TW201318938A - Clean, high density, soft-accumulating conveyor - Google Patents

Abstract

A conveyor segment for clean manufacturing applications. Each conveyor belt segment includes a pair of side rails parallel to each other; a pair of belt-drives for transporting work pieces from a first end to a second end of the belt segment; a pair of driving wheels for turning the belt-drives. The belt of each of the belt-drives is disposed in a serpentine path about plural, load-bearing upper idler wheels, around either a lower loop-back idler wheel or a driving wheel, and back up and around another pair of upper idler wheels. This sequence is repeated a selected number of times about additional pairs of upper idler wheels and lower loop-back idler wheels or a driving wheel before the belt is disposed beneath plural return idler wheels and back up to the starting point. Slipping between the belt and wheels is thus minimized, even in the absence of a work piece on the belt segment.

Description

Clean, high density, flexible gathering conveyor

This application is a continuation of the application of the patent application No. 12/432,129, filed on Apr. 29, 2009, entitled,,,,,,,,,,,,,,,,,,,,,,,,,,, U.S. Provisional Patent Application No. 61/125,901, entitled "Clean, High Density, Soft-Accumulating Conveyor", claims the benefit of priority.

There are several special performance requirements in addition to common parameters such as speed, weight, and shipping capacity in some industrial applications of conveyors. Such applications are found in semiconductors, pharmaceuticals, solar cells, hard disk drives, flat panel displays, and other manufacturing industries. For such applications and other similar applications, conveyors for moving between WIP tools require "no particle clean", "no vibration transport", "very high density WIP flow" and "soft convergence with WIP" The asynchronous movement of the pallet" (ie, no collision or collision).

For the four above requirements, the prior art has provided clean, non-synchronous movement, and flexible aggregation of WIPs, such as the use of precisely guided WIPs on rollers driven by motors that are coupled to the wheels via hysteresis. See, for example, U.S. Patent Nos. 4,793,262 and 6,047,812. Conventionally, a conveyor transport mechanism consists of a series of wheels that support and drive multiple WIP pallets on each of the two parallel sides. In the case where the inertia of the WIP does not allow the WIP pallet to synchronize with the transmission speed during acceleration or deceleration, a hysteresis coupling allows the transmission wheel of a WIP to be detached from the drive shaft of the motor to avoid The scream of the tire.

Advantageously, the hysteresis coupling reduces the rubbing motion between the drive wheel and the WIP pallet, which in another way produces particles that would unduly affect clean shipping requirements. Moreover, the hysteresis coupling in combination with the segmentation of the conveyor provides for flexible gathering of the WIP pallets (i.e., no collision) because the WIP pallets are guided by the WIP presence sensor and the WIP presence sensing The device defines the boundary of the segment on one of the conveyors that can be occupied by one and only one WIP pallet.

One of the fundamental deficiencies of the current technology is that these supports (idle) and the drive wheels generate small vibrations during transport and therefore do not meet the "no vibration" requirement. Several physical factors are the cause. First of all, it is almost impossible to manufacture a large number of wheels into an absolute same diameter and concentricity. Another factor is the impossibility of placing and positioning the wheels to form a straight line such that any perfectly flat WIP pallets that ride on it will simultaneously encounter all of the wheels below it.

One of the further drawbacks of the existing practice is that one of the very high density WIP streams is defined due to the relatively moderate acceleration and deceleration rates of the WIP. High density WIP streams require a relatively close spacing of one of the pallets that travel at high speeds. To achieve this, a relatively high acceleration and deceleration rate is required in a collision-free environment (and in which the pallets can move asynchronously with each other) (in case the pallet is slowed or stopped for whatever reason).

The physical cause of this defect is the defined surface contact required for frictional adhesion between the underlying WIP pallet and the drive wheel. Indeed, the coefficient of friction of a flexible or deformable material is dependent on the surface area, while the harder or more rigid surface is more Not the case. Therefore, it will be necessary to initiate a low setting of the hysteresis drive or early disengagement of the clutch to prevent spin of the drive wheel under the pallet during an acceleration mode, wherein the rubber tire of the clutch drive wheel and the transmission The lower side of the pallet is in direct contact.

However, the low torque clutch setting cancels the higher acceleration rate of the motor that drives the clutch. Therefore, the high speed and high density of the pallet flow cannot be achieved at present. Rather, it is important to be able to quickly start a pallet from a standstill and to quickly stop the same pallet that travels in a high speed mode of transport to maintain high density of the stream.

The need for the asynchronous movement of the pallets also necessitates the individual transport of each pallet in the presence of a space for moving the pallet downstream, and/or independently if another downstream pallet blocks its road No collision stops a pallet. In short, high speed and high density streams together need to be stably grasped on one of the pallets during their movement. However, a single drive wheel with a defined surface contact area to the WIP pallet is currently unable to deliver this performance.

To address these shortcomings, an existing conveyor section that is constructed and configured to be slightly larger than a WIP or a WIP pallet can instead be equipped with a dedicated transmission belt that is independently driven by the same dead clutch/motor mechanism as before. On the top of the wheel of the drive. The high friction belt sandwiched between the wheels and the WIP pallets provides the desired adhesion between the WIP pallet and the transmission, return idle and/or idler wheels to ensure high requirements, No sliding acceleration. Moreover, riding the belt on top of the previously disclosed wheel reduces the vibration produced by any uneven height difference of the sequential wheels.

Disadvantageously, the general belt drive conveyor is not inherently clean. because Therefore, only adding a belt drive can affect a particle-free environment. Therefore, maintaining a high level of cleanliness in a belt drive environment requires special wheel and belt designs.

Correspondingly, it would be desirable to provide a high density, high speed, non-synchronous belt drive delivery system that is particle free, vibration free, and utilizes flexible gathering.

A first belt drive conveyor includes a flat, thin belt in combination with the raised drive wheel and the idler of the flange. Each drive wheel is constructed and configured to drive and center on the flat, thin belt, and the idler wheels are constructed and configured to laterally constrain the workpiece or the object carrying the workpiece using the flanges on the idler wheels . Whenever a workpiece or the inertia of an object carrying a workpiece does not allow the workpiece or the object carrying the workpiece to synchronize with the transmission speed during acceleration or deceleration, a hysteresis clutch or coupling allows the transmission for the belt The wheel is disengaged from the drive shaft of the motor. Indeed, the clutch setting is pre-programmed or keyed such that it does not exceed the friction between the belt and the workpiece or the object carrying the workpiece. When the acceleration exceeds this setting, the workpiece or the object carrying the workpiece is decoupled from the motor.

A relatively thin belt thickness is desired because, although the idler rotates at the same rate, the portions of the idler that are closer to the axis of rotation (i.e., at or near the root) are relatively far from the axis of rotation The portion of the idler wheel rotates more slowly. Therefore, any difference in the rotational speed of the two surfaces on the flange contacting the workpiece or the object carrying the workpiece can cause unwanted rubbing and resulting friction. Therefore, it is more desirable to have a relatively thin, relatively flat belt cross section to reduce the transition between potential contact points. Speed differential and maintain the cleanliness of demand.

In a second system, a relatively thick belt (i.e., an L-shaped belt) having a raised edge is used to laterally constrain the workpiece or the object carrying the workpiece. In this embodiment, each of the drive wheels and the return idlers are machined to include a ridge on the peripheral surface beyond the travel of the belt. However, the center of the ridge radius of the machining on the drive wheels and on the return idlers is slightly offset by a distance x relative to the centerline of the belt. This deviation is centered on the L-shaped belts, and the belt dimensions (e.g., cross-sections) are inconsistent.

A third system is accomplished by completely eliminating the flanges of the idler wheels. More specifically, a third belt drive transfer device includes a belt having a circular or substantially circular cross section with a reverse clutch yaw having a reverse ridge and a reverse ridge and guide flange Empty wheel combination.

Each of the three embodiments described above divides the transport device into modules comprising one or more segments. The belt section is the smallest component of the whole and is sized to handle and transport a single workpiece or object carrying the workpiece at a time. Each belt section includes a sensor(s) that are adapted to confirm the presence or absence of one of the discrete workpieces or objects carrying the workpiece within the belt section. Currently, the movement of an upstream workpiece or an object carrying a workpiece is achieved only when one or more of the sequential downstream belt sections are all unoccupied. Therefore, the forward movement of an upstream workpiece or an object carrying the workpiece does not begin until the downstream section is completely unoccupied. This in turn defines a minimum distance between the workpiece or the object carrying the workpiece that does not depend on the rotational speed.

However, this approach delays an upstream workpiece or an object carrying the workpiece. Move forward until a clear signal is received from a downstream belt segment sensor to affect the workpiece density. This limitation becomes important once higher acceleration and deceleration are implemented. In this way, the increase in the flexible belt becomes a consistent technology for higher density, higher speed, non-synchronous, and non-colliding flow for the workpiece or the object carrying the workpiece.

By including more sensors or other feedback members along the path of the moving object or the object carrying the workpiece, the precise position of each of the objects or the objects carrying the workpiece is obtained during movement. One of the current technologies is further improved. The data signal from more sensors increases the granularity of the conveyor segments, which then become substantially finer than the size of the workpiece or object carrying the workpiece. At the limit, if various techniques are applied to the conveyor to more accurately position the moving workpiece or the workpiece carrying the workpiece, higher workpiece densities at higher flow rates can be achieved while maintaining non-synchronous, bump-free movement requirements.

Yet another improvement in the configuration of the present disclosure is achieved by using a spiral belt path to thereby drive continuous rolling contact of the belt with the idler and drive wheels and avoiding between the belt and the transmission and idler wheels. Regular and intermittent contact, in particular when the belts in their respective areas are unloaded.

Similarly, improvements in the disclosed system are obtained when the ridge of the alignment belt is not disposed on the drive wheel but on the idler wheel that can define the spiral belt path and on the idler wheel that defines the belt return path.

The invention is pointed out with particularity in the scope of the accompanying claims. However, it can be better by reference to the following description made in conjunction with the drawings. The advantages of the invention described above are solved along with additional advantages. The figures are not necessarily to scale, and like reference numerals refer to the same parts throughout the different views.

Referring to Figures 1 and 2, a belt drive transfer system ("transfer device") will be described. The conveyor 10 includes a plurality of internally coupled conveyor modules 15 having at least one belt actuator conveyor section 25. The belt sections 25 and conveyor modules 15 can be constructed in a myriad of configurations and configured to meet local transportation and equipment requirements. Each conveyor module 15 is internally segmented into a unit length belt or belt section 25, the size (length and width) of which is determined by the size of the workpiece or by an object 19 carrying a workpiece. Indeed, the length of a conveyor module 15 is an integral multiple of the length of each belt segment 25 within the module 15.

For example, if the workpiece or workpiece-bearing object 19 has a length of 0.5 m and the conveyor module 15 has a length of approximately 2 m, then each conveyor module 15 would require a total of four autonomous, belt-gear conveyors. Section 25, which is each slightly larger than the 0.5 meter length of the workpiece or object 19 carrying the workpiece. One of ordinary skill in the art will appreciate that the size of the object 19 or the object 19 carrying the workpiece, the length of the conveyor module 15 and the length of each belt section 25 in each module are variable.

Each belt section 25 of each conveyor module 15 includes first and second side rails 12 and 14. The side rails 12 and 14 are constructed and arranged to be parallel or substantially parallel to each other. The side rails 12 and 14 can be raised to any desired height above a planar surface (e.g., a floor or sheet) and/or suspended from an overhead structure (e.g., a ceiling or beam).

The first and second side rails 12 and 14 of each belt section 25 are each fixedly coupled to the first and second side rails 12 of the adjacent conveyor module 15 adjacent to the belt sections 25a and 25b and 14. Moreover, the first and second side rails 12 and 14 of the belt section 25 at the end of a conveyor module 15 are each fixedly coupled to the first and the first end portions of the adjacent conveyor module 15 Two side rails 12 and 14.

To modify the direction of the workpiece or the flow of the object 19 carrying the workpiece, or to branch the conveyor 10 in the other direction, construct the corner element based on the length and width of the workpiece or object 19 carrying the workpiece (not shown) ) to allow free network configuration based on this mathematical modularity. Optionally, the upright lift (not shown) may be provided with discrete belt sections 25 and/or conveyor modules 15 to allow for an upright network between conveyors 10 that are placed at different elevations.

Each conveyor module 15 includes at least one side struts 13 that are operatively coupled between the parallel rails 12 and 14 to increase construction support to the belt section 25 and to the conveyor module 15. Although the lateral stays 13 shown in Figures 1 and 2 are disposed perpendicular or substantially perpendicular to each of the side rails 12 and 14, the struts for the lateral struts may instead intersect, for example Form an X (not shown).

The belt section 25 has a modular size that is pre-determined based on the size (length and width) of a workpiece and/or an object 19 carrying a workpiece. Moreover, each belt section 25 is constructed and arranged to provide a workpiece and/or autonomous transport of an object 19 carrying a workpiece to transport the workpiece from one end of the belt section 25 to the other end and/or An object 19 carrying a workpiece. Accordingly, each belt section 25 includes its own support and transfer members and Its own transmission member, and more specifically, each belt section 25 includes a pair of drive belts 20 and belt support wheels (ie, idler wheels 18) that are physically supported and transport the workpiece and/or carry the workpiece. The object 19, and a motor 11 and a pair of belt drive wheels 16a and 16b of the pair of drive belts 20 are advanced.

Belt section

As mentioned above, each belt section 25 is constructed and arranged to provide a workpiece and/or autonomous transport of an object 19 carrying a workpiece to transport the workpiece from one end of the belt section 25 to the other end. And/or the object 19 carrying a workpiece. Accordingly, each belt section 25 includes its own support and transfer member and its own transmission member. The support and transfer members provide underlying indirect rolling support to the workpieces and/or to the objects 19 carrying the workpiece, and transport the workpiece or the object 19 carrying the workpiece from one end of the belt section 25 to the other end ( Such as pallets, boxes, etc.). The transmission members are adapted to provide the inertial forces required to drive the support and transfer members.

Referring to Figures 2 and 3, an illustrative transmission member is shown. The transmission member can include a drive motor 11 and first and second belt drive mechanisms, each of which includes more than one drive wheel 16a and 16b. The drive wheels 16a and 16b are each disposed on the first and second side rails 12 and 14. Once extended drive shaft 17 is mechanically coupled to each of the drive wheels 16a and 16b.

The motor 11 is adapted to directly drive (i.e., rotate) one of the two drive wheels 16a and the respective belt drive mechanisms and to indirectly rotate the other drive wheel 16b and the belt drive mechanism via the extended drive shaft 17. These belts The actuator mechanism is synchronized by the connecting drive shaft 17. Therefore, the transported workpiece or the object 19 carrying the workpiece rests on the drive belt 20 and is supported by the drive belt 20, which is synchronously driven. The attachment drive shaft 17 and its attachment members to the drive wheels 16a and 16b must also conform to design criteria that eliminate the generation of contaminating particles. Accordingly, the designs described below are unique in that they allow the first and second conveyor rails 12 and 14 to be slightly misaligned. Thus, the connecting drive shafts 17 can be attached to each of the drive wheels 16a and 16b in a manner that is less than perfectly vertical.

Indeed, referring to Fig. 3, the configuration of the connecting transmission shaft 17 and the transmission wheel 16a is disclosed. If the connecting transmission shaft 17 enters the transmission wheels 16a and 16b at a non-perpendicular angle, the rotation will cause the shaft 17 to be The strain on the attached flange forces one or both to wear excessively. To circumvent this problem, the ends 42 of the drive shaft 17 can be substantially flattened from a circle. The flange attached to the hub 31 can be constructed and configured to include a centrally located slot 35 to receive the flat ends 42 of the shaft 17. The openings 35 of the slots in the flange are tied to the counterbore on the entry side of the shaft and are circular to accommodate one of the unstrained rather than the vertical axis 17. Rotating this assembly will then freely advance the shaft 17 into the slot 35, eliminating or substantially eliminating any unwanted material wear. Material selection is also important in order to minimize accidental friction at the insertion point of each slot 35.

Preferably, the motor 11 is coupled to a transmission wheel 16 and the connecting transmission shaft 17 via a hysteresis clutch integrated in the interior of the transmission wheel 16. The hysteresis clutch allows for different transmission speeds between the drive belt 20 and the motor 11 during acceleration and deceleration. Variable loads associated with each belt section 25 (eg, full load, partial load, and emptying) affect the workpiece or load The inertia of the object 19 of the workpiece.

The detent clutch has an inner, rotating portion and an outer clutch housing that is the drive wheel 16 itself. Adjusting the hysteresis clutch such that the inner, rotating portion is fixedly coupled (i.e., pressed) to the rotor or drive shaft of the motor 11, while the outer clutch housing portion (not shown) is free due to a hysteresis effect To rotate asynchronously on the same rotor or drive shaft. When this mode of operation is desired, the motor 11 can continue to drive the internal rotating parts of the clutch while the outer clutch housing portion is self-rotatingly braked.

The drive belts 20 are driven by each of the drive wheels 16a and 16b that are mechanically coupled to the outer clutch housing portion. Thus, by engaging and disengaging the outer clutch housing portion, the motor-clutch combination can be controlled to deliver a defined drive torque to the belt 20, which is independent of speed. For example, if the motor torque exceeds the hysteresis force on the belt 20 and the outer clutch housing portion, the clutch housing portion will be synchronized from the motor drive shaft rotational speed. Therefore, the outer clutch housing portion will rotate at the hysteresis speed of the spin drive belt 20. Advantageously, when the clutch housing is de-synchronized and rotated at a hysteresis speed, it continues to exercise a pre-established constant drive torque.

The support and transfer members of each belt section 25 include a pair of rails 12 and 14 that are constructed and configured to constructively support the load of the drive and transfer members and a workpiece and/or any of the workpieces. The live load of the object 19. The workpieces or objects carrying the workpieces 19 are in direct contact with the pair of drive belts 20 and ride directly on the pair of drive belts 20 from which the pair of drive belts 20 are rotated when rotated by the corresponding drive wheels 16a and 16b. Paragraph 25 One end moves the workpiece or the object 19 carrying the workpiece to the other end. The drive belts 20 travel along the idler wheels 18 that are adapted to freely rotate with the belts 20 without adding additional transmission force.

Each drive belt 20 is constructed and arranged to pass over the freely rotatable idler wheels 18. The idler 18 is removably attached to the first and second side rails 12 and 14 (eg, using a bearing combination having a low friction axle, screws, bolts or rivets, etc.) such that the workpiece or workpiece is loaded The weight of the object 19 is transferred to the first and second side rails 12 and 14 via the drive belt 20 and the idler wheel 18. The idler 18 is spaced at critical intervals along the side rails 12 and 14, which are determined by the belt speed, vibration level, and other design requirements, as discussed further below.

At one end of each of the first and second side rails 12 and 14 of each belt section 25 (opposite to the transmission wheels 16a and 16b), a pair of idler wheels 18a and 18b serve Returning the member to one of the belts 20. The diameters of the return wheels 18a and 18b may be the same or substantially the same as the diameter of the drive wheel 16a or 16b and/or the idler wheels 18, or may be larger or smaller. The drive wheels 16a and 16b and the return idlers 18a and 18b can also be critically shaped to maintain centering and tracking of the drive belt 20.

For tension purposes, the length of the drive belt is determined by the length of a belt section 25 that is less than the measure or total amount of critical stretch of the elastic belt 20. The wheel ridge cross-sectional geometry for the drive wheel 16 and the idler wheel 18 is determined by the belt material, cross-sectional geometry, and the like. Exemplary combinations of various belt and wheel types are described below.

Referring to Figure 4, a clutch transmission primary drive wheel 16b is shown having Machining to a relatively smooth center bulge on its outer periphery. The center ridge is adapted to center on a relatively flat, relatively thin elastic belt 20. The drive belt 20 is returned to one end of the belt section 25 using a similar ridge and a similarly flanged return idler 18b.

Between the pair of drive wheels 16a and 16b and their corresponding return wheels 18a and 18b, the drive belt 20 passes over a smaller idler wheel 18 that includes a flange 30. The flanged idler 18 is constructed and arranged to laterally contain the workpiece or the object 19 carrying the workpiece.

A relatively thin belt thickness is desired because, although the idler wheels 18 rotate at the same rate, the portions of the idler wheel 18 that are closer to the axis of rotation (i.e., at or near the root) are positioned relative to each other. The portion of the idler 18 that is farther from the axis of rotation rotates more slowly. Thus, any difference in the rotational speed of the two surfaces on the flange 30 of the object 19 that contacts the workpiece or carries the workpiece can cause unwanted rubbing, which can cause friction particles. Therefore, a relatively thin, relatively flat drive belt 20 cross-section is preferred to reduce the rotational speed differential between the workpiece or the potential contact point of the object 19 carrying the workpiece, and to maintain the desired clean level.

Referring to Figure 5, a cross-sectional view of another embodiment of a belt section 25 for a system 10 as seen from the end of the return idler of the belt section 25. The motor 11 is mechanically coupled to one of the drive wheels 16a via a hysteresis clutch. The drive wheels 16a and 16b (at the distal end of the Figure) drive an L-shaped or substantially L-shaped belt 20 that includes a segment 33 of a raised edge. The long leg of "L" is placed on the plane of the peripheral surface of the wheels and is substantially in it, while the short leg of "L" is vertical or substantially perpendicular to its. The restraining flange 33 on the L-shaped belt is constructed and arranged to laterally constrain the workpiece therebetween or the object 19 carrying the workpiece.

There is more than one idler 18 between the drive wheels 16a and 16b and the respective return idlers 18a and 18b, which may optionally include a restraining flange 36 (shown in the phantom). When the idler wheels 18 include a flange 36, the bottom and outer corners of the L-shaped belt 20 are guided by the idler wheels 18 at the roots thereof.

In this second embodiment, each of the pair of drive wheels 16a and 16b and the pair of return wheels 18a and 18b are machined to include a belt-centered ridge on one of the outer peripheral surfaces of the belt 20 travel. Because the cross-sections of the L-shaped belts 20 are inconsistent, the center 34 of the radiant radius machined on the drive wheels 16a and 16b and on the return idlers 18a and 18b relative to the centerline of the drive belt 20 37 is slightly offset by a distance x to properly center the drive belt 20. The dimension of the deviation x is determined by the material of the belt, the thickness of the belt, and the like.

Referring to Figures 6A and 6B, a belt section 25 is shown having interposed drive wheels 16a and 16b (which are disposed at one end of the belt section 25) and corresponding return idlers 18a and 18b (which A relatively thin, circular or substantially circular elastic drive belt 20 that is stretched and stretched between the other ends of the belt section 25. A first transmission wheel 16a is directly advanced by a motor 11 via an internal hysteresis clutch. A second transmission wheel 16b is coupled to one of the motors 11 by the internal hysteresis clutch and is indirectly advanced via the transmission shaft 17. Between the pair of transmission wheels 16a and 16b and the respective pair of return idlers 18a and 18b, more than one idler 18 is disposed, which is used to guide the transmission. The moving belt 20 is also used to support the weight of the workpiece or the object 19 carrying the workpiece.

All of the trains are machined to include a relatively smooth, inverted or reverse ridge 38 at the periphery thereof. Due to the ridge radius 39, the reverse ridge 38 is adapted to center the circular or substantially circular belt 20 and keep it clean. Preferably, the radius 39 is greater than the radius of the drive belt 20 to minimize cross-movement of the belt and wheel surfaces, which ensures particle-free motion.

As an alternative to the use of the L-shaped belt 20 as shown in FIG. 5 or the idler wheels 18a, 18b having a restraining flange 30 as shown in FIG. 4, a lateral guide wheel 102 can be provided, such as Shown in Figure 7. Preferably, the guide wheels are provided with a rebound, and some bendable outer surfaces to prevent the shock from contacting one of the workpieces. While it is effective to limit the workpiece to an optimal path of travel, it can be expensive to provide such lateral guide wheels in all or substantially all of the conveyor sections. However, the use of lateral guide wheels eliminates the need for an L-shaped belt or an idler with a restricted flange. Of course, any combination of an L-shaped belt, an idler with a restricted flange, and a lateral guide wheel can be provided, although the function of each can be considered redundant when so combined.

Despite the particle reduction achieved by the use of an L-shaped belt or a lateral guide wheel, there is still another source of particles not heretofore stated. As is apparent in the views of Figures 1, 2, 4 and 6A, each of the depicted belts is routed between a drive wheel (e.g., drive wheel 16a) and a return wheel (e.g., return wheel 18a). . In the meantime, there may be a plurality of idler wheels (such as idler wheels 18) adapted to support a workpiece 101 as it passes over a workpiece 101. Regardless of the straightness of the drive and/or return wheels relative to the idler wheels The diameter still has the opportunity to slide the belt across the surface of one or more of the idlers, especially when a workpiece is not being loaded. When not actively engaged by the belt, the rate of rotation of an idler can begin to slow. When re-engaged by the belt, the rotational speed of the idler is less than the linear rotational speed of the belt. When a workpiece travels along the conveyor section, it forces the belt into contact with the idler wheel and thus accelerates the belt speed on the idler wheel. Due to the initial difference in rotational speed, friction particles can thus be produced.

To prevent such intermittent contact between the belt and the idler wheel, another embodiment of the disclosed system and method, as shown in Figures 7-9, utilizes a spiral belt. Specifically, a drive belt 103 is disposed to wrap around the idler pulley 104, the lower return idler pulley 105, and the drive wheels 108 that are attached to a respective drive shaft 106.

Figure 7 depicts a portion of one side of a conveyor section. A workpiece 101, such as a 300 mm FOUP, is shown on a portion of the section and will be moved from the upper right corner to the lower left corner of the opposite belt 103 as illustrated. Lateral guide wheels 102 are disposed in the side walls on each side of the conveyor section. The multi-free rotation of the upper idler wheel 104 and the lower return wheel 105 is illustrated. A drive wheel 108 attached to one of the drive shafts 106 is also depicted, and a return idle wheel 107 is depicted. It should be understood that a similar configuration of one of the idler and the drive wheel is placed on the side wall of the table before Figure 7. Figure 8 is a cross-sectional view of one of the conveyor sections of Figure 7 taken along line A-A. Figure 9 is a side elevational view of one of the multiple sequential conveyor sections illustrating, in one embodiment, the path of the belt 103 traveling through various idle and drive wheels.

Preferably, as shown in Figures 7 and 9, the belt 103 passes through two Above the upper side of the upper runner 104, downwardly surrounds the foremost forward side of the two upper idlers, surrounds the rearward, downward and forward sides of the lower return wheel 105, and then returns upwards to the next upper idler Back and up. Thus, the belt passes over the two upper idlers, down and around the return pulley, and then back over the two upper idlers.

Next, in the illustrated embodiment, the belt is in contact with more than 25% of the peripheral surface area of each of the upper idlers that form a pair of upper idlers. The belt is also in contact with more than 50% of the peripheral surface area of the lower return wheel and the drive wheel. The belt is also in contact with less than 25% of the peripheral surface area of each of the return idlers.

At some interval between the pair of upper idle wheels, the belt passes down and around a drive wheel 108 rather than a lower return wheel. As with the drive wheels of the previously described embodiments, the drive wheels of Figures 7-9 are preferably coupled together by a drive shaft 106 to rotate the drive wheels on each side of a conveyor section at the same speed. Here, the drive shaft is depicted as a simple cylinder, although it is understood that the drive shaft can take one of many forms, such as the connection drive shaft 17 of Figures 3 and 4. Thus, regardless of whether a workpiece 101 is riding on that portion of the belt 103, the belt system remains in frontal contact with each of the upper idle wheels 104.

The drive wheels 108 and the drive shaft 106 can be disposed at any suitable location within a conveyor section. However, it may be preferred to provide a drive wheel that is closer to the center of the respective conveyor section.

As shown in Figures 7 and 9, the upper idler wheels 109 adjacent the drive wheel 108 have a smaller diameter to accommodate the drive wheel 108. In the presence of the wheel This embodiment of the larger amount of space does not require this diameter difference.

At the selected position, the belt passes from the forward side of an upper idler wheel 104 to a returning idler wheel 107 having a lower surface below the lower surface of each lower return wheel. Another return idler wheel is placed at the opposite end of the respective conveyor section and the belt is directed upwardly into contact with the last upper idler wheel in the conveyor section. Optionally, one or more additional return idlers can be placed along the length of the respective conveyor section to guide the belt as it travels in a direction opposite the direction of movement of the workpiece. Also shown in Figure 7 is at least one beam 110 for maintaining alignment between the sides of the conveyor section.

As is apparent from the figures, the upper idler, lower return and return idlers are disposed on respective side rails of the conveyor section via axes extending perpendicular or substantially perpendicular to the respective side rails. Thereby enabling the wheels to rotate in a plane substantially parallel to one of the respective side rails. As described, the drive trains are similarly mounted, although the drive wheels on opposite sides of the conveyor section are coupled by the drive shaft.

The number of idler pairs above each conveyor section may be selected based on factors such as section length, belt material, belt thickness, drive wheel retarder characteristics, and the like. The length of each belt section on the one-line conveyor is determined by the size of the workpiece to be transported. In a typical implementation application, one of the transport sections of the 300 mm FOUP is 0.5 m long.

In the earlier described embodiment, the transmission and selection idler wheel has a central ridge to hold the belt approximately centered on each of the transmission and return idlers. However, if any of the shafts used for the wheel with the bulge are not perpendicular to the belt and In the direction in which the workpiece travels, the belt can travel in a slightly eccentric path across the periphery of the respective wheel surface rather than along the optimal path defined by the ridge in another manner. Thus, the respective wheels can be rotated at a different speed than the complementary wheels on the opposite side of the conveyor section. This causes frictional slip under the directly loaded workpiece, producing some non-negligible particles. To account for this possible source of contamination in the embodiment of Figures 7-9, the ridges are preferably placed only on the idler.

Controller

The asynchronous movement and flow control of the workpiece or the object 19 carrying the workpiece can be achieved by embedding a network of a microcontroller or microcontroller in the body of the conveyor. Controller 50 (Fig. 5) contains hardware or software applications to perform basic transportation logic, such as workpiece or workpiece 19 carrying the asynchronous flow and flexible gathering (i.e., non-collision) linear transmission and speed adjustment, acceleration and deceleration, logic The control branch is more than one stream and merged from more than one stream, and an object 19 for tracking the workpiece or carrying the workpiece from a source or entry point to a destination or exit point. The asynchronous stream on the internal segmented transport device 10 follows the embedded logic, wherein each belt segment 25 is capable of sensing the presence of a workpiece or an object 19 carrying a workpiece, and if (and only if) the belt region Segment 25 is confirmed to be vacant and available (i.e., emptying any workpiece or object 19 carrying the workpiece), allowing the workpiece or object 19 carrying the workpiece to enter from one of the upstream streams. This logic inherently facilitates linear movement and flexible gathering of the workpiece or object 19 carrying the workpiece.

One of the above control logics even further improves the workpiece or the workpiece carrying the workpiece contained in the program for emptying a respective workpiece or an object 19 carrying a workpiece. The body 19 moves towards the preference of the belt section 25. The improved logic allows for a higher throughput by increasing the flow density on the conveyor 10 and further includes the time and distance calculation of the physical position of the discrete workpiece or object 19 carrying the workpiece. This improved algorithm can be enhanced by adding an additional sensor 60 (Fig. 2) to each of the belt sections 25 of the conveyor 10, which enables the discrete workpiece or the object 19 carrying the workpiece to be positioned closer to the original zone. The segment will allow the position to be more precise.

An additional improvement toward one of the higher density and higher throughput will result in a mechanical reduction in the size of the belt section 25. This reduction will mean less than the size of the belt segment of the workpiece or the object 19 carrying the workpiece, but still one of its complete fractions.

Many variations in the details, materials, and configurations of the parts and steps described and illustrated herein may be made by those skilled in the art in light of the teachings herein. Accordingly, the scope of the following claims is not limited to the embodiments disclosed herein and may be construed as being

10‧‧‧Transfer device/system

11‧‧‧Motor

12‧‧‧First side rails

13‧‧‧ lateral struts

14‧‧‧Second side rails

15‧‧‧Transport device module

16a‧‧‧Drive wheel / first drive wheel

16b‧‧‧Drive wheel / second drive wheel

17‧‧‧Drive shaft

18‧‧‧Air wheel

18a‧‧‧Return wheel/return idler

18b‧‧‧Return wheel/return idler

19‧‧‧Objects carrying workpieces

20‧‧‧Drive belt/elastic belt/L-shaped belt/round belt

25‧‧‧ Belt drive conveyor section

25a‧‧‧Adjacent belt section

25b‧‧‧adjacent belt section

31‧‧·wheels

33‧‧‧ paragraph/limit flange

34‧‧‧Center of the radius of the rise

35‧‧‧Slot/slot opening

36‧‧‧Restricting flange/flange

37‧‧‧Center line of drive belt

38‧‧‧Backside uplift

39‧‧‧Room radius

42‧‧‧End of the drive shaft

50‧‧‧ Controller

101‧‧‧Workpiece

102‧‧‧ lateral guide wheel

103‧‧‧Land

104‧‧‧Air wheel

105‧‧‧Under the idler

106‧‧‧Drive shaft

107‧‧‧Return to idler

108‧‧‧Drive wheel

109‧‧‧Air wheel

110‧‧‧ beams

A‧‧‧ line

1 shows a conveyor module having one or more belt sections in accordance with the present disclosure; FIG. 2 shows a belt section in accordance with the present disclosure; FIG. 3 shows a transmission wheel in accordance with the present disclosure; One section of a belt drive transfer device in accordance with one aspect of the present disclosure; FIG. 5 shows another belt drive transfer device in accordance with the present disclosure Figure 6A shows a section of yet another belt drive transfer device in accordance with the present disclosure; Figure 6B shows a detail of one of the drive wheels for the belt section shown in Figure 6A; Figure 7 is based on A perspective view of a portion of a conveyor belt section of a spiral belt path is provided in an embodiment of the present invention; FIG. 8 is a cross-sectional view of a portion of the conveyor section of FIG. 7; and FIG. One of the more than one conveyor sections of the embodiment of Figure 7 is a schematic side view.

101‧‧‧Workpiece

102‧‧‧ lateral guide wheel

103‧‧‧Land

104‧‧‧Air wheel

105‧‧‧Under the idler

106‧‧‧Drive shaft

107‧‧‧Return to idler

108‧‧‧Drive wheel

109‧‧‧Air wheel

110‧‧‧ beams

A‧‧‧ line

Claims (12)

A conveyor section for a clean manufacturing application, the conveyor section comprising: a pair of mutually parallel side rails; a pair of autonomous belt drives, for use from a first end of the belt section to One of the belt sections transports at least one workpiece at a second end, each belt drive being disposed parallel or substantially parallel to one of the pair of side rails, each belt drive comprising: more than one pair of upper idling Wheels, which are disposed at substantially the same height along the respective side rails, a plurality of lower return wheels, each placed in the middle of two respective upper idler wheels and disposed low along the respective side rails On the two respective pairs of idler wheels, one of the transmission wheels is disposed in the middle of the two respective upper idlers and is disposed along the respective side rails below the two respective pairs of idlers, one a returning idler wheel disposed adjacent the first end of the belt section and a second returning idler wheel disposed adjacent the second end of the belt section, the first and second Returning the idler wheel to be placed along the respective side rail Lower than the plurality of lower return wheels and the transmission wheel, and a continuous belt having a substantially planar cross section, wherein the belt is disposed in sequence with: a first pair of upper idler wheels; One of a plurality of lower return wheels or one of the respective ones of the transmission wheels a lower surface; and the upper surface contact of the subsequent one of the more than one pair of upper idlers, wherein the belt is disposed in sequence with: the pair of the second end closest to the belt section One of the upper surfaces of the runner; a lower surface of one of the second return idlers; a lower surface of the first return idler; and one of the pair of upper idlers closest to the first end of the belt section Surface contact, wherein all of the upper idler, lower return and return idlers are adapted to rotate in a plane substantially parallel to one of the respective side rails. The conveyor section of claim 1, wherein each of the outer idler, the lower return wheel, and the return idler has a ridge for centering the belt thereon. The conveyor section of claim 2, wherein the ridges of each of the idler, the lower return wheel, and the return idler are substantially coplanar. The conveyor section of claim 1, further comprising at least one intermediate return idler disposed between the first and second return idlers and disposed relative to the respective side rail Such substantially equal heights as the first and second return idlers. The conveyor section of claim 1, wherein each belt drive further comprises more than one lateral guide wheel, the same is disposed in association with the respective side rail to select one of the workpieces passing through the conveyor section Sliding contact of each of the more than one lateral guide wheels, the axis of rotation being substantially perpendicular to the workpiece traveling through the conveyor section direction. The conveyor section of claim 1, wherein the outer surface of the drive wheel of each belt drive is substantially cylindrical. The conveyor section of claim 1, wherein the belt is in contact with more than 25% of the peripheral surface area of each of the upper idle wheels constituting each pair of upper idlers, and the lower return wheel More than 50% of the peripheral surface area of the drive wheel is in contact with and is in contact with less than 25% of the peripheral surface area of each of the return idlers. A method of transporting a workpiece on a conveyor section, each conveyor belt section further comprising a pair of mutually parallel side rails; for from a first end of the belt section to the belt section a second end transporting a pair of autonomous belt drives of at least one workpiece, each belt drive being disposed parallel or substantially parallel to one of the pair of side rails, each belt drive being disposed along the respective More than one pair of upper idlers at substantially the same height of the side rails; a plurality of lower return wheels, each disposed between the two respective upper idlers and disposed below the respective side rails Two respective upper idle wheels; one drive wheel disposed between the two respective upper idlers and disposed along the respective side rails below the two respective upper idlers; a first return idler Disposed adjacent to the first end of the belt section; and a second returning idler wheel disposed adjacent to the second end of the belt section, the first and second returning idler wheels Placed along the respective side rails to be low The next time a plurality of fifth wheel and the transmission wheel; and a continuous belt, having a substantially flat cross section, the method comprising the belt for each actuator: Positioning the belt in sequence with: a top surface of a first pair of upper idle wheels; a lower surface of one of the plurality of lower return wheels or one of the transmission wheels; and the plurality of upper idle wheels The upper surface of the subsequent sequencer is in contact; and the belt is disposed in sequence with: an upper surface of the pair of upper idle wheels closest to the second end of the belt section; the second return idle a lower surface of the wheel; a lower surface of the first return idler; and an upper surface contact of one of the pair of upper idle wheels closest to the first end of the belt section. The method of claim 8, further comprising providing a ridge on each of the upper idler wheel, the lower return wheel, and the return idler wheel to have a ridge for centering the belt thereon. The method of claim 8, further comprising providing at least one intermediate return idler wheel disposed between the first and second return idlers and disposed relative to the respective side rails as Waiting for the first and second return idlers to be substantially the same height. The method of claim 8 further comprising providing each belt drive with more than one lateral guide wheel, such as being disposed in conjunction with the respective side rail to select a workpiece that passes through one of the conveyor sections The circumferential peripheral rolling contact, the axis of rotation of each of the more than one lateral guide wheels being substantially perpendicular to the direction of the workpiece traveling through the conveyor section. The method of claim 8, further comprising positioning the belt to be more than each of the upper idlers that make up each pair of upper idlers 25% of the peripheral surface area contact; more than 50% of the peripheral surface area of the lower return wheel and the drive wheel; and less than 25% of each of the return idlers Contact with the surrounding surface area.