201243214 六、發明說明： 【發明所屬之技術領域】 本發明係有關在被照射物上形成偏振光之線狀圖樣時 ，所使用之光照射裝置用燈單元，及具備該燈單元之光照 射裝置。 【先前技術】 3D影像顯示裝置可顯現三維立體影像，習知此類3D 影像顯示裝置之硏發，是用於電影院或電視觀賞用途。而 未來可望用於娛樂設施、店面展示、醫療等等用途，近年 來十分受到矚目。 專利文獻1中，記載了 3 D影像顯示裝置之一例。 圖1 5所示者，係專利文獻1所記載之3D影像顯示裝 置的槪略構成說明圖。該3D影像顯示裝置，具備：3D影 像顯示體形成用薄膜1 02，係由右眼用影像送訊部1 0 1 c與 左眼用影像送訊部〗〇ld交互配置而成之液晶（LCD)製 3 D影像送訊部1 〇 1、以及配置於右眼用影像送訊部1 〇 1 c 前方之右眼用影像顯示部l〇la、以及配置於左眼用影像送 訊部l〇ld前方之左眼用影像顯示部101b，所構成；和設 置於3D影像送訊部101後方之光源103。其中，從右眼 用影像送訊部1 〇 1 c、左眼用影像送訊部1 〇 1 d所送出之影 像，分別會導入右眼用影像顯示部1 〇 1 a、左眼用影像顯示 部101b，而爲觀察者接收。 依據該文獻之3D影像顯示裝置，可將偏光振動方向 -5- 201243214 互異之右眼用影像與左眼用影像送出給觀察者’而觀 接收右眼用影像及左眼用影像時，會藉由偏光眼鏡來 影像，該偏光眼鏡係由僅可供右眼用影像透過之附偏 右眼用鏡片、以及僅可供左眼用影像透過之附偏光板 用鏡片所組成，右眼用影像及左眼用影像的合成影像 被認知成單一立體影像。 在此類3D影像顯示裝置中，爲區分右眼用影像 眼用影像，會使用圖樣化相位差薄膜。 圖樣化相位差薄膜之製造方法，是對於薄膜基材 著配向膜而形成之光重合性材料層，以線狀之遮光部 光部彼此交互排列形成之遮罩予以遮蓋並以光照射， 條紋狀圖樣之液晶聚合物層，其後再將殘留之光重合 晶材料層除去而得。 換言之，如圖16(a)所示，對於薄膜基材90上 配向膜91而形成之光重合性液晶材料層92，以線狀 數遮光部96及複數透光部97彼此交互排列配置之遮 予以遮蓋並以光照射，如圖1 6 ( b )所示，形成條紋 樣之液晶聚合物層93，其後再將殘留之光重合性液晶 層92除去而得。 像這樣製造圖樣化相位差薄膜時，會以紫外光等 能量線，對光重合性液晶材料層進行廣範圍照射，藉 升量產能力’故一般會使用具長弧型放電燈之光照射 。該光照射裝置，相對於線狀遮光部及透光部的延伸 ，放電燈配置時與其長度方向呈正交。 察者 捕捉 光板 左眼 ，會 與左 上介 及透 形成 性液 介著 之複 羣95 狀圖 材料 活性 此提 裝置 方向 -6 - 201243214 〔先前技術文獻〕 〔專利文獻〕 〔專利文獻1〕日本特開2002-185983號公報 【發明內容】 〔發明所欲解決之課題〕 如上所述，製造圖樣化相位差薄膜時，一般認爲需使 用具長弧型放電燈之光照射裝置。但，長弧型放電燈爲線 狀光源，因其光學特性，放電燈所放射出之光，於該放電 燈之長度方向，無法放射相互平行之平行光。 因此如圖17所示，透過遮罩95之透光部97的部分 光，相對於遮罩95的面方向，會呈斜向入射，而被照射 物之光重合性液晶材料層92，其被遮光部96邊緣部分遮 擋之正下方之區域會受到照射，結果便難以忠實按照遮罩 95的圖樣，形成具高解析度圖樣之液晶聚合物層93。 本發明係有鑑於上述問題，目的在於提供一種燈單元 及具備該燈單元之光照射裝置，可忠於遮罩圖樣形成高解 析度圖樣，且可以照度分布均勻的光照射。 〔用以解決課題之手段〕 本發明解決上述課題的方法如下。 (1)燈單元係具有：複數之光源元件列，分別朝同 方向延伸，由短弧型放電燈、及以包圍該放電燈的方式配 201243214 置之，由反光板所構成之複數光源元件，朝某一方向排列 配置而成：和光源元件支撐框體，具有對應於各光源元件 之光源元件容納部；該燈單元之構成如下。 前述各光源元件，爲使其射出光之光軸彼此平行，而 並排於前述光源元件容納部內；假設前述光源元件列的複 數光源元件之配置方向爲第1方向時，前述複數之光源元 件列，係於與前述第1方向正交之第2方向並排排列。又 ，其中一個光源元件列R1的光源元件中放電燈的電極之 間中心點C1，以及與該光源元件最爲接近之另一光源元 件列R2的光源元件中放電燈的電極之間中心點C2，兩點 相連之直線，與前述第1方向呈斜交的方式配置；假設前 述光源元件列的列數爲N，各光源元件列中相鄰光源元件 之，放電燈的電極之間中心點的距離爲A時，前述電極之 間中心點C1與C2，於前述第1方向之距離爲Η，則 Η = Α/Ν。 此外，前述光源元件支撐框體中，收納前述光源元件 列R1部分之前述第1方向之端面，與收納前述光源元件 列R2部分之前述第1方向之端面，於前述第1方向具有 前述Η之差距。 (2) 在上述（1)中，前述光源元件支撐框體的各光 源元件容納部之間形成有隔壁，各光源元件由該隔壁所隔 開並相鄰配置。 (3) 在上述（1)或（2)中’前述光源元件支撐框 體之光射出側的面上設有玻璃，前述光源元件之燈的管軸 -8 - 201243214 ，相對於該玻璃面呈垂直的方式配置，前述光源元件藉彈 力被彈推至玻璃面側，使得該光源元件之反光板的光射出 開口側端面，被頂壓至前述玻璃。 (4 )將上述（1 ) ( 2 )或（3 )之燈單元，以相鄰燈 單元之前述第1方向的端面彼此接觸的方式，於前述第1 方向連結構成燈單元，其中該端面具有前述差距。 (5 )將上述（1 ) ( 2 ) ( 3 )或（4 )之燈單元，作 爲光照射裝置的光射出部之用，來構成光照射裝置，該光 射出部具備聚光構件，將來自前述光射出部之光聚光成線 狀，朝前述第1方向延伸。 〔發明之功效〕 本發明可獲得下列功效。 (1)針對由短弧型放電燈及反光板所構成之複數光 源元件，爲使其射出光之光軸彼此平行，於某一方向並排 排列而形成光源元件列；將複數該光源元件列，於與前述 第1方向正交之第2方向並排排列，而構成燈單元；其中 —個光源元件列R1的光源元件中放電燈的電極之間中心 點C 1，以及與該光源元件最爲接近之另一光源元件列R2 的光源元件中放電燈的電極之間中心點C 2，兩點相連之 直線，與前述第1方向呈斜交的方式配置；假設前述光源 元件列的列數爲N ’各光源元件列中相鄰光源元件之，放 電燈的電極之間中心點的距離爲A時，前述電極之間中心 點C1與C2，於前述第1方向之距離爲η，貝IJ H = A/N。因 -9- 201243214 此，其中一個光源元件列R1的各光源元件之照度谷値部 分，會因爲另一光源元件列R2的各光源元件之照度峰値 部分而獲得補償，使得光照射區域的照度分布均勻。 此外，收納上述光源元件列之光源元件支撐框體中， 收納前述光源元件列R1部分之前述第1方向之端面，與 收納前述光源元件列R2部分之前述第1方向之端面，於 前述第1方向具有前述Η之差距；可將上述燈單元於上述 第1方向互相連結，構成具有相同光學性能之長型燈單元 〇 又，當光照射裝置具備遮罩，而該遮罩具有沿光源元 件排列之某一方向延伸之複數線狀遮光部時，若應用本發 明之燈單元，則於該某一方向，平行光便可介由遮罩而照 射至被照射物。因此，若上述遮罩具有與上述線狀方向正 交之複數線狀遮光部，便可防止或抑制位於遮罩遮光部正 下方之區域受到光照射，而能忠於遮罩圖樣，形成高解析 度之圖樣。 (2 )光源元件列係收納於光源元件支撐框體的光源 元件容納部內，而構成上述構造之燈單元，故當特定燈到 達使用壽命時，可以整個燈單元爲單位，輕易地將複數燈 更換成新品，能夠大幅縮短燈交換所需之時間。此外，事 先完成所有新品燈的照度分布調整，故無需在現場進行照 度分布調整，而可迅速地更換燈單元。又，燈單元中，各 光源元件所射出的光，其光軸互相平行，故無需針對各光 源元件進行光軸調整，可直接安裝至光照射裝置上。 -10- 201243214 (3 )光源元件支撐框體的各光源元件收納部之間形 成有隔壁，將各光源元件隔開，並收納於光源元件支撐框 體中，故可輕易地定位各光源元件，亦可緩和來自相鄰放 電燈的熱影響。此外，即使產生漏光，亦不會影響相鄰的 燈。 (4 )前述光源元件支撐框體之光射出側的面上設有 玻璃，針對前述光源元件，以燈的管軸相對於該玻璃面呈 垂直的方式來配置，前述光源元件藉彈力被彈推至玻璃面 側，使得該光源元件之反光板的光射出開口側端面，被頂 壓至前述玻璃；藉此，只要預先提升前面玻璃的平面度， 無須特殊調整，即可讓各光源元件1 2射出的光成爲平行 光。 (5)當光照射裝置具備將來自光射出部的光聚光成 線狀之聚光構件時，若應用本發明之燈單元，則當來自該 聚光構件的光介由遮罩照射至被照射物時，於上述線狀方 向，平行光便可介由遮罩而照射至被照射物。 因此，來自上述燈單元的各放電燈之放射光，會藉由 各反光板及聚光構件，而聚光成沿X方向延伸之線狀，能 夠有效地將光聚光至有效照射寬度d (參照圖4、圖5 )的 範圍內，藉此’便可忠於遮罩圖樣，而形成高解析度之圖 樣0 【實施方式】 圖1爲本發明具備光射出部（以下亦稱燈單元）之光 -11 · 201243214 照射裝置的槪略構成圖，同圖（a)爲立體圖、同圖（b) 爲從光射出側觀察燈單元各光源元件配置之圖。此外’圖 2爲圖1所示光照射裝置沿YZ面截斷之剖面圖’圖3爲 該光照射裝置沿XZ面截斷之剖面圖。 本實施例之光照射裝置，可用於製造前述圖樣化相位 差薄膜，具備：燈單元10，由複數之光源元件12所構成 ;以及聚光構件20，將來自該燈單元1 0的光，朝光源元 件12的排列方向（第1方向：X方向）延伸的方式聚光 成線狀；以及遮罩3 0，將來自該聚光構件2 0的光整形爲 條紋狀。又，上述聚光構件20與遮罩3 0之間，視必要設 置如圖2、圖3所示之偏光元件3 5。偏光元件3 5，例如可 使用線柵偏光元件等。又，圖1中省略了偏光元件35。 被照射物W (例如，爲形成前述圖樣化相位差薄膜， 而具有介著配向膜形成光重合性液晶材料層之薄膜基材） 如圖2所示，是與搬運手段40之滾子41接觸之狀態下， 被搬運至遮罩30的正下方。 燈單元1 0如圖1所示，其具有光源元件列1 1 a、1 1 b ，係複數之光源元件12沿其中一方向（X方向）並列配 置而成，該光源元件列11a、lib是沿著上述X方向的正 交方向（第2方向：Y方向）而並排。 光源元件列1 1 a、1 1 b中的每個光源元件1 2，如圖2 所示’具有：短弧型之放電燈13，係發光管14內沿其管 軸配置相互對向之一對電極（圖示省略）而成；以及反光 板15，以包圍該放電燈13的方式配置，反射來自該放電 -12- 201243214 燈1 3的光。 上述放電燈13，係發光管14內封入水銀、稀有氣體 及鹵素，例如可使用高效率放射波長爲270〜450nm紫外光 之超高壓水銀燈。此類放電燈13中，一對電極之間的電 極間距離，例如可爲0.5〜2.0mm，水銀封入量例如可爲 0.08~0.30mg/mm3。 光源元件列1 1 a之光源元件1 2、及光源元件列1 1 b之 光源元件12，相對於上述X方向，配置成斜向。換言之 ，各光源元件1 2，係光源元件列1 1 a的光源元件1 2中放 電燈1 3電極之間的中心點，以及與該光源元件丨2最爲接 近之另一光源元件列lib的光源元件12中放電燈13電極 之間的中心點，兩點相連之直線T與上述X方向延伸之直 線X，呈斜交的方式配置。 而如圖1 ( b )所示，光源元件列1 1 a之各光源元件 1 2的中心位置A 1 (放電燈1 3電極之間的中心點），以及 與該光源元件1 2最爲接近之光源元件列1 1 b的光源元件 1 2之中心位置A2 (放電燈1 3電極之間的中心點），假設 兩位置於X方向的間隔距離爲Η，則Η可以下述式1來表 示。 Η = Α/Ν ...(式 i ) 其中’ Η爲上述間隔距離、A爲各光源元件於X方向 之寬度、N爲光源元件列之列數。又，燈單元的光源元件 列之列數亦可爲2列以上，若如圖1所示，光源元件列之 列數爲2的情形，則上述間隔距離η爲a/2。 -13- 201243214 各光源元件1 2之反光板1 5，係以拋物線鏡所構成， 以其光軸C爲中心，具有旋轉拋物面狀之光反射面；該反 光板15之光軸C，配置於放電燈13的發光管14之管軸 上，且其焦點F位於放電燈13的電極之間的亮點（bright spot )上 ° 此外，各光源元件12如圖2、圖3所示，以該射出光 之光軸平行於Z方向的方式並排，從各光源元件12射出 的光如圖2、圖3所示成爲平行光，射入聚光構件20。 聚光構件20，其垂直於X方向的剖面具有放物線狀 之光反射面，由沿著X方向延伸之柱面拋物線鏡所構成； 該聚光構件20，與燈單元10中各反光板15之光軸C垂 直之方向爲光射出面，在該光射出面前方，其焦點f位於 被照射物W的表面上。 該聚光構件20亦可施以冷光鏡（cold mirror)鍍膜 ，使其僅反射所需波長之紫外光，其餘可視光及紅外光則 可透過。 遮罩30，係於X方向呈長型之矩形板狀物，於聚光 構件20之下方沿平面配置，垂直於該聚光構件20的反射 光光軸L。該遮罩3 0，於X方向交互排列配置有線狀之複 數遮光部及複數透光部，該線狀朝向垂直於X方向的Z方 向（圖3中的上下方向）延伸。 圖4爲遮罩30的具體構成例說明圖，同圖（a>爲平 面圖、（b )爲側面圖。該遮罩3 0當中，在例如石英玻璃 所構成之透光性基板31的一面上，以例如鉻所構成之複 -14- 201243214 數線狀遮光膜3 2隔著所需之間隔排列配置，遮光膜3 2 形成之區域會形成線狀之遮光部33,相鄰遮光膜32之 的區域會形成透光部34。該遮罩30上如圖4(a)的虛 Lb所示，遮光部33及透光部34排列的X方向，有帶 延伸的光射入。又，d爲有效照射寬度。 圖5爲上述搬運手段40的滾子41與遮罩30附近 放大圖。 搬運手段40具有滾子41，與被照射物W接觸以搬 該被照射物W。具體來說，滾子41的配置形態，是其 被照射物W接觸處位於遮罩30的正下方，而該滾子 的旋轉軸（圖示省略）朝前述X方向延伸，藉由該滾 4 1的旋轉，將被照射物W往Z方向搬運。 又，藉由在滾子41上設置水冷機構，即使被照射 W受到高照度紫外光照射，也會因被照射物W與滾子 接觸，而可冷卻被照射物W，可防止被照射物W發生 縮等變形。 被照射物W藉由搬運手段40往Z方向搬運，遮罩 相對於被照射物W，隔著間距G而配置。遮罩3 0與被 射物W之間的最小間距G，例如可爲50〜1 ΟΟΟμηι。又， 少滾子41的芯偏移，可使遮罩30及與滾子41接觸之 膜狀被照射物W之間，得以保持一定間距。 由圖5可知，遮罩3 0與被照射物W之間的間距， 隨著該被照射物W往Ζ方向搬運而變動。換言之，被 射物W被搬運而通過遮罩30正下方區域時，被照射物201243214 VI. [Technical Field] The present invention relates to a lamp unit for a light irradiation device used for forming a linear pattern of polarized light on an object to be irradiated, and a light irradiation device including the same . [Prior Art] The 3D image display device can display a three-dimensional image, and the burst of such a 3D image display device is used for cinema or television viewing purposes. In the future, it is expected to be used for entertainment facilities, store display, medical treatment, etc., and has attracted much attention in recent years. Patent Document 1 describes an example of a 3D video display device. The figure shown in Fig. 15 is a schematic diagram of a schematic configuration of a 3D video display device described in Patent Document 1. The 3D image display device includes a film 022 for forming a 3D image display body, and a liquid crystal (LCD) in which the right-eye image transmitting unit 1 0 1 c and the left-eye image transmitting unit 〇ld are alternately arranged. The 3D video image transmitting unit 1 〇1, the right eye image display unit 〇1a disposed in front of the right eye image transmitting unit 1 〇1 c, and the left eye image transmitting unit 〇1 The left-eye image display unit 101b in front of the ld is configured, and the light source 103 is disposed behind the 3D image transmitting unit 101. The images sent from the right-eye image transmitting unit 1 〇1 c and the left-eye image transmitting unit 1 〇1 d are respectively introduced into the right-eye image display unit 1 〇1 a and the left-eye image display. The part 101b is received by the observer. According to the 3D image display device of the document, the right-eye image and the left-eye image which are different in the polarization direction of the polarization -5 - 201243214 can be sent to the observer' while the right-eye image and the left-eye image are received. The polarized glasses are composed of polarized glasses for the right eye for the right eye and the polarized lenses for the left eye. The right eye is used for the right eye. The composite image of the left eye image is recognized as a single stereo image. In such a 3D video display device, in order to distinguish the right-eye image ophthalmic image, a patterned phase difference film is used. The method for producing a patterned retardation film is a photo-adhesive material layer formed by aligning a film on a film substrate, and a mask formed by alternately arranging light portions of a linear light-shielding portion is covered with light and is striped. The liquid crystal polymer layer of the pattern is obtained by removing the remaining layer of the light-respecting crystal material. In other words, as shown in Fig. 16 (a), the light-receiving liquid crystal material layer 92 formed on the film substrate 91 on the film substrate 90 is arranged such that the linear light-shielding portion 96 and the plurality of light-transmitting portions 97 are alternately arranged. It is covered and irradiated with light, and as shown in Fig. 16 (b), a stripe-like liquid crystal polymer layer 93 is formed, and then the remaining photoreceptive liquid crystal layer 92 is removed. When a patterned retardation film is produced in this manner, the photorefractive liquid crystal material layer is irradiated with a wide range of wavelengths by an energy line such as ultraviolet light, and the mass production ability is generally increased by the light of the long arc discharge lamp. In the light irradiation device, the discharge lamp is arranged to be orthogonal to the longitudinal direction of the linear light-shielding portion and the light-transmitting portion. The observer captures the left eye of the light plate and interacts with the left upper medium and the permeable liquid. The material of the 95-shaped picture is active. -6 - 201243214 [Prior Art Document] [Patent Document] [Patent Document 1] JP-A-2002-185983 SUMMARY OF INVENTION [Problem to be Solved by the Invention] As described above, when a patterned retardation film is produced, it is generally considered to use a light irradiation device having a long arc discharge lamp. However, the long arc type discharge lamp is a linear light source. Due to its optical characteristics, the light emitted by the discharge lamp cannot emit parallel light parallel to each other in the longitudinal direction of the discharge lamp. Therefore, as shown in Fig. 17, part of the light transmitted through the light transmitting portion 97 of the mask 95 is obliquely incident with respect to the surface direction of the mask 95, and the light-receiving liquid crystal material layer 92 of the object to be irradiated is The region directly under the occlusion of the edge portion of the light shielding portion 96 is irradiated, and as a result, it is difficult to faithfully form the liquid crystal polymer layer 93 having a high resolution pattern in accordance with the pattern of the mask 95. The present invention has been made in view of the above problems, and an object thereof is to provide a lamp unit and a light irradiation device including the same, which can form a high resolution pattern in a mask pattern and can illuminate light with uniform illumination distribution. [Means for Solving the Problem] The method for solving the above problems of the present invention is as follows. (1) The lamp unit has a plurality of light source element rows extending in the same direction, and is composed of a short arc type discharge lamp and a plurality of light source elements composed of a reflector, which is provided by 201243214 so as to surround the discharge lamp. Arranged in a certain direction: the light source element supporting frame has a light source element housing portion corresponding to each light source element; the lamp unit is configured as follows. Each of the light source elements is arranged side by side in the light source element housing portion so that the optical axes of the emitted light are parallel to each other. When the arrangement direction of the plurality of light source elements in the light source element row is the first direction, the plurality of light source element rows are It is arranged side by side in the second direction orthogonal to the first direction. Further, a center point C1 between the electrodes of the discharge lamps in the light source elements of one of the light source element rows R1, and a center point C2 between the electrodes of the discharge lamps in the light source elements of the other light source element row R2 closest to the light source elements a straight line connecting the two points, which is disposed obliquely to the first direction; assuming that the number of columns of the light source element row is N, adjacent light source elements in each light source element row, and a center point between the electrodes of the discharge lamp When the distance is A, the center points C1 and C2 between the electrodes are Η in the first direction, and Η = Α / Ν. Further, in the light source element supporting frame, an end surface in the first direction in which the light source element row R1 portion is accommodated and an end surface in the first direction in which the light source element row R2 is housed are provided in the first direction. gap. (2) In the above (1), partition walls are formed between the respective light source element housing portions of the light source element supporting frame, and the respective light source elements are spaced apart from each other by the partition walls. (3) In the above (1) or (2), the glass is provided on a surface on the light-emitting side of the light source element supporting frame, and the tube axis of the light source element is -8 - 201243214, which is opposite to the glass surface. In a vertical manner, the light source element is elastically pushed to the glass surface side such that the light of the light reflecting plate of the light source element is emitted toward the opening side end surface and is pressed against the glass. (4) The lamp unit of the above (1) (2) or (3) is connected to the lamp unit in the first direction so that the end faces of the adjacent lamp units in the first direction are in contact with each other, wherein the end face has The aforementioned gap. (5) The lamp unit of the above (1) (2) (3) or (4) is used as a light emitting portion of the light irradiation device to constitute a light irradiation device, and the light emitting portion includes a light collecting member and is derived from The light of the light emitting portion is condensed into a linear shape and extends in the first direction. [Effect of the Invention] The present invention can attain the following effects. (1) A plurality of light source elements composed of a short arc type discharge lamp and a reflector are formed such that light axes of the emitted light are parallel to each other and are arranged side by side in a certain direction to form a light source element row; And arranging side by side in the second direction orthogonal to the first direction to form a lamp unit; wherein the light source element of the light source element row R1 has a center point C1 between the electrodes of the discharge lamp and is closest to the light source element The center point C 2 between the electrodes of the discharge lamp in the light source element of the other light source element row R2, the straight line connecting the two points is arranged obliquely to the first direction; assuming that the number of columns of the light source element column is N 'When the distance between the center points of the electrodes of the discharge lamp is A in each of the adjacent light source elements, the center points C1 and C2 between the electrodes are η in the first direction, and IJ H = A/N. According to -9-201243214, the illuminance valley portion of each of the light source elements of one of the light source element columns R1 is compensated for by the illuminance peak portion of each light source element of the other light source element row R2, so that the illuminance of the light irradiation region is obtained. evenly distributed. Further, in the light source element supporting frame in which the light source element row is accommodated, an end surface in the first direction in which the light source element row R1 portion is accommodated, and an end surface in the first direction in which the light source element row R2 portion is accommodated are formed in the first The direction has the aforementioned gap; the lamp unit can be connected to each other in the first direction to form a long lamp unit having the same optical performance. When the light irradiation device is provided with a mask, the mask has an arrangement along the light source element. When the plurality of linear light-shielding portions extending in one direction are applied, if the lamp unit of the present invention is applied, the parallel light can be irradiated to the object to be irradiated through the mask in the certain direction. Therefore, if the mask has a plurality of linear light-shielding portions orthogonal to the linear direction, it is possible to prevent or suppress light irradiation of a region directly under the light-shielding portion of the mask, and to be faithful to the mask pattern to form a high resolution. The pattern. (2) The light source element array is housed in the light source element housing portion of the light source element supporting frame to constitute the lamp unit of the above configuration, so that when the specific lamp reaches the service life, the plurality of lamps can be easily replaced by the entire lamp unit. Into new products, can greatly shorten the time required for lamp exchange. In addition, the illuminance distribution adjustment of all new lamps is completed in advance, so that it is not necessary to adjust the illuminance distribution on site, and the lamp unit can be quickly replaced. Further, in the lamp unit, since the light beams emitted from the respective light source elements are parallel to each other, it is not necessary to perform optical axis adjustment for each of the light source elements, and can be directly mounted on the light irradiation device. -10- 201243214 (3) A partition wall is formed between each of the light source element housing portions of the light source element supporting frame, and the respective light source elements are separated and housed in the light source element supporting frame, so that the respective light source elements can be easily positioned. It also mitigates the thermal effects from adjacent discharge lamps. In addition, even if light leakage occurs, the adjacent lamps are not affected. (4) The surface of the light source element supporting frame on the light emitting side is provided with glass, and the light source element is disposed such that the tube axis of the lamp is perpendicular to the glass surface, and the light source element is pushed by the elastic force. To the glass surface side, the light of the light reflecting plate of the light source element is emitted to the opening side end surface, and is pressed against the glass; thereby, as long as the flatness of the front glass is raised in advance, the light source elements can be made without special adjustment. The emitted light becomes parallel light. (5) When the light irradiation device includes the concentrating member that condenses the light from the light emitting portion into a line shape, when the lamp unit of the present invention is applied, when the light from the condensing member is irradiated to the quilt by the mask When the object is irradiated, the parallel light can be irradiated to the object to be irradiated through the mask in the linear direction. Therefore, the radiation from the respective discharge lamps of the lamp unit is condensed into a line extending in the X direction by the respective reflecting plates and the condensing member, and the light can be efficiently collected to the effective irradiation width d ( Referring to FIG. 4 and FIG. 5), it is possible to form a high-resolution pattern 0 by faithful to the mask pattern. [Embodiment] FIG. 1 is a light emitting portion (hereinafter also referred to as a light unit) of the present invention. Light-11 · 201243214 A schematic diagram of the illumination device, the same figure (a) is a perspective view, and the same figure (b) is a view of the arrangement of the light source elements of the lamp unit viewed from the light exit side. Further, Fig. 2 is a cross-sectional view of the light irradiation device shown in Fig. 1 taken along the YZ plane. Fig. 3 is a cross-sectional view of the light irradiation device taken along the XZ plane. The light irradiation device of the present embodiment can be used for manufacturing the patterned phase difference film, comprising: a lamp unit 10 composed of a plurality of light source elements 12; and a light collecting member 20 for directing light from the lamp unit 10 The arrangement direction of the light source elements 12 (the first direction: the X direction) is concentrated to form a line shape, and the mask 30 is formed to shape the light from the light collecting member 20 into a stripe shape. Further, between the concentrating member 20 and the mask 30, a polarizing element 35 as shown in Figs. 2 and 3 is provided as necessary. As the polarizing element 35, for example, a wire grid polarizing element or the like can be used. Further, the polarizing element 35 is omitted in FIG. The object W to be irradiated (for example, a film substrate having a pattern-forming retardation film and having a photo-adhesive liquid crystal material layer interposed therebetween) is in contact with the roller 41 of the conveying means 40 as shown in FIG. In this state, it is carried directly below the mask 30. As shown in FIG. 1, the lamp unit 10 has a light source element row 1 1 a, 1 1 b , and a plurality of light source elements 12 are arranged side by side in one direction (X direction), and the light source element rows 11a, lib are The rows are arranged side by side in the orthogonal direction (the second direction: the Y direction) in the X direction. Each of the light source elements 1 1 a, 1 1 b, as shown in FIG. 2, has a short arc-shaped discharge lamp 13 disposed inside the arc tube 14 along its tube axis. The counter electrode (not shown) is formed; and the reflector 15 is disposed so as to surround the discharge lamp 13, and reflects the light from the discharge -12-201243214 lamp 13. The discharge lamp 13 is provided with mercury, a rare gas, and a halogen in the arc tube 14. For example, an ultrahigh pressure mercury lamp having a high efficiency of emitting ultraviolet light having a wavelength of 270 to 450 nm can be used. In such a discharge lamp 13, the distance between the electrodes between the pair of electrodes may be, for example, 0.5 to 2.0 mm, and the amount of mercury enclosed may be, for example, 0.08 to 0.30 mg/mm3. The light source element 1 2 of the light source element array 1 1 a and the light source element 12 of the light source element array 1 1 b are arranged obliquely with respect to the X direction. In other words, each light source element 12 is a center point between the electrodes of the discharge lamp 13 in the light source element 1 2 of the light source element array 1 1 a, and another light source element column lib closest to the light source element 丨 2 In the light source element 12, the center point between the electrodes of the discharge lamp 13 is arranged such that the straight line T connecting the two points and the straight line X extending in the X direction are oblique. As shown in FIG. 1(b), the center position A1 of each of the light source elements 12 of the light source element array 1 1 a (the center point between the electrodes of the discharge lamp 13 3) and the light source element 12 are closest to each other. The center position A2 of the light source element 1 2 of the light source element row 1 1 b (the center point between the electrodes of the discharge lamp 13 3), assuming that the distance between the two bits in the X direction is Η, Η can be expressed by the following formula 1 . Η = Α / Ν (Expression i ) where Η is the above-described separation distance, A is the width of each light source element in the X direction, and N is the number of columns of the light source element rows. Further, the number of rows of the light source element rows of the lamp unit may be two or more. When the number of columns of the light source element rows is two as shown in Fig. 1, the distance η is a/2. -13- 201243214 The light-reflecting plate 15 of each light source element 1 2 is constituted by a parabolic mirror, and has a parabolic light-reflecting surface around the optical axis C; the optical axis C of the reflecting plate 15 is disposed in The light-emitting tube 14 of the discharge lamp 13 is on the tube axis, and its focal point F is located on the bright spot between the electrodes of the discharge lamp 13. Further, each light source element 12 is projected as shown in Figs. 2 and 3 The light axes of the light are arranged side by side in parallel with the Z direction, and the light emitted from each of the light source elements 12 is parallel light as shown in FIGS. 2 and 3 and is incident on the light collecting member 20. The concentrating member 20 has a light-reflecting surface of a linear shape in a cross section perpendicular to the X direction, and is constituted by a cylindrical parabolic mirror extending in the X direction; the concentrating member 20 and each of the reflecting plates 15 of the lamp unit 10 The direction perpendicular to the optical axis C is a light exit surface, and the focus f is located on the surface of the object W to be irradiated in front of the light exit surface. The concentrating member 20 can also be coated with a cold mirror so that it reflects only ultraviolet light of a desired wavelength, and the remaining visible light and infrared light are permeable. The mask 30 is a rectangular plate having a long shape in the X direction, and is disposed in a plane below the concentrating member 20, perpendicular to the reflected optical axis L of the concentrating member 20. In the mask 30, a linear plurality of light-shielding portions and a plurality of light-transmitting portions are alternately arranged in the X direction, and the line shape extends in the Z direction (up-and-down direction in Fig. 3) perpendicular to the X direction. 4 is an explanatory view showing a specific configuration example of the mask 30, and the same drawing (a> is a plan view and (b) is a side view. Among the masks 30, on one side of the light-transmitting substrate 31 made of, for example, quartz glass. A plurality of linear light-shielding films 3 2 made of, for example, chrome, are arranged at intervals of a desired interval, and a region where the light-shielding film 32 is formed forms a linear light-shielding portion 33 adjacent to the light-shielding film 32. The light-transmitting portion 34 is formed in the region. The mask 30 has light extending in the X direction in which the light-shielding portion 33 and the light-transmitting portion 34 are arranged as shown by the virtual Lb in Fig. 4(a). Fig. 5 is an enlarged view of the vicinity of the roller 41 and the mask 30 of the transporting means 40. The transporting means 40 has a roller 41 that comes into contact with the irradiated object W to carry the irradiated object W. Specifically, The arrangement of the rollers 41 is such that the contact portion of the irradiated object W is located immediately below the mask 30, and the rotation axis (not shown) of the roller extends in the X direction, and the rotation of the roller 4 1 is performed. The object to be irradiated W is transported in the Z direction. Further, by providing a water-cooling mechanism on the roller 41, even if it is irradiated, it is subjected to high illumination. When the external light is irradiated, the irradiated object W can be cooled by the contact with the roller, and the irradiated object W can be prevented from being deformed by the contraction. The irradiated object W is transported in the Z direction by the transport means 40. The cover is disposed with respect to the object W to be irradiated with a gap G. The minimum pitch G between the mask 30 and the object W can be, for example, 50 to 1 ΟΟΟμηι. Further, the core of the roller 41 is shifted, The mask 30 and the film-shaped object W to be in contact with the roller 41 can be kept at a constant pitch. As can be seen from Fig. 5, the distance between the mask 30 and the object W to be irradiated is irradiated with the irradiation. The object W is conveyed and moved in the direction of the weir. In other words, when the object W is transported and passes through the area directly under the mask 30, the object to be irradiated
所 間 線 狀 的 運 與 4 1 子 物 41 收 30 照 減 薄 會 照 W -15- 201243214 與遮罩3 0之間的間距，起初會隨著被照射物W往Z方向 移動而愈來愈小，當到達遮罩30中央位置的正下方後， 則會隨著被照射物W往Z方向移動而愈來愈大。因此， 當有效照射寬度d愈大，則間距的變動寬度亦變大，便無 法忠於遮罩3 0的圖樣而形成高解析度圖樣。 是故，針對遮罩30上來自聚光構件20的入射光有效 照射寬度d，需考量遮罩3 0與被照射物W之間間距的變 動容許値，以及滾子4 1的半徑，儘可能設定地較小爲佳 〇 具體來說如圖5所示，假設遮罩30與被照射物W之 間間距的變動容許値爲a、滾子4 1的半徑爲r，則有效照 射寬度d可藉由d=y~ {r2-(r-a) 2}x2來求得。又，理論 上來說尙需考量被照射物W的厚度，但因被照射物W厚 度相較於滾子4 1的半徑而言非常小，故可忽略。 舉一具體例子，假設遮罩3 0與被照射物W之間間距 的變動容許値爲50μιη、滾子41的半徑r爲300mm時，有 效照射寬度d約爲1 1 m m以下較佳。 圖1、圖2、圖3所示光照射裝置當中，燈單元10中 各光源元件1 2的放電燈1 3所放射的光，會經由反光板1 5 的光反射面而反射，成爲平行於反光板15光軸C的平行 光’朝向聚光構件20射出。 ·The linear line and the 4 1 sub-object 41 receive 30 photo thinning will take the distance between W -15- 201243214 and the mask 30, and will initially become more and more as the irradiated object W moves in the Z direction. When it reaches the center of the mask 30, it will become larger as the object W moves in the Z direction. Therefore, as the effective irradiation width d is larger, the variation width of the pitch is also increased, and it is impossible to form a high-resolution pattern by faithful to the pattern of the mask 30. Therefore, for the incident light from the concentrating member 20 on the mask 30 to effectively illuminate the width d, it is necessary to consider the variation of the spacing between the mask 30 and the object W to be irradiated, and the radius of the roller 4 1 as much as possible. Specifically, as shown in FIG. 5, it is assumed that the variation of the spacing between the mask 30 and the object W is allowed to be a, and the radius of the roller 4 1 is r, and the effective irradiation width d can be It is obtained by d=y~ {r2-(ra) 2}x2. Further, in theory, it is necessary to consider the thickness of the irradiated object W, but since the thickness of the irradiated object W is extremely small compared to the radius of the roller 41, it can be ignored. As a specific example, assuming that the variation of the pitch between the mask 30 and the object to be irradiated is 50 μm and the radius r of the roller 41 is 300 mm, the effective irradiation width d is preferably about 1 m 2 or less. In the light irradiation device shown in Fig. 1, Fig. 2, and Fig. 3, the light emitted from the discharge lamp 13 of each of the light source elements 12 in the lamp unit 10 is reflected by the light reflecting surface of the reflecting plate 15 to be parallel to The parallel light ' of the optical axis C of the light reflecting plate 15 is emitted toward the light collecting member 20. ·
該燈單元1 0所射出之平行光，會經由聚光構件20的 光反射面而朝下方反射，聚光成於X方向延伸之線狀，介 著偏光元件35而射入遮罩30。射入遮罩30的光，於X -16- 201243214 方向爲相互平行之平行光。 射入遮罩30的光，會因遮罩30的遮光部及透光部而 被整形成條紋狀，並照射至被照射物W，被照射物W與 滾子41接觸處的表面上，會形成對應於遮罩30的遮光部 及透光部圖樣之條紋狀光照射區域。而被照射物W藉由 搬運手段40往Z方向搬運，達成該被照射物W所需之光 照射處理。 在此類光照射裝置中，可使用光配向膜用材料，以下 述方法製造出圖樣化相位差薄膜。 首先如圖6(a)所示，於薄膜基材51上塗布液狀之 光配向膜用材料，使其乾燥或硬化而形成光配向膜用材料 層 5 5 A。 接下來，對光配向膜用材料層55A，藉由上述光照射 裝置以直線偏振光進行選擇性曝光處理，便如圖6 ( b )所 示’薄膜基材51上會形成條紋狀圖樣之第1光配向膜5 5 〇 再利用適當之光照射裝置，以與上述圖6 ( b )照射之 偏振光呈90。偏光方向相異之直線偏振光，進行全面曝光 處理’便如圖6 ( c )所示，相鄰之第1光配向膜5 5之間 ’會形成第2光配向膜5 6。 接著如ffl 6 ( d )所示，在第1光配向膜5 5及第2光 膜56的表面上，以適當之光照射裝置進行全面曝光 處理’使該光重合性液晶材料層57A硬化，便如圖6 ( e )所示’第1光配向膜55上形成之第1液晶聚合物層部 -17- 201243214 分5 7，及與該第1液晶聚合物層部分5 7的液晶配光狀態 相異之第2液晶聚合物層部分5 8，兩部分會形成條紋狀圖 樣化之液晶聚合物層5 9 ’依此得到圖樣化相位差薄膜。 圖1、圖2、圖3所示光照射裝置當中，由點光源之 短弧型放電燈13’與具旋轉拋物面狀之光反射面的反光板 15所構成的複數光源元件12，沿其中一方向（X方向） 排列配置而成爲光源元件列1 1 a，1 1 b，以此構成燈單元 10° 因此，構成該光源元件列1 1之光源元件1 2，其各個 放電燈13所放射之光，會因該光源元件12的各個反光板 15，於光源元件12排列之其中一方向，成爲彼此平行之 平行光；藉此，來自聚光構件20的光便如圖7所示，相 對於遮罩30的透光部34之面方向，呈正交或略正交射入 ，透過該透光部34。是故，被照射物W位於遮罩30的遮 光部3 3正下方之區域，便可防止或抑制受到光照射，而 能忠於遮罩3 0之圖樣，形成高解析度之圖樣。 此外，上述燈單元的兩個光源元件列11a、lib，其中 —方的光源元件列1 1 a之光源元件1 2中，放電燈1 3電極 之間的中心點A1，以及與該光源元件1 2最爲接近之，另 一方的光源元件列1 1 b之光源元件1 2中放電燈1 3電極之 間的中心點A2，兩點相連之直線T，與X方向延伸之直 線X呈斜交的方式配置。因此，被照射區域可獲得均勻之 照度分布。 圖8爲光照射區域中X方向之照度分布示意曲線圖。 -18- 201243214 該圖中，縱軸爲相對照度，橫軸爲於χ方向之相對位置， 實線表示來自其中一方的光源元件列1 1 a的光之光照射區 域照度分布曲線，虛線表示來自另一方的光源元件列1 1 b 的光之光照射區域照度分布曲線。 如同圖所示，其中一個光源元件列1 1 a的光源元件1 2 產生的光，其照射區域照度最弱的位置，與該光源元件最 爲接近之，另一光源元件列lib的光源元件12產生的光 之照射區域照度最強的位置重叠；另一方面，光源元件列 1 1 b的光源元件1 2產生的光，其照射區域照度最弱的位置 ，與光源元件列1 1 a的光源元件1 2產生的光之照射區域 .最強位置重疊；結果便可獲得均勻的照度分布。 依據上述燈單元10，以聚光構件20聚光之光照射區 域中，各光源元件列1 1 a、1 1 b的各光源元件1 2射出的光 ，其照度的峰値及谷値，針對各光源元件列，於光源元件 1 2排列的其中一方向，各顯現於前述每隔A/2之位置。 因此’其中一個光源元件列11a的各光源元件12之 照度谷値部分，會因爲另一光源元件列1 1 b的各光源元件 1 2之照度峰値部分，而獲得補償。亦即，來自各光源元件 1 2的聚光光彼此重疊，使得其中一個光源元件列丨丨^的各 光源元件1 2之照度峰値及谷値，與另一光源元件列i i b 的各光源元件1 2之照度峰値及谷値，成爲互補關係。綜 上所述’具備本發明燈單元之光照射裝置，擁有均勻之照 度分布。 不過’當放電燈的照度比起初期下降了規定比率以上 -19- 201243214 ，而達使用壽命時，便需要更換新品。然而每個放電燈的 使用壽命不同，亦可能發生如下情形：光射出部的某一特 定燈的照度，提前較其他放電燈的照度快速降低，而達使 用壽命》 此時，若僅將該特定燈更換成新品，則更換之新燈照 度會與其餘燈的照度不同，導致照射區域的照度分布變得 不均勻。因此，發生上述特定燈提前達使用壽命之情形時 ，構成光射出部的所有燈都必須一槪更換成新品。 此外，上述光照射裝置的光源元件列其中一方向之全 長，會因應被照射物的大小而變動。光源元件列其中一方 向之全長爲500〜1500mm時，一般會使用包含8x8燈（計 16燈）〜2 4x24燈（計48燈）之光源元件。 也就是說，上述特定燈達使用壽命時，包須將複數燈 —槪更換成新品。 然而像這樣將複數燈一槪更換成新品的作業並不容易 ，且需耗費長時間。特別是光源元件列於其中一方向的全 長較長，亦即光源元件的個數較多時，光是將所有的燈取 下再裝上新品，就需耗費長時間。 此外，各放電燈個別之照度相異，於交換所有燈時， 必須進行照度分布調整。該照度分布調整，是將所有燈同 時點燈，藉此測定照度分布。此時必須進行一些作業，如 將照度較其他燈特別高或特別低者剔除，而選擇照度較平 均的燈。因此，照度分布調整隨著光源元件個數愈多，所 需時間愈長。考量在設置光照射裝置的使用者工廠處，進 -20- 201243214 行該照度分布調整作業的情形下，必須長時間停止光照射 裝置，故可能導致生產效率下降，給使用者帶來莫大的困 擾。 因此’當燈達到使用壽命時，有必要迅速更換構成燈 單元的所有燈。此外’針對裝入新品燈而成之燈單元，預 先完成照度分布調整較佳，如此便不必在安裝光照射裝置 的使用者工廠進行照度分布調整。 如上所述，針對具備燈單元之光照射裝置，其中該燈 單元具有短弧型放電燈於其中一方向排列配置而成之複數 光源元件列者’當燈單元達到使用壽命時，是以燈單元爲 單位進行交換。 以下說明本發明上述燈單元之具體構成例。該燈單元 具備聚光構件，用以將光射出部射出之光聚光成線狀；利 用該聚光構件，將線狀聚光於第1方向的光照射至被照射 物，並用於光照射裝置；構成上述光射出部之燈單元，其 特徵爲：具有：複數之光源元件列，分別朝同方向延伸， 由短弧型放電燈、及以包圍該放電燈的方式配置之，由反 光板所構成之複數光源元件，朝上述第1方向排列配置而 成；和光源元件支撐框體，具有對應於各光源元件之光源 元件容納部；該燈單元可以整個燈單元爲單位進行更換， 且可獲得均勻之照度分布，且可視需要構成長型之燈單元 〇 圖9爲本發明實施例的燈單元之具體構成例立體示意 圖。又，圖9所示之燈單元既可單獨使用，亦可如後所述 -21 - 201243214 ，將複數燈單元於光源元件的排列方向（前述χ方向）予 以連結，構成更長的燈單元。 本實施例之燈單元1 〇係如前述，分別將各8個由短 弧型放電燈13與反光板15所成之光源元件12，於其中一 方向（前述X方向）排列配置以構成光源元件列Π a、 lib後，再將該兩個光源元件列11a、lib沿上述其中一方 向之正交方向（前述Y方向）排列而成，各光源元件12 被收納於具有光源元件容納部的蜂巢構造體（光源元件支 撐框體）16之中。亦即，燈單元10由合計16個光源元件 12所構成，於其中一方向之全長約爲5 00mm。從各光源 元件12放電燈上拉出引線12a，連接於端子12b。 蜂巢構造體16如圖10所示，具有與光源元件12同 樣個數之光源元件容納部1 6a，各光源元件容納部1 6a之 間設置隔壁1 6b。蜂巢構造體1 6的各光源元件容納部1 6a ，係由兩列容納部所構成，以便收納光源元件列1 1 a的8 個光源元件1 2，及光源元件列1 1 b的8個光源元件1 2 » 蜂巢構造體1 6的各光源元件容納部1 6a所收納之各 光源元件1 2的光射出側（前面），如圖9所示設置前面 玻璃1 8，前面玻璃1 8由玻璃固定金屬配件1 8 a所固定。 玻璃固定金屬配件1 8a，係爲一板狀體，與光源元件 12具有同樣個數之開口，於各個燈單元爲一體成形，於蜂 巢構造體1 6的光射出側端面以螺絲固定。玻璃固定金屬 配件1 8 a各個開口之大小，比各光源元件1 2的前面玻璃 1 8稍小，以防前面玻璃1 8脫落。 -22- 201243214 又，蜂巢構造體1 6所收納之各光源元件1 2，如前述 圖1 ( b )所示，光源元件列1 1 a的各光源元件1 2中心位 置爲A1、與該光源元件12最爲接近之另一光源元件列 1 1 b的光源元件1 2中心位置爲A2時，假設X方向的間隔 距離爲Η，各光源兀件12於X方向的寬度爲A，則令Η 滿足η=α/ν。 因此，蜂巢構造體1 6中收納光源元件列1 1 a的部分 ，於光源元件12排列方向（前述X方向）之端面16d、 以及收納前述光源元件列H b的部分，於光源元件1 2排 列方向（前述X方向）之端面16e，便如圖1(b)、圖9 、圖1 〇所示，兩端面相對於光源元件1 2的排列方向（前 述X方向），具有前述Η的差距（當光源元件列爲2列 時，値爲Α/2 )。 圖1 1所示爲蜂巢構造體的光源元件容納部剖面圖。 如同圖所示，蜂巢構造體1 6於光射出側的端面上’ 設有前面玻璃18並以玻璃固定金屬配件18a固定；此外 ’蜂巢構造體1 6於上述光射出側的反對側之面上，設有 燈固定用的底蓋16c。 各光源元件12如圖11所示，固定於蜂巢構造體16 的各光源元件容納部16a內。 首先，將前面玻璃1 8裝配於玻璃固定金屬配件1 8 a 上。接著，以放電燈13的管軸與前面玻璃18呈正交的方 式’將光源元件1 2配置於蜂巢構造體1 6的光源元件容納 部！6a內。光源元件12由放電燈13、反光板15、反光板 -23- 201243214 基座17所構成，藉由黏著劑等而固定》 同前所述，蜂巢構造體16的光源元] 隔壁1 6 b所區隔，各光源元件1 2藉由隔 ，收納於各光源元件容納部16a內。又， 光射出側觀察時，光源元件1 2的反光板 其收納進四角形之光源元件容納部1 6a，1 的一部分，圖1 1所示的曲線1 5 a，即爲 1 5之端部。 又如同圖所示，彈簧19介插於上述β 底蓋1 6c之間，藉彈簧1 9將光源元件1 2 ，使得光源元件1 2的反光板1 5光射出開 壓於前面玻璃18上。藉此，前面玻璃18 壓於玻璃固定用金屬配件1 8a光源元件側 :光源元件1 2中，反光板1 5光射出開口 壓於前面玻璃1 8的光源元件1 2側之面， 造體16。 藉由上述構成，將各光源元件12中， 出開口側的端面，預先設定成與光源元件 光軸互相垂直，且預先提升前面玻璃的平 ，只要以彈簧1 9從下往上頂壓光源元件 整，即可讓各光源元件1 2射出的光成爲平 此外，各光源元件12以隔壁16b所 巢構造體1 6中，故可輕易地定位各光源） 和來自相鄰放電燈的熱影響。此外，即使 容納部16a由 壁16b相互隔開 在圖1 1中，從 1 5呈圓形，爲將 ί削去反光板1 5 被削去的反光板 i光板基座1 7與 朝玻璃面側彈推 口側之端面，頂 的前端面，被頂 內面的邊緣部分 側的端面，被頂 而固定於蜂巢構 反光板1 5光射 1 2所射出光之 面度，如此一來 1 2，無須特殊調 行光。 隔開並收納於蜂 C件1 2，亦可緩 產生漏光，亦不 -24- 201243214 會影響相鄰的燈。 上述燈單元1 〇中，各個燈的照度有所差異，需要預 先調整照度分布。照度分布之調整，例如可將所有燈同時 點燈，進行照度分布測定，確認照度分布是否均勻，當照 度分布不均勻，進行下述調整。 找出照度較其他燈特別高或特別低，會擾亂照度分布 的特定燈之後，剔除該特定燈並更換之，而後再度測定照 度分布，確認照度分布是否均勻。重覆進行該一連串手續 ，直到如前述圖8所示，其中一個光源元件列的光源元件 之照射區域之照度谷値位置，與另一光源元件列的光源元 件之照射區域之照度峰値位置彼此重疊，獲得均勻之照度 分布爲止。 以上述方式預先備妥已調整好照度分布之燈單元，則 當前述光照射裝置之燈單元1 0的燈達到使用壽命時，即 可在使用者的工廠迅速更換燈單元，而無需進行照度分布 調整。此外，燈單元中，各光源元件12所射出的光，其 光軸互相平行，故無需針對各光源元件進行光軸調整，可 直接安裝至光照射裝置上。 圖1 2所示之燈單元，是將兩組圖9所示之燈單元1 0a 、1 Ob，利用板狀之連結用金屬配件1 6 f以螺絲固定後連 結而成者。燈單元10a' l〇b連結時，係燈單元10a的光 源元件1 2排列方向之端面1 6 d與1 6 e，分別與燈單元1 〇 b 的端面16e與16d接觸對位，再以連結用金屬配件I6f予 以連結。從各光源元件12放電燈上拉出引線12a，連接於 -25- 201243214 端子12b。 以上述方式連結之燈卓兀’合計由3 2個光源元件所 構成，其中一方向之全長約爲1000mm。 以上述方式構成之燈單元同前述圖9，其中一個光源 元件列的各光源元件1 2之中心位置A 1，以及與該光源元 件1 2最爲接近之另一光源元件列的光源元件1 2之中心位 置A2，兩中心位置相連之直線，與上述光源元件的排列 方向（前述X方向）延伸之直線，呈斜交的方式配置：假 設中心位置A 1與A2於上述排列方向之距離爲η，則 Η = Α/2。 圖1 3爲將圖1 2所示燈單元裝入光照射裝置之型態示 意圖’同圖（a)爲立體圖、（b)爲從燈單元光射出側觀 察時之圖。又，圖13中所示者爲連結兩個燈單元所構成 之物，裝入光照射裝置時之情形，但圖9所示之單一燈單 元，同樣可裝入光照射裝置中。 如圖1 3 ( a )所示，光照射裝置之裝置本體60側上， 設有複數之燈單元導軌62，以供燈單元1 〇裝卸之用。各 導軌62分別形成於各燈單元長度方向之兩端附近，並且 朝燈單元1 〇中各光源元件列的光源元件1 2排列方向之正 交方向延伸。 燈單元10的蜂巢構造體16之底面上，爲了對應上述 裝置本體60的燈單元導軌62,在各蜂巢構造體16長度方 向的兩端附近，分別形成有與上述導軌62朝同方向延伸 之脚部61。此外，裝置本體60上設有定位擋塊63，用以 -26- 201243214 抵接燈單元1 〇並進行定位，其分別位於燈單元1 0的兩端 部，以及對應於中央部之處。 燈單元10中，設於蜂巢構造體16底面之各脚部61 ’ 相對於設於上述裝置本體60上之各導軌62，從上述光源 元件列的光源元件1 2排列方向之正交方向滑入；再如圖 13(b)所示，令蜂巢構造體16兩端部的端面與上述定位 擋塊63抵接，藉此安裝在裝置本體60上。 圖13中所示者，爲兩個燈單元於長度方向彼此連結 所構成之物，但裝入光照射裝置之燈單元個數，視其與被 處理物全長的關係，可做適當調整。同圖例中，其照射於 被處理物之線狀聚光光的光照射區域，於光源元件排列方 向之全長爲1 000mm。該光照射區域之全長較短，例如爲 5 00mm左右時，那麼燈單元個數亦可爲1個。 又，連結複數燈單元時，每個燈單元之形狀相同較佳 。換言之，連結複數燈單元時，如圖9等各圖所示，複數 個（例如8個）光源元件分別於某一方向並排而成燈單元 ，則複數燈單元連結時亦於該某一方向連結較佳。藉此， 各燈單元連結部分正下方之光照射區域，便不會發生照度 不均，而可獲得均勻之照度分布。 圖1 4爲上述以外之燈單元實施例。 如圖14(a) ( b )所示，燈單元1 〇，亦可具有3列 以上之，由複數光源元件12朝其中一方向排列形成之光 源元件列1 1。光源元件列1 1的列數愈多，照度分布的均 勻度愈能提升。若以圖1 4 ( a )( b )所示之燈單元爲例， -27- 201243214 前述聚光構件20所聚光之光照射區域中，各光源元件列 中各光源元件12射出光之照度峰値及谷値，針對各光源 元件列，於光源元件排列的其中一方向，各顯現於每隔 A/3之位置。因此，各光源元件的照度谷値部分，會因各 光源元件的峰値部分而獲得補償。換言之，來自各光源元 件之聚光光重疊時，各光源元件之照度峰値及谷値呈互補 關係，使照度分布變得均勻。 【圖式簡單說明】 〔圖1〕本發明具備光射出部（燈單元）之光照射裝 置的槪略構成圖。 〔圖2〕圖1所示光照射裝置沿YZ面截斷之剖面圖 〇 〔圖3〕圖1所示光照射裝置沿XZ面截斷之剖面圖 〇 〔圖4〕具體的遮罩構成例示意圖。 〔圖5〕搬運手段的滾子與遮罩附近的放大圖。 〔圖6〕圖樣化相位差薄膜製程的一例之示意圖。 〔圖7〕圖1 ~圖3所示光照射裝置的光照射方向說明 圖。 〔圖8〕使用圖1〜圖3所示光照射裝置時，光照射區 域中X方向之照度分布示意曲線圖。 〔圖9〕本發明實施例的燈單元之具體構成例立體示 意圖* -28- 201243214 〔圖10〕未收納光源元件的蜂巢構造體之立體示意圖 〇 〔圖1 1〕蜂巢構造體的光源元件容納部剖面圖。 〔圖12〕將兩個圖9所示燈單元予以連結，構成長型 燈單元之示意圖。 〔圖1 3〕將圖1 2所示燈單元裝入光照射裝置之型態 示意圖。 〔圖1 4〕燈單元其他實施例之示意圖。 〔圖1 5〕構成3 D影像顯示裝置的一例之槪略示意圖 〇 〔圖1 6〕圖樣化相位差薄膜製程之示意說明圖。 〔圖17〕使用習知之光照射裝置時，光通過遮罩透光 部之示意說明圖。 【主要元件符號說明】 10，10a、10b ：燈單元 1 1 ’ 1 1 a，1 1 b :光源元件列 1 2 :光源元件 12a :引線 12b :端子 1 3 :放電燈 14 :發光管 1 5 :反光板 1 6 :蜂巢構造體 -29- 201243214 16a :光源元件容納部 1 6 b :隔壁 1 6c :底蓋 1 6 d，1 6 e :端面 16f :連結用金屬配件 1 7 :反光板基座 1 8 :前面玻璃 1 8 a :玻璃固定金屬配件 1 9 :彈簧 2 0 :聚光構件 30 :遮罩 3 1 :透光性基板 32 :遮光膜 33 :遮光部 3 4 :透光部 3 5 :偏光元件 40 :搬運手段 41 :滾子 5 1 :薄膜基材 52 :配向膜 52A:配向膜用材料層 5 3 :液晶聚合物層 5 3 A :光重合性液晶材料層 60 :裝置本體 -30 201243214 6 1 :脚部 62 :燈單元導軌 63 :定位擋塊The parallel light emitted from the lamp unit 10 is reflected downward by the light reflecting surface of the condensing member 20, and is condensed into a line extending in the X direction, and enters the mask 30 via the polarizing element 35. The light incident on the mask 30 is parallel to each other in the direction of X-16-201243214. The light incident on the mask 30 is formed into a stripe shape by the light shielding portion and the light transmitting portion of the mask 30, and is irradiated onto the surface of the object W to be irradiated with the object 41. A stripe-shaped light irradiation region corresponding to the light shielding portion of the mask 30 and the light transmission portion pattern is formed. On the other hand, the irradiated object W is transported in the Z direction by the transport means 40, and the light irradiation treatment required for the irradiated object W is achieved. In such a light irradiation device, a patterned phase difference film can be produced by using a material for a photoalignment film by the following method. First, as shown in Fig. 6(a), a material for a liquid photo-alignment film is applied onto the film substrate 51, and dried or cured to form a material layer 5 5 A for the photo-alignment film. Next, the photo-alignment film material layer 55A is subjected to selective exposure treatment by linearly polarized light by the above-described light irradiation device, and as shown in FIG. 6(b), a stripe pattern is formed on the film substrate 51. 1 The light alignment film 5 5 〇 is further irradiated with a suitable light irradiation device to have a polarized light of 90 as shown in Fig. 6 (b). The linearly polarized light having a different polarization direction is subjected to the full-exposure treatment. As shown in Fig. 6(c), the second photo-alignment film 56 is formed between the adjacent first photo-alignment films 55. Then, as shown in ffl 6 (d), the entire photo-alignment liquid crystal material layer 57A is cured by performing a full-exposure treatment on the surface of the first photo-alignment film 55 and the second photo film 56 with an appropriate light irradiation device. As shown in Fig. 6(e), the first liquid crystal polymer layer portion -17-201243214 is formed on the first photo-alignment film 55, and the liquid crystal is distributed to the liquid crystal polymer layer portion 57. The second liquid crystal polymer layer portion 558 having different states is formed into a stripe-like patterned liquid crystal polymer layer 5', thereby obtaining a patterned retardation film. In the light irradiation device shown in Fig. 1, Fig. 2, and Fig. 3, a plurality of light source elements 12 composed of a short-arc discharge lamp 13' of a point source and a reflector 15 having a parabolic light-reflecting surface are disposed along one of them. The direction (X direction) is arranged to form the light source element rows 1 1 a, 1 1 b, thereby constituting the lamp unit 10°. Therefore, the light source elements 1 2 constituting the light source element row 1 1 are radiated by the respective discharge lamps 13 The light is parallel to each other in one of the directions of the light source elements 12 due to the respective light reflecting plates 15 of the light source elements 12; thereby, the light from the light collecting member 20 is as shown in FIG. The direction of the surface of the light transmitting portion 34 of the mask 30 is orthogonal or slightly orthogonal, and is transmitted through the light transmitting portion 34. Therefore, the object to be irradiated W is located in a region directly under the light shielding portion 3 of the mask 30, so that it can be prevented or suppressed from being irradiated with light, and the pattern of the mask 30 can be faithfully formed to form a high-resolution pattern. Further, the two light source element rows 11a, lib of the lamp unit, wherein the light source element 1 2 of the light source element array 1 1 a, the center point A1 between the electrodes of the discharge lamp 13 3, and the light source element 1 2 is the closest, the other side of the light source element array 1 1 b of the light source element 1 2, the center point A2 between the electrodes of the discharge lamp 13 3, the straight line T connecting the two points, oblique with the straight line X extending in the X direction Way of configuration. Therefore, a uniform illuminance distribution can be obtained in the irradiated area. Fig. 8 is a graph showing the illuminance distribution in the X direction in the light irradiation region. -18- 201243214 In the figure, the vertical axis is the relative illuminance, the horizontal axis is the relative position in the χ direction, and the solid line is the illuminance distribution curve of the light irradiation region of the light source element row 1 1 a from one of the light source lines, and the broken line indicates The light source of the other light source element array 1 1 b illuminates the area illuminance distribution curve. As shown in the figure, the light generated by the light source element 12 of one of the light source element arrays 1 1 a has the weakest illumination area of the illumination area, and is closest to the light source element, and the light source element 12 of the other light source element column lib The position where the illuminance of the generated light region is the strongest is overlapped; on the other hand, the light generated by the light source element 12 of the light source element array 1 1 b is the position where the illumination area is the weakest, and the light source element of the light source element array 1 1 a 1 2 The area of illumination produced by the light. The strongest position overlaps; the result is a uniform illumination distribution. According to the lamp unit 10, in the light irradiation region where the light collecting member 20 collects light, the light emitted from each of the light source elements 1 1 of each of the light source element rows 1 1 a and 1 1 b has an illuminance peak and a valley, Each of the light source element rows appears in each of the directions in which the light source elements 12 are arranged at every A/2 position. Therefore, the illuminance valley portion of each of the light source elements 12 of one of the light source element rows 11a is compensated for by the illuminance peak portion of each of the light source elements 1 2b of the other light source element array 1 1 b. That is, the condensed light from each of the light source elements 12 overlaps each other such that the illuminance peaks and valleys of the light source elements 1 2 of one of the light source elements are aligned with the light source elements of the other light source element array iib The illuminance peaks and valleys of 1 2 become complementary. As described above, the light irradiation device having the lamp unit of the present invention has a uniform illuminance distribution. However, when the illuminance of the discharge lamp is lower than the initial ratio by -19-201243214, and the service life is reached, it is necessary to replace the new product. However, the service life of each discharge lamp is different, and the following situation may occur: the illumination of a particular lamp of the light exiting portion is rapidly lowered in comparison with the illumination of other discharge lamps, and reaches the service life. When the lamp is replaced with a new one, the illuminance of the replaced new lamp will be different from the illuminance of the remaining lamps, resulting in uneven illumination distribution in the illuminated area. Therefore, when the above-mentioned specific lamp reaches the service life in advance, all the lamps constituting the light exiting portion must be replaced with new ones. Further, the light source element array of the above-described light irradiation device has a full length in one direction, and varies depending on the size of the object to be irradiated. When the total length of one of the light source elements is 500 to 1500 mm, a light source element including 8 x 8 lamps (16 lamps) to 2 4 x 24 lamps (48 lamps) is generally used. That is to say, when the above specific lamp reaches the service life, the bag must be replaced with a new lamp. However, it is not easy to replace the multiple lamps into new ones like this, and it takes a long time. In particular, when the light source elements are arranged in a long direction in one of the directions, that is, when the number of the light source elements is large, it takes a long time to remove all the lamps and then install the new ones. In addition, the individual illuminations of the discharge lamps are different, and the illumination distribution adjustment must be performed when all the lamps are exchanged. The illuminance distribution is adjusted by lighting all the lamps at the same time, thereby measuring the illuminance distribution. At this point, some work must be done, such as selecting a lamp with a higher illumination or a particularly low illumination than other lamps, and selecting a lamp with a relatively uniform illumination. Therefore, the illuminance distribution is adjusted as the number of light source elements increases, and the longer it takes. When the illuminance distribution adjustment operation is performed in the user's factory where the light irradiation device is installed, it is necessary to stop the light irradiation device for a long time, which may cause a decrease in production efficiency and cause great trouble to the user. . Therefore, when the lamp reaches the end of its service life, it is necessary to quickly replace all the lamps constituting the lamp unit. In addition, it is preferable to adjust the illuminance distribution in advance for the lamp unit in which the new lamp is mounted, so that it is not necessary to adjust the illuminance distribution in the factory where the light irradiation device is installed. As described above, for a light irradiation device having a lamp unit, wherein the lamp unit has a plurality of light source elements arranged in a direction in which one of the short arc type discharge lamps is arranged, when the lamp unit reaches the service life, it is a lamp unit. Exchange for the unit. A specific configuration example of the above lamp unit of the present invention will be described below. The lamp unit includes a condensing member for condensing the light emitted from the light emitting portion into a line shape, and the light condensing the light in the first direction is irradiated to the object to be irradiated by the concentrating member, and is used for light irradiation. And a lamp unit constituting the light emitting portion, comprising: a plurality of light source element rows extending in the same direction, being arranged by a short arc type discharge lamp and surrounding the discharge lamp, and comprising a reflector The plurality of light source elements are arranged side by side in the first direction; and the light source element supporting frame has a light source element housing portion corresponding to each of the light source elements; the lamp unit can be replaced by the entire lamp unit, and A uniform illumination distribution is obtained, and a long lamp unit can be constructed as needed. FIG. 9 is a perspective view showing a specific configuration example of a lamp unit according to an embodiment of the present invention. Further, the lamp unit shown in Fig. 9 may be used alone or as described later -21 - 201243214, and the plurality of lamp units may be connected to each other in the direction in which the light source elements are arranged (the above-described χ direction) to constitute a longer lamp unit. The lamp unit 1 of the present embodiment is configured such that each of the eight light source elements 12 formed by the short arc type discharge lamp 13 and the reflecting plate 15 is arranged in one direction (the X direction) to constitute a light source element. After the arrays a and lib, the two light source element rows 11a and 11b are arranged in the orthogonal direction (the Y direction) of the one direction, and the light source elements 12 are housed in the honeycomb having the light source element housing portion. The structure (light source element support frame) 16 is included. That is, the lamp unit 10 is composed of a total of 16 light source elements 12, and has a total length of about 500 mm in one direction. The lead wires 12a are pulled out from the discharge lamps of the respective light source elements 12, and are connected to the terminals 12b. As shown in Fig. 10, the honeycomb structure 16 has the same number of light source element housing portions 16a as the light source elements 12, and a partition wall 16b is provided between each of the light source element housing portions 16a. Each of the light source element housing portions 16a of the honeycomb structure 16 is composed of two rows of housing portions for accommodating the eight light source elements 1 2 of the light source element array 1 1 a and the eight light sources of the light source element array 1 1 b Element 1 2 » Light source side (front side) of each light source element 1 2 housed in each of the light source element housing portions 1 6 a of the honeycomb structure 1 6 , as shown in FIG. 9 , the front glass 18 is provided, and the front glass 1 8 is made of glass. The fixing metal fittings are fixed by 1 8 a. The glass fixing metal fitting 18a is a plate-like body having the same number of openings as the light source element 12, and is integrally formed in each of the lamp units, and is fixed to the light-emitting side end surface of the honeycomb structure 16 by screws. The size of each opening of the glass fixing metal fitting 18 8 is slightly smaller than the front glass 18 of each light source element 12 to prevent the front glass 18 from falling off. -22- 201243214 Further, as shown in FIG. 1(b), each of the light source elements 1 2 housed in the honeycomb structure 16 has a central position of the light source element 1 2 of the light source element array 1 1 a and the light source When the center position of the light source element 1 2 of the other light source element array 1 1 b closest to the element 12 is A2, assuming that the distance in the X direction is Η, and the width of each light source element 12 in the X direction is A, then Η Satisfy η = α / ν. Therefore, the portion in which the light source element row 11a is housed in the honeycomb structure 16 is arranged in the light source element 12 in the end face 16d in the direction in which the light source element 12 is arranged (in the X direction) and the portion in which the light source element row Hb is housed. As shown in Fig. 1 (b), Fig. 9, and Fig. 1 , the end faces 16e of the direction (the X direction) have the above-described Η difference with respect to the arrangement direction of the light source elements 12 (the X direction). When the light source elements are listed in two columns, 値 is Α/2). Fig. 11 is a cross-sectional view showing a light source element housing portion of the honeycomb structure. As shown in the figure, the honeycomb structure 16 is provided with a front glass 18 on the end face on the light exit side and fixed by a glass fixing metal fitting 18a; and further, the honeycomb structure 16 is on the opposite side of the light emitting side. A bottom cover 16c for fixing the lamp is provided. Each of the light source elements 12 is fixed to each of the light source element housing portions 16a of the honeycomb structure 16 as shown in FIG. First, the front glass 18 is assembled to the glass fixing metal fitting 18a. Next, the light source element 1 2 is placed in the light source element housing portion of the honeycomb structure 16 in a manner orthogonal to the tube axis of the discharge lamp 13 and the front glass 18! Within 6a. The light source element 12 is composed of a discharge lamp 13, a reflector 15, a reflector -23-201243214, and is fixed by an adhesive or the like. As described above, the light source element of the honeycomb structure 16 is partitioned by a partition wall 16b. Each of the light source elements 1 2 is housed in each of the light source element housing portions 16a. Further, when viewed on the light exit side, the light reflecting plate of the light source element 12 is housed in a part of the square light source element housing portion 16a, 1 , and the curve 15 5 a shown in Fig. 11 is the end portion of the fifteenth. As shown in the figure, the spring 19 is interposed between the above-mentioned β bottom cover 16c, and the light source element 12 is guided by the spring 19 so that the light reflecting plate 15 of the light source element 12 is light-ejected on the front glass 18. Thereby, the front glass 18 is pressed against the glass fixing metal fitting 18a on the light source element side: in the light source element 12, the light emitting opening of the reflecting plate 15 is pressed against the surface of the front glass 18 on the side of the light source element 12, and the body 16 is formed. . According to the above configuration, the end surface on the opening side of each of the light source elements 12 is set to be perpendicular to the optical axis of the light source element, and the front glass is raised in advance, and the light source element is pressed from the bottom up by the spring 19. In addition, the light emitted from each of the light source elements 12 can be made flat, and each of the light source elements 12 can be easily positioned between the respective light sources) and the adjacent discharge lamps by the partitions 16b. Further, even if the accommodating portion 16a is separated from each other by the wall 16b in Fig. 11, a circular shape from 15 is used, and the reflecting plate i-light board base 7 and the glass surface which are cut off by the clarifying reflector 15 are removed. The end surface of the side of the side of the side of the side of the pusher, the front end surface of the top end, and the end surface of the edge portion of the top inner surface are fixed to the surface of the honeycomb reflector 1 15 light beam, and thus the light is emitted. 2, no special tune light is required. Separated and stored in the bee C 1 2, light leakage can also be slowed out, and -24-201243214 will affect adjacent lamps. In the above lamp unit 1 ,, the illuminance of each lamp is different, and it is necessary to adjust the illuminance distribution in advance. For the adjustment of the illuminance distribution, for example, all the lamps can be lit at the same time, and the illuminance distribution measurement can be performed to confirm whether the illuminance distribution is uniform. When the illuminance distribution is uneven, the following adjustment is performed. After finding a specific lamp whose illumination is particularly high or low, which will disturb the illumination distribution, remove the specific lamp and replace it, and then measure the illumination distribution again to confirm whether the illumination distribution is uniform. Repeating the series of procedures until the illuminance valley position of the illumination area of the light source element of one light source element row and the illumination intensity peak position of the illumination area of the light source element of another light source element row are repeated as shown in FIG. 8 above. Overlap and obtain a uniform illumination distribution. By pre-preparing the lamp unit with the illuminance distribution adjusted in the above manner, when the lamp of the lamp unit 10 of the light irradiation device reaches the service life, the lamp unit can be quickly replaced in the user's factory without illuminance distribution. Adjustment. Further, in the lamp unit, since the light beams emitted from the respective light source elements 12 are parallel to each other, it is not necessary to perform optical axis adjustment for each of the light source elements, and can be directly mounted on the light irradiation device. In the lamp unit shown in Fig. 12, two sets of the lamp units 10a and 1ob shown in Fig. 9 are screwed and fixed by a plate-shaped connecting metal fitting 16f. When the lamp units 10a' lb are connected, the end faces of the light unit 1 2 in the direction in which the light source elements 1 2 are arranged are in contact with the end faces 16e and 16d of the lamp unit 1 〇b, respectively, and then connected. Connected with metal fittings I6f. The lead wire 12a is pulled out from the discharge lamp of each light source element 12, and is connected to the terminal 12b of -25-201243214. The lamps connected in the above manner are composed of 32 light source elements, and the total length in one direction is about 1000 mm. The lamp unit constructed in the above manner is the same as the above-mentioned FIG. 9, in which the center position A1 of each light source element 12 of one light source element row and the light source element 1 2 of another light source element row closest to the light source element 12 The center position A2, a straight line connecting the two center positions, and a straight line extending in the direction in which the light source elements are arranged (the X direction) are obliquely arranged: assuming that the distance between the center positions A 1 and A2 in the above arrangement direction is η , then Η = Α/2. Fig. 13 is a view showing a state in which the lamp unit shown in Fig. 12 is incorporated in a light-emitting device. The same figure (a) is a perspective view, and (b) is a view when viewed from the light-emitting side of the lamp unit. Further, the case shown in Fig. 13 is a case where the two lamp units are connected and incorporated in the light irradiation device, but the single lamp unit shown in Fig. 9 can also be incorporated in the light irradiation device. As shown in Fig. 13 (a), on the side of the apparatus body 60 of the light irradiation device, a plurality of lamp unit guides 62 are provided for the lamp unit 1 to be loaded and unloaded. Each of the guide rails 62 is formed in the vicinity of both ends in the longitudinal direction of each of the lamp units, and extends in the direction orthogonal to the direction in which the light source elements 12 of the respective light source element rows in the lamp unit 1 are arranged. In the bottom surface of the honeycomb structure 16 of the lamp unit 10, in order to correspond to the lamp unit guide 62 of the apparatus main body 60, legs extending in the same direction as the guide rails 62 are formed in the vicinity of both ends in the longitudinal direction of each of the honeycomb structures 16. Part 61. In addition, the device body 60 is provided with a positioning stopper 63 for abutting and positioning the lamp unit 1 -26- 201243214, which are respectively located at both ends of the lamp unit 10 and corresponding to the central portion. In the lamp unit 10, the leg portions 61' provided on the bottom surface of the honeycomb structure 16 are slid in the direction orthogonal to the direction in which the light source elements 12 are arranged with respect to the respective guide rails 62 provided on the apparatus main body 60. Further, as shown in FIG. 13(b), the end faces of both end portions of the honeycomb structure 16 are brought into contact with the positioning stopper 63, thereby being attached to the apparatus body 60. As shown in Fig. 13, the two lamp units are connected to each other in the longitudinal direction, but the number of lamp units incorporated in the light irradiation device can be appropriately adjusted depending on the relationship with the entire length of the object to be processed. In the same example, the light irradiation region of the linear concentrated light irradiated to the object to be processed is 1 000 mm in the entire direction in which the light source elements are arranged. When the total length of the light irradiation region is short, for example, about 500 mm, the number of lamp units may be one. Further, when the plurality of lamp units are connected, the shape of each of the lamp units is preferably the same. In other words, when the plurality of lamp units are connected, as shown in FIG. 9 and the like, a plurality of (for example, eight) light source elements are arranged side by side in a certain direction to form a lamp unit, and the plurality of lamp units are also connected in the certain direction when connected. Preferably. Thereby, the light irradiation area directly under the connection portion of each of the lamp units does not cause illuminance unevenness, and a uniform illuminance distribution can be obtained. Figure 14 is an embodiment of a lamp unit other than the above. As shown in Fig. 14 (a) and (b), the lamp unit 1 〇 may have three or more rows of the light source element arrays 1 formed by the plurality of light source elements 12 arranged in one direction. The more the number of columns of the light source element row 1 1 , the more uniform the illuminance distribution is. Taking the lamp unit shown in FIG. 14 ( a ) ( b ) as an example, -27-201243214 illuminance of light emitted from each light source element 12 in each light source element row in the light-irradiated area of the light collecting member 20 The peaks and valleys are displayed at every A/3 position in one of the directions of the arrangement of the light source elements for each of the light source element rows. Therefore, the illuminance valley portion of each light source element is compensated for by the peak portion of each light source element. In other words, when the collected light from the respective light source elements overlap, the illuminance peaks and valleys of the respective light source elements are complementary, and the illuminance distribution is made uniform. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing a configuration of a light irradiation device including a light emitting portion (lamp unit) according to the present invention. Fig. 2 is a cross-sectional view of the light irradiation device shown in Fig. 1 taken along the YZ plane. Fig. 3 is a cross-sectional view of the light irradiation device shown in Fig. 1 taken along the XZ plane. Fig. 4 is a schematic view showing a specific mask configuration. [Fig. 5] An enlarged view of the vicinity of the roller and the cover of the transport means. [Fig. 6] Schematic diagram of an example of a process for patterning a phase difference film. Fig. 7 is a view showing the light irradiation direction of the light irradiation device shown in Figs. 1 to 3; Fig. 8 is a graph showing the illuminance distribution in the X direction in the light irradiation region when the light irradiation device shown in Figs. 1 to 3 is used. Fig. 9 is a perspective view showing a specific configuration example of a lamp unit according to an embodiment of the present invention. -28- 201243214 [Fig. 10] A perspective view of a honeycomb structure in which a light source element is not housed (Fig. 1) a light source component of a honeycomb structure Sectional view. Fig. 12 is a schematic view showing the two lamp units shown in Fig. 9 connected to each other to constitute a long lamp unit. [Fig. 13] A schematic view showing a state in which the lamp unit shown in Fig. 12 is incorporated in a light irradiation device. [Fig. 14] Schematic diagram of other embodiments of the lamp unit. [Fig. 15] A schematic diagram of an example of a 3D image display device 〇 [Fig. 16] Schematic illustration of a process for patterning a phase difference film. Fig. 17 is a schematic explanatory view showing the passage of light through a transparent portion of a mask when a conventional light irradiation device is used. [Description of main component symbols] 10, 10a, 10b: lamp unit 1 1 ' 1 1 a, 1 1 b : light source element row 1 2 : light source element 12a: lead 12b: terminal 1 3 : discharge lamp 14 : luminous tube 1 5 : Reflector 1 6 : Honeycomb structure -29- 201243214 16a : Light source component housing 1 6 b : partition 1 6c : bottom cover 1 6 d, 1 6 e : end face 16f : connecting metal fitting 1 7 : reflector base Seat 1 8 : Front glass 1 8 a : Glass fixing metal fitting 1 9 : Spring 2 0 : Light collecting member 30 : Mask 3 1 : Light-transmitting substrate 32 : Light-shielding film 33 : Light-shielding portion 3 4 : Light-transmitting portion 3 5: polarizing element 40: conveying means 41: roller 5 1 : film base material 52 : alignment film 52A: material layer for alignment film 5 3 : liquid crystal polymer layer 5 3 A : photorefractive liquid crystal material layer 60 : apparatus body -30 201243214 6 1 : Foot 62 : Lamp unit guide 63 : Positioning stop