TW201223339A - Induction heating device, induction heating method, and program of the same - Google Patents

Abstract

The invention provides an induction heating device, induction heating method, and program of the same capable of reducing the main switch of inverse conversion device. The device comprises several induction heating coils 20 which are positioned in close proximity; a plurality of inverse conversion devices 30 having capacitors 40 serially connected to each of the induction heating coils for converting DC voltage into square wave voltage; and a control circuit 15 that controls alignment of the phases of the coil currents flowing through several induction heating coils. The control circuit 15 controls the timing at which the square wave voltage transitions, so as to maintain instantaneous value of the square wave voltage in either DC voltage or reverse voltage when the coil voltage zero-crosses.

Description

201223339 VI. Description of the Invention: [Technical Field to Be Invented by the Invention] This publication relates to an induction heating device using a complex induction heating coil, an induction heating method, and a program therefor. [Prior Art] A semiconductor manufacturing apparatus for heat-treating a wafer must be controlled to a small wafer surface temperature difference (for example, ±1 (within 3) due to problems such as thermal deformation. Further, it is necessary to heat up at a high speed (for example, lOOt: / Second) to the desired high temperature (eg 1350 C). Thus, the well-known induction heating device divides the induction heating coil into a plurality of individual heating coils that are individually connected to a high frequency power source (eg, an inverter) for performing Power control. However, since the divided induction heating coils are close to each other, there is a mutual induction inductance M, which is a state in which mutual induced voltages are generated. Therefore, the inverters are in a state of being operated in parallel via mutual inductance, and the inverters are currents with each other. When there is a gap in the phase, the inverters often receive power with each other. That is, depending on the current phase difference of each inverter, the phase difference between the induced heating coils in the magnetic field is generated, and the magnetic field near the boundary of the adjacent induced heating coil is weakened. , reducing the heat generation density generated by the heating power. As a result, the object to be heated (wafer, etc.) The surface may be uneven in temperature. Yu Yu’s inventor and others proposed “partition control induced heating (z〇ne

Controlled Induction Heating : ZCI Η)" technology, the mutual induced voltage is generated between the adjacent induction heating coils, and even if the mutual induction exists, the inverters do not circulate the circulating current between each other, and the divided 201223339 induces the heating coil boundary. The nearby heat density does not decrease, and the induced heating power can be appropriately controlled (for example, 'Reference Patent Document 1>). According to this zc IΗ technique, each power supply unit has a buck chopper and a voltage-shaped inverter (hereinafter, simply referred to as an inverter). Then, the respective power supply units divided in the plurality of power supply areas are individually connected to the divided induction heating coils to supply electric power. At this time, the current-synchronization control (i.e., the synchronous control of the current phase) of each of the inverter units in each of the power supply units does not flow the circulating current between the plurality of inverters by synchronously flowing the currents of the inverters. In other words, no current is applied between the complex inverters, and no overvoltage occurs due to the regenerative power flowing into the inverter. Further, the inverter flows synchronously to the current phases of the divided induction heating coils, and the heat generation density generated by the induction heating power in the vicinity of the boundary of each induction heating coil does not drastically decrease. Further, each of the step-down choppers controls the current amplitude of each inverter by varying the input voltage of each inverter, and controls the induced heating power supplied to each of the induced heating coils. That is, the ZCIH technology disclosed in the patent document ,, by controlling the current amplitude of each step-down chopper, performs power control of the induction heating coil for each partition, and achieves suppression of the complex number by current synchronous control of each reverse phase β. The circulating current between the inverters, = and the heating density generated by the induction heating power near the boundary of each induced heating coil are uniformized. With such ZCIH technology, since the control of the buck chopper: individual control with the control system of the inverter, the heat distribution on the object to be heated can be arbitrarily controlled. That is, according to the ZCIH technology disclosed in Patent Document 1, rapid and precise temperature control and temperature distribution control can be performed. In the special spear J file 2, 'disclose the technique of simultaneously supplying DC power to the inverter of the individual connection 201223339 to the complex induction heating coil, and simultaneously operating the complex induction plus", and the coil. Specifically, this technique detects connection to The zero-crossing of the output current of each inverter of the series resonant circuit is a zero-crossing timing and a standard pulse rising timing of comparing the output currents of the inverters. This technique adjusts the frequency of the output current so that the calculation is based on comparison and calculation. The phase difference of the pulse is 0 or close to 〇' to synchronize the output current of each inverter. Moreover, after the output current of each inverter is synchronized, the output of the inverter is increased or decreased: 'control flow into each Inducing the current of the heating coil to achieve a uniform temperature distribution of the object to be heated. In Document 1, the resonance-type conversion circuit has a resonance current phase = mode in which the phase of the output current of the device is delayed by the voltage of the inverter. And the phase of the inverter output current to the inverter phase current advance mode. It is mainly stated that the resonant current phase switching element is turned on! Switching on, but the anti-recovery action of the polar body, the current of several parts of the flow is divided by ±L, Thunder, and Thunder, and the motor, plus the anti-recovery of the diode The conduction loss increases. In this regard, the main load: her "resonance type conversion circuit of the head delay mode, conduction action;: current switching, disconnection action is hard switching, ... conduction action is zero loss-free capacitance slow, straw by ^ The switching element is connected in parallel (zvs: Zer... σ is further switched to zero voltage 0 V〇Uage Switching). In addition, the 'non-patent document, by uncovering the full bridge circuit, when the current is zero, the wheel is short-circuited, avoiding the cut _μ山. Now the stable drive 戌g I, the yak becomes the open state' and the real brother The ZVS action of the load. [Patent Document 1] JP-A-2007-26750 [Patent Document 2] JP-A-2004-146283 [Non-Patent Document] [Non-Patent Document 1] Power Electronic Circuit, Ohm Society, Electrical Society Semiconductor Power Conversion System Investigation Special Committee, Chapter 8, Resonance Conversion Circuit # [Non-Patent Document 2] Transistor Technology, Cq Press, 2, 4, June issue, page 228 [Invention [Problem to be Solved by the Invention] The inverter used in the technique of Patent Document 1 generally uses a resonant current phase delay mode to reduce the switching loss, and reverses the sinusoidal current flowing into the induction heating coil more delay than the driving voltage rising timing. Zero crossing timing of the direction. However, in order to adjust the supply power (effective power) applied to the induction heating coil, when the pulse width of the rectangular wave voltage is shortened, the zero-crossing timing of the sine wave from negative to positive zero crossing is earlier than the driving voltage rising timing, often with a resonant current Phase advance mode switching. Therefore, the inverter (inverse conversion means) has a problem that the current flowing into the switching element and the reverse recovery current of the commutating diode are increased when the switching element is turned on, which increases the switching loss. Accordingly, the present invention has been made to solve the problem, and the object is to provide an induction heating device, an induction heating method, and a program thereof, which can reduce the switching loss of the reverse conversion device regardless of the pulse amplitude. [Means for Solving the Problem] In order to achieve the above object, an induction heating device (1〇〇) of the present invention includes a plurality of induction heating coils (2 邻近) disposed adjacent to each other, and a capacitor connected in series to each of the above-described induction heating coils (4〇) Controlling the complex inverse conversion device by applying a high-frequency voltage converted from a DC voltage to a complex inverse conversion device (30) that induces a series circuit of the heating coil and the capacitor, and a voltage amplitude to control the high-frequency voltage A control circuit for phase-forming the coil motor of the plurality of induced heating coils; wherein the complex inverse conversion device is characterized in that each of the DC voltages is common. Also, the numbers in parentheses are exemplified. In order to withstand the effective power supplied to each of the induction heating coils, the DC voltage is not changed, instead of shortening the rectangular wave voltage pulse width of the inverse conversion device having a small output power, and the DC voltage applied to each of the inverse conversion devices is reduced, and the output power is large. The high frequency voltage (rectangular wave voltage) pulse amplitude of the inverse conversion device increases. Therefore, since each of the inverse conversion means avoids the resonant current phase advance mode and is driven in the resonant current phase delay mode, the switching loss is lowered regardless of the high frequency voltage pulse amplitude. X, when the coil current is zero-crossed, the output voltage of the reverse conversion device is stabilized, and the thirst voltage generated by the inductive load is reduced. In addition, the drive frequency can be increased, and the phase delay can be increased instead of increasing the pulse width. Further, it is preferable that the DC voltage is lowered so that the maximum value of the voltage amplitude of the high-frequency voltage converted by the complex inverse conversion means becomes a predetermined value or more. Thereby, a large output inverse conversion device such as a voltage amplitude of a predetermined value or more controls the DC voltage, and delays the current flowing to the series circuit from negative to positive zero crossing than the rising timing of the applied voltage applied to the series circuit. The zero-crossing time 201223339 sequence operates in the resonant current delay phase mode. On the other hand, a small output inverse conversion device in which the voltage amplitude does not reach the threshold value is operated in the resonant current advance phase mode. Since the small output 'storage loss and the thirst voltage are also small, the destruction of the transistor is eliminated. The conversion device has a diode in which each arm is connected in anti-parallel with a transistor (for example, an FET (Field Effect Transistor), an IGBT (Insulated Gate Bipolar Transistor)), and the DC voltage is generated by a chopper circuit or a forward conversion device. . Further, it is preferable to further include an abnormal stop portion, and when the coil current is crossed from negative to positive zero, the reverse conversion device is stopped when the high-frequency voltage rises. Thereby, the damage caused by the heat generated by the switching loss or the overcurrent is avoided. Further, the plurality of induced heating coils are adjacent to the common heating element, and the control circuit preferably variably controls the rectangular wave voltage pulse width to uniformize the electromagnetic energy supplied to the heating element by the respective induction heating coils. [Effect of the Invention] According to the present invention, the switching loss of the inverse conversion device is reduced regardless of the pulse width. Also, the surge voltage at the time of switching is also lowered. [Embodiment] [First Embodiment] A configuration of an induction heating device according to the present invention will be described with reference to Figs. 1 and 2 . In Fig. 1, the configuration of the induction heating device 100 includes a buck chopper 10, complex inverse conversion devices 30, 31, ..., 35, complex induction heating coils 20, 21, ..., 25, and a control circuit 15; Heating coil 2〇, 21,...,25

S 8 201223339 causes the heating element to generate heat by generating a high-frequency magnetic flux, a thirst current, flowing into a common heating element (for example, carbonaceous ink) (Fig. 2). Further, the induction heating device i 控制 is controlled so that the current phases and frequencies of all the induction heating coils 2 〇, 21, ..., 25 are reduced to reduce the mutual induced electric burglar effect caused by the adjacent induced heating coils. The current phases of the control induction heating coils 2〇, 21, ..., 25 are the same, and the magnetic field does not cause a phase difference. The magnetic field near the boundary of the induction heating coil is not weakened, and the heat generation density generated by the induced heating power does not decrease. As a result, temperature unevenness does not occur on the surface of the object to be heated. Further, the inverse conversion means 30, 31, ..., 35 increase the drive frequency in order to reduce the switching loss, and the equivalent inductance of the induction heating coils 2, 21, ..., 25 and the resonance frequency of the capacitance of the capacitor C connected in series High, driven in resonant current phase delay mode. Next, the object to be heated will be described using Fig. 2 . Fig. 2 is a diagram showing the structure of an RTA (Rapid Thermal Tempering) device using heat treatment of a wafer. The RAT device has embedded heat-inducing heating coils 2, 21, ..., a heat-resistant plate supported in the concave portion, a common heat generating body provided on the surface of the heat-resistant plate, an inverse conversion device (Fig. 1), and a step-down chopper 1 The zc丨Η inverter constituted by the 〇 constitutes a plurality of induction heating coils 20' 21, ..., 25, and heats up the heating element in a plurality of regions (for example, 6 regions). In the configuration of the RTA apparatus, the generator induces the respective high-frequency magnetic fluxes of the heating coils 20, 21, ..., 25, and the high-frequency magnetic flux, for example, an eddy current flows into the heating element formed by the carbon graphite, and the resistance component of the carbon graphite flows according to the eddy current. The fever body is hot. In other words, the rTa can be used to generate the high-frequency electromagnetic energy of the induction heating coils 20, 21, ..., 25, by the electromagnetic month b, the heating element generates heat, and the heating element is heated by the heat of the heating element. The glass base of the object, a ^ board day yen. Further, in the heat treatment of the semiconductor, this heating is carried out under reduced pressure air. Considering the induced heating coils 20 and 21 adjacent to each other, the vibration circuit of the third (a) diagram is considered. That is, the induction components of the equivalent inductance U Lb and the resistance components of the equivalent resistance values Ra and Rb are induced in the heating coils 2G and 21, and the voltages ^1 and ^2 are applied via the Rayker packages P 0 1 and 〇2'. Further, the induction heating coils 2, 21' are adjacent to each other to induce electric 5M (M1) bonding. Here, the equivalent resistance values Ra and Rb are used to induce the heating coil 2. The high-frequency magnetic flux flows the eddy current of the equivalent resistance of carbon graphite. Further, the current flowing into the induction heating coil 2 of the region 1 is 11, and the insulating transistor Tr. The output voltage is in the V" region 2 to induce the inflow of the heating coil 21: the current is "' and the output voltage of the insulating transistor Τη is V2. , Person's 3rd (b) diagram shows the resonant circuit shown in the figure in the equivalent circuit of the 1st zone. The display of this equivalent circuit is a circuit of a series circuit of an electric current & and a mutually induced voltage vector and a driving capacitor c equivalent inductance L^, La2, and an equivalent resistance M Ra . Here, the equivalent inductance .La has a relationship of U = Lal + La2. Inverted conversion of the driving frequency f disk resonance frequency. (7) - In the resonance state, the equivalent inductance U2, the equivalent circuit resistance of the series circuit voltage v and the mutual induced voltage V12, Mh vector and the driven circuit . That is, when the vector diagram of the third (4) diagram is displayed, the transistor τ, the vector voltage Vi at which the power plant η is the equivalent inductance U2 and the equivalent resistance value, and the vector sum of the mutual induced voltage v12 also become the voltage Ra. .n and voltage (he ^La2.

S 201223339 II) The sum of vectors. In the first drawing, the adjacent induction heating coils 20, 21, ..., 25 are combined with each other to induce inductances M1, M2, ..., M5, but in order to reduce the influence of the combination, the reverse combination inductance is often connected. (-Me). This inverse combined inductance (_Mc), for example, is obtained by the inductance of 〇.5仁Η(微亨利), which can be obtained by 1 turn or core penetration. The buck chopper 10 is a DC/DC converter having an electrolytic capacitor 46, an electric grid 47, an IG Β Τ (insulated gate bipolar transistor) q 1 , q 2, and a diverted binary D1 D 2 The chopper coil c Η is operated to control rectification by a commercial power source (not shown). The smooth DC high voltage Vmax becomes a predetermined low voltage direct current I Vdc on the day τ, and the buck chopper 10 outputs such as an inverse conversion device go, The maximum voltage amplitude of the rectangular wave voltage (high-frequency voltage) converted by 31 '...' 35 is a low-voltage DC voltage Vdc equal to or greater than the threshold value. The predetermined value is an inverse conversion device in which the voltage amplitude is greater than or equal to a predetermined value, and the zero-crossing timing of the coil current of the current-induced heating coil 20 2 丨 ' . . . 25 is delayed from the rising timing of the driving voltage. And by electricity (4) in the reversal of the small output that does not reach the predetermined value, :f °"" "the zero current of the coil current and the timing is earlier than the rising timing of the driving power. At this time, although the storage loss occurs in the inverse conversion device of the small output, since it is a small output, the switching loss is small and the electric thirst is small. For the set value of the straight dust amplitude, for example, the maximum output voltage of the low voltage DC voltage Vdc is the straightening voltage of the straight peach Vm, and the step-down filter 10 is controlled to operate at 95%, and the short-circuit energy charging rectification of the avoidance moment is two: The DC high voltage Vmax between the positive electrode and the negative electrode of the electrolytic capacitor 46 is connected to I (the collector 201222339 of JBTQ1 and the emitter of IGBT Q2, one end of the chopper coil Ch is connected to this connection point p, and the other end is connected to the capacitor 47. Further, the other end of the capacitor 47 is connected to the collector of the IGBT Q1 and the anode of the electrolytic capacitor 46. Further, the cathode of the electrolytic capacitor 46 is connected to the emitter of the IGBT Q2. Next, the operation of the step-down chopper 1 说明 will be described. The control circuit 15 is alternately turned on by applying a gate rectangular wave voltage. The IGBTs Q1 and Q2 are turned off. First, the IGBT Q1 is turned off, and when the IGBT Q2 is turned on, the capacitor 47 is charged via the cut coil CH. Then, the IGBT Q1 is turned on. When the IGBT Q2 is turned off, the current flowing into the chopper coil ch is discharged via the commutating diode D1. By repeating this charging and discharging at a predetermined operational ratio, the voltage across the capacitor 47 converges to a straight line. The high voltage Vmax and the operating ratio are determined by the low voltage DC voltage Vdc. The inverse conversion devices 30, 31, ..., 35' respectively have a complex inverter circuit for switching the low voltage DC voltage Vdc across the capacitor 5|47, and an insulating transistor Τη. , Trr..Tr5, and capacitors 40, 41...45, generate a rectangular wave voltage (high-frequency voltage) from a common low-voltage DC voltage Vdc, and are a driving circuit for flowing a high-frequency current. Here, 'insulated transistor Tr., TrK The secondary side of the .Trs connection induces the series circuits of the heating coils 20, 21...25 and the capacitors 40, 41 . . . 45. The inverter circuit has IGBTs Q3, Q4, Q5, Q6, and with Q3, Q4, Q5. The commutating diodes of the Q6 are connected in anti-parallel, such as D4, D5, and D6', by applying a rectangular wave voltage to the gate, generating the same frequency and controlling the rectangular wave voltage of the same phase of the coil current, and driving the insulation. The primary side of the transistor Tr〇, Τη...Tr5. The insulating transistor Tr., Τη...Trs is provided to insulate the heating coil 2〇, 201223339 21...25 and the inverter circuit from each other, and the heating coil is induced. 2 0 '21...25 is insulated from each other Further, the primary side voltages of the 'insulating transistors Tr(), Τη...Tr5 are the same as the secondary side voltage, and the rectangular wave voltage is output. Further, the primary side current and the secondary side current have the same waveform. Capacitors 40, 41...45 Resonating with the induced heating coils 20, 21...25 'The capacitance is C' The equivalent inductance is Lai, Lbl...Lei, the driving frequency of the inverter ί and the resonant frequency l/(2; r, (Lal . C)) 1/(2ττ, (Lbl . C))...1/1(2 π (Lcl · 〇) is substantially uniform, and the output of the insulating transistor Tr〇, Τη...Trs flows through the fundamental wave voltage Vi, V2, v3, V |, Vs divided by the equivalent inductance La2, Lb2...Le2 and the sinusoidal current of the value of the series resistance of the equivalent resistance values R〇, ri...R5. Since the equivalent inductances La2, Lb2 . . . Le2 and the equivalent resistance values r 〇, R1 ... R5 are induced loads, the sine wave current is delayed from the phase of the fundamental wave voltage, and the higher the frequency of the fundamental wave voltage, the more the phase delay is increased. Further, since the high-frequency wave current is not in the resonance state, it hardly flows. Further, since the effective power Peff of the chopping voltage and current does not flow in the high-frequency wave, and the fundamental wave voltage is V1, the fundamental wave current is 丨丨, and the phase difference between the fundamental wave voltage Η and the fundamental wave current 为 is θ 1 , it is displayed as

Pef f = VI · Π . cos θ 1. Therefore, the effective power Peff when the chopper voltage ' drives the series resonant circuit of lcr with the rectangular wave voltage is displayed as the effective power of the fundamental wave. As shown in FIG. 4, the control circuit 丨5 includes a pulse width control unit 9, an abnormal stop unit 92, a phase difference determination unit 93, and a DC voltage control unit 94. The pulse width control unit 91 generates an application to the inverse conversion device 30. The igbt is a rectangular wave voltage of the Q4, 卯, and Q6 gates, and the DC voltage control unit 94 generates a rectangular wave voltage of 13 201223339 input to the gates of the IGBTs Q1 and Q2 of the buck chopper 10. The phase difference determination unit 93 uses ντ (transformer) to observe the waveform of the rectangular wave voltage generated by the inverse conversion device 3, and uses CT (converter) to observe the waveform of the coil current to determine whether or not the phase delay mode of these waveforms is present. In other words, if the coil current is delayed from negative to positive zero and the timing is delayed from the rising timing of the rectangular wave voltage, the phase difference determining unit 93 determines that the phase delay is 杈, and the zero crossing and the timing are advanced earlier than the rising timing. It is the phase advance mode. Then, the phase difference determination unit 93 outputs the determination result to the pulse amplitude control unit 91, the DC voltage control unit 94, and the abnormal stop unit 92 which will be described later. The pulse width control unit 91 controls the phase difference Θ (Fig. 5) of the zero-crossing and the time-series of the fundamental wave of the rectangular wave voltage, and the coil current phases (zero-crossing timing) flowing into the respective induction heating coils 2A and 21-25 are matched. At the same time, the pulse amplitude and frequency are controlled such that the zero crossing timing of the coil current flowing into the series circuit is delayed from the rising timing of the rectangular wave voltage. At this time, the pulse width can be changed by controlling the control angle δ (Fig. 5) of the difference between the zero-crossing timing of the fundamental wave of the rectangular wave voltage and the rising timing of the rectangular wave voltage. The operation of the pulse width control unit g] will be described using the voltage-current waveform diagram of Fig. 5. Fig. 5 shows a rectangular wave voltage waveform, a fundamental wave fundamental wave and a coil electric WlL waveform, a vertical axis voltage, a current, and a horizontal axis phase (ω _^ ). The rectangular wave voltage waveform 5 on the secondary side of the electric crystal Tr is an odd-function symmetric waveform ′ shown by a solid line and its fundamental wave is shown as a basic wave voltage waveform 51 of a broken line. The maximum amplitude of the rectangular wave voltage waveform 50 is ±Vdc, and the phase angle of the control angle & is set to the zero crossing point of the fundamental wave voltage waveform 51. That is, the moment

S 201223339 The waveform voltage waveform 5〇@ rising timing and falling timing have a phase difference of control angle ^ between the zero crossing and the timing of the fundamental wave voltage waveform 51. At this time, the amplitude of the fundamental wave voltage waveform 51 is 4 Vdc / 7 r . c 〇 S (5. Further, the coil current waveform 52 shown by a broken line is only a sine wave delayed by the phase difference θ from the zero crossing timing of the fundamental wave voltage waveform 51. However, the coil current waveform 52 is controlled such that the control angle δ of the rectangular wave voltage waveform 5〇 is large, and the effective power supplied to the induction heating coils 20, 21 to 25 is zero. The timing of the zero crossing is often higher than the rising timing of the rectangular wave voltage waveform 5〇. Further, the pulse width control unit 91 changes the coil current amplitude of each of the induction heating coils while matching the phase difference 0 of the coil currents of all the induction heating coils 20, 21, ... of the flow person. The portion 91 changes the control angle by the zero-crossing timing of the fundamental wave voltage waveform 51, and the amplitude controls the fundamental wave voltage. Therefore, the pulse width control unit 91 uses the ACT (automatic current regulator) to change the control angle to occupy the coil current. By this control, the effective electric power of the input induction coil is changed, and the influence of the mutual induced voltage generated by the adjacent coil electric power is reduced. For example, 'for the induction heating coil 2 〇, the rectangular wave voltage to which the longest pulse width is applied' is applied to the other induced heating coils 21, 22 to 25, and a rectangular wave voltage of a shorter pulse width is applied depending on the amount of heating. 2〇, input the maximum effective power 'to the other induced heating coils 21, 22...25, input less effective power according to the heating amount'. At this time, when shortening the pulse amplitude of the rectangular wave voltage, the zero-crossing timing of the coil current is often The resonant current phase advance mode is earlier than the rising timing of the rectangular wave voltage. At this time, the drive frequency can be increased to delay the coil current, and 15 201223339 reduces the DC voltage Vdc to decrease the control angle δ. Further, the rectangular wave voltage is positively and negatively symmetric. In order to make the rectangular wave frequency the same, the pulse width is set to a low-order interval before the instantaneous value of the voltage applied to the primary side of the insulating transistor Tr is zero. Further, the voltage applied to the primary side of the insulating transistor Tr is set to The same pulse width of positive and negative symmetry prevents DC biasing of the insulating transistor Tr. Fig. 6 is a resonant current phase delay mode波形% operation waveform diagram, and circuit diagram of the inverse conversion device 3 用以 for displaying current flow. Figure 6 (a) is the control angle (5 = 0, that is, the voltage and current waveform during 100% operation) Fig. 6(b) is a circuit diagram of the inverse conversion device 3 用以 for displaying current flow. In Fig. 6(a), the symbol v shows a rectangular wave voltage waveform of 1〇〇% operation, and the symbol i indicates inflow induction. The sinusoidal current of the heating coil. The zero crossing of the current waveform i is delayed with respect to the rising timing of the rectangular wave voltage waveform v. In the sixth (b) diagram, the inverse conversion device 30 has iGBTQ3(TRap) 'Q4(TRan) , Q5 (TRbp), Q6 (TRbn), shunt diodes j) 3 (DIap), D4 (DIan), D5 (DIbp), and D6 (DIbn). A low-voltage DC voltage Vdc is applied between the collectors of the transistors TRap and TRbp and the emitters of the transistors TRan and TRbn. The emitter of the transistor TRap is connected to the collector of the transistor TAn. The emitter of the transistor TRbp is connected to the collector of the transistor TRbn. Further, a connection point between the emitter of the transistor TRap and the collector of the transistor TRan, and a connection point between the emitter of the transistor TRbp and the collector of the transistor TRbn are connected to the coil of the equivalent inductance La2, A series circuit of a capacitor of capacitor c and a resistor of equivalent resistance value Ra. The series circuit of the coil, resistor and capacitor is the transistor seen from the input side.

S 16 201223339

The equivalent circuit of TrO, Trl... Further, the arms of the transistors TRap, TRan, TRbp, and TRbn are connected to the commutating diodes DI ap, DI an, DI bp ', and d I bn between the collector and the emitter, respectively. In Fig. 6(a), at the time tal, the transistors TRap and TRbn are in the 〇N (on) state, and the coil current i (ial ) flows. At this time, the series circuit of the coil, the resistor, and the electric valley is induced, and the zero-crossing timing of the sinusoidal current is delayed from the rising timing of the rectangular wave voltage v. At the time ta2', the transistors TRap and TRbn are shifted to the OFF state, and the transistors TRan and TRbp are shifted to the ON (ON) state. Therefore, the coil current i (ia2) in the same direction as the coil current ial flows through the diodes DIan, DIbp. At this time, since the voltages across the transistors TRap and TRbn are not changed, the switching becomes zero volts. At the time ta3, the coil current ia2 is zero-crossed, and the direction of the coil current i is reversed. The inverted coil current i(ia3) flows through the transistors TRan and TRbp, and at time ta4 = ta0', the transistors TRap and TRbn migrate to the 〇N (on) state, and the transistors TRan and TRbp migrate to the 0FF (off) state. . Therefore, the coil current ia4 in the same direction as the coil current ia3 flows through the diode DIbn Dlap. At the time tal, the coil current ia4 is zero-crossed, and the inversion current ial flows through the transistors TRap and TRbn. Due to the zero current switching of the coil current ia4 zero crossing, the switching loss is small. In other words, at this time, the transition of the time ta2 transitions from the 〇N state of the transistor TRbn to the OFF state, but the applied voltage of the diode DIbn changes only from zero to the reverse bias voltage, since it is not biased. The state transitions to the reverse bias state, and no storage loss of the carrier occurs. Also, the time ta3 moves 17 201223339 竣 shift to the transistor but the forward bias current shifts from the biased state of the diode DIbp to the electricity

The shift is also the same, the ON of TRbp becomes zero zero current switching, and the storage loss of the carrier does not occur. Figure 7 is the resonant current phase advance mode, waveform diagram. The 7th (a) diagram shortens the voltage amplitude. If this is not the case, the voltage and current waveforms when the operation is less than 100%, and the 7th (b) diagram shows the timing of the gate voltage. Figure. First

Figure. The circuit diagrams of Figs. 8(a) and (b) are omitted from the description of the configuration in which the flow of current is different from that of Fig. 6(b). In Fig. 7(a), the zero current and the current consumption of the coil current i are earlier than the resonant current phase advance mode of the rectangular wave (four) rising timing. The rectangular wave voltage v is a positive value ' between time tM and time tb2 and a negative value between time tb4 and time tb5. That is, referring to the timing chart 'from time tb to time 讣' in the seventh diagram (b), only the transistor TRbn is in the ON state, and from the time tM to the time tb2, the transistors TRap and TRbn are (10) (conducting). From time to time tb4, the transistors TRan and TRbn are in a 0N (on) state, and from time 讣4 to time tb5 'the transistors TRan and TRbp are in the 〇N (on) state and from the time tb5 to the time tb6, the transistor TRan TRbn4 (10) (conduction), that is, by turning on the transistor TRap, TRbn in the diagonal direction or the transistors TRbp and TRan in the other diagonal direction, the coil current is flowing, and in other periods, the transistor TRan of the lower arm, Any of TRbn is in the on state, and the other transistors are in an OFF state, and the heating coils 2, 21 to 25 are not in a floating state but in a non-energized state. 201223339 More specifically, from the time tbl to the time tb2, the coil current ib 1 ' flows through the transistors TR ap and TR b η from the time tb 2 to the time tb 3, and flows through the diode Dlan and the transistor TRbn. The coil current ib2 in the same direction as the coil current ibl, the coil current is zero-crossed. From the time tb3 to the time t b 4 ', the coil current ib3 in the reverse direction flows through the diode DI b η and the transistor T R a η. From the time tb4 to the time tb5, the coil current ib4 flows through the transistors TRan and TRbp. From the time tb5 to the time tb6 = tb0, the coil current i b6 flows through the diode DI an and the transistor TRbn ', and the coil current i crosses zero. At the time tb3 at which the coil current i is zero-crossed, there is no potential change at both ends of the heating coils 2 0, 21, ... 2 5, and no power loss occurs. On the other hand, at time tb4, the current flows in the direction of the diode in the forward direction. For example, since the transistor TRbp migrates to the ON state, the diode DIbn migrates to the reverse bias state. Therefore, during the storage time of the diode Dlbn, a reverse bias current flows, and a recovery loss (storage loss) occurs in the transistor TRbp. Similarly, at time tb1, since the diode Dian is biased from the forward direction to the reverse direction bias, a loss of storage occurs in the transistor TRap. However, if the low voltage DC voltage Vdc is low, the effect of the storage loss is small. Figure 9 is a waveform diagram of the resonant phase delay mode, which is less than 1% operation. Fig. 9(a) is a diagram showing the voltage and current waveforms when the voltage amplitude is shortened, and the dotted line is not the basic wave of the rectangular wave voltage. At this time, the zero crossing of the current wave rise "i" is delayed by the timing of the rise of the applied voltage v. That is, although it is not 1〇. % operates, but: 匕 is the case of the pulse width of the rectangular wave voltage. The ninth (a) and (b) diagrams are used to display the electric W flow at the time of the circuit diagram of the 2012 20123339 inverse conversion device 30. 帛1〇(a), (8) The circuit diagram of the figure, the flow of the current is different from the sixth (8) circle, and the description of the configuration is omitted. In the figure (a), the time tcl to the time ^, the transistor and the TRbn are turned on, from the time tc3 to the time 5, The transistor core and TRbn are in an on state, and from the time tc5 to the timed state 7, the transistor chest and the TRan are in an on state, and the transistors TRan and TRbn are turned on from the time tc7 to the time point of 9. The time is from the time. During the period from tc3 to the time and from the time tc7 to the time tc9, since the transistor *TRbn of the lower arm is turned on, the voltage across the induction heating coil is zero, and the bias voltage is not generated. 0. Fig. 9 and the first frame (a) (b) Circle, explaining the operation. From the time tel to the time tc2, the negative sinusoidal coil current icl flows through the diodes DIbn and DIap, and the current zero crossing at time tc2. From the time tb2 to the time tb3 During the period, a positive sinusoidal coil is passed through the transistors TRap and TRbn. Ic2. From the time tc3 to the time tc5, the positive coil current ic3 flows through the diode DIan and the transistor TRbn. From the time tb5 to the time tb6, in the figure 10(b), via the diode Dlan and DIbp' The positive coil current ic4 flows. Thus, the coil current zero-crosses at time tc6 "from time tc6 to time tc7, the negative coil current ic5 flows through the transistors TRbp, TRan'. From time tc7 to time tel' via the pole The body DIbn and the transistor TRan flow through the coil current ic 6. Here, at time tc 1, the current continues to flow only into the diode d I bn , and zero voltage switching does not occur in the recovery loss. Switching at time tc3 20 201223339 In the middle, the current flowing into the transistor TRap flows into the diode DIan, and since only the diode Dlan changes from the off state to the on state, no return current is generated. The current flowing into the diode during the switching of the time tc5 does not change: In the switching of the time tc7, "only the diode _ changes from the off state to the on state" does not generate a return current. Further, at the times u2, tc6, the zero current is switched, and no recovery loss occurs. In any of the switching, the diode does not change from the on state to the off state, and no return current is generated. The exclusive portion 92 (Fig. 4) stops driving each of the inverse conversion devices 3 by the determination result of the phase difference determination unit 93. 〇, 31, 32, 33, 34, %. Specifically, the abnormal stop unit 92 drives the voltage waveform when the low-voltage DC voltage of the input voltage is equal to or greater than a predetermined value (for example, 50% or more of the DC high-voltage power Vmax). When the rising timing is earlier than the zero crossing timing of the coil current, the lifting is stopped. By reducing the output voltage of the buck chopper (low voltage DC voltage Vdc), the transition voltage is reduced to avoid damaging the IGBT. Further, by increasing the frequency of the rectangular voltage, it becomes a more inductive operation, and the zero-crossing of the delay coil current and the timing "guarantee the phase delay state. Further, the abnormal stop unit 92 also stops abnormally when the coil current is equal to or higher than a predetermined value (for example, 20% or more of the maximum current value) and the phase advance mode. In other words, when the coil current does not reach a predetermined value, the abnormal stop portion 92 does not abnormally stop even if the switching advance parent mode is small. (Modification) The present invention is not limited to the above-described embodiments, and may be, for example, the following modifications. 21 201223339 (1) Although the above embodiment uses an IGBT as a switching element of an inverse conversion device, a transistor such as an FET or a bipolar transistor may be used. (2) In the above embodiment, the step-down converter 1 降低 for reducing the voltage from the DC voltage is used to supply the DC power to the inverse conversion device. However, the DC voltage can be generated from the commercial power source by using the forward conversion device. Further, in a commercial power source, a "three-phase power source" can be used instead of a single-phase power source. (3) In the above embodiment, the reverse conversion devices 30, 31, ... 35 corresponding to all the induction heating coils 2, 21, ... 25 are supplied with a common low-voltage DC voltage Vdc power, but the induction of the maximum heating amount may be added. The heating coil and the inverse conversion device corresponding to the induction heating coil supply electric power of the DC voltage Vmax to the additional inverse conversion device, and supply the low-voltage DC voltage vdc power to the inverse conversion devices 30, 31, 32, ... 35. BRIEF DESCRIPTION OF THE DRAWINGS [Fig. 1] is a circuit configuration diagram of an induction heating device according to a first embodiment of the present invention; [Fig. 2] is a sectional view of a heating portion of an induction heating device according to a first embodiment of the present invention. [Fig. 3] is a resonance circuit formed by the induction heating coil and the capacitor and its equivalent circuit, (a) is a 2-zone ZCIH (partition control induction heating) that induces a resonant circuit formed by the heating coil and the capacitor, (8) An equivalent circuit of the i region, and (c) is a vector diagram; [Fig. 4] is a diagram of a control circuit used in the induction heating device according to the first embodiment of the present invention;

S 22 201223339 [Fig. 5] Waveform diagram for explaining the control method when using Phase-Shift control; [6th (a), (b)] Resonance current phase delay mode, operation (DUTY) Waveform diagram of time, and circuit diagram of inverse conversion device showing current flow; [Fig. 7] Waveform diagram of resonant current phase advance mode, less than 1〇〇% operation (ρυτγ); [8th (a), ( b) Figure] Resonant current phase advance mode, showing the reverse-conversion farm circuit diagram of current flow when less than 10% operation (DUTY); [Fig. 9] Resonance current phase delay mode, less than 1 〇 operation () Waveform diagram; and [10th (a), (b) diagram] resonant current phase delay mode, showing the circuit diagram of the reverse conversion device for current flow when the operation is less than 100% (DUTY). [Main component symbol description] 10~ buck chopper; 15~ control circuit; 20 '21, 22, 23, 24, 25~ induction heating coil; 30, 31, 32 ' 33, 34, 35~ inverse conversion device 40, 41, 42, 43, 44, 45~ capacitor; 46~ electrolytic capacitor; 47~ capacitor; 50 '60' 70, 80~ rectangular wave voltage waveform; 51, 61, 71, 81~ basic wave voltage waveform; 23 201223339 52, 62, 72, 82~ mutual induced voltage waveform; 5 3, 6 3, 7 3, 8 3 ~ coil current waveform; 91~ pulse amplitude control unit; 92~ abnormal stop unit; 93~ phase difference judgment unit 94~DC voltage control unit; 100~ induction heating device; CH~Chopping coil;

Cl, C2~capacitor; C1~capacitor; C~capacitor; Db D2, D3(DIap), D4(DIan), D5(DIbp) and D6(DIbn)~Switching diode; f~drive frequency; 11 ~ basic wave current; i ~ coil current; I! ~ current; I 2 ~ current; i (ia 1) ~ coil current, i (ia2) ~ coil current; ib 1 ~ coil current, ib2 ~ coil current; ib 3 ~ coil current, ib4 ~ coil current;

S 24 201223339 ib6 ~ coil current; icl ~ coil current; ic4 ~ coil current;

Lai, Lbl." Lei~ equivalent inductance;

La2, Lb2...Le2~ equivalent inductance; M, Ml, M2, M3, M4, M5~ mutual induction inductance; -M c~ inverse combination inductance;

Ql, Q2, Q3 (TRap), Q4 (TRan), Q5 (TRbp), Q6 (TRbn) ~ IGBT (insulated gate bipolar transistor (switching element)); RO, R1 ... R5 ~ equivalent resistance value;

Ra, Rb~ equivalent resistance value;

TrO, Tr1, Tr2, Tr3, Tr4, Tr5~insulating transistor; tbl, tb2, tc3, tc4, tc5, tc6~ time;

Tr~ transistor;

Tr. , Τη...Trs~ insulated transistor;

Vi, V2, V3, V4, Vs~ basic wave voltage; v~ rectangular wave voltage waveform;

Vdc ~ low voltage DC voltage; ± Vdc ~ maximum amplitude;

Vl2~ mutual induction voltage;

Vmax ~ DC high voltage; P ~ connection point;

Pef f~ effective power;

Ra~ equivalent resistance value; 25 201223339 0 1~ phase difference; β~phase difference; and <5~ control angle.

Claims (1)

201223339 VII. Patent application scope: 1. An induction heating device comprising: a plurality of induction heating coils disposed adjacent to each other; a capacitor connected in series to each of the induced heating coils; a complex inverse conversion device applying a high frequency voltage converted from the DC voltage to a series circuit for inducing the heating coil and the capacitor; and a control circuit for controlling the complex inverse conversion device, wherein the voltage amplitude controls the chirp frequency and simultaneously corrects a phase of a coil current flowing into the complex induction heating coil; wherein the plurality The reverse conversion device is common to each of the above DC voltages. 2. The induction heating device according to claim 1, wherein the DC voltage is lowered to cause a maximum value of a voltage amplitude of all of the high-frequency voltages converted by the complex inverse conversion device to be greater than or equal to a predetermined value. 3. The induction heating device according to Item 2 or 2 of the patent application, wherein the dc is controlled to delay the coil current flowing to the series circuit from the rising timing of the applied voltage applied to the series circuit Zero-crossing and timing with negative to positive zero crossing. 4. The induction heating device according to any one of claims 3 to 3, wherein the reverse conversion device has a diode in which each arm is connected in anti-parallel with the transistor, and the DC voltage is blocked by a current-carrying circuit or The conversion device is generated. 5. The induction heating device according to any one of claims 4 to 4, further comprising: 27 201223339 abnormal stop portion, when the coil current is crossed from negative to positive zero, the high frequency voltage rises when the vehicle stops The above inverse conversion device. 6. For example, the scope of Shen Qing patents! The induction heating device according to any one of the items 5, wherein the plurality of induction heating coils are adjacent to a common heating element; and the control circuit variably controls the rectangular wave voltage pulse width to uniformize each of the induced heating coils Electromagnetic energy supplied to the above-described heating element. 7. The induction heating method is performed by the induction heating device, comprising: a plurality of induction heating coils disposed adjacent to each other; a capacitor 'connected to each of the induced heating coils; a complex inverse conversion device applying a high frequency voltage converted from the DC voltage to a series circuit for inducing the heating coil and the capacitor; and a control circuit 'voltage amplitude controlling the high frequency voltage; wherein the control circuit controls the complex inverse conversion means common to the respective DC voltages to flow into the complex induction heating coil The coil current is phase-aligned. 8. The induction heating method according to claim 7, wherein the DC voltage is lowered to cause a maximum value of a voltage amplitude of the high-frequency voltage converted by the complex inverse conversion device to be a predetermined value or more. The induction heating method according to claim 7, wherein the DC voltage is controlled to delay the timing of the current flowing to the series circuit more than the rising timing of the applied voltage applied to the series circuit. The method of inducing heating according to any one of the claims 7 to 28, 2012, 239, 339, is carried out in the computer of the above control circuit. 29