201242051 六、發明說明： 【發明所屬之技術領域】 本發明係關於使用具有具長孔剖面的複數吐出噴嘴的 塗佈頭，在光入射面形成集電極的太陽電池集電極的形成 裝置及太陽電池集電極，尤其係關於指狀電極的形成方法 ，此外，關於考慮到製造法或組裝性的塗佈頭的構造及製 造法。 【先前技術】 太陽電池由屬於清淨的能量源且防止地球暖化的觀點 來看受到各國矚目，亦盛大進行實際的導入。太陽電池有 矽系、化合物系、有機物系、色素增感型等各式各樣，現 在及目前的期間的中心爲結晶系的矽系太陽電池。本發明 係關於該太陽電池的集電極的形成者。 太陽電池一般係在藉由光入射而發生光生成載體的光 電轉換部的光入射面及背面，藉由形成輸出取出用的一對 電極來進行製作。此時，設在光入射面上的電極係爲了儘 可能減小遮住入射光的面積，而形成爲具有複數線寬較小 的指狀電極及線寬相對較大的匯流條電極的梳形形狀。 但是，爲了儘可能減小遮住入射光的面積，若將指狀 電極形成爲窄幅，因電極的電阻增加而使電流效率降低， 結果會導致太陽電池的轉換效率降低。因此，爲了確保更 多的電流，且使更多的入射光到達光電轉換部，期待開發 出一種使指狀電極儘可能爲窄幅且可加大電極厚度的形成201242051 6. TECHNOLOGICAL FIELD The present invention relates to a coating head using a coating head having a plurality of discharge nozzles having a long hole section, a solar cell collector forming a collector on a light incident surface, and a solar cell. The collecting electrode is, in particular, a method of forming a finger electrode, and a structure and a manufacturing method of a coating head in consideration of a manufacturing method or assembly property. [Prior Art] From the viewpoint of being a clean energy source and preventing global warming, solar cells are attracting attention from various countries and are also being introduced in a practical manner. Solar cells are various types such as lanthanide, compound, organic, and dye-sensitized. At present and in the current period, the center is a crystalline lanthanide solar cell. The present invention relates to the formation of the collector of the solar cell. The solar cell is generally produced by forming a pair of electrodes for output extraction by forming a light incident surface and a back surface of the photoelectric conversion portion of the light generating carrier by light incidence. At this time, the electrode provided on the light incident surface is formed into a comb shape having a finger electrode having a small plurality of line widths and a bus bar electrode having a relatively large line width in order to reduce the area of the incident light as much as possible. shape. However, in order to reduce the area of the incident light as much as possible, if the finger electrode is formed to have a narrow width, the current efficiency is lowered due to an increase in the resistance of the electrode, and as a result, the conversion efficiency of the solar cell is lowered. Therefore, in order to secure more current and to allow more incident light to reach the photoelectric conversion portion, it is expected to develop a shape in which the finger electrodes are as narrow as possible and the thickness of the electrodes can be increased.
S -5- 201242051 方法。 亦即’將指狀電極剖面中的電極厚度對電極寬幅的比 稱爲電極縱橫比’對太陽電池的高效率化而言，形成高電 極剖面縱橫比的電極的裝置的開發已成爲重要的課題。 至目前爲止’太陽電池的指狀電極的形成係藉由網版 印刷法來進行。網版印刷法係可藉由黏度較高的材料來形 成電極，在現階段已成爲主流製程。 但是’在網版印刷法中’有對於被認爲是消耗品之因 網版損耗或強制脫版而起的電極材料的單元（cell)基板的 附著力的降低、圖案混亂等問題，由於在印刷時所產生的 ‘滲糊’’在線寬的狹小化有其界限，而處於並無法期待電 極縱橫比提升的狀況。 此外’如專利文獻1及專利文獻2所示，在目前備受 矚目之藉由噴墨法所爲之電極形成中，由於適用黏度非常 低的電極材料，因此彈著於太陽電池單元基板上的液滴係 在基板上廣泛擴散，難以確保線寬，而且因亦無法取得厚 度，而僅取得非常低的電極縱橫比。 在如上所示之狀態下，在以噴墨法處理時，必須十數 次的重疊塗覆，在製程中的效率（tact)殘留較大的課題。 此外，因金屬粒子凝聚，除了有噴墨頭的噴嘴阻塞之虞之 外，由於易於吐出，而含有大量黏結劑等，因此乾燥後的 片電阻大，而殘留雙重困難的技術課題。 此外，如專利文獻3所示，有適用凹版的平版印刷（0ffset printing)的方法等，但是根本上只不過是網版印刷的改善 201242051 方案，具有擔負消耗品、無法保證轉印性能等致命性的缺 陷，而未被實用化。 在以上所示之背景下，係有嘗試由非常狹小的長孔剖 面的吐出噴嘴列，以高壓壓出塗佈材料，直接欲在單元基 板上進行塗佈。有如分配器塗佈般，透過空氣而間接將塗 佈材料進行加壓而使其吐出的方式；及如開縫式塗佈機般 ，將塗佈材料直接加壓而使其吐出的方式等二個類型。以 該等方法的現狀標準中，僅限於相對於加壓面積，開口部 的面積爲較大的情形，太陽電池的集電極所被期待的線寬 狹小、厚度較大的圖案的形成至今尙未實現。 此外，具有吐出噴嘴孔的塗佈頭係使用雷射等最新加 工技術來進行製造，但是以現狀的加工精度，不僅不均的 情形多，而且連設備亦不普及，因此較爲昂貴，而期望開 發出一種可兼顧精度與價格的新穎的塗佈頭的構造與製造 方法。 但是，如開縫式塗佈機或分配器般，在將塗佈溶液直 接或間接加壓，而由微細空間吐出時，會有如以下所述之 問題點。 現況中，以網版印刷所形成的指狀電極的線寬爲約 100微米前後，爲了達成在單元的大型化或聚光能力的提 升所被期待的5 0微米以下的電極寬幅，必須以高剛性且 高精度對應網版遮罩，製造時的運轉成本會上升，並不理 想。取而代之，有欲適用多噴嘴分配器或開縫式塗佈機的 變動。分配器或開縫式塗佈機係在被稱爲噴嘴或噴頭的描 201242051 繪手段塡充塗佈溶液’透過空氣等而間接加壓、或將塗佈 溶液藉由泵等手段而直接加壓，藉此進行吐出而在單元上 形成電極。 若爲分配器的情形，在通過狹小噴嘴時，塗佈溶液係 被加壓，由噴嘴被吐出的瞬間，壓力係呈開放，因此在單 元上’係放大爲噴嘴直徑的5〜6倍的線寬，相較於網版 印刷法，描繪能力較低。 此外，在開縫式塗佈機中，係藉由適用薄層的間隙墊 片，有可達成狹小電極寬幅的可能性，但是具有如以下所 述的問題點。 亦即，第一問題點係如第1圖所示，太陽電池單元用 的指狀電極係以4〜5mm間隔形成爲直線狀者，對於開縫 式塗佈機的塗佈寬幅，供形成電極的開縫開口部極端少， 必須比一般的開縫式塗佈機的加壓施加更大的壓力。因此 ，與前述分配器同樣地，由吐出開縫孔所被吐出的塗佈溶 液係藉由壓力解放，大幅放大線寬。該緩和時，考慮藉由 降低塗佈溶液的黏度，來減低在狹小開縫間隙部分的流體 摩擦電阻，但是在單元基板上的形狀維持，亦即高電極縱 橫比的達成方面，會形成問題。總言之，要如何地將高黏 度的塗佈溶液，可在狹小的開縫間隙未提高壓力地吐出乃 爲第一課題。 第二問題點係由第1圖可知，作爲主流的結晶系太陽 電池單元係由矽晶圓切出使用。因此，基於有效單元的取 得數的確保，大部分四角形成爲切口。因此，接近周邊的 -8- 201242051 指狀電極係愈爲端部愈短。在習知的開縫式 於無法控制寬幅方向的吐出的有無，因此無 的塗佈。此爲第二問題點。 第三問題點係塗佈頭的性能與價格的問 如指狀電極般的狹小配線，必須精度佳地製 吐出噴嘴孔。在現況中借用雷射加工或線放 的加工設備之力，來製作吐出噴嘴孔。但是 或電位梯度的影響下，尤其在深度方向，均 孔形成非常困難，愈形成爲小徑，加工誤差 。此外，前述所代表的加工設備非常昂貴， 可調配，因此塗佈頭亦較爲昂貴。 [先前技術文獻] [專利文獻] [專利文獻1]日本特開2004-281813公開 [專利文獻2]日本特開2009-193993公開 [專利文獻3]日本特開2008-159798公開 【發明內容】 (發明所欲解決之課題） 因此’本發明係解決上述問題點，同時 狹小寬幅且剖面縱橫比高的指狀電極者，可 的電極形成裝置’同時亦實現達成更高光電 陽電池。 塗佈機中，由 法對應該部分 題。爲了塗佈 作非常狹窄的 電加工等高級 ’在能量分布 一的吐出噴嘴 愈大乃爲現況 並非爲到處均 公報 公報 公報 另外用以形成 提供可靠性高 轉換效率的太 -9 - 201242051 (解決課題之手段） 本發明之第一特徵係在藉由光入射而發生光生成載體 的光電轉換部的光入射面上，形成收集光生成載體的複數 指狀電極及匯流條電極之太陽電池集電極形成裝置，其使 作爲電極材料的塗佈溶液，藉由泵等加壓手段，通過狹小 的吐出噴嘴孔而吐出，在單元上形成直線狀電極。僅在電 極形成部分有吐出噴嘴孔的開口部，由此吐出塗佈溶液， 藉由單元基板與頭（head)的相對移動，形成連續電極圖案 的構造。 但是，與習知的開縫式塗佈機的全塗佈寬幅相比，供 形成電極之用的開口部換算成開口長度，非常短，爲3〜 5%，開縫間隙內的壓力若假定按照哈庚-帕穗定律（Hagen-Poiseuille law)時，內部壓力係增加至20〜30倍。以此， 即使特意地使吐出噴嘴孔形成爲微細，亦在吐出後使壓力 開放，而成爲過大的電極寬幅。 爲防止該現象，以不會影響電極寬幅而在降低壓力的 狀態下進行塗佈的方法爲最佳。如前所述，塗佈溶液黏度 的減低雖然大幅有助於壓力降低，但是會使實現吐出後的 高縱橫比的形狀維持性能惡化，因此若可能，並不想採用 〇 指狀電極係由複數直線狀配線所構成，其間隔爲一定 。著重在該特徵，即使朝向塗佈方向使開口部取得較長， 亦判斷出對於描繪特性造成的影響較少。亦即，若爲在塗 佈方向具有長邊的矩形狀的開口部、或者在塗佈方向具有 -10- 201242051 長軸的橢圓形狀的開口部，對電極寬幅不會造成影響，藉 由開口部的增加，狹小的塗佈溶液供給流路內的壓力係可 降低’此乃爲本發明之基本考量方式。 此外，若由塗佈頭吐出塗佈溶液時，溶液由流路到達 吐出噴嘴孔，若所吐出的方向相對單元基板面呈直角時， 形成爲噴流狀態，即使降低壓力，亦產生沿著單元基板面 的流動’因此所形成的電極寬幅係必然增加。爲了緩和該 狀況’必須減小相對基板面的直角方向的速度向量成分。 因此，將到達吐出噴嘴孔的塗佈液流動方向，相對塗佈方 向呈順向傾斜，藉此可解決課題。亦即，意指將開縫間隙 內的流路方向相對單元基板面呈順向傾斜。此時的順向意 指若以塗佈溶液的吐出流動爲基準來考量時，對基板的動 作，移動至流動電阻較少的狀況的情形，逆向意指朝向其 相反方向動作的情形。 本發明之第二特徵爲可進行指狀電極的長度控制。構 成作爲太陽電池主幹的光電轉換部的單元通常係由矽晶圓 切出，爲了提高晶圓利用效率，並非爲矩形，而是圓弧的 一部分亦呈切口來使用，因此如第1圖所示，大部分形成 將4邊形的4角隅形成切口的8邊形。若由一般具有吐出 噴嘴孔的開縫式塗佈機吐出塗佈溶液時，一度會由各孔吐 出，因此所形成的指狀電極係長度爲一定，無法進行在太 陽電池單元的各角隅部的對應。 對於該課題，藉由設置以橫向排列的吐出噴嘴孔的供 給方向，換言之爲與吐出方向呈直角的滑閥，藉由進行對 -11 - 201242051 吐出噴嘴孔供給及遮斷塗佈溶液的控制手段來解決該課題 〇 亦即，若爲8邊形的單元，在塗佈開始時點，佔據大 部分的中央部的指狀電極的供給口係張開，滑閥逐漸地移 位至外側，電極塗佈係依序進行。在塗佈的中間階段，由 所有吐出噴嘴孔吐出塗佈溶液，若接近塗佈結束時點時， 滑閥再次由外側朝向內側移動，來塗佈預定的8邊形的指 狀電極圖案。 此外，第三特徵係提出使用一般加工技術的塗佈頭構 造及製造方法，而非使用昂貴加工技術的塗佈頭。此時， 吐出噴嘴孔的加工精度係藉由習知方法所致者，等級高， 必然地吐出亦安定。結果，無須依存特殊的加工技術，而 利用一般的手段，因此塗佈頭係會降低價格。此外，除了 可彈性地對應太陽電池單元的設計變更，例如電極間隔的 變更等以外，在發生損傷時，以習知的塗佈頭係必須將全 部更換，相對於此，藉由本發明之構造，僅進行局部更換 即可，可提供在多方面均遠遠凌駕習知技術的塗佈頭。 本發明係爲了解決上述課題，形成爲一種太陽電池集 電極形成裝置之構成，其特徵爲：在藉由光入射而發生光 生成載體的光電轉換部的光入射面上，取得收集前述光生 成載體的複數指狀電極及收集該複數指狀電極所收集到的 前述光生成載體的匯流條電極構造之太陽電池之製造中， —面使太陽電池基板（單元）移動，一面從由具有長孔剖面 的複數吐出噴嘴孔所構成的塗佈頭，吐出經加壓的集電極 -12 - 201242051 材料而總括形成。 此外，形成爲一種太陽電池集電極形成方法之構成， 其特徵爲：在藉由光入射而發生光生成載體的光電轉換部 的光入射面上，取得收集前述光生成載體的複數指狀電極 及收集該複數指狀電極所收集到的前述光生成載體的匯流 條電極構造之太陽電池之製造中，一面使太陽電池基板（ 單元）移動，一面從由具有長孔剖面的複數吐出噴嘴孔所 構成的塗佈頭，吐出經加壓的集電極材料而總括形成。 此外，形成爲一種太陽電池集電極形成裝置之構成， 如申請專利範圍第1項之太陽電池集電極形成裝置，其中 ，藉由具有長孔剖面的吐出噴嘴孔的長軸與集電極的塗佈 方向相一致的塗佈頭，吐出經加壓的集電極材料而總括形 成。 此外，形成爲一種太陽電池集電極形成裝置之構成， 如申請專利範圍第1項或第3項之太陽電池集電極形成裝 置，其中，具備有塗佈頭，該塗佈頭係來自具有各長孔剖 面的吐出噴嘴孔的吐出流動方向，相對基板的移動方向， 在相反側呈傾斜。 此外，形成爲一種太陽電池集電極形成方法之構成， 如申請專利範圍第4項之太陽電池集電極形成裝置，其中 ，使用來自吐出太陽電池之指狀電極材料之具有各長孔剖 面的吐出噴嘴孔的吐出方向，相對基板移動方向，在相反 側呈傾斜的塗佈頭。 此外，形成爲一種太陽電池集電極形成裝置之構成，S -5- 201242051 Method. That is to say, 'the ratio of the thickness of the electrode in the cross section of the finger electrode to the width of the electrode is called the aspect ratio of the electrode.' For the improvement of the efficiency of the solar cell, the development of an apparatus for forming an electrode having a high aspect ratio of the electrode has become important. Question. Up to now, the formation of the finger electrodes of the solar cells has been carried out by a screen printing method. The screen printing method can form electrodes by using a material with a high viscosity, and has become a mainstream process at this stage. However, in the "screen printing method", there is a problem that the adhesion of the cell substrate of the electrode material which is considered to be a consumable product due to screen loss or forced release is reduced, and the pattern is disordered. The narrowness of the 'bleeding' that is produced during printing has its limits, and it is not expected to increase the aspect ratio of the electrodes. Further, as shown in Patent Document 1 and Patent Document 2, in the electrode formation by the inkjet method, which is currently attracting attention, since an electrode material having a very low viscosity is applied, it is impinged on the solar cell substrate. The droplets spread widely on the substrate, and it is difficult to secure the line width, and since the thickness cannot be obtained, only a very low electrode aspect ratio is obtained. In the state as described above, when the inkjet method is used, it is necessary to apply a plurality of times of overlap coating, and the efficiency (tact) in the process remains large. In addition, since the metal particles are agglomerated, in addition to the clogging of the nozzle of the ink jet head, a large amount of a binder or the like is contained because it is easy to be ejected, so that the sheet resistance after drying is large, and the technical problem of the double is difficult. Further, as shown in Patent Document 3, there is a method of applying embossing (0ffset printing) of a gravure, etc., but it is basically an improvement of the screen printing method 201242051, which has a fatal property such as a consumable product and cannot guarantee transfer performance. The defect was not put into practical use. In the background shown above, there is a row of ejection nozzles which are attempted to be cut by a very narrow long hole, and the coating material is pressed at a high pressure to directly coat the unit substrate. There is a method in which the coating material is indirectly pressurized by air as a dispenser coating, and a method in which the coating material is directly pressurized and discharged as in a slit coater. Types. In the current standard of these methods, the area of the opening is limited to a large area of the pressurized area, and the formation of a pattern having a narrow line width and a large thickness of the collector of the solar cell has not been formed yet. achieve. Further, the coating head having the discharge nozzle hole is manufactured by using the latest processing technology such as laser, but the current processing accuracy is not only uneven, but also the equipment is not popular, so it is expensive and desired. A new construction and manufacturing method for a coating head that combines accuracy and price has been developed. However, in the case of a slit coater or a dispenser, when the coating solution is directly or indirectly pressurized and discharged from a fine space, there are problems as described below. In the present case, the line width of the finger electrodes formed by screen printing is about 100 μm, and must be high in order to achieve an electrode width of 50 μm or less which is expected to be increased in size of the unit or improvement in condensing ability. Rigid and high-precision corresponds to the screen mask, and the running cost during manufacturing is increased, which is not preferable. Instead, there are variations to be applied to the multi-nozzle dispenser or the slot coater. The dispenser or the slit coater is indirectly referred to as a nozzle or a nozzle, and the coating solution is indirectly pressurized by air or the like, or the coating solution is directly pressurized by means of a pump or the like. Thereby, the discharge is performed to form an electrode on the unit. In the case of a dispenser, when the narrow nozzle is passed, the coating solution is pressurized, and the pressure is opened at the moment when the nozzle is discharged, so that the unit is enlarged to a line 5 to 6 times the diameter of the nozzle. Wide, compared to screen printing, the rendering ability is lower. Further, in the slit coater, there is a possibility that a narrow electrode width can be achieved by applying a thin-layer gap spacer, but it has problems as described below. That is, the first problem is as shown in Fig. 1, and the finger electrodes for the solar cell unit are formed in a linear shape at intervals of 4 to 5 mm, and the coating for the slit coater is wide, and is formed. The slit opening portion of the electrode is extremely small, and it is necessary to apply a larger pressure than the press of a general slit coater. Therefore, similarly to the above-described dispenser, the coating solution discharged from the discharge slit hole is released by pressure, and the line width is greatly enlarged. In the relaxation, it is considered that the fluid friction resistance in the narrow slit portion is reduced by lowering the viscosity of the coating solution, but a problem arises in that the shape on the unit substrate is maintained, that is, the achievement of the high electrode aspect ratio. In summary, how to smear a high-viscosity coating solution without increasing pressure in a narrow slit gap is the first problem. The second problem is shown in Fig. 1. As a mainstream crystal cell, the solar cell is cut out from the wafer. Therefore, most of the four corners are formed as slits based on the securing of the number of effective cells. Therefore, the proximity to the periphery of the -8-201242051 finger electrode system is the shorter the end. In the conventional slit type, it is impossible to control the presence or absence of the discharge in the wide direction, and therefore there is no coating. This is the second problem point. The third problem is the performance and price of the coating head. For narrow wiring like a finger electrode, the nozzle hole must be sprinkled with high precision. In the current situation, the force of the processing equipment of the laser processing or the wire discharge is used to make the discharge nozzle hole. However, under the influence of the potential gradient, especially in the depth direction, the formation of the uniform pores is very difficult, and the formation becomes a small diameter and a machining error. In addition, the processing equipment represented by the foregoing is very expensive and can be adjusted, so that the coating head is also expensive. [PRIOR ART DOCUMENT] [Patent Document 1] Japanese Laid-Open Patent Publication No. 2004- 281 813. [Patent Document 2] Japanese Laid-Open Patent Publication No. 2009-193993. SUMMARY OF THE INVENTION Therefore, the present invention solves the above problems, and at the same time, a narrow electrode having a wide aspect and a high aspect ratio of the finger electrode can achieve a higher photoelectric anode battery. In the coater, the method corresponds to the problem. In order to apply a very narrow electrical processing, etc., the larger the discharge nozzle in the energy distribution is, the current situation is not used to form a highly reliable conversion efficiency. - 201242051 The first feature of the present invention is that a solar cell collector forming a plurality of finger electrodes and a bus bar electrode for collecting a light generating carrier is formed on a light incident surface of a photoelectric conversion portion where a light generating carrier is generated by light incidence. In the apparatus, a coating solution as an electrode material is discharged through a narrow discharge nozzle hole by a pressurizing means such as a pump, and a linear electrode is formed on the unit. The opening portion for discharging the nozzle holes is formed only in the electrode forming portion, whereby the coating solution is discharged, and the structure of the continuous electrode pattern is formed by the relative movement of the unit substrate and the head. However, compared with the full coating width of the conventional slit coater, the opening for forming the electrode is converted into an opening length, which is very short, and is 3 to 5%, and the pressure in the slit gap is It is assumed that the internal pressure system is increased by 20 to 30 times in accordance with the Hagen-Poiseuille law. As a result, even if the discharge nozzle hole is intentionally formed to be fine, the pressure is opened after the discharge, and the electrode width is excessively large. In order to prevent this, it is preferable to carry out the coating in a state where the pressure is lowered without affecting the width of the electrode. As described above, although the decrease in the viscosity of the coating solution greatly contributes to the pressure reduction, the shape maintenance performance of the high aspect ratio after the discharge is deteriorated. Therefore, if possible, it is not desirable to use the 〇 finger electrode system from the plural straight line. The wiring is formed, and the interval is constant. Employing this feature, even if the opening portion is made longer toward the coating direction, it is judged that the influence on the drawing characteristics is small. In other words, if the opening is a rectangular opening having a long side in the coating direction or an elliptical opening having a long axis of -10-201242051 in the coating direction, the width of the electrode is not affected by the opening. With the increase of the portion, the pressure in the narrow coating solution supply flow path can be reduced. This is the basic consideration of the present invention. Further, when the coating solution is discharged from the coating head, the solution reaches the discharge nozzle hole through the flow path, and when the discharge direction is at right angles to the unit substrate surface, it is formed into a jet flow state, and even if the pressure is lowered, the generation along the unit substrate occurs. The flow of the surface 'so the width of the electrode formed is necessarily increased. In order to alleviate this situation, it is necessary to reduce the velocity vector component in the direction perpendicular to the substrate surface. Therefore, the flow direction of the coating liquid reaching the discharge nozzle hole is inclined in the forward direction with respect to the coating direction, whereby the problem can be solved. That is, it means that the flow path direction in the slit gap is inclined obliquely with respect to the unit substrate surface. The forward direction at this time means that when the discharge operation of the coating solution is taken as a reference, the movement of the substrate moves to a state where the flow resistance is small, and the reverse direction means the operation in the opposite direction. A second feature of the present invention is that length control of the finger electrodes can be performed. The unit that constitutes the photoelectric conversion unit of the solar cell trunk is usually cut out from the silicon wafer, and is not rectangular but a part of the arc is also used as a slit in order to improve the wafer utilization efficiency. Most of them form an 8-sided shape in which a 4-sided four-corner 隅 is formed into a slit. When the coating solution is discharged from a slit coater which generally has a discharge nozzle hole, it is once ejected from each hole. Therefore, the length of the formed finger electrode is constant, and it is impossible to perform the corner portions of the solar cell unit. Correspondence. In this problem, by providing a supply direction of the discharge nozzle holes arranged in the lateral direction, in other words, a spool which is perpendicular to the discharge direction, the control means for supplying and blocking the coating solution to the discharge nozzle hole of -11 - 201242051 is provided. To solve this problem, in the case of an 8-sided unit, at the start of application, the supply port of the finger electrode occupying most of the central portion is opened, and the spool is gradually displaced to the outside, and the electrode is coated. The cloth is carried out in order. At the intermediate stage of the coating, the coating solution is discharged from all the discharge nozzle holes, and when the coating end point is approached, the spool is again moved from the outside toward the inside to apply a predetermined octagonal finger electrode pattern. Further, the third feature proposes a coating head construction and manufacturing method using general processing techniques instead of a coating head using an expensive processing technique. At this time, the processing accuracy of the discharge nozzle hole is caused by a conventional method, and the level is high, and the discharge is inevitably stabilized. As a result, it is not necessary to rely on special processing techniques, but the general method is used, so the coating head system can lower the price. Further, in addition to elastically adapting the design change of the solar cell unit, for example, changing the electrode spacing, etc., in the event of damage, the conventional coating head system must be completely replaced, and by the structure of the present invention, It can be replaced only by partial replacement, and it can provide a coating head which is far superior to the conventional technology in many aspects. In order to solve the above problems, the present invention provides a solar cell collector forming apparatus which is characterized in that the light generating carrier is collected on a light incident surface of a photoelectric conversion portion where light is generated by light incidence. In the manufacture of a solar cell in which the plurality of finger electrodes and the bus bar electrode structure of the light generating carrier collected by the plurality of finger electrodes are collected, the solar cell substrate (unit) is moved while having a long hole profile The plurality of coating heads formed by the nozzle holes are spouted, and the pressurized collector -12 - 201242051 material is discharged and collectively formed. Further, a solar cell collector forming method is characterized in that a plurality of finger electrodes for collecting the photo-generated carrier are obtained on a light incident surface of a photoelectric conversion portion where a light generating carrier is generated by light incidence In the manufacture of a solar cell in which the bus bar electrode structure of the photo-generated carrier collected by the plurality of finger electrodes is collected, the solar cell substrate (unit) is moved from a plurality of nozzle holes having a long hole cross section. The coating head is formed by spitting out the pressurized collector material. Further, a solar cell collector forming device is a solar cell collector forming device according to the first aspect of the invention, wherein the long axis and the collector are coated by a discharge nozzle hole having a long hole cross section. The coating heads having the same direction are collectively formed by discharging the pressurized collector material. Further, a solar cell collector forming device is a solar cell collector forming device according to the first or third aspect of the invention, further comprising a coating head having a length The discharge flow direction of the discharge nozzle hole of the hole section is inclined on the opposite side with respect to the moving direction of the substrate. Further, a solar cell collector forming method according to the fourth aspect of the invention, wherein the nozzle electrode having the long hole section from the finger electrode material for ejecting the solar cell is used. The direction in which the holes are ejected, the coating head that is inclined on the opposite side with respect to the direction in which the substrate moves. Further, it is formed as a solar cell collector forming device,
S -13- 201242051 如申請專利範圍第1項、第3項及第4項中任一項之太陽 電池集電極形成裝置，其中，在頭（head)具備有開閉閥， 該開閉閥係以配合與前述太陽電池基板（單元）的形狀相對 應的電極圖案的方式，可依序切換形成各電極的各噴嘴的 吐出/停止。 此外，形成爲一種太陽電池集電極形成用頭之構成， 其係如申請專利範圍第6項之太陽電池電極形成裝置所使 用的塗佈頭，其特徵爲：所具備的開閉閥係藉由可朝向相 對以塗佈材料所塡充的吐出流路的供給方向呈直角方向滑 動的機構，來控制有無由各吐出噴嘴孔吐出。 此外，形成爲一種太陽電池集電極形成方法之構成， 其特徵爲：在如申請專利範圍第6項之太陽電池集電極形 成裝置中使用如申請專利範圍第7項之塗佈頭。 形成爲一種太陽電池集電極形成裝置之構成，如申請 專利範圍第1項、第3項、第4項及請求項6中任一項之 太陽電池集電極形成裝置，其中，所裝載的塗佈頭係裝載 有交替層積堆疊規定吐出噴嘴孔之間隔的區塊與將吐出流 路進行切削的薄層間隔件的塗佈頭。 此外，形成爲一種太陽電池集電極形成方法之構成， 其特徵爲：在如申請專利範圍第9項之太陽電池集電極形 成裝置中使用前述層積堆疊的塗佈頭。 此外’形成爲一種塗佈頭之構成，其係在具有複數吐 出噴嘴孔、及對該吐出噴嘴孔供給黏性塗佈溶液的吐出流 路’且由吐出噴嘴孔吐出塗佈溶液而形成圖案的塗佈裝置 -14 - 201242051 中，具有以下構造：交替層積規定複數吐出噴嘴孔之間隔 的區塊與具有藉由切削加工所形成的吐出流路的薄層間隔 件，而以疊層螺栓加以固定。 此外，形成爲一種塗佈頭之構成，如申請專利範圍第 1 1項之塗佈頭，其中，藉由區塊與間隔件所形成的吐出噴 嘴孔的剖面形狀爲正方形。 再者，形成爲一種塗佈頭之構成，如申請專利範圔第 11項或第12項之層積型塗佈頭，其中，在與微細的各吐 出噴嘴孔列呈平行的塗佈溶液的共通供給流路內設置滑動 的閥，藉由各吐出噴嘴孔的開閉，可控制吐出的有無。 此外，形成爲一種如申請專利範圍第1 1項、第1 2項 或請求項13中任一項之層積型塗佈頭之製造方法之構成 (發明之效果） 如以上詳述，藉由使用本發明之太陽電池之單元基板 的集電極，尤其指狀電極之形成裝置及形成方法’可得以 下所述之效果。 首先，第一，相較於以習知的製程方法所得的指狀電 極，藉由適用本發明之製程裝置及方法’可得電極寬幅狹 小而電極剖面縱橫比大的指狀電極，以達成配線電阻的減 低與入射光面積的增加’結果，可大幅有助於所製作的太 陽電池的光電轉換效率的提升。 第二，與指狀電極形成之屬於習知主流方式的網版印 -15- 201242051 刷法相比，在本發明之製程裝置及方法中完全不會有消耗 品，故可大幅減低運轉成本。 第三，在太陽電池的指狀電極形成中，可提升電極塗 佈材料的有效利用效率。例如，若與網版印刷法相比較， 成爲1.5倍以上的有效利用效率。若使用銀等昂貴的塗佈 溶液時，較爲有利。 第四，在本發明之製程中，至塗佈溶液附著至塗佈基 板上爲止，由於通過完全密閉的流路，因此不會有曝露在 空氣的情形，因此材料的劣化或物性變化少，而易於製程 管理。 第五，本發明之層積型塗佈頭係對於引起阻塞所代表 的塗佈不良的障礙，洗淨容易，且恢復率亦高。 第六，本發明之層積型塗佈頭係對於太陽電池的指狀 電極設計的變更，例如電極寬幅或電極間隔的變更，亦可 輕易對應。 第七，本發明之層積型塗佈頭係可以習知的加工技術 來製作，價格亦可抑制爲較低。萬一，形成噴嘴的薄層間 隔件發生損傷時，僅有相當部分進行替換即可，綜言之亦 爲低價格。 第八，本發明之層積型塗佈頭雖然基於形狀等的制約 而使適用對象有所界限，但是與相鄰的距離取得較大，對 於接近直線描繪之處的適用對象，係爲簡單的構造及低價 格，而可期待擴展適用範圍。 -16- 201242051 【實施方式】 以下參照圖示，說明本發明之實施形態。在圖示記載 中係對同一部分標註同一元件符號。 [實施例1] 在第2圖中針對作爲本發明之對象的太陽電池的基本 構造加以說明。太陽電池係具備有：藉由太陽光的入射而 發生光生成載體的光電轉換部；及用以取出在光電轉換部 所發生的光生成載體的正負1對電極。正負1對電極係壓 倒性地多爲設在光電轉換部的表面及背面的情形，但是其 中亦有在光電轉換部的背面設置正負1對電極的情形。在 光電轉換部的表面，由入射光發生光生成載體，而且1對 電極之中其中一方電極被設在光電轉換部的表面時，爲了 儘可能減小遮住入射光的面積，前述其中一方電極一般係 組合複數個狹小的指狀電極與寬廣的匯流條電極而形成爲 梳型形狀。指狀電極係集合在光電轉換部所生成的光生成 載體的電極，遍及光電轉換部的表面的大致全域作配置。 此外，匯流條電極係以複數個指狀電極所集合的光生成載 體的集電用電極，以與指狀電極呈交叉的方式形成爲直線 狀。 此外，若光電轉換部不僅其表面，亦可藉由來自背面 的光入射來發生光生成載體時，係在光電轉換部的光入射 面，亦包含背面，而不僅光電轉換部的表面。因此，在光 電轉換部的表面及背面上亦同樣地形成有指狀電極及匯流 -17- 201242051 條電極。 光電轉換部係具有pn或pin接合等半導體接合，由 單晶矽、多晶矽等矽系半導體材料、非晶質矽系材料或 CuInSe等薄膜半導體材料、或GaAs、InP等化合物半導 體材料所構成。此外，近來亦硏究色素增感型等有機半導 體材料。 太陽電池的集電極係由導電性材料所構成，以具代表 性者而言，有將環氧樹脂作爲黏結劑、將導電性粒子作爲 塡料的熱硬化型導電性樹脂等導電性糊。集電極的塡料之 目的在獲得電傳導性，以組成而言，可適用選自銀、銅、 鎳 '鋁、錫等之至少1種金屬粒子或該等之合金或混合體 。此外’集電極的黏結劑係以接著塡料爲主要目的，爲了 維持可靠性’被要求耐濕性或耐熱性優異。以滿足該等要 件的黏結劑的材料而言，列舉有環氧樹脂、丙烯樹脂、聚 醯亞胺樹脂、酚醛樹脂、胺基甲酸乙酯樹脂、矽樹脂等， 可適用至少一種或該等樹脂的混合或共聚等。 此外’光電轉換部如結晶系半導體般具有高耐熱性時 ’係可使用可在高溫下硬化/燒成的無機系材料作爲黏結 劑。例如’在銀或鋁等金屬粒子適合由玻料及有機質媒劑 等所構成者。 以太陽電池單元的集電極，尤其指狀電極所被要求的 項目而言’係有供光入射之用的開口面積的增加及電阻損 失的減低。關於開口面積的增加，亦包含在網版印刷製造 時經常看到的‘滲糊’的消除，儘可能實現微細的電極寬幅 -18- 201242051 後，將電極厚度儘可能形成較厚，亦即，達成高縱橫比形 狀。因此，儘可能使用粒徑小的導電性塡料，若可以相對 較高的黏度進行吐出，則實現的可能性即會變大。 參照第3圖’說明本發明之實施形態之太陽電池集電 極形成裝置。關於本裝置中的機構，係由以下所構成：由 被置放在基座1之上且附有固定太陽電池的單元基板2的 真空吸附用溝槽的平台3、及可將該平台3移動至任意位 置的驅動機構4所構成的基板側系統；及支持附有微小孔 洞的塗佈頭5，由設定塗佈頭5與太陽電池單元基板2之 間的間隙之可以上下方向移動的驅動機構6所構成的頭側 系統’該等2個系統係被固定在基座1上且以門型框架7 來決定相對位置關係。亦即，頭側系統全體係被固定在門 型框架7，形成爲與被固定在基座1上的基板側系統相對 向的構造。除了該等機構之外，加上由用以由塗佈溶液槽 8對塗佈頭5供給塗佈溶液的送液泵9所構成的液體供給 系統而形成爲太陽電池集電極形成裝置。 以下說明各個要素。固定單元基板2的平台3係藉由 真空泵10來吸附基板背面，因此在表面形成有溝槽，使 負壓發生而加以固定。此外，電極形成後，爲供卸除單元 基板2，內置有用以上抬基板的上升銷。該動作通常係使 用空氣壓來執行。 使被真空吸附固定在平台3上的單元基板2移動的驅 動機構4，在最爲簡單的情形下，係具有僅有1方向的移 動機構，爲了最爲具有自由度，可具有平面2方向、及面 <«· 5 -19- 201242051 內旋轉方向之合計3軸的移動機構。以該移動機構而言’ —般爲將電動機驅動的滾珠螺絲機構進行伺服控制的構造 ，但是亦有利用線性導引件的應用或隧道致動器者。同樣 地，可進行頭的上下方向移動的驅動機構6亦經常使用電 動機驅動的滾珠螺絲機構。視情況亦有使用線性導引件的 情形。 此外，本裝置中重要的要素零件爲送液泵9。泵亦有 各種種類，所被要求的性能項目首先在於定量性優異。在 旋轉型或往返動作型等眾多種類中，平均單位旋轉的吐出 流量或平均單位變位的吐出量的不均小乃極爲重要。在相 同的主旨下，脈動少亦爲必要。接著，太陽電池的電極塗 佈溶液如前所述，爲了欲儘可能加大電極剖面形狀的縱橫 比’一般而言黏度較高。因此，在由微細的吐出噴嘴孔11 吐出塗佈溶液時，會發生較大的流動摩擦電阻，必然地， 塗佈頭5內的壓力會變高。因此，必須要有高吐出壓力的 栗。此外’在形成電極所使用的材料之中，亦大部分爲包 含熔解或腐蝕等使泵材料劣化的要因的情形，因此亦要求 化學性質上的安定性。一般而言係適用伸縮栗或齒輪泵等 ’旋轉型且可正逆旋轉的螺旋泵係適於有塗佈開始與結束 的間歇塗佈。 以下說明本裝置之指狀電極形成動作。藉由液體供給 系統’在塗佈頭5被供給塗佈材料的狀態下，單元基板2 與塗佈頭5之間的間隙被設定爲一定之後，一面使基板側 系統移動’ 一面進行塗佈。此時係頭側系統被固定而基板 -20- 201242051 側系統進行移動的構造，但是亦有基板側被固定而頭側進 行移動的情形。作爲電極材料的塗佈溶液係藉由送液泵9 而被送至塗佈頭5，由被正確定位在指狀電極形成位置的 微小的吐出噴嘴孔1 1吐出。爲了獲得安定的吐出，將送 液泵9的吐出流量主要實施各種控制。 在第4圖中顯示塗佈頭5之構造之一實施例。該塗佈 頭係藉由線放電加工予以製作之例》首先，塗佈頭5係由 3個板所構成。亦即，包含複數狹小的吐出噴嘴孔11的噴 嘴板1 2 a、閉塞吐出噴嘴孔1 1的蓋板1 3 a、及具有閉塞位 於噴嘴板12a內且具有貯存來自送液泵9的塗佈溶液的槽 的作用的空腔14之功能的密封板15等3個板。噴嘴板 12a與密封板15在構造上可爲一體，但是在以線放電加工 將吐出噴嘴孔列1 1進行加工時，作爲線材的通路，必須 將空腔1 4的頂棚部分進行開放，必然形成爲3體構造。 以一定厚度的線材切削噴嘴板12a的端面，藉由切削深度 ，來決定長孔的程度。該吐出噴嘴孔1 1的形狀爲長孔， 該長軸的方向與進行塗佈的指狀電極的塗佈方向相一致即 爲本發明中的請求項1、請求項2及請求項3。 在第5圖中顯示塗佈頭5的其他構造的實施例。該塗 佈頭係藉由雷射加工予以製作之例。該例亦爲塗佈頭5係 由3個板所構成。亦即爲包含複數個狹小吐出噴嘴孔i i 的噴嘴板l2b、蓋板13b'包含前述空腔14的蓋板13c。 在該構造中，以與噴嘴板12b的長邊方向呈直角藉由雷射 形成長圓孔。雖然亦依作爲對象的噴嘴板12b的材料而異 Λ -21 - 201242051 ，但是通常作爲加工機而使用YAG雷射。在本構造中， 對於伴隨塗佈溶液的流動的內壓的增加，噴嘴板12b與2 枚蓋板13b及13c的接合面不具有較大的影響，相對於此 ，在第4圖的構造中，由於對於所增加的內壓，噴嘴板 12a與蓋板13a進行形成開口的變形，因此由塗佈溶液的 密封性來看，以第5圖的塗佈頭構造較爲優異。在此所示 之藉由具有長孔剖面之吐出噴嘴孔1 1所致之集電極形成 相當於本發明之請求項1、請求項2及請求項3。 在此說明將吐出噴嘴孔1 1的剖面形狀形成爲長孔的 理由。分配器大部分爲一個噴嘴，透過空氣將塗佈溶液加 壓塗佈。此時，空氣爲壓縮性流體，即使施加過量的壓力 ，施加於塗佈溶液本身的力亦受到抑制。因此，由噴嘴所 被解放的塗佈溶液可不會那麼擴展地塗佈在基板面。 但是，力相對較弱，且至噴嘴爲止的流動摩擦電阻較大 時，係無法進行塗佈。例如，在塗佈溶液的黏度爲1 OPa · s 以上之非常高的情形或噴嘴孔的直徑非常小的情形下，以 分配器並無法吐出。如作爲本發明之對象的太陽電池的指 狀電極形成的情形般，若電極寬幅狹窄且欲提高電極剖面 的縱橫比時，分配器並不適合。 另一方面，在開縫式塗佈機中，即使開縫間隙較爲狹 小，在確保總計的開口面積時，即使黏度爲1 OOPa · s以 上的高黏度，亦可吐出。開縫式塗佈機係與分配器不同， 可將塗佈溶液直接加壓乃爲較大的要因。但是，如這次作 爲對象的太陽電池的指狀電極的情形般，所塗佈的圖案未 -22- 201242051 達及全面’若爲局部的情形’大部分呈封閉的部分，開口 部變得極少。因此’流動摩擦電阻增大，塗佈溶液本身被 曝露在高壓。若在如上所示之狀況下進行吐出，由狹小的 吐出噴嘴孔11所排出的塗佈溶液係被解放，在基板上擴 展或無法吐出。 關於塗佈溶液的材料物性，尤其黏度，若考慮到太陽 電池的指狀電極時’由維持塗佈後的剖面形狀方面來看， 必須選定爲較高。此外，由於必須減小電極寬幅，因此欲 儘可能減小吐出噴嘴孔1 1的短邊。在如上所示之制約條 件下，藉由將對電極寬幅或剖面形狀影響較小的塗佈方向 ，亦即長邊取得較長，來使外觀的開口面積增加，且使施 加於塗佈溶液的壓力減少乃爲本發明之目的。可知藉由製 作出如上所示之狀況，使用高黏度的塗佈溶液，可形成電 極寬幅小、且剖面縱橫比亦優異的指狀電極。在第6圖中 以模式顯示所形成的指狀電極與塗佈頭的吐出噴嘴孔11 的位置關係。由該圖可知，吐出噴嘴孔11的長邊的軸係 與塗佈方向相一致。此外，依塗佈材料的物性，尤其黏度 ，亦可爲圓孔或正方形，而非爲長孔。 施加於塗佈頭5內的塗佈溶液的壓力係可利用吐出噴 嘴孔1 1的長孔剖面形狀進行緩和，可知會對所形成的電 極的形狀帶來好結果，但是更加要求狹小的電極寬幅。如 第7圖（a)中以模式顯示，一般的分配器或開縫式塗佈機係 由噴嘴吐出的塗佈溶液的吐出方向係相對基板表面呈直角 。此時，基板面係對塗佈溶液的流動進行如壁般的對應， -23- 201242051 發生所謂在流體力學的世界中所稱的‘噴流，現象。亦即， 塗佈溶液在衝撞到壁後，產生沿著壁的全方向的速度向量 而擴散展開。其會成爲違反形成指狀電極時的狹小化的目 的的舉動。 爲了即便些微亦欲緩和衝撞後的塗佈溶液的擴散展開 ，如第7圖（b)所示，相對塗佈方向，朝向將來自塗佈頭5 的塗佈溶液的吐出方向傾倒的方向傾斜乃較具效果。在此 係顯示將塗佈頭5相對基板面2呈傾斜的狀況，但是亦可 如第7圖（c)所示’塗佈頭5如習知技術般使其豎立，而使 至塗佈頭5內的吐出噴嘴孔11的吐出流路15傾斜。藉由 使吐出流路23相對單元基板面2呈傾斜，可緩和塗佈溶 液所具有的衝撞能量’僅具有塗佈方向的相反方向的速度 向量，因此對電極寬幅的狹小化而言，爲極爲有效的實施 形態，本發明中的請求項4及請求項5分別相當作爲裝置 及方法。 現在，佔有太陽電池之大部分的結晶太陽電池的單元 基板2通常係由呈大致圓形形狀的矽晶圓所製作，基於構 裝上的關係，將第1圖所示之矩形形狀作爲基座，形成將 4角隅呈切口的形狀。指狀電極16係一面具有—定間隔， 一面形成爲直線狀。但是’在前述切口部中，係愈往晶圓 的外側，電極長愈短’在中央部係形成爲一定長度。接著 說明對於階段性改變的指狀電極的塗佈長的對應機構。 在第8圖中顯示改變指狀電極16之塗佈長的構造。 塗佈頭的中心爲吐出噴嘴孔1 1 ’以預定間隔形成有預定個 -24- 201242051 數之剖面形狀爲長孔的吐出噴嘴孔11。在對該吐出噴嘴孔 11供給塗佈溶液的共通流路之中存在有可左右移動的滑閥 17，可以塗佈材料供給口 18爲中心來進行移動的構造。 亦即’滑閥係覆蓋共通流路的剖面的活塞狀的閥，具有閉 塞吐出噴嘴孔1 1的作用，若位於吐出流路2 3之上時，並 無法吐出。 該滑閥1 7係由透過線性導引件1 9之附屬於塗佈頭5 的左右對稱的精密梯形螺絲20的驅動，藉由所連結的臂 21而左右移動的構造。此外，梯形螺絲20的驅動係由伺 服電動機來進行。結果，可進行在太陽電池單元基板的切 口部的圖案化。 使用第9圖（a)〜（d)，說明一連串具體的塗佈動作。 該圖係如第1圖所示之顯示電極的塗佈長在切口部改變時 的塗佈順序。首先，（a)係表示塗佈開始瞬後，塗佈頭5下 降’在設定與單元基板2的預定間隙之後，供給塗佈溶液 ，移動已裝載單元基板2的平台3而開始塗佈。此時，滑 閥17的間隔係形成爲不會有中央部的切口的影響的基板 寬幅。接著，在（b)中，左右慢慢地移動滑閥1 7，依序增 加電極的描繪個數。由總個數的描繪係成爲安定的吐出， 持續至抵碰到單元基板2的切口部爲止。在（c)(d)中，使 滑閥17逐漸返回至中央，依序增加中止描繪的電極的個 數。此時必須減少送液泵9的吐出流量。具體而言，監視 設定在供給流路23的壓力感測器3 2的値，以反饋至泵的 旋轉數的形式進行控制。在塗佈結束的時點，提高塗佈頭 -25- 201242051 5，亦停止供給塗佈溶液而結束。該等爲關於本發明之請 求項6、請求項7及請求項8的實施例。 此外，第8圖係將塗佈溶液由塗佈頭5的中央放入的 構造’但是有依頭之構成，未由中央部放入，而必須由塗 佈頭5的兩端部或單端部放入的情形。將此時的構成顯示 於第10圖。由中央部放入塗佈溶液時的滑閥17爲中實的 活塞狀的構造，相對於此，若由端面放入塗佈溶液時，由 圖亦可知，在使用中空活塞狀的滑閥17a具有特徵，在圓 筒的外壁面閉塞對吐出噴嘴孔的流路。此相當於本發明之 請求項1 2之實施例的構造。 其中，第9圖所示之吐出控制用滑閥1 7係呈圓柱形 狀，但是並非侷限於此，亦可爲角柱形狀。此外，吐出控 制用滑閥的材料係以使用屬於低膨脹材的超因瓦（Superinvar)陶 瓷爲佳 ，俾 以可進 行平順 的動作 。此外 ，吐 出控 制用滑閥或與該滑閥進行滑動的吐出流路的內面係以施行 類鑽碳塗敷或鍍敷塗敷爲宜，俾以提升耐摩擦性。 在第13圖中顯示改變指狀電極16之塗佈長的第二構 造β在本構造中，取代使用吐出控制用的滑閥，而使用在 側面具有斜向切口 3 6的旋轉桿3 3。該旋轉桿3 3係使用利 用固定治具35而被固定在塗佈頭5的電動機34來朝向箭 號方向旋轉。塗佈溶液係與第10圖相同地，通過位於噴 嘴板12的塗佈溶液體供給口 18而被供給至吐出噴嘴孔11 。旋轉桿3 3的側面係配置成與吐出噴嘴孔1 1相接，旋轉 桿的切口 36位於吐出噴嘴孔π之上時，該吐出噴嘴孔係 -26- 201242051 呈開放，因此塗佈溶液被吐出，當旋轉桿33沒有切□的 部分位於吐出噴嘴孔1 1之上時，該吐出噴嘴孔係被旋轉 桿33所閉塞，因此塗佈溶液未被吐出。該切口 36係斜向 形成，藉由將旋轉桿33進行旋轉，可依序改變被旋轉桿 所閉塞的吐出噴嘴孔與藉由切口呈開放的吐出噴嘴孔，@ 此可藉由一面旋轉旋轉桿33 —面進行塗佈來改變指狀電 極的塗佈長。 使用第14圖（a)〜（d)來說明一連串具體的塗佈動作。 該圖係與第9圖同樣地，顯示出電極的塗佈長改變時的塗 佈順序者。首先，（a)係表示塗佈開始瞬後，在吐出噴嘴孔 11a之上位有旋轉桿33的切口 36，在吐出噴嘴孔lib之 上位有旋轉桿33之不具切口的部分，由吐出噴嘴孔Ua 係被吐出塗佈溶液，由吐出噴嘴孔1 1 b並未被吐出塗佈溶 液。接著在（b)中，將旋轉桿33以預定角度進行旋轉，旋 轉桿的切口部位於上方的吐出噴嘴孔11a的數量在兩側一 個一個增加，塗佈長即會擴大。接著在（c)中，另外將旋轉 桿33以預定角度進行旋轉，旋轉桿的切口部位於上方的 吐出噴嘴孔11a的數量另外在兩側一個一個增加，塗佈長 會擴大。同樣地，加寬塗佈長，在（d)中，旋轉桿33的切 口 3 6位於所有吐出噴嘴孔之上，由所有吐出噴嘴孔被吐 出塗佈溶液。在縮窄塗佈長時，若進行與該動作相反的動 作即可。如上所示，可藉由一面使旋轉桿33旋轉一面進 行塗佈，來改變指狀電極的塗佈長。 接著，檢討具有狹小微細吐出噴嘴孔群11的塗佈頭5 -27- 201242051 所被要求的項目。塗佈頭5係在太陽電池的集電極形成中 ，爲中心元件，稱之爲其性能或可靠性直接置換成裝置的 性能或可靠性亦不爲過。現在的太陽電池的指狀電極的線 寬爲1 00微米前後，電極剖面的縱橫比亦不高。此外，因 製造法而起的電極周邊的‘滲糊’的課題並未被解決。減半 電極寬幅，而且使電極剖面縱橫比大幅提升，在消除‘滲 糊’的目的下，所被提出的開縫式塗佈機方式的形成方法 係可能性十足，但是由於作爲主元件的塗佈頭5的安定性 不足，因此以實力値而言，係與習知的方式爲相同等級。 該原因完全依因吐出塗佈溶液的噴嘴孔1 1的加工法 的困難之處甚大。具體而言，將微細孔以雷射加工或線放 電加工進行開孔乃爲常識上的考量，但是兩者均爲材質或 形狀的制約大，例如藉由雷射而形成孔洞的噴嘴的厚度方 向的直徑分布一般較爲不佳，厚度的制約亦較大。孔形狀 若爲本發明中所被提出的長孔時，被推定出不均會變得更 大。此外，關於線放電加工，亦必須要有供設定線材的開 口面，孔形狀亦不佳。而且，由於該等加工設備昂貴，並 非爲到處均可進行加工者。此外，在指狀電極的間隔的變 更等的對應方面，必須由最初即重新製作，結果，塗佈頭 5係無關於加工精度不佳，而形成爲非常昂貴者。 、 根據以上背景，列舉作爲塗佈頭5所必須具備的條件 如下。 (1) 吐出噴嘴孔的加工精度充分。 (2) 吐出噴嘴孔的長孔形狀之中，尤其短邊的尺寸不均 -28- 201242051 非常小。 (3) 在吐出噴嘴孔的加工未使用特殊方法，必然爲低價 格。 (4) 可迅速且廉價地對應電極寬幅或電極間隔的變更等 〇 (5) 可容易處理吐出噴嘴孔阻塞等不良情形。 (6) 對於部分的損傷，可以適當部分替換》 將根據前述塗佈頭5的必要條件的層積型塗佈頭構造 顯示於第11圖。此外，將構成該塗佈頭的吐出噴嘴孔11 的具代表性零件顯示於第12圖。首先，吐出噴嘴孔11係 藉由在第12圖所示之規定指狀電極的間隔的區塊22與2 枚區塊2 2之間，層積將亦包含吐出噴嘴孔1 1的吐出流路 23進行切削形成的薄層間隔件24，藉此可完成間隙成爲 微細長孔（長方形）的塗佈頭5的基本構造。當然，依塗佈 溶液的物性，尤其黏度的値，亦有吐出噴嘴孔1 1形狀成 爲正方形的情形。在該等兩零件22、24係在共通的位置 形成有供層積之用的疊層螺栓孔25及塗佈溶液體供給流 路孔26。交替層積該等2個零件，若結束層積預定個數後 ，即由於連接用以對兩側供給塗佈溶液的配管27及用以 排出的配管28，而安裝成爲疊層螺栓29的台座的端板30 、31，最後在調整噴嘴面後，鎖緊疊層螺栓29而層積型 的塗佈頭的組裝即告完成。組入前述槪念爲本發明之請求 項1 1、請求項1 2及請求項1 3。 在該構造中，由於全部藉由切削或硏削等習知的加工 S. -29- 201242051 法’全部均爲相對基準平面呈垂直方向的加工，若連平行 度都留意，則以任何加工設備均可對應。此外，相當於長 孔噴嘴的短邊的薄層間隔件24通常爲不銹鋼板的壓延材 ，具有非常正確的厚度與較少的不均，形成空間的吐出噴 嘴孔11係比藉由雷射加工等最先端的加工技術所爲之形 成孔洞，更遠爲準確。此外，以該方法所製作的塗佈頭係 比以任何加工方法所製作的塗佈頭還要廉價，純粹的製造 價格與其他方法及構造相比較，成爲1/10以下。本發明 之請求項1 4係關於藉由切削及硏削之習知的加工技術所 致之塗佈頭5的製造法。 此外，對於伴隨著規格變更的電極間隔或電極寬幅的 變更亦可有彈性地對應，亦可對應在同一基板內的規格値 的變更’係以與以藉由雷射等形成孔洞所致之一體型頭並 無法完全對應爲良好對照。 係有太陽電池的指狀電極所要求的尺寸各種因素非常 嚴謹，實現此的元件所被要求的精度亦較爲嚴謹者。作爲 對象的塗佈頭5係被要求與噴墨頭相同等級的尺寸各種因 素與精度。另一方面，作爲塗佈對象的塗佈溶液係被限定 爲噴墨塗佈爲10mPa . s程度的極低黏度，相對於此，本 發明對象的塗佈頭5係必須吐出黏度1 oojoomPa · s以上 的塗佈溶液。此時，在塗佈噴墨時，將成爲問題的噴嘴孔 阻塞的問題係在可靠性方面造成較大的課題。以雷射開孔 等所製作的一體型的塗佈頭5係對微細的吐出噴嘴孔11， 難以進行阻塞恢復的手段，若無法恢復時，即不得不替換 -30- 201242051 塗佈頭5全體。相對於此，在第11圖所示之層積型塗佈 頭5發生阻塞時，會立刻分解，藉由各個薄層間隔件24 的洗淨及各個區塊22的洗淨，可輕易恢復。亦即，爲了 進行平板1枚的洗淨，以方法而言，極爲容易，大部分均 使阻塞消除。萬一因洗淨工程等的處理錯誤，而使薄層間 隔件2 4發生破損時，若僅替換1枚，即可恢復原狀。 藉由前述各構造及方法的採用，可使形成於太陽電池 單元基板的指狀電極變細，且可形成剖面縱橫比爲較大。 結果，可提供光電轉換效率提升且有效的太陽電池系統。 此外，藉由採用本發明之頭構造，可廉價提供太陽電池集 電極之形成裝置，且可提供安定且可靠性高的製程。 [產業上可利用性] 本發明係在解決前述問題點的同時，另外係用以形成 狹小寬幅且剖面縱橫比高的指狀電極者，在可提供可靠性 高的電極形成裝置的同時，亦造成實現達成更高的光電轉 換效率的太陽電池者。 【圖式簡單說明】 第1圖係顯示結晶系太陽電池單元中的集電極（指狀 電極與匯流條電極）之構成例圖。 第2圖係以模式顯示太陽電池中的基本構造圖。 第3圖係顯示作爲本發明之實施例的太陽電池集電極 形成裝置的構成圖。 S. -31 - 201242051 第4圖係顯示作爲本發明之實施例之具備有複數吐出 噴嘴孔之藉由線放電加工所致之—體型塗佈頭之構成圖。 第5圖係顯示作爲本發明之實施例之具備有複數吐出 噴嘴孔之藉由雷射加工所致之一體型塗佈頭之構成圖。 第6圖係顯示作爲本發明之實施例之塗佈電極與吐出 噴嘴長孔的關係圖。 第7圖（a)係以模式顯示由分配器或習知的開縫式塗佈 機的噴嘴或頭，塗佈溶液被吐出至基板面而進行衝撞的樣 子的圖。此外，（b)係以模式顯示作爲本發明之實施例之藉 由傾斜塗佈頭，將來自吐出噴嘴孔的塗佈溶液的吐出方向 相對基板面呈傾斜，緩和衝撞的樣子的圖。（c)係以模式顯 示塗佈頭本身雖然未傾斜，但是對於至吐出噴嘴孔爲止的 流路賦予傾斜，來緩和衝撞的樣子的圖。 第8圖係顯示作爲本發明之實施例之對於單元基板之 電極塗佈長改變的領域的吐出控制的機構的圖。 第9圖係針對在本發明之單元基板的端部所需之對於 電極塗佈長改變的領域的吐出控制的機構，連續說明動作 的圖。（a)係表示塗佈開始瞬後，（b)係表示電極塗佈範圍 擴大的時點，（c)係表示電極塗佈範圍變窄的時點，（d)係 表示在塗佈結束的時點的元件的動作。 第10圖係顯示作爲本發明之實施例之對於單元基板 的電極塗佈長改變的領域的吐出控制的機構者，使由泵所 被送入的塗佈溶液由塗佈頭的端部流入時之構成圖。 第11圖係顯示作爲本發明之實施例之層積型塗佈頭 -32- 201242051 的構造圖。 第12圖係顯示在作爲本發明之實施例之構成層積型 塗佈頭的零件之中形成吐出噴嘴孔的2個組件的圖。 第1 3圖係顯示作爲本發明之實施例之改變指狀電極 的塗佈長的第二構造圖。 第1 4圖係顯示在作爲本發明之實施例之改變指狀電 極的塗佈長的第二構造中一連串具體的塗佈動作圖。 【主要元件符號說明】 1:太陽電池集電極形成裝置的機構部分的基座 2:太陽電池的單元基板 3:單元基板吸附裝載平台 4:用以使平台移動的驅動機構（載台致動器） 5 :塗佈頭 6 :頭〜基板間間隙調整用移動機構（垂直軸致動器） 7:頭固定用門型框架 8 :塗佈溶液槽 9 :送液泵 10:基板吸附用真空泵 11、11a、lib:吐出噴嘴孔 12 :噴嘴板（a)(b) 13 :蓋板（a)(b)(c) 14:塗佈溶液液體積存用空腔 1 5 :密封板 -33- 201242051 1 6 :指狀電極 1 7 :吐出控制用滑閥 1 8 :塗佈溶液體供給口 19 :線性導引件 20 :精密梯形螺絲驅動機構 21 :連結臂 2 2 :規定指狀電極間隔的區塊 23 :吐出流路 24 :薄層間隔件 2 5 :疊層螺栓孔 26 :共通塗佈溶液體供給流路孔 27 :塗佈溶液體供給配管 28 :塗佈溶液排出配管 29 :疊層螺栓 30:締結台座用端板（1) 31 :締結台座用端板（2) 3 2 :壓力感測器 33 :旋轉桿 34 :電動機 3 5 :固定治具 36 :切口 -34-The solar cell collector forming apparatus according to any one of the preceding claims, wherein the head is provided with an opening and closing valve, and the opening and closing valve is adapted to cooperate with the solar cell collector forming apparatus according to any one of the preceding claims. In the manner of the electrode pattern corresponding to the shape of the solar cell substrate (cell), the discharge/stop of each nozzle forming each electrode can be sequentially switched. Further, it is formed as a head for forming a solar cell collector, which is a coating head used in a solar cell electrode forming apparatus according to claim 6 of the patent application, characterized in that the on-off valve is provided by The mechanism for sliding in the direction perpendicular to the supply direction of the discharge flow path filled with the coating material is controlled to be discharged from each discharge nozzle hole. Further, it is formed as a configuration of a solar cell collector forming method, which is characterized in that the coating head of claim 7 is used in the solar cell collecting device of claim 6 of the patent application. The solar cell collector forming device of any one of the first, the third, the fourth, and the sixth aspect of the invention, wherein the coating is applied The head system is provided with a coating head in which a plurality of blocks which alternately stack the discharge nozzle holes and a thin layer spacer which cuts the discharge flow path are alternately stacked. Further, it is formed as a configuration of a solar cell collector forming method, which is characterized in that the above-described laminated stacked coating head is used in the solar cell collecting device of the ninth application. In addition, it is formed into a coating head having a plurality of discharge nozzle holes and a discharge flow path for supplying a viscous coating solution to the discharge nozzle holes, and discharging a coating solution from the discharge nozzle holes to form a pattern. In the coating apparatus-14 - 201242051, there is a structure in which a block in which a plurality of discharge nozzle holes are spaced apart and a thin layer spacer having a discharge flow path formed by cutting are alternately laminated, and laminated bolts are used. fixed. Further, a coating head having a configuration in which the discharge nozzle hole formed by the block and the spacer has a square shape is formed. Further, a coating head is formed as a coating head of the eleventh or twelfth aspect of the invention, wherein the coating solution is parallel to the fine rows of the respective discharge nozzle holes. A valve that is slidably provided in the supply flow path is provided, and the presence or absence of discharge can be controlled by opening and closing of each discharge nozzle hole. Further, the configuration of the method for producing a laminated type coating head according to any one of the claims 1 to 12, the item 1 or the claim 13 (the effect of the invention) is as described above. The following effects can be obtained by using the collector of the unit substrate of the solar cell of the present invention, in particular, the forming device and the forming method of the finger electrode. First, first, compared with the finger electrodes obtained by the conventional process method, by using the process apparatus and method of the present invention, a finger electrode having a narrow electrode width and a large aspect ratio of the electrode profile can be obtained. As a result of the reduction in the wiring resistance and the increase in the incident light area, the photoelectric conversion efficiency of the produced solar cell can be greatly improved. Secondly, compared with the screen printing -15-201242051 brushing method which is formed by the finger electrode, the processing apparatus and method of the present invention have no consumables at all, so that the running cost can be greatly reduced. Third, in the formation of the finger electrodes of the solar cell, the effective utilization efficiency of the electrode coating material can be improved. For example, it is 1.5 times or more effective utilization efficiency as compared with the screen printing method. It is advantageous if an expensive coating solution such as silver is used. Fourthly, in the process of the present invention, since the coating solution adheres to the coated substrate, since it passes through the completely closed flow path, there is no exposure to the air, and thus the deterioration of the material or the change in physical properties is small. Easy process management. Fifth, the laminated type coating head of the present invention is easy to clean and has a high recovery rate against the problem of coating failure which is caused by clogging. Sixth, the laminated type coating head of the present invention can easily change the design of the finger electrode of the solar cell, for example, the width of the electrode or the change of the electrode spacing. Seventh, the laminated type coating head of the present invention can be produced by a known processing technique, and the price can be suppressed to be low. In the event of damage to the thin-layer spacer forming the nozzle, only a considerable portion of the replacement can be replaced, which is also a low price. Eighth, the laminated type coating head of the present invention has a limit to be applied to the object depending on the shape and the like, but the distance from the adjacent side is large, and the object to be applied to the straight line is simple. Construction and low price, and can be expected to expand the scope of application. -16-201242051 [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the description of the drawings, the same components are denoted by the same reference numerals. [Embodiment 1] The basic structure of a solar cell which is the object of the present invention will be described in Fig. 2 . The solar cell system includes a photoelectric conversion portion that generates a light generation carrier by incidence of sunlight, and positive and negative one-pair electrodes for taking out a light generation carrier generated in the photoelectric conversion portion. The positive and negative one-pair electrode systems are often provided on the front surface and the back surface of the photoelectric conversion portion, but a positive and negative pair of electrodes may be provided on the back surface of the photoelectric conversion portion. When the light generating carrier is generated by the incident light on the surface of the photoelectric conversion portion, and one of the pair of electrodes is provided on the surface of the photoelectric conversion portion, one of the electrodes is required to reduce the area of the incident light as much as possible. Generally, a plurality of narrow finger electrodes and a wide bus bar electrode are combined to form a comb shape. The finger electrodes are stacked on the electrode of the light generating carrier generated by the photoelectric conversion unit, and are disposed over substantially the entire surface of the photoelectric conversion portion. Further, the bus bar electrode is formed by forming a collecting electrode of a light generating carrier in which a plurality of finger electrodes are stacked so as to intersect with the finger electrodes. Further, when the photoelectric conversion portion is not only the surface thereof but also the light generating carrier is generated by the light incident from the back surface, the light incident surface of the photoelectric conversion portion also includes the back surface and not only the surface of the photoelectric conversion portion. Therefore, finger electrodes and confluences -17-201242051 electrodes are formed in the same manner on the front and back surfaces of the photoelectric conversion unit. The photoelectric conversion portion has a semiconductor junction such as pn or pin bonding, and is composed of a lanthanide semiconductor material such as a single crystal lanthanum or a polycrystalline lanthanum, an amorphous lanthanum material or a thin film semiconductor material such as CuInSe, or a compound semiconductor material such as GaAs or InP. In addition, organic semiconductor materials such as dye-sensitized types have recently been studied. The collector of the solar cell is made of a conductive material, and a conductive paste such as a thermosetting conductive resin in which an epoxy resin is used as a binder and conductive particles are used as a coating material. The purpose of the collector of the collector is to obtain electrical conductivity. In terms of composition, at least one metal particle selected from the group consisting of silver, copper, nickel 'aluminum, tin, and the like, or an alloy or mixture thereof may be applied. Further, the collector of the collector is mainly used for the subsequent coating, and is required to have excellent moisture resistance or heat resistance in order to maintain reliability. Examples of the material for the binder to satisfy the requirements include an epoxy resin, an acrylic resin, a polyimide resin, a phenol resin, a urethane resin, a ruthenium resin, etc., and at least one or the like may be applied. Mixing or copolymerization, etc. Further, when the photoelectric conversion portion has high heat resistance like a crystalline semiconductor, an inorganic material which can be cured and fired at a high temperature can be used as the binder. For example, metal particles such as silver or aluminum are preferably composed of a glass material and an organic vehicle. In the case of the collector of the solar cell, especially the item required for the finger electrode, there is an increase in the area of the opening for the light to enter and a decrease in the resistance loss. The increase in the opening area also includes the elimination of the 'bleeding' often seen in the manufacture of screen printing. After the fine electrode width -18-201242051 is achieved as much as possible, the thickness of the electrode is formed as thick as possible, that is, , to achieve a high aspect ratio shape. Therefore, when a conductive material having a small particle diameter is used as much as possible, if the discharge can be performed with a relatively high viscosity, the possibility of realization becomes large. A solar cell collector forming apparatus according to an embodiment of the present invention will be described with reference to Fig. 3'. The mechanism in the present device is constituted by a platform 3 that is placed on the susceptor 1 and has a vacuum suction groove for fixing the unit substrate 2 of the solar cell, and can move the platform 3 a substrate-side system including a drive mechanism 4 at an arbitrary position; and a coating mechanism 5 that supports the micro-holes, and a drive mechanism that can move up and down in a gap between the coating head 5 and the solar cell substrate 2 The head system "of six" is fixed to the base 1 and the relative positional relationship is determined by the portal frame 7. That is, the head side system is fixed to the portal frame 7 in a whole system, and is formed to be opposed to the substrate side system fixed to the susceptor 1. In addition to these mechanisms, a solar battery collector forming device is formed by adding a liquid supply system composed of a liquid supply pump 9 for supplying a coating solution to the coating head 5 by the coating solution tank 8. Each element is explained below. Since the stage 3 of the fixed unit substrate 2 adsorbs the back surface of the substrate by the vacuum pump 10, a groove is formed on the surface, and a negative pressure is generated and fixed. Further, after the electrode is formed, the substrate 2 is attached and detached, and a rising pin having the above-mentioned substrate is built in. This action is usually performed using air pressure. The drive mechanism 4 that moves the unit substrate 2 that is vacuum-adsorbed and fixed to the stage 3 has a movement mechanism having only one direction in the simplest case, and has a plane 2 direction for the most freedom. Face <«· 5 -19- 201242051 A total of three axes of movement in the direction of rotation. In the case of the moving mechanism, the motor-driven ball screw mechanism is generally servo-controlled, but there are also applications using a linear guide or a tunnel actuator. Similarly, the drive mechanism 6 that can move the head in the up and down direction often uses a motor-driven ball screw mechanism. There are also cases where linear guides are used as appropriate. Further, an important component part of the apparatus is the liquid feeding pump 9. There are also various types of pumps, and the required performance items are first of all excellent in quantitative. In many types, such as a rotary type or a reciprocating type, it is extremely important that the discharge flow rate of the average unit rotation or the discharge amount of the average unit displacement is small. Under the same theme, less pulsation is also necessary. Next, as described above, the electrode coating solution of the solar cell has a high viscosity in order to increase the aspect ratio of the cross-sectional shape of the electrode as much as possible. Therefore, when the coating solution is discharged from the fine discharge nozzle hole 11, a large flow friction resistance occurs, and the pressure in the coating head 5 is inevitably increased. Therefore, it is necessary to have a high discharge pressure. Further, among the materials used for forming the electrodes, most of them are those which cause deterioration of the pump material such as melting or corrosion, and therefore chemical stability is required. In general, a rotary pump or a rotary pump capable of rotating in the forward and reverse directions is suitable for intermittent coating of the start and end of coating. The finger electrode forming operation of the device will be described below. In the state where the coating material is supplied to the coating head 5 by the liquid supply system, the gap between the unit substrate 2 and the coating head 5 is set to be constant, and the substrate side system is moved while being coated. At this time, the system in which the head side system is fixed and the substrate -20-201242051 side system is moved, but the substrate side is fixed and the head side is moved. The coating solution as the electrode material is sent to the coating head 5 by the liquid feeding pump 9, and is discharged from the fine discharge nozzle hole 11 which is correctly positioned at the position where the finger electrodes are formed. In order to obtain stable discharge, the discharge flow rate of the liquid supply pump 9 is mainly subjected to various controls. An embodiment of the configuration of the coating head 5 is shown in Fig. 4. The coating head is produced by wire electric discharge machining. First, the coating head 5 is composed of three plates. That is, the nozzle plate 1 2 a including the plurality of small discharge nozzle holes 11 , the cover plate 13 a that blocks the discharge nozzle hole 11 , and the clogging in the nozzle plate 12 a and having the coating from the liquid supply pump 9 The solution of the solution of the cavity 14 functions as a sealing plate 15 for three plates. The nozzle plate 12a and the sealing plate 15 may be integrally formed. However, when the discharge nozzle hole array 11 is processed by wire electric discharge machining, the ceiling portion of the cavity 14 must be opened as a passage of the wire, which is inevitably formed. It is a 3-body structure. The end surface of the nozzle plate 12a is cut by a wire having a certain thickness, and the depth of the hole is determined by the depth of cut. The discharge nozzle hole 11 has a long hole shape, and the direction of the long axis coincides with the application direction of the applied finger electrode, that is, the request item 1, the request item 2, and the request item 3 in the present invention. An embodiment of other configurations of the coating head 5 is shown in Fig. 5. The coating head is produced by laser processing. In this example, the coating head 5 is composed of three plates. That is, the nozzle plate 12b including a plurality of narrow discharge nozzle holes i, and the cover plate 13b' includes the cover 13c of the aforementioned cavity 14. In this configuration, the oblong holes are formed by laser at right angles to the longitudinal direction of the nozzle plate 12b. Although depending on the material of the nozzle plate 12b to be used, it is different from -21 - 201242051, but a YAG laser is usually used as a processing machine. In the present configuration, the joint surface of the nozzle plate 12b and the two cover plates 13b and 13c does not have a large influence on the increase of the internal pressure accompanying the flow of the coating solution, whereas in the configuration of Fig. 4, Since the nozzle plate 12a and the lid plate 13a are deformed to form an opening with respect to the increased internal pressure, the coating head structure of Fig. 5 is excellent in terms of the sealing property of the coating solution. The collector formed by the discharge nozzle hole 11 having a long hole section shown here corresponds to the request 1, the request 2, and the request 3 of the present invention. Here, the reason why the cross-sectional shape of the discharge nozzle hole 11 is formed as a long hole will be described. The dispenser is mostly a nozzle, and the coating solution is applied by air. At this time, the air is a compressive fluid, and even if an excessive pressure is applied, the force applied to the coating solution itself is suppressed. Therefore, the coating solution liberated by the nozzle can be applied to the substrate surface without being so expanded. However, when the force is relatively weak and the flow friction resistance until the nozzle is large, the coating cannot be performed. For example, in the case where the viscosity of the coating solution is extremely high above 1 OPa · s or the diameter of the nozzle hole is very small, the dispenser cannot be discharged. As in the case of forming a finger electrode of a solar cell which is the object of the present invention, the dispenser is not suitable if the electrode is narrow and the aspect ratio of the electrode profile is to be increased. On the other hand, in the slit coater, even if the slit gap is narrow, when the total opening area is secured, even if the viscosity is high viscosity of 100 Pa·s or more, it can be discharged. The slit coater differs from the dispenser in that direct application of the coating solution is a major factor. However, as in the case of the finger electrode of the solar cell as the object of the present invention, the applied pattern is not -22-201242051 and the entire portion is "closed", and the opening portion is extremely small. Therefore, the flow friction resistance is increased and the coating solution itself is exposed to high pressure. When the discharge is performed under the above-described conditions, the coating solution discharged from the narrow discharge nozzle hole 11 is released, and is spread on the substrate or cannot be discharged. The physical properties of the coating solution, particularly the viscosity, when considering the finger electrodes of the solar cell, must be selected to be high in terms of maintaining the cross-sectional shape after coating. Further, since it is necessary to reduce the width of the electrode, it is desirable to reduce the short side of the discharge nozzle hole 11 as much as possible. Under the above-mentioned constraints, the coating area having a small influence on the width or cross-sectional shape of the electrode, that is, the long side is obtained, so that the opening area of the appearance is increased and applied to the coating solution. The pressure reduction is for the purpose of the present invention. It has been found that by using the high-viscosity coating solution as described above, a finger electrode having a small electrode width and excellent cross-sectional aspect ratio can be formed. In Fig. 6, the positional relationship between the formed finger electrodes and the discharge nozzle holes 11 of the coating head is shown in a pattern. As is apparent from the figure, the axis of the long side of the discharge nozzle hole 11 coincides with the coating direction. In addition, depending on the physical properties of the coating material, especially the viscosity, it may be a round hole or a square instead of a long hole. The pressure applied to the coating solution in the coating head 5 can be alleviated by the long hole cross-sectional shape of the discharge nozzle hole 11 , and it is understood that the shape of the formed electrode is good, but a narrow electrode width is required. Width. As shown in the pattern of Fig. 7(a), a general dispenser or a slit coater has a discharge direction of a coating solution discharged from a nozzle at a right angle to the surface of the substrate. At this time, the substrate surface responds to the flow of the coating solution as a wall, and -23-201242051 occurs as a so-called "jet flow" phenomenon in the world of fluid mechanics. That is, after the coating solution collides with the wall, it generates a velocity vector along the omnidirectional direction of the wall and spreads out. This would be a violation of the purpose of narrowing the formation of the finger electrodes. In order to alleviate the diffusion and spread of the coating solution after the impact, as shown in Fig. 7(b), the direction in which the discharge direction of the coating solution from the coating head 5 is tilted is inclined with respect to the coating direction. More effective. Here, the coating head 5 is inclined with respect to the substrate surface 2, but the coating head 5 may be erected as in the prior art as shown in Fig. 7(c) to the coating head. The discharge flow path 15 of the discharge nozzle hole 11 in the 5 is inclined. By making the discharge flow path 23 inclined with respect to the unit substrate surface 2, it is possible to alleviate the collision energy of the coating solution, which has only the velocity vector in the opposite direction to the coating direction. Therefore, the narrowing of the electrode width is In an extremely effective embodiment, the request item 4 and the request item 5 in the present invention are equivalent to each other as an apparatus and method. Now, the unit substrate 2 of a crystalline solar cell that occupies most of the solar cell is usually made of a germanium wafer having a substantially circular shape, and the rectangular shape shown in FIG. 1 is used as a pedestal based on the relationship of the structure. Forming a shape in which the 4 corners are cut. The finger electrodes 16 have a predetermined interval and are formed in a straight line on one surface. However, in the slit portion, the shorter the electrode length is toward the outer side of the wafer, and the central portion is formed to have a constant length. Next, the corresponding mechanism for the coating length of the finger electrodes which are changed stepwise will be described. The configuration in which the coating length of the finger electrodes 16 is changed is shown in Fig. 8. The center of the coating head is a discharge nozzle hole 11 having a predetermined cross-sectional shape of a predetermined number of -24 - 201242051 at a predetermined interval in the center of the coating head. In the common flow path for supplying the coating solution to the discharge nozzle hole 11, there is a structure in which the slide valve 17 that can move left and right can be moved around the coating material supply port 18. In other words, the piston valve that covers the cross section of the common flow path has a function of closing the discharge nozzle hole 1 and cannot be discharged when it is positioned above the discharge flow path 23. The spool valve 17 is configured to be driven to the left and right by the connected arm 21 by the linearly-guided precision trapezoidal screw 20 attached to the coating head 5 of the linear guide 19. Further, the drive of the trapezoidal screw 20 is performed by a servo motor. As a result, patterning at the cut portion of the solar cell substrate can be performed. A series of specific coating operations will be described using Figs. 9(a) to (d). This figure is a coating sequence when the coating length of the display electrode is changed as shown in Fig. 1 when the notch portion is changed. First, (a) shows that after the coating start, the coating head 5 is lowered, and after the predetermined gap with the unit substrate 2 is set, the coating solution is supplied, and the stage 3 of the loaded unit substrate 2 is moved to start coating. At this time, the interval of the spool valve 17 is formed as a substrate width which does not have the influence of the slit at the center portion. Next, in (b), the slide valve 17 is slowly moved left and right, and the number of drawn electrodes is sequentially increased. The total number of draws is stabilized and continues until the notch portion of the unit substrate 2 is reached. In (c) and (d), the spool 17 is gradually returned to the center, and the number of electrodes that are suspended is sequentially increased. At this time, it is necessary to reduce the discharge flow rate of the liquid feeding pump 9. Specifically, the enthalpy of the pressure sensor 3 2 set in the supply flow path 23 is monitored and controlled in the form of feedback to the number of revolutions of the pump. At the time of completion of the coating, the coating head -25 - 201242051 5 was raised, and the supply of the coating solution was stopped. These are examples of request 6, request 7 and claim 8 of the present invention. Further, Fig. 8 is a configuration in which the coating solution is placed in the center of the coating head 5, but has a head-like configuration, which is not placed in the center portion, but must be provided at both ends or single ends of the coating head 5. The situation of the department. The configuration at this time is shown in Fig. 10. When the coating solution is placed in the center portion, the spool 17 is a solid piston-like structure. When the coating solution is placed on the end surface, it can be seen from the drawing that a hollow piston-shaped spool valve 17a is used. It is characterized in that the flow path to the discharge nozzle hole is closed on the outer wall surface of the cylinder. This corresponds to the construction of the embodiment of the claim 1 of the present invention. Here, the discharge control slide valve 17 shown in Fig. 9 has a cylindrical shape, but is not limited thereto, and may have a prismatic shape. Further, the material of the sprinkler control slide valve is preferably a superinvar ceramic which is a low-expansion material, so that smooth operation can be performed. Further, it is preferable that the discharge control spool or the inner surface of the discharge passage that slides with the spool is subjected to diamond-like carbon coating or plating to improve the friction resistance. In Fig. 13, the second configuration β for changing the coating length of the finger electrodes 16 is shown. In the present configuration, instead of using the spool for discharge control, the rotary lever 33 having the oblique slits 36 on the side is used. The rotating lever 3 3 is rotated in the direction of the arrow by using the motor 34 fixed to the coating head 5 by the fixing jig 35. The coating solution is supplied to the discharge nozzle hole 11 through the coating solution supply port 18 of the nozzle plate 12, similarly to Fig. 10. The side surface of the rotating rod 3 3 is disposed to be in contact with the discharge nozzle hole 1 1 . When the slit 36 of the rotating rod is positioned above the discharge nozzle hole π , the discharge nozzle hole -26 - 201242051 is opened, so that the coating solution is discharged. When the portion where the rotary lever 33 is not cut is located above the discharge nozzle hole 11, the discharge nozzle hole is closed by the rotary lever 33, so that the coating solution is not discharged. The slit 36 is formed obliquely, and by rotating the rotary lever 33, the discharge nozzle hole closed by the rotary lever and the discharge nozzle hole opened by the slit can be sequentially changed, and the rotary lever can be rotated by one side The coating was applied to change the coating length of the finger electrodes. A series of specific coating operations will be described using Figs. 14(a) to (d). This figure shows the order of application when the coating length of the electrode is changed, similarly to Fig. 9. First, (a) shows a slit 36 in which the rotary lever 33 is positioned above the discharge nozzle hole 11a after the start of coating, and a portion having no slit in the rotary lever 33 above the discharge nozzle hole lib, and the discharge nozzle hole Ua is formed. The coating solution was discharged, and the coating solution was not discharged from the discharge nozzle hole 1 1 b. Next, in (b), the rotary lever 33 is rotated at a predetermined angle, and the number of the discharge nozzle holes 11a in which the slit portion of the rotary lever is located is increased one by one on both sides, and the coating length is enlarged. Next, in (c), the rotary lever 33 is additionally rotated at a predetermined angle, and the number of the discharge nozzle holes 11a in which the slit portion of the rotary lever is located is additionally increased one by one on both sides, and the coating length is enlarged. Similarly, the coating length is widened, and in (d), the slit 36 of the rotary lever 33 is positioned above all the discharge nozzle holes, and the coating solution is discharged from all the discharge nozzle holes. When the coating length is narrowed, the operation opposite to the operation may be performed. As described above, the coating length of the finger electrodes can be changed by applying the rotating rod 33 while rotating. Next, the items required for the coating head 5-27-201242051 having the narrow fine discharge nozzle hole group 11 are reviewed. The coating head 5 is formed in the collector of a solar cell and is a central element, and its performance or reliability is directly referred to as the performance or reliability of the device. Nowadays, the finger electrodes of solar cells have a line width of about 100 microns, and the aspect ratio of the electrode profile is not high. Further, the problem of "bleeding" around the electrode due to the manufacturing method has not been solved. The width of the electrode is reduced by half, and the aspect ratio of the electrode profile is greatly increased. Under the purpose of eliminating the 'bleeding', the proposed method of forming the slit coater is quite possible, but as a main component Since the stability of the coating head 5 is insufficient, it is the same level as the conventional method in terms of strength. This reason is entirely difficult due to the processing method of the nozzle hole 1 1 for discharging the coating solution. Specifically, it is common knowledge to open the micropores by laser processing or wire electric discharge machining, but both of them are subject to material or shape constraints, such as the diameter of the nozzle in the thickness direction of the nozzle formed by the laser. The distribution is generally poor, and the thickness is also restricted. Hole shape If the long hole is proposed in the present invention, it is estimated that the unevenness becomes larger. In addition, regarding the wire electric discharge machining, it is necessary to have an opening surface for setting the wire, and the hole shape is also poor. Moreover, since these processing equipments are expensive, they are not available to processors everywhere. Further, in terms of the correspondence of the change in the interval of the finger electrodes, etc., it is necessary to reproduce it from the beginning, and as a result, the coating head 5 is formed to be extremely expensive regardless of the processing accuracy. According to the above background, the conditions necessary for the coating head 5 are listed as follows. (1) The machining accuracy of the discharge nozzle hole is sufficient. (2) Among the long hole shapes of the nozzle holes, especially the short side size unevenness -28- 201242051 is very small. (3) The special method is not used for the processing of the nozzle hole, and it must be a low price. (4) It is possible to quickly and inexpensively change the width of the electrode or the interval of the electrode, etc. 〇 (5) It is easy to handle problems such as blockage of the discharge nozzle hole. (6) Partial damage can be appropriately replaced. The laminated type coating head structure according to the requirements of the coating head 5 described above is shown in Fig. 11. Further, representative parts of the discharge nozzle holes 11 constituting the coating head are shown in Fig. 12. First, the discharge nozzle hole 11 is laminated between the block 22 and the two blocks 2 2 which define the interval between the finger electrodes shown in Fig. 12, and the discharge flow path including the discharge nozzle hole 1 1 is also laminated. 23 The thin layer spacer 24 formed by cutting is formed, whereby the basic configuration of the coating head 5 in which the gap becomes a micro elongated hole (rectangular shape) can be completed. Of course, depending on the physical properties of the coating solution, particularly the viscosity of the coating, there is also a case where the nozzle hole 11 is formed into a square shape. The laminated bolt holes 25 for laminating and the coating solution supply flow path holes 26 are formed at the common positions of the two parts 22, 24. When the two components are stacked alternately, the pedestal which is the laminated bolt 29 is attached by connecting the piping 27 for supplying the coating solution to both sides and the piping 28 for discharging. The end plates 30, 31, and finally, after adjusting the nozzle face, the assembly of the laminated coating head is completed by locking the laminated bolts 29. The foregoing complication is the request item 1 1 of the present invention, the request item 1 2 and the request item 13 . In this configuration, since all the conventional processes such as cutting or boring are S. -29-201242051, the method is all processed perpendicularly to the reference plane, and if the parallelism is noticed, any processing equipment is used. Can be corresponding. Further, the thin layer spacer 24 corresponding to the short side of the long hole nozzle is usually a rolled material of a stainless steel plate, and has a very correct thickness and less unevenness, and the discharge nozzle hole 11 forming the space is processed by laser processing. Such as the most advanced processing technology to form holes, far more accurate. Further, the coating head produced by this method is cheaper than the coating head produced by any processing method, and the pure manufacturing price is 1/10 or less as compared with other methods and structures. The claim 14 of the present invention relates to a manufacturing method of the coating head 5 by a conventional processing technique of cutting and boring. Further, the electrode spacing or the electrode width change accompanying the specification change may be elastically matched, and the change in the specification 値 in the same substrate may be caused by forming a hole by laser or the like. The integrated head does not correspond exactly to a good control. The dimensions required for the finger electrodes of the solar cell are very rigorous, and the accuracy required to achieve the components is also relatively stringent. The coating head 5 as a target is required to have various factors and precision in the same level as the ink jet head. On the other hand, the coating solution to be coated is limited to an extremely low viscosity of about 10 mPa·s by inkjet coating, whereas the coating head 5 of the present invention must discharge the viscosity of 1 oojoomPa·s. The above coating solution. At this time, when the inkjet is applied, the problem that the nozzle hole which is a problem is blocked is a problem of reliability. The integrated coating head 5 made of a laser opening or the like is a means for making a fine discharge nozzle hole 11 difficult to recover from clogging, and if it cannot be recovered, it has to be replaced -30-201242051 . On the other hand, when the laminated type coating head 5 shown in Fig. 11 is clogged, it is immediately decomposed, and can be easily recovered by washing the respective thin layer spacers 24 and washing the respective blocks 22. That is, in order to clean one plate, it is extremely easy to use, and most of the blockage is eliminated. If the thin layer spacer 24 is damaged due to a processing error such as a cleaning process, if only one piece is replaced, the original state can be restored. According to the above-described respective structures and methods, the finger electrodes formed on the solar cell unit substrate can be made thinner, and the cross-sectional aspect ratio can be made large. As a result, a solar cell system in which photoelectric conversion efficiency is improved and is effective can be provided. Further, by employing the head structure of the present invention, a solar cell collector forming device can be provided at low cost, and a stable and highly reliable process can be provided. [Industrial Applicability] The present invention solves the above problems while additionally forming a finger electrode having a narrow width and a high aspect ratio, and can provide a highly reliable electrode forming device. It also causes solar cells to achieve higher photoelectric conversion efficiency. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing an example of a configuration of a collecting electrode (a finger electrode and a bus bar electrode) in a crystal solar cell. Fig. 2 shows the basic structure diagram in the solar cell in a mode. Fig. 3 is a view showing the configuration of a solar cell collector forming apparatus as an embodiment of the present invention. S. -31 - 201242051 Fig. 4 is a view showing the configuration of a body coating head which is obtained by wire electric discharge machining having a plurality of discharge nozzle holes as an embodiment of the present invention. Fig. 5 is a view showing the configuration of a body coating head which is subjected to laser processing with a plurality of discharge nozzle holes as an embodiment of the present invention. Fig. 6 is a view showing the relationship between the coating electrode and the long hole of the discharge nozzle as an embodiment of the present invention. Fig. 7(a) is a view showing, in a mode, a nozzle or a head of a dispenser or a conventional slit coater, in which a coating solution is discharged onto a substrate surface to be collided. In addition, (b) is a view showing a state in which the direction in which the coating solution from the discharge nozzle hole is ejected toward the substrate surface by the oblique coating head as a mode of the present invention, and the collision is relaxed. (c) A mode in which the coating head itself is not inclined, but the flow path to the discharge nozzle hole is inclined to alleviate the collision. Fig. 8 is a view showing a mechanism for discharge control of a field in which the electrode coating length of the unit substrate is changed as an embodiment of the present invention. Fig. 9 is a view for continuously explaining the operation of the mechanism for suppressing the discharge of the electrode coating length required at the end of the unit substrate of the present invention. (a) indicates the time when the coating starts, (b) indicates that the electrode coating range is enlarged, (c) indicates that the electrode coating range is narrowed, and (d) indicates that the coating is completed. The action of the component. Fig. 10 is a view showing a mechanism for discharging control of a field in which the electrode coating length of the unit substrate is changed as an embodiment of the present invention, when the coating solution fed by the pump flows from the end of the coating head The composition of the figure. Fig. 11 is a view showing the configuration of a laminated type coating head -32 to 201242051 as an embodiment of the present invention. Fig. 12 is a view showing two components which form a discharge nozzle hole among the components constituting the laminated type coating head as an embodiment of the present invention. Fig. 13 is a view showing a second configuration diagram for changing the coating length of the finger electrodes as an embodiment of the present invention. Fig. 14 is a series of specific coating operation diagrams showing a second configuration for changing the coating length of the finger electrodes as an embodiment of the present invention. [Description of Main Element Symbols] 1: Base 2 of the mechanism portion of the solar cell collector forming device: Unit substrate 3 of the solar cell: Cell substrate adsorption loading platform 4: Driving mechanism for moving the stage (stage actuator) 5: coating head 6: head-to-substrate gap adjustment moving mechanism (vertical axis actuator) 7: head fixing door frame 8: coating solution tank 9: liquid feeding pump 10: substrate adsorption vacuum pump 11 , 11a, lib: spout nozzle hole 12: nozzle plate (a) (b) 13: cover plate (a) (b) (c) 14: coating solution liquid volume storage cavity 1 5: sealing plate -33- 201242051 1 6 : finger electrode 1 7 : discharge control slide valve 18 : coating solution body supply port 19 : linear guide 20 : precision trapezoidal screw drive mechanism 21 : connection arm 2 2 : area where the finger electrodes are spaced apart Block 23: discharge flow path 24: thin layer spacer 2 5 : laminated bolt hole 26 : common coating solution supply flow path hole 27 : coating solution supply pipe 28 : coating solution discharge pipe 29 : laminated bolt 30: End plate for pedestal (1) 31: End plate for pedestal (2) 3 2: Pressure sensor 33: Rotating lever 34: Electric motor 3 5 :fixed fixture 36 : slit -34-