201226619 六 發明說明： 【發明所屬之技術領域】 本發明係提供一種可同時進行滾鍍式及批次式之濺鍍作 且可依工件型式選擇適當之濺鍍作業方式，而於工件之表面均 ，膜’以節省設備成本及雜雜品質之續賴之複合式 機構。 【先前技術】 夹凡制ΐί，技術係已廣泛應用在眾多產業領域中， 及降低設備與操作成本，相關業者亦 請參閱第1圖所示’其係習用之滚 ，腔體1 Q之側邊裝設有連接低壓電負===巧於一 空腔體10内架設一呈網狀之滾筒丄1，；芮] 行濺鍍作業時，其係將工拌片η 1，於進 1旋轉，而以該滾筒i i之撥糾]ffJ1内，並驅動滾筒1 真空腔體1 0内注人反應氣翻轉1件2 ◦，另於該 該濺鍍乾1 〇 i乾材之原子〇 1通電，而將 筒1 1，並沉積於工件2 _材原子即滅射通過滾 鍍膜；惟，該滾鑛式之崎設備隹^工件2 〇之表面上完成 不斷的翻轉，才可使工件？ 二仃鍍膜時，必須使工件2 〇 之滾鍍方式，將會使工件2 〇相互臈均勻，然而，如此翻轉 較小或重量較輕之工件2〇， 曰主而僅能適用於一些體積 效率明顯不足；另對於一此且古十貝之濺鍍設備來說，其使用 鍍方式易有顧碼础之工件進行賴，如此滾 密度零件來說，該顧方錢f _ 1於—些不可碰撞之高精 比之工件或不可碰撞之高精 冰、此’對於-些具高縱深 (如批次式Μ行鍍膜，以確保: 一般係採用其他方式 經膜4，相對的，業者即必 201226619 須增巧他昂貴之濺鍍設備’進而大幅增加設備之成本。 經驗=前事r行業的研發與製作 試作，終究研創出一種複合式濺鍍究與 習式之缺弊，此即為本發明之設計滚雜構，並糟以改善 【發明内容】 本發明之主要目的係提供一種複合式賤錢設備 其係包含有中空之滾筒本體、撥料塊及置料 旋ΐ ’其内部設有第-側面及第二側面 翻轉工件之撥料塊，以進行滾鍵式:滅===撥動 牛而可於進行滾鍍式濺鍍作業時，同時 藉此，卿賴本翻之置㈣，即可乍業； 本發明接ί ί 1省設備成本之實用目的。 ，於滾筒本體之第,上環佈裝設可供撥料 體内同時進行雜式雜次式之顧 ⑯^本 使用效率之實用目的。λ概作業’並達到地提昇設備 本發明之另-目的係提供一種複合式 it 上係裝設可延伸至 鍵膜，進而達到確保濺鍍品質之實用目而於工件之表面均勻 【實施方式】 圖式i=明作更進一步之瞭解，兹舉一較佳實施例，並配合 201226619 請參閱第2、3、4圖所示，本發明濺鍍設備之複合式滾筒 機構’其係於一真空腔體3 〇内裝設有滚筒機構4 〇，該滾筒機 $冓4$包含有中空之滾筒本體4 1、撥料塊42及置料架4 3， 3亥滾筒本體41係可由動力源驅動旋轉，並可於内部注入反應氣 體’該滾筒本體41並内部設有第一側面41 1及第二側面41 2:且於中央處架設有濺鍍靶413 ;該撥料塊4 2係環設於該 滾筒本體41之第一側面41 1上，而可隨著該滾筒本體4工旋 轉:以供撥動翻轉工件；於本實施例中，該撥料塊4 2之斷面形 ，係概呈三角形，而於該撥料塊4 2上設有二斜面4 21，另於 該撥料塊4 2之二斜面4 21上分別開設有直向之槽溝4 2 2 , 以及複數個橫向貫穿二斜面4 21之導槽423，且於二斜面4 21之頂端處又設有凹槽4 2 4，而於隨著該滾筒本體41旋轉 時’即藉由該撥概4 2之槽溝4 2 2、凹槽4 2 4不斷的撥動 翻轉工件，並以該導槽4 2 3導引分散工件，以使工件可均勻鍍 膜；，置料架4 3係裝設於滾筒本體4 χ之第二側面4 i 2上， ，使ί置料架4 3延伸至贿乾4 1 3之周侧’以供架置固定具 =縱深比、不可碰撞或高精密度等另—型式之卫件；於 & 中，該置料架4 3係設有-直架桿4 31，該直架桿4 3工之二 側並延伸設有複數支橫架桿4 3 2，且機絲 [201226619 Sixth Invention: Technical Field of the Invention The present invention provides a sputtering method capable of simultaneously performing barrel plating and batch plating, and can select an appropriate sputtering operation method according to a workpiece type, and the surface of the workpiece is , membrane 'to save equipment costs and complex quality of the composite structure. [Prior Art] The technology department has been widely used in many industrial fields, and the equipment and operating costs are reduced. For related companies, please refer to Figure 1 for the scroll of the system, the side of the cavity 1 Q. Side-mounted with low-voltage electrical connection === It is a good idea to erect a web-shaped drum 丄1 in a hollow body 10; 芮] When the sputtering operation is performed, the system will mix the workpiece η 1, into the 1 Rotate, and the drum ii is calibrated in the ffJ1, and drives the drum 1 in the vacuum chamber 10 to inject the reaction gas into one 2 ◦, and the atomic 〇 1 of the dry 1i dry material When the battery is energized, the cylinder 1 is deposited on the workpiece 2, and the atom is extinguished by the barrel coating; however, the workpiece of the rolling mine-like equipment 隹^ workpiece 2 不断 is continuously turned over to make the workpiece? When the coating is applied, the workpiece 2 must be barrel-plated, which will make the workpiece 2 臈 uniform. However, if the workpiece is smaller or lighter, the 工件 而 can only be applied to some volumetric efficiency. Obviously insufficient; for the sputtering equipment of this one and the old ten shells, the use of the plating method is easy to rely on the workpieces of the code base, so for the rolling density parts, the Gu Fang money f _ 1 High-precision collisions of workpieces or non-collision of high-precision ice, this 'for some with high depth (such as batch-type tantalum coating to ensure: generally other ways through the membrane 4, the opposite, the industry must be 201226619 Adding his expensive sputtering equipment' and thus increasing the cost of the equipment. Experience = R&D and production trials of the predecessor industry. After all, the research and development of a composite splashing study and the practice of the shortcomings, this is the invention The invention aims to provide a composite money-saving device which comprises a hollow drum body, a material-receiving block and a feeding rotary turret. Side and second Face flipping the workpiece block to perform the rolling key type: off === to move the cow and perform the barrel plating sputtering operation, and at the same time, the Qing Lai Ben turned it to (4), and then the industry; The invention has the practical purpose of the equipment cost of the province. In the first part of the drum body, the upper ring cloth is provided with a practical purpose for simultaneously using the hybrid type in the body of the material. The present invention is directed to providing a composite on-line device that can be extended to the key film, thereby achieving a practical purpose of ensuring the quality of the sputtering. The surface of the workpiece is uniform [embodiment] i = further understanding, a preferred embodiment, and with 201226619, see Figures 2, 3, 4, the composite drum mechanism of the sputtering apparatus of the present invention is attached to a vacuum chamber The 〇 is equipped with a roller mechanism 4 〇, the roller machine $冓4$ includes a hollow drum body 4 1 , a material block 42 and a loading frame 43 3 And injecting a reaction gas into the inside of the drum body 41 and internally providing a The side surface 41 1 and the second side surface 41 2 are provided with a sputtering target 413 at the center; the material block 42 is disposed on the first side surface 41 1 of the roller body 41, and can follow the roller body 4 旋转 Rotating: for flipping the workpiece; in the embodiment, the sectional shape of the material block 42 is triangular, and the slanting surface 4 21 is provided on the material block 42 Straight grooves 4 2 2 and a plurality of guide grooves 423 extending transversely through the two inclined faces 41 are respectively formed on the two inclined faces 4 21 of the block 4 2 , and are further disposed at the top end of the two inclined faces 4 21 . There is a groove 4 2 4, and when the drum body 41 rotates, the workpiece is turned over by the groove 4 2 2 and the groove 4 2 4 of the dial 4 4, and the guide groove is turned over. 4 2 3 guiding the dispersing workpiece so that the workpiece can be uniformly coated; the loading frame 43 is mounted on the second side 4 i 2 of the drum body 4, so that the lacing rack 4 3 extends to the bribe 4 1 3 on the side of the 'for the mounting fixture = depth ratio, non-collision or high precision, etc.; in the &, the rack 4 3 is equipped with - straight rod 4 31, the straight rod 4 3 And a plurality of branching cross frame is provided extending rod 432, and machine wire [
3 "'I 木叫4 3 3上林植結構，以使工件可 Γ，係於各架料桿4 3 3之頂端 又4 3 4 ’且於各架料桿4 3 3上跨置有壓 堊隼件4 3 5上並設有可供穿伸各架料桿4 3 3 = 複數個穿槽4 3 Θ，再於q 紋'^又4 3 4之 合-鎖人件4 ? 7干4 3 3螺紋段4 3 4分別旋 i直ί壓料4 3 5可麗合卫件端部，另於 固於滾筒本體4 1之第二側面4 i 2上，進 内以該置料架43架定另—型式之工件。、料本體4 1 請參閱第5、6圖所示，本發明於進行賤鑛作業時，其係可 201226619 將體積較小或重量較輕之工件^ 41 1，另可以該置料架43|^滚筒本體41之第-侧面 高精密度等另一型式之二=置固疋具高縱深比、不可碰撞或 桿4 3 3分別穿置工件6 〇，並將4 3之各架 4 3 3上，再以鎖合件4 3 7鎖人^件4 3 5跨置於各架料朴 固定工件6 〇 ;請參閱第7圖所L ===架4 3之架， 應氣體，並將賤餘4工3魏 ㈣本體4 1注入反 該滾筒本體4 1即哺料塊4 2 本體4 1旋轉’3 "'I wood called 4 3 3 on the forest planting structure, so that the workpiece can be smashed, tied to the top of each rack 4 3 3 and 4 3 4 ' and spanned on each rack 4 3 3 The pressing piece 4 3 5 is provided with a material rod 4 3 3 = a plurality of slots 4 3 =, and then a q pattern '^ 4 3 4 - a lock member 4 7 7 dry 4 3 3 threaded section 4 3 4 respectively, the pressing material is straight, the pressing material 4 3 5 is the end of the welcoming piece, and is fixed on the second side 4 i 2 of the drum body 4 1 to enter the inside of the loading frame 43 sets of other-type workpieces. Material body 4 1 Please refer to Figures 5 and 6. When the present invention is used for the operation of the antimony ore, it can be used in 201226619 to make the workpiece smaller or lighter in weight, and the storage rack 43| ^The other side of the first side of the drum body 41 is high precision = the height ratio of the set cooker is high, the non-collision or the rod 4 3 3 respectively wears the workpiece 6 〇, and the racks of 4 3 are 3 3 3 On the upper part, the lock piece 4 3 7 locks the piece 4 3 5 and straddles the fixed workpiece 6 各; please refer to Figure 7 L === frame 4 3 frame, should be gas, and贱 remaining 4 workers 3 Wei (four) body 4 1 injection against the drum body 4 1 feeding block 4 2 body 4 1 rotation '
賤鑛作業，同時，該置料竿4 3 體4 1進行it鍵式之 作各種角度之翻轉，即隨著滚筒本體4 1 筒本體4 1同時進行批次式之濺鍍作苹.進而可以該滾 確保濺鍍品質之實用效益。 系並達到即省設備成本及 請參閱第8圖所示，另本發明於其他應用上 架土 3壓合工件6 〇之端部，峻成鍍财均勻，免該置料 之疋位結構係*於各架料桿4 3 3上分別設置。置料架4 3 ，3 8 ’並使該彈性件4 3 8之二端可抵頂簧之彈性 以彈性件4 3 8之彈力推抵固定工件6 〇，進 〇内側，而 置料架4 3架置定位工件6 〇之效益。 相同達到以該 【圖式簡單說明】 第1圖：習式滾鍍式濺鍍設備之示意圖。 第2圖：本發明之結構示意圖。 第3圖：本發明撥料塊之外觀示意圖。 第4圖：本發明置料架之分解示意圖。 第5圖：本發明之使用示意圖（一）。 第6圖：本發明置料架之使用示意圖。 第7圖：本發明之使用示意圖（二）。 第8圖：本發明置料架另一實施例之使用示意圖。 【主要元件符號說明】 201226619At the same time, the loading 竿4 3 body 4 1 performs the it-key type to turn over various angles, that is, the batch body type sputtering is performed simultaneously with the drum body 4 1 cylinder body 4 1 . This roller ensures the practical benefits of sputter quality. And to achieve the cost of the equipment and please refer to Figure 8, and the other invention on the other end of the soil 3 press the workpiece 6 〇 end of the end, the formation of uniform plating, free of the clamp structure * They are respectively disposed on the respective racks 4 3 3 . The loading frame 4 3 , 3 8 ′ and the elastic end of the elastic member 4 3 8 can be pushed against the fixed workpiece 6 以 by the elastic force of the elastic member 4 3 8 to the inner side of the workpiece, and the loading frame 4 3 The efficiency of positioning the workpiece 6 架. The same is achieved in the [simplified description of the drawing] Figure 1: Schematic diagram of the conventional barrel plating sputtering equipment. Figure 2: Schematic diagram of the structure of the present invention. Figure 3: Schematic diagram of the appearance of the material block of the present invention. Fig. 4 is a schematic exploded view of the loading rack of the present invention. Figure 5: Schematic diagram of the use of the invention (1). Figure 6 is a schematic view showing the use of the rack of the present invention. Figure 7: Schematic diagram of the use of the present invention (2). Figure 8 is a schematic view showing the use of another embodiment of the rack of the present invention. [Main component symbol description] 201226619
習式部分： 1 0 :真空腔體 1 1 :滾筒 2 0 :工件 本發明部份： 3 0 :真空腔體 4 0 :滾筒機構 41:滾筒本體 412:第二側面 4 2 .撥料塊 4 2 1 :斜面 4 2 3 :導槽 4 3 :置料架 4 31 :直架桿 4 3 3 :架料桿 4 3 5 :壓掣件 4 3 7 :鎖合件 4 3 9 :結合部 5 0 :工件 101:濺鍍靶 111:攪拌片 4 1 1 :第一側面 413:濺鍍靶 4 2 2 :槽溝 4 2 4 :凹槽 4 3 2 :橫架桿 4 3 4 :螺紋段 4 3 6 :穿槽 4 3 8 :彈性件 6 0 :工件Part of the formula: 1 0 : Vacuum chamber 1 1 : Roller 2 0 : Workpiece Part of the invention: 3 0 : Vacuum chamber 4 0: Roller mechanism 41: Roller body 412: Second side 4 2 . 2 1 : Bevel 4 2 3 : Guide groove 4 3 : Feeding rack 4 31 : Straight rod 4 3 3 : Rack rod 4 3 5 : Pressing piece 4 3 7 : Locking piece 4 3 9 : Jointing part 5 0: workpiece 101: sputtering target 111: stirring piece 4 1 1 : first side 413: sputtering target 4 2 2 : groove 4 2 4 : groove 4 3 2 : cross bar 4 3 4 : thread segment 4 3 6 : through slot 4 3 8 : elastic member 6 0 : workpiece