TW201415528A - Discharging lamp and light illuminating apparatus - Google Patents

Abstract

A discharging lamp and a light illuminating apparatus are provided. The light illuminating apparatus includes a discharging pipe 4; a pair of electrodes 51, 52 disposed at the discharging pipe 4; a pair of connecting terminals 61, 62 disposed at two end portions 4m, 4n of the axis direction of the discharging pipe 4 and extending along one direction different from the axis direction; and a pair of power supplying sockets 31, 32 disposed at an apparatus main body side and supplying power from the pair of connecting terminals 61, 62 to the electrodes 51, 52 via insertion into the pair of connecting terminals 61, 62; and the pair of connecting terminals 61, 62 are configured not to be at the outer side opposite to the side of the aforementioned one direction at two end portions of the axis direction of the discharging pipe 4.

Description

Discharge lamp and light irradiation device

The present invention relates to a discharge lamp such as an excimer lamp and a light irradiation device having the above discharge lamp.

In the past, an excimer lamp was used as an ultraviolet lamp for an ultraviolet irradiation device such as a glass substrate or a wafer such as a semiconductor wafer to be light-cleaned.

When the xenon gas is used as a gas for discharge, the excimer lamp emits ultraviolet rays having a center wavelength of 172 nm, and is configured to provide a pair of external electrodes on the outer surface of the discharge tube in which the discharge gas is sealed. Ultraviolet rays are emitted by applying a high-frequency high voltage to the pair of external electrodes.

Further, in order to apply a high-frequency high voltage to the pair of external electrodes, a lead wire is connected to the pair of external electrodes. The lead wire is coated with a silicone wire or a tetrafluoroethylene-perfluoroalkoxy vinyl ether (PFA) which is not easily deteriorated by ultraviolet rays and has high insulation and heat resistance. The fluorenone resin of the fluorenone wire.

However, if you are using a fluorenone wire, you have the following problem: UV rays The fluorenone resin is irradiated to cause chalking, and the powdery substance generated by the pulverization falls to contaminate the object to be irradiated. Moreover, even if it is coated with a tetrafluoroethylene-perfluoroalkoxy vinyl ether copolymer, there is a problem that if a tetrafluoroethylene-perfluoroalkoxy vinyl ether copolymer is cracked due to deterioration, Ultraviolet rays are irradiated to the underlying fluorenone resin to cause chalking, and the powdery substance generated by the pulverization falls to contaminate the object to be irradiated.

Moreover, if the lead is used to supply power to the external electrode, since the lead is connected to the external electrode by welding or soldering, in the case of replacing the ultraviolet lamp, it is necessary to provide a weld or a welded portion of the lead to be broken, or to be welded or A mechanism for separating the leads other than the welded portion causes a complication of the structure.

As a solution to the above problem, as a structure for supplying power to the external electrode without using a lead wire, there is also a case where the power supply terminal is attached to the apparatus main body, and the power supply terminal includes a winding portion along the outer circumferential surface of the discharge tube. Winding in the circumferential direction more than one turn; and protruding portions extending in a direction away from the outer peripheral surface; or mounting a pair of connector terminals on a socket portion on the apparatus main body side, the pair of connectors The terminal is provided at an outer surface end portion of the upper wall and the lower wall of the discharge tube; however, the winding portion, the connector terminal or the socket portion protrudes outward from the outer peripheral surface of the discharge tube, and therefore, The light irradiation efficiency is such that even if the light-irradiating surface of the discharge tube is to be placed infinitely close to the object to be irradiated, the protruding surface thereof is hindered, and there is a limit in the approach arrangement. Further, when a plurality of the discharge tubes are arranged in parallel, the protruding surface is also hindered, and there is a limit in the approach arrangement.

[Previous Technical Literature]

[Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2010-33883

[Patent Document 2] Japanese Patent Laid-Open No. 2009-231221

[Patent Document 3] WO2010-032849

Therefore, the present invention has been made to solve the above problems, and a main desired problem is that it is easy to attach and detach a discharge tube to a device main body of a light irradiation device, and it is not necessary to provide a discharge tube. The leads connected to the electrodes can be miniaturized and cost-down, and the discharge tubes can be placed close to the object to be irradiated.

That is, the discharge lamp of the present invention includes: a discharge tube; a pair of electrodes provided in the discharge tube; and a pair of connection terminals extending in a direction different from the axial direction at both axial end portions of the discharge tube The pair of connection terminals are provided so as to be disposed outside the side surfaces on the opposite sides of the one direction from the axial end portions of the discharge tube.

In the case of such a discharge lamp, the pair of connection terminals connected to the pair of electrodes are extended in the axial direction of the discharge tube, and are attached only to the pair of power supply members provided on the apparatus side. You can supply power to a pair of electrodes, so There is no need to connect the leads to a pair of electrodes. Thereby, it is possible to easily attach and detach the discharge tube to the apparatus main body of the light irradiation device without complicated work such as welding or welding of the connection of the lead wires.

Moreover, if the discharge lamp is used, the lead wire can be eliminated, so that the size can be reduced. cut costs. Further, in the case of irradiating ultraviolet rays, it is possible to eliminate the occurrence of contaminants due to irradiation of ultraviolet rays on the leads.

In addition, since the pair of connection terminals are configured such that the both end portions of the discharge tube are not located on the side opposite to the opposite side (light exit surface) in the axial direction, the discharge tube can be placed close to the object to be irradiated.

In other words, since the connection terminal does not protrude to the side of the object to be irradiated from the light exit surface of the discharge tube, the light exit surface can be arranged close to the object to be irradiated.

Preferably, the pair of connection terminals are attached to a block body, and the block body is provided at both axial end portions of the discharge tube.

In this way, the pair of connection terminals can be extended to the block in a direction away from the axial direction.

Here, the block contains the same material as the discharge tube or a similar kind of material. For example, in the case where the discharge tube is formed of synthetic quartz glass, the block is formed of synthetic quartz glass or fused silica glass. Further, the block body may be welded to both axial end portions of the discharge tube, or the discharge tube and the block body may be integrally formed.

Preferably, the pair of connection terminals are attached to a flange portion, and the flange portion is provided at both axial end portions of the discharge tube.

In this way, the discharge lamp can be made lighter than the block.

Here, the flange portion is a projecting portion which is provided in the axial direction of the discharge tube which is separated from the discharge space and which contains the same material as the discharge tube or a material of a similar kind.

Preferably, the lower surface of the light exit surface of the discharge tube and the upper surface facing the lower surface are flat surfaces, and the pair of connection terminals extend perpendicularly to the upper surface of the discharge tube. Thus, the discharge tube has a wide flat surface, so that it is not required to be disposed between the discharge tube and the object to be irradiated, and nitrogen is disposed around the discharge tube. Window material such as glass filled with gas. In other words, when the discharge tube emits ultraviolet rays, the object to be irradiated can be irradiated with ultraviolet rays through a small gap of 2 mm to 3 mm under the discharge tube. Therefore, the attenuation of ultraviolet rays in the air can be reduced to improve the irradiation efficiency. As described above, in the discharge lamp that irradiates the object to be irradiated with ultraviolet rays without passing through the window member, it is not necessary to use the lead wire, and therefore the effect of the present invention can be made more remarkable.

Preferably, the pair of connection terminals do not protrude to the outside of a pair of side surfaces that connect the lower surface to the upper surface.

In this way, even when a plurality of discharge lamps are arranged in parallel, the respective discharge lamps can be arranged close to each other.

Preferably, the pair of electrodes include a first external electrode provided on a surface extending in a direction in which the pair of connection terminals extend, and a second external electrode provided on a surface opposite to the extending direction. In this case, the first connection terminal provided at one end of the discharge tube in the axial direction is electrically connected to the first external electrode, and the second connection terminal provided at the other end of the discharge tube in the axial direction is electrically connected to the first Two external electrodes. In this manner, in a state in which a pair of connection terminals are attached to the pair of power supply members, the first external electrode is located on the opposite side of the object to be irradiated, and when the first external electrode is the high-voltage side electrode, the first external portion can be suppressed. The effect of the high voltage applied by the electrodes on the object being irradiated.

Furthermore, the first external electrode and the second external electrode may include, for example, a metal thin film or a metal plate. In the case of including a metal thin film, it is possible to adhere to the outer surface of the discharge tube without a gap, so that the discharge efficiency can be improved. Moreover, in the case of including a metal plate, it is easy to mount an external electrode.

The above discharge tube is preferably an excimer lamp.

In this way, a small room of 2mm~3mm can be placed under the excimer lamp. The gap irradiates the irradiated object with ultraviolet rays, thereby reducing the attenuation of the ultraviolet rays in the air and improving the irradiation efficiency.

Preferably, the discharge tube is attached to a pair of power supply members, and the pair of power supply members are provided on the apparatus main body side and have the same mounting direction.

In this way, the connection terminals can be mounted on a pair of power supply members having the same mounting direction, so that the lead wires can be eliminated, so that the size can be reduced and the cost can be reduced.

A light irradiation device according to the present invention includes: a discharge tube; a pair of electrodes provided in the discharge tube; and a pair of connection terminals extending in a direction different from an axial direction at both axial end portions of the discharge tube, And connecting the pair of electrodes; and the pair of power supply members are provided on the apparatus main body side, and the pair of connection terminals are connected to supply power to the pair of electrodes by the pair of connection terminals; and the pair of connection terminals are provided The outer side of the discharge tube is not located on the outer side of the side opposite to the one direction.

In the case of such a light irradiation device, the pair of connection terminals connected to the pair of electrodes are extended in one direction different from the axial direction at both axial end portions of the discharge tube, and are attached only to a pair of power supplies provided on the device side. The component can supply power to a pair of electrodes, therefore, There is no need to connect the leads to a pair of electrodes. Thereby, it is possible to easily attach and detach the discharge tube to the apparatus main body of the light irradiation device without complicated work such as welding or welding of the connection of the lead wires.

Moreover, in the case of the discharge lamp described above, the lead wire can be eliminated, so that the size can be reduced and the cost can be reduced. Further, in the case of irradiating ultraviolet rays, it is possible to eliminate the occurrence of contaminants due to irradiation of ultraviolet rays on the leads.

Further, since the pair of connection terminals are configured such that the axial end portions of the discharge tube are not located on the opposite side (light exit surface) on the opposite side in the axial direction, the discharge can be performed. The tube is disposed close to the object to be irradiated.

In other words, since the connection terminal does not protrude to the side of the object to be irradiated from the light exit surface of the discharge tube, the light exit surface can be arranged close to the object to be irradiated.

Preferably, the discharge tube is suspended substantially horizontally by the pair of connection terminals being attached to the pair of power supply members. By arranging the discharge tube so substantially horizontally, the distance between the discharge tube and the object to be irradiated can be reduced.

Preferably, at least one of the pair of power supply members is movably disposed. In this way, it is possible to absorb the deviation error in the size of the processing of the discharge tube, the expansion and contraction caused by the thermal expansion of the device, and the positional error of the connection terminal, and more reliably mount the pair of connection terminals to the pair of power supply members. Power is supplied to a pair of electrodes.

When the power supply member on the high voltage side is moved, it is necessary to study the surrounding pressure resistant structure and it is not safe. Therefore, it is preferable that the power supply member inserted into the connection terminal on the high voltage side is fixed, and the power supply member to which the connection terminal on the earth side is attached is movably provided. In this way, it is not necessary to complicate the pressure-resistant structure of the power supply member on the high-voltage side, and safety can be ensured, and a pair of power supply members can surely supply power to the pair of electrodes via the pair of connection terminals.

Preferably, the movably provided power supply member is moved along a plane provided on the apparatus main body side. Thus, it is possible to preferably absorb the deviation error in the size of the processing of the discharge tube and the expansion and contraction caused by the thermal expansion of the instrument.

Preferably, the movably provided power supply member is rotated on the apparatus main body side around the rotation axis set in at least two directions. In this way, the positional error of the connection terminal, in particular the inclination error of the connection terminal, can be preferably absorbed.

According to the present invention having such a configuration, it is easy to attach and detach the discharge tube to the apparatus main body of the light irradiation device, and it is possible to reduce the size and cost by eliminating the need for a lead wire connected to the pair of electrodes provided in the discharge tube. The discharge tube can be placed close to the object to be irradiated.

2‧‧‧UV lamp (discharge lamp)

4‧‧‧Discharge tube

4a‧‧‧ face facing the extension direction (upper surface)

4b‧‧‧ faces facing the opposite side of the extension (lower surface)

4m‧‧‧ axial end of the discharge tube

4n‧‧‧The other end of the discharge tube in the axial direction

4S‧‧‧Discharge space

9‧‧‧Socket fixing member

10‧‧‧Socket holding member

11, 12‧‧‧ sliding members

13‧‧‧Moving restriction member

14‧‧‧Resisting members

15‧‧‧Rotating body

16‧‧‧ Ball plunger

17‧‧‧ Cover

18‧‧‧External terminals

19‧‧‧Connecting conductor

20‧‧‧1st shaft

21‧‧‧1st bearing

22‧‧‧2nd axis

23‧‧‧2nd bearing

24‧‧‧ movable components

25‧‧‧Base

31‧‧‧First power supply socket (power supply socket on high voltage side) (power supply unit)

32‧‧‧Second power socket (power supply socket on the ground side) (power supply unit)

41‧‧‧A block at one end of the shaft

42‧‧‧Armage at the other end of the block

43‧‧‧Exhaust pipe

44‧‧‧Exhaust road

51‧‧‧First external electrode (high voltage side electrode)

52‧‧‧Second external electrode (grounding side electrode)

61‧‧‧First connection terminal

61a‧‧‧ Male threaded part of the first connection terminal

61b‧‧‧Flange of the first connection terminal

61c‧‧‧ Connection terminal of the first connection terminal

62‧‧‧Second connection terminal

62a‧‧‧ Male threaded part of the second connecting terminal

62b‧‧‧Flange of the second connection terminal

62c‧‧‧ Connection terminal of the second connection terminal

71, 72‧‧‧ nut components

71a, 72a‧‧‧ Small Trails Department

71b, 72b‧‧‧ Large Path Department

71c‧‧‧Flange part of the nut member

81, 82‧‧‧ solder

91‧‧‧Installation Department

100‧‧‧UV irradiation device (light irradiation device)

101‧‧‧Upper wall

101a‧‧‧ upper surface

101s‧‧‧Sliding surface

411, 421‧‧‧ mounting holes

711‧‧‧ fixing screws

C‧‧‧ center axis

H1, H2‧‧‧ through holes

X, Y‧‧ direction

Fig. 1 is a cross-sectional view schematically showing an ultraviolet irradiation device of the embodiment.

2(A), 2(B), and 2(C) are a plan view, a side view, and a bottom view schematically showing the ultraviolet lamp of the above embodiment.

Fig. 3 is a partially enlarged cross-sectional view showing mainly the structure of the connection terminal of the above embodiment.

4 is a cross-sectional view schematically showing a high-voltage side power supply member (power supply socket) and a peripheral structure of the embodiment.

Fig. 5 is a cross-sectional view schematically showing a power supply member (power supply socket) on the ground side and a peripheral structure of the embodiment.

Fig. 6 is a plan view schematically showing a power feeding member (power supply socket) holding member of the above embodiment.

FIG. 7 is a plan view schematically showing a power supply member (power supply socket) on the ground side and a peripheral structure in a modified embodiment.

8(A) and 8(B) are cross-sectional views showing a power supply member (power supply socket) on the ground side and a peripheral structure in a modified embodiment, and Fig. 8(A) is a cross section along the X-axis direction. Fig. 8(B) is a cross-sectional view along the Y-axis direction.

9(A) and 9(B) are partially enlarged cross-sectional views showing a main part of a connection terminal structure according to a modified embodiment.

10(A), 10(B), and 10(C) are a plan view, a side view, and a partially enlarged cross-sectional view taken along line B-B' of the connection terminal structure according to the modified embodiment.

11(A), 11(B), and 11(C) are a plan view, a side view, and a partially enlarged cross-sectional view taken along the line A-A' showing a connection terminal structure according to a modified embodiment.

12(A) and 12(B) are a plan view and a side view showing a main structure of a connection terminal according to a modified embodiment.

Hereinafter, an embodiment of an ultraviolet irradiation device which is an example of the light irradiation device of the present invention will be described with reference to the drawings.

In the ultraviolet irradiation device 100 of the present embodiment, the object to be irradiated, such as a glass substrate of a liquid crystal display, is light-cleaned, and the like, as shown in FIG. 1, includes an ultraviolet lamp (discharge lamp) 2, and has a straight tubular discharge tube 4; The ultraviolet lamp 2 is detachably mounted to the power supply socket 31 and the power supply socket 32.

As shown in Fig. 2 (A), Fig. 2 (B), and Fig. 2 (C), the ultraviolet lamp 2 is an excimer lamp using a square straight tubular discharge tube 4 in which helium gas is sealed.

Specifically, the discharge tube 4 is a hermetic container in which a discharge space is formed inside by opening an opening in the axial direction of a cylindrical body having a substantially rectangular cross section of synthetic quartz glass by a swarovski glass block having a substantially rectangular cross section. 4S, in the discharge The space 4S is sealed with helium gas as a discharge gas. Further, the discharge tube 4 has an upper flat surface 4a and a lower flat surface 4b whose upper and lower outer surfaces are substantially flat, a first outer electrode 51 is formed on the upper flat surface 4a, and a second outer electrode 52 is formed on the lower flat surface 4b.

The first outer electrode 51 of the upper flat surface 4a is a two-layer metal film including: an aluminum vapor-deposited film uniformly formed on substantially the entire surface of the upper flat surface 4a of the discharge tube 4; and a metal The film is deposited to protect the surface of the aluminum deposited film. Further, the second outer electrode 52 of the lower flat surface 4b is a two-layer metal thin film including an aluminum vapor-deposited film which is formed in a substantially linear pattern on the lower flat surface 4b of the discharge tube 4 And a metal evaporation film to protect the mesh surface.

In the discharge tube 4 of the excimer lamp 2 having the above configuration, when a high-frequency high voltage from a high-frequency high-voltage power source (not shown) is applied between the pair of external electrodes 51 and the external electrodes 52, the discharge tube 4 containing a dielectric material is used. The internal discharge space 4S generates a dielectric barrier discharge. Therefore, in the discharge space 4S, a xenon atom as a discharge gas is excited, and when the helium atom returns to the ground state A vacuum ultraviolet light (excimer light emission) having a radiation center wavelength of 172 nm. Further, the vacuum ultraviolet rays are emitted to the lower side through the gap of the mesh of the second outer electrode 52 of the lower flat surface 4b of the discharge tube 4. That is, the lower flat surface 4b serves as an ultraviolet light emitting surface. Therefore, when the vacuum ultraviolet rays emitted to the lower side of the discharge tube 4 are irradiated to the object to be irradiated via the minute gap, the object to be irradiated can be light-cleaned.

Further, in the axial end portions 4m and the end portions 4n of the discharge tube 4 of the present embodiment, a pair of connection terminals 61 and connection terminals 62 that are inserted into the pair of power supply sockets 31 and the power supply socket 32 from below are provided.

Specifically, the pair of connection terminals 61 and the connection terminals 62 are attached to the block body 41 and the block body 42 which are formed in the axial end portions 4m and the end portions 4n of the discharge tube 4. The block 41 and the block 42 contain the same material as the discharge tube 4, and in the present embodiment, are fused silica glass. Further, the discharge tube 4 of the present embodiment is formed by blocking an opening at both axial ends of a cylindrical body including synthetic quartz glass with a fused silica glass block, and the portion formed of the fused silica glass block is the block 41 and the block. Body 42.

Further, the pair of connection terminals 61 and the connection terminals 62 are extended to the block body 41 and the block body 42 in a direction substantially orthogonal to the axial direction. Specifically, the pair of connection terminals 61 and the connection terminals 62 extend substantially perpendicularly to the upper surface (upper flat surface 4a) of the block 41 and the block 42. Further, the first connection terminal 61 is connected to the first external electrode 51 provided on the upper flat surface 4a, and the second connection terminal 62 is connected to the second external electrode 52 provided on the lower flat surface 4b. In other words, the first outer electrode 51 is provided on the surface (upper flat surface 4a) extending in the direction in which the pair of connection terminals 61 and the connection terminal 62 extend, and the surface (the lower flat surface 4b) on the opposite side to the extending direction is provided. The second outer electrode 52. Moreover, the first external electrode 51 is a high voltage side electrode by the power supply socket 32 on the high voltage side described below.

The specific mounting structure of the first connection terminal 61 and the second connection terminal 62 will be described with reference to Fig. 3 .

As shown in the left diagram of FIG. 3, the first connection terminal 61 is attached via a mounting hole 411 formed in the block 41 provided at one end portion 4m in the axial direction. Specifically, the first connection terminal 61 is screwed to a nut member provided in the mounting hole 411 of the block 41 by a male screw portion 61a provided at a lower end portion of the first connection terminal 61. 71 is fixed to the block 41.

The mounting hole 411 of the present embodiment extends over the upper flat surface 4a of the block 41 and The lower flat surface 4b penetrates, and has a large diameter hole portion on the lower side and a small diameter hole portion on the upper side. Further, the nut member 71 includes an insulator such as ceramics, and has a shape corresponding to the shape of the mounting hole 411, and includes a small diameter portion 71a inserted into the small diameter hole portion and a large diameter portion 71b inserted into the large diameter hole portion.

Further, the first connection terminal 61 includes a male screw portion 61a screwed to the nut member 71, and a flange portion 61b provided at an upper portion of the male screw portion 61a to be in contact with the upper surface 4a of the block 41; and a connection terminal The portion 61c is provided at an upper portion of the flange portion 61b, and is inserted into the power supply socket 31 on the high voltage side and has a round bar shape.

With this configuration, the male screw portion 61a of the first connection terminal 61 is screwed to the nut member 71, and the block 41 is sandwiched by the flange portion 61b of the first connection terminal 61 and the large diameter portion 71b of the nut member 71. Thereby, the first connection terminal 61 is fixed to the block 41.

Moreover, the first connection terminal 61 thus mounted is vertically extended to the upper flat surface 4a. Further, the flange portion 61b located on the upper surface 4a of the block 41 and the first outer electrode 51 are electrically connected by the solder 81. Further, as a method of electrically connecting, the flange portion 61b may be connected to the first external electrode 51 by physical contact.

As shown in the right diagram of FIG. 3, the second connection terminal 62 is attached via a mounting hole 421 formed in the block 42 provided at the other end portion 4n in the axial direction. Specifically, the second connection terminal 62 is fixed to the block 42 by screwing the male screw portion 62 a provided at the lower end portion of the second connection terminal 62 to the nut member 72 provided in the attachment hole 421 of the block 42 . .

The mounting hole 421 extends over the upper flat surface of the block 42 in the same manner as described above. The 4a and the lower flat surface 4b penetrate therethrough, and have a large diameter hole portion on the lower side and a small diameter hole portion on the upper side. Further, the nut member 72 includes a conductor such as a metal and has a shape corresponding to the shape of the attachment hole 421, and includes a small diameter portion 72a inserted into the small diameter hole portion and a large diameter portion 72b inserted into the large diameter hole portion.

Further, the second connection terminal 62 includes a male screw portion 62a screwed to the nut member 72, and a flange portion 62b provided at an upper portion of the male screw portion 62a to be in contact with the upper surface of the block 42; and a connection terminal portion 62c is provided on the upper portion of the flange portion 62b, and is inserted into the power supply socket 32 on the ground side and has a round bar shape.

With this configuration, the male screw portion 62a of the second connection terminal 62 is screwed to the nut member 72, and the flange portion 62b of the second connection terminal 62 and the large diameter portion 72b of the nut member 72 sandwich the block body 42, Thereby, the second connection terminal 62 is fixed to the block 42.

Moreover, the second connection terminal 62 thus mounted is vertically extended to the upper flat surface 4a. Further, the nut member 72 facing the lower surface 4b of the block 42 and the second outer electrode 52 are electrically connected by the solder 82. Further, as a method of electrically connecting, the nut member 72 may be connected to the second external electrode 52 by physical contact.

Further, as shown in FIG. 2(A), FIG. 2(B), and FIG. 2(C), the exhaust pipe 43 and the exhaust passage 44 are provided on the central axis C of the block 41 and the block 42. The one connection terminal 61 and the second connection terminal 62 are provided at positions offset from the central axis C so as to avoid the exhaust pipe 43 and the exhaust path 44. Further, in consideration of the center of gravity of the entire ultraviolet lamp 2, the first connection terminal 61 and the second connection terminal 62 are provided on the respective blocks 41 and 42 in a diagonal direction. Furthermore, in order to prevent the first connection terminal 61 and the second connection terminal 62 from being inserted with respect to the power supply socket 31 on the high voltage side and the power supply socket 32 on the ground side described below The size of the connection terminal portion 61c of the first connection terminal 61 and the connection terminal portion 62c of the second connection terminal 62 may be different.

Further, in the above embodiment, the connection terminal is provided in the block of the discharge tube, but the block is not limited to the block, as shown in Fig. 10 (A), Fig. 10 (B), and Fig. 10 (C). A flange portion (projecting portion) formed along the axial direction of the discharge tube, which is separated from the discharge space of the self-discharge tube.

In this case, the weight of the discharge lamp can be reduced as compared with the use of the block, and thus it is more preferable.

Further, in the above embodiment, the connection terminal is provided on the upper flat portion of the block, but is not limited to the upper flat portion, as shown in Fig. 11 (A), Fig. 11 (B), Fig. 11 (C), and Fig. 12 (A) and FIG. 12(B) may be provided on the side surface in the longitudinal direction or the side surface in the short side direction of the upper flat surface and the lower flat surface of the connecting block.

In addition, the connection terminal is provided so as not to protrude to the light-emitting surface of the discharge tube, and is not limited to the above, and various modifications can be made.

Next, a pair of power supply sockets 31 and power supply sockets 32 will be described.

A pair of power supply sockets 31 and power supply sockets 32 are provided on the apparatus main body side and have the same insertion direction. The pair of power supply sockets 31 and the power supply sockets 32 are inserted from the insertion direction by the pair of connection terminals 61 and the connection terminals 62, and the ultraviolet lamp 2 (discharge tube 4) is held in a substantially horizontal state (refer to FIG. 1). ). Specifically, the first power supply socket 31 is a power supply socket on the high voltage side, and the second power supply socket 32 is a power supply socket on the ground side.

As shown in FIG. 4, the power supply socket 31 on the high voltage side is fixed to the upper wall 101 of the casing constituting the apparatus main body.

Specifically, the power supply socket 31 on the high voltage side is supported by the socket fixing member 9 It is fixed to the upper wall 101. The socket fixing member 9 is formed of an insulator such as ceramic, and a mounting portion 91 for mounting the power supply socket 31 is formed inside. The mounting portion 91 is a mounting hole that penetrates vertically. In addition, the socket fixing member 9 to which the power supply socket 31 of the high voltage side is attached to the mounting hole 91 is fixed to the through hole H1 of the upper wall 101, and the power supply socket 31 of the high voltage side is fixed downward.

The power supply socket 32 on the ground side is movably disposed along a plane formed on the upper wall 101 described above. The power supply socket 32 on the ground side of the present embodiment is provided to move along the upper surface 101a of the upper wall 101.

Specifically, as shown in FIG. 5, the power supply socket 32 on the ground side is configured such that the socket holding member 10 of the power supply socket 32 holding the ground side is disposed on the slide surface of the upper surface 101a of the upper wall 101. Slide on the 101s and move. In addition, the power supply socket 32 on the ground side held by the socket holding member 10 extends downward from the through hole H2 in a state of being separated from the inner surface of the through hole H2 formed in the upper wall 101, and is kept downward. .

Here, the sliding member 11 such as Teflon (registered trademark) is provided on the lower surface of the socket holding member 10, and the sliding surface 101s is constituted by a sliding member 12 such as Teflon (registered trademark). The socket holding member 10 is slid by sliding the sliding members 11 and the sliding members 12 to each other. Thereby, the movement of the power supply socket 32 on the ground side becomes easy.

Further, in order to restrict the range of movement of the socket holding member 10 in the plane, the movement restricting member 13 is provided around the socket holding member 10. Thereby, the socket holding member 10 is prevented from excessively moving.

Further, in order to press the lower surface of the socket holding member 10 (specifically, the sliding member 11) against the sliding surface 101s, above the socket holding member 10 A pressing member 14 is provided. The pressing member 14 is fixed to the upper surface of the movement restricting member 13. Further, a rotating body 15 that presses and contacts the lower surface of the pressing member 14 and rotates is provided on the upper surface of the socket holding member 10. In the present embodiment, a ball 15 as a rotating body is constituted by a ball plunger 16 energized by a spring. Specifically, as shown in FIG. 6, the three ball plungers 16 are provided at equal intervals in the circumferential direction around the power supply socket 32 on the ground side. Thereby, the ball 15 of the ball plunger 16 is pressed and brought into contact with the lower surface of the pressing member 14, so that the sway of the socket holding member 10 can be suppressed, and the lower surface of the socket holding member 10 can be pressed against the sliding surface 101s. Further, the ball 15 of the ball plunger 16 is moved forward and backward with respect to the plunger main body, and the inclination of the power supply socket 32 on the ground side (i.e., the inclination of the socket holding member 10) can be absorbed. Further, the ball plunger 16 may be provided on the lower surface of the socket holding member 10. In this case, the upper surface of the socket holding member 10 is in contact with the lower surface of the pressing member 14 via the sliding member.

Further, a cover body 17 is fixed to the upper surface 101a of the upper wall 101 so as to accommodate the socket holding member 10, the movement restricting member 13, and the pressing member 14. An external terminal 18 for providing a power supply socket 32 on the ground side is provided on the upper wall of the cover body 17. The external terminal 18 is connected to the power supply socket 32 on the ground side by a flexible connecting conductor 19. Moreover, in order to allow the movement of the power supply socket 32 on the ground side, the connection conductor 19 is configured to be long and flexible.

In this way, the power supply socket 32 on the ground side can be moved, and the power supply socket 32 on the ground side can be relatively moved relative to the power supply socket 31 on the high voltage side, so that a pair of connection terminals are inserted in relation to the pair of power supply sockets 31 and the power supply socket 32. 61. When the terminal 62 is connected, even if the distance between the pair of connection terminals 61 and the connection terminals 62 varies, the deviation can be absorbed by the power supply socket 32 on the ground side. Thereby, the variation in the processing size of the discharge tube 4, the expansion and contraction caused by the thermal expansion of the device, the positional error of the connection terminal 61, the connection terminal 62, and the like can be absorbed, thereby reliably passing through the pair of power supply sockets 31 and the power supply socket 32. Power is supplied to the pair of external electrodes 51 and 52 via the pair of connection terminals 61 and the connection terminals 62.

According to the ultraviolet irradiation device 100 of the present embodiment configured as described above, only the pair of power supply sockets 31 and the power supply socket 32 are inserted into the pair of connection terminals 61 provided at the axial end portions 4m and the end portions 4n of the discharge tube 4, and connected. The terminal 62 can supply power to the pair of external electrodes 51 and 52. Thereby, the lead wires connected to the pair of external electrodes 51 and 52 can be eliminated, and complicated work such as welding or welding accompanying the connection of the leads can be eliminated. Therefore, the attachment and removal of the ultraviolet lamp 2 (discharge tube 4) with respect to the apparatus main body of the ultraviolet irradiation device 100 can be facilitated.

Moreover, since the lead wires for connecting to the pair of external electrodes 51 and 52 provided in the discharge tube 4 are not required, it is possible to eliminate the occurrence of contaminants due to the irradiation of the ultraviolet rays to the leads, and it is possible to reduce the size by eliminating the need for the leads. cut costs.

Furthermore, the present invention is not limited to the above embodiment.

For example, the configuration in which the power supply socket 32 on the ground side can be moved can be set to at least two along the upper wall 101 provided in the casing as shown in FIGS. 7 and 8(A) and 8(B). The rotation axis direction of each direction moves, and can be configured to rotate around the rotation axis.

Specifically, the above-described configuration includes the first shaft body 20 and the first bearing 21, the socket holding member 10 is movable in the X-axis direction and rotatable about the X-axis, and the second shaft body 22 and the second bearing 23 are provided. The socket holding member 10 is movable in the Y-axis direction and rotatable around the Y-axis. Further, as the first bearing 21 and the second bearing 23, a shaft that can linearly and rotationally move the first shaft body 20 and the second shaft body 22 is used. Cheng.

The second shaft body 22 is provided in the socket holding member 10 , and the second bearing 23 is provided in the movable member 24 , and the movable member 24 is provided around the socket holding member 10 . The first shaft body 20 is provided on the movable member 24, and the first bearing 21 is provided on the base 25, and the base 25 is provided on the upper wall 101 of the casing. Further, the second shaft body 22 may be provided to the movable member 24, and the second bearing 23 may be provided to the socket holding member 10, or the first shaft body 20 may be provided to the base 25, and the first bearing 21 may be provided. It is provided on the movable member 24. Further, the members for providing the first shaft body 20 and the first bearing 21 and the second shaft body 22 and the second bearing 23 may be reversed.

According to this configuration, the variation in the processing size of the discharge tube 4, the expansion and contraction caused by the thermal expansion of the device, and the positional error of the connection terminal 61 and the connection terminal 62 can be absorbed, and the pair of power supply sockets 31 can be used. The power supply socket 32 surely supplies power to the pair of external electrodes 51 and 52 via the pair of connection terminals 61 and the connection terminals 62. In particular, since the socket holding member 10 is rotatably provided, the inclination error of the connection terminal 61 and the connection terminal 62 can be preferably absorbed.

Further, in addition to making the power supply socket 32 on the ground side movable, it is also conceivable to move the power supply socket 31 on the high voltage side instead of moving the power supply socket 32 on the ground side. In particular, if both of the pair of power supply sockets 31 and the power supply sockets 32 are movably formed, the ultraviolet lamp 2 can be mounted more easily.

Further, the attachment structure of the first connection terminal 61 and the second connection terminal 62 may be, for example, as shown in FIGS. 9(A) and 9(B) in addition to the above embodiment. In addition, both FIGS. 9(A) and 9(B) show the attachment structure of the 1st connection terminal 61.

The structure of FIG. 9(A) is that the nut member 71 is fixed to the mounting hole 411 of the block 41 by the fixing screw 711, and the male screw portion 61a of the first connecting terminal 61 is made. The screw is attached to the fixed nut member 71 to perform mounting. Further, on the side of the first connection terminal 61, the nut member 71 and the fixing screw 711 are each formed of an insulator such as ceramic. On the other hand, on the second connection terminal 62 side, the nut member and the fixing screw are each formed of a metal conductor.

The structure of FIG. 9(B) may be such that the mounting hole 411 of the block 41 has a substantially cross-sectional shape, and the nut member 71 has a flange portion 71c that is in contact with the lower surface of the block 41 by the nut member 71. The male screw portion 61a of the first connection terminal 61 is screwed, and the flange portion 61b of the first connection terminal 61 and the flange portion 71c of the nut member 71 sandwich the block 41.

In addition, the above-described embodiment is configured such that the ultraviolet lamp (discharge tube) is suspended and held underneath, and the central axis of the ultraviolet lamp (discharge tube) may be held in a state of being inclined from the horizontal plane.

Further, although the above embodiment is an excimer lamp using xenon, it may be an excimer lamp using another rare gas capable of performing excimer light emission, a halide thereof, or the like. Further, the vacuum ultraviolet ray having a radiation wavelength of 172 nm is not limited to the wavelength of the ultraviolet ray, and the wavelength of the ultraviolet ray is determined by the substance used as the discharge gas. Therefore, the wavelength is not limited to 172 nm, and is not limited to vacuum ultraviolet ray.

Further, the ultraviolet lamp is not limited to the excimer lamp, and may be applied to other dielectric barrier discharge lamps, and may be applied as long as it is an ultraviolet lamp having a discharge tube provided with a pair of electrodes. Further, in the above embodiment, the ultraviolet irradiation device in which the discharge lamp is an ultraviolet lamp has been described, but the light irradiation device in which the discharge tube lamp is a visible light lamp can also be applied.

Further, in the above embodiment, the discharge tube has a rectangular shape in a cross section. However, as long as the upper surface and the lower surface are flat surfaces, the discharge tube is along the center of the discharge tube. The left and right sides of the shaft do not have to be flat surfaces, for example, they may be slightly bent outward. Further, it is also possible to use a discharge tube including, for example, a cylindrical tube. When the discharge tube is a cylindrical tube or the like, the ultraviolet light emission surface (the surface corresponding to the lower flat surface of the above embodiment) is not a flat surface. Therefore, in order to purge the oxygen around the excimer lamp, etc. A glass plate or the like is placed between the object to be irradiated and the object to be irradiated. In other words, when a glass plate or the like is disposed in such a manner, if a decomposition gas or a powdery substance due to powdering is generated due to deterioration of the resin, the pair of external electrodes are discolored or the surface of the discharge tube or the glass plate is contaminated. The effects of the present invention can also be exerted.

Further, in the above embodiment, the round bar-shaped connection terminal is attached to the power supply socket having the support port of the connection terminal. However, the front end portion of the connection terminal may be bent instead of being hung on the power supply socket. A hole in the front end of the power supply member suspends the discharge tube, and various deformations can be performed.

The present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit and scope of the invention.

2‧‧‧UV lamp (discharge lamp)

4‧‧‧Discharge tube

4a‧‧‧ face facing the extension direction (upper surface)

4b‧‧‧ faces facing the opposite side of the extension (lower surface)

4m‧‧‧ axial end of the discharge tube

4n‧‧‧The other end of the discharge tube in the axial direction

4S‧‧‧Discharge space

31‧‧‧First power supply socket (power supply socket on high voltage side) (power supply unit)

32‧‧‧Second power socket (power supply socket on the ground side) (power supply unit)

51‧‧‧First external electrode (high voltage side electrode)

52‧‧‧Second external electrode (grounding side electrode)

61‧‧‧First connection terminal

62‧‧‧Second connection terminal

100‧‧‧UV irradiation device (light irradiation device)

101‧‧‧Upper wall

101a‧‧‧ upper surface

Claims (15)

A discharge lamp comprising: a discharge tube; a pair of electrodes disposed on the discharge tube; and a pair of connection terminals extending in a direction different from the axial direction at both axial ends of the discharge tube, and connected to the above A pair of electrodes; and the pair of connection terminals are configured such that both end portions of the discharge tube in the axial direction are not located outside the side surface opposite to the one direction. The discharge lamp according to claim 1, wherein the pair of connection terminals are attached to the block, and the block is provided at both axial end portions of the discharge tube. The discharge lamp according to claim 1, wherein the pair of connection terminals are attached to the flange portion, and the flange portion is provided at both axial end portions of the discharge tube. The discharge lamp according to any one of the first to third aspect, wherein the lower surface of the light exit surface of the discharge tube and the upper surface facing the lower surface are flat surfaces, and the pair The connection terminal extends perpendicularly to the upper surface of the discharge tube. The discharge lamp according to any one of claims 1 to 4, wherein the pair of connection terminals are not protruded to the outside of a pair of side surfaces that are connected to the lower surface and the upper surface. The discharge lamp according to any one of claims 1 to 5, wherein the pair of electrodes includes: a first external electrode disposed on a surface extending in a direction extending toward the pair of connection terminals; and The two external electrodes are provided on the surface opposite to the extending direction. The discharge lamp of claim 6, wherein the first external portion The electrode is a high voltage side electrode. The discharge lamp according to any one of claims 1 to 7, wherein the discharge tube is an excimer lamp. The discharge lamp according to any one of claims 1 to 8, wherein the discharge tube is attached to a pair of power supply members, and the pair of power supply members are provided on the apparatus main body side and have the same mounting direction. A light irradiation device comprising: a discharge tube; a pair of electrodes disposed in the discharge tube; a pair of connection terminals extending in a direction different from the axial direction at both axial ends of the discharge tube, and connected to the above a pair of electrodes; and a pair of power supply members provided on the apparatus main body side, wherein the pair of connection terminals are connected to supply power from the pair of connection terminals by the pair of connection terminals; and the pair of connection terminals are provided in the discharge tube The axial end portions are not located outside the side opposite to the one direction described above. The light-emitting device according to claim 10, wherein the discharge tube is horizontally suspended by the pair of connection terminals being attached to the pair of power supply members. The light irradiation device according to claim 10, wherein at least one of the pair of power supply members is movably provided. The light irradiation device according to claim 12, wherein the power supply member to which the connection terminal of the high voltage side is inserted is fixed, and the power supply member inserted into the connection terminal on the ground side is movably provided. The light irradiation device of claim 13, wherein the movable device is movable The power supply member provided in the ground is moved along a plane provided on the side of the apparatus main body. The light-irradiating device according to claim 12, wherein the movably provided power supply member is rotated on the apparatus main body side around a rotation axis set in at least two directions.