TW201336093A - Solar cell and its manufacturing method - Google Patents

Solar cell and its manufacturing method Download PDF

Info

Publication number
TW201336093A
TW201336093A TW101106009A TW101106009A TW201336093A TW 201336093 A TW201336093 A TW 201336093A TW 101106009 A TW101106009 A TW 101106009A TW 101106009 A TW101106009 A TW 101106009A TW 201336093 A TW201336093 A TW 201336093A
Authority
TW
Taiwan
Prior art keywords
conductive adhesive
adhesive layer
slurry
solar cell
dielectric layer
Prior art date
Application number
TW101106009A
Other languages
Chinese (zh)
Other versions
TWI453935B (en
Inventor
jia-mei Lin
Zhi-Yu Ren
Kun-Ru Li
Ting Fang
Original Assignee
Motech Ind Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motech Ind Inc filed Critical Motech Ind Inc
Priority to TW101106009A priority Critical patent/TW201336093A/en
Publication of TW201336093A publication Critical patent/TW201336093A/en
Application granted granted Critical
Publication of TWI453935B publication Critical patent/TWI453935B/zh

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Photovoltaic Devices (AREA)

Abstract

A solar cell and its manufacturing method, wherein the mentioned cell comprises: a photoelectric conversion unit, a dielectric layer, a few back-surface field structures, and a first and a second conductive glue layers containing the glass material. The second conductive glue layer is covered onto the dielectric layer, and its glass content ration is smaller than that of the first conductive glue layer. By means of two different materials to make the first and second conductive layers to be used as the back-surface electrode of the cell and adjusting the glass content in the material according to the disposition position and function of the mentioned conductive glue layer, the two materials are made to have different erosion capabilities, therefore on one hand capable of forming the back surface filed structure with high thickness and excellent quality, and on the other hand capable of maintaining the quality and function of the dielectric layer to enhance the characteristics of the open-circuit voltage and the conversion efficiency of the cell.

Description

太陽能電池及其製造方法Solar cell and method of manufacturing same

本發明是有關於一種太陽能電池及其製造方法,特別是指一種矽晶太陽能電池及其製造方法。The present invention relates to a solar cell and a method of fabricating the same, and more particularly to a twinned solar cell and a method of fabricating the same.

參閱圖1,為一種已知太陽能電池1的製造流程示意圖,在此先說明該太陽能電池1的結構(請參考圖1的最後一道流程),主要包含:一晶片11、一介電層12、數個形成於該晶片11的局部部位的背電場結構(local back surface field,簡稱LBSF)13,以及一背電極14。Referring to FIG. 1 , it is a schematic diagram of a manufacturing process of a known solar cell 1 . The structure of the solar cell 1 is described first (please refer to the last process of FIG. 1 ), which mainly includes: a wafer 11 , a dielectric layer 12 , A plurality of local back surface fields (LBSF) 13 formed at a partial portion of the wafer 11, and a back electrode 14.

其中,該晶片11用於將光能轉換成電能,並包括p型矽基板、形成於該基板上的n型射極層,以及抗反射膜等膜層。該介電層12形成於該晶片11的一背面111上,用於降低載子在該晶片11表面複合(recombination)的速率,提升電池的效率。所述介電層12具有數個貫穿的穿孔121。所述背電場結構13對應所述穿孔121而形成於該背面111處,背電場結構13為p型半導體材料,且載子濃度大於該p型矽基板,利用其電場作用阻止電子朝該背面111的方向移動,使電子被收集於該晶片11的n型射極層,以提升轉換效率。而該背電極14位於該介電層12的表面且局部伸入介電層12的穿孔121,進而與該晶片11的背面111接觸形成電連接,透過背電極14將該晶片11產生的電能傳輸到外部。The wafer 11 is used for converting light energy into electrical energy, and includes a p-type germanium substrate, an n-type emitter layer formed on the substrate, and a film layer such as an anti-reflection film. The dielectric layer 12 is formed on a back surface 111 of the wafer 11 for reducing the rate of carrier recombination on the surface of the wafer 11, thereby improving the efficiency of the battery. The dielectric layer 12 has a plurality of through-holes 121. The back electric field structure 13 is formed on the back surface 111 corresponding to the through hole 121. The back electric field structure 13 is a p-type semiconductor material, and the carrier concentration is larger than the p-type germanium substrate, and the electric field is used to block electrons toward the back surface 111. The direction of movement causes electrons to be collected on the n-type emitter layer of the wafer 11 to improve conversion efficiency. The back electrode 14 is located on the surface of the dielectric layer 12 and partially extends into the through hole 121 of the dielectric layer 12 to form an electrical connection with the back surface 111 of the wafer 11, and transmits the power generated by the wafer 11 through the back electrode 14. To the outside.

該太陽能電池1在製作上,是先在該晶片11的背面111形成一層完整的介電層12,並將該介電層12的局部蝕刻移除而形成所述穿孔121,再利用網印方式將鋁漿塗布在該介電層12表面,接著燒結該晶片11,鋁漿材料即乾燥而形成該背電極14,且該鋁漿材料會擴散進入該晶片11中,使該晶片11的局部形成由鋁-矽混合材料構成的背電場結構13。The solar cell 1 is formed by first forming a complete dielectric layer 12 on the back surface 111 of the wafer 11, and removing the local etching of the dielectric layer 12 to form the through hole 121, and then using the screen printing method. An aluminum paste is coated on the surface of the dielectric layer 12, and then the wafer 11 is sintered. The aluminum paste material is dried to form the back electrode 14, and the aluminum paste material is diffused into the wafer 11, so that the wafer 11 is partially formed. A back electric field structure 13 composed of an aluminum-niobium mixed material.

由於鋁漿中的玻璃成分(glass frit)的含量高低會影響鋁漿的侵蝕能力,在一定的限度下,當鋁漿的侵蝕能力愈強時,鋁與基板中的矽的混合效果愈好,燒結形成的背電場結構13的厚度愈厚、品質愈佳。但因為鋁漿材料也會侵蝕該介電層12而造成損害,因而影響介電層12的品質及功能,所以在考慮該介電層12的品質的情況下,鋁漿材料的侵蝕性也不能過高,如此則導致該背電場結構13的厚度不足,從而影響電池的開路電壓、轉換效率等特性。Since the content of the glass frit in the aluminum paste affects the erosion ability of the aluminum paste, under certain limits, when the erosion ability of the aluminum paste is stronger, the mixing effect of the aluminum and the crucible in the substrate is better. The thicker the back electric field structure 13 formed by sintering, the better the quality. However, since the aluminum paste material also erodes the dielectric layer 12 to cause damage, thereby affecting the quality and function of the dielectric layer 12, the corrosion property of the aluminum paste material cannot be considered in consideration of the quality of the dielectric layer 12. If it is too high, the thickness of the back electric field structure 13 is insufficient, thereby affecting characteristics such as open circuit voltage and conversion efficiency of the battery.

因此,本發明之目的,即在提供一種能提升開路電壓及轉換效率等特性的太陽能電池及其製造方法。Accordingly, an object of the present invention is to provide a solar cell capable of improving characteristics such as an open circuit voltage and a conversion efficiency, and a method of manufacturing the same.

於是,本發明太陽能電池,包含:一光電轉換單元、一介電層、數個背電場結構、一個含有玻璃材料的第一導電膠層,以及一個含有玻璃材料的第二導電膠層。Thus, the solar cell of the present invention comprises: a photoelectric conversion unit, a dielectric layer, a plurality of back electric field structures, a first conductive adhesive layer containing a glass material, and a second conductive adhesive layer containing a glass material.

該光電轉換單元用於將光能轉換成電能,並包括相反的一入光面與一背面。該介電層鄰近該背面而設置,並包括數個穿孔。所述背電場結構各別對應所述穿孔而位於該光電轉換單元的背面處。該第一導電膠層包括數個各別位於所述穿孔並接觸所述背電場結構的導電接觸部。該第二導電膠層披覆於該介電層上,且該第二導電膠層的玻璃含量比例小於該第一導電膠層的玻璃含量比例。The photoelectric conversion unit is configured to convert light energy into electrical energy, and includes an opposite light incident surface and a back surface. The dielectric layer is disposed adjacent to the back side and includes a plurality of perforations. The back electric field structures are respectively located at the back surface of the photoelectric conversion unit corresponding to the perforations. The first conductive paste layer includes a plurality of conductive contacts respectively located in the through holes and contacting the back electric field structure. The second conductive adhesive layer is coated on the dielectric layer, and the glass content ratio of the second conductive adhesive layer is smaller than the glass content ratio of the first conductive adhesive layer.

本發明太陽能電池的製造方法,包含:The method for manufacturing a solar cell of the invention comprises:

步驟A:在一光電轉換單元的一個背面上形成一個具有數個穿孔的介電層;Step A: forming a dielectric layer having a plurality of perforations on a back surface of a photoelectric conversion unit;

步驟B:在該介電層上且對應於所述穿孔的部位塗布一第一漿料;Step B: coating a first slurry on the dielectric layer and corresponding to the portion of the perforation;

步驟C:在該介電層及該第一漿料上塗布一第二漿料,且該第二漿料的玻璃含量比例小於該第一漿料的玻璃含量比例;及Step C: coating a second slurry on the dielectric layer and the first slurry, and a glass content ratio of the second slurry is smaller than a glass content ratio of the first slurry;

步驟D:進行燒結以使該第一漿料形成一個第一導電膠層,該第二漿料形成一個第二導電膠層,以及形成數個各別對應所述穿孔而位於該光電轉換單元的背面處的背電場結構。Step D: performing sintering to form the first slurry to form a first conductive adhesive layer, the second paste forming a second conductive adhesive layer, and forming a plurality of corresponding perforations corresponding to the photoelectric conversion unit The back electric field structure at the back.

本發明之功效:藉由兩種材料來形成電池的背電極,而且依據該第一導電膠層與第二導電膠層的設置位置及功能而調整材料中的玻璃含量,使兩種材料有不同的侵蝕能力,因此一方面能形成厚度厚、品質佳的背電場結構,另一方面又能維持該介電層的品質與功能,從而提升電池的開路電壓及轉換效率等特性。The effect of the invention is that the back electrode of the battery is formed by two materials, and the glass content in the material is adjusted according to the position and function of the first conductive adhesive layer and the second conductive adhesive layer, so that the two materials are different. The erosion ability, on the one hand, can form a thick electric field structure with good thickness and good quality, on the other hand, it can maintain the quality and function of the dielectric layer, thereby improving the open circuit voltage and conversion efficiency of the battery.

有關本發明之前述及其他技術內容、特點與功效,在以下配合參考圖式之一個較佳實施例的詳細說明中,將可清楚的呈現。The above and other technical contents, features and advantages of the present invention will be apparent from the following detailed description of the preferred embodiments.

參閱圖2,本發明太陽能電池的較佳實施例包含:一光電轉換單元2、一介電層3、數個背電場結構4、一第一導電膠層5,以及一第二導電膠層6。Referring to FIG. 2, a preferred embodiment of the solar cell of the present invention comprises: a photoelectric conversion unit 2, a dielectric layer 3, a plurality of back electric field structures 4, a first conductive adhesive layer 5, and a second conductive adhesive layer 6. .

該光電轉換單元2用於將光能轉換成電能,並包括一入光面21,以及一相反於該入光面21的背面22。該光電轉換單元2實際上包括一個具有該背面22的基板、一形成於該基板上的射極層,以及一抗反射膜等膜層。其中,該射極層為半導體材料,其主要載子(carrier)的導電形式不限,只要該射極層能與該基板形成p-n接面即可。在本實施例中,該基板為p型矽基板,該射極層為n型射極層,但不限於此。The photoelectric conversion unit 2 is configured to convert light energy into electrical energy, and includes a light incident surface 21 and a back surface 22 opposite to the light incident surface 21. The photoelectric conversion unit 2 actually includes a substrate having the back surface 22, an emitter layer formed on the substrate, and a film layer such as an anti-reflection film. Wherein, the emitter layer is a semiconductor material, and the conductive form of the main carrier is not limited as long as the emitter layer can form a p-n junction with the substrate. In the present embodiment, the substrate is a p-type germanium substrate, and the emitter layer is an n-type emitter layer, but is not limited thereto.

該抗反射層的材料例如氮化矽(SiNx),用於降低太陽光的反射、提升光線入射率並可降低表面載子的複合速率(surface recombination velocity,簡稱SRV),但該光電轉換單元2不以設置該抗反射層為必要。由於該光電轉換單元2的結構設計非本發明的改良重點,所以不再詳述,圖中也只是用單一層體示意出。需注意的是,本發明不必限制該光電轉換單元2的具體結構及層體數量,因為可以視太陽能電池的需求而增添不同功能的膜層。The material of the anti-reflection layer, such as tantalum nitride (SiN x ), is used to reduce the reflection of sunlight, increase the incidence of light, and reduce the surface recombination velocity (SRV), but the photoelectric conversion unit 2 It is not necessary to provide the anti-reflection layer. Since the structural design of the photoelectric conversion unit 2 is not a modification of the present invention, it will not be described in detail, and the figure is only illustrated by a single layer. It should be noted that the present invention does not necessarily limit the specific structure and the number of layers of the photoelectric conversion unit 2, because a film layer of different functions can be added depending on the demand of the solar cell.

此外,在該電池上還設有一個圖未示出的正面電極,該正面電極的底部可穿過該抗反射層而電連接該射極層,該正面電極與該第一導電膠層5、該第二導電膠層6配合將該光電轉換單元2產生的電能傳輸到外部,但由於該正面電極非本發明的改良重點,所以不再說明。In addition, a front surface electrode (not shown) is further disposed on the battery, and the bottom of the front electrode can be electrically connected to the emitter layer through the anti-reflection layer, the front electrode and the first conductive adhesive layer 5, The second conductive paste layer 6 cooperates to transfer the electric energy generated by the photoelectric conversion unit 2 to the outside, but since the front electrode is not an improvement point of the present invention, it will not be described.

該介電層3一般又稱為鈍化層(passivation layer),鄰近該光電轉換單元2的背面22,並包括一朝向該背面22的第一面31、一相反於該第一面31的第二面32,以及數個貫穿該第一面31及該第二面32的穿孔33,該介電層3的材料為氧化物、氮化物,或氧化物與氮化物的複合材料,具體例如:SiOx、SiNx、Al2O3,或者複合層例如SiO2/SiNx,Al2O3/SiNx…等等。該介電層3用於填補、降低表面缺陷,進而降低載子在該光電轉換單元2的背面22處的複合速率,提升電池的轉換效率。The dielectric layer 3 is also generally referred to as a passivation layer adjacent to the back surface 22 of the photoelectric conversion unit 2 and includes a first face 31 facing the back face 22 and a second face opposite the first face 31. a surface 32, and a plurality of through holes 33 extending through the first surface 31 and the second surface 32. The material of the dielectric layer 3 is an oxide, a nitride, or a composite of an oxide and a nitride, specifically, for example, SiO. x , SiN x , Al 2 O 3 , or a composite layer such as SiO 2 /SiN x , Al 2 O 3 /SiN x ... and the like. The dielectric layer 3 is used to fill and reduce surface defects, thereby reducing the recombination rate of the carrier at the back surface 22 of the photoelectric conversion unit 2, and improving the conversion efficiency of the battery.

所述背電場結構4各別對應所述穿孔33而位於該光電轉換單元2的背面22處,本實施例的背電場結構4為鋁矽(Al-Si)混合材料所形成的p型半導體,其載子濃度大於該p型矽基板的載子濃度,藉由所述背電場結構4的電場作用阻擋電子朝該背面22的方向移動,使電子被收集於該光電轉換單元2的n型射極層,以提升載子收集效率及轉換效率。The back electric field structure 4 is located at the back surface 22 of the photoelectric conversion unit 2 corresponding to the through hole 33, and the back electric field structure 4 of the embodiment is a p-type semiconductor formed by an aluminum-bismuth (Al-Si) mixed material. The carrier concentration is greater than the carrier concentration of the p-type germanium substrate, and the electric field of the back electric field structure 4 blocks the electrons from moving toward the back surface 22, so that electrons are collected in the n-type emitter of the photoelectric conversion unit 2. Polar layer to improve carrier collection efficiency and conversion efficiency.

該第一導電膠層5是將膏液狀的金屬漿料網印並且經燒結(firing)後乾燥固化而形成,本實施例使用的金屬漿料為鋁漿,其主要成分為鋁,其中還含有少量的玻璃材料(glass frit)與其它成分。該第一導電膠層5包括數個各別位於該介電層3的穿孔33並接觸所述背電場結構4的導電接觸部51,以及數個各別自所述導電接觸部51突出於穿孔33外且彼此間隔的導電突部52,所述導電突部52並且接觸該介電層3的第二面32的局部表面。The first conductive adhesive layer 5 is formed by screen printing a paste-like metal paste and drying and solidifying after firing. The metal paste used in the embodiment is an aluminum paste, and the main component thereof is aluminum, wherein Contains a small amount of glass frit and other ingredients. The first conductive adhesive layer 5 includes a plurality of conductive contacts 51 respectively located in the through holes 33 of the dielectric layer 3 and contacting the back electric field structure 4, and a plurality of respective conductive contacts 51 protruding from the through holes. The conductive protrusions 52 are spaced apart from each other and are spaced apart from each other, and the conductive protrusions 52 are in contact with a partial surface of the second face 32 of the dielectric layer 3.

本實施例的第二導電膠層6披覆於該介電層3的第二面32上及該第一導電膠層5的導電突部52上。該第二導電膠層6也是透過將膏液狀的金屬漿料網印,並且經燒結後乾燥固化而形成,本實施例的金屬漿料為鋁漿,其主要成分為鋁,其中還含有少量的玻璃材料(glass frit)與其它成分。該第二導電膠層6為鋁導電膠層,其玻璃含量比例必須小於該第一導電膠層5的玻璃含量比例,其理由稍後說明。該第二導電膠層6與該第一導電膠層5配合作為電池的背電極。The second conductive adhesive layer 6 of the present embodiment is coated on the second surface 32 of the dielectric layer 3 and the conductive protrusions 52 of the first conductive adhesive layer 5. The second conductive adhesive layer 6 is also formed by screen printing a paste-like metal paste and drying and solidifying after sintering. The metal paste of the embodiment is an aluminum paste, and the main component thereof is aluminum, and a small amount thereof is also contained therein. Glass frit and other ingredients. The second conductive adhesive layer 6 is an aluminum conductive adhesive layer, and the glass content ratio thereof must be smaller than the glass content ratio of the first conductive adhesive layer 5, the reason of which will be described later. The second conductive adhesive layer 6 is combined with the first conductive adhesive layer 5 as a back electrode of the battery.

值得一提的是,本發明的第二導電膠層6使用金屬漿料網印形成,而不使用真空鍍膜的薄膜形式,原因在於:由於一般電池的矽基板較薄、較脆弱,而金屬漿料形成的層體與薄膜相比,具有一定的支撐力,因此可透過由金屬漿料製成的該第二導電膠層6來增加基板強度,而且在經過高溫燒結後所形成的該第二導電膠層6的厚度,較佳地為20μm~30μm,以提供足夠的強度。此外,金屬漿料中的玻璃材料可以提升與該介電層3之間的附著力,使該第二導電膠層3能固著於該介電層3上。It is worth mentioning that the second conductive adhesive layer 6 of the present invention is formed by screen printing using a metal paste without using a vacuum-coated film form because the germanium substrate of the general battery is thinner and more fragile, and the metal paste is used. The layer formed by the material has a certain supporting force compared with the film, so that the second conductive adhesive layer 6 made of a metal paste can be used to increase the strength of the substrate, and the second formed after high-temperature sintering. The thickness of the conductive paste layer 6 is preferably 20 μm to 30 μm to provide sufficient strength. In addition, the glass material in the metal paste can enhance the adhesion between the dielectric layer 3 and the second conductive adhesive layer 3 to be adhered to the dielectric layer 3.

參閱圖2、3、4,本發明太陽能電池的製造方法的一較佳實施例,包含:Referring to Figures 2, 3 and 4, a preferred embodiment of the method of fabricating a solar cell of the present invention comprises:

(1)進行步驟71:首先製作該光電轉換單元2,包含利用擴散製程在基板上形成p-n接面、形成抗反射膜等步驟,接著再於該光電轉換單元2的背面22上形成該介電層3,且於該介電層3上形成所述穿孔33。由於該光電轉換單元2及該介電層3的製法非本發明的改良重點,所以不再說明。(1) Step 71: First, the photoelectric conversion unit 2 is formed, including a step of forming a pn junction on the substrate by a diffusion process, forming an anti-reflection film, and the like, and then forming the dielectric on the back surface 22 of the photoelectric conversion unit 2 Layer 3, and the perforations 33 are formed on the dielectric layer 3. Since the method of manufacturing the photoelectric conversion unit 2 and the dielectric layer 3 is not an improvement of the present invention, it will not be described.

(2)進行步驟72:利用網版印刷方式,在該介電層3上且對應於所述穿孔33的部位塗布一第一漿料5’,該第一漿料5’會填充於所述穿孔33中,以及披覆在該介電層3的局部表面上,該第一漿料5’即為用於形成該第一導電膠層5的漿料。接著再透過一個烘烤步驟使該第一漿料5’乾燥定型,以利於後續製程的進行。(2) performing step 72: applying a first paste 5' on the dielectric layer 3 and corresponding to the through hole 33 by screen printing, the first paste 5' being filled in the In the through hole 33, and on a partial surface of the dielectric layer 3, the first paste 5' is a slurry for forming the first conductive paste layer 5. The first slurry 5' is then dried and shaped through a baking step to facilitate subsequent processing.

(3)進行步驟73:利用網版印刷方式,在該介電層3及該第一漿料5’上塗布一第二漿料6’,該第二漿料6’即為用於形成該第二導電膠層6的漿料。(3) performing step 73: coating a second paste 6' on the dielectric layer 3 and the first paste 5' by screen printing, and the second paste 6' is used to form the A slurry of the second conductive paste layer 6.

本實施例的第二漿料6’與第一漿料5’皆為鋁漿,如同前述,鋁漿的主要成分為鋁,而且還含有少量的玻璃材料與其它成分。較佳地,該第一漿料5’可以包含2wt%~7wt%的玻璃材料,該第二漿料6’可以包含1wt%~5wt%的玻璃材料。而且該第二漿料6’的玻璃含量比例必須小於該第一漿料5’的玻璃含量比例。The second slurry 6' and the first slurry 5' of this embodiment are both aluminum pastes. As described above, the main component of the aluminum paste is aluminum, and also contains a small amount of glass material and other components. Preferably, the first slurry 5' may comprise from 2 wt% to 7 wt% of glass material, and the second paste 6' may comprise from 1 wt% to 5 wt% of glass material. Further, the glass content ratio of the second slurry 6' must be smaller than the glass content ratio of the first slurry 5'.

(4)進行步驟74:進行高溫燒結,以使該第一漿料5’乾燥固化而形成該第一導電膠層5,該第二漿料6’乾燥固化而形成該第二導電膠層6,而且在燒結過程中,該第一漿料5’的鋁漿材料會由該介電層3的穿孔33位置擴散到該光電轉換單元22的背面22處,金屬鋁因而摻雜於該光電轉換單元2的矽基板中,並與矽化合形成鋁矽混合物,使該背面22處形成所述背電場結構4,如此即完成該電池的製作。(4) performing step 74: performing high temperature sintering to dry and solidify the first slurry 5' to form the first conductive adhesive layer 5, and the second paste 6' is dried and solidified to form the second conductive adhesive layer 6 And during the sintering process, the aluminum paste material of the first paste 5' is diffused from the position of the through hole 33 of the dielectric layer 3 to the back surface 22 of the photoelectric conversion unit 22, and the metal aluminum is thus doped to the photoelectric conversion. The ruthenium substrate of the unit 2 is combined with ruthenium to form an aluminum ruthenium mixture, so that the back electric field structure 4 is formed at the back surface 22, thus completing the fabrication of the battery.

本發明透過適當的玻璃含量限制,使該第一漿料5’的玻璃含量比例大於該第二漿料6’,因此該第一漿料5’的侵蝕性較強,能確實地與基板的矽反應,使燒結形成的背電場結構4有足夠的厚度,品質也較好。而該第二漿料6’的玻璃含量比例較低,對於該介電層3的侵蝕性相對地較小,能減輕對該介電層3的破壞。According to the present invention, the glass content ratio of the first slurry 5' is greater than the second slurry 6' by an appropriate glass content limitation, so that the first slurry 5' is more aggressive and can be surely bonded to the substrate. The ruthenium reaction makes the back electric field structure 4 formed by sintering have sufficient thickness and good quality. On the other hand, the second slurry 6' has a low glass content ratio, and the etching property to the dielectric layer 3 is relatively small, so that the damage to the dielectric layer 3 can be alleviated.

請配合參閱表1,為本發明的太陽能電池與比較例的太陽能電池的各項特性測試結果,比較例的電池的背電極為單一鋁漿材料網印形成,而且其材料組成與本發明的第二導電膠層6相同。Please refer to Table 1 for the results of testing various characteristics of the solar cell of the present invention and the solar cell of the comparative example. The back electrode of the battery of the comparative example is formed by screen printing of a single aluminum paste material, and the material composition thereof is the same as that of the present invention. The two conductive adhesive layers 6 are the same.

表中的Voc代表開路電壓,Jsc代表短路電流,Rs代表串聯電阻,Rsh代表並聯電阻,F.F.值代表填充因子(fill factor),Eff.為轉換效率。由表1結果可看出,本發明相對於比較例而言,有效地降低串聯電阻,而且具有較大的開路電壓、短路電流、並聯電阻、F.F值,以及轉換效率。此乃因為本發明藉由提升該第一漿料5’(也相當於其所形成的第一導電膠層5)的玻璃含量與侵蝕性,而能產生較厚的背電場結構4,而且遠因為本發明的第二漿料6’(也相當於其所形成的第二導電膠層6)的玻璃含量較低,因此能兼顧該介電層3的品質。V oc in the table represents the open circuit voltage, J sc represents the short circuit current, R s represents the series resistance, R sh represents the parallel resistance, FF value represents the fill factor, and Eff. is the conversion efficiency. As can be seen from the results of Table 1, the present invention effectively reduces the series resistance with respect to the comparative example, and has a large open circuit voltage, a short circuit current, a parallel resistance, an FF value, and a conversion efficiency. This is because the present invention can produce a thick back electric field structure 4 by increasing the glass content and the aggressiveness of the first paste 5' (which is also equivalent to the first conductive adhesive layer 5 formed therein). Since the second slurry 6' of the present invention (which also corresponds to the second conductive paste layer 6 formed therein) has a low glass content, the quality of the dielectric layer 3 can be achieved.

綜上所述,藉由兩種材料來形成電池的背電極,而且是依據該第一導電膠層5與第二導電膠層6的設置位置及功能而調整材料中的玻璃含量,使兩種材料有不同的侵蝕能力,因此一方面能形成厚度厚、品質佳的背電場結構4,另一方面又能維持該介電層3的品質與功能,從而提升電池的開路電壓及轉換效率等特性。本發明具有良好的應用性,並可根據不同需求來調整各個導電膠層的成分,例如,若該第二導電膠層6中的玻璃含量再降低時,則該介電層3的品質將更好。In summary, the back electrode of the battery is formed by two materials, and the glass content in the material is adjusted according to the position and function of the first conductive adhesive layer 5 and the second conductive adhesive layer 6. The material has different etching ability, so on the one hand, the back electric field structure 4 with thick thickness and good quality can be formed, and on the other hand, the quality and function of the dielectric layer 3 can be maintained, thereby improving the open circuit voltage and conversion efficiency of the battery. . The invention has good applicability, and can adjust the composition of each conductive adhesive layer according to different requirements. For example, if the glass content in the second conductive adhesive layer 6 is further reduced, the quality of the dielectric layer 3 will be further improved. it is good.

惟以上所述者,僅為本發明之較佳實施例而已,當不能以此限定本發明實施之範圍,即大凡依本發明申請專利範圍及發明說明內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention are All remain within the scope of the invention patent.

2...光電轉換單元2. . . Photoelectric conversion unit

21...入光面twenty one. . . Glossy surface

22...背面twenty two. . . back

3...介電層3. . . Dielectric layer

31...第一面31. . . First side

32...第二面32. . . Second side

33...穿孔33. . . perforation

4...背電場結構4. . . Back electric field structure

5...第一導電膠層5. . . First conductive adhesive layer

5’...第一漿料5’. . . First slurry

51...導電接觸部51. . . Conductive contact

52...導電突部52. . . Conductive protrusion

6...第二導電膠層6. . . Second conductive adhesive layer

6’...第二漿料6’. . . Second slurry

71~74...步驟71~74. . . step

圖1是一種已知太陽能電池的製造流程示意圖;1 is a schematic view showing a manufacturing process of a known solar cell;

圖2是一剖視示意圖,顯示本發明太陽能電池的一較佳實施例;Figure 2 is a cross-sectional view showing a preferred embodiment of the solar cell of the present invention;

圖3是一流程方塊圖,顯示本發明太陽能電池的製造方法的一較佳實施例;及3 is a flow block diagram showing a preferred embodiment of a method of fabricating a solar cell of the present invention;

圖4是該較佳實施例的製造流程示意圖。Figure 4 is a schematic view showing the manufacturing process of the preferred embodiment.

2...光電轉換單元2. . . Photoelectric conversion unit

21...入光面twenty one. . . Glossy surface

22...背面twenty two. . . back

3...介電層3. . . Dielectric layer

31...第一面31. . . First side

32...第二面32. . . Second side

33...穿孔33. . . perforation

4...背電場結構4. . . Back electric field structure

5...第一導電膠層5. . . First conductive adhesive layer

51...導電接觸部51. . . Conductive contact

52...導電突部52. . . Conductive protrusion

6...第二導電膠層6. . . Second conductive adhesive layer

Claims (10)

一種太陽能電池,包含:一光電轉換單元,用於將光能轉換成電能,並包括相反的一入光面與一背面;一介電層,鄰近該背面而設置,並包括數個穿孔;數個背電場結構,各別對應所述穿孔而位於該光電轉換單元的背面處;一個含有玻璃材料的第一導電膠層,包括數個各別位於所述穿孔並接觸所述背電場結構的導電接觸部;及一個含有玻璃材料的第二導電膠層,披覆於該介電層上,且該第二導電膠層的玻璃含量比例小於該第一導電膠層的玻璃含量比例。A solar cell comprising: a photoelectric conversion unit for converting light energy into electrical energy, and comprising an opposite light incident surface and a back surface; a dielectric layer disposed adjacent to the back surface and including a plurality of perforations; a back electric field structure, corresponding to the perforation, located at a back surface of the photoelectric conversion unit; a first conductive adhesive layer containing a glass material, comprising a plurality of conductive layers respectively located in the perforations and contacting the back electric field structure a contact portion; and a second conductive adhesive layer containing a glass material, coated on the dielectric layer, and the second conductive adhesive layer has a glass content ratio smaller than a glass content ratio of the first conductive adhesive layer. 依據申請專利範圍第1項所述之太陽能電池,其中,該第一導電膠層及該第二導電膠層都是由金屬漿料網印形成。The solar cell of claim 1, wherein the first conductive adhesive layer and the second conductive adhesive layer are formed by screen printing of a metal paste. 依據申請專利範圍第2項所述之太陽能電池,其中,所述金屬漿料為鋁漿。The solar cell according to claim 2, wherein the metal paste is an aluminum paste. 依據申請專利範圍第3項所述之太陽能電池,其中,該第一導電膠層還包括數個各別自所述導電接觸部突出於穿孔外且彼此間隔的導電突部。The solar cell of claim 3, wherein the first conductive adhesive layer further comprises a plurality of conductive protrusions each protruding from the conductive contact and spaced apart from each other. 依據申請專利範圍第1項所述之太陽能電池,其中,該第二導電膠層為鋁導電膠層,該第二導電膠層的厚度為20μm~30μm。The solar cell of claim 1, wherein the second conductive adhesive layer is an aluminum conductive adhesive layer, and the second conductive adhesive layer has a thickness of 20 μm to 30 μm. 一種太陽能電池的製造方法,包含:步驟A:在一光電轉換單元的一個背面上形成一個具有數個穿孔的介電層;步驟B:在該介電層上且對應於所述穿孔的部位塗布一第一漿料;步驟C:在該介電層及該第一漿料上塗布一第二漿料,且該第二漿料的玻璃含量比例小於該第一漿料的玻璃含量比例;及步驟D:進行燒結以使該第一漿料形成一個第一導電膠層,該第二漿料形成一個第二導電膠層,以及形成數個各別對應所述穿孔而位於該光電轉換單元的背面處的背電場結構。A method of manufacturing a solar cell comprising: step A: forming a dielectric layer having a plurality of perforations on a back surface of a photoelectric conversion unit; and step B: coating a portion on the dielectric layer corresponding to the perforation a first slurry; step C: coating a second slurry on the dielectric layer and the first slurry, and a glass content ratio of the second slurry is less than a glass content ratio of the first slurry; Step D: performing sintering to form the first slurry to form a first conductive adhesive layer, the second paste forming a second conductive adhesive layer, and forming a plurality of corresponding perforations corresponding to the photoelectric conversion unit The back electric field structure at the back. 依據申請專利範圍第6項所述之太陽能電池的製造方法,其中,該第一漿料包含2wt%~7wt%的玻璃材料,該第二漿料包含1wt%~5wt%的玻璃材料。The method of manufacturing a solar cell according to claim 6, wherein the first slurry comprises 2 wt% to 7 wt% of a glass material, and the second paste comprises 1 wt% to 5 wt% of a glass material. 依據申請專利範圍第6項所述之太陽能電池的製造方法,其中,該第二漿料為鋁漿,在步驟D中,進行燒結後所形成的該第二導電膠層的厚度為20μm~30μm。The method for manufacturing a solar cell according to claim 6, wherein the second slurry is an aluminum paste, and in step D, the second conductive adhesive layer formed after sintering has a thickness of 20 μm to 30 μm. . 依據申請專利範圍第6至8項中任一項所述之太陽能電池的製造方法,其中,所述第一漿料與第二漿料是利用網印方式而塗布。The method for producing a solar cell according to any one of claims 6 to 8, wherein the first slurry and the second slurry are applied by screen printing. 依據申請專利範圍第9項所述之太陽能電池的製造方法,其中,步驟B在塗布該第一漿料後還進行一烘烤步驟,使該第一漿料乾燥定型。The method for manufacturing a solar cell according to claim 9, wherein in the step B, after the first slurry is applied, a baking step is further performed to dry and shape the first slurry.
TW101106009A 2012-02-23 2012-02-23 Solar cell and its manufacturing method TW201336093A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW101106009A TW201336093A (en) 2012-02-23 2012-02-23 Solar cell and its manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW101106009A TW201336093A (en) 2012-02-23 2012-02-23 Solar cell and its manufacturing method

Publications (2)

Publication Number Publication Date
TW201336093A true TW201336093A (en) 2013-09-01
TWI453935B TWI453935B (en) 2014-09-21

Family

ID=49627489

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101106009A TW201336093A (en) 2012-02-23 2012-02-23 Solar cell and its manufacturing method

Country Status (1)

Country Link
TW (1) TW201336093A (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI423462B (en) * 2008-10-22 2014-01-11 Ind Tech Res Inst Method of manufacturing back electrode of silicon bulk solar cell
TWM422758U (en) * 2011-09-27 2012-02-11 Neo Solar Power Corp Solar cell and back electrode structure thereof

Also Published As

Publication number Publication date
TWI453935B (en) 2014-09-21

Similar Documents

Publication Publication Date Title
TWI535043B (en) Electrodes of solar cell formed by active solder and method therefor
JP2011165668A (en) Conductive aluminum paste and its manufacturing method, solar cell, and its module
TW201409488A (en) Low-metal content electroconductive paste composition
JP2013507750A (en) Silver paste composition and solar cell using the same
RU2462788C2 (en) Paste-like composition and solar cell
JP5374788B2 (en) Conductive paste, solar cell electrode, solar cell, and method for manufacturing solar cell
TWI493605B (en) Fabricating method of backside electrode layer
US10483412B2 (en) High efficiency local back electrode aluminum paste for crystalline silicon solar cells and its application in PERC cells
CN111902881A (en) Conductive paste, solar cell prepared from conductive paste and manufacturing method of solar cell
WO2013031751A1 (en) Conductive paste, electrode for semiconductor devices, semiconductor device, and method for manufacturing semiconductor device
KR101371865B1 (en) Front electrode structure of solar cell and fabricating method thereof
TWI714897B (en) Conductive paste for electrode of solar cell, glass frit included in the same, and solar cell
US9640298B2 (en) Silver paste composition for forming an electrode, and silicon solar cell using same
KR20140048465A (en) Ag paste composition for forming electrode and silicon solar cell using the same
TWI473119B (en) Conductive silver paste with glass frit and method of increasing the adhesion force of the back side silver electrode on solar cells by thereof conductive silve paste
TWI509049B (en) Conductive silver paste with glass frit
JP6434310B2 (en) Passivation film, coating type material, solar cell element, and silicon substrate with passivation film
TW201336093A (en) Solar cell and its manufacturing method
KR20100111411A (en) Aluminium paste complex and solar battery using the same
TW200947717A (en) An electroconductive paste for solar cell
JP2006066748A (en) Semiconductor device, solar battery, and manufacturing methods thereof
TWM422758U (en) Solar cell and back electrode structure thereof
JP2015043301A (en) Aluminum paste, and solar cell element and production method of the solar cell element
TW200947718A (en) An electroconductive paste for solar cell
TWI518709B (en) Silver paste including fined glass particles and use thereof in production of photovoltaic device

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees