the intermediate layer, which is not preferable. This situation is not only caused by the case where the Cr layer is placed at the interface with the carrier, but even if Cr is The layer is disposed at the interface with the ultra-thin copper layer, and may be generated if the amount of Cr is too large. The reason is considered to be that Cu and Ni are easily dissolved in a solid state. Therefore, when these contacts are in contact with each other, the adhesion force is increased and the adhesion is less likely to occur. On the other hand, Cr and Cu are not easily dissolved and are not easily diffused. Therefore, the interface between Cr and Cu has a weaker adhesion and is easily peeled off. Further, when the amount of Ni in the intermediate layer is insufficient, only a small amount of Cr exists between the carrier and the ultra-thin copper layer, so that the two are in close contact with each other and are not easily peeled off.

為了使Cr層存在於極薄銅層之界面,可藉由如下方式而實 現:於形成Ni層後,藉由例如電解鉻酸鹽、電鍍、無電電鍍及浸漬鍍敷之類之濕式鍍敷,或濺鍍、CVD及PDV之類之乾式鍍敷而使微量之Cr附著,並於其上形成極薄銅層。就以低成本使微量之Cr附著之觀點而言,較佳為電解鉻酸鹽。 In order to make the Cr layer exist at the interface of the extremely thin copper layer, it can be realized as follows Now, after the Ni layer is formed, a trace amount of Cr is obtained by wet plating such as electrolytic chromate, electroplating, electroless plating, and immersion plating, or dry plating such as sputtering, CVD, and PDV. Attached and formed a very thin copper layer thereon. From the viewpoint of attaching a trace amount of Cr at a low cost, electrolytic chromate is preferred.

於本發明中,中間層所含之Ni附著量係以濃度20質量%之 硝酸溶解試樣並利用ICP發光分析進行測定,中間層所含之Cr附著量及Zn附著量係藉由以濃度7質量%之鹽酸溶解試樣並利用原子吸光法進行定量分析而測定。再者,於在極薄銅層之表面設置含有Ni、Cr、Zn之鍍敷層等之情形時,於剝離極薄銅層後,對載體試樣進行上述測定,藉此,可測定中間層所含之Ni附著量、Cr附著量、及Zn附著量。 In the present invention, the amount of Ni contained in the intermediate layer is 20% by mass. The sample was dissolved in nitric acid and measured by ICP emission analysis. The amount of Cr deposited and the amount of Zn deposited in the intermediate layer were measured by dissolving the sample in hydrochloric acid having a concentration of 7 mass% and performing quantitative analysis by atomic absorption. Further, when a plating layer containing Ni, Cr, or Zn is provided on the surface of the ultra-thin copper layer, the carrier layer is subjected to the above measurement after the ultra-thin copper layer is peeled off, whereby the intermediate layer can be measured. The Ni adhesion amount, the Cr adhesion amount, and the Zn adhesion amount contained.

就上述觀點而言,於本發明中,將中間層之Cr之附著量設 定為10~100μg/dm2、Ni之附著量設定為1000~40000μg/dm2。又,隨著Cr附著量或Ni附著量增加而有針孔之量變多之傾向,但只要為該範圍則針孔之數量亦受到抑制。就無不均而均勻地剝離極薄銅層之觀點、及抑制針孔之觀點而言,Cr附著量較佳為設為10~50μg/dm2,更佳為設為15~40μg/dm2,進而較佳為設為10~20μg/dm2。Ni附著量較佳為設為2000~10000μg/dm2,更佳為設為2000~9000μg/dm2,進而較佳為設為2000~4000μg/dm2In the above aspect, in the present invention, the adhesion amount of Cr in the intermediate layer is set to 10 to 100 μg/dm 2 , and the adhesion amount of Ni is set to 1000 to 40,000 μg/dm 2 . Further, as the amount of Cr adhesion or the amount of Ni adhesion increases, the amount of pinholes tends to increase, but the number of pinholes is also suppressed as long as it is within this range. To all views are uniformly peeled off of the ultra-thin copper layer, and in terms of suppressing the pinhole, Cr deposition amount is preferably set to 10 ~ 50μg / dm 2, more preferably set to 15 ~ 40μg / dm 2 Further, it is preferably 10 to 20 μg/dm 2 . Ni deposition amount is preferably set to 2000 ~ 10000μg / dm 2, more preferably set to 2000 ~ 9000μg / dm 2, and further preferably set to 2000 ~ 4000μg / dm 2.

進而,於本發明中較重要的是於中間層含有微量之Zn。藉 此,可有意義地降低針孔之產生,進而容易獲得適當之剝離強度,故而大有助於品質穩定性。並未意圖使本發明受理論所限定,但此係藉由於中間層存在微量之Zn,而形成由Cr與Zn所構成之氧化膜,使中間層之導電度更均勻,使導電度極高之部位、或導電度極低之部位消失。可認為其原因在於:藉此,形成極薄銅層時之銅之電沈積粒均勻地附著於由Cr與Zn所構成之氧化膜,剝離強度成為適當之值(剝離強度不會極高,或剝離強度不會極低)。 Further, it is more important in the present invention that the intermediate layer contains a trace amount of Zn. borrow Therefore, the occurrence of pinholes can be remarkably reduced, and the appropriate peel strength can be easily obtained, which greatly contributes to quality stability. It is not intended to limit the invention to the theory, but by the presence of a trace amount of Zn in the intermediate layer, an oxide film composed of Cr and Zn is formed, so that the conductivity of the intermediate layer is more uniform, and the conductivity is extremely high. The part or the part with extremely low conductivity disappears. The reason for this is considered to be that the electrodeposited particles of copper are uniformly adhered to the oxide film composed of Cr and Zn when the ultra-thin copper layer is formed, and the peel strength is an appropriate value (the peel strength is not extremely high, or Peel strength will not be extremely low).

Zn可存在於中間層中之Ni層及Cr層之任一層或兩層。例 如,藉由於形成Ni層時於鍍敷液中添加鋅成分進行鍍鎳鋅合金,而可獲得含有鋅之Ni層。又,藉由於鉻酸鹽處理液中添加鋅成分,而可獲得含有鋅之Cr層。然而,於任一情形時,均由於Zn於中間層中擴散,故而通常於Ni層及Cr層之兩者中被檢測出來。再者,就容易形成由Cr與Zn所構成之氧化膜而言,較佳為Zn存在於Cr層。 Zn may be present in either or both of the Ni layer and the Cr layer in the intermediate layer. example For example, by adding a zinc component to the plating solution when the Ni layer is formed, a nickel-zinc alloy is deposited to obtain a Ni layer containing zinc. Further, a Cr layer containing zinc can be obtained by adding a zinc component to the chromate treatment liquid. However, in either case, since Zn diffuses in the intermediate layer, it is usually detected in both the Ni layer and the Cr layer. Further, in the case where an oxide film composed of Cr and Zn is easily formed, Zn is preferably present in the Cr layer.

然而,若中間層中之Zn之附著量過少則其效果有限,故而 應設為1μg/dm2以上,較佳為設為5μg/dm2以上。另一方面,若中間層中之Zn之附著量過多則剝離強度過大,故而應設為70μg/dm2以下,較佳為設為30μg/dm2以下,更佳為設為20μg/dm2以下。 However, if the amount of adhesion of Zn in the intermediate layer is too small, the effect is limited, so it should be 1 μg/dm 2 or more, and preferably 5 μg/dm 2 or more. On the other hand, if the amount of deposition of the intermediate layer is too large, the peel strength of Zn is too large, and therefore should be set to 70μg / dm 2 or less, is preferably set to 30μg / dm 2 or less, more preferably to 20μg / dm 2 or less .

又,Zn相對於Cr之質量比(Zn附著量/Cr附著量)之值 較佳為0.01~5.00之範圍,更佳為0.1~1.0之範圍,較佳為0.2~0.8。其原因在於:藉由將Zn相對於Cr之量設為該範圍而針孔之產生受到抑制或極薄銅箔之剝離特性提升。 Further, the mass ratio of Zn to Cr (the amount of Zn adhesion/Cr adhesion) It is preferably in the range of 0.01 to 5.00, more preferably in the range of 0.1 to 1.0, and preferably 0.2 to 0.8. This is because the occurrence of pinholes is suppressed or the peeling characteristics of the ultra-thin copper foil are improved by setting the amount of Zn to Cr to the range.

<3.極薄銅層> <3. Very thin copper layer>

於中間層上設置極薄銅層。極薄銅層可藉由利用有硫酸銅、焦磷酸銅、胺磺酸銅、氰化銅等電解浴之電鍍而形成,硫酸銅浴由於被用於通常之電解銅箔,且可於高電流密度下形成銅箔,故而較佳。極薄銅層之厚度並無 特別限制,但通常薄於載體,例如為12μm以下。典型而言為0.5~12μm,更典型而言為2~5μm。 An extremely thin copper layer is provided on the intermediate layer. The ultra-thin copper layer can be formed by electroplating using an electrolytic bath such as copper sulfate, copper pyrophosphate, copper sulfonate, copper cyanide or the like, which is used for the usual electrolytic copper foil and can be used for high current. It is preferred to form a copper foil at a density. The thickness of the very thin copper layer is not It is particularly limited, but is usually thinner than the carrier, for example, 12 μm or less. Typically it is from 0.5 to 12 μm, more typically from 2 to 5 μm.

<4.粗化處理層及其他層> <4. Roughening layer and other layers>

於極薄銅層之表面,例如為了使與絕緣基板之密接性變得良好等,亦可藉由實施粗化處理而設置粗化處理層。粗化處理例如可藉由以銅或銅合金形成粗化粒子而進行。粗化處理亦可為微細者。粗化處理層亦可為由選自由銅、鎳、鈷、磷、鎢、砷、鉬、鉻及鋅組成之群中之任一單質構成、或由含有選自該群中之任1種以上元素之合金構成的層等。又,於以銅或銅合金形成粗化粒子後,進而亦可進行以鎳、鈷、銅、鋅之單質或合金等設置二次粒子或三次粒子之粗化處理。其後,亦可以鎳、鈷、銅、鋅之單質或合金等形成耐熱層或防銹層,進而亦可對其表面實施鉻酸鹽處理、矽烷偶合處理等處理。或者亦可未進行粗化處理,而以鎳、鈷、銅、鋅之單質或合金等形成耐熱層或防銹層,進而對其表面實施鉻酸鹽處理、矽烷偶合處理等處理。即,亦可於粗化處理層之表面形成選自由耐熱層、防銹層、鉻酸鹽處理層及矽烷偶合處理層組成之群中之1種以上的層,亦可於極薄銅層之表面形成選自由耐熱層、防銹層、鉻酸鹽處理層及矽烷偶合處理層組成之群中之1種以上的層。再者,上述耐熱層、防銹層、鉻酸鹽處理層、矽烷偶合處理層亦可分別以例如2層以上、3層以上等複數層之形式形成。 On the surface of the ultra-thin copper layer, for example, in order to improve the adhesion to the insulating substrate, a roughening treatment layer may be provided by performing a roughening treatment. The roughening treatment can be carried out, for example, by forming roughened particles with copper or a copper alloy. The roughening treatment can also be fine. The roughening treatment layer may be composed of any one selected from the group consisting of copper, nickel, cobalt, phosphorus, tungsten, arsenic, molybdenum, chromium, and zinc, or may contain any one or more selected from the group. A layer composed of an alloy of elements. Further, after the roughened particles are formed of copper or a copper alloy, a roughening treatment may be performed in which secondary particles or tertiary particles are provided in a simple substance such as nickel, cobalt, copper or zinc or an alloy. Thereafter, a heat-resistant layer or a rust-preventing layer may be formed of a single substance or an alloy of nickel, cobalt, copper or zinc, and the surface may be subjected to a treatment such as chromate treatment or decane coupling treatment. Alternatively, the heat-resistant layer or the rust-preventing layer may be formed of a single substance or an alloy of nickel, cobalt, copper or zinc, and the surface may be subjected to a treatment such as chromate treatment or decane coupling treatment. In other words, one or more layers selected from the group consisting of a heat-resistant layer, a rust-preventive layer, a chromate-treated layer, and a decane coupling treatment layer may be formed on the surface of the roughened layer, or may be formed in an extremely thin copper layer. One or more layers selected from the group consisting of a heat-resistant layer, a rust-preventive layer, a chromate-treated layer, and a decane coupling treatment layer are formed on the surface. Further, the heat-resistant layer, the rust-preventive layer, the chromate-treated layer, and the decane coupling treatment layer may be formed as a plurality of layers of, for example, two or more layers and three or more layers.

因此,於本發明之一實施形態中,亦可於上述極薄銅層上具備粗化處理層,亦可於上述粗化處理層上具備耐熱層、防銹層,亦可於上述耐熱層、防銹層上具備鉻酸鹽處理層,亦可於上述鉻酸鹽處理層上具備矽烷偶合處理層。 Therefore, in one embodiment of the present invention, the ultra-thin copper layer may be provided with a roughened layer, or the heat-treated layer or the rust-preventing layer may be provided on the roughened layer, or the heat-resistant layer may be The rustproof layer is provided with a chromate treatment layer, and a decane coupling treatment layer may be provided on the chromate treatment layer.

作為耐熱層、防銹層,可使用公知之耐熱層、防銹層。例如, 耐熱層及/或防銹層可為含有選自鎳、鋅、錫、鈷、鉬、銅、鎢、磷、砷、鉻、釩、鈦、鋁、金、銀、鉑族元素、鐵、鉭之群中之1種以上之元素的 層,亦可為由選自鎳、鋅、錫、鈷、鉬、銅、鎢、磷、砷、鉻、釩、鈦、鋁、金、銀、鉑族元素、鐵、鉭之群中之1種以上之元素所構成的金屬層或合金層。又,耐熱層及/或防銹層亦可含有氧化物、氮化物、矽化物,該氧化物、氮化物、矽化物含有選自鎳、鋅、錫、鈷、鉬、銅、鎢、磷、砷、鉻、釩、鈦、鋁、金、銀、鉑族元素、鐵、鉭之群中之1種以上之元素。又,耐熱層及/或防銹層亦可為含有鎳-鋅合金之層。又,耐熱層及/或防銹層亦可為鎳-鋅合金層。上述鎳-鋅合金層亦可為去除不可避免之雜質而含有50wt%~99wt%之鎳、50wt%~1wt%之鋅者。上述鎳-鋅合金層之鋅及鎳之合計附著量亦可為5~1000mg/m2、較佳為10~500mg/m2、較佳為20~100mg/m2。又,上述含有鎳-鋅合金之層或上述鎳-鋅合金層之鎳之附著量與鋅之附著量的比(=鎳之附著量/鋅之附著量)較佳為1.5~10。又,上述含有鎳-鋅合金之層或上述鎳-鋅合金層之鎳之附著量較佳為0.5mg/m2~500mg/m2,更佳為1mg/m2~50mg/m2。於耐熱層及/或防銹層為含有鎳-鋅合金之層之情形時,於通孔(through hole)或通路孔(via hole)等之內壁部與除膠渣(desmear)液接觸時,銅箔與樹脂基板之界面不易受除膠渣液侵蝕,從而提高銅箔與樹脂基板之密接性。 As the heat-resistant layer and the rust-preventing layer, a known heat-resistant layer or rust-preventing layer can be used. For example, the heat resistant layer and/or the rustproof layer may be selected from the group consisting of nickel, zinc, tin, cobalt, molybdenum, copper, tungsten, phosphorus, arsenic, chromium, vanadium, titanium, aluminum, gold, silver, platinum group elements, iron. a layer of one or more elements of the group of bismuth, which may also be selected from the group consisting of nickel, zinc, tin, cobalt, molybdenum, copper, tungsten, phosphorus, arsenic, chromium, vanadium, titanium, aluminum, gold, silver, A metal layer or an alloy layer composed of one or more elements selected from the group consisting of platinum group elements, iron, and antimony. Moreover, the heat-resistant layer and/or the rust-preventing layer may further contain an oxide, a nitride, and a telluride, and the oxide, nitride, and telluride may be selected from the group consisting of nickel, zinc, tin, cobalt, molybdenum, copper, tungsten, and phosphorus. One or more elements of the group consisting of arsenic, chromium, vanadium, titanium, aluminum, gold, silver, platinum group elements, iron, and antimony. Further, the heat-resistant layer and/or the rust-preventive layer may be a layer containing a nickel-zinc alloy. Further, the heat-resistant layer and/or the rust-preventive layer may be a nickel-zinc alloy layer. The nickel-zinc alloy layer may also contain 50% by weight to 99% by weight of nickel and 50% by weight to 1% by weight of zinc for removing unavoidable impurities. The total adhesion amount of zinc and nickel in the nickel-zinc alloy layer may be 5 to 1000 mg/m 2 , preferably 10 to 500 mg/m 2 , preferably 20 to 100 mg/m 2 . Further, the ratio of the adhesion amount of nickel to the nickel-zinc alloy layer or the nickel-zinc alloy layer to the adhesion amount of zinc (=the adhesion amount of nickel/the adhesion amount of zinc) is preferably 1.5 to 10. Further, the adhesion amount of the nickel-zinc alloy-containing layer or the nickel-zinc alloy layer is preferably 0.5 mg/m 2 to 500 mg/m 2 , more preferably 1 mg/m 2 to 50 mg/m 2 . When the heat-resistant layer and/or the rust-preventive layer is a layer containing a nickel-zinc alloy, when the inner wall portion of the through hole or the via hole is in contact with the desmear liquid The interface between the copper foil and the resin substrate is not easily eroded by the degreasing liquid, thereby improving the adhesion between the copper foil and the resin substrate.

例如耐熱層及/或防銹層亦可為依次積層有附著量為1mg /m2~100mg/m2(較佳為5mg/m2~50mg/m2)之鎳或鎳合金層、與附著量為1mg/m2~80mg/m2(較佳為5mg/m2~40mg/m2)之錫層者,上述鎳合金層亦可由鎳-鉬、鎳-鋅、鎳-鉬-鈷之任一種構成。又,耐熱層及/或防銹層中,鎳或鎳合金與錫之合計附著量較佳為2mg/m2~150mg/m2,更佳為10mg/m2~70mg/m2。又,耐熱層及/或防銹層中,[鎳或鎳合金中之鎳附著量]/[錫附著量]較佳為0.25~10,更佳為0.33~3。若使用該耐熱層及/或防銹層,則將附載體銅箔加工成印刷配線板以後之電路之剝落強度、該剝落強度之耐化學品性劣化率等變良好。 For example, the heat-resistant layer and/or the rust-preventing layer may be a nickel or nickel alloy layer having an adhesion amount of 1 mg / m 2 to 100 mg / m 2 (preferably 5 mg / m 2 to 50 mg / m 2 ), and attached thereto. The nickel alloy layer may also be composed of nickel-molybdenum, nickel-zinc, nickel-molybdenum-cobalt in an amount of 1 mg/m 2 to 80 mg/m 2 (preferably 5 mg/m 2 to 40 mg/m 2 ). Any one of the components. Further, in the heat-resistant layer and/or the rust-preventive layer, the total adhesion amount of nickel or a nickel alloy to tin is preferably 2 mg/m 2 to 150 mg/m 2 , more preferably 10 mg/m 2 to 70 mg/m 2 . Further, in the heat-resistant layer and/or the rust-preventive layer, [the amount of nickel deposited in the nickel or nickel alloy] / [the amount of tin adhesion] is preferably 0.25 to 10, more preferably 0.33 to 3. When the heat-resistant layer and/or the rust-preventing layer are used, the peeling strength of the circuit after the copper foil with a carrier is processed into a printed wiring board, the chemical-resistant deterioration rate of the peeling strength, etc. become favorable.

再者,可將公知之矽烷偶合劑用於矽烷偶合處理中所使用之 矽烷偶合劑,可使用例如胺基系矽烷偶合劑或環氧系矽烷偶合劑、巰基系矽烷偶合劑。又,亦可將乙烯基三甲氧基矽烷、乙烯基苯基三甲氧基矽烷、γ-甲基丙烯醯氧基丙基三甲氧基矽烷、γ-環氧丙氧基丙基三甲氧基矽烷、4-環氧丙基丁基三甲氧基矽烷、γ-胺基丙基三乙氧基矽烷、N-β(胺基乙基)γ-胺基丙基三甲氧基矽烷、N-3-(4-(3-胺基丙氧基)丁氧基)丙基-3-胺基丙基三甲氧基矽烷、咪唑矽烷、三矽烷、γ-巰基丙基三甲氧基矽烷等用於矽烷偶合劑。 Further, a known decane coupling agent can be used for the decane coupling treatment. As the decane coupling agent, for example, an amine decane coupling agent, an epoxy decane coupling agent, or a decyl decane coupling agent can be used. Further, vinyl trimethoxy decane, vinyl phenyl trimethoxy decane, γ-methyl propylene methoxy propyl trimethoxy decane, γ-glycidoxypropyl trimethoxy decane, 4-epoxypropylbutyltrimethoxydecane, γ-aminopropyltriethoxydecane, N-β(aminoethyl)γ-aminopropyltrimethoxydecane, N-3-( 4-(3-Aminopropoxy)butoxy)propyl-3-aminopropyltrimethoxydecane, imidazolium, trioxane, γ-mercaptopropyltrimethoxydecane, etc. for decane coupling agents .

上述矽烷偶合處理層亦可使用環氧系矽烷、胺基系矽烷、甲 基丙烯醯氧基系矽烷、巰基系矽烷等矽烷偶合劑等而形成。再者,此種矽烷偶合劑亦可混合2種以上使用。其中,較佳為使用胺基系矽烷偶合劑或環氧系矽烷偶合劑而形成者。 The above decane coupling treatment layer may also be an epoxy decane, an amine decane or a It is formed by a decane coupling agent such as a propylene oxy oxane or a decyl decane. Further, such a decane coupling agent may be used in combination of two or more kinds. Among them, it is preferred to use an amine decane coupling agent or an epoxy decane coupling agent.

此處所提及之胺基系矽烷偶合劑,亦可為選自由如下化合物 所組成之群者:N-(2-胺基乙基)-3-胺基丙基三甲氧基矽烷、3-(N-苯乙烯基甲基-2-胺基乙基胺基)丙基三甲氧基矽烷、3-胺基丙基三乙氧基矽烷、雙(2-羥基乙基)-3-胺基丙基三乙氧基矽烷、胺基丙基三甲氧基矽烷、N-甲基胺基丙基三甲氧基矽烷、N-苯基胺基丙基三甲氧基矽烷、N-(3-丙烯醯氧基-2-羥基丙基)-3-胺基丙基三乙氧基矽烷、4-胺基丁基三乙氧基矽烷、(胺基乙基胺基甲基)苯乙基三甲氧基矽烷、N-(2-胺基乙基-3-胺基丙基)三甲氧基矽烷、N-(2-胺基乙基-3-胺基丙基)三(2-乙基己氧基)矽烷、6-(胺基己基胺基丙基)三甲氧基矽烷、胺基苯基三甲氧基矽烷、3-(1-胺基丙氧基)-3,3-二甲基-1-丙烯基三甲氧基矽烷、3-胺基丙基三(甲氧基乙氧基乙氧基)矽烷、3-胺基丙基三乙氧基矽烷、3-胺基丙基三甲氧基矽烷、ω-胺基十一基三甲氧基矽烷、3-(2-N-苄基胺基乙基胺基丙基)三甲氧基矽烷、 雙(2-羥基乙基)-3-胺基丙基三乙氧基矽烷、(N,N-二乙基-3-胺基丙基)三甲氧基矽烷、(N,N-二甲基-3-胺基丙基)三甲氧基矽烷、N-甲基胺基丙基三甲氧基矽烷、N-苯基胺基丙基三甲氧基矽烷、3-(N-苯乙烯基甲基-2-胺基乙基胺基)丙基三甲氧基矽烷、γ-胺基丙基三乙氧基矽烷、N-β(胺基乙基)γ-胺基丙基三甲氧基矽烷、N-3-(4-(3-胺基丙氧基)丁氧基)丙基-3-胺基丙基三甲氧基矽烷。 The amine decane coupling agent mentioned herein may also be selected from the following compounds The group consisting of: N-(2-aminoethyl)-3-aminopropyltrimethoxydecane, 3-(N-styrylmethyl-2-aminoethylamino)propyl Trimethoxydecane, 3-aminopropyltriethoxydecane, bis(2-hydroxyethyl)-3-aminopropyltriethoxydecane, aminopropyltrimethoxydecane, N-A Aminopropyltrimethoxydecane, N-phenylaminopropyltrimethoxydecane, N-(3-propenyloxy-2-hydroxypropyl)-3-aminopropyltriethoxy Decane, 4-aminobutyltriethoxydecane, (aminoethylaminomethyl)phenethyltrimethoxydecane, N-(2-aminoethyl-3-aminopropyl)trimethyl Oxydecane, N-(2-aminoethyl-3-aminopropyl)tris(2-ethylhexyloxy)decane, 6-(aminohexylaminopropyl)trimethoxynonane, amine Phenyltrimethoxydecane, 3-(1-aminopropoxy)-3,3-dimethyl-1-propenyltrimethoxynonane, 3-aminopropyltris(methoxyethoxy) Ethyloxy)decane, 3-aminopropyltriethoxydecane, 3-aminopropyltrimethoxydecane, ω-aminoundecyltrimethoxydecane, 3-(2-N-benzyl Aminoethylaminopropyl)trimethoxyanthracene alkyl, Bis(2-hydroxyethyl)-3-aminopropyltriethoxydecane, (N,N-diethyl-3-aminopropyl)trimethoxynonane, (N,N-dimethyl 3-aminopropyl)trimethoxydecane, N-methylaminopropyltrimethoxydecane, N-phenylaminopropyltrimethoxydecane, 3-(N-styrylmethyl- 2-Aminoethylamino)propyltrimethoxydecane, γ-aminopropyltriethoxydecane, N-β(aminoethyl)γ-aminopropyltrimethoxydecane, N- 3-(4-(3-Aminopropyloxy)butoxy)propyl-3-aminopropyltrimethoxydecane.

矽烷偶合處理層較理想為於以矽原子換算為0.05mg/m2~ 200mg/m2、較佳為0.15mg/m2~20mg/m2、較佳為0.3mg/m2~2.0mg/m2之範圍設置。於上述範圍之情形時,可進一步提高基材樹脂與表面處理銅箔之密接性。 The decane coupling treatment layer is preferably 0.05 mg/m 2 to 200 mg/m 2 , preferably 0.15 mg/m 2 to 20 mg/m 2 , preferably 0.3 mg/m 2 to 2.0 mg/in terms of ruthenium atom. The range of m 2 is set. In the case of the above range, the adhesion between the base resin and the surface-treated copper foil can be further improved.

又,上述附載體銅箔亦可於上述極薄銅層上、或上述粗化處 理層上、或上述耐熱層、防銹層、或鉻酸鹽處理層、或矽烷偶合處理層上具備樹脂層。上述樹脂層亦可為絕緣樹脂層。 Further, the copper foil with a carrier may be on the ultra-thin copper layer or the roughening portion A resin layer is provided on the protective layer or the heat-resistant layer, the rust-preventing layer, the chromate-treated layer, or the decane coupling treatment layer. The above resin layer may also be an insulating resin layer.

上述樹脂層可為接著劑,亦可為接著用之半硬化狀態(B階 段狀態)之絕緣樹脂層。所謂半硬化狀態(B階段狀態)係包含如下狀態:即便以手指觸碰其表面亦無黏著感,可將該絕緣樹脂層重疊保管,進而若受到加熱處理則發生硬化反應。 The above resin layer may be an adhesive or a semi-hardened state for subsequent use (B-stage) Insulating resin layer in the segment state). The semi-hardened state (B-stage state) includes a state in which the insulating resin layer can be stored in an overlapping manner even if the surface is touched by a finger, and the curing reaction can be performed by heat treatment.

又,上述樹脂層可含有熱硬化性樹脂,又,亦可含有熱塑性 樹脂。其種類並無特別限定,例如可列舉包含環氧樹脂、聚醯亞胺樹脂、多官能性氰酸酯化合物、順丁烯二醯亞胺化合物、順丁烯二醯亞胺系樹脂、聚乙烯縮醛樹脂、胺酯樹脂(urethane resin)、聚醚碸、聚醚碸樹脂、芳香族聚醯胺樹脂、聚醯胺醯亞胺樹脂、橡膠修飾(改質)環氧樹脂、苯氧樹脂(phenoxy resin)、羧基修飾(改質)丙烯腈-丁二烯樹脂、聚苯醚、雙順丁烯二醯亞胺三 樹脂、熱硬化性聚苯醚樹脂、氰酸酯系樹脂、多元羧酸之酐等之樹脂作為較佳者。又,上述樹脂層亦可為含有嵌段共聚聚醯亞胺樹 脂層之樹脂層或含有嵌段共聚聚醯亞胺樹脂與聚順丁烯二醯亞胺化合物之樹脂層。又,上述環氧樹脂係於分子內具有2個以上環氧基者,且只要為可用於電氣.電子材料用途者則可無特別問題地使用。又,上述環氧樹脂較佳為使用於分子內具有2個以上環氧丙基之化合物進行環氧化而成之環氧樹脂。又,可混合使用選自雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、雙酚AD型環氧樹脂、酚醛清漆型環氧樹脂、甲酚酚醛清漆型環氧樹脂、脂環式環氧樹脂、溴化環氧樹脂、環氧丙基胺型環氧樹脂、三聚異氰酸三環氧丙酯、N,N-二環氧丙基苯胺等環氧丙基胺化合物、四氫鄰苯二甲酸二環氧丙酯等環氧丙酯化合物、含磷環氧樹脂、聯苯型環氧樹脂、聯苯酚醛清漆型環氧樹脂、三羥基苯基甲烷型環氧樹脂、四苯乙烷型環氧樹脂之群中之1種或2種以上,或者可使用上述環氧樹脂之氫化物或鹵化物。 Further, the resin layer may contain a thermosetting resin, and may also contain a thermoplastic Resin. The type thereof is not particularly limited, and examples thereof include an epoxy resin, a polyimide resin, a polyfunctional cyanate compound, a maleimide compound, a maleimide resin, and a polyethylene. Acetal resin, urethane resin, polyether oxime, polyether oxime resin, aromatic polyamide resin, polyamidoximine resin, rubber modified (modified) epoxy resin, phenoxy resin ( Phenoxy resin), carboxyl modified (modified) acrylonitrile-butadiene resin, polyphenylene ether, bis-xenylene diimide three resin, thermosetting polyphenylene ether resin, cyanate resin, polycarboxylic acid A resin such as an anhydride is preferred. Further, the above resin layer may also be a block copolymerized polyimine tree A resin layer of a lipid layer or a resin layer containing a block copolymerized polyimide resin and a polysynyleneimine compound. Further, the epoxy resin is one having two or more epoxy groups in the molecule, and is only applicable to electricity. Electronic materials users can use without any problems. Further, the epoxy resin is preferably an epoxy resin obtained by epoxidizing a compound having two or more epoxy propyl groups in the molecule. Further, a mixture selected from the group consisting of bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, bisphenol AD type epoxy resin, novolac type epoxy resin, cresol novolac Epoxy resin, alicyclic epoxy resin, brominated epoxy resin, epoxy propyl amine epoxy resin, triglycidyl isocyanate, N, N-diepoxypropyl aniline, etc. A glycidyl ester compound such as a glycidylamine compound or a diglycidyl tetrahydrophthalate, a phosphorus-containing epoxy resin, a biphenyl type epoxy resin, a biphenyl novolac type epoxy resin, or a trihydroxybenzene One or two or more of the group consisting of a base methane type epoxy resin and a tetraphenylethane type epoxy resin, or a hydride or a halide of the above epoxy resin may be used.

上述多元羧酸之酐較佳為作為環氧樹脂之硬化劑而有助益 之成分。又,上述多元羧酸之酐較佳為鄰苯二甲酸酐、順丁烯二酸酐、1,2,4-苯三甲酸酐、焦蜜石酸二酐、四羥基鄰苯二甲酸酐、六羥基鄰苯二甲酸酐、甲基六羥基鄰苯二甲酸酐、耐地酸酐(Nadic anhydride)、甲基耐地酸酐。 The above polycarboxylic acid anhydride is preferably useful as a hardener for an epoxy resin. The ingredients. Further, the anhydride of the polyvalent carboxylic acid is preferably phthalic anhydride, maleic anhydride, 1,2,4-benzenetricarboxylic anhydride, pyromellitic dianhydride, tetrahydroxyphthalic anhydride, or hexahydroxyl Phthalic anhydride, methyl hexahydroxyphthalic anhydride, Nadic anhydride, methyl acid anhydride.

又,用以形成上述樹脂層之樹脂組成物亦可含有多元羧酸之酐、苯氧樹脂、環氧樹脂。上述酸酐較佳為相對於苯氧樹脂中所含有之羥基1mol含有0.01mol~0.5mol。上述苯氧樹脂可使用藉由雙酚與2價之環氧樹脂之反應而合成者。上述苯氧樹脂之含量亦可於將上述樹脂組成物之總量設為100重量份時含有3重量份~30重量份。上述環氧樹脂亦可為使用於分子內具有2個以上環氧丙基之化合物進行環氧化而成之環氧樹脂。再者,上述樹脂組成物可於使多元羧酸之酐與苯氧樹脂進行反應,對苯氧樹脂之羥基開環加成多元羧酸後,添加環氧樹脂而獲得。 Further, the resin composition for forming the resin layer may contain an anhydride of a polyvalent carboxylic acid, a phenoxy resin, or an epoxy resin. The above acid anhydride preferably contains 0.01 mol to 0.5 mol with respect to 1 mol of the hydroxyl group contained in the phenoxy resin. The above phenoxy resin can be synthesized by a reaction of a bisphenol and a divalent epoxy resin. The content of the phenoxy resin may be 3 parts by weight to 30 parts by weight when the total amount of the resin composition is 100 parts by weight. The epoxy resin may be an epoxy resin obtained by epoxidizing a compound having two or more epoxy propyl groups in the molecule. Further, the resin composition can be obtained by reacting an anhydride of a polyvalent carboxylic acid with a phenoxy resin, ring-opening addition of a polyvalent carboxylic acid to a hydroxyl group of a phenoxy resin, and then adding an epoxy resin.

作為上述雙酚,可使用以雙酚A、雙酚F、雙酚S、四溴雙 酚A、4,4'-二羥基聯苯、HCA(9,10-Dihydro-9-Oxa-10-Phosphaphenanthrene-10-Oxide,9,10-二氫-9-氧雜-10-磷雜菲-10-氧化物)與對苯二酚、萘醌等醌類之加成物之形式所獲得之雙酚等。 As the above bisphenol, bisphenol A, bisphenol F, bisphenol S, and tetrabromo-bis can be used. Phenol A, 4,4'-dihydroxybiphenyl, HCA (9,10-Dihydro-9-Oxa-10-Phosphaphenanthrene-10-Oxide, 9,10-dihydro-9-oxa-10-phosphaphenanthrene -10-Oxide) Bisphenol obtained in the form of an adduct with a terpene such as hydroquinone or naphthoquinone.

又,上述熱塑性樹脂亦可為具有可與環氧樹脂聚合之除醇性羥基以外之官能基之熱塑性樹脂。 Further, the thermoplastic resin may be a thermoplastic resin having a functional group other than the alcohol-removing hydroxyl group polymerizable with the epoxy resin.

上述樹脂層之組成係相對於樹脂成分總量含有50~90重量%之環氧樹脂、5~20重量%之聚乙烯縮醛樹脂、0.1~20重量%之胺酯樹脂,該環氧樹脂之0.5~40重量%亦可為橡膠修飾(改質)環氧樹脂。 The composition of the resin layer is 50 to 90% by weight of epoxy resin, 5 to 20% by weight of polyvinyl acetal resin, and 0.1 to 20% by weight of urethane resin, based on the total amount of the resin component. 0.5 to 40% by weight may also be a rubber modified (modified) epoxy resin.

又,上述聚乙烯縮醛樹脂亦可具有酸基及羥基以外之可與環氧樹脂或順丁烯二醯亞胺化合物聚合之官能基。相對於上述用於樹脂層之樹脂組成物之總量100重量份,可含有環氧樹脂摻合物40~80重量份、順丁烯二醯亞胺化合物10~50重量份、具有羥基及除羥基以外之可與環氧樹脂或順丁烯二醯亞胺化合物聚合之官能基之聚乙烯縮醛樹脂5~30重量份。又,上述聚乙烯縮醛樹脂亦可為於分子內導入有羧基、胺基或不飽和雙鍵者。 Further, the polyvinyl acetal resin may have a functional group other than an acid group or a hydroxyl group which is polymerizable with an epoxy resin or a maleimide compound. It may contain 40 to 80 parts by weight of the epoxy resin blend, 10 to 50 parts by weight of the maleimide compound, and have a hydroxyl group and 100 parts by weight based on 100 parts by weight of the total amount of the resin composition for the resin layer. 5 to 30 parts by weight of a polyvinyl acetal resin which is a functional group which can be polymerized with an epoxy resin or a maleimide compound other than a hydroxyl group. Further, the polyvinyl acetal resin may be one having a carboxyl group, an amine group or an unsaturated double bond introduced into the molecule.

又,上述樹脂層亦可為使用由20~80重量份之環氧樹脂(含硬化劑)、20~80重量份之可溶於溶劑之芳香族聚醯胺樹脂聚合物、及視需要適量添加之硬化促進劑所構成之樹脂組成物而形成者。又,上述樹脂層亦可為使用由5~80重量份之環氧樹脂(含硬化劑)、20~95重量份之可溶於溶劑之芳香族聚醯胺樹脂聚合物、及視需要適量添加之硬化促進劑所構成之樹脂組成物而形成者。用於形成上述樹脂層之樹脂組成物之構成中所使用之芳香族聚醯胺樹脂聚合物亦可為藉由使芳香族聚醯胺與橡膠性樹脂進行反應而獲得者。上述樹脂層亦可為含有介電體填料者。上述樹脂層亦可為含有骨架材料者。 Further, the resin layer may be an epoxy resin (containing a curing agent) in an amount of 20 to 80 parts by weight, 20 to 80 parts by weight of a solvent-soluble aromatic polyamide resin polymer, and if necessary, added in an appropriate amount. The resin composition composed of the hardening accelerator is formed. Further, the resin layer may be an epoxy resin (containing a curing agent) of 5 to 80 parts by weight, 20 to 95 parts by weight of a solvent-soluble aromatic polyamide resin polymer, and if necessary, added in an appropriate amount. The resin composition composed of the hardening accelerator is formed. The aromatic polyamide resin polymer used in the constitution of the resin composition for forming the above resin layer may be obtained by reacting an aromatic polyamide with a rubber resin. The above resin layer may also be a dielectric filler. The above resin layer may also be a material containing a skeleton.

此處,作為上述芳香族聚醯胺樹脂聚合物,可列舉:使芳香族聚醯胺樹脂與橡膠性樹脂進行反應所獲得者。此處,所謂芳香族聚醯胺 樹脂係藉由芳香族二胺與二羧酸之縮聚合而合成者。作為此時之芳香族二胺,使用4,4'-二胺基二苯基甲烷、3,3'-二胺基二苯基碸、間茬二胺、3,3'-氧二苯胺等。而且,作為二羧酸,使用鄰苯二甲酸、間苯二甲酸、對苯二甲酸、反丁烯二酸等。 Here, the aromatic polyamine resin polymer is obtained by reacting an aromatic polyamide resin with a rubber resin. Aromatic polyamine The resin is synthesized by condensation polymerization of an aromatic diamine and a dicarboxylic acid. As the aromatic diamine at this time, 4,4'-diaminodiphenylmethane, 3,3'-diaminodiphenylphosphonium, m-diamine diamine, 3,3'-oxydiphenylamine, etc. are used. . Further, as the dicarboxylic acid, phthalic acid, isophthalic acid, terephthalic acid, fumaric acid or the like is used.

而且,所謂與上述芳香族聚醯胺樹脂反應之上述橡膠性樹脂 係以包含天然橡膠及合成橡膠之概念來記載,作為後者之合成橡膠有苯乙烯-丁二烯橡膠、丁二烯橡膠、丁基橡膠、乙烯-丙烯橡膠等。進而,於確保形成之介電層之耐熱性時,亦為有用的是選擇使用腈橡膠、氯丁二烯橡膠、矽橡膠、胺酯橡膠等具備耐熱性之合成橡膠。關於該等橡膠性樹脂,為了與芳香族聚醯胺樹脂反應而製造共聚物,而較理想為於兩末端具備各種官能基者。尤為有用的是使用CTBN(羧基末端丁二烯腈)。 Further, the above-mentioned rubber resin which reacts with the above aromatic polyamide resin The concept includes natural rubber and synthetic rubber. The latter synthetic rubbers include styrene-butadiene rubber, butadiene rubber, butyl rubber, and ethylene-propylene rubber. Further, in order to secure the heat resistance of the formed dielectric layer, it is also useful to use a heat-resistant synthetic rubber such as a nitrile rubber, a chloroprene rubber, a ruthenium rubber or an amine ester rubber. The rubber-based resin is preferably a compound having various functional groups at both ends in order to produce a copolymer by reacting with an aromatic polyamide resin. It is especially useful to use CTBN (carboxy terminal butadiene nitrile).

構成芳香族聚醯胺樹脂聚合物之芳香族聚醯胺樹脂與橡膠 性樹脂較佳為以芳香族聚醯胺樹脂為25wt%~75wt%、剩餘部分為橡膠性樹脂此種組成來使用。於芳香族聚醯胺樹脂未達25wt%之情形時,橡膠成分之存在比率過大而導致耐熱性較差,另一方面,若超過75wt%則芳香族聚醯胺樹脂之存在比率過大,硬化後之硬度過高而變脆。該芳香族聚醯胺樹脂聚合物係用於如下目的:於對加工成覆銅積層板後之銅箔進行蝕刻加工時,不會因蝕刻液而受到由底蝕(underetching)所引起之損傷。 Aromatic polyamide resin and rubber constituting aromatic polyamide resin polymer The resin is preferably used in an amount of 25 wt% to 75 wt% of the aromatic polyamide resin and the remainder being a rubber resin. When the aromatic polyamide resin is less than 25% by weight, the ratio of the presence of the rubber component is too large to cause poor heat resistance. On the other hand, if it exceeds 75 wt%, the ratio of the presence of the aromatic polyamide resin is too large, and after hardening, The hardness is too high and becomes brittle. The aromatic polyamide resin polymer is used for the purpose of etching the copper foil processed into a copper clad laminate without being damaged by underetching due to the etching liquid.

對該芳香族聚醯胺樹脂聚合物首先要求有可溶於溶劑之性 質。該芳香族聚醯胺樹脂聚合物係以20重量份~80重量份之摻合比率使用。於芳香族聚醯胺樹脂聚合物未達20重量份之情形時,於進行覆銅積層板之製造之通常之加壓條件下過度硬化而變脆,從而容易於基板表面產生微裂。另一方面,即便超過80重量份地添加芳香族聚醯胺樹脂聚合物亦無特別妨礙,但即便超過80重量份地添加芳香族聚醯胺樹脂聚合物,硬化後之強度亦不會進一步提高。因此,可認為若考慮到經濟性則80重量份為上 限值。 The aromatic polyamide resin polymer is first required to have solubility in a solvent. quality. The aromatic polyamide resin polymer is used in a blending ratio of 20 parts by weight to 80 parts by weight. When the amount of the aromatic polyamide resin polymer is less than 20 parts by weight, it is excessively hardened and becomes brittle under ordinary pressurization conditions for producing a copper clad laminate, and it is easy to cause microcracking on the surface of the substrate. On the other hand, even if the aromatic polyamine resin polymer is added in an amount of more than 80 parts by weight, the strength of the aromatic polyamide resin polymer is not increased even if it is added in an amount of more than 80 parts by weight. . Therefore, it can be considered that 80 parts by weight is considered in consideration of economy. Limit.

所謂「視需要適量添加之硬化促進劑」係三級胺、咪唑、脲系硬化促進劑等。於本案發明中,該硬化促進劑之摻合比率並未特別設限。其原因在於:關於硬化促進劑,考慮到覆銅積層板製造之步驟中之生產條件性等,製造者可任意選擇性地規定添加量。 The "hardening accelerator added in an appropriate amount as needed" is a tertiary amine, an imidazole, a urea-based hardening accelerator, and the like. In the invention of the present invention, the blending ratio of the hardening accelerator is not particularly limited. The reason for this is that the curing accelerator can be arbitrarily and selectively specified by the manufacturer in consideration of the production conditions and the like in the step of manufacturing the copper clad laminate.

用以形成上述樹脂層之樹脂組成物亦可為使雙酚A型環氧樹脂、甲酚酚醛清漆型環氧樹脂、溴化雙酚A型環氧樹脂之3種環氧樹脂溶解於溶劑並向其中添加硬化劑、微粉碎二氧化矽、三氧化銻等反應觸媒而成之樹脂組成物。關於此時之硬化劑與上述相同。該樹脂組成亦為顯示出良好之銅箔與基材樹脂之密接性者。 The resin composition for forming the resin layer may be one in which three epoxy resins of a bisphenol A epoxy resin, a cresol novolak epoxy resin, and a brominated bisphenol A epoxy resin are dissolved in a solvent. A resin composition obtained by adding a curing agent such as a curing agent or finely pulverized ceria or antimony trioxide to the reaction catalyst. The hardener at this time is the same as described above. The resin composition also exhibits good adhesion between the copper foil and the base resin.

用以形成上述樹脂層之樹脂組成物亦可為使聚苯醚樹脂、2,2-雙(4-氰氧基苯基)丙烷、含磷之酚化合物、環烷酸錳、2,2-雙(4-環氧丙基苯基)丙烷溶解於溶劑而成之聚苯醚-氰酸酯系之樹脂組成物。該樹脂組成亦為顯示出良好之銅箔與基材樹脂之密接性者。 The resin composition for forming the above resin layer may also be a polyphenylene ether resin, 2,2-bis(4-cyanooxyphenyl)propane, a phosphorus-containing phenol compound, manganese naphthenate, 2,2- A polyphenylene ether-cyanate-based resin composition in which bis(4-epoxypropylphenyl)propane is dissolved in a solvent. The resin composition also exhibits good adhesion between the copper foil and the base resin.

用以形成上述樹脂層之樹脂組成物亦可為使矽氧烷改質聚醯胺醯亞胺樹脂、甲酚酚醛清漆型環氧樹脂溶解於溶劑而成之矽氧烷改質聚醯胺醯亞胺系之樹脂組成物。該樹脂組成亦為顯示出良好之銅箔與基材樹脂之密接性者。 The resin composition for forming the above resin layer may also be a decane modified polyamine amide which is obtained by dissolving a decane modified polyamidoximine resin or a cresol novolac type epoxy resin in a solvent. An imide resin composition. The resin composition also exhibits good adhesion between the copper foil and the base resin.

(含有介電體(介電體填料)之樹脂層之情形) (In the case of a resin layer containing a dielectric (dielectric filler))

於使上述任一樹脂層或樹脂組成物含有介電體(介電體填料)之情形時,可用於形成電容器層之用途,使電容器電路之電容增大。作為該介電體(介電體填料),使用BaTiO3、SrTiO3、Pb(Zr-Ti)O3(通稱PZT)、PbLaTiO3.PbLaZrO(通稱PLZT)、SrBi2Ta2O9(通稱SBT)等具有鈣鈦礦結構之複合氧化物之介電體粉末。 When any of the above resin layers or resin compositions contains a dielectric (dielectric filler), it can be used for forming a capacitor layer to increase the capacitance of the capacitor circuit. As the dielectric (dielectric filler), BaTiO 3 , SrTiO 3 , Pb(Zr-Ti)O 3 (commonly known as PZT), and PbLaTiO 3 are used . A dielectric powder of a composite oxide having a perovskite structure such as PbLaZrO (commonly known as PLZT) or SrBi 2 Ta 2 O 9 (commonly known as SBT).

介電體(介電體填料)亦可為粉狀。於介電體(介電體填料) 為粉狀之情形時,該介電體(介電體填料)之粉體特性必須首先粒徑為0.01μm~3.0μm、較佳為0.02μm~2.0μm之範圍者。關於此處所提及之粒徑,由於粉粒彼此形成某種固定之2次凝集狀態,故而由雷射繞射散射式粒度分佈測定法或BET法等之測定值推測平均粒徑般之間接測定之精度較差故而無法使用,從而係指以掃描式電子顯微鏡(SEM)直接觀察介電體(介電體填料)並對其SEM像進行圖像解析所獲得之平均粒徑。於本案說明書中將此時之粒徑表示為DIA。再者,本案說明書中使用掃描式電子顯微鏡(SEM)所觀察之介電體(介電體填料)之粉體之圖像解析,係使用旭工程(Asahi Engineering)股份有限公司製造之IP-1000PC,以圓度閾值10、重疊度20進行圓形粒子解析,求出平均粒徑DIA。 The dielectric (dielectric filler) may also be in powder form. Dielectric (dielectric filler) In the case of a powder, the powder characteristics of the dielectric (dielectric filler) must first be in the range of 0.01 μm to 3.0 μm, preferably 0.02 μm to 2.0 μm. Regarding the particle diameter mentioned here, since the powder particles form a certain fixed secondary aggregation state, the measured values of the laser diffraction scattering particle size distribution measurement method or the BET method are estimated to be the same as the average particle diameter. The measurement accuracy is inferior and cannot be used, and refers to an average particle diameter obtained by directly observing a dielectric (dielectric filler) by a scanning electron microscope (SEM) and performing image analysis on the SEM image thereof. The particle size at this time is indicated as DIA in the specification of the present invention. Further, in the present specification, image analysis of a powder of a dielectric (dielectric filler) observed by a scanning electron microscope (SEM) is performed using IP-1000 PC manufactured by Asahi Engineering Co., Ltd. The circular particle analysis was performed with a roundness threshold of 10 and an overlap degree of 20, and the average particle diameter DIA was obtained.

進一步要求其係如下之介電體粉末:藉由雷射繞射散射式粒 度分布測定法所得之體積累積粒徑D50為0.2μm~2.0μm,且,利用體積累積粒徑D50與藉由圖像解析所得之平均粒徑DIA並以D50/DIA表示之凝集度的值為4.5以下,呈近似球形之形狀,具有鈣鈦礦結構。 Further required to be a dielectric powder: by laser diffraction scattering particles The volume cumulative particle diameter D50 obtained by the degree distribution measurement method is 0.2 μm to 2.0 μm, and the value of the agglomeration degree represented by the volume cumulative particle diameter D50 and the average particle diameter DIA obtained by image analysis and expressed by D50/DIA is obtained. Below 4.5, it has an approximately spherical shape and has a perovskite structure.

所謂藉由雷射繞射散射式粒度分布測定法所得之體積累積 粒徑D50,係指使用雷射繞射散射式粒度分布測定法所得之重量累積50%時的粒徑,該體積累積粒徑D50之值越小,則在介電體(介電體填料)粉之粒徑分布中,微細粉粒所占比例越多。本發明中,要求該值為0.2μm~2.0μm。也就是說,在體積累積粒徑D50之值未達0.2μm之情況下,不論是採用了何種製造方法之介電體(介電體填料)粉,凝集之進行皆顯著,無法滿足以下所述凝集度。另一方面,在體積累積粒徑D50之值超過2.0μm之情況下,則無法用作本發明之目的即印刷配線板之內置電容器層形成用之介電體(介電體填料)。也就是說,用於形成內置電容器層之雙面覆銅積層板之介電體層通常厚度為10 μm~25μm,在此,為了均勻地分散介電體填料,2.0μm成為上限。 Volume accumulation by laser diffraction scattering particle size distribution measurement The particle diameter D50 is the particle diameter at 50% of the weight obtained by the laser diffraction scattering particle size distribution measurement method, and the smaller the value of the volume cumulative particle diameter D50 is in the dielectric body (dielectric filler) In the particle size distribution of the powder, the proportion of the fine particles is larger. In the present invention, the value is required to be 0.2 μm to 2.0 μm. In other words, when the value of the volume cumulative particle diameter D50 is less than 0.2 μm, regardless of the dielectric (dielectric filler) powder used in the production method, the agglomeration progresses remarkably, and the following cannot be satisfied. Describe the degree of agglutination. On the other hand, when the value of the volume cumulative particle diameter D50 exceeds 2.0 μm, the dielectric body (dielectric filler) for forming the built-in capacitor layer of the printed wiring board cannot be used as the object of the present invention. That is, the dielectric layer of the double-sided copper-clad laminate for forming the built-in capacitor layer has a thickness of usually 10 μm to 25 μm. Here, in order to uniformly disperse the dielectric filler, 2.0 μm becomes an upper limit.

本發明中體積累積粒徑D50之測定係將介電體(介電體填 料)粉混合分散於甲基乙基酮,將該溶液投入至雷射繞射散射式粒度分布測定裝置Micro Trac HRA 9320-X100型(日機裝股份有限公司製)之循環器而進行測定。 The volume cumulative particle diameter D50 in the present invention is determined by dielectric (dielectric filling) The powder was mixed and dispersed in methyl ethyl ketone, and the solution was placed in a circulator of a laser diffraction scattering type particle size distribution analyzer Micro Trac HRA 9320-X100 (manufactured by Nikkiso Co., Ltd.).

在此,使用所謂凝集度之概念,係根據如下理由而採用。亦 即認為,使用雷射繞射散射式粒度分布測定法所得之體積累積粒徑D50的值,並非真正地直接觀察粉粒之一個一個之直徑所得者。其原因在於,大部分構成介電體粉之粉粒並非各個粒子完全分離之所謂單分散粉,而是成為複數個粉粒凝集並集合之狀態。其原因在於,可以說雷射繞射散射式粒度分布測定法係捕捉已凝集之粉粒作為一個粒子(凝集粒子)來算出體積累積粒徑。 Here, the concept of the so-called agglutination degree is used for the following reasons. also That is, it is considered that the value of the volume cumulative particle diameter D50 obtained by the laser diffraction scattering type particle size distribution measurement is not the one obtained by directly observing the diameter of one of the particles. The reason for this is that most of the powder constituting the dielectric powder is not a so-called monodisperse powder in which the respective particles are completely separated, but is a state in which a plurality of powder particles are aggregated and aggregated. The reason for this is that the laser diffraction scattering type particle size distribution measurement system can capture the aggregated powder particles as one particle (aggregated particles) to calculate the volume cumulative particle diameter.

相對於此,藉由對於使用掃描型電子顯微鏡所觀察到之介電 體粉之觀察像進行圖像處理而得到之平均粒徑DIA,由於係直接從SEM觀察像獲得者,因此,一次粒子可確實地被捕捉,從反面來看,則完全不反映粉粒之凝集狀態之存在。 In contrast, the dielectric observed by using a scanning electron microscope The observation of the body powder is performed by image processing, and the average particle diameter DIA is obtained by directly observing the image from the SEM. Therefore, the primary particles can be reliably captured, and from the reverse side, the aggregation of the particles is not reflected at all. The existence of the state.

考慮如上情形,本案發明人等使用雷射繞射散射式粒度分布 測定法之體積累積粒徑D50、與藉由圖像解析所得到之平均粒徑DIA,獲得以D50/DIA算出之值作為凝集度。也就是說,假設在同一批銅粉中,D50與DIA之值能夠以相同精度來進行測定,若以前述理論來考慮,則可認為:使具有凝集狀態一事反映於測定值之D50的值會成為大於DIA值的值。 Considering the above situation, the inventors of the present invention use a laser diffraction scattering type particle size distribution The volume cumulative particle diameter D50 of the measurement method and the average particle diameter DIA obtained by image analysis were used to obtain a value calculated by D50/DIA as the degree of aggregation. That is to say, it is assumed that in the same batch of copper powder, the values of D50 and DIA can be measured with the same accuracy. If the above theory is considered, it can be considered that the value of D50 reflecting the agglutination state is reflected in the measured value. Become a value greater than the DIA value.

此時,若設為介電體(介電體填料)粉之粉粒的凝集狀態完 全不存在,則D50之值會無限地接近DIA之值,作為凝集度之D50/DIA之值則會接近1。在凝集度成為1之階段,可以說是完全沒有粉粒之凝集狀態的單分散粉。但是,在現實上,也有凝集度顯示未達1之值的情形。從理論上考量,在真球之情形下,並不會成為未達1之值,但是在現實上, 粉粒並非真球,因此會得到未達1之凝集度之值。 At this time, if the agglomerated state of the powder of the dielectric (dielectric filler) is completed If it does not exist, the value of D50 will be infinitely close to the value of DIA, and the value of D50/DIA as the degree of agglutination will be close to 1. In the stage where the degree of agglomeration is 1, it can be said that the monodisperse powder is completely free from the agglomerated state of the powder. However, in reality, there is also a case where the degree of agglutination shows a value that does not reach one. Theoretically, in the case of a real ball, it will not become a value of less than 1, but in reality, The powder is not a true ball, so it will give a value of less than 1 agglutination.

在本發明中,該介電體(介電體填料)粉之凝集度較佳為 4.5以下。若該凝集度超過4.5,則介電體填料之粉粒彼此之凝集位準變得過高,難以與上述樹脂組成物均勻混合。 In the present invention, the degree of agglomeration of the dielectric (dielectric filler) powder is preferably 4.5 or less. When the degree of agglomeration exceeds 4.5, the aggregation level of the particles of the dielectric filler becomes too high, and it is difficult to uniformly mix with the above resin composition.

作為介電體(介電體填料)粉之製造方法,即使採用烷氧化 物法、水熱合成法、草酸鹽法等任一種製造方法,也不可避免地會形成一定之凝集狀態,因此,會產生不滿足前述凝集度之介電體填料粉。特別是,在濕式法即水熱合成法之情形下,會有容易引起凝集狀態之形成的傾向。 在此,對於該凝集狀態之粉體,可進行分離成一粒一粒之粉粒的解粒處理,藉此使得介電體填料粉之凝集狀態成為前述凝集度之範圍。 As a method of manufacturing a dielectric (dielectric filler) powder, even if alkoxylation is employed Any one of the production methods such as the physical method, the hydrothermal synthesis method, and the oxalate method inevitably forms a certain agglomerated state, and therefore, a dielectric filler powder which does not satisfy the above-described degree of aggregation occurs. In particular, in the case of a wet method, that is, a hydrothermal synthesis method, there is a tendency that formation of agglomerated state is likely to occur. Here, the powder in the agglomerated state can be subjected to a granulation treatment of separating the particles into one particle, whereby the agglomerated state of the dielectric filler powder becomes the range of the degree of aggregation.

只要是僅以進行解粒作業為目的,則作為可行之解粒手段, 可使用高能球磨機、高速導體碰撞式氣流型粉碎機、衝擊式粉碎機、籠式磨機、介質攪拌型磨機、高水壓式粉碎裝置等各種手段。然而,為了確保介電體(介電體填料)粉與樹脂組成物之混合性及分散性,應考慮以下敘述之作為含介電體(介電體填料)之樹脂溶液的黏度減低。為了謀求含介電體(介電體填料)之樹脂溶液的黏度減低,要求設為介電體(介電體填料)之粉粒之比表面積較小而光滑者。因此,即便可進行解粒,亦不能是在解粒時會對粉粒表面造成損傷而增加其比表面積的解粒手法。 As long as it is only for the purpose of granulating, as a feasible means of granulation, Various means such as a high-energy ball mill, a high-speed conductor collision type air flow type pulverizer, an impact pulverizer, a cage mill, a medium agitation type mill, and a high-hydraulic type pulverizing apparatus can be used. However, in order to ensure the miscibility and dispersibility of the dielectric (dielectric filler) powder and the resin composition, the viscosity of the resin solution containing a dielectric (dielectric filler) described below is considered to be reduced. In order to reduce the viscosity of the resin solution containing a dielectric (dielectric filler), it is required that the specific surface area of the particles of the dielectric (dielectric filler) be small and smooth. Therefore, even if granulation can be carried out, it cannot be a granulation method which causes damage to the surface of the granules at the time of granulation and increases the specific surface area thereof.

基於此種見解,本發明人等致力研究,結果發現,二種手法 是有效的。該二種方法中共通者為:將介電體(介電體填料)之粉體之粉粒與裝置之內壁部、攪拌扇葉、粉碎介質等部分的接觸抑制至最小限度,使凝集之粉粒彼此相互碰撞,藉此可充分地進行解粒的方法。也就是說,與裝置之內壁部、攪拌扇葉、粉碎介質等部分接觸會造成損傷粉粒表面、增大表面粗糙度、使真球度惡化,因此要防止這種情形。於是,可採用如下手法:藉由引起充分之粉粒彼此之碰撞而將處於凝集狀態之粉粒解粒, 同時可藉由粉粒彼此之碰撞使粉粒表面平滑化。 Based on this insight, the inventors of the present invention have devoted themselves to research and found that two methods It is vaild. The common method of the two methods is to suppress the contact between the powder of the powder of the dielectric (dielectric filler) and the inner wall portion of the device, the stirring blade, the pulverizing medium, and the like to minimize the agglomeration. The powder particles collide with each other, whereby the method of granulation can be sufficiently performed. That is to say, contact with the inner wall portion of the apparatus, the stirring blade, the pulverizing medium, and the like may cause damage to the surface of the powder, increase the surface roughness, and deteriorate the true sphericity, so this is prevented. Thus, the following method can be employed: the particles in the agglutinated state are threshed by causing sufficient particles to collide with each other, At the same time, the surface of the powder can be smoothed by the collision of the particles with each other.

其中一種係利用噴射磨機對處於凝集狀態之介電體(介電體 填料)粉進行解粒處理。在此所謂「噴射磨機」係使用空氣之高速氣流,在該氣流中放入介電體(介電體填料)粉,在該高速氣流中使粉粒彼此相互碰撞來進行解粒作業。 One of them uses a jet mill to couple the dielectric in a cohesive state (dielectric) The filler) powder is subjected to granulation treatment. Here, the "jet mill" uses a high-speed air stream of air, and a dielectric (dielectric filler) powder is placed in the air stream, and the particles collide with each other in the high-speed air stream to perform a granulation operation.

此外,對於將處於凝集狀態之介電體(介電體填料)粉分散 於不會破壞其化學計量之溶劑中而成的漿體,使用利用離心力之流體磨機來進行解粒處理。藉由使用在此所謂「利用離心力之流體磨機」,以描繪圓周軌道之方式,以高速使該漿體流動,此時,藉由產生之離心力使凝集之粉粒彼此於溶劑中相互碰撞而進行解粒作業。對以此種方式結束解粒作業之漿體進行洗淨、過濾及乾燥,藉此獲得結束解粒作業之介電體(介電體填料)粉。藉由上述方法,可謀求凝集度之調整及介電體填料粉之粉體表面的平滑化。 In addition, powder dispersion of a dielectric (dielectric filler) to be in an agglomerated state The slurry obtained by not damaging the stoichiometric solvent is subjected to a granulation treatment using a fluid mill using centrifugal force. By using the "fluid mill using centrifugal force" as described herein, the slurry is flowed at a high speed by drawing a circular orbit. At this time, the agglomerated particles collide with each other in the solvent by the centrifugal force generated. Perform the granulation operation. The slurry which has been subjected to the granulation operation in this manner is washed, filtered, and dried to obtain a dielectric (dielectric filler) powder which is subjected to the granulation operation. According to the above method, the adjustment of the degree of aggregation and the smoothing of the surface of the powder of the dielectric filler powder can be achieved.

將以上所述之樹脂組成物與介電體(介電體填料)混合,製成印刷配線板之內置電容器層形成用之含有介電體(介電體填料)之樹脂。再者,作為用於用以與介電體(介電體填料)混合之樹脂組成物之樹脂,可列舉可用於上述樹脂層之樹脂。此時之樹脂組成物與介電體(介電體填料)之摻合比率較理想為設為介電體(介電體填料)之含有率為75wt%~85wt%且剩餘部分為樹脂組成物。 The resin composition described above is mixed with a dielectric (dielectric filler) to form a resin containing a dielectric (dielectric filler) for forming a built-in capacitor layer of a printed wiring board. Further, as the resin used for the resin composition to be mixed with the dielectric (dielectric filler), a resin which can be used for the above resin layer can be mentioned. The blending ratio of the resin composition to the dielectric (dielectric filler) at this time is preferably such that the content of the dielectric (dielectric filler) is 75 wt% to 85 wt% and the remainder is a resin composition. .

於介電體(介電體填料)之含有率未達75wt%之情形時,無法滿足市場上現在所要求之相對介電係數20,若介電體(介電體填料)之含有率超過85wt%,則樹脂組成物之含有率未達15wt%,損害含有介電體(介電體填料)之樹脂與貼合於該樹脂之銅箔之密接性,從而難以製造滿足作為印刷配線板製造用之要求特性之覆銅積層板。 When the content of the dielectric (dielectric filler) is less than 75% by weight, the relative dielectric constant 20 required by the market cannot be satisfied. If the content of the dielectric (dielectric filler) exceeds 85 wt% %, the content of the resin composition is less than 15% by weight, and the adhesion between the resin containing the dielectric (dielectric filler) and the copper foil bonded to the resin is impaired, and it is difficult to manufacture and satisfy the production as a printed wiring board. A copper clad laminate with the required characteristics.

再者,含有上述介電體(介電體填料)之樹脂層亦可使用含有介電體 (介電體填料)、環氧樹脂、活性酯樹脂、聚乙烯縮醛樹脂及硬化促進劑之樹脂組成物而形成。 Furthermore, the resin layer containing the above dielectric (dielectric filler) may also use a dielectric containing body. It is formed by a resin composition of a (dielectric filler), an epoxy resin, an active ester resin, a polyvinyl acetal resin, and a hardening accelerator.

又,含有上述介電體(介電體填料)之樹脂層亦可使用於將含有環氧樹脂、活性酯樹脂、聚乙烯縮醛樹脂、硬化促進劑之樹脂組成物重量設為100重量份時,含有25重量份~60重量份之環氧樹脂之樹脂組成物與介電體(介電體填料)而形成。 Further, the resin layer containing the dielectric (dielectric filler) may be used when the weight of the resin composition containing the epoxy resin, the active ester resin, the polyvinyl acetal resin, and the curing accelerator is 100 parts by weight. It is formed by containing a resin composition of 25 parts by weight to 60 parts by weight of an epoxy resin and a dielectric (dielectric filler).

又,含有上述介電體(介電體填料)之樹脂層亦可使用於將含有環氧樹脂、活性酯樹脂、聚乙烯縮醛樹脂、硬化促進劑之樹脂組成物重量設為100重量份時,含有28重量份~60重量份之活性酯樹脂之樹脂組成物與介電體(介電體填料)而形成。 Further, the resin layer containing the dielectric (dielectric filler) may be used when the weight of the resin composition containing the epoxy resin, the active ester resin, the polyvinyl acetal resin, and the curing accelerator is 100 parts by weight. It is formed by containing a resin composition of 28 parts by weight to 60 parts by weight of the active ester resin and a dielectric (dielectric filler).

又,含有上述介電體(介電體填料)之樹脂層亦可使用於將含有環氧樹脂、活性酯樹脂、聚乙烯縮醛樹脂、硬化促進劑之樹脂組成物重量設為100重量份時,含有合計含量為78重量份~95重量份之環氧樹脂與活性酯樹脂之樹脂組成物與介電體(介電體填料)而形成。 Further, the resin layer containing the dielectric (dielectric filler) may be used when the weight of the resin composition containing the epoxy resin, the active ester resin, the polyvinyl acetal resin, and the curing accelerator is 100 parts by weight. It is formed by containing a resin composition of a total of 78 parts by weight to 95 parts by weight of an epoxy resin and an active ester resin, and a dielectric (dielectric filler).

又,含有上述介電體(介電體填料)之樹脂層亦可使用於將含有環氧樹脂、活性酯樹脂、聚乙烯縮醛樹脂、硬化促進劑之樹脂組成物重量設為100重量份時,含有1重量份~20重量份之聚乙烯縮醛樹脂之樹脂組成物與介電體(介電體填料)而形成。 Further, the resin layer containing the dielectric (dielectric filler) may be used when the weight of the resin composition containing the epoxy resin, the active ester resin, the polyvinyl acetal resin, and the curing accelerator is 100 parts by weight. It is formed by containing a resin composition of 1 part by weight to 20 parts by weight of a polyvinyl acetal resin and a dielectric (dielectric filler).

又,含有上述介電體(介電體填料)之樹脂層亦可使用於將含有環氧樹脂、活性酯樹脂、聚乙烯縮醛樹脂、硬化促進劑之樹脂組成物重量設為100重量份時,含有0.01重量份~2重量份之硬化促進劑之樹脂組成物與介電體(介電體填料)而形成。 Further, the resin layer containing the dielectric (dielectric filler) may be used when the weight of the resin composition containing the epoxy resin, the active ester resin, the polyvinyl acetal resin, and the curing accelerator is 100 parts by weight. It is formed by containing a resin composition of 0.01 to 2 parts by weight of a hardening accelerator and a dielectric (dielectric filler).

又,含有上述介電體(介電體填料)之樹脂層亦可使用於將構成該樹脂層之樹脂組成物重量設為100重量份時,構成該樹脂組成物之環氧樹脂、活性酯樹脂、聚乙烯縮醛樹脂、硬化促進劑之各成分之合計量為70重量份 以上之樹脂組成物與介電體(介電體填料)而形成。 In addition, the resin layer containing the dielectric material (dielectric filler) may be used as an epoxy resin or an active ester resin constituting the resin composition when the weight of the resin composition constituting the resin layer is 100 parts by weight. The total amount of each component of the polyvinyl acetal resin and the hardening accelerator is 70 parts by weight. The above resin composition is formed with a dielectric (dielectric filler).

又,含有上述介電體之樹脂層較佳為於將含有該介電體(介電體填料)之樹脂重量設為100wt%時,於65wt%~85wt%之範圍含有介電體(介電體填料)。 Further, it is preferable that the resin layer containing the dielectric body contains a dielectric body in a range of 65 wt% to 85 wt% when the weight of the resin containing the dielectric (dielectric filler) is 100 wt% (dielectric Body filler).

再者,作為環氧樹脂、活性酯樹脂、聚乙烯縮醛樹脂及硬化促進劑,可使用公知之環氧樹脂、活性酯樹脂、聚乙烯縮醛樹脂及硬化促進劑或本案說明書中記載之環氧樹脂、活性酯樹脂、聚乙烯縮醛樹脂及硬化促進劑。 Further, as the epoxy resin, the active ester resin, the polyvinyl acetal resin, and the curing accelerator, a known epoxy resin, an active ester resin, a polyvinyl acetal resin, a curing accelerator, or a ring described in the present specification can be used. An oxygen resin, an active ester resin, a polyvinyl acetal resin, and a hardening accelerator.

又,含有上述介電體(介電體填料)之樹脂層,依據MIL標準中之MIL-P-13949G進行測定時之樹脂溢流量(resin flow)較佳為未達1%。 Further, the resin layer containing the dielectric body (dielectric filler) preferably has a resin flow rate of less than 1% when measured in accordance with MIL-P-13949G in the MIL standard.

再者,作為硬化促進劑、環氧樹脂,可使用公知者或本案說明書中記載之硬化促進劑、環氧樹脂。又,作為硬化促進劑,可使用公知之咪唑化合物或本案說明書中記載之咪唑化合物。 Further, as the curing accelerator or the epoxy resin, a curing accelerator or an epoxy resin described in the public or the present specification can be used. Further, as the curing accelerator, a known imidazole compound or an imidazole compound described in the specification can be used.

而且,作為該介電體(介電體填料),於現階段,若考慮作 為粉體之製造精度,則較佳為使用具有鈣鈦礦結構之複合氧化物中之鈦酸鋇。作為此時之介電體(介電體填料),可使用經預燒之鈦酸鋇或未預燒之鈦酸鋇之任一者。於欲獲得較高之介電係數之情形時較佳為使用經預燒之鈦酸鋇,只要根據印刷配線板製品之設計品質選擇使用即可。 Moreover, as the dielectric (dielectric filler), at this stage, if considering For the production precision of the powder, it is preferred to use barium titanate in the composite oxide having a perovskite structure. As the dielectric (dielectric filler) at this time, either calcined barium titanate or unsintered barium titanate can be used. In the case where a higher dielectric constant is desired, it is preferred to use the calcined barium titanate as long as it is selected according to the design quality of the printed wiring board product.

又進而,鈦酸鋇之介電體填料最佳為具有立方晶之結晶結構 者。於鈦酸鋇具有之結晶結構中存在立方晶與正方晶,但與使用僅具有正方晶之結構之鈦酸鋇之介電體(介電體填料)之情形相比,具有立方晶之結構之鈦酸鋇之介電體(介電體填料)最終所獲得之介電層之介電係數之值更為穩定化。因此,可以說必須使用至少兼有立方晶與正方晶之兩者之結晶結構的鈦酸鋇粉。 Further, the dielectric filler of barium titanate is preferably a crystal structure having a cubic crystal By. Cubic and tetragonal crystals exist in the crystal structure of barium titanate, but have a cubic crystal structure as compared with the case of using a dielectric (dielectric filler) of barium titanate having only a tetragonal structure. The value of the dielectric constant of the dielectric layer finally obtained by the dielectric material (dielectric filler) of barium titanate is more stabilized. Therefore, it can be said that it is necessary to use a barium titanate powder having at least a crystal structure of both a cubic crystal and a tetragonal crystal.

根據上述實施形態,可提供一種附載體銅箔,其提高該內層芯材之內層電路表面與含有介電體之樹脂層之密接性,且具有具備較低之介電損耗 正切之用以形成電容器電路層之含有介電體的樹脂層。 According to the above embodiment, a copper foil with a carrier can be provided which improves the adhesion between the inner circuit surface of the inner core material and the resin layer containing the dielectric, and has a low dielectric loss. A dielectric layer-containing resin layer for forming a capacitor circuit layer is formed.

又,上述樹脂層亦可為自銅箔側(即附載體銅箔之極薄銅層 側)依次形成有硬化樹脂層(所謂「硬化樹脂層」係指已硬化之樹脂層)與半硬化樹脂層之樹脂層。上述硬化樹脂層亦可由熱膨脹係數為0ppm/℃~25ppm/℃之聚醯亞胺樹脂、聚醯胺醯亞胺樹脂、該等之複合樹脂之任一種樹脂成分所構成。 Further, the resin layer may be from the side of the copper foil (ie, a very thin copper layer with a carrier copper foil) The resin layer of the hardened resin layer (the "hardened resin layer" means the hardened resin layer) and the semi-hardened resin layer are formed in this order. The hardened resin layer may be composed of a polyimine resin having a thermal expansion coefficient of 0 ppm/° C. to 25 ppm/° C., a polyamidimide resin, or a resin component of any of these composite resins.

又,亦可於上述硬化樹脂層上設置硬化後之熱膨脹係數為0 ppm/℃~50ppm/℃之半硬化樹脂層。又,上述硬化樹脂層與上述半硬化樹脂層硬化後之樹脂層整體之熱膨脹係數亦可為40ppm/℃以下。上述硬化樹脂層之玻璃轉移溫度亦可為300℃以上。又,上述半硬化樹脂層亦可為使用順丁烯二醯亞胺系樹脂形成者,上述順丁烯二醯亞胺系樹脂可為於分子內具有2個以上順丁烯二醯亞胺基之芳香族順丁烯二醯亞胺樹脂,上述順丁烯二醯亞胺系樹脂亦可為使於分子內具有2個以上順丁烯二醯亞胺基之芳香族順丁烯二醯亞胺樹脂與芳香族多胺聚合而成之聚合加成物。又,上述半硬化樹脂層亦可為於將該半硬化樹脂層設為100重量份時,含有20重量份~70重量份之順丁烯二醯亞胺系樹脂者。用以形成上述半硬化樹脂層之樹脂組成物較佳為以順丁烯二醯亞胺系樹脂、環氧樹脂、具有可交聯之官能基之線性聚合物作為必需成分。而且,作為順丁烯二醯亞胺系樹脂,亦可使用使芳香族順丁烯二醯亞胺樹脂與芳香族多胺聚合而成之聚合加成物。又,視需要亦可於半硬化樹脂層中添加與順丁烯二醯亞胺系樹脂具有反應性之氰基酯樹脂或環氧樹脂。環氧樹脂可使用公知之環氧樹脂或本案說明書中記載之環氧樹脂。 Moreover, the thermal expansion coefficient after hardening may be set to 0 on the hardened resin layer. Semi-hardened resin layer of ppm/°C~50ppm/°C. Moreover, the thermal expansion coefficient of the entire resin layer after the hardened resin layer and the semi-hardened resin layer are cured may be 40 ppm/° C. or less. The glass transition temperature of the above-mentioned cured resin layer may be 300 ° C or more. Further, the semi-cured resin layer may be formed using a maleimide-based resin, and the maleimide-based resin may have two or more maleimide groups in the molecule. The aromatic maleimide resin, and the maleimide-based resin may be an aromatic maleicene having two or more maleimide groups in the molecule. A polymeric adduct obtained by polymerizing an amine resin with an aromatic polyamine. Moreover, when the semi-hardened resin layer is 100 parts by weight, the semi-hardened resin layer may contain 20 parts by weight to 70 parts by weight of a maleimide-based resin. The resin composition for forming the above-mentioned semi-hardened resin layer is preferably an essential component of a maleimide-based resin, an epoxy resin, or a linear polymer having a crosslinkable functional group. Further, as the maleimide-based resin, a polymerized adduct obtained by polymerizing an aromatic maleimide resin and an aromatic polyamine can also be used. Further, a cyanoester resin or an epoxy resin reactive with a maleimide-based resin may be added to the semi-cured resin layer as needed. As the epoxy resin, a known epoxy resin or an epoxy resin described in the present specification can be used.

又,上述具有可交聯之官能基之線性聚合物較佳為具備羥 基、羧基等有助於環氧樹脂之硬化反應之官能基。而且,該具有可交聯之官能基之線性聚合物較佳為可溶於沸點為50℃~200℃之溫度之有機溶 劑。若具體例示此處所提及之具有官能基之線性聚合物,則有聚乙烯縮醛樹脂、苯氧樹脂、聚醚碸樹脂、聚醯胺醯亞胺樹脂等。該具有可交聯之官能基之線性聚合物較佳為於將樹脂組成物設為100重量份時,以3重量份~30重量份之摻合比率使用。於該環氧樹脂未達3重量份之情形時,有樹脂流動變大之情形。其結果為,有自製造而成之覆銅積層板之端部較多地觀察到樹脂粉之產生之情形,且有亦無法改善半硬化狀態下之樹脂層之耐吸濕性之情形。另一方面,即便超過30重量份亦有樹脂流動較小之情形,且有於製造而成之覆銅積層板之絕緣層內容易產生孔隙等缺陷之情形。 Further, the above linear polymer having a crosslinkable functional group preferably has a hydroxyl group A functional group such as a carboxyl group or a carboxyl group which contributes to the hardening reaction of the epoxy resin. Moreover, the linear polymer having a crosslinkable functional group is preferably soluble in an organic solvent having a boiling point of from 50 ° C to 200 ° C. Agent. When a linear polymer having a functional group mentioned herein is specifically exemplified, there are a polyvinyl acetal resin, a phenoxy resin, a polyether oxime resin, a polyamidoximine resin, and the like. The linear polymer having a crosslinkable functional group is preferably used in an amount of from 3 parts by weight to 30 parts by weight based on 100 parts by weight of the resin composition. When the epoxy resin is less than 3 parts by weight, the flow of the resin becomes large. As a result, the occurrence of the resin powder was observed in the end portion of the copper clad laminate which was produced, and the moisture absorption resistance of the resin layer in the semi-hardened state could not be improved. On the other hand, even if it exceeds 30 parts by weight, the resin flow may be small, and defects such as voids may easily occur in the insulating layer of the copper clad laminate produced.

作為此處所提及之順丁烯二醯亞胺系樹脂,可使用:4,4'- 二苯甲烷雙順丁烯二醯亞胺、多苯基甲烷順丁烯二醯亞胺、間伸苯基雙順丁烯二醯亞胺、雙酚A二苯醚雙順丁烯二醯亞胺、3,3'-二甲基-5,5'-二乙基-4,4'-二苯甲烷雙順丁烯二醯亞胺、4-甲基-1,3-伸苯基雙順丁烯二醯亞胺、4,4'-二苯醚雙順丁烯二醯亞胺、4,4'-二苯碸雙順丁烯二醯亞胺、1,3-雙(3-順丁烯二醯亞胺苯氧基)苯、1,3-雙(4-順丁烯二醯亞胺苯氧基)苯等。於順丁烯二醯亞胺系樹脂之含量未達20重量份之情形時,有無法獲得使硬化後之半硬化樹脂層之熱膨脹係數降低之效果之情形。另一方面,若順丁烯二醯亞胺系樹脂之含量超過70重量份,則有若半硬化樹脂層硬化則變成較脆之樹脂層之情形,有於該樹脂層容易產生龜裂之情形,且有作為印刷配線板之絕緣層之可靠性降低之情形。 As the maleimide-based resin mentioned here, 4,4'- can be used: Diphenylmethane bis-m-butylene iminoimide, polyphenylmethane maleimide, inter-phenyl bis-bis-succinimide, bisphenol A diphenyl ether, bis-butenylene Amine, 3,3'-dimethyl-5,5'-diethyl-4,4'-diphenylmethane bis-n-butylene diimide, 4-methyl-1,3-phenylene double Maleimide, 4,4'-diphenyl ether, maleimide, 4,4'-diphenyl bis-bis-butenylene, 1,3-double (3- Maleimide phenoxy)benzene, 1,3-bis(4-methyleneimide phenoxy)benzene, and the like. When the content of the maleimide-based resin is less than 20 parts by weight, the effect of lowering the thermal expansion coefficient of the semi-hardened resin layer after curing may not be obtained. On the other hand, when the content of the maleimide-based resin is more than 70 parts by weight, if the semi-hardened resin layer is cured, it becomes a brittle resin layer, and the resin layer is likely to be cracked. There is a case where the reliability of the insulating layer as a printed wiring board is lowered.

於形成使於分子內具有2個以上順丁烯二醯亞胺基之芳香 族順丁烯二醯亞胺樹脂與芳香族多胺聚合而成之聚合加成物之情形時,較佳為將作為芳香族多胺之例如間苯二胺、對苯二胺、4,4'-二胺基二環己基甲烷、1,4-二胺基環己烷、2,6-二胺基吡啶、4,4'-二胺基二苯甲烷、2,2-雙(4-胺基苯基)丙烷、4,4'-二胺基二苯醚、4,4'-二胺基-3-甲基二苯醚、4,4'-二胺基二苯硫醚、4,4'-二胺基二苯甲酮、4,4'-二胺基二苯碸、 雙(4-胺基苯基)苯胺、間茬二胺、對茬二胺、1,3-雙[4-胺基苯氧基]苯、3-甲基-4,4'-二胺基二苯甲烷、3,3'-二乙基-4,4'-二胺基二苯甲烷、3,3'-二氯-4,4'-二胺基二苯甲烷、2,2',5,5'-四氯-4,4'-二胺基二苯甲烷、2,2-雙(3-甲基-4-胺基苯基)丙烷、2,2-雙(3-乙基-4-胺基苯基)丙烷、2,2-雙(2,3-二氯-4-胺基苯基)丙烷、雙(2,3-二甲基-4-胺基苯基)苯乙烷、乙二胺及六亞甲基二胺等添加至樹脂組成物來使用而形成樹脂層。 Forming a fragrance having two or more maleimide groups in the molecule In the case of a polymerized adduct obtained by polymerizing a maleicinimide resin and an aromatic polyamine, it is preferred to use, for example, m-phenylenediamine, p-phenylenediamine, 4, 4 as an aromatic polyamine. '-Diaminodicyclohexylmethane, 1,4-diaminocyclohexane, 2,6-diaminopyridine, 4,4'-diaminodiphenylmethane, 2,2-bis(4- Aminophenyl)propane, 4,4'-diaminodiphenyl ether, 4,4'-diamino-3-methyldiphenyl ether, 4,4'-diaminodiphenyl sulfide, 4 , 4'-diaminobenzophenone, 4,4'-diaminodiphenyl hydrazine, Bis(4-aminophenyl)aniline, m-diamine, p-nonanediamine, 1,3-bis[4-aminophenoxy]benzene, 3-methyl-4,4'-diamino Diphenylmethane, 3,3'-diethyl-4,4'-diaminodiphenylmethane, 3,3'-dichloro-4,4'-diaminodiphenylmethane, 2,2', 5,5'-tetrachloro-4,4'-diaminodiphenylmethane, 2,2-bis(3-methyl-4-aminophenyl)propane, 2,2-bis(3-ethyl 4-aminophenyl)propane, 2,2-bis(2,3-dichloro-4-aminophenyl)propane, bis(2,3-dimethyl-4-aminophenyl)benzene Ethane, ethylenediamine, hexamethylenediamine or the like is added to the resin composition to form a resin layer.

而且,於必需環氧樹脂硬化劑之情形時,使用二氰二胺、咪 唑類、芳香族胺等胺類、雙酚A、溴化雙酚A等酚類、苯酚酚醛清漆樹脂及甲酚酚醛清漆樹脂等酚醛清漆類、鄰苯二甲酸酐等酸酐等。此時之環氧樹脂硬化劑相對於環氧樹脂之添加量係自各自之當量自然導出者,故而未進行特別之添加量限定。 Moreover, in the case of an epoxy resin hardener, dicyandiamide, microphone An amine such as an azole or an aromatic amine; a phenol such as bisphenol A or brominated bisphenol A; a novolac such as a phenol novolac resin or a cresol novolak resin; an acid anhydride such as phthalic anhydride or the like. In this case, the amount of the epoxy resin hardener added to the epoxy resin is naturally derived from the respective equivalents, and thus the amount of addition is not particularly limited.

又,於提供適於立體成型印刷配線板製造用途之具有樹脂層 之附載體銅箔之情形時,上述硬化樹脂層較佳為已硬化之具有可撓性之高分子聚合物層。為了能夠經得起焊料構裝步驟,上述高分子聚合物層較佳為由具有150℃以上之玻璃轉移溫度之樹脂所構成者。上述高分子聚合物層較佳為由聚醯胺樹脂、聚醚碸樹脂、聚芳醯胺(aramid)樹脂、苯氧樹脂、聚醯亞胺樹脂、聚乙烯縮醛樹脂、聚醯胺醯亞胺樹脂之任1種或2種以上之混合樹脂所構成。又,上述高分子聚合物層之厚度較佳為3μm~10μm。 又,上述高分子聚合物層較佳為含有環氧樹脂、順丁烯二醯亞胺樹脂、酚樹脂、胺酯樹脂之任1種或2種以上。又,上述半硬化樹脂層較佳為由厚度為10μm~50μm之環氧樹脂組成物所構成。 Moreover, it is provided with a resin layer suitable for the manufacture of a three-dimensionally formed printed wiring board. In the case of a carrier copper foil, the hardened resin layer is preferably a cured polymer layer having flexibility. In order to be able to withstand the solder mounting step, the above polymer layer is preferably composed of a resin having a glass transition temperature of 150 ° C or higher. The above polymer layer is preferably composed of a polyamide resin, a polyether oxime resin, an aramid resin, a phenoxy resin, a polyimine resin, a polyvinyl acetal resin, or a polyamidoxime. Any one or two or more kinds of mixed resins of an amine resin. Further, the thickness of the polymer layer is preferably from 3 μm to 10 μm. In addition, the polymer layer preferably contains one or more of an epoxy resin, a maleimide resin, a phenol resin, and an amine ester resin. Further, the semi-cured resin layer is preferably composed of an epoxy resin composition having a thickness of 10 μm to 50 μm.

又,上述環氧樹脂組成物較佳為含有以下A成分~E成分之 各成分者。 Further, the epoxy resin composition preferably contains the following components A to E. Each component.

A成分:環氧當量為200以下,且由選自室溫中為液狀之雙酚A型環 氧樹脂、雙酚F型環氧樹脂、雙酚AD型環氧樹脂之群中之1種或2種以上所構成之環氧樹脂。 Component A: an epoxy equivalent of 200 or less, and a bisphenol A ring selected from liquid at room temperature An epoxy resin composed of one or more of an oxygen resin, a bisphenol F-type epoxy resin, and a bisphenol AD-type epoxy resin.

B成分:高耐熱性環氧樹脂。 Component B: High heat resistant epoxy resin.

C成分:含磷難燃性樹脂,即含磷環氧系樹脂、膦氮烯(phosphazene)系樹脂之任1種或將該等混合而成之樹脂。 Component C: a phosphorus-containing flame retardant resin, that is, any one of a phosphorus-containing epoxy resin and a phosphazene-based resin, or a resin obtained by mixing the same.

D成分:具備可溶於沸點處於50℃~200℃之範圍之溶劑之性質且以液狀橡膠成分修飾(改質)而成之橡膠修飾(改質)聚醯胺醯亞胺樹脂。 Component D: A rubber-modified (modified) polyamidoquinone imine resin which is soluble in a solvent having a boiling point in the range of 50 ° C to 200 ° C and modified (modified) with a liquid rubber component.

E成分:樹脂硬化劑。 Component E: Resin hardener.

A成分係環氧當量為200以下,且由選自室溫中為液狀之雙 酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚AD型環氧樹脂之群中之1種或2種以上所構成之環氧樹脂。此處,選擇使用雙酚系環氧樹脂之原因在於:與下述D成分(橡膠修飾(改質)聚醯胺醯亞胺樹脂)之相容性良好,容易對半硬化狀態下之樹脂膜賦予適度之可撓性(flexibility)。而且,若環氧當量超過200,則樹脂於室溫中成為半固形,半硬化狀態下之可撓性減少故而欠佳。進而,只要為上述雙酚系環氧樹脂,則可單獨使用1種亦可混合使用2種以上。而且,於混合使用2種以上之情形時,關於其混合比並無特別之限定。 The component A has an epoxy equivalent of 200 or less and is selected from liquids selected from room temperature. An epoxy resin composed of one or more of a group of a phenol A type epoxy resin, a bisphenol F type epoxy resin, and a bisphenol AD type epoxy resin. Here, the reason why the bisphenol epoxy resin is selected is that it has good compatibility with the following component D (rubber-modified (modified) polyamidoximine resin), and it is easy to be a resin film in a semi-hardened state. Give moderate flexibility. Further, when the epoxy equivalent exceeds 200, the resin becomes semi-solid at room temperature, and the flexibility in the semi-hardened state is reduced, which is not preferable. In addition, as long as it is a bisphenol type epoxy resin, you may use it either individually or in combination of 2 or more types. In addition, when two or more types are used in combination, the mixing ratio is not particularly limited.

該環氧樹脂較佳為於將構成半硬化樹脂層之環氧樹脂組成 物設為l00重量份時,以3重量份~30重量份之摻合比率使用。於該環氧樹脂未達3重量份之情形時,未充分發揮熱硬化性,不僅未充分實現作為與內層可撓性印刷配線板之黏合劑之功能,而且未充分實現作為附樹脂銅箔之與銅箔之密接性。另一方面,若超過30重量份,則因與其他樹脂成分之平衡故製成樹脂清漆時之黏度變高,從而於製造附樹脂銅箔時,不易以均勻之厚度於銅箔表面形成樹脂膜。而且,若考慮下述D成分(橡膠修飾(改質)聚醯胺醯亞胺樹脂)之添加量,則作為硬化後之樹脂層無法獲得充 分之韌性。 The epoxy resin is preferably composed of an epoxy resin constituting a semi-hardened resin layer. When the amount is 100 parts by weight, it is used in a blending ratio of 3 parts by weight to 30 parts by weight. When the amount of the epoxy resin is less than 3 parts by weight, the thermosetting property is not sufficiently exhibited, and the function as a binder to the inner flexible printed wiring board is not sufficiently achieved, and the resin copper foil is not sufficiently realized. The adhesion to the copper foil. On the other hand, when it exceeds 30 parts by weight, the viscosity at the time of preparing a resin varnish becomes high due to the balance with other resin components, and it is difficult to form a resin film on the surface of the copper foil with a uniform thickness when producing a resin-attached copper foil. . Further, considering the addition amount of the following component D (rubber-modified (modified) polyamidoximine resin), the resin layer after curing cannot be obtained as a charge. The resilience.

B成分係所謂之玻璃轉移點Tg較高之「高耐熱性環氧樹脂」。此處所提及之「高耐熱性環氧樹脂」較佳為酚醛清漆型環氧樹脂、甲酚酚醛清漆型環氧樹脂、苯酚酚醛清漆型環氧樹脂、萘型環氧樹脂等多官能環氧樹脂。而且,該B成分較佳為於將構成半硬化樹脂層之環氧樹脂組成物設為100重量份時,於3重量份~30重量份之範圍使用。於B成分未達3重量份之情形時,有樹脂組成物之高Tg化不充分之傾向故而欠佳。另一方面,於B成分超過30重量份之情形時,硬化後之樹脂變脆,損害可撓性故而作為可撓性印刷配線板用途欠佳。B成分更佳為於10重量份~20重量份之範圍使用,藉此可穩定地兼具樹脂組成物之高Tg化與硬化後之樹脂之良好之可撓性。 The component B is a "high heat-resistant epoxy resin" in which the glass transition point Tg is high. The "high heat resistant epoxy resin" mentioned herein is preferably a polyfunctional ring such as a novolak type epoxy resin, a cresol novolak type epoxy resin, a phenol novolak type epoxy resin, or a naphthalene type epoxy resin. Oxygen resin. Further, the component B is preferably used in an amount of from 3 parts by weight to 30 parts by weight, based on 100 parts by weight of the epoxy resin composition constituting the semi-cured resin layer. When the amount of the component B is less than 3 parts by weight, the high Tg of the resin composition tends to be insufficient, which is not preferable. On the other hand, when the component B is more than 30 parts by weight, the resin after curing becomes brittle and impairs flexibility, so that it is not preferable as a flexible printed wiring board. More preferably, the component B is used in the range of 10 parts by weight to 20 parts by weight, whereby the high Tg of the resin composition and the good flexibility of the resin after curing can be stably achieved.

C成分係所謂無鹵素系之難燃性樹脂,且使用即為含磷環氧系樹脂、膦氮烯系樹脂之任1種或將該等混合而成之樹脂的含磷難燃性樹脂。首先,所謂含磷環氧系樹脂係於環氧骨架中含有磷之環氧樹脂之總稱。而且,只要為於將該環氧樹脂組成物重量設為100重量%時,可將構成半硬化樹脂層之環氧樹脂組成物之磷原子含量、即源自C成分之磷原子設為0.5重量%~3.0重量%之範圍的含磷環氧系樹脂,則任一者均可使用。然而,於上述含磷環氧系樹脂之中,若使用於分子內具備2個以上環氧基之即為9,10-二氫-9-氧雜-10-磷雜菲(phosphaphenanthrene)-10-氧化物衍生物之含磷環氧系樹脂,則半硬化狀態下之樹脂品質之穩定性優異,同時難燃性效果較高故而較佳。將9,10-二氫-9-氧雜-10-磷雜菲-10-氧化物之結構式示於下以作參考。 The component C is a halogen-free flame-retardant resin, and is a phosphorus-containing flame-retardant resin which is a resin containing one of a phosphorus-containing epoxy resin and a phosphazene-based resin or a mixture thereof. First, the phosphorus-containing epoxy resin is a general term for epoxy resins containing phosphorus in an epoxy skeleton. In addition, when the weight of the epoxy resin composition is 100% by weight, the phosphorus atom content of the epoxy resin composition constituting the semi-cured resin layer, that is, the phosphorus atom derived from the C component can be set to 0.5 weight. Any of the phosphorus-containing epoxy resins in the range of % to 3.0% by weight can be used. However, among the phosphorus-containing epoxy resins, 9,10-dihydro-9-oxa-10-phosphaphenanthrene-10 is used when two or more epoxy groups are contained in the molecule. - The phosphorus-containing epoxy resin of the oxide derivative is excellent in the stability of the resin quality in a semi-hardened state, and is preferable because the flame retardancy effect is high. The structural formula of 9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide is shown below for reference.

[化1] [Chemical 1]

進而,作為即為9,10-二氫-9-氧雜-10-磷雜菲-10- 氧化物衍生物之含磷環氧系樹脂之具體例,呈示具備化2所示之結構式之化合物。若使用具備該化2所示之結構式之化合物,則半硬化狀態下之樹脂品質之穩定性進一步優異,同時難燃性效果變高故而較佳。 Further, as 9,10-dihydro-9-oxa-10-phosphaphenanthrene-10- A specific example of the phosphorus-containing epoxy resin of the oxide derivative is a compound having a structural formula represented by Chemical Formula 2. When the compound having the structural formula shown by the chemical formula 2 is used, the stability of the resin quality in the semi-hardened state is further excellent, and the flame retardancy effect is improved, which is preferable.

又,作為C成分之含磷環氧系樹脂,亦較佳為具備以下所示之化3所示之結構式之化合物。與化2所示之含磷環氧系樹脂相同,半硬化狀態下之樹脂品質之穩定性優異,同時可賦予較高之難燃性故而較佳。 Further, the phosphorus-containing epoxy resin as the component C is preferably a compound having the structural formula shown by the following formula 3. In the same manner as the phosphorus-containing epoxy resin represented by Chemical Formula 2, the stability of the resin in the semi-hardened state is excellent, and it is preferable to impart high flame retardancy.

[化3] [Chemical 3]

進而,作為C成分之含磷環氧系樹脂,亦較佳為具備以下所示之化4所示之結構式之化合物。與化2及化3所示之含磷環氧系樹脂相同,半硬化狀態下之樹脂品質之穩定性優異,同時可賦予較高之難燃性 故而較佳。 Further, the phosphorus-containing epoxy resin as the component C is preferably a compound having the structural formula shown by the following formula 4. Similar to the phosphorus-containing epoxy resin represented by Chemicals 2 and 3, the resin quality in the semi-hardened state is excellent in stability and imparts high flame retardancy. Therefore, it is better.

以來自該9,10-二氫-9-氧雜-10-磷雜菲-10-氧化物之衍生物之形式所獲得之環氧樹脂可舉出如下者:於使萘醌或對苯二酚與 9,10-二氫-9-氧雜-10-磷雜菲-10-氧化物反應並製成以下之化5(HCA-NQ)或化6(HCA-HQ)所示之化合物後,使環氧樹脂與其OH基之部分反應而製成含磷難燃性樹脂。 The epoxy resin obtained in the form of a derivative derived from the 9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide may be exemplified by the following: naphthoquinone or p-phenylene Phenol and After reacting 9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide to give a compound represented by the following 5 (HCA-NQ) or 6 (HCA-HQ), the ring is made The oxygen resin reacts with a portion of its OH group to form a phosphorus-containing flame retardant resin.

此處,使用含磷環氧系樹脂作為含磷難燃性樹脂之情形時之樹脂組成物可單獨使用1種含磷環氧系樹脂,亦可混合使用2種以上含磷環氧系樹脂。然而,較佳為考慮作為C成分之含磷難燃性樹脂之總量,以於將構成半硬化樹脂層之環氧樹脂組成物重量設為100重量%時,使源自C 成分之磷原子成為0.5重量%~3.0重量%之範圍之方式規定添加量。含磷環氧系樹脂根據其種類而於環氧骨架內含有之磷原子量不同。因此,可優先於C成分之添加量而如上所述設計磷原子之含量。 Here, when the phosphorus-containing epoxy resin is used as the phosphorus-containing flame-retardant resin, one type of phosphorus-containing epoxy resin may be used alone, or two or more types of phosphorus-containing epoxy resin may be used in combination. However, it is preferable to consider the total amount of the phosphorus-containing flame retardant resin as the component C, so that the weight of the epoxy resin composition constituting the semi-hardened resin layer is 100% by weight, and it is derived from C. The amount of addition is defined in such a manner that the phosphorus atom of the component is in the range of 0.5% by weight to 3.0% by weight. The phosphorus-containing epoxy resin differs in the amount of phosphorus atoms contained in the epoxy skeleton depending on the type thereof. Therefore, the content of the phosphorus atom can be designed as described above in preference to the addition amount of the component C.

繼而,對使用膦氮烯系樹脂作為含磷難燃性樹脂之情形進行說明。膦氮烯系樹脂係含有以磷及氮為構成元素且具有雙鍵之膦氮烯的樹脂。膦氮烯系樹脂可藉由分子中之氮與磷之協同效果,而使難燃性能飛躍性地提高。又,與9,10-二氫-9-氧雜-10-磷雜菲-10-氧化物衍生物不同,於樹脂中穩定地存在,且可獲得防止遷移(migration)之產生之效果。 Next, a case where a phosphazene-based resin is used as the phosphorus-containing flame retardant resin will be described. The phosphazene-based resin is a resin containing a phosphazene having a double bond as a constituent element of phosphorus and nitrogen. The phosphazene-based resin can greatly improve the flame retardancy performance by the synergistic effect of nitrogen and phosphorus in the molecule. Further, unlike the 9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide derivative, it is stably present in the resin, and an effect of preventing migration can be obtained.

又,使用膦氮烯系樹脂作為含磷難燃性樹脂之情形時之樹脂組成物可單獨使用1種膦氮烯系樹脂,亦可混合使用2種以上膦氮烯系樹脂。然而,較佳為考慮作為C成分之含磷難燃性樹脂之總量,以於將構成半硬化樹脂層之膦氮烯系樹脂組成物重量設為100重量%時,使源自C成分之磷原子成為0.5重量%~3.0重量%之範圍之方式規定添加量。此種情況於混合使用含磷環氧系樹脂與膦氮烯系樹脂作為C成分之情形時亦相同。 In the case of using a phosphazene-based resin as the phosphorus-containing flame-retardant resin, one type of phosphazene-based resin may be used alone, or two or more kinds of phosphazene-based resins may be used in combination. However, it is preferable to consider the total amount of the phosphorus-containing flame-retardant resin as the component C, and to obtain the component derived from the component C when the weight of the phosphazene-based resin composition constituting the semi-hardened resin layer is 100% by weight. The amount of addition is defined in such a manner that the phosphorus atom is in the range of 0.5% by weight to 3.0% by weight. In this case, the same applies to the case where a phosphorus-containing epoxy resin and a phosphazene-based resin are used in combination as the component C.

而且,作為C成分之含磷難燃性樹脂只要使用含磷環氧系樹脂、膦氮烯系樹脂之任一種或將該等混合而成者即可。於單獨使用含磷環氧系樹脂作為含磷難燃性樹脂之情形時,含磷環氧系樹脂較佳為於將構成半硬化樹脂層之環氧樹脂組成物設為100重量份時,於5重量份~50重量份之範圍使用。於由含磷環氧系樹脂所構成之C成分未達5重量份之情形時,若考慮其他樹脂成分之摻合比率,則源自C成分之磷原子不足,難以獲得難燃性。另一方面,即便由含磷環氧系樹脂所構成之C成分超過50重量份,難燃性提高效果亦飽和,同時硬化後之樹脂層變脆故而欠佳。 In addition, any of the phosphorus-containing epoxy resin and the phosphazene-based resin may be used as the C-containing phosphorus-containing flame retardant resin, or may be mixed. When the phosphorus-containing epoxy resin is used alone as the phosphorus-containing flame retardant resin, the phosphorus-containing epoxy resin is preferably used when the epoxy resin composition constituting the semi-cured resin layer is 100 parts by weight. It is used in the range of 5 parts by weight to 50 parts by weight. When the C component composed of the phosphorus-containing epoxy resin is less than 5 parts by weight, considering the blending ratio of the other resin components, the phosphorus atom derived from the C component is insufficient, and it is difficult to obtain flame retardancy. On the other hand, even if the C component composed of the phosphorus-containing epoxy resin exceeds 50 parts by weight, the flame retardancy improving effect is saturated, and the resin layer after curing becomes brittle and is not preferable.

又,於單獨使用膦氮烯系樹脂作為含磷難燃性樹脂之情形時,膦氮烯系樹脂較佳為於將構成半硬化樹脂層之環氧樹脂組成物設為100重量份時,於2重量份~18重量份之範圍使用。於由膦氮烯系樹脂所構成 之C成分未達2重量份之情形時,若考慮其他樹脂成分之摻合比率,則源自C成分之磷原子不足,難以獲得難燃性。另一方面,若由膦氮烯系樹脂所構成之C成分超過18重量份,則有樹脂組成物之玻璃轉移點Tg、焊料耐熱性、剝離強度不充分之傾向故而欠佳。 In the case where the phosphazene-based resin is used alone as the phosphorus-containing flame-retardant resin, the phosphazene-based resin is preferably used in an amount of 100 parts by weight based on the epoxy resin composition constituting the semi-cured resin layer. It is used in the range of 2 parts by weight to 18 parts by weight. Made of phosphazene-based resin When the C component is less than 2 parts by weight, considering the blending ratio of other resin components, the phosphorus atom derived from the C component is insufficient, and it is difficult to obtain flame retardancy. On the other hand, when the C component composed of the phosphazene-based resin is more than 18 parts by weight, the glass transition point Tg of the resin composition, solder heat resistance, and peel strength tend to be insufficient, which is not preferable.

所謂上述之硬化樹脂之「高Tg化」與「可撓性」通常為呈 反比例之特性。此時,含磷難燃性樹脂存在有助於硬化後之樹脂之可撓性之提高者、有助於高Tg化者。因此,與其使用一種含磷難燃性環氧樹脂,不如平衡良好地摻合「有助於高Tg化之含磷難燃性環氧樹脂」與「有助於可撓性之提高之含磷難燃性環氧樹脂」來使用,藉此可製成適於可撓性印刷配線板用途之樹脂組成。 The "high Tg" and "flexibility" of the above-mentioned hardened resin are usually Anti-proportional characteristics. In this case, the phosphorus-containing flame-retardant resin has an improvement in flexibility of the resin which contributes to hardening, and contributes to high Tg. Therefore, instead of using a phosphorus-containing flame retardant epoxy resin, it is better to blend well with the "phosphorus-containing flame retardant epoxy resin which contributes to high Tg" and "phosphorus which contributes to the improvement of flexibility". The use of a flame retardant epoxy resin can be used to form a resin composition suitable for use in a flexible printed wiring board.

D成分係可溶於沸點處於50℃~200℃之範圍之溶劑且以液 狀橡膠成分修飾(改質)而成之橡膠修飾(改質)聚醯胺醯亞胺樹脂。該橡膠修飾(改質)聚醯胺醯亞胺樹脂係使聚醯胺醯亞胺樹脂與橡膠性樹脂反應所獲得者。此處所提及之使聚醯胺醯亞胺樹脂與橡膠性樹脂反應而使用之情況,係以提高聚醯胺醯亞胺樹脂其本身之柔軟性之目的而進行。即,使聚醯胺醯亞胺樹脂與橡膠性樹脂反應,將聚醯胺醯亞胺樹脂之酸成分(環己烷二羧酸等)之一部分取代為橡膠成分。作為橡膠成分,包含天然橡膠及合成橡膠,作為後者之合成橡膠有苯乙烯-丁二烯橡膠、丁二烯橡膠、丁基橡膠、乙烯-丙烯橡膠等。進而,就確保耐熱性之觀點而言,亦為有用的是選擇使用腈橡膠、氯丁二烯橡膠、矽橡膠、胺酯橡膠等具備耐熱性之合成橡膠。關於該等橡膠性樹脂,為了與聚醯胺醯亞胺樹脂反應而製造共聚物,較理想為於兩末端具備各種官能基者。尤其有用的是使用具有羧基之CTBN(羧基末端丁二烯腈)。再者,上述橡膠成分可僅使1種共聚合,亦可使2種以上共聚合。進而,於使用橡膠成分之情形時,就該可撓性之穩定化之觀點而言較佳為使用該橡膠成分之數量平均分子量為1000以上 者。 The D component is soluble in a solvent having a boiling point in the range of 50 ° C to 200 ° C and is in the form of a liquid. A rubber modified (modified) polyamidoquinone imine resin modified (modified). The rubber modified (modified) polyamidoximine resin is obtained by reacting a polyamide amine imide resin with a rubber resin. The use of the polyamidoximine resin and the rubber resin as mentioned herein is carried out for the purpose of improving the flexibility of the polyamidoximine resin itself. In other words, the polyamidoximine resin is reacted with a rubber resin, and one of the acid components (such as cyclohexanedicarboxylic acid) of the polyamidoximine resin is partially substituted with a rubber component. The rubber component contains natural rubber and synthetic rubber, and the latter synthetic rubbers include styrene-butadiene rubber, butadiene rubber, butyl rubber, and ethylene-propylene rubber. Further, from the viewpoint of ensuring heat resistance, it is also useful to use a heat-resistant synthetic rubber such as a nitrile rubber, a chloroprene rubber, a ruthenium rubber or an amine ester rubber. In order to produce a copolymer by reacting with a polyamidoximine resin, it is preferable that these rubber-based resins have various functional groups at both ends. It is especially useful to use CTBN (carboxy terminal butadiene nitrile) having a carboxyl group. Further, the rubber component may be copolymerized in only one type or may be copolymerized in two or more types. Further, in the case of using a rubber component, it is preferred that the rubber component has a number average molecular weight of 1,000 or more from the viewpoint of stabilization of flexibility. By.

於使橡膠修飾(改質)聚醯胺醯亞胺樹脂聚合時,作為用於 聚醯胺醯亞胺樹脂與橡膠性樹脂之溶解的溶劑,較佳為混合使用1種或2種以上之二甲基甲醯胺、二甲基乙醯胺、N-甲基-2-吡咯啶酮、二甲基亞碸、硝基甲烷、硝基乙烷、四氫呋喃、環己酮、甲基乙基酮、乙腈、γ-丁內酯等。而且,為了使聚合反應發生,較佳為採用80℃~200℃之範圍之聚合溫度。於將沸點超過200℃之溶劑用在該等之聚合之情形時,較佳為其後根據用途將溶劑置換成沸點處於50℃~200℃之範圍之溶劑。 When used to polymerize a rubber modified (modified) polyamidoximine resin, The solvent in which the polyamidoximine resin and the rubber resin are dissolved is preferably one or more kinds of dimethylformamide, dimethylacetamide, and N-methyl-2-pyrrole. Pyridone, dimethyl hydrazine, nitromethane, nitroethane, tetrahydrofuran, cyclohexanone, methyl ethyl ketone, acetonitrile, γ-butyrolactone and the like. Further, in order to cause a polymerization reaction to occur, a polymerization temperature in the range of 80 ° C to 200 ° C is preferably employed. When a solvent having a boiling point of more than 200 ° C is used in the polymerization, it is preferred to replace the solvent with a solvent having a boiling point in the range of 50 ° C to 200 ° C depending on the application.

此處,所謂上述沸點處於50℃~200℃之範圍之溶劑,可列 舉:選自甲基乙基酮、二甲基乙醯胺、二甲基甲醯胺等之群中之1種之單獨溶劑或2種以上之混合溶劑。於沸點未達50℃之情形時,因加熱所引起之溶劑之氣散明顯,於自樹脂清漆之狀態製成半硬化樹脂之情形時,難以獲得良好之半硬化狀態。另一方面,於沸點超過200℃之情形時,於自樹脂清漆之狀態製成半硬化樹脂之情形時,容易發生起泡,故而難以獲得良好之半硬化樹脂膜。 Here, the solvent having the above boiling point in the range of 50 ° C to 200 ° C can be listed. A single solvent selected from the group consisting of methyl ethyl ketone, dimethyl acetamide, and dimethylformamide, or a mixed solvent of two or more kinds. When the boiling point is less than 50 ° C, the gas dispersion due to heating is remarkable, and in the case where a semi-hardened resin is produced from the state of the resin varnish, it is difficult to obtain a good semi-hardened state. On the other hand, when the boiling point exceeds 200 ° C, when a semi-hardened resin is produced from the state of the resin varnish, foaming easily occurs, so that it is difficult to obtain a good semi-cured resin film.

於環氧樹脂組成物中使用之橡膠修飾(改質)聚醯胺醯亞胺 樹脂中,較佳為於將橡膠修飾(改質)聚醯胺醯亞胺樹脂之重量設為100重量%時,橡膠成分之共聚合量為0.8重量%以上。於該共聚合量未達0.8重量%之情形時,即便製成橡膠修飾(改質)聚醯胺醯亞胺樹脂,亦缺乏本案發明中所提及之使利用環氧樹脂組成物形成之樹脂層硬化時之可撓性,與銅箔之密接性亦降低故而欠佳。再者,更佳為,該橡膠成分之共聚合量為3重量%以上,進而較佳為5重量%以上。根據經驗,即便超過40重量%地提高橡膠成分之添加量,亦無特別之問題。然而,該硬化後之樹脂層之可撓性之提高效果飽和故而造成資源之浪費從而欠佳。 Rubber modified (modified) polyamidoximine used in epoxy resin composition In the resin, when the weight of the rubber modified (modified) polyamidoximine resin is 100% by weight, the copolymerization amount of the rubber component is preferably 0.8% by weight or more. When the copolymerization amount is less than 0.8% by weight, even if a rubber modified (modified) polyamidoximine resin is prepared, the resin formed by using the epoxy resin composition mentioned in the invention is lacking. The flexibility at the time of layer hardening and the adhesion to the copper foil are also lowered, which is not preferable. Further, more preferably, the amount of copolymerization of the rubber component is 3% by weight or more, and more preferably 5% by weight or more. According to experience, there is no particular problem even if the amount of the rubber component added is increased by more than 40% by weight. However, the effect of improving the flexibility of the hardened resin layer is saturated, resulting in waste of resources and thus being poor.

對以上所述之橡膠修飾(改質)聚醯胺醯亞胺樹脂要求有可 溶於溶劑之性質。其原因在於:若不可溶於溶劑,則難以製備成樹脂清漆。該橡膠修飾(改質)聚醯胺醯亞胺樹脂較佳為於將樹脂組成物之重量設為100重量份時,以10重量份~40重量份之摻合比率使用。於橡膠修飾(改質)聚醯胺醯亞胺樹脂未達10重量份之情形時,無法提高硬化後之樹脂層之可撓性且變脆,從而容易於樹脂層產生微裂。另一方面,即便超過40重量份地添加橡膠修飾(改質)聚醯胺醯亞胺樹脂亦無特別妨礙,但硬化後之樹脂層之可撓性不會進一步提高,不會實現硬化後之樹脂之高Tg化。因此,若考慮經濟性則可以說40重量份為上限值。 The above-mentioned rubber modified (modified) polyamidoximine resin is required Soluble in the nature of the solvent. The reason for this is that it is difficult to prepare a resin varnish if it is insoluble in a solvent. The rubber modified (modified) polyamidoximine resin is preferably used in a blending ratio of 10 parts by weight to 40 parts by weight when the weight of the resin composition is 100 parts by weight. When the rubber modified (modified) polyamidoximine resin is less than 10 parts by weight, the flexibility and embrittlement of the resin layer after hardening cannot be improved, and the resin layer is likely to be slightly cracked. On the other hand, even if more than 40 parts by weight of the rubber-modified (modified) polyamidoximine resin is added, there is no particular hindrance, but the flexibility of the resin layer after curing is not further improved, and the hardening is not achieved. High Tg of the resin. Therefore, if economic efficiency is considered, it can be said that 40 parts by weight is the upper limit.

關於E成分之樹脂硬化劑進行敍述。此處所提及之樹脂硬化劑較佳為使用聯苯型酚樹脂、苯酚芳烷基型酚樹脂之1種或2種以上。該樹脂硬化劑之添加量係由對要硬化之樹脂之反應當量自然導出者,並不需要特別之量之限定。然而,於用於本案發明之環氧樹脂組成物之情形時,較佳為於將該環氧樹脂組成物設為100重量份時,於20重量份~35重量份之範圍使用E成分。於該E成分未達20重量份之情形時,若考慮上述樹脂組成,則無法獲得充分之硬化狀態,作為硬化後之樹脂無法獲得可撓性。另一方面,於E成分超過35重量份之情形時,有硬化後之樹脂層之耐吸濕特性劣化之傾向,從而欠佳。 The resin hardener of the E component will be described. The resin curing agent mentioned above is preferably one or more selected from the group consisting of a biphenyl type phenol resin and a phenol aralkyl type phenol resin. The amount of the resin hardener added is naturally derived from the reaction equivalent of the resin to be hardened, and does not require a particular amount. However, in the case of the epoxy resin composition of the present invention, it is preferred to use the E component in the range of 20 parts by weight to 35 parts by weight when the epoxy resin composition is 100 parts by weight. When the amount of the component E is less than 20 parts by weight, in consideration of the above resin composition, a sufficiently hardened state cannot be obtained, and flexibility cannot be obtained as a resin after curing. On the other hand, when the E component exceeds 35 parts by weight, the moisture absorption resistance of the resin layer after curing tends to be deteriorated, which is not preferable.

對以上所示之樹脂組成物添加溶劑而用作樹脂清漆使用,形成熱硬化性樹脂層作為印刷配線板之接著層。該樹脂清漆之特徵在於:對上述樹脂組成物添加溶劑,製備成樹脂固形物成分量為30wt%~70wt%之範圍,且可形成依據MIL標準中之MIL-P-13949G進行測定時之樹脂溢流量處於5%~35%之範圍的半硬化樹脂膜。作為此處所提及之溶劑,較佳為使用沸點為50℃~200℃之範圍且選自甲基乙基酮、二甲基乙醯胺、二甲基甲醯胺等之群中之1種之單獨溶劑或2種以上之混合溶劑。此係為了獲得如上所述良好之半硬化樹脂膜。而且,此處所示之樹脂固形物成分量之 範圍係於塗佈於銅箔之表面時,可將膜厚控制為精度最佳者之範圍。於樹脂固形物成分未達30wt%之情形時,黏度過低,於剛塗佈於銅箔表面後會流動而難以確保膜厚均勻性。相對於此,若樹脂固形物成分超過70wt%,則黏度變高,難以於銅箔表面形成薄膜。再者,於樹脂溢流量未達5%之情形時,於處於內層芯材之表面的內層電路之凹凸部等會發生空氣之咬入等故而欠佳。另一方面,於該樹脂溢流量超過35%之情形時,樹脂溢流量變得過大,使用具有樹脂層之附載體銅箔之樹脂層而形成之絕緣層之厚度變得不均勻。 A solvent is added to the resin composition shown above and used as a resin varnish to form a thermosetting resin layer as an adhesive layer of a printed wiring board. The resin varnish is characterized in that a solvent is added to the resin composition to prepare a resin solid content of 30% by weight to 70% by weight, and a resin overflow can be formed according to MIL-P-13949G in the MIL standard. A semi-hardened resin film having a flow rate of 5% to 35%. As the solvent mentioned herein, it is preferred to use a group having a boiling point of from 50 ° C to 200 ° C and selected from the group consisting of methyl ethyl ketone, dimethyl acetamide, dimethylformamide, and the like. A single solvent or a mixture of two or more kinds. This is to obtain a good semi-hardened resin film as described above. Moreover, the amount of the resin solid component shown here When the surface is applied to the surface of the copper foil, the film thickness can be controlled to the range of the best accuracy. When the resin solid content is less than 30% by weight, the viscosity is too low, and it flows immediately after application to the surface of the copper foil, and it is difficult to ensure uniformity of film thickness. On the other hand, when the resin solid content exceeds 70% by weight, the viscosity becomes high, and it is difficult to form a film on the surface of the copper foil. In addition, when the resin overflow rate is less than 5%, air is trapped in the uneven portion of the inner layer circuit on the surface of the inner layer core material, and the like. On the other hand, when the resin overflow rate exceeds 35%, the resin overflow rate becomes excessively large, and the thickness of the insulating layer formed using the resin layer of the carrier-attached copper foil having the resin layer becomes uneven.

於將上述硬化樹脂層及半硬化樹脂層設於附載體銅箔之情形時,可提供適於立體成型印刷配線板製造用途之具有樹脂層之附載體銅箔。 When the hardened resin layer and the semi-hardened resin layer are provided on the carrier-attached copper foil, a copper foil with a carrier having a resin layer suitable for the production of a three-dimensionally formed printed wiring board can be provided.

又,上述樹脂層較佳為於上述半硬化絕緣層之單面具備可剝落之保護膜。作為上述保護膜可使用公知之絕緣膜或樹脂膜。例如,可將聚對苯二甲酸乙二酯膜、聚萘二甲酸乙二酯膜、金屬箔等用於上述保護膜。 Further, it is preferable that the resin layer has a peelable protective film on one surface of the semi-hardened insulating layer. As the protective film, a known insulating film or resin film can be used. For example, a polyethylene terephthalate film, a polyethylene naphthalate film, a metal foil, or the like can be used for the above protective film.

再者,上述樹脂層亦可含有硬化劑及/或硬化促進劑。 Further, the resin layer may contain a curing agent and/or a curing accelerator.

上述樹脂層亦可為由依據MIL標準中之MIL-P-13949G進行測定時之樹脂溢流量為5%以內之樹脂組成物所形成之樹脂層。 The resin layer may be a resin layer formed of a resin composition having a resin overflow rate of 5% in accordance with MIL-P-13949G in the MIL standard.

上述樹脂層亦可為使用由5重量份~50重量份之環氧樹脂(含硬化劑)、50重量份~95重量份之可溶於溶劑之聚醚碸、及視需要適量添加之硬化促進劑所構成之樹脂組成物而構成者。 The resin layer may also be used in an amount of from 5 parts by weight to 50 parts by weight of the epoxy resin (containing a curing agent), 50 parts by weight to 95 parts by weight of the solvent-soluble polyether oxime, and, if necessary, an appropriate amount of hardening promotion. The resin composition composed of the agent is composed of a resin composition.

又,上述樹脂層亦可為由以下述含量(其中,以排除環氧樹脂硬化劑並將樹脂組成物設為100重量份時之重量份記載)之範圍含有以下所示之成分A~成分D的樹脂組成物所形成者。 In addition, the resin layer may contain the component A to the component D shown below in the range of the following content (in the case where the epoxy resin curing agent is excluded and the resin composition is 100 parts by weight) The composition of the resin composition.

成分A:於25℃之拉伸強度為200MPa以上之聚醯胺醯亞胺樹脂10重量份~20重量份 Component A: 10 parts by weight to 20 parts by weight of a polyamidoximine resin having a tensile strength of 200 MPa or more at 25 ° C

成分B:於25℃之拉伸強度為100MPa以下之聚醯胺醯亞胺樹脂20重 量份~40重量份 Component B: 20 weight of polyamidoximine resin having a tensile strength of 100 MPa or less at 25 ° C Measured to 40 parts by weight

成分C:環氧樹脂 Composition C: Epoxy

成分D:環氧樹脂硬化劑 Ingredient D: Epoxy resin hardener

上述樹脂層亦可為半硬化樹脂層。 The above resin layer may also be a semi-hardened resin layer.

上述成分A係於25℃之拉伸強度為200MPa以上之聚醯胺醯亞胺樹脂。此處所提及之「拉伸強度為200MPa以上之聚醯胺醯亞胺樹脂」,例如係藉由將1,2,4-苯三甲酸酐、二苯甲酮四羧酸酐及聯甲伸苯基二異氰酸酯(bitolylene diisocyanate)於N-甲基-2-吡咯啶酮或/及N,N-二甲基乙醯胺等溶劑中進行加熱所獲得之樹脂等。此處,雖未記載上限值,但若考慮聚醯胺醯亞胺樹脂之拉伸強度,則該聚醯胺醯亞胺樹脂之拉伸強度之上限為500MPa左右。再者,本案發明中之成分A及成分B之聚醯胺醯亞胺樹脂之拉伸強度係由聚醯胺醯亞胺樹脂溶液使用JIS K7113中規定之膜狀之2號試驗片(全長115mm,夾頭間距離80±5mm,平行部長度33±2mm,平行部寬度6±0.4mm,膜厚1~3mm),並以拉伸試驗機進行測定所得之值。 The component A is a polyamidoximine resin having a tensile strength of 200 MPa or more at 25 °C. The "polyamido quinone imine resin having a tensile strength of 200 MPa or more" as referred to herein, for example, by using 1,2,4-benzenetricarboxylic anhydride, benzophenone tetracarboxylic anhydride, and phenylene A resin obtained by heating a bitylylene diisocyanate in a solvent such as N-methyl-2-pyrrolidone or /N,N-dimethylacetamide. Here, although the upper limit is not described, the upper limit of the tensile strength of the polyamidoximine resin is about 500 MPa in consideration of the tensile strength of the polyamidoximine resin. Further, the tensile strength of the polyamidoximine resin of the component A and the component B in the present invention is a film-like No. 2 test piece (full length 115 mm) prescribed in JIS K7113 from a polyamidoximine resin solution. The distance between the chucks was 80 ± 5 mm, the length of the parallel portion was 33 ± 2 mm, the width of the parallel portion was 6 ± 0.4 mm, and the film thickness was 1 to 3 mm), and the value was measured by a tensile tester.

上述成分B係於25℃之拉伸強度為100 MPa以下之聚醯胺醯亞胺樹脂。此處所提及之「拉伸強度為100MPa以下之聚醯胺醯亞胺樹脂」,例如係藉由將1,2,4-苯三甲酸酐、二苯甲烷二異氰酸酯及羧基末端丙烯腈-丁二烯橡膠於N-甲基-2-吡咯啶酮或/及N,N-二甲基乙醯胺等溶劑中進行加熱所獲得者。 The component B is a polyamidoximine resin having a tensile strength of 100 MPa or less at 25 °C. The "polyamidoximine resin having a tensile strength of 100 MPa or less" as referred to herein, for example, by using 1,2,4-benzenetricarboxylic anhydride, diphenylmethane diisocyanate, and carboxyl terminal acrylonitrile-butyl The diene rubber is obtained by heating in a solvent such as N-methyl-2-pyrrolidone or / and N,N-dimethylacetamide.

於將樹脂組成物設為100重量份時,上述成分C(環氧樹脂)之含量亦可為40重量份~70重量份。再者,作為環氧樹脂,可使用上述環氧樹脂。上述成分D(環氧樹脂硬化劑)之含量較佳為使樹脂組成物含有環氧樹脂之可硬化之程度之咪唑化合物者。上述半硬化樹脂層較佳為由上述樹脂組成物形成之揮發成分未達1wt%之半硬化狀態之樹脂層。於滿足上述含量之 情形時,即便以捲筒狀保管或輸送具有樹脂層之附載體銅箔,亦不會自具有樹脂層之附載體銅箔之樹脂層向附載體銅箔轉印有機溶劑,而且可獲得具備耐熱性、與附載體銅箔之接著性之各特性優異之樹脂層的附載體銅箔。 When the resin composition is 100 parts by weight, the content of the component C (epoxy resin) may be 40 parts by weight to 70 parts by weight. Further, as the epoxy resin, the above epoxy resin can be used. The content of the component D (epoxy resin hardener) is preferably an imidazole compound in which the resin composition contains a hardenable epoxy resin. The semi-hardened resin layer is preferably a resin layer in a semi-hardened state in which the volatile component formed by the above resin composition is less than 1% by weight. To meet the above content In this case, even if the carrier-attached copper foil having the resin layer is stored or conveyed in a roll shape, the organic solvent is not transferred from the resin layer of the carrier-attached copper foil having the resin layer to the copper foil with the carrier, and heat resistance can be obtained. A carrier-attached copper foil of a resin layer excellent in properties and adhesion to a copper foil with a carrier.

此處,咪唑化合物可使用公知者,例如可列舉:2-十一基 咪唑、2-十七基咪唑、2-乙基-4-甲基咪唑、2-苯基-4-甲基咪唑、1-氰乙基-2-十一基咪唑、1-氰乙基-2-乙基-4-甲基咪唑、1-氰乙基-2-苯基咪唑、2-苯基-4,5-二羥基甲基咪唑、2-苯基-4-甲基-5-羥基甲基咪唑等,可將該等單獨或混合使用。 Here, as the imidazole compound, a known one can be used, and for example, 2-nine group can be cited. Imidazole, 2-heptadecylimidazole, 2-ethyl-4-methylimidazole, 2-phenyl-4-methylimidazole, 1-cyanoethyl-2-undecylimidazole, 1-cyanoethyl- 2-ethyl-4-methylimidazole, 1-cyanoethyl-2-phenylimidazole, 2-phenyl-4,5-dihydroxymethylimidazole, 2-phenyl-4-methyl-5- Hydroxymethylimidazole or the like can be used singly or in combination.

再者,應添加之硬化劑之量係根據環氧樹脂之量、步驟中要 求之硬化速度等而必然決定者。若特意記載作為硬化劑之咪唑化合物之添加量,則於將樹脂組成物設為100重量份時(其中,於該情形時,以將成分A~成分D全部之樹脂組成物設為100重量份時之重量份記載),於該樹脂組成物中於0.01重量份~2重量份之範圍摻合使用。而且,咪唑化合物之摻合量更佳為0.02重量份~1.5重量份,進而較佳為0.03重量份~1.0重量份。於該咪唑化合物之摻合量未達0.01重量份之情形時,若考慮上述環氧樹脂之含量則有硬化不充分之情形,且貼合具有樹脂層之附載體銅箔之樹脂層彼此時之接著強度降低。另一方面,於咪唑化合物之摻合量超過2重量份之情形時,有如下情形:環氧樹脂之硬化反應變快,硬化後之樹脂層變脆,硬化樹脂膜之強度、貼合附樹脂銅箔之樹脂層彼此時之接著性降低。 Furthermore, the amount of hardener to be added is based on the amount of epoxy resin, It is inevitable to determine the hardening speed and so on. When the amount of the imidazole compound to be used as the curing agent is specifically described, when the resin composition is 100 parts by weight (in this case, the resin composition of all the components A to D is 100 parts by weight). In the case of the weight component, it is blended in the range of 0.01 part by weight to 2 parts by weight in the resin composition. Further, the blending amount of the imidazole compound is more preferably 0.02 part by weight to 1.5 parts by weight, still more preferably 0.03 part by weight to 1.0 part by weight. When the blending amount of the imidazole compound is less than 0.01 part by weight, if the content of the epoxy resin is considered, the curing may be insufficient, and the resin layers of the copper foil with a carrier layer having the resin layer may be bonded to each other. Then the intensity is reduced. On the other hand, when the blending amount of the imidazole compound exceeds 2 parts by weight, there is a case where the curing reaction of the epoxy resin becomes fast, the resin layer after hardening becomes brittle, the strength of the cured resin film, and the adhesion of the resin The adhesion of the resin layers of the copper foil to each other is lowered.

再者,作為成分C之環氧樹脂、成分D之環氧樹脂硬化劑,可使用公知之成分C之環氧樹脂、成分D之環氧樹脂硬化劑或本案說明書中記載之成分C之環氧樹脂、成分D之環氧樹脂硬化劑。 Further, as the epoxy resin of the component C and the epoxy resin curing agent of the component D, an epoxy resin of the known component C, an epoxy resin curing agent of the component D, or an epoxy of the component C described in the present specification can be used. Resin, epoxy resin hardener of component D.

上述樹脂層係半硬化狀態下之具備耐吸濕特性之樹脂組成 物,該樹脂組成物亦可使用含有以下A成分~E成分,且於將樹脂組成物重量設為100重量%時於0.5重量%~3.0重量%之範圍含有磷原子之樹脂組 成物而形成。 The resin layer is a resin composition having moisture absorption resistance in a semi-hardened state In the resin composition, a resin group containing a phosphorus atom in a range of 0.5% by weight to 3.0% by weight when the weight of the resin composition is 100% by weight may be used. Formed by the object.

A成分:環氧當量為200以下,且選自於25℃為液狀之雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚AD型環氧樹脂之群中之1種或2種以上。 Component A: an epoxy equivalent of 200 or less, and one selected from the group consisting of a liquid bisphenol A type epoxy resin, a bisphenol F type epoxy resin, and a bisphenol AD type epoxy resin at 25 ° C or 2 or more types.

B成分:具有可交聯之官能基之線性聚合物。 Component B: a linear polymer having a crosslinkable functional group.

C成分:交聯劑。 Component C: Crosslinker.

D成分:咪唑系環氧樹脂硬化劑。 Component D: Imidazole-based epoxy resin hardener.

E成分:含磷環氧樹脂。 Component E: Phosphorus-containing epoxy resin.

作為上述B成分之具有官能基之線性聚合物較佳為可溶於沸點為50℃~200℃之溫度之有機溶劑的聚合物成分。具體而言為聚乙烯縮醛樹脂、苯氧樹脂、聚醚碸樹脂、聚醯胺醯亞胺樹脂等。上述具有可交聯之官能基之線性聚合物較佳為於將樹脂組成物設為100重量份時,以3重量份~30重量份之摻合比率使用。於該環氧樹脂未達3重量份之情形時,有樹脂流動變大之情形。其結果為,有自製造而成之覆銅積層板之端部可較多地觀察到樹脂粉之產生之情形,且有亦無法改善半硬化狀態下之樹脂層之耐吸濕性之情形。另一方面,即便超過30重量份亦有樹脂流動較小之情形,且有於製造而成之覆銅積層板之絕緣層內容易產生孔隙等缺陷之情形。 The linear polymer having a functional group as the component B is preferably a polymer component which is soluble in an organic solvent having a boiling point of from 50 ° C to 200 ° C . Specifically, it is a polyvinyl acetal resin, a phenoxy resin, a polyether oxime resin, a polyamidoximine resin, etc. The linear polymer having a crosslinkable functional group is preferably used in an amount of from 3 parts by weight to 30 parts by weight based on 100 parts by weight of the resin composition. When the epoxy resin is less than 3 parts by weight, the flow of the resin becomes large. As a result, it is possible to observe the occurrence of the resin powder in the end portion of the copper clad laminate which is manufactured, and it is also impossible to improve the moisture absorption resistance of the resin layer in the semi-hardened state. On the other hand, even if it exceeds 30 parts by weight, the resin flow may be small, and defects such as voids may easily occur in the insulating layer of the copper clad laminate produced.

又,若具體例示此處所提及之沸點為50℃~200℃之溫度之 有機溶劑,則為選自甲醇、乙醇、甲基乙基酮、甲苯、丙二醇單甲醚、二甲基甲醯胺、二甲基乙醯胺、環己酮、乙基賽路蘇等之群中之1種之單獨溶劑或2種以上之混合溶劑。於沸點未達50℃之情形時,有如下情形:因加熱所引起之溶劑之氣散明顯,於自樹脂清漆之狀態形成半硬化樹脂之情形時,難以獲得良好之半硬化狀態。另一方面,於沸點超過200℃之情形時,有於半硬化狀態下溶劑容易殘留之情形。而且,有未滿足通常所要求之揮發速度、未滿足工業生產性之可能性。 Further, if the boiling point mentioned here is 50 ° C to 200 ° C, the temperature is specifically exemplified. The organic solvent is selected from the group consisting of methanol, ethanol, methyl ethyl ketone, toluene, propylene glycol monomethyl ether, dimethylformamide, dimethylacetamide, cyclohexanone, and ethyl sulco. One of the solvent alone or a mixture of two or more solvents. When the boiling point is less than 50 ° C, there is a case where the gas dispersion due to heating is remarkable, and in the case where a semi-hardened resin is formed from the state of the resin varnish, it is difficult to obtain a good semi-hardened state. On the other hand, when the boiling point exceeds 200 ° C, the solvent tends to remain in the semi-hardened state. Further, there is a possibility that the volatilization speed which is usually required is not satisfied and the industrial productivity is not satisfied.

C成分係用以使B成分與環氧樹脂之交聯反應發生之交聯劑。較佳為 將胺酯系樹脂用於該交聯劑。該交聯劑係根據B成分之混合量而添加者,從而可認為原來就沒有嚴格地清楚記載其摻合比率之必要性。然而,較佳為於將樹脂組成物設為100重量份時,以10重量份以下之摻合比率使用。 其原因在於:若超過10重量份地存在胺酯系樹脂即C成分,則半硬化狀態下之樹脂層之耐吸濕性劣化,硬化後之樹脂層變脆。 The component C is a crosslinking agent for causing a crosslinking reaction between the component B and the epoxy resin. Preferred An amine ester resin is used for the crosslinking agent. This crosslinking agent is added according to the mixing amount of the component B, and it is considered that the necessity of the blending ratio is not strictly described. However, when the resin composition is 100 parts by weight, it is preferably used in a blending ratio of 10 parts by weight or less. The reason for this is that when the component C, which is an amine ester-based resin, is present in excess of 10 parts by weight, the moisture absorption resistance of the resin layer in the semi-hardened state is deteriorated, and the resin layer after curing becomes brittle.

D成分係咪唑系環氧樹脂硬化劑。於本案發明之樹脂組成物 中,就提高半硬化狀態之樹脂層之耐吸濕性之觀點而言,較佳為選擇性地使用咪唑系環氧樹脂硬化劑。其中,較佳為使用具備以下之化7所示之結構式之咪唑系環氧樹脂硬化劑。藉由使用該化7所示之結構式之咪唑系環氧樹脂硬化劑,而可明顯提高半硬化狀態之樹脂層之耐吸濕性,使長期保存穩定性優異。再者,環氧樹脂硬化劑相對於環氧樹脂之添加量較佳為採用實驗上所獲得之最佳量,而並非根據反應當量進行計算。咪唑系環氧樹脂硬化劑係於環氧樹脂之硬化時發揮觸媒性之作用者,其原因在於:於硬化反應之初始階段,作為引起環氧樹脂之自聚合反應之反應起始劑而有所助益。 The D component is an imidazole epoxy resin hardener. The resin composition of the invention of the present invention Among them, from the viewpoint of improving the moisture absorption resistance of the resin layer in a semi-hardened state, it is preferred to selectively use an imidazole-based epoxy resin hardener. Among them, an imidazole-based epoxy resin curing agent having a structural formula represented by the following formula 7 is preferably used. By using the imidazole-based epoxy resin curing agent of the structural formula shown in Chemical Formula 7, the moisture absorption resistance of the resin layer in a semi-hardened state can be remarkably improved, and the long-term storage stability is excellent. Further, the amount of the epoxy resin hardener added to the epoxy resin is preferably an optimum amount obtained experimentally, and is not calculated based on the reaction equivalent. The imidazole-based epoxy resin hardener acts as a catalyst for hardening of the epoxy resin because it is used as a reaction initiator for causing self-polymerization of the epoxy resin in the initial stage of the hardening reaction. Help.

[化7] [Chemistry 7]

作為上述E成分之含磷環氧樹脂較佳為以來自於分子內具 備2個以上環氧基之9,10-二氫-9-氧雜-10-磷雜菲-10-氧化物之衍生物之形式所獲得之環氧樹脂。 The phosphorus-containing epoxy resin as the above-mentioned E component is preferably derived from intramolecular An epoxy resin obtained in the form of a derivative of two or more epoxy groups of 9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide.

10-二氫-9-氧雜-10-磷雜菲-10-氧化物之結構式如下。 The structural formula of 10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide is as follows.

以來自該9,10-二氫-9-氧雜-10-磷雜菲-10-氧化物之衍生物之形式所獲得之環氧樹脂係於使萘醌或對苯二酚與9,10-二氫-9 -氧雜-10-磷雜菲-10-氧化物反應並形成以下之化9(HCA-NQ)或化10(HCA-HQ)所示之化合物後,使環氧樹脂與其OH基之部分反應而形成含磷環氧樹脂者。 The epoxy resin obtained in the form of the derivative derived from the 9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide is used to make naphthoquinone or hydroquinone with 9,10 -dihydro-9 -Oxo-10-phosphaphenanthrene-10-oxide reacts to form a compound represented by the following 9 (HCA-NQ) or 10 (HCA-HQ), and then reacts the epoxy resin with a portion thereof The formation of phosphorus-containing epoxy resin.

以上述化合物為原料所獲得之上述E成分即含磷環氧樹脂 較佳為混合使用具備以下所示之化11~化13中之任一者所示之結構式的化合物之1種或2種。其原因在於:半硬化狀態下之樹脂品質之穩定性優異,同時難燃性效果較高。 The above-mentioned E component obtained by using the above compound as a raw material, that is, a phosphorus-containing epoxy resin It is preferred to use one or two kinds of compounds having a structural formula represented by any one of the following formulas 11 to 13 which are shown below. The reason for this is that the stability of the resin quality in the semi-hardened state is excellent, and the flame retardancy effect is high.

[化12] [化12]

上述樹脂組成物較佳為如下者:於將樹脂組成物重量設為100重量份時,A成分為3重量份~20重量份,B成分為3重量份~30重量份,且以於將樹脂組成物重量設為100重量%時使磷原子成為0.5重量%~3.0重量%之範圍之方式規定E成分之重量份。 The resin composition is preferably such that when the weight of the resin composition is 100 parts by weight, the component A is 3 parts by weight to 20 parts by weight, and the component B is 3 parts by weight to 30 parts by weight, and the resin is used. When the weight of the composition is 100% by weight, the weight fraction of the E component is defined so that the phosphorus atom is in the range of 0.5% by weight to 3.0% by weight.

上述樹脂層亦可使用含有以下A成分~F成分之各成分之樹脂組成物而形成。 The resin layer may be formed using a resin composition containing each component of the following components A to F.

A成分:環氧當量為200以下,且選自於25℃為液狀之雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚AD型環氧樹脂之群中之1種或2種以上。 Component A: an epoxy equivalent of 200 or less, and one selected from the group consisting of a liquid bisphenol A type epoxy resin, a bisphenol F type epoxy resin, and a bisphenol AD type epoxy resin at 25 ° C or 2 or more types.

B成分:具有可交聯之官能基之線性聚合物。 Component B: a linear polymer having a crosslinkable functional group.

C成分:交聯劑(其中,於A成分作為B成分之交聯劑發揮功能之情形時可省略)。 Component C: a crosslinking agent (may be omitted when the component A functions as a crosslinking agent of the component B).

D成分:4,4'-二胺基二苯碸或2,2-雙(4-(4-胺基苯氧基)苯基)丙烷。 Component D: 4,4'-diaminodiphenyl hydrazine or 2,2-bis(4-(4-aminophenoxy)phenyl)propane.

E成分:難燃性環氧樹脂。 Component E: Flame retardant epoxy resin.

F成分:多官能環氧樹脂。 F component: a multifunctional epoxy resin.

G成分:硬化促進劑。 Component G: Hardening accelerator.

作為上述B成分之具有可交聯之官能基之線性聚合物較佳為聚乙烯縮醛樹脂或聚醯胺醯亞胺樹脂。 The linear polymer having a crosslinkable functional group as the above component B is preferably a polyvinyl acetal resin or a polyamidoximine resin.

作為上述C成分之交聯劑較佳為胺酯系樹脂。 The crosslinking agent as the component C is preferably an amine ester-based resin.

作為上述E成分之難燃性環氧樹脂較佳為混合使用以來自於分子內具備2個以上環氧基之四溴雙酚A之衍生物之形式所獲得的具備化14所示之結構式之溴化環氧樹脂、具備以下所示之化15所示之結構式之溴化環氧樹脂之1種或2種。 The flame retardant epoxy resin as the component E is preferably a compound having the structure shown in Formula 14 obtained by mixing a derivative of tetrabromobisphenol A having two or more epoxy groups in the molecule. The brominated epoxy resin or one or two kinds of brominated epoxy resins having the structural formula shown by the following formula 15.

[化14] [Chemistry 14]

[化15] [化15]

作為上述E成分之難燃性環氧樹脂較佳為使用於分子內具備2個以上環氧基之即為9,10-二氫-9-氧雜-10-磷雜菲-10-氧化物衍生物之含磷環氧樹脂。 The flame retardant epoxy resin as the component E is preferably used in the presence of two or more epoxy groups in the molecule, that is, 9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide. A phosphorus-containing epoxy resin of a derivative.

作為上述E成分之難燃性環氧樹脂較佳為混合使用具備以下所示之化16~化18之任一者所示之結構式之含磷環氧樹脂之1種或2種。 The flame retardant epoxy resin as the above-mentioned component E is preferably one or two types of phosphorus-containing epoxy resins having a structural formula represented by any one of the following formulas 16 to 18.

[化16] [Chemistry 16]

[化17] [化17]

[化18] [化18]

作為上述F成分之多官能環氧樹脂,較佳為使用鄰甲酚酚醛清漆型環氧樹脂。 As the polyfunctional epoxy resin of the above F component, an o-cresol novolac type epoxy resin is preferably used.

較佳為於將用以形成上述樹脂層之樹脂組成物之重量設為100重量份時,A成分為3重量份~20重量份,B成分為3重量份~30重量份,C成分為3重量份~10重量份(於A成分作為B成分之交聯劑發揮功能之情形時為0重量份~10重量份),D成分為5重量份~20重量份,F成分為3重量份~20重量份,且以於將樹脂組成物重量設為100重量%時於12重量% ~18重量%之範圍含有源自E成分之溴原子的方式規定E成分之重量份。 When the weight of the resin composition for forming the resin layer is 100 parts by weight, the component A is 3 parts by weight to 20 parts by weight, the component B is 3 parts by weight to 30 parts by weight, and the component C is 3 parts. Parts by weight to 10 parts by weight (0 parts by weight to 10 parts by weight when the component A functions as a crosslinking agent of the component B), the component D is 5 parts by weight to 20 parts by weight, and the F component is 3 parts by weight. 20 parts by weight, and 12% by weight when the weight of the resin composition is 100% by weight The weight fraction of the E component is defined in such a manner that the bromine atom derived from the component E is contained in the range of ~18% by weight.

較佳為於將用以形成上述樹脂層之樹脂組成物之重量設為100重量份時,A成分為3重量份~20重量份,B成分為3重量份~30重量份,C成分為3重量份~10重量份(於A成分作為B成分之交聯劑發揮功能之情形時為0重量份~10重量份),D成分為5重量份~20重量份,F成分為3重量份~20重量份,且以於將樹脂組成物重量設為100重量%時於0.5重量%~3.0重量%之範圍含有源自E成分之磷原子的方式規定E成分之重量份。 When the weight of the resin composition for forming the resin layer is 100 parts by weight, the component A is 3 parts by weight to 20 parts by weight, the component B is 3 parts by weight to 30 parts by weight, and the component C is 3 parts. Parts by weight to 10 parts by weight (0 parts by weight to 10 parts by weight when the component A functions as a crosslinking agent of the component B), the component D is 5 parts by weight to 20 parts by weight, and the F component is 3 parts by weight. When the weight of the resin composition is 100% by weight, the weight fraction of the E component is defined so as to contain the phosphorus atom derived from the component E in the range of 0.5% by weight to 3.0% by weight.

用以形成上述樹脂層之樹脂組成物較佳為含有硬化促進劑作為G成分。 The resin composition for forming the above resin layer preferably contains a curing accelerator as the G component.

上述樹脂層較佳為以如下步驟a、步驟b之次序製備用於形成樹脂層之樹脂清漆,將該樹脂清漆塗佈於附載體銅箔之表面並使之乾燥,藉此形成5μm~100μm之平均厚度之半硬化樹脂膜。 The resin layer preferably has a resin varnish for forming a resin layer in the order of the following steps a and b, and the resin varnish is applied onto the surface of the copper foil with a carrier and dried to form a 5 μm to 100 μm. A semi-hardened resin film of average thickness.

步驟a:於上述A成分、B成分、C成分(於A成分作為B成分之交聯劑發揮功能之情形時可省略)、D成分、E成分、F成分、G成分中,於將以A成分~F成分為必需成分之樹脂組成物之重量設為100重量%時,於12重量%~18重量%之範圍含有源自E成分之溴原子或於0.5重量%~3.0重量%之範圍含有磷原子,以此種方式混合各成分而製成樹脂組成物。 Step a: In the above-mentioned A component, B component, and C component (may be omitted when the A component functions as a crosslinking agent of the B component), the D component, the E component, the F component, and the G component, When the weight of the resin composition in which the component -F component is an essential component is 100% by weight, the bromine atom derived from the component E is contained in the range of 12% by weight to 18% by weight or is contained in the range of 0.5% by weight to 3.0% by weight. The phosphorus atom is mixed in this manner to form a resin composition.

步驟b:使用有機溶劑溶解上述樹脂組成物,製成樹脂固形物成分量為25重量%~50重量%之樹脂清漆。 Step b: The resin composition is dissolved in an organic solvent to prepare a resin varnish having a resin solid content of 25% by weight to 50% by weight.

上述樹脂層較佳為使用含有以下A成分~E成分之各成分之樹脂組成物而形成。 The resin layer is preferably formed using a resin composition containing each component of the following components A to E.

A成分:環氧當量為200以下,且由選自室溫中為液狀之雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚AD型環氧樹脂之群中之1種或2種以上所構成之環氧樹脂。 Component A: one of a group of bisphenol A type epoxy resins, bisphenol F type epoxy resins, and bisphenol AD type epoxy resins selected from liquid crystals at room temperature and having an epoxy equivalent of 200 or less. Or two or more types of epoxy resins.

B成分:高耐熱性環氧樹脂。 Component B: High heat resistant epoxy resin.

C成分:含有磷之難燃性環氧樹脂。 Component C: a flame retardant epoxy resin containing phosphorus.

D成分:具備可溶於沸點處於50℃~200℃之範圍之溶劑之性質且以液狀橡膠成分修飾(改質)而成之橡膠修飾(改質)聚醯胺醯亞胺樹脂。 Component D: A rubber-modified (modified) polyamidoquinone imine resin which is soluble in a solvent having a boiling point in the range of 50 ° C to 200 ° C and modified (modified) with a liquid rubber component.

E成分:由聯苯型酚樹脂、苯酚芳烷基型酚樹脂之1種或2種以上所構成之樹脂硬化劑。 Component E: A resin curing agent comprising one or more of a biphenyl type phenol resin and a phenol aralkyl type phenol resin.

上述樹脂層較佳為使用除上述A成分~E成分之各成分以外,進而含有作為F成分之不具有與環氧樹脂之反應性之含磷難燃劑的樹脂組成物而形成。 The resin layer is preferably formed by using a resin composition other than the components of the components A to E described above and further containing a phosphorus-containing flame retardant which is not reactive with an epoxy resin as the component F.

A成分係環氧當量為200以下,且由選自室溫中為液狀之雙 酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚AD型環氧樹脂之群之1種或2種以上所構成之環氧樹脂。此處,選擇使用雙酚系環氧樹脂之原因在於:與下述D成分(橡膠修飾(改質)聚醯胺醯亞胺樹脂)之相容性良好,容易對半硬化狀態下之樹脂膜賦予適度之可撓性。而且,若環氧當量超過200,則樹脂於室溫中成為半固形,半硬化狀態下之可撓性減少故而欠佳。 進而,只要為上述雙酚系環氧樹脂,則可單獨使用1種亦可混合使用2種以上。而且,於混合使用2種以上之情形時,關於其混合比並無特別之限定。 The component A has an epoxy equivalent of 200 or less and is selected from liquids selected from room temperature. An epoxy resin composed of one or more of a group of a phenol A type epoxy resin, a bisphenol F type epoxy resin, and a bisphenol AD type epoxy resin. Here, the reason why the bisphenol epoxy resin is selected is that it has good compatibility with the following component D (rubber-modified (modified) polyamidoximine resin), and it is easy to be a resin film in a semi-hardened state. Give moderate flexibility. Further, when the epoxy equivalent exceeds 200, the resin becomes semi-solid at room temperature, and the flexibility in the semi-hardened state is reduced, which is not preferable. In addition, as long as it is a bisphenol type epoxy resin, you may use it either individually or in combination of 2 or more types. In addition, when two or more types are used in combination, the mixing ratio is not particularly limited.

該環氧樹脂較佳為於將樹脂組成物設為100重量份時,以3 重量份~20重量份之摻合比率使用。於該環氧樹脂未達3重量份之情形時,未充分發揮熱硬化性,不僅難以充分實現作為與內層可撓性印刷配線板之黏合劑之功能,而且難以充分實現作為附樹脂銅箔之與銅箔之密接性。另一方面,若超過20重量份,則因與其他樹脂成分之平衡故製成樹脂清漆時之黏度變高,從而於製造附樹脂銅箔時,不易以均勻之厚度於銅箔表面形成樹脂膜。而且,若考慮下述D成分(橡膠修飾(改質)聚醯胺醯亞胺樹脂)之添加量,則作為硬化後之樹脂層無法獲得充分之韌性。 The epoxy resin is preferably used when the resin composition is 100 parts by weight. The blending ratio of parts by weight to 20 parts by weight is used. When the amount of the epoxy resin is less than 3 parts by weight, the thermosetting property is not sufficiently exhibited, and it is difficult to sufficiently realize the function as a binder to the inner layer flexible printed wiring board, and it is difficult to sufficiently realize the copper foil as a resin. The adhesion to the copper foil. On the other hand, when it exceeds 20 parts by weight, the viscosity of the resin varnish becomes high due to the balance with other resin components, and it is difficult to form a resin film on the surface of the copper foil with a uniform thickness when manufacturing the resin-coated copper foil. . Further, considering the addition amount of the following component D (rubber-modified (modified) polyamidoximine resin), sufficient toughness cannot be obtained as the resin layer after curing.

B成分係所謂之玻璃轉移點較高之「高耐熱性環氧樹脂」。 此處所提及之「高耐熱性環氧樹脂」較佳為酚醛清漆型環氧樹脂、甲酚酚醛清漆型環氧樹脂、苯酚酚醛清漆型環氧樹脂、萘型環氧樹脂等多官能環氧樹脂。而且,該B成分較佳為於將樹脂組成物設為100重量份時,於3重量份~30重量份之範圍使用。於B成分未達3重量份之情形時,樹脂組成物之高Tg化完全不會實現。另一方面,於B成分超過30重量份之情形時,硬化後之樹脂變脆,完全損害可撓性故而作為可撓性印刷配線板用途欠佳。B成分更佳為於10重量份~20重量份之範圍使用,藉此可穩定地兼具樹脂組成物之高Tg化與硬化後之樹脂之良好之可撓性。 The B component is a so-called "high heat resistant epoxy resin" having a high glass transition point. The "high heat resistant epoxy resin" mentioned herein is preferably a polyfunctional ring such as a novolak type epoxy resin, a cresol novolak type epoxy resin, a phenol novolak type epoxy resin, or a naphthalene type epoxy resin. Oxygen resin. Further, the component B is preferably used in an amount of from 3 parts by weight to 30 parts by weight, based on 100 parts by weight of the resin composition. When the amount of the component B is less than 3 parts by weight, the high Tg of the resin composition is not at all realized. On the other hand, when the component B is more than 30 parts by weight, the resin after curing becomes brittle, and the flexibility is completely impaired, so that it is not preferable as a flexible printed wiring board. More preferably, the component B is used in the range of 10 parts by weight to 20 parts by weight, whereby the high Tg of the resin composition and the good flexibility of the resin after curing can be stably achieved.

作為C成分係所謂之無鹵素系之難燃性環氧樹脂,且使用 含磷難燃性環氧樹脂。所謂含磷難燃性環氧樹脂係於環氧骨架中含有磷之環氧樹脂之總稱。而且,只要為於將樹脂組成物重量設為100重量%時,可將本申請案之樹脂組成物之磷原子含量、即源自C成分之磷原子設為0.5重量%~30重量%之範圍的含磷難燃性環氧樹脂,則任一者均可使用。然而,使用於分子內具備2個以上環氧基之即為9,10-二氫-9-氧雜-10-磷雜菲-10-氧化物衍生物之含磷難燃性環氧樹脂係由於半硬化狀態下之樹脂品質之穩定性優異,同時難燃性效果較高故而較佳。將9,10-二氫-9-氧雜-10-磷雜菲-10-氧化物之結構式示於化19以作參考。 As a C component, it is a halogen-free flame retardant epoxy resin and is used. Phosphorus-containing flame retardant epoxy resin. The phosphorus-containing flame retardant epoxy resin is a general term for epoxy resins containing phosphorus in an epoxy skeleton. In addition, when the weight of the resin composition is 100% by weight, the phosphorus atom content of the resin composition of the present application, that is, the phosphorus atom derived from the C component may be in the range of 0.5% by weight to 30% by weight. Any of the phosphorus-containing flame retardant epoxy resins can be used. However, a phosphorus-containing flame retardant epoxy resin which is a 9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide derivative having two or more epoxy groups in its molecule is used. It is preferable because the stability of the resin quality in the semi-hardened state is excellent and the flame retardancy effect is high. The structural formula of 9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide is shown in Figure 19 for reference.

[化19] [Chemistry 19]

而且,若具體例示即為9,10-二氫-9-氧雜-10-磷雜菲-10-氧化物衍生物之含磷難燃性環氧樹脂,則較佳為使用具備化20所示之結構式之化合物。半硬化狀態下之樹脂品質之穩定性優異,同時難燃性效果較高故而較佳。 Further, if a phosphorus-containing flame retardant epoxy resin of 9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide derivative is specifically exemplified, it is preferred to use 20 A compound of the formula shown. The resin in the semi-hardened state is excellent in stability of the quality and has a high flame retardancy effect.

又,作為C成分之含磷難燃性環氧樹脂,亦較佳為具備以下所示之化21所示之結構式之化合物。與化20所示之含磷難燃性環氧樹脂相同,半硬化狀態下之樹脂品質之穩定性優異,同時可賦予較高之難燃性故而較佳。 Further, the phosphorus-containing flame retardant epoxy resin as the component C is preferably a compound having the structural formula shown by the following formula 21. In the same manner as the phosphorus-containing flame retardant epoxy resin shown in Chemical Formula 20, the stability of the resin quality in the semi-hardened state is excellent, and at the same time, it is preferable to impart high flame retardancy.

進而,作為C成分之含磷難燃性環氧樹脂,亦較佳為具備 以下所示之化22所示之結構式之化合物。與化20及化21所示之含磷難燃性環氧樹脂相同,半硬化狀態下之樹脂品質之穩定性優異,同時可賦予較高之難燃性故而較佳。 Further, the phosphorus-containing flame retardant epoxy resin as the component C is preferably further provided The compound of the structural formula shown by the formula 22 shown below. In the same manner as the phosphorus-containing flame retardant epoxy resin shown in Chemical Formulas 20 and 21, the resin quality in the semi-hardened state is excellent in stability, and it is preferable to impart high flame retardancy.

[化22] [化22]

以來自該9,10-二氫-9-氧雜-10-磷雜菲-10-氧化物之衍生物之形式所獲得之環氧樹脂可舉出如下者:於使萘醌或對苯二酚與 9,10-二氫-9-氧雜-10-磷雜菲-10-氧化物反應並形成以下之化23(HCA-NQ)或化24(HCA-HQ)所示之化合物後,使環氧樹脂與其OH基之部分反應而形成含磷難燃性環氧樹脂。 The epoxy resin obtained in the form of a derivative derived from the 9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide may be exemplified by the following: naphthoquinone or p-phenylene Phenol and After reacting 9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide to form a compound represented by the following 23 (HCA-NQ) or 24 (HCA-HQ), the ring is made The oxygen resin reacts with a portion of its OH group to form a phosphorus-containing flame retardant epoxy resin.

此處,使用含磷難燃性環氧樹脂之情形時之樹脂組成物可單獨使用1種作為C成分之含磷難燃性環氧樹脂,亦可混合使用2種以上含磷難燃性環氧樹脂。然而,較佳為考慮作為C成分之含磷難燃性環氧樹脂之總量,以於將樹脂組成物重量設為100重量%時,使源自C成分之磷原子 成為0.5重量%~3.0重量%之範圍之方式添加。含磷難燃性環氧樹脂根據其種類而於環氧骨架內含有之磷原子量不同。因此,可如上所述規定磷原子之含量來代替C成分之添加量。然而,C成分通常於將樹脂組成物設為100重量份時,於5重量份~50重量份之範圍使用。於C成分未達5重量份之情形時,若考慮其他樹脂成分之摻合比率,則難以將源自C成分之磷原子設為0.5重量%以上,無法獲得難燃性。另一方面,即便C成分超過50重量份,難燃性提高效果亦飽和,同時硬化後之樹脂層變脆故而欠佳。 Here, in the case of using a phosphorus-containing flame retardant epoxy resin, one type of phosphorus-containing flame retardant epoxy resin as a component C may be used alone, or two or more types of phosphorus-containing flame retardant rings may be used in combination. Oxygen resin. However, it is preferable to consider the total amount of the phosphorus-containing flame retardant epoxy resin as the component C, and to make the phosphorus atom derived from the C component when the weight of the resin composition is 100% by weight. It is added so as to be in the range of 0.5% by weight to 3.0% by weight. The phosphorus-containing flame retardant epoxy resin differs in the amount of phosphorus atoms contained in the epoxy skeleton depending on the type thereof. Therefore, the content of the phosphorus atom can be specified as described above instead of the amount of the C component added. However, the component C is usually used in the range of 5 parts by weight to 50 parts by weight when the resin composition is 100 parts by weight. When the amount of the component C is less than 5 parts by weight, considering the blending ratio of the other resin component, it is difficult to set the phosphorus atom derived from the component C to 0.5% by weight or more, and flame retardancy cannot be obtained. On the other hand, even if the C component exceeds 50 parts by weight, the flame retardancy improving effect is saturated, and the cured resin layer becomes brittle and is not preferable.

所謂上述之硬化樹脂之「高Tg化」與「可撓性」通常為呈反比例之特性。此時,含磷難燃性環氧樹脂存在有助於硬化後之樹脂之可撓性之提高者、有助於高Tg化者。因此,與其使用一種含磷難燃性環氧樹脂,不如平衡良好地摻合「有助於高Tg化之含磷難燃性環氧樹脂」與「有助於可撓性之提高之含磷難燃性環氧樹脂」來使用,藉此可製成適於可撓性印刷配線板用途之樹脂組成。 The "high Tg" and "flexibility" of the above-mentioned hardened resin are generally inversely proportional. In this case, the phosphorus-containing flame retardant epoxy resin has an improvement in flexibility of the resin which contributes to hardening, and contributes to high Tg. Therefore, instead of using a phosphorus-containing flame retardant epoxy resin, it is better to blend well with the "phosphorus-containing flame retardant epoxy resin which contributes to high Tg" and "phosphorus which contributes to the improvement of flexibility". The use of a flame retardant epoxy resin can be used to form a resin composition suitable for use in a flexible printed wiring board.

D成分係可溶於沸點處於50℃~200℃之範圍之溶劑且以液狀橡膠成分修飾(改質)而成之橡膠修飾(改質)聚醯胺醯亞胺樹脂。該橡膠修飾(改質)聚醯胺醯亞胺樹脂係使聚醯胺醯亞胺樹脂與橡膠性樹脂反應所獲得者。此處所提及之使橡膠修飾(改質)聚醯胺醯亞胺樹脂與橡膠性樹脂反應而使用的情況,係以提高聚醯胺醯亞胺樹脂其本身之柔軟性之目的而進行。即,使聚醯胺醯亞胺樹脂與橡膠性樹脂反應,將聚醯胺醯亞胺樹脂之酸成分(環己烷二羧酸等)之一部分取代為橡膠成分。作為橡膠成分,以包含天然橡膠及合成橡膠之概念進行記載,作為後者之合成橡膠有苯乙烯-丁二烯橡膠、丁二烯橡膠、丁基橡膠、乙烯-丙烯橡膠等。進而,就確保耐熱性之觀點而言,亦為有用的是選擇使用腈橡膠、氯丁二烯橡膠、矽橡膠、胺酯橡膠等具備耐熱性之合成橡膠。關於該等橡膠性樹脂,為了與聚醯胺醯亞胺樹脂反應而製造共聚物,而較理想為於兩末端具 備各種官能基者。尤其有用的是使用具有羧基之CTBN(羧基末端丁二烯腈)。再者,上述橡膠成分可僅使1種共聚合,亦可使2種以上共聚合。進而,於使用橡膠成分之情形時,就該可撓性之穩定化之觀點而言較佳為使用該橡膠成分之數量平均分子量為1000以上者。 The component D is a rubber-modified (modified) polyamidoximine resin which is soluble in a solvent having a boiling point in the range of 50 ° C to 200 ° C and modified (modified) with a liquid rubber component. The rubber modified (modified) polyamidoximine resin is obtained by reacting a polyamide amine imide resin with a rubber resin. The case where the rubber modified (modified) polyamidoximine resin is reacted with a rubber resin as mentioned herein is carried out for the purpose of improving the flexibility of the polyamide amine imide resin itself. In other words, the polyamidoximine resin is reacted with a rubber resin, and one of the acid components (such as cyclohexanedicarboxylic acid) of the polyamidoximine resin is partially substituted with a rubber component. The rubber component is described in terms of a concept including natural rubber and synthetic rubber, and the latter synthetic rubber includes styrene-butadiene rubber, butadiene rubber, butyl rubber, and ethylene-propylene rubber. Further, from the viewpoint of ensuring heat resistance, it is also useful to use a heat-resistant synthetic rubber such as a nitrile rubber, a chloroprene rubber, a ruthenium rubber or an amine ester rubber. These rubber resins are preferably produced at both ends in order to react with a polyamide amidoxime resin to produce a copolymer. Prepare a variety of functional bases. It is especially useful to use CTBN (carboxy terminal butadiene nitrile) having a carboxyl group. Further, the rubber component may be copolymerized in only one type or may be copolymerized in two or more types. Further, in the case of using a rubber component, it is preferred that the rubber component has a number average molecular weight of 1,000 or more from the viewpoint of stabilization of flexibility.

於使橡膠修飾(改質)聚醯胺醯亞胺樹脂聚合時,作為用於 聚醯胺醯亞胺樹脂與橡膠性樹脂之溶解之溶劑,較佳為混合使用1種或2種以上之二甲基甲醯胺、二甲基乙醯胺、N-甲基-2-吡咯啶酮、二甲基亞碸、硝基甲烷、硝基乙烷、四氫呋喃、環己酮、甲基乙基酮、乙腈、γ-丁內酯等。而且,為了使聚合反應發生,較佳為採用80℃~200℃之範圍之聚合溫度。於將沸點超過200℃之溶劑用在該等之聚合之情形時,較佳為其後根據用途將溶劑置換成沸點處於50℃~200℃之範圍之溶劑。 When used to polymerize a rubber modified (modified) polyamidoximine resin, The solvent in which the polyamidoximine resin and the rubber resin are dissolved is preferably one or more kinds of dimethylformamide, dimethylacetamide, and N-methyl-2-pyrrole. Pyridone, dimethyl hydrazine, nitromethane, nitroethane, tetrahydrofuran, cyclohexanone, methyl ethyl ketone, acetonitrile, γ-butyrolactone and the like. Further, in order to cause a polymerization reaction to occur, a polymerization temperature in the range of 80 ° C to 200 ° C is preferably employed. When a solvent having a boiling point of more than 200 ° C is used in the polymerization, it is preferred to replace the solvent with a solvent having a boiling point in the range of 50 ° C to 200 ° C depending on the application.

此處,作為上述沸點處於50℃~200℃之範圍之溶劑,可列 舉:選自甲基乙基酮、二甲基乙醯胺、二甲基甲醯胺等之群之1種之單獨溶劑或2種以上之混合溶劑。於沸點未達50℃之情形時,因加熱所引起之溶劑之氣散明顯,於自樹脂清漆之狀態形成半硬化樹脂之情形時,難以獲得良好之半硬化狀態。另一方面,於沸點超過200℃之情形時,於自樹脂清漆之狀態形成半硬化樹脂之情形時,容易發生起泡,故而難以獲得良好之半硬化樹脂膜。 Here, as the solvent having a boiling point in the range of 50 ° C to 200 ° C, it can be listed. A single solvent selected from the group consisting of methyl ethyl ketone, dimethyl acetamide, and dimethylformamide, or a mixed solvent of two or more kinds. When the boiling point is less than 50 ° C, the dispersion of the solvent due to heating is remarkable, and in the case where a semi-hardened resin is formed from the state of the resin varnish, it is difficult to obtain a good semi-hardened state. On the other hand, when the boiling point exceeds 200 ° C, when a semi-hardened resin is formed from the state of the resin varnish, foaming easily occurs, so that it is difficult to obtain a good semi-cured resin film.

用於本案發明之樹脂組成物之橡膠修飾(改質)聚醯胺醯亞 胺樹脂中,較佳為於將橡膠修飾(改質)聚醯胺醯亞胺樹脂之重量設為100重量%時,橡膠成分之共聚合量為0.8重量%以上。於該共聚合量未達0.8重量%之情形時,即便形成橡膠修飾(改質)聚醯胺醯亞胺樹脂,亦缺乏使利用本案發明中所提及之樹脂組成物形成之樹脂層硬化時之可撓性,與銅箔之密接性亦降低故而欠佳。再者,更佳為,該橡膠成分之共聚合量更佳為3重量%以上,進而較佳為5重量%以上。根據經驗,即便超過40重量% 地提高橡膠成分之添加量,亦無特別之問題。然而,該硬化後之樹脂層之可撓性之提高效果飽和故而造成資源之浪費從而欠佳。 Rubber modified (modified) polyamidoxime used in the resin composition of the present invention In the amine resin, when the weight of the rubber-modified (modified) polyamidoximine resin is 100% by weight, the copolymerization amount of the rubber component is preferably 0.8% by weight or more. When the amount of the copolymerization is less than 0.8% by weight, even if a rubber-modified (modified) polyamidoximine resin is formed, there is a lack of hardening of the resin layer formed using the resin composition mentioned in the present invention. The flexibility and the adhesion to the copper foil are also lowered, which is not preferable. Further, more preferably, the amount of the copolymerization of the rubber component is more preferably 3% by weight or more, still more preferably 5% by weight or more. According to experience, even more than 40% by weight There is no particular problem in increasing the amount of rubber component added. However, the effect of improving the flexibility of the hardened resin layer is saturated, resulting in waste of resources and thus being poor.

對以上所述之橡膠修飾(改質)聚醯胺醯亞胺樹脂要求有可溶於溶劑之性質。其原因在於:若不可溶於溶劑,則難以製備成樹脂清漆。該橡膠修飾(改質)聚醯胺醯亞胺樹脂較佳為於將樹脂組成物之重量設為100重量份時,以10重量份~40重量份之摻合比率使用。於橡膠修飾(改質)聚醯胺醯亞胺樹脂未達10重量份之情形時,難以提高硬化後之樹脂層之可撓性且變脆,從而容易於樹脂層產生微裂。另一方面,即便超過40重量份地添加橡膠修飾(改質)聚醯胺醯亞胺樹脂亦無特別妨礙,但硬化後之樹脂層之可撓性不會進一步提高,不會實現硬化後之樹脂之高Tg化。因此,可認為若考慮經濟性則40重量份為上限值。 The rubber modified (modified) polyamidoximine resin described above is required to have a solvent-soluble property. The reason for this is that it is difficult to prepare a resin varnish if it is insoluble in a solvent. The rubber modified (modified) polyamidoximine resin is preferably used in a blending ratio of 10 parts by weight to 40 parts by weight when the weight of the resin composition is 100 parts by weight. When the rubber modified (modified) polyamidoximine resin is less than 10 parts by weight, it is difficult to increase the flexibility and embrittlement of the resin layer after hardening, and it is easy to cause microcracking of the resin layer. On the other hand, even if more than 40 parts by weight of the rubber-modified (modified) polyamidoximine resin is added, there is no particular hindrance, but the flexibility of the resin layer after curing is not further improved, and the hardening is not achieved. High Tg of the resin. Therefore, it is considered that 40 parts by weight is an upper limit in consideration of economy.

對E成分之樹脂硬化劑進行敍述。此處所提及之樹脂硬化劑係使用聯苯型酚樹脂、苯酚芳烷基型酚樹脂之1種或2種以上。通常,該樹脂硬化劑之添加量係由對要硬化之樹脂之反應當量自然導出者,並不需要特別之量之限定。然而,本案發明之樹脂組成物之情形時之E成分較佳為於將樹脂組成物設為100重量份時,於20重量份~35重量份之範圍使用。於該E成分未達20重量份之情形時,若考慮上述樹脂組成,則無法獲得充分之硬化狀態,作為硬化後之樹脂無法獲得可撓性。另一方面,於E成分超過35重量份之情形時,有硬化後之樹脂層之耐吸濕特性劣化之傾向,從而欠佳。 The resin hardener of the E component will be described. The resin hardener mentioned here is one or two or more types of a biphenyl type phenol resin and a phenol aralkyl type phenol resin. In general, the amount of the resin hardener added is naturally derived from the reaction equivalent of the resin to be hardened, and no particular amount is required. However, in the case of the resin composition of the present invention, the component E is preferably used in an amount of from 20 parts by weight to 35 parts by weight based on 100 parts by weight of the resin composition. When the amount of the component E is less than 20 parts by weight, in consideration of the above resin composition, a sufficiently hardened state cannot be obtained, and flexibility cannot be obtained as a resin after curing. On the other hand, when the E component exceeds 35 parts by weight, the moisture absorption resistance of the resin layer after curing tends to be deteriorated, which is not preferable.

關於F成分之含磷難燃劑進行敍述。該含磷難燃劑係任意之添加成分,無須有助於樹脂之硬化反應,僅用以大幅提高難燃性。作為此種含磷難燃劑,較佳為使用膦氮烯化合物之無鹵素難燃劑。因此,該F成分係於0重量份~7重量份之範圍使用。此處,記載為「0重量份」之原因在於:明確說明存在無須使用F成分之情形,且F成分為任意之添加成分。 另一方面,即便F成分超過7重量份亦不指望難燃性之明顯之提高。 The phosphorus-containing flame retardant of the F component will be described. The phosphorus-containing flame retardant is an optional component added, and does not need to contribute to the hardening reaction of the resin, and is only used to greatly improve the flame retardancy. As such a phosphorus-containing flame retardant, a halogen-free flame retardant using a phosphazene compound is preferred. Therefore, the F component is used in the range of 0 part by weight to 7 parts by weight. Here, the reason for describing "0 parts by weight" is to clearly indicate that there is no need to use the F component, and the F component is an optional component. On the other hand, even if the F component exceeds 7 parts by weight, no significant improvement in flame retardancy is expected.

較佳為於將上述樹脂組成物重量設為100重量份時,A成分 為3重量份~20重量份,B成分為3重量份~30重量份,C成分為5重量份~50重量份,D成分為10重量份~40重量份,E成分為20重量份~35重量份,F成分為0重量份~7重量份,且於將樹脂組成物重量設為100重量%時,於樹脂組成物中以0.5重量%~3.0重量%之範圍含有源自C成分之磷原子。 Preferably, when the weight of the above resin composition is 100 parts by weight, the component A is preferably 3 parts by weight to 20 parts by weight, component B is 3 parts by weight to 30 parts by weight, component C is 5 parts by weight to 50 parts by weight, component D is 10 parts by weight to 40 parts by weight, and component E is 20 parts by weight to 35 parts by weight. The component of the component is 0 parts by weight to 7 parts by weight, and when the weight of the resin composition is 100% by weight, the phosphorus derived from the component C is contained in the resin composition in an amount of 0.5% by weight to 3.0% by weight. atom.

上述D成分較佳為具備可溶於沸點處於50℃~200℃之範圍之選自甲基乙基酮、二甲基乙醯胺、二甲基甲醯胺之群之1種之單獨溶劑或2種以上之混合溶劑的性質且以液狀橡膠成分修飾(改質)而成之橡膠修飾(改質)聚醯胺醯亞胺樹脂。 Preferably, the component D is a single solvent selected from the group consisting of methyl ethyl ketone, dimethyl acetamide, and dimethylformamide, which is soluble in a boiling point of 50 ° C to 200 ° C or A rubber modified (modified) polyamidoquinone imine resin obtained by modifying (modifying) a liquid rubber component with the properties of two or more kinds of mixed solvents.

作為上述D成分之橡膠修飾(改質)聚醯胺醯亞胺樹脂較佳為藉由使聚醯胺醯亞胺與橡膠性樹脂反應而獲得者。 The rubber-modified (modified) polyamidoximine resin as the component D is preferably obtained by reacting polyamidoximine with a rubber resin.

上述樹脂層較佳為使用如下樹脂組成物(樹脂清漆)而形成:對上述樹脂組成物添加溶劑,製備成樹脂固形物成分量為30重量%~70重量%之範圍,且可形成依據MIL標準中之MIL-P-13949G進行測定時之樹脂溢流量處於1%~30%之範圍的半硬化樹脂層。 The resin layer is preferably formed by using a resin composition (resin varnish) in which a solvent is added to the resin composition to prepare a resin solid content of 30% by weight to 70% by weight, and can be formed according to MIL standards. The semi-hardened resin layer in which the resin overflow flow rate in the measurement of MIL-P-13949G is in the range of 1% to 30%.

上述樹脂層較佳為藉由以如下步驟a、步驟b之次序製備用於形成樹脂層之樹脂清漆,將該樹脂清漆塗佈於銅箔之表面並使之乾燥,而形成為10μm~50μm之厚度之半硬化樹脂層。 Preferably, the resin layer is prepared by preparing a resin varnish for forming a resin layer in the following steps a and b, and applying the resin varnish to the surface of the copper foil and drying it to form a film of 10 μm to 50 μm. A semi-hardened resin layer of thickness.

步驟a:於A成分為3重量份~20重量份、B成分為3重量份~30重量份、C成分為5重量份~50重量份、D成分為10重量份~40重量份、E成分為20重量份~35重量份、F成分為0重量份~7重量份之範圍混合各成分,製成以0.5重量%~3.0重量%之範圍含有源自C成分之磷原子之樹脂組成物。 Step a: 3 parts by weight to 20 parts by weight of component A, 3 parts by weight to 30 parts by weight of component B, 5 parts by weight to 50 parts by weight of component C, and 10 parts by weight to 40 parts by weight of component D, and component E The components are mixed in an amount of from 20 parts by weight to 35 parts by weight, and the component F is from 0 parts by weight to 7 parts by weight to obtain a resin composition containing a phosphorus atom derived from the component C in a range of from 0.5% by weight to 3.0% by weight.

步驟b:使用有機溶劑溶解上述樹脂組成物,製成樹脂固形物成分量為30重量%~70重量%之樹脂清漆。 Step b: The resin composition is dissolved in an organic solvent to obtain a resin varnish having a resin solid content of 30% by weight to 70% by weight.

上述樹脂層係用以形成接著層之樹脂組成物,該接著層用以使內層可撓性印刷配線板多層化,且較佳為由含有以下A成分~E成分之各成分之樹脂組成物所形成。 The resin layer is a resin composition for forming an adhesive layer for multilayering an inner flexible printed wiring board, and is preferably a resin composition containing the following components of the A component to the E component. Formed.

A成分:軟化點為50℃以上之固形狀之高耐熱性環氧樹脂(其中,聯苯型環氧樹脂除外)。 Component A: A high-temperature heat-resistant epoxy resin having a softening point of 50 ° C or higher (excluding a biphenyl type epoxy resin).

B成分:由聯苯型酚樹脂、苯酚芳烷基型酚樹脂之1種或2種以上所構成之環氧樹脂硬化劑。 Component B: an epoxy resin curing agent comprising one or more of a biphenyl type phenol resin and a phenol aralkyl type phenol resin.

C成分:可溶於沸點處於50℃~200℃之範圍之溶劑之橡膠改質聚醯胺醯亞胺樹脂。 Component C: A rubber-modified polyamidoximine resin which is soluble in a solvent having a boiling point in the range of 50 ° C to 200 ° C.

D成分:有機含磷難燃劑。 Component D: Organic phosphorus-containing flame retardant.

E成分:聯苯型環氧樹脂。 Component E: Biphenyl type epoxy resin.

用以形成上述樹脂層之樹脂組成物較佳為除上述A成分~E成分之各成分以外,進而含有含磷難燃性環氧樹脂作為F成分。 The resin composition for forming the resin layer preferably contains a phosphorus-containing flame retardant epoxy resin as the F component in addition to the components of the components A to E described above.

用以形成上述樹脂層之樹脂組成物較佳為進而含有環氧當量為200以下且由選自室溫中為液狀之雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚AD型環氧樹脂之群之1種或2種以上所構成之環氧樹脂作為G成分。 The resin composition for forming the above resin layer preferably further contains a bisphenol A type epoxy resin, a bisphenol F type epoxy resin, and a bisphenol having an epoxy equivalent of 200 or less and a liquid selected from room temperature. An epoxy resin composed of one or two or more types of AD type epoxy resins is used as the G component.

用以形成上述樹脂層之樹脂組成物較佳為進而含有由熱塑性樹脂及/或合成橡膠所構成之低彈性物質作為H成分。 The resin composition for forming the resin layer preferably further contains a low elastic material composed of a thermoplastic resin and/or a synthetic rubber as the H component.

上述A成分之軟化點為50℃以上之固形狀之高耐熱性環氧樹脂較佳為甲酚酚醛清漆型環氧樹脂、苯酚酚醛清漆型環氧樹脂、萘型環氧樹脂之任1種或2種以上。 The high heat resistant epoxy resin having a solid shape of the above component A having a softening point of 50 ° C or higher is preferably one of a cresol novolac type epoxy resin, a phenol novolak type epoxy resin, and a naphthalene type epoxy resin. 2 or more types.

較佳為使用進而含有作為上述A成分之如下高耐熱性環氧樹脂之樹脂組成物來形成上述樹脂層,該高耐熱性環氧樹脂係由室溫下為液狀之酚醛 清漆型環氧樹脂、甲酚酚醛清漆型環氧樹脂、苯酚酚醛清漆型環氧樹脂、萘型環氧樹脂之任1種或2種以上所構成。 It is preferable to form the resin layer by using a resin composition containing the above-mentioned high-temperature epoxy resin as the component A, which is a liquid phenolic aldehyde at room temperature. One or two or more of a varnish type epoxy resin, a cresol novolac type epoxy resin, a phenol novolak type epoxy resin, and a naphthalene type epoxy resin.

較佳為於將用以形成上述樹脂層之樹脂組成物之重量設為100重量份時,A成分為3重量份~30重量份,B成分為13重量份~35重量份,C成分為10重量份~50重量份,D成分為3重量份~16重量份,E成分為5重量份~35重量份。 When the weight of the resin composition for forming the resin layer is 100 parts by weight, the component A is 3 parts by weight to 30 parts by weight, the B component is 13 parts by weight to 35 parts by weight, and the C component is 10 parts. The component D is from 3 parts by weight to 16 parts by weight, and the component E is from 5 parts by weight to 35 parts by weight.

較佳為使用如下樹脂清漆來形成上述樹脂層,該樹脂清漆係 對上述樹脂組成物添加溶劑,製備成樹脂固形物成分量為30重量%~70重量%之範圍者,其特徵在於:於製成半硬化樹脂層時,依據MIL標準中之MIL-P-13949G,於以樹脂厚度55μm測定時之樹脂溢流量為0%~10%之範圍。 It is preferred to form the above resin layer by using a resin varnish which is a resin varnish system. A solvent is added to the resin composition to prepare a resin solid content of 30% by weight to 70% by weight, which is characterized by MIL-P-13949G in the MIL standard when the semi-hardened resin layer is formed. The resin overflow rate when measured at a resin thickness of 55 μm is in the range of 0% to 10%.

上述樹脂層較佳為以如下步驟a、步驟b之次序製備用於形 成樹脂層之樹脂清漆,將該樹脂清漆塗佈於附載體銅箔之表面並使之乾燥,而形成為10μm~80μm之厚度之半硬化樹脂層。 The above resin layer is preferably prepared in the order of the following steps a and b. The resin varnish of the resin layer is applied onto the surface of the copper foil with a carrier and dried to form a semi-hardened resin layer having a thickness of 10 μm to 80 μm.

步驟a:製成於將樹脂組成物重量設為100重量份時,於A成分為3重量份~30重量份、B成分為13重量份~35重量份、C成分為10重量份~50重量份、D成分為3重量份~16重量份、E成分為5重量份~35重量份之範圍含有各成分之樹脂組成物。 Step a: when the weight of the resin composition is 100 parts by weight, the component A is 3 parts by weight to 30 parts by weight, the B component is 13 parts by weight to 35 parts by weight, and the C component is 10 parts by weight to 50 parts by weight. The resin composition of each component is contained in the range of 3 parts by weight to 16 parts by weight of the D component and 5 parts by weight to 35 parts by weight of the E component.

步驟b:使用有機溶劑溶解上述樹脂組成物,製成樹脂固形物成分量為30重量%~70重量%之樹脂清漆。 Step b: The resin composition is dissolved in an organic solvent to obtain a resin varnish having a resin solid content of 30% by weight to 70% by weight.

A成分係軟化點為50℃以上之固形狀之高耐熱性環氧樹 脂。A成分係所謂之玻璃轉移溫度Tg較高之環氧樹脂。採用環氧樹脂中之軟化點為50℃以上之固形狀之高耐熱性環氧樹脂之原因在於:玻璃轉移溫度Tg較高,藉由添加少量即可獲得高耐熱效果。 A component is a high heat resistant epoxy tree with a softening point of 50 ° C or higher. fat. The A component is an epoxy resin having a high glass transition temperature Tg. The reason why a high heat-resistant epoxy resin having a solid shape of a softening point of 50 ° C or more in an epoxy resin is used is that a glass transition temperature Tg is high, and a high heat resistance can be obtained by adding a small amount.

此處所提及之「軟化點為50℃以上之固形狀之高耐熱性環 氧樹脂」較佳為甲酚酚醛清漆型環氧樹脂、苯酚酚醛清漆型環氧樹脂、萘型環氧樹脂之任1種或2種以上。 The high heat resistance ring of the solid shape having a softening point of 50 ° C or more is mentioned here. The oxy-resin is preferably one or more selected from the group consisting of a cresol novolac type epoxy resin, a phenol novolak type epoxy resin, and a naphthalene type epoxy resin.

再者,於A成分中,除上述軟化點為50℃以上之固形狀之 高耐熱性環氧樹脂以外,亦可製成進而含有由酚醛清漆型環氧樹脂、甲酚酚醛清漆型環氧樹脂、苯酚酚醛清漆型環氧樹脂、萘型環氧樹脂之任1種或2種以上所構成之高耐熱性環氧樹脂者。如此,若製成進而含有由室溫中為液狀之酚醛清漆型環氧樹脂、甲酚酚醛清漆型環氧樹脂、苯酚酚醛清漆型環氧樹脂、萘型環氧樹脂之任1種或2種以上所構成之高耐熱性環氧樹脂作為A成分者,即可進一步提高玻璃轉移溫度Tg及提高改善B階段破裂之效果。 Further, in the component A, the solid shape having a softening point of 50 ° C or more is used. In addition to the high heat-resistant epoxy resin, it may be made of any one or two of a novolac type epoxy resin, a cresol novolac type epoxy resin, a phenol novolak type epoxy resin, and a naphthalene type epoxy resin. A high heat resistant epoxy resin composed of the above. In this case, any one or two of a novolac type epoxy resin, a cresol novolak type epoxy resin, a phenol novolac type epoxy resin, and a naphthalene type epoxy resin which are liquid at room temperature are further prepared. When the high heat resistant epoxy resin composed of the above is used as the component A, the glass transition temperature Tg can be further improved and the effect of improving the B-stage cracking can be improved.

而且,A成分較佳為於將樹脂組成物設為100重量份時,於 3重量份~30重量份之範圍使用。於A成分未達3重量份之情形時,難以實現樹脂組成物之高Tg化。另一方面,於A成分超過30重量份之情形時,硬化後之樹脂層變脆,完全損害可撓性故而作為可撓性印刷配線板用途欠佳。A成分更佳為於10重量份~25重量份之範圍使用,藉此可穩定地兼具樹脂組成物之高Tg化與硬化後之樹脂層之良好之可撓性。 Further, the component A is preferably used when the resin composition is 100 parts by weight. It is used in the range of 3 parts by weight to 30 parts by weight. When the amount of the component A is less than 3 parts by weight, it is difficult to achieve high Tg of the resin composition. On the other hand, when the A component exceeds 30 parts by weight, the resin layer after curing becomes brittle, and the flexibility is completely impaired, so that it is not preferable as a flexible printed wiring board. The component A is more preferably used in the range of 10 parts by weight to 25 parts by weight, whereby the high Tg of the resin composition and the good flexibility of the resin layer after curing can be stably achieved.

B成分係由聯苯型酚樹脂、苯酚芳烷基型酚樹脂之1種或2 種以上所構成之環氧樹脂硬化劑。環氧樹脂硬化劑之添加量係由對要硬化之樹脂之反應當量自然導出者,並不需要特別之量之限定。然而,於本案發明之樹脂組成物之情形時,B成分較佳為於將樹脂組成物設為100重量份時,於13重量份~35重量份之範圍使用。於該B成分未達13重量份之情形時,若考慮本案發明之樹脂組成,則無法獲得充分之硬化狀態,無法獲得硬化後之樹脂層之可撓性。另一方面,於B成分超過35重量份之情形時,有硬化後之樹脂層之耐吸濕特性劣化之傾向,從而欠佳。 The B component is one or two of a biphenyl type phenol resin and a phenol aralkyl type phenol resin. An epoxy resin curing agent composed of the above. The amount of the epoxy resin hardener added is naturally derived from the reaction equivalent of the resin to be hardened, and does not require a particular amount. However, in the case of the resin composition of the present invention, the component B is preferably used in the range of 13 parts by weight to 35 parts by weight, based on 100 parts by weight of the resin composition. When the amount of the component B is less than 13 parts by weight, considering the resin composition of the invention of the present invention, a sufficiently hardened state cannot be obtained, and the flexibility of the resin layer after curing cannot be obtained. On the other hand, when the B component exceeds 35 parts by weight, the moisture absorption resistance of the resin layer after curing tends to be deteriorated, which is not preferable.

將聯苯型酚樹脂之具體例示於化25。 A specific example of the biphenyl type phenol resin is shown in Chemical Formula 25.

又,將苯酚芳烷基型酚樹脂之具體例示於化26。 Further, a specific example of the phenol aralkyl type phenol resin is shown in Chemical Formula 26.

C成分係可溶於沸點處於50℃~200℃之範圍之溶劑之橡膠 改質聚醯胺醯亞胺樹脂。藉由摻合該C成分,而提高可撓性性能並且可獲得抑制樹脂流動之效果。該橡膠改質聚醯胺醯亞胺樹脂係使聚醯胺醯亞胺樹脂與橡膠性樹脂反應所獲得者,且以提高聚醯胺醯亞胺樹脂其本身之柔軟性之目的而進行。即,使聚醯胺醯亞胺樹脂與橡膠性樹脂反應,將聚醯胺醯亞胺樹脂之酸成分(環己烷二羧酸等)之一部分取代為橡膠成分。作為橡膠成分,以包含天然橡膠及合成橡膠之概念進行記載,作為後者之合成橡膠有苯乙烯-丁二烯橡膠、丁二烯橡膠、丁基橡膠、乙烯-丙烯橡膠、丙烯腈丁二烯橡膠等。進而,就確保耐熱性之觀點而言,亦為有用的是選擇使用腈橡膠、氯丁二烯橡膠、矽橡膠、胺酯橡膠等具備耐熱性之合成橡膠。關於該等橡膠性樹脂,為了與聚醯胺醯亞胺樹脂反應而製造共聚物,而較理想為於兩末端具備各種官能基者。尤其有用的是使用具有羧基之CTBN(羧基末端丁二烯腈橡膠)。再者,上述橡膠成分可僅使1種共聚合, 亦可使2種以上共聚合。進而,於使用橡膠成分之情形時,就可撓性之穩定化之觀點而言較佳為使用該橡膠成分之數量平均分子量為1000以上者。 The C component is a rubber which is soluble in a solvent having a boiling point in the range of 50 ° C to 200 ° C. Modified polyamidoximine resin. By blending the C component, the flexibility property is improved and the effect of suppressing the flow of the resin can be obtained. The rubber-modified polyamidoximine resin is obtained by reacting a polyamidoximine resin with a rubber resin, and is used for the purpose of improving the flexibility of the polyamide amine imide resin itself. In other words, the polyamidoximine resin is reacted with a rubber resin, and one of the acid components (such as cyclohexanedicarboxylic acid) of the polyamidoximine resin is partially substituted with a rubber component. The rubber component is described in terms of the concept of containing natural rubber and synthetic rubber. As the latter, the synthetic rubber includes styrene-butadiene rubber, butadiene rubber, butyl rubber, ethylene-propylene rubber, and acrylonitrile butadiene rubber. Wait. Further, from the viewpoint of ensuring heat resistance, it is also useful to use a heat-resistant synthetic rubber such as a nitrile rubber, a chloroprene rubber, a ruthenium rubber or an amine ester rubber. In order to produce a copolymer by reacting with a polyamidoximine resin, these rubber-based resins are preferably provided with various functional groups at both ends. It is especially useful to use CTBN (carboxy terminal butadiene nitrile rubber) having a carboxyl group. Furthermore, the above rubber component may be copolymerized by only one type. It is also possible to copolymerize two or more kinds. Further, in the case of using a rubber component, from the viewpoint of stabilizing the flexibility, it is preferred to use a rubber having a number average molecular weight of 1,000 or more.

於使橡膠改質聚醯胺醯亞胺樹脂聚合時,作為用於聚醯胺醯 亞胺樹脂與橡膠性樹脂之溶解之溶劑,較佳為混合使用1種或2種以上之二甲基甲醯胺、二甲基乙醯胺、N-甲基-2-吡咯啶酮、二甲基亞碸、硝基甲烷、硝基乙烷、四氫呋喃、環己酮、甲基乙基酮、乙腈、γ-丁內酯等。而且,為了使聚合反應發生,較佳為採用80℃~200℃之範圍之聚合溫度。於將沸點超過200℃之溶劑用在該等之聚合之情形時,較佳為其後根據用途將溶劑置換成沸點處於50℃~200℃之範圍之溶劑。 When used to polymerize a rubber modified polyamidoximine resin, it is used as a polyamide The solvent in which the imide resin and the rubber resin are dissolved is preferably one or more kinds of dimethylformamide, dimethylacetamide, N-methyl-2-pyrrolidone, and the like. Methyl hydrazine, nitromethane, nitroethane, tetrahydrofuran, cyclohexanone, methyl ethyl ketone, acetonitrile, γ-butyrolactone, and the like. Further, in order to cause a polymerization reaction to occur, a polymerization temperature in the range of 80 ° C to 200 ° C is preferably employed. When a solvent having a boiling point of more than 200 ° C is used in the polymerization, it is preferred to replace the solvent with a solvent having a boiling point in the range of 50 ° C to 200 ° C depending on the application.

此處,作為沸點處於50℃~200℃之範圍之溶劑,可列舉: 選自甲基乙基酮、二甲基乙醯胺、二甲基甲醯胺等之群之1種之單獨溶劑或2種以上之混合溶劑。於沸點未達50℃之情形時,因加熱所引起之溶劑之氣散明顯,於自樹脂清漆之狀態形成半硬化樹脂之情形時,難以獲得良好之半硬化狀態。另一方面,於沸點超過200℃之情形時,於自樹脂清漆之狀態形成半硬化樹脂之情形時,溶劑難以乾燥,故而難以獲得良好之半硬化樹脂層。 Here, as the solvent whose boiling point is in the range of 50 ° C to 200 ° C, for example, A single solvent selected from the group consisting of methyl ethyl ketone, dimethyl acetamide, and dimethylformamide, or a mixed solvent of two or more kinds. When the boiling point is less than 50 ° C, the dispersion of the solvent due to heating is remarkable, and in the case where a semi-hardened resin is formed from the state of the resin varnish, it is difficult to obtain a good semi-hardened state. On the other hand, when the boiling point exceeds 200 ° C, when a semi-hardened resin is formed from the state of the resin varnish, the solvent is difficult to dry, so that it is difficult to obtain a good semi-cured resin layer.

用於本案發明之樹脂組成物之橡膠改質聚醯胺醯亞胺樹脂中,較佳為於將橡膠改質聚醯胺醯亞胺樹脂之重量設為100重量%時,橡膠成分之共聚合量為0.8重量%以上。於該共聚合量未達0.8重量%之情形時,即便形成橡膠改質聚醯胺醯亞胺樹脂,亦缺乏使利用本案發明中所提及之樹脂組成物形成之樹脂層硬化時之可撓性,與銅箔之密接性亦降低故而欠佳。再者,更佳為,該橡膠成分之共聚合量更佳為3重量%以上,進而較佳為5重量%以上。根據經驗,即便共聚合量超過40重量%亦無特別之問題。然而,該硬化後之樹脂層之可撓性之提高效果飽和故而造成資源之浪費從而欠佳。 In the rubber-modified polyamidoximine resin used in the resin composition of the present invention, it is preferred to copolymerize the rubber component when the weight of the rubber-modified polyamidoximine resin is 100% by weight. The amount is 0.8% by weight or more. When the amount of the copolymerization is less than 0.8% by weight, even if a rubber-modified polyamidoximine resin is formed, there is a lack of flexibility in hardening the resin layer formed by the resin composition mentioned in the present invention. Sex, and the adhesion to the copper foil is also reduced, which is not good. Further, more preferably, the amount of the copolymerization of the rubber component is more preferably 3% by weight or more, still more preferably 5% by weight or more. According to experience, there is no particular problem even if the amount of copolymerization exceeds 40% by weight. However, the effect of improving the flexibility of the hardened resin layer is saturated, resulting in waste of resources and thus being poor.

對以上所述之橡膠改質聚醯胺醯亞胺樹脂要求有可溶於溶 劑之性質。其原因在於:若不可溶於溶劑,則難以製備成樹脂清漆。而且,該橡膠改質聚醯胺醯亞胺樹脂係於將樹脂組成物之重量設為100重量份時,以10重量份~50重量份之摻合比率使用。於橡膠改質聚醯胺醯亞胺樹脂未達10重量份之情形時,難以發揮樹脂流動之抑制效果。又,硬化後之樹脂層變脆,難以提高可撓性。其結果為,產生容易產生樹脂層之微裂等影響。另一方面,於超過50重量份地添加橡膠改質聚醯胺醯亞胺樹脂之情形時,向內層電路之埋入性降低,結果容易產生孔隙故而欠佳。 The above-mentioned rubber modified polyamidoximine resin is required to be soluble and soluble. The nature of the agent. The reason for this is that it is difficult to prepare a resin varnish if it is insoluble in a solvent. Further, the rubber-modified polyamidoximine resin is used in a blending ratio of 10 parts by weight to 50 parts by weight when the weight of the resin composition is 100 parts by weight. When the rubber-modified polyamidoximine resin is less than 10 parts by weight, it is difficult to exhibit the effect of suppressing the resin flow. Moreover, the resin layer after hardening becomes brittle, and it is difficult to improve flexibility. As a result, effects such as microcracking of the resin layer are likely to occur. On the other hand, when a rubber-modified polyamidoximine resin is added in an amount of more than 50 parts by weight, the embedding property to the inner layer circuit is lowered, and as a result, voids are likely to occur, which is not preferable.

D成分係有機含磷難燃劑,用以提高難燃性。作為有機含磷 難燃劑,可列舉:由磷酸酯及/或膦氮烯化合物所構成之含磷難燃劑。該D成分較佳為於將樹脂組成物設為100重量份時,於3重量份~16重量份之範圍使用。若將D成分之含量設為未達3重量份,則無法獲得難燃性之效果。另一方面,即便D成分之含量超過16重量份亦不指望難燃性之提高。 再者,D成分之更佳之含量為5重量份~14重量份。 The D component is an organic phosphorus-containing flame retardant for improving flame retardancy. Organic phosphorus Examples of the flame retardant include a phosphorus-containing flame retardant composed of a phosphate ester and/or a phosphazene compound. The component D is preferably used in an amount of from 3 parts by weight to 16 parts by weight per 100 parts by weight of the resin composition. When the content of the component D is less than 3 parts by weight, the effect of flame retardancy cannot be obtained. On the other hand, even if the content of the component D exceeds 16 parts by weight, the improvement in flame retardancy is not expected. Further, a more preferable content of the component D is from 5 parts by weight to 14 parts by weight.

再者,本案發明之樹脂組成物若以於將樹脂組成物重量設為 100重量%時,磷之總含量成為0.5重量%~5重量%之範圍之方式添加,則確保難燃性故而較佳。 Furthermore, the resin composition of the present invention is such that the weight of the resin composition is set When 100% by weight is added, the total content of phosphorus is added in the range of 0.5% by weight to 5% by weight, and it is preferable to ensure flame retardancy.

E成分係聯苯型環氧樹脂。聯苯型環氧樹脂有助於所謂之玻 璃轉移溫度Tg之提高與彎曲性之提高。聯苯型環氧樹脂可列舉聯苯芳烷基型環氧樹脂。該E成分較佳為於將樹脂組成物設為100重量份時,於5重量份~35重量份之範圍使用。若將E成分之含量設為未達5重量份,則無法獲得提高玻璃轉移溫度Tg及彎曲性之效果。另一方面,即便E成分之含量超過35重量份,亦不指望高Tg化,而且不指望彎曲性之提高。再者,E成分之更佳之含量為7重量份~25重量份。 The E component is a biphenyl type epoxy resin. Biphenyl type epoxy resin contributes to the so-called glass The glass transition temperature Tg is improved and the bendability is improved. Examples of the biphenyl type epoxy resin include a biphenyl aralkyl type epoxy resin. The component E is preferably used in an amount of from 5 parts by weight to 35 parts by weight, based on 100 parts by weight of the resin composition. When the content of the component E is less than 5 parts by weight, the effect of improving the glass transition temperature Tg and the bendability cannot be obtained. On the other hand, even if the content of the component E exceeds 35 parts by weight, high Tg is not expected, and improvement in bendability is not expected. Further, a more preferable content of the component E is from 7 parts by weight to 25 parts by weight.

若製成除上述A成分~E成分以外進而含有作為F成分之含 磷難燃性環氧樹脂的樹脂組成物,則可進一步提高難燃性。所謂含磷難燃性環氧樹脂係於環氧骨架中含有磷之環氧樹脂之總稱,係所謂之無鹵素系之難燃性環氧樹脂。而且,只要為於將樹脂組成物重量設為100重量%時,可將本申請案之樹脂組成物之磷原子含量、即源自F成分之磷原子設為0.1重量%~5重量%之範圍的含磷難燃性環氧樹脂,則任一者均可使用。然而,使用即為9,10-二氫-9-氧雜-10-磷雜菲-10-氧化物衍生物之於分子內具備2個以上環氧基之含磷難燃性環氧樹脂一事,由於半硬化狀態下之樹脂品質之穩定性優異,同時難燃性效果較高故而較佳。將9,10-二氫-9-氧雜-10-磷雜菲-10-氧化物之結構式示於化27以作參考。 In addition to the above components A to E, it is contained as a component of the F component. The resin composition of the phosphorus flame retardant epoxy resin can further improve the flame retardancy. The phosphorus-containing flame retardant epoxy resin is a general term for epoxy resins containing phosphorus in an epoxy skeleton, and is a so-called halogen-free flame retardant epoxy resin. In addition, when the weight of the resin composition is 100% by weight, the phosphorus atom content of the resin composition of the present application, that is, the phosphorus atom derived from the F component may be in the range of 0.1% by weight to 5% by weight. Any of the phosphorus-containing flame retardant epoxy resins can be used. However, the use of a 9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide derivative for a phosphorus-containing flame retardant epoxy resin having two or more epoxy groups in the molecule is used. It is preferable because the stability of the resin quality in the semi-hardened state is excellent and the flame retardancy effect is high. The structural formula of 9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide is shown in Figure 27 for reference.

即為該9,10-二氫-9-氧雜-10-磷雜菲-10-氧化物衍 生物之於分子內具備2個以上環氧基之含磷難燃性環氧樹脂較佳為於使萘醌或對苯二酚與9,10-二氫-9-氧雜-10-磷雜菲-10-氧化物反應並製成以下之化28或化29所示之化合物後,使環氧樹脂與其OH基之部分反應而製成含磷難燃性環氧樹脂者。 That is, the 9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide derivative The phosphorus-containing flame-retardant epoxy resin having two or more epoxy groups in the molecule is preferably such that naphthoquinone or hydroquinone is substituted with 9,10-dihydro-9-oxa-10-phosphonium. After the phenanthrene-10-oxide is reacted and formed into the compound represented by the following 28 or 29, the epoxy resin is reacted with a part of the OH group to prepare a phosphorus-containing flame retardant epoxy resin.

[化28] [化28]

而且,若具體例示即為9,10-二氫-9-氧雜-10-磷雜菲 -10-氧化物衍生物之於分子內具備2個以上環氧基之含磷難燃性環氧樹脂,則較佳為使用具備化30、化31或化32所示之結構式之化合物。 Moreover, if specifically exemplified, it is 9,10-dihydro-9-oxa-10-phosphaphenanthrene When the 10-oxide derivative is a phosphorus-containing flame retardant epoxy resin having two or more epoxy groups in the molecule, it is preferred to use a compound having a structural formula represented by Chemical Formula 30, Chemical Formula 31 or Chemical Formula 32.

[化30] [化30]

[化31] [化31]

[化32] [化32]

此處使用含磷難燃性環氧樹脂之情形時之樹脂組成物可單 獨使用作為F成分之含磷難燃性環氧樹脂之1種,亦可混合使用2種以上含磷難燃性環氧樹脂。然而,較佳為考慮作為F成分之含磷難燃性環氧樹脂之總量,以於將樹脂組成物重量設為100重量%時,使源自F成分之磷原 子成為0.1重量%~5重量%之範圍之方式添加。含磷難燃性環氧樹脂根據其種類而於環氧骨架內含有之磷原子量不同。因此,可如上所述規定磷原子之含量來代替F成分之添加量。然而,F成分通常係於將樹脂組成物設為100重量份時,於5重量份~50重量份之範圍使用。於F成分未達5重量份之情形時,若考慮其他樹脂成分之摻合比率,則難以將源自F成分之磷原子設為0.1重量%以上,無法獲得難燃性之提高效果。另一方面,即便F成分超過50重量份,難燃性提高效果亦飽和,同時硬化後之樹脂層變脆故而欠佳。 The resin composition in the case where a phosphorus-containing flame retardant epoxy resin is used herein may be One type of phosphorus-containing flame retardant epoxy resin as the F component may be used alone, and two or more types of phosphorus-containing flame retardant epoxy resins may be used in combination. However, it is preferable to consider the total amount of the phosphorus-containing flame retardant epoxy resin as the F component, so that the phosphorus component derived from the F component is obtained when the weight of the resin composition is 100% by weight. The amount is added so as to be in the range of 0.1% by weight to 5% by weight. The phosphorus-containing flame retardant epoxy resin differs in the amount of phosphorus atoms contained in the epoxy skeleton depending on the type thereof. Therefore, the content of the phosphorus atom can be specified as described above instead of the addition amount of the F component. However, the F component is usually used in the range of 5 parts by weight to 50 parts by weight when the resin composition is 100 parts by weight. When the blending ratio of the other resin component is considered in the case where the F component is less than 5 parts by weight, it is difficult to obtain the phosphorus atom derived from the F component to be 0.1% by weight or more, and the effect of improving the flame retardancy cannot be obtained. On the other hand, even if the F component exceeds 50 parts by weight, the flame retardancy improving effect is saturated, and the resin layer after curing becomes brittle and is not preferable.

所謂上述之硬化樹脂之「高Tg化」與「可撓性」通常為呈 反比例之特性。此時,含磷難燃性環氧樹脂存在有助於硬化後之樹脂層之可撓性之提高者、有助於高Tg化者。因此,與其使用一種含磷難燃性環氧樹脂,不如平衡良好地摻合「有助於高Tg化之含磷難燃性環氧樹脂」與「有助於可撓性之提高之含磷難燃性環氧樹脂」來使用,藉此可製成適於可撓性印刷配線板用途之樹脂組成物。 The "high Tg" and "flexibility" of the above-mentioned hardened resin are usually Anti-proportional characteristics. In this case, the phosphorus-containing flame retardant epoxy resin has an improvement in flexibility of the resin layer which contributes to hardening, and contributes to high Tg. Therefore, instead of using a phosphorus-containing flame retardant epoxy resin, it is better to blend well with the "phosphorus-containing flame retardant epoxy resin which contributes to high Tg" and "phosphorus which contributes to the improvement of flexibility". A flame retardant epoxy resin is used, whereby a resin composition suitable for use in a flexible printed wiring board can be obtained.

本案發明之樹脂組成物亦可製成進而含有環氧當量為200 以下且由選自室溫中為液狀之雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚AD型環氧樹脂之群之1種或2種以上所構成之環氧樹脂作為G成分者。 此處,選擇使用雙酚系環氧樹脂之原因在於:與C成分(橡膠改質聚醯胺醯亞胺樹脂)之相容性良好,容易對半硬化樹脂層賦予適度之可撓性。而且,若環氧當量超過200,則樹脂於室溫中成為半固形,半硬化狀態下之可撓性減少故而欠佳。進而,只要為上述雙酚系環氧樹脂,則可單獨使用1種亦可混合2種以上使用。而且,於混合使用2種以上之情形時,關於其混合比亦無特別之限定。 The resin composition of the invention of the present invention can also be made to further contain an epoxy equivalent of 200 In the following, an epoxy resin composed of one or more selected from the group consisting of a bisphenol A type epoxy resin, a bisphenol F type epoxy resin, and a bisphenol AD type epoxy resin which are liquid at room temperature As a G component. Here, the reason why the bisphenol epoxy resin is selected to be used is that it has good compatibility with the component C (rubber-modified polyamidoximine resin), and it is easy to impart appropriate flexibility to the semi-hardened resin layer. Further, when the epoxy equivalent exceeds 200, the resin becomes semi-solid at room temperature, and the flexibility in the semi-hardened state is reduced, which is not preferable. Further, the bisphenol-based epoxy resin may be used singly or in combination of two or more kinds. Further, when two or more kinds are used in combination, the mixing ratio thereof is not particularly limited.

該G成分之環氧樹脂係於將樹脂組成物設為100重量份 時,以2重量份~15重量份之摻合比率使用,此充分發揮熱硬化性,於半 硬化狀態中可減少被稱為捲曲(curl)之翹曲現象之產生,又,可實現半硬化狀態下之樹脂層之可撓性之進一步之提高故而較佳。若該環氧樹脂超過15重量份,則就與其他樹脂成分之平衡而言有難燃性降低或硬化後之樹脂層變硬之傾向。而且,若考慮C成分(橡膠改質聚醯胺醯亞胺樹脂)之添加量,則作為硬化後之樹脂層難以獲得充分之韌性。 The epoxy resin of the G component is set to 100 parts by weight of the resin composition When it is used in a blending ratio of 2 parts by weight to 15 parts by weight, this fully exerts thermosetting property in half In the hardened state, the occurrence of a warp phenomenon called curl can be reduced, and further, the flexibility of the resin layer in a semi-hardened state can be further improved. When the epoxy resin exceeds 15 parts by weight, the flame retardancy is lowered or the resin layer after hardening tends to be hard in balance with other resin components. Further, when the amount of addition of the component C (rubber-modified polyamidoximine resin) is considered, it is difficult to obtain sufficient toughness as the resin layer after curing.

本案發明之樹脂組成物亦可製成進而含有由熱塑性樹脂及 /或合成橡膠所構成之低彈性物質作為H成分者。藉由製成含有H成分之樹脂組成物,可防止樹脂組成物之半硬化狀態中之破裂,且提高硬化後之可撓性。作為該H成分之低彈性物質,例如可列舉:丙烯腈丁二烯橡膠、丙烯酸橡膠(丙烯酸酯共聚物)、聚丁二烯橡膠、異戊二烯、氫化型聚丁二烯、聚乙烯丁醛、聚醚碸、苯氧基、高分子環氧、芳香族聚醯胺。自該等之中可單獨使用1種,亦可混合使用2種以上。尤佳為使用丙烯腈丁二烯橡膠。於丙烯腈丁二烯橡膠中,若為羧基改質物,則與環氧樹脂建立交聯結構,而可提高硬化後之樹脂層之可撓性。作為羧基改質物,較佳為使用羧基末端腈丁二烯橡膠(CTBN)、羧基末端丁二烯橡膠(CTB)、羧基改質腈丁二烯橡膠(C-NBR)。 The resin composition of the invention of the present invention can also be made into a thermoplastic resin and / or a low-elastic substance composed of synthetic rubber as the H component. By forming the resin composition containing the H component, cracking in the semi-hardened state of the resin composition can be prevented, and flexibility after curing can be improved. Examples of the low elastic material of the H component include acrylonitrile butadiene rubber, acrylic rubber (acrylate copolymer), polybutadiene rubber, isoprene, hydrogenated polybutadiene, and polyvinyl butadiene. Aldehyde, polyether oxime, phenoxy group, polymer epoxy, aromatic polyamine. One type may be used alone or two or more types may be used in combination. It is especially preferred to use acrylonitrile butadiene rubber. In the case of the acrylonitrile butadiene rubber, if it is a carboxyl group-modified material, a crosslinked structure is formed with the epoxy resin, and the flexibility of the resin layer after curing can be improved. As the carboxyl group-modified material, a carboxyl terminal nitrile butadiene rubber (CTBN), a carboxyl terminal butadiene rubber (CTB), or a carboxyl-modified nitrile butadiene rubber (C-NBR) is preferably used.

H成分較佳為於將樹脂組成物設為100重量份時,以25重 量份以下之摻合比率使用。若添加超過25重量份之量之H成分,則產生玻璃轉移溫度Tg之降低、焊料耐熱性能之降低、剝離強度之降低、熱膨脹係數之增大等問題故而欠佳。 The H component is preferably 25 weights when the resin composition is 100 parts by weight. The blending ratio below the amount is used. When the amount of the H component exceeds 25 parts by weight, the glass transition temperature Tg is lowered, the solder heat resistance is lowered, the peel strength is lowered, and the thermal expansion coefficient is increased, which is not preferable.

本案發明之樹脂組成物係藉由組合上述A成分~E成分,而 可提高難燃性及使玻璃轉移溫度Tg變高,又,防止耐折性之熱劣化。而且,不添加如先前之接著劑用樹脂組成物般之無機填充劑,即可獲得充分之彎曲性。進而,可防止半硬化狀態下之破裂或衝壓加工時之落粉。 The resin composition of the invention of the present invention is obtained by combining the above components A to E. The flame retardancy can be improved, the glass transition temperature Tg can be increased, and thermal deterioration of the folding endurance can be prevented. Further, sufficient flexibility can be obtained without adding an inorganic filler such as the resin composition of the prior adhesive. Further, it is possible to prevent cracking in a semi-hardened state or powder falling during press working.

本案發明之樹脂清漆:本案發明之樹脂清漆係對上述樹脂組 成物添加溶劑,製備成樹脂固形物成分量為30重量%~70重量%之範圍者。而且,藉由該樹脂清漆而形成之半硬化樹脂層之特徵在於:依據MIL標準中之MIL-P-13949G,於將樹脂厚度設為55μm進行測定時之樹脂溢流量處於0%~10%之範圍。作為此處所提及之溶劑,較佳為使用上述作為沸點處於50℃~200℃之範圍之溶劑的選自甲基乙基酮、二甲基乙醯胺、二甲基甲醯胺等之群之1種之單獨溶劑或2種以上之混合溶劑。此係為了獲得如上所述良好之半硬化樹脂層。而且,此處所示之樹脂固形物成分量之範圍係於塗佈於銅箔之表面時,可將膜厚控制為精度最佳者之範圍。於樹脂固形物成分未達30重量%之情形時,黏度過低,於剛塗佈於銅箔表面後會流動而難以確保膜厚均勻性。相對於此,若樹脂固形物成分超過70重量%,則黏度變高,難以於銅箔表面形成薄膜。 The resin varnish of the invention of the present invention: the resin varnish of the invention of the present invention is the above resin group The solvent is added to the product to prepare a resin solid content of 30% by weight to 70% by weight. Further, the semi-cured resin layer formed by the resin varnish is characterized in that the resin overflow amount at the time of measuring the resin thickness of 55 μm is 0% to 10% in accordance with MIL-P-13949G in the MIL standard. range. As the solvent mentioned herein, it is preferred to use a solvent selected from the group consisting of methyl ethyl ketone, dimethyl acetamide, dimethylformamide, etc. as a solvent having a boiling point in the range of 50 ° C to 200 ° C. One type of the solvent alone or a mixture of two or more types. This is to obtain a good semi-hardened resin layer as described above. Further, the range of the amount of the resin solid content shown here is such that when applied to the surface of the copper foil, the film thickness can be controlled to the range of the best accuracy. When the resin solid content is less than 30% by weight, the viscosity is too low, and it flows immediately after application to the surface of the copper foil, and it is difficult to ensure uniformity of film thickness. On the other hand, when the resin solid content exceeds 70% by weight, the viscosity is high, and it is difficult to form a film on the surface of the copper foil.

該樹脂清漆於使用其而形成半硬化樹脂層時,所測定之樹脂溢流量較佳為處於0%~10%之範圍。若該樹脂溢流量較高,則使用附樹脂銅箔之樹脂層而形成之絕緣層之厚度變得不均勻。然而,本案發明之樹脂清漆可將樹脂溢流量控制為10%以下之較低之值。再者,本案發明之樹脂清漆可實現幾乎不會產生樹脂流動之等級,故而將該樹脂溢流量之下限值設為0%。再者,本案發明之樹脂清漆之樹脂溢流量之更佳之範圍為0%~5%。 When the resin varnish is used to form a semi-hardened resin layer, the measured resin overflow amount is preferably in the range of 0% to 10%. If the resin overflow rate is high, the thickness of the insulating layer formed using the resin layer of the resin copper foil becomes uneven. However, the resin varnish of the present invention can control the resin overflow rate to a lower value of 10% or less. Further, the resin varnish of the present invention can achieve a level in which resin flow hardly occurs, so the lower limit of the resin overflow flow rate is set to 0%. Further, the resin overcoat of the resin varnish of the present invention has a better range of resin overflow of 0% to 5%.

於本案說明書中,所謂樹脂溢流量,係依據MIL標準中之MIL-P-13949G,自將樹脂厚度設為55μm之附樹脂銅箔取樣4片10cm見方試樣,將該4片試樣於重疊之狀態(積層體)下於加壓溫度171℃、加壓壓力14kgf/cm2、加壓時間10分鐘之條件下貼合,測定此時之樹脂流出重量,並根據該結果基於數1算出之值。 In the present specification, the resin overflow is based on MIL-P-13949G in the MIL standard, and four 10 cm square samples are sampled from a resin-coated copper foil having a resin thickness of 55 μm, and the four samples are overlapped. The state (layered body) was bonded under the conditions of a pressurization temperature of 171 ° C, a pressurization pressure of 14 kgf / cm 2 , and a pressurization time of 10 minutes, and the resin outflow weight at this time was measured, and based on the result, it was calculated based on the number 1. value.

[數1] [Number 1]

又,上述樹脂層亦可含有2重量份~50重量份之可溶於溶 劑且於分子內具有作為官能基之羥基、羧基、胺基之1種或2種以上之聚合物成分、以及50重量份以上之由沸點200℃以上之環氧樹脂及沸點200℃以上之胺系環氧樹脂硬化劑所構成之環氧樹脂摻合物。上述樹脂層亦可為氟樹脂基材或氟樹脂膜接著用樹脂。又,上述聚合物成分亦可為將選自聚乙烯縮醛樹脂、苯氧樹脂、芳香族聚醯胺樹脂、聚醚碸樹脂、聚醯胺醯亞胺樹脂之群之1種或2種以上混合而成者。上述沸點200℃以上之環氧樹脂亦可為將選自雙酚A型環氧樹脂、雙酚F型環氧樹脂、橡膠改質雙酚A型環氧樹脂、聯苯型環氧樹脂之群之1種或2種以上混合而成者。 Further, the resin layer may contain 2 parts by weight to 50 parts by weight of the soluble solution. And a polymer component having one or two or more kinds of a hydroxyl group, a carboxyl group, and an amine group as a functional group in the molecule, and an epoxy resin having a boiling point of 200 ° C or higher and an amine having a boiling point of 200 ° C or more in an amount of 50 parts by weight or more An epoxy resin blend composed of an epoxy resin hardener. The resin layer may be a fluororesin base material or a fluororesin film followed by a resin. In addition, the polymer component may be one or more selected from the group consisting of a polyvinyl acetal resin, a phenoxy resin, an aromatic polyamine resin, a polyether oxime resin, and a polyamidoximine resin. Mixed by. The epoxy resin having a boiling point of 200 ° C or higher may be a group selected from the group consisting of bisphenol A type epoxy resin, bisphenol F type epoxy resin, rubber modified bisphenol A type epoxy resin, and biphenyl type epoxy resin. One type or two or more types are mixed.

上述胺系環氧樹脂硬化劑亦可使用選自芳香族多胺、聚醯胺類及使該等與環氧樹脂或多元羧酸聚合或縮合所獲得之胺加成物之群之1種或2種以上。 The amine-based epoxy resin curing agent may be one selected from the group consisting of aromatic polyamines, polyamines, and amine adducts obtained by polymerizing or condensing these epoxy resins or polycarboxylic acids. 2 or more types.

再者,所謂上述氟樹脂基材或氟樹脂膜,亦可為使用有由「選 自PTFE(聚四氟乙烯(4氟化))、PFA(四氟乙烯-全氟烷基乙烯基醚共聚物)、FEP(四氟乙烯-六氟丙烯共聚物(4.6氟化))、ETFE(四氟乙烯-乙烯共聚物)、PVDF(聚偏二氟乙烯(2氟化))、PCTFE(聚氯三氟乙烯(3氟化))、聚芳碸、芳香族多硫化物及芳香族聚醚之中之任意至少1種熱塑性樹脂」與「氟樹脂」所構成之氟系樹脂等的基材或膜。可含有玻璃布等骨架材料亦可不含玻璃布等骨架材料。又,關於該氟樹脂基材之厚度,亦無特別之限定。 Furthermore, the fluororesin base material or the fluororesin film may be selected from the use From PTFE (polytetrafluoroethylene (4 fluorinated)), PFA (tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer), FEP (tetrafluoroethylene-hexafluoropropylene copolymer (4.6 fluorinated)), ETFE (tetrafluoroethylene-ethylene copolymer), PVDF (polyvinylidene fluoride (2-fluorinated)), PCTFE (polychlorotrifluoroethylene (3 fluorinated)), polyarsenic, aromatic polysulfide and aromatic A substrate or a film such as a fluorine-based resin composed of at least one of a polyether and a "fluororesin". It may contain a skeleton material such as glass cloth or may not contain a skeleton material such as glass cloth. Further, the thickness of the fluororesin base material is not particularly limited.

又,作為上述硬化劑,若僅以使之硬化為目的,則可使用二 氰二胺、咪唑類、芳香族胺等胺類、雙酚A、溴化雙酚A等酚類、苯酚酚醛清漆樹脂及甲酚酚醛清漆樹脂等酚醛清漆類、鄰苯二甲酸酐等酸酐等所 有硬化劑。該等硬化劑對環氧樹脂尤其有效。然而,就明顯提高氟樹脂基材與金屬箔之密接性之觀點而言,尤佳為使用沸點200℃以上之胺系環氧樹脂硬化劑。若加壓成形溫度為180℃附近,且於該加壓成形溫度附近存在硬化劑之沸點,則環氧樹脂硬化劑會因為加壓成形而沸騰故而容易於已硬化之絕緣樹脂層內產生氣泡。而且,若使用胺系環氧樹脂硬化劑以於氟樹脂基材與金屬箔之間構成接著層,則可獲得最穩定之密接性。即,所謂「沸點200℃以上之胺系環氧樹脂硬化劑」,係指使用選自芳香族多胺、聚醯胺類及使該等與環氧樹脂或多元羧酸聚合或縮合所獲得之胺加成物之群之一種或二種以上的情形。而且,若對此更具體而言,則較佳為使用4,4'-二胺基聯伸苯碸、3,3'-二胺基聯伸苯碸、4,4-二胺基二苯基甲烷、2,2-雙[4-(4-胺基苯氧基)苯基]丙烷、雙[4-(4-胺基苯氧基)苯基]碸之任一者。 又,該胺系環氧樹脂硬化劑相對於環氧樹脂之添加量係自各自之當量自然導出者,故而可認為原本就無嚴格地清楚記載其摻合比率之必要性。因此,於本案發明中,並未特別限定硬化劑之添加量。 Further, as the above-mentioned curing agent, it is possible to use only two for the purpose of hardening it. Amines such as cyanide diamine, imidazoles, and aromatic amines, phenols such as bisphenol A and brominated bisphenol A, novolacs such as phenol novolac resin and cresol novolak resin, and anhydrides such as phthalic anhydride Place There is a hardener. These hardeners are especially effective for epoxy resins. However, from the viewpoint of remarkably improving the adhesion between the fluororesin base material and the metal foil, it is particularly preferable to use an amine-based epoxy resin curing agent having a boiling point of 200 ° C or higher. When the press molding temperature is in the vicinity of 180 ° C and the boiling point of the curing agent is present in the vicinity of the press molding temperature, the epoxy resin hardener is boiled by press molding, so that bubbles are easily generated in the cured insulating resin layer. Further, when an amine-based epoxy resin curing agent is used to form an adhesive layer between the fluororesin base material and the metal foil, the most stable adhesiveness can be obtained. In other words, the "amine-based epoxy resin curing agent having a boiling point of 200 ° C or higher" is obtained by using an aromatic polyamine or a polyamine, and polymerizing or condensing the epoxy resin or the polyvalent carboxylic acid. One or more of the group of amine adducts. Moreover, if more specifically, it is preferred to use 4,4'-diamine-based benzoquinone, 3,3'-diamine-based phenylhydrazine, 4,4-diaminodiphenyl. Any of methane, 2,2-bis[4-(4-aminophenoxy)phenyl]propane, and bis[4-(4-aminophenoxy)phenyl]anthracene. Further, since the amount of the amine-based epoxy resin curing agent added to the epoxy resin is naturally derived from the respective equivalents, it is considered that the necessity of blending the ratio is not strictly described. Therefore, in the invention of the present invention, the amount of addition of the curing agent is not particularly limited.

又,亦較佳為使用視需要適量添加之硬化促進劑。此處所提 及之硬化促進劑係三級胺、咪唑、脲系硬化促進劑等。於本案發明中,該硬化促進劑之摻合比率並未特別設限。其原因在於:硬化促進劑係考慮加壓加工時之加熱條件等,製造者任意地選擇性地規定添加量即可者。 Further, it is also preferred to use a curing accelerator which is added in an appropriate amount as needed. As mentioned here The hardening accelerator is a tertiary amine, an imidazole, a urea-based hardening accelerator, and the like. In the invention of the present invention, the blending ratio of the hardening accelerator is not particularly limited. The reason for this is that the curing accelerator is a heating condition at the time of press working, and the like, and the manufacturer can arbitrarily specify the amount of addition.

而且,上述樹脂層亦較佳為含有橡膠性樹脂。此處所提及之橡膠性樹脂,係以包含天然橡膠及合成橡膠之概念記載,作為後者之合成橡膠有苯乙烯-丁二烯橡膠、丁二烯橡膠、丁基橡膠、乙烯-丙烯橡膠等。進而,於要求耐熱性之情形時,亦為有用的是選擇使用腈橡膠、氯丁二烯橡膠、矽橡膠、胺酯橡膠等耐熱性合成橡膠。關於該等橡膠性樹脂,為了與上述聚合物成分反應而形成共聚物,而較理想為於兩末端具備各種官能基者。 Further, the resin layer preferably contains a rubber resin. The rubbery resin mentioned here is described by the concept including natural rubber and synthetic rubber, and the latter synthetic rubber includes styrene-butadiene rubber, butadiene rubber, butyl rubber, ethylene-propylene rubber, and the like. . Further, in the case where heat resistance is required, it is also useful to use a heat resistant synthetic rubber such as a nitrile rubber, a chloroprene rubber, a ruthenium rubber or an amine ester rubber. In order to form a copolymer by reacting with the above polymer component, it is preferred that these rubber resins have various functional groups at both ends.

進而,亦較佳為視需要添加上述高分子聚合物之交聯劑來使 用。例如,於使用聚乙烯縮醛樹脂作為上述高分子聚合物之情形時,使用胺酯樹脂作為交聯材料等。 Further, it is also preferred to add a crosslinking agent of the above polymer as needed to make use. For example, when a polyvinyl acetal resin is used as the above polymer, an amine ester resin is used as a crosslinking material or the like.

上述樹脂層之樹脂組成物之構成成分亦可採用於將樹脂組 成物設為100重量份時,環氧樹脂為50重量份~80重量份、硬化劑為1重量份~15重量份、硬化促進劑為0.01重量份~1.0重量份、聚合物成分為2重量份~50重量份、交聯劑為1重量份~5重量份、橡膠性樹脂為1重量份~10重量份之範圍之組成。只要包含於該組成範圍,則維持氟樹脂基材與金屬箔之良好之密接性,且使製品之密接性之不均變少。 The constituent component of the resin composition of the above resin layer may also be used in the resin group When the content is 100 parts by weight, the epoxy resin is 50 parts by weight to 80 parts by weight, the curing agent is 1 part by weight to 15 parts by weight, the hardening accelerator is 0.01 parts by weight to 1.0 part by weight, and the polymer component is 2 parts by weight. The composition is in the range of from 1 part by weight to 5 parts by weight, and the rubber resin is from 1 part by weight to 10 parts by weight. When it is contained in this composition range, the good adhesion between the fluororesin base material and the metal foil is maintained, and the unevenness of the adhesion of the product is reduced.

上述樹脂層亦可為使用由5~50重量份之環氧樹脂(含硬化 劑)、50~95重量份之聚醚碸樹脂(於末端具有羥基或胺基且可溶於溶劑者)、及視需要適量添加之硬化促進劑所構成之樹脂混合物而形成者或使該樹脂混合物半硬化而成者。 The above resin layer may also be used in an amount of 5 to 50 parts by weight of epoxy resin (including hardening) Or a resin mixture composed of 50 to 95 parts by weight of a polyether oxime resin (having a hydroxyl group or an amine group at the terminal and soluble in a solvent), and an appropriate amount of a hardening accelerator added as needed The mixture is semi-hardened.

上述樹脂層係自銅箔側依序具有第1熱硬化性樹脂層、及位 於該第1熱硬化性樹脂層之表面之第2熱硬化性樹脂層者,第1熱硬化性樹脂層係由不溶解於配線板製造製程中之除膠渣處理時之藥品之樹脂成分所形成者,第2熱硬化性樹脂層可為使用溶解於配線板製造製程中之除膠渣處理時之藥品且可洗淨去除之樹脂而形成者。上述第1熱硬化性樹脂層亦可為使用混合有聚醯亞胺樹脂、聚醚碸、聚苯醚之任一種或2種以上之樹脂成分而形成者。上述第2熱硬化性樹脂層亦可為使用環氧樹脂成分而形成者。上述第1熱硬化性樹脂層之厚度t1(μm)係於將附載體銅箔之粗化面粗糙度設為Rz(μm)、第2熱硬化性樹脂層之厚度設為t2(μm)時,t1較佳為滿足Rz<t1<t2之條件之厚度。 The resin layer has a first thermosetting resin layer and a bit in order from the copper foil side. In the second thermosetting resin layer on the surface of the first thermosetting resin layer, the first thermosetting resin layer is a resin component of a drug which is not dissolved in the desmear treatment in the wiring board manufacturing process. In the form of a mold, the second thermosetting resin layer can be formed by using a resin which is dissolved in a desmear treatment process in a wiring board manufacturing process and can be washed and removed. The first thermosetting resin layer may be formed by using any one or two or more kinds of resin components in which a polyimine resin, a polyether oxime, or a polyphenylene ether is mixed. The second thermosetting resin layer may be formed by using an epoxy resin component. The thickness t1 (μm) of the first thermosetting resin layer is when the roughened surface roughness of the copper foil with a carrier is Rz (μm) and the thickness of the second thermosetting resin layer is t2 (μm). , t1 is preferably a thickness satisfying the condition of Rz < t1 < t2.

上述樹脂層亦可為使樹脂含浸於骨架材料而成之預浸體。上述含浸於骨架材料之樹脂較佳為熱硬化性樹脂。上述預浸體亦可為公知之 預浸體或用於製造印刷配線板之預浸體。上述預浸體亦可為藉由具有以下步驟之製造方法所製造而成之預浸體。1.液體樹脂被膜形成步驟,其使用液體狀之熱硬化性樹脂,於平坦之工作平面之上以規定厚度之被膜之形式形成液體樹脂層。2.預乾燥步驟,其藉由使處於工作平面上之液體樹脂層於該狀態下乾燥而形成乾燥樹脂層。3.骨架材料預接著步驟,其藉由於處於工作平面上之上述乾燥樹脂層之表面重疊骨架材料,進行預加熱並進行壓接而形成附骨架材料之乾燥樹脂層。4.樹脂含浸步驟,其於在工作平面上載置附骨架材料之乾燥樹脂層之狀態下,以樹脂可再流動之溫度進行加熱,從而使熱硬化性樹脂成分含浸於該骨架材料。5.冷卻步驟,其係一旦結束樹脂含浸,則立即進行降溫操作而不使熱硬化性樹脂完全硬化,維持含浸於骨架材料之熱硬化性樹脂之半硬化狀態而成為預浸體狀態。 The resin layer may be a prepreg obtained by impregnating a resin with a skeleton material. The resin impregnated with the skeleton material is preferably a thermosetting resin. The above prepreg can also be known Prepreg or prepreg used to make printed wiring boards. The prepreg may be a prepreg manufactured by a manufacturing method having the following steps. A liquid resin film forming step of forming a liquid resin layer in the form of a film having a predetermined thickness on a flat working surface using a liquid thermosetting resin. 2. A pre-drying step of forming a dry resin layer by drying the liquid resin layer on the working plane in this state. 3. A pre-step of a skeleton material by pre-heating and crimping the surface of the dried resin layer on the working plane to form a dry resin layer with a skeleton material. 4. A resin impregnation step of heating a thermosetting resin component in a state in which a resin is reflowable in a state in which a dry resin layer of a skeleton material is placed on a working plane, thereby impregnating the matrix material. 5. The cooling step, when the resin impregnation is completed, immediately performs a temperature lowering operation without completely curing the thermosetting resin, and maintains a semi-hardened state of the thermosetting resin impregnated with the skeleton material to be in a prepreg state.

上述骨架材料亦可含有聚芳醯胺纖維或玻璃纖維或全芳香 族聚酯纖維。上述骨架材料較佳為聚芳醯胺纖維或玻璃纖維或全芳香族聚酯纖維之不織布或織布。又,上述全芳香族聚酯纖維較佳為熔點為300℃以上之全芳香族聚酯纖維。所謂上述熔點為300℃以上之全芳香族聚酯纖維,係使用被稱為所謂之液晶聚合物之樹脂而製造之纖維,且該液晶聚合物係以2-羥基-6-萘甲酸及對羥基苯甲酸之聚合物為主成分者。該全芳香族聚酯纖維具有低介電係數、較低之介電損耗正切,故而作為電氣絕緣層之構成材料具有優異之性能,可與玻璃纖維及聚芳醯胺纖維同樣地使用。 The above skeleton material may also contain polyarmine fiber or glass fiber or full aromatic Family polyester fiber. The above-mentioned skeleton material is preferably a non-woven fabric or a woven fabric of polyarmine fiber or glass fiber or wholly aromatic polyester fiber. Further, the wholly aromatic polyester fiber is preferably a wholly aromatic polyester fiber having a melting point of 300 ° C or higher. The wholly aromatic polyester fiber having a melting point of 300 ° C or higher is a fiber produced by using a resin called a so-called liquid crystal polymer, and the liquid crystal polymer is 2-hydroxy-6-naphthoic acid and p-hydroxyl group. The polymer of benzoic acid is the main component. Since the wholly aromatic polyester fiber has a low dielectric constant and a low dielectric loss tangent, it has excellent performance as a constituent material of the electrical insulating layer, and can be used in the same manner as glass fibers and polyaramide fibers.

再者,構成上述不織布及織布之纖維較佳為實施矽烷偶合劑處理,以提高與其表面之樹脂之潤濕性。此時之矽烷偶合劑係根據使用目的而使用胺基系、環氧系等之矽烷偶合劑即可。 Further, it is preferred that the fibers constituting the nonwoven fabric and the woven fabric are treated with a decane coupling agent to improve the wettability of the resin on the surface thereof. In this case, the decane coupling agent may be a decane coupling agent such as an amine group or an epoxy group depending on the purpose of use.

又,上述預浸體亦可為使熱硬化性樹脂含浸於由標稱厚度為70μm以下之使用有聚芳醯胺纖維或玻璃纖維之不織布、或者標稱厚度為30μm以下之玻璃布所構成的骨架材料而成之預浸體。 Further, the prepreg may be formed by impregnating a thermosetting resin with a non-woven fabric using polyaramide fibers or glass fibers having a nominal thickness of 70 μm or less, or a glass cloth having a nominal thickness of 30 μm or less. Prepreg made of skeleton material.

將該等樹脂溶解於例如甲基乙基酮(MEK)、環戊酮、二甲 基甲醯胺、二甲基乙醯胺、N-甲基吡咯啶酮、甲苯、甲醇、乙醇、丙二醇單甲醚、二甲基甲醯胺、二甲基乙醯胺、環己酮、乙基賽路蘇、N-甲基-2-吡咯啶酮、N,N-二甲基乙醯胺、N,N-二甲基甲醯胺等溶劑而製成樹脂液,藉由例如輥塗法等將其塗佈於上述極薄銅層上、或上述耐熱層、防銹層、或上述鉻酸鹽處理層、或上述矽烷偶合劑層上,繼而視需要進行加熱乾燥去除溶劑而成為B階段狀態。乾燥時使用例如熱風乾燥爐即可,乾燥溫度為100~250℃、較佳為130~200℃即可。亦可使用溶劑溶解上述樹脂層之組成物,製成樹脂固形物成分為3wt%~60wt%、較佳為10wt%~40wt%、更佳為25wt%~40wt%之樹脂液。再者,自環境之觀點而言,於現階段最佳為使用甲基乙基酮與環戊酮之混合溶劑進行溶解。 Dissolving the resins in, for example, methyl ethyl ketone (MEK), cyclopentanone, and dimethyl Carbamide, dimethylacetamide, N-methylpyrrolidone, toluene, methanol, ethanol, propylene glycol monomethyl ether, dimethylformamide, dimethylacetamide, cyclohexanone, B A solvent solution is prepared by using a solvent such as ketiselus, N-methyl-2-pyrrolidone, N,N-dimethylacetamide or N,N-dimethylformamide, for example by roll coating. Applying the method to the ultra-thin copper layer or the heat-resistant layer, the rust-preventing layer, the chromate-treated layer or the decane coupling agent layer, and then drying and removing the solvent as needed to become B Stage status. For drying, for example, a hot air drying oven may be used, and the drying temperature may be 100 to 250 ° C, preferably 130 to 200 ° C. The composition of the above resin layer may be dissolved in a solvent to obtain a resin liquid having a resin solid content of 3 wt% to 60 wt%, preferably 10 wt% to 40 wt%, more preferably 25 wt% to 40 wt%. Further, from the viewpoint of the environment, it is most preferable to use a mixed solvent of methyl ethyl ketone and cyclopentanone for dissolution at this stage.

具備上述樹脂層之附載體銅箔(附有樹脂之附載體銅箔)係 以如下態樣被使用:於使該樹脂層重疊於基材之後對整體進行熱壓接而使該樹脂層熱硬化,繼而將載體剝離而使極薄銅層露出(當然,露出的是該極薄銅層之中間層側之表面),於此形成規定之配線圖案。 A copper foil with a carrier (the carrier-attached copper foil with a resin) having the above resin layer It is used in such a manner that after the resin layer is superposed on the substrate, the entire resin layer is thermocompression-bonded to thermally harden the resin layer, and then the carrier is peeled off to expose the ultra-thin copper layer (of course, the pole is exposed) A surface of the intermediate layer side of the thin copper layer is formed to form a predetermined wiring pattern.

若使用該附有樹脂之附載體銅箔,則可減少多層印刷配線基 板之製造時之預浸體材料之使用片數。而且,可將樹脂層之厚度設為可確保層間絕緣之厚度,或者即便完全未使用預浸體材料亦可製造覆銅積層板。又,此時,亦可於基材之表面底塗(under coat)絕緣樹脂而進一步改善表面之平滑性。 If the copper foil with the carrier attached to the resin is used, the multilayer printed wiring base can be reduced The number of sheets of prepreg material used in the manufacture of the board. Further, the thickness of the resin layer can be set to ensure the thickness of the interlayer insulation, or the copper clad laminate can be produced even if the prepreg material is not used at all. Further, at this time, the surface of the substrate may be undercoated with an insulating resin to further improve the smoothness of the surface.

再者,於未使用預浸體材料之情形時,由於節約預浸體材料 之材料成本且積層步驟亦變得簡單,故而於經濟上有利,而且按照預浸體材料之厚度相應地製造之多層印刷配線基板之厚度變薄,從而具有可製造1層之厚度為100μm以下之極薄之多層印刷配線基板的優點。 Furthermore, when the prepreg material is not used, the prepreg material is saved. Since the material cost and the lamination step are also simple, it is economically advantageous, and the thickness of the multilayer printed wiring board which is manufactured correspondingly according to the thickness of the prepreg material is thin, so that the thickness of one layer can be made 100 μm or less. The advantages of a very thin multilayer printed wiring board.

該樹脂層之厚度較佳為0.1~120μm。 The thickness of the resin layer is preferably from 0.1 to 120 μm.

若樹脂層之厚度薄於0.1μm,則接著力降低,當未介由預 浸體材料而將該附有樹脂之附載體銅箔積層於具備內層材之基材時,存在難以確保與內層材之電路之間之層間絕緣的情形。又,較佳為上述硬化樹脂層與半硬化樹脂層之總樹脂層厚度為0.1μm~120μm者,於實用上較佳為35μm~120μm者。而且,該情形時之各厚度較理想為硬化樹脂層為5~20μm,半硬化樹脂層為15~115μm。其原因在於:若總樹脂層厚度超過120μm,則有難以製造厚度較薄之多層印刷配線板之情形,若未達35μm則雖容易形成厚度較薄之多層印刷配線板,但內層之電路間之作為絕緣層之樹脂層變得過薄,有產生使內層之電路間之絕緣性不穩定之傾向的情形。又,若硬化樹脂層厚度未達5μm,則有產生考慮銅箔粗化面之表面粗糙度之必要之情形。反之若硬化樹脂層厚度超過20μm則有利用已硬化之樹脂層之效果不會特別提高之情形,且總絕緣層厚變厚。又,上述硬化樹脂層之厚度亦可為3μm~30μm。又,上述半硬化樹脂層之厚度亦可為7μm~55μm。又,上述硬化樹脂層與上述半硬化樹脂層之合計厚度亦可為10μm~60μm。 If the thickness of the resin layer is thinner than 0.1 μm, the adhesion force is lowered, when it is not When the resin material-attached copper foil with a resin is laminated on the base material provided with the inner layer material, it is difficult to ensure interlayer insulation between the circuit and the inner layer material. Further, it is preferable that the total resin layer thickness of the cured resin layer and the semi-hardened resin layer is 0.1 μm to 120 μm, and practically preferably 35 μm to 120 μm. Further, in this case, the thickness is preferably 5 to 20 μm for the cured resin layer and 15 to 115 μm for the semi-hardened resin layer. The reason is that when the total resin layer thickness exceeds 120 μm, it is difficult to manufacture a multilayer printed wiring board having a small thickness. If the thickness is less than 35 μm, it is easy to form a multilayer printed wiring board having a small thickness, but the circuit between the inner layers is The resin layer as the insulating layer is too thin, and there is a tendency that the insulation between the circuits of the inner layer tends to be unstable. Further, when the thickness of the cured resin layer is less than 5 μm, it is necessary to consider the surface roughness of the roughened surface of the copper foil. On the other hand, if the thickness of the cured resin layer exceeds 20 μm, the effect of using the cured resin layer is not particularly improved, and the total thickness of the insulating layer becomes thick. Further, the thickness of the cured resin layer may be 3 μm to 30 μm. Further, the semi-hardened resin layer may have a thickness of 7 μm to 55 μm. Further, the total thickness of the cured resin layer and the semi-cured resin layer may be 10 μm to 60 μm.

又,於將具有樹脂層之附載體銅箔用於製造極薄之多層印刷 配線板之情形時,將上述樹脂層之厚度設為0.1μm~5μm、更佳為0.5μm~5μm、更佳為1μm~5μm之情況,會縮小多層印刷配線板之厚度故而較佳。再者,於將上述樹脂層之厚度設為0.1μm~5μm之情形時,為了提高樹脂層與附載體銅箔之密接性,而較佳為於在極薄銅層上設置耐熱層及/或防銹層及/或鉻酸鹽處理層及/或矽烷偶合處理層後,於該耐熱層或防銹層或鉻酸鹽處理層或矽烷偶合處理層上形成樹脂層。 Moreover, the copper foil with a carrier layer having a resin layer is used for manufacturing extremely thin multilayer printing In the case of the wiring board, the thickness of the resin layer is preferably from 0.1 μm to 5 μm, more preferably from 0.5 μm to 5 μm, even more preferably from 1 μm to 5 μm, and the thickness of the multilayer printed wiring board is reduced. Further, when the thickness of the resin layer is 0.1 μm to 5 μm, in order to improve the adhesion between the resin layer and the copper foil with a carrier, it is preferable to provide a heat-resistant layer on the ultra-thin copper layer and/or After the rustproof layer and/or the chromate treatment layer and/or the decane coupling treatment layer, a resin layer is formed on the heat-resistant layer or the rust-preventive layer or the chromate-treated layer or the decane coupling treatment layer.

又,於樹脂層含有介電體之情形時,樹脂層之厚度較佳為0.1~50μm,較佳為0.5μm~25μm,更佳為1.0μm~15μm。再者,上述樹脂層之厚度係指於任意之10點藉由剖面觀察而測定到之厚度之平均值。 Further, when the resin layer contains a dielectric material, the thickness of the resin layer is preferably from 0.1 to 50 μm, preferably from 0.5 μm to 25 μm, more preferably from 1.0 μm to 15 μm. Further, the thickness of the above resin layer means an average value of the thickness measured by a cross-sectional observation at any 10 points.

另一方面,若使樹脂層之厚度厚於120μm,則難以利用1 次塗佈步驟形成目標厚度之樹脂層,且花費多餘之材料費與步驟數,故而於經濟上不利。進而,所形成之樹脂層由於其可撓性較差,故而存在如下情形:於操作時變得較易產生龜裂等,又,於與內層材之熱壓接時發生過剩之樹脂流動,從而變得難以進行順利之積層。 On the other hand, if the thickness of the resin layer is thicker than 120 μm, it is difficult to use 1 The secondary coating step forms a resin layer of a target thickness and costs an extra material cost and the number of steps, which is economically disadvantageous. Further, since the formed resin layer is inferior in flexibility, it is likely to be cracked during operation, and excessive resin is generated during thermal compression bonding with the inner layer. It becomes difficult to carry out the smooth accumulation.

進而,作為該附有樹脂之附載體銅箔之另一製品形態,亦可 於上述極薄銅層上、或上述耐熱層、防銹層、或上述鉻酸鹽處理層、或上述矽烷偶合處理層上以樹脂層進行被覆,成為半硬化狀態之後繼而將載體剝離,從而以未存在載體之附有樹脂之銅箔之形態製造。 Further, as another form of the product with the resin-attached carrier copper foil, Coating on the ultra-thin copper layer or the heat-resistant layer, the rust-preventing layer, the chromate-treated layer, or the decane coupling treatment layer with a resin layer, and forming a semi-hardened state, followed by peeling off the carrier, thereby The form of a resin-attached copper foil in which no carrier is present is produced.

<5.附載體銅箔> <5. With carrier copper foil>

以此種方式,製造具備銅箔載體、於銅箔載體上依序積層有Ni層及Cr層且含有微量之Zn之中間層、及積層於中間層上之極薄銅層的附載體銅箔。附載體銅箔本身之使用方法為業者所周知,例如可將極薄銅層之表面貼合於紙基材酚樹脂、紙基材環氧樹脂、合成纖維布基材環氧樹脂、玻璃布-紙複合基材環氧樹脂、玻璃布-玻璃不織布複合基材環氧樹脂及玻璃布基材環氧樹脂、聚酯膜、聚醯亞胺膜等絕緣基板,進行熱壓接後剝離載體,將與絕緣基板接著之極薄銅層蝕刻成目標之導體圖案,最終製造印刷配線板。進而,藉由於印刷配線板搭載電子零件類而完成印刷電路板。於本發明之附載體銅箔之情形時,剝離部位主要為Cr層與極薄銅層之界面。 In this manner, a carrier-attached copper foil having a copper foil carrier, an intermediate layer in which a Ni layer and a Cr layer are sequentially laminated on a copper foil carrier and containing a trace amount of Zn, and an extremely thin copper layer laminated on the intermediate layer is produced. . The method of using the carrier copper foil itself is well known. For example, the surface of the ultra-thin copper layer can be bonded to the paper substrate phenol resin, paper substrate epoxy resin, synthetic fiber cloth substrate epoxy resin, glass cloth - Paper composite substrate epoxy resin, glass cloth-glass non-woven composite substrate epoxy resin and glass cloth substrate epoxy resin, polyester film, polyimide film, etc., and the carrier is peeled off after thermocompression bonding. A very thin copper layer is then etched into the target conductor pattern with the insulating substrate to finally produce a printed wiring board. Further, the printed circuit board is completed by mounting electronic components on the printed wiring board. In the case of the copper foil with a carrier of the present invention, the peeling portion is mainly an interface between the Cr layer and the extremely thin copper layer.

以下,表示若干使用有本發明之附載體銅箔之印刷配線板之製造步驟之例。 Hereinafter, an example of a manufacturing procedure of a printed wiring board using the copper foil with a carrier of the present invention will be described.

於本發明之印刷配線板之製造方法之一實施形態中,包括如下步驟:準備本發明之附載體銅箔與絕緣基板,積層上述附載體銅箔與絕緣基板,於將上述附載體銅箔與絕緣基板以極薄銅層側與絕緣基板相對向之方式積層後,剝離上述附載體銅箔之載體,經過如上步驟而形成覆銅積 層板,其後,藉由半加成法、改進型半加成法、部分加成法及減成法中任一種方法而形成電路。絕緣基板亦可設為帶有內層電路者。 An embodiment of the method for producing a printed wiring board according to the present invention includes the steps of: preparing a copper foil and an insulating substrate with a carrier of the present invention, and laminating the copper foil and the insulating substrate with the carrier, and the copper foil with the carrier After the insulating substrate is laminated with the ultra-thin copper layer side facing the insulating substrate, the carrier of the carrier-attached copper foil is peeled off, and the copper-clad product is formed through the above steps. The laminate, after which the circuit is formed by any of a semi-additive method, a modified semi-additive method, a partial addition method, and a subtractive method. The insulating substrate may also be provided with an inner layer circuit.

於本發明中,所謂半加成法,係指如下方法:於絕緣基板或 銅箔種晶(seed)層上進行較薄之無電電鍍,形成圖案後,使用電鍍及蝕刻形成導體圖案。 In the present invention, the so-called semi-additive method refers to the following method: on an insulating substrate or Thin copper electroless plating is performed on the copper foil seed layer, and after patterning, a conductor pattern is formed using electroplating and etching.

因此,於使用有半加成法之本發明之印刷配線板之製造方法之一實施形態中,包括如下步驟:準備本發明之附載體銅箔與絕緣基板;積層上述附載體銅箔與絕緣基板;於積層上述附載體銅箔與絕緣基板後,剝離上述附載體銅箔之載體;藉由使用酸等腐蝕溶液之蝕刻或電漿等方法將剝離上述載體而露出之極薄銅層全部去除;於藉由利用蝕刻去除上述極薄銅層而露出之上述樹脂設置通孔或/及盲孔(blind via);對包含上述通孔或/及盲孔之區域進行除膠渣處理;對上述樹脂及包含上述通孔或/及盲孔之區域設置無電電鍍層;於上述無電電鍍層上設置鍍敷阻劑;對上述鍍敷阻劑進行曝光,其後去除形成有電路之區域之鍍敷阻劑;於去除上述鍍敷阻劑後之上述形成有電路之區域設置電鍍層;去除上述鍍敷阻劑;以及藉由快速蝕刻(flash etching)等去除位於上述形成有電路之區域以外之區域的無電電鍍層。 Therefore, in one embodiment of the method for producing a printed wiring board of the present invention having a semi-additive method, the method includes the steps of: preparing a copper foil and an insulating substrate with a carrier of the present invention; and laminating the copper foil and the insulating substrate with the carrier After laminating the carrier-attached copper foil and the insulating substrate, the carrier with the carrier copper foil is peeled off; and the ultra-thin copper layer exposed by peeling off the carrier is completely removed by etching or plasma etching using an etching solution such as acid; Providing a through hole or/and a blind via to expose the resin by removing the ultra-thin copper layer by etching; performing desmear treatment on the region including the through hole or/and the blind hole; And providing an electroless plating layer in the region including the through hole or/and the blind hole; providing a plating resist on the electroless plating layer; exposing the plating resist, and then removing the plating resistance in the region where the circuit is formed a plating layer disposed in the circuit-formed region after removing the plating resist; removing the plating resist; and removing by flash etching or the like Electroless plating layer region other than the region of the road.

於使用有半加成法之本發明之印刷配線板之製造方法之另一實施形態中,包括如下步驟:準備本發明之附載體銅箔與絕緣基板; 積層上述附載體銅箔與絕緣基板;於積層上述附載體銅箔與絕緣基板後,剝離上述附載體銅箔之載體;藉由使用酸等腐蝕溶液之蝕刻或電漿等方法將剝離上述載體而露出之極薄銅層全部去除;對藉由利用蝕刻去除上述極薄銅層而露出之上述樹脂之表面設置無電電鍍層;於上述無電電鍍層上設置鍍敷阻劑;對上述鍍敷阻劑進行曝光,其後去除形成有電路之區域之鍍敷阻劑;於去除上述鍍敷阻劑後之上述形成有電路之區域設置電鍍層;去除上述鍍敷阻劑;以及藉由快速蝕刻等去除位於上述形成有電路之區域以外之區域的無電電鍍層及極薄銅層。 In another embodiment of the method for manufacturing a printed wiring board of the present invention having a semi-additive method, the method includes the steps of: preparing a copper foil with an insulating substrate of the present invention and an insulating substrate; Laminating the carrier-attached copper foil and the insulating substrate; after laminating the carrier-attached copper foil and the insulating substrate, peeling off the carrier of the carrier-attached copper foil; and peeling off the carrier by etching or plasma etching using an etching solution such as acid The exposed ultra-thin copper layer is completely removed; an electroless plating layer is disposed on the surface of the resin exposed by removing the ultra-thin copper layer by etching; a plating resist is disposed on the electroless plating layer; and the plating resist is applied Performing exposure, thereafter removing the plating resist in the region where the circuit is formed; providing a plating layer in the circuit-formed region after removing the plating resist; removing the plating resist; and removing by rapid etching or the like An electroless plating layer and an extremely thin copper layer located in a region other than the region in which the circuit is formed.

於本發明中,所謂改進型半加成法,係指如下方法:於絕緣層上積層金屬箔,藉由鍍敷阻劑而保護非電路形成部,藉由電鍍而加厚電路形成部之銅後去除阻劑,利用(快速)蝕刻去除上述電路形成部以外之金屬箔,藉此於絕緣層上形成電路。 In the present invention, the modified semi-additive method refers to a method of laminating a metal foil on an insulating layer, protecting a non-circuit forming portion by plating a resist, and thickening the copper of the circuit forming portion by electroplating. Thereafter, the resist is removed, and the metal foil other than the above-described circuit forming portion is removed by (rapid) etching, thereby forming a circuit on the insulating layer.

因此,於使用有改進型半加成法之本發明之印刷配線板之製造方法之一實施形態中,包括如下步驟:準備本發明之附載體銅箔與絕緣基板;積層上述附載體銅箔與絕緣基板;於積層上述附載體銅箔與絕緣基板後,剝離上述附載體銅箔之載體;於剝離上述載體而露出之極薄銅層與絕緣基板設置通孔或/及盲孔;對包含上述通孔或/及盲孔之區域進行除膠渣處理;對包含上述通孔或/及盲孔之區域設置無電電鍍層;於剝離上述載體而露出之極薄銅層表面設置鍍敷阻劑; 於設置上述鍍敷阻劑後,藉由電鍍而形成電路;去除上述鍍敷阻劑;以及利用快速蝕刻將藉由去除上述鍍敷阻劑而露出之極薄銅層去除。 Therefore, in one embodiment of the method for producing a printed wiring board of the present invention using the improved semi-additive method, the method comprises the steps of: preparing a copper foil with an insulating substrate of the present invention and an insulating substrate; and laminating the copper foil with the carrier An insulating substrate; after laminating the carrier-attached copper foil and the insulating substrate, peeling off the carrier with the carrier copper foil; and providing a through hole or/and a blind hole in the ultra-thin copper layer and the insulating substrate exposed by peeling off the carrier; The area of the through hole or/and the blind hole is subjected to desmear treatment; the electroless plating layer is disposed on the area including the through hole or/and the blind hole; and the plating resist is disposed on the surface of the extremely thin copper layer exposed by peeling off the carrier; After the plating resist is disposed, the circuit is formed by electroplating; the plating resist is removed; and the ultra-thin copper layer exposed by removing the plating resist is removed by rapid etching.

於使用有改進型半加成法之本發明之印刷配線板之製造方法之另一實施形態中,包括如下步驟:準備本發明之附載體銅箔與絕緣基板;積層上述附載體銅箔與絕緣基板;於積層上述附載體銅箔與絕緣基板後,剝離上述附載體銅箔之載體;於剝離上述載體而露出之極薄銅層上設置鍍敷阻劑;對上述鍍敷阻劑進行曝光,其後去除形成有電路之區域之鍍敷阻劑;於去除上述鍍敷阻劑後之上述形成有電路之區域設置電鍍層;去除上述鍍敷阻劑;以及藉由快速蝕刻等去除位於上述形成有電路之區域以外之區域的無電電鍍層及極薄銅層。 In another embodiment of the method for manufacturing a printed wiring board of the present invention using the improved semi-additive method, the method comprises the steps of: preparing a copper foil with an insulating substrate of the present invention and an insulating substrate; laminating the copper foil with the carrier and insulating the carrier a substrate; after laminating the carrier-attached copper foil and the insulating substrate, peeling off the carrier of the carrier-attached copper foil; and providing a plating resist on the extremely thin copper layer exposed by peeling off the carrier; and exposing the plating resist Thereafter, removing the plating resist in the region where the circuit is formed; providing a plating layer in the circuit-formed region after removing the plating resist; removing the plating resist; and removing the above-mentioned formation by rapid etching or the like An electroless plating layer and an extremely thin copper layer in areas outside the circuit area.

於本發明中,所謂部分加成法,係指如下方法:於設置導體層而成之基板、視需要穿出通孔或通路孔用之孔而成之基板上賦予觸媒核,進行蝕刻而形成導體電路,視需要設置阻焊劑或鍍敷阻劑後,於上述導體電路上,藉由無電電鍍處理而對通孔或通路孔等進行加厚,藉此製造印刷配線板。 In the present invention, the partial addition method refers to a method in which a catalyst core is provided on a substrate on which a conductor layer is provided, and a via hole or a via hole is formed as needed, and etching is performed. After the conductor circuit is formed, if necessary, a solder resist or a plating resist is provided, and the via hole, the via hole, and the like are thickened on the conductor circuit by electroless plating treatment, thereby manufacturing a printed wiring board.

因此,於使用有部分加成法之本發明之印刷配線板之製造方法之一實施形態中,包括如下步驟:準備本發明之附載體銅箔與絕緣基板;積層上述附載體銅箔與絕緣基板;於積層上述附載體銅箔與絕緣基板後,剝離上述附載體銅箔之載體;於剝離上述載體而露出之極薄銅層與絕緣基板設置通孔或/及盲孔; 對包含上述通孔或/及盲孔之區域進行除膠渣處理;對包含上述通孔或/及盲孔之區域賦予觸媒核;於剝離上述載體而露出之極薄銅層表面設置蝕刻阻劑;對上述蝕刻阻劑進行曝光,形成電路圖案;藉由使用酸等腐蝕溶液之蝕刻或電漿等方法去除上述極薄銅層及上述觸媒核,而形成電路;去除上述蝕刻阻劑;於藉由使用酸等腐蝕溶液之蝕刻或電漿等方法去除上述極薄銅層及上述觸媒核而露出之上述絕緣基板表面設置阻焊劑或鍍敷阻劑;以及於未設置上述阻焊劑或鍍敷阻劑之區域設置無電電鍍層。 Therefore, in one embodiment of the method for producing a printed wiring board of the present invention using a partial addition method, the method includes the steps of: preparing a copper foil with an insulating substrate of the present invention and an insulating substrate; and laminating the copper foil and the insulating substrate with the carrier After laminating the carrier-attached copper foil and the insulating substrate, the carrier with the carrier copper foil is peeled off; and the ultra-thin copper layer and the insulating substrate exposed by peeling off the carrier are provided with through holes or/and blind holes; Desmear treatment is performed on the region including the through hole or/and the blind hole; the catalyst core is provided to the region including the through hole or/and the blind hole; and the etching resistance is set on the surface of the extremely thin copper layer exposed by peeling off the carrier Exposing the etching resist to form a circuit pattern; removing the ultra-thin copper layer and the catalyst core by etching or plasma etching using an acid or the like to form a circuit; removing the etching resist; Providing a solder resist or a plating resist on the surface of the insulating substrate exposed by removing the ultra-thin copper layer and the catalyst core by etching or plasma etching using an acid or the like; and the solder resist is not provided or An electroless plating layer is provided in the region where the plating resist is applied.

於本發明中,所謂減成法,係指如下方法:藉由蝕刻等將覆銅積層板上之銅箔之不需要部分選擇性地去除,形成導體圖案。 In the present invention, the subtractive method refers to a method of selectively removing unnecessary portions of the copper foil on the copper clad laminate by etching or the like to form a conductor pattern.

因此,於使用有減成法之本發明之印刷配線板之製造方法之一實施形態中,包括如下步驟:準備本發明之附載體銅箔與絕緣基板;積層上述附載體銅箔與絕緣基板;於積層上述附載體銅箔與絕緣基板後,剝離上述附載體銅箔之載體;於剝離上述載體而露出之極薄銅層與絕緣基板設置通孔或/及盲孔;對包含上述通孔或/及盲孔之區域進行除膠渣處理;對包含上述通孔或/及盲孔之區域設置無電電鍍層;於上述無電電鍍層之表面設置電鍍層;於上述電鍍層或/及上述極薄銅層之表面設置蝕刻阻劑;對上述蝕刻阻劑進行曝光,形成電路圖案;藉由使用酸等腐蝕溶液之蝕刻或電漿等方法去除上述極薄銅層及上述無電電鍍層及上述電鍍層,從而形成電路;以及 去除上述蝕刻阻劑。 Therefore, in one embodiment of the method for producing a printed wiring board of the present invention using the subtractive method, the method includes the steps of: preparing a copper foil with an insulating substrate and an insulating substrate of the present invention; and laminating the copper foil and the insulating substrate with the carrier; After laminating the carrier-attached copper foil and the insulating substrate, the carrier with the carrier copper foil is peeled off; the ultra-thin copper layer exposed to the carrier is peeled off and the insulating substrate is provided with a through hole or/and a blind hole; And the area of the blind hole is subjected to desmear treatment; an electroless plating layer is disposed on the area including the through hole or/and the blind hole; a plating layer is disposed on the surface of the electroless plating layer; and the plating layer or/and the above is extremely thin An etching resist is disposed on the surface of the copper layer; the etching resist is exposed to form a circuit pattern; and the ultra-thin copper layer and the electroless plating layer and the plating layer are removed by etching or plasma etching using an etching solution such as acid To form a circuit; The above etching resist is removed.

於使用有減成法之本發明之印刷配線板之製造方法之另一實施形態中,包括如下步驟:準備本發明之附載體銅箔與絕緣基板;積層上述附載體銅箔與絕緣基板;於積層上述附載體銅箔與絕緣基板後,剝離上述附載體銅箔之載體;於剝離上述載體而露出之極薄銅層與絕緣基板設置通孔或/及盲孔;對包含上述通孔或/及盲孔之區域進行除膠渣處理;對包含上述通孔或/及盲孔之區域設置無電電鍍層;於上述無電電鍍層之表面形成掩膜(mask);於未形成掩膜之上述無電電鍍層之表面設置電鍍層;於上述電鍍層或/及上述極薄銅層之表面設置蝕刻阻劑;對上述蝕刻阻劑進行曝光,形成電路圖案;藉由使用酸等腐蝕溶液之蝕刻或電漿等方法去除上述極薄銅層及上述無電電鍍層,從而形成電路;以及去除上述蝕刻阻劑。 In another embodiment of the method for producing a printed wiring board of the present invention using the subtractive method, the method includes the steps of: preparing a copper foil with an insulating substrate of the present invention and an insulating substrate; laminating the copper foil and the insulating substrate with the carrier; After laminating the carrier-attached copper foil and the insulating substrate, the carrier with the carrier copper foil is peeled off; the ultra-thin copper layer exposed to the carrier is peeled off and the insulating substrate is provided with a through hole or/and a blind hole; and the through hole or the pair is included And a region of the blind hole is subjected to desmear treatment; an electroless plating layer is disposed on the region including the through hole or/and the blind hole; a mask is formed on the surface of the electroless plating layer; and the mask is not formed a plating layer is disposed on the surface of the electroplated layer; an etching resist is disposed on the surface of the plating layer or/and the ultra-thin copper layer; and the etching resist is exposed to form a circuit pattern; etching or electrolysis by etching the solution using an acid or the like A method such as slurry removes the above-mentioned ultra-thin copper layer and the above electroless plating layer to form a circuit; and removes the above-mentioned etching resist.

亦可不進行設置通孔或/及盲孔之步驟、及其後之除膠渣步驟。 The step of providing a through hole or/and a blind hole, and the subsequent desmear step may also be omitted.

此處,使用圖式,對使用有本發明之附載體銅箔之印刷配線板之製造方法之具體例詳細進行說明。再者,此處係以具有形成有粗化處理層之極薄銅層之附載體銅箔為例進行說明,但不限於此,即便使用具有未形成粗化處理層之極薄銅層之附載體銅箔亦可同樣地進行下述印刷配線板之製造方法。 Here, a specific example of a method of manufacturing a printed wiring board using the copper foil with a carrier of the present invention will be described in detail with reference to the drawings. Here, the copper foil with a carrier having an extremely thin copper layer on which a roughened layer is formed is exemplified, but is not limited thereto, even if an ultrathin copper layer having a roughened layer is not used. The carrier copper foil can also be similarly produced in the following method for producing a printed wiring board.

首先,如圖1-A所示,準備具有於表面形成有粗化處理層之極薄銅層之附載體銅箔(第1層)。 First, as shown in Fig. 1-A, a carrier-attached copper foil (first layer) having an extremely thin copper layer having a roughened layer formed on its surface is prepared.

繼而,如圖1-B所示,於極薄銅層之粗化處理層上塗佈阻劑,進行曝光.顯影,將阻劑蝕刻成規定之形狀。 Then, as shown in FIG. 1-B, a resist is coated on the roughened layer of the ultra-thin copper layer for exposure. Development, etching the resist into a prescribed shape.

繼而,如圖1-C所示,藉由於形成電路用之鍍敷後去除阻劑,而形成規定之形狀之電路鍍敷。 Then, as shown in FIG. 1-C, circuit plating of a predetermined shape is formed by removing the resist after plating for forming a circuit.

繼而,如圖2-D所示,以覆蓋電路鍍敷之方式(以埋沒電路鍍敷之方式)於極薄銅層上設置埋入樹脂而積層樹脂層,繼而使另一附載體銅箔(第2層)自極薄銅層側接著。 Then, as shown in FIG. 2-D, a resin layer is laminated on the ultra-thin copper layer by a method of covering the circuit plating (in the form of a buried circuit plating), and then another carrier copper foil is attached ( Layer 2) is followed by a very thin copper layer.

繼而,如圖2-E所示,自第2層附載體銅箔剝離載體。 Then, as shown in Fig. 2-E, the carrier was peeled off from the second layer of the carrier-attached copper foil.

繼而,如圖2-F所示,於樹脂層之規定位置進行雷射開孔,使電路鍍敷露出而形成盲孔。 Then, as shown in FIG. 2-F, a laser opening is performed at a predetermined position of the resin layer to expose the circuit plating to form a blind hole.

繼而,如圖3-G所示,將銅埋入盲孔而形成填孔。 Then, as shown in FIG. 3-G, copper is buried in the blind hole to form a hole.

繼而,如圖3-H所示,於填孔上以上述圖1-B及圖1-C之方式形成電路鍍敷。 Then, as shown in FIG. 3-H, circuit plating is formed on the filling holes in the manner of FIG. 1-B and FIG. 1-C described above.

繼而,如圖3-I所示,自第1層附載體銅箔剝離載體。 Then, as shown in Fig. 3-I, the carrier was peeled off from the first layer of the carrier-attached copper foil.

繼而,如圖4-J所示,藉由快速蝕刻去除兩表面之極薄銅層,使樹脂層內之電路鍍敷之表面露出。 Then, as shown in FIG. 4-J, the extremely thin copper layer on both surfaces is removed by rapid etching to expose the surface of the circuit plating in the resin layer.

繼而,如圖4-K所示,於樹脂層內之電路鍍敷上形成凸塊,於該焊料上形成銅柱。以此種方式製作使用有本發明之附載體銅箔之印刷配線板。 Then, as shown in FIG. 4-K, a bump is formed on the circuit plating in the resin layer, and a copper pillar is formed on the solder. A printed wiring board using the copper foil with a carrier of the present invention was produced in this manner.

上述另一附載體銅箔(第2層)可使用本發明之附載體銅 箔,亦可使用先前之附載體銅箔,進而亦可使用通常之銅箔。又,亦可於圖3-H所示之第2層電路上進而形成1層或複數層電路,亦可藉由半加成法、減成法、部分加成法或改進型半加成法中任一種方法進行該等之電路形成。 The above-mentioned other carrier copper foil (the second layer) can use the copper carrier of the present invention. For the foil, it is also possible to use the previously attached copper foil, and it is also possible to use a conventional copper foil. Alternatively, a layer 1 or a plurality of layers may be formed on the second layer circuit shown in FIG. 3-H, or may be formed by a semi-additive method, a subtractive method, a partial addition method or a modified semi-additive method. Any of the methods performs such circuit formation.

又,於印刷配線板之製造時,亦可將用以加強附載體銅箔之 載體之支持物(support)貼附於載體表面。藉此,可進一步提高處理性。作 為支持物,可列舉預浸體或樹脂等絕緣基板。作為樹脂,亦可為上述樹脂層。 Moreover, in the manufacture of the printed wiring board, it is also possible to strengthen the copper foil with the carrier. A support for the carrier is attached to the surface of the carrier. Thereby, the handleability can be further improved. Make Examples of the support include an insulating substrate such as a prepreg or a resin. The resin may be the above resin layer.

本發明之附載體銅箔較佳為以極薄銅層表面之色差滿足以下(1)~(4)中之任一者以上之方式控制。於本發明中所謂「極薄銅層表面之色差」係表示極薄銅層之表面之色差、或於實施有粗化處理等各種表面處理之情形時其表面處理層表面之色差。即,本發明之附載體銅箔較佳為以極薄銅層或粗化處理層或耐熱層或防銹層或鉻酸鹽處理層或矽烷偶合層之表面之色差滿足以下(1)~(4)中之任一者以上之方式控制。 The copper foil with a carrier of the present invention is preferably controlled so that the color difference of the surface of the ultra-thin copper layer satisfies any one of the following (1) to (4). In the present invention, the "chromatic aberration of the surface of the ultra-thin copper layer" means the chromatic aberration of the surface of the ultra-thin copper layer or the chromatic aberration of the surface of the surface-treated layer when various surface treatments such as roughening treatment are performed. That is, the copper foil with a carrier of the present invention preferably has the chromatic aberration of the surface of the ultra-thin copper layer or the roughened layer or the heat-resistant layer or the rust-proof layer or the chromate-treated layer or the decane coupling layer, which satisfies the following (1)~( 4) Any of the above methods are controlled.

(1)極薄銅層或粗化處理層或耐熱層或防銹層或鉻酸鹽處理層或矽烷偶合處理層之表面之基於JIS Z8730之色差△L為-40以下。 (1) The color difference ΔL based on JIS Z8730 of the surface of the ultra-thin copper layer or the roughened layer or the heat-resistant layer or the rust-preventive layer or the chromate-treated layer or the decane coupling treatment layer is -40 or less.

(2)極薄銅層或粗化處理層或耐熱層或防銹層或鉻酸鹽處理層或矽烷偶合處理層之表面之基於JIS Z8730之色差△E*ab為45以上。 (2) The color difference ΔE*ab based on JIS Z8730 of the surface of the ultra-thin copper layer or the roughened layer or the heat-resistant layer or the rust-proof layer or the chromate-treated layer or the decane coupling treatment layer is 45 or more.

(3)極薄銅層或粗化處理層或耐熱層或防銹層或鉻酸鹽處理層或矽烷偶合處理層之表面之基於JIS Z8730之色差△a為20以下。 (3) The color difference Δa based on JIS Z8730 of the surface of the ultra-thin copper layer or the roughened layer or the heat-resistant layer or the rust-preventive layer or the chromate-treated layer or the decane coupling treatment layer is 20 or less.

(4)極薄銅層或粗化處理層或耐熱層或防銹層或鉻酸鹽處理層或矽烷偶合處理層之表面之基於JIS Z8730之色差△b為20以下。 (4) The color difference Δb based on JIS Z8730 of the surface of the ultra-thin copper layer or the roughened layer or the heat-resistant layer or the rust-preventive layer or the chromate-treated layer or the decane coupling treatment layer is 20 or less.

此處,上述色差△L、△a、△b係分別以色差計進行測定,加入黑/白/紅/綠/黃/藍,使用基於JIS Z8730之L*a*b表色系所表示之綜合指標,以△L:白黑、△a:紅綠、△b:黃藍表示。又,△E*ab係使用該等色差以下述式所表示。 Here, the color difference ΔL, Δa, and Δb are measured by a color difference meter, and black/white/red/green/yellow/blue is added, and the color is expressed by the L*a*b color system based on JIS Z8730. The comprehensive index is expressed by △L: white black, △a: red green, △b: yellow blue. Further, ΔE*ab is expressed by the following formula using these chromatic aberrations.

上述色差可藉由增高極薄銅層形成時之電流密度,降低鍍敷液中之銅濃度,增高鍍敷液之線流速而進行調整。 The chromatic aberration can be adjusted by increasing the current density at the time of formation of the extremely thin copper layer, lowering the concentration of copper in the plating solution, and increasing the line flow rate of the plating solution.

又,上述色差亦可藉由對極薄銅層之表面實施粗化處理並設置粗化處理層而進行調整。於設置粗化處理層之情形時,可藉由使用含有選自由銅及鎳、鈷、鎢、鉬所組成之群中之一種以上之元素之電解液,較先前增高電流密度(例如40~60A/dm2),縮短處理時間(例如0.1~1.3秒)而進行調整。於未在極薄銅層之表面設置粗化處理層之情形時,可藉由使用將Ni之濃度設為其他元素之2倍以上之鍍敷浴,以較先前更低之電流密度(0.1~1.3A/dm2)設定更長之處理時間(20秒~40秒),對極薄銅層或耐熱層或防銹層或鉻酸鹽處理層或矽烷偶合處理層之表面處理鍍Ni合金(例如鍍Ni-W合金、鍍Ni-Co-P合金、鍍Ni-Zn合金)而達成。 Further, the chromatic aberration may be adjusted by subjecting the surface of the ultra-thin copper layer to a roughening treatment and providing a roughened layer. In the case where the roughening treatment layer is provided, the current density (for example, 40 to 60 A) can be increased by using an electrolyte containing one or more elements selected from the group consisting of copper and nickel, cobalt, tungsten, and molybdenum. /dm 2 ), adjust the processing time (for example, 0.1 to 1.3 seconds). In the case where the roughened layer is not provided on the surface of the ultra-thin copper layer, the plating bath having a concentration of Ni of twice or more of other elements can be used to lower the current density (0.1~). 1.3A/dm 2 ) Set a longer processing time (20 seconds to 40 seconds) to treat the surface of the ultra-thin copper layer or the heat-resistant layer or the rust-proof layer or the chromate treatment layer or the decane coupling treatment layer. This is achieved, for example, by plating a Ni-W alloy, plating a Ni-Co-P alloy, or plating a Ni-Zn alloy.

若極薄銅層表面之基於JIS Z8730之色差△L為-40以下, 則例如於在附載體銅箔之極薄銅層表面形成電路時,極薄銅層與電路之對比度鮮明,其結果為,視認性良好且可精度良好地進行電路之位置對準。 極薄銅層表面之基於JIS Z8730之色差△L較佳為-45以下,更佳為-50以下。 If the surface of the ultra-thin copper layer is based on JIS Z8730, the color difference ΔL is -40 or less. For example, when an electric circuit is formed on the surface of the ultra-thin copper layer with the carrier copper foil, the contrast between the ultra-thin copper layer and the circuit is sharp, and as a result, the visibility of the circuit is good and the alignment of the circuit can be performed with high precision. The color difference ΔL based on JIS Z8730 on the surface of the ultra-thin copper layer is preferably -45 or less, more preferably -50 or less.

若極薄銅層表面之基於JIS Z8730之色差△E*ab為45以上, 則例如於在附載體銅箔之極薄銅層表面形成電路時,極薄銅層與電路之對比度鮮明,其結果為,視認性良好且可精度良好地進行電路之位置對準。 極薄銅層表面之基於JIS Z8730之色差△E*ab較佳為50以上,更佳為55以上,進而更佳為60以上。 If the surface of the ultra-thin copper layer is based on JIS Z8730, the color difference ΔE*ab is 45 or more. For example, when an electric circuit is formed on the surface of the ultra-thin copper layer with the carrier copper foil, the contrast between the ultra-thin copper layer and the circuit is sharp, and as a result, the visibility of the circuit is good and the alignment of the circuit can be performed with high precision. The color difference ΔE*ab based on JIS Z8730 on the surface of the ultra-thin copper layer is preferably 50 or more, more preferably 55 or more, still more preferably 60 or more.

若極薄銅層表面之基於JIS Z8730之色差△a為20以下,則 例如於在附載體銅箔之極薄銅層表面形成電路時,極薄銅層與電路之對比度鮮明,其結果為,視認性更加良好且可精度良好地進行電路之位置對準。 極薄銅層表面之基於JIS Z8730之色差△a較佳為15以下,更佳為10以下,進而更佳為8以下。 If the color difference Δa based on JIS Z8730 on the surface of the ultra-thin copper layer is 20 or less, then For example, when an electric circuit is formed on the surface of an ultra-thin copper layer with a carrier copper foil, the contrast between the ultra-thin copper layer and the circuit is sharp, and as a result, the visibility is further improved and the positional alignment of the circuit can be performed with high precision. The color difference Δa based on JIS Z8730 on the surface of the ultra-thin copper layer is preferably 15 or less, more preferably 10 or less, still more preferably 8 or less.

若極薄銅層表面之基於JIS Z8730之色差△b為20以下,則 例如於在附載體銅箔之極薄銅層表面形成電路時,極薄銅層與電路之對比度鮮明,其結果為,視認性更加良好且可精度良好地進行電路之位置對準。 極薄銅層表面之基於JIS Z8730之色差△b較佳為15以下,更佳為10以下,進而更佳為8以下。 If the color difference Δb based on JIS Z8730 on the surface of the ultra-thin copper layer is 20 or less, then For example, when an electric circuit is formed on the surface of an ultra-thin copper layer with a carrier copper foil, the contrast between the ultra-thin copper layer and the circuit is sharp, and as a result, the visibility is further improved and the positional alignment of the circuit can be performed with high precision. The color difference Δb based on JIS Z8730 on the surface of the ultra-thin copper layer is preferably 15 or less, more preferably 10 or less, still more preferably 8 or less.

於如上所述控制極薄銅層或粗化處理層或耐熱層或防銹層 或鉻酸鹽處理層或矽烷偶合層之表面之色差之情形時,與電路鍍敷之對比度鮮明,視認性良好。因此,於如上所述之印刷配線板之例如圖1-C所示之製造步驟中,可精度良好地且於規定之位置形成電路鍍敷。又,根據如上所述之印刷配線板之製造方法,電路鍍敷成為埋入至樹脂層之構成,故而於例如圖4-J所示之利用快速蝕刻去除極薄銅層時,電路鍍敷受樹脂層所保護,其形狀得以保持,藉此容易形成微細電路。又,由於電路鍍敷受樹脂層所保護,故而提高耐遷移性,良好地抑制電路之配線之導通。因此,容易形成微細電路。又,於如圖4-J及圖4-K所示藉由快速蝕刻去除極薄銅層時,電路鍍敷之露出面成為自樹脂層凹下之形狀,故而容易於該電路鍍敷上形成凸塊,進而容易於凸塊上形成銅柱,從而提高製造效率。 Control the ultra-thin copper layer or the roughened layer or the heat-resistant layer or the rust-proof layer as described above When the color difference of the surface of the chromate treatment layer or the decane coupling layer is used, the contrast with the circuit plating is sharp, and the visibility is good. Therefore, in the manufacturing steps shown in, for example, FIG. 1-C of the printed wiring board as described above, circuit plating can be formed accurately and at a predetermined position. Moreover, according to the method for manufacturing a printed wiring board as described above, since the circuit plating is embedded in the resin layer, the circuit plating is affected by, for example, the rapid etching to remove the ultra-thin copper layer as shown in FIG. 4-J. The resin layer is protected and its shape is maintained, whereby a fine circuit is easily formed. Further, since the circuit plating is protected by the resin layer, the migration resistance is improved, and the wiring of the circuit is satisfactorily suppressed. Therefore, it is easy to form a fine circuit. Further, when the ultra-thin copper layer is removed by rapid etching as shown in FIG. 4-J and FIG. 4-K, the exposed surface of the circuit plating becomes a concave shape from the resin layer, so that it is easy to form on the circuit plating. The bumps, in turn, facilitate the formation of copper posts on the bumps, thereby improving manufacturing efficiency.

再者,作為埋入樹脂(resin)可使用公知之樹脂、預浸體。 例如,可使用即為含浸有BT(雙順丁烯二醯亞胺三)樹脂或BT樹脂之玻璃布之預浸體、味之素精細化學(Ajinomoto Fine-Techno)股份有限公司製造之ABF膜或ABF。又,上述埋入樹脂可含有熱硬化性樹脂,亦可為熱塑性樹脂。又,上述埋入樹脂亦可含有熱塑性樹脂。上述埋入樹脂之種類並無特別限定,例如可列舉包含環氧樹脂、聚醯亞胺樹脂、多官能性氰酸酯化合物、順丁烯二醯亞胺化合物、聚乙烯縮醛樹脂、胺酯樹脂、嵌段共聚聚醯亞胺樹脂、嵌段共聚聚醯亞胺樹脂、聚醚碸、聚醚碸樹脂、芳香族聚醯胺樹脂、聚醯胺醯亞胺樹脂、橡膠修飾(改質)環氧樹脂、苯氧樹脂、羧基改質丙烯腈-丁二烯樹脂、聚苯醚、雙順丁烯二醯亞胺三 樹脂、熱 硬化性聚苯醚樹脂、氰酸酯系樹脂、多元羧酸之酐等之樹脂、或紙基材酚樹脂、紙基材環氧樹脂、合成纖維布基材環氧樹脂、玻璃布.紙複合基材環氧樹脂、玻璃布.玻璃不織布複合基材環氧樹脂及玻璃布基材環氧樹脂、聚酯膜、聚醯亞胺膜、液晶聚合物膜、氟樹脂膜等作為較佳者。 Further, as the resin, a known resin or prepreg can be used. For example, a prepreg which is a glass cloth impregnated with a BT (bis-synyleneimine III) resin or a BT resin, or an ABF film manufactured by Ajinomoto Fine-Techno Co., Ltd. can be used. Or ABF. Further, the embedded resin may contain a thermosetting resin or a thermoplastic resin. Further, the embedded resin may contain a thermoplastic resin. The type of the embedded resin is not particularly limited, and examples thereof include an epoxy resin, a polyimide resin, a polyfunctional cyanate compound, a maleimide compound, a polyvinyl acetal resin, and an amine ester. Resin, block copolymerized polyimide resin, block copolymerized polyimide resin, polyether oxime, polyether oxime resin, aromatic polyamide resin, polyamide amide resin, rubber modification (modified) Epoxy resin, phenoxy resin, carboxyl modified acrylonitrile-butadiene resin, polyphenylene ether, bis-xenylene diimide, three resins, heat a resin such as a curable polyphenylene ether resin, a cyanate resin, or a polycarboxylic acid anhydride, or a paper substrate phenol resin, a paper substrate epoxy resin, a synthetic fiber cloth substrate epoxy resin, or a glass cloth. Paper composite substrate epoxy resin, glass cloth. A glass non-woven composite substrate epoxy resin, a glass cloth substrate epoxy resin, a polyester film, a polyimide film, a liquid crystal polymer film, a fluororesin film, or the like is preferable.

[實施例] [Examples]

以下,藉由本發明之實施例對本發明進一步詳細進行說明,但本發明並不受該等實施例任何限定。 Hereinafter, the present invention will be further described in detail by way of examples of the invention, but the invention is not limited by the examples.

1. 附載體銅箔之製造 1. Manufacture of carrier copper foil

<No.1> <No.1>

作為銅箔載體,準備厚度35μm之長條之電解銅箔(JX日鑛日石金屬公司製造之JTC)。於以下條件下,利用卷對卷(roll-to-roll)型之連續鍍敷線對該銅箔之閃亮(shiny)面進行電鍍,藉此形成1000μm/dm2之附著量之Ni層。 As a copper foil carrier, a strip of electrolytic copper foil (JTC manufactured by JX Nippon Mining & Metal Co., Ltd.) having a thickness of 35 μm was prepared. The shiny surface of the copper foil was plated by a roll-to-roll type continuous plating line under the following conditions, thereby forming a Ni layer having an adhesion amount of 1000 μm/dm 2 .

.Ni層(基底鍍敷) . Ni layer (base plating)

硫酸鎳:270~280g/L Nickel sulfate: 270~280g/L

氯化鎳:35~45g/L Nickel chloride: 35~45g/L

乙酸鎳:10~20g/L Nickel acetate: 10~20g/L

檸檬酸三鈉:15~25g/L Trisodium citrate: 15~25g/L

光澤劑:糖精、丁炔二醇等 Gloss agent: saccharin, butynediol, etc.

十二基硫酸鈉:55~75ppm Sodium dodecyl sulfate: 55~75ppm

pH值:4~6 pH: 4~6

浴溫:55~65℃ Bath temperature: 55~65°C

電流密度:7~11A/dm2 Current density: 7~11A/dm 2

於水洗及酸洗後,繼而於卷對卷型之連續鍍敷線上,藉由以如下條件進行電解鉻酸鹽處理而使11μg/dm2之附著量之Cr層附著於Ni 層之上。 After washing with water and pickling, a Cr layer having an adhesion amount of 11 μg/dm 2 was adhered to the Ni layer by performing electrolytic chromate treatment under the following conditions on a roll-to-roll continuous plating line.

.電解鉻酸鹽處理 . Electrolytic chromate treatment

液組成:重鉻酸鉀1~10g/L、鋅0g/L Liquid composition: potassium dichromate 1~10g/L, zinc 0g/L

pH值:7~10 pH: 7~10

液溫:40~60℃ Liquid temperature: 40~60°C

電流密度:0.1~2.6A/dm2 Current density: 0.1~2.6A/dm 2

庫侖量:0.5~30As/dm2 Coulomb amount: 0.5~30As/dm 2

繼而,於卷對卷型之連續鍍敷線上,藉由以如下條件進行電鍍而於Cr層之上形成厚度2~10μm之極薄銅層,從而製造附載體銅箔。 Then, on the continuous plating line of the roll-to-roll type, an ultra-thin copper layer having a thickness of 2 to 10 μm was formed on the Cr layer by electroplating under the following conditions to produce a copper foil with a carrier.

.極薄銅層 . Very thin copper layer

銅濃度:30~120g/L Copper concentration: 30~120g/L

H2SO4濃度:20~120g/L H 2 SO 4 concentration: 20~120g/L

電解液溫度:20~80℃ Electrolyte temperature: 20~80°C

電流密度:10~100A/dm2 Current density: 10~100A/dm 2

<No.2~37> <No.2~37>

相對於No.1,藉由調整線速度而使Ni附著量及Cr附著量如表1所記載般進行各種變更。又,於Ni層形成時或鉻酸鹽處理時,於鍍Ni液或鉻酸鹽處理液中添加硫酸鋅(ZnSO4)之形態之鋅,於鋅濃度:0.05~5g/L之範圍進行調整,藉此,使中間層之Zn附著量如表1所記載般發生變化。然而,比較例15及16係分別將鋅濃度設為10g/L及15g/L。表中,於基底鍍敷之處記載為「Ni」係指進行鍍純鎳,記載為「Ni-Zn」係指進行鍍鎳鋅合金。又,表中,於鉻酸鹽處理之處記載為「Cr」係指進行純鉻酸鹽處理,記載為「Zn-Cr」係指進行鋅鉻酸鹽處理。以此種方式製作No.2~37之附載體銅箔。Ni附著量或Cr附著量為0之例係指未實施鍍Ni或電解鉻酸鹽處理。再者,藉由增高鍍鎳鋅合金液或鉻酸鹽處理液中之鋅濃度, 而可增多Zn之附著量。又,藉由增高鉻酸鹽處理液中之鉻濃度,而可增高Cr之附著量。 With respect to No. 1, the Ni adhesion amount and the Cr adhesion amount were variously changed as described in Table 1 by adjusting the linear velocity. Further, in the formation of the Ni layer or the chromate treatment, zinc in the form of zinc sulfate (ZnSO 4 ) is added to the Ni plating solution or the chromate treatment liquid, and the zinc concentration is adjusted in the range of 0.05 to 5 g/L. Thereby, the amount of Zn adhered to the intermediate layer was changed as described in Table 1. However, in Comparative Examples 15 and 16, the zinc concentrations were set to 10 g/L and 15 g/L, respectively. In the table, "Ni" is referred to as "Ni" in the case of substrate plating, and "Ni-Zn" is referred to as nickel-zinc alloy plating. In addition, in the table, "Cr" is referred to as a pure chromate treatment at the chromate treatment, and "Zn-Cr" is referred to as a zinc chromate treatment. The carrier copper foil of No. 2 to 37 was produced in this manner. The example in which the Ni adhesion amount or the Cr adhesion amount is 0 means that the Ni plating or the electrolytic chromate treatment is not performed. Further, by increasing the zinc concentration in the nickel-zinc alloy plating solution or the chromate treatment liquid, the adhesion amount of Zn can be increased. Further, by increasing the chromium concentration in the chromate treatment liquid, the adhesion amount of Cr can be increased.

2.附載體銅箔之特性評價 2. Evaluation of the characteristics of copper foil with carrier

以如下方法對以上述方式所獲得之附載體銅箔實施特性評價。將結果示於表1。 The characteristics of the copper foil with a carrier obtained in the above manner were evaluated in the following manner. The results are shown in Table 1.

<針孔> <pinhole>

以民生用之照片用背光源為光源,以目視測定針孔之數量。評價係藉由以下基準進行。 The number of pinholes was visually measured by using a backlight for photos of people's livelihood as a light source. The evaluation was carried out by the following criteria.

×:針孔超過10,000個/dm2 ×: pinholes exceeding 10,000/dm 2

△:針孔為5,000個/dm2以上~10,000個/dm2以下 △: The pinhole is 5,000 / dm 2 or more and 10,000 / dm 2 or less

○:針孔為100個/dm2以上~未達5,000個/dm2 ○: Pinholes are 100/dm 2 or more ~ less than 5,000 / dm 2

◎:針孔為20個/dm2以上~未達100個/dm2 ◎: pinholes are 20 / dm 2 or more ~ less than 100 / dm 2

◎◎:針孔未達20個/dm2 ◎◎: The pinhole is less than 20/dm 2

<剝離強度(BT加壓後)> <Peel strength (after BT pressurization)>

將附載體銅箔之極薄銅層側與BT基板貼合並於溫度195℃加壓2小時後,以50mm/分鐘之剝離速度、剝離角度90°並依據JIS C6471將附載體銅箔之載體側剝離,藉此測定剝離強度。將結果示於表1。 The extremely thin copper layer side of the copper foil with a carrier was attached to the BT substrate and pressed at a temperature of 195 ° C for 2 hours, and then the carrier side of the copper foil with a carrier was pressed according to JIS C6471 at a peeling speed of 50 mm/min and a peeling angle of 90°. Peeling, thereby measuring the peel strength. The results are shown in Table 1.

N0.1係於中間層未含有Zn之實例。由於Ni及Cr之附著量 適當,故而可獲得可實用之程度之針孔之頻度及剝離強度。然而,將Ni及Cr之附著量設為與No.1相同程度且於中間層適量添加有Zn之No.2中,針孔之數量進一步減少,剝離強度上升至更適當之值。剝離強度之適當之範圍為0.5~120g/cm,更適當之範圍為0.5~30g/cm,進而更適當之範圍為1~30g/cm,進而適當之範圍為5~25g/cm。 N0.1 is an example in which the intermediate layer does not contain Zn. Due to the adhesion of Ni and Cr Suitably, the frequency and peel strength of the pinholes can be obtained to a practical extent. However, in the No. 2 in which the adhesion amount of Ni and Cr is the same as that of No. 1 and Zn is added in an appropriate amount in the intermediate layer, the number of pinholes is further reduced, and the peel strength is increased to a more appropriate value. The appropriate range of peel strength is from 0.5 to 120 g/cm, more suitably from 0.5 to 30 g/cm, and more suitably from 1 to 30 g/cm, and more suitably from 5 to 25 g/cm.

於其他發明例中,亦可藉由與Ni及Cr之附著量同等之參考 例進行比較,知道可實現針孔之頻度及剝離強度之改善。另一方面,No.15 及16係因Zn附著量過多故剝離強度過高。No.29~33係由於未形成Ni層或Cr層,故而無法剝離。No.36~37係因Ni之附著量過多故密接力不足,於在連續鍍敷線移行期間產生剝離。 In other invention examples, the same reference value as the adhesion amount of Ni and Cr may be used. For comparison, it is known that the frequency of pinholes and the peel strength can be improved. On the other hand, No.15 And the 16 series is too high in peeling strength due to the excessive amount of Zn adhesion. No. 29 to 33 were not formed because the Ni layer or the Cr layer was not formed. In No. 36 to 37, since the adhesion amount of Ni is too large, the adhesion is insufficient, and peeling occurs during the transition of the continuous plating line.

Claims (26)

一種附載體銅箔,其具備銅箔載體、積層於銅箔載體上之中間層、及積層於中間層上之極薄銅層,中間層係由接觸於與銅箔載體之界面的Ni層及接觸於與極薄銅層之界面的Cr層構成,中間層中之Ni的附著量為1000~40000μg/dm2,中間層中之Cr的附著量為10~100μg/dm2,於中間層進一步以1~70μg/dm2之附著量存在Zn。 A carrier-attached copper foil comprising a copper foil carrier, an intermediate layer laminated on the copper foil carrier, and an extremely thin copper layer laminated on the intermediate layer, the intermediate layer being contacted by a Ni layer contacting the interface with the copper foil carrier Contacting a Cr layer at the interface with the ultra-thin copper layer, the adhesion amount of Ni in the intermediate layer is 1000 to 40000 μg/dm 2 , and the adhesion amount of Cr in the intermediate layer is 10 to 100 μg/dm 2 , further in the intermediate layer Zn is present in an amount of 1 to 70 μg/dm 2 . 如申請專利範圍第1項之附載體銅箔,其中,Ni之附著量為2000~10000μg/dm2,Cr之附著量為20~40μg/dm2The scope of the appended patent carrier copper foil, Paragraph 1, wherein the Ni deposition amount is 2000 ~ 10000μg / dm 2, the deposition amount of Cr 20 ~ 40μg / dm 2. 如申請專利範圍第1或2項之附載體銅箔,其中,存在於中間層之Zn相對於Cr之質量比的值為0.01~5之範圍。 The carrier copper foil according to claim 1 or 2, wherein the mass ratio of Zn to Cr present in the intermediate layer is in the range of 0.01 to 5. 如申請專利範圍第1或2項之附載體銅箔,其中,Cr係藉由電解鉻酸鹽而附著。 The carrier copper foil according to claim 1 or 2, wherein the Cr is adhered by electrolytic chromate. 如申請專利範圍第3項之附載體銅箔,其中,Cr係藉由電解鉻酸鹽而附著。 The carrier-attached copper foil according to claim 3, wherein the Cr is adhered by electrolytic chromate. 如申請專利範圍第1項之附載體銅箔,其中,該載體係以電解銅箔或壓延銅箔形成。 The carrier copper foil according to claim 1, wherein the carrier is formed of an electrolytic copper foil or a rolled copper foil. 如申請專利範圍第1項之附載體銅箔,其於該極薄銅層表面具有粗化處理層。 The carrier-attached copper foil according to claim 1, which has a roughened layer on the surface of the ultra-thin copper layer. 如申請專利範圍第7項之附載體銅箔,其中,該粗化處理層係由選自由銅、鎳、鈷、磷、鎢、砷、鉬、鉻及鋅組成之群中之任一單質構成、或由含有選自該群中之任1種以上元素之合金構成的層。 The copper foil with carrier of claim 7, wherein the roughening layer is composed of any element selected from the group consisting of copper, nickel, cobalt, phosphorus, tungsten, arsenic, molybdenum, chromium and zinc. Or a layer composed of an alloy containing any one or more elements selected from the group. 如申請專利範圍第7項之附載體銅箔,其於該粗化處理層之表面,具有選自由耐熱層、防銹層、鉻酸鹽處理層及矽烷偶合處理層組成之群中之1種以上的層。 The carrier-attached copper foil according to claim 7, which has a surface selected from the group consisting of a heat-resistant layer, a rust-preventing layer, a chromate-treated layer and a decane coupling treatment layer on the surface of the roughened layer. Above layer. 如申請專利範圍第1項之附載體銅箔,其於該極薄銅層之表面,具有 選自由耐熱層、防銹層、鉻酸鹽處理層及矽烷偶合處理層組成之群中之1種以上的層。 The copper foil with carrier of the first aspect of the patent application, which has a surface of the ultra-thin copper layer One or more layers selected from the group consisting of a heat-resistant layer, a rust-preventive layer, a chromate-treated layer, and a decane coupling treatment layer are selected. 如申請專利範圍第1項之附載體銅箔,其於該極薄銅層上具備樹脂層。 The carrier copper foil according to claim 1, wherein the ultra-thin copper layer is provided with a resin layer. 如申請專利範圍第7項之附載體銅箔,其於該粗化處理層上具備樹脂層。 The carrier-attached copper foil according to claim 7, which is provided with a resin layer on the roughened layer. 如申請專利範圍第9項之附載體銅箔,其於該選自由耐熱層、防銹層、鉻酸鹽處理層及矽烷偶合處理層組成之群中之1種以上的層上具備樹脂層。 The copper foil with a carrier of the ninth aspect of the invention is provided with a resin layer on one or more layers selected from the group consisting of a heat-resistant layer, a rust-preventive layer, a chromate-treated layer, and a decane coupling treatment layer. 如申請專利範圍第10項之附載體銅箔,其於該選自由耐熱層、防銹層、鉻酸鹽處理層及矽烷偶合處理層組成之群中之1種以上的層上具備樹脂層。 The carrier-attached copper foil according to claim 10, wherein the resin layer is provided on one or more layers selected from the group consisting of a heat-resistant layer, a rust-preventive layer, a chromate-treated layer, and a decane coupling treatment layer. 如申請專利範圍第11至14項中任一項之附載體銅箔,其中,該樹脂層係以接著用樹脂形成。 The carrier-attached copper foil according to any one of claims 11 to 14, wherein the resin layer is formed by using a resin. 如申請專利範圍第11至14項中任一項之附載體銅箔,其中,該樹脂層係以半硬化狀態之樹脂形成。 The carrier-attached copper foil according to any one of claims 11 to 14, wherein the resin layer is formed of a resin in a semi-hardened state. 如申請專利範圍第11至14項中任一項之附載體銅箔,其中,該樹脂層含有介電體。 The carrier-attached copper foil according to any one of claims 11 to 14, wherein the resin layer contains a dielectric. 一種印刷配線板,其係使用申請專利範圍第1至17項中任一項之附載體銅箔製造而成。 A printed wiring board manufactured by using the carrier-attached copper foil according to any one of claims 1 to 17. 一種印刷電路板,其係使用申請專利範圍第1至17項中任一項之附載體銅箔製造而成。 A printed circuit board manufactured by using the carrier-attached copper foil according to any one of claims 1 to 17. 一種覆銅積層板,其係使用申請專利範圍第1至17項中任一項之附載體銅箔製造而成。 A copper-clad laminate produced by using the carrier-attached copper foil according to any one of claims 1 to 17. 一種印刷配線板之製造方法,其包括如下步驟:準備申請專利範圍第1至15項中任一項之附載體銅箔與絕緣基 板,積層該附載體銅箔與絕緣基板,於積層該附載體銅箔與絕緣基板後,剝離該附載體銅箔之載體,經過如上步驟形成覆銅積層板,其後,藉由半加成(semi-additive)法、減成(subtractive)法、部分加成(partly-additive)法或改進型半加成(modified semi-additive)法中任一種方法而形成電路。 A method of manufacturing a printed wiring board, comprising the steps of: preparing a carrier copper foil and an insulating base according to any one of claims 1 to 15 And laminating the carrier copper foil and the insulating substrate, after laminating the carrier copper foil and the insulating substrate, peeling off the carrier of the carrier copper foil, forming a copper clad laminate through the above steps, and then, by semi-addition A circuit is formed by any one of a semi-additive method, a subtractive method, a partial-additive method, or a modified semi-additive method. 一種印刷配線板之製造方法,其包括如下步驟:於申請專利範圍第1至17項中任一項之附載體銅箔之該極薄銅層側表面形成電路;以埋沒該電路之方式於該附載體銅箔之該極薄銅層側表面形成樹脂層;於該樹脂層上形成電路;於在該樹脂層上形成電路後,使該載體剝離;及於使該載體剝離後,去除該極薄銅層,藉此,使已形成於該極薄銅層側表面之埋沒於該樹脂層的電路露出。 A manufacturing method of a printed wiring board, comprising the steps of: forming a circuit on a side surface of the ultra-thin copper layer of a copper foil with a carrier of any one of claims 1 to 17; a side surface of the ultra-thin copper layer of the carrier copper foil is formed with a resin layer; an electric circuit is formed on the resin layer; after the circuit is formed on the resin layer, the carrier is peeled off; and after the carrier is peeled off, the pole is removed The thin copper layer is thereby exposed to the circuit buried in the resin layer on the side surface of the ultra-thin copper layer. 如申請專利範圍第22項之印刷配線板之製造方法,其中,於該樹脂層上形成電路之步驟係如下步驟:於該樹脂層上自極薄銅層側貼合另一附載體銅箔,並使用貼合於該樹脂層之附載體銅箔形成該電路。 The method for manufacturing a printed wiring board according to claim 22, wherein the step of forming a circuit on the resin layer is as follows: bonding another copper foil with a carrier on the resin layer from the side of the ultra-thin copper layer, The circuit is formed using a copper foil with a carrier attached to the resin layer. 如申請專利範圍第23項之印刷配線板之製造方法,其中,於該樹脂層上貼合之另一附載體銅箔為申請專利範圍第1至17項中任一項之附載體銅箔。 The method of manufacturing a printed wiring board according to claim 23, wherein the other carrier copper foil bonded to the resin layer is the carrier-attached copper foil according to any one of claims 1 to 17. 如申請專利範圍第22至24項中任一項之印刷配線板之製造方法,其中,於該樹脂層上形成電路之步驟係藉由半加成法、減成法、部分加成法或改進型半加成法中任一種方法而進行。 The method of manufacturing a printed wiring board according to any one of claims 22 to 24, wherein the step of forming a circuit on the resin layer is by a semi-additive method, a subtractive method, a partial addition method or an improvement The method of any one of the semi-additive methods is carried out. 如申請專利範圍第22至24項中任一項之印刷配線板之製造方法,其中,於該表面形成電路之附載體銅箔於該附載體銅箔之載體的表面具有基板或樹脂層。 The method of manufacturing a printed wiring board according to any one of claims 22 to 24, wherein the copper foil with a carrier on which the circuit is formed has a substrate or a resin layer on the surface of the carrier of the copper foil with the carrier.
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