TW201236065A - Manufacture method for patterned conductive elements - Google Patents

Abstract

The invention is related to a manufacture method for patterned conductive elements. The method includes the following steps. A first substrate is provided. A first adhesive layer is formed on a surface of the first substrate. The first adhesive layer is partially solidified according to a predetermined pattern, so that the first adhesive layer in a first area is solidified and the first adhesive layer in a second area is not solidified. A carbon nanotube layer is formed on the first adhesive layer. The first adhesive layer in the second area is solidified. A second substrate having a second adhesive layer on a surface thereof is provided, and the second adhesive layer of the second substrate is attached to the carbon nanotube layer. The second substrate is separated from the first substrate. Therefore, a first patterned transparent conductive layer is formed on the surface of the first substrate, and a second patterned transparent conductive layer is formed on the surface of the second substrate.

Description

201236065 '

1 W7442FA VI. Description of the Invention: [Technical Field] The present invention relates to a method of preparing a patterned conductive element, and more particularly to a method of preparing a patterned conductive element based on a carbon nanotube. [Prior Art] Transparent conductive elements, especially patterned conductive elements, are important components of various electronic devices such as touch screens, liquid crystal displays, field emission display devices, and the like. The prior art patterned conductive element includes a substrate and a patterned indium tin oxide layer (ITO layer) formed on the surface of the substrate. However, after the ITO layer is continuously bent, the resistance at the bend is increased, which has the disadvantage that the transparent conductive layer has insufficient mechanical and chemical durability, and the resistance is uneven and the resistance value range is small. . As a result, the existing touch panel has disadvantages such as poor usability, low sensitivity, and poor accuracy. Further, the ITO layer is usually prepared as a transparent conductive layer by a process such as ion beam sputtering or evaporation, so that the preparation cost of the ITO layer is high. The method of patterning the ITO layer is usually laser etching, which is not only high in production cost but also low in production efficiency. SUMMARY OF THE INVENTION In view of the above, it is indeed necessary to provide a method for preparing a patterned conductive element that is less expensive and more efficient. A method for preparing a patterned conductive member, comprising: providing a first substrate; forming a first/drilling layer on a surface of the first substrate; partially curing the first adhesive layer according to a predetermined pattern, so that An adhesive layer 201236065

1W7442PA forms a cured first region and an uncured second region; forms a carbon nanotube layer on the surface of the first adhesive layer; cures the first adhesive layer in the second region; provides a surface provided with a second a second substrate of the adhesive layer, and bonding the second adhesive layer of the second substrate to the carbon nanotube layer; and separating the second substrate from the first substrate to thereby form a surface of the first substrate A first patterned transparent conductive layer is formed, and a second patterned transparent conductive layer is formed on the surface of the second substrate. Compared with the prior art, the method for preparing a patterned conductive φ element provided by the embodiment of the present invention has the following advantages: simultaneously forming a second substrate and a first substrate to form a second substrate and a surface of the first substrate simultaneously The transparent conductive layer is patterned to prepare two patterned conductive elements at a time. The method is not only simple in process, low in cost, but also improves the efficiency of preparing patterned conductive elements. [Embodiment] Hereinafter, a method for preparing a patterned conductive member provided by the present invention will be further described in detail with reference to the accompanying drawings and specific embodiments. φ Referring to FIG. 1 , an embodiment of the present invention provides a method for preparing two patterned conductive elements at a time, which specifically includes the following steps: Step 1. A first substrate 12 is provided. The substrate 12 functions primarily as a support, which may be a curved or planar structure. The substrate 12 has a suitable transmittance. The substrate 12 can be formed of a hard material or a flexible material. Specifically, the hard material may be selected from glass, quartz, diamond or plastic. The flexible material may be selected from polycarbonate (PC), polydecyl acrylate (PMMA), polyethylene (PE), polyimine (PI) or polyterephthalic acid.

201236065 TW7442PA Polyester materials such as ethylene glycol ester (PET), or materials such as polyether oxime (PES), cellulose ester, polyethylene (pvc), benzocyclobutene (BCB) or acrylic resin. Preferably, the substrate 12 has a transmittance of 75% or more. It is to be understood that the material of the base I 12 is not limited to the materials listed above as long as the substrate 12 can function as a stimulator. In the present embodiment, the first type PET film. Adhesive layer [3. The material of the portion 2 13 can be realized under the first surface of the first substrate 12 - the first surface of the first substrate 12, as long as it is under certain conditions or UV glue. The rotation of the = can be, for example, hot plastic, thermosetting glue.., the thickness of the glue layer 13 is from 1 nm to 500 microns. Preferably, the adhesive; (3) 13 has a thickness of 1 micrometer to 2 micrometers. The adhesive layer 13 has an appropriate luminosity on the crucible. Household = degree / good balance, the account of the _ layer 13 through the spin coating method, money - « layer 13 method can be layer η is a thickness of about, coated. The first (four) method of the present invention is formed on a PET film. The (10) glue layer of the film is formed by brushing the third step of the brushing process, and the step 7 is followed by the first step 13: the second layer is partially cured. 'Make two areas 134. ^ The cured first region 132 and the uncured first portion have a pass. The method of "drilling the rubber layer 13 and the - (10) layer 13 solid glue can be cured by local cooling, which is cured by external heat. With:: heat = the said UV win can be achieved by local purple combined with infrared radiation; the method of partial heating can be through the mask I see 'the local ultraviolet light can be passed 201236065

w maA is achieved by masking. The 13-position portion of the first gel layer forms a first predetermined portion; the _. pre-pattern of the region 132. The portion of the first adhesive layer 13 erecting the 筮-region 134 forms a second predetermined pattern. The fixed figure single figure, the plurality of identical single-_^ pre-cut patterns may be two= shapes including circular, square, triangular, etc. Common rust (four) is the shape of the '疋 pattern and the first picture to be prepared荦The shape of the transparent conductive layer 18 is the same. It can be understood that the = and the second predetermined pattern are complementary to each other... The first pre-pattern and the second predetermined pattern 5 can form a complete pattern of the first 一 拈 拈 拈 Μ Μ Μ Μ Μ . M3tlrr, the first dead glue which is cured in the first region 132: two: the first dead rubber layer 13 which is uncured in the field 134 is respectively formed into a strip pattern which is arranged at intervals. The method for curing the first layer 13 Μ uv (4)' of the present embodiment specifically includes the following steps: First, a mask 15 is disposed above the first adhesive layer 13. The mask 15 is suspended above the surface of the first ruthenium layer 13 away from the first substrate 12 . The shape and size of the mask 15 is selected according to the first-case transparent conductive 4 18 to be equipped. Specifically, the cover 15 includes a body 150, and the body 150 is provided with a through hole 152. The through hole 152 is a light transmitting portion, and the body is a light blocking portion. The light transmitting portion may be located at an intermediate position of the light blocking portion or at an edge position of the light blocking portion. The region of the first adhesive layer 13 corresponding to the light transmitting portion is defined as the first region 132 due to the action of the mask 15 . The area corresponding to the lighting section is defined as the second area 134. In this embodiment, the mask 15 is a baffle having a plurality of strip openings. Next, the first adhesive is irradiated through the mask 15 by using the ultraviolet light 16 201236065

TW7442PA Layer 13. The portion of the first adhesive layer 13 located in the second region 134 is not irradiated by the ultraviolet light 16 due to being blocked by the light blocking portion. The portion of the first adhesive layer 13 located in the first region 132 is exposed to the ultraviolet light 16 due to being exposed through the light transmitting portion. Since the first adhesive layer 13 is a UV adhesive layer, after the ultraviolet light 16 is irradiated, the first adhesive layer 13 located in the first region 132 is solidified, and the first adhesive layer 13 located in the second region 134 is cured. Will not cure. The ultraviolet light 16 is irradiated for a time of 2 seconds to 10 seconds. In this embodiment, the ultraviolet light 16 is irradiated for 4 seconds. Finally, the mask 15 is removed. In step four, a carbon nanotube layer 14 is formed on the surface of the first adhesive layer 13. The carbon nanotube layer 14 is composed of a plurality of carbon nanotubes, and most of the carbon nanotubes 14 extend in a direction substantially parallel to the surface of the carbon nanotube layer 14. The thickness of the carbon nanotube layer 14 is not limited and may be selected as needed; the thickness of the carbon nanotube layer 14 is 0.5 nm to 100 μm; preferably, the thickness of the carbon nanotube layer 14 is From 100 nm to 200 nm, the carbon nanotube layer 14 has a transmittance of 75% or more. Since the carbon nanotubes in the carbon nanotube layer 14 are uniformly distributed and have good flexibility, the carbon nanotube layer 14 has good flexibility and can be bent and folded into an arbitrary shape without being easily broken. The carbon nanotubes in the carbon nanotube layer 14 include one or more of a single-walled carbon nanotube, a double-walled carbon nanotube, and a multi-walled carbon nanotube. The single-walled carbon nanotube has a diameter of 0.5 nm to 50 nm, the double-walled carbon nanotube has a diameter of 1.0 nm to 50 nm, and the multi-walled carbon nanotube has a diameter of 1.5 nm to 50 nm. Nano. The carbon nanotubes have a length greater than 50 microns. Preferably, 201236065

W The length of the carbon nanotubes is preferably from 200 μm to 9 μm. The carbon nanotubes in the carbon nanotube layer 14 are referred to as the order in which the arrangement of the carbon nanotubes is irregular. The ordering means that the arrangement of the carbon nanotubes is regular. In the meantime, when the two bodies 14 include a disordered array of nanotubes including an ordered arrangement of carbon nanotubes, the carbon nanotubes along the == preferred orientation means that the nano* has a greater probability of orientation. ;; ::: The axial direction is basically along the same direction or a few two: = two 1 tube, ^ ^ The second embodiment, the carbon tube layer 14 includes at least one nano carbon to avoid carbon When the carbon nanotube layer 14 comprises a plurality of carbon nanotube membranes, the membrane can be arranged substantially parallel without gaps or ^ ▲ main diterpene. The carbon nanotube membrane is composed of several carbon nanotubes: composition of the heart 3 And two of the carbon nanotubes are arranged in a preferred orientation along the same direction. The same general extension direction of most of the carbon nanotubes is basically toward the parallel extension of the majority of the carbon nanotubes in the overall extension direction of the majority of the base: only the surface of the stone anti-film. Further, the carbon nanotube film is attached. With: carbon tube is passed, van derwaals force first and last phase, most of the half a catty, said nano carbon tube in the carbon nanotube film, which is basically oriented in the same direction, each carbon nanotube in the iitH is adjacent to the extending direction. The pieces of the pieces are connected to each other. Of course, the carbon nanotube film in 201236065

1 W7442FA There are a few randomly arranged carbon nanotubes that do not significantly affect the overall orientation of most of the carbon nanotubes in the carbon nanotube membrane. The carbon nanotube film does not need a large-area carrier support, but can maintain a self-membrane state as long as it provides supporting force on both sides, that is, the carbon nanotube film is placed (or fixed) at intervals. On the two supports, the carbon nanotube film located between the two supports can be suspended to maintain its own membranous state. Specifically, the plurality of carbon nanotubes extending substantially in the same direction in the carbon nanotube film are not absolutely linear and may be appropriately bent; or may not be completely aligned in the extending direction, and may be appropriately deviated from the extending direction. Therefore, partial contact between the carbon nanotubes juxtaposed in the majority of the carbon nanotubes extending substantially in the same direction of the carbon nanotube film cannot be excluded. Specifically, the carbon nanotube membrane comprises a plurality of continuous and aligned carbon nanotube fragments. The plurality of carbon nanotube segments are connected end to end by van der Waals force. Each of the carbon nanotube segments includes a plurality of carbon nanotubes that are parallel to each other, and the plurality of mutually parallel carbon nanotubes are tightly coupled by van der Waals force. The carbon nanotube segments have any length, thickness, uniformity, and shape. The carbon nanotubes in the carbon nanotube film are arranged in a preferred orientation in the same direction. It will be appreciated that the carbon nanotube layers 14 of different areas and thicknesses can be prepared by co-planar or/and lamination of a plurality of carbon nanotube membranes in parallel and without gaps. Each of the carbon nanotube films may have a thickness of from 0.5 nm to 100 μm. When the carbon nanotube layer 14 includes a plurality of stacked carbon nanotube films, the arrangement direction of the carbon nanotubes in the adjacent carbon nanotube film forms an angle α, 0ο$α^90ο. The carbon nanotube film can be directly pulled from the carbon nanotube array to obtain 201236065

1 W / 44ZrA got. Specifically, first, a carbon nanotube array is grown on a substrate of quartz or a wafer or other material, for example, a chemical vapor deposition (CVD) method; then, the carbon nanotubes are one by one by a stretching technique. Formed by pulling out of the carbon nanotube array. These carbon nanotubes are connected end to end by van der Waals to form a conductive and elongated structure having a directionality and a substantially parallel arrangement. The formed carbon nanotube film has the smallest electrical resistance in the direction of stretching, and has the largest electrical impedance in the direction perpendicular to the stretching direction, thus having electrical anisotropy. φ The carbon nanotube layer 14 can be formed on the surface of the first gel layer 13 by printing, deposition or direct laying. In this embodiment, the carbon nanotube layer 14 is a self-supporting carbon nanotube film, which can be directly laid on the entire surface of the first adhesive layer 13 to cover the entire first adhesive layer 13. . It will be appreciated that a plurality of carbon nanotube membranes can be spliced into a large area of carbon nanotube layer 14 by providing a plurality of carbon nanotube membranes in parallel without gaps. After the carbon nanotube layer 14 is formed on the surface of the first adhesive layer 13, since the portion of the first adhesive layer 13 located at the first region 132 has solidified, the carbon nanotube layer 14 of the first region 132 is only φ. It is formed on the surface of the first adhesive layer 13, and is bonded to the cured first adhesive layer 13 by van der Waals force. Therefore, the bonding force of the carbon nanotube layer 14 located in the first region 132 to the first adhesive layer 13 is weak. Since the portion of the first adhesive layer 13 located in the second region 134 is not yet cured, the carbon nanotube layer 14 located in the second region 134 is partially or completely wetted into the first adhesive layer 13 and passes through the bonding force. Combined with the first adhesive layer 13. Therefore, the bonding force of the carbon nanotube layer 14 located in the second region 134 with the first adhesive layer 13 is relatively strong. Preferably, the carbon nanotube layer 14 is located in the second region 134 201236065

The carbon nanotube portion of the TW7442PA is partially wetted into the first adhesive layer 13, partially exposed to the outside of the first adhesive layer 13. Further, in order to infiltrate the carbon nanotube layer 14 located in the second region 134 into the first adhesive layer 13, a step of pressing the carbon nanotube layer 14 may also be included. In this embodiment, a PET film is applied to the surface of the carbon nanotube layer 14 to gently press the nanotube layer 14. In step five, the first adhesive layer 13 located in the second region 134 is cured. The method of curing the first adhesive layer 13 located in the second region 134 is the same as the method of partially curing the first adhesive layer 13 described above, and is selected according to the material of the first adhesive layer 13. In this embodiment, the UV glue located in the second region 134 is cured by ultraviolet light irradiation. Since the carbon nanotube layer 14 located in the second region 134 is infiltrated into the first adhesive layer 13, the carbon nanotube layer 14 located in the second region 134 in this step is fixed, thereby forming the fixed naphthalene. Carbon tube layer 144. The first adhesive layer 13 located in the first region 132 has solidified, so the carbon nanotube layer 14 located in the first region 132 is not fixed by the first adhesive layer 13, thereby forming an unfixed carbon nanotube. Layer 142. In step six, a second substrate 22 having a second adhesive layer 23 on its surface is provided, and the second adhesive layer 23 of the second substrate 22 is bonded to the carbon nanotube layer 14. The second substrate 22 and the second adhesive layer 23 are identical in structure and material to the first substrate 12 and the first adhesive layer 13. Preferably, the second substrate 22 has the same shape and shape as the first substrate 12, the second adhesive layer 23 has the same shape and shape as the first adhesive layer 13, and the second adhesive layer 23 is The carbon nanotube layers 14 are arranged in an overlapping manner. In this embodiment, the second 201236065

The TW7442PA substrate 22 is a flat PET film. The adhesive layer 13 is a UV adhesive layer having a thickness of about 1.5 μm. Step 7: separating the second substrate 22 from the first substrate 12, thereby obtaining a first patterned conductive element 1〇 and a second patterned conductive element 20. Since the carbon nanotube layer 14 located in the first region 132 is not defined by the first gel layer 13 ® and the carbon nanotube layer located in the second region 134 is "fixed by the first gel layer 13 , the stripping is performed The process of the second substrate 22 separates the unfixed carbon nanotube layer 142 located in the first region 132 from the fixed carbon nanotube layer located in the first region 134. The fixed The carbon nanotube layer 144 is fixed on the surface of the first substrate 12 by the first adhesive layer 13 to form a first patterned transparent conductive layer 18. The unfixed carbon nanotube layer 142 is peeled off and is _ The layer 23 is fixed on the surface of the second substrate 22 to form a second patterned transparent conductive layer 28. The first patterned transparent conductive layer 18 has the same shape as the second predetermined pattern. The second patterned transparent conductive layer 28 and the first The shape of the pattern is the same. The step of the step - after the step 7 of the embodiment further includes the step of curing the second adhesive layer 23, so that the second patterned transparent conductive layer 28 is coated by the second adhesive layer 23. Fixing. Please refer to FIG. 2 and FIG. 3 for the first patterned conductive crucible prepared in this embodiment. The first patterned transparent conductive layer 18 of the first patterned transparent conductive layer 18 is complementary to the second patterned transparent conductive layer of the second patterned conductive element 20, that is, the first patterned transparent conductive layer 18 is bonded to the second patterned transparent conductive layer. A complete carbon nanotube layer 14 can be formed. It can be understood that the shape of the first patterned transparent conductive layer 18 and the second patterned transparent conductive layer (4) can be 13 201336065 '

TW7442PA is the same or different. The first patterned conductive element 10 and the second patterned conductive element 20 prepared in this embodiment can be applied to the fields of touch panels, solar cells, liquid crystal displays and the like. The patterned conductive element provided by the embodiment of the invention and the preparation method thereof have the following advantages: First, the carbon nanotube has excellent mechanical properties, so that the carbon nanotube layer has good toughness and mechanical strength, and is resistant to bending, so The use of a carbon nanotube layer as a transparent conductive layer can correspondingly improve the durability of the transparent conductive layer; second, since the carbon nanotube layer includes a plurality of uniformly distributed carbon nanotubes, the carbon nanotube layer It also has a uniform resistance distribution. Therefore, the use of the carbon nanotube layer as a transparent conductive layer can correspondingly improve the sensitivity and accuracy of an electronic device using the transparent conductive layer, such as a touch panel; The carbon nanotube film is self-formed, so it can be directly laid on the surface of the adhesive layer, and the preparation process is simplified. Fourthly, by patterning and separating the second substrate from the first substrate, simultaneously forming a patterned transparent conductive layer on the surface of the second substrate and the first substrate, two patterned conductive elements are prepared at one time, which is not only simple in process, The cost is low and the efficiency of preparing patterned conductive elements is improved. In addition, those skilled in the art can make other changes within the spirit of the invention, and the changes made in accordance with the spirit of the invention should be included in the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a process flow diagram of a method of fabricating a patterned conductive element according to an embodiment of the present invention. Figure 2 is a top plan view of a first patterned conductive element prepared in accordance with an embodiment of the present invention. 201236065

1 W / 442FA Figure 3 is a top plan view of a second patterned conductive element prepared in accordance with an embodiment of the present invention. 4 is a scanning electron micrograph of a carbon nanotube film according to an embodiment of the present invention. [Main component symbol description] 10: First patterned conductive member 12: First substrate 13: First adhesive layer 132: First region ^ 134: second region 14: carbon nanotube layer 142: unfixed carbon nanotube layer 144: carbon nanotube layer 15 that has been fixed: mask 150: body 152: through hole ^ I6 : ultraviolet Light 18: first patterned transparent conductive layer 20: second patterned conductive element 22: second substrate 23: second adhesive layer 28: second patterned transparent conductive layer 15

Claims (1)

201236065 TW7442PA VII. Patent Application Range: 1. A method for preparing a patterned conductive element, comprising: providing a first substrate; forming a first adhesive layer on a surface of the first substrate; and partially curing according to a predetermined pattern An adhesive layer, the first adhesive layer forming a cured first region and an uncured second region; forming a carbon nanotube layer on the surface of the first drill layer; curing the first adhesive located in the second region a second substrate provided with a second adhesive layer on the surface, and a second drill layer of the second substrate is bonded to the carbon nanotube layer; and the second substrate is first The substrate is separated to form a first patterned transparent conductive layer on the surface of the first substrate and a second patterned transparent conductive layer on the surface of the second substrate. 2. The method for preparing a patterned conductive member according to claim 1, wherein the material of the first adhesive layer is a thermoplastic, and the method for partially curing the first adhesive layer is a local part. cool down. 3. The method for preparing a patterned conductive member according to claim 1, wherein the material of the first adhesive layer is a thermosetting adhesive, and the method for partially curing the first adhesive layer is Local heating. 4. The method for preparing a patterned conductive member according to claim 1, wherein the material of the first adhesive layer is UV glue, and the method for partially curing the first adhesive layer is a part. UV light. 5. The method of preparing a patterned conductive member according to claim 4, wherein the method of partially curing the first adhesive layer comprises the following steps: 201236065 W /44/1Ά In the first A mask is disposed above the glue layer; the first gelatin is irradiated by ultraviolet light through the mask; and the mask is removed. The supplier is a 4 gram 8 of the patterned conductive member described in the first paragraph of the patent, and is characterized in that the carbon nanotube layer is formed by printing, deposition or direct laying. The patterned conductive member according to Item 1, wherein the forming of the first conductive layer is performed on the surface of the first-bake layer. The carbon tube layer only forms a sub- or a whole Qiu;:: the surface of the layer is located in the second region of the carbon nanotube layer, and the second layer is uncured into the uncured first viscose layer. The second feature of the second embodiment of the patterned conductive member according to claim 7 is that the solidified carbon nanotube layer formed in the second region is formed. The carbon nanotube layer which is fixedly layered and located in the first region is not solidified. 9. The pattern according to claim 8 is characterized in that the second substrate is separated from the first substrate. Divided and: the carbon nanotube layer and the unfixed carbon nanotube layer are two: the carbon nanotube layer that has been fixed is fixed by the first rubber layer in the first The transparent conductive layer is patterned without being fixed-n-v: fixed by the second adhesive layer on the surface of the second substrate to form a first patterned transparent conductive layer. 1 〇. The method of preparation of the patent scope is characterized in that the /TXL patterned transparent conductive layer of the conductive element is complementary to the shape of the 17 201236065 TW7442PA two patterned transparent conductive layer.