TW201249760A - Cutting method of plate glass and cutting device thereof - Google Patents
Cutting method of plate glass and cutting device thereof Download PDFInfo
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201249760 六、發明說明: 【發明所屬之技術領域】 本發明是有關於一種用以藉由沿著板狀玻璃的切割預 定線進行局部加熱及冷卻來切割該板狀玻璃的方法及裴 置。 【先刖技術】 眾所周知’近年來的影像顯示裝置的主流是以液晶顯 示器(Liquid Crystal Display,LCD )、電漿顯示器(Plasma Display Panel ’ PDP )、場發射顯示器(Field Emission Display ’ FED )、有機電致發光顯示器(〇rganic201249760 VI. Description of the Invention: [Technical Field] The present invention relates to a method and apparatus for cutting a sheet glass by local heating and cooling along a cutting line of sheet glass. [First-hand technology] It is well known that the mainstream of image display devices in recent years is liquid crystal display (LCD), plasma display panel (PDP), field emission display (FED), and Electroluminescent display (〇rganic
Light-Emitting Diode ’ OLBD )等為代表的平板顯示器(Flat Panel Display,FPD)。由於該些FPD正推進輕量化,因此 現狀是該些FPD中所使用的玻璃基板日趨薄板化。 另外’有機EL並非如顯示器般藉由薄膜電晶體(Thin Film Transistor,TFT)使微細的三原色明滅,而僅以單色 (例如白色)進行發光且亦用作LCD的背光或屋内照明的 光源等平面光源。而且,有機EL的照明裝置於玻璃基板 具有可撓性時,可使發光面自由地變形,因此就確保充分 的可撓性的觀點而言,該照明裝置_所使用的玻璃基板亦 正推進大幅度的薄板(玻璃膜)化。 切割(或割斷)該些FPD或照明裝置等中所使用的玻 ,基板的方法—般包括:t丨線轉,於玻璃基板的表面或 背面刻設規定深度的劃線;以及斷裂步驟,於執行上述步 驟後以跨越劃線的方式施加f矩,藉此切斷玻璃基板。A flat panel display (FPD) represented by Light-Emitting Diode ’ OLBD. Since these FPDs are being promoted to be lightweight, the current situation is that the glass substrates used in these FPDs are becoming increasingly thin. In addition, the organic EL does not illuminate the fine primary colors by a thin film transistor (TFT), but emits light in a single color (for example, white) and is also used as a backlight for an LCD or a light source for indoor illumination. Plane light source. Further, when the organic EL illumination device has flexibility in the glass substrate, the light-emitting surface can be freely deformed. Therefore, the glass substrate used in the illumination device is also being pushed forward from the viewpoint of ensuring sufficient flexibility. The thickness of the sheet (glass film). The method of cutting (or cutting) the glass, the substrate used in the FPD or the illumination device, etc., generally includes: t-turning, scribe a predetermined depth on the surface or the back surface of the glass substrate; and a breaking step, After the above steps are performed, the f-moment is applied across the scribe line, thereby cutting the glass substrate.
S 4 201249760 作為此種玻璃基板切斷方法的改良例,根據專利文獻 卜專利文獻2,揭示有如下的方法:藉由個先行移動的 雷射光騎與緊接紐的彻冷制冷卻,而使玻璃基板 的表面層產生起gj於熱應力的龜裂來形成劃線,然後藉 由機械式方法以劃線為邊界進行折斷(斷裂)。進而,作為 其特徵性構成,揭示有使具有高導齡的接著劑層或填充 液體位於玻縣板_線形成預定線的正下方區域。 另外’根據專利文獻3 ’揭示有如下的全身割斷方法: 將針對包含脆性材料的工件(例如卿㈣玻璃基板)的 熱應力割斷分離成熱應力的分布、及以應力傳播速度為上 擴大來進行,並且藉由_騎雷射光的加熱與 利用導熱的冷卻的組合來形成溫度分布。 [先前技術文獻] [專利文獻] [專利文獻1]曰本專利特開2008 115〇67號公報 [專利文獻2]日本專利特開2〇〇8 127223號公報 [專利文獻3]日本專利特開2〇〇9_4〇665號公報 W t是,與先前的—般方法烟,專散獻1、專利文 示的朗基板的_方法基本上是於玻璃基板 =面層刻人齡,並以_線為邊界進行所謂的折斷的 存在纖端面產生微小裂痕等而導致其面性狀 ;==且’該等割斷方法需要併用雷射光照射及 冷媒絲線的步驟、以“ 致割斷作業的繁雜賊裝置的複雜,引起u 201249760 成本高等致命的問題。進而,該割斷方法亦存在如下的難 點:若欲連續地割斷被連續地輸送的帶狀的板狀玻璃,則 會被強加極其困難的作業。 另一方面,根據專利文獻3中所揭示的割斷方法,只 要藉由熱應力使初始龜裂擴展來對玻璃基板進行全身切割 (全切)’便可結束割斷作業,因此不需要劃線的形成作 業’可期待使割斷作業迅速化,並且可使割斷端面變成鏡 面或以其為標準的面性狀,故可期待使割斷端面適當化。 但是,於該公報中,對於玻璃基板是以何種形態得到支撐 未進行任何揭示及暗示,欠缺用於適當地進行全身熱應力 割斷的方法的具體性。 叫,於更確貫地使全身熱應力割斷適當化時,玻璃 板的支樓形態成為極其重要的因素,先前,通常如圖1 所不’於定盤2G的上表面載置麵基板g,賊如由箭 z 自其上方進行利用雷射等的局部加熱與利用 區域的冷卻,從而使初始龜裂擴展。再者 者等自先前以來長時間實施的方法, 進订發表於刊物等的行為。 疋此種簡單的方法會引起如下的事離:當對玻 基板g進行了局部加熱時,如圖i 二 因膨脹而朝上方隆起,另-方面,當其後 的冷卻部位的因收縮而凹陷。而:,,,璃基相 玻璃基板g上產生而且’若於該定盤20上 生伴隨冷㈣凹陷部gb,則定盤20成S 4 201249760 As a modified example of such a glass substrate cutting method, according to Patent Document 2, there is disclosed a method in which a laser light riding by a preceding movement and a cold cooling of a new one are used. The surface layer of the glass substrate is cracked by gj in thermal stress to form a scribe line, and then fractured (broken) by a mechanical method with a scribe line as a boundary. Further, as a characteristic configuration thereof, it has been revealed that an adhesive layer or a filling liquid having a high age is located directly under the glass plate-line formation line. Further, 'the patent document 3' discloses a whole body cutting method in which the thermal stress of a workpiece containing a brittle material (for example, a glass substrate) is separated into thermal stress distribution and the stress propagation speed is expanded upward. And the temperature distribution is formed by a combination of heating of the laser light and cooling by heat conduction. [PRIOR ART DOCUMENT] [Patent Document 1] Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. Hei. 2〇〇9_4〇665 Bulletin W t is, with the previous general method of smoke, the special method, the patent application of the Lang substrate _ method is basically on the glass substrate = surface layer engraving age, and _ The line is a boundary for the so-called breaking, and the surface of the fiber is slightly cracked to cause its surface properties; == and 'the cutting method requires the step of using the laser beam and the refrigerant wire in combination, and the "complex thief device for cutting the operation" It is complicated and causes fatal problems such as high cost of 20129760. Further, the cutting method has the following difficulty: if the strip-shaped plate glass that is continuously conveyed is continuously cut, it will be extremely difficult to work. On the other hand, according to the cutting method disclosed in Patent Document 3, the cutting operation can be completed by performing the whole body cutting (full cutting) of the glass substrate by the thermal crack to expand the initial crack, so that the formation of the scribe line is not required. In the operation, it is expected that the cutting operation can be made rapid, and the cut end surface can be made into a mirror surface or a surface property as a standard. Therefore, it is expected that the cut end surface can be made appropriate. However, in this publication, the shape of the glass substrate is used. The support is not disclosed and implied, and the specificity of the method for proper whole body thermal stress cutting is lacking. The shape of the glass slab is extremely important when the whole body thermal stress is cut more properly. The factor is that, in the past, as shown in Fig. 1, the upper surface of the fixed plate 2G is placed on the substrate g, and the thief is subjected to local heating and utilization of the region by the arrow z from above, thereby making the initial Crack expansion. In addition, the method that has been implemented for a long time since the previous time, the behavior published in the publication, etc. 疋 This simple method causes the following things to be caused: when the glass substrate g is locally heated, such as Figure i is bulging upward due to expansion, and on the other hand, when the subsequent cooling portion is recessed due to shrinkage, and, on, the glass-based phase glass substrate g is generated and The fixed disc 20 on the green (iv) cold recesses along gb, the plate 20 into
S 6 201249760 障礙而引起初始龜裂蜿蜒或方向性產生紊亂後擴展等事 態,因此會產生無法沿著割斷預定線準確地割斷玻璃基板 g的問題。而且,因玻璃基板g與定盤2〇進行面接觸或大 致面接觸,故熱被定盤2〇吸收而無法進行充分的局部加 熱’於此種狀態下即便進行冷卻,溫度梯度亦變得不充分, 導致熱效率惡化,因此會引起進一步妨礙沿著割斷預定線 的準確的割斷這一不良情況。此種事態於玻璃基板g的厚 度變薄時變得更顯著。 而且,於全身熱應力割斷中,需要大量的熱量,因此 局部加熱時的定盤等支撐構件與玻璃基板的接觸狀態變得 極其重要,就此種觀點而言,現實情況是尚未採取適當的 對策。於此情況下,上述專利文獻丨、專利文獻2中所揭 不的技術因並非進行全身熱應力割斷的技術,而無需採取 針對局部加熱時的熱的流失的對策,故其玻璃基板的支撐 形態若著眼於此種問題的解決,則反而弊病變大。 即,該些公報中所揭示的割斷方法是使具有高導熱性 的接著劑層4位於玻璃基板的劃線形成預定線的正下方區 域來作為該玻璃基板的支樓形態的方法,因此當照射了用 以於玻璃基板的表面形成劃線的雷射光時,該雷射光的大 量的熱經由接著劑層等而傳導至下方構造物(於該公報中 為其他玻璃基板及支撐其的支撐構件等> 因此,即便對藉 由雷射光所加熱的區域進行冷卻,亦無法獲得充分的溫度 梯度,因此引起用以形成劃線的龜裂擴展所需的應力不足 的問題。 201249760 而且’若欲以此種玻璃基板的支撐形態對該玻璃基板 進行全身切割,則源自藉由雷射光所加熱的區域的大量的 熱不當地自玻璃基板傳導至下方構造物,因此產生如下問 題:熱效率下降’溫度梯度變得更加不充分,難以或無法 進行利用龜裂擴展的全身熱應力割斷。 【發明内容】 鑒於上述情況’本發明將藉由沿著切割預定線進行局 部加熱與冷卻來對玻璃基板等板狀玻璃進行全身切割時, 使板狀玻璃的支樓形態變得適當,並恰當地應對板狀玻璃 的切割所需的應力不足或由加熱冷卻所引起的變形作為技 術性課題。 為了解決上述技術性課題而創造的本發明是一種於藉 由支#構件自背面側所支樓的板狀玻璃的切割預定線上形 成初始龜裂後,藉由因沿著上述切割預定線進行局部加熱 與針對其加熱區域的冷卻而產生的拉伸應力,使上述初= 龜裂自表面貫穿至背面並擴展’從而對該板狀玻璃進行全 身切割的方法,其特徵在於:藉由上述支撐構件自背面侧 經由具有低導熱性的彈性片材來支撐上述板狀玻璃。 根據此種構成,伴隨沿著切割預定線掃描由針對板狀 玻璃的局部加熱所產生的加熱區域、及由對應於該加熱區 域的冷卻所產生的冷卻區域,拉伸應力(熱應力)的產生 區域亦沿著切割預定線移動,藉此初始龜裂 線擴展,從而對板狀玻璃進行全身切割(全切)。於; 割過程中,因藉由支揮構件自背面側經由具有低導熱性的S 6 201249760 Obstruction causes the initial crack or directional disorder to expand and other events, so there is a problem that the glass substrate g cannot be cut accurately along the cut line. Further, since the glass substrate g is in surface contact or substantially in surface contact with the platen 2, heat is absorbed by the platen 2, and sufficient local heating cannot be performed. In this state, even if cooling is performed, the temperature gradient does not become constant. Sufficient, the thermal efficiency is deteriorated, and this causes a problem that further hinders accurate cutting along the cut line. Such a situation becomes more remarkable when the thickness of the glass substrate g becomes thin. Further, in the whole body thermal stress cutting, a large amount of heat is required. Therefore, the contact state between the supporting member such as the fixing plate and the glass substrate during local heating becomes extremely important. From this point of view, the actual situation is that no appropriate countermeasure has been taken. In this case, the technique disclosed in the above-mentioned Patent Document No. 2 and Patent Document 2 is not a technique for performing whole-body thermal stress cutting, and it is not necessary to take measures against the loss of heat during local heating, so the supporting form of the glass substrate is not required. If you look at the solution to this problem, it will be a big problem. That is, the cutting method disclosed in the publications is a method in which the adhesive layer 4 having high thermal conductivity is located directly under the scribe line forming line of the glass substrate as a form of the branch of the glass substrate, and thus, when irradiated When laser light for scribing the surface of the glass substrate is formed, a large amount of heat of the laser light is transmitted to the lower structure via the adhesive layer or the like (in the publication, other glass substrates and support members supporting the same) > Therefore, even if the area heated by the laser light is cooled, a sufficient temperature gradient cannot be obtained, and thus the problem of insufficient stress required for forming the crack propagation of the scribe line is caused. When the glass substrate is integrally cut by the support form of the glass substrate, a large amount of heat originating from the region heated by the laser light is not easily transmitted from the glass substrate to the underlying structure, and thus the following problem occurs: the thermal efficiency is lowered. The gradient becomes more insufficient, and it is difficult or impossible to perform whole body thermal stress cracking using crack propagation. In the case of the present invention, when the sheet glass such as a glass substrate is integrally cut by local heating and cooling along a line to be cut, the shape of the sheet glass of the sheet glass is appropriately adjusted, and the sheet glass is appropriately handled. The stress required for the cutting is insufficient or the deformation caused by the heating and cooling is a technical problem. The present invention created to solve the above technical problem is a sheet glass which is supported by the branch member from the back side. After the initial crack is formed on the cutting line, the initial crack is propagated from the surface to the back surface and expanded by the tensile stress generated by the local heating along the cutting line and the cooling of the heating region. A method of performing whole body cutting of the sheet glass, wherein the sheet glass is supported by the support member from the back side via an elastic sheet having low thermal conductivity. According to this configuration, along the cutting line Scanning the heating zone produced by local heating of the sheet glass and the cooling caused by the cooling corresponding to the heating zone In the region, the region in which the tensile stress (thermal stress) is generated also moves along the line to be cut, whereby the initial crack line is expanded to perform whole body cutting (full cut) on the sheet glass. The baffle member has a low thermal conductivity from the back side
S 8 201249760 彈性片材來支撐板狀玻璃,故藉由彈性片材所具備的低導 熱性,即高隔熱性來抑制由針對板狀玻璃的局部加熱所產 生的大量的熱量傳導至支撐構件。因此,可充分地;^保起 因於局部加熱與冷卻的溫度梯度,可提高熱效率,並進行 板狀玻璃的圓滿且適當的全身切割。換言之,若欲利用巧 部加熱與冷卻對板狀玻璃進行全身切割,則需要大量的^ 量,因此若該熱量的大部分被支撐構件吸收,則不僅會產 生浪費,而且給圓滿的全身切割帶來障礙。因此,於本發 明中,有效利用彈性片材所具有的低導熱性,使伴隨針對 板狀玻璃的局部加熱與冷卻的溫度梯度變得充分,因此能 夠儘可能地確保全身切割所需的拉伸應力(熱應力)。如 此,於熱效率得到改善的狀態下進行板狀玻璃的切割,因 此伴隨與全身切割的協同作用而推進作業的迅速化,於謀 求生產性的提昇等方面變得極其有利。而且,即便因產^ 較大的熱梯度而導致板狀玻璃的切割預定線的周邊產生變 形,其背面側所存在的彈性片材亦追隨該變形而變形,因 此不會給板狀玻璃的支撐帶來障礙,可進行準確地沿著切 割預定線的高精度的全身切割。再者,藉由彈性片材的存 在,而避免板狀玻璃的背面產生損傷等不良情況,因此不 存在引起该板狀玻璃的強度下降的可能性。另外,於全身 切割中,撕裂板狀玻璃的力必需相對於裂痕(龜裂)的前 進方向而作用於其兩側,但於此情況下,若於支樓構件上 利用負壓吸引等而直接吸附保持板狀玻璃,則作用於該板 狀玻璃的撕裂力減少。但是,若如本發明般於板狀玻璃的 201249760 材,則使作用於該板狀玻璃的撕裂力減 高割可適當地利用有效地產生的撕裂力來 支撐下,較佳為上述雜㈣料熱率低於上述 朝白確實地享受關於抑制自上述板狀玻璃 朝向支撐構件的導熱的效果。 中’可將上述彈性片材設定為有機片材 =稀、聚s旨、《胺絲丙料、或者該些材料各自= 2、該純料的高分子合金、或者軸材顺其他合^ :二:的高分子合金,進而,有機片材的形態較佳為發泡 树月曰或不織布等,另外,亦可使用紙漿片等作為有機片材。 若如此’财則材兼具針對藉由熱應力對板狀玻璃 進仃全身切割時的該板狀玻璃的變形的較佳的彈性、及針 對朝向支#構件㈣熱的較佳的低導熱性,因此作為介於 ,狀玻璃與支職狀間㈣材何發揮整體性優異的功 能。 、 上的構成t,亦可如τ方法:上述板狀玻璃 疋破連續地輸送的帶狀的板狀玻璃,並且上述彈性片材是 ^上述帶狀的板狀玻璃-隨連續地輸送的帶狀的彈性片 上述切割預定線沿著上述帶狀的板狀玻璃的輸送方向 延伸,且沿著上述切割預定線連續地對該帶狀的板狀玻璃 進行全身切割。 201249760 若如此,則可進行先前無法實現的沿著被連續地輸送 的帶狀的板狀玻璃的輸送方向的全身切割,且無需如先前 般於矩形的玻璃基板的一邊的長度受限的狀態下進行: 割,因此切割效率大幅度地提昇,並且可謀求切割後的板 狀玻璃的處理或使用形態的多樣化。 而且,當進行此種連續切割時,較佳為上述支撐構件 是以一同連續地輸送上述帶狀的板狀玻璃與上述帶狀的彈 性片材的方式受到驅動。 若如此’則伴隨支撐構件的輸送驅動而一同輸送帶狀 的板狀玻璃與帶狀的彈性片材,因此支稽構件與帶狀的彈 性片材及帶狀的板狀玻璃各自之間不易產生滑動等,而不 存在該板狀玻璃上產生擦傷等的可能性,並且穩定地進行 該板狀玻璃的輸送。藉此,可謀求玻璃品質的優質化,並 且亦可謀求切割作業的高速化及圓滑化。 另外,當進行此種連續切割時,可使上述切割預定線 位於(假設位於)以寬度方向的任意的部位連續地切斷上 述帶狀的板狀玻璃的位置。 若如此,則能夠以寬度方向(與輸送方向正交的方向) 的任意的部位分割帶狀的板狀玻璃,因此可自寬度方向尺 寸形成得較長的帶狀的板狀玻璃,獲得多個具有所期望的 寬度方向尺寸的帶狀的板狀玻璃。藉此,可提高利用成形 裝置的帶狀的板狀玻璃的成形能力,並可迅速且高效地製 作對應於要求的寬度的板狀玻璃。 進而,當進行此種連續切割時,亦可使上述切割預定 11 201249760 線位於連續地切除形成於上述帶狀的板狀玻璃的寬度方向 兩端的耳部的位置。 若如此,則可於維持利用成形裝置的帶狀的板狀玻璃 的自先則以來的圓滿的成形作業後,連續地進行切除作為 該板狀玻璃中的不需要的厚壁部分的耳部的作業,因此可 高效且圓滿地進行耳部的切除作業。 除此以外,當進行如上所述的連續切割時,可將上述 被連續地輸送的帶狀的板狀玻璃設定為經過成形裝置的緩 冷區域冷卻後的帶狀的板狀玻璃。 若如此,則藉由經過熔融玻璃利用成形裝置而成形後 通過緩冷區域冷卻的一連串的連續的成形步驟,於已成為 帶狀的板狀玻璃被連續地輸送的期間内,伴隨局部加熱與 冷卻而連續地對該板狀玻璃進行全身切割。藉此,利用成 形裝置的帶狀的板狀玻璃的成形步驟與針對該板狀玻璃的 全身切割作為一連串的連續的作業而進行,作業效率得到 大幅度改善。再者,作為成形裝置,較佳為可實施下拉法, 特別是溢流下拉法的裝置。但是,並不排除可實施浮式法 等的成形裝置》 進而,當進行如上所述的連續切割時,亦能夠以如下 方式構成:一面沿著上述切割預定線連續地對上述被連續 地輸送的帶狀的板狀玻璃進行全身切割,一面將其成輥狀 地捲繞於捲芯的周圍。 若如此,則如上述般切除了耳部後的帶狀的板狀玻 璃、或寬度方向尺寸以成為所期望的尺寸的方式被分割後S 8 201249760 The elastic sheet supports the sheet glass, so that a large amount of heat generated by local heating for the sheet glass is suppressed to the support member by the low thermal conductivity of the elastic sheet, that is, high heat insulation. . Therefore, it is possible to sufficiently maintain the temperature gradient due to local heating and cooling, improve the thermal efficiency, and perform a satisfactory and proper whole body cut of the sheet glass. In other words, if the whole body is to be cut by the heating and cooling of the plate glass, a large amount of material is required, so if most of the heat is absorbed by the supporting member, not only waste but also a full body cutting tape is provided. Come to the obstacles. Therefore, in the present invention, the low thermal conductivity of the elastic sheet is effectively utilized, and the temperature gradient accompanying local heating and cooling for the sheet glass is sufficiently made, so that the stretching required for the whole body cutting can be ensured as much as possible. Stress (thermal stress). In this way, the slab-shaped glass is cut in a state in which the thermal efficiency is improved. Therefore, it is extremely advantageous to advance the work with the synergy of the whole body cutting, and to improve the productivity. Further, even if the periphery of the line to be cut of the sheet glass is deformed due to a large thermal gradient, the elastic sheet existing on the back side is deformed in accordance with the deformation, so that the sheet glass is not supported. Bringing obstacles, it is possible to perform high-precision whole body cutting accurately along the cutting line. Further, since the presence of the elastic sheet prevents the back surface of the sheet glass from being damaged, there is no possibility that the strength of the sheet glass is lowered. Further, in the whole body cutting, the force of tearing the sheet glass must act on both sides with respect to the direction in which the crack (crack) advances, but in this case, if suction is applied to the branch member, When the plate glass is directly adsorbed and held, the tearing force acting on the plate glass is reduced. However, according to the 201249760 material of the sheet glass as in the present invention, the tearing force acting on the sheet glass can be appropriately supported by the effectively generated tearing force, preferably the above-mentioned impurities. (4) The heat transfer rate is less than the above-described whitening effect, and the effect of suppressing heat conduction from the above-mentioned sheet glass toward the support member is surely enjoyed. In the above, the above elastic sheet can be set as an organic sheet = thin, poly s, "amine propylene material, or each of these materials = 2, the polymer alloy of the pure material, or the shaft material is s... In addition, the form of the organic sheet is preferably a foamed tree or a non-woven fabric, and a pulp sheet or the like may be used as the organic sheet. If so, the material has both a good elasticity for deformation of the sheet glass when the sheet glass is completely cut by thermal stress, and a preferred low thermal conductivity for heat toward the member (four). Therefore, as a function between the glass and the branch (four), it is excellent in overall integrity. The upper composition t may be, for example, a τ method: the above-mentioned plate glass smashes the strip-shaped plate glass which is continuously conveyed, and the elastic sheet is the strip-shaped plate glass which is continuously conveyed The elastic sheet has a line to be cut extending in the conveying direction of the strip-shaped sheet glass, and the strip-shaped sheet glass is continuously cut along the line to be cut. 201249760 If so, it is possible to perform a whole-body cutting along the conveying direction of the continuously conveyed strip-shaped sheet glass, which is not possible before, and it is not necessary to have a length limited to one side of the rectangular glass substrate as before. The cutting is carried out, so that the cutting efficiency is greatly improved, and the treatment or the form of use of the cut sheet glass can be diversified. Further, when such continuous cutting is performed, it is preferable that the support member is driven to continuously convey the strip-shaped plate glass and the strip-shaped elastic sheet together. If this is the case, the strip-shaped sheet glass and the strip-shaped elastic sheet are conveyed together with the conveyance drive of the support member, so that the branch member and the belt-shaped elastic sheet and the strip-shaped sheet glass are less likely to be produced between each other. Sliding or the like does not have the possibility of causing scratches or the like on the sheet glass, and the conveyance of the sheet glass is stably performed. As a result, the quality of the glass can be improved, and the cutting operation can be speeded up and smoothed. Further, when such continuous cutting is performed, the predetermined line to be cut can be placed (presumably located) at a position in the width direction to continuously cut the position of the strip-shaped sheet glass. In this way, the strip-shaped sheet glass can be divided at any position in the width direction (the direction orthogonal to the transport direction), so that a strip-shaped sheet glass having a long dimension from the width direction can be obtained, and a plurality of strips can be obtained. A strip-shaped plate glass having a desired width direction dimension. Thereby, the molding ability of the strip-shaped sheet glass by the molding apparatus can be improved, and the sheet glass corresponding to the required width can be produced quickly and efficiently. Further, when such continuous cutting is performed, the line of the above-mentioned cutting plan 11 201249760 may be continuously cut away at the positions of the ear portions formed at both ends in the width direction of the strip-shaped sheet glass. In this manner, after the successful forming operation of the strip-shaped sheet glass by the molding apparatus is maintained, the ear portion which is an unnecessary thick portion of the sheet glass is continuously cut. The work is performed, so that the ear can be removed efficiently and satisfactorily. In addition, when the continuous cutting as described above is carried out, the strip-shaped sheet glass which is continuously conveyed can be set as a strip-shaped sheet glass which has been cooled by the slow cooling region of the molding apparatus. In this case, a series of continuous molding steps which are formed by the molten glass by the molding apparatus and then cooled by the slow cooling zone are accompanied by local heating and cooling during the continuous conveyance of the strip-shaped sheet glass. The plate glass is continuously cut whole body. Thereby, the forming step of the strip-shaped sheet glass by the molding device and the whole body cutting of the sheet glass are performed as a series of continuous operations, and the work efficiency is greatly improved. Further, as the forming device, a device capable of performing a down-draw method, in particular, an overflow down-draw method is preferable. However, it is not excluded that a molding apparatus that can perform a floating method or the like. Further, when continuous cutting as described above is performed, it is also possible to continuously perform the above-described continuous conveyance along the line to cut. The strip-shaped plate glass is subjected to whole body cutting, and is wound around the winding core in a roll shape. In this case, the strip-shaped plate glass after the ear is cut off or the width direction dimension is divided into a desired size as described above.
S 12 201249760 的各個帶^的板狀麵成輥狀祕繞於捲s的周圍,因此 ^其可精簡且容易地進行帶狀的薄壁板狀玻璃的收納或拥 匕再者針對於寬度方向上經分割的各個帶狀的板狀玻 璃,較佳為使各板狀玻璃的輸送方向不同並將該些分別成 輥狀地捲繞於各個捲芯的周圍。 於以上的構成中,上述彈性片材亦可在上述板狀玻璃 的全身切割的同時受到切割。 若如此則可藉由寬度方向的同一部位將板狀玻璃與 彈性片材成對_。具體而言,此種動作是於藉由例如^ ,雷射照射的局部加熱與_冷_冷卻來對板狀玻璃進 行王身切割時,藉由雷射光束通過經_的板狀玻璃的間 隙來切割(熔切)彈性片材。 於此情況下,較佳為於一面沿著上述切割預定線連續 地對上述被連續地輸送的帶狀的板狀玻璃進行全身切割, 一面將其成輥狀地捲繞於捲芯的㈣時,將在該帶狀的板 狀玻璃的全身切朗同時受到糊的上 疊加於上述帶狀的板狀玻璃上的狀態下,成輥狀== 上述捲芯的周圍。 若如此,則藉由帶狀的彈性片材(例如有機片材)來 保護帶狀的板狀玻璃,可㈣於防止由板狀麵彼此的接 觸所產生的損傷等。而且,於藉由如上述般捲繞而獲得的 反狀玻璃纏繞體中’帶㈣彈性片材亦可發揮作為帶狀的 板狀玻璃的緩衝㈣的制,而成馳包喊 理性或衝擊緩和性等優異者。 < T J地 13 201249760 於以上的構成中,亦可於上述板狀玻璃的表面側配設 按壓構件,該按壓構件與上述支撐構件分別對向地配置, 且在按壓構件與上述支撐構件之間夾持上述板狀玻璃。 若如此’則不僅於板狀玻璃處於平放姿勢的情況下, 而且於板狀玻璃處於縱向姿勢的情況下,亦可在藉由支樓 構件與按壓構件夾持並保持該板狀玻璃的狀態下進行伴隨 局部加熱及冷卻的全身切割,從而可不論板狀玻璃的姿勢 而進行適當的切割。再者,於此情況下,可將按壓構件設 疋為貫質上與支稽·構件相同的構件及相同的構造,另外, 較佳為亦使具有低導熱性的彈性片材位於按壓構件與板狀 玻璃之間。 於以上的構成中,上述板狀玻璃的厚度若為2〇〇 μηι 以下,則較合適。 即,若為厚度為200 μιη以下的薄壁的板狀玻璃(玻 j膜)’則於藉由較弱的按壓力使例如輪式切割機旋轉來刻 設劃線時,以不使該板狀玻璃粉碎的方式進行刻設較困 難另外,¥上述輪式切割機的按壓力過強時,不僅容易 產生折斷所需的垂直裂痕,而且容易產生成為切割端面的 強度下降的原因的水平方向的微裂痕。進而,當將厚度為 200卿以下的玻璃膜捲繞成輥狀,並沿著於長度方向上延 伸,切割預定線進行折斷時,必需長距離地形成劃線,而 不付不使作業繁雜化或困難化。如此,欲在厚度為綱哗 的玻璃膜上刻設劃線來進行折斷時的問題可藉由上述 本案發明的方法而-下子解決,其結果,作為此種薄壁的 201249760 ,狀玻璃可獲得抗彎強度高且高品質的板狀玻璃。另外, 虽將厚度為200 μιη以下等的玻璃膜作為對象時,藉由該 玻璃膜的3面側存在彈性#材,使得玻璃膜不會因支樓構 件的支撐©上的制或摩擦衫到約束,因此玻璃膜可藉 由局部加熱而最大限度地膨脹,並藉由其後的冷卻而最大 限度地收縮。而且’該膨脹無_差成相於使初始龜 裂擴展來進行全身_的拉伸應力的,因此可有效利 用由極其高效的加熱及冷卻難生的最大限度的拉伸應力 來切割玻璃膜。 於以上的構成中,較佳為上述局部加熱是藉由二氧化 碳雷射來進行。 如此,若使用二氧化碳雷射作為針對板狀玻璃的切割 預定線的局部加熱機構’舰璃(_是紐玻璃)可高 效地吸收雷射的能量,因此可於穩定狀態下簡單地進行局 部加熱,且成本亦變得低廉。 若使用以上的方法,則可獲得至少一邊被切割且厚度 為200 μιη以下的板狀玻璃。 又 該板狀玻璃(玻璃膜)因其切割面的抗彎強度高,故 可承受由利用較小的曲率半徑的彎曲等所產生的較強的拉 伸應力,可於比先前更廣的範圍内使用,並且成為處理性 優異者。 另外,若使用以上的方法,則可獲得至少一邊被切割 且切割面的抗彎強度為200 MPa以上,並且厚度為μιη 以下的板狀玻璃。 15 201249760 ί 該板狀玻璃(玻璃膜)因切割面的抗蠻強度為200 MPa 以上,故可確實地承受由利用更小的曲率半徑的彎曲等所 產生的更強的拉伸應力,並且抗彎強度以2〇〇 MPa以上這 一較高值而變得明確’藉此能夠以適當的形態使該板狀玻 璃的處理具體化。 進而,若使用以上的方法,則可獲得成輥狀地捲繞於 捲芯的周圍而成的板狀玻璃纏繞體。 根據該板狀玻璃纏繞體,使收納或處理容易化,並且 輸送效率亦提昇。再者,一面執行自一個板狀玻璃纏繞體 抽出帶狀的板狀玻璃,並將其成輥狀地捲繞於其他捲芯的 周圍的方法(連續捲繞)’ 一面沿著於長度方向上延伸的切 割預定線進行全身切割時的製程可圓滿且容易地進行。 另外,亦可於藉由以上的方法所獲得的板狀玻璃的切 割面及表背面的至少一面形成有機層。 即,當於所獲得的板狀玻璃的切割面或表面或者背面 形成有機層時,其切割面或表背面的強度得到提高,因此 於例如厚度為200 μιη以下的板狀玻璃(玻璃膜)中,對 撓曲可確保充分的強度,並可有效地活用薄壁的板狀玻璃 所具有的可撓性。此處,上述「有機層」亦包括經由接著 層或黏著層而黏接的有機樹脂膜等。 為了解決上述技術性課題而創造的本發明的裝置是一 種板狀玻璃的切割裝置,其以如下方式所構成:^在 支樓構件自背面側所支撐的板狀玻璃的切割預定線上形 初始龜裂後,藉由因沿著上述_預定線進行局部加熱與 201249760 ^十對其加熱區域的冷卻而產生的應力,使上述初始龜裂自 面貫穿至背面並擴展,從而對該板狀玻璃進行 =,其特徵在於:其以藉由上述支撐構件自f面側經由且 有低導熱性的彈性片材來支撐上述板狀玻璃的方式構成: 包含關於具備該構成的裝置的作用效果的說明事項 質上與針對構成要素實質上與該裝置相_上述本發明的 方法所說明的事項相同。 .In S 12 201249760, the plate-like surface of each of the strips is wound around the roll s, so that the strip-shaped thin-walled glass can be easily and easily accommodated in the strip shape. Each of the strip-shaped plate-shaped glass which has been divided is preferably such that the conveying directions of the respective plate-shaped glass are different, and the respective sheets are wound around the respective winding cores in a roll shape. In the above configuration, the elastic sheet may be cut while being cut by the whole body of the sheet glass. If so, the sheet glass can be paired with the elastic sheet by the same portion in the width direction. Specifically, such an action is performed by, for example, local heating and _cold cooling of the laser irradiation, when the plate glass is cut by the body, and the laser beam passes through the gap of the plate glass through the laser beam. To cut (melt) the elastic sheet. In this case, it is preferable that the strip-shaped sheet glass which is continuously conveyed is continuously cut along the line to be cut, and is wound in a roll shape on the winding core (four). In the state where the strip-shaped plate glass is completely covered and the paste is superimposed on the strip-shaped plate glass, it is formed into a roll shape == around the winding core. In this case, the strip-shaped sheet glass is protected by a strip-shaped elastic sheet (for example, an organic sheet), and (4) damage or the like caused by contact between the plate-like surfaces can be prevented. Further, in the reverse glass-wound body obtained by winding as described above, the 'belt (four) elastic sheet can also be used as a buffer (four) for the strip-shaped plate glass, and it is possible to achieve a rational or shock mitigation. Sexual excellence. < TJ 地13 201249760 In the above configuration, a pressing member may be disposed on a surface side of the sheet glass, and the pressing member and the supporting member may be disposed to face each other, and between the pressing member and the supporting member The above plate glass is clamped. If this is the case, the plate glass is placed in a flat position, and in the case where the plate glass is in the vertical posture, the plate glass can be held and held by the branch member and the pressing member. The whole body cutting with local heating and cooling is performed, and appropriate cutting can be performed regardless of the posture of the plate glass. Further, in this case, the pressing member may be provided as the same member and the same structure as the member of the member, and it is preferable that the elastic sheet having low thermal conductivity is located at the pressing member and Between the plate glass. In the above configuration, the thickness of the sheet glass is preferably 2 〇〇 μηι or less. In other words, if the thickness is 200 μm or less, the thin-walled plate glass (glass j-film) is used to scribe the scribe line by rotating the wheel cutter by a weak pressing force, so that the plate is not made. It is difficult to engrave the glass pulverization method. When the pressing force of the above-described wheel cutter is too strong, not only the vertical cracks required for the breakage are likely to occur, but also the horizontal direction which causes the strength of the cut end face to be lowered is likely to occur. Micro cracks. Further, when a glass film having a thickness of 200 sec or less is wound into a roll shape and stretched in the longitudinal direction, and the cutting line is broken, it is necessary to form a scribe line over a long distance without paying for complicated work. Or difficult. Thus, the problem that the scribe line is to be broken on the glass film having the thickness of the thickness can be solved by the method of the present invention described above, and as a result, as the thin-walled 201249760, the glass can be obtained. High-quality plate glass with high bending strength. In addition, when a glass film having a thickness of 200 μm or less is used as the object, the elastic material is present on the three sides of the glass film, so that the glass film is not supported by the support member of the support member or the friction shirt. Constrained, the glass film can be maximally expanded by local heating and contracted to the maximum by subsequent cooling. Further, the expansion does not cause a difference in the initial crack to carry out the tensile stress of the whole body, so that the glass film can be cut by the maximum tensile stress which is extremely difficult to heat and cool. In the above configuration, it is preferred that the local heating is performed by a carbon dioxide laser. In this way, if a carbon dioxide laser is used as the local heating mechanism for the cutting line of the sheet glass, the glass (_ is a neon glass) can efficiently absorb the energy of the laser, so that local heating can be easily performed in a stable state. And the cost has also become cheap. When the above method is used, a plate glass having at least one side cut and having a thickness of 200 μm or less can be obtained. Further, since the plate-shaped glass (glass film) has a high bending strength of the cut surface, it can withstand a strong tensile stress caused by bending or the like with a small radius of curvature, and can be wider than before. It is used internally and is excellent in handling property. Further, when the above method is used, it is possible to obtain a sheet glass having a bending strength of at least one side and having a bending strength of 200 MPa or more and a thickness of μηη or less. 15 201249760 ί The plate glass (glass film) has a tensile strength of 200 MPa or more due to the cutting surface, so it can withstand stronger tensile stress caused by bending with a smaller radius of curvature, and is resistant. The bending strength is made clear by a higher value of 2 〇〇 MPa or more. Thereby, the treatment of the sheet glass can be embodied in an appropriate form. Further, according to the above method, a plate-shaped glass wound body obtained by winding around the core of the core in a roll shape can be obtained. According to the plate-shaped glass wound body, the storage or handling is facilitated, and the conveying efficiency is also improved. In addition, a method of extracting a strip-shaped sheet glass from one sheet-like glass winding body and winding it around the other cores in a roll shape (continuous winding) is performed along the longitudinal direction The process of performing the whole body cutting of the extended cutting line can be performed satisfactorily and easily. Further, an organic layer may be formed on at least one of the cut surface and the front and back surfaces of the sheet glass obtained by the above method. That is, when an organic layer is formed on the cut surface or the surface or the back surface of the obtained sheet glass, the strength of the cut surface or the front and back surfaces is improved, and thus, for example, in a sheet glass (glass film) having a thickness of 200 μm or less The deflection ensures sufficient strength and can effectively utilize the flexibility of the thin-walled glass. Here, the "organic layer" also includes an organic resin film or the like which is bonded via an adhesive layer or an adhesive layer. The apparatus of the present invention created to solve the above-described technical problems is a cutting device for a sheet glass, which is constructed in such a manner that an initial turtle is formed on a cutting line of a sheet glass supported by a side member from the back side. After the cracking, the initial crack is penetrated from the surface to the back surface and expanded by the local heating according to the above-mentioned predetermined line and the cooling of the heating region of 201249760 ^10, thereby performing the sheet glass It is characterized in that it is configured to support the sheet glass by an elastic sheet having a low thermal conductivity from the f-side of the support member, and includes an explanation of the operation and effect of the device having the configuration. The substance and the constituent elements are substantially the same as those described in the above-described method of the present invention. .
[發明的效果] 如上所述’根據本發明,因藉由支樓構件自背面側經 由,、有低導熱性的彈性片材來支樓板狀玻璃,故藉由彈性 片材所具備的低導熱性,即南隔熱性來抑制由 璃的局部加熱所產生的大量的熱量料至支撐構件,藉此 可充分地確保起因於局部加熱與冷卻的溫度梯度,可提高 熱效率,並進行板狀玻璃的圓滿且適當的全身切割。而且, 即便因產生較大的熱梯度而導致板狀玻璃的切割預定線的 周邊產生變形’其背面側所存在的彈性#材亦追隨該變形 而變升々,因此不會給板狀玻璃的支撐帶來障礙,可進行準 破地沿著切割預定線的高精度的全身切割。 【實施方式】 以下,參照隨附圖式對本發明的實施形態進行說明。 再者,於以下的實施形態中,將;PPD或有機EL照明裝置 或者太陽電池中所使用的厚度為200 μιη以下的板狀玻 璃,即玻璃膜作為對象。 圖1是表示形成本發明的基本構造的第i實施形態的 201249760 板狀玻璃的切割裝置及其切割方法的實施狀況的概略立體 圖。如,圖所示,該切割裝置!包括:支擇構件2,包含 由金屬專剛性較咼的材料形成的定盤或平板等;彈性片材 E,鋪設於該支標構件2的支樓面以上並具有低導熱性(或 者隔熱性);局部加熱機構3,自表面側對裁置於 材E上的板狀玻璃G照射雷射光束L來實施局部二^ 射=_部加熱機構3所加熱的 撐二2(支 聚而u 、聚S1、聚醯胺或 、或者該些材料各自的共聚物、該些材料的高分 子°金、或者該些材料與其他合成高分子的高分子合金。 :且再E的形態包含發泡樹脂或不織 :。再者’於該實施形射,使用二氧化 機3構但他可進二 =作為冷媒喷射者’但該冷媒亦可心 、料㈣與紐的= 於m璃體的流體的f合物心 严2與Ϊ性片材E及板:二i 關於利。而且’ 201249760 並自板狀玻璃G的一端部側起於切割預定 、:害= 此情況下’在板狀玻璃G的-端部的 疋f 5上,藉由圖外的龜裂形成機構(裂痕賦予機 構)而形成有初始龜裂6a,因此藉由上述加熱區域h與冷 卻區域c的掃描時所產生的應力(熱應力)而使初始龜^ 以擴展,藉此於切割預定線5上,自表面貫穿至背面的切 割面6-面擴展—面形成。與此同時,亦藉由局部加熱機 構3的雷射照射沿著切割預定線5切割(熔切)彈性片材 E 〇 於此情況下,板狀玻璃G的初始龜裂6a擴展,於自 表面貫穿至背面的切割面6在切割預定線5上一面擴展一 面形成的過程中,撕裂板狀玻璃G的力相對於裂痕(龜裂) 的前進方向而作用於其兩侧(垂直方向),因此如該圖中誇 張地表示般,形成板狀玻璃G的切割預定線5上的一端部 側(初始龜裂6a侧)擴開的間隙即,若假定於支撐構 件2上利用負壓吸引等而直接吸附保持板狀玻璃g,則作 用於板狀玻璃G的撕裂力減少而難以形成如上所述的間隙 Κ,但若板狀玻璃G的背面側存在彈性片材Ε,則使祚用 於板狀玻璃G的撕裂力減少的主要原因消失,可容易地形 成如上所述的間隙Κ。因此,板狀玻璃G的初始龜裂如 的擴展甚至切割面6的擴展迅速且圓滿地進行。再表,弹 性片材E亦隨著板狀玻璃G而以相同的形態被撕裂。 於如上所述的形態中,與沿著切割預定線5對板狀破 璃G進行全身切割(全身熱應力割斷)來將其分割的同時’ 19 201249760 2著切_定線5對片材E進行_來 再者,於該實施形態中,支撐構件 3^冷卻機構4被固枝持,但亦可構成為^“ = 固疋保持且局部加熱機構3及冷卻機構4移動。 _於如上所述的切割過程中,藉由支擇構件2自背 經由具有低導紐的彈性片材E來支撐板狀朗g,因此 ,板狀玻璃G的切割财線5進行局部加熱時的大量的執 置因彈性>ί#Ε所具有的低導熱性即高隔熱性_以傳^ 至支禮構件2。尤其’於該實施形態中,彈性片材ε 熱率低於支_件2的導鮮,因此自板狀朗G朝向支 撐構件2的熱的吸收被較佳地抑制。因此,可充分地確保 起因於局部加減冷卻的溫度梯度,可提高触率,並圓 滿且適當地對板狀玻璃G進行全身切割。附帶地說,因有 效利用彈性片材E所具有的低導熱性,並使伴隨針對板狀 玻璃G的局部加熱與冷卻的溫度梯度變得充分,故能夠儘 可能地抑制板狀玻璃G的全身切割所需的應力(熱應力) 的不足。如此,於熱效率得到改善的狀態下進行板狀玻螭 G的切割,因此伴隨與全身切割的協同作用而推進作業的 迅速化’於謀求生產性的提昇等方面變得極其有利。 而且,當因產生較大的熱梯度而導致板狀玻璃G的切 割預定線5附近產生了變形時,尤其當產生了凹陷變形 時,因其背面側所存在的彈性片材E追隨該變形而變形, 故不會給板狀玻璃G的支撐帶來障礙,可進行準確地沿著 切割預定線5的高精度的全身切割。進而,藉由彈性片材[Effects of the Invention] As described above, according to the present invention, since the sheet-like glass is supported by the elastic sheet having low thermal conductivity through the support member from the back side, the low heat conduction by the elastic sheet is provided. Sex, that is, south heat insulation to suppress a large amount of heat generated by local heating of the glass to the support member, thereby sufficiently ensuring a temperature gradient due to local heating and cooling, improving thermal efficiency, and performing sheet glass A perfect and proper whole body cut. Further, even if a large thermal gradient is generated, the periphery of the line to be cut of the sheet glass is deformed, and the elastic material present on the back side thereof is increased in accordance with the deformation, so that the sheet glass is not given. The support brings obstacles, and high-precision whole body cutting along the cutting line can be performed. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. Furthermore, in the following embodiments, a PPD, an organic EL illumination device, or a plate glass having a thickness of 200 μm or less, which is used in a solar cell, is a glass film. Fig. 1 is a schematic perspective view showing an implementation state of a cutting device of a 201249760 sheet glass forming an i-th embodiment of the basic structure of the present invention and a cutting method therefor. As shown in the figure, the cutting device! The invention comprises: a supporting member 2, comprising a fixing plate or a flat plate formed of a material with a relatively rigid metal material; the elastic sheet E is laid on the supporting floor surface of the supporting member 2 and has low thermal conductivity (or heat insulation) The local heating mechanism 3 illuminates the laser beam L from the sheet glass G cut on the material E from the surface side to perform the partial heating of the local heating mechanism 3 (the accumulation of u, poly S1, polyamine or a copolymer of each of these materials, a polymer of these materials, or a polymer alloy of these materials with other synthetic polymers. Bubble resin or non-woven: In addition, 'the formation of the shape, using the oxidation machine 3 structure, but he can enter two = as a refrigerant sprayer' but the refrigerant can also be heart, material (four) and New Zealand = in the glass The fluid composition of the fluid is 2 and the sturdy sheet E and the plate: 2i about the profit. And '201249760 and from the one end side of the sheet glass G from the cutting schedule,: harmful = in this case 'in the plate shape The 疋f 5 at the end of the glass G is formed by a crack forming mechanism (cracking mechanism) outside the drawing Since the crack 6a is formed, the initial turtle is expanded by the stress (thermal stress) generated during the scanning of the heating region h and the cooling region c, thereby extending from the surface to the back surface on the planned cutting line 5. The face-to-face extension-face is formed. At the same time, the elastic sheet E is cut (melted) along the line 5 to be cut by the laser irradiation of the local heating mechanism 3, in which case the sheet glass G The initial crack 6a is expanded, and the force of the sheet glass G is torn relative to the direction in which the crack (crack) advances during the formation of the cut surface 6 penetrating from the surface to the back surface on the one side of the cut line 5 . The two sides (vertical direction) are formed on the both sides (the initial crack 6a side) on the planned cutting line 5 of the sheet glass G, as is shown in the figure. When the sheet glass g is directly adsorbed and held by the negative pressure suction or the like on the support member 2, the tearing force acting on the sheet glass G is reduced, and it is difficult to form the gap 如上 as described above, but the back side of the sheet glass G is formed. If there is an elastic sheet, it will be used. The main cause of the reduction in the tearing force of the sheet glass G disappears, and the gap 如上 as described above can be easily formed. Therefore, the initial crack of the sheet glass G is expanded, for example, even if the expansion of the cutting surface 6 is performed rapidly and satisfactorily. Further, the elastic sheet E is also torn in the same form along with the sheet glass G. In the above-described form, the whole body is cut with the plate-shaped glass G along the line to cut 5 (systemic heat) Stress cut) to divide it while '19 201249760 2 cutting _ alignment 5 to sheet E _ again, in this embodiment, the support member 3 ^ cooling mechanism 4 is fixed, but also The structure is ^" = solid hold and the local heating mechanism 3 and the cooling mechanism 4 are moved. - In the cutting process as described above, the support member 2 supports the plate from the back via the elastic sheet E having a low guide Since the shape of the cutting glass 5 of the sheet glass G is locally heated, a large amount of the setting is due to the elasticity of the lower heat conductivity, that is, the high heat insulating property is transmitted to the support member. 2. In particular, in this embodiment, the elastic sheet ε heat rate is lower than that of the branch member 2, and therefore heat absorption from the sheet-like ridge G toward the support member 2 is preferably suppressed. Therefore, the temperature gradient due to local addition and subtraction of cooling can be sufficiently ensured, the contact rate can be improved, and the plate glass G can be completely and completely cut by the whole body. Incidentally, since the low thermal conductivity of the elastic sheet E is effectively utilized and the temperature gradient accompanying local heating and cooling of the sheet glass G is sufficient, the entire body of the sheet glass G can be suppressed as much as possible. Deficiencies in the stress (thermal stress) required for cutting. In this way, the slab-shaped glass stalk G is cut in a state in which the thermal efficiency is improved. Therefore, the rapid progress of the work is promoted by the synergy with the whole body dicing, which is extremely advantageous in terms of improving productivity. Further, when deformation occurs in the vicinity of the line to cut 5 of the sheet glass G due to generation of a large thermal gradient, especially when the deformation of the depression occurs, the elastic sheet E existing on the back side thereof follows the deformation. Since it is deformed, it does not cause an obstacle to the support of the sheet glass G, and it is possible to perform high-precision whole body cutting accurately along the line 5 to be cut. Further, by elastic sheet
S 20 201249760 E的存在,而避免板狀玻璃G的背面產生損傷等不良情 況,因此可有效地阻止板狀玻璃G的強度下降。 除此以外’若考慮將厚度為200 μιη以下的薄壁的板 狀玻璃G作為對象,則該板狀玻璃G的切割預定線5附近 的背面側不會因支撐構件2的支撐面2a上的吸附或摩擦而 受到約束,伴隨於此,板狀玻璃G可藉由局部加熱而最大 限度地膨脹,並藉由其後的冷卻而最大限度地收縮。而且, 該膨脹與收縮的差成為用於使初始龜裂6a擴展來進行全 身切割的拉伸應力的主要原因,因此可有效利用能夠藉由 極其南效的加熱及冷卻而產生的最大限度的拉伸應力來判 斷板狀玻璃G。 ° 再者,根據該圖,初始龜裂6a形成於板狀玻璃G的 表面的切割預定線5上的一端部,但該初始龜裂6a亦可自 板狀玻璃G的表面一端部起橫跨端面而形成。 另外,於該實施形態中,以將彈性片材E與板狀玻璃 G —同切割的方式構成,但亦可僅對板狀玻璃G進行全身 切割而不切割彈性片材E。 圖2是表示本發明的第2實施形態的板狀玻璃的切判 裝置及其切割方法的實施狀況的要部立體圖。如該圖& 示,於該第2實施形態的切割裝置丨巾,藉由輸送^的 搬送帶(亦可為滾輪輸送機的多個搬送輥)8而構成支 構件,且該搬送帶8朝向箭頭a方向被驅動,其中箭頭还 方向用以沿著切寵定線5的方向上使搬送帶8經由帶狀 的彈性片材E輸送帶狀的板狀玻璃因此,該搬送帶8 21 201249760The presence of S 20 201249760 E prevents the back surface of the sheet glass G from being damaged or the like, so that the strength of the sheet glass G can be effectively prevented from being lowered. In addition, when the thin-walled sheet glass G having a thickness of 200 μm or less is considered, the back side of the vicinity of the line to cut 5 of the sheet glass G is not caused by the support surface 2a of the support member 2. Confined by adsorption or friction, the sheet glass G can be maximally expanded by local heating and contracted to the maximum by subsequent cooling. Further, the difference between the expansion and the contraction is a factor of the tensile stress for expanding the initial crack 6a to perform the whole body cutting, so that the maximum pulling force which can be produced by the extremely south-effect heating and cooling can be effectively utilized. The stress is applied to judge the sheet glass G. Further, according to the figure, the initial crack 6a is formed at one end portion of the surface of the sheet glass G on the cut line 5, but the initial crack 6a may also span from one end of the surface of the sheet glass G. Formed by the end faces. Further, in this embodiment, the elastic sheet E and the sheet glass G are cut together, but only the sheet glass G may be subjected to whole body cutting without cutting the elastic sheet E. Fig. 2 is a perspective view of an essential part showing an implementation state of a cutting device for a sheet glass according to a second embodiment of the present invention and a cutting method therefor. As shown in the figure, the cutting device wipe of the second embodiment is constituted by a conveyance belt (a plurality of conveyance rollers of the roller conveyor) 8 to constitute a support member, and the conveyance belt 8 is provided. It is driven in the direction of the arrow a, wherein the arrow is also oriented to convey the belt 8 through the strip-shaped elastic sheet E in the direction of the cut line 5, so that the belt 8 21 201249760
的外周面被設定為經由帶狀的彈性片材E來支撐帶狀的板 狀玻璃G的支樓面8a。而且,該切難置丨於·的板狀 玻璃G的切割預&線5上具備藉由雷射光束l而實施局部 加熱的局部加熱機構3、以及喷射供給冷卻水w的冷卻機 構4。根據此種構成,藉由輸送機7的搬送帶8輸送疊加 於帶狀的彈性片材E上的帶狀的板狀玻璃G ’局部加熱機 構3的加熱區域η先於冷卻機構4的冷卻區域〇在帶狀的 板狀玻璃G的切割預定線5 ±自—端部侧起進行掃描。藉 此’形成於帶狀的板狀玻璃G的—端部的初始龜裂如擴 展’於切割預定線5上形成自表面貫穿至背面的切割面6, 伴隨於此’連續地進行全身切割(全身熱應力割斷)。再者, 與此同時亦切割(炫切)帶狀的彈性>}材E,而成為帶狀 的板狀玻璃G與帶狀的彈性片材E被成對_的狀態。其 ,構成及作股果或補紐的制事項與上述第丨實施形 態相同’因此於® 2巾,對相同的構成要素標註相同的符 號’並省略其說明。 圖3是表示本發明的第3實施形態的板狀玻璃的切割 裝置及其切财法的實施狀況料部立體®。如該圖所 不’該第3實施形態的切縣置〗是切除位於帶狀的板狀 玻璃G的寬度方向兩端的相雜 置,於,耳部Gx的略微寬度方向中央側位丄= 切割預疋線5。而且’於自触蝴預定線5的各個至朝 兩侧僅隔離規定尺寸的部位為止的區域中,配置有自背面 側支樓並輸送帶狀的雑料E絲㈣玻璃G的一The outer peripheral surface is set to support the branch floor surface 8a of the strip-shaped sheet glass G via the strip-shaped elastic sheet E. Further, the cutting pre-amplifier line 5 of the sheet glass G which is difficult to be placed is provided with a local heating mechanism 3 for performing local heating by the laser beam l and a cooling mechanism 4 for supplying the cooling water w. According to this configuration, the belt-shaped sheet glass G' superimposed on the belt-shaped elastic sheet E is conveyed by the conveyance belt 8 of the conveyor 7, and the heating region η of the local heating mechanism 3 precedes the cooling region of the cooling mechanism 4. 〇 Scanning is performed on the cutting line 5 ± from the end side of the strip-shaped sheet glass G. Thereby, the initial crack formed at the end portion of the strip-shaped sheet glass G is expanded, and the cut surface 6 penetrating from the surface to the back surface is formed on the cut line 5, and the whole body is continuously cut ( Whole body thermal stress cut). At the same time, at the same time, the strip-shaped elastic material > E is cut (hyun), and the strip-shaped sheet glass G and the strip-shaped elastic sheet E are in a paired state. The matter of the configuration and the effect of the squirrel or the suffix is the same as that of the above-described ninth embodiment. Therefore, the same components are denoted by the same reference numerals, and the description thereof will be omitted. Fig. 3 is a perspective view showing a cutting device for a sheet glass according to a third embodiment of the present invention and a method for performing the cutting method. As shown in the figure, the cut-off of the third embodiment is to cut off the misalignment at both ends in the width direction of the strip-shaped sheet glass G, and the center portion of the ear portion Gx in the width direction is 丄 = cut Pre-twist line 5. Further, in a region from the respective portions of the predetermined line 5 to the predetermined side of the predetermined line 5, a portion of the strip-shaped material E (four) glass G is transported from the back side branch.
S 22 201249760 對輸送機7。另外,於帶狀的板狀玻璃G的表面側,在該 些切割預定線5上分別配設有實施局部加熱的局部加熱機 構3與噴射冷卻水W的冷卻機構4。再者,於帶狀的板狀 玻璃G及帶狀的彈性片材E的寬度方向中央部區域的背面 側’設置有用於防止G、E兩者下垂的一個或多個(圖例 田Ψ W 口做队坡喂 而且亦 中為1個)輔助輸送機9 u........... 寬度方向尺寸較短時,不僅不需要輔助輸送機y,而且亦 可為藉由單一的輸送機7來輸送帶狀的彈性片材E及帶狀 的板狀玻璃G的構成。另外,一對或單一的輸送機7亦能 夠以可自背面側支撐帶狀的板狀玻璃G的耳部Gx的方式 於寬度方向上延伸,伴隨於此,亦可使彈性片材E延伸至 ,耳部Gx的背面側為止,但即便於此種情況下,帶狀的 彈性片材E亦追隨該耳部Gx的相對的厚壁部而凹陷變 形’因此帶狀的板狀玻璃⑽以正確的平放姿勢輸送,而 曲等。根據如上所述的構成’於藉由輸送機7(以 ,辅助輸域9)來輸送綠的板狀玻 =熱機構3的加熱區域η與冷卻機構 展,於有效部Ga與耳^ ^H 始龜裂^的擴S 22 201249760 to conveyor 7. Further, on the surface side of the strip-shaped sheet glass G, a local heating mechanism 3 for locally heating and a cooling mechanism 4 for spraying the cooling water W are disposed on the predetermined line 5 to be cut. In addition, one or more of the back side of the central portion of the strip-shaped glass G and the strip-shaped elastic sheet E in the width direction are provided to prevent one or more of G and E from sagging (Fig. Do the team slope feeding and also one of them.) Auxiliary conveyor 9 u........... When the width direction is short, not only the auxiliary conveyor y is required, but also a single The conveyor 7 conveys the structure of the strip-shaped elastic sheet E and the strip-shaped sheet glass G. In addition, the pair of single conveyors 7 can extend in the width direction so as to support the ear portion Gx of the strip-shaped sheet glass G from the back side, and the elastic sheet E can be extended to the same. In the case of the back side of the ear portion Gx, even in this case, the strip-shaped elastic sheet E is deformed in accordance with the opposite thick portion of the ear portion Gx. Therefore, the strip-shaped plate glass (10) is correct. The flat posture is conveyed, while the song is equal. According to the configuration described above, the heating region η of the plate-shaped glass-thermal mechanism 3 that transports green by the conveyor 7 (for the auxiliary transport domain 9) and the cooling mechanism are exhibited in the effective portion Ga and the ear ^ ^H Initial cracking
進行全身切割,兹、 日]刀別對帶狀的板狀玻璃G °】’藉此分別連續地切除耳邮ρ _ . 帶狀的彈性片材E . ^Gx。另外,針對 起連續地嫌耳部巾央輯的有效部Ea ,及作用效果或補充 其他 相同’因此於圖3中,對相同的構成要素 ==形號態 23 201249760 並省略其說明。 圖4是表示本發明的第4實施形態的板狀玻璃的切割 裝置及其切割方法的實施狀況的概略侧視圖。如該圖所 示’該第4實施形態是在使帶狀的板狀玻璃G成形的成形 裝置10與將該成形後的帶狀的板狀玻璃G成輥狀地捲繞 於捲芯11a的周圍的捲繞裝置11之間,設置有上述圖3所 •示的切割裝置1的實施形態。即,該成形裝置10是實施溢 流下拉法的成形裝置,且於成形爐内自上方起依次具備具 有成形體10x的成形區域10A、具有退火機構(退火裝置) 的緩冷區域10B、以及具有冷卻機構的冷卻區域1〇c。而 且’自該成形裝置10的冷卻區域l〇C朝下方所抽出的帶 狀的板狀玻璃G藉由轉換輥12而平滑地彎曲後於橫方向 上被輸送’然後於經由自片材纏繞體13所抽出的帶狀的彈 性片材E而被支撐在切割裝置丨的輸送機7的搬送帶8上 的狀態下被輸送。如此,於藉由搬送帶8經由帶狀的彈性 片材E支撐且在橫方向上輸送帶狀的板狀玻璃G的期間 内,利用局部加熱機構3與冷卻機構4於切割預定線5上 實施局部加熱及冷卻藉此在有效部Ga與耳部Gx之間對 帶狀的板狀玻璃G進行全身切割,並且亦將帶狀的彈性片 材E切割成有效部Ea與不需要的部分£?^其後,於在帶 狀的板狀玻璃G的有效部Ga的背面側疊加有帶狀的彈性 片材E的有效部Ea的狀態下將其成輥狀地捲繞於捲繞裝 置11的捲芯11a的周圍。然後,於其輥外徑達到規定值的 時間點,在寬度方向上切割板狀玻璃G。該切割是藉由例 24 201249760 如利用切割機於板狀玻璃G的寬度方向刻入劃線後折斷 (斷裂)來進行。另外,亦藉由其他切割機構於寬度方向 上以同一位置切割帶狀的彈性片材E。其結果’可獲得帶 狀的彈性片材E發揮作為帶狀的板狀玻璃G的緩衝材料的 作用的作為最終製品的輥狀的板狀玻璃纏繞體。另一方 面,帶狀的板狀玻璃G的耳部Gx及彈性片材E的不需要 的部分Ex被輸送至下方進行廢棄處理。再者,,切割裝置j 的構成及其作用效果實質上與上述第3實施形態相同,因 此於圖4中,對相同的構成要素標註相同的符號,並省略 其說明。 圖5是表示本發明的第5實施形態的板狀玻璃的切割 裝置及其切割方法的實施狀況的概略側視圖。該第5實施 形態與上述第4實施形態的不同點在於:於製作將自成形 裝置10的冷卻區域l〇C所抽出的帶狀的板狀玻璃G在不 切除耳部Gx的狀態下捲繞成輥狀而成的原始玻璃纏繞體 15後,於橫方向上輸送自該原始玻璃纏繞體15所抽出的 帶狀的板狀玻璃G,並經過利用切割裝置丨的耳部Gx的 切除步驟而將該板狀玻璃G成輥狀地捲繞於捲繞裝置u 的捲芯11a的周圍,藉此獲得作為最終製品的板狀玻璃纏 繞體。於此情況下,在切贱置丨中,自片材纏繞體13 所抽出的帶狀的彈性片材E亦介於輸送機7的搬送帶8與 帶狀的板狀麵G之間,且於作騎終製品的板狀玻璃纏 繞體中,帶狀的彈性片材Ea亦發揮作為帶狀的板狀玻璃 ❿⑽_料的作用。而且’執行帶狀的板狀玻璃G的 25 201249760 耳部Gx的切除步驟的切割裝置1的構成及其作用效果實 質上與上述第3實施形態的切割裝置1相同,因此於圖5 中’對相同的構成要素標註相同的符號,並省略其說明。 圖6是表示本發明的第6實施形態的板狀玻璃的切割 裝置及其切割方法的實施狀況的概略侧視圖。該第6實施 形態與上述第4實施形態或第5實施形態的不同點在於: 於橫方向上輸送自成形.裝置10的冷卻區域10C或原始玻 璃纏繞體15㈣出的帶狀的板狀玻璃Gj切除板狀玻璃 G的耳部Gx後,進而經過利用切割裝置丨的二分割步驟, 將$板狀玻璃G分別成輥狀地捲繞於捲繞裝置u的兩根 捲芯11a的周圍,藉此獲得作為最終製品的兩個板狀玻璃 纏繞體。於此情況下,在切割裝置1中,自片材纏繞體13 所抽出的帶狀㈣性片材E亦介於輸送機7的搬送帶8與 ,狀的板狀朗G之間,且於作為最終製品的板狀玻璃纏 乂體中’帶狀的彈性片# Ea亦發揮作為帶狀的板狀玻璃 a的緩衝材料的作用。而且,執行帶狀的板狀玻璃G的 =分割步驟的_裝置i _纽其侧效果實f上與上 述第2實施形態的切割裝置1相同,因此於圖6中,仙The whole body is cut, and the strip-shaped sheet glass G ° is used to continuously cut the ear mail ρ _. The strip-shaped elastic sheet E. ^Gx. Further, the effective portion Ea of the continuous earphones, and the effect or the addition of the same effect are the same. Therefore, in Fig. 3, the same constituent elements == shape number 23 201249760, and the description thereof will be omitted. Fig. 4 is a schematic side view showing a state of implementation of a dicing apparatus for a sheet glass according to a fourth embodiment of the present invention and a cutting method therefor. As shown in the figure, in the fourth embodiment, the molding apparatus 10 for molding the strip-shaped sheet glass G and the strip-shaped sheet glass G after the molding are wound around the winding core 11a in a roll shape. An embodiment of the cutting device 1 shown in Fig. 3 described above is provided between the surrounding winding devices 11. In other words, the molding apparatus 10 is a molding apparatus that performs an overflow down-draw method, and includes a molding region 10A having a molded body 10x, a slow cooling region 10B having an annealing mechanism (annealing device), and a step in the forming furnace from the top. The cooling zone of the cooling mechanism is 1〇c. Further, the strip-shaped sheet glass G extracted from the cooling region 10C of the molding apparatus 10 is smoothly bent by the transfer roller 12 and then conveyed in the lateral direction. Then, the self-sheet winding body is passed. The strip-shaped elastic sheet E that has been taken out is conveyed while being supported by the conveyance belt 8 of the conveyor 7 of the cutting device. When the belt 8 is supported by the belt-shaped elastic sheet E and the belt-shaped sheet glass G is conveyed in the lateral direction, the local heating mechanism 3 and the cooling mechanism 4 are applied to the line 5 to be cut. Local heating and cooling thereby integrally cut the strip-shaped sheet glass G between the effective portion Ga and the ear portion Gx, and also cut the strip-shaped elastic sheet E into the effective portion Ea and the unnecessary portion. After that, the effective portion Ea of the strip-shaped elastic sheet E is superimposed on the back side of the effective portion Ga of the strip-shaped sheet glass G, and is wound in a roll shape on the winding device 11 in a state of being rolled. The circumference of the core 11a. Then, the sheet glass G is cut in the width direction at a point where the outer diameter of the roll reaches a predetermined value. This cutting is performed by the example 24 201249760, which is obtained by cutting a scribe line in the width direction of the sheet glass G by a cutter, and then breaking (breaking). Further, the strip-shaped elastic sheet E is cut at the same position in the width direction by other cutting means. As a result, a strip-shaped sheet-like glass wound body which is a final product which functions as a cushioning material for the strip-shaped sheet glass G can be obtained. On the other hand, the ear portion Gx of the strip-shaped sheet glass G and the unnecessary portion Ex of the elastic sheet E are conveyed to the lower side for disposal. In addition, the configuration of the cutting device j and the operation and effect thereof are substantially the same as those in the above-described third embodiment. Therefore, in FIG. 4, the same components are denoted by the same reference numerals, and the description thereof will be omitted. Fig. 5 is a schematic side view showing an implementation state of a sheet glass cutting device and a cutting method therefor according to a fifth embodiment of the present invention. The fifth embodiment differs from the above-described fourth embodiment in that a strip-shaped sheet glass G that has been taken out from the cooling region 10C of the self-forming apparatus 10 is wound without cutting the ear portion Gx. After the original glass winding body 15 which is formed into a roll shape, the strip-shaped sheet glass G drawn from the original glass winding body 15 is conveyed in the lateral direction, and passes through the cutting step of the ear portion Gx by the cutting device. The sheet glass G is wound around the core 11a of the winding device u in a roll shape, whereby a sheet-shaped glass wound body as a final product is obtained. In this case, the strip-shaped elastic sheet E taken out from the sheet winding body 13 is also interposed between the conveying belt 8 of the conveyor 7 and the belt-shaped plate-like surface G in the cutting jaw, and In the sheet-like glass winding body which is used as a riding end product, the belt-shaped elastic sheet Ea also functions as a belt-shaped sheet glass crucible (10). Further, the configuration of the cutting device 1 for performing the cutting process of the band-shaped sheet glass G 25 201249760 ear Gx is substantially the same as that of the cutting device 1 of the third embodiment described above, and therefore The same components are denoted by the same reference numerals and their description will be omitted. Fig. 6 is a schematic side view showing an embodiment of a cutting device for a sheet glass according to a sixth embodiment of the present invention and a cutting method therefor. The sixth embodiment is different from the fourth embodiment or the fifth embodiment in that the strip-shaped sheet glass Gj which is conveyed from the cooling region 10C of the apparatus 10 or the original glass winding body 15 (four) is conveyed in the lateral direction. After the ear portion Gx of the sheet glass G is cut out, the sheet glass G is wound around the two cores 11a of the winding device u in a two-step process by the cutting device ,. This obtained two sheet-like glass winding bodies as final products. In this case, in the cutting device 1, the strip-shaped (four) sheet E taken out from the sheet winding body 13 is also interposed between the conveying belt 8 of the conveyor 7 and the plate-like shape G of the shape, and The strip-shaped elastic sheet #Ea in the sheet-like glass entangled body as the final product also functions as a cushioning material for the strip-shaped sheet glass a. Further, the _device i _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _
仟的搬送帶8、及另_ L述第2實施形態〜第6實施形態的 '藉由一個輸送機7中的作為支撐構 個輸送機7z中的作為按壓構件的搬搬 搬 搬 、 、 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' '
S 26 201249760 帶狀的板狀玻璃G的狀態下支撐該板狀玻 夕的不同點在於:以縱向姿勢朝下方 是對向配置 Ξ玻成作為按壓構件的搬送帶8z接觸帶狀的 片材介於該8Z、G兩者的相互間。用以藉由上2 = 綱⑽行全㈣制制从作用效果 實與上述第2實施形態〜第6實施形態相同,因此於 圖7中,對相同的構成錢標註姻的符號,並省略其說 月再者,帶狀的板狀玻璃G的姿勢並無特別限定, 為平放姿勢(水平姿勢),另外,即便板狀玻璃G的長度 方向的中心、線相對於水平傾斜’亦可顧該構成。而且, 於此情況下,在作為最終製品的板狀玻璃纏繞體中,帶狀 片材h亦發揮作為帶狀的板狀玻璃Ga的緩衝材料 圖8是於藉由以上的實施形態中的切割裝置丨所切割 的板狀玻璃G(Ga)的蝴面6上形成有機層(較佳為有 機樹脂層)16的圖。再者,關中,因板狀玻璃G (Ga) 的寬度方向兩端具有㈣面6,故於該兩端形成有機層 16 ’但當僅板狀玻璃G (Ga)的寬度方向一端具有切割面 6時’亦可僅於該-端形成有機層16。若如上所述,則板 狀玻璃G的切割面6的強度得到提高,因此於厚度為2〇〇 27 201249760 μιη以下的板狀玻璃G中,對撓曲可確保充分的強度,並 可有效地活用薄壁的板狀玻璃G所具有的可撓性。 圖9是於藉由以上的實施形態中的切割裝置1所切割 的板狀玻璃G(Ga)的表面形成有機層(較佳為有機樹脂 層)16的圖。於此種情況下,板狀玻璃G (Ga)的表面的 強度亦得到提高,藉此對撓曲可確保充分的強度,並可有 效地活用薄壁的板狀玻璃G (Ga)所具有的可撓性。 [實例] 於本發明的[實例1]中,將長邊為460 mm、短邊為360 mm、厚度為2〇〇 μιη且30°C〜380°c下的熱膨脹係數為 38xlO_7/°C的無鹼玻璃板經由發泡聚乙烯片材(導熱率為 0.03 W/m,K〜0.05 W/m.K)載置於包含定盤或平板的支名 構件的支撐面上(基本上為圖丨所示的狀態而且,藉这 例如超硬合金製刀輪片等於無驗玻璃板的切割預定線上亥 入初始龜裂後,使用二氧化碳雷射作為局部加熱機構,e 6〇w的輸出功率將長度為加瓜瓜且寬度為3mm的橢圓开 ,雷射點照射於切割預^線上,繼而,—面以G1聰令 氣壓、1.0 ml/分的水量吹附作為冷卻機構的混合有空氣參 水的冷媒,一面以2〇〇 mm/秒的速度進行全身切割。藉这 =寬,方向上每隔2〇 mm的部位反覆執行上述局部加堯 =’ *製成5〇根由寬度為2〇咖、長度為⑽^ =狀玻璃構成的樣品Sa。#進行該全料割時,亦同時七 ;檢::)發泡聚乙烯片材。於暗室中以20萬勒克斯的用 X 一〜5G根樣品Sa’未發現玻璃粉的產生或玻璃背透S 26 201249760 The plate-shaped glass-shaped glass G is supported in a state in which the plate-shaped glass-ceramic is supported in a state in which the longitudinal direction is downward, and the conveyor belt 8z, which is a pressing member, is in contact with the strip-shaped sheet. In the 8Z, G between the two. The effect of the above-mentioned second embodiment is the same as that of the second embodiment to the sixth embodiment. Therefore, in FIG. 7, the symbols of the same constituent money are attached, and the description is omitted. In addition, the posture of the strip-shaped sheet glass G is not particularly limited, and is a flat posture (horizontal posture), and even if the center and the line in the longitudinal direction of the sheet glass G are inclined with respect to the horizontal direction, This composition. Further, in this case, in the sheet-like glass winding body as the final product, the belt-shaped sheet h also serves as a cushioning material for the strip-shaped sheet glass Ga. FIG. 8 is the cutting by the above embodiment. A diagram of an organic layer (preferably an organic resin layer) 16 is formed on the butterfly surface 6 of the sheet glass G (Ga) cut by the apparatus. In addition, in Guanzhong, since the plate-shaped glass G (Ga) has (four) faces 6 at both ends in the width direction, the organic layer 16' is formed at both ends, but when only one end of the sheet glass G (Ga) has a cut surface in the width direction At 6 o', the organic layer 16 may be formed only at the end. As described above, since the strength of the cut surface 6 of the sheet glass G is improved, the sheet glass G having a thickness of 2〇〇27 201249760 μm or less can ensure sufficient strength for deflection and can effectively The flexibility of the thin-walled sheet glass G is utilized. Fig. 9 is a view showing an organic layer (preferably an organic resin layer) 16 formed on the surface of the sheet glass G (Ga) cut by the cutting device 1 of the above embodiment. In this case, the strength of the surface of the sheet glass G (Ga) is also improved, whereby sufficient strength can be ensured for the deflection, and the thin-walled sheet glass G (Ga) can be effectively utilized. Flexible. [Examples] In [Example 1] of the present invention, the thermal expansion coefficient of the long side is 460 mm, the short side is 360 mm, the thickness is 2 〇〇μιη, and the thermal expansion coefficient at 30 ° C to 380 ° C is 38 x 10 7 / ° C. The alkali-free glass plate is placed on the support surface of the named member including the fixing plate or the flat plate via a foamed polyethylene sheet (thermal conductivity: 0.03 W/m, K~0.05 W/mK) (basically In addition, after the initial crack is formed, for example, the super-hard alloy cutter wheel is equal to the cut line of the non-glass plate, and the carbon dioxide laser is used as the local heating mechanism, the output power of the e 6〇w is An ellipsoid with a width of 3 mm is opened, and the laser spot is irradiated on the cutting pre-wire. Then, the surface is blown with a water volume of G1 Congling pressure and 1.0 ml/min. On one side, the whole body is cut at a speed of 2 〇〇mm/sec. By this = width, the above-mentioned partial twisting is repeated every 2 〇 mm in the direction = ' * made of 5 〇 roots with a width of 2 〇 coffee, length For the sample Sa composed of (10)^= glass, when the whole material is cut, it is also seven; the inspection::) foaming polymerization Alkenyl sheet. No glass powder production or glass back-transparent was found in the dark room with 200 lux of X-~5G root sample Sa'.
S 28 201249760 的損傷。其後,如圖10所示,藉由利用兩塊板狀體17夾 持且以於50 mm/分的速度下在長度方向上產生彎曲的方 式按壓彎曲成U字狀的兩點彎曲,依次對該些樣品Sa進 行強度評價。該評價是藉由根據因按壓彎曲而斷裂時的兩 塊板狀體17的間隔算出斷裂強度(breaking strength)來 進行’該斷裂強度獲得了最低值為2〇〇 MPa,平均值為5〇〇 MPa的結果。該斷裂強度若與如後述的比較例1般藉由利 用超鋼合金製刀輪片形成劃線後的折斷所獲得的端面的斷 裂強度相比,則獲得了以平均值計為3倍以上的結果。 於本發明的[實例2]中,使由長度為25〇m、寬度為6〇〇 mm、,。度為1〇〇 μιη且机〜38〇c>c下的熱膨脹係數為 38x10 /C的無鹼玻璃構成的帶狀的板狀玻璃經由聚對笨 一甲酉义乙一酯(Polyethylene Terephthalate,PET)膜(導 熱率為〇.〇8W/m.K〜〇.l7W/m.K)而支樓於輸送機的橡膠 製的搬送帶上’且以使帶狀的板狀玻璃的輸送速度達到 200 ηπη/秒的方式驅動輸送機。而且,㈣狀的板狀玻璃 的寬度方向兩侧分航置二氧化碳魏,並且對應於此, 事先藉由例如超硬合金製刀輪片等於兩條切割預定線上形 成初始龜裂(基本上為圖3所示的狀態)。然後,使用兩個 二氧化碳雷射’以7〇 w的輸出功率將長度為3()麵且 度為1.5 mm的橢圓形的t射點照射於刻人有初始龜裂 切割預m -面以使水量制〗Qmi/分的^ 於0.1 MPa的氣壓下吹_合衫㈣水的冷媒,一面= 續地進行全身切割’藉此將寬度方向兩侧的50酿的寬度 29 201249760 分別切除°另外’於該全身切割時,亦同時切割(熔切) PET膜。其後’將被同時切割的帶狀的板狀玻璃與帶狀的 PET膜加以疊加並捲繞於直徑為100 mm的丙烯酸製的捲 心上,藉此獲得板狀玻璃纏繞體。於暗室中以2〇萬勒克斯 的照度對此處所獲得的帶狀的板狀玻璃進行檢查,未發現 玻璃粉的產生及玻璃背面的損傷。進而,自此處所獲得的 板狀玻璃纏繞體選取50根寬度為2〇 mm的帶狀的板狀玻 璃的樣品,與上述實例1同樣地藉由兩點彎曲進行評價, 結果該些的斷裂強度的最低值為230 MPa,平均值為51〇 MPa ’若與後述的比較例1進行對比,則平均值為3倍以 上0 於[比較例1]中,將長邊為46〇mm、短邊為360 mm、 厚度為50μιη且30〇C〜380〇C下的熱膨脹係數為38xl〇_7/t>c 的無鹼玻璃板設置於定盤上,並且使用刀尖角度為95。的 超鋼合金製的刀輪>;,於2N的按壓力及冗匪/秒的速度 下,以寬度為15 mm的間隔於該玻璃板上刻設劃線,然後 以手工作業進行折斷。以上述方式所獲得的5()根樣品以 之中,10根於刻設劃線的途中水平裂痕朝四方擴展而實質 上無法進行樣品選取。藉由與上述實例i相_方法對剩 =的40根進行評價。其結果,該些的斷㈣度的最低值為 ㈧MPa’平均值為13〇MPa,顯現出極低的值。 【圖式簡單說明】 圖1是表示本發明的第1實施形態的板狀玻璃的切割 瑕置及其切割方法的實施狀況的概略立體圖。 201249760 圖2是表示本發明的第2實施形態的板狀玻璃的切割 裝置及其切割方法的實施狀況的要部立體圖。 圖3是表示本發明的第3實施形態的板狀玻璃的切割 裝置及其切割方法的實施狀況的要部立體圖。 圖4是表示本發明的第4實施形態的板狀玻璃的切割 裝置及其切割方法的實施狀況的概略側視圖。 圖·5是表示本發明的第5實施形態的板狀玻璃的切割 裝置及其切割方法的實施狀況的概略側視圖。 圖6是表示本發明的第6實施形態的板狀玻璃的切割 裝置及其切割方法的實施狀況的概略側視圖。 圖7是表示本發明的第7實施形態的板狀玻璃的切割 裝置及其切割方法的實施狀況的概略側視圖。 t圖8是表示藉由本發明的第1實施形態〜第7實施形 %中的切割裝置所切割的板狀玻璃的切割面上形成有機層 的狀態的剖面圖。 圖9是表示藉由本發明的第1實施形態〜第7實施形 態中的切割裝置所切割的板狀玻璃的表面形成有機層的狀 態的剖面圖。 圖10是表示進行板狀玻璃的評價的狀態的概略圖。 圖11&是表示先前的問題點的概略前視圖。 圖llbS表示先前的問題點的概略前視圖。 圖1lc是表示先前的問題點的概略前視圖。 【主要元件符號說明】 1:切割装置 31 201249760 2:支撐構件 2a :支撐面 3:局部加熱機構 4 :冷卻機構 5 :切割預定線 6 :切割面 6a :初始龜裂 · 7、7z :輸送機 8 :搬送帶(支撐構件) 8a :支樓面 8z :搬送帶 9 :輔助輸送機 10 :成形裝置 10A :成形區域 10B :緩冷區域 10C :冷卻區域 10x :成形體 11 :捲繞裝置 11a :捲芯 12 :轉換輥 13 :片材纏繞體 15 :原始玻璃纏繞體 16 :有機層 17 :板狀體S 28 201249760 Damage. Then, as shown in FIG. 10, the two-point bending which is bent in a U shape is pressed by being sandwiched by the two plate-like bodies 17 and bent at a speed of 50 mm/min. The samples Sa were subjected to strength evaluation. This evaluation was carried out by calculating the breaking strength from the interval between the two plate-like bodies 17 when the bending was caused by the bending of the bending, and the minimum value of the breaking strength was 2 〇〇 MPa, and the average value was 5 〇〇. The result of MPa. When the breaking strength is compared with the breaking strength of the end surface obtained by forming the scribing after the scribing of the super-steel alloy blade wheel as in Comparative Example 1 described later, the average value is three times or more. result. In [Example 2] of the present invention, the length was 25 〇m and the width was 6 〇〇 mm. A strip-shaped plate glass composed of an alkali-free glass having a thermal expansion coefficient of 38×10 /C at a degree of 1 〇〇 μιη and a machine of 38 10 c> c is passed through Polyethylene Terephthalate (PET). The film (thermal conductivity: 〇.〇8W/mK~〇.l7W/mK) is attached to the rubber conveyor belt of the conveyor' and the conveying speed of the strip-shaped sheet glass reaches 200 ηπη/sec. The way drives the conveyor. Further, the carbon dioxide is divided into two sides in the width direction of the (four)-shaped plate glass, and correspondingly, the initial crack is formed by, for example, a super-hard alloy blade to be equal to the two cutting lines (substantially The state shown in 3). Then, using two carbon dioxide lasers, an elliptical t-point having a length of 3 () and a length of 1.5 mm is irradiated with an output power of 7 〇w to inscribe the initial m-plane with an initial crack to make Water quantity〗 Qmi/min ^ Under the pressure of 0.1 MPa, blow the _ _ (4) water refrigerant, one side = continue to cut the whole body 'by taking the width of the 50 sides of the width direction 29 201249760 respectively. At the time of the whole body cutting, the PET film is also cut (melted) at the same time. Thereafter, the strip-shaped sheet glass to be simultaneously cut and the strip-shaped PET film were superposed and wound on a roll of acrylic having a diameter of 100 mm, whereby a sheet-like glass wound body was obtained. The strip-shaped sheet glass obtained here was examined in an illuminance of 2 10,000 lux in a dark room, and no generation of glass frit and damage of the back surface of the glass were observed. Further, from the sheet-shaped glass wound body obtained here, 50 samples of strip-shaped plate glass having a width of 2 mm were selected, and evaluated by two-point bending in the same manner as in the above-described Example 1, and the breaking strength was obtained. The lowest value is 230 MPa, and the average value is 51 MPa. When compared with Comparative Example 1 described later, the average value is 3 times or more. 0 In [Comparative Example 1], the long side is 46 〇 mm, and the short side is An alkali-free glass plate having a thermal expansion coefficient of 38 x 10 〇 7 / t > c at 360 mm, a thickness of 50 μm and a pressure of 30 〇 C to 380 ° C was placed on the platen, and a blade tip angle of 95 was used. The cutter wheel of the super-steel alloy was placed on the glass plate at a width of 15 mm at a pressing force of 2 N and a speed of 匪/sec, and then broken by a manual operation. Among the 5 () root samples obtained in the above manner, 10 of the 10 horizontal cracks on the engraved line were expanded toward the square to be substantially impossible for sample selection. The evaluation of 40 of the remaining = was carried out by the same method as the above example i. As a result, the lowest value of the break (four) degrees of these (eight) MPa' average value is 13 〇 MPa, showing an extremely low value. [Brief Description of the Drawings] Fig. 1 is a schematic perspective view showing a state of implementation of a cutting device for a sheet glass according to a first embodiment of the present invention and a cutting method therefor. 201249760 Fig. 2 is a perspective view of an essential part showing a state of implementation of a dicing apparatus for a sheet glass and a cutting method therefor according to a second embodiment of the present invention. Fig. 3 is a perspective view of an essential part showing a state of implementation of a dicing apparatus for a sheet glass and a cutting method therefor according to a third embodiment of the present invention. Fig. 4 is a schematic side view showing a state of implementation of a dicing apparatus for a sheet glass according to a fourth embodiment of the present invention and a cutting method therefor. Fig. 5 is a schematic side view showing a state of implementation of a dicing apparatus for a sheet glass according to a fifth embodiment of the present invention and a cutting method therefor. Fig. 6 is a schematic side view showing an embodiment of a cutting device for a sheet glass according to a sixth embodiment of the present invention and a cutting method therefor. Fig. 7 is a schematic side view showing an embodiment of a cutting device for a sheet glass according to a seventh embodiment of the present invention and a cutting method therefor. FIG. 8 is a cross-sectional view showing a state in which an organic layer is formed on a cut surface of a sheet glass cut by a cutting device according to the first embodiment to the seventh embodiment of the present invention. FIG. 9 is a cross-sectional view showing a state in which an organic layer is formed on the surface of the sheet glass cut by the cutting device in the first embodiment to the seventh embodiment of the present invention. FIG. 10 is a schematic view showing a state in which evaluation of the sheet glass is performed. 11 & is a schematic front view showing a previous problem point. Figure 11bS shows a schematic front view of a previous problem point. Figure 11c is a schematic front view showing the previous problem. [Description of main component symbols] 1: Cutting device 31 201249760 2: Support member 2a: Support surface 3: Local heating mechanism 4: Cooling mechanism 5: Cutting line 6: Cutting surface 6a: Initial cracking · 7, 7z: Conveyor 8: conveyor belt (support member) 8a: support floor 8z: conveyor belt 9: auxiliary conveyor 10: forming device 10A: forming region 10B: slow cooling region 10C: cooling region 10x: molded body 11: winding device 11a: Core 12: Transfer Roller 13: Sheet Winding Body 15: Original Glass Winding Body 16: Organic Layer 17: Plate Body
S 32 201249760 20 :定盤 a :箭頭/方向 b :方向 C :冷卻區域 E :彈性片材S 32 201249760 20 : Fixing plate a : Arrow / direction b : Direction C : Cooling area E : Elastic sheet
Ea :有效部/彈性片材Ea : effective part / elastic sheet
Ex :不需要的部分 g :玻璃基板 ga :加熱部位 gb :冷卻部位/凹陷部 G:板狀玻璃(玻璃膜)Ex : Unwanted part g : Glass substrate ga : Heating part gb : Cooling part / recessed part G: Plate glass (glass film)
Ga :有效部/板狀玻璃Ga : effective part / sheet glass
Gx :耳部 Η .加熱區域 Κ :間隙 L :雷射光束 S a .樣品 W :冷卻水 z :箭頭 33Gx : Ear Η . Heated area Κ : Clearance L : Laser beam S a . Sample W : Cooling water z : Arrow 33
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