TW201408499A - Fabricating a fluid ejection device - Google Patents

Abstract

In an embodiment, a method of fabricating a fluid ejection device includes forming on a substrate, a primer layer having a center-of-slot rib feature. The method also includes forming over the primer layer, a chamber layer that extends the center-of-slot rib. The method further includes forming over the chamber layer, a first layer of a two-layer tophat that further extends the center-of-slot rib. The method then includes forming over the first layer, a second layer of the two-layer tophat.

Description

Technology for manufacturing fluid ejection devices

The present invention relates to a technique for manufacturing a fluid ejection device.

Background of the invention

The fluid ejection device in the ink jet printer provides a droplet ejection method that is disposed as required. Inkjet printers produce images by ejecting ink droplets through a plurality of nozzles onto a print medium such as paper. The nozzles are typically arranged in one or more arrays such that ink droplets ejected from the nozzles in a proper sequence cause the characters or other images to be printed as the print head and the print medium move relative to each other. On the print media. In a particular example, a thermal inkjet printhead evaporates a small amount of fluid in a firing chamber by causing a current to pass through a heating element to generate heat, thereby ejecting droplets from the nozzle. In other examples, a piezoelectric inkjet printhead uses a piezoelectric material actuator to generate a pressure pulse that forces ink droplets away from a nozzle.

When the nozzle is left to be exposed to atmospheric conditions while being in a standby state, the loss of water evaporating through the pores of the nozzle changes the local composition of the ink volume in the pores, the firing chamber, and in some cases, It will exceed the entrance to the shelf/groove (ink tank) interface. After the nozzle has not been applied for a period of time, the properties of these localized volumes can be changed. It can change the droplet ejection kinetics (eg, droplet trajectory, velocity, shape, and color). When reprinting after an unused period of time, there is an inherent delay before the local ink volume in the nozzle aperture is refilled, and the delay and the associated effect on droplet kinetics after a period of no ejection time. It is called a decap reaction. The industry's continued improvement in inkjet printers and other fluid ejection systems focuses on melting reactions.

According to an embodiment of the present invention, a method for manufacturing a fluid ejection device is specifically provided, comprising: forming a primer layer having a groove center rib on a substrate; forming a cavity on the primer layer a chamber layer extending the center rib of the groove perpendicular to the substrate; forming a first layer of a double-layer top ring on the chamber layer, further extending perpendicular to the base extending groove center rib; A second layer of the double-layered top ring is formed on the layer.

100‧‧‧Inkjet printing system

102‧‧‧Inkjet print head assembly

104‧‧‧Ink supply assembly

106‧‧‧Relocation assembly

108‧‧‧Media delivery assembly

110‧‧‧Electronic printer controller

111‧‧‧ Processor

112‧‧‧Power supply

113‧‧‧ memory

114‧‧‧Print head

116‧‧‧Nozzles

118‧‧‧Printing media

119‧‧‧Double top ring layer

120‧‧‧Storage

122‧‧‧Ink droplets

124‧‧‧Information

128‧‧‧ pump module

200‧‧‧ base

202‧‧‧ fluid trench

202a, 202b‧‧‧ fluid supply trench

204‧‧‧Under paint layer

206‧‧‧fire resistor

208‧‧‧ chamber

210‧‧‧ chamber layer

212‧‧‧jet channel

214‧‧‧ first floor

216‧‧‧ second floor

218‧‧‧ nozzle aperture

220‧‧‧large cavity

222‧‧‧ Small cavity

224‧‧‧Secondary fluid flow path

300‧‧‧channel entrance

302‧‧‧Channel exit

304‧‧‧ Impedance pump

306‧‧‧ Fluid conduit

308‧‧‧ pump pores

310‧‧‧ pump chamber

312‧‧‧Particle tolerant structure

600‧‧‧Part 1

602‧‧‧ Terminal

604‧‧‧ notch channel

606‧‧‧Part II

608‧‧‧ Beginning

800‧‧‧ vents

900‧‧‧Wax material

1100‧‧‧ Grooved center ribs

1200~1400‧‧‧ exemplary method

1202~1210, 1302~1314, Block 1402~1410‧‧‧

Embodiments of the present invention will now be described, by way of example, with reference to the accompanying drawings, in which FIG. 1 shows a fluid ejection system as an inkjet printing system in accordance with an embodiment; FIGS. 2a and 2b respectively show A side view of a portion of an exemplary fluid ejection device of an embodiment and a plan view; FIGS. 3 through 7 show a different flow characteristics of a chat body for use in a double top hat according to various embodiments. An example of a fluid ejection device; Figure 8 shows an example of a fluid ejection device having a vent formed in a first layer of a double-layered top ring, according to an embodiment; Figures 9a through 9d show Figure 8 having the vent according to an embodiment. An example of a fluid ejection device; FIG. 10 shows another example of a fluid ejection device having a plurality of vent holes formed in a first layer of a double-layer top ring, according to an embodiment; FIG. 11 shows an embodiment according to an embodiment. An example of a fluid ejection device having a "channel" support feature that spans a fluid channel for supporting the dual layer top ring; and Figures 12 through 14 illustrate a method for fabricating a fluid ejection device in accordance with various embodiments. Flow chart of an exemplary method.

Detailed description of the preferred embodiment Throughout the description

As previously described, the melt reaction affects the localized ink volume to the nozzle aperture, the firing chamber, and other adjacent regions in the fluid ejection device that interface with the surrounding environment during the non-jetting standby. In general, the melting behavior tends to produce a "first-drop-out" print image concurrency problem in the form of pigmented ink media separation (PIVS) and viscous plug attachment mode. In the PIVS melting mode, the moisture that evaporates in the exposed pores causes a local concentration increase in the non-volatile ink components located in the pores and/or in the device firing chamber. Variations in the ink composition in a particular region can consume the volume of ink within its local chamber and/or within the pores. When the nozzle is subjected to the dynamic recovery state, from the nozzle The color of the first droplet ejected will be different from the color of the replenishing ink, which will affect the image quality of the printed droplet on the paper. Similarly, the viscous plug melt mode is derived from the evaporation of ink that causes docking in the pores (and in some cases in the chamber) due to the consumption of water molecules in the ink and subsequent evaporation in the local ink viscosity." Thicken or "harden". This type of melting reaction affects the droplet ejection power and thus produces misdirected droplets, decelerating droplets, and in some cases, no droplets at all.

Previous methods of mitigating the melting reaction have mostly focused on ink formulation chemistry, minor structural adjustments, adjustment of nozzle firing parameters, and/or service algorithm approach. However, these solutions are often biased towards the implementation of a particular printer/platform and therefore do not provide a universally applicable solution.

Efforts to mitigate the melting reaction by adjusting the ink formulation often focus on, for example, the addition of key additives, which are often only helpful in collocation with specific dispersion chemistries. A structurally focused strategy typically consists in balancing the storage (ie, the length from the center of the firing resistor to the edge of the inlet ink supply slot), with or without buried holes, and modifying the resistor size. However, these techniques typically only provide a slight performance gain. The firing pulse subroutine is known as a sub-TOE mixing protocol for agitating the ink located in the nozzle to overcome the melt dynamics of the pigment ink separation (PIVS) form, or to deliver more The energy of the ink volume in a plurality of chambers is excited (either at a higher voltage or through a modified precursor pulse configuration) to counteract a slightly improved structure for a specific purpose in the melt reaction of the viscous plug. However, as such, This strategy can only provide marginal benefits for specific non-generic situations. Service algorithms typically derive waste inks and associated waste ink storage, printer sprays, and print/wipe communication protocols that can only be implemented before or after job execution.

The disclosed embodiments of the present invention provide a manufacturing technique for a fluid ejection device that mitigates the melting reaction through a system-level hardware approach that is superior to the existing market-based melt mode for offsetting PIVS and directly addresses the viscous plug. The main melt reaction. This solution performs a composite multilayer void fabrication to create a new form of intra-nozzle flow channels that allow a large amount of ink supply to be processed through portions of the pores. A standard individual top ring layer is interposed as a first layer in a two-layer stack configuration having a flow channel feature that collects a portion of the die-level recirculating flow through the nozzle aperture. The second layer of the two-layer top ring stack functions to define a nozzle aperture outlet in a manner similar to a conventional top ring layer.

There are many different techniques suitable for producing grain-level fluid circulation. While the grain-level fluid circulation is integrated herein with the notion of fluid flow within or through the pores, the techniques used to generate such cycles are not the focus of this paper. In short, such techniques can include, for example, integrating a fluid-exciter drive integrated pump into a primary fluid recirculation passage. Selective actuation of a fluid actuator integrated at an asymmetrical location in the jet channel (e.g., toward the trailing end of the channel) can create unidirectional and bi-directional fluid flow through the channel. Depending on the actuator mechanism used, time control of the mechanical operation or movement of the actuator can also provide fluid flow through a single shot. The flow direction of the road is controlled. The fluid actuator can be driven by a number of actuator mechanisms, such as thermal bubble resistors, piezoelectric film actuators, electrostatic thin film (MEMS) actuators, mechanical/impact driven film actuators, acoustic coil actuators, magnetically telescopic drive actuation , AC electroosmosis (ACEO) pump mechanisms, and more. The fluid actuator can be integrated into the passage of a microfluidic system, such as a fluid ejection device. Other techniques for creating a grain-level fluid cycle include driving by a differential pressure of an off-die mechanism such as an external pneumatic pump or syringe. However, such institutions are typically cumbersome, difficult to handle and plan, and have unreliable related problems.

These and other grain level recirculation techniques can assist in flushing the supplemental ink through the fluid/ink firing chamber in the fluid ejection device. However, the fabrication techniques disclosed herein provide an ink replenishment solution via voids that directly overcomes the problem of forming an evaporative drive formation in the pores. This strategy extends the field of previous printer systems to manage the concurrency issues associated with print output and melt power, and achieves an ideal "on-the-fly" nozzle that does not require a series of re-inking or The service subroutine ensures that the first drop system printed after a period of standby and no ink jetting is perfectly matched to the quality of the reference line.

The fabrication techniques disclosed herein enable an assembly of fluid ejection devices having a multi-layered pore configuration to provide fluid flow through the pores. The multilayer pore structure is formed in a multilayer top ring layer of the fluid ejection device. Concurrency problems may arise when such a multilayer top ring layer is formed by conventional techniques, which may cause problems such as creating a vacuum in the top ring due to obstruction of trapped air pockets in the lower device layer. In general, by the center Additional structural support is provided beneath the multi-layer top ring layer in the trench region, and by avoiding air trapping in other regions below the multi-layer top ring layer, the fabrication techniques of the present disclosure can avoid this concurrency problem.

In an exemplary embodiment, a method of making a fluid ejection device includes forming a primer layer on a substrate. The primer layer has a grooved center rib. That is, forming the primer layer includes forming a reinforcement of the primer layer in the center of a subsequently formed fluid channel. The method of manufacturing also includes forming a chamber layer on the primer layer, and the chamber layer extends the trench center rib perpendicular to the substrate. Thus, the formation of the chamber layer will be superimposed on the central rib of the trench. A first layer of a two-layer top ring layer is then formed on the chamber layer that extends the groove center rib again. A second layer of the double layer top ring is then formed on the first layer.

In another exemplary embodiment, a method of making a fluid ejection device includes forming a primer layer on a substrate and forming a chamber layer on the primer layer, wherein the chamber layer includes a fluid channel With a chamber. A first layer of a two-layer top ring layer is then formed on the chamber layer, the first layer forming comprising a venting aperture extending through the first layer to the fluid channel. In one embodiment, the fluid passageway includes a U-shaped fluid passageway coupled to a groove at the end of the channel at both sides, and the venting opening is located at a bend or a top end of the U-shaped fluid passage. In another embodiment, the fluid passage extends between two different grooves.

In another exemplary embodiment, a method of making a fluid ejection device includes forming a primer layer on a substrate and forming a chamber layer on the primer layer, wherein the chamber layer includes a channel. One double layer A first layer of the top ring layer is formed on the primer layer and includes a vent hole above the channel, and a second layer of the double layer top ring layer is formed on the first layer. Each layer also includes a portion of the grooved center rib that extends between the second layer and the substrate.

Description of the exemplary embodiments

1 shows a fluid ejection system as an inkjet printing system 100 in accordance with an embodiment of the present disclosure. The inkjet printing system 100 generally includes an inkjet print head assembly 102, an ink supply assembly 104, a mounting assembly 106, a media delivery assembly 108, an electronic printer controller 110, and At least one power supply 112 that supplies power to various different electronic components of the inkjet printing system 100. In this embodiment, the fluid ejection device 114 is used to eject the print head 114 as a fluid droplet. The inkjet printhead assembly 102 includes at least one fluid droplet ejection printhead 114 that ejects ink droplets through a plurality of apertures or nozzles 116 to a print medium 118 for printing on the print medium 118. . The nozzles 116 are typically arranged in one or more columns or arrays such that when the inkjet printhead assembly 102 and the print medium 118 are moved relative to each other, the ink ejected from the nozzles 116 in an appropriate sequence is formed. Characters, symbols, and/or other patterns or images printed on the print media 118. Print media 118 can be any type of suitable sheet or roll material such as paper, card stacks, transparencies, mela, and the like. As further described below, each of the printheads 114 includes a two-layer top ring layer 119 having flow channel features that recirculate through the grain level of the collection portion of the nozzle holes.

The ink supply assembly 104 supplies liquid ink to the print head assembly 102, and including a reservoir 120 for storing ink, the ink flows from the reservoir 120 to the printhead assembly 102. The ink supply assembly 104 and the inkjet printhead assembly 102 can form a one-way ink delivery system or a micro-recirculating ink delivery system. In a one-way ink delivery system, substantially all of the ink supplied to the inkjet printhead assembly 102 is consumed during printing. However, in a micro recirculating ink delivery system, only a portion of the ink supplied to the printhead assembly 102 is consumed during printing, and the ink that was not consumed during printing is returned to the ink supply assembly 104.

In some embodiments, the inkjet printhead assembly 102 and the ink supply assembly 104 are housed together in an ink cartridge or tray. In other embodiments, the ink supply assembly 104 is separate from the inkjet printhead assembly 102 and supplies ink to the inkjet printhead assembly 102 through a interface such as a supply tube. In another embodiment, the reservoir 120 of the ink supply assembly 104 can be removed, replaced, and/or refilled. In the case where the inkjet printhead assembly 102 and the ink supply assembly 104 are housed together in an inkjet cartridge, the reservoir 120 can include a proximal reservoir within the cassette and a septum spaced from the cartridge. The larger reservoir, a separately spaced larger reservoir, is used to refill the proximal reservoir. Thus, a separately spaced larger reservoir and/or proximal reservoir can be removed, replaced and/or refilled.

The placement assembly 106 positions the inkjet printhead assembly 102 for the media delivery assembly 108, and the media delivery assembly 108 positions the print media 118 for the inkjet printhead assembly 102. Thus, a print area is defined between the ink jet print head assembly 102 and the print medium 118 adjacent a region of the nozzle 116. in. In one embodiment, the inkjet printhead assembly 102 is a scan type printhead assembly. Accordingly, the mounting assembly 106 includes a cassette for moving the inkjet printhead assembly 102 to the media delivery assembly 108 to scan the print medium 118. In other embodiments, the inkjet printhead assembly 102 is a non-scanning inkjet printhead assembly. Accordingly, the placement assembly 106 secures the inkjet printhead assembly 102 relative to the media delivery assembly 108 in a depicted position. Therefore, the media delivery assembly 108 will position the print media 118 for the inkjet printhead assembly 102.

In one embodiment, the inkjet printhead assembly 102 includes a printhead 114. In other embodiments, the inkjet printhead assembly 102 is a wide array assembly having multiple printheads 114. In a wide array assembly, an inkjet printhead assembly 102 typically includes a carrier that carries a printhead 114, provides an electrical connection between the printhead 114 and the electronic controller 110, and provides printing. The fluid connection between the head 114 and the ink supply assembly 104.

In one embodiment, the inkjet printing system 100 is a thermal bubble inkjet printing system that ejects droplets as desired, wherein the printhead 114 is a thermal inkjet (TIJ) printhead. The thermal inkjet printhead is configured with a thermal resistance ejection element in an ink chamber for evaporating ink and creating bubbles that force ink or other fluid droplets away from a nozzle 118. In another embodiment, the inkjet printing system 100 is a piezoelectric inkjet printing system that ejects droplets as needed, wherein the printing head 114 is a piezoelectric inkjet (PIJ) printing head. It uses a piezoelectric material actuator as a discharge element for generating a pressure pulse that forces the ink droplets away from a nozzle.

The electronic print controller 110 typically includes one or more processes 111, firmware, software, one or more computer/processor readable memory components 113, including electrical and non-electrical memory components (ie, non-transitory specific media), and others The printer electronics, the mounting assembly 106, and the media delivery assembly 108 of the inkjet printhead assembly 102 are coupled and controlled. The electronic controller 110 receives the data 124 from a host system such as a computer and temporarily stores the data 124 in a memory 113. Typically, data 124 is transmitted to inkjet printing system 100 along an electronic, infrared, optical or other information transfer path. The data 124 represents, for example, one of the documents and/or files to be printed. Thus, the data 124 will form a print job for the inkjet printing system 100 and include one or more print job instructions and/or command parameters.

In one embodiment, electronic printer controller 110 controls inkjet printhead assembly 102 for ejecting ink droplets from nozzles 116. Thus, electronic controller 110 defines a pattern of ejected ink drops that form characters, symbols, and/or other graphics or images on print medium 118. The pattern of ejected ink droplets is determined by the print job command and/or command parameters.

In one embodiment, the electronic controller 110 includes a fluid pump module 128 that is stored in the memory 113 of the controller 110. The pump module 128 includes encoded instructions that can be executed by one or more processors 111 of the controller 110 to cause the controller 110 to implement a jet pump that can operate in the jet channel of the printhead 114. Various functions of (not shown in Figure 1) are utilized to create a grain-level fluid flow that circulates through the jet channel. Pump module 128 manages the direction, rate, and timing of fluid flow through the channels. A jet pump can include a variety of different types of pump actuators, including For example, an impedance pump that generates fluid displacement by heating a fluid to generate expansion and associated with vapor bubbles, a piezoelectric material actuator that generates piezoelectric pulses, and an alternating current permeation (ACEO) pump mechanism through which electrons are transmitted. The electrical stimulation in the jet channel of the print head 114 produces a fluid network stream. In some embodiments, the jet flow through the printhead 114 can be achieved using a difference in decrystallization pressure.

2 shows a side view (FIG. 2a) and a plan view (FIG. 2b) of an exemplary fluid ejection device 114 (ie, printhead 114) in accordance with an embodiment of the present disclosure. The portion of the print head 114 shown in FIG. 2 is a drop generating portion in which fluid/ink droplets are ejected from the print head 114 via a nozzle 116. The print head 114 portion is formed in a laminated configuration comprising a substrate 200 (e.g., glass, decane) with a fluid channel 202 or trench formed therein. In general, the features of the print head 114, such as the fluid channel 202, are formed using a variety of different precision microfabrication techniques, such as electrical forming, laser cutting, anisotropic etching, sputtering, spin coating, dry etching, Photolithography, casting, molding, stamping, cutting, and the like.

Referring to FIG. 2, the print head 114 further includes a primer layer 204 on the substrate 200. The primer layer 204 is typically formed from SU8 epoxide, but can also be formed from other materials such as polyamine. A firing resistor 206 is also formed on the substrate 200 by heating a surrounding fluid located in a microlayer of a chamber 208 to generate a vapor bubble that forces ink from the nozzle 116 to eject ink through the nozzle 116. Droplet. The chamber 208 is defined by a chamber layer 210 formed over the primer layer 204 and the substrate 200. The chamber layer 210 also defines a jet channel 212, which is the primary flow path for ink to flow into and out of the fluid channel 202, such as, for example, as shown in FIG. The primary fluid flow path (i.e., jet channel 212) via chamber layer 210 is shown in Figure 2a by three straight arrows. The material forming the chamber layer 210 is not shown in FIG. 2 (i.e., only the jet channel 212 and the chamber 208 defined by the chamber layer 210 are shown). However, similar to the primer layer 204, the chamber layer 210 is typically formed from SU8 epoxide, but can also be formed from other materials such as polyamidamine.

A two-layer top ring layer 119 is formed on the chamber layer 210. The two-layer top ring 119 forms a two-layer stack that includes a first layer 214 and a second layer 216. Therefore, the first layer 214 is located in an inner layer of the double-layer top ring 119, which is disposed on the second layer 216 (ie, the topmost layer) of the double-layer top ring 119 and the chamber layer 210. between. The double-layered top ring 119 has a thickness of about 20 microns. However, in certain embodiments, the thickness can be more or less than 20 microns. The first layer 214 has a thickness of about 15 microns and the second layer 216 has a thickness of about 5 microns. Although these dimensions may vary in certain embodiments, the thickness of the first layer 214 of the double-layer top ring 119 is generally 50 to 75% of the overall thickness of the double-layer top ring layer 119. between. The two-layer top ring 119 is typically formed from SU8 epoxide, but it can also be made from other materials such as polyamine.

A double-sized nozzle aperture 218 is formed in the double-layered top ring 119 that spans the first layer 214 and the second layer 216 of the top ring layer 119. As shown in Figure 2a, the dual sized aperture 218 comprises two different shapes Cavity. The nozzle aperture 218 includes a larger cavity 220 formed in the first layer 214 of the dual layer top ring 119 and a smaller cavity 222 formed in the second layer of the double top ring 119 216. The larger cavity 220 covers one volume than the smaller cavity 222. However, as shown in Figure 2b, the volume covered by the larger cavity does not include the same width dimension as the chamber 208 disposed below. Instead, the larger cavity has a wider width than the chamber 208 disposed below it.

Referring again to FIG. 2a, although the jet channel 212 forms a primary fluid flow path for the grain level fluid circulation in the chamber layer 210, the larger cavity 220 located in the nozzle aperture 218 is capable of generating a primary fluid flow path 224 through which The nozzle aperture 218 collects a portion of the grain level fluid/ink flowing in the jet channel 212. This fluid flow through the nozzle aperture 218 via the secondary path 224 can disrupt the volume of retentate fluid located in the nozzle region, which can develop during the standby of the nozzle 116 and without ejecting fluid. The fluid/ink flow through the nozzle apertures 218 provides a new and substantial volume of ink that alleviates the PIVS and viscous plug melt reaction modes and improves the print quality of the first drop of droplets by the print head 114". Other fluid flow features formed in the first/intermediate layer 214 of the dual layer top ring 119 provide additional fluid flow through the nozzle apertures 218, as described below.

3-7 illustrate examples of fluid ejection devices 114 (i.e., printheads 114) having different fluid flow characteristics implemented in a double-layered top ring 119 in accordance with an embodiment of the present disclosure. Each of the exemplary print heads 114 of Figures 3-7 is shown in plan view showing the chamber layer 210. The first layer 214 of the two-layer top ring 119 is arranged, the individual views of the second layer 216 of the two-layer top ring 119 are arranged, and an overall design layout that integrates the layers into a single view. It is noted that the primer layer 204 is not shown in these views, but would be placed prior to mounting the chamber layer 210. The firing resistor 206 and, in some cases, a pump actuator (e.g., a pump resistor) are also shown in the overall design layout.

Referring to FIG. 3, the chamber layer 210 defines a firing chamber 208, a pump chamber 310, and a jet channel 212 that extends from the fluid channel 212 to the channel 212 at a first end 300 of the channel 212. A second end 302. The first and second passage ends 300, 302 can be referred to as a passage inlet 300 and a passage outlet 302, respectively, depending on the direction in which the fluid flows through the passage 212. As previously known, the jet channels 212 located in the chamber layer 210 form a primary fluid flow path for grain level fluid circulation. As shown in the overall layout of Figure 3, for example, a resistor pump 304 located in the pump chamber 310, or other type of jet pump, such as a piezoelectric actuator or ACEO pump, or a difference in fluid pressure Disengaging the substrate mechanism, fluid/ink is pumped from the channel 202 through the channel 212 and the firing chamber 208 and through the channel outlet 302 back to the channel 202. In some embodiments, the printhead 114 also includes a particle-resistant formation 312. As used herein, a particle-tolerant construct (PTA) is referred to as an obstruction disposed in a fluid/ink path (eg, channel inlet 300 and outlet 302) to help prevent particles such as dust and bubbles from interfering with the fluid/ The ink flows and avoids clogging the ejection chamber and/or the nozzle 116.

A fluid conduit 306 is formed in the double top ring 119 The resistor pump 304 in a layer 214. The fluid conduit 306 and pump aperture 308 are shown in the first layer 214 view of FIG. 3 and show a nozzle aperture 218 that includes a larger cavity 220 and a smaller cavity 222, as previously described for FIG. In the embodiment of FIG. 3, the fluid conduit 306 extends from the pump aperture 308 to the larger cavity 220 of the nozzle aperture 218, following the path of the flow therethrough to 212. In other embodiments, such as that shown in Figure 4a, the fluid conduit 306 extends from the pump aperture 308 to the larger cavity 220 of the nozzle aperture 218, but does not follow the path of the upper jet channel 212. The fluid conduit 306 intersects and runs through the larger cavity 220 of the nozzle aperture 218 of FIG. Alternatively, the larger cavity 220 of the nozzle aperture 218 forms a portion of the fluid conduit 306 in the first layer 214 of the dual layer top ring 119. In addition, it is noted that this design and other designs of fluid conduits 306 can extend beyond the channel outlet 302 and exit above the region of the trench 202 (i.e., beyond the particle-resistant formation 312).

As the fluid/ink is pumped by the impeder pump 304 and circulated in a primary fluid flow path around the jet channel 212, a fluid conduit 306 formed in the first layer 214 of the dual layer top ring 119 Some flow is captured and allowed to pass through a larger cavity 220 located within the nozzle aperture 218. Moreover, this design allows fluid/ink pumped by the impeder pump 304 to pass directly from the pump aperture 308, through the conduit 306, and into the nozzle aperture 218 without traveling through the primary jet passage 212. Thus, the fluid/ink passes through the nozzle aperture 218 through a primary path and supplies a large, replenished volume of ink that disintegrates the retention volume in the nozzle area and improves the printing of the first printed droplet. quality.

As previously known, FIG. 4 (FIGS. 4a and 4b) shows another embodiment of a fluid conduit 306 formed in the first layer 214 of the two-layer top ring 119 of a row of print heads 114. As with the embodiment of FIG. 3, fluid conduit 306 and pump aperture 308 are shown in first layer 214 of the drawings of FIGS. 4a and 4b, which also shows nozzle aperture 218, which includes the prior description of FIG. Larger cavity 220 and smaller cavity 222. In the embodiment of Figure 4a, the fluid conduit 306 extends from the pump aperture 308 to the larger cavity 222 of the nozzle aperture 218, but does not follow (i.e., above) the path of the jet channel 212. Instead, the conduit 306 of the embodiment of Figure 4a directly spans a portion of the chamber layer 210 and is fluidically coupled to the pump aperture 308 and the nozzle aperture 218 through a first layer of the dual layer top ring 119. Thus, unlike the design indicated in FIG. 3, the fluid/ink flowing through the conduit 306 and into the nozzle aperture 218 is not part of the primary fluid flow that circulates through the jet passage 212. Instead, in the design of Figure 4a, as the impeder pump 304 pumps fluid/ink, a primary fluid circulation is provided through the jet channel 212, and substantially all of the irrigation passes through the nozzle aperture 218 as it surrounds the firing chamber 208. The fluid/ink of the larger cavity 220 flows directly through the fluid conduit 306 formed in the first layer 214 of the double top ring 119. The fluid conduit 306 intersects and runs through the larger cavity 220 of the nozzle aperture 218, and the larger cavity 220 forms a portion of the fluid conduit 306 located in the first layer 214 of the dual layer top ring 119.

In the embodiment shown in FIG. 4b, the jet channel 212 located in the chamber layer 210 is discontinuous and does not extend through the chamber layer 210 between the pump chamber 310 and the firing chamber 208. Therefore, by means of a resistor The fluid flow generated by pump 304 does not circulate through the fluid passage 212 between the pump chamber 310 and the firing chamber 208. Instead, all of the fluid flow generated by the impeder pump 304 will circulate directly through the fluid conduit 306 between the pump aperture 308 and the nozzle aperture 308.

FIG. 5 shows another embodiment of a fluid passage formed in the first layer 214 of the double top ring 119 of a row of print heads 114. The fluid conduit 306 starting end shown in the embodiment of FIG. 5 is not located at the pump aperture 308 and thus does not extend from the pump aperture 308 and the impeder pump 304 to the nozzle aperture 218. Instead, the fluid conduit 306 portion of the embodiment of Figure 5 is initiated by the primary jet channel 212. Thus, in this design, ink flowing through the fluid conduit 306 and into the larger cavity 220 of the nozzle aperture 218 will collect into the conduit 306, completely forming a grain-level fluid flow through which it circulates.

FIG. 6 shows another embodiment of a fluid conduit 306 formed in a first layer 214 of a double top ring 119 of a row of print heads 114. In this embodiment, the chamber layer 210 defines a discontinuous jet channel 212. That is, the first portion 600 of the discontinuous jet channel 212 extends from the channel inlet 300 through a portion of the chamber layer 210 and then to its terminal 602. Above the passage 212, a first formation formed in the double layer top ring 119 is a notch passage 604 having a trailing end that is fluidically coupled to the terminating end 602 of the first portion of the jet passage 212. Thus, fluid flowing from the groove 202 can flow through the discontinuous passage 212 at the passage inlet 300 and then upwardly into the notch passage 604. The notch channel 604 extends a short distance through the first layer 214 of the double layer top ring 119 and then The other end is fluidically coupled to an open end 606 of the second portion 608 of the discontinuous jet channel 212. Thus, fluid flowing from the channel 202 can flow through the first portion 600 of the discontinuous channel 212 at the channel inlet 300 and then into the notch channel 604 and then back down into the discontinuous channel 212. Two parts 608. The second portion 608 of the discontinuous passage 212 extends through the firing chamber 208 and reaches the passage outlet 302. A conduit 306 formed in the first layer 214 then fluidly couples the notch passage 604 with the larger cavity 220 of the nozzle aperture 218. Thus, fluid circulation due to the action of the impeder pump 304 will flow through the discontinuous passage 212 and through the notch passage 604 before flowing through the circulation conduit 306 and then through the nozzle aperture 218.

FIG. 7 shows another embodiment of a fluid conduit 306 formed in the first layer 214 of the double top ring 119 of a row of print heads 114. In this embodiment, the jet channel 212 defined by the chamber layer 210 extends across a central region of the substrate 200 between the two fluid supply channels 202a and 202b. The impeder pump 304 pumps fluid along a groove 202a such that the fluid/ink circulates through the main flow path extending across the central region of the substrate through the jet channel 212 to the firing chamber 208, and then to the second Trench 202b. It is noted that although the pump chamber 310 surrounds the impeder pump 304, no pump aperture is shown in this embodiment. The circulation conduit 306 formed in the first layer 214 of the double top ring 119 extracts a portion of the circulating fluid and bypasses it through the larger chamber 220 of the nozzle aperture 218. As previously described for the former design, the circulating fluid/ink flows through the nozzle aperture 218 via a primary path and provides a large and replenished volume of ink, In addition to the retention volume in the nozzle area, the print quality of the first print drop is improved.

FIG. 8 shows an example of a fluid ejection device 114 having a vent 800 formed in a first layer 214 of a double-layered top ring 119 in accordance with an embodiment of the present disclosure. The fluid ejection device 114 shows the arrangement of the chamber layer 210, the first layer 214 of the double-layered top ring 119, the second layer 216 of the double-layered top ring 119, and the various layers in a separate plan view. The overall design layout in a single schema. The vent 800 is a feature formed in the first layer 214 during fabrication that facilitates subsequent formation of the second layer 216 of the dual layer top ring 119. A vent 800 is formed through the first layer 214 and joined to a U-shaped jet channel 212 located in the lower chamber layer 210. U-shaped jet channel 212 is finally coupled to fluid channel 202 at its two ends. Although FIG. 8 only shows features of the vent 800 formed in the first layer 214, it is noted that one or more fluid flow features such as the catheter 306 as previously discussed with respect to FIGS. 3-6 may be formed in the In the first layer 214. Fluid flow conduit 306 is not shown in Figure 8, but is removed to provide a clearer view and a description of the features of vent 800.

Figures 9a-d show several diagrams of the fluid ejection device 114 of Figure 8 having a vent 800 in accordance with one embodiment of the present disclosure. The overall design layout of Figure 9a shows the air hole 800 and is shown in Figures 9b, 9c and 9d in a cross-sectional view through the vent 800 at two different locations. Figure 9b is a cross-sectional view showing the underlying base of the base 200, the primer layer 204, the chamber layer 210, the first layer 214 of the double top ring 119, and the second layer 216 of the double top ring 119. . The diagram does not show one or more An additional film layer 208, which can include, for example, electrical components as well as circuit traces. Although Figure 9b includes the secondmost layer 216 of the topmost top ring 119, Figures 9c and 9d are not shown. The topmost second layer 216 of the double top ring 119 is not shown in Figures 9c and 9d to illustrate the functional purpose of the vent 800 during manufacture of the fluid ejection device 114. In general, the vent 800 can prevent air from being trapped in the U-shaped channel 212 during the wax filling manufacturing step performed after the patterning step of the channel 212 to form vent holes in the layer 214 and other features. Bend or elbow part. If the vent 800 is not provided, air may become trapped in the elbow portion of the U-shaped channel 212 during the manufacturing of the second layer, such as during the thermal cycling manufacturing step, and cause foaming and the second layer A cavity appears in the middle. Thus, as shown in Figures 9c and 9d, a wax filling manufacturing step is performed after the application of the first top ring layer 214. During the wax filling step, the function of the wax material 900 is intended to fill the cavity in the chamber layer 210, including the U-shaped channel 212. The vent 800 enables the U-shaped channel 212 to achieve a complete wax fill without leaving an air pocket in the bend/elbow portion of the passage 212. The complete wax filling is achieved by the passage of air from the channels through the vent 800 as the wax material enters the channel 212 from both ends.

FIG. 10 shows another example of a fluid ejection device 114 having a plurality of vents 800 formed in a first layer 214 of a double-layered top ring 119 in accordance with an embodiment of the present disclosure. In the example of FIG. 10, the jet channel 212 extends across a central region of the substrate 200 between the two fluid supply channels 202a and 202b. As with the example shown in FIG. 9, the vent 800 of FIG. 10 enables the passage 212 to achieve a complete wax fill without leaving an air pocket in the passage 212, which can cause concurrency problems, such as Foaming and cavities are created during the second layer 216. The complete wax filling is achieved by the passage of air from the channels through the vent 800 as the wax material enters the channel 212 from both ends.

11 shows an example of a fluid ejection device 114 formed with a "runway" support feature 1100 for supporting a topmost layer of a double-layered top ring across a fluid channel 202, in accordance with an embodiment of the present disclosure. . The runway feature 1100 runs down to the center of the groove, forming a grooved center rib "race" 1100 between the lower base 200 and the second layer 216 at the top of the double top ring 119. The trench center rib 1100 spans three layers and includes a primer layer 204, a chamber layer 210, and a first layer 214 of the double chamber top ring 119. The thermal cycling used in patterning the layers of a multi-layer top ring can create complications that can hinder effective sealing, especially across the width of a trench 202. Concurrency issues include, for example, the creation of bubbles and vacuum in the topmost second layer 216. Thus, the first layer 214 does not straddle the trench 202 because the unsupported regions (i.e., where no trench center ribs are present) may be recessed and may cause air to be formed when the second layer 216 is formed. Sleepy, it also causes bubbles and vacuum during subsequent processing. However, the groove center rib 1100 is capable of forming a uniform and sealed second layer 216 in the double layer top ring 119.

12-14 show flow diagrams of exemplary methods 1200, 1300, and 1400 for fabricating a fluid ejection device 114 in accordance with an embodiment of the present disclosure. The methods 1200, 1300 and 1400 correspond to the embodiments previously described for Figures 1-11. In general, features in the fluid ejection device/printing head 114, such as jet channels and chambers, nozzle apertures, fluid channels, A droplet discharge actuator or the like uses a mixed integrated circuit and MEMS technology. These techniques can include, but are not limited to, general photolithography, laser cutting, wet etching, dry etching, plasma etching, sand drilling, sawing, and the like.

More specifically, in the methods 1200, 1300, and 1400 described in Figures 12-14, the manufacturing steps used are primarily related to the performance of the steps in a conventional photolithography procedure. These steps generally involve depositing a coating or layer of (e.g., SU8 or other material) by a spray coating application or by laminating a dry film application, using a photolithographic tool such as a mask or light. The layer is patterned, the layer is developed (e.g., using a solvent) to form features, and the layer is cured to secure the features in position.

Referring to Figure 12, the method 1200 first forms a primer layer on a substrate at block 1202, the primer layer comprising a trench center rib. At block 1204, the method 1200 continues to form a chamber layer on the primer layer that extends the trench center ribs in a direction perpendicular to the substrate. That is, the groove center rib extends through the chamber layer such that it includes a portion of the primer layer and a portion of the chamber layer. In various embodiments, forming the chamber layer includes forming a chamber and a jet channel located in the chamber layer.

In block 1206 of method 1200, a first layer of a two-layer top ring is formed on the chamber layer. The first layer further extends the trench center rib perpendicular to the substrate such that the rib includes a portion of the primer layer, the chamber layer, and the first layer. In some embodiments, forming the first layer includes forming a vent in the first layer that is connected to a A jet channel in the lower chamber layer. In certain embodiments, forming the first layer also includes forming a nozzle aperture disposed above the chamber and forming a conduit above the jet channel to provide a fluid flow path through the nozzle aperture through the nozzle aperture .

The method 1200 includes forming a second layer of a double layer top ring over the first layer, as shown by block 1208. This second layer seals the print head and installs the remaining nozzle apertures. In block 1210 of method 1200, a groove is then formed in the substrate below the center rib of the groove.

Referring now to Figure 13, method 1300 first forms a primer layer on a substrate at block 1302. At block 1304, a chamber layer is formed on the primer layer. The chamber layer includes a jet channel and a chamber. In one embodiment, the fluidic channel forms a U-shaped channel that is coupled to a trench at its two ends. It is noted that the grooves have not been formed when the U-shaped channel is formed. In another embodiment, the fluidic channel is formed as a channel that extends between two different fluid channels. Likewise, although the grooves are mentioned in the step of forming the jet channels, the fluid channels can be formed behind the jet channels.

At block 1306, method 1300 continues by forming a first layer of a double top ring on the chamber layer. The first layer includes a vent extending through the first layer to a jet channel located in the chamber layer. In one embodiment, the vent is located above the bend of a U-shaped jet channel. In another embodiment, the vent includes a plurality of vents disposed along the jet channel between two different grooves.

Applying a wax filling layer at block 1308 so that the wax is completely Fill the jet channel. This wax layer provides structural support and patterning enhancement capabilities for successive jet layer formation. The filling of the jet channel is facilitated by the air exiting the jet channel through the vent as it enters the two ends of the channel. The overflow due to the wax filling procedure is then smoothed using a CMP (Chemical Machining) procedure. The method 1300 continues with forming a second layer on the first layer at block 1310. The second layer includes a nozzle aperture of a smaller cavity that is disposed above the chamber.

The method 1300 continues at block 1312 to form a nozzle aperture of a larger cavity into the first layer. The larger cavity is also disposed above the chamber and forms a partial nozzle aperture in the double layer top ring. At block 1314, method 1300 includes forming a conduit into the first layer that provides a fluid flow path from the jet passage through the nozzle aperture of the larger cavity.

Referring now to Figure 14, method 1400 first forms a primer layer on a substrate at block 1402. At block 1404, a chamber layer comprising a channel is formed on the primer layer. A first layer of a two-layer top ring is then formed over the chamber layer as shown by block 1406. The first layer includes a vent on the channel. At block 1408 of method 1400, a second layer of the two-layer top ring is formed on the first layer. As shown by block 1410, each layer includes a portion of the trench center rib that extends between the second layer and the substrate.

100‧‧‧Inkjet printing system

102‧‧‧Inkjet print head assembly

104‧‧‧Ink supply assembly

106‧‧‧Relocation assembly

108‧‧‧Media delivery assembly

110‧‧‧Electronic printer controller

111‧‧‧ Processor

112‧‧‧Power supply

113‧‧‧ memory

114‧‧‧Print head

116‧‧‧Nozzles

118‧‧‧Printing media

119‧‧‧Double top ring layer

120‧‧‧Storage

122‧‧‧Ink droplets

124‧‧‧Information

128‧‧‧ pump module

Claims (15)

A method of manufacturing a fluid ejection device, comprising: forming a primer layer having a grooved center rib on a substrate; forming a chamber layer on the primer layer, extending the center of the groove perpendicular to the substrate a first layer of a double-layered top ring formed on the chamber layer, further extending perpendicular to the base extending groove center rib; forming a first layer of the double-layered top ring on the first layer Second floor. The method of claim 1 further comprising forming a trench below the central rib of the trench in the substrate. The method of claim 1 wherein forming the first layer comprises forming a vent that is coupled to a jet channel located in the lower chamber layer. The method of claim 1, wherein the chamber layer comprises a chamber and a jet channel, the method further comprising: forming a nozzle aperture disposed above the chamber in the first layer, and a A conduit above the jet channel to provide a fluid flow path from the fluid passage through the nozzle aperture. The method of claim 3, wherein the fluidic channel comprises a channel having both ends coupled to an identical fluid channel. The method of claim 3, wherein the fluidic channel comprises a channel having a first tail coupled to a first fluid channel and a second tail coupled to a second fluid channel. A method of making a fluid ejection device comprising: Forming a primer layer on a substrate; forming a chamber layer on the primer layer, the chamber layer comprising a jet channel and a chamber; forming a double-layer top ring on the chamber layer A layer, the first layer comprising a vent extending through the first layer to the jet channel. The method of claim 7, wherein the jet channel comprises a U-shaped jet channel coupled to a groove at both ends thereof, and the venting hole is disposed at a top end of the curved portion of the U-shaped jet channel . The method of claim 7, wherein the jet channel extends between two different grooves, and the vent includes a plurality of vents that join the two in a first layer above the jet channel Different grooves. The method of claim 7, further comprising applying a wax coating such that the wax completely fills the jet channel with the aid of air passing through the vent opening away from the jet channel. The method of claim 10, further comprising: smoothing the wax through a CMP (Chemical Mechanical Polishing) procedure; and forming a second layer of the double-layer top ring on the first layer, the cavity A nozzle is included above the chamber. The method of claim 7, further comprising forming a larger cavity nozzle aperture in the first layer. The method of claim 12, further comprising forming a conduit in the first layer, the conduit for providing a fluid flow path from the jet passage through the nozzle aperture of the larger cavity. The method of claim 12, further comprising the first layer A second layer of nozzle apertures comprising a smaller cavity is formed. A method of manufacturing a fluid ejection device, comprising: forming a primer layer on a substrate; forming a chamber layer on the primer layer, the chamber layer comprising a channel; forming a layer on the chamber layer a first layer of a double-layer top ring, the first layer including a vent hole above the channel; a second layer of the double-layer top ring formed on the first layer; wherein each layer includes a portion of the trench A central rib extending between the second layer and the base.