TW201308019A - Exposure apparatus - Google Patents

Exposure apparatus Download PDF

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Publication number
TW201308019A
TW201308019A TW100143501A TW100143501A TW201308019A TW 201308019 A TW201308019 A TW 201308019A TW 100143501 A TW100143501 A TW 100143501A TW 100143501 A TW100143501 A TW 100143501A TW 201308019 A TW201308019 A TW 201308019A
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Taiwan
Prior art keywords
lens
exposure apparatus
light
mold
light source
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TW100143501A
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Chinese (zh)
Inventor
Young-Su Jin
Kwang-Chun Lee
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Samsung Electro Mech
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Publication of TW201308019A publication Critical patent/TW201308019A/en

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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor

Abstract

There is provided an exposure apparatus. The exposure apparatus includes a mold including a lens molding unit formed thereon, a light source curing a lens molding resin on the mold, a lens unit converting light irradiated from the light source into parallel light, and a scattering member scattering the parallel light.

Description

曝照裝置Exposure device

本申請案係主張於2011年8月4日向韓國智慧財產局所提出申請之韓國專利申請案第10-2011-0077795號之優先權,於此併入該專利申請案所揭露之內容以供參考。The present application claims the priority of the Korean Patent Application No. 10-2011-0077795, filed on Jan. 4, 2011, the disclosure of which is hereby incorporated by reference.

本發明係有關於一種曝照裝置,特別係有關於一種能夠均勻地以光照射透鏡成型樹脂以製造有均一品質的透鏡陣列(array)的曝照裝置。The present invention relates to an exposure apparatus, and more particularly to an exposure apparatus capable of uniformly irradiating a lens molding resin with light to produce a lens array of uniform quality.

因可攜式電子設備外加的攝影功能已為普遍,小型相機模組的需求已經增加。因此,為便於相機模組的量產,其透鏡由樹脂製成。As the photographic capabilities of portable electronic devices have become commonplace, the demand for compact camera modules has increased. Therefore, in order to facilitate mass production of the camera module, the lens is made of resin.

樹脂製成的透鏡的製造是藉由,將透鏡成型樹脂注入,複數透鏡形狀形成於其中的模具,並使用光源(例如,紫外線)固化透鏡成型樹脂。以這種方式,藉由相對簡單的方法製造的樹脂材料製成的透鏡相比其中透鏡表面需要精密加工的玻璃製成的透鏡可容易製造,並可以陣列的形式大量生產。The resin-made lens is produced by injecting a lens molding resin into a mold in which a plurality of lens shapes are formed, and curing the lens molding resin using a light source (for example, ultraviolet rays). In this way, a lens made of a resin material manufactured by a relatively simple method can be easily manufactured compared to a lens made of glass in which the lens surface needs precision machining, and can be mass-produced in the form of an array.

然而,因為樹脂材料製成的透鏡陣列的透鏡性能相比玻璃製成的透鏡陣列相對劣化(degradated),需要均勻固化透鏡成型樹脂之技術方案。However, since the lens performance of a lens array made of a resin material is relatively degraded compared to a lens array made of glass, a technical solution of uniformly curing a lens molding resin is required.

然而,當使用由金屬製成之模具製造透鏡陣列時,照射光按照金屬模具的形狀反射或聚焦,從而導致反射和聚焦光線的數量之間的差異,使得透鏡成型樹脂不均勻固化。However, when a lens array is manufactured using a mold made of metal, the irradiation light is reflected or focused in accordance with the shape of the metal mold, resulting in a difference between the amount of reflected and focused light, so that the lens molding resin is unevenly cured.

而且,即使在使用透明材料而不是金屬材料反射光製造模具的時候,如果照射光非正交地照射模具(如果照射光不是平行光束),由於照射光的光學路徑的差異所造成的光的數量之間的差異,透鏡成型樹脂可能不均勻固化。Moreover, even when a mold is manufactured using a transparent material instead of a metal material to reflect light, if the illumination light illuminates the mold non-orthogonally (if the illumination light is not a parallel beam), the amount of light due to the difference in the optical path of the illumination light The difference between the lens molding resin may be unevenly cured.

在一般情況下,可藉由延長從光源到模具之光學路徑,並在光學路徑中使用擴散(spread)或聚集光的各種透鏡,而得到優異的平行光束。然而,使用的透鏡數量的增加(即光學路徑長度的增加),可能會減少到達模具的光的強度,使得透鏡成型樹脂的固化速度可能減少。In general, an excellent parallel beam can be obtained by extending the optical path from the source to the mold and using various lenses that spread or concentrate light in the optical path. However, an increase in the number of lenses used (i.e., an increase in the length of the optical path) may reduce the intensity of light reaching the mold, so that the curing speed of the lens molding resin may be reduced.

因此,無論模具的材料和形狀、和使用的光源的平行化(parallelization)程度,能夠均勻固化透鏡成型樹脂的曝照裝置有發展的需求。Therefore, regardless of the material and shape of the mold, and the degree of parallelization of the light source used, there is a growing demand for an exposure apparatus capable of uniformly curing the lens-molding resin.

本發明的一態樣係提供一種曝照裝置,其能夠均勻固化透鏡成型樹脂,無論透鏡成型模具的材料和形狀、和使用的光源的平行化程度。An aspect of the present invention provides an exposure apparatus capable of uniformly curing a lens molding resin regardless of the material and shape of the lens molding die and the degree of parallelization of the light source used.

依據本發明的一態樣,提供一種曝照裝置,其包括:模具,包含形成於其中之透鏡成型單元;光源,固化透鏡成型樹脂於該模具上;透鏡單元,將來自該光源照射的光轉換成平行光;以及散射構件,散射該平行光。According to an aspect of the invention, there is provided an exposure apparatus comprising: a mold comprising a lens forming unit formed therein; a light source for curing a lens molding resin on the mold; and a lens unit for converting light from the light source Parallel light; and a scattering member that scatters the parallel light.

透鏡單元可包含複數具有不同的折射率(refractive power)的透鏡。The lens unit may comprise a plurality of lenses having different refractive powers.

以這種方式,透鏡單元包含複數具有不同的折射率的透鏡時,照射區域的尺寸可以調整。In this way, when the lens unit includes a plurality of lenses having different refractive indices, the size of the irradiation area can be adjusted.

透鏡單元可包含菲涅爾透鏡(Fresnel lens)。The lens unit may comprise a Fresnel lens.

以這種方式,透鏡單元包含菲涅爾透鏡(Fresnel lens)時,來自光源之光可有效地轉換成平行光。In this way, when the lens unit includes a Fresnel lens, light from the light source can be efficiently converted into parallel light.

透鏡成型單元可塗覆有抗反射層,使得來自光源照射的光實質上透射。The lens forming unit may be coated with an anti-reflective layer such that light illuminated from the light source is substantially transmissive.

以這種方式,透鏡成型單元塗覆有抗反射層時,可減少來自透鏡成型單元反射之光所造成的透鏡成型樹脂之不均勻固化。In this manner, when the lens forming unit is coated with the antireflection layer, uneven curing of the lens molding resin caused by light reflected from the lens forming unit can be reduced.

散射構件的表面可進行粗拋光處理或腐蝕處理,以散射平行光。The surface of the scattering member may be subjected to a rough polishing treatment or an etching treatment to scatter parallel light.

可藉由研磨(grinding)或打磨(sanding)典型的半透明材料製造散射構件,從而使其製造便利化。散射構件可包括複數柵形槽,以散射平行光。The scattering member can be fabricated by grinding or sanding a typical translucent material to facilitate its manufacture. The scattering member may include a plurality of grating grooves to scatter parallel light.

經由柵形槽,散射構件可將照射在模具或透鏡成型樹脂上的平行光,較均勻散射。Through the grating grooves, the scattering member can scatter the parallel light irradiated on the mold or the lens molding resin more uniformly.

依據本發明之一態樣之曝照裝置之透鏡單元可包括過濾構件。A lens unit of an exposure apparatus according to an aspect of the present invention may include a filter member.

透鏡單元包括過濾構件時,來自光源照射的光的波長可能會受限於預定的範圍內,從而透鏡成型樹脂快速且不規則的固化受到抑制。When the lens unit includes the filter member, the wavelength of light irradiated from the light source may be limited to a predetermined range, so that rapid and irregular curing of the lens molding resin is suppressed.

曝照裝置可復包括反射構件,其將來自該散射構件散射的光反射至透鏡成型樹脂。The exposure device may further include a reflective member that reflects light scattered from the scattering member to the lens molding resin.

以這種方式,曝照裝置復包括反射構件時,散射光可被反射到透鏡成型樹脂,以改善透鏡成型樹脂的固化比(curing ratio)。In this manner, when the exposure device includes the reflective member, the scattered light can be reflected to the lens molding resin to improve the curing ratio of the lens molding resin.

散射構件可與固定模具的夾盤一體成形。The scattering member can be integrally formed with the chuck holding the mold.

散射構件可與模具一體成形。The scattering member can be integrally formed with the mold.

在這種情形下,散射構件與固定模具的夾盤或與模具一體成形時,光散射效應可最大化。In this case, the light scattering effect can be maximized when the scattering member is integrally formed with the chuck of the fixed mold or with the mold.

曝照裝置可復包括:殼體,容納光源和透鏡單元;以及反射件,將來自光源的光反射至透鏡單元。The exposure apparatus may further include: a housing that houses the light source and the lens unit; and a reflective member that reflects light from the light source to the lens unit.

以下參照隨附圖示說明本發明之實施形態。Embodiments of the present invention will be described below with reference to the accompanying drawings.

第1圖係依據本發明的第一實施例的曝照裝置的配置圖。第2圖係第1圖之透鏡單元之形狀之圖。第3圖係第1圖之散射構件之第一例之圖。第4圖係第1圖之散射構件之第二例之圖。第5圖係藉由第1圖之曝照裝置描述光傳輸之圖。Fig. 1 is a configuration diagram of an exposure apparatus according to a first embodiment of the present invention. Fig. 2 is a view showing the shape of the lens unit of Fig. 1. Fig. 3 is a view showing a first example of the scattering member of Fig. 1. Fig. 4 is a view showing a second example of the scattering member of Fig. 1. Fig. 5 is a diagram for describing light transmission by the exposure apparatus of Fig. 1.

依據本發明的第一實施例的曝照裝置100可包括光源、透鏡單元20、散射構件30、和模具40。此外,曝照裝置100可復包括殼體102,其容納光源10、透鏡單元20、和散射構件30。The exposure apparatus 100 according to the first embodiment of the present invention may include a light source, a lens unit 20, a scattering member 30, and a mold 40. Further, the exposure apparatus 100 may further include a housing 102 that houses the light source 10, the lens unit 20, and the scattering member 30.

光源10可安裝在殼體102中。光源10可照射波長能固化透鏡成型樹脂的光。例如,光源10可照射對應紫外線的波長的光。所有類型的燈,包括LED,可以用來作為光源10。Light source 10 can be mounted in housing 102. The light source 10 can illuminate light of a wavelength capable of curing the lens molding resin. For example, the light source 10 can illuminate light of a wavelength corresponding to ultraviolet rays. All types of lamps, including LEDs, can be used as the light source 10.

透鏡單元20可安裝在光源10前面(如第1圖所示光源10之下)。透鏡單元20可將來自光源10照射之光轉換成平行光。為此,透鏡單元20可以包括菲涅爾透鏡,透鏡單元20可為菲涅爾透鏡本身。同時,如第2圖所示,透鏡單元20之菲涅爾透鏡可為複數菲涅爾透鏡之結合。以此方式,當透鏡單元20包括複數菲涅爾透鏡,來自光源10之光可廣泛地轉換成平行光而且可均勻。The lens unit 20 can be mounted in front of the light source 10 (below the light source 10 as shown in Figure 1). The lens unit 20 can convert light irradiated from the light source 10 into parallel light. To this end, the lens unit 20 may comprise a Fresnel lens, and the lens unit 20 may be the Fresnel lens itself. Meanwhile, as shown in FIG. 2, the Fresnel lens of the lens unit 20 may be a combination of a plurality of Fresnel lenses. In this manner, when the lens unit 20 includes a plurality of Fresnel lenses, light from the light source 10 can be widely converted into parallel light and can be uniform.

散射構件30可設置於透鏡單元20和模具40之間。散射構件30可散射通過透鏡單元20之平行光。散射構件30可散射平行光同時不減少其能量(彈性散射(elastic scattering)),或散射平行光同時減少其能量(非彈性散射(inelastic scattering))。當假定具有相同的輸出的光源用作為光源10,在前者的情況下(彈性散射)樹脂可藉由光源10迅速固化;然而,散射光可能容易被模具40反射。另一方面,在後者的情況下(非彈性散射)樹脂可能會藉由光源10相對緩慢地固化,但是,散射光可能相對少數地被模具40反射。在目前的實施例,可使用具有後者情況特性的散射構件30;然而,依據使用的透鏡成型樹脂的特性,可使用前者情況的特性的散射構件30。The scattering member 30 may be disposed between the lens unit 20 and the mold 40. The scattering member 30 can scatter parallel light passing through the lens unit 20. The scattering member 30 can scatter parallel light without reducing its energy (elastic scattering), or scattering parallel light while reducing its energy (inelastic scattering). When a light source having the same output is assumed to be used as the light source 10, in the former case (elastic scattering) resin can be rapidly solidified by the light source 10; however, the scattered light may be easily reflected by the mold 40. On the other hand, in the latter case (inelastic scattering) the resin may be relatively slowly solidified by the light source 10, but the scattered light may be reflected by the mold 40 relatively few. In the present embodiment, the scattering member 30 having the latter case characteristics can be used; however, depending on the characteristics of the lens molding resin used, the scattering member 30 of the former case can be used.

作為參考,散射構件30可具有第3和4圖所示之形狀。也就是說,散射構件30的製造可藉由使用蝕刻液腐蝕透明材料製成之其至少一表面,或藉由進行粗糙表面處理,如磨、砂光或類似者(見第3圖)。另外,散射構件30的製造可藉由在透明材料製成的其至少一表面上形成規則形狀(在第4圖之柵形槽32)。For reference, the scattering member 30 may have the shape shown in Figures 3 and 4. That is, the scattering member 30 can be manufactured by etching at least one surface of the transparent material using an etching solution, or by performing a rough surface treatment such as grinding, sanding or the like (see Fig. 3). Further, the scattering member 30 can be manufactured by forming a regular shape (the grid-shaped groove 32 in Fig. 4) on at least one surface thereof made of a transparent material.

此外,雖然沒有顯示,散射構件30可以其中包括顆粒之透明的材料製成。在這種情況下,由於顆粒反射光不規則,可發生光散射。Further, although not shown, the scattering member 30 may be made of a material in which the particles are transparent. In this case, light scattering may occur due to irregular light reflected by the particles.

模具40可包括在其表面形成之複數透鏡成型單元42。根據待製造之透鏡陣列類型,每一透鏡成型單元42可具有凹或凸的形狀。此外,根據待製造之透鏡陣列類型,透鏡成型單元42之曲面可為球面或非球面。模具40可由透明材料如玻璃製成。在這種情況下,模具40可緊接光源10(即,在第5圖,模具40和透明基板300之位置可交換)。The mold 40 may include a plurality of lens forming units 42 formed on the surface thereof. Each lens forming unit 42 may have a concave or convex shape depending on the type of lens array to be manufactured. Further, depending on the type of lens array to be manufactured, the curved surface of the lens forming unit 42 may be spherical or aspherical. The mold 40 may be made of a transparent material such as glass. In this case, the mold 40 can be immediately adjacent to the light source 10 (i.e., at the position of the mold 40 and the transparent substrate 300 in Fig. 5).

然而,視需要,模具40可由不可透射光之不透明材料製成。在這種情況下,為使照射於模具40上的光不被反射,在不透明材料中可復包括吸光物質。黑鉻可用於吸光物質。However, the mold 40 may be made of a non-transmissive opaque material, as desired. In this case, in order to prevent the light irradiated onto the mold 40 from being reflected, the light absorbing material may be included in the opaque material. Black chrome can be used for light absorbing materials.

同時,殼體102可形成為有圓形或方形截面的支柱狀。如上所述,殼體102可容納光源10、透鏡單元20、和散射構件30。殼體102可防止來自光源10照射的光洩露至外。殼體102的內壁可塗覆有吸光物質,以便吸收來自光源10照射的光。At the same time, the housing 102 may be formed in a pillar shape having a circular or square cross section. As described above, the housing 102 can house the light source 10, the lens unit 20, and the scattering member 30. The housing 102 prevents light emitted from the light source 10 from leaking to the outside. The inner wall of the housing 102 may be coated with a light absorbing material to absorb light from the light source 10.

接下來,本發明之實施例所述之曝照裝置的使用例將參照第5圖描述。Next, an example of use of the exposure apparatus according to the embodiment of the present invention will be described with reference to FIG.

首先,將透明基板300(視需要,可由具有透鏡成型單元的模具替換)和模具40固定,將待固化之透鏡成型樹脂200施加到模具40之成型區域。接下來,移動模具40以壓縮透鏡成型樹脂200。然而,為了保持透明基板300和模具40之間的恆定距離,根據待製造之透鏡陣列類型,模具40可向上移動到特定的高度。First, the transparent substrate 300 (which may be replaced by a mold having a lens forming unit as needed) and the mold 40 are fixed, and the lens molding resin 200 to be cured is applied to the molding region of the mold 40. Next, the mold 40 is moved to mold the resin 200 in a compression lens. However, in order to maintain a constant distance between the transparent substrate 300 and the mold 40, the mold 40 may be moved upward to a specific height depending on the type of lens array to be manufactured.

當透鏡成型樹脂200之壓縮完成,操作光源10以固化透鏡成型樹脂200。在這裡,來自光源10照射的光通過透鏡單元20時,轉換成平行光。如第5圖所示,轉換後的平行光通過散射構件30時,廣泛地散射於透鏡成型樹脂200整體上。When the compression of the lens molding resin 200 is completed, the light source 10 is operated to cure the lens molding resin 200. Here, when the light irradiated from the light source 10 passes through the lens unit 20, it is converted into parallel light. As shown in FIG. 5, when the converted parallel light passes through the scattering member 30, it is widely scattered on the entire lens molding resin 200.

在這裡,因為散射光以任意角度入射(incident)於透鏡成型單元42上,透鏡成型單元42上反射之光不聚焦在透鏡成型樹脂200。此外,由於光源的平行化程度的差異發生的光的數量之間的差異可以減少。因此,依據本發明之實施例,相比其他部分,部分透鏡成型樹脂200的快速固化可有效地防止。Here, since the scattered light is incident on the lens forming unit 42 at an arbitrary angle, the light reflected on the lens forming unit 42 is not focused on the lens forming resin 200. Furthermore, the difference between the number of lights occurring due to the difference in the degree of parallelization of the light sources can be reduced. Therefore, according to the embodiment of the present invention, the rapid curing of the partial lens molding resin 200 can be effectively prevented compared to other portions.

此外,因本發明之實施例所述之曝照裝置100可使用具有非彈性散射性質的散射構件30,反射至透鏡成型單元42上的光無法容易聚焦。Further, since the exposure apparatus 100 according to the embodiment of the present invention can use the scattering member 30 having inelastic scattering properties, light reflected onto the lens forming unit 42 cannot be easily focused.

因此,本發明之實施例所述之曝照裝置100具有上面描述的特性,透鏡成型樹脂200可均勻地固化。Therefore, the exposure apparatus 100 according to the embodiment of the present invention has the characteristics described above, and the lens molding resin 200 can be uniformly cured.

作為參考,本發明的上述實施例描述,使用實施例所述之曝照裝置100來固化透鏡成型樹脂200;然而,視需要,可使用本發明之實施例所述之曝照裝置100來固化其他固化材料。For reference, the above embodiment of the present invention describes that the lens forming resin 200 is cured using the exposure apparatus 100 described in the embodiment; however, the exposure apparatus 100 according to the embodiment of the present invention may be used to cure other parts as needed. Curing material.

此外,在本發明的實施例中,模具40是單獨使用;然而,視需要,可使用一對的上和下模具40。也就是說,可使用其上形成有單獨的透鏡成型單元之上模具,代替透明基板300。Further, in the embodiment of the present invention, the mold 40 is used alone; however, a pair of upper and lower molds 40 may be used as needed. That is, instead of the transparent substrate 300, a mold on which a separate lens molding unit is formed may be used.

下來描述本發明的其他實施例。作為參考,與第一實施例相同的其他實施例的組件使用與第一實施例相同的參考元件符號,並將省略其詳細說明。Further embodiments of the invention are described below. For reference, the components of the other embodiments that are the same as the first embodiment use the same reference numerals as the first embodiment, and a detailed description thereof will be omitted.

第6圖係依據本發明的第二實施例的曝照裝置的剖面圖。第7圖係依據本發明的第三實施例的曝照裝置的剖面圖。第8圖係依據本發明的第四實施例的曝照裝置的剖面圖。第9圖係依據本發明的第五實施例的曝照裝置的剖面圖。第10和11圖係依據本發明的第六實施例的曝照裝置的剖面圖。Figure 6 is a cross-sectional view of an exposure apparatus in accordance with a second embodiment of the present invention. Figure 7 is a cross-sectional view of an exposure apparatus in accordance with a third embodiment of the present invention. Figure 8 is a cross-sectional view showing an exposure apparatus according to a fourth embodiment of the present invention. Figure 9 is a cross-sectional view showing an exposure apparatus according to a fifth embodiment of the present invention. 10 and 11 are cross-sectional views of an exposure apparatus according to a sixth embodiment of the present invention.

將參照第6圖描述依據本發明的第二實施例的曝照裝置。An exposure apparatus according to a second embodiment of the present invention will be described with reference to Fig. 6.

依據第二實施例的曝照裝置100與第一實施例不同在於,透鏡單元20包括複數透鏡22、24和26。The exposure apparatus 100 according to the second embodiment is different from the first embodiment in that the lens unit 20 includes a plurality of lenses 22, 24, and 26.

在本發明之實施例所述之曝照裝置100中,透鏡單元20可包括三透鏡22、24和26。第一透鏡22和第二透鏡24可具有不同的折射率,第三透鏡26可為菲涅爾透鏡。這裡,第一透鏡22和第二透鏡24可改變來自光源10照射的光的焦距(focal length)。也就是說,可調整第一透鏡22和第二透鏡24,使得來自光源10之光可廣泛照射育第三透鏡26上。為此,第一透鏡22和第二透鏡24之至少一者,可沿著光軸方向(Z軸方向)移動。作為參考,透鏡22和24之移動,可藉由分開的驅動手段(未顯示)進行。In the exposure apparatus 100 of the embodiment of the present invention, the lens unit 20 may include three lenses 22, 24, and 26. The first lens 22 and the second lens 24 may have different refractive indices, and the third lens 26 may be a Fresnel lens. Here, the first lens 22 and the second lens 24 may change the focal length of the light irradiated from the light source 10. That is, the first lens 22 and the second lens 24 can be adjusted such that light from the light source 10 can be widely irradiated onto the third lens 26. To this end, at least one of the first lens 22 and the second lens 24 is movable in the optical axis direction (Z-axis direction). For reference, the movement of lenses 22 and 24 can be performed by separate driving means (not shown).

如上配置的曝照裝置100可透過第一透鏡22和第二透鏡24而任意改變光源10的焦點位置,從而調整實質照射於待固化目標(即,透鏡成型樹脂200)上的照射區域尺寸。The exposure apparatus 100 configured as above can arbitrarily change the focus position of the light source 10 through the first lens 22 and the second lens 24, thereby adjusting the size of the irradiation area substantially irradiated on the target to be cured (i.e., the lens molding resin 200).

因此,本發明實施例可有效地運用到其中固化的目標的尺寸經常改變的情況。Therefore, the embodiment of the present invention can be effectively applied to the case where the size of the target to be cured frequently changes.

同時,依據本發明之實施例之殼體102可製造有如第6圖所示之ㄈ-形狀。有這樣形狀的殼體102可提供從光源10相對長的光軸至透鏡單元20,從而充分保障第一透鏡22和第二透鏡24的距離的移動。此外,在本發明的實施例,光軸比上述實施例相對較長,因此,來自光源10照射的光可便利地轉換成平行光。Meanwhile, the casing 102 according to the embodiment of the present invention can be manufactured with a ㄈ-shape as shown in FIG. The housing 102 having such a shape can provide a relatively long optical axis from the light source 10 to the lens unit 20, thereby sufficiently securing the movement of the distance between the first lens 22 and the second lens 24. Further, in the embodiment of the present invention, the optical axis is relatively longer than the above embodiment, and therefore, the light irradiated from the light source 10 can be conveniently converted into parallel light.

沒有詳細描述的參考元件符號104和106,係將來自光源10的光反射到透鏡單元20上的反射件。Reference element symbols 104 and 106, which are not described in detail, reflect light from the light source 10 to the reflective member on the lens unit 20.

接下來,將參考第7圖描述本發明的第三實施例的曝照裝置。Next, an exposure apparatus of a third embodiment of the present invention will be described with reference to Fig. 7.

依據第三實施例的曝照裝置100與上述實施例的不同在於,抗反射層46形成於模具40的透鏡成型單元42。The exposure apparatus 100 according to the third embodiment is different from the above embodiment in that the anti-reflection layer 46 is formed in the lens molding unit 42 of the mold 40.

如發明背景中所述,模具40之透鏡成型單元42會將照射透鏡成型樹脂200上的光反射到透鏡成型樹脂200,從而導致透鏡成型樹脂200的固化不均勻。As described in the background of the invention, the lens forming unit 42 of the mold 40 reflects the light on the irradiation lens molding resin 200 to the lens molding resin 200, resulting in uneven curing of the lens molding resin 200.

為了有效地克服該缺陷,抗反射層46形成於在本發明實施例的透鏡成型單元42。由於抗反射層46感應(induces)入射透鏡成型單元42上的光以實質上通過,藉由透鏡成型單元42所造成的光反射可以抑制。作為參考,抗反射層46可經由如塗層、沉積、或類似的方法形成於透鏡成型單元42。In order to effectively overcome this drawback, the anti-reflection layer 46 is formed in the lens molding unit 42 of the embodiment of the present invention. Since the anti-reflection layer 46 induces light incident on the lens forming unit 42 to substantially pass, light reflection by the lens forming unit 42 can be suppressed. For reference, the anti-reflective layer 46 may be formed on the lens forming unit 42 via a method such as coating, deposition, or the like.

同時,本發明之實施例描述,抗反射層46形成在透鏡成型單元42中;然而,視需要,可形成光吸收層代替抗反射層46。作為參考,光吸收層可以在第一實施例所描述的吸光物質製成。Meanwhile, the embodiment of the present invention describes that the anti-reflection layer 46 is formed in the lens molding unit 42; however, a light absorbing layer may be formed instead of the anti-reflection layer 46 as needed. For reference, the light absorbing layer can be made of the light absorbing material described in the first embodiment.

接下來,將參照第8圖描述依據本發明的第四實施例的曝照裝置。Next, an exposure apparatus according to a fourth embodiment of the present invention will be described with reference to FIG.

依據第四實施例的曝照裝置100與上述實施例的曝照裝置100的不同在於進一步包含過濾構件50。The exposure apparatus 100 according to the fourth embodiment is different from the exposure apparatus 100 of the above embodiment in further including the filter member 50.

一般來說,來自光源10照射的光具有寬波段波長。但是,光可阻礙透鏡成型樹脂的均勻固化。Generally, the light from the source 10 is illuminated with a broad band wavelength. However, light can hinder uniform curing of the lens forming resin.

據此,本發明之實施例所述之曝照裝置100可復包括過濾構件50,以便只有來自光源10照射的光的特定的波長(例如紫外線波長)照射於透鏡成型樹脂上。Accordingly, the exposure apparatus 100 according to an embodiment of the present invention may further include the filter member 50 so that only a specific wavelength (for example, an ultraviolet wavelength) of light irradiated from the light source 10 is irradiated onto the lens molding resin.

實施例中,過濾構件50可安裝於光源10和透鏡單元20之間;然而,可安裝於透鏡單元20和散射構件30之間。此外,過濾網構件50可與散射構件30一體成形。例如,過濾構件50可塗覆於散射構件30之表面上。In an embodiment, the filter member 50 can be mounted between the light source 10 and the lens unit 20; however, it can be mounted between the lens unit 20 and the scattering member 30. Further, the filter member 50 may be integrally formed with the scattering member 30. For example, the filter member 50 may be coated on the surface of the scattering member 30.

在上述配置的實施例,可經由過濾構件50的更換,照射所需波段的光,藉此,可根據透鏡成型樹脂之材料,輕易改變光的波長。In the embodiment of the above configuration, the light of the desired wavelength band can be irradiated via the replacement of the filter member 50, whereby the wavelength of the light can be easily changed according to the material of the lens molding resin.

接下來,將參考第9圖描述本發明的第五實施例的曝照裝置。Next, an exposure apparatus of a fifth embodiment of the present invention will be described with reference to Fig. 9.

依據第五實施例的曝照裝置100與上述的實施例之不同在於復包括反射構件60。The exposure apparatus 100 according to the fifth embodiment is different from the above-described embodiment in that the reflection member 60 is repeatedly included.

當模具40由透明材料製成,照射模具40上的光可實質上通過模具40。然而,當光反射到透鏡成型樹脂200,可提高透鏡成型樹脂之固化率。When the mold 40 is made of a transparent material, the light on the illumination mold 40 can pass substantially through the mold 40. However, when light is reflected to the lens molding resin 200, the curing rate of the lens molding resin can be improved.

在這樣考慮,在實施例中,反射構件60可進一步提供於模具40之下。也就是說,在實施例的曝照裝置100中,散射光被反射構件60反射到透鏡成型樹脂200,因此,可從透鏡成型樹脂200的兩表面(在第9圖之頂面和底面)進行固化。In this regard, in an embodiment, the reflective member 60 can be further provided below the mold 40. That is, in the exposure apparatus 100 of the embodiment, the scattered light is reflected by the reflection member 60 to the lens molding resin 200, and therefore, can be performed from both surfaces of the lens molding resin 200 (on the top and bottom surfaces of Fig. 9) Cured.

因此,依據實施例,透鏡成型樹脂200之固化率可改善,可促使透鏡成型樹脂200之均勻固化。Therefore, according to the embodiment, the curing rate of the lens molding resin 200 can be improved, and the uniform curing of the lens molding resin 200 can be promoted.

同時,在第9圖,反射構件60提供於模具40之下;然而,視需要,反射構件60可設置於模具40周圍。在這種情況下,因為散射光被反射至透鏡成型樹脂200的側面,透鏡成型樹脂200之固化率可以進一步改善。Meanwhile, in FIG. 9, the reflection member 60 is provided under the mold 40; however, the reflection member 60 may be disposed around the mold 40 as needed. In this case, since the scattered light is reflected to the side surface of the lens molding resin 200, the curing rate of the lens molding resin 200 can be further improved.

接下來,將參考第10和11圖描述本發明的第六實施例的曝照裝置。Next, an exposure apparatus of a sixth embodiment of the present invention will be described with reference to Figs. 10 and 11.

實施例的曝照裝置100與上述實施例的不同在於散射構件的位置。The exposure apparatus 100 of the embodiment differs from the above embodiment in the position of the scattering member.

如上所述,散射構件可分散(disperse)從光源10之光以抑制或減少透鏡成型樹脂200的不均勻固化;然而,在同一時間,散射構件可能會降低光源10的能量,從而導致在透鏡成型樹脂200的固化率的延遲。As described above, the scattering member can disperse light from the light source 10 to suppress or reduce uneven curing of the lens molding resin 200; however, at the same time, the scattering member may lower the energy of the light source 10, thereby causing lens formation. The retardation of the curing rate of the resin 200.

在這樣考慮,在實施例中,散射構件可設置成盡量靠近透鏡成型樹脂200。In this regard, in the embodiment, the scattering member may be disposed as close as possible to the lens molding resin 200.

例如,如第10圖所示,散射構件可為成型或壓縮透鏡成型樹脂200的上模具41,也可與上模具41一體成形。以此方式,因為位於最接近透鏡成型樹脂200的上模具41可作為散射構件,來自光源10照射的光能量的損失可最小化。For example, as shown in Fig. 10, the scattering member may be an upper mold 41 that molds or compresses the lens molding resin 200, or may be integrally formed with the upper mold 41. In this way, since the upper mold 41 located closest to the lens molding resin 200 can function as a scattering member, the loss of light energy from the light source 10 can be minimized.

此外,如第11圖所示,散射構件可為夾具(jig)70夾持上模具41或透明基板300,或可與夾具70一體成形。在這裡,夾具70可完全覆蓋上模具41和透明基板300之至少之一者的上表面(即其上從光源10之光是入射之表面),或可覆蓋上模具41之上表面和側表面。以這種方式,因為散射構件可形成在夾具70,有利的情況是,上模具41經常根據成型的透鏡的類型,加以更換或取代。Further, as shown in FIG. 11, the scattering member may hold the upper mold 41 or the transparent substrate 300 for a jig 70, or may be integrally formed with the jig 70. Here, the jig 70 may completely cover the upper surface of at least one of the upper mold 41 and the transparent substrate 300 (i.e., the surface on which the light from the light source 10 is incident), or may cover the upper surface and the side surface of the upper mold 41. . In this manner, since the scattering member can be formed on the jig 70, it is advantageous that the upper mold 41 is often replaced or replaced depending on the type of the molded lens.

如上所述,依據本發明之實施例,無論透鏡成型模具的材料和形狀和使用之光源的平行化程度,透鏡成型樹脂可以均勻地固化。As described above, according to the embodiment of the present invention, the lens molding resin can be uniformly cured regardless of the material and shape of the lens forming mold and the degree of parallelization of the light source used.

此外,依據本發明之實施例,從光源之光可廣泛擴散和照射於透鏡成型樹脂上,從而提高透鏡陣列的生產速度。Further, according to an embodiment of the present invention, light from a light source can be widely diffused and irradiated onto the lens molding resin, thereby increasing the production speed of the lens array.

上述實施例係用以例示性說明本發明之原理及其功效,而非用於限制本發明。任何熟習此項技藝之人士均可在不違背本發明之精神及範疇下,對上述實施例進行修改。因此本發明之權利保護範圍,應如後述之申請專利範圍所列。The above embodiments are intended to illustrate the principles of the invention and its effects, and are not intended to limit the invention. Any of the above-described embodiments may be modified by those skilled in the art without departing from the spirit and scope of the invention. Therefore, the scope of protection of the present invention should be as set forth in the appended claims.

10...光源10. . . light source

20...透鏡單元20. . . Lens unit

22、24、26...透鏡22, 24, 26. . . lens

30...散射構件30. . . Scattering member

32...柵形槽32. . . Grating groove

40...模具40. . . Mold

41...上模具41. . . Upper mold

42...透鏡成型單元42. . . Lens forming unit

46...抗反射層46. . . Antireflection layer

50...過濾構件50. . . Filter member

60...反射構件60. . . Reflective member

70...夾具70. . . Fixture

100...曝照裝置100. . . Exposure device

102...殼體102. . . case

104、106...反射件104, 106. . . Reflector

200...透鏡成型樹脂200. . . Lens molding resin

300...透明基板300. . . Transparent substrate

第1圖係依據本發明的第一實施例的曝照裝置的配置圖;1 is a configuration diagram of an exposure apparatus according to a first embodiment of the present invention;

第2圖係第1圖之透鏡單元之形狀之圖;Figure 2 is a diagram showing the shape of the lens unit of Figure 1;

第3圖係第1圖之散射構件之第一例之圖;Figure 3 is a view showing a first example of the scattering member of Figure 1;

第4圖係第1圖之散射構件之第二例之圖;Figure 4 is a view showing a second example of the scattering member of Figure 1;

第5圖係藉由第1圖之曝照裝置描述光傳輸之圖;Figure 5 is a diagram depicting light transmission by the exposure apparatus of Figure 1;

第6圖係依據本發明的第二實施例的曝照裝置的剖面圖;Figure 6 is a cross-sectional view showing an exposure apparatus according to a second embodiment of the present invention;

第7圖係依據本發明的第三實施例的曝照裝置的剖面圖;Figure 7 is a cross-sectional view showing an exposure apparatus according to a third embodiment of the present invention;

第8圖係依據本發明的第四實施例的曝照裝置的剖面圖;Figure 8 is a cross-sectional view showing an exposure apparatus according to a fourth embodiment of the present invention;

第9圖係依據本發明的第五實施例的曝照裝置的剖面圖;Figure 9 is a cross-sectional view showing an exposure apparatus according to a fifth embodiment of the present invention;

第10和11圖係依據本發明的第六實施例的曝照裝置的剖面圖。10 and 11 are cross-sectional views of an exposure apparatus according to a sixth embodiment of the present invention.

10...光源10. . . light source

20...透鏡單元20. . . Lens unit

30...散射構件30. . . Scattering member

40...模具40. . . Mold

42...透鏡成型單元42. . . Lens forming unit

100...曝照裝置100. . . Exposure device

Claims (11)

一種曝照裝置,包括:模具,包含形成於其中之透鏡成型單元;光源,固化透鏡成型樹脂於該模具上;透鏡單元,將來自該光源照射的光轉換成平行光;以及散射構件,散射該平行光。An exposure apparatus comprising: a mold including a lens forming unit formed therein; a light source for curing a lens molding resin on the mold; a lens unit that converts light irradiated from the light source into parallel light; and a scattering member that scatters the Parallel light. 如申請專利範圍第1項所述之曝照裝置,其中,該透鏡單元包含複數具有不同的折射率的透鏡。The exposure apparatus of claim 1, wherein the lens unit comprises a plurality of lenses having different refractive indices. 如申請專利範圍第1項所述之曝照裝置,其中,該透鏡單元包含菲涅爾透鏡。The exposure apparatus of claim 1, wherein the lens unit comprises a Fresnel lens. 如申請專利範圍第1項所述之曝照裝置,其中,該透鏡成型單元塗覆有抗反射層,從而實質上透射來自該光源照射的光。The exposure apparatus of claim 1, wherein the lens forming unit is coated with an anti-reflection layer to substantially transmit light irradiated from the light source. 如申請專利範圍第1項所述之曝照裝置,其中,該散射構件的表面進行粗拋光處理或腐蝕處理,以散射該平行光。The exposure apparatus of claim 1, wherein the surface of the scattering member is subjected to a rough polishing treatment or an etching treatment to scatter the parallel light. 如申請專利範圍第1項所述之曝照裝置,其中,該散射構件包括複數柵形槽,以散射該平行光。The exposure apparatus of claim 1, wherein the scattering member comprises a plurality of grating grooves to scatter the parallel light. 如申請專利範圍第1項所述之曝照裝置,其中,該透鏡單元包括過濾構件。The exposure apparatus of claim 1, wherein the lens unit comprises a filter member. 如申請專利範圍第1項所述之曝照裝置,復包括反射構件,將來自該散射構件散射的該平行光反射至透鏡成型樹脂。The exposure apparatus of claim 1, further comprising a reflecting member that reflects the parallel light scattered from the scattering member to the lens molding resin. 如申請專利範圍第1項所述之曝照裝置,其中,該散射構件與固定該模具的夾盤一體成形。The exposure apparatus of claim 1, wherein the scattering member is integrally formed with a chuck that fixes the mold. 如申請專利範圍第1項所述之曝照裝置,其中,該散射構件與該模具一體成形。The exposure apparatus of claim 1, wherein the scattering member is integrally formed with the mold. 如申請專利範圍第1項所述之曝照裝置,其復包括:殼體,容納該光源和該透鏡單元;以及反射件,將來自該光源的光反射至該透鏡單元。The exposure apparatus of claim 1, further comprising: a housing accommodating the light source and the lens unit; and a reflecting member that reflects light from the light source to the lens unit.
TW100143501A 2011-08-04 2011-11-28 Exposure apparatus TW201308019A (en)

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Publication number Priority date Publication date Assignee Title
US11776840B2 (en) 2019-10-29 2023-10-03 Canon Kabushiki Kaisha Superstrate chuck, method of use, and method of manufacturing an article

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KR100589055B1 (en) * 2004-07-23 2006-06-12 삼성전자주식회사 Exposure method and exposure apparatus for performing the same
KR20080045431A (en) * 2006-11-20 2008-05-23 삼성전자주식회사 Light source unit, method for manufacturing the same and display apparatus having the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11776840B2 (en) 2019-10-29 2023-10-03 Canon Kabushiki Kaisha Superstrate chuck, method of use, and method of manufacturing an article

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