201236750 六、發明說明： 【發明所屬之技術領域】 本發明係有關微流道的流體流動控制與混合裳置，其可應 用於生醫流體之檢測或流體之混合。 又〃… 【先前技術】 近年來生物晶片、化學分析晶片的持續研發已經帶動微 流道裝置相關的研究工作，小於lmm甚至是5〇〇微下& 裝置微小化與整合’使得如信用卡大小的檢測裝置具^減少分 析時間、減少樣品體積、降低檢驗成本及增加檢驗速率等特 點。但檢驗的成功與否卻因為在此尺度下的擴散係數不高，常 與控制流體的流動與混合有極大的關係。 门Γ 在微尺度下流體間的快速混合常因雷諾數太低、擴散係 數太小而顯得困難，尤其是流體中混有大分子量之溶質。'一般 而5、’流體的黏滞力造成在微尺度下為層流流動，主要的混合 抵:制為擴散’流體在微尺度下的混合所需的時間需在數十秒之 譜。換句話說，低雷諾數下常使紊流混合難以進彳^_，但快速混 合又是在生化檢測技術上不可缺少之要素，這些困難對生化晶 片而言是一項極大的挑戰。 基於上述問題，陸陸續續有不同之混合器設計裝置被提 出。根據應用之需求與設計原理，一般微混合器可分為主動式 (active)與被動式(passjve) ’ 一般被動式微混合器利用流道幾何 形狀^設計„去增加流體間之混合接觸介面，提升混合效果。被 動式混合為可分為面上式(in_p丨ane)與面外式(〇ut_〇f_plane)兩 種’其中面上式是所有流道都在同一平面上（如美國專利申請 案0263485A1號所揭露之雙渦流流道設計），而面外式（或稱 層化式）則是使用3D立體流道之幾何設計（如美國專利 6241379B1號所揭露之立體層化流道設計）。 另外，如美國專利6213151B1號所提出之層化混合器是 201236750 J = ϊί 曾加擴散之介_及降低擴散 之路徑長度，提升混合效果。但此低= 到3D立體空間流道之交疊’所 &二之°又计牽涉 複雜且点火相各古2成且所佔工間大、所需之微製程相當 =雜且成本相_。另外，經由噴嘴將不同流體噴人混机 1 (如錢專辦請案⑻极购朗揭露之彎管^产^ :十），也因為較均句的混合需要設置較多的噴 ^嘴 數也勢必增加製作的困難度。 曰力嗜％ 主動式微混合器主妓設計有作動機 力等外力所驅動之裝置。有作動機件之混合器在製造上^ ，相當高’目前也僅限於半導體㈣程。而部分使 產又生 ^永、電滲^驅動之混合裝置，也可有效增加流體間之介面 積、加強混5效果（如美國專利7〇7〇681Β2201236750 VI. Description of the Invention: [Technical Field] The present invention relates to fluid flow control and mixing skirts for microchannels, which can be applied to the detection of biomedical fluids or the mixing of fluids. 〃 〃 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 The detection device has the characteristics of reducing analysis time, reducing sample volume, reducing inspection cost and increasing inspection rate. However, the success of the test is because the diffusion coefficient at this scale is not high, and it is often related to the flow and mixing of the control fluid. Thresholds Rapid mixing between fluids at microscales is often difficult due to the low Reynolds number and too small diffusion coefficients, especially in fluids with large molecular weight solutes. The viscous forces of 'general 5' fluids cause laminar flow at the microscale, and the main mixing: the time required for the diffusion of the fluid at the microscale needs to be in the tens of seconds. In other words, low Reynolds numbers often make turbulent mixing difficult to enter, but rapid mixing is an indispensable element in biochemical detection technology. These difficulties are a great challenge for biochemical wafers. Based on the above problems, different mixer design devices have been proposed. According to the application requirements and design principles, the general micro-mixer can be divided into active (active) and passive (passjve) 'general passive micro-mixer uses flow channel geometry ^ design „ to increase the mixed contact interface between fluids, improve mixing The effect of passive mixing can be divided into two types: in-plane (in_p丨ane) and out-of-plane (〇ut_〇f_plane), where all the channels are on the same plane (such as US Patent Application 0263485A1). The double vortex flow channel design disclosed in the No. 5, and the out-of-plane (or stratified) design uses the geometric design of the 3D flow channel (such as the three-dimensional stratified flow channel design disclosed in US Pat. No. 6,241,379 B1). The stratification mixer proposed in U.S. Patent No. 6,213,151 B1 is 201236750 J = ϊί has been diffused _ and reduced the path length of the diffusion to enhance the mixing effect. However, this low = the overlap of the 3D spatial flow channel And the second is also involved in the complex and ignited phase of 20% of the ancient and occupying a large space, the required micro-process is equivalent = miscellaneous and cost phase _. In addition, different fluids are sprayed through the nozzle 1 (such as Money special please Case (8) Extremely purchased the exposed bend of the bend ^ production ^ : 10), but also because the more uniform sentence needs to set more spray nozzles will also increase the difficulty of production. 曰力趣% active micro-mixer main 妓The device is designed to be driven by external forces such as motive force. The mixer with the motive component is manufactured at a high level, which is currently limited to the semiconductor (four) process, and some of the production is produced by the combination of ^ Yong, electroosmosis ^ drive The device can also effectively increase the inter-fluid area and enhance the mixing effect (such as US Patent 7〇7〇681Β2).
電場驅動混合設計）。 ^ "L 前述習用mt巾，被動式設計使料雖不需外加驅動能 源’但混合效果一般較主動式為差，且若有操作中變換混合方 式之需求，則無法提供控制之彈性。具有運動件之主動式微混 合裔設計，雖然混合效果較佳，但如前所述目前僅限於以 體製程製作’材料材質受舰制，且製作上複雜度也高。因 此，一種具有主動式混合器之作動件，可達到增加混合效果， 但相對可以較簡單之製程完成製作，且控制簡單的微混合哭# 計就可以顯現其優點。 σ @ °x 另外，形狀記憶材料(shape memory materials)係—類可 隨溫度、磁場等控制因素而產生相變化之材料，在不同相時的 元件結構可以經由訓練等方式而做成不同形狀，因此在不同控 制條件下可作形狀上之切換。Zhang等人於2006年之App丨丨^Electric field driven hybrid design). ^ "L The aforementioned mt towel, passive design makes the material do not need additional driving energy', but the mixing effect is generally worse than the active type, and if there is a need to change the mixing mode in operation, it can not provide the flexibility of control. The active micro-hybrid design with moving parts, although the mixing effect is better, as mentioned above, it is currently limited to the manufacturing process of the material material, and the production complexity is also high. Therefore, an actuating member with an active mixer can achieve an increased mixing effect, but can be produced by a relatively simple process, and a simple control of the micro-mixing cry can show its advantages. σ @ °x In addition, shape memory materials are materials that can change phase with temperature, magnetic field and other control factors. The structure of components in different phases can be made into different shapes through training or the like. Therefore, the shape can be switched under different control conditions. Zhang et al. in 2006 App丨丨^
Physics Letters 期刊上揭露「shape memory surfaces」是以壓痕 方式在形狀記憶合金表面製作具有雙向形狀記憶之表面凹凸 構形。 【發明内容】 201236750 因此，為解決上述制裝置之缺點，本發明之目 ，路-設計、製作過程簡單、容易控制、且可動件不雜 才貝耗問題之微混合器設計。 《有厚k 為達上述目的，本發明之使用形狀記憶材料之符产请 合器，絲用形狀記憶材料製作之流道轉，:“ ϋ東材枓具有設計之形狀，此形狀特徵可為凸柱或凹陷 ^號之純下，作不同壁面幾何特徵之切換，以 動之局部鱗，制雜阻力或混合之效果。*·⑽ 本^明所稱之形狀記憶材料，包含形狀記憶合金(S :二a"oy)、形狀記憶高分子材料(shape _ ^^.•ft^£#^(shape memory ceramics)# , /皿度、電％或磁料之㈣變細產生改變。 9 閥及混合器供―簡單可靠之微流道開關 數下的形狀Ui整狀記憶材料在不同操控參 、皆肉夕、*私、二 、截面之尺寸及形狀，控制流體在管 '本二之另到調目=流體間混合之功能。 可動^，式微流體混合器之 擦，增加，之壽命、提升裝件間運動所造成之摩 微产目的在於提供―控制方式簡單的主動式 操^狀態” °接觸或非接觸之訊號，迅速控制系統之 【實施方式】 、特徵及功效’茲藉由下述具 之圖式，對本發明做一詳細說 為瞭解本發明之目的 體之實施例’並配合所附 明，說明如後。 201236750 (4)所環繞而成，不同流體係由右側流道（1〇〇)及左側流道 ,(200)藉由外部動力源驅動流入’兩流體經由流道導引匯流 後，由出口（300)流出。微混合器去除部分上蓋板後之視圖 如第二圖所示，而微混合器流道於AA的截面如第三圖所示， 在面升7狀5己’( 思材料不受，驅動情形下，壁面維持平整，流體層 流之流動使不同流體之混合效果差，即流體不積極進行混合曰。 。。流遏壁面之形狀記憶材料在組裝構成微流道前，先以壓痕 器沿設定的位置進行壓痕之製作，然後再將產生壓痕後之壁面 ，行拋光，形成平整之壁面，其壓痕之位置如丨la、仙、仙 ^所=。此—平整之壁面當受到控制訊號之驅動，如溫度改 ^、磁場、電場強度變化等，將使壁面形成_之凸塊。而且 ㈣具有雙向形狀記憶之效應ϋ塊之隆起在控 制訊唬消失後，會再回到原先之平坦之表面形狀。 6 f壁絲面職之作法也可以不同之方式達成。如 痕料之壁面麵料，僅作部分厚度料，磨完後之 二'留有部分凹痕。當壁面受到控制訊號驅動時，仍會產生 二：3果成ί塊’因此’壁面在調變控制時會在凹 ^大出換。當形成麵之壁面不做任何研 變控制時’壁面就會在不同凹陷 材料之特性而言，不同控制訊號大小 又，形成連續可調變壁面形狀之微流道混合器。 之凸二^微ί道ί面受控，號驅動後之視圖。流道壁面 且上下Α壁面之凸制等）炎出後，縮小流道之戴面積， 配置，位設置’左、右側壁面凸塊也是錯位 而 豆g路内形成二維之流場，增力口流體間之擴耑介 面，加強流體間之混合。 ㈤擴政" 或鬼驅動後’各方向壁面凸塊會相互接觸，甚 功能。^0所-可阻斷流體之流動’形成流道開關閥之 Ϊ /為本發明之第二實施例。流體由人口⑽） 又外側驅動源驅動流入此微流道裝置，並經由一分歧流= 201236750 側出口（700)及左側出口（800)流出。每一分歧流道之入口 處都設有一形狀記憶材料管壁之微流道開關閥。在形狀記憶材 料不受驅動下，其流道斷面如第六圖所示’為一平整壁面，流 道面積大，流體可按原先設計之流道流動。如第七圖所示，當 右側流道（700)壁面受到控制訊號驅動，下壁面（6)形成凸 塊（61a)與上壁面（9)形成凸塊（91a)相互接觸，阻斷大 部分流道（700)之戴面，形成流動阻力大增，而限制流體之 流動’形成微流道開關閥，大部分流體導向左側流道（8〇〇)。 第八圖所示為當左側流道（8〇〇)壁面受到控制訊號驅動，下 壁面（6)形成凸塊（61b)與上壁面（9)形成凸塊（91b)相 互接觸，阻斷大部分流道（8〇〇)之戴面，形成流動阻力大增， 而限制流體之流動，形成微流道開關閥，大部分流體導向右曰側 流道（700)。因此，可藉由控制左右兩側開關的閉合與開啟， 而控制流體流向右側出口（700)或左側出口（8〇〇)。/、 明較佳實施例揭露如上，但並非用以限定本發 和r二％”那此項技#者，在不脫離本發明之精神 2圍内，^可作些許之更動與潤飾，即凡依本發明所做 化與修飾’應為本發明專利範圍申二 專利範圍為準。 皿/、介疋應以申凊 201236750 【圖式簡單說明】 第一圖微流體混合器之實施例示意圖 第二圖微流體混合器移除部分上蓋後之示意圖 第三圖微流體混合器之實施例於壁面材料不@驅動日士 圖 才之剖面 第四圖 第五圖 弟六圖 微流體混合器之實施例於壁面材料.驅動 微流體開關閥之實施例示意圖 、°面圖 ^流體開關閥之實施例於壁面材料不驅動時之叫6 第七圖 微流體開關閥之實施例於右側流道壁面 之剖面圖 / 驅動時 第八圖 左側岐㈣材料驅動時 【主要元件符號說明】 1 微流道混合器之下底板 2 微流道混合器之右側板 3 微流道混合器之左側板 4 微流道混合器之上蓋板 100 微流道混合器之右側流道入口 200 微流道混合器之左側流道入口 300 微流道混合器之流道出口 11a 流道下壁面之形狀記憶材料驅動後之凸塊 21 a 流道右壁面之形狀記憶材料.驅動後之凸塊 31a 流道左壁面之形狀記憶材料驅動後之凸塊 41a 流道上壁面之形狀記憶材料,驅動後之凸塊 6 微流道開關閥之下底板 7 微流道開關閥之右惻板 8 微流道開關閥之左側板 201236750 9 微流道開關閥之上蓋板 600 微流道開關閥之流道入口 700 微流道開關閥之右側流道出口 800 微流道開關閥之左側流道出口 61a 開關閥右流道下壁面之形狀記憶材料驅動後之凸塊 91a 開關閥右流道上壁面之形狀記憶材料驅動後之凸塊 61b 開關閥左流道下壁面之形狀記憶材料驅動後之凸塊 91b 開關閥左流道上壁面之形狀記憶材料驅動後之凸塊The Physics Letters Journal reveals that "shape memory surfaces" are indented to form a surface relief structure with a two-way shape memory on the shape memory alloy surface. SUMMARY OF THE INVENTION 201236750 Therefore, in order to solve the shortcomings of the above-mentioned manufacturing apparatus, the object of the present invention is that the road-design, the manufacturing process is simple, the control is easy, and the movable member is not complicated by the micro-mixer design. "There is a thick k for the above purpose, the use of the shape memory material of the present invention, and the flow of the wire made of the shape memory material,": "ϋ东枓 has a design shape, and the shape feature can be The convex column or the depression of the ^ is pure, and the geometrical features of different wall surfaces are switched to move the local scales, and the effect of mixing resistance or mixing. *·(10) The shape memory material referred to in the present invention includes shape memory alloy ( S: two a " oy), shape memory polymer material (shape _ ^ ^. • ft ^ £ # ^ (shape memory ceramics) #, / dish degree, electricity % or magnetic material (four) thinning changes. 9 valve And the mixer for the shape of the simple and reliable micro-flow switch number Ui shape memory material in different control parameters, all meat, evening, * private, two, cross-section size and shape, control fluid in the tube 'this two To the eye-catching = the function of mixing between fluids. The movable micro-fluid mixer wipes, increases the life, and the movement between the lifting parts is aimed at providing a "active control mode with simple control mode". ° contact or non-contact signal, rapid control system DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail with reference to the following drawings in order to understand the embodiments of the present invention, and the description will be given as follows. 201236750 (4) Surrounded by different flow systems, the right flow channel (1〇〇) and the left flow channel, (200) are driven by an external power source to flow in. The two fluids are guided by the flow channel and then flow out from the outlet (300). The view of the mixer after removing part of the upper cover is as shown in the second figure, and the cross section of the micro-mixer flow path in AA is as shown in the third figure, and the surface is raised in the shape of 7:5 (the material is not affected, the driving situation Underneath, the wall surface is flat, and the flow of the fluid laminar flow makes the mixing effect of different fluids poor, that is, the fluid is not actively mixed. The shape memory material of the flow suppressing wall surface is firstly indented along the indenter before assembling to form the micro flow channel. The set position is used to make the indentation, and then the wall surface after the indentation is generated and polished to form a flat wall surface, and the position of the indentation is as follows: 丨la, 仙,仙^^. Control signal drive, such as temperature change, magnetic The electric field strength changes, etc., will cause the wall to form a bulge. And (4) the effect of the two-way shape memory. The ridge of the block will return to the original flat surface shape after the control signal disappears. 6 f wall surface The job method can also be achieved in different ways. For example, the wall material of the trace material is only used as a part of the thickness material, and the second part after the grinding has a partial dent. When the wall is driven by the control signal, it still produces two: 3 fruit. In the case of the modulation control, the wall will be replaced in the concave control. When the wall surface of the forming surface is not subjected to any research control, the wall will be different in the characteristics of the different concave materials. , forming a micro flow channel mixer with a continuously adjustable wall shape. The convex two ^ micro ί ί 面 surface controlled, the number driven view. After the wall of the flow channel and the convexity of the upper and lower walls, etc.), the exposed area of the flow channel is reduced, and the arrangement is set. The left and right wall convex bumps are also misplaced, and the two-dimensional flow field is formed in the bean g road, and the force is increased. The expansion interface between the oral fluids enhances the mixing between the fluids. (5) After the expansion of the government or the ghost drive, the wall bumps in all directions will touch each other, which is very functional. ^0 - can block the flow of the fluid 'forms the flow path switching valve Ϊ / is the second embodiment of the present invention. The fluid is driven by the population (10)) and the external drive source into the microchannel device and flows out via a divergent flow = 201236750 side outlet (700) and left side outlet (800). A microfluidic on-off valve of a shape memory material tube wall is provided at the entrance of each of the divergent flow paths. When the shape memory material is not driven, the flow path section is as shown in the sixth figure, which is a flat wall surface, the flow area is large, and the fluid can flow according to the originally designed flow path. As shown in the seventh figure, when the wall surface of the right flow channel (700) is driven by the control signal, the lower wall surface (6) forming the bump (61a) and the upper wall surface (9) forming the bump (91a) are in contact with each other, blocking most of the The wear surface of the flow channel (700) forms a large increase in flow resistance, while restricting the flow of the fluid 'forming a micro-flow switch valve, most of which is directed to the left flow channel (8 〇〇). The eighth figure shows that when the left side runner (8〇〇) wall is driven by the control signal, the lower wall surface (6) forming the bump (61b) and the upper wall surface (9) forming the bump (91b) are in contact with each other, and the blocking is large. Part of the flow path (8 〇〇) wear surface, the flow resistance is greatly increased, and the flow of the fluid is restricted to form a micro flow path switching valve, and most of the fluid is directed to the right side flow channel (700). Therefore, the fluid can be controlled to flow to the right outlet (700) or the left outlet (8 〇〇) by controlling the closing and opening of the left and right switches. The preferred embodiment is disclosed above, but is not intended to limit the present invention and the invention may be modified and retouched without departing from the spirit of the invention. The implementation and modification of the invention shall be based on the scope of the patent application scope of the invention. The dish/, 疋 疋 should be applied to 201236750 [Simple description of the diagram] The first diagram of the embodiment of the microfluidic mixer The second figure shows the microfluidic mixer after removing the upper cover. The third embodiment of the microfluidic mixer is not driven by the wall material. Embodiments of the wall material. Example of driving the microfluidic switching valve, the embodiment of the fluid switching valve is called when the wall material is not driven. The seventh embodiment of the microfluidic switching valve is on the right side of the flow channel wall. Sectional view / Driven on the left side of the eighth figure 四 (4) When the material is driven [Main component symbol description] 1 Microchannel mixer under the bottom plate 2 Microchannel mixer on the right side plate 3 Microchannel mixer on the left side plate 4 Micro Flow channel mixing Upper cover 100 micro flow channel mixer right channel inlet 200 micro channel mixer left channel inlet 300 micro channel mixer channel outlet 11a flow channel lower wall shape memory material driven bump 21 a shape memory material on the right wall of the flow path. The driven block 31a is driven by the shape of the left wall of the flow path. The shape of the memory material is driven by the bump 41a. The shape of the upper wall of the flow path is memory material, and the driven bump 6 is used for the micro flow path switching valve. Lower bottom plate 7 micro flow path switching valve right side plate 8 micro flow path switching valve left side plate 201236750 9 micro flow path switching valve upper cover 600 micro flow path switching valve flow path inlet 700 micro flow path switching valve Right side flow path outlet 800 Left side flow path outlet valve of micro flow path switching valve 61a Switching valve Right side channel lower wall surface shape Memory material driven bump 91a Switching valve right channel upper wall shape shape memory material driven bump 61b switch The convex block 91b driven by the shape memory material of the lower wall of the left flow channel of the valve is the bump of the shape memory material driven by the upper wall of the left valve of the switch valve