TW201302487A - Printing apparatus - Google Patents

Abstract

This invention provides a printing apparatus having an alignment mechanism for adjusting the relative position between a printing type and a flexible circuit board. The alignment mechanism has an optical system capable of simultaneously aligning the focus with two or more than two different positions. The optical system has first focus to be aligned with a first mark provided on the circuit board and second focus to be aligned with a second mark provided on the printing type. The alignment is performed by obtaining position information about the first and second marks by simultaneously aligning both of the first and second focus with the first and second marks, and then the position alignment of the printing type with the circuit board is carried out based on the position information about the first and second marks detected by the optical system. By this arrangement the relative position of the printing type with respect to the flexible circuit board can be detected with high precision without fixing the flexible circuit board and thereby a highly accurate position alignment is possible.

Description

Printing device

One embodiment of the present invention relates to a printing apparatus for printing ink onto a flexible substrate in a predetermined pattern.

An electric device such as a circuit board, a display device, or an illumination device includes a transistor or an organic EL (electroluminescence) device. A film which constitutes a part of the transistors or organic EL elements can be formed by various methods, and a printing method as one of them has been studied.

The printing method first performs the alignment of the printing method with the object to be printed, and then transfers the ink to the object to be printed by pressing the printing plate on the object to be printed, and solidifies the ink to form a film. Regarding the alignment of the printing plate and the printed matter, the conventional printing device arranges the printing plate and the object to be printed, and arranges the camera above the printing plate and the object to be printed, and performs the printed matter based on the image information of the camera. The alignment of the printing plate (see, for example, Patent Document 1).

(previous technical literature) (Patent Literature)

Patent Document 1: Japanese Laid-Open Patent Publication No. 2010-221548 (Fig. 5)

The transistor or the organic EL element must be formed with fineness and high positional accuracy, and the film constituting a part thereof must also be formed with fineness and high positional accuracy. Therefore, printing must be done with high positional accuracy The version is aligned with the printed matter. In the above-described prior art, in order to detect the position of the printed matter and the printing plate with high accuracy, although the objective lens of the high magnification can be used to obtain image information, since the objective lens magnification is higher, the depth of focus is shallower, so when used When the objective lens of high magnification is used, the printed matter must be brought close to the printing plate. Specifically, it is necessary to bring the object to be printed and the printing plate to a distance of several μm to several tens of μm. However, when a flexible substrate is used as the object to be printed, if the flexible substrate is brought close to the printing plate, the flexible substrate may adhere to the printing plate due to an electrostatic force or the like. Therefore, the position of the flexible substrate and the printing plate cannot be detected as desired, and as a result, there is a problem that alignment with high precision cannot be performed.

In addition, the attachment of the flexible substrate to the printing plate can be prevented by fixing the flexible substrate. At this time, a method of fixing the flexible substrate by vacuum adsorption or the like can be considered. However, when the flexible substrate is fixed, since the flexible substrate is deformed along the vacuum adsorption port, even if the position is detected with high precision, the film cannot be formed in a desired pattern to be flexible. Problems on the substrate.

Accordingly, it is an object of an embodiment of the present invention to provide a printing apparatus capable of detecting a relative position of a printing plate and a flexible substrate with high precision without fixing a flexible substrate, and according to the relative position The alignment is performed with high precision.

An embodiment of the present invention relates to a printing apparatus comprising: a printing plate for transferring ink to a flexible substrate; and an alignment mechanism for adjusting a relative position of the printing plate and the flexible substrate, wherein the alignment mechanism has Simultaneously An optical system in which two or more positions are different from each other, and the optical system is aligned with the flexible substrate in a state in which the printing plate and the flexible substrate are opposed to each other with a predetermined interval therebetween. The first focus of the 1 mark and the second focus set to the second mark of the printing plate are aligned with both the first mark and the second mark by the first focus and the second focus. The position information of the first mark and the second mark is obtained, and the alignment mechanism performs alignment between the printing plate and the flexible substrate based on the position information of the first mark and the second mark obtained by the optical system.

An embodiment of the present invention relates to a printing apparatus in which an optical system simultaneously aligns a focus with both a first mark and a second mark by two focus optical means.

An embodiment of the present invention relates to a printing apparatus in which an optical system simultaneously aligns a focus with both a first mark and a second mark by a double focus optical lens barrel.

Furthermore, an embodiment of the present invention relates to a printing apparatus in which an absolute value of a difference between a first focus distance f1 up to a first focus and a second focus distance f2 up to a second focus is 300 μm. the above.

Furthermore, an embodiment of the present invention relates to a printing apparatus in which a first focus distance f1 up to a first focus of the optical system is variable, and a difference between a maximum value and a minimum value of the first focus distance f1 is 20 μm or more.

An embodiment of the present invention relates to a printing apparatus, wherein the optical system has a degree of decomposition of 2 μm or less.

The present invention can realize a printing apparatus which can detect the relative position of the printing plate and the flexible substrate with high precision without fixing the flexible substrate, and perform alignment with high precision according to the relative position.

A printing apparatus according to an embodiment of the present invention is a printing apparatus that transfers ink to a flexible substrate, and can be applied to a roll-to-roll type printing or a leaf type printing. However, the printing apparatus applied to the leaf type printing will be described below with reference to FIGS. 1 and 2 .

The printing apparatus 1 of the present embodiment shown in FIGS. 1 and 2 includes a printing plate 3 for transferring ink onto the flexible substrate 2, and a substrate holding portion 10, a mounting portion 21, a printing plate holder 31, and an optical system. 32 alignment mechanism.

The printing apparatus 1 includes a substrate holding portion 10 that holds the flexible substrate 2 . The substrate holding portion 10 includes a substrate stage 5 on which the flexible substrate 2 is placed, and an alignment stage 6 that supports the substrate stage 5 so as to be displaceable with respect to a predetermined plane.

A spherical sliding portion 7 is provided at a lower portion of the substrate stage 5. The substrate stage 5 is such that the spherical sliding portion 7 abuts on the alignment stage 6 and is disposed on the alignment stage 6. The substrate stage 5 is slid on the alignment table 6 by the spherical sliding portion 7, and its inclination is adjusted to a predetermined plane. As will be described later, the substrate stage 5 is adjusted such that the flexible substrate 2 placed on the substrate stage 5 is parallel to the printing plate 3. Further, the alignment stage 6 is provided with a fixing means (not shown) for fixing the substrate stage 5, and the substrate stage 5 is fixed by the fixing means. As the fixing means, for example, a vacuum suction device that fixes the spherical sliding portion 7 by vacuum suction can be cited.

The printing apparatus 1 includes a moving means (not shown) for movably holding the substrate holding portion 10, and the substrate holding portion 10 is moved toward, for example, a direction close to the printing plate 3 or from the printing plate 3 by the moving means. Move in the direction.

The printing apparatus 1 is provided with a printing plate holder 31 that holds the peripheral portion of the printing plate 3. The printing plate 3 is placed on the substrate stage 5 while being held by the printing plate holder 31. Since the flexible substrate 2 is placed on the substrate stage 5, the printing plate 3 is disposed opposite to the flexible substrate 2. Further, when the printing plate 3 is aligned with the flexible substrate 2, the printing plate 3 and the flexible substrate 2 are disposed with a predetermined interval therebetween. As described above, in the present embodiment, the relative distance between the printing plate 3 and the substrate holding portion 10 is adjusted by moving the substrate holding portion 10. However, in other embodiments, the printing plate holder 31 can be adjusted by moving the printing plate holder 31. The relative distance between the printing plate 3 and the substrate holding portion 10.

The type of the printing plate 3 is not particularly limited. However, in the state where the printing plate 3 is disposed between the optical system 32 and the flexible substrate 2 as shown in Fig. 1, the printing plate 3 must be a member exhibiting light transmittance. A portion in which at least the second mark 34 to be described later is provided is formed. For the printing plate 3, for example, a rubber plate or a plastic resin plate, a quartz plate, a glass plate, or the like can be used. As the material of the rubber plate, an anthrone rubber represented by polydimethyl siloxane (PDMS) or the like can be cited.

The coating ink for the printing plate 3 may be performed before the printing plate 3 is attached to the printing plate holder 31, or may be performed after the printing plate 3 is attached to the printing plate holder 31. Further, the printing apparatus 1 preferably has an ink supply means having an ink filling function, and the ink is applied to the printing plate 3 attached to the printing plate holder 31 by the ink supply means.

The alignment mechanism including the substrate holding portion 10, the mounting portion 21, the printing plate holder 31, and the optical system 32 adjusts the printing plate 3 and the flexible substrate 2 disposed opposite to the printing plate 3 with a predetermined interval therebetween. Relative position. The alignment mechanism is provided with an optical system 32 that can simultaneously focus on two or more positions different from each other. The optical system 32 includes two focus optical devices that can simultaneously focus on two positions. More specifically, the optical system 32 that can focus on two positions at the same time can be exemplified by a double focus optical lens barrel, a 2-light path different focus optical lens barrel, an all-focus optical device, and a confocal laser. Optical device of the device, etc. From the standpoint of device cost and device area, a dual focus optical lens barrel or a 2-light path different focus optical lens barrel can be used.

Hereinafter, an optical system 32 including a double focus optical lens barrel will be described as an example. Fig. 3 is a view schematically showing the configuration of an optical system 32 including a double focus optical lens barrel 8 and a light receiving device 16. The double focus optical lens barrel 8 includes first and second dichroic mirrors 11a and 11b, first and second relay lenses 12a and 12b, an objective lens 13, a lens 14, and first and second mirrors 15a. 15b.

The light incident on the objective lens 13 from the focus side is different from the first path 17a and the second path 17b when passing through the first beam splitter 11a. The light that is different from the first path 17a is incident on the second beam splitter 11b through the first mirror 15a and the first relay lens 12a. The light that is different from the second path 17b is incident on the second beam splitter 11b through the second relay lens 12b and the second mirror 15b. The light that has entered the second beam splitter 11b through the first path 17a and the second path 17b is merged by the second beam splitter 11b, and is incident on the light receiving lens 14b. Device 16.

The double focus optical lens barrel 8 has a first focus F1 and a second focus F2 by using a relay lens in which the first relay lens 12a and the second relay lens 12b are different from each other. Further, a light valve is provided in each of the first path 17a and the second path 17b, and the focus of the double focus optical lens barrel 8 can be selected as the first by closing one of the first path 17a and the second path 17b. Any of the focus F1 and the second focus F2.

The light receiving device 16 is realized by a camera or the like including a solid-state image sensor such as a CCD (Charge-coupled Device) image sensor. When the double focus optical lens barrel 8 having the first focus F1 and the second focus F2 is used, the light receiving device 16 specifically obtains an image corresponding to an image in which the images located at the first focus F1 and the second focus F2 are enlarged. Like information. The image information obtained by the light receiving device 16 is output on a predetermined screen as needed. In this way, by using the double focus optical lens barrel 8, an image particularly located at the first focus F1 and the second focus F2 is obtained as vivid image information.

The optical system 32 is mounted on the mounting portion 21 in the present embodiment. The printing apparatus 1 includes a moving means for movably holding the mounting portion 21, and the moving portion (not shown) moves the mounting portion 21 and the optical system 32 mounted on the mounting portion 21 to a predetermined position. When the flexible substrate 2 is aligned with the printing plate 3, the optical system 32 is arranged such that the first focus F1 is aligned with the first mark of the flexible substrate 2 and the second focus F2 is aligned with the printing plate 3. The distance of the second mark is placed on the flexible substrate 2 and the printing plate 3. In the embodiment shown in Fig. 1, the flexible substrate 2 The printing plate 3 and the optical system 32 are arranged at predetermined intervals in the order of the flexible substrate 2, the printing plate 3, and the optical system 32. However, in other embodiments, the flexible substrate 2, the printing plate 3, and the optical system 32 can also be arranged in the order of the printing plate 3, the flexible substrate 2, and the optical system 32.

In the printing apparatus 1 shown in Figs. 1 and 2, two optical systems 32 are provided, and the flexible substrate 2 is aligned with the printing plate 3 at two spaced positions. Further, by moving one optical system 32, the alignment of the flexible substrate 2 and the printing plate 3 can be performed at positions separated by two or more.

As shown in FIG. 4(b), the first mark 33 is previously applied to the flexible substrate 2. As shown in Fig. 4(a), the second mark 34 is previously applied to the printing plate 3. The shape and arrangement of the first mark 33 and the second mark 34 are not particularly limited as long as they are shapes and arrangements of the marks when the position of the specific flexible substrate 2 and the printing plate 3 can be used. For example, the first mark 33 and the second mark 34 are in a region where a mark is to be provided, and one mark is provided in a region other than the other mark. Further, although one mark may be provided in all areas other than the other mark, it may be provided in a region other than the other mark and the peripheral portion of the mark. Specifically, as shown in FIG. 4, when a cross is provided as the second mark 34 (see FIG. 4(a)), the first mark 33 is provided with an area other than the cross and the peripheral portion thereof. The shape of the mark is applied (refer to Fig. 4(b)). Fig. 4(c) shows a state in which the first mark 33 and the second mark 34 are superimposed. As shown in Fig. 4(c), in a state in which the first mark 33 and the second mark 34 are overlapped, a blank area is formed to the width of the peripheral portion. For example, alignment This is performed based on the state in which the blank area uniformly covers the entire circumference of the second mark 34. The width of the peripheral portion corresponding to the blank region is set to, for example, 1 μm to 5 μm.

Next, the operation of the printing apparatus 1 at the time of printing will be described.

First, the inclination of the substrate stage 5 on which the flexible substrate 2 is placed is adjusted. That is, the inclination of the substrate stage 5 is adjusted so that the flexible substrate 2 is arranged in parallel with respect to the printing plate 3. First, the dummy flexible substrate 2 is placed on the substrate stage 5 disposed at the origin position. The virtual flexible substrate 2 is not a flexible substrate on which ink is actually printed, but is used to adjust the inclination of the substrate stage 5. When the inclination of the substrate stage 5 is adjusted, vacuum suction is released, and the substrate stage 5 is set to a variable position. In this state, the substrate holding portion 10 is moved toward the printing plate 3, and the printing plate 3 is brought into contact with the flexible substrate 2 with a predetermined applied pressure. As described above, when the printing plate 3 is brought into contact with the flexible substrate 2, the substrate stage 5 is displaced in accordance with the inclination of the printing plate 3, and is adjusted to be in a state of being parallel to the printing plate 3. In this state, the substrate stage 5 is fixed by vacuum suction. Thereafter, the substrate holding portion 10 is moved to the original position.

Further, although any of the substrates may be used for the dummy flexible substrate 2, in order to prevent contamination of the printing plate 3, it is preferable to use a cleaned substrate. Further, although the optimum value of the applied pressure varies depending on the size or weight of the substrate stage 5, it is set to a pressure at which the substrate stage 5 is inclined at least with the inclination of the printing plate 3, for example, an application pressure of 5 N to 50 N is applied. .

Further, in the present embodiment, the inclination of the substrate stage 5 is adjusted by using the printing plate 3 used for actual printing. However, in another embodiment, the printing plate may be a virtual printing plate 3 for tilt adjustment. For example, in In the case where the printing plate 3 cannot withstand the pressure applied when the tilt is adjusted, a thicker printing plate 3 can be used as thicker than the printing plate 3 actually used.

Next, the alignment of the flexible substrate 2 with the printing plate 3 is performed, and before the alignment, the printing plate 3 is first supplied with ink. For example, ink is supplied to the printing plate 3 by the above-described ink supply means. Further, the flexible substrate 2 on which printing is actually performed is placed on the substrate stage 5 in place of the dummy flexible substrate 2. In the flexible substrate 2, the material or the like is appropriately selected depending on the device to which the flexible substrate 2 is applied, and the like, for example, a metal foil substrate or a resin substrate is used. Examples of the material of the resin substrate include polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polycarbonate (PC), polyimine (PI), and polyether. PES, PEI, PPS, wholly aromatic polyamine (alias: aramid, trade name, aramid amide), polyphenylene ether (PPE) , polyarylate (PAR), polybutylene terephthalate (PBT), polyoxymethylene (POM), alias: polyacetal, polyetheretherketone (PEEK), and liquid crystal polymerization (LCP), etc.

Next, the substrate holding portion 10 is moved toward the printing plate 3, and the flexible substrate 2 is brought close to the printing plate 3. The interval between the flexible substrate 2 and the printing plate 3 is set to an absolute value of the difference between the first focus distance f1 from the first focus F1 and the second focus distance f2 from the second focus F2. Further, the distance between the flexible substrate 2 and the printing plate 3 means the distance between the opposite faces of the flexible substrate 2 and the printing plate 3.

Since the interval between the flexible substrate 2 and the printing plate 3 is too narrow, the flexible substrate 2 adheres to the printing plate 3, and therefore the interval is preferably 300 μm or more, and more preferably 500 μm or more. Therefore, it is preferable to use the first focal length An optical system having an absolute value of the difference between f1 and the second focal length f2 of 300 μm or more. Further, the upper limit of the interval between the flexible substrate 2 and the printing plate 3 is not particularly limited, but is, for example, 1 mm depending on the specifications of the optical system to be used.

Next, the optical system 32 is placed at a predetermined position. That is, the optical system 32 is disposed at a position where the first focus F1 is aligned with the first mark 33 and the second focus F2 is aligned with the second mark 34. Next, the positional information of the first mark 33 and the second mark 34 is obtained by simultaneously aligning the focus with both the first mark 33 and the second mark 34. In the present embodiment, the position information of the first mark 33 and the second mark 34 is obtained from the image information detected by the light receiving device 16. Based on the position information, the alignment of the printing plate 3 and the flexible substrate 2 is performed. For example, as shown in FIG. 4(c), at least one of the flexible substrate 2 and the printing plate 3 is moved so that the blank portion between the first mark 33 and the second mark 34 uniformly covers the second mark 34. By. As described above, the blank area is set to, for example, 1 μm to 5 μm, but this is appropriately set by, for example, the fineness of the printed pattern or the degree of resolution of the optical system. In order to perform alignment with high precision, it is preferable to use an optical system 32 having a degree of decomposition of 2 μm or less.

Further, since the flexible substrate 2 is placed on the substrate stage 5 and is not necessarily placed on the substrate stage so as to be attached along the surface of the substrate stage 5, irregularities may be formed on the surface. In addition, for example, when the flexible substrate 2 is placed on a table having a low surface flatness, irregularities may occur on the surface of the flexible substrate 2. Further, the surface of the flexible substrate 2 itself has irregularities. Therefore, even if the optical system 32 is placed at the position where the first focus F1 is aligned with the first mark 33 in accordance with the setting of the printing apparatus, it may occur. The first focus F1 is not in the case of the first mark 33. Even in this case, in order to obtain vivid image information, it is preferable to use the optical system 32 as a deeper depth of focus. The depth of focus of the optical system 32 is preferably as deep as possible, and is preferably 2 μm or more, more preferably 4 μm or more, and most preferably 10 μm or more. Further, when the depth of focus is made deeper, the degree of decomposition is lowered, and a special device is required, so that the device cost becomes high. Therefore, the depth of focus of the optical system 32 is set in consideration of the above points.

Furthermore, in order to obtain more vivid image information, the distance of the first focus F1 is variable, and is preferably adjustable. Even if irregularities are formed on the surface of the flexible substrate 2, after the positions of the printing plate 3, the flexible substrate 2, and the optical system 32 are determined, the distance of the first focus F1 is adjusted so that the focus is on the first mark 33. This can focus on the first mark 33. The adjustable range of the first focus F1, that is, the difference between the maximum value and the minimum value of the first focus distance is preferably 20 μm or more.

Further, in the optical system, it is preferable that the absolute value of the difference between the first focal length f1 and the second focal length f2 is 500 μm or more and 1 mm or less, the focal depth is 4 μm or more, and the first focal length f1 is variable, and the maximum value thereof is The difference between the minimum values is 20 μm or more, and the magnification of the objective lens is 10 times or more.

Further, the means for moving at least one of the flexible substrate 2 and the printing plate 3 based on the positional information of the first mark 33 and the second mark 34 detected by the optical system may be, for example, an FV. -aligner (trade name, first company) system.

When the alignment ends, printing is then performed. The substrate holding portion 10 is moved toward the printing plate 3, and the printing plate 3 and the flexible substrate are caused by a predetermined applied pressure. The plate 2 abuts to transfer the ink. Then, the printing plate 3 is separated from the substrate holding portion 10. Thereby, the ink is printed on the flexible substrate 2 in a predetermined pattern to form a predetermined film.

Further, by repeating the above-described operations, it is possible to laminate, for example, different layers, or to form different layer patterns at different positions.

In this manner, a film constituting at least a part of the organic EL element, the photoelectric conversion element, and the transistor can be patterned by printing ink. A circuit board, a display device, an illumination device, a photoelectric conversion element, and the like can be formed by forming such an organic EL element, a photoelectric conversion element, a transistor, or the like on a flexible substrate.

The printing apparatus of the present embodiment can be applied to any type of printing apparatus as long as it is a printing apparatus that performs printing on a flexible substrate by a printing plate, and can be applied to, for example, a lithographic printing apparatus, a nano imprint apparatus, and Micro contact printing devices, etc.

In the above-described embodiment, the double focus optical lens barrel 8 shown in FIG. 3 which is an example of the optical system 32 has been described. However, the optical system 32 is not limited to the double focus optical lens barrel 8, It is also possible to use a device that can focus on two or more positions at the same time, and for example, a two-way optical isolator optical lens barrel, an all-focus optical device, an optical device using a confocal laser device, or the like can be used.

(industrial availability)

According to the printing apparatus of an embodiment of the present invention, a printing apparatus can be realized which can detect the relative position of the printing plate and the flexible substrate with high precision without fixing the flexible substrate, and according to the relative position position The alignment is performed with high precision.

1‧‧‧Printing device

2‧‧‧Flexible substrate

3‧‧‧Printing

5‧‧‧ substrate table

6‧‧‧Alignment table

7‧‧‧Spherical sliding part

8‧‧‧Double focus optical tube

9‧‧‧Flexible substrate

10‧‧‧Substrate retention department

11a‧‧‧1st beam splitter

11b‧‧‧2nd beam splitter

12a‧‧‧1st relay lens

12b‧‧‧2nd relay lens

13‧‧‧ Objective lens

14‧‧‧ lens

15a‧‧‧1st mirror

15b‧‧‧2nd mirror

16‧‧‧Light receiving device

17a‧‧‧1st path

17b‧‧‧2nd path

21‧‧‧Installation Department

31‧‧‧Printing clips

32‧‧‧Optical system

33‧‧‧1st mark

34‧‧‧2nd mark

F1‧‧‧1st focus

F2‧‧‧2nd focus

F1‧‧‧1st focus distance

F2‧‧‧2nd focus distance

Fig. 1 is a plan view schematically showing a printing apparatus.

Figure 2 is a front view schematically showing the printing apparatus.

Fig. 3 is a view showing the configuration of the optical system 32.

Fig. 4(a) is a view showing a first mark, Fig. 4(b) is a view showing a second mark, and Fig. 4(c) is a view showing a state in which a first mark and a second mark are overlapped. .

1‧‧‧Printing device

2‧‧‧Flexible substrate

3‧‧‧Printing

21‧‧‧Installation Department

31‧‧‧Printing clips

32‧‧‧Optical system

Claims (6)

A printing apparatus comprising: a printing plate for transferring ink to a flexible substrate; and an alignment mechanism for adjusting a relative position of the printing plate and the flexible substrate, wherein the alignment mechanism has a simultaneous alignment mechanism An optical system that is in focus at two or more positions different from each other, wherein the optical system is disposed in the state in which the printing plate and the flexible substrate are disposed to face each other with a predetermined interval therebetween a first focus of the first mark of the flexible substrate and a second focus disposed at the second mark of the printing plate, wherein the first focus and the second focus are simultaneously aligned with the first mark and the first mark And obtaining the position information of the first mark and the second mark, wherein the alignment mechanism performs the printing plate based on the position information of the first mark and the second mark obtained by the optical system. The alignment of the aforementioned flexible substrate. The printing apparatus according to claim 1, wherein the optical system simultaneously aligns the focus with both of the first mark and the second mark by the two focus optical means. The printing apparatus according to claim 1 or 2, wherein the optical system is configured to simultaneously align the focus with both of the first mark and the second mark by the double focus optical lens barrel. The printing device according to any one of the first to third aspects of the invention, wherein the first focus distance f1 up to the first focus and the second focus to the second focus Distance f2 The absolute value of the difference is 300 μm or more. The printing apparatus according to any one of the first to fourth aspect, wherein the first focus distance f1 of the optical system up to the first focus is variable, and the first focus distance f1 is The difference between the maximum value and the minimum value is 20 μm or more. The printing apparatus according to any one of the items 1 to 5, wherein the optical system has a degree of decomposition of 2 μm or less.