TW201245063A - Cutting method for strengthened glass plate - Google Patents

Abstract

A cutting method for a strengthened glass plate, having a step that irradiates a laser light (20) on the surface (12) of the strengthened glass plate (10) and moves the irradiation area (22) for the laser light (20) on top of the surface (12) of the strengthened glass plate (10), and which cuts the strengthened glass plate (10) by causing a crack penetrating the strengthened glass plate (10) in the plate thickness direction to follow behind the irradiation area (22). By irradiating the laser light (20) on the surface (12) of the strengthened glass plate (10), an intermediate layer (17) in the irradiation area (22) is heated at an annealing point temperature max., a tensile stress or a compression stress smaller than the value for the internal residual tensile stress is formed in the intermediate layer (17) in the center of the irradiation area (22), and the extension of the crack is restrained.

Description

201245063 VI. Description of the Invention: [Technical Field to Be Invented] The present invention relates to a method of cutting a tempered glass sheet. [Prior Art] In recent years, in mobile devices such as mobile phones or PDAs (Pers〇nal Digital Assistants), protective glasses have been used to improve the protection or aesthetics of displays (including touch panels). 〇ver glass). Further, a glass substrate is widely used as a substrate of a display. On the other hand, the thinning and weight reduction of mobile devices have been progressing, and the thinning of glass used in the driving devices has been continuously developed. When the glass is thinned, the strength is lowered. Therefore, in order to compensate for the insufficient strength of the glass, a tempered glass having a surface layer and a back layer having residual compressive stress has been developed. Tempered glass is also used as window glass for building or window glass for construction. The tempered glass system is produced by, for example, air-cooling strengthening or chemical strengthening. The air-cooling strengthening method quenches the temperature of the glass near the softening point from the surface and the back surface to form a surface layer and a back surface layer with residual compressive stress by providing a temperature difference between the surface and the back surface of the glass. On the other hand, the chemical strengthening method replaces ions of a smaller ionic radius (eg, u ions, other ions) of 3 in the glass with ions of a larger ionic radius by ion exchange of the surface and the back surface of the glass (for example, κ ions) form a surface layer and a back layer of residual compressive stress. In the __ method, the intermediate layer apos which forms a residual tensile stress between the surface layer and the back layer acts as a reaction. In the case of manufacturing tempered glass, 'Compared with the glass of the product size in units of i-pieces, 'will be larger than the product size. 160223.doc 201245063 Glass is reinforced, cut and then It is more effective to perform multiple chamfering. Therefore, as a method of cutting the tempered glass sheet, there is proposed a method of cutting the tempered glass sheet by irradiating the surface of the tempered glass sheet with laser light to move the irradiation region of the laser light on the surface of the tempered glass sheet (for example) Refer to Patent Document 1). CITATION LIST Patent Literature Patent Literature 1: JP-A-2008-247732 SUMMARY OF INVENTION Technical Problem The above-mentioned Patent Document 1 uses a carbon dioxide laser as a light source of laser light, and thus a laser light source Most of it is absorbed as heat near the surface of the tempered glass sheet. Therefore, a tensile stress greater than the residual tensile stress is generated directly under the irradiation region of the laser light on the back surface of the glass. As a result, there is a case where the crack formed at the time of cutting passes over the irradiation region of the laser light and is sharply extended in a direction other than the expected direction, so that the trajectory accuracy of the cutting line is deteriorated, that is, the cutting line is cut off from the desired one. The line is deviated or cannot be cut to cause the glass to shatter. This tendency is more pronounced as the residual tensile stress becomes larger. The present invention has been made in view of the above problems, and an object of the invention is to provide a method for cutting a tempered glass sheet having a high accuracy of cutting lines. Means for Solving the Problems In order to solve the above object, a method for cutting a tempered glass sheet according to one aspect of the present invention 160223.doc 201245063 is performed by a surface layer and a back layer including residual compressive stress, and a surface layer and a back layer. The surface of the tempered glass sheet between the layers and the intermediate layer of the residual tensile stress is irradiated with the laser light and the irradiated region of the laser light is moved on the surface to cut the tempered glass sheet, wherein the tempered glass is When the plate and the laser beam are incident on the surface of the tempered glass plate perpendicularly to the laser light, if the absorption coefficient of the tempered glass plate with respect to the laser light is a (cm-i), the reinforcement is performed. When the thickness of the glass plate is t (cm), it satisfies the formula of 〇 <axt$ 3.0, and when the laser light is obliquely incident on the surface of the tempered glass sheet, the laser light is applied to the tempered glass. If the angle of refraction on the surface of the plate is γ (.), then the formula of 〇<aXt/c〇syS 3.〇 is satisfied, and the above-mentioned laser light is irradiated by the temperature below the cold spot. The intermediate layer in the region is heated to control the stretching of the crack on the tempered glass sheet due to the residual tensile stress of the intermediate layer. Further, the cutting method of the tempered glass sheet according to another aspect of the present invention is performed by the surface layer and the back layer having residual compressive stress, and the interlaminar layer formed between the surface layer and the back layer and having residual tensile stress. The laminated body of the reinforced glass plate layer N (N is a natural number of 2 or more) irradiates the laser light, and the irradiation region of the laser light is moved on the surface of each of the tempered glass plates to cut the N a sheet tempered glass sheet, wherein each of the tempered glass sheets is incident on the surface of each of the tempered glass sheets perpendicularly to the laser light, and the tempered glass sheet is irradiated with the laser light The absorption coefficient is set to ai (cnrI), and if the thickness of each of the tempered glass sheets is ti (cm), it satisfies 160223.doc 201245063 〇<¥(5).〇_above, any natural number below N) When the laser light is obliquely incident on the surface of each of the tempered glass sheets, the angle of refraction of the laser light on the surface of the tempered glass sheet is γΚ. And satisfying the above formula in which the 〇<aiXti/c〇s^3叩 is an arbitrary number of i or more and N or less, in the irradiation region of the laser light by a temperature lower than a cold spot; The intermediate layer is heated to control the stretching of the cracks on the respective tempered glass sheets due to the residual tensile stress of each of the intermediate layers. Advantageous Effects of Invention According to the present invention, it is possible to provide a method of cutting a tempered glass sheet having a high trajectory accuracy of a cutting line. [Embodiment] Hereinafter, embodiments for carrying out the invention will be described with reference to the drawings. [First Embodiment] Fig. 1A and Fig. 1B are explanatory views of a method of cutting a tempered glass sheet according to a first embodiment of the present invention. Figure (7) is a plan view of Figure 1A. As shown in FIG. 1A and FIG. 1B, by irradiating the surface (one main surface) 12 of the strengthened glass sheet 10 with the laser light 20' and moving the irradiation region 22 of the laser light 20 on the surface 12 of the strengthened glass sheet 10, Stress is applied to the tempered glass sheet 10, and the tempered glass sheet is cut 1 。. The tempered glass sheet 10 is produced by, for example, air-cooling strengthening or chemical strengthening. The type of glass used for reinforcement is selected according to the use. For example, in the case of automotive window glass or architectural window glass, glass substrates for PDP (Plasma Display Panel), and protective glass, 160223.doc 201245063 uses limestone glass as a glass for reinforcement. Further, in the case of a glass substrate for an LCD (Liquid Crystal Display), an alkali-free glass which does not substantially contain an alkali metal element is used as the glass for reinforcement. The air-cooling strengthening method quenches the glass of the temperature near the softening point from the surface and the back surface (both main faces), so that there is a temperature difference between the surface and the back surface (the two main faces) of the glass and the inside, thereby forming residual compression. The surface layer and back layer of stress. The air-cooled strengthening method is suitable for strengthening thicker glass. The chemical strengthening method replaces the ions of smaller ionic radius (for example, ions, Na ions) contained in the glass with ions of larger ionic radius by subjecting the surface and back surface of the glass (the two main faces) to ion-family replacement. A surface layer and a back layer which form residual compressive stress are formed (for example, a κ ion). The chemical strengthening method is suitable for strengthening lime glass containing metal elements. These air-cooling strengthening methods and chemical strengthening methods form an intermediate layer of residual tensile stress between the surface layer and the back layer, and act as a reaction between the surface layer and the back layer which form residual compressive stress. Fig. 2 is a schematic view showing an example of distribution of residual stress of a chemically strengthened glass plate before irradiation of laser light. Fig. 2 is a schematic view showing an example of distribution of residual stress of the air-cooled tempered glass sheet before the irradiation of the laser light. Fig. 3 is a cross-sectional view showing an example of a tempered glass plate irradiated with laser light. In Fig. 3, the direction of the arrow indicates the direction of action of the stress, and the size of the arrow indicates the magnitude of the stress. As shown in Fig. 3, the tempered glass sheet 1 includes a surface layer 13 and a back layer 15 which have residual compressive stress, and an intermediate layer 17 which is provided between the surface layer 13 and the back layer 15 and which has residual tensile stress. The surface layer of the end face of the tempered glass sheet 10 is J60223.doc 201245063, which may include only the layer of residual compressive stress, and may also include a layer of residual compressive stress and a layer of residual tensile stress. As shown in Fig. 2A and Fig. 2B, the compressive stress (>0) remaining in the surface layer 13 and the back layer 15 tends to gradually decrease from the surface 12 and the back surface 14 of the tempered glass sheet 1 toward the inside. In the case of chemical strengthening, as shown in Fig. 2A, the tensile stress (> 〇) remaining in the intermediate layer 17 is substantially constant. Further, in the case where the air-cooling is strengthened, as shown in Fig. 2B, the tensile stress (> 〇) remaining in the intermediate layer 丨 7 gradually decreases from the inside of the glass toward the surface 12 and the back surface 14. In FIGS. 2A and 2B, CS is the maximum residual compressive stress in the surface layer u or the back layer 15 (surface compressive stress, and CT is the internal residual tensile stress in the intermediate layer 17 (residue of the intermediate layer 17) The average value of the tensile stress (>0)' CM (refer to Fig. 2B) indicates the maximum residual tensile stress of the intermediate layer 17 'DOL indicates the thickness of the surface layer 13 or the back layer 15>> CS or CT, CM, DOL can be adjusted under enhanced processing conditions. For example, in the case of air-cooling strengthening method, 'cs or CT, CM, DOL can be adjusted by the cooling rate of glass, etc. Also, in the case of chemical strengthening method, The glass is immersed in the treatment liquid (for example, KNO3 molten salt) for ion exchange, so CS or CT, CM, and DOL can be adjusted by the concentration or temperature of the treatment liquid, the immersion time, etc. Further, the surface layer 13 of the present embodiment And the back layer 15 has the same thickness and the same maximum residual compressive stress, but may have different thicknesses' or different maximum residual compressive stresses. The surface 12 of the strengthened glass sheet 10 is not pre-cut along the predetermined line. Dashing It is also possible to form a scribe line in advance, but in this case, the operation is complicated due to the step addition. Further, if the scribe line is formed in advance, there is a case where the glass is missing 160 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The initial crack is formed in advance at the cutting start position. The method of forming the initial crack may be a common method, for example, by a cutter, a file, or a laser. In order to reduce the number of steps, the initial crack may not be formed in advance. Before the cutting, the end portion of the tempered glass sheet 10 is polished by a rotating grindstone or the like in advance, and micro-cracks are formed during polishing, so that initial cracks may not be formed in advance. On the surface 12 of the tempered glass sheet 10, the ray is made. The irradiation region 22 of the light beam 20 (for example, the center of the irradiation region 22 of the laser light 20) moves linearly or in a curved shape along the line to cut from the end portion of the strengthened glass sheet 1 to the inside. Thereby, the self-tempered glass sheet 10 is moved. The end portion is formed with a crack 3 朝向 (see FIG. 8 and FIG. 1B) to cut the tempered glass sheet 10. The irradiation region 22 of the laser beam 2 can also be moved in a P-shape. In this case, the end of the planned cutting line included in the moving path intersects with the line to cut. The movable area 22 of the laser beam 20 is moved on the surface 12 of the tempered glass sheet 1 to be movable. Or rotating the supporting body of the tempered glass plate, or moving the light source of the laser light 20, or rotating the mirror disposed in the middle of the path of the laser light. On the surface 12 of the tempered glass plate 10, The irradiation area 22 of the laser light 2 is formed into a circular shape as shown in, for example, FIGS. 1A and 1B, but may be a rectangular or elliptical shape, and its shape is not limited. Further, the roundness of the irradiation area 22 is preferably. R is below. When the right roundness is q. 5 R or less, the rotation of the irradiation region 22 is controlled when the center of the irradiation region 22 is moved along the curved line of the curve shape on the surface 12 of the tempered glass sheet 10. The required accuracy is lower, 160223.doc 201245063 is therefore better. Further, when the accuracy of the rotation control of the irradiation region 22 is equal to the extent that the width of the irradiation region 22 in the normal direction of the planned cutting line is small, the cutting accuracy is increased. For example, even when the radius of curvature of the cutting planned line is small, the cutting can be performed with high precision. The true roundness is preferably 0.3 R or less. The roundness is further preferably 〇 2 R or less. Here, the true roundness is the difference between the radii R and r of the two concentric circles of the circle C1 丨 and the inscribed circle C12 outside the irradiation region 22. Furthermore, r is the radius of the circle C11 outside the irradiation area 22, * indicates the radius of the inscribed circle C12 of the irradiation region 22. On the surface 12 of the reinforced glass and glass plate 10, the irradiation area 22 of the laser light is the thickness of the tempered glass plate 10, the maximum residual compressive stress (cs), the internal residual tensile stress (CT), and the surface layer 13 Or the thickness of the back layer 15 (DOL), the light source output of the laser light 20, and the like, and the corresponding speed is moved. The light source of the laser light 20 is not particularly limited, and examples thereof include UV (ultraviolet) laser (wavelength: 355 nm), green laser (wavelength: 532 nm), and semiconductor laser (wavelength: 808 nm, 940 nm, 975 nm), fiber laser (wavelength: i〇60~1100 nm), YAG (yttrium aluminum garnet) laser (wavelength: ίο" nrn, 2080 nm, 2940 nm) A laser using a mid-infrared optical parametric oscillator (wavelength: 2600 to 3450 nm). The oscillation mode of the laser light 20 is not limited, and any of a CW (Continuous Wave) laser that continuously oscillates laser light and a pulsed laser that intermittently oscillates the laser light can be used. Further, the intensity distribution of the laser light 20 is not particularly limited and may be a Gaussian type or a top hat type. 160223.doc •10· 201245063 The laser light 2G emitted from the light source is condensed by a collecting lens or the like to form an image on the surface 12 of the tempered glass sheet 10. The condensing position of the laser light 2G is based on the surface 12 of the tempered glass plate 10, and may be the laser light source side or the back surface 14 side. Further, if the heating temperature is not too high, the concentrating surface below the freezing point can be maintained. As shown in FIG. 5, the condensing position of the laser light 20 can be in the tempered glass sheet, especially It can be inside the intermediate layer 17. In the case where the condensing position of the laser light 20 is located in the intermediate layer 17, since the region where the stress is generated can be minimized by the laser light 20, the cutting accuracy can be improved, and the laser light can be reduced. Light source output. The details will be described later, and the laser light 2 is absorbed as heat during the passage through the tempered glass sheet 10, so that the strength is lowered. In the case where the condensing position of the laser light 20 is located at or near the back surface 14 (for example, the boundary between the back layer 15 and the intermediate layer 17), the intensity (power density) per unit area of the laser light 20 on the back surface 14 is increased. Therefore, the difference between the heating temperature of the surface 12 and the heating temperature of the back surface 丨 4 becomes small. Thereby, the heating efficiency is better' and the light source output of the laser light 20 is reduced. The optical axis 21 of the laser light 20 is π on the surface Φ of the tempered glass sheet, for example, as shown in FIG. 1 and FIG. 5 (illustration omitted from the optical axis in FIG. 1A), which may be orthogonal to the surface 12 as shown in FIG. The indication 'can also intersect the surface 12 obliquely. When the laser light reflected by the surface 12 has an effect on the laser oscillator, if the optical axis 21 of the laser light 20 and the surface 12 are obliquely intersected, most of the reflected light will not return to the laser. Therefore, the effect can be made smaller. Further, when a film 18160223.doc 201245063 having the property of absorbing the laser light 20 is formed on the surface 12 of the tempered glass sheet 10, the surface 12 is not caused by the absorption of the laser light by the film 18. It is heated' so that the tempered glass sheet cannot be cut. However, as shown in Fig. 6, the light of the right laser light 2 obliquely intersects the surface 12 toward the surface 12, and even if the line to be cut is overlapped with the edge of the film 18, it can be cut. The film 18 can be, for example, a ceramic film or a resin film for improving the novelty, a transparent electrode film for improving the function, and the like. Since the prior method is cut by the action of only laser light, in the tempered glass having a large residual tensile stress, the crack caused by the residual tensile stress of the intermediate layer is sharply stretched in a direction other than the expected direction, resulting in failure. Cut in the desired shape. On the other hand, in the present embodiment, the tempered glass sheet 1 〇 and the laser light 2 〇 satisfy the following formula, and the extension of the crack caused by the residual tensile stress of the intermediate layer 17 is utilized, and not only the action of the laser light 20 is caused. The crack is stretched, and the tempered glass sheet 1 is cut. That is, although the details are described below, the intermediate layer 17 of the irradiated region 22 of the laser light 20 is heated by the above conditions at a temperature below the cold spot. The extension of the crack 3 产生 generated in the tempered glass sheet 1 因 due to the residual tensile stress of the intermediate layer 17 is controlled, so that the reinforced glass sheet can be cut by the crack caused by the residual tensile stress. . Further, the reason why the intermediate layer 17 is heated at a temperature lower than the cold point is that if the heating is performed beyond the cold point, even if the laser light penetrates for a short period of time, the glass becomes high in temperature and becomes sticky. The state of flow, so the compressive stress generated by the laser light is alleviated by the viscous flow. The laser light 20 penetrating the tempered glass sheet 10 is set to the intensity of the surface 12 of the tempered glass sheet 1 and is moved to a distance L (cm) in the tempered glass sheet. 160223.doc 12

When the intensity of the laser light 20 at S 201245063 is set to I, ^^xexpGaxL) holds. The s-style is called Lambert-Beer's law. The α system indicates the absorption coefficient (cnT1) of the strengthened glass plate 雷 with respect to the laser light 20. When the laser light 20 is incident perpendicularly to the surface 12 of the tempered glass sheet 1 , it is moved at the same distance as the thickness t (cm) of the tempered glass sheet, and is emitted from the back surface. In this case, the tempered glass sheet 1 〇 and the laser light 2 〇 satisfy the formula of ax <axt $ 3.0, so that the laser light 2 〇 is not absorbed by the surface of the tempered glass sheet ( 7 ) and reaches the inside. The inside of the tempered glass sheet is sufficiently heated, and the stress generated in the tempered glass sheet 10 is changed from the state shown in FIG. 3 to the state shown in FIG. 7 or FIG. 8. FIG. 7 is a diagram showing the line along the line of FIG. The distribution of the stress on the cross section is not intended to be an example of the distribution of the stress on the cross section of the irradiated area of the laser light. Fig. 8 is a view showing an example of the distribution of stress along the section of Fig. 1 Β 2 Β β line, and Fig. 1 is a view showing an example of the distribution of stress on the section rearward of the section shown in Fig. 7 . Here, the rear of the month is the rear of the scanning direction of the laser light. In Figures 7 and 8, the direction of the arrow indicates the direction of stress, and the length of the arrow indicates the magnitude of the stress. The intermediate layer in the irradiation region 22 of the field light 20 is "higher than the intensity of the laser light, so the temperature is higher than the circumference", thereby generating a tensile stress smaller than the residual tensile stress shown in FIG. Compressive stress. The extension of the crack 3 is suppressed in the portion where the tensile stress or the (4) stress is less than the residual tensile stress. To surely prevent the stretching of the crack 30, it is preferable to generate the compressive stress as shown in Fig. 7. I60223.doc -13· 201245063 Furthermore, the surface layer 13 or the back layer 15 in the irradiation region 22 of the laser light 20 generates a compressive stress greater than the residual compressive stress shown in FIGS. 2A, 2B and 3, and thus The extension of the crack 30 is suppressed. In order to achieve the balance with the compressive stress shown in Fig. 7, the cross section of the cross section shown in Fig. 7 produces a tensile stress in the intermediate layer 如图7 as shown in Fig. 8. The portion in which the tensile stress is greater than the residual tensile stress and the tensile stress reaches a specific value forms a crack 30. The crack 30 penetrates from the surface 12 of the tempered glass sheet 1 to the back surface 14, and the cutting in the present embodiment is so-called The whole piece is cut off. In this state, when the irradiation region 22 of the laser light 20 is moved, the position of the irradiation region 22 becomes the stress distribution shown in Fig. 7 as described above, so that the crack 30 does not deviate from the cutting schedule. The line is free to stretch, and the position of the front end of the crack 30 is moved to track the position of the irradiation area 22. Therefore, the extension of the crack 3 can be controlled by the laser light 2 . Thus, the present embodiment can be made by Axt is larger than 〇 and is 3 〇 or less, and in the tempered glass sheet 10, the stretching of the crack 3 〇 is controlled by the laser light 2 而且. Moreover, since the crack 30 extends right behind the irradiation region 22, the cutting line is irradiated The movement trajectory of the region 22 is formed, so that the cutting accuracy can be improved. Further, the front end of the crack 30 can be tracked in superimposed manner with the irradiation region 22, instead of tracking the rear side of the irradiation region 22. The front end is close to the illumination area 22, or it is superimposed to further improve the cutting precision. Since the glass requires high transparency depending on the application, the laser wavelength is close to visible light. When the case of the long area, the closer the better axt billion However, since too small if the axt absorption efficiency is deteriorated, and therefore a >. ≪ t preferred 160223.doc

S 201245063 is 0.0005 or more (laser light absorptivity is 〇〇5% or more), more preferably 〇〇〇2 or more (laser light absorptivity is 0.2% or more), further preferably 0.004 or more (laser light absorptance is 0.4) %the above). Since glass requires a lower transparency depending on the application, the larger the axt, the better the laser wavelength is used in the vicinity of the wavelength region of visible light. However, if the axt is too large, the surface absorption of the laser light becomes large, so that the crack extension cannot be controlled. Therefore, axt is preferably 3 Å or less (the laser light absorptivity is 95% or less), more preferably 0.105 or less (the laser light absorptivity is 1% by mass or less), and further preferably 0.02 or less (laser light absorption). The rate is 2% or less). Further, according to the findings of the present inventors, if the internal residual tensile stress (CT) of the intermediate layer 17 reaches 30 MPa or more, the crack formed in the reinforced glass sheet 1 仅 is only due to the residual tensile stress of the intermediate layer 17 Stretch naturally (free stretch). Therefore, it is preferable that the internal residual tensile stress ((:) is 15 Mpa or more, and the residual tensile stress of the intermediate layer 17 used in the tensile stress of the cut is compared with that by the laser light 20. The tensile stress is dominant, whereby the distance between the position where the tensile stress reaches a certain value (i.e., the position at the front end of the crack 30) and the position of the laser light 20 becomes sufficiently short inside the tempered glass sheet 10, Therefore, the internal residual tensile stress (CT) of the intermediate layer 17 is more preferably 3 〇Mpa or more, and further preferably 40 MPa. If the internal residual tensile stress (cτ) is 30 MPa or more, it is used for cutting. The tensile stress at break is only the residual tensile stress of the intermediate layer 17, so that the accuracy of the cutting line can be further improved. In the cutting of the chemically strengthened glass of the present embodiment, the internal residual stretching is 160223.doc.15 · 201245063 The upper limit of stress (ct) is 12〇MPa. It can only be strengthened to about 12〇MPa due to technical reasons for strengthening treatment in the current technology. If internal residual tensile stress (CT) can be produced Chemical strength exceeding l2〇MPa Glass, the present invention is no doubt also be applied. Absorption coefficient ([alpha]) based 2〇 wavelength laser beam, the glass composition of glass reinforced decided 1〇 the like. For example in the glass sheet 10 with reinforcing iron (comprising

The content of Fe〇' Fe2〇3 'Fe3〇4), the content of cobalt oxide (including CoO, Co2〇3, C〇3〇4), and the content of copper telluride (including Cu〇, Cu2〇) become 1000 The absorption coefficient in the near-infrared wavelength region near nm becomes large. Further, as the amount of the oxide of the rare earth element (for example, Yb) in the tempered glass sheet 10 increases, the absorption coefficient (α) increases in the vicinity of the absorption wavelength of the rare earth atom. The absorption coefficient (α) in the near-infrared wavelength region around 1000 nm is set depending on the application. For example, in the case of a window glass for automobiles, the absorption coefficient (〇〇 is preferably 3 cm·1 or less. Further, in the case of a window glass for construction, the absorption coefficient (4) is preferably 〇6 cm•丨 or less. In the case of glass for display, the absorption coefficient (α) is preferably 0.2 cm·丨 or less. The wavelength of the laser light 20 is preferably 250 to 5 〇〇〇 nm. The wavelength of the laser light can be made 250~5000 nm, taking into account the transmittance of the laser light and the heating efficiency of the laser light 20. The wavelength of the laser light is preferably 3〇〇~仂(8) nm' and further preferably 8〇〇~3〇 〇〇nm The content of iron oxide in the tempered glass sheet 10 depends on the kind of the glass constituting the tempered glass sheet 10, but is, for example, 0.02 mass%, which can be used by adjusting the content of iron oxide in the range. The general infrared 160223.doc •16- 201245063 near-infrared laser near 丨〇〇〇nm adjusts the axt to the desired range. It can also adjust the content of oxides of cobalt oxide or copper oxide and rare earth elements. : The content of iron oxide. ° ρ The thickness of the tempered glass plate ίο (1) is based on When the reinforcing glass plate 10 is chemically strengthened glass, the thickness (1) of the reinforcing glass plate 10 is preferably 0〇1 to 〇2 em. The thickness (1) can be set to 〇2升 Internal residual tensile stress (CT) vixx If the thickness (1) is less than 0,01 cm, it is not easy to chemically strengthen the glass. The thickness (1) is more preferably 〇.03~0.15(10), and further preferably 〇〇5~〇 When the tempered glass sheet 1G is an air-cooled reinforced glass, the thickness (1) of the tempered glass sheet 10 is preferably (U~3 eme can sufficiently increase the internal residual tensile stress by setting the thickness (1) to 3 (10) or less. On the other hand, if the thickness (1) is not reached (U em, the glass is subjected to air-cooling strengthening treatment. The thickness (1) is more preferably 0.15 to 2 cm, and further preferably My 5 (10). On the surface of the tempered glass sheet 10 (Ray) Shot & 私田I field shot first 20 incident surface) 12, the irradiation area 22 of the laser light 20 is preferably formed to have a round shape, and is preferably larger than 〇.18 surface and smaller than the tempered glass (4) The diameter of the thickness (φ). If the diameter (4) reaches the thickness of the tempered glass plate 1G, the laser light is illuminated. If the area 22 is too large, the heating area is too large, so that there is a case where a part of the cut surface (especially the cutting start portion or the cutting end result.) is slightly curved. The diameter (Φ) may also be less than 1.03 mm. Ancient ", when the right direct control (Φ) is 0.5 mm or less, the positional controllability of the crack 30 can be improved, and therefore, it is better. On the other hand, if the diameter (φ) becomes 〇18, the cutting accuracy is improved, and thus the mm is less than In the power control of the laser light 20, the power density becomes too high, and the cut surface becomes rough and a fine crack is formed. However, for example, if αΜ is smaller than, for example, 〇·1〇5 or less (the laser light absorption rate is 1% or less), even if power generation is uneven, the power density is not easily affected, so even the diameter is small. When (φ) is 018 mm or less, the cutting accuracy is also improved. Further, if the precision of the power control of the laser light is high, regardless of the value of axt, if the diameter 〇) is 〇 18 mm or less, the cutting accuracy is also improved. [Second Embodiment] Fig. 9 is an explanatory view showing a method of cutting a tempered glass sheet according to a second embodiment of the present invention. In Fig. 9, the same components as those in Fig. 8 are denoted by the same reference numerals and their description will be omitted. In the present embodiment, as in the first embodiment, the surface of the tempered glass sheet 10 is irradiated with the laser light 20, and the irradiation region 22 of the laser beam 2 is moved on the surface 12 of the tempered glass sheet 10 to cut the tempered glass. Board 1〇. Further, in the present embodiment, the absorption coefficient of the tempered glass sheet 10 with respect to the laser light 2 is cKcrn·1), and the thickness of the tempered glass sheet 1 is t (cm), and the tempered glass sheet 10 and the laser light 20 are obtained. When the formula of 〇<axt$3.0 is satisfied, the tempered glass sheet 10 is cut by the extension of the crack caused by the residual tensile stress of the intermediate layer 17. That is, the cracks 3 generated in the strengthened glass sheet 1 due to the residual tensile stress of the intermediate layer opening can be heated by heating the intermediate layer 17 in the irradiation region 22 of the laser light 2 at a temperature lower than the cold point. The extension of the squat is controlled. Therefore, in the present embodiment, the same effects as those of the third embodiment can be obtained. In addition to this, the present embodiment is as shown in Fig. 9, and the gas 4〇 is sprayed to 160223.doc.

S 201245063 The surface 12 of the tempered glass sheet 10 is moved on the surface 12 of the tempered glass sheet 10 so that the blasting region 42 of the gas 40 moves in conjunction with the illuminating region 22 of the laser light 20 (together with the illuminating region 22). The spray area 42 may be overlapped with the irradiation area 22 or may be disposed in the vicinity of the irradiation area 22. Further, the spray area 42 can be advanced beyond the illumination area 22, and the illumination area 22 can also be tracked. The gas 40 is not particularly limited, and for example, compressed air or the like can be used. The deposit (e.g., dust) adhering to the surface 12 of the tempered glass sheet 1 can be sprayed by the compressed air to prevent the deposit from absorbing the laser light. Thereby, overheating of the surface 12 of the tempered glass sheet 10 can be prevented. The gas 40 may also be a cooling gas for locally cooling the tempered glass sheet 1 'in this case _, the spraying area 42 of the gas 4 亦可 may also be as shown in FIG. 9 to be in the irradiation area 2 of the laser light 2 〇 The illumination area 22 is tracked in such a manner that the direction of movement of the 2 is near the rear. Thereby, a souther temperature gradient is generated in the vicinity of the moving white rear of the irradiation region 22 of the laser light, so that the tensile stress reaches the position of the characteristic value (ie, the position of the front end of the crack 3〇) and the laser light. The distance between the positions of 2〇 becomes shorter. Thereby, since the positional controllability of the crack 3〇 is improved, the cutting accuracy can be further improved. [Third Embodiment] Figs. 10A and 10B are explanatory views of a method of cutting a tempered glass sheet according to a third embodiment of the present invention. Fig. 10A is a cross-sectional view showing a cross section of a tempered glass sheet, and Fig. 10B is an enlarged plan view showing a surface of the tempered glass sheet. In Fig. 10A, the arrow direction indicates the flow direction of the gas. The same components as those in Fig. 1A and Fig. 9 are denoted by the same reference numerals in Fig. 1 and Fig. 10B, and the description thereof will be omitted. 160223.doc 201245063 In the second embodiment, the spray region a of the gas 4 is disposed in the vicinity of the irradiation region 22 of the laser light 20, whereas the present embodiment differs in that the laser light 2G is irradiated. The region 22 is disposed on the inner side of the outer edge of the spray region 42 of the gas 4 (). The other configuration is the same as that of the second embodiment, and therefore, the description will be focused on the differences. The gas 40 partially cools the cooling gas of the tempered glass sheet. The irradiation region 22 of the laser light 20 is disposed on the inner side of the outer edge of the ejection region 42 of the gas 4〇. The spray area 42 of the gas 40 is a region obtained by projecting the outlet 52 of the nozzle 50 as the discharge port of the gas jet onto the surface 12 of the strengthened glass sheet 10 in a direction parallel to the central axis 51 of the nozzle 5A. As shown in Fig. 10B, on the surface 12 of the tempered glass sheet 1, the irradiation region 22 of the laser beam 2 is disposed on the outer edge of the blasting region 42 of the gas 40, so that the tempered glass sheet can be reduced. The heating area. Thereby, a higher temperature gradient is generated in the vicinity of the irradiation region 22 of the laser light 20, and thus the distance between the tensile stress reaching the characteristic value (ie, the position of the front end of the crack 3 )) and the position of the laser light 20 is obtained. Shortened. Thereby, the positional control of the crack is improved, so that the cutting accuracy can be further improved. The nozzle 50 is formed in a cylindrical shape as shown, for example, and the laser light 2 permeable to the inside of the nozzle 50. The center (4) of the nozzle 5G and the optical axis 21 of the laser light 2q can be coaxially matched with the positional relationship between the spray area 42 of the gas 4G and the illumination area 22 of the laser light 2, and thus the positional relationship is not required to be changed. The situation is more effective. [Fourth Embodiment] 160223.doc -20-201245063 Fig. 11A and Fig. 11B are explanatory views showing a method of cutting a tempered glass sheet according to a fourth embodiment of the present invention. Figure 8 is a cross-sectional view taken along line A_A of Figure 11B. Plan view of a round tempered glass panel. The same components as those in Fig. 1A and the like are denoted by the same reference numerals in Fig. 11A and Fig. 11B, and the description thereof will be omitted. In the first embodiment, the laser light 20 is incident perpendicularly on the surface I2 of the tempered glass sheet 10. However, the present embodiment is different in that the laser light 20 is obliquely incident on the surface of the tempered glass sheet 10. Since it is the same as that of the second embodiment, the description will be focused on the differences. When viewed in the moving direction of the irradiation region 22 of the laser light 20, as shown in Fig. 11A, the laser light 2 is obliquely incident on the surface 12 of the tempered glass sheet 1 ,, and thus, the cut surface of the tempered glass sheet 1 变It has to be inclined with respect to the thickness direction. Thereby, the separation of the cut pieces obtained by the severing of the tempered glass sheet 10 in the thickness direction can be realized. As the incident angle β of the optical axis 21 of the laser light 20 becomes larger, the refraction angle 7 becomes larger according to Snell's law, and therefore, the inclination of the cut surface of the tempered glass sheet 1 Å becomes larger with respect to the thickness direction. . As the inclination becomes larger, the separation in the thickness direction after the cutting becomes easier. However, the chamfering of the cut surface after the cutting becomes troublesome. The incident angle β is set in accordance with the positional relationship between the optical axis 21 of the laser light 20 and the line to cut 11 on the surface 12 of the tempered glass sheet 1 . For example, in the case of the plan view (viewed from the thickness direction), when the optical axis 21 of the laser beam 2 is arranged perpendicularly to the line to cut 1 1 , the incident angle β is set at 1 to 60°. Within the scope. Further, in the plan view (viewed from the thickness direction), the optical axis 21 of the laser light 20 may be disposed obliquely with respect to the planned cutting line n. I60223.doc -21· 201245063 If the laser beam 20 is incident obliquely with respect to the surface 12 of the tempered glass sheet 10, the distance t/cosY is moved and then emitted from the back surface 14. In this case, since the strengthened glass plate 10 and the laser light 20 satisfy the equation of 0 <axt/cos YS 3.0, the laser light 20 is not absorbed near the surface 12 of the tempered glass sheet 1 and reaches the inside. Therefore, similarly to the first embodiment, the extension of the crack 30 generated in the tempered glass sheet 10 due to the residual tensile stress of the intermediate layer 17 can be controlled. Therefore, this embodiment can also obtain the same effects as those of the first embodiment. Further, in the present embodiment, as in the second and third embodiments, the gas 40 may be sprayed onto the surface 12 of the tempered glass sheet 10, and the gas 40 may be sprayed on the surface 12 of the tempered glass sheet 10. The attachment area 42 moves in conjunction with the illumination area 22 of the laser light 20. The spray area 42 of the gas 40 may be overlapped with the illumination area 22 of the laser light 20 or may be disposed adjacent to the illumination area 22 of the laser light 20. Further, the irradiation region 22 of the laser light 20 may be disposed on the inner side of the outer edge of the ejection region 42 of the gas. [Fifth Embodiment] Fig. 12 is an explanatory view showing a method of cutting a tempered glass sheet according to a fifth embodiment of the present invention. The same or corresponding components as those in FIG. 1A are denoted by the same or corresponding reference numerals, and their description will be omitted. In the first embodiment, the one tempered glass sheet 1 is cut, and the difference in the present embodiment is that a plurality of sheets (for example, three sheets) of the tempered glass sheets 10A to 10C are simultaneously cut in a layered state. Broken. For example, if a><t is less than 〇ι〇5 or less (the laser light absorption rate is 1% or less), most of the laser light irradiated to the surface of each tempered glass sheet 10 is transmitted. Product 160223.doc .. -22 -

S 201245063 The layers of tempered glass sheets 10 are cut at the same time. Since the other configuration is the same as that of the second embodiment, the description will be focused on the differences. In the present embodiment, the laser beam 20 is irradiated onto the surface (one main surface) ιι2 of the laminated body 11 by a laminate of the tempered glass sheets 1A to 1〇c, which is a natural number of 2 or more. The surface of the glass plate 1A1 to 1〇c is moved to the irradiation area 22 of the laser light 20, and the N piece of the tempered glass plate 10A to 100N is strengthened. The mutually different glass compositions, but preferably have the same glass composition. The β N sheet tempered glass sheets 10A to 10C may have mutually different thicknesses, but preferably have the same thickness. The N sheets of tempered glass sheets 1 〇 a to l〇c may have mutually different thermal expansion coefficients' but preferably have the same coefficient of thermal expansion. The N sheets of tempered glass sheets 10A to 10C may have mutually different absorption coefficients α, but preferably have the same absorption coefficient α. In the laminated body 110, the tempered glass sheets adjacent to each other (for example, the tempered glass sheet 10 Α and the tempered glass sheet 1 〇Β) may be joined or separated. Further, in the laminated body 110, a spacer such as a resin may be provided between the tempered glass sheets adjacent to each other (for example, the tempered glass sheet 10A and the tempered glass sheet 10B). The laser light 20 is incident perpendicularly to the surface (upper surface in the drawing) 112 of the laminated body 110. That is, the laser light 20 can be incident perpendicularly to the surfaces 12A to 12C of the respective tempered glass sheets 10A to 10C. Each of the tempered glass sheets 10A to 10C and the laser beam 20 has an absorption coefficient of the laser beam 10 to the laser light 20 of a/cm·1), and when the thickness of each of the tempered glass sheets 1 设为 is ti (cm), 0<aiXtiS3.0 (i is 1 or more and N or less is 160223.doc •23- 201245063 is a natural number). When the laser beam 20 is incident perpendicularly to the surfaces 12A to 12C of the tempered glass sheets 10A to 10C, the laser beam 20 is moved at the same distance as the thickness ti (cm) of each of the tempered glass sheets i 〇 A to 10C, and then emitted from the back surface. In this case, since each of the tempered glass sheets 10A to 10C and the laser light 20 satisfy the formula of 〇<aixtiS3.0, the laser light 20 is not absorbed near the surfaces 12A to 12C of the tempered glass sheets 10A to 10C. internal. Therefore, similarly to the first embodiment, the stretching of the cracks generated in the tempered glass sheets 10A to 10C due to the residual tensile stress of the intermediate layers of the tempered glass sheets 10A to 10C can be controlled. Therefore, in the present embodiment, the same effects as those in the first embodiment can be obtained. Further, in the present embodiment, as in the second and third embodiments, the gas U 4 may be sprayed onto the surface U2 of the laminated body 11 , and the gas 40 may be sprayed on the surface 112 of the laminated body 11 . The attachment area 42 moves in conjunction with the illumination area 22 of the laser light 20. The spray region 42 of the gas may be overlapped with the irradiation region 22 of the laser beam 2 or may be disposed in the vicinity of the irradiation region 22 of the laser beam 2 . Further, the irradiation region 22 of the laser light 20 may be disposed on the inner side of the outer edge of the spraying region 4 2 of the gas 40. Further, in the present embodiment, the laser beam 2 is incident perpendicularly on the surfaces 12A to 12C of the tempered glass sheets 10A to 10C. However, as in the fourth embodiment, the laser light 20 may be obliquely incident on each of the tempered glass sheets. 〇A~1〇〇 surface 12A~12C. In this case, the angle of refraction of the laser light 20 on the surface 12A-12C of each of the tempered glass sheets 1A to 1〇c is set to i, and each of the tempered glass sheets 1〇 and the laser light 20 satisfies 〇<aiXti/ c〇SYig 3 〇 (丨 is an arbitrary number of i or more and N or less). 160223.doc

S -24·201245063 EXAMPLES Hereinafter, the present invention will be specifically described by way of examples, but the present invention is not limited by the examples. [Examples ～ 1-4] (Production of chemically strengthened glass sheet) The glass raw material prepared by mixing a plurality of kinds of raw materials is melted, and the molten glass is formed into a plate shape and then cooled to room temperature. Cutting, cutting, and double-sided mirror polishing were performed to prepare a glass plate having a specific thickness of mm x 50 mm as a glass plate for chemical strengthening. The glass raw material was prepared by changing the absorption coefficient of the laser light to the desired value of the laser light to change the amount of the iron oxide (Fe2〇3) powder for the same blending ratio of the substrate. Each of the glass sheets for chemical strengthening is expressed by mass% of the oxide standard.

Si02: 60.7. /〇, Al2〇3: 9.6%, MgO: 7.0%, CaO: 〇·1〇/0, SrO: 0.1%, BaO: 〇·1%, Na20: 11.6%, Κ2〇: 6.0〇/〇,

Zr〇2: 4.8%, and contains a specific amount of iron oxide (Fe2〇3) in a new ratio. Each of the chemically strengthened glass sheets was prepared by impregnating the above-mentioned chemical strengthening glass plate with KN〇3 molten salt, followed by ion exchange treatment, and then cooling to room temperature. The treatment conditions such as the temperature of the KN〇3 molten salt or the impregnation time are set such that the internal residual tensile stress (CT) reaches a desired value. The internal residual tensile stress (CT) of each chemically strengthened glass plate is measured by a surface stress meter FSM-6000 (manufactured by Ohara, Ltd.) to determine the surface compressive stress (CS) and the depth of the compressive stress layer (DOL), and according to the measurement. The value and the thickness (t) of the chemically strengthened glass plate were calculated by the following formula (1). 160223.doc •25· 201245063 CT=(CSxDOL)/(t-2xDOL) (1) As a result of the measurement, the surface layer and the back layer of each chemically strengthened glass plate have the same thickness and the same maximum compressive stress. Incidentally, when the surface layer and the back layer have different thicknesses and different maximum compressive stresses, the internal residual tensile stress (ct) is calculated by the following formula (II). CT=(ClxDl/2+C2xD2/2)/(t-Dl-D2) (〇) In the above formula (II), 'Cl is the maximum residual compressive stress of the surface layer, and D1 is the thickness of the surface layer' C2 It is the maximum residual compressive stress of the back layer, and D2 is the thickness of the back layer. (Cutting of Chemically Strengthened Glass Sheet) The cutting of the chemically strengthened glass sheet is carried out by the cutting method shown in Figs. 1A and 1B. At the cutting start position on the side of each chemically strengthened glass plate, an initial crack was formed by using a silicon knife in advance, and no scribing was formed on the surface of each chemically strengthened glass plate. The source of the laser light is a fiber laser (central band: 1〇75~ι〇95 nm). The absorption coefficient of the laser light for each chemically strengthened glass plate was measured using a violet visible near-infrared spectrophotometer Lambda 950. The optical axis of the laser light is arranged orthogonal to the surface of each chemically strengthened glass plate. The irradiation light of the laser light was applied to the surface of each chemically strengthened glass plate, and one end (initial crack) of the predetermined line was moved at a constant speed of 1 mm/sec 2 over 50 mm to the other end. The cutting line as the center line of the moving path is set to be linear parallel to one side of the rectangular chemically strengthened glass plate and 160223.doc

-26 - S 201245063 The distance from one side is set to 1 〇 mm. The shape of the area irradiated by the laser light is rounded. The condensing position of the laser light is disposed at a position of -10.3 to 20 mm from the surface (upper surface) of each chemically strengthened glass plate (the upper surface is the reference and the upper side (the light source side) is set to be positive). The concentration angle of the laser light is set to 14 to 33 4 . . (Evaluation of cutting result) The cutting result was evaluated by (1) cutting, (2) cutting end quality, cutting surface quality, and (4) maximum offset. (1) Whether the cutting system can cut the predetermined line and cut the chemically strengthened glass sheet is also a flaw, and it is impossible to control the stretching of the crack and the crack is freely stretched away from the cutting line and cannot be cut to cause the glass to be crushed. The situation is set to "X". (2) The cut-off surface was visually observed to cut the surface, and the end portion (the beginning portion and the end portion of the cut) of the cut surface was evaluated as a flat surface. The end of the cut surface is set to "〇", and the end of the cut surface is set to "X". () The σσ texture of the knife section was visually observed to cut the surface, and 5 cracks were performed on whether there was a crack on the cut surface. If the crack is not recognized as "0", the crack can be recognized as "X". In addition, even if the (2) cut end quality or (3) the cut surface quality is evaluated as "Iw shape", the cutting accuracy can be used depending on the application. (4) The maximum offset system 矣 _ # , , is not the extent to which the cutting line on the surface of the chemically strengthened glass plate deviates from the line to cut 'and is orthogonal to the cutting line. Doc -27- 201245063 The change in direction is the result of the increase. The most A offset amount is obtained by measuring other than the cutting start portion and the cutting end portion. The S parity result is shown together with the cutting conditions and the like. [Table 1] Example 1-1 Example 1-2 Example 1-3 Example 1·4 Light source output (W) ·— ___1 180 200 50 ~~~---- 4 Laser light concentrating angle (°) 1.4 1.4 1.4 33.4 Concentration position (mm) 12.4 12.4 12.4 ---- -0.8 φ (mm) 0.3 0.3 0.3 ----- L 0,5 tempered glass CT (MPa) 68.2 115 43.6 —--~~~— 65.5 t (cm) 0.05 0.05 0.14 "------ 0.07 a(/cm) 0.09 0.09 0.48 ~383~ a(/cm)xt(cm) 0.0045 0.0045 0.0672 — 2.68 Can I cut off 〇 ---- ---— 0 Cut end quality 〇Ο 〇 〇 〇 cut surface quality 〇〇〇 ' 〇 maximum offset (mm) 0 0 0 0 1-1 to 1-4 shown in Table 1 Among them, the evaluation of whether the cut end quality and the cut surface quality can be cut or cut is "〇", and the maximum offset is 0 mm. [Example 1-5 to Example 1-10] Example 1-5 to Example 1-10 (Comparative Example) are different from Examples 1-1 to 1-4 (Example) in making the thickness (t) x absorption coefficient ( The value of α) is greater than 3.0, and the test chemically strengthens the cutting of the slab. In Example 1-5, except for changing the thickness (1), it was produced in the same manner as in Example 1-4. -28 - 160223.doc

S 201245063 tempered glass plate' and moved the irradiated area of the laser light on the produced chemically strengthened glass plate. Example 1-6 to Example 1-10 except that a carbon dioxide laser (wavelength: 1 〇 6 〇〇 nm) is used as a light source of laser light and the absorption coefficient (α) is changed (example _6 to case 1-8 is also changed) A chemically strengthened glass plate was produced in the same manner as in Example 1-2 except for the thickness (t), and 'the irradiation region of the laser light was moved on the produced chemically strengthened glass plate. In order to extend the irradiation time of the laser light, the heat transfer time is ensured, and the irradiation area of the laser light on the surface of the tempered glass plate is set to be an elliptical shape long in the moving direction (the length is ^^ claw, the width is 3 mm) ). The evaluation results are shown in Table 2 together with the cutting conditions and the like. 160223.doc -29- 201245063 [<N<] Example 1-10 1 1 1 46.7 0.05 1000 or more 50 or more X 1 1 Example 1-9 1 1 1 00 (N 0.05 1000 or more 50 〇X 〇0.35 Example 1 -8 CN 1 1 1 25.2 0.09 1000 or more 90 or more X 1 1 Example 1-7 1 1 1 18.1 0.09 1000 or more 90 or more 〇X 〇Example 1-6 CN 1 1 1 15.3 0.09 1000 or more 90 or more 〇X 〇 1-5 inch 33.4 00 〇5 38.3 3.83 X 1 1 1 Light source output (W) Concentration angle (°) Concentration position (mm) φ (mm) CT(MPa) t(cm) a(/cm) a( /cm)xt(cm) Can cut the cut end quality cut surface quality maximum offset (mm) Laser light tempered glass 160223.doc -30-

S 201245063 According to Tables 1 and 2, it is understood that the chemically strengthened glass sheet can be cut with good cutting precision by setting the value of the thickness (t) x absorption coefficient (α) to 3.0 or less. If the thickness (t) x absorption coefficient (α) exceeds 3.0, the cutting cannot be performed, or even if the cutting is possible, the maximum offset is large, and the cutting accuracy is poor. [Example 2-1 to Example 2-20] Example 2-1 to Example 2-20 (Example) The internal residual tensile stress (CT) was analyzed after changing the chemical strengthening treatment conditions and adjusting the internal residual tensile stress (ct). ) the relationship with the maximum offset. The production, cutting, and evaluation of the chemically strengthened glass plate were the same as in Examples 1-4. The evaluation results are shown together with the cutting conditions in Tables 3 to 5. 160223.doc -31 - 201245063 [εί Example 2-7 〇〇36.3 0.07 tn 0.021 〇〇〇0.15 Example 2-6 〇(N m 〇27.9 0.09 00 Ο 0.072 〇〇〇<N Example 2-5 % inch·沄in c> 27.9 0.09 00 ο 0.072 〇〇〇0.15 Example 2-4 inch · CN rn 27.8 0.09 ΓΛ ο 0.027 〇〇〇0.15 Example 2-3 〇沄27.8 0.09 ΓΟ Ο 0.027 〇〇〇1—^ Example 2 2 i 〇11.4 ΓΛ o 21.4 2.99 0.299 〇〇〇例2-1 00 21.4 2.99 0.299 〇〇〇(N Ο Light source output (W) Concentration angle (°) Concentration position (mm) φ (mm) CT(MPa ) t(cm) a(/cm) a(/cm)xt(cm) Can cut the cut end quality cut surface quality maximum offset (mm) Laser light tempered glass -32· 160223.doc 201245063 -ee· ^〇Ρ'ίΖΖ09\ Maximum offset (mm) Cut surface quality Cut end quality Can cut P 3 X £ P 3 Strengthened glass laser light star 〇Η 2 -Θ- Spot position ( Mm) Concentration angle (°) Light source output (W) 〇〇〇〇0.021 〇UJ 0.07 36.3 〇U) to Example 2-8 0.15 〇〇〇0.056 〇bo 0.07 36.5 〇N) g Example 2-9 〇〇〇 〇0.056 Bo 0.07 36.5 〇k) 00 Example 2-10 〇〇〇〇0.0336 0.48 0.07 40.8 ο Ιλ Μ Example 2-11 〇〇〇〇0.084 l>-<· k) 0.07 40.8 ο U) »—» K> 2-12 〇〇〇〇0.0672 0.48 0.14 43.6 ο ▲ ON Ο Example 2-13 〇〇〇〇0.0672 0.48 0.14 43.6 ο UJ Ν> »—· Lh Ο Example 2-14 [>4] 201245063 Example 2-20 〇1 11 <<N m Ο 74.6 0.06 oo ο 0.048 Example 2-19 〇〇CN ο 74.6 | 0.06 00 ο 0.048 Example 2-18 〇 inch · (N ο 50.8 0.14 CN 0.168 〇〇〇〇例2-17 污ο 50.8 0.14 cs 0.168 〇〇〇〇例2-16 卜 in cn m ο 47.4 ^—4 〇2.99 0.299 〇〇〇〇例2-15 卜〇〇ο 47.4 Ο 2.99 0.299 〇〇〇〇 light source output (W) concentrating angle (°) concentrating position (mm) Ν surface V—* CL, Ο X X X* 1 Can cut the cut end quality quality cut surface quality maximum offset Amount (mm) Laser light tempered glass 160223.doc -34- s 201245063 According to Table 3 to Table 5, the internal residual tensile stress (CT) is set to 30 MP. A or more can make the extension of the crack of the residual tensile stress become dominant, so that the maximum offset can be 0 mm. [Example 3-1 to Example 3-8] Irradiation area of laser light t size and shape

The valence result and the cutting condition, etc. Example 3-1 to Example 3·8 (Example) were changed to the shape of the inch on the surface of the chemically strengthened glass plate, and the result of s-cutting was cut. The chemical strengthening system was set to be the same as in Examples 1-1 to 1-4. The items are shown in Table 6. 160223,doc 35- 201245063 Γ--|9崦] Example 3-8 卜-10.3 S 21.4 2.99 0.299 〇X 〇(N 〇Example 3-7 〇1 11.4 00 inch 0.95 21.4 2.99 0.299 〇〇〇CN 〇Example 3 -6 00 00 21.4 T-t 2.99 0.299 〇〇〇<N 〇例3-5 〇〇1 0.18 21.4 2.99 0.299 〇〇X 0.15 Example 3-4 -10.3 s 47.4 F· M 2.99 0.299 〇X 〇〇Example 3-3 〇〇Ο 47.4 2.99 0.299 〇〇〇〇 Example 3-2 ο 47.4 r M 2.99 0.299 〇〇〇〇rA 5 〇〇 1 0.18 47.4 2,99 0.299 〇〇X 〇Light source output (W) Spotlight Angle (°) Concentration position (mm) φ (mm) CT(MPa) t(cm) a(/cm) a(/cm)xt(cm) Can cut off the quality of the cut end----1 The maximum offset of the cut surface quality (mm) Laser light tempered glass -36- 160223.doc 201245063 According to Table 6, it can be seen that when the irradiated area of the laser light is formed into a circular shape on the surface of the tempered glass or the tempered glass sheet If the diameter (4) is greater than 18 and less than the thickness of the chemically strengthened glass plate (1 () _), the quality of the cut end or the quality of the cut surface is better. When the diameter Μ is 0.18, the cut is cut. Broken There are fine cracks on the surface. Also, when the diameter (Φ) is 1.03 mm, the end of the cut surface is slightly curved. [Example 4-1 to Example 4-4] Example 4] ~ Example 4_4 The relationship between the maximum laser scanning distance of the chemically strengthened glass = (free stretching without cracking or pulverization of glass) and the diameter of the laser light on the surface of the strengthened glass plate is analyzed by using the cutting line (4). The mass % of the oxide standard means that si〇2 : 6 〇 、 %, A1203 : 12 articles, Mg 0 : 6.6%, Ca 〇: G 1%, Sr 〇: 〇 2%,

Ba〇: 0.2%, Na2〇: 12.2%, K2〇: 5 states, Zr〇2: i 〇% are as each chemically strengthened glass plate. In each chemically strengthened glass plate, the surface compressive stress (cs) was 735 MPa, the depth of the compressive stress layer was φ 〇Ι 512 (μηι), and the internal tensile stress (CT) was 38 (MPa). The cutting of each chemically strengthened glass plate (300 mm x 300 mm x 1 mm) was carried out by the cutting method shown in Figs. 10A and 10B. The initial cracks were formed in advance by the boring tool at the cutting start position of the side faces of the chemically strengthened glass sheets, and no scribe lines were formed on the surfaces of the respective chemically strengthened glass sheets. The outlet of the nozzle is a circle having a diameter of 2 mm, and is disposed at a position 3 mm from the gap G (refer to Fig. A) between the surface of each of the reinforced glass sheets of 160223.doc • 37- 201245063. The compressed air at room temperature was sprayed from the outlet of the nozzle toward the surface of each chemically strengthened glass plate at a flow rate of 100 L/min. The central axis of the nozzle and the optical axis of the laser light are coaxially arranged to be orthogonal to the surface of each of the chemically strengthened glass sheets. A fiber laser (central wavelength: 1 〇 7 〇 nm) is used as the light source of the laser light. The absorption coefficient of the laser light for each chemically strengthened glass plate was measured using an ultraviolet visible near-infrared spectrophotometer Lambda 950. The condensing position of the laser light is disposed at a position above the surface of each chemically strengthened glass plate from 0 to 2.8 mm (opposite side of the back surface). The spotlight angle of the laser light is set to 4°. In the same plane as the surface of each chemically strengthened glass plate, the center of the laser light is moved from one end to the other end from one end of the line to cut. The line to be cut as the moving path is formed in a straight line parallel to one side (short side) of each of the rectangular chemically strengthened glass sheets, and the distance from one side is set to 10 mm. In the same plane as the surface of each chemically strengthened glass plate, the diameter of the laser light is set to 0.2 mm, and the center of the laser light is moved by 15 mm at a speed of 2.5 mm/sec from the cutting start end, and then During the period of 5 mm in the laser light, and further moving 5 mm, the diameter of the laser light is the diameter shown in Table 7. Thereafter, the moving speed of the laser light is accelerated to the target speed and maintained at the target speed. The maximum speed at which the cutting can be performed is shown in Table 7. 160223.doc

S -38· 201245063 [Table 7] Example 4-1 Example 4-2 Example 4-3 Example 4-4 Light source output (W) 120 120 120 120 Laser light collecting angle (°) 4 4 4 4 Concentrating position ( Mm) 0 0.7 1.4 2.8 φ (mm) 0.02 0.05 0.1 0.2 tempered glass CT (MPa) 38 38 38 38 t(cm) 0.11 0.11 0.11 0.11 a(/cm) 0.09 0.09 0.09 0.09 a(/cm)xt(cm) 0.010 0.010 0.010 0.010 Maximum speed at which cutting can be performed (mm/s) 60 60 50 30 According to Table 7, when the light source output is constant, the surface of the chemically strengthened glass plate can be changed with the diameter of the laser light. Small, while improving the scanning speed of laser light. The reason is that when the output of the laser light source is constant, the obstacle is 1 "on the surface of the chemically strengthened glass plate, as the diameter of the laser light becomes smaller, the power density of the laser light (w/mm2) rises, so that the heating can be shortened. time. [Example 5-1 to Example 5-2] Example 5-1 to Example 5_2 are the minimum light source output for cutting the chemically strengthened glass sheet (free stretching without cracking or pulverization of glass) by cutting the predetermined line. Analyze with the use of the nozzle. A glass having the same composition as in Example 4-1 (cs = 699 (Mpa), D 〇 L = 64.8 (_, CT = 46.7 (MPa)) was used as each chemically strengthened plate. Each chemically strengthened glass plate (10) _100 _ χ 11 Cut off the line 160223.doc -39- 201245063 by the cutting method shown in Fig. 10A and Fig. 1 OB. The initial crack is formed by using a file in advance at the cutting start position of the side surface of each chemically strengthened glass plate. The surface of the chemically strengthened glass plate is not lined. The fiber laser (central wavelength. 1070 nm) is used as the light source of the laser light. The absorption coefficient of the laser light for each chemically strengthened glass plate is UV-visible near-infrared spectrophotometer Lambda. The measurement was performed at 950. The condensing position of the laser light was placed at a position above 0 mm (opposite side of the back surface) from the surface of each chemically strengthened glass plate. The condensing angle of the laser light was set to 8.9°. The surface of the tempered glass plate is moved in the same plane, and the center of the laser light is moved from 15 〇mm to the other end from one end of the cutting line. The cutting line for the moving path is set to be a chemically strengthened glass plate with a rectangular shape. It One side (short side) is parallel and straight, and the distance from one side is set to 10 mm. In the same plane as the surface of each chemically strengthened glass plate, the diameter of the laser light is set to 0.2 mm, and the laser light is made. The center of the cutting line is moved by 15 mm at a speed of 2.5 mm/sec from the cutting start end of the cutting line, and then the diameter of the laser light is reduced from 0.2 mm to φ during the movement of the center of the laser light by 5 mm. _1 mm. Thereafter, the moving speed of the laser light is accelerated to the target speed (10 mm/Sec)' and maintained at the target speed. At the beginning of the cutting, the slower moving speed is caused by the formation of cracks. In Example 5-1, the nozzle was not used, and in Example 5_2, the nozzle was used to spray the cooling gas on the surface of the chemically strengthened glass plate. The surface of the chemically strengthened glass plate was orthogonal to the central axis of the spray S. The optical axis of the laser light is coaxially arranged 160223.doc -40- 201245063. The nozzle has a circular diameter of 丨mm and is disposed in the gap G between the surface of each chemically strengthened glass plate (refer to FIG. 10A). Positioned to 2, at 15 L/min Amount '(iv) the temperature of the line from the outlet of the nozzle toward the surface of the glass chemically strengthened each injection would be minimal cut of the light output are shown in Table 8. [Table 8]

According to Table 8, it can be seen that the discharge of the light source can be reduced by using the nozzle for ejecting the cold portion by using the middle and the human λ. [Example 6-1 to Example 6-5] Example "~Example 6.5 is the minimum light source output that can be cut by chemical cutting glass by cutting line: (free stretching without cracking or pulverization of glass), The relationship between the condensed positions of the laser light was analyzed. The glass with the same fineness, and the same physical properties as in Example 5-1 (CS=699 (MPa) ' DOL=64 sr , ... · 8 (μηι), CT= 46.7 (MPa)) as a tempering 160223.doc 201245063 tempered glass plate. The cutting of each chemically strengthened glass plate (150 mm x 100 mm x 1.1 mm) was carried out by the cutting method shown in Fig. 10A and Fig. 1 OB. The cutting start position of the side of each chemically strengthened glass plate was previously formed by a knife to form an initial crack, and no scribing was formed on the surface of each chemically strengthened glass plate. A fiber laser (central wavelength: 1070 nm) was used as the laser light. Light source. The absorption coefficient of laser light for each chemically strengthened glass plate is measured by UV-visible near-infrared spectrophotometer Lambda 950. The center of the laser light is self-cut in the same plane as the surface of each chemically strengthened glass plate. One end of the wire is moved over 150 mm to the other end The line to be cut as the moving path is formed in a straight line parallel to one side (short side) of each of the rectangular chemically strengthened glass sheets, and the distance from one side is set to 10 mm. In the same plane of the surface, the diameter of the laser light is set to 0.2 mm, and the center of the laser light is moved by 15 mm at a speed of 2·5 mm/sec from the cutting start end of the planned cutting line, and then When the center of the light is moved by 5 mm, the diameter of the laser light is reduced by ο.! mm. The movement speed of the laser light is accelerated to the target speed (1G mm/Sec), and The target speed is maintained. The reason for the slower moving speed at the start of cutting is the time required for the formation of cracks. The position of the laser light at the position of the laser light is set at a period of low speed and is set in comparison with the chemically strengthened glass. The surface of the board is at a position above l3 mm (the opposite side of the back side). #The speed of movement of the laser light is changed from low speed to high speed, and the position of the concentrated light of the laser light is changed.

S _3.doc .42. 201245063 The position is set at a position 〇4 mm from the surface of the chemically strengthened glass plate in Example 6-1, and is set on the surface of the chemically strengthened glass plate in Example 6_2. The position set in the center of the thickness direction of the chemically strengthened glass plate in Example 6-3 'the position set on the back surface of the chemically strengthened glass plate in Example 6-4' is set in the chemically strengthened glass plate in Example 6-5. The back side is located 0.4 mm below. The central axis of the nozzle is disposed in the same manner as the optical axis of the laser beam, and is disposed in the same manner as the optical axis of the laser beam. The outlet of the nozzle is a circular shape having a diameter of 1 mm, and is disposed at a position of 2 _ between the gap 0 (refer to Fig. 1A) between the surfaces of the respective chemically strengthened glass sheets. At a flow rate of 15 L/min, room temperature compressed air was sprayed from the outlet of the nozzle toward the surface of each chemically strengthened glass plate. The minimum light source output that Jia Wei will cut off is shown in Table 9. 160223.doc 43· 201245063 [6嵴] Example 6-5 46.7 0.11 0.09 0.010 from the bottom of the back side Example 6-4 rH 46.7 0.11 0.09 0.010 Example 6-3 ψ 板 Plate thickness center 46.7 0.11 0.09 0.010 Example 6-2 Surface 46.7 0.11 0.09 0.010 Example 6-1 Η 46.7 above the surface ο 0.09 0.010 〇 light source output (W) φ (mm) Focus position CT (MPa) t (cm) a (/cm) a (/cm) xt ( Cm) Can the laser light tempered glass be cut off. 44-160223.doc s 201245063 According to Table 9, it is understood that 'to reduce the light source output' is preferably the spotlight position of the laser light between the surface and the back of the chemically strengthened glass plate, and It is better to be as close as possible to the back. [Example 7-1 to Example 7_2] Examples 7-1 to 7_2 are analyses for the ability of the chemically strengthened glass sheets of different glass compositions to be cut off. Example 7-1 was a cut of a chemically strengthened glass plate having the same composition as in Example 4-1. On the other hand, Example 7-2 shows that SiO2 is contained in an amount of SiO 2 : 62.0%, a1203: 17.1%, MgO: 3.9%, CaO: 〇·6%, Na2〇: 12.7%, K20: 3.5. . /. , Sn02 : 〇.3〇/0 chemically strengthened glass plate cutting. The cutting of each chemically strengthened glass plate (120 mm x 100 mm x 〇. 8 mm) was carried out by the cutting method shown in Fig. 10A and Fig. 10B. The initial cracks were formed in advance by the boring tool at the cutting start position of the side surface of each of the chemically strengthened glass sheets, and no scribe line was formed on the surface of each of the chemically strengthened glass sheets. A fiber laser (central wavelength: 1070 nm) was used as the light source for the laser light. The absorption coefficient of the laser light for each chemically strengthened glass plate was measured using an ultraviolet visible near-infrared spectrophotometer Lambda 950. The center of the laser light is moved from one end of the line to the other end to the other end in the same plane as the surface of each of the chemically strengthened glass sheets. As shown in FIG. 13, the line to cut 11 as a moving path includes two linear portions (length 55 mm) ll-1, 11-4, and two linear portions 1M, 11-4. 2 curved parts (1 / 4 round orphans with a radius of 5 mm) 11-2, 11-3. I60223.doc •45- 201245063 Set the diameter of the laser light to 0.2 mm in the same plane as the surface of each chemically strengthened glass plate, and make the center of the laser light 2.5 mm from the cutting start end of the cut line. The speed of /sec is moved by 15 mm, and then the diameter of the laser light is reduced from 0.2 mm to 〇_i mm during the movement of the center of the laser light by 5 mm. Thereafter, the moving speed of the laser light is accelerated to the target speed (10 mm/Sec) and maintained at the target speed. At the start of cutting, the reason why the moving speed is slow is that the formation time of the cracks is β. The light collecting position of the laser light is disposed at a position above 0 mm (opposite side of the back surface) from the surface of each chemically strengthened glass plate. The spotlight angle of the laser light is set to 8.9. . The central axis of the nozzle is disposed coaxially with the optical axis of the laser light in a manner orthogonal to the surface of each of the chemically strengthened glass sheets. The outlet of the nozzle is directly controlled to have a circular shape of 2 mm, and is disposed at a position 3 mm from the gap G (refer to Fig. 1A) between the surfaces of the respective chemically strengthened glass sheets. At a flow rate of 50 L/min, room temperature compressed air was sprayed from the outlet of the nozzle toward the surface of each chemically strengthened glass plate. The evaluation results of the cut and the cutting conditions are shown in Table 丨〇. [Table 10] Example 7-1 Example 7-2 Laser light source output (W) 37.5 200 Concentration angle (°) 8.9 8.9 Condensation position (mm) 0 0 φ (mm) 0.1 0.1 Reinforced glass C1 (MPa) 37.4 48 t(cm) 0.08 0.08 a(/cm) a(/cm)xt(cm) 0.09 0.04 0.007 0.003 Can I cut off Ο 46•46· 160223.doc

S 201245063 According to Table 10, the glass composition of the chemically strengthened glass plate is not particularly limited. [Examples 8 - 1 to 8 2] Examples 8-1 to 8 2 were irradiated with laser light in the same manner as in Example 5-2 except that the laser light was obliquely incident on the surface of the chemically strengthened glass plate (see 圊11Α and Fig. 11A). The illuminated area moves on the surface of the chemically strengthened glass sheet. The evaluation results are shown in Table i together with the cutting conditions and the like. [Table 11] Example 8-1 Example 8-1 Light source output (W) 60 60 Laser light φ (mm) 0.1 0.1 Incident angle β (°) 23.0 40.0 Refraction angle γ (°) 15.1 25.4 Reinforced glass CT (MPa) 46.7 46.7 t(cm) 0.11 0.11 a(/cm) 0.09 0.09 a(/cm) χ t(cm)/cosy 0.010 0.011 Can it be cut? The angle of inclination of the cut surface is 14.4 23.2 According to Table 11, it can be seen that 'by making The laser light is incident obliquely on the surface of the chemically strengthened glass plate, and the cut surface is inclined with respect to the thickness direction. Further, it can be seen that the inclination angle of the cut surface is substantially the same as the angle of refraction of the laser light. [Example 9] Example 9 is an analysis of whether or not the laminated body obtained by laminating three sheets of chemically strengthened glass sheets can be cut. I60223.doc -47- 201245063 Three glasses of chemically strengthened glass were used for the same composition and the same physical properties as in Example 4-1 (CS=735 (MPa), DOL=51.2 (pm), CT=37.7 (MPa)). board. Three sheets of chemically strengthened glass sheets (15 〇 mm x 100 mm x 1.1 mm) were simultaneously cut using the cutting method shown in Fig. 12. The initial crack was formed in advance by the trowel at the cutting start position of the side surface of each chemically strengthened glass plate, and no scribe line was formed on the surface of each chemically strengthened glass plate. A fiber laser (central band: 1075 to 1095 nm, light source output: 80 W) is used as a light source for laser light. The absorption coefficient of the laser for each chemically strengthened glass plate was measured using an ultraviolet visible near-infrared spectrophotometer Lambda 950. The concentrating position of the laser light is disposed at a position 9 mm above the upper surface of the laminated body. The concentration angle of the laser light is set to 16 〇. The diameter of the laser light in the same plane as the upper surface of each chemically strengthened glass plate is 0.24 mm, 0.27 mm, and 0.30 mm from the top, respectively. In the same plane as the upper surface of each chemically strengthened glass plate, the center of the laser light is moved from 150 mm to one end at a constant speed of 2.5 mm/sec from one end of the predetermined line to be cut off as a moving path. The line system is formed in a straight line parallel to one side (short side) of the rectangular chemically strengthened glass plate, and the distance from one side is set to 丨〇mm. As a result, the three sheets of chemically strengthened glass sheets can be simultaneously cut along the line to be cut. No free stretching of the crack or smashing of the glass was observed. [Example 10-1 to Example 10-2] Example 10-1 to Example 10-2 are for dividing the air-cooled tempered glass sheet by 160223.doc

S •48· 201245063 Analysis. The glass raw material prepared by mixing a plurality of raw materials is dissolved, and the molten glass is formed into a plate shape, and then cooled to near room temperature, and then cut, cut, and double-sided mirror-polished to prepare each air-cooled tempered glass. board. During the cooling process, the surface of the glass near the softening point is quenched from the surface and the back surface to form a surface layer of residual compressive stress and the condition of the back layer β quenching is achieved by internal residual tensile stress (CT). The value of each air-cooled tempered glass plate is based on the mass% of the oxide, which means that SiO 2 : 72.4% ' Al2 〇 3 : 1.9% ' MgO : 3.8% ' CaO : 8.3% ' Na20 : 12.7% , K20 : 1.0%. The maximum residual tensile stress (CM) of each of the air-cooled tempered glass sheets was measured by a surface stress meter FSM-6000 (manufactured by Ohara, Ltd.) to measure the surface compressive stress (cs), and the following formula was used based on the measured value (ΙΠ ) is calculated by calculation. CM=CS/a (ΙΠ) In the formula (III), the constant determined by the temperature at the start of quenching of the glass, the quenching rate of the glass, and the thickness of the glass, is usually 2.2 to 25 Within the scope. In Example 10-1 to Example 10-2, 2.35 was used as the value of a. The cutting of each of the air-cooled tempered glass sheets (300 mm x 300 nnnx 5 mm) was carried out by the cutting method shown in Figs. 1A and 1B. The side surface of each of the air-cooled tempered glass sheets is previously ground by the rotating grindstone before cutting, so that the cutting start position of the side of the cold tempered glass sheet of each wind 160223.doc -49- 201245063 is before the cutting No initial cracks were formed. Further, no scribe line was formed on the surface of each of the air-cooled tempered glass sheets. A fiber laser (central wavelength: 1070 nm) was used as the light source for the laser light. The absorption coefficient of the laser light for each of the air-cooled tempered glass sheets was measured using an ultraviolet visible near-infrared spectrophotometer Lambda 950. The optical axis of the laser light is arranged orthogonal to the surface of each of the air-cooled tempered glass crucibles. The condensing position of the laser light is disposed at a position above the surface of each of the air-cooled tempered glass sheets by 25.6 mm (the opposite side of the back surface). The concentrating angle of the laser light is set to 8.9°. In the same plane as the surface of each of the air-cooled tempered glass sheets, the center of the laser light is moved from 3 〇〇 mm to the other end from one end of the line to cut. The line to be cut as the moving path is set to be linear with one side (short side) of each of the rectangular air-tempered tempered glass sheets, and the distance from one side is set to 20 mm. In the same plane as the surface of each of the air-cooled tempered glass sheets, the irradiated area of the laser light is a circular shape having a diameter of 4 mm and moved at a constant speed of 2.5 mm/sec. On the surface of each air-cooled tempered glass sheet, the laser light source output is set to 2 in Example 1 〇 1 1 during the position of the laser light within a distance of 丨 5 mm from the start end of the cut. W, set to 240 W in Example 1 〇-2, and then set to 10 〇w. 160223.doc

S •50· 201245063 [Table 12] Example 10-1 Example 10-2 I—100 Light source output (W) 100 Laser light collecting angle (°) 8.9 8.9 ~~ Spotting position (mm) 25.6 25.6 φ (mm) 4 — — 4 tempered glass CT (MPa) 55 81 t(cm) 0.5 _ _ 0.5 a(/cm) 0.57 0.57 a(/cm)xt(cm) --------- 0.285 0.285 ~~ No cut--------L --------- According to Table 12, the present invention can be applied to an air-cooled reinforced glass sheet. The embodiments and examples of the present invention have been described above, but the present invention is not limited to the above-described embodiments and the above-described embodiments, and various modifications and changes can be made without departing from the spirit and scope of the invention. For example, as shown in Fig. 6 of the above embodiment, when the film 18 is formed on the surface 12 of the tempered glass sheet 1 , the film 18 may be removed along the line to cut by pulse laser irradiation. Broken. The method of removing the film 18 is not limited to the use of laser light such as a pulsed laser, as long as it can be removed by a mechanical method or the like. This application is based on the patent application No. 201 1-003496, which was applied to the Patent Office on January 11, 2011, and the Japanese Patent Office on August 31, 2011. No. 190024 claims the priority of the Japanese Patent Application No. 2011-003496, and Japanese Patent Application No. 2 〇 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1A is an explanatory view (1) of a method of cutting a tempered glass sheet according to a first embodiment of the present invention. Fig. 1B is a schematic view showing a method of cutting a tempered glass sheet according to a first embodiment of the present invention. Fig. 2A is a schematic view showing an example of distribution of residual stress of a chemically strengthened glass sheet before irradiation with laser light. Circle 2B is a schematic view showing an example of the distribution of residual stress of the air-cooled tempered glass sheet before the irradiation of the laser light. Fig. 3 is a cross-sectional view showing an example of a tempered glass sheet before irradiation with laser light. Fig. 4 is an explanatory view showing an example of the true roundness of the irradiation region of the laser light. Fig. 5 is a view showing an example of a condensing position of laser light. Fig. 6 is a view showing an example of an optical axis of laser light. Fig. 7 is a view showing an example of the stress distribution along the line A-A of Fig. 1B. Fig. 0 is a schematic view showing an example of the stress distribution along the line B-B of Fig. 1B. Fig. 9 is an explanatory view showing a method of cutting a tempered glass sheet according to a second embodiment of the present invention. Fig. 10A is an explanatory view (1) of a method of cutting a tempered glass sheet according to a third embodiment of the present invention. 160223.doc

S 201245063 Fig. 10B is an explanatory view (2) of a method of cutting a tempered glass sheet according to a third embodiment of the present invention. Fig. 11A is an explanatory view (1) of a method of cutting a tempered glass sheet according to a fourth embodiment of the present invention. Fig. 11B is a view showing a method of cutting a tempered glass sheet according to a fourth embodiment of the present invention. Fig. 12 is an explanatory view showing a method of cutting a tempered glass sheet according to a fifth embodiment of the present invention. Fig. 13 is a view showing a line cut off of the surface of the tempered glass sheet in Example 7_丨 to Example 7_2. [Main component symbol description] 10 tempered glass plate 11 cut line 12 surface 13 surface layer 14 back surface 15 back layer 17 intermediate layer 20 laser light 21 laser light axis 22 laser light irradiation area 30 crack 40 gas 42 gas Spraying area 160223.doc -53- 201245063 50 Nozzle 51 Central axis of the nozzle 52 Nozzle outlet 110 Laminated body 112 Surface of the laminated body 160223.doc -54- s

Claims (1)

201245063 VII. Patent application scope: 1. A method for cutting a tempered glass sheet by using a surface layer and a back layer including residual compressive stress, and forming a residual tensile stress between the surface layer and the back layer. The surface of the tempered glass sheet of the intermediate layer is irradiated with laser light, and the irradiated region of the laser light is moved on the surface to cut the tempered glass sheet. The tempered glass sheet and the laser light are attached to the laser light. When the light is incident perpendicularly on the surface of the tempered glass sheet, the absorption coefficient of the tempered glass sheet to the laser light is a (cm.1), and the thickness of the tempered glass sheet is t (cm). And satisfying the formula of 〇<axt$ 3 ,, and when the laser light is obliquely incident on the surface of the tempered glass sheet, the laser light is applied to the surface of the tempered glass sheet When the refraction angle is set to 丫(〇), it satisfies (Xaxt/cosyS 3.0, by adding the above-mentioned inter-layer in the irradiation region of the above-mentioned laser light by the temperature below the cold spot Heat, and controlling the stretching of the crack on the tempered glass sheet due to the residual tensile stress of the intermediate layer. 2. The method for cutting a tempered glass sheet according to claim 1 wherein the wavelength of the above-mentioned laser light is 250 ～5000 nm. 3. The method for cutting a tempered glass sheet according to claim 1 wherein the internal residual tensile stress of the intermediate layer is 15 MPa or more. 4. The method for cutting a tempered glass sheet according to claim 2, The internal residual tensile stress of the intermediate layer is 15 MPa or more. The method of cutting the tempered glass sheet according to any one of claims 1 to 4, wherein the inner layer is internally stretched. The method of cutting a tempered glass sheet according to any one of claims 1 to 4, wherein the irradiated region of the laser light is formed in a circular shape on the surface of the tempered glass sheet. The method of cutting a tempered glass sheet according to any one of claims 1 to 4, wherein the tempered glass sheet is a chemically strengthened glass. The method for cutting a tempered glass sheet, wherein the thickness of the tempered glass sheet is 〇.〇1 cm or more and 0.2 cm or less. 9. The method for cutting a tempered glass sheet according to any one of claims 1 to 4, wherein The tempered glass sheet is air-cooled tempered glass. 10. The method for cutting a tempered glass sheet according to claim 9, wherein the thickness of the tempered glass sheet is 0.1 cm or more and 3 cm or less. 11. If any of claims 1 to 4 A method of cutting a tempered glass sheet, wherein the optical axis of the laser light is inclined with respect to a surface of the tempered glass sheet. The tempered glass sheet cutting method according to any one of claims 1 to 4, wherein On the surface of the tempered glass sheet, when the half of the outer circumference of the irradiation region of the laser light is set to R, the roundness of the irradiation region is 0.5 R or less. The method of cutting a tempered glass sheet according to any one of claims 1 to 4, wherein the condensing position of the laser light is located in the intermediate layer of the tempered glass sheet. 14. The method of cutting a tempered glass sheet according to any one of claims 1 to 4, wherein 160223.doc 201245063 sprays a gas onto the surface of the tempered glass sheet, and sprays the gas on the surface of the tempered glass sheet. The attached area moves in conjunction with the illumination area of the above-described laser light. The method of cutting a tempered glass sheet according to claim 14, wherein the gas system is a cooling gas for partially cooling the tempered glass sheet. 16. A method of cutting a tempered glass sheet by using a tempered glass sheet having a surface layer and a back layer having residual compressive stress and an intermediate layer formed between the surface layer and the back layer and having residual tensile stress The laminated body formed by laminating N pieces (N is a natural number of 2 or more) irradiates the laser light, and moves the irradiation area of the laser light on the surface of each of the tempered glass sheets to cut the N-shaped tempered glass sheet In the case where the tempered glass sheets are incident on the surface of each of the tempered glass sheets perpendicularly to the laser light, the tempered glass sheets are provided with the absorption coefficient of the laser light. In the above, each of the tempered glass sheets has a thickness of ti (cm), and satisfies the above-described formula of any natural number of N or less, and the laser light is obliquely incident on the tempered glass sheets. In the case of the surface, the angle of refraction of the above-mentioned laser light on the surface of each of the tempered glass sheets is set to Yi (〇)--> two 疋 (XaiMi/cosYiS3 〇 (丨 is i or more, Ν Any of the following self-brome formulas, wherein the respective intermediate layers in the irradiation region of the laser light are heated by a temperature lower than a cold spot, and the residual tensile stress of each of the intermediate layers is controlled to be generated in each of the above Strengthening the exhibition of cracks on the glass plate. 160223.doc