TW201334629A - Lamp-out detection apparatus, light irradiation apparatus and lamp-out detection method - Google Patents

Abstract

A lamp-out detection apparatus and a lamp-out detection method that detect a lamp-out with fewer sensors are provided. The lamp-out detection apparatus is characterized in that: a light quantity sensor 24, disposed corresponding to a lamp group that includes a plurality of lamps 22 connected in parallel; an accumulation part 36, calculating a sensor accumulation value I in a specified time τ _A according to an output of the light quantity sensor 24; a memory part 37, storing the sensor accumulation value I; and a determination part 38, determining whether a lamp works or not. The determination part 38 determines whether the lamp works or not based on a comparison between the sensor accumulation value I and a reference value, and a comparison between the sensor accumulation value I and a past sensor accumulation value I stored in the memory part 37.

Description

Lamp non-lighting detecting device, light illuminating device and lamp non-lighting detecting method

The present invention relates to a non-lighting detecting device and method for a lamp. More specifically, the present invention relates to a non-lighting detecting device and method capable of detecting that one of a plurality of lamps connected in parallel is not lit.

In the manufacturing process of a semiconductor or flat panel display, in order to clean the surface of the processed member or to modify the surface, an ultraviolet (Ultra Violet, UV) ozone wash using an ultraviolet lamp is widely performed. . It is preferable that when the lamp is turned off for some reason during such processing, the lamp is quickly detected to be unlit, and appropriate processing such as lamp replacement is performed.

Patent Document 1 discloses a dielectric discharge lamp device provided with a detection unit for ultraviolet excimer light and a unit for indicating a lighting state of the lamp. Further, Patent Document 2 discloses a lighting detection device for a xenon excimer lamp, which uses a photoelectric conversion element to detect emitted light from an excimer lamp. And the photoelectric conversion The output of the replacement element is compared with a predetermined reference value to determine whether the lamp is turned on or off.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. Hei 7-220688

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2005-227275

However, the prior art device disclosed in Patent Document 1 or Patent Document 2 has a problem that an expensive detector is required for one lamp, and if the light irradiation device becomes large, the number of lamps increases, which is costly ( Cost).

On the other hand, if the number of detectors is simply reduced, it is difficult to accurately detect the non-brightness. When a detector is used to detect the amount of light of a plurality of lamps, even if the lamp is turned off, the amount of detected light is reduced only and does not become zero. Moreover, when the amount of detected light is reduced, it is necessary to accurately determine that the cause of the decrease in the amount of light is not due to ageing deterioration or the like, or that the lamp output setting is lowered, but because the lamp is not lit.

The present invention has been made in view of the above aspects, and an object of the present invention is to provide a non-brightness detecting device and a non-bright detecting method which can detect a non-brightness of a lamp using a smaller number of detectors. Moreover, it is an object of the present invention to provide a light irradiation device including such a non-lighting detecting device.

The non-light detecting device of the lamp of the present invention is characterized by comprising: a light amount a sensor for a lamp group including a plurality of lamps connected in parallel; an integrating unit that obtains a sensor integrated value for a predetermined time based on an output of the light amount sensor; and a memory unit that memorizes the sense a detector integrated value; and a determining unit that determines that the lamp is not lit, wherein the determining unit compares the sensor integrated value with a reference value, and the sensor integrated value and a past sensor stored in the memory unit The comparison of the accumulated values and the determination of the light is not lit.

Moreover, the non-lighting detecting device of the lamp of the present invention is characterized by comprising: a light amount sensor, relative to the lamp group including the plurality of lamps; a UV-visible light conversion filter and an optical fiber, The number of lamps is smaller than the number of the illumination surfaces of the plurality of lamps, and the integration unit obtains the sensor integrated value for a predetermined period of time based on the output of the light amount sensor; the memory unit and the memory The sensor integrated value; and the determining unit determines that the lamp is not lit, and the determining unit compares the sensor integrated value with the reference value, and the sensor integrated value and the past feeling stored in the memory unit The comparison of the cumulative values of the detectors determines that the lights are not lit.

Here, the "light group" refers to a plurality of lamps whose light amount is collectively perceived by one light amount sensor. When there are two or more lamps connected in parallel, one or more of the above two lamps may be used as one lamp group, and one light amount sensor may be provided; when there are four or more lamps connected in parallel, the above may be The four or more lamps are collectively divided into a plurality of lamp groups each including a plurality of lamps, and one light amount sensor is provided for each of the lamp groups. Any of the cases is included in the present invention. Moreover, the so-called sensor integrated value means that the output of the light amount sensor is digitally converted as many times as needed. The value obtained by changing the summed values up.

In this way, one light amount sensor is used for a plurality of lamps, so that the cost of the entire device can be reduced. Moreover, by comparing the sensor integrated value with the reference value and the past sensor integrated value, it is possible to detect the non-brightness of one of the plurality of lamps with substantially no problem accuracy.

Preferably, the content is set such that the reference value is set based on the sensor reference value obtained at the initial stage of use of the lamp. Further, it is preferable that the content is set such that the reference value is set based on the output of the lamp. Thereby, when the sensor integrated value is compared with the reference value, it is possible to judge that the light is not brighter.

Further, the following may be characterized in that when the four or more lamps connected in parallel form a plurality of lamp groups each including a plurality of lamps, the non-lighting detecting device includes one light amount sensing for each of the lamp groups. Device. In the case where the plurality of (four or more) lamps connected in parallel are divided into a plurality of lamp groups in the above respective inventions, the above-described configuration can obtain the same effects as those of the above-described respective inventions.

Further, it is preferable that the determination unit further determines that the lamp is based on a comparison of the sensor integrated value with the sensor integrated value of the other lamp group when the plurality of lamp groups are formed. not bright. Thereby, it is possible to judge that the light is not bright evenly.

Preferably, a UV-visible light conversion filter and an optical fiber are disposed between vertical lines, and the vertical line is irradiated with the lamp with respect to the parallel line. The direction is vertical and the center point is used as a starting point, and the parallel lines connect the center points of the adjacent pairs of lamps constituting the lamp group to each other.

Further, the lamp non-light detecting device of the present invention is characterized by comprising: a light amount sensor for a lamp group including a plurality of lamps connected in parallel; and an integrating portion based on an output from the light amount sensor a sensor integrated value of a predetermined time; a memory unit that memorizes the sensor integrated value; and a determination unit that determines that the lamp is not lit, and the determination unit determines the integrated value of the sensor and the past stored in the memory unit The sensor integrated value is compared to determine that the lamp is not lit, and the sensor integrated value obtained in the past is: sensing obtained two or more times earlier than the sensor integrated value. The cumulative value of the device is the cumulative value of the sensor obtained within 50 hours before the cumulative value of the sensor. By comparing the sensor integrated value with the past sensor integrated value satisfying the above-described conditions, it is possible to obtain an effect that the non-brightness can be judged more accurately.

Preferably, the sensor integrated value obtained in the past is a sensor integrated value obtained two cycles earlier than the sensor integrated value. Thereby, the number of past sensor integrated values that should be held in advance can be reduced, and the entire process can be simplified, so that a non-lighting detecting device with fewer failures can be formed.

Preferably, the determination unit compares the sensor integrated value with a reference value, and compares the sensor integrated value with the sensor integrated value obtained in the past. Thereby, the accuracy of the non-lighting judgment can be made higher.

The light irradiation device of the present invention includes: a plurality of lamps connected in parallel; a control device that collectively controls the outputs of the plurality of lamps; and any one of the above-described non-lighting detection devices. According to this configuration, the light irradiation device can be formed at a lower cost, and the light irradiation device can detect that none of the plurality of lamps is off.

The non-brightness detecting method of the present invention is characterized in that the sensor integrated value of a predetermined time is obtained based on an output of one light amount sensor provided for a lamp group including a plurality of lamps connected in parallel, when the sensor is used When the integrated value is smaller than the reference value and smaller than the sensor integrated value obtained in the past, it is determined that the light is not lit. Here, the sensor integrated value is smaller than the sensor integrated value obtained in the past, and does not include the case where both of them are the same within the range of the measurement error of the sensor integrated value. According to this method, it is possible to detect the non-lighting of one of the plurality of lamps at a lower cost.

Further, the above-described non-lighting detection method may be characterized in that, when four or more lamps connected in parallel form a plurality of lamp groups each including a plurality of lamps, one light amount sensor provided for each of the lamp groups is provided The sensor obtains the sensor integrated value for a predetermined period of time. When the sensor integrated value is smaller than the reference value and smaller than the sensor integrated value obtained in the past, it is determined that the lamp is not lit. In the above configuration, since one light amount sensor is provided for each of the lamp groups including the plurality of lamps connected in parallel, the same aspect as the above-described invention can be obtained in one aspect of the invention related to the non-lighting detection method. effect.

Further, the method for detecting the non-lighting of the lamp of the present invention is based on an output from a light amount sensor provided for a lamp group including a plurality of lamps connected in parallel. The sensor integrated value for a predetermined period of time is compared with the sensor integrated value obtained in the past, thereby determining that the lamp is not lit. The above-described non-lighting detecting method is characterized by: The obtained sensor integrated value is a sensor integrated value obtained two or more times earlier than the sensor integrated value, and is obtained within 50 hours before the sensor integrated value. Sensor cumulative value.

In order to use a light quantity sensor relative to a plurality of lamps to detect the non-brightness of a lamp with substantially no problem accuracy, it is effective to combine the sensor integrated value with the past sensor integrated value. Comparison. At this time, by limiting the past sensor integrated value to the above range, it is possible to exclude the sensor integrated value including the time when the amount of the irradiated light becomes unstable due to the occurrence of no light. That is, the past sensor integrated value can be compared with the latest sensor integrated value, and the past sensor integrated value is after the predetermined time of obtaining the sensor integrated value, when the light is intact. The sensor integrated value, the most recent sensor integrated value is the sensor integrated value when the lamp is not lit after a predetermined time. As a result, it is possible to obtain an effect that the non-brightness can be judged more accurately.

Preferably, the sensor integrated value obtained in the past is a sensor integrated value obtained two cycles earlier than the sensor integrated value. Thereby, the number of past sensor integrated values that should be held in advance can be reduced, making the entire process simple.

Preferably, the following content is characterized in that after the sensor integrated value is obtained, the sensor integrated value is compared with a reference value, and then the sensing is performed. The cumulative value of the device is compared with the sensor integrated value obtained in the past. Thereby, the accuracy of the non-lighting judgment can be made higher.

According to the non-lighting detecting device, the light irradiation device, and the non-lighting detecting method of the present invention, one light amount sensor is used for a plurality of lamps, and therefore, the cost of the entire device can be reduced. Further, by comparing the sensor integrated value obtained from the output of the light amount sensor with the reference value and the past sensor integrated value, it is possible to detect a plurality of lamps with substantially no problem accuracy. The light of one of the lights is not lit.

11‧‧‧Lighting device

12‧‧‧Irradiating equipment (lighting equipment)

13‧‧‧Lighting device

14‧‧‧不亮检测装置

21‧‧‧Inverter

22, 221, 222, 223 ‧ ‧ lights

23, 231, 232, 233‧‧‧ fiber

24, 241, 243‧ ‧ light diode (PD, light sensor)

25‧‧‧Signal Converter

26, 261, 262, 263‧‧‧ UV-visible conversion filter

27‧‧‧Transformers

31‧‧‧Circuit breaker

32‧‧‧ switch

33‧‧‧DC power supply

34‧‧‧Programmable Controller (PLC)

35‧‧‧Output control device

36‧‧ ‧ Accumulation Department

37‧‧‧Memory Department

38‧‧‧Determining Department

40, 40b‧‧‧ leaked light

A‧‧‧ cumulative count

I _xn ‧‧‧Acceptor cumulative value of the nth cycle obtained from the output of the light amount sensor relative to the lamp group X

Oi‧‧‧ Center Point

S1‧‧‧ vertical line

‧‧‧‧ arrow

τ _A ‧‧‧ cumulative time

τ _P ‧‧‧Sampling interval

△I _x ‧‧‧ digit value

Fig. 1 is a configuration diagram showing a light irradiation device according to an embodiment of the present invention.

Fig. 2 is a view showing a method of obtaining a cumulative value of a sensor in an embodiment of the present invention.

Fig. 3 is a schematic view showing a method of determining no light in the first embodiment of the present invention.

Fig. 4 is a schematic view for explaining leakage light when the lamp is not lit.

Fig. 5 is a schematic view for explaining an example of determining that the lamp is not lit.

Fig. 6 is a schematic view for explaining an example of determining that the lamp is not lit.

Fig. 7 is a schematic view showing a method of determining no light in the second embodiment of the present invention.

Fig. 8 is a schematic block diagram showing a light irradiation device according to an embodiment of the present invention.

Fig. 9 is a schematic view showing an embodiment of a positional relationship between a lamp, an optical fiber, a PD, and a UV-visible light conversion filter in the non-lighting detection device of Fig. 8;

10(a), 10(b), and 10(c) are schematic views for explaining leakage light when the lamp is not lit.

Fig. 11 is a schematic view for explaining an example of determining that the lamp is not lit.

(First embodiment)

1 is a block diagram showing the configuration of a light irradiation device, a light irradiation device, and a non-lighting detection device according to the first embodiment of the present invention.

In FIG. 1, the light irradiation device 11 includes an illumination device 12 and a lighting device 13, and includes a non-light detection device 14.

The illuminating device 12 includes an inverter 21 and a transformer 27, and 10 lamps 22. The 10 lamps 22 are connected in parallel, and the outputs of the 10 lamps 22 are collectively controlled by the inverter 21. . Ten lamps 22 are formed: five groups of lamps each containing two lamps. A photodiode (light quantity sensor, hereinafter abbreviated as "PD") 24 is provided for each of the lamp groups. The UV-visible light conversion filter 26 and one end of the optical fiber 23 are arranged toward the irradiation surface of each of the lamps, and the other end of the optical fiber 23 is disposed toward the PD 24. The signal converter 25 is connected to an output signal line from the PD 24.

Various lamps such as excimer lamps can be used as the lamp 22. When the lamp 22 is an ultraviolet lamp, especially when the lamp 22 is a far ultraviolet lamp, the amount of light corresponding to the lamp 22 The sensors are mostly expensive, and therefore, the effects of the present invention are particularly large. The PD 24 can be appropriately selected in accordance with the illumination light spectrum of the target lamp 22. Further, the PD 24 may also include an optical filter for cutting light of an unnecessary wavelength as needed.

The lighting device 13 includes a breaker 31 and a switch 32. The external power source is supplied to the lighting fixture 12 via the breaker 31 and the switch 32. Further, the lighting device 13 includes an external power source DC power source 33 and a programmable controller (Programmable Logic Controller (PLC)) 34. The PLC 34 can be configured to have various functions inside by changing the built-in program. In the present embodiment, the internal configuration of the PLC 34 includes an output control unit 35 for controlling the output of the inverter 21, an integrating unit 36 for obtaining a sensor integrated value for a predetermined period of time, and a sense of pastness. The memory unit 37 for measuring the integrated value of the detector and the determining unit 38 for determining that the lamp is not lit. The functions of the accumulation unit 36, the storage unit 37, and the determination unit 38 will be described later.

The non-lighting detection device 14 includes the optical fiber 23, the PD 24, the signal converter 25, the integration unit 36, the memory unit 37, and the determination unit 38 in each of the above-described devices.

Next, the operation of the non-lighting detection device of the present embodiment will be described.

During the lighting of the lamp 22, the ultraviolet illuminating light is converted by the UV-visible conversion filter, and the components of the two optical fibers 23 are combined into one by the optical fiber 23, and photoelectric conversion is performed by the PD 24. Output signal from PD 24 (eg 0 μA~10 μA) The current is converted by the signal converter 25 into a signal more suitable for transmission (for example, a current of 4 mA to 20 mA), and then the accumulation unit 36 obtains the sensor integrated value.

The operation of the integrating unit 36 is shown in Fig. 2 . The signal from the PD 24 relative to the lamp group X is sampled at intervals of τ _P seconds, converted into a digital value (ΔI _x ), and the digital value (ΔI _x ) is accumulated A times. Thereby, the sensor integrated value I _{x of} the predetermined time (cumulative time) τ _A (τ _A = τ _P × A) can be obtained. In the process of lighting the lamp, the above processing is repeated. Hereinafter, the sensor integrated value I _x obtained in the nth cycle is represented by I _xn .

The preferred range of the cumulative time τ _A , the sampling interval τ _P , and the cumulative number of times A is as follows. When the non-lighting of the ultraviolet lamp is detected, it is necessary to determine the non-lighting before the irradiation process for the object to be irradiated is completed. The above irradiation processing time varies depending on the processing content, but the shortest time is also about 5 seconds. Therefore, regardless of the content of the irradiation process, in order to determine the non-brightness before the completion of the irradiation process, the cumulative time τ _{A is} preferably 1.5 seconds or less. On the other hand, in order to obtain sufficient accuracy, the cumulative number A is preferably five or more times. Further, if the sampling interval τ _{P is} set too small, there is a problem that the actual sampling interval is not fixed depending on the capabilities of the PLC 34 or the program capacity built into the PLC. Therefore, τ _{P is} preferably 0.01 second or longer, more preferably 0.02 second or longer. For example, τ _A can be set to 1 second, τ _P can be set to 0.1 second intervals, and A can be set to 10 times.

The operation of the determination unit 38 is shown in FIG. The sensor integrated value I _xn obtained in the above manner is stored in the memory unit 37, and is used by the determining unit 38 for the non-lighting determination. Analyzing unit 38 sensor integrated value I _xn acquired, the integrated value I _xn sensor is compared with a reference value, when the integrated value I _xn sensor less than the reference value, is determined to be normal (all lighting ). When the sensor integrated value I _{xn is} smaller than the reference value, the determination unit 38 further compares the sensor integrated value I _xn with the past sensor integrated value I _xm (m<n) _stored in the memory unit 37, if I _xn ≧I _xm , it is judged to be normal.

The reference value is a value that is determined to be that all the lamps have been turned on when the sensor integrated value I _xn is equal to or higher than the reference value. When the lamp group includes L lamps, if one of the L lamps is turned off, the amount of illumination light of the lamp group is reduced by only 1/L. However, in the present embodiment, the amount of decrease in light intensity detected by the PD 24 is less than 1/L. The reason is that, as shown in FIG. 4, even if one of the lamps 222 is turned off, the leaked light from the adjacent lamps 221, 223 is incident on the UV-visible conversion filter 262 and the optical fiber 232 corresponding to the non-lighting. . The amount of leaked light depends on the arrangement of the lamp and the optical fiber, the shape of the device, and the like. However, if the device is appropriately designed, the amount of the leaked light can be generally suppressed to several % or less. Therefore, it is preferable to set the following value as the reference value and set the correction coefficient to 50% to 90%. The above value is: only 1/L of the sensor integrated value when all the L lamps are turned on. × The value obtained by the correction factor. In the present embodiment, the amount of decrease in the amount of light when one lamp is turned off is 1/2 × 80%, and 60% of the cumulative value of the sensor when both lamps constituting the lamp group are lit is used as a reference. value.

The value of the sensor integrated value when all the lamps constituting the lamp group are lighted may be determined in advance based on the specifications of the lamp, the shape of the device, and the like, and the value may be stored in the memory unit 37. Alternatively, it may be based on the sensor integrated value actually measured at the beginning of use of the lamp, The value of the sensor integrated value when all the lamps constituting the lamp group are lit is determined, and the value is stored in the memory unit 37.

When the light irradiation device 11 does not perform simple on-off control but continuously changes the lamp output, the amount of illumination light of the lamp changes according to the output setting. In the present embodiment, the inverter 21 can be controlled by the output control device 35 to continuously change the lamp output. Therefore, even when the lamp output is intentionally lowered, it is not erroneously detected as not bright. On the other hand, it is preferable that the determination unit 38 receives the information from the output control device 35 related to the lamp output, and corrects the reference value based on the information. The relationship between the output of the lamp and the amount of the illuminating light can be known in advance according to the specifications of the lamp. Therefore, the relationship between the output and the amount of the illuminating light, the conversion table, and the like are stored in the memory unit 37 in advance, and the relationship and conversion table can be obtained from the determining unit 38. It is read and used.

Next, a comparison between the sensor integrated value I _xn and the past sensor integrated value I _xm (m<n) will be described. Even when the sensor integrated value I _{xn is} smaller than the reference value, this may be caused by a cause other than a non-bright or deliberate output change, such as caused by accumulated dirt or the like of the lamp or the measurement system. Therefore, the sensor integrated value I _{xn is} compared with the past sensor integrated value I _xm , and if the sensor integrated value I _xn is equal to or greater than the past sensor integrated value I _xm , it is determined that it is not off. In addition, I _{x n} is I _{x m} or more, and the case where both are the same in the range of the measurement error of the sensor integrated value. Further, for example, when there is no I _xm to be compared after the light irradiation device starts operating, I _xn and I _xm are not compared.

The past sensor integrated value I _xm compared with the sensor integrated value I _xn is preferably a sensor integrated value obtained before the _Ixn at least two cycles earlier. The reason is that in the case where no light occurs, the sensor integrated value including the cumulative interval when the light is not generated is based on the output from the PD before the occurrence of the non-lighting, and the output from the PD after the occurrence of the non-lighting. However, it is calculated. Therefore, if the sensor integrated value is used for comparison, the error is large. By comparing I _xn with the sensor integrated value I _xm (m≦n-2) obtained before two cycles, the error factor can be eliminated and an accurate judgment can be made.

Further, when the excimer lamp or the like is not lit, the amount of light of the excimer lamp or the like becomes zero in a time sufficiently shorter than the sampling interval τ _P (for example, 0.01 second), so if I _{x n} and 2 By comparing the sensor integrated value I _xm (m=n-2) obtained before the cycle, the error factor can be eliminated and an accurate judgment can be made. By setting the past sensor integrated value I _xm compared with I _xn to a value obtained two cycles ago, it is preferable that the influence of the aging change of the amount of light to be described later can be made. Reduced. Moreover, since the number of past sensor integrated values held in the memory unit 37 can be reduced, the operation of the memory unit 37, the determination unit 38, and the like is simplified, which is also preferable.

On the other hand, if the gap between the times of I _xn and I _xm is too large, the change in the integrated value of the sensor due to factors other than the non-brightness becomes an error factor. The amount of light of the lamp sometimes deteriorates by age, and it drops by about 0.5% in 50 hours. Further, the amount of light of the lamp may vary by about 0.5% in 20 seconds due to the temperature change of the lamp itself. From the above, the gap between the times of I _xn and I _xm is preferably shorter than 50 hours, and more preferably shorter than 20 seconds.

In summary, the past sensor integrated value I _xm compared with the sensor integrated value I _xn is: the sensor integrated value obtained two or more times earlier than I _xn , and particularly preferably The sensor integrated value obtained in the first 50 hours of I _xn is preferably the sensor integrated value obtained within 20 seconds earlier than I _xn . Further, I _xm is more preferably a sensor integrated value obtained two cycles earlier than I _xn .

As described above, the past sensor integrated value I _xm compared with the sensor integrated value I _xn is the sensor integrated value obtained two or more times earlier than I _xn , and particularly preferably not The sensor integrated value obtained 50 hours or more earlier than I _xn is preferably a sensor integrated value which is not obtained by 20 seconds or more earlier than I _xn . Further, I _xm is more preferably a sensor integrated value obtained two cycles earlier than I _xn .

An example of the determination of the above-described non-brightness will be described with reference to FIGS. 5 and 6. Fig. 5 schematically shows a change in the sensor integrated value when the lamp is not lit in the cumulative section n-1. In FIG. 5, the sensor integrated value I _{xn is} smaller than the reference value and smaller than the past I _xn-2 , and therefore, it is judged to be off. At this time, in the interval n-1, the change of ΔI _x is severe, and the sensor integrated value I _xn-1 contains a large error, but by comparing I _xn with I _xn-2 , a more accurate judgment can be made. . Fig. 6 schematically shows changes in the sensor integrated value and the reference value when the output of the lamp is artificially lowered in the section n-1. In FIG. 6, in the section n-1, since the reference value is lowered in accordance with the lamp output, I _xn is equal to or greater than the reference value, and it is determined to be normal.

Next, a second embodiment of the present invention will be described. The configuration of the light irradiation device, the light irradiation device, and the non-lighting detection device of the present embodiment is the same as that of the first embodiment, and is shown in Fig. 1 . In the non-lighting detection method of the present embodiment, the determination unit 38 compares the sensor integrated value I _xn of the lamp group X with the sensor integrated value I _{yn of the} other lamp group Y.

The operation of the determination unit 38 of the present embodiment is shown in Fig. 7 . In the same manner as in the first embodiment, the determination unit 38 compares the sensor integrated value I _xn with the reference value, and compares I _xn with the past sensor integrated value I _xm (m<n). When it is not judged to be normal, the above I _xn is further compared with the sensor integrated value I _{yn of the} other lamp group Y, and when I _xn is I _yn or more, it is judged to be normal, and when I _{xn is} smaller than I _yn When it is judged, it is not lit. As described above, there is a case where the sensor integrated value I _xn is reduced due to aged deterioration or temperature change of the lamp, or deliberate power adjustment. In this case, even if the reference value is not corrected according to the lamp output or the reference value is not set well, the result is judged to be abnormal after comparing I _xn with the reference value, and according to the above method, I can also Comparison of _xn and I _yn to prevent false detection of no light.

(Third embodiment)

FIG. 8 is a block diagram showing the configuration of a light irradiation device and a non-lighting detection device according to a third embodiment of the present invention. Fig. 9 is a schematic view showing an embodiment of a positional relationship between a lamp, an optical fiber, a PD, and a UV-visible light conversion filter in the non-lighting detection device of Fig. 8;

In FIG. 8, the light irradiation device 11 includes: an illumination device 12 and a lighting device Set to 13, and include a non-brightness detecting device 14.

The illuminating device 12 includes an inverter 21, a transformer 27, and ten lamps 22. The ten lamps 22 are connected in parallel, and the outputs of the ten lamps 22 are collectively controlled by the inverter 21. Ten lamps 22 are formed: five groups of lamps each containing two lamps. One PD 24 is provided for each of the lamp groups.

Further, in Fig. 9, one end of the UV-visible light conversion filter 26 and the optical fiber 23 is arranged in a smaller number (five) than the ten lamps 22, and is disposed toward the irradiation surface of the lamp 22, and the other end of the optical fiber 23 is turned toward PD 24 configuration. Specifically, a UV-visible light conversion filter 26 and an optical fiber 23 are disposed between the vertical lines S1, and the vertical line S1 is perpendicular to the irradiation direction of the lamp 22 with respect to the parallel line H1 and has a center point Oi As the starting point, the parallel line H1 connects the center points Oi of the pair of adjacent lamps (two) constituting the lamp group. Hereinafter, the UV-visible light conversion filter 26, the optical fiber 23, and the PD 24 are collectively referred to as a light detecting portion. The signal converter 25 is connected to an output signal line from the PD 24.

The other configurations (the lamp 22, the lighting device 13, and the non-lighting detecting device 14) are the same as those of the first embodiment and the second embodiment, and therefore the description thereof will be omitted.

Next, the operation of the non-lighting detection device of the present embodiment will be described.

During the lighting of the lamp 22, the ultraviolet illuminating light is converted by the UV-visible conversion filter 26, via the optical fiber 23, and then photoelectrically converted by the PD 24. The output signal from the PD 24 (for example, a current of 0 μA to 10 μA) is converted by the signal converter 25 into a signal more suitable for transmission (for example, a current of 4 mA to 20 mA), and then The cumulative value of the sensor is obtained by the integrating unit 36.

The operation of the integration unit 36, the integration time τ _A , the sampling interval τ _P , and the preferred range of the cumulative number A and the operation of the determination unit 38 are the same as those of the first embodiment and the second embodiment. Therefore, the description will be omitted.

The reference value is a value that is determined to be that all the lamps have been turned on when the sensor integrated value I _xn is equal to or higher than the reference value. When the lamp group includes L lamps, if one of the L lamps is turned off, the amount of illumination light of the lamp group is reduced by only 1/L. Specifically, in the case of the normal state in FIG. 10(a), if one of the two lamps 22 (one lamp group) is turned off (FIG. 10(b) or FIG. 10(c)), the one The amount of illumination of the lamp group is only reduced by 1/2. However, even in the normal state as shown in FIG. 10(a), the leaked light 40b from the lamps 22 of the adjacent other lamp groups is incident on the UV-visible light conversion filter 26, which is converted into the UV-visible light conversion. The filter 26 is for detecting the amount of light of the two lamps 22 (one lamp group).

Further, the amount of the leaked light 40b depends on the arrangement of the lamp and the optical fiber, the shape of the device, and the like. However, if the device is appropriately designed, the amount of the leaked light 40b can be generally suppressed to several % or less. Therefore, it is preferable to set the following value as the reference value and set the correction coefficient to 50% to 90%. The above value is: only 1/L of the sensor integrated value when all the L lamps are turned on. × The value obtained by the correction factor. In the present embodiment, the amount of decrease in the amount of light when one lamp is turned off is 1/2 × 80%, and 60% of the cumulative value of the sensor when both lamps constituting the lamp group are lit is used as a reference. value.

The other configuration is the same as that of the first embodiment and the second embodiment. The description will be omitted.

Furthermore, in the present invention, as described above, the UV-visible light conversion filter and the optical fiber are disposed for detection in a smaller number than the number of the plurality of lamps. Therefore, for example, there is a case where the amount of illumination light of the PD 24 that detects the light-off is detected when the left side of one of the lamp groups is turned off as shown in FIG. 10(b), and when the right side is turned off as shown in FIG. 10(c). It is judged to be the same level. In this case, the change in the amount of illumination light of the PD 24 (the arrow α side in FIG. 10(b) and FIG. 10(c)) is detected, and the PD 24 (FIG. 10(b), FIG. 10(FIG. 10(b), FIG. The arrow 24 side in c) is adjacent to the PD 24 that detects the group of lamps determined to have turned off any of the lamps, and the change state is a decrease amount of the amount of light corresponding to the leaked light 40b (a decrease amount of several %) When it is determined, it is determined that the adjacent lamp 22 is turned off. Furthermore, when the outermost lamp has been turned off (for example, when the light-off lamp 22 of FIG. 10(b) is at the outermost periphery), the adjacent PD 24 (the arrow α side in FIG. 10(b)) The amount of illumination light hardly drops. Therefore, the change state of the amount of illumination light of the PD 24 is detected, and the PD 24 is adjacent to the PD 24 that detects the group of lamps determined to be turned off by any of the lamps, when the adjacent PDs 24 are not present. In the case of a change, it is determined that the lamp 22 remote from the adjacent PD 24 is turned off.

Further, as shown in FIG. 11, when the two lamps in one of the lamp groups are turned off, the amount of the irradiation light of the PD 24 to be detected is largely lowered. Therefore, when the amount of decrease in the amount of the illumination light is confirmed as follows, it is judged. When two lights in one lamp group are turned off, the amount of decrease in the amount of illumination light is determined to be when any one of the lamps is turned off. The amount of decrease in the amount of illumination light is larger.

Further, the present invention is not limited to the above embodiment, and various embodiments can be realized within the scope of the technical idea of the present invention. For example, in the above embodiment, the ten lamps connected in parallel are divided into five groups of lamps each including two lamps. However, all the lamps may be one lamp group, and the number of lamps constituting the lamp group is not limited. Two, the number of lamps constituting each lamp group may also be different. Moreover, if the cumulative use time of the lamp becomes long, the amount of the irradiation light may be lowered due to deterioration. When the decrease in the amount of the irradiation light described above becomes a problem, the reference value can be appropriately corrected downward based on the actual measurement value.

11‧‧‧Lighting device

12‧‧‧Irradiating equipment (lighting equipment)

13‧‧‧Lighting device

14‧‧‧不亮检测装置

21‧‧‧Inverter

22‧‧‧ lights

23‧‧‧ fiber optic

24‧‧‧Light diode (PD, light sensor)

25‧‧‧Signal Converter

26‧‧‧UV-visible conversion filter

27‧‧‧Transformers

31‧‧‧Circuit breaker

32‧‧‧ switch

33‧‧‧DC power supply

34‧‧‧Programmable Controller (PLC)

35‧‧‧Output control device

36‧‧ ‧ Accumulation Department

37‧‧‧Memory Department

38‧‧‧Determining Department

Claims (16)

A lamp non-lighting detecting device, comprising: a light amount sensor for a lamp group including a plurality of lamps connected in parallel; and an accumulating portion that obtains a predetermined time according to an output of the light amount sensor a sensor integrated value; a memory unit that memorizes the sensor integrated value; and a determining unit that determines that the lamp is not lit, wherein the determining unit compares the sensor integrated value with a reference value and the sensor integrated value The comparison of the past sensor integrated values memorized in the above memory portion determines that the lamp is not lit. A lamp non-lighting detecting device, comprising: a light amount sensor, relative to a lamp group including a plurality of lamps; a UV-visible light conversion filter and an optical fiber, which are smaller than the plurality of lamps The number of the sensors is arranged toward the respective illumination surfaces of the plurality of lamps; the integration unit obtains the sensor integrated value for a predetermined period of time based on the output of the light amount sensor; and the memory unit stores the sensor integrated value And a determining unit that determines that the lamp is not lit, and the determining unit compares the sensor integrated value with a reference value, and compares the sensor integrated value with a past sensor integrated value stored in the memory unit And judge the light is not bright. The non-lighting detection device for a lamp according to the first or second aspect of the invention, wherein the reference value is set based on the sensor integrated value obtained at an initial stage of use of the lamp. The non-lighting detection device for a lamp according to any one of claims 1 to 3, wherein the reference value is set based on an output of the lamp. The non-lighting detection device for a lamp according to any one of claims 1 to 4, wherein when the four or more lamps connected in parallel form a plurality of lamp groups each including a plurality of lamps, Each of the groups of lamps includes a light amount sensor. The non-lighting detecting device for a lamp according to claim 5, wherein the determining unit further determines that the lamp is not lit based on a comparison of the sensor integrated value with a sensor integrated value of the other lamp group. The non-lighting detecting device of the lamp of claim 2, wherein: one of the above-mentioned UV-visible conversion filters and one optical fiber are disposed between vertical lines, and the vertical line is opposite to the parallel line The illumination direction of the lamp is perpendicular to the center point, and the parallel line connects the center points of the adjacent pairs of lamps constituting the lamp group. A non-brightness detecting device for a lamp, characterized by comprising: a light amount sensor, relative to a lamp group including a plurality of lamps connected in parallel; The accumulating unit obtains a sensor integrated value for a predetermined period of time based on an output from the light amount sensor; the memory unit stores the sensor integrated value; and the determining unit determines that the lamp is not lit, and the determining unit is The sensor integrated value is compared with the sensor integrated value obtained in the past in the memory unit, thereby determining that the lamp is not lit, and the sensor integrated value obtained in the past is: The sensor integrated value obtained by the sensor integrated value two or more times earlier is the sensor integrated value obtained within 50 hours before the sensor integrated value. The non-lighting detecting device for a lamp according to claim 8, wherein: the sensor integrated value obtained in the past is: a sensor obtained by two cycles earlier than the sensor integrated value Cumulative value. The non-brightness detecting device for a lamp according to Item 8 or 9, wherein the determining unit compares the sensor integrated value with a reference value, and the cumulative value of the sensor and the past The obtained sensor integrated values are compared. A light irradiation device comprising: a plurality of lamps connected in parallel; a control device that collectively controls an output of the plurality of lamps; and a non-lighting according to any one of claims 1 to 10 Detection device. A method for detecting a non-lighting of a lamp, comprising: Obtaining a sensor integrated value for a predetermined time based on an output of one light amount sensor provided for a lamp group including a plurality of lamps connected in parallel, when the cumulative value of the sensor is smaller than a reference value and smaller than the past When the sensor integrated value is output, it is determined that the light is not lit. The method for detecting a non-brightness of a lamp according to claim 12, wherein when four or more lamps connected in parallel form a plurality of lamp groups each including a plurality of lamps, each is set according to each of the lamp groups. The output of one light amount sensor is used to obtain a sensor integrated value for a predetermined time. When the sensor integrated value is smaller than the reference value and smaller than the sensor integrated value obtained in the past, it is determined that the light is not lit. A method for detecting a non-lighting of a lamp, based on an output from a light amount sensor provided for a lamp group including a plurality of lamps connected in parallel, obtaining a sensor integrated value for a predetermined time, and accumulating the sensor Comparing with the sensor integrated value obtained in the past, thereby determining that the lamp is not lit, the above-described non-brightness detecting method is characterized in that the sensor integrated value obtained in the past is: than the above sensing The sensor integrated value obtained by two or more cycles earlier than the cumulative value of the sensor is the sensor integrated value obtained within 50 hours before the cumulative value of the sensor. The method for detecting a non-brightness of a lamp according to claim 14, wherein: the sensor integrated value obtained in the past is a sensor obtained by two cycles earlier than the cumulative value of the sensor. Cumulative value. If the lamp is not bright, as described in claim 14 or 15 In the method, after the sensor integrated value is obtained, the sensor integrated value is compared with a reference value, and then the sensor integrated value is compared with the sensor integrated value obtained in the past.