201240285 ‘ 六、發明說明： • 【發明所屬之技術領域】 本發明係關於一種線性馬達（linear motor)驅動裝置。 【先前技術】 作為控制線性馬達之停止位置（移動距離）之構成， 已知有一種除了設置用以產生推力之線圈（c〇il)及磁鐵 之外’另設有用以增減因為磁性吸引力所導致之摩擦力之 線圈及磁鐵的構成（例如專利文獻1)。 另一方面’在旋轉馬達的停止控制中，係使用一種藉 由d轴電々IL控制產生制動轉矩（brake t〇rque )使之減速的 方法（例如專利文獻2)。 [先前技術文獻] 專利文獻 專利文獻1 :日本特開平u_122902號公報 專利文獻2 :日本特開2003-88168號公報 【發明内容】 [發明所欲解決之課題] 除產生推力用之線圈及磁鐵之外，又另行設置用以增 減磁性吸引力所導致之摩擦力之線圈及磁鐵的構成中，用 以控制停止位置（移動距離）的構成會變得複雜。 然而’即使是線性馬達的驅動控制，由於係使用與旋 轉馬達相同的向量（vector)控制，因此只要可在線性馬 達中亦藉由進行d轴電流控制來增減磁性吸引力所導致之 摩擦力來進行停止位置控制（移動距離控制），就可謀求構 4 323202 201240285 成的簡單化。 本發明係有鑑於上述愔 種可進行d軸電流控制來择減研創者，其目的在獲得一 的線性馬達驅動裝置。4贿吸引力所導致之摩擦力 [解決課題之手段] 為了解決上述問題而诖士、α , 胃ffl V 成目的，本發明提供一種線性 :=二=動具有固定部與可動部而構成的線 所:L==由直線狀排列之複數個永久磁鐵 二構成之磁鐵列及在前述磁鐵列兩_以切及引導可動 邛而與該磁鐵列並行配置 罝偌八2丨山-+、。 2條軌道（ml)，該可動部係 ^刀別由^ 2條軌道切滑料可滑動之2個承件 ^开:：^為轴承，但本件發明中所謂—ng之支 為;月動接觸’故本文中稱為承件。）及在前述2個 承件之間與前述磁鐵列靠近而相對向配置之電樞.用 =控制供給至前述電樞之線圈之d軸電流及4軸電流之 電^控制電财^軸電流㈣電路係具備使所產生之d 來控制在前述執道與前述承件之間所產生之摩 擦力的構成。 [發明之功效] 依據本發明，在除產生推力用之線圈及磁鐵外，不另 性吸引力所導致之摩擦力之線圈及磁 = t制來增減磁性吸引力所導致之摩擦 【實施方式】 單化的功效。 323202 5 201240285 . 以下根據圖式來詳細說明本發明之線性馬達驅動裝 .· 置之實施例。另外，本發明並不限定於該實施例。 (實施例） 苐1圖及第2圖係為顯示本發明之一實施例之線性馬 達之外觀構成之斜視圖及Y軸方向剖面圖。在兩圖中，線 性馬達100係由固定部1、及以可朝X軸方向移動之方式 配置於固定部1上之可動部2所構成。 固定部1係於X軸方向形成於長形之底座（base) 13 上。亦即，在底座13上朝X軸方向固定有狹長條板狀安 裝座12，而於安裝座12上則朝又轴方向以等間隔地固定 配置有複數個永久磁鐵11。在安裝座12之短邊方向（γ 軸方向）之兩侧之底座13上，係分別於X軸方向並行固 疋配置有2條軌道31。再者，在一方之軌道31之外側之 底座13上，係於X軸方向並行固定配置有尺規（scale) 41。在尺規41中，係以光學式或磁性式記錄有位置資訊。 可動部2係安裝於頂板24。頂板24之長邊寬度係較 2條執道31之間隔為長，在頂板24兩端側之下面，係固 定有與2條軌道31分別滑接之2個承件(bearmg)32。藉 此，使得2個承件32於由2條軌道31支樓之狀態下滑動 於2條軌道31上，而頂板24可朝X軸方向移動。 此外’在頂板24之下表面且為2個承件32之間，於 永久磁鐵11之配置位置的正上方位置，固定有電樞之鐵心 23。在鐵心23之外周圍，係固定有收容有電樞之線圈21 之樹脂製繞線管（bobbin) 22。另外，線圈21之相數係設 6 323202 201240285 為3。在三相線圈21中，係藉由電源用導（lead)線51， 從驅動裝置之反相器（inverter) 95 (參照第3圖）接受三 相交流電流供給。藉此，藉由電流流通於三相線圈21而形 成於鐵心23之磁性迴路所形成之磁通與永久磁鐵11所形 成磁通之相互作用，在鐵心23與永久磁鐵11之間，產生 從鐵心23侧朝向永久磁鐵11側之磁性吸引力62、及朝向 未圖示之X軸方向之推力。可得知由於磁性吸引力62，會 在軌道31與承件32之間產生與推力之方向相反方向的摩 擦力。 再者，在尺規41側之頂板24的側端，係以與尺規41 相對向之方式藉由位置檢測器結合構件43安裝有位置檢 測器42。在位置檢測器42中，係連接有用以將檢測出之 位置信號傳遞至驅動裝置之位置檢測器用導線52。 第3圖係為顯示驅動第1圖所示之線性馬達之線性馬 達驅動裝置之構成例之方塊圖。在第3圖中，線性馬達驅 動裝置90係具備：加減算電路91、93 ;位置控制電路92 ; 速度控制電路94 ;電流控制電路95 ;二相/三相轉換電路 96 ;反相器97 ;微分電路98 ;及電流檢測器99。電流檢 測器99係安裝於反相器97之輸出端，而所檢測出之輸出 電流係輸入於電流控制電路95。電流控制電路95係由d 轴電流控制電路95a、及q軸電流控制電路95b所構成。 此外，位置檢測器42所檢測出之尺規41上的位置資訊， 係輸入於加減算電路91、與微分電路98。 加減算電路91係求出從外部輸入之目標位置之位置 7 323202 201240285 ^ 指令與位置檢測器42所檢測出之尺規41上之目前位置的 . 偏差。位置控制電路92係進行從加減算電路91所求出之 位置偏差來算出内部速度指令之比例控制，且將所獲得之 内部速度指令予以輸出。 加減算電路93係求出位置控制電路92所求得之内部 速度指令、與微分電路98將來自位置檢測器42之位置資 訊微分後所求得之馬達速度的偏差。速度控制電路94係就 加減算電路93所求得之速度偏差來進行比例積分控制而 算出d軸電流指令及q軸電流指令，且將所算出之d軸電 流指令及q軸電流指令輸出至電流控制電路95。 在電流控制電路95中，雖係進行產生輸入於d軸電 流控制電路95a之d軸電流指令所指示之d軸電流的動 作，且進行產生輸入於q軸電流控制電路95b中所輸入之 q軸電流指令所指示之q軸電流的動作，惟d軸電流控制 電路95a及q軸電流控制電路95b係以電流檢測器99所檢 測出之馬達供給電流為參考來控制各個產生的電流。 二相/三相轉換電路96係將電流控制電路95所輸出 之d軸及q軸之電流id、iq轉換成uvw之三相交流電流iu、 iv、iw。反相器97係將所轉換之三相交流電流iu、iv、iw 分別轉換且放大成PWM信號，且供給至三相之線圈21。 藉此，產生磁性吸引力62及朝X軸方向的推力。 再者，在可動部2與固定部1之間產生作用之負 (minus )Z軸方向之磁性吸引力62,若表示為Fm[N]，則 可使用導磁率# [H/m]、永久磁鐵11所作成之磁通</> 8 323202 201240285 4 m[Wb]、d 軸電感（inductance) Ld[H]、d 軸電流 id[A]、 * 固定部1與可動部2之磁路刮面積S[m2]以公式（1)來求 出。201240285 ‘6. Description of the invention: • Technical field to which the invention pertains The present invention relates to a linear motor driving device. [Prior Art] As a configuration for controlling the stop position (moving distance) of the linear motor, it is known that in addition to the coil (c〇il) and the magnet for generating the thrust, the other is provided to increase or decrease the magnetic attraction. The configuration of the coil and the magnet caused by the friction (for example, Patent Document 1). On the other hand, in the stop control of the rotary motor, a method of generating a braking torque (brake t〇rque) by the d-axis electric 々 IL is used (for example, Patent Document 2). [Patent Document 1] Japanese Patent Laid-Open Publication No. JP-A No. 2003-88168 [Patent Document 2] [Problems to be Solved by the Invention] In addition to a coil and a magnet for generating thrust Further, in the configuration of the coil and the magnet for increasing or decreasing the frictional force due to the magnetic attraction force, the configuration for controlling the stop position (moving distance) becomes complicated. However, even in the case of linear motor drive control, since the same vector control as the rotary motor is used, the frictional force caused by the magnetic attraction force can be increased or decreased by performing d-axis current control in the linear motor. By performing stop position control (moving distance control), it is possible to simplify the construction of 4 323202 201240285. The present invention has been made in view of the above-described various types of d-axis current control for selecting a researcher, and the object thereof is to obtain a linear motor driving device. (4) The friction caused by the bribe attraction [means for solving the problem] In order to solve the above problems, the gentleman, the α, the stomach ffl V, the present invention provides a linear:=two=moving having a fixed portion and a movable portion Line: L== The magnet array consisting of a plurality of permanent magnets arranged in a straight line, and the magnet arrays are arranged in parallel with the magnet array in parallel with the magnet array, and are arranged in parallel with the magnet array. 2 tracks (ml), the movable part is a tool that can be slid by the 2 tracks. 2: The bearing is the bearing, but the so-called ng of this invention is the moon; Contact 'this is referred to as the contract in this article. And an armature that is disposed opposite to the magnet array between the two carriers, and controls the d-axis current and the 4-axis current of the coil supplied to the armature by the = control electric current (4) The circuit system has a configuration in which the generated d is used to control the frictional force generated between the preceding road and the aforementioned member. [Effects of the Invention] According to the present invention, in addition to the coil and the magnet for generating the thrust, the friction of the coil and the magnetic force caused by the non-external attraction force increase or decrease the friction caused by the magnetic attraction force. 】 The effect of simplification. 323202 5 201240285. The embodiment of the linear motor driving device of the present invention will be described in detail below based on the drawings. In addition, the invention is not limited to the embodiment. (Embodiment) FIG. 1 and FIG. 2 are a perspective view and a cross-sectional view in the Y-axis direction showing the appearance of a linear motor according to an embodiment of the present invention. In both figures, the linear motor 100 is composed of a fixed portion 1 and a movable portion 2 which is disposed on the fixed portion 1 so as to be movable in the X-axis direction. The fixing portion 1 is formed on the elongated base 13 in the X-axis direction. That is, the elongated strip-shaped mounting seat 12 is fixed to the base 13 in the X-axis direction, and a plurality of permanent magnets 11 are fixedly disposed on the mounting base 12 at equal intervals in the axial direction. In the base 13 on both sides in the short-side direction (γ-axis direction) of the mount 12, two rails 31 are arranged in parallel in the X-axis direction. Further, on the base 13 on the outer side of one of the rails 31, a scale 41 is fixedly arranged in parallel in the X-axis direction. In the ruler 41, positional information is recorded in an optical or magnetic manner. The movable portion 2 is attached to the top plate 24. The width of the long side of the top plate 24 is longer than the interval between the two lanes 31. On the lower side of the both ends of the top plate 24, two bears 32 are slidably attached to the two rails 31, respectively. Thereby, the two carriers 32 are slid on the two rails 31 in the state of the two rails 31, and the top panel 24 is movable in the X-axis direction. Further, between the two lower surfaces of the top plate 24 and between the two receiving members 32, the core 23 of the armature is fixed at a position directly above the position where the permanent magnets 11 are disposed. Around the core 23, a resin bobbin 22 in which the coil 21 of the armature is housed is fixed. In addition, the number of phases of the coil 21 is set to 6 323202 201240285. In the three-phase coil 21, a three-phase alternating current supply is received from an inverter 95 (see Fig. 3) of the driving device by a power supply lead line 51. Thereby, the magnetic flux formed by the magnetic circuit formed in the core 23 by the current flowing through the three-phase coil 21 interacts with the magnetic flux formed by the permanent magnet 11, and the core is generated between the core 23 and the permanent magnet 11. The magnetic attraction force 62 on the side of the 23 side toward the permanent magnet 11 and the thrust in the X-axis direction not shown. It can be seen that due to the magnetic attraction force 62, a frictional force is generated between the rail 31 and the carrier 32 in a direction opposite to the direction of the thrust. Further, at the side end of the top plate 24 on the ruler 41 side, the position detector 42 is attached to the position detector coupling member 43 so as to face the ruler 41. In the position detector 42, a position detector wire 52 for transmitting the detected position signal to the driving means is connected. Fig. 3 is a block diagram showing a configuration example of a linear motor driving device for driving the linear motor shown in Fig. 1. In Fig. 3, the linear motor driving device 90 is provided with: addition and subtraction circuits 91, 93; a position control circuit 92; a speed control circuit 94; a current control circuit 95; a two-phase/three-phase conversion circuit 96; an inverter 97; Circuit 98; and current detector 99. The current detector 99 is mounted at the output of the inverter 97, and the detected output current is input to the current control circuit 95. The current control circuit 95 is composed of a d-axis current control circuit 95a and a q-axis current control circuit 95b. Further, the position information on the ruler 41 detected by the position detector 42 is input to the addition and subtraction circuit 91 and the differentiation circuit 98. The addition and subtraction circuit 91 determines the position of the target position input from the outside. 7 323202 201240285 ^ The deviation of the current position on the ruler 41 detected by the command and position detector 42. The position control circuit 92 calculates the proportional deviation of the internal speed command from the positional deviation obtained by the addition and subtraction circuit 91, and outputs the obtained internal speed command. The addition and subtraction circuit 93 obtains the deviation between the internal speed command obtained by the position control circuit 92 and the motor speed obtained by the differentiation circuit 98 by differentiating the position information from the position detector 42. The speed control circuit 94 performs proportional integral control on the speed deviation obtained by the addition and subtraction circuit 93 to calculate a d-axis current command and a q-axis current command, and outputs the calculated d-axis current command and q-axis current command to current control. Circuit 95. In the current control circuit 95, the operation of generating the d-axis current instructed by the d-axis current command input to the d-axis current control circuit 95a is performed, and the q-axis input to the q-axis current control circuit 95b is generated. The operation of the q-axis current indicated by the current command is performed, and the d-axis current control circuit 95a and the q-axis current control circuit 95b control the respective generated currents with reference to the motor supply current detected by the current detector 99. The two-phase/three-phase conversion circuit 96 converts the current id and iq of the d-axis and the q-axis output from the current control circuit 95 into three-phase alternating currents iu, iv, and iw of uvw. The inverter 97 converts and converts the converted three-phase alternating currents iu, iv, and iw into PWM signals, respectively, and supplies them to the coils 21 of the three phases. Thereby, the magnetic attraction force 62 and the thrust force in the X-axis direction are generated. Further, a magnetic attraction force 62 in the negative Z-axis direction is generated between the movable portion 2 and the fixed portion 1, and if expressed as Fm[N], the magnetic permeability # [H/m] can be used and permanent. The magnetic flux made by the magnet 11 </> 8 323202 201240285 4 m [Wb], d-axis inductance (inductance) Ld [H], d-axis current id [A], * magnetic of the fixed portion 1 and the movable portion 2 The road scraping area S[m2] is obtained by the formula (1).
Fm= ( s/2/O { ( 0 m+Ldid) /S}2 · · · ( 1 ) 此外’藉由朝X軸方向之推力將可動部2引導於執道 31而移動時，在承件32與執道31之間產生的摩擦力 Ff[N] ’雖會在與推力反向之χ方向產生作用，惟可使用承 件32與軌道31之間的動摩擦係數k、在承件32產生作用 之垂直阻力N[N]而以公式（2)來求出。Fm=( s/2/O { ( 0 m+Ldid) /S}2 · · · (1) In addition, when the movable portion 2 is guided to the road 31 by the thrust in the X-axis direction, the bearing The frictional force Ff[N]' generated between the member 32 and the obstruction 31 may act in the direction opposite to the thrust, but the dynamic friction coefficient k between the carrier 32 and the rail 31 may be used in the carrier 32. The vertical resistance N[N] of the action is generated and is obtained by the formula (2).
Ff=kN · · · ( 2 ) 再者’垂直阻力N係使用可動部2之質量M[kg]、重 力加速度g[m/s2]、磁性吸引力Fm[N]而以公式（3)來求 出。 N=Mg+Fm· · · (3) 在公式（1)至公式（3)中，動摩擦係數k、可動部 2、之質里Μ、導磁率以、永久磁鐵n之磁通$、及^軸電 感Ld係為已知。因此，由磁性吸引力化所導致之摩擦力 Ff’係可藉由d軸電流id的控制來控制。 第4圖係為顯示第丨圖所示之線性馬達之速度特性之 波心圖。在第4圖中，至目標為止之移動時間⑽，係區分 為加速時間81、等速時間82、與減速時間^。至目前為 止，在加逮時間81與減速時間83,已使承们2與執道Μ 之間產生相同大小的摩擦力。 在本實施例中’ d軸電流控制電路95a係以電流檢測 323202 9 201240285 所檢測出之馬達電流為參照信號，心 減速時增加摩擦力之方式來控制流。I =係可在加速時與減速時之兩方來進行，亦可在單方來 藉此，由於可將加速時間81與減速時間Μ之兩方 3方較目前更為肺，目此可縮短移動時間⑽。 如此，依據本實施，不需如專利文獻i所示，除產生 ^力用之線圈及磁鐵之外，又另行設置用以增減磁性吸引 力所導致之摩擦力之線圈及磁鐵，即可進行d軸電流控制 ^減因磁性吸引力所導致之摩擦力，因此可謀求構成的 間單化。 (產業上之可利用性） 、〜综上所述，本發明之線性馬達驅動裝置係適用作為可 進行d軸電流控制來增減因磁性吸引力所導致之摩擦力的 線性馬達驅動裝置。 【圖式簡單說明】 第1圖係為顯示本發明之一實施例之線性馬達之外觀 構成之斜視圖。 第2圖係為γ軸方向剖面圖。 第3圖係為顯示驅動第丨圖所示之線性馬達之線性馬 達驅動裝置之構成例之方塊圖。 第4圖係為顯示第〗圖所示之線性馬達之速度特性之 波圖。 【主要元件符號說明】 1 固定部 10 323202 201240285 2 11 12 13 21 22 23 24 31 32 41 42 43 51 52 62 80 81 82 83 90 91 92 可動部 永久磁鐵 安裝座 底座 線圈 繞線管 鐵心 頂板 執道 承件 尺規 位置檢測器 位置檢測器結合構件 電源用導線 位置檢測器用導線 磁性吸引力 移動時間 加速時間 等速時間 減速時間 線性馬達驅動裝置 93 加減算電路 位置控制電路 速度控制電路 11 323202 94 201240285 95 電流控制電路 95a d軸電流控制電路 95b q軸電流控制電路 96 二相/三相轉換電路 97 反相器 98 微分電路 99 電流檢測器 100 線性馬達 Ff 摩擦力 Fm 磁性吸引力 id、iq 電流 K 動摩擦係數 Ld d軸電感 M 質量 N 垂直阻力 β 導磁率 12 323202Ff=kN · · · ( 2 ) Further, 'vertical resistance N is based on the mass M [kg] of the movable portion 2, the gravitational acceleration g [m/s2], and the magnetic attraction force Fm [N], and is expressed by the formula (3). Find out. N=Mg+Fm· · · (3) In the formulas (1) to (3), the dynamic friction coefficient k, the mass of the movable part 2, the magnetic permeability, the magnetic flux of the permanent magnet n, and ^ The shaft inductance Ld is known. Therefore, the frictional force Ff' caused by the magnetic attraction can be controlled by the control of the d-axis current id. Fig. 4 is a wavy diagram showing the speed characteristics of the linear motor shown in Fig. 。. In Fig. 4, the moving time (10) to the target is divided into an acceleration time 81, a constant speed time 82, and a deceleration time ^. Up to now, the acceleration time 81 and the deceleration time 83 have caused the same amount of friction between the bearing 2 and the ruling. In the present embodiment, the 'd-axis current control circuit 95a controls the flow by using the motor current detected by the current detection 323202 9 201240285 as a reference signal and increasing the frictional force during the deceleration of the heart. I = can be performed both during acceleration and deceleration, or in a single way. Since the acceleration time 81 and the deceleration time can be more lungs than before, the movement can be shortened. Time (10). Thus, according to the present embodiment, it is not necessary to provide a coil and a magnet for generating a force force, and a coil and a magnet for increasing or decreasing the frictional force caused by the magnetic attraction force, as shown in the patent document i. The d-axis current control reduces the friction caused by the magnetic attraction force, so that the composition can be simplified. (Industrial Applicability) As described above, the linear motor driving device of the present invention is applied as a linear motor driving device capable of performing d-axis current control to increase or decrease the frictional force due to magnetic attraction. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing the appearance of a linear motor according to an embodiment of the present invention. Fig. 2 is a cross-sectional view in the γ-axis direction. Fig. 3 is a block diagram showing a configuration example of a linear motor driving device for driving a linear motor shown in the second drawing. Figure 4 is a waveform diagram showing the speed characteristics of the linear motor shown in Figure 〖. [Main component symbol description] 1 Fixing part 10 323202 201240285 2 11 12 13 21 22 23 24 31 32 41 42 43 51 52 62 80 81 82 83 90 91 92 Movable part permanent magnet mount base coil bobbin iron core top plate Bearing ruler position detector position detector combined component power supply wire position detector wire magnetic attraction moving time acceleration time constant speed time deceleration time linear motor drive device 93 addition and subtraction circuit position control circuit speed control circuit 11 323202 94 201240285 95 Current Control circuit 95a d-axis current control circuit 95b q-axis current control circuit 96 two-phase/three-phase conversion circuit 97 inverter 98 differential circuit 99 current detector 100 linear motor Ff friction force Fm magnetic attraction id, iq current K dynamic friction coefficient Ld d-axis inductance M mass N vertical resistance β magnetic permeability 12 323202