TW201406686A - Scribe processing system - Google Patents

Abstract

The purpose of a scribe processing system of this invention is to avoid from using a rotary blade which possibly causes the product failure during scribing. The scribe processing system is a system which performs scribing by contacting rotary blades installed on the top and the bottom to a brittle material substrate, while moving them relatively at the same time; in addition, the system comprises: a component for decoding the management ID number of the rotary blades from the code printed on a blade holder; a component for keeping the blade parameter value for furnishing the operation configuration of the rotary blades during scribing with characteristics; and a component for keeping a process formulation data recorded with a replacement recommendation value associated to the blade parameter and the scribe processing content. The blade parameter of the rotary blade at the lower side is multiplied by a weight coefficient k and kept in the use history data. When a rotary blade with its code read is used to perform the scribe processing according to a process formulation data selected by an input component, in a situation where the blade parameter has exceeded the replacement recommendation value, it is reported that the rotary blade is in a replacement-recommended state.

Description

Line processing system

The present invention relates to a scribing system for the cutting of a substrate of a brittle material, and more particularly to the management of a rotating blade used in a scribing system.

A scribing device is widely known as a device for cutting a brittle material substrate (hereinafter also referred to as a substrate) such as a glass substrate (see, for example, Patent Document 1, Patent Document 2, and Patent Document 3). The scribing device is used to cut a bonded substrate formed by bonding two mother glass substrates into a specific size, for example, in a process of manufacturing a flat panel display (FPD) such as a liquid crystal display panel or a liquid crystal projector substrate. Steps, etc.

In general, the scribing device is a predetermined pre-determined pre-determined path along the surface of the substrate by a rotating blade (a scribing wheel or a blade) which is a disc-shaped tool having a V-shaped blade tip at the outer peripheral end. A device in which the cutting line is crimped and rotated to perform scribing and to expand the crack. Further, there is a case where the substrate is cut by only the above-described scribe line, and there is a case where the substrate is cut by applying stress to the substrate which has been scribed in the break step.

Further, as the scribing device, a scribing device having a plurality of configurations is known, and an appropriate configuration can be selected and used depending on the application. For example, there is a scribing device having a configuration in which only one side of a brittle material substrate is scribed as disclosed in Patent Document 1 and Patent Document 2, or both sides of a brittle material substrate can be simultaneously simultaneously disclosed as disclosed in Patent Document 3. A scribing device constructed of scribing. In addition, the scribing device disclosed in Patent Document 1 and Patent Document 2 has a configuration in which a brittle material substrate can be rotated in a horizontal plane. On the other hand, the scribing device disclosed in Patent Document 3 can transport a brittle material only in one direction. Substrate.

[Background literature] [Patent Literature]

[Patent Document 1] International Publication No. 2007/063979

[Patent Document 2] International Publication No. 2008/149515

[Patent Document 3] Japanese Patent Laid-Open Publication No. 2010-52995

In a factory where an FPD is manufactured, in many cases, a plurality of scribing devices are simultaneously operated in parallel in the same facility, and each scribing device cuts substrates of different materials or varieties. In general, when the substrate is cut, different types of rotary blades are selected depending on the material of the target substrate or the cutting method. Therefore, in the above-described facility, a plurality of types of rotary blades are used in parallel. In the case as described above, it is necessary to correctly mount the rotary blade to be used for each scribing device.

Further, although the tip of the rotary blade is made of a hard material such as diamond, it is a consumable that causes wear due to use, and must be replaced at an appropriate timing before reaching the service life. However, the rotary blade is a minute member having a diameter of at most several millimeters, and it is difficult to visually recognize the state of the blade edge. Moreover, it is not easy to mark its type or lot number on the side to distinguish or even manage each rotary blade. Therefore, previously, the quality of the scribing was judged based on the product obtained after the actual cutting, and it was judged whether or not the rotating blade reached the service life (use limit). However, in the above embodiment, the replacement of the rotary blade is started after the occurrence of a defective product (defective scribe line), and therefore there is a limit in the improvement of the yield of the product.

Patent Document 1 and Patent Document 2 disclose a technique of integrating a rotary blade with a blade holder and replacing it with a blade holder when it is necessary to replace the rotary blade, thereby improving the operability of the rotary blade. And by using the type of the rotating blade or the information for eliminating the initial setting of the mounting error of the rotating blade, etc., by bar code or two The form of the dimension code is stamped on the blade holder to improve the manageability of the rotary blade and the efficiency of the initial processing with replacement.

Patent Document 2 further discloses a management platform that assigns a management number to each blade holder and prepares to record and update the management number and the travel distance of the rotary blade integrated with the blade holder. When the moving distance of the rotating blade to be used for scribing exceeds a certain value, it is judged that the rotating blade must be replaced.

However, in the form disclosed in Patent Document 1 and Patent Document 2, it is possible to distinguish between the respective rotary blades, but it is not possible to prohibit the execution of the scribe line of the rotary blade that should not be used originally or the rotary blade that has reached the service life.

Moreover, the service life of the rotary blade is not limited only by the travel distance, but also depending on the form of use of the rotary blade, that is, the cutting method of the brittle material.

The present invention has been made in view of the above problems, and an object thereof is to provide a scribing processing system which can more reliably avoid the use of a rotary blade which may cause a product defect.

In order to solve the above problems, the invention of claim 1 is a scribing system including a scribing head on which a blade holder is attached, the blade holder holding a rotary blade having a blade on an outer peripheral surface thereof Rotating freely, and the scribing head is movably disposed relative to the brittle material substrate held by the specific holding means, and is held by the blade while the blade holder is mounted on the scribing head The above-mentioned rotating blade is placed on the brittle material substrate to move the scribing head relative to the brittle material substrate, thereby scribing the brittle material substrate; and the scribing head is at least one pair of upper sides The scribing head and the lower scribing head are integrally moved relative to the brittle material substrate, or are provided separately from at least one of the upper scribing heads for scribing the brittle material substrate from the upper side, and At least one of the lower side scribing heads for scribing the brittle material substrate on the side; the scribing processing system further comprises: a decoding device that includes uniquely identifying the above-mentioned blade to maintain When the information of the management number of the rotating blade that is held is marked as a code on the blade holder, the management number of the rotating blade is decoded from the code; the history data holding device is used The operation mode of the rotary blade at the time of the scribing is given a feature; and when the parameter whose value is increased when the corresponding scribing operation is performed is set as the blade parameter, the value of at least one of the blade parameters of each rotary blade is determined. The process is maintained as the usage history data; the process recipe data holding device holds at least one process recipe data, and the process recipe data includes the content of the scribing process performed by the scribing processing system, and at least a suggested replacement value individually determined by one of the above blade parameters; and an input device that can input a plurality of indications for the scribing processing system, the indication comprising selecting, for selecting from the at least one process recipe material, the scribing process The system executes an indication of one of the process recipe materials; and, regarding the at least one upper side scribing head The blade parameters of the rotating blade are directly maintained in the usage history data, and the blade parameters of the rotating blade provided on the at least one lower scribing head are multiplied by a specific weighting After the coefficient k (k>1) is retained in the above-mentioned usage history data, the rotating blade that has been read using the above code performs the above-mentioned scribing process according to the above-mentioned one-process recipe data selected through the input device, thereby When the cumulative value of the above-mentioned blade parameters of a rotary blade exceeds the above-mentioned recommended replacement value, it is notified that the rotary blade is in the recommended replacement state.

The invention of claim 2 is the scribing system according to claim 1, wherein the rotary blade is integrally formed with the blade holder.

The invention of claim 3 is the scribing system according to claim 1 or 2, characterized in that the scribing process is performed in accordance with the content of the selected one of the process recipe materials, and each time corresponding to the blade parameter is performed In the scribing operation, the added value generated in the scribing operation is added to the accumulated value of the previous blade parameter recorded in the use history data, and when the added value exceeds the recommended replacement value, the notification is notified. The above rotating blade is in a recommended replacement state.

The invention of claim 4 is the scribing system according to claim 1 or 2, characterized in that, in order to perform a scribing process, when the process recipe data is selected via the input device, it is recorded according to the process recipe data described above. The added value of the blade parameter calculated by the execution content of the scribing process is added to the previous integrated value of the blade parameter recorded in the use history data, thereby obtaining the one-line process The predicted value of the arrival of the blade parameter is such that when the predicted arrival value exceeds the recommended replacement value, the rotating blade is notified to be in the recommended replacement state.

The invention of claim 4 is characterized in that the at least one of the blade parameters includes at least one of the following parameters: the rotating blade during the scribing process The number of times of collision with the brittle material substrate, the distance that the rotating blade relatively moves in a state of being in contact with the brittle material substrate during the scribing process, the number of times of excision during the scribing process, and the above-described The number of twists that occur during line processing.

According to the inventions of the first aspect to the fifth aspect, it is determined whether or not the rotary blade needs to be replaced according to the recommended replacement value set based on the operation form of the rotary blade at the time of scribing, whereby the process recipe-based data can be surely prevented from being executed. In the case of the set recipe, the scribing defect is caused by the use form of the rotary blade up to this point. Further, since the recommended replacement value is determined according to the setting contents of the recipe, the rotary blade can be effectively used within the usable range.

1‧‧‧Rotating blade

2‧‧‧ (rotating blade) blade

3‧‧‧through holes

10‧‧‧ blade holder

11a‧‧‧ (blade holder) flat

11b‧‧‧ (blade holder) flat

12‧‧‧ gap

13‧‧‧ pin slot

14‧‧‧ Code

15‧‧ ‧ sales

16‧‧‧Installation Department

16a‧‧‧ inclined section

16b‧‧‧flat

20‧‧‧Retaining joints

21a‧‧‧ Bearing

21b‧‧‧ Bearing

22‧‧‧ Keeping Department

23‧‧‧ openings

24‧‧‧ magnet

25‧‧‧Locating pin

30‧‧‧Scribe head

30A‧‧‧Upper side scribing head

30B‧‧‧ underline head

31‧‧‧ (dash head) lifting section

100‧‧‧ scribe device

101‧‧‧Mobile Station

102a‧‧‧rail

102b‧‧‧rail

103‧‧‧Rolling screw

104‧‧‧Transport motor

105‧‧‧Rotating mechanism

106‧‧‧ platform

107a‧‧‧Locating pin

107b‧‧‧Locating pin

108a‧‧‧CCD camera

108b‧‧‧CCD camera

110‧‧ ‧Bridge

111a‧‧‧ pillar

111b‧‧‧ pillar

112‧‧‧Linear motor

120‧‧‧ Controller

121‧‧‧Control Department

122‧‧‧Image Processing Department

123‧‧‧ Input Department

124‧‧‧Code Processing Department

125‧‧‧Transportation Mechanism Drive Department

126‧‧‧Rotary Mechanism Drive Department

127‧‧‧Scribe head drive

128‧‧‧ monitor

129‧‧‧Process Formula Data Maintenance Department

130‧‧‧Use History Maintenance Department

140‧‧‧Reader

200‧‧‧ scribe device

210‧‧‧Substrate support mechanism

211‧‧‧Support unit

212‧‧‧ timing belt

220‧‧‧Clamping mechanism

221L‧‧‧Clamping parts

221R‧‧‧Clamping parts

230‧‧‧Chaining agency

231‧‧‧Upper side scribing mechanism

232‧‧‧Bottom line mechanism

240a‧‧‧CCD camera

240b‧‧‧CCD camera

250‧‧‧ Controller

251‧‧‧Control Department

252‧‧‧Image Processing Department

253‧‧‧ Input Department

254‧‧‧Code Processing Department

255‧‧‧Clamping mechanism drive unit

256‧‧‧1st scribing head drive

257‧‧‧2nd scribing head drive

258‧‧‧ monitor

259‧‧‧Process Formula Data Maintenance Department

260‧‧‧Use History Maintenance Department

270‧‧ ‧ barcode reader

D1‧‧‧Process recipe data

D2‧‧‧Use history data

OH1‧‧‧ distance

OH2‧‧‧ distance

P‧‧‧Battery substrate

V1‧‧‧Recommended replacement value

Fig. 1 is a perspective view of the blade holder 10 in a state in which the rotary blade 1 is held.

Fig. 2 is a side view showing the blade holder 10 in a state in which the rotary blade 1 is mounted.

3 is a side cross-sectional view of the holder joint 20 in a state in which the blade holder 10 is mounted.

4 is an external perspective view showing main mechanical components of the scribing device 200.

FIG. 5 is a view showing a detailed configuration of the scribing head 30.

FIG. 6 is a block diagram showing the functional configuration of the controller 250 provided on the scribing device 200.

Fig. 7 is a view showing the use history data D2 in the present embodiment.

Fig. 8 is a view showing the use history data D2 in the present embodiment.

Fig. 9 is a schematic view showing a state of circumscribing.

Fig. 10 is a view showing an example of twisting of a rotary blade.

FIG. 11 is a view showing a flow of processing until the scribing process is completed after the blade holder 10 is attached to the scribing device 200 in the first embodiment.

FIG. 12 is a view showing a flow of processing until the scribing process is completed after the blade holder 10 is attached to the scribing device 200 in the first embodiment.

Fig. 13 is a view for explaining calculation of an added value of a blade parameter based on a recipe.

FIG. 14 is a view showing a flow of processing until the scribing process is completed after the blade holder 10 is attached to the scribing device 200 in the second embodiment.

Fig. 15 is a view showing a flow of processing until the scribing process is completed after the blade holder 10 is attached to the scribing device 200 in the second embodiment.

<First embodiment> <Rotating blade and its surrounding structure>

First, in the first embodiment of the present invention, a rotary blade (also referred to as a blade) used in a scribing device, a blade holder as a holder thereof, and a mounting end of a blade holder in a scribing device are used. Hold the connector for instructions. 1 is a perspective view of the blade holder 10 in a state in which the rotary blade 1 is held, and FIG. 2 is a side view showing the blade holder 10 in a state in which the rotary blade 1 is mounted. 3 is a side cross-sectional view of the holder joint 20 in a state in which the blade holder 10 is mounted.

The rotary blade 1 has a disk-shaped tool whose outer peripheral end portion is a V-shaped blade portion 2, and has a through hole 3 at the center. In the rotary blade 1, at least a portion of the blade portion 2 is made of a hard material such as diamond. The rotary blade 1 is attached to a scribing device in a state of being held by the blade holder 10 for scribing. As the rotary blade 1, a rotary blade having an outer diameter (wheel diameter) of about 1.0 mm to 6.0 mm and a thickness of about 0.4 mm to 1.1 mm is usually used.

The blade holder 10 is a substantially cylindrical member that holds the rotary blade 1. In the blade holder 10, at one end portion in the longitudinal direction, there are substantially flat flat portions 11a and 11b which are provided in parallel with the longitudinal direction. On the other hand, the other end portion in the longitudinal direction serves as a mounting portion 16 for attaching the blade holder 10 to the scribing device. Further, in the blade holder 10, at least the vicinity of the mounting portion 16 is made of a magnetic metal.

The flat portions 11a and 11b are provided symmetrically with respect to the central axis of the longitudinal direction of the blade holder 10, and the flat portions 11a and 11b are formed as notches 12 along the central axis. Further, pin holes 13 penetrating in the direction perpendicular to the respective faces are provided at the lower ends of the flat portions 11a and 11b.

In the blade holder 10, in a state where the rotary blade 1 is placed in the notch portion 12, the pin 15 is inserted into the through hole 3 formed at the center of the rotary blade 1, and the flat portions 11a, 11b on both sides thereof. In the pin groove 13, the rotary blade 1 is rotatably held by the pin 15 as an axis. Further, in the case of the present embodiment, after the pin 15 is inserted into the pin groove 13 to hold the rotary blade 1 on the blade holder 10, the rotary blade 1 is not removed from the blade holder 10. For example, the replacement of the rotary blade 1 used in the scribing device is performed by replacing the blade holder 10 itself. Therefore, in the following description, the blade holder 10 refers to the blade holder in a state in which the rotary blade 1 is mounted, unless otherwise specified.

On the flat portion 11a, a code 14 is marked (although the illustration is omitted in Fig. 3). Code 14 is a type or management number of the rotary blade 1 held in advance on the blade holder 10 The body identification information, the initial correction (offset) information, and the like are encoded by the text information associated with the rotary blade 1 mounted on the blade holder 10. As the code 14, a preferred example is to use a QR code (registered trademark). The format of the text information as the metadata can be appropriately determined, for example, it can be determined as the following format.

(indicating the type string) / (indicating the string of the management number) / (indicating the string of the initial correction information)

Here, the type is a string of the size (outer diameter, inner diameter, thickness, tool nose angle, etc.) or material of the rotary blade 1 in accordance with a specific rule. The management number refers to a number uniquely assigned to each of the rotary blades 1. Moreover, the initial correction (compensation) information refers to a correction specified in advance for each rotary blade 1 in order to eliminate (compensate) the offset of the scribe line position due to the mounting error of the rotary blade 1 with respect to the blade holder 10. Use information.

The code 14 is after the rotary blade 1 is mounted on the blade holder 10, and after the initial correction (compensation) information has been specified, is marked by a well-known laser marking device or the like. Further, as described below, the code 14 is read and decoded by the code reader 270 (refer to FIG. 6) before scribing.

The mounting portion 16 is formed into a shape in which a part of the cylinder is cut out, and includes an inclined portion 16a and a flat portion 16b parallel to the longitudinal direction of the blade holder 10. The flat portion 16b is provided perpendicular to the flat portions 11a, 11b on the side holding the rotary blade 1. The state in which the rotary blade 1 is attached to the scribing device is realized by inserting the mounting portion 16 having the shape into the holder joint 20 included in the scribing device.

Although not shown in FIG. 3, the holder joint 20 is a member constituting one of the following scribing devices, and is a mounting end of the blade holder 10 in the scribing device. The holder joint 20 includes a retaining portion 22 that mounts and holds the blade holder 10. Further, the holder joint 20 includes bearings 21a and 21b that allow the holder joint 20 to freely rotate about a rotation axis AX1 extending in the Z-axis direction.

A bottomed cylindrical opening 23 is formed in the holding portion 22, and is buried at the deepest end portion thereof. A magnet 24 is provided. Further, on the side of the opening 23, a positioning pin 25 for determining the insertion position of the blade holder 10 is provided perpendicular to the extending direction of the opening 23.

The mounting of the blade holder 10 relative to the holder joint 20 can be performed by inserting the mounting portion 16 of the blade holder 10 into the opening 23 of the holder joint 20. That is, when the mounting portion 16 of the blade holder 10 is inserted into the opening 23, the mounting portion 16 of the blade holder 10 made of a magnetic material is attracted by the magnet 24, whereby the blade holder 10 is pulled toward the opening 23 Internally, in the process, if a certain portion of the inclined portion 16a is in contact with the positioning pin 25, the mounting portion 16 will be rotated about the extending direction of the opening 23, and the positioning pin 25 as shown in FIG. The extending direction is stationary in a state in which the inclined portions 16a abut each other in parallel with each other. At this time, the blade holder 10 is prevented from moving in the rotational direction by the action of the positioning pin 25, and receives the attraction force from the magnet 24, and as a result, is formed in a state of being fixedly attached to the holder joint 20.

On the other hand, in the state of being mounted on the holder joint 20, the force acting on the longitudinal direction of the blade holder 10 is only a magnetic force, so that the removal of the blade holder 10 from the holder joint 20 can be performed by flatness. The sides of the portions 11a and 11b are pulled and easily performed.

Further, the opening 23 of the holder joint 20 is such that, in a state in which the blade holder 10 is mounted, the horizontal position of the pin 15 of the rotary blade 1 is shifted from the horizontal position of the rotation axis AX1 which is the rotation center of the bearings 21a, 21b. Mode setting. The purpose is to cause the rotating blade 1 to generate a so-called caster caster effect when the scribing action is performed. The post-stabilization effect of the kingpin will be described below.

<Main components of the scribing system>

Next, the configuration of the scribing device constituting the scribing processing system of the present embodiment and the controller for controlling the operation thereof will be described. Further, although the scribing device can be variously configured, it is common in that it includes at least one upper scribing line for scribing the brittle material substrate from the upper side, and brittleness from the lower side. At least one lower scribing head for scribing the material substrate, and each scribing head includes a holder joint 20 and is attached to The scribing is performed in a state where the blade holder 10 is attached to the holder joint 20. Hereinafter, a scribing device 200 which can perform double-sided simultaneous scribing using the upper scribing head and the lower scribing head as a representative configuration example will be described.

Further, in the present invention, it is not necessary that the upper side scribing head and the lower side scribing head are double-sided simultaneously scribing in pairs, or the number of the upper side scribing head and the lower side scribing head are the same, for example. Alternatively, the upper side scribing head and the lower side scribing head may be separately provided so that the two can be independently scribed, or one of the upper scribing head and the lower scribing head. The shape is larger than the number of other scribing heads, or may be a form in which the substrate can be rotated.

(composition of the scribing device)

4 is an external perspective view showing main mechanical components of the scribing device 200. Roughly speaking, the scribing device 200 moves between the upper and lower scribe heads 30 (the upper scribe head 30A and the lower scribe head 30B) by including the brittle material substrate P on the upper and lower sides of the rotary blade 1 respectively. A device for scribing the brittle material substrate P simultaneously from the upper and lower directions. In addition, in FIG. 4, the XYZ coordinates of the right-handed system are drawn, in which the moving direction of the brittle material substrate is set to the Y-axis direction, and the moving direction of the scribing heads 30A and 30B in the horizontal plane is set to the X-axis direction. The vertical direction is set to the Z-axis direction.

The scribing device 200 mainly includes a substrate supporting mechanism 210, a clamping mechanism 220, and a scribing mechanism 230 as mechanical components thereof. Further, although not shown in FIG. 4, two CCD cameras 240a for locating positioning alignment marks provided on the upper surface (line surface) of the brittle material substrate P are provided on the upper portion of the scribing device 200. 240b (refer to Figure 6).

The substrate supporting mechanism 210 includes a first substrate supporting portion 210A and a second substrate supporting portion 210B. The first substrate supporting portion 210A and the second substrate supporting portion 210B are disposed to face each other with the scribing mechanism 230 interposed therebetween. The first substrate supporting portion 210A is responsible for transporting the brittle material substrate P before scribing, and the second substrate supporting portion 210B is responsible for transporting the brittle material substrate P after scribing. Each of the first substrate supporting portion 210A and the second substrate supporting portion 210B is constituted by a plurality of (five in FIG. 4) supporting units 211 which are arranged along the X-axis direction. Each of the support units 211 has a longitudinal direction in the Y-axis direction, and a timing belt 212 is placed along the Y-axis direction. The timing belt 212 is configured such that when a brittle material substrate P is supported on the upper surface thereof, a force in the Y-axis direction is applied to the brittle material substrate P, and the timing belt 212 is driven by the brittle material substrate. The movement of P rotates, thereby accelerating the movement of the brittle material substrate P in the Y-axis direction.

The clamp mechanism 220 is configured to clamp (hold) the rear end portion of the brittle material substrate P placed on the timing belt 212 by the pair of clamps 221L, 221R disposed in the X-axis direction, and to maintain In the clamped state, the clamps 221L and 221R are moved in the Y-axis direction. The movement of the clamping mechanism 220 is achieved by a linear motor. Further, the clamps 221L and 221R are provided so as not to interfere with the support unit 211 when moving in the Y-axis direction.

The scribing mechanism 230 is a portion that scribing the upper and lower sides of the brittle material substrate P in parallel at the same time. In the scribing mechanism 230, the upper scribing head 30A and the lower scribing head 30B are included at positions between the first substrate supporting portion 210A and the second substrate supporting portion 210B in the Y-axis direction. The upper scribing head 30A is provided on the upper scribing mechanism 231, and the lower scribing head 30B is provided on the lower scribing mechanism 232, and is movable in the X-axis direction by a linear motor (not shown). Further, in the present embodiment, when the linear motor is driven, the moving speeds of the upper side scribing head 30A and the lower side scribing head 30B are scribed on the upper surface and the lower surface of the brittle material substrate P in the X-axis direction. The speed of the line.

Fig. 5 is a view showing a detailed configuration of the scribing head 30 which is not shown in Fig. 4 . In more detail, FIG. 5 shows the upper side scribing head 30A. The upper scribing head 30A includes a holder joint 20 in such a manner that the rotary blade 1 is located at the lowermost end in a state in which the blade holder 10 is attached. On the other hand, the lower scribing head 30B includes the holder joint 20 in such a manner that the rotary blade 1 is located at the uppermost end in a state in which the blade holder 10 is attached. That is, the lower side line The head 30B is provided in such a manner that the upper side scribing head 30A shown in Fig. 5 is vertically inverted.

In the two scribing heads 30, the pin 15 is horizontal on the blade holder 10, so that the rotary blade 1 is in a posture orthogonal to the horizontal plane and is free to rotate in the horizontal direction.

Further, by including the bearings 21a and 21b as described above, the holder joint 20 is freely rotatable in the horizontal plane in the scribing device 200. Thereby, when the blade holder 10 is mounted on the holder joint 20, the rotary blade 1 is free to rotate in the horizontal plane.

Further, each of the upper scribing head 30A and the lower scribing head 30B includes elevating portions 31A and 31B that can perform the lifting operation of the holder joint 20, respectively. The lifting portions 31A and 31B are realized by, for example, a servo motor, a linear motor, or an air cylinder controlled by air pressure.

In the scribing device 200 having the above configuration, the clamping mechanism 220 is brought into a state in which the rear end portion side of the brittle material substrate P placed on the first substrate supporting portion 210A is clamped by the clamping mechanism 220. When moving in the Y-axis direction, the brittle material substrate P supported by the support unit 211 of the first substrate supporting portion 210A is supported by the supporting unit 211 while being driven by the timing rotation of the timing belt 212 and the clamping mechanism 220 Move and transport in the Y-axis direction. In the middle, when the brittle material substrate P is scribed by the upper scribe line mechanism 231 and the lower scribe line mechanism 232, the brittle material substrate P is gradually supported by the support unit of the second substrate support portion 210B from the distal end portion side. 211. In the second substrate supporting portion 210B, similarly to the first substrate supporting portion 210A, the brittle material substrate P is also conveyed by the movement of the clamping mechanism 220 and the driven rotation of the timing belt 212 included in the supporting unit 211. Therefore, in the scribing device 200, the substrate supporting mechanism 210 and the clamping mechanism 220 function as a holding device of the brittle material substrate P.

In this case, if the position of the upper side scribing head 30A and the lower side scribing head 30B in the Z-axis direction is adjusted in advance, the rotating blade 1 at the front end of the blade holder 10 to be mounted separately and the lower side scribing mechanism 231 and the lower side are drawn. When the brittle material substrate P is in contact with each other between the wire mechanisms 232, the rotary blades 1 are pressed and rotated on the upper and lower surfaces of the brittle material substrate P during transportation. Thereby, the upper and lower surfaces of the brittle material substrate P can be scribed along the Y-axis direction. herein In this case, by appropriately arranging the arrangement positions of the upper scribing head 30A and the lower scribing head 30B in the X-axis direction, the scribing along the Y-axis direction can be performed at any position in the X-axis direction.

Further, when the brittle material substrate P is placed between the upper scribing mechanism 231 and the lower scribing mechanism 232, the blade holders are attached to the upper scribing head 30A and the lower scribing head 30B, respectively. When the rotating blade 1 at the front end is in contact with the brittle material substrate P, the upper scribing head 30A and the lower scribing head 30B are moved in the X-axis direction, whereby the rotary blade 1 is pressed against the brittle material substrate P, and the rotating blade 1 can be pressed against the brittle material substrate P. The brittle material substrate P is scribed along the X-axis direction.

Further, when the scribing device 200 performs scribing, the so-called main pin backward tilting effect acts due to the mounting form of the blade holder 10 with respect to the holder joint 20. Details of the post-stabilization effect of the kingpin will be described below.

FIG. 6 is a block diagram showing the functional configuration of the controller 250 included in the scribing device 200. The controller 250 mainly includes a control unit 251, an image processing unit 252, an input unit 253, a code processing unit 254, a clamp mechanism drive unit 255, a first scribing head drive unit 256, a second scribing head drive unit 257, and monitoring. The device 258, the process recipe data holding unit 259, and the use history holding unit 260. Further, a preferred example of the controller 250 is realized by a general-purpose personal computer, but may be constituted by being incorporated in the scribing device 200.

The control unit 251 includes a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), and the like, and controls the scribing device 200 in an integrated manner. The part of each part of the action.

The image processing unit 252 processes the portions of the image signals from the CCD cameras 240a and 240b. For example, when the position correction (alignment) of the brittle material substrate P to be scribing or the initial correction of the scribing position or the like is performed, the image signals from the CCD cameras 240a and 240b are appropriately applied to the image processing unit 252. After the treatment, it is supplied to the control unit 251 for repair Positive operation processing.

The input unit 253 is an input device such as a touch panel, a keyboard, or a mouse. The operation instruction to the scribing device 200 is given via the input unit 253.

The code processing unit 254 is responsible for decoding (decode) the text information such as the pattern of the rotary blade 1 or the management number based on the result of reading the code 14 by the code reader 270, and gives the decoded content to the control unit 251. In the present embodiment, as described below, by comparing the decoded pattern or the management number with the description of the use history or the recipe, it is determined whether or not the scribing can be performed using the rotary blade 1 having the pattern and the management number.

The clamp mechanism drive unit 255 operates the clamps 221L and 221R of the clamp mechanism 220 in accordance with a drive signal from the control unit 251, and moves the clamp mechanism 220 in the Y-axis direction.

The first scribing head driving unit 256 and the second scribing head driving unit 257 move the upper scribing head 30A and the lower scribing head 30B in the X-axis direction based on the driving signal from the control unit 251, respectively, and drive the same. The elevating portions 31A and 31B of the respective scribing heads of the upper scribing head 30A and the lower scribing head 30B are responsible for holding the lifting operation of the joint 20 .

The monitor 258 is a display device that displays various setting menus or action menus (recipes) of the scribing device 200, operation states of the respective units, and captured images of the CCD cameras 240a and 240b. Furthermore, the monitor 258 itself may be a touch panel and may have the function of the input unit 253.

The process recipe data holding unit 259 holds (stores) a portion (storage medium) of the process recipe data D1 in which the operation contents of the respective portions of the scribing device 200 at the time of scribing are described. In the scribing device 200, from the plurality of process recipe data D1 held in the process recipe data holding unit 259, the process recipe data D1 corresponding to the content of the desired scribing process is selected and called, and the control unit 251 follows In the description, an operation instruction is given to each unit, and the scribing process is executed in accordance with the content of the process recipe data D1.

In each process recipe data D1, the following contents are recorded, for example: suitable for the required The type of the rotary blade 1 of the line of the line, the size (planar size and thickness) of the brittle material substrate P to be scribed, and the position where the scribe line is performed on the brittle material substrate P (or the scribe line is lowered and raised) The position of the scribing head 30 at the time of scribing, or the scribing speed, and the like.

Further, in the process recipe data D1, a recommended replacement value V1 is further described. It is recommended that the replacement value V1 be a rotary blade 1 (blade holder 10) and other rotary blades 1 (other blade holders 10) that are recommended to be used when scribing according to the recipe set based on the process recipe data D1. The value of the baseline at the time of replacement. Details of the proposed replacement value V1 will be described below.

The format of the process recipe data D1 is not particularly limited, and can be described in any format that can be processed by the scribing device 200.

Furthermore, in the scribing device 200, the input portion 253 can also be operated by following the setting menu displayed on the monitor 258, and a new process recipe data D1 can be created and held in the process recipe data holding portion. 259.

The use history holding unit 260 holds (stores) a portion (storage medium) in which the history data D2 of the use history of each rotary blade is recorded, for all the rotary blades 1 used (or used in the future) in the scribing device 200. Specifically, at least one blade parameter is set in advance, and the blade parameter is a parameter that imparts a characteristic to the operation form of the rotary blade 1 in the scribe line and affects the service life of the rotary blade 1. The blade parameter is incremented every time the corresponding scribing action is performed, and the added value of each blade parameter in the scribing line is obtained each time the scribing process is performed, and is used as the usage history data D2 together with the previous accumulated value. Recorded.

Fig. 7 and Fig. 8 are diagrams showing the use history data D2 in the present embodiment. Here, FIG. 7 exemplifies the use history data D2 (referred to as first use history data D2α) of the rotary blade 1 used only in the upper scribing head 30A. On the other hand, in FIG. 8, the usage history data D2 for the rotary blade 1 for the both of the upper side scribing head 30A and the lower side scribing head 30B is mixed (this is called the second usage history). Data D2β).

In the use history data D2 shown in FIG. 7 and FIG. 8, the number of collisions between the rotary blade 1 and the brittle material substrate P, the number of circumcisions, and the occurrence of the rotary blade 1 from the start to the end of the scribe line. The number of twists, the travel distance (unit: m) of the rotary blade 1 in the X-axis direction, the travel distance (unit: m) in the Y-axis direction, and the total travel distance (unit: m) are set as the blade parameters. Furthermore, details regarding the parameters of each blade will be described below. Further, the added value of each blade parameter on the day when the rotary blade 1 is used and the integrated value of each blade parameter are recorded.

In the case where the added value is described in the use history data D2, when the rotary blade 1 is used in the upper scribing head 30A, the actual increase value of each blade parameter is described, whereas the rotary blade 1 is used for the lower side. In the scribing head 30B, the value obtained by multiplying the actual added value of each blade parameter by the weighting coefficient k (k>1) is described.

For example, the first use history data D2α shown in FIG. 7 is related to the data of the rotary blade 1 used only in the upper scribing head 30A. Therefore, for each blade parameter, the actual added value is recorded under each date. a ₁ ~ a _n , b ₁ ~ b _n , c ₁ ~ c _n , d ₁ ~ d _n , e ₁ ~ e _n , d ₁ + e ₁ ~ d _n + e _n . Further, in the first usage history data D2α, the cumulative values of the respective blade parameters are expressed as a, b, c, d, e, and d+e for the sake of convenience.

On the other hand, the second usage history data D2β shown in FIG. 8 is related to the material in which the rotary blade 1 for the both of the upper scribing head 30A and the lower scribing head 30B is mixed. In the second usage history data D2β, the actual increase values for the respective blade parameters are a ₁ ~ a _n , b ₁ ~ b _n , c ₁ ~ c _n , d ₁ ~ d _n , e ₁ ~ e _n , When d ₁ + e ₁ to d _n + e _n , the actual increase in the date (2012/1/21, 2012/1/25) of the rotary blade 1 only in the lower scribing head 30B is described. The value is multiplied by the weighting factor k. For the date other than the above, the rotary blade 1 is used in the upper scribing head 30A, the actual added value is directly described. Further, in the second use history data D2α, the integrated value of each blade parameter is a value a', b', c', d', e', d'+ different from the integrated value in the first use history data D2α. e'.

The value of the weighting coefficient k can be appropriately determined depending on the shape, material, and the like of the rotary blade 1. Furthermore, in the present embodiment, the effect of using the weighting coefficient k will be described later.

Further, as shown in FIG. 7 and FIG. 8, in the use history data D2, the use limit values (A, B, C, D, E, and F) of the respective blade parameters are described, and the respective blade parameters are described. There is a limit flag indicating whether the latest accumulated value has reached the usage limit value. The use limit value means that if the rotary blade 1 is used in a state where the latest integrated value of the blade parameter exceeds the value, the value of the product defect (defective line defect) almost surely occurs. The use limit value is a value inherent to each of the rotary blades 1.

In the present embodiment, the limit flag is set to "1" for the blade parameter whose latest integrated value exceeds the use limit value, and the limit flag is set to "0" for the blade parameter whose latest integrated value does not exceed the use limit value. . In FIGS. 7 and 8 , a case where the blade parameter that becomes the "X-axis direction travel distance" exceeds the use limit value (d, d' > D) is exemplified. As described below, in the present embodiment, even if only one blade parameter having the limit flag of "1" exists in the rotary blade 1, it is prohibited to use the blade parameter, and if the blade parameter is not replaced, the scribing operation cannot be performed. That is, by checking the value of the limit flag, it is possible to specify whether or not the rotary blade 1 is unusable.

Alternatively, the method may be such that only the individual identification information of the rotary blade 1 having the blade parameter whose limit flag is "1" in the corresponding use history data D2 is captured, and the process blade is not usable, and the data is not available according to the blade. Whether or not individual identification information is recorded to determine whether or not the rotary blade 1 can be used.

Further, the blade parameters shown in FIGS. 7 and 8 are merely examples, and the type of the blade parameter to be set or the description format of the use history data D2 is not limited to those shown in FIGS. 7 and 8. Further, as the use limit value, an appropriate value can be determined based on experience or experiment.

Alternatively, in the present embodiment, it is not necessary that the scribing apparatus 200 itself includes the reader 270 or even the code processing unit 254. For example, the scribing processing system connects a plurality of scribing apparatuses 200 to a common management server that collectively manages the scribing apparatuses by a communication network such as a LAN (Local Area Network) (not shown). Alternatively, the code reader 270 or the code processing unit 254 may be provided only in the management server, and the decoded content may be transmitted from the management server to each of the scribing devices 200 through the network. Alternatively, in principle, the operator of the scribing processing system (hereinafter simply referred to as an operator) may input the decoded content via the input unit 253.

Further, in the case where the scribing processing system has the network configuration as described above, it is preferable that the process recipe data holding unit 259 or the usage history holding unit 260 is also provided in the management server. In this case, the process recipe data D1, the usage history data D2, and the blade unusable data are shared among the plurality of scribing devices 200, and can be referred to or updated by any of the scribing devices 200.

<Details of blade parameters>

Next, the blade parameters indicating the state of use of the rotary blade 1 illustrated in Figs. 7 and 8 will be described in detail.

(number of collisions)

In the present embodiment, the number of collisions between the rotary blade 1 and the brittle material substrate P means that the scribing head 30 including the rotary blade 1 is lowered to perform scribing, and the blade portion 2 of the rotary blade 1 and the brittle material substrate P are caused. The number of contacts. When the contact occurs each time, the blade portion 2 is subjected to an impact, and therefore, the blade portion 2 is worn by repeated contact. The use of the worn blade portion 2 is a major factor that deteriorates the quality of the scribing. Therefore, in the present embodiment, the number of collisions between the rotary blade 1 and the brittle material substrate P is set as the blade parameter, and based on the integrated value, it is determined whether or not the rotary blade 1 has reached the use limit.

(external cut)

The outer cut is generally referred to as a position where the upper surface of the brittle material substrate P is a lined surface, and the rotary blade 1 is lowered to a brittle position at a position outside the edge portion of the brittle material substrate P. A method in which the height position of the scribing surface of the material substrate P is slightly lower than the height of the scribe line, and the end portion of the brittle material substrate P is scribed to the other end portion. Fig. 9 is a schematic view showing a state of circumcision. In the case shown in Figure 9, the following is illustrated Shape: in the X-axis direction at a position close to the brittle material substrate P by a distance OH1, the rotating blade 1 is lowered to a line height lower than the scribed surface of the brittle material substrate P, and circumscribed until the same The position of the front side of the OH2 is separated from the brittle material substrate P in the X-axis direction.

Further, with respect to the outer cutting, a method of lowering the rotary blade 1 at the position where the brittle material substrate P is located and performing scribing is referred to as inscribed.

Since the scribe line reaches both ends of the substrate, the break after the scribe line is easy, and there is an advantage that the rotary blade 1 slips at the start position of the scribe line when the dicing does not occur in the case of the inner cut. . However, the rotary blade 1 is apt to be consumed as compared with the case of the inner cut, so the more the number of circumcisions, the easier the rotary blade 1 reaches the use limit. On the other hand, in the present embodiment, the number of circumcisions is set as the blade parameter, and based on the integrated value, it is determined whether or not the rotary blade 1 has reached the use limit.

(rotation of the rotating blade)

Next, in the description of the twist of the rotary blade 1, first, the kingpin backward tilting effect which occurs at the time of scribing will be described. As described above, the holder joint 20 is freely rotatable about the rotation axis AX1, and does not have a mechanism for directly adjusting the posture of the rotary blade 1. Therefore, when the scribing is started, the blade portion 2 of the rotary blade 1 does not necessarily face the scribing direction. On the other hand, in the state in which the blade holder 10 is attached to the holder joint 20, the horizontal position of the pin 15 of the rotary blade 1 is shifted from the horizontal position of the rotation axis AX1 which is the rotation center of the bearings 21a, 21b. Therefore, if the scribing head 30 starts to move in a certain direction in a horizontal direction in a state where the rotary blade 1 is in contact with the brittle material substrate P, the torque acts on the holder joint 20 immediately, and the rotary blade 1 is in the same direction. The wire head 30 is pressed against the brittle material substrate P in a state in which the relative movement directions of the wire ends 30 are parallel. This phenomenon is called the kingpin backward tilting effect.

However, when the king pin back tilting effect occurs, the rotary blade 1 forcibly changes its posture in a state where the blade portion 2 is in contact with the brittle material substrate P. In this embodiment In the state, the mandatory posture change occurring on the rotary blade 1 in response to the occurrence of the caster stabilization effect is referred to as "twisting" of the rotary blade 1.

Fig. 10 is a view showing an example of twisting of a rotary blade. In FIG. 10, the scribing head 30 is moved in the X-axis direction, and the brittle material substrate P is subjected to a plurality of times of scribing in the X-axis direction indicated by the arrow AR1, and then rotated. The blade 1 is temporarily separated from the brittle material substrate P, and then, after the rotary blade 1 is brought into contact with the next scribe start position of the brittle material substrate P, the scribe head 30 is relatively moved in the Y-axis direction, thereby the arrow The Y-axis direction indicated by AR2 is scribed. In this case, the rotary blade 1 in the state in which the first scribe line has been completed is supplied to the scribe line in the next Y-axis direction in a posture in the substantially X-axis direction. Therefore, when the rotary blade 1 is brought into contact with the brittle material substrate P again to start the scribe line in the Y-axis direction, as shown in the circle of FIG. 10, the scribe line is temporarily slightly slanted in a direction different from the Y-axis. Soon, the rotary blade 1 is twisted with the relative movement of the scribing head 30, so that the rotary blade 1 is formed in a posture parallel to the Y-axis direction, and as a result, a desired scribe line in the Y-axis direction can be realized.

The twisting of the rotary blade 1 is one of the main factors that cause the blade portion 2 of the rotary blade 1 to wear, and if the twist is repeated, the quality of the scribe line of the rotary blade 1 is deteriorated. Therefore, in the present embodiment, the number of occurrences of the twist is set as the blade parameter, and based on the integrated value, it is determined whether or not the rotary blade 1 has reached the use limit.

(transition distance)

The travel distance of the rotary blade 1 is a distance in which the rotary blade 1 relatively moves with respect to the brittle material substrate P in a state where the blade portion 2 of the rotary blade 1 is in contact with the brittle material substrate P. Since the scribing is achieved by pressing and rotating the blade portion 2 with respect to the brittle material substrate P, it is understood that when the traveling distance of the rotary blade 1 is long, the abrasion of the blade portion 2 progresses, and the scribing quality is deteriorated. Therefore, in the present embodiment, the travel distance of the rotary blade 1 is set as the blade parameter, and it is judged based on the integrated value of the blade parameter whether or not the rotary blade 1 has reached the use limit.

Furthermore, in FIG. 7, the travel distance in the X-axis direction, the travel distance in the Y-axis direction, and the accumulated value of the equal distances, that is, the total travel distance are treated as individual blade parameters, but they correspond to the shifting of the eye. The distance will vary depending on the content of the recipe set at the time of scribing.

As an example, it is considered that the second scribing in the Y-axis direction is performed without rotating the brittle material substrate P after the first scribing in the X-axis direction is completed. In this case, when the second scribing line is performed, the rotary blade 1 crosses the scribe line previously formed by the first scribe line, so that the rotary blade 1 is more susceptible than the case where the cross traverse is not performed. Shock. In this case, by setting the recommended replacement value V1 regarding the travel distance in the Y-axis direction to be shorter than the recommended replacement value V1 with respect to the travel distance in the X-axis direction, the division by the Y-axis direction can be more reliably suppressed. The occurrence of line defects due to deterioration of line quality.

<Replacement of rotary blade based on recommended replacement value>

As described above, in the present embodiment, the recommended replacement value V1 is described in the process recipe data D1. The recommended replacement value V1 is, in a nutshell, a value set for each blade parameter that is a criterion for recommending replacement of the rotary blade 1. In other words, the recommended replacement value V1 is a standard value, which means that if the rotary blade 1 is not replaced and the scribing process is continued based on the formulation, there is a high possibility that the scribing defect is generated, so that the scratch prevention is prevented. It is best to replace it with a bad line. Therefore, it is generally set such that even if the rotary blade 1 is continuously used in a state where the blade parameter exceeds the above value, the rotary blade 1 does not reach the service life immediately. Further, as for the recommended replacement value V1, an appropriate value can be determined empirically or experimentally, similarly to the use limit value. Further, hereinafter, the case of the rotary blade 1 that satisfies the recommended replacement basis is referred to as a recommended replacement state.

In the present embodiment, it is determined whether or not the rotary blade 1 at the time of scribing can be used (whether or not replacement is necessary) based on the recommended replacement value V1 determined for each recipe and the use history data D2 unique to each rotary blade 1. Thereby, it is possible to surely prevent occurrence of defects in the scribing process of the brittle material substrate P, and it is possible to improve the yield.

Although it is called the scribing process, the method of using the rotary blade 1 will be due to the process recipe. The settings are completely different. For example, by repeating the scribing process in which the scribing is performed in only one direction, or the scribing process in which the scribing head 30 is moved up and down a long distance, the scribing process in which the moving distance is short, or the scribing process in which the twisting is repeated, etc., by changing the recipe setting, Although various sorting processes can be performed, the wear mode of the rotary blade 1 differs depending on the scribing process. This means that if the setting contents of the recipe are different, the method of accumulating the blade parameters until the scribing defect occurs, or the cumulative value of the blade parameters of the rotary blade 1 that can be used when the scribing defect is not generated The upper limit is different. In the present embodiment, in view of this point, by setting the recommended replacement value V1 for each blade parameter for each process recipe data D1, it is determined whether or not there is a rotary blade based on the criterion most suitable for each recipe.

For example, in the formulation in which the scribing head 30 is lifted and lowered a lot, the blade portion 2 is easily worn by the collision of the rotary blade 1 and the brittle material substrate P, and therefore, the blade 1 and the brittleness are involved in the blade parameters. The recommended replacement value V1 of the number of collisions of the material substrate P is set to be low, and it is possible to surely prevent generation of a scribe defect.

On the other hand, even if the blade parameter of the rotary blade 1 has accumulated to a value recommended to be replaced according to the recommended replacement value V1 described in the certain process recipe data D1, the cumulative value is smaller than the recommended replacement value V1 described in the other process recipe data D1. In the case of the case, the rotary blade 1 can also be used for scribing under the recipe of the process recipe data D1. Thereby, the rotary blade 1 can be effectively used within the usable range.

Further, in the present embodiment, as described above, the increase value of the blade parameter is multiplied by the weighting coefficient k only when the rotary blade 1 is used in the lower scribing head 30B. In other words, the added value is increased from the actual value by multiplying the weighting coefficient. The above situation is based on the fact that the rotating blade 1 having a large number of uses in the lower scribing head 30B tends to have a shorter service life. This tendency may be due to the fact that in the rotary blade 1 used in the lower scribing head 30B, the weight of the brittle material substrate itself is generated when the scribing is performed, or the debris (broken glass) is easily attached, that is, the upper side is crossed. The head 30A is generated in a larger load than the lower scribing head 30B to the rotary blade 1.

Assuming that the rotary blade 1 used in the upper scribing head 30A and the rotary blade 1 used in the lower scribing head 30B are completely distinguished, it is conceivable to determine the recommended replacement value or the use limit value of each blade parameter. Coping for different values. However, this coping style limits the degree of freedom of use of the rotary blade 1 (relative to the flexibility of the dispensing of the scribing head 30). On the other hand, in the present embodiment, by using the weighting coefficient k, a recommended replacement value or a use limit value can be determined for one blade parameter, and one rotary blade 1 can be used for the upper side scribing head 30A and the lower side. Both of the scribing heads 30B. That is, the rotary blade 1 can be used with a high degree of freedom. Further, the recommended replacement value and the use limit value in this case refer to the recommended replacement value and the use limit value when the rotary blade 1 is used only in the upper side scribing head 30A.

Further, as long as the rotary blade 1 is replaced based on the recommended replacement value V1, the blade parameter should not reach the use limit value except for the case where the use limit value and the recommended replacement value V1 are set to the same value. Therefore, although it seems that there is no need to set the limit value, there is actually a case where the rotary blade 1 exceeding the recommended replacement value V1 is hard to be used, or the possibility of using the rotary blade 1 that has reached the service life is misused. Therefore, it is effective to set the use limit value in order to prevent the scribe line from being bad in such a case.

<Line processing>

Next, a flow of processing in the case where scribing is performed in the scribing processing system having the above configuration will be described. In the following description, the scribing device 200, which is a mechanical component that performs the actual scribing operation, is also referred to as a "device main body". Moreover, for the sake of convenience, the following description is based on the premise of the scribing by the scribing device 200, and the description can also be applied to other scribing devices having the same configuration.

FIGS. 11 and 12 are views showing a flow of processing up to the completion of the scribing process after the blade holder 10 is attached to the scribing device 200.

First, the blade holder 10 of the rotary blade 1 is prepared to be held (step S1). Furthermore, by pre-selecting and setting the recipe used in the scribing (step S0), it is desired to proceed later. In the case where the scribing content is known, it is preferable to prepare the blade holder 10 having the rotary blade 1 of the type suitable for the scribing. In the case of the scribing apparatus 200, since the two scribing heads of the upper scribing head 30A and the lower scribing head 30B are provided, two blade holders 10 are prepared. Furthermore, unless otherwise specified, in the case of the scribing device 200, when the rotary blade 1 held by at least one of the blade holders 10 is unusable or is the object of the recommended replacement, The situation is handled accordingly.

Next, the code reader 270 is used to read the code 14 stamped on the flat portion 11a of the prepared blade holder 10 (step S2). The read code 14 is immediately decoded into text information in the code processing unit 254 (step S3). Text information such as a pattern, a management number, and initial correction information decoded from the code 14 is given to the control unit 251.

Then, based on the management number decoded from the code 14, the control unit 251 reads the use history data D2 of the rotary blade 1 with the management number from the use history holding unit 260 (step S4), based on the use history data D2. The content of the description determines whether or not the rotary blade 1 is a rotatable blade that has not yet reached the use limit (step S5). Specifically, when there is no blade parameter in which the limit flag is "1" in the use history data D2, it is determined that it is usable (YES in step S5). On the other hand, if there is one of the blade parameters whose limit flag is "1" in the use history data D2, it is judged that it is not usable (NO in step S5). Furthermore, in the case where the blade non-useable material has been generated, it is also possible to judge whether the rotary blade 1 is a usable rotary blade that has not reached the use limit by referring to the data.

When it is determined that the rotary blade 1 is unuserable (NO in step S5), the control unit 251 causes the monitor 258 to display the warning display of the read blade 14 that is to be used later, which is not usable. Further, a signal for prohibiting the operation of the scribing operation (lock scribing operation) using the rotary blade 1 is issued (step S6). Thereby, in the scribing device 200, it is notified that the rotary blade 1 is unusable, and the scribing blade 1 cannot be used for scribing, so that it is possible to surely prevent, for example, the erroneous use of the rotary blade 1 that has reached the end of its service life. Plan The occurrence of line defects and the like.

When the warning display of the unusable warning has been performed, the operator removes the blade holder 10 while the blade holder 10 holding the rotary blade 1 is attached to the holder joint 20, and confirms the removal when the blade is removed. After the state of the blade holder 10 (step S7), another blade holder 10 is prepared (step S8). Moreover, the newly prepared blade holder 10 is again read by the code 14 (step S2). Further, by performing the re-reading of the code 14, the prohibition state of the scribing operation of the scribing device 200 is released.

When it is judged that the prepared rotary blade 1 is a user-possible (YES in step S5), the operator then operates in accordance with the menu displayed on the monitor 258, whereby the slave recipe data holding portion 259 A process recipe data D1 suitable for the scribing is selected, and in addition, information required for the number of blocks of the brittle material substrate P to be processed is input. Thereby, the process recipe required in the scribing is set (step S9). Further, as described above, there is also a case where the process recipe is previously selected and set before the blade holder 10 is prepared.

When the process recipe is set, the control unit 251 compares the pattern decoded from the code 14 with the type of the rotary blade 1 that can be used in the scribe line performed by executing the process recipe described in the process recipe data D1. It is judged whether or not the prepared rotary blade 1 is suitable for executing the process recipe (step S10).

When it is determined that the rotary blade 1 is not suitable for executing the set process recipe (NO in step S10), as in the case described above, the monitor 258 is caused to display the warning display that the rotary blade 1 is unusable, and is issued. It is prohibited to perform a signal for the scribing operation (locking the scribing operation) using the rotary blade 1 (step S6). Accordingly, the scribing device 200 notifies that the rotary blade 1 is unusable, and cannot use the rotary blade 1 to perform scribing. Therefore, it is possible to reliably prevent, for example, misuse of the rotary blade 1 based on the set process recipe. The occurrence of a scribe defect or the like caused by the rotation of the blade 1 by the wire. Further, in this case, the rotary blade 1 judged to be unusable cannot be used only in the scribe line based on the set process recipe, and is not an unusable item that has reached the end of its service life. Therefore, there is also setting up another process. The situation that can be used in the case of a recipe.

As described above, when it is determined that the rotary blade 1 is not suitable for executing the set process recipe, it is necessary to prepare another blade holder and re-read the code (steps S7, S8, S2).

On the other hand, when it is determined that the rotary blade 1 is suitable for executing the set process recipe (YES in step S10), the control unit 251 performs the following arithmetic processing, that is, calculation based on the setting contents of the process recipe The value of each blade parameter at the time of the end of the line drawing based on the process recipe is added, and the added value is added to the integrated value of each blade parameter described in the use history data D2 (step S11). The value thus obtained becomes the cumulative value of the blade parameters that may be reached after the end of the scribing (referred to as the estimated arrival value). In this case, only the rotary blade 1 used in the lower scribing head 30B is multiplied by the weighting coefficient k and then added.

Further, the control unit 251 compares the estimated arrival value with the recommended replacement value V1 described in the process recipe data D1, and determines whether the rotary blade 1 to be used has reached the recommended replacement state in the scribing process (step S12). .

More specifically, in terms of scribing based on the process recipe, in other words, the specific action content of the scribing can be specified according to the setting content of the process recipe, that is, the scribing head 30 is lowered. The number of times the rotary blade 1 is in contact with the brittle material substrate P, or the travel distance of the rotary blade 1, and the like. That is, by analyzing the contents of the process recipe, even if the scribing is not actually performed, the added value of each blade parameter when scribing according to the process recipe can be calculated. When the added value is obtained, as described above, the estimated arrival value of each blade parameter after the scribing process can be obtained before the scribing is actually performed.

Fig. 13 is a view for explaining a method of calculating an added value of a blade parameter based on a process recipe. For example, as shown in FIG. 13, it is considered that the following process recipes are set: six pieces of brittle material substrate P are subjected to end-cutting in six directions (transition distance L1) of X1 to X6 in the X-axis direction, and then in Y. 6 parts of Y1~Y6 in the axial direction (moving distance) The treatment of scribing is performed by incision from L2).

In this case, since there are 12 collisions for each of the 100 brittle material substrates P, the number of collisions between the rotary blade 1 and the brittle material substrate P is 1200 times; since all are inscribed, the number of circumcisions is 0 times. Since the twisting of the next brittle material substrate P by X1 is performed only after the scribing of Y1 after the X6 scribing, and when the scribing of the next brittle material substrate P is performed by X1, the number of twisting is 200 times. The X-axis travel distance becomes 600L1 (m), the Y-axis travel distance becomes 600L2 (m), and the total travel distance becomes 600 (L1 + L2) (m).

In this case, if the cumulative value described in the first use history data D2α shown in FIG. 7 is applied to the calculation of the estimated arrival value, it is determined whether or not the rotary blade 1 has reached the recommended replacement state with respect to each blade parameter. Compare the following two values.

Number of collisions between the rotating blade 1 and the brittle material substrate P: estimated arrival value = a ₁ + ... + a _n + 1200, recommended replacement value V1 = V1a; number of external cuts: estimated arrival value = b ₁ +... +b _n , recommended replacement value V1=V1b; number of twists: estimated arrival value = c ₁ +...+c _n +200, recommended replacement value V1=V1c; X-axis direction travel distance: estimated arrival value = d ₁ +...+d _n +600L1, recommended replacement value V1=V1d; Y-axis direction travel distance: estimated arrival value = e ₁ +...+e _n +600L2, recommended replacement value V1=V1e; total travel distance: The expected arrival value = (d ₁ + e ₁ ) ... + (d _n + e _n ) + 600 (L1 + L2), it is recommended to replace the value V1 = V1f.

As a result of the comparison, even if there is only one blade parameter whose estimated arrival value is larger than the recommended replacement value V1, the control unit 251 determines that the rotary blade is the target to be used. 1 A recommended replacement state is reached in the scribing process (YES in step S12), and the monitor 258 is caused to display a display (recommended replacement display) of the rotary blade 1 suggesting replacement of the read code 14 (step S13). Thereby, the rotary blade 1 is informed that it is in the recommended replacement state.

When the recommended replacement display has been made, the operator usually judges that it is necessary to replace the rotary blade 1 (YES in step S14), prepare another blade holder and reread the code (steps S7, S8, S2). Thereby, it is possible to surely avoid occurrence of scribing defects.

On the other hand, when it is determined that the rotary blade 1 to be used does not reach the recommended replacement state in the scribing process (NO in step S12), the blade holder 10 holding the rotary blade 1 is mounted on the hold. The connector 20 is provided (step S15). Furthermore, this case is confirmed when the blade holder 10 has been attached to the holder joint 20.

Further, there is a case where the replacement display is performed but the replacement is not performed according to the judgment of the operator (NO in step S14), and in this case, the blade holder 10 is also attached to the holder joint. For example, the cumulative value obtained by the above calculation is only slightly larger than the recommended replacement value V1, and it is determined that the possibility that the scribe line defect is low is the same.

If the blade holder 10 is attached to the holder joint 20, the control unit 251 issues a signal indicating that the scribing process is performed based on the set process recipe after performing the well-known alignment process or initial processing in which the details are omitted (steps). S16). The scribing device 200 starts scribing based on the process recipe in response to the execution instruction signal (step S17).

Specifically, the clamp mechanism drive unit 255, the first scribing head drive unit 256, and the second scribing head drive unit 257 each have a corresponding clamp mechanism 220 and an upper scribing mechanism 231 in accordance with the contents of the process recipe. And the lower scribing mechanism 232 operates to realize a scribing action based on a series of process recipes.

Further, in the case of the scribing device 200, in the lower scribing mechanism 232, in order to bring the rotary blade 1 into contact with the brittle material substrate P, the lower scribing head 30B is raised, but the brittle material substrate P and the rotation are caused. The relative positional relationship of the blade 1 is the upper side scribing mechanism 231 Since the upper side scribing head 30A is provided in the same manner, in the present embodiment, the contact form of the brittle material substrate P of the lower scribing head 30B and the rotary blade 1 is also expressed as "a scribing head" for the sake of convenience. 30 drops."

When the scribing operation set by the process recipe is completed and the scribing process is completed (step S18), the use history is updated in accordance with the content of the scribing process (step S19). Specifically, for the use history data D2, the added value of each blade parameter generated by the scribing process and the date of the scribing generated by the scribing process are added, and the previously recorded cumulative value is added. Rewritten to the estimated arrival value obtained by the above operation.

If the usage history is updated, the control unit 251 causes the monitor 258 to display a menu for inputting whether or not to execute a scribing based on another recipe (step S20). When the selection of the scribing with another process recipe is selected (YES in step S20), the process returns to step S5, and the same processing as described above is repeated. When the case where the scribing is not performed with another process recipe is selected (NO in step S20), a series of processing ends.

As described above, in the scribing system of the present embodiment, before the scribing, the code reading the code on the blade holder is read by the reader, and the rotary blade held by the blade holder is rotated. The management number and type decoding, the decoded management number is compared with the usage history. As a result of the comparison, if the rotary blade of the management number has previously recorded the case of a rotating blade that is not usable to reach the use limit, the scribing device performs display prohibiting the use of the rotary blade, and prepares another blade holder Prohibited action before. Thereby, it is possible to prevent the occurrence of a poor scribing due to the use of the rotary blade that has reached the use limit.

Further, the decoded type and the type described in the process recipe data defining the content of the scribing process to be performed are compared. As a result of the comparison, if the type of the rotary blade is not described in the process recipe data as the type of the rotary blade that can be used, the scribing device prohibits the display using the rotary blade and prepares another blade. Prohibit action before the holder. In this way, it is possible to prevent the use of the type from being unsuitable for The problem of poor scribing caused by the rotating blade of the process recipe set by the process recipe data occurs.

Further, with respect to each of the rotary blades, the characteristics of the use pattern are given, and the parameters affecting the service life, that is, the history of the blade parameters are recorded in advance, and on the other hand, in the process recipe data, the parameters corresponding to the respective blades are recorded according to the process recipe data. The value of the scribing content is set in advance as a value for the replacement of the rotary blade, that is, a recommended replacement value. Moreover, regarding each blade parameter, the cumulative value (estimated arrival value) that may have been reached when the line is drawn according to the process recipe is compared with the recommended replacement value, and when there is a larger blade parameter of the former, the recommended replacement rotation is performed. The display of the blade. Moreover, it is considered that the use load is large when used in the lower side scribing head as compared with the case of use in the upper side scribing head, so that the blade is used only when the rotating blade is used in the lower side scribing head The added value of the parameter is multiplied by the weighting factor. According to the above, it is possible to surely prevent the occurrence of the scribe defect when the process recipe based on the process recipe data is executed. Furthermore, since the recommended replacement value is determined according to the setting contents of the process recipe, the rotary blade can be effectively used within the usable range.

<Second embodiment>

In the first embodiment described above, the integration of the blade parameters is performed based on the arithmetic processing of the set process recipe, but the integrated form of the blade parameters is not limited to the above embodiment. In the present embodiment, the flow of the scribing process in the case where the blade parameters are accumulated based on the actual measurement values will be described. However, for the sake of simplicity, in the present embodiment, only the number of collisions of the rotary blade 1 and the brittle material substrate P in the blade parameters exemplified above and the travel distance of the rotary blade 1 are used to determine whether or not the rotary blade 1 needs to be replaced. .

FIG. 14 and FIG. 15 are views showing a flow of processing until the scribing process is completed after the blade holder 10 is attached to the scribing device 200 in the present embodiment.

As shown in FIG. 14, in the front portion of the scribing process of the present embodiment, specifically, after the blade holder 10 is prepared, it is up to the management number or type based on the code decoded from the code 14. The procedure (steps S1 to S10) before determining whether or not the rotary blade 1 is usable is the same as that of the first embodiment.

However, in the case of the present embodiment, when it is determined by the comparison pattern that the rotary blade 1 is suitable for executing the set process recipe (YES in step S10), the blade holder 10 is attached to the holder. On the joint 20 (step S15). Furthermore, this case is confirmed when the blade holder 10 has been attached to the holder joint 20. Further, if the blade holder 10 is attached to the holder joint 20, after performing well-known alignment processing or initial processing, the control portion 251 issues a signal indicating that the scribing process is executed based on the set recipe recipe (step S16).

The scribing device 200 starts scribing based on the process recipe in response to the execution instruction signal (step S17). However, in the present embodiment, the scribing device 200 measures the blade parameters while starting the scribing, and further, the blade is The measured value of the parameter (the measured value of the parameter) is sequentially transmitted to the control unit 251. The control unit 251 adds the parameter actual value to the integrated value before each blade parameter described in the use history data D2 each time the parameter actual value is acquired (step S101). Further, in this case, only the rotating blade 1 used on the lower scribing head 30B is added after multiplying the parameter measured value by the weighting coefficient k.

For example, in the case of the rotary blade 1 used in the upper scribing head 30A, the number of collisions between the rotary blade 1 and the brittle material substrate P is such that the rotary blade 1 and the brittleness are caused by the lifting operation of the scribing head each time. When the material substrate P is in contact, "1" is added to the previous integrated value. Further, regarding the travel distance of the rotary blade 1, each time the scribing operation in the X-axis direction or the Y-axis direction is performed, the travel distance of the rotary insert 1 at this time is added to the previous integrated value.

During the scribing operation, the control unit 251 compares the values of the respective blade parameters with the recommended replacement value V1 described in the process recipe data D1 each time the blade parameters are added, according to Any one of the blade parameters is larger than the recommended replacement value V1 to judge whether the rotary blade 1 has reached the recommended replacement state (step S102).

If the recommended replacement state is not reached (NO in step S102), and the scribing period is performed (NO in step S103), the addition of the parameters and the comparison with the recommended replacement value V1 are repeated.

On the other hand, during the execution of the scribing, when any of the blade parameters is larger than the recommended replacement value V1 and becomes the recommended replacement state (YES in step S102), the control unit 251 causes the monitor 258 to display the use of the recommended replacement scribing line. The display of the rotary blade 1 (recommended replacement display) (step S104). Thereby, the rotary blade 1 is informed that it is in the recommended replacement state. However, the dotted line action continues at this time.

When the recommended replacement display is performed, the operator determines whether or not to replace the rotary blade 1 (step S105). When the replacement is performed (YES in step S105), the scribing is stopped (step S106), another blade holder is prepared and the code is re-read (steps S7, S8, S2). Thereby, it is avoided to cause poor scribing.

In the case where the recommended replacement display has been performed but the rotary blade 1 has not been replaced (NO in step S105), or the rotary blade 1 is not in the recommended replacement state, if the line is set in the process recipe When the operations are all completed, the scribing process ends (YES in steps S18 and S103). Moreover, the accumulated value of the usage history data D2 is updated by adding the blade parameters at this point of time (step S19).

In addition, in the case where the replacement of the rotary blade 1 has not been performed, the replacement of the rotary blade 1 is not performed, and the cumulative value of the blade parameter at the time point when the completion of the scribing process is determined due to the fact that the number of remaining batches is small is satisfied. When it is slightly larger than the recommended replacement value V1, it is determined that the possibility of occurrence of a scribe defect is low.

When the usage history is updated, the control unit 251 causes the monitor 258 to display a menu for inputting whether or not to perform scribing based on another recipe (step S20). When the selection of the scribing by another process recipe is selected (YES in step S20), the process returns to step S5, and the same processing as described above is repeated. When the case where the scribing is not performed in accordance with another process recipe is selected (NO in step S20), a series of processing ends.

As described above, in the present embodiment, the first embodiment in which the blade parameter is calculated based on the description of the process recipe and the rotary blade 1 is in the recommended replacement state based on the calculation result is based on the actual situation. The scribing action determines whether the rotary blade 1 is in the recommended replacement state. In the first embodiment, if the setting content of the process recipe is complicated, it takes time to calculate the arrival value, and thus the processing efficiency may be lowered. However, in the present embodiment, it is repeated only in the scribing process. Since the addition processing is performed, the scribing process can be performed without lowering the processing efficiency, and the occurrence of the scribing defect can be surely prevented.

Further, in the first embodiment, there is a case where even if the rotary blade 1 that does not actually reach the recommended replacement state is compared, the estimated arrival value is compared with the recommended replacement value, and as a result, the recommended replacement state is reached at the next use. In this case, the replacement is performed at this point of time; however, in the present embodiment, the rotary blade 1 is replaced only after the recommended replacement state is actually reached, so that the rotary blade 1 can be used more effectively.

Furthermore, the actual measurement of the blade parameters can be performed using well-known techniques. The number of collisions between the rotary blade 1 and the brittle material substrate P may be, for example, a configuration in which a relay (electrical connection) that is turned on or off each time the rotary blade 1 comes into contact with the brittle material substrate P is provided on the scribing head 30. In addition, "1" is added every time the control unit 251 detects the ON/OFF signal; it may be a configuration in which the lift unit 31 of the scribing head 30 is constituted by a servo motor, and the rotary blade 1 is detected every time. When the brittle material substrate P is in contact with each other, the torque generated by the servo motor is increased by "1".

Further, regarding the traveling distance of the rotary blade 1, in the case of the scribing action in the Y-axis direction of the scribing device 200, when the relative movement of the rotary blade 1 is realized by a linear motor, the stator portion is disposed along the stator portion thereof. A linear scale of the moving direction of the rotor portion, and if the scale portion is scanned while the scribing head 30 is relatively moved, one pulse signal is generated per unit length, and the travel distance can be calculated from the number of output pulse signals.

Or, if the relative movement of the image rotating blade 1 with respect to the brittle material substrate P is made When it is realized by a ball screw, the number of rotations of the rotary shaft of the motor can be converted and output as a pulse signal by a rotary encoder (not shown), and the output pulse signal can be counted by the encoder counter. This calculates the travel distance.

As described above, even in the present embodiment, as in the first embodiment, the management of the rotary blade held by the blade holder can be performed based on the code decoded from the blade holder. Number and type to determine whether the rotary blade can be used.

Further, with respect to each of the rotary blades, a feature is given to the shape of use thereof, and a parameter which affects the service life, that is, a blade parameter is accumulated based on the actual measurement value, and based on each process recipe for the content in which the scribing process is described. Determine the recommended replacement value for each blade parameter and specify whether the rotating blade for scribing has reached the recommended replacement state. Moreover, it is considered that the use load is large when used in the lower side scribing head compared to the case used in the upper side scribing head, and the blade parameter is used only when the rotating blade is used in the lower side scribing head The measured value is multiplied by the weighting factor. Thereby, it is possible to surely prevent the occurrence of the scribe defect when the process recipe is executed. Further, since the recommended replacement value is determined according to the setting contents of the process recipe, the rotary blade can be effectively used within the usable range.

<variation>

In the above description, the scribing process of the first embodiment and the scribing process of the second embodiment have been independently described. However, the scribing processes are not reversed, but can be performed simultaneously in parallel. In this case, it is also possible to distinguish between the respective scribing processes depending on the type of the blade parameters. For example, the determination of the recommended replacement state based on the number of collisions or the travel distance of the rotary blade 1 and the brittle material substrate P may be applied to the scribing process according to the second embodiment, based on actual measurement, and on the other hand, The determination of the recommended replacement state based on the number of times of the circumcision or the number of times of twisting is performed by applying the scribing process of the first embodiment based on the estimated arrival value.

In the second embodiment described above, the blade parameters are actually measured during the scribing process, but in alignment The blade parameters can also be measured during processing, or during test scribing by manual operation. In this case, since the cumulative value of the blade parameters recorded in the usage history data D2 is close to the value of the actual blade parameter, it is possible to judge more strictly whether or not the rotary blade needs to be replaced. Furthermore, in the case of the first embodiment, such a response is not impossible, but it is not necessarily realistic.

In the case of the second embodiment, the cumulative value of the blade parameters is almost instantaneously updated. The accumulated value can also be instantly displayed on the monitor 258 in this manner. In this case, since the operator can recognize that the blade parameter is close to the recommended replacement value V1, the replacement can be prepared in advance. In this case, the form of the value of the blade parameter before the recommended replacement value V1 is displayed in a countdown manner.

In the above case, it is also possible to use a scribing device in which only one rotating blade is scribed on one surface of the brittle material substrate P, and a plurality of scribing heads are provided on the same surface. A plurality of portions of the surface are simultaneously scribed. In this case, the judgment of whether or not the above-described use can be judged or replaced is performed separately according to the rotary blades attached to the respective scribing heads.

The scribing system can also include means for automatically replacing the blade holder 10 mounted on the holder joint 20 (holding device). In this case, it is preferable to notify the control portion 251 in response to the unusable or in the recommended replacement state of the rotary blade 1, and the blade holder 10 is replaced by the holder automatic change device.

Further, in the above embodiment, the increase value of the blade parameter is multiplied by the weighting coefficient k only when the rotary blade 1 is used in the lower scribing head 30B, but may be used only in the upper scribing head 30A instead. Rotating the blade 1 multiplies the added value of the blade parameter by a factor less than one. In this case as well, the same effects as those of the above embodiment can be obtained.

1‧‧‧Rotating blade

10‧‧‧ blade holder

11a‧‧‧ (blade holder) flat

12‧‧‧ gap

13‧‧‧ pin slot

14‧‧‧ Code

15‧‧ ‧ sales

16a‧‧‧ inclined section

16b‧‧‧flat

Claims (7)

A scribing processing system, comprising: a scribing head on which a blade holder is mounted, the blade holder retaining a rotating blade having a blade on an outer peripheral surface to be rotatable, and the scribing head can be Providing the frangible blade held by the specific holding means relatively movably, the rotating blade held on the blade holder is in contact with the brittleness while the blade holder is attached to the scribing head The material substrate is configured to scribe the brittle material substrate while moving the scribing head relative to the brittle material substrate; and as the scribing head, at least one pair of the upper scribing head and the lower scribing head are opposed to each other The fragile material substrate is integrally moved relative to each other or separately provided with at least one upper scribing head for scribing the brittle material substrate from the upper side, and scribing the brittle material substrate from the lower side. At least one of the above lower side scribing heads; the scribing processing system further comprising: a decoding device that is uniquely identifiable in the inclusion When the information of the management number of the rotary blade held by the blade holder is marked as a code on the blade holder, the management number of the rotary blade is decoded from the code; the history data holding device is used. At least one of the above-mentioned blade parameters for each of the rotary blades is set to a blade parameter when a parameter for imparting a characteristic to the operation of the rotary blade at the time of the scribing is added and the value is increased each time the corresponding scribing operation is performed. The value history is maintained as the usage history data; the process recipe data retention device maintains at least one process recipe data, the system The recipe data includes a content of the scribing process performed by the scribing processing system, and a recommended replacement value that is determined individually for the at least one of the blade parameters; and an input device that can input the scribing line a plurality of instructions for the processing system, the indication comprising an indication for selecting, by the at least one process recipe data, one of the recipe processing materials to be executed by the scribing processing system; and the above-mentioned at least one upper scribing head The blade parameters of the rotary blade are directly maintained in the usage history data. On the other hand, the blade parameters of the rotary blade provided in the at least one lower scribing head are multiplied by a specific weighting coefficient k. After (k>1), in the above-mentioned usage history data, the rotating blade that has been read using the above code performs the above-mentioned scribing process according to the above-described one-process recipe data selected through the input device, thereby When the cumulative value of the above blade parameters of the blade exceeds the above recommended replacement value, the above-mentioned rotating blade is informed that the above-mentioned rotating blade is in the suggestion Change state. A scribing system according to claim 1, wherein said rotating blade is integrally formed with said blade holder. The scribing processing system of claim 1 or 2, wherein the scribing process is performed according to the content of the selected one of the process recipe materials, and each time the scribing action corresponding to the blade parameter is performed, The accumulated value of the previous blade parameter in the history data is added to the added value generated in the scribing action, and when the added value exceeds the recommended replacement value, the rotating blade is notified to be in the recommended replacement state. The scribing processing system of claim 1 or 2, wherein when the process recipe data is selected via the input device in order to perform a scribing process, the scribing process according to the process recipe data described above is performed. The added value of the blade parameter calculated by executing the content is added to the previous accumulated value of the blade parameter recorded in the use history data, thereby obtaining the arrival of the blade parameter after the one-line process The predicted value informs the above-mentioned rotating blade that it is in the recommended replacement state when the above predicted value exceeds the above-mentioned recommended replacement value. The scribing processing system of claim 1 or 2, wherein the at least one of the blade parameters includes at least one of the following parameters: a number of collisions between the rotating blade and the brittle material substrate during the scribing process, and the scribing The distance during which the rotating blade relatively moves in contact with the brittle material substrate during the processing, the number of times of the external cutting during the scribing process, and the number of twists generated during the scribing process. The scribing processing system of claim 3, wherein the at least one of the blade parameters includes at least one of the following parameters: a number of collisions between the rotating blade and the brittle material substrate during the scribing process, during the scribing process The distance by which the rotary blade relatively moves in contact with the brittle material substrate, the number of times of external cutting during the scribing process, and the number of twists generated during the scribing process. The scribing processing system of claim 4, wherein the at least one of the blade parameters includes at least one of the following parameters: a number of collisions between the rotating blade and the brittle material substrate during the scribing process, during the scribing process The above rotating blade is in contact with the above-mentioned brittle material substrate The distance relative to the movement in the contact state, the number of times of the outer cut during the scribing process, and the number of twists occurring during the scribing process.