TW201221232A - Cleaning device for object to be cleaned - Google Patents

Cleaning device for object to be cleaned Download PDF

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Publication number
TW201221232A
TW201221232A TW100130845A TW100130845A TW201221232A TW 201221232 A TW201221232 A TW 201221232A TW 100130845 A TW100130845 A TW 100130845A TW 100130845 A TW100130845 A TW 100130845A TW 201221232 A TW201221232 A TW 201221232A
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TW
Taiwan
Prior art keywords
cleaning
chamber
washed
reference chamber
washing
Prior art date
Application number
TW100130845A
Other languages
Chinese (zh)
Inventor
Masahide Uchino
Original Assignee
Japan Field Kk
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Publication date
Application filed by Japan Field Kk filed Critical Japan Field Kk
Publication of TW201221232A publication Critical patent/TW201221232A/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00Accessories or details of general applicability for machines or apparatus for cleaning

Abstract

This invention enables a fast cleaning operation with great cleaning efficiency while decreasing outflow of solvent fume or risk of inflaming, wherein plural cleaning portions are provided for inserting objects to be cleaned simultaneously and moving the plural cleaning portions in order to apply different cleaning operations upon the objects to be cleaned. By being able to individually seal the plural cleaning portions and to limit the exit/entrance for the objects to be cleaned to and from the outside into one, the outflow of the solvent fume to the outside is to be extremely decreased. The cleaning device for object to be cleaned according to this invention is provided with standard room 1 disposed on its top end with exit/entrance 3 being sealable by cover body 2, and provided with side rooms 8, 9 upon the outer circumferential of standard room 1 that are able to connect and block standard room 1. Further provided are up-down conveying mechanism 5 for taking out or sending in object to be cleaned 7 from and to standard room 1, and horizontal conveying mechanism 11, 12 for being able to move in object to be cleaned 7 inside side rooms 8, 9 and to move out object to be cleaned 7 to standard room 1. Blocking walls 26, 27 are further provided for connecting horizontal conveying mechanism 11, 12 and being able to connect or block side rooms 8, 9 and standard room 1.

Description

201221232 六、發明說明: 【發明所屬之技術領域】 本發明係為有關使用被洗淨物之溶劑的洗淨裝置,其 目的在於減少溶劑蒸氣的流出及引燃的危險,並將洗淨效 率良好且迅速之洗淨作業可能化。 【先前技術】 以往,進行被洗淨物之洗淨時,一般係在對1個被洗 淨物施加洗淨液浸泡洗淨、沖洗(shower)洗淨、蒸氣洗淨 等不同洗淨手段之後再進行乾燥作業。然而,以此等施加 於被洗淨物之洗淨手段及乾燥之方法而言,大體上以往使 用2種方法。現存其一之方法,係為將用以分別實現上述 洗淨手段之洗淨浸泡洗淨槽、沖洗洗淨槽、蒸氣洗淨槽、 乾燥槽等,予以平面地排列配置,一面依序移動於此複數 個槽之間,一邊進行被洗淨物之洗淨。 另外,其他方法係如於專利文獻1所示,在1個洗淨 槽内,藉由將被洗淨物由下方移動至上方的過程中,對被 洗淨物施加洗淨液浸泡洗淨、沖洗洗淨、蒸氣洗淨等不同 的洗淨手段孓後,再進行乾燥作業之方法已為人所知。相 異之其他方法係如專利文獻2所示,藉由將1個洗淨槽内 以閘閥(gate valve)上下隔開,而不受存在於下方的槽冬洗 淨液的影響,在上部槽進行被洗淨物之乾燥的方式已為人 所知。 (先前技術文獻) (專利文獻) 4 323394 201221232 〔專利文獻l ] 曰本特開平5 —261347號公報 〔專利文獻2〕 日本特開平6- 15239號公報 【發明内容】 (發明所欲解決之課題) 枰、中將用以分別實現洗淨手段之洗淨液浸泡洗淨 二、/ >洗淨槽、蒸氣洗淨槽、乾燥槽等平面地排列配置, 的::序移動於複數個槽之間,一面進行被洗淨物之洗淨 方法中’因為在複數個槽分別插人被洗淨物 =種洗淨作業,故具有能提高作業效率之優點= ° 被洗淨物進出於複數個槽時,因必須開閉各样 <蓋體’且在溶劑附著於被洗淨物的狀態下被取出至外部 而!送至下個槽,溶劑氣體(gas)的流出量會變多,而有在 =作業者帶來不良影響的同時,溶劑損耗多,洗淨 姓本提两之缺點。料,於洗淨液使用可祕溶劑 亦升=為溶劑氣體之流出量變多,而導致引燃之危險性 物由==專利文獻1所示,▲ 1個洗淨槽内將被洗淨 違行乾燥作業之方法,闵沪. 再 加洗淨液浸泡洗淨、沖個洗淨槽内對被洗淨物施 又’故有溶劑氣體的流出少、對環境及作業者帶來之^ 323394 5 201221232 少、且溶劑損耗也少,而能進行價廉之洗淨作業的優點。 而且’因能在1個洗淨槽内進行複數種力淨作業,故亦具 有裝置之專用面積少之優點。然而,因係為在1、個洗淨柙 内對被洗淨物依序施加洗淨液糾洗淨、沖洗洗淨、 洗淨等不同的洗淨手段者,故具有必須較多之洗淨^的 缺點。 另外’如專利文獻2所示,藉由以閘閥將1個洗淨槽 内區隔成上下,*受到存在於下方的槽之洗淨液的影塑, 而在上部槽進行被洗淨物之乾燥,在此方式中,雖能^由 閘閥將洗淨蒸氣的產生部與乾燥部予辕斷,但卻^將 形成於洗淨槽内之複數個洗淨部予以個別密閉,以各自進 行洗淨作業。因此致使洗淨效率不佳者。 因此,本申請案係為欲解決如同上述之課題者,目的 在於減少溶劑蒸氣之流出及引燃的危險, 好且迅速之洗淨作業予以可能化。而且,因能== 率良好且迅速之洗淨作業,故能設置複數個洗淨部而在此 複數個洗淨部同時插入被洗淨物,並且能一面依序移動於 複數個洗淨部,一面對被洗淨物施加不同的洗淨作業。另 外,因能同時將複數個洗淨部分別密閉而具備複數個洗淨 部,並將被洗淨物往外部之出入口對應每一個槽僅形成 個,使溶劑蒸氣往外部之流出極度減少,並使對作業者 裱境帶來之影響為最小限,而且使溶劑損耗之產生為 限,而使價廉之洗淨作業可能化。 m ; [解決課題之手段]201221232 VI. Description of the Invention: [Technical Field] The present invention relates to a cleaning device using a solvent for a substance to be washed, which aims to reduce the risk of outflow and ignition of solvent vapor and to improve cleaning efficiency. And the rapid cleaning operation may be possible. [Prior Art] Conventionally, when washing a washed object, it is generally after applying different washing means such as washing, rinsing, washing, steam washing, etc. to one of the washed materials. Drying is carried out. However, in order to apply the cleaning means and the method of drying to the object to be washed, two methods have been conventionally used. In one of the methods, the washing and soaking washing tank, the washing and washing tank, the steam washing tank, the drying tank, and the like for realizing the above-described washing means are arranged in a plane, and are sequentially moved while being The washed matter is washed between the plurality of grooves. In addition, as shown in Patent Document 1, in the process of moving the object to be washed from the lower side to the upper side in one washing tank, the washing liquid is washed and washed with the washing liquid. A method of performing a drying operation after washing and washing, steam washing, and the like is known. The other method differs as shown in Patent Document 2, in which the gate valve is vertically partitioned by one of the cleaning tanks, and is not affected by the grooved winter cleaning liquid existing in the lower tank. The manner in which the washed matter is dried is known. (Prior Art Document) (Patent Document) 4 323 394 PCT Patent Publication No. JP-A No. Hei. No. Hei. No. Hei. No. Hei.枰, 中中, respectively, used to achieve the cleaning means of the washing solution soaking and washing, / > washing tank, steam washing tank, drying tank, etc. arranged in a plane, the:: sequence moves in a plurality of slots In the method of cleaning the washed matter, the effect of improving the work efficiency is achieved because the laundry is cleaned in a plurality of tanks, and the work efficiency is improved. In the case of a single groove, it is necessary to open and close each of the <covers' and to be taken out to the outside while the solvent adheres to the object to be washed! When it is sent to the next tank, the outflow of the solvent gas will increase, and there will be a disadvantage that the operator has a bad influence, the solvent is lost, and the washing surname is mentioned. In the case of the cleaning liquid, the use of the secret solvent is also increased. The amount of the outflow of the solvent gas is increased, and the risk of ignition is caused by == Patent Document 1, ▲ 1 cleaning tank will be washed out. The method of drying operation, Haohu. Adding the washing liquid to soak and wash, flushing the washing tank and applying the washed matter, so there is less outflow of solvent gas, which brings to the environment and the operator ^ 323394 5 201221232 There are few, and the solvent loss is also small, and the advantages of the inexpensive cleaning operation can be achieved. Moreover, since a plurality of types of force net operations can be performed in one cleaning tank, there is also an advantage that the dedicated area of the apparatus is small. However, since it is a washing method in which the washing liquid is sequentially washed, washed, washed, and the like in a single washing bowl, it is necessary to wash a lot. The shortcomings of ^. In addition, as shown in the patent document 2, the inside of one washing tank is partitioned up and down by a gate valve, * is subjected to the washing of the washing liquid existing in the groove below, and the object is washed in the upper tank. In this manner, the cleaning portion and the drying portion of the cleaning steam can be cut off by the gate valve, but the plurality of cleaning portions formed in the cleaning tank are individually sealed and washed separately. Net work. Therefore, the cleaning efficiency is not good. Therefore, the present application is intended to solve the problems as described above, and the object of the present invention is to reduce the risk of outflow and ignition of solvent vapor, and it is possible to quickly and quickly clean the operation. In addition, since the cleaning operation can be performed with a good rate and a rapid cleaning operation, a plurality of cleaning portions can be provided, and the plurality of cleaning portions can be simultaneously inserted into the laundry, and can be sequentially moved to the plurality of cleaning portions. A different washing operation is applied to the washed object. In addition, since a plurality of cleaning portions can be sealed at the same time, a plurality of cleaning portions are provided, and the inlet and outlet of the object to be washed are formed only for each of the grooves, and the outflow of the solvent vapor to the outside is extremely reduced. The impact on the operator's dilemma is minimized, and the generation of solvent loss is limited, which makes the inexpensive cleaning operation possible. m ; [means to solve the problem]

32339, 6 201221232 本案發明為了解決如上所述之課題,而形成在上端設 置月b以蓋體密閉及打開之出入口之基準室。另外,形成1 個或複數個能與基準室連通及阻斷的側室且配置於此基準 至之外周。此側至及基準室係具備能進行被洗淨物之洗淨 的功能。另外,係形成有使被洗淨物經由出入口進出基準 室的上下搬運機構、與配置於前述側室,能將已搬入基準 室之被洗淨物搬入側室内或搬出至基準室的水平搬運機 構。而且,於此水平搬運機構係連接有能連通或阻斷侧室 與基準室之阻斷壁。而且,基準室及侧室係將蒸氣產生機 構、減壓機構、洗液供給機構之全部或其中1個機構選 擇性地連接’並使用溶劑而進行被洗淨物之洗淨。 另外,基準室及侧室為以耐減壓性之真空槽形成者亦 可,而為對應常壓者亦可。 另外,亦可於基準室下端形成浸泡洗淨部。藉由以此 種方式形成而能輕鬆地進行被洗淨物之浸泡洗淨。 【發明效果】 本發明係為如同上述之構成者,為僅、經由設於基準室 上端之可密閉的出入口進行被洗淨物之進出,故即使在設 有基準室、侧室等複數個洗淨室的情況,亦能儘可能減少 與外部空氣之接觸,而減少溶劑蒸氣之流出及引燃之危 險,亦能減少溶劑損耗之發生。另外,設置基準室、側室 等複數個洗淨部’並且設置使被洗淨物進出基準室之上下 搬運機構、與配置於前述側室’且能將已搬入基準室之被 洗淨物搬入側室内或搬出至基準室的水平搬運機構,故以 323394 7 201221232 基準室為基準,能將被洗淨物分別配置於基準室及侧室, 而容易地-面依序移動於基準室與侧室間,—面對被洗淨 物施加不_洗淨作業,H進行有效率的洗淨作業。 另外,因設置有連接於水平搬運機構的阻斷壁,而能 連通或阻斷側室與基準室,故能將由基準室與側室所構成 之洗淨部各自獨立而密閉,且能將被洗淨物之洗淨液浸泡 洗淨、蒸氣洗淨、減壓錢洗料段在各自之洗 淨部進行,而不受❹他洗料之影響。而且,若設置複 數個側室,則能將更有效率的洗淨作業可能化。 (實施例1) 當將本發明之實施例1於第!圖至第1〇圖說明時,則 (1)為基準室,並於上端形成設有能以蓋體(2)密閉及打開之 出入口(3)的罩體(h〇〇d)(4)。此基準室(1),係使以氣壓缸(air cylinder)專所形成之上下搬運機構(5)面向上面而配置,藉 由此上下搬運機構(5) ’能收納及取出送往基準室(1)及設置 於基準室(1)下端之浸泡洗淨部(6)的被洗淨物(7)。 另外,於此基準室(1)之外周,配置有1個或複數個側 室(8)、(9) ’並作成為能與基準室(1)連通及阻斷。本實施 例中,雖於基準室⑴之外周設有2個側室(8)、(9),惟此 側室(8)、(9)為1個亦可,而設置3個以上亦可,能因應洗 淨作業之目的任意決疋。另外,此侧室(8)、(9)係設置有使 被洗淨物(7)進出於前述基準室(1)之上下搬運機構(5);與 配置於前述側室(8)、(9) ’能將已搬入基準室(1)之被洗淨 物搬入至側室(8)、(9)内,或將侧室(8)、(9)之被洗淨物(7) 32339432339, 6 201221232 In order to solve the above problems, the present invention has a reference chamber in which an entrance and exit of the lid b is sealed and opened at the upper end. Further, one or a plurality of side chambers that can communicate with and block the reference chamber are formed and disposed between the reference and the outer circumference. This side to and the reference chamber have a function of being able to wash the washed matter. In addition, an up-and-down transport mechanism that allows the object to be washed in and out of the reference chamber through the entrance and exit, and a horizontal transport mechanism that can be carried into the side chamber and carried out into the side chamber can be carried in the side chamber. Further, the horizontal transport mechanism is connected to a blocking wall that can connect or block the side chamber and the reference chamber. Further, the reference chamber and the side chamber are selectively connected to all or one of the steam generating mechanism, the pressure reducing mechanism, and the washing liquid supply mechanism, and the washed matter is washed using a solvent. Further, the reference chamber and the side chamber may be formed by a vacuum chamber which is resistant to decompression, and may be a person corresponding to normal pressure. Alternatively, an immersion cleaning portion may be formed at the lower end of the reference chamber. By being formed in this manner, the soaking of the washed matter can be easily performed. [Effect of the Invention] The present invention is configured as described above, and the cleaning is carried out only through the sealable inlet and outlet provided at the upper end of the reference chamber. Therefore, even if a plurality of cleanings such as a reference chamber and a side chamber are provided, In the case of the chamber, the contact with the outside air can be minimized as much as possible, and the risk of solvent vapor outflow and ignition can be reduced, and the occurrence of solvent loss can also be reduced. In addition, a plurality of cleaning units, such as a reference chamber and a side chamber, are provided, and the laundry is moved into and out of the reference chamber, and the storage unit is placed in the side chamber, and the laundry that has been carried into the reference chamber can be carried into the indoor chamber. Or move out to the horizontal transport mechanism of the reference room. Therefore, based on the reference room of 323394 7 201221232, the objects to be washed can be placed in the reference chamber and the side chamber, and the surface can be easily moved between the reference chamber and the side chamber. In the case of applying a non-washing operation to the object to be washed, H performs an efficient cleaning operation. Further, since the partition wall connected to the horizontal transport mechanism is provided, the side chamber and the reference chamber can be connected or blocked, so that the washing portions composed of the reference chamber and the side chamber can be sealed independently and can be washed. The washing solution of the object is washed, steamed, and decompressed. The washing section is carried out in the respective washing parts without being affected by the washing of the material. Moreover, if a plurality of side chambers are provided, a more efficient cleaning operation can be made possible. (Embodiment 1) When Embodiment 1 of the present invention is applied to the first! When the figure is illustrated in the first drawing, (1) is a reference chamber, and a cover (h〇〇d) (4) having an inlet and outlet (3) that can be sealed and opened by the lid body (2) is formed at the upper end. . The reference chamber (1) is disposed such that an upper and lower transport mechanism (5) is formed by an air cylinder, and the upper and lower transport mechanism (5) can be stored and taken out to the reference chamber ( 1) and the object to be washed (7) of the immersion washing unit (6) provided at the lower end of the reference chamber (1). Further, one or a plurality of side chambers (8) and (9)' are disposed on the outer circumference of the reference chamber (1) so as to be able to communicate with and block from the reference chamber (1). In the present embodiment, two side chambers (8) and (9) are provided on the outer circumference of the reference chamber (1). However, one of the side chambers (8) and (9) may be provided, and three or more of the side chambers may be provided. Arbitrarily determined for the purpose of washing operations. Further, the side chambers (8) and (9) are provided with the upper and lower transport mechanisms (5) for allowing the object to be washed (7) to enter the reference chamber (1); and the side chambers (8) and (9) 'The items that have been carried into the reference chamber (1) can be carried into the side chambers (8), (9), or the side chambers (8), (9) are washed (7) 323394

8 201221232 搬出至基準室(1)的水平搬運機構(11)、(12)。 此水平搬運機構(11)、(12)係與上下搬運機構(5)同樣 地藉由氣壓缸(13)、(14)等所構成。而且,水平搬運機構 (11)、(12)係於氣壓缸(13)、(14)之兩側配置辅助心軸 (spindle)(15)、(16),並以連結板(20)、(21)連結固定此輔助 心軸(15)、(16)與氣壓缸(13)、(14)之心軸(17)、(18)。另外, 在此連結板(20)、(21)之外面朝向基準室(1)側突出固定有 安裝桿(22)、(23)。 於此安裝桿(2 2 )、( 2 3 )之前端係以連接固定有能阻斷側 室(8)、(9)之開口部(24)、(25)的阻斷壁(26)、(27),且於水 平搬運機構(11)、(12)之收縮時,阻斷並密閉側室(8)、(9) 之開口部(24)、(25) ’並且於水平搬運機構(11)、(12)之伸 長時,為能移動阻斷壁(26)、(27)通過基準室(1),而到達 接近於配置在對向位置之側室(8)、(9)的阻斷壁(26)、(27) 的位置為止之方式,而s周整水平搬運機構(11)、(12)之心轴 (17)、(18)及安裝桿(22)、(23)等之突出長度。另外,於阻 斷壁(26)、(27)與連結板(20)、(21)之間係連結定位被洗淨 物(Ό的載置部(28)、(29),並於將水平搬運機構(丨丨)、(12) 伸長時將載置部(28)、(29)配置於基準室(1)内,作成為能 載置以上下搬運機構(5)所運送之被洗淨物(7),並移送至侧 室(8)、(9)内,或能將側室(8)、(9)内之被洗淨物(7)移送至 基準室(1)為止。 另外,上述之基準室(1)及側室(8)、(9)係以耐減壓性 之真空槽形成,能進行真空蒸氣洗淨洗淨、真空乾燥等之 323394 9 201221232 真空相關作業。當然’未必必須將基準室(1)及側室(8)、(9) 做成耐減壓性之真空槽,而能因應作業目的任意地設計。 另外,可將於洗淨作業必須之種種機構任意地連接於 基準室(1)及側室(8)、(9)。在本實施例中,侧室(8)、(9)及 基準室(1)分別間隔著第1、第2、第3、第4開閉閥(31)、 (32)、(33)、(34)及冷凝器(35),連接於減壓機構(36)。進 而在地減壓機構(36)與冷凝器(35)之間設置有第5開閉閥 (37)。另外,於冷凝器(35)間隔著第6開閉閥(38)配置有冷 凝液貯藏槽(40),並將此冷凝液貯藏槽(40)間隔著第7開閉 閥(41)連接於浸泡洗淨部(6)。另外,間隔著第8、第9開 閉闊(42)、(43)連接浸泡洗淨部(6)的下端與側室(8)、(9)的 下端。 另外,將使用於蒸氣洗淨的蒸氣產生機構(44) 著第10、第11、第12開閉閥(45)、(46)、(47)連接於侧室 (8)、(9)及基準室,而能進行洗淨蒸氣之供給。蒸氣產 生機構(44)與加熱器(heater)(48)共同具備液位計(5〇),並間 隔著第13開閉閥(51)連接於儲藏槽(reserve tank)(52),且 將此儲藏槽(52)連接於浸泡洗淨部⑹。此儲藏槽(52)係收 納心包洗淨部⑹之溢流(峨出㈣成,並且對蒸氣產生機 構(44)供給洗淨液(53)。而且圖示中(54)係為真空破壞闊。 於如上述所構成者之中,要進行被洗淨物⑺之洗淨, 將密閉基準室⑴之罩體(4)上端的出入口 洗淨物m,^了開,並將上下搬運機構(5)所保持之被 … ,由出人口(3)經由基準室⑴,插人如第2圖所 108 201221232 Move out to the horizontal transport mechanism (11), (12) of the reference room (1). The horizontal transport mechanisms (11) and (12) are constituted by pneumatic cylinders (13), (14) and the like in the same manner as the vertical transport mechanism (5). Further, the horizontal transport mechanisms (11) and (12) are provided with auxiliary spindles (15) and (16) on both sides of the pneumatic cylinders (13) and (14), and are connected by a connecting plate (20), ( 21) The mandrel (17) and (18) of the auxiliary mandrel (15), (16) and the pneumatic cylinders (13) and (14) are fixed. Further, mounting rods (22) and (23) are protruded and fixed toward the reference chamber (1) side on the outer surfaces of the connecting plates (20) and (21). The front end of the mounting rods (2 2 ) and ( 2 3 ) is connected and fixed with a blocking wall (26) capable of blocking the opening portions (24) and (25) of the side chambers (8) and (9), ( 27), and when the horizontal transport mechanisms (11), (12) contract, block and seal the opening portions (24), (25) ' of the side chambers (8), (9) and the horizontal transport mechanism (11) When the elongation of (12) is extended, the movable blocking walls (26) and (27) pass through the reference chamber (1), and reach the blocking wall close to the side chambers (8) and (9) disposed at the opposite positions. The position of (26) and (27) is the same as that of the position of the (26) and (12) mandrels (17) and (18) and the mounting rods (22) and (23). length. Further, between the blocking walls (26) and (27) and the connecting plates (20) and (21), the objects to be cleaned (the mounting portions (28) and (29) of the crucible are connected, and the level is to be horizontal. When the transporting mechanism (丨丨) and (12) are extended, the placing portions (28) and (29) are placed in the reference chamber (1), and the transport can be carried by the upper and lower transport mechanisms (5). The object (7) is transferred to the side chambers (8) and (9), or the object to be washed (7) in the side chambers (8) and (9) can be transferred to the reference chamber (1). The reference chamber (1) and the side chambers (8) and (9) are formed by vacuum chambers that are resistant to decompression, and can be vacuum-cleaned, vacuum-dried, etc., 323394 9 201221232 vacuum-related work. Of course, 'it is not necessary The reference chamber (1) and the side chambers (8) and (9) are made into a vacuum chamber that is resistant to decompression, and can be arbitrarily designed for the purpose of the work. Further, various mechanisms necessary for the washing operation can be arbitrarily connected. The reference chamber (1) and the side chambers (8) and (9). In the present embodiment, the side chambers (8), (9) and the reference chamber (1) are respectively opened, closed, first, second, third, and fourth. Valves (31), (32), (33) And (34) and the condenser (35) are connected to the pressure reducing mechanism (36). Further, a fifth opening and closing valve (37) is provided between the ground pressure reducing mechanism (36) and the condenser (35). The condenser (35) is provided with a condensate storage tank (40) via a sixth opening and closing valve (38), and the condensate storage tank (40) is connected to the immersion washing portion via a seventh opening and closing valve (41). 6). The lower end of the immersion cleaning unit (6) and the lower ends of the side chambers (8) and (9) are connected to the eighth and ninth opening and closing gaps (42) and (43). In addition, it is used for steam washing. The net steam generating means (44) is connected to the side chambers (8), (9) and the reference chamber by the 10th, 11th, and 12th opening and closing valves (45), (46), and (47), and is capable of cleaning the vapor. The steam generating means (44) and the heater (48) are provided with a liquid level gauge (5 〇), and are connected to a reserve tank (52) via a thirteenth opening and closing valve (51). And the storage tank (52) is connected to the immersion washing unit (6). The storage tank (52) accommodates the overflow of the pericardial washing unit (6), and supplies the cleaning liquid to the steam generating mechanism (44). (53) and in the illustration (54) In the case of the above-mentioned structure, the object to be washed (7) is washed, and the inlet and outlet washings m of the upper end of the cover (4) of the sealed reference chamber (1) are closed, and the upper and lower sides are opened. The transport mechanism (5) is kept by ..., from the population (3) through the reference room (1), inserted as shown in Figure 2

323394 S 201221232 示的浸泡洗淨部⑹。於此被洗淨物⑺往浸泡洗淨部⑹的 插入之中,係、以洗淨液(53)不與上下搬運機構(5)接觸的方 式,作成防♦止上下搬運機構(5)拉升至基準室⑴外部時帶出 溶劑。接著,如第3圖所示,將上下搬運機構⑺由基準室 ⑴朝向上方拉升,並且將出人口⑶以蓋體(2)密閉,以進 行被洗淨物(7)之浸泡洗淨。 當被洗淨物(7)之浸泡洗淨完成後,係如第4圖所示打 開蓋體(2 ),並藉由上下搬運機構(5 )將浸泡洗淨完成之被洗 淨物(7)拉升到基準室(1)的罩體(4)的部分。藉由此拉升動 作,附著於被洗淨物(7)的洗淨液(53)雖會與外部空氣接 觸,惟因被洗淨物(7)係配置於罩體(4)内,故溶劑氣體的擴 散少。另外’若使減壓機構(36)動作’則因溶劑氣體朝向 基準室(1)的内部方向流動,故幾乎不會產生溶劑氣體往外 部流出之情形。 接著’使一方之侧室(8)的水平搬運機構(η)、(12)動 作’如第5圖所示,使阻斷壁(26)接近相對向之阻斷壁 (27),並且將水平搬運機構(11)的載置部(28)朝向基準室(1) 移動。而後,將被洗淨物(7)載置於此載置部(28)。接著, 將水平搬運機構(11)復原至原位置,如第6圖所示,將被 洗淨物(7)收納於側室(8) ’並且藉由阻斷壁(26)將侧室(8) 予以密閉。當在此密閉狀態下將第1、第4、第5開閉閥 (33)、(34)、(37)打開,且使減壓機構(36)動作而將一方之 側室(8)内減壓,並打開第11開閉閥(46),則蒸氣產生機構 (44)之洗淨蒸氣會被導入側室(8),而能進行被洗淨物(7)之 11 323394 201221232 蒸氣洗淨。與此蒸氣洗淨同時將蓋體(2)打開’藉由上下搬 運機構(5)將下個被洗淨物(7)導入浸泡洗淨部(6)’再如第6 圖所示將蓋體(2)密閉。接著打開第3、第5開閉閥(33)、 (37),將基準室(1)内減壓,進行被洗淨物(7)之減壓浸泡洗 淨。 接著,若侧室(8)之蒸氣洗淨完成後,將與蒸氣產生機 構(44)連通之第η開閉閥(46)關閉,藉由將與減壓機構(36) 連通之第1、第4開閉閥(31)、(34)維持在打開狀態,使側 室(8)内之減壓度提高’以進行被洗淨物之減壓乾燥作 業。亦可將減壓機構(36)更強力地動作,急劇提高側室(8) 内之減壓度而進行突沸乾燥。另外,上述之蒸氣洗淨及乾 燥作業,因係相較於浸泡洗淨為需要較多之作業時間者, 故在一方之側室(8)進行蒸氣洗淨及減壓乾燥的同時,亦可 如第8圖所示,在另一方之側室(9),一面對浸泡洗淨完成 後之被洗淨物(7)進行蒸氣洗淨及減壓乾燥,一面在浸泡洗 淨部(6)進行下個被洗淨物(7)之浸泡洗淨。另外,亦可在一 方之側室(8)僅進行被洗淨物(7)之蒸氣洗淨,而在另一方之 侧室(9)僅進行被洗淨物(7)之乾燥。另外,關於當時的開閉 閥之開閉’係依據上述之閉程序而進行者,因具體的程序 說明上顯得繁雜故予以省略。 另外,在上述洗淨手段中,係在側室(8)、(9)進行具體 的洗淨作業,基準室(1)係作為分配位置而使用於將被洗淨 物(7)分配至側室(8)、(9),惟當然亦能在基準室(丨)進行被 洗淨物(7)之具體的洗淨作業。在本發明中,係能因應洗淨 323394 201221232 目的’而任意使用基準室(1)、側室(8)、(9)而有效率的進 行多種洗淨作業。而且,因被洗淨物(7)之出入口(3)為每1 槽1個,故在使用所謂的基準室(1)與侧室(8)、(9)之複數 個洗淨部進行多樣的洗淨作業下’而能使溶劑氣體往外部 之流出為最小限。 (實施例2) 於上述之實施例1中,雖設置專用之浸泡洗淨部(6) 而進行被洗淨物(7)之浸泡洗淨’惟未必有其必要性,在實 施例2中,如第11圖所示’係不設置專用之浸泡洗淨部(6) 而進行被洗淨物(7)之浸泡洗淨。於基準室(1)之下底係以底 板(55)密閉,並且將洗淨液管理槽(56)連接於側室(8)、(9)。 此洗淨液管理槽(56)係充填用以進行被洗淨物(7)之浸泡洗 淨的洗淨液(53),並將液體供給泵(57)、過濾器(58)間隔著 第、第16開閉閥(59)、(60) ’連接於侧室⑻、(9)之上 部。另外’將侧室(8)、(9)之下端間隔著第17、第μ開閉 閥(62)、(63)連接至洗淨液管理槽(56),而能進行來自侧室 (8)、(9)之洗淨液(53)的回收。 另外,往侧室(8)、(9)及基準室(1)之減壓機構(36)與蒸 氣產生機構(44)之連接與真空破壞閥(54)之設置,係與前述 之實施例1完全相同。而且,於前述之實施例丨中亦相同, 在阻斷壁(26)、(27)所導致侧室(8)、(9)之密閉不完全,而 產生侧室(8)、(9)之真空不良時,藉由打開第3開閉閥(33) 來進行基準室(1)的減壓,側室(8)、(9)亦能伴隨此減壓而 減壓’能無礙的進行使用減壓之洗淨作業。 323394 13 201221232 藉由如同上述所構成之實施例2,欲進行被洗淨物(7) 、先/爭作業,係與實施例1相同地、將一方之側室(8)的水 平搬運機構(11)朝向基準室⑴侧突出,將經由出人口(3)而 ,下搬運機構(5)搬運至基準室⑴的被洗淨物⑺,以載 置部(28)接收’收納於一方之側室⑻,並將此一方之側室 (^)以阻斷壁(26)密閉。接著,將洗淨液(53)導入一方之側 室(8)。此洗淨液(53)之導入係將第17開閉閥(62)關閉,並 在打開第15開閉閥(59)的狀態下,使液體供給泵(57)動 作,藉以將洗淨液管理槽(56)的洗淨液(53)導入一方之側室 (8) ’以進行被洗淨物(7)之浸泡洗淨。 上述之浸泡洗淨完成後,將第17開閉閥(62)打開,使 洗淨液(53)藉由自體重量排出至洗淨液管理槽(56)之後,與 蒸氣產生裝置(44)連接,以進行蒸氣洗淨。另外,同時於 另一方的側室(9),亦可進行其他之被洗淨物(7)的浸泡洗 ’爭,亦可進行蒸氣洗淨。進而,在基準室(丨),亦可進行蒸 氣洗淨完成後之被洗淨物(7)的真空乾燥。 另外,於實施例2中’雖將減壓機構(36)間隔著第1、 第2、第4、第5開閉閥(31)、(32)、(34)、(37)連接於側室 (8)、(9) ’惟亦能進而將別系統之配管,藉由間隔著第19、 第20開閉閥(64)、(65) ’將減壓機構(36)與側室(8)、(9)連 接,在將此側室(8)、(9)内減壓之狀態下,將第π、第18 開關閥(62)、(63)同時地或個別地打開’而能不使用液體供 給泵(57),將洗淨液管理槽(56)的洗淨液(53),迅速地減璧 吸取而導入側室(8)、(9)。 323394323394 S 201221232 shows the soaking wash section (6). In the insertion of the object to be cleaned (7) into the immersion cleaning unit (6), the cleaning liquid (53) is prevented from coming into contact with the vertical transport mechanism (5), and the upper and lower transport mechanism (5) is prevented from being pulled. The solvent is taken up when it rises outside the reference chamber (1). Next, as shown in Fig. 3, the vertical transport mechanism (7) is pulled upward from the reference chamber (1), and the population (3) is sealed with the lid body (2) to be washed by immersion of the object to be washed (7). After the immersion cleaning of the object to be washed (7) is completed, the lid body (2) is opened as shown in Fig. 4, and the immersed washed finished material is washed by the upper and lower transport mechanism (5) (7) ) Pull up to the portion of the cover (4) of the reference chamber (1). By this pulling operation, the cleaning liquid (53) adhering to the object to be washed (7) comes into contact with the outside air, but the object to be washed (7) is placed in the cover (4). The diffusion of the solvent gas is small. Further, when the pressure reducing mechanism (36) is operated, the solvent gas flows toward the inside of the reference chamber (1), so that the solvent gas almost does not flow out to the outside. Next, 'the horizontal transport mechanism (n), (12) of the side chamber (8) is operated as shown in Fig. 5, so that the blocking wall (26) approaches the opposite blocking wall (27) and will be horizontal. The placing portion (28) of the transport mechanism (11) moves toward the reference chamber (1). Then, the object to be washed (7) is placed on the placing portion (28). Next, the horizontal transport mechanism (11) is restored to the original position, and as shown in Fig. 6, the object to be washed (7) is stored in the side chamber (8)' and the side chamber (8) is blocked by the partition wall (26). Be sealed. When the first, fourth, and fifth on-off valves (33), (34), and (37) are opened in this sealed state, the pressure reducing mechanism (36) is operated to decompress one side chamber (8). When the eleventh opening and closing valve (46) is opened, the cleaning vapor of the steam generating means (44) is introduced into the side chamber (8), and the steam of the object (7) can be washed by 11 323394 201221232. At the same time as the steam is washed, the lid body (2) is opened. 'The next washed object (7) is introduced into the immersion washing portion (6) by the upper and lower transport mechanism (5), and the lid is closed as shown in Fig. 6. Body (2) sealed. Then, the third and fifth on-off valves (33) and (37) are opened, the inside of the reference chamber (1) is depressurized, and the object to be cleaned (7) is immersed and washed. Next, after the steam cleaning of the side chamber (8) is completed, the η on-off valve (46) that communicates with the steam generating mechanism (44) is closed, and the first and fourth sides are connected to the pressure reducing mechanism (36). The opening and closing valves (31) and (34) are maintained in an open state, and the degree of pressure reduction in the side chamber (8) is increased to perform a vacuum drying operation of the object to be washed. The pressure reducing mechanism (36) can also be operated more strongly, and the degree of pressure reduction in the side chamber (8) can be sharply increased to perform the boiling drying. Further, in the above-described steam washing and drying operation, since it takes a lot of work time compared to the immersion washing, steam cleaning and decompression drying are performed in one side chamber (8), and As shown in Fig. 8, in the other side chamber (9), the washed object (7) after the completion of the immersion washing is subjected to steam washing and drying under reduced pressure, and is carried out in the immersion washing portion (6). Wash with the next soaked material (7). Further, only the side chamber (8) may be washed only by the vapor of the object (7), and the other side chamber (9) may be only dried by the object (7). In addition, the opening and closing of the opening and closing valve at that time is performed in accordance with the above-described closing procedure, and the description of the specific procedure is complicated and therefore omitted. Further, in the above cleaning means, a specific washing operation is performed in the side chambers (8) and (9), and the reference chamber (1) is used as a dispensing position for distributing the object to be washed (7) to the side chamber ( 8), (9), of course, it is also possible to carry out the specific cleaning operation of the object to be washed (7) in the reference room (丨). In the present invention, it is possible to efficiently perform various washing operations by using the reference chamber (1) and the side chambers (8) and (9) arbitrarily in accordance with the purpose of cleaning 323394 201221232. In addition, since the entrance (3) of the object to be cleaned (7) is one per tank, various washing units using the so-called reference chamber (1) and the side chambers (8) and (9) are used. Under the cleaning operation, the solvent gas can be discharged to the outside as a minimum. (Embodiment 2) In the first embodiment described above, it is not necessary to provide the immersion cleaning portion (6) for the immersion cleaning of the object to be washed (7), but it is not necessary, and in the second embodiment, As shown in Fig. 11, the immersion washing (7) is not provided, and the immersion (7) is washed and immersed. The bottom of the base chamber (1) is sealed with a bottom plate (55), and the cleaning liquid management tank (56) is connected to the side chambers (8), (9). The cleaning solution management tank (56) is filled with a cleaning liquid (53) for performing immersion cleaning of the object to be washed (7), and the liquid supply pump (57) and the filter (58) are spaced apart from each other. The 16th opening and closing valves (59) and (60)' are connected to the upper portions of the side chambers (8) and (9). Further, 'the 17th and the μth opening and closing valves (62) and (63) are connected to the cleaning liquid management tank (56) with the lower ends of the side chambers (8) and (9) interposed therebetween, and can be carried out from the side chambers (8), ( 9) Recovery of the cleaning solution (53). Further, the connection between the pressure reducing mechanism (36) of the side chambers (8), (9) and the reference chamber (1) and the steam generating mechanism (44) and the vacuum breaking valve (54) are provided in the foregoing embodiment 1 It's exactly the same. Moreover, in the foregoing embodiment, the sealing of the side chambers (8) and (9) caused by the blocking walls (26) and (27) is incomplete, and the vacuum of the side chambers (8) and (9) is generated. In the case of a failure, the reference chamber (1) is decompressed by opening the third opening and closing valve (33), and the side chambers (8) and (9) can be decompressed with the pressure reduction. Washing work. 323394 13 201221232 By the second embodiment configured as described above, the object to be washed (7) and the first-hand operation are the same as in the first embodiment, and the horizontal transport mechanism (11) of one side chamber (8) is used. ) protruding toward the reference chamber (1), and the object to be cleaned (7) transported to the reference chamber (1) via the population (3), and the side portion (8) received by the mounting unit (28) And the side chamber (^) of this side is sealed with a blocking wall (26). Next, the cleaning liquid (53) is introduced into one of the side chambers (8). The introduction of the cleaning liquid (53) closes the 17th opening and closing valve (62), and when the 15th opening and closing valve (59) is opened, the liquid supply pump (57) is operated to thereby supply the cleaning liquid management tank. The cleaning liquid (53) of (56) is introduced into one side chamber (8)' to be washed by immersion of the object to be washed (7). After the immersion washing is completed, the 17th opening and closing valve (62) is opened, and the cleaning liquid (53) is discharged to the cleaning liquid management tank (56) by the self weight, and is connected to the steam generating device (44). For steam washing. Further, in the other side chamber (9), it is also possible to perform other soaking and washing of the object to be washed (7), or to perform steam washing. Further, in the reference chamber (丨), the laundry (7) after the steam cleaning is completed may be vacuum dried. Further, in the second embodiment, the pressure reducing mechanism (36) is connected to the side chambers with the first, second, fourth, and fifth on-off valves (31), (32), (34), and (37) interposed therebetween ( 8), (9) 'However, the piping of the other system can be further connected, and the pressure reducing mechanism (36) and the side chamber (8) are separated by the 19th and 20th opening and closing valves (64), (65), 9) Connection, in the state where the side chambers (8), (9) are decompressed, the πth, 18th on-off valves (62), (63) are simultaneously or individually opened, and the liquid supply can be omitted. The pump (57) rapidly introduces the cleaning liquid (53) of the cleaning liquid management tank (56) into the side chambers (8) and (9). 323394

14 201221232 本發明中,設置基準室(1)與側室(8)、(9),在此基準 室⑴與侧室⑻、⑼間’因應洗淨目的而—面任意地使被 洗淨物⑺進面使洗料段動作,藉以能進行有效率 且溶劑消耗少之洗淨。再者,在上述之第丄、帛2實施例 中,雖未洗洗淨進行具體性的說明 ,惟當然能將沖洗 洗淨機構②置於基準室⑴、側室⑻、⑼,而能於基準室 ⑴側至(8)、(9)任意地連接任意的洗淨手段。 【圖式簡單說明】 第1圖係為顯示本發明之實施例1之流程圖,顯示洗 淨作業開始.前。 、第2圖係為顯示本發明之實施例1之流程圖,顯示將 被洗淨物插入浸泡洗淨部之狀態。 第3圖係為顯示本發明之實施例1之流程圖,顯示將 上下搬運機構由基準室抽出之狀態。 、第4圖係為顯示本發明之實施例i之流程圖,顯示將 被洗淨物岐域淨部絲準錄升之狀態。 第5圖係為顯示本發明之實施例丨之流程圖,顯示左 侧的側至之水平搬運機構在基準室内接收被洗淨物之狀 態。 第6圖係為顯示本發明之實施例丨之流程圖,顯示在 左側的側室内已收納被洗淨物之狀態。 ^第7圖係為顯示本發明之實施例1之流程圖,顯示將 藉由上下搬運機構從浸泡洗淨部拉升之被洗淨物, 之水平搬運機構接收之狀態。此時上下搬運機構保持有下 323394 15 201221232 個被洗淨物並處於待命狀態。 第8圖係為顯示本發明之實施例1之流程圖,顯示將 在第7圖所接收之被洗淨物收納於右侧之側室,並將待命 中之被洗淨物收納於浸泡洗淨部之狀態。 第9圖係為顯示本發明之實施例1之流程圖,顯示由 左側之側室搬運至基準室,再以上下搬運機構搬運至外部 之狀態。 第10圖係為顯示本發明之實施例1之流程圖,顯示將 被洗淨物由右側之侧室搬運至基準室之狀態。 第11圖係為顯示本發明之實施例2之流程圖,顯示不 設置專用之浸泡洗淨部,而亦將侧室作為浸泡洗淨部使用 之狀態。 【主要元件符號說明】 1 基準室 2 蓋體 3 出入口 4 罩體 5 上下搬運機構 6 浸泡洗淨部 7 被洗淨物 8、9 側室 11 ' 12 水平搬運機構 13、14 氣壓缸 15 ' 16 輔助心轴 16 323394 201221232 17、18 心轴 20、21 連結板 22、23 安裝桿 24 ' 25 開口部 26 ' 27 阻斷壁 28 > 29 載置部 31 第1開閉閥 32 第2開閉閥 33 第3開閉閥 34 第4開閉閥 35 冷凝器 36 減壓機構 37 第5開閉閥 38 第6開閉閥 40 冷凝液貯藏槽 41 第7開閉閥 42 第8開閉閥 43 第9開閉閥 44 蒸氣產生機構 45 第10開閉閥 46 第11開閉閥 47 第12開閉閥 48 加熱器 50 液位計 201221232 51 第13開閉閥 52 儲藏槽 53 洗淨液 54 真空破壞閥 55 底板 56 洗淨液管理槽 57 液體供給泵 58 過遽器 59 第15開閉閥 60 第16開閉閥 62 . 第17開閉閥 63 第18開閉閥 64 第19開閉閥 65 第20開閉閥14 201221232 In the present invention, the reference chamber (1) and the side chambers (8) and (9) are provided, and between the reference chamber (1) and the side chambers (8) and (9), the object to be washed (7) is arbitrarily made in accordance with the purpose of cleaning. The surface allows the washing section to operate, thereby enabling efficient cleaning with less solvent consumption. Further, in the above-described examples of the second and second embodiments, the specific description of the washing and washing is not performed, but it is of course possible to place the flushing and cleaning mechanism 2 in the reference chamber (1) and the side chambers (8) and (9). Any cleaning means is arbitrarily connected to the chamber (1) side to (8) and (9). BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a flow chart showing the first embodiment of the present invention, showing the start of the cleaning operation. Fig. 2 is a flow chart showing the first embodiment of the present invention, showing a state in which the object to be washed is inserted into the immersion washing portion. Fig. 3 is a flow chart showing the first embodiment of the present invention, showing a state in which the upper and lower conveyance mechanisms are taken out from the reference chamber. Fig. 4 is a flow chart showing an embodiment i of the present invention, showing a state in which the net portion of the object to be cleaned is allowed to be recorded. Fig. 5 is a flow chart showing an embodiment of the present invention, showing the state in which the left side of the horizontal transport mechanism receives the laundry in the reference chamber. Fig. 6 is a flow chart showing an embodiment of the present invention, showing a state in which the object to be washed is stored in the side chamber on the left side. Fig. 7 is a flow chart showing the first embodiment of the present invention, showing a state in which the object to be washed is lifted from the immersion washing unit by the upper and lower conveyance mechanisms, and the horizontal conveyance mechanism is received. At this time, the upper and lower transport mechanisms maintain the next 323394 15 201221232 items to be washed and are on standby. Fig. 8 is a flow chart showing the first embodiment of the present invention, showing that the object to be washed received in Fig. 7 is stored in the side chamber on the right side, and the washed matter to be hit is stored in the soaking and washing. The state of the ministry. Fig. 9 is a flow chart showing the first embodiment of the present invention, showing a state in which the side chamber on the left side is transported to the reference chamber, and the upper and lower transport mechanisms are transported to the outside. Fig. 10 is a flow chart showing the first embodiment of the present invention, showing a state in which the object to be washed is transported from the side chamber on the right side to the reference chamber. Fig. 11 is a flow chart showing the second embodiment of the present invention, showing a state in which the dedicated immersion washing portion is not provided, and the side chamber is also used as the immersion washing portion. [Description of main components] 1 Reference room 2 Cover 3 Entrance and exit 4 Cover 5 Up and down transport mechanism 6 Immersion cleaning unit 7 Washed objects 8 and 9 Side chamber 11 ' 12 Horizontal transport mechanism 13 and 14 Air cylinder 15 ' 16 Auxiliary Mandrel 16 323394 201221232 17, 18 Mandrel 20, 21 Connecting plate 22, 23 Mounting rod 24 ' 25 Opening 26 ' 27 Blocking wall 28 > 29 Mounting part 31 First opening and closing valve 32 Second opening and closing valve 33 3 opening and closing valve 34 fourth opening and closing valve 35 condenser 36 pressure reducing mechanism 37 fifth opening and closing valve 38 sixth opening and closing valve 40 condensate storage tank 41 seventh opening and closing valve 42 eighth opening and closing valve 43 ninth opening and closing valve 44 steam generating mechanism 45 10th opening and closing valve 46 11th opening and closing valve 47 12th opening and closing valve 48 Heater 50 Level gauge 201221232 51 13th opening and closing valve 52 Storage tank 53 Cleaning liquid 54 Vacuum breaking valve 55 Base plate 56 Cleaning liquid management tank 57 Liquid supply pump 58 damper 59 15th opening and closing valve 60 16th opening and closing valve 62. 17th opening and closing valve 63 18th opening and closing valve 64 19th opening and closing valve 65 20th opening and closing valve

Claims (1)

201221232 七、申請專利範圍: 1. 一種被洗淨物之洗淨裝置,係由將能以蓋體密閉及打 開之出入口設置於上端之基準室、配置於此基準室外 周且能與基準室連通及阻斷之1個或複數個侧室、使 被洗淨物進出前述基準室之上下搬運機構、配置於前 述側室並能將已搬入基準室之被洗淨物搬入側室内或 搬出至基準室之水平搬運機構、及連接於此水平搬運 機構,能連通或阻斷侧室與基準室之阻斷壁所構成, 於基準室及側室,將蒸氣產生機構、減壓機構、洗淨 液供給機構之全部或1個機構予以選擇性的連接,並 且使用溶劑進行被洗淨物之洗淨。 2. 如申請專利範圍第1項所述之被洗淨物之洗淨裝置, 其中,基準室及側室係以耐減壓性之真空槽所形成。 3. 如申請專利範圍第1項所述之被洗淨物之洗淨裝置, 其中,在基準室之下端,係形成浸泡洗淨部。 1 323394201221232 VII. Patent application scope: 1. A cleaning device for cleaning the object, which is provided in the reference chamber which is provided at the upper end by the inlet and outlet which can be sealed and opened by the cover body, and is disposed on the outdoor circumference of the reference and can communicate with the reference chamber. And one or a plurality of side chambers that are blocked, the laundry is moved into and out of the reference chamber, and is disposed in the side chamber, and the laundry that has been carried into the reference chamber can be carried into the side chamber or moved out to the reference chamber. The horizontal transport mechanism and the horizontal transport mechanism are connected to each other to connect or block the blocking walls of the side chamber and the reference chamber, and the steam generating mechanism, the pressure reducing mechanism, and the cleaning liquid supply mechanism are all provided in the reference chamber and the side chamber. Or one mechanism is selectively connected, and the washed matter is washed with a solvent. 2. The apparatus for cleaning a laundry according to the first aspect of the invention, wherein the reference chamber and the side chamber are formed by a vacuum chamber resistant to decompression. 3. The apparatus for cleaning a washed object according to claim 1, wherein the lower portion of the reference chamber forms an immersion washing portion. 1 323394
TW100130845A 2010-11-16 2011-08-29 Cleaning device for object to be cleaned TW201221232A (en)

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JPS63184335A (en) * 1987-01-26 1988-07-29 Nec Corp Washer
JPH0652976U (en) * 1992-12-22 1994-07-19 株式会社北村製作所 Cleaning equipment
JP2757102B2 (en) * 1993-03-15 1998-05-25 ティーディーケイ株式会社 Clean transfer method and device
JP3273339B2 (en) * 1993-04-22 2002-04-08 光洋サーモシステム株式会社 Degreasing cleaning method and apparatus
JP3171807B2 (en) * 1997-01-24 2001-06-04 東京エレクトロン株式会社 Cleaning device and cleaning method
JP3341148B2 (en) * 1997-12-19 2002-11-05 東京エレクトロン株式会社 Cleaning / drying processing apparatus and cleaning / drying processing method
JP4608748B2 (en) * 1999-08-05 2011-01-12 東京エレクトロン株式会社 Cleaning device, cleaning system and cleaning method
JP2002170823A (en) * 2000-09-19 2002-06-14 Hitachi Kokusai Electric Inc Apparatus for manufacturing semiconductor device and its manufacturing method, and covering member used for it
JP2004263206A (en) * 2003-02-10 2004-09-24 Fuyuutec Furness:Kk Heat treatment device
JP5237133B2 (en) * 2008-02-20 2013-07-17 株式会社日立国際電気 Substrate processing equipment

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