201238685 六、發明說明： 【發明所屬之技術領域】 本發明係有關於一種於前端側具有工具之主軸一邊 超音波振動一邊旋轉之超音波轉軸裝置。 【先前技術】 以往，於模具加工等領域中，高速銑削加工法正在被 利用。該方法之特徵為將已熱處理之材料，以2〇〇〇〇qm 以上之轉數，使小直徑之球形端銑刀等銑刀高速旋轉的加 工方法，且通常採用一個工具從粗糙加工施行到修整加工 為止，與以往的放電加工等相比，被認為可謀求加工效率 以及加工精確度之提升。 然而，該尚速銑削加工法為了採用一個工具進行高速 切削，致使施加於工具之負擔變大、工具壽命減短之^重 問題。作為此問題之對策，正開發塗覆硬質膜之超硬工具， 例如氮化鈦鋁薄膜工具（TiA1N;氮化鈦鋁），甚至開發出'立 方晶氮化硼（cBN，cublic boron nitride)鍛燒體工具，後 者因較硬且具優越耐熱性，可比前者具有較長工具壽命， 但因刀鋒成形性不良，而有無法成形為用於工具之=形 狀之缺點。 八 ^ ，#具而言，採用最硬且刀鋒成形性亦佳之锻 燒鑽石、單晶錢石、化學氣相沉積鑽石等鑽石工呈較且效 果。然而，當由鑽石工具實行鐵系材料之切削時二與 件會起化學反應，而造成激烈的化學性磨耗， 工 具哥命大幅地變短、實用上不耐用等新問題 產生了工 322965 4 201238685 為了解決該問題點’使用鑽石工具，並往主軸之軸方 向、圓周方向或彎曲方向（與軸方向呈直角之方向）施加超 音波振動的同時，以20000rpm以上之轉數進行高速銑削， 於是，防止了化學反應，提升了工具壽命。此外，對於由 小直徑銑刀加工、小直徑之附有軸的砥石進行硬脆材研削、 微小深孔之研磨以及超音波紙粒加工等加工，同樣地施加 超音波振動以進行高速加工之方法亦有效。 然而，以往之超音波轉軸，由於其構造尚未耐受以主 軸之軸方向或圓周方向進行超音波振動的同時以 20000rpm以上旋轉之加工條件，因此即使在極低速下可使 用作為研磨用或鑽孔加工用，亦難以適用在高速下之超音 波振動銳削、研磨、鑽孔。 亦即，以往之超音波轉軸，因僅部份被支 ，，支承作用相當脆弱，而有無法承受前述高速加工時之 尚速旋轉以及橫方向之負載關題。此外，由於係為用以 11動主軸的振動子被螺絲固定於軸方向後端部之構造，因 3有以下問題：主軸之旋轉平衡度不良，於高速加工之 轉時超音波振動子帶綠_產生有害之振動，或 釉套主軸之内壁碰撞導致損壞。 内 套主軸 ， -^ ~yT*7 ^則側”後側·財自振動節點部位支承於轴 且壓電元件位於前侧喇η八與後側喇η八之間之兩支 (專#2該問題之對策’於日本特願2嶋—13738號公報 件站太&1)中提出—種超音波轉轴裝置，係將於壓電元 内，蚀ϋ前後將料—體化之主轴予以配置於軸套主轴 322965 5 201238685 承點間之大致振動郎點部位’藉此耐受高速旋轉、振動以 及橫負載，且可以將經淬火等熱處理之材料等以高加工效 率與高加工精確度進行加工。 (先前技術文獻） (專利文獻） 專利文獻1.日本特願2001 — 13738號公報。 【發明内容】 (發明所欲解決的課題） 在曰本特願2001 — 13738號公報（專利文獻1)中，在 主軸之外侧配置軸套，將這些主軸與軸套在主轴之振動節 點部中以加壓等形式連結，將這些主軸與軸套主軸之一體 化主軸以可旋轉之方式被支承於主軸套。然而，該先前技 術係因為主軸為雙重構造，故有以下問題：超音波銑削之 主軸之直徑無論如何均會增大，且在軸方向亦會增長，而 不能適用於小型工具機用之轉軸。 此外，以往之超音波轉軸，支承主軸之軸套構造會大 垔=，且利用其他構件之振動子，而於高速銑削加工之高 ，旋轉有其極限。並且，有進行高速銑削加工之工具的安 :特殊、非—般用途化、工具高成本且工具交貨期冗長等 本發明為有鑑於前述之課題點而研創者，其目的係為 及高且小型，可得到高速化、高精確度化以 貨期縮短之超音波轉轴褒置。 置之乂 322965 6 201238685 此外，本發明之其他目的係除了上述以外，提供一種 可使工具穩定地承受高速加I時的高速旋轉以及橫方、向負 載’且可效率良好地傳達超音波振動之超音波熟裝置。' (解決課題的手段） 、為了解決前述問題，且達成目的，本發明如下述所構 於申請專利範圍第1項所述之發明係於前端側且有工 具之主軸-邊進行超音波振動一邊旋轉之超音波轉轴裝 置，其具備有： 本體 透過軸承而支承前述主轴之前端侧和驅動侧之裝置 使前述主軸旋轉之驅動部； 使前述主轴超音波振動之加振部； 將則述加振部，在前述前端側之軸承與前述驅動側 之軸承之中間位置，配置於振動節點附近之振動效率最大 之部位。 於申π專利範圍第2項所述之發明係於前端側具有工 〃之主轴邊進行超音波振動一邊旋轉之超音波轉軸裝 置’其具備有： 透過轴承而支持前述主軸之前端側和驅 動側之裝置 本體； 使則述主輛旋轉之驅動部； 使前述主料超音波振動之加振部； 且將刖述加振部，在前述驅動側之軸承與前述驅動部 7 322965 201238685 之中間位置’配置於振動效率最大之部位。 於申請專利範圍第3項所述之發明係如申請專利範圍 第1項或第2項所述之超音波轉轴裝置，其中，將 軸與前述軸承之内環一體地形成。 ^ 第二==第4項所述之發明係如申請專利範圍 音波轉轴裝置，其中，將前述主 :=動之傳達上前述軸承之内環與前述轉軸被視 第二範圍第5項所述之發明係如申請專利範圍 第1項或第2項所述之超音波轉轴敦置，其中 部係具有電動機或空氣渦輪等驅動源。、 … 第範圍第6項所述之發明係如申請專利範圍 第1項或第2項所述之超音波轉轴裝置，其中，於 超音波振動之預定頻率共振之功能的夹頭熱套震配 .==：：_㈣n“錐形減前述夾頭裝著 於申請專利範圍第7韻述之發明係如_請專利範圍 第1項或第2項所述之超音波轉軸裝置，其巾，於具有以 超音波振動之狀鮮共振之魏的夾頭，間夾裝著前 述工具，藉由錐形軸將前述夾頭裝著於前述主軸。 於申請專利範圍第8項所述之發明係如申請專利範圍 第1項或第2項所述之超音⑽軸|置，其中，前述加振 部係具有壓電元件與f極板’安裝供電電刷於前述褒置本 體，將前述電極板兼用為滑移環（slipHng)，由前述供電 322965 8 201238685 電刷供電於前述電極板。 於申請專利範圍第9項所述之發明係如申請專利範圍 第1項或第2項所述之超音波轉軸裝置，其中，於前述裝 置本體，具有可以直接安裝於工具機之主轴之心軸 (arbor) ° (發明的效果） 依據前述構成，本發明具有如下述之效果。 在申請專利範圍第1項所述之發明中，具備使主軸超 音波振動之加振部，在前端側軸承與驅動側轴承之中間位 置，將加振部配置於振動節點附近之振動效率最大之部位， 藉此，可將主軸做成小直徑，且縮短裝置之軸方向之長度， 而且在不妨礙超音波振動之情形下將主軸支承於裝置本體， 即使在高速旋轉與超音波振動重疊之嚴厲使用條件下亦可 充分地承受負載，而可實行小型且穩定的高速銑削加工。 此外，因超音波振動稍許作用於前端側軸承與驅動側軸 承，因而提升了潤滑性，且可謀求更順暢之旋轉性能與壽 命提升。 在申請專利範圍第2項所述之發明，具備使主轴超音 波振動之加振部，在前驅動側軸承與驅動部之中間位置， 將加振部配置於振動節點附近之振動效率最大之部位，藉 此，可將主軸做成小直徑，且縮短裝置之軸方向之長度， 而且在不妨礙超音波振動之情形下將主軸支承於裝置本 體，即使在高速旋轉與超音波振動重疊之嚴厲使用條件下 亦可充分地承受負載，而可進行小型且穩定的高速銑削加 9 322965 201238685 工此外’ ϋ超音;皮振動猶許作肖於前端彳雜承與驅動側 軸承目*提升了m且可課求更順暢之旋轉性能與 壽命提升。 申月專利圍第3項所迷之發明中，將主軸與轴承 之内裏ϋ地形成，藉此，主幸由兼為袖承之内環，可將構 造簡易化，並且可提高支承剛性。 ，在申請專利範圍第4項所述之發明中，將轉軸壓入 至在振動之傳達上轴承之内環與轉軸被視為一體之程 度’藉此：將構造簡易化，並且可提高支承剛性。 在申。月專利k圍第5項所述之發明，驅動部係具有電 或1氣渴輪等驅動源，因此只要架置於工具機即可實 行高速銳削加工。 在申請專利範圍第6項所述之發明中，於具有以超音 =振動之預讀率共振之功能的爽頭熱套裝配王具，並藉 =赠_裝著於轉軸’藉此提高卫具支承剛性，且 ，態平衡性亦佳’因此可效率良好地將超音波振動傳達至 口並且可承受高速賴加工時之高速㈣以及振動 =、、，此外，實行鬲速銑削加工之工具安裝變為簡單， 以般用途化、低成本可以縮短裝置之交貨期。 波振2料· ^第7項所述之發财，於具有以超音 並藉―預疋頻率共振之功能的夾頭，以筒夾裝著工具， 裝配固定=夾=著於轉軸，因此相對於以往之熱套 具以外之各種㈣·夾頭加熱，結果可裝著超硬工 種材質之工具。此外，能以簡單之構造更換工 322965 10 201238685 201238685 以一般 具’使實行高速銑削加工之工具的安裝 用途化、低成本，可以縮短裝置之交貨期μ單 在申請專利範圍第8項所述之發明中。 f電元件與電極板，安裝供電電刷於前述二振部係具有 極板兼用騎移環，並由供電⑽供電^置本體，將電 須於主軸配置供電系統之路 ^ ;極板，因此無 統之單純化。 飞導線4 1可謀求供電系 在申請專利範圍第9項所述之發明 有可以直接安裝於卫具機之#之^ 置本體具 於工具機。 故可簡單地安裝 【實施方式】 以下參照圖式說明本發明之超 形態。本發明之實施形緣俜為夺j轉㈣置之實施 ㈣月貫㈣態係為表不本發明之最 發明不以此為限。 [第一實施形態] 第1圖至第4圖係表示超音波轉轴裝置八之第一實施 形態’ 1係為構成裝置本體之外彀，2係為配置於外殼丨 内之主軸，3a、3b係為在前端侧和驅動側使外殼1支承主 軸2之轴承，4係為連結於主軸2之夾頭，5係為裝著於爽 頭4之工具，6係為使主軸2高迷旋轉之驅動部，7係為超 音波振盪裝置。W係為工件。 主軸2係為喇B八與壓電元件之一體型構造，如於第3 圖所示之分解狀態’由下述構件所構成··壓電元件2a ;兼 作為該壓電元件2a之後端倒所疊合之内襯構件之後側喇 322965 201238685 叭2b;以及兼作為該壓電元件2£1之前端侧所疊合之前面 構件之前侧制°八2c。 後侧喇队2b係於與振動節點S2部位對應之外周部份 具有環狀溝23’在由後端面之軸心上設置有作為旋轉力傳 達部之齒孔21，在前端側配置有用來與前側喇^八連結之螺 栓22。在由前侧喇叭2c之後端面之軸心上配置有與螺栓 22螺合之母嫘紋孔24。將後側喇叭2b之螺栓22螺接連結 於前侧喇*>八2c之母螺紋孔24。 壓電元件2a係由例如與壓電陶瓷和電極板交互而成 三明治狀構造之複數枚（在圖式中為二牧）所構成者，且於 中心形成有容許螺栓22貫穿之通孔。該壓電元件以係構 成使主轴2超音波振動之加振部χ。 該超音波振動係如第1圖（b)所示，亦包含軸方向η、 扭轉方向F2以及f曲方向F3之任—態樣，這些可由壓電 陶瓷之組成（材質）的選定而容易地實現。 前側私2c係為從中間部開始前端直徑變大者，且 j餘振㈣點S1耗之外周部份具有環狀溝20，, ==心上配置有與螺拾以螺合之母螺紋錢， 且於則h面中央部形成有錐 之裏端形成母螺紋孔26卜L26,並且從該錐形孔2€ 係設置成與屋二 侧軸承如位於主軸2 :二致相專之距離’崔 北位於之振動節點S2^S1部位，使驅動側 Z #位’將加振部X配置 322965 12 201238685 端侧軸承3a與驅動側軸承3b之中間位置S3，俾使壓電元 件2a設定成與厚度方向之中央之中間位置S3對應。 亦即’在前端側軸承3a與驅動侧軸承3b之中間位 置’將加振部X配置於振動節點附近之振動效率最大之部 位，將主軸2做成小直徑，且縮短裝置之軸方向之長度， 而且在不妨礙超音波振動之情形下可將主軸2支承於裝置 本體’即使在高速旋轉與超音波振動重疊之嚴厲使用條件 下亦可充分地承受負載’而可實行小型且穩定的高速銑削 加工。此外’因超音波振動稍許作用於前端侧軸承3a與驅 動侧軸承3b，因而提升了潤滑性，且可謀求更順暢之旋轉 性能與壽命提升。 前端側軸承3a與驅動側軸承3b通常係為採用減摩軸 承，在本例具有外環3a卜3bl和滾動體3a2、3b2和托架 3a3、3b3 ;滾動體3a2、3b2係分別埋設於前側喇叭2C之 環狀溝20與後侧喇n八2b之環狀溝23。因而，内環被省略。 在本例中，使用滾珠作為滚動體3a2、3b2，亦可為滾輪。 亦即，將主軸2與前端侧軸承3a以及驅動側軸承沾 之内環一體地形成，主軸2兼作為軸承之内環，可將構造 簡易化，並且可提高支承剛性。此外，因無軸套主軸，故 可將裝置之直徑做成小徑，而可對應小型工具機之小型轉 軸。 前端側軸承3a以及驅動側軸承3b係分別安裴於環狀 溝20、23之外周，該環狀溝係以對應於前侧喇叭2c'與後 侧喇叭2b之振動節點si、S2部位之方式設置，在該狀態 322965 13 201238685 I’後側喇叭2b和壓電元件2a以及前侧喇叭&係重疊辦 合成串聯狀，後侧喇》八2b之螺栓22之基部貫穿壓電元件 &之通孔，螺紋部螺合於前側°刺口八2c之母螺紋孔24而鎖 緊成一體化’構成了超音波之主軸裝配。 夾碩4係如第4圖（c)所示，於對應於錐形孔26之錐 部4〇之頂部具有與母螺紋孔261虫累合之公螺紋軸4卜 操作用之多角形部42在錐部4〇之基部接合有工具 二。P 43。在工具安裝部43,從下端面之軸心上配置有 用孔430,裝配於該壓入用孔43〇熱套 柄部50。 另，、3之 此外，夾頭4如第4圖⑹、⑹所示，於錐部仙之 5二柄= 外形成之工具安裝部43壓入固定，亦可將工I 柄熱㈣配於該工具安裝部仏之壓人用孔伽。 夹頭4,以工具安裝部43之筒夾裝著二、=以 軸將爽頭4裝著於主轴2，與以 藉由錐形 相比較，無需將炎頭4加熱，即可配固定之爽頭 地拔除，以簡單的構造，可更換：將二=:容易 使實行高速銑削加工之工具5 _ 、卜王β的工具。 途化m 的文裂變得簡單’以一般用 途化、低成本可縮短裝置之交貨期。 敢用 工具5雖係採用端銑刀，但 鑽石、單晶#;5、H θ jt 質而言，係適用鍛燒 工 ::鑽石、化學·冗積鑽 具當然亦可為超硬工具、錢膜工具等。 錯石 外殼1為了内插保持主轴2，内部形成筒狀，而於後 322965 201238685 端侧配置擴大内徑之驅動部收納部10 ’從該驅動部收納部 10之底部形成有筒室11。在筒室11之振動節點S1部位附 近形成有軸承3b之定位肩12。筒室11係於大致對應於振 動節點S1部位之部位形成段差擴大部13 ’在下端開口部 内周配置所需範圍配置有母螺紋部。 超音波之主軸裝配係插入至外殼1之筒室11 ’安裝於 後側喇队2b之軸承3b之外環3bl係壓入至筒室11之内 壁，藉由抵接於定位肩12而定位固定。此外，安裝於前側 喇°八2c之軸承3a，係藉由外環3al抵接於段差擴大部13 之段面而定位，於開口側之母螺紋部螺合有固定用環8， 且藉由固定圓環8之上端80抵接於外環3al而定位保持。 藉此，主軸2相對於外殼1如第1圖所示，在前蠕i 域與後端區域之兩處且在大致振動節點S1部位之位置，葬 由轴承3a而在大致振動節點S2部位之位置藉由軸承3b 保持成可旋轉且不會朝軸方向移動。在該狀態下，壓電元 件2a係配置於屬於支撐點之振動節點S1、S2部位之間、 前端侧轴承3a與驅動侧軸承3b之中間位置S3。 高速旋轉用之驅動部6雖為任意者，但例如使用可以 輪出40000幻50000rpra之轉數之高頻馬達或AC飼服= =電動機，且收納於驅動部收納部1〇，由安裝於驅動部 、、内部10之蓋體l〇a而被保持。驅動部6係藉由輸出轴前 ,齒輪部60卡合於主軸2之齒孔21，以傳達輸出。此外 驅動部6亦可具有空氣渦輪等驅動源，只要架置於工’ 即可實行高速銑削加工。 /、機1 322965 15 201238685 從超音波振盪裝置7對壓電元件2a供電的供電系統， 係由外殼1之任一部位導入而連接於壓電元件2a即可。在 本例中，於主軸2之外周表面配置滑移環7〇，將與滑移環 70連接之導線引導至到達螺栓22之導孔25，從導孔25 向直徑方向取出而連接於壓電元件2a，另一方面，將與來 自超音波振盪裝置7之導線連接之供電電刷71，穿過外妒 1之壁且延伸至筒室11而與滑移環7〇接觸。於其他圖^ 中’15係為貫穿外殼1之壁而安裝之冷卻用流體之噴出二。 [第二實施形態] ° ° 第5圖表示根據本發明之超音波轉軸裝置之第二實施 形態。在該實施形態中，前端側轴承3a與驅動側軸承扑 具備外環3al、3b卜滾動體3a2、3b2、托架（未圖示）、 及内環3a4、3b4，為與外殼1不同體者。 這些前端側軸承3a與驅動側軸承3b係藉由分別將内 環3a4、3b4壓入至對應於前側喇叭2c與後側喇叭孔之振 動節點SI、S2部位之部位而固定。於是，如此將已安装前 端側軸承3a與驅動侧軸承3b之主軸2插入至外殼丨之= 室11，將前端侧軸承3a與驅動側軸承3b之外環3al、3Μ 壓入至筒室11之内壁面，藉此保持固定於外殼夏。 亦即，在振動之傳達上，將主軸2壓入至前端側轴承 3a與驅動侧軸承3b之各自内如4、3Μ和主轴 一體之程度，藉此可將構造W化，並且可提高支承剛性為 在本例中，於前端側軸承3a與驅動側軸承扑之 3al、3M之間配置用以保持間隔之套筒31，此為不一定需 322965 16 201238685 要。其他構成因與第一實施形態相同，故於相同部份以及 構件標示相同符號，且省略說明。 另外，在本實施形態中，貫穿外殼1之壁並安裝供電 電刷71而與壓電元件2a之電極板接觸，以作為供電系統。 亦即’於裝置本體安裝供電電刷71，將壓電元件2a之電 極板與滑移環兼用，而由供電電刷71向電極板供電，藉此 無須在主軸2配置供電系統之路徑或導線等，可使供電系 統簡單化。此外，亦可採用與第一實施形態相同之構造。 相反地，亦可將第一實施形態之供電系統取代為第二實施 形態所示者。 [第三實施形態] 第6圖係表示本發明之第三實施形態。本實施行態係 表示以螺栓2 d將主軸2之壓電元件2 a與前侧喇„八2 c以及 後側喇叭2b結合而一體化之例。 在後側π刺α八2b ’由後端形成有所需深度之袋孔1 〇〇， 由該袋孔100之底部朝轴方向配置通孔1〇1。後侧u刺„八2b 與壓電元件2a以及前侧喇σ八2c係配置成串聯狀，藉由通 過袋孔100插通過螺栓2d，並將螺紋部螺合於前侧喇叭2c 之母螺紋孔24而鎖緊。 前端侧轴承3a與驅動侧軸承3b之態樣及安襞形式， 為第一實施形態或第二實施形態任一種皆可，但於本實施 形態中，係在相當於前侧喇°八2c以及後侧喇叭2b之振動 節點S1、S2部位的部位’一體形成突台環狀之内環部3〇a、 3〇b。其他構成因與第一實施形態相同’故於相同部份以及 17 322965 201238685 部品標示相同符號，且省略說明。 另外’圖中所示者為本發明之幾例，可採用其他種種 構成。例如’亦可將第一實施形態與第二實施形態之主轴 2做成為如第三實施形態藉由螺栓之結合形式。對夾頭4 之工具的安裝宜為熱套裝配者，亦可為茼夾（c〇Uet)式、 隔膜（Diaphragm)式。此外，本發明亦可作為具有驅動部之 專用之超音波轉軸裝置，但不以此為限，驅動部亦可為位 於外部之形式。 再者，作為被削材之工件W之材質為任意者，除了碳 鋼、預硬鋼、不鏽鋼、模具用淬火鋼等之外，亦包含鋁等 非鐵金屬。此外，本發明雖適合於高速銑削加工，但即使 為低速之一般銑削當然亦可發揮效果。此外，不只是銑削， 亦可適用在研磨或鑽孔。 [實施形態之作用] 驅動部6之輸出軸之齒輪部6〇因為與主軸2之齒孔 21卡合，因此如果驅動驅動部6，將使由前端侧軸承3a 與驅動側軸承3b支承於外殼1之主軸2以2〇〇〇〇rpm以上 之咼速旋轉，並且藉由施加來自超音波振盪裝置7之電 流，使壓電元件2a朝軸方向、扭轉方向或彎曲方向振動， 使工件W由工具5被銑削加工。藉由該超音波振動，在工 具5之材質為鑽石且工件材質為鐵系材料之情形下，亦避 免由於化學反應所致之化學性磨耗。 於第一實施形態至第三實施形態中任一種中，相當於 主轴2之前側喇队2 c與後側喇叭2 b之振動節點之部份（兩 18 322965 201238685 處）’藉由被固定於外殼1之前端側軸承3a與驅動側軸承 3b’而確實地支承為被容許旋轉且不會朝軸方向以及半徑 方向移動。 因此’即使高速旋轉和振動起作用，主轴2亦可承受 於高速旋轉與橫方向之負載，可順暢且穩定地實行長距^ 之高速銑削加工。此外，如預先將冷卻用流體之喷出部15 安裝於外殼1之情形時’例如藉由噴出空氣喷霧（Mist Air)，可去除加工熱，因而可抑制因主軸2之發熱所造成 之延伸或彎曲。 此外，本發明由於設為主軸2挾持壓電元件仏而將 前侧喇八2c與後侧喇°八2b直接連結之一體型，且將前側 喇叭2c與後側喇叭沘之振動節點部份予以支承固定，且 將壓電元件2a配置於支承固定部之中間，因此使主軸2 之旋轉平衡度變佳，而不會產生如以往之振動子伴隨著旋 轉帶來旋轉振動，或與外殼碰撞而損壞之現象。 而且，不存在轴套主轴，且因主軸2直接由前端側軸 承3a與驅動側轴承3b被支承於外殼1，因而可將這樣的 轉轴之直徑縮小，藉此可對應於小型工具機之小型轉軸。 此外，因將驅動部6内建於外殼1内’故於外部不需要驅 動源，只要架置於工具機即可實行高速超音波銑削加工。 此外，主軸不會成為主軸與轴套主軸之雙重構造，而 是成為僅主轴之單一主軸構造，因此機構簡單且構件數變 少，且減少了組裝誤差。因此可謀求旋轉等精確度之提升、 更高速化、以及高精確度化、高剛性化。除上述之外，由 19 322965 201238685 於超音波振動稍許作用於配置於振動節點s丨、s 2部位之前 端側軸承3a與驅動側軸承3b’因而提升了軸承之潤滑性， 且得到了更順暢之旋轉性能，並且可謀求壽命之提升。 對於夾頭4之工具5之安農為熱套震配，且以錐形式 將夾頭4插入於主軸2之前側喇叭2c之情形時，工具支承 剛性會變高，動態平衡特性亦佳，可效率良好地傳達超音 波振動至工具5° 9 [實施形態之加工例] 以下，表示適用本發明之加工例。使用第i圖所示之 構造者作為裝置。超音波壓電元件係使用壓電式 type)。使用鍛燒鑽石鍍膜端銑刀（R1.5，一枚刀刃）作為工 具，將預硬鋼HRC40進行高速超音波銑削加工而成為加工 形狀：波形。工具轉數為2〇〇〇〇rpm，超音波振動頻率為 60.1kHz’進給量為〇.〇5_/刀，切削深度為軸方向〇 2_， 進給間距為0.1mm，使用非水溶性之切削油。為了進行比 較，除了無附加超音波振動之外均在相同條件下實行加工。 結果，比較例之情形，鑽石工具刀峰急速磨損，於切 削距離18m時變得不能切削。相對地，於本發明之情形下， 即使於30m切削時間點均未發生工具之磨損。在檢討該磨 損狀況時，初期磨損雖發生17 # m，但是之後是在幾乎無 磨損之狀態下推移β且為了看出對於負載之效果，實行連 續切削至切削距離達25〇ra為止時，以無磨損之狀態下推 移。 此外，為了看出對於負載之耐久性，實行連續切削至 20 322965 201238685 切削距離達10500m為止，主軸以及外殼均無何之損傷，確 認出具穩定之耐久性。 此外，為了進行比較，使用僅支承靠近於工具之剩°八 部分之凸緣之習知裝置，以前述條件實行高速銑削，結果 於切削距離1050m時超音波振動子產生龜裂且發出異聲， 變得不能使用。由該結果得知，將前側喇队與超音波壓電 元件與後侧喇°八做成為一體化之構造，且以振動節點位置 將前侧喇σ八與後側喇η八之雙方予以支承固定較有效果。 如此，為一種主軸2進行超音波振動的同時旋轉之形 式之超音波轉軸裝置，使前端側軸承3a與驅動側軸承3b 位於主軸2之振動節點SI、S2部位，將加振部X配置於前 端侧軸承3a與驅動側軸承3b之中間位置S3，藉此短縮了 裝置之軸方向之長度，而且可在不妨礙超音波振動之情形 下將主軸2支承於裝置本體，即使在高速旋轉與超音波振 動重疊之嚴厲使用條件下亦可充分地承受於負載，而可實 行穩定之高速銑削加工。此外，因超音波振動稍許作用於 前端侧軸承3a與驅動側軸承3b而提升了潤滑性，且可謀 求更順暢之旋轉性能與壽命提升。 而且，旋轉自在地使外殼1直接支承於主軸2，因無 轴套主軸，故可縮小直徑，且可對應小型工具機之小型轉 軸。再者，因成為未使用軸套主轴之僅主軸之單一構造， 故機構或構造變為簡單，而且減少了組裝之誤差，藉此可 提升旋轉等精確度，進一步以低成本實現高速化、高精確 度化、高剛性化。此外，因超音波振動稍許作用於前端側 21 322965 201238685 軸承3a與驅動側轴q # 而b拯升了潤滑性，且可得到謀求 更順=^讀性能與壽命提料之優越效果。 卜因主轴2兼為前端側軸承3a與驅動侧軸承3b 力f &可獲得將構造簡易化且可提高支承剛性的優越 立果再者’因外殼1成為亦具有主軸2之驅動部6之超 曰波同速㈣單元’故不需要特別之驅動源或傳達機構， 即可得到只要架置於工具機即可實行高速銑削加工的優越 效果。 此外’於前側喇η八2c之前端部之裏面部配置具有母 螺纹孔261之錐形孔％，且將具有對應於錐形部4〇之錐 形孔26的夹頭4予以螺入固定，因在該夾頭4熱套裝配工 具5 ’故提高工具支承剛性，且動態平衡性亦佳，因而獲 得可效率良好地傳達超音波振動至加工物，且可承受於高 速銑削加工時之高速旋轉以及振動或負載之這樣的優越效 果。 [第四實施形態] 第7圖至第9圖係表示超音波轉軸裝置之第四實施形 態，第7圖係為超音波轉轴裝置之剖視圖，第8圖係為加 振部之剖視圖，第9圖係為說明夾頭之固定之圖。 主轴2係以單一構件而成形，材質為例如軸承鋼、不 鏽鋼或鈦合金。該主軸2係為圓柱體，外周被研磨加工’ 於前端側形成有因藉由熱套裝配而固定夾頭106用之固定 孔2e。 工具5以及夾頭1〇6之安裝係如第9圖所示’雖藉由 22 322965 201238685 熱套裝配而將夾頭106裝配壓入固定於主轴2之前端之固 定孔2e，但並未特別限定於螺入、熱套裝配等固定方法。 工具5係藉由熱套裝配而固定裝配於夾頭丨〇6之固定孔 106a。 亦即’將工具5熱套裝配於具有以超音波振動之預定 頻率共振之功能的夾頭106，且藉由錐形轴將夾頭1〇6裝 著於主軸2，以提高工具支承剛性，且可高精確度地固定， 平衡性亦佳’因而可效率良好地傳達超音波振動至加工物 W’並且可承受於高速銑削加工時之高速旋轉以及振動或負 載。此外，實行高速銑削加工之工具安裝變為簡單，能以 一般用途化、低成本縮短裝置之交貨期。 工具5雖係採用端銑刀等，但就材質而言，適用超硬、 鍵膜超硬、鍛燒以及單晶鑽石、立方晶氮化侧（CBN)、研磨 石氏石等。 主軸2係前端測透過軸承3a、驅動測透過轴承3b而 支承於外殼1 ’前端側軸承3a與驅動侧軸承3b為同樣地 構成’通常採用滾動軸承。該前端侧軸承3a與驅動侧軸承 3b具備外環3a卜3b卜滾動體3a2、3b2、及内環3a4、3b4, 為與外殼1不同體者。 前端侧軸承3a與驅動側軸承3b係藉由將内環3a4、 3b4分別壓入至主軸2之外周而固定。於是，如此將已安 裝前端側軸承3a與驅動側軸承3b之主軸2插入至外殼1 之筒室11，藉由將外環3al、3bl壓入至筒室11之内壁面， 而被保持固定於外殼1。 23 322965 201238685 在本例中，於前端側种承3a與驅動侧轴承3b之外環 3al、3bl之間配置保持間隔用之套筒113 ’此為不一定需 要。此外，於主軸2之外肩形成環狀溝（未圖示）’以將前 端側軸承3a與驅動側軸承扣之滾動體3a2、3b2分別嵌設 於環狀溝，則内環亦可省略。 在本實施形態中，使前端轴承如位於主軸2之振動 節點S1部位，使驅動侧柏承此位於主軸2之振動師點S2 部位，將加振部X配置於主軸2之靠近驅動侧軸承3b位置 之驅動部侧。 亦即，在前端側軸承3a與驅動部6之中間位置，將 加振部X配置於振動效率最大之部位，將主軸2做成小直 徑，且縮短裝置之軸方向之長度’而且可在不妨礙超音波 振動之情形下將主軸2支承外殼1，即使在高速旋轉與超 音波振動重疊之嚴厲使用條件下亦可充分地承受於負載’ 而可進行小型且穩定的高速銑削加工。此外，因超音波振 動稍許作用於前端侧軸承3a與驅動侧軸承3b而提升了潤 滑性，真玎謀求更順暢之旋轉性能與壽命提升。 使主軸2旋轉之驅動部6係具有驅動軸6a，該驅動軸 6a係透過固定螺釘而連接於主軸2之軸線上。驅動軸 6a係將其前端部卡合於固定螺釘120之卡合孔120a，而成 為一體旋轉之構成°驅動部6係只要為高速旋轉用之裝置 則任何裝置皆可’例如使用高頻馬達或AC伺服馬達等電動 機，且收納於外殼1之筒室11。本實施型態中，雖將驅動 部6收納於外殼1並藉由蓋la而安裝，但驅動部6不一定 24 322965 201238685 要配置收納於外殼1，亦可為將主軸2之後端做成心軸而 安裝在另外之工具機之方式。 加振部X係使主軸2超音波振動，該加振部X係具有 一對壓電元件150與電極板151，由一對壓電元件150 與電極板151交互做成三明治狀構造之複數個所構成者， 且在中心形成通孔150a、151a。 於一對壓電元件150之間配置有電極板151，將固定 螺釘120之外螺紋部120b螺接於主軸2之母螺紋孔2f時， 貫穿一對壓電元件150之通孔150a、電極板151之通孔 151a ’而一起被固定於主轴2之驅動侧之前端部2g。 在外殼1安裝有供電電刷152，於該供電電刷152連 接有用以使超音波振盪之超音波振盡裝置7之供電線154。 由供電電刷152向電極板151實行電刷供電，使一對壓電 元件150驅動，使主軸2超音波振動。向麗電元件15〇之 供電係從供電電刷15 2經由電極板151實行，並透過導電 性主軸2、軸承3a與軸承3b、外殼1而接地，使饋電系統 簡單化。 該超音波轉軸裝置A係實行作為被削材之工件w之加 工’邊工件W之材質係為任意者’除了碳鋼、預硬鋼、不 鏽鋼、模具用淬火鋼等之外，亦包含鋁等非鐵金屬、甚至 玻螭或陶瓷、寶石類之非金屬、橡膠、塑膠、木材等。 驅動部6之驅動轴6a因為可一體旋轉於固定螺钉12〇, 如果驅動驅動部6,則藉由軸承3a與轴承3b支承於外殼1 之主軸2係以高速旋轉’同時藉由來自超音波振逢褒置7 322965 25 201238685 之供電，透過電極板151而使一對壓電元件15〇朝轴方向、 扭轉方向或彎曲方向振動’藉由工具5對工件w進行銳削 加工。藉由該超音波振動，在工具5之材質為鑽石且工件 之材質為鐵系材料之情形下，亦避免由於化學反應所致之 化學性磨耗。 此外，在本實施形態中，使前端側轴承3a與驅動側 軸承3b位於主轴2之振動節點S1、S2部位，將加振部χ 配置於主軸2之靠近驅動側軸承北位置之驅動部側，而短 縮了裝置之轴方向之長度’而且可在不妨礙超音波振動之 情形下將主轴2支承於外殼i，即使在高速旋轉與超音波 振動重4之嚴厲使用條件下亦可充分地承受於負載，而可 實行穩定之高迷銑削加工。 此外’主輪2由於係藉由軸承3a與軸承3b，而確實 地被支承為令許旋轉而且不會朝軸方向以及半徑方向移 動’即使南迷旋轉和振動起作用 ，主軸2亦可承受於高速 旋轉與橫方向之負载，可順暢且穩定地實行長距離之高速 銑削加工。 此外’主細2係以單一構材成形，前端側透過軸承3a、 驅動端透過#承3b而支承於外殼丨，因將使主軸2超音波 振動之加振部X配置於主軸2之靠近驅動侧軸承3b位置之 驅動部側’故無彡貞纟a裝複數個軸構件而#主軸2進行加工 而削減了製作步驟，且成本降低。 此外，加振部X具有壓電元件150與電極板151，於 外殼安裝供電電刷152，由供電電刷152向電極板151實 26 322965 201238685 行電刷供電’使壓電元件150驅動’故無須於主軸2配置 供電系統之路徑或導線等，可使供電系統簡單化，旋轉平 " 衡性佳’且可獲得高速化、高精確度化。 [供電之構成] 第一至第四實施形態之超音波轉轴裝置A，可採用第 10圖所示之供電之構成之實施形態。在本實施形態中，加 振部X具有壓電元件150與電極板151，且於外殼1安裝 供電電刷單元γ。 該供電電刷單元Y係由下述所構成：安裝於外殼1之 導電性材質之刷座300 ;插設於刷座300之導電性材質之 軸環301 ;插設於軸環301之供電電刷302 ;以使供電電刷 302之前端部接觸於電極板151之方式彈壓之導電性材質 的彈壓構件303。供電電刷302之後端係保持於構成彈壓 構件303之彈簧’彈壓構件303係支承於環310，環310 被固定於罩蓋311。 在螺接於刷座300之罩蓋311，連接有用以使超音波 振盪之超音波振盪裝置7之供電線154，由刷座300透過 軸環301以及彈壓構件303，實行由供電電刷302向電極 板151之供電，使一對壓電元件150驅動。該供電電刷302 採用小型且耐磨耗性佳之特殊微型電刷，於該特殊微型電 刷附屬有配線。因而，採用特殊微型電刷作為供電電刷 302 ’在轴環301以及彈壓構件303 —者中，均可供給電力 於供電電刷302。 如此，加振部X具有一對壓電元件15〇與電極板151， 27 322965 201238685 且將供電電刷單元Y組裝於外殼1，即可簡單且正確地將 供電電刷302安裝於外殼1。此外，實行由供電電刷單元Υ 之供電電刷302向電極板151之供電，使一對壓電元件150 驅動，藉此無須於主軸2配置供電系統之路徑或導線等， 可使供電系統簡單化。 [對工具機之安裝構造] 第一至第四實施形態之超音波轉軸裝置A，可採用第 11圖至第14圖所示之安裝構造之實施形態。第11圖係為 超音波轉軸裝置之前視圖；第12圖係為於超音波轉軸裝置 具備安裝夾持具之前視圖；第13圖係為於超音波轉軸裝置 具備安裝夾持具之俯視圖；第14圖係為第13圖之左側視 圖。 本實施形態之超音波轉軸裝置A係如第11圊所示， 表示第四實施形態之超音波轉軸裝置A，在外殼1組裝供 電電刷單元Y，並從藉由電線400由超音波振盪裝置7所 連接之供電部401向供電電刷單元Y供電。此外，在外殼 1中，配置吸入空氣至外殼1之内部之空氣吸入部402，藉 由控制器500之控制透過軟管502從空氣吸入部402供給 空氣至外殼1之内部並冷卻主軸2。 此外，在外殼1中，驅動部6係採用無刷馬達，該無 刷馬達係藉由電線501連接於控制器500,且由控制器500 所控制。此外，在驅動部6配置吸入空氣至無刷馬達之内 部之空氣吸入部403,藉由控制器500之控制透過軟管503 從空氣吸入部403供給空氣至無刷馬達之内部並將無刷馬 28 322965 201238685 • 達予以冷卻。軟管502以及軟管503係透過軟管504連接 " 於控制器500 ’並藉由控制器500控制空氣之供給量。 該超音波轉轴裝置A係如第12圖至第14圖所示，具 備安裝夾持具C’可由該安裝夾持具對工具機安裝超音波 轉軸裝置A。該安裝夾持具C係由第一夾持具600與第二 灸持具601所構成’該第一夾持具6〇〇與第二夾持具 係由不鏽鋼（Stainless Used Steel ; SUS)所形成，且由螺 拴602所固定。在裝置本體具有可以直接安裝於工具機之 主軸之心軸，該心軸由第二夾持具601所構成，可簡單地 安裝於工具機。 在第一爽持具配置有電源連接器610與冷卻連接 器620，電源連接器610係藉由電線連接於作為驅動部6 之無刷馬達與供電電刷單元γ之供電部4〇1，冷卻連接器 620係藉由軟管連接於外殼1之空氣吸入部402與無刷馬 達之空氣吸入部403。 在電源連接器610連接電源連接器611，於該電源連 接器611連接電線4〇〇以及電線5〇1，透過電源連接器61〇 以及電源連接器611實行向加振部X與驅動部6之電源供 給。此外，在冷卻連接器62〇連接冷卻連接器621，且於 該冷卻連接器621連接軟管502以及軟管503，並透過冷 部連接器620以及冷卻連接器621供給空氣至空氣吸入部 402以及空氣吸入部403。 在本實施形態中，超音波轉軸裝置A具備安裝夾持具 C，藉由該安裝夾持具c對工具機安裝超音波轉軸裝置A。 322965 29 201238685 該安裝央持具c係藉由於電源連接器610連接電源連接器 611，即可實行向加振部X與驅動部6之電源供給，且藉由 於冷卻連接器620連接冷卻連接器621，即可向空氣吸入 部402以及空氣吸入部403供給空氣，且可簡單地於工具 機安裝超音波轉軸裝置A。 [產業上之可利用性] 本發明係可適用於前端側具有工具之主軸進行超音 波振動的同時旋轉之超音波轉軸裝置，且可適用於構造簡 單且小型之小塑工具機用之小直經轉轴，而且可得到高速 化、高精確度化、高剛性化’且使工具穩定地承受高速貌 削加工時之高速旋轉以及橫方向之負載，且可效率良好地 傳達超音波振動。 【圖式簡單說明】 第1圖（a)係為第一實施形態之超音波轉軸裝置之縱 剖面圖；第1圖（b)係為表示振動方向之說明圖。 第2圖係為沿第1圖之X至X線之剖面圖。 第3圊係為以分解狀態表示主轴之部份切開前視圖。 第4圖（a)至（c)係為炎頭機構之部份切開前視圖。 第5圖係為表示第二實施形態之超音波轉軸裝置之部 份切開剖視圖。 第6圖係為表示第三實施形態之超音波轉軸裝置之部 份切開剖視圖。 第7圖係為表示超音波轉軸裝置之第四實施形態之剖 視圖。 30 322965 201238685 第8圖係為加振部之剖視圖。 第9圖係為說明夾頭固定之圖。 第10圖（a)至（b)係為表示供電之構成之實施形態之 圖。 第11圖係為超音波裝置之前視圖。 第12圖係為於超音波裝置具備安裝支持具之前視圖。 第13圖係為於超音波裝置具備安裝支持具之俯視圖。 第14圖係為第15圖之左側視圖。 【主要元件符號說明】 1 外殼 la 蓋 2 主軸 2a 壓電元件 2b 後侧剩σ八 2c 前側喇口八 2d、22、 602 螺栓 2e、 106a 固定孔 2f、24、 261 母螺紋孔 2g 前端部 3a、3b 軸承 3al 、3bl 外環 3a2 、 3b2 :滾動體 3a3 、3b3、3a4、3b4 内環 4、106 夾頭 5 工具 6 驅動部 6a 驅動軸 7 超音波振盪裝置 8 固定用環 10 驅動部收納部 10a 蓋體 11 筒室 12 定位肩 13 段差擴大部 15 喷出部 20、23 環狀溝 21 齒孔 25 導孔 26 錐形孔 31 322965 201238685 30a、30b 内環部 31 ' 113 套筒 40 錐形部 41 公螺紋軸 42 多角形部 43 工具安裝部 50 柄部 60 齒輪部 70 滑移環 71 ' 152 、302 供電電刷 80 上端 100 袋孔 101、150a、151a 通孔 120 固定螺釘 120a 卡合孔 120b 外螺紋部 150 壓電元件 151 電極板 301 軸環 303 彈壓構件 310 環 311 罩蓋 400、5(H、154 電線 401 供電部 402、403 空氣吸入部 430 壓入用孔 500 控制器 502 ' 50c 丨、504 軟管 600、601 夾持具 610 、 611 .電源連接器 620、621 冷卻連接器 A 超音波轉軸裝置 C 安裝夾持具 FI 轴方向 F2 扭轉方向 F3 彎曲方向 SI、S2 振動節點 S3 中間位置 W 工件 Y 供電電刷單元 X 加振部 32 322965201238685 VI. [Technical Field] The present invention relates to an ultrasonic rotating shaft device that rotates while being ultrasonically vibrated on a tip end side of a spindle of a tool. [Prior Art] In the past, high-speed milling methods are being used in the field of mold processing. The method is characterized in that the heat-treated material is rotated at a high speed of 2 〇〇〇〇 qm or more, and a milling cutter such as a small-diameter spherical end mill is rotated at a high speed, and usually a tool is used to perform the rough processing. It is considered that processing efficiency and processing accuracy can be improved as compared with conventional electric discharge machining and the like. However, this still speed milling method uses a tool for high-speed cutting, which causes a problem that the burden imposed on the tool becomes large and the tool life is shortened. As a countermeasure against this problem, superhard tools coated with hard films, such as titanium aluminum nitride film tools (TiA1N; titanium aluminum nitride), and even 'cBlic (cublic boron nitride) forging, are being developed. The sintered tool, which is harder and has superior heat resistance, has a longer tool life than the former, but has a disadvantage of being inferior to the shape of the tool due to poor blade formability. In the case of VIII, it is more effective to use diamonds such as forged diamonds, single crystal money stones, and chemical vapor deposited diamonds that are the hardest and have good blade formability. However, when the cutting of the iron-based material is carried out by the diamond tool, the chemical reaction occurs with the member, which causes intense chemical wear, and the new problem of the tool life is greatly shortened and the utility is not durable. 322965 4 201238685 In order to solve this problem, 'using a diamond tool, and applying ultrasonic vibration to the axial direction, the circumferential direction, or the bending direction of the main shaft (the direction perpendicular to the axial direction), the high-speed milling is performed at a number of revolutions of 20,000 rpm or more. Prevents chemical reactions and increases tool life. In addition, a method of applying ultrasonic vibration to perform high-speed machining in the same manner as a small-diameter milling cutter, a small-diameter shaft-attached vermiculite, a hard and brittle material grinding, a micro deep hole grinding, and an ultrasonic paper grain processing. Also effective. However, the conventional ultrasonic rotating shaft can be used as a grinding or drilling even at an extremely low speed because its structure has not yet withstood the processing conditions of ultrasonic vibration of 20,000 rpm or more in the axial direction or the circumferential direction of the main shaft. For processing, it is also difficult to apply ultrasonic vibration, sharpening, grinding and drilling at high speed. In other words, in the past, the ultrasonic rotating shaft was only partially supported, and the supporting action was rather fragile, and it was unable to withstand the above-described high speed machining and the vertical rotation and the lateral load. In addition, since the vibrator for the 11-moving spindle is screwed to the rear end portion of the shaft direction, there are the following problems: the rotation balance of the main shaft is poor, and the ultrasonic vibration sub-band is green at the time of high-speed machining. _Causing harmful vibrations, or damage to the inner wall of the glaze sleeve main shaft. Inner sleeve, -^ ~yT*7 ^The side" rear side, the self-vibration node is supported by the shaft and the piezoelectric element is located between the front side η8 and the rear side η8 (Special #2 The countermeasure against this problem is proposed in the Japanese Patent No. 2嶋—13738 (Taiwan Station & 1), a kind of ultrasonic rotating shaft device, which will be the main axis of the material in the piezoelectric element before and after the etching. It is disposed on the sleeve main shaft 322965 5 201238685 The approximate vibration point between the bearing points is 'to withstand high-speed rotation, vibration and cross load, and high-processing efficiency and high machining accuracy can be obtained by heat-treating materials such as quenching. Processing. (Prior Technical Paper) (Patent Literature) Patent Document 1. Japanese Patent No. 2001-13738. [Problem to be Solved by the Invention] In Japanese Patent Application Laid-Open No. 2001-13738 (Patent Document 1), a bushing is disposed on the outer side of the main shaft, and the main shaft and the bushing are placed in the vibration node portion of the main shaft. The main shaft and the integrated main shaft of the sleeve main shaft are rotatably supported by the main shaft sleeve by being joined by pressurization or the like. However, this prior art has a double structure because the main shaft has a double structure, and the diameter of the main shaft of the ultrasonic milling is increased anyway, and the axial direction is also increased, and it cannot be applied to the shaft for a small machine tool. In addition, in the conventional ultrasonic rotating shaft, the bushing structure for supporting the main shaft is greatly reduced, and the vibrators of other members are used, and the high-speed milling process has a high limit, and the rotation has its limit. Further, there is a tool for high-speed milling processing: special, non-general use, high tool cost, and long tool delivery time. The present invention has been developed in view of the above-mentioned problems, and its purpose is high and Small, high-speed, high-accuracy ultrasonic spindles with a shorter delivery time.置 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂Ultrasonic familiar device. In order to solve the above problems, and to achieve the object, the invention according to the first aspect of the invention is attached to the front end side and has a spindle-side of the tool for ultrasonic vibration. a rotating ultrasonic shafting device comprising: a driving unit that supports a front end side and a driving side of the main shaft through a bearing to rotate the main shaft; and a vibration oscillating unit that ultrasonically vibrates the main shaft; The vibrating portion is disposed at a position where the vibration efficiency is the highest in the vicinity of the vibration node at a position intermediate between the bearing on the distal end side and the bearing on the driving side. The invention described in the second aspect of the invention is the ultrasonic shaft rotating device that rotates while performing ultrasonic vibration on the front end side of the spindle having the workpiece, and is provided with: a front end side and a driving side of the spindle supported by the bearing a device main body; a driving portion for rotating the main unit; a vibration portion for vibrating the main material; and a vibration absorbing portion, wherein the driving portion is in a middle position between the driving portion and the driving portion 7 322965 201238685 'Disposed in the part with the highest vibration efficiency. The invention according to claim 3, wherein the shaft is integrally formed with the inner ring of the bearing. ^ The invention of claim 4 is the sound wave shaft device of the patent application scope, wherein the inner ring of the bearing is transmitted to the inner ring of the bearing and the rotating shaft is regarded as the fifth item of the second range. The invention is the ultrasonic shaft shaft described in claim 1 or 2, wherein the system has a drive source such as an electric motor or an air turbine. The invention of claim 6 is the ultrasonic shaft rotating device according to the first or second aspect of the invention, wherein the thermal shock of the chuck is a function of resonance at a predetermined frequency of ultrasonic vibration. Matching . ==:: _ (4) n "conical reduction of the aforementioned chuck is attached to the invention of the scope of the patent application, the seventh aspect of the invention, such as the ultrasonic shaft device of the first or second aspect of the patent scope, The collet of the Wei, which is a resonance of the supersonic vibration, is interposed with the above-mentioned tool, and the collet is attached to the main shaft by a tapered shaft. The invention described in claim 8 is applied for. The supersonic (10) axis of the first or second aspect of the invention, wherein the oscillating portion has a piezoelectric element and an f-plate mounted with a power supply brush on the dam body, and the electrode plate is used in combination For the slip ring (slipHng), the foregoing electrode plate is powered by the aforementioned power supply 322965 8 201238685. The invention described in claim 9 is the ultrasonic wave according to claim 1 or 2 of the patent application. The spindle device has an arbor that can be directly attached to the spindle of the machine tool. (The effect of the invention) According to the above configuration, the present invention has the following effects. In the invention described above, In the vibration portion of the shaft ultrasonic vibration, the vibration portion is disposed at a position where the vibration efficiency is the highest near the vibration node at a position intermediate between the front end side bearing and the driving side bearing, whereby the main shaft can be made small in diameter and shortened. The length of the axial direction of the device is controlled by the main body of the device without impeding ultrasonic vibration, and the load can be sufficiently withstand even under severe use conditions in which high-speed rotation and ultrasonic vibration are superposed. Stable high-speed milling. In addition, since the ultrasonic vibration acts slightly on the front end side bearing and the driving side bearing, the lubricity is improved, and smoother rotation performance and life improvement can be achieved. According to the invention, the vibration oscillating portion for vibrating the main shaft is provided at a position intermediate the front drive side bearing and the drive portion, and the vibration absorbing portion is disposed at a portion where the vibration efficiency is the highest near the vibration node, whereby the main shaft can be made Small diameter, shortening the length of the axis of the device, and supporting the spindle to the device without interfering with ultrasonic vibration The main body can fully withstand the load even under the severe use conditions of high-speed rotation and ultrasonic vibration overlap, and can be used for small and stable high-speed milling plus 9 322965 201238685 。 ' ϋ super sound; skin vibration is still allowed to make a front end 彳The hybrid bearing and the driving side bearing are improved by m and can achieve smoother rotation performance and life improvement. In the invention of the third item of Shenyue Patent, the main shaft and the bearing are formed inside, thereby The main reason is that the inner ring is also a sleeve, which can simplify the structure and improve the rigidity of the support. In the invention described in claim 4, the shaft is pressed into the bearing in the vibration transmission. The degree to which the ring and the rotating shaft are considered to be integrated 'by this: the structure is simplified, and the rigidity of the support can be improved. In the invention described in the fifth paragraph of the Japanese Patent Application, the driving part has electric or a pneumatic wheel, etc. Drive source, so high-speed sharpening can be performed as long as it is placed on the machine tool. In the invention described in claim 6 of the patent application, the cool head set with the function of resonating at the pre-reading rate of supersonic=vibration is equipped with a kingpiece, and the gift is added to the shaft to enhance the guard. It has a support rigidity and a good balance of the state. Therefore, the ultrasonic vibration can be efficiently transmitted to the port and can withstand the high speed (four) and vibration =, and, in addition, the tool installation of the idle milling process. It becomes simple, and it can be used in a general purpose and at a low cost to shorten the delivery time of the device. Wave vibration 2 material · ^ The wealth mentioned in item 7, in the chuck with the function of supersonic and reverberating at the frequency of pre-twisting, the tool is mounted in the collet, and the assembly is fixed = clip = on the rotating shaft, therefore Compared with the previous (four) and collet heating of the previous hot sets, the result is a tool for super-hard work. In addition, it is possible to replace the work 322965 10 201238685 201238685 with a simple structure. Generally, the installation of the tool for performing high-speed milling is low-cost, and the delivery time of the device can be shortened. In the invention. f electric component and electrode plate, the installation power supply brush has a pole plate and a riding ring in the second vibration part, and is powered by the power supply (10), and the electric power is arranged on the main shaft of the power supply system; Uniform purification. The flying lead wire 4 1 can be used for the power supply system. The invention described in claim 9 has a body that can be directly attached to the guard machine and has a machine tool. Therefore, it is easy to install. [Embodiment] The super mode of the present invention will be described below with reference to the drawings. The implementation of the present invention is not limited to the implementation of the invention. (4) The monthly (four) state is not the limit of the invention. [First Embodiment] Figs. 1 to 4 show a first embodiment of an ultrasonic rotating shaft device. The first embodiment is a main body that constitutes the main body of the device, and the second system is a main shaft disposed in the outer casing, 3a. 3b is a bearing for supporting the main shaft 1 on the front end side and the driving side, 4 is a collet connected to the main shaft 2, 5 is a tool attached to the cool head 4, and 6 is a high rotation of the main shaft 2. The drive unit 7 is an ultrasonic oscillating device. The W system is a workpiece. The main shaft 2 is a body type structure of a B B and a piezoelectric element, and is in an exploded state as shown in Fig. 3, which is composed of the following members: · Piezoelectric element 2a; also serves as the piezoelectric element 2a The laminated lining member has a rear side 322965 201238685 horn 2b; and also serves as a front side of the front side member of the piezoelectric element 2*1. The rear side racquet 2b has an annular groove 23' at the outer peripheral portion corresponding to the vibration node S2 portion, and a perforation 21 as a rotational force transmitting portion is provided on the axial center of the rear end surface, and is disposed on the distal end side for The front side of the bar is connected to the bolt 22. A mother bead hole 24 screwed to the bolt 22 is disposed on the axial center of the end surface of the rear side horn 2c. The bolt 22 of the rear side horn 2b is screwed to the female threaded hole 24 of the front side *8. The piezoelectric element 2a is composed of, for example, a plurality of sandwich-shaped structures (two-grain in the drawing) that interact with the piezoelectric ceramic and the electrode plate, and a through hole that allows the bolt 22 to pass therethrough is formed in the center. The piezoelectric element is configured as a vibration absorbing portion that causes the main shaft 2 to vibrate. As shown in Fig. 1(b), the ultrasonic vibration system also includes any of the axial direction η, the torsional direction F2, and the f-curved direction F3. These can be easily selected by the composition (material) of the piezoelectric ceramic. achieve. In the front side private 2c, the diameter of the front end becomes larger from the middle portion, and the outer peripheral portion of the j residual vibration (four) point S1 has an annular groove 20, and == the heart is arranged with the female thread screwed with the screw. And the inner end of the tapered surface is formed with a tapered inner end to form a female threaded hole 26, L26, and is arranged from the tapered hole to be disposed at a distance from the second side bearing such as the main shaft 2: Cuibei is located at the vibration node S2^S1, so that the drive side Z# position 'positions the vibration portion X at 322965 12 201238685 between the end side bearing 3a and the driving side bearing 3b, so that the piezoelectric element 2a is set to The intermediate position S3 at the center of the thickness direction corresponds to each other. In other words, 'the intermediate portion 3a and the driving side bearing 3b are disposed at the intermediate position of the front end side bearing 3a and the driving side bearing 3b." The vibration portion X is disposed at a portion where the vibration efficiency is the highest in the vicinity of the vibration node, and the main shaft 2 is made small in diameter, and the length of the axial direction of the device is shortened. Moreover, the main shaft 2 can be supported by the apparatus main body without impeding the ultrasonic vibration, and the load can be sufficiently received even under severe use conditions in which the high-speed rotation and the ultrasonic vibration overlap, and small-sized and stable high-speed milling can be performed. machining. Further, since the ultrasonic vibration acts slightly on the distal end side bearing 3a and the driving side bearing 3b, the lubricity is improved, and smoother rotation performance and life improvement can be achieved. The front end side bearing 3a and the driving side bearing 3b are usually made of an antifriction bearing, and in this example, have an outer ring 3ab 3b1 and rolling elements 3a2, 3b2 and brackets 3a3, 3b3; the rolling elements 3a2, 3b2 are respectively embedded in the front side horn The annular groove 20 of 2C and the annular groove 23 of the rear side n8b. Thus, the inner ring is omitted. In this example, balls are used as the rolling bodies 3a2, 3b2, and may be rollers. In other words, the main shaft 2 is integrally formed with the inner end ring 3a and the inner side ring of the drive side bearing, and the main shaft 2 also serves as an inner ring of the bearing, which simplifies the structure and improves the support rigidity. In addition, since there is no sleeve sleeve spindle, the diameter of the device can be made small, and it can be used for small shafts of small machine tools. The front end side bearing 3a and the driving side bearing 3b are respectively mounted on the outer circumference of the annular groove 20, 23 in such a manner as to correspond to the vibration nodes si, S2 of the front side horn 2c' and the rear side horn 2b. In this state, in the state 322965 13 201238685 I', the rear side horn 2b and the piezoelectric element 2a and the front side horn & are overlapped and integrated in series, and the base of the rear side of the bolt 22 of the octa 2b penetrates the piezoelectric element & The through hole, the threaded portion is screwed to the female threaded hole 24 of the front side of the spurs 八2c and locked into an integral 'constituting the spindle assembly of the ultrasonic wave. As shown in Fig. 4(c), the clip 4 has a polygonal portion 42 for operation on the top of the tapered portion 4 corresponding to the tapered hole 26, which has a male threaded shaft 4 that is engaged with the female threaded hole 261. A tool 2 is joined to the base of the tapered portion 4〇. P 43. In the tool attachment portion 43, a hole 430 is disposed from the axial center of the lower end surface, and is attached to the press-fitting hole 43 to heat the shank portion 50. In addition, in addition, as shown in Fig. 4 (6) and (6), the chuck 4 is press-fitted to the tool mounting portion 43 formed by the outer portion of the taper portion, and the heat can be applied to the handle (4). The tool mounting part is used to press the hole. The chuck 4 is attached to the main body 2 by a collet of the tool mounting portion 43. The lower end 4 is attached to the main shaft 2 by a shaft. Compared with the taper, the head 4 can be fixed without being heated. The head is removed, and it can be replaced with a simple structure: the second =: a tool that is easy to implement the tool for high-speed milling 5 _ and Bu Wang β. The cracking of the turnaround m is simple. The general delivery time and low cost can shorten the delivery time of the device. Dare to use the tool 5, although the use of end milling cutter, but diamond, single crystal #; 5, H θ jt quality, suitable for forging workers:: diamonds, chemical · redundant drilling tools can of course be super hard tools, Money film tools, etc. In the outer casing 2, the main shaft 2 is bored to form a cylindrical shape, and the drive unit accommodating portion 10' having the enlarged inner diameter is disposed on the end side of 322965 201238685. The cylindrical chamber 11 is formed from the bottom of the drive unit accommodating portion 10. A positioning shoulder 12 of the bearing 3b is formed near the vibration node S1 of the cylinder chamber 11. The cylindrical chamber 11 is formed in a portion substantially corresponding to the portion of the vibration node S1, and the stepped enlarged portion 13' is disposed in a range in which the lower end opening portion is disposed in the inner circumference. The spindle assembly of the ultrasonic wave is inserted into the cylindrical chamber 11 of the outer casing 1 and the outer ring 3b1 is pressed into the inner wall of the cylindrical chamber 11 by the bearing 3b attached to the rear side rib 2b, and is fixed by abutting against the positioning shoulder 12. . Further, the bearing 3a attached to the front side latitude 8c is positioned by the outer ring 3a1 abutting against the step surface of the step-enlarged portion 13, and the fixing ring 8 is screwed to the female screw portion on the opening side, and by The upper end 80 of the fixed ring 8 abuts against the outer ring 3al to be positioned and held. Thereby, the main shaft 2 with respect to the outer casing 1 is immersed in the position of the substantially vibrating node S2 by the bearing 3a at two positions of the front vibrating region and the rear end region and at the position of the substantially vibrating node S1 as shown in Fig. 1 . The position is held rotatable by the bearing 3b and does not move in the axial direction. In this state, the piezoelectric element 2a is disposed between the vibration node S1, S2 belonging to the support point and the intermediate position S3 between the front end side bearing 3a and the drive side bearing 3b. Although the drive unit 6 for high-speed rotation is arbitrary, for example, a high-frequency motor or AC feed == motor that can rotate a number of revolutions of 40000 50,000 rpm is used, and is housed in the drive unit accommodating unit 1 〇, and is mounted on the drive unit. The lid of the inner portion 10 and the inner portion 10 are held. The drive unit 6 is engaged with the pinion 21 of the main shaft 2 by the gear shaft 60 before the output shaft to transmit the output. Further, the drive unit 6 may have a drive source such as an air turbine, and high-speed milling processing may be performed as long as it is placed on the work. /1, 322965 15 201238685 The power supply system for supplying power to the piezoelectric element 2a from the ultrasonic oscillating device 7 may be introduced from any part of the casing 1 and connected to the piezoelectric element 2a. In this example, the slip ring 7 is disposed on the outer peripheral surface of the main shaft 2, and the wire connected to the slip ring 70 is guided to the guide hole 25 reaching the bolt 22, and is taken out from the guide hole 25 in the diameter direction to be connected to the piezoelectric On the other hand, the element 2a, on the other hand, passes the power supply brush 71 connected to the wire from the ultrasonic oscillating device 7 through the wall of the outer cymbal 1 and extends to the cylindrical chamber 11 to come into contact with the slip ring 7A. In the other drawings, '15' is a discharge of the cooling fluid installed through the wall of the outer casing 1. [Second Embodiment] Fig. 5 is a view showing a second embodiment of the ultrasonic rotating shaft device according to the present invention. In this embodiment, the distal end side bearing 3a and the driving side bearing are provided with outer rings 3a1, 3b, rolling elements 3a2, 3b2, brackets (not shown), and inner rings 3a4, 3b4, which are different from the outer casing 1. . The front end side bearing 3a and the driving side bearing 3b are fixed by pressing the inner rings 3a4, 3b4 to the portions corresponding to the vibration nodes SI, S2 of the front side horn 2c and the rear side horn hole, respectively. Then, the main shaft 2 to which the front end side bearing 3a and the driving side bearing 3b are attached is inserted into the chamber 11 of the outer casing, and the outer end side bearing 3a and the outer side ring 3al, 3b of the driving side bearing 3b are pressed into the cylindrical chamber 11 The inner wall surface is thereby kept fixed to the outer casing in summer. That is, in the transmission of the vibration, the main shaft 2 is press-fitted into the respective ends of the front end side bearing 3a and the driving side bearing 3b such as 4, 3, and the main shaft, whereby the structure can be formed and the support rigidity can be improved. In this example, a sleeve 31 for maintaining a gap is disposed between the front end side bearing 3a and the driving side bearing flap 3al, 3M, which does not necessarily require 322965 16 201238685. The other components are the same as those in the first embodiment, and the same reference numerals will be given to the same portions and members, and the description will be omitted. Further, in the present embodiment, the power supply brush 71 is attached to the wall of the casing 1 to be in contact with the electrode plates of the piezoelectric element 2a as a power supply system. That is, the power supply brush 71 is mounted on the device body, and the electrode plate of the piezoelectric element 2a is used together with the slip ring, and the power supply brush 71 supplies power to the electrode plate, thereby eliminating the need to configure the path or wire of the power supply system in the spindle 2. Etc., the power supply system can be simplified. Further, the same configuration as that of the first embodiment can be employed. Conversely, the power supply system of the first embodiment may be replaced by the second embodiment. [THIRD EMBODIMENT] Fig. 6 shows a third embodiment of the present invention. The present embodiment shows an example in which the piezoelectric element 2 a of the main shaft 2 is integrated with the front side „ 八 八 c and the rear side horn 2 b by bolts 2 d. On the rear side π α α 八 2b ' The end is formed with a bag hole 1 所需 having a desired depth, and the through hole 1 〇1 is disposed from the bottom of the bag hole 100 toward the axial direction. The rear side u „ 八 2b and the piezoelectric element 2a and the front side σ 八 八 2c They are arranged in series, and are locked by inserting the bolt 2d through the pocket 100 and screwing the threaded portion to the female threaded hole 24 of the front side horn 2c. The front end side bearing 3a and the driving side bearing 3b may be in the form of either the first embodiment or the second embodiment. However, in the present embodiment, the front side bearing 3a and the driving side bearing 3b are both the front side and the front side. The portion 'of the vibration nodes S1 and S2 of the rear side horn 2b integrally forms the inner ring portions 3〇a and 3〇b of the boss ring. The other components are the same as in the first embodiment, and the same reference numerals are given to the same parts and the components of the same reference numerals are omitted. Further, the figures shown in the drawings are a few examples of the invention, and other various configurations may be employed. For example, the main shaft 2 of the first embodiment and the second embodiment may be combined with a bolt as in the third embodiment. The tool for the chuck 4 should be installed as a heat pack, or as a clamp (c〇Uet) or a diaphragm (diaphragm). Further, the present invention can also be used as a dedicated ultrasonic rotating shaft device having a driving portion, but the driving portion can also be in an external form. In addition, as the material of the workpiece W to be cut, any material other than carbon steel, pre-hardened steel, stainless steel, and hardened steel for a mold may contain non-ferrous metals such as aluminum. Further, although the present invention is suitable for high-speed milling, it is of course effective even for low-speed general milling. In addition, it is not just for milling, but also for grinding or drilling. [Operation of the Embodiment] Since the gear portion 6 of the output shaft of the drive unit 6 is engaged with the perforation 21 of the main shaft 2, when the drive unit 6 is driven, the front end side bearing 3a and the drive side bearing 3b are supported by the outer casing. The spindle 2 of 1 rotates at an idle speed of 2 rpm or more, and by applying a current from the ultrasonic oscillating device 7, the piezoelectric element 2a is vibrated in the axial direction, the twisting direction, or the bending direction, so that the workpiece W is The tool 5 is milled. By the ultrasonic vibration, in the case where the material of the tool 5 is diamond and the workpiece material is an iron-based material, chemical abrasion due to chemical reaction is also avoided. In any one of the first embodiment to the third embodiment, the portion corresponding to the vibration node of the front side racquet 2 c and the rear side horn 2 b of the main shaft 2 (both 18 322965 201238685) is fixed by The front end side bearing 3a and the driving side bearing 3b' of the outer casing 1 are reliably supported to be allowed to rotate without moving in the axial direction and the radial direction. Therefore, even if high-speed rotation and vibration are applied, the spindle 2 can withstand high-speed rotation and lateral load, and smooth and stable high-speed milling can be performed smoothly and stably. Further, when the discharge portion 15 for the cooling fluid is attached to the outer casing 1 in advance, for example, by spraying the air spray (Mist Air), the processing heat can be removed, so that the extension due to the heat generated by the main shaft 2 can be suppressed. Or curved. Further, in the present invention, since the main shaft 2 holds the piezoelectric element 仏, the front side arro 2c and the rear side latitude 八2b are directly connected to each other, and the vibration node portions of the front side horn 2c and the rear side horn are given. The support is fixed, and the piezoelectric element 2a is disposed in the middle of the support fixing portion, so that the rotation balance of the main shaft 2 is improved, and the vibration of the conventional vibrator accompanying the rotation or the collision with the outer casing does not occur. The phenomenon of damage. Further, since the sleeve main shaft does not exist, and since the main shaft 2 is directly supported by the outer casing 1 by the front end side bearing 3a and the driving side bearing 3b, the diameter of such a rotating shaft can be reduced, thereby being compatible with the small size of the small machine tool. Rotating shaft. Further, since the drive unit 6 is built in the casing 1 so that no drive source is required externally, high-speed ultrasonic milling can be performed by placing the machine on the machine tool. Further, the main shaft does not have a double structure of the main shaft and the main shaft of the sleeve, but a single main shaft structure of only the main shaft, so that the mechanism is simple and the number of components is small, and assembly errors are reduced. Therefore, it is possible to improve the accuracy such as rotation, increase the speed, and achieve high precision and high rigidity. In addition to the above, the ultrasonic vibration of 19 322965 201238685 acts slightly on the end side bearing 3a and the driving side bearing 3b' disposed before the vibration node s丨, s 2, thereby improving the lubricity of the bearing and being smoother. The rotation performance and the improvement in life can be achieved. When the Annonong of the tool 5 of the chuck 4 is equipped with a hot sleeve and the chuck 4 is inserted into the front side horn 2c of the main shaft 2 in a tapered shape, the rigidity of the tool support becomes high, and the dynamic balance characteristic is also good. The ultrasonic vibration is transmitted to the tool 5° 9 efficiently. [Processing Example of the Embodiment] Hereinafter, a processing example to which the present invention is applied will be described. The constructor shown in Fig. i is used as the device. The ultrasonic piezoelectric element uses a piezoelectric type). Use a calcined diamond coated end mill (R1. 5, a blade) As a tool, the pre-hardened steel HRC40 is subjected to high-speed ultrasonic milling to form a machining shape: a waveform. The tool revolution is 2 rpm and the ultrasonic vibration frequency is 60. The 1 kHz' feed is 〇. 〇5_/knife, the cutting depth is the axis direction 〇 2_, the feed pitch is 0. 1mm, using a water-insoluble cutting oil. For comparison, processing was performed under the same conditions except for the absence of additional ultrasonic vibration. As a result, in the case of the comparative example, the peak of the diamond tool blade was rapidly worn, and it became impossible to cut at a cutting distance of 18 m. In contrast, in the case of the present invention, no wear of the tool occurred even at the cutting time point of 30 m. When reviewing the wear condition, the initial wear occurred 17 # m, but after that, β was pushed in a state where there was almost no wear, and in order to see the effect on the load, continuous cutting was performed until the cutting distance reached 25 〇ra. Move without wear. In addition, in order to see the durability of the load, continuous cutting to 20 322965 201238685 cutting distance of 10500m, no damage to the spindle and the casing, confirm the stability of the durability. Further, for comparison, a high-speed milling is performed under the above conditions using a conventional device that supports only the flanges of the eight portions of the tool, and the ultrasonic vibrator is cracked and emits a strange sound at a cutting distance of 1050 m. Become unavailable. From this result, it is known that the front side racquet, the ultrasonic piezoelectric element, and the rear side of the horn are integrated, and the front side λ8 and the rear side η8 are supported by the vibration node position. Fixed is more effective. In this way, the ultrasonic shaft rotating device of the form in which the main shaft 2 is ultrasonically vibrated is disposed such that the front end side bearing 3a and the driving side bearing 3b are located at the vibration nodes SI and S2 of the main shaft 2, and the oscillating portion X is disposed at the front end. The intermediate position S3 between the side bearing 3a and the driving side bearing 3b shortens the length of the axial direction of the device, and supports the main shaft 2 to the apparatus body without hindering ultrasonic vibration, even at high speed rotation and ultrasonic waves. Under the severe use conditions of vibration overlap, it can also fully withstand the load, and stable high-speed milling can be performed. Further, since the ultrasonic vibration acts slightly on the front end side bearing 3a and the driving side bearing 3b, the lubricity is improved, and smoother rotation performance and life improvement can be achieved. Further, since the outer casing 1 is directly supported by the main shaft 2 by rotation, since the main shaft of the sleeve is not provided, the diameter can be reduced, and the small shaft of the small machine tool can be matched. Furthermore, since the mechanism is simple, and the mechanism or the structure is simple, and the assembly error is reduced, the accuracy of rotation and the like can be improved, and the speed and the speed can be further reduced at a low cost. Accuracy and high rigidity. In addition, since the ultrasonic vibration acts slightly on the front end side 21 322965 201238685 The bearing 3a and the drive side shaft q # and b are improved in lubricity, and the superior effect of achieving better performance and life improvement can be obtained. The main shaft 2 is also a front end side bearing 3a and a driving side bearing 3b. The force f & an advantageous effect of simplifying the structure and improving the support rigidity is obtained. Further, since the outer casing 1 is also the drive unit 6 having the main shaft 2 The super-chopper wave (four) unit does not require a special drive source or transmission mechanism, so that the superior effect of high-speed milling can be realized as long as it is placed on the machine tool. Further, the inner portion of the front end portion of the front side of the front side is disposed with a tapered hole % having the female screw hole 261, and the collet 4 having the tapered hole 26 corresponding to the tapered portion 4 is screwed into, Since the chuck 4 is thermally packaged with the tool 5', the rigidity of the tool support is improved, and the dynamic balance is also good, so that the ultrasonic vibration can be efficiently transmitted to the workpiece, and the high-speed rotation can be withstood during high-speed milling. And the superior effect of vibration or load. [Fourth embodiment] Fig. 7 to Fig. 9 show a fourth embodiment of the ultrasonic rotating shaft device, Fig. 7 is a cross-sectional view of the ultrasonic rotating shaft device, and Fig. 8 is a cross-sectional view of the vibrating portion, Figure 9 is a diagram illustrating the fixation of the collet. The main shaft 2 is formed of a single member and is made of, for example, bearing steel, stainless steel or titanium alloy. The main shaft 2 is a cylindrical body, and the outer circumference is polished. On the front end side, a fixing hole 2e for fixing the collet 106 by thermal fitting is formed. The mounting of the tool 5 and the collet 1〇6 is as shown in Fig. 9. Although the collet 106 is assembled and fixed into the fixing hole 2e fixed to the front end of the main shaft 2 by the thermal assembly of 22 322965 201238685, it is not particularly It is limited to fixing methods such as screwing in and hot fitting. The tool 5 is fixedly fitted to the fixing hole 106a of the cartridge 6 by a heat setting. That is, the tool 5 is heat-fitted to the chuck 106 having a function of resonating at a predetermined frequency of ultrasonic vibration, and the chuck 1〇6 is attached to the spindle 2 by a tapered shaft to improve the rigidity of the tool support. It can be fixed with high precision and balance. It can efficiently transmit ultrasonic vibration to the workpiece W' and can withstand high-speed rotation and vibration or load during high-speed milling. In addition, the installation of tools for high-speed milling is simplified, and the delivery time of the device can be shortened in a general purpose and at a low cost. Although the tool 5 is an end mill or the like, it is suitable for superhard, super-hard film, calcined and single crystal diamond, cubic nitriding side (CBN), and polished stone. The spindle 2 is a front end measuring transmission bearing 3a, and the driving transmission through bearing 3b is supported by the outer casing 1. The front end side bearing 3a and the driving side bearing 3b are configured in the same manner. A rolling bearing is usually employed. The front end side bearing 3a and the driving side bearing 3b are provided with outer rings 3a, 3b, rolling elements 3a2, 3b2, and inner rings 3a4, 3b4, which are different from the outer casing 1. The front end side bearing 3a and the driving side bearing 3b are fixed by pressing the inner rings 3a4, 3b4 to the outer circumference of the main shaft 2, respectively. Then, the main shaft 2 to which the front end side bearing 3a and the driving side bearing 3b are attached is inserted into the cylindrical chamber 11 of the outer casing 1, and the outer ring 3al, 3b1 is pressed and fixed to the inner wall surface of the cylindrical chamber 11, and is held fixed to Outer casing 1. 23 322965 201238685 In this example, it is not necessary to arrange the sleeve 113' for maintaining the gap between the front end side seed 3a and the outer side rings 3a, 3bb of the drive side bearing 3b. Further, an annular groove (not shown) is formed on the shoulder of the main shaft 2 so that the rolling elements 3a2 and 3b2 of the front end side bearing 3a and the driving side bearing are fitted to the annular groove, respectively, and the inner ring may be omitted. In the present embodiment, the front end bearing is placed at the vibration node S1 of the main shaft 2, the drive side is placed at the vibrator point S2 of the main shaft 2, and the vibrating portion X is placed near the drive side bearing 3b of the main shaft 2. The drive side of the position. In other words, at the intermediate position between the distal end side bearing 3a and the driving portion 6, the vibrating portion X is disposed at a portion where the vibration efficiency is the greatest, the main shaft 2 is made small in diameter, and the length of the axial direction of the device is shortened, and When the ultrasonic vibration is impeded, the main shaft 2 is supported by the main shaft 1, and even under the severe use conditions in which the high-speed rotation and the ultrasonic vibration are superposed, the load can be sufficiently received, and a small and stable high-speed milling process can be performed. In addition, since the ultrasonic vibration acts slightly on the front end side bearing 3a and the driving side bearing 3b, the lubrication property is improved, and the smoothness and the life improvement are improved. The drive unit 6 that rotates the main shaft 2 has a drive shaft 6a that is coupled to the axis of the main shaft 2 via a fixing screw. The drive shaft 6a is configured such that the front end portion thereof is engaged with the engagement hole 120a of the fixing screw 120 and is integrally rotated. The drive unit 6 can be any device that can be used, for example, by a high-frequency motor or An electric motor such as an AC servo motor is housed in the cylindrical chamber 11 of the casing 1. In the present embodiment, the drive unit 6 is housed in the outer casing 1 and attached by the cover 1a. However, the drive unit 6 does not have to be placed in the outer casing 1 at 24 322965 201238685, and the rear end of the main shaft 2 may be made into a heart. The way the shaft is mounted on another machine tool. The oscillating portion X vibrates the main shaft 2, and the oscillating portion X has a pair of piezoelectric elements 150 and an electrode plate 151, and a plurality of piezoelectric elements 150 and the electrode plate 151 are alternately formed into a sandwich structure. As a constituent, through holes 150a and 151a are formed in the center. An electrode plate 151 is disposed between the pair of piezoelectric elements 150, and when the external screw portion 120b of the fixing screw 120 is screwed to the female screw hole 2f of the main shaft 2, the through hole 150a of the pair of piezoelectric elements 150 and the electrode plate are penetrated. The through holes 151a' of 151 are fixed together to the front end portion 2g of the drive side of the main shaft 2. A power supply brush 152 is attached to the outer casing 1, and the power supply brush 152 is connected to a power supply line 154 for the ultrasonic sounding device 7 for oscillating ultrasonic waves. The brush supply power is applied to the electrode plate 151 by the power supply brush 152, and the pair of piezoelectric elements 150 are driven to ultrasonically vibrate the main shaft 2. The power supply to the power supply element 15 is carried out from the power supply brush 15 2 via the electrode plate 151, and is grounded through the conductive main shaft 2, the bearing 3a, the bearing 3b, and the outer casing 1, thereby simplifying the power feeding system. The ultrasonic rotating shaft device A performs the processing of the workpiece w as the material to be cut. 'The material of the workpiece W is arbitrary'. In addition to carbon steel, pre-hardened steel, stainless steel, hardened steel for molds, etc., aluminum is also included. Non-ferrous metals, even glass or ceramics, non-metallic, rubber, plastic, wood, etc. Since the drive shaft 6a of the drive unit 6 is integrally rotatable to the set screw 12A, if the drive unit 6 is driven, the main shaft 2 supported by the outer casing 1 by the bearing 3a and the bearing 3b is rotated at a high speed 'while by ultrasonic vibration The power supply of the device 7 322965 25 201238685 causes the pair of piezoelectric elements 15 to vibrate in the axial direction, the torsional direction or the bending direction through the electrode plate 151. The workpiece w is sharpened by the tool 5. By the ultrasonic vibration, in the case where the material of the tool 5 is diamond and the material of the workpiece is an iron-based material, chemical abrasion due to a chemical reaction is also avoided. Further, in the present embodiment, the distal end side bearing 3a and the driving side bearing 3b are located at the vibration nodes S1 and S2 of the main shaft 2, and the oscillating portion χ is disposed on the driving portion side of the main shaft 2 near the north side of the driving side bearing. The length of the axial direction of the device is shortened', and the main shaft 2 can be supported by the outer casing i without hindering the ultrasonic vibration, and can be sufficiently withstand even under the severe use conditions of high-speed rotation and ultrasonic vibration. The load can be stabilized and the milling process can be carried out. In addition, since the main wheel 2 is reliably supported by the bearing 3a and the bearing 3b so as to rotate and does not move in the axial direction and the radial direction, even if the south rotation and vibration act, the main shaft 2 can withstand High-speed rotation and lateral load enable smooth and stable high-speed milling at long distances. Further, the 'main thin 2' is formed of a single member, and the front end side is supported by the outer casing 透过 through the bearing 3a and the driving end through the yoke 3b, and the oscillating portion X for ultrasonically vibrating the main shaft 2 is disposed adjacent to the main shaft 2 The side of the drive portion on the side of the side bearing 3b is not loaded with a plurality of shaft members. The spindle 2 is machined to reduce the number of manufacturing steps, and the cost is reduced. Further, the oscillating portion X has the piezoelectric element 150 and the electrode plate 151, and the power supply brush 152 is mounted on the outer casing, and the power supply brush 152 supplies power to the electrode plate 151 to drive the piezoelectric element 150. It is not necessary to configure the path or wire of the power supply system on the main shaft 2, so that the power supply system can be simplified, and the rotary flat is "high quality" and high speed and high precision can be obtained. [Configuration of Power Supply] The ultrasonic rotating shaft device A of the first to fourth embodiments can adopt the configuration of the power supply shown in Fig. 10. In the present embodiment, the vibration portion X has the piezoelectric element 150 and the electrode plate 151, and the power supply brush unit γ is attached to the casing 1. The power supply brush unit Y is composed of a brush holder 300 that is electrically conductively attached to the outer casing 1, a collar 301 that is inserted into the conductive material of the brush holder 300, and a power supply that is inserted into the collar 301. The brush 302 is a resilient member 303 of a conductive material that is biased so that the front end of the power supply brush 302 contacts the electrode plate 151. The rear end of the power supply brush 302 is held by a spring constituting the biasing member 303. The elastic member 303 is supported by the ring 310, and the ring 310 is fixed to the cover 311. The power supply line 154 of the ultrasonic oscillating device 7 for oscillating the ultrasonic waves is connected to the cover 311 of the brush holder 300, and the brush holder 300 passes through the collar 301 and the biasing member 303, and is executed by the power supply brush 302. The power supply of the electrode plate 151 drives the pair of piezoelectric elements 150. The power supply brush 302 employs a special miniature brush which is small in size and wear resistant, and has wiring attached to the special micro brush. Therefore, a special micro brush as the power supply brush 302' can be supplied with power to the power supply brush 302 in the collar 301 and the biasing member 303. Thus, the damper portion X has a pair of piezoelectric elements 15 and electrode plates 151, 27 322965 201238685 and the power supply brush unit Y is assembled to the outer casing 1, so that the power supply brush 302 can be simply and correctly attached to the outer casing 1. In addition, the power supply brush 302 of the power supply brush unit 实行 is supplied with power to the electrode plate 151 to drive the pair of piezoelectric elements 150, thereby eliminating the need for the spindle 2 to configure the path or wire of the power supply system, thereby making the power supply system simple. Chemical. [Mounting structure of the machine tool] The ultrasonic shafting device A of the first to fourth embodiments can adopt the embodiment of the mounting structure shown in Figs. 11 to 14 . Figure 11 is a front view of the ultrasonic rotating shaft device; Fig. 12 is a front view of the ultrasonic rotating shaft device with the mounting clamp; and Fig. 13 is a top view of the ultrasonic rotating shaft device with the mounting clamp; The figure is the left side view of Figure 13. The ultrasonic rotating shaft device A of the present embodiment is the elliptical rotating shaft device A of the fourth embodiment, and the power feeding brush unit Y is assembled to the outer casing 1 and the ultrasonic wave oscillating device is used by the electric wire 400. The seven connected power supply units 401 supply power to the power supply brush unit Y. Further, in the casing 1, an air suction portion 402 that takes in air to the inside of the casing 1 is disposed, and air is supplied from the air suction portion 402 to the inside of the casing 1 through the hose 502 by the control of the controller 500 and cools the main shaft 2. Further, in the casing 1, the driving portion 6 employs a brushless motor which is connected to the controller 500 by a wire 501 and is controlled by the controller 500. Further, the driving unit 6 is provided with an air intake portion 403 that takes in air to the inside of the brushless motor, and the air is supplied from the air suction portion 403 to the inside of the brushless motor through the hose 503 by the control of the controller 500. 28 322965 201238685 • Cooled down. The hose 502 and the hose 503 are connected to the controller 500' via the hose 504 and control the supply of air by the controller 500. The ultrasonic rotating shaft device A is shown in Figures 12 to 14, and the mounting clamp C' can be used to mount the ultrasonic rotating shaft device A to the machine tool. The mounting clamp C is composed of a first holder 600 and a second moxibustion holder 601. The first holder 6 and the second holder are made of stainless steel (SUS). Formed and secured by a thread 602. The apparatus body has a spindle that can be directly mounted to the spindle of the machine tool, and the spindle is composed of the second holder 601 and can be easily mounted to the machine tool. The first cool holder is provided with a power connector 610 and a cooling connector 620. The power connector 610 is connected to the power supply unit 4〇1 of the brushless motor and the power supply brush unit γ by wires. The connector 620 is connected to the air suction portion 402 of the outer casing 1 and the air suction portion 403 of the brushless motor by a hose. The power connector 610 is connected to the power connector 611, and the power connector 611 is connected to the electric wire 4〇〇 and the electric wire 5〇1, and is transmitted to the oscillating portion X and the driving portion 6 through the power connector 61 〇 and the power connector 611. Power supply. Further, a cooling connector 621 is connected to the cooling connector 62, and the hose 502 and the hose 503 are connected to the cooling connector 621, and air is supplied to the air suction portion 402 through the cold portion connector 620 and the cooling connector 621, and Air intake portion 403. In the present embodiment, the ultrasonic rotating shaft device A is provided with a mounting clamp C, and the ultrasonic rotating shaft device A is attached to the machine tool by the mounting clamp c. 322965 29 201238685 The mounting center holder c is configured to supply power to the oscillating portion X and the driving portion 6 by the power connector 610 being connected to the power connector 611, and the cooling connector 621 is connected by the cooling connector 620. Air can be supplied to the air intake portion 402 and the air suction portion 403, and the ultrasonic shaft device A can be simply attached to the machine tool. [Industrial Applicability] The present invention is applicable to an ultrasonic rotating shaft device that has a spindle of a tool on the front end side and performs ultrasonic vibration while rotating, and is applicable to a small straight machine for a simple and small plastic working machine. Through the rotating shaft, high speed, high precision, and high rigidity can be obtained, and the tool can stably withstand high-speed rotation and lateral load during high-speed surface cutting, and can transmit ultrasonic vibration efficiently. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1(a) is a longitudinal sectional view of the ultrasonic rotating shaft device of the first embodiment, and Fig. 1(b) is an explanatory view showing a vibration direction. Fig. 2 is a cross-sectional view taken along line X to line X of Fig. 1. The third enthalpy is a partial cut front view showing the main shaft in an exploded state. Figure 4 (a) to (c) are partial cut front views of the head mechanism. Fig. 5 is a partially cutaway sectional view showing the ultrasonic rotating shaft device of the second embodiment. Fig. 6 is a cross-sectional view showing a portion of the ultrasonic rotating shaft device of the third embodiment. Fig. 7 is a cross-sectional view showing a fourth embodiment of the ultrasonic rotating shaft device. 30 322965 201238685 Figure 8 is a cross-sectional view of the damper. Figure 9 is a diagram illustrating the fixing of the collet. Fig. 10 (a) to (b) are views showing an embodiment of a configuration of power supply. Figure 11 is a front view of the ultrasonic device. Figure 12 is a front view of the ultrasonic device with mounting support. Figure 13 is a plan view of the ultrasonic device with mounting support. Figure 14 is a left side view of Figure 15. [Description of main component symbols] 1 Housing la cover 2 Spindle 2a Piezoelectric element 2b Rear side remaining σ8 2c Front side port 8d, 22, 602 Bolt 2e, 106a Fixing hole 2f, 24, 261 Female threaded hole 2g Front end 3a 3b bearing 3al, 3b outer ring 3a2, 3b2: rolling elements 3a3, 3b3, 3a4, 3b4 inner ring 4, 106 chuck 5 tool 6 drive unit 6a drive shaft 7 ultrasonic oscillating device 8 fixing ring 10 drive unit accommodating portion 10a Cover 11 Tube chamber 12 Positioning shoulder 13 Step difference enlarged portion 15 Spouting portion 20, 23 Annular groove 21 Perforation 25 Guide hole 26 Tapered hole 31 322965 201238685 30a, 30b Inner ring portion 31' 113 Sleeve 40 Tapered Part 41 Male threaded shaft 42 Polygonal portion 43 Tool mounting portion 50 Handle 60 Gear portion 70 Slip ring 71 ' 152 , 302 Power supply brush 80 Upper end 100 Pocket hole 101, 150a, 151a Through hole 120 Fixing screw 120a Engagement hole 120b male thread portion 150 piezoelectric element 151 electrode plate 301 collar 303 spring member 310 ring 311 cover 400, 5 (H, 154 electric wire 401 power supply portion 402, 403 air suction portion 430 press-fitting hole 500 controller 502 ' 50c, 504 with the hose clamp 600, 601 610, 611. Power connector 620, 621 Cooling connector A Ultrasonic shaft unit C Mounting clamp FI axis direction F2 Torsion direction F3 Bending direction SI, S2 Vibration node S3 Intermediate position W Workpiece Y Power supply brush unit X Vibration unit 32 322965