TW201218218A - Transparent conductive film and method for manufacturing the same - Google Patents

Abstract

The invention provides a transparent conductive film having excellent resistance stability and pen input durability when it is used in a touch panel under high temperature and high humidity condition, as well as provides an effective method for manufacturing the same. The solution of the present invention is a transparent conductive film which is formed on at least one side of a transparent plastics film substrate by laminating a transparent conductive membrane. The said transparent conductive membrane not only comprises an indium oxide, and further comprises at least 0.1 to 5 mass% in average of a tin oxide, and at least 0.1 to 5 mass% in average of a substance selected from a specified substance group, as well as the specific resistance of the said transparent conductive is in the range of 4*10<SP>-4</SP> to 2.5*10<SP>-3</SP>Ω.cm.

Description

201218218 6. Technical Description of the Invention The present invention relates to a transparent conductive film in which a transparent conductive film mainly composed of indium trioxide is laminated on a transparent plastic film substrate, and a method for producing the same, and in particular, A transparent conductive film excellent in resistance value stability under high temperature and high humidity conditions for use in a touch panel for a car navigation system for automobiles, and excellent in handwriting input durability, and an efficient manufacturing method thereof. [Prior Art] A transparent conductive film having a transparent and low-resistance film laminated on a transparent plastic film base # is widely used in, for example, a liquid crystal display and an electroluminescence (EL) display by the same conductivity. Applications such as flat panel displays and transparent electrodes for touch panels, etc., in the electrical/electronic field. In recent years, due to the spread of the car satellite navigation system with a touch panel, a transparent conductive film having a small change in resistance even under high temperature and high humidity conditions of 85 ° C and 85% R.H. Further, a transparent conductive film excellent in hand resistance and excellent in durability was also obtained. For example, the resistance value of the transparent conductive film under high temperature and high humidity conditions of 85 ° C and 85% RH can be obtained by dividing the resistance value after the high temperature and high humidity stability test by the resistance value before the high temperature and high humidity stability test. The value of the reliability coefficient is expressed. The reliability coefficient is desirably in the range of 0.8 to 1.2. On the other hand, the handwriting input endurance test was conducted by investigating the sliding portion and the electrical characteristics after performing a linear sliding of 300,000 times with a load of 5.0 N. If the appearance and electrical characteristics of the sliding portion are unchanged from those before the handwriting input durability test, the test result is considered to be good. A transparent conductive film having a good handwriting input endurance test result is known as a crystallized transparent conductive film. A method for making the reliability coefficient close to 1 under transparent conductive junction crystallization has been studied (refer to Patent Document 1, 4/56 201218218 '~ 2). Although both the patent documents 丨 and 2 agree that the transparent conductive film is a junction = handwriting, the durability is relatively excellent. However, in these patent documents, the resistance value of the transparent conductive ruthenium film under high temperature and high humidity conditions is as follows. . For example, a film having a reduced heat shrinkage rate by heating a plastic film substrate before film formation of a transparent conductive film is described. However, in order to add the plastic film substrate before the film formation, the heating step is not required, because the number of steps is increased. Zha, the transparent conductive film contained in the patent document, at 85^2, after 〇〇 hours The resistance value is an unprocessed resistance Η _ ' (the reliability coefficient described above is about 2), and the stability is not sufficient in the case of high temperature and high humidity conditions. ', the resistance value of the patent read 2 towels, recorded in transparent conductive = electrical _. However, when the transparent conductivity is formed by the transparent method, the film is discharged from the plastic film:: the cookware is empty: (nitrogen) / (argon gas + nitrogen gas fixed 3GGG ~ l3_ppm is It is very difficult. No slaves are controlled in the patent field 3, and the use of the transparent conductive composition of the present invention is repeated, which is equivalent to the use of the transparent conductive property in the patent document. Note = wet condition 8VC, 85% RH change is not high: literature 3. The middle is added with nickel in m3, the value is two = less, but in the special: degree, 〇: C, film forming gas only There is Ar. In this condition ":, the substrate / dish dampness condition 8rc, 85%, in the high. S lies in: If the transparent __ substrate is changed, it is large. When it is filmed Water and organic gases; produced in large quantities, and: 2=

5/56 S 201218218 The order of the heart is about the unstable and inhomogeneous transparent guide. The transfer film is lack of handwriting input durability due to amorphous:: If:: The temperature is still wet. 4 big. Moreover, m T ] resistor 値 will increase with time ^ ^ If the material is not reacted when the wire is used, the milk gas will cause the resulting transparent conductive film to be oxygen-deficient (4) 〇 xv〇en ddlc eney) part of the transparent conductive Membrane, such a transparent guided thunder film is lacking in the quality of the handwriting, and if it is placed under the high temperature and high secrets, it will be reflected by the Wei defect part, and the resistance value is two corpses. Increase. In the case of the transparent conductive film of Patent Document 3, it is confirmed that the resistance value after 85°, 8)°, Η., and ι_hour is the initial value of 5 仵 or more (the reliability coefficient is K5 or more. ), in high temperature and high humidity conditions; - = stability is not sufficient. χ ‘ When the transparent conductive core film of Patent Document 3 was used to perform the test of writing and translating humans, the white part of the pen was whitened, and the characteristics were significantly deteriorated. 。 。 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ SUMMARY OF THE INVENTION [Problems to be Solved by the Invention] The object of the present invention is to provide resistance value stability and handwriting input endurance under high temperature and high humidity conditions for a touch panel in view of the above problems. A transparent conductive film excellent in properties and efficient production thereof (means for solving the problem) 6/56 201218218 The present invention is based on the above-mentioned situation, a transparent guide _ and a branch material; ]. A transparent conductive film, complex composition. The layer of the material is laminated on at least one side of the material: the transparent plastic film-based film is characterized in that it has a transparent conductive conductivity, and at least contains an average = except that it contains indium oxide at 0.] to 5% by mass. The specific resistance of the emulsified tin and the average bright conductive film of the material &quot;in/° is 4χ] (Γ4~2 _, the substance of 3) and the permeable group A: oxidation, oxidation, molybdenum, oxidation Tungsten, oxidized $, ^ ·, bismuth iron, nickel oxide, oxygen, gold, rhyme. Now Wei, oxidized, chrome oxide V oxidized material 匕 ==:? It is to be noted that: in addition to the transparent conductive film card containing at least the average 〇] indium difluoride, the transparent conductive transparent film contains at least

The selected material, in addition, the : / / / from the substance group AA secret addition amount relative to the penetration: work:: two selected items are reduced, and the surface side of the continuous or stepwise release of the substance 2% by mass or less:: Berry/° or less on the side of the transparent plastic film substrate, and the selected one of the substance group a: d: contains 0.5 to 5 mass denier/, from the addition amount, 曰' The addition of the bucket σ system to the surface side is 0·4~2.5,%·(10). The specific resistance of the transparent conductive film is material group A: oxidation, gallium oxide, iron oxide, oxidation

7/56 S 201218218 Steel, gasification town, gasification, oxidation, 匕, 氧化, oxidation, violent, gold, in white. 3. The transparent conductive film according to item 2 or 2 above, wherein the transparent conductive film has a thickness of 1 〇 2 〇 () nm. And ux 4. A method for producing a transparent conductive film, which is a method for producing a transparent conductive film in which a transparent conductive film is laminated on at least a surface of a transparent plastic ruthenium film substrate, which is characterized in that it is formed by a ruthenium method. The film, which is used as a raw material of the transparent conductive film, (4) (4) :: In addition to containing indium oxide, it also contains 〇. 5 mass: and G 5% by mass of the substance selected from the substance group A, = 2 2 pieces The above-mentioned _ material, the amount of the material selected from the substance group A is high, and the amount of the material selected from the second film substrate 'and finally used for film formation is equal to 2 : 'And, the amount of the substance selected by the material mt contained in the material for film formation is: 0.5 to 5 mass % of the film is added, and the transparency is = The substrate temperature is _60~50〇(:, and the conductive film is used for ruthenium, 5\ using oxygen rolling as the 夂U raw rolling, the milk rolling partial pressure is ..0 3 substance groupΑ : Gasification button 5 ϋ 10 Pa〇 oxidation pin, tungsten oxide, atmosphere, iron oxide, oxidized bromine, manganese oxide, gold, platinum. Emulsified chrome, <Effects of the Invention> According to the present invention, it is possible to provide a film having a high electrical resistance at a high temperature, a film having a high resistance value, and a film which can be efficiently and efficiently obtained. Transparent 8/56 ¥Electrical film, board, etc., λ, in the car satellite navigation system with touch μ#: extremely useful [panel and other touch surfaces [poor way] <1 ♦ ♦, invention The form> The transparent ^$ exposed film substrate at least - the surface of the bank is transparent, the ten right Τ has an average 〇 1~5 temporary gas, transparent conductive film: and ~ 贤" / bis from:: Yi' and Qianming's conductive film contain at least the outer part, f + Becha/〇 under the material group 纰A from ^, the main pair of thin and fat-like life π γ γ sound ancient a, the material in the middle. This self-material = skill The substance selected from the substrate side of the transparent conductive film contained in the second:=, conductive two plastics than the material selected from the table rhino 3, the material selected from the material is 4X10'^^.5~5 mass %, and the specific resistance of the transparent conductive film = oxidation to Ω., Cm. More preferably contains an average of 0.2 to 4.5% by mass. The mass of the group F is better than the average Ο .2~4 '5 quality denier 0/, the self contained, preferably the surface layer: transparent below. Also, the amount of the substance added is 1 quality =

[The self-object ===, _ film contains 4·5 mass 0 / 〇. In addition, the penetration, the shell of the bucket is more than 1 〇, 4~2. G coffee 3Q · (10) range film specific resistance is better in the 4X substance group A: oxidation, oxidation &quot; molybdenum, tungsten oxide · 'Emulsified iron, nickel oxide, manganese manganese, gold, turn ''4 lead: oxidation, oxidation, oxidation in order to produce resistance values under high temperature and high humidity conditions of 8rc, 85% RH•

.9/56 •S 201218218 A transparent conductive film with excellent durability for women's foot and handwriting input is preferably a transparent conductive film having the following structure. That is, a transparent conductive film having excellent chemical stability is disposed on the side of the substrate of the transparent plastic (4), and then the composition of the laminated material is continuously or stepwisely extended to the table (4). The transparent conductive film excellent in chemical stability plays the role of maintaining the stability of the resistance value under the condition of 8rc, 85%rh: plus J. Excellent physical durability: = Potential electric thief, and the composition of the transparent conductive film which changes the composition of the film thickness direction continuously or stepwise, and can maintain the durability of the handwriting wheel. The reason why the transparent conductive material having excellent long-lasting property is disposed on the outermost layer is to prevent deterioration of the outermost layer portion/knife abrasion of the transparent conductive film in order to perform the handwriting input durability test. In addition, the reason why the "m" is continuously or gradually changed is to give a reason for maintaining the durability of the handwriting input, and the "transparent conductive film having excellent needle stability is explained. First, the butyl bismuth (indium oxide. tin) is described. ()) The transparent conductive film in the 85, c, Η, the temperature and high humidity conditions τ resistance value changes. If the · · = = electric film set ... Germany high temperature and high humidity strip; = two lead = 亍 oxidation Oxide-based transparent conductive film 22; 若 Γ If the transparent conductive film is oxidized, the oxygen deficiency is reduced, and the electric conduction will deteriorate. The transparent conductive film is preferably broken; the chemically active knife of the oxygen defect and the lining of the moon is reduced or the part of the material is exposed to high temperature and high sound; Leading; sex, = part of the salty i-profit 4 | silk height &gt; s high * Wei τ is an effective strategy here to limit the transparent conductive film to ίΤ0, to illustrate the reduction of chemical 10/56 201218218 - activity Part of the exposed part of the high (four) wet active part is exposed to high temperature (four) ^ method ^, less Indium in chemistry and chemically stable ^f brother 'addition is not easy to insert I 〇 _ _: If the above substances are added to = two two: due to the grain boundaries and surfaces in the film. The result ^ can prevent lT 〇 C, 85 / ° RH C, 85 〇 / 〇 RH high, the surname /, 虱 and water seeking reaction under the conditions of south temperature and high humidity, in the case. , JT's resistance value is very good. The conductive film is used in 85 g .. O' to ask the resistance value under the wet condition stability 纴 | f wrong by the material group A towel , fruit, C, _.H. high temperature and high humidity strip: two = 4 85. Group A is oxidized, oxygen resistance value is good female genital: materialized crane, oxidation, oxygen oxidation record, Oxygen, oxygen, and pin. Special day ^ / 匕, chrome oxide, oxidized violent, gold, when effective?: Chemical: nickel: molybdenum oxide, palladium oxide, chromium oxide. For phase and surface, etc. Can be == .C, 85% RH height::: strip: the reaction with oxygen and water. At 85. The reliability coefficient is value stability, if it is mentioned later, ΒΘ ^+, .2 can be compared Good and satisfying. 夭/ Cloth School good stability of the transparent conductive film in a left ΓΤΟ:, group "was selected from F, preferably in the: == reinforcement. A transparent conductive film which is excellent in physical durability and is crystallized. This Bu: = said the definition of 'simple electric film. When the transparent guide is not crystalline at h, it has a polygonal shape. The transparent conductive film layer is observed under an electron microscope ^ ^ f ^ MM W ^ ^ttot 150 t 4 # &quot; 〇^ is .00 0'50 h The bright conductive film is called U/56 s 201218218 Jing Jing, and the method of comparing the crystal part to the crust part can be calculated from the area ratio of the crotch portion to the non-claw portion when the sub-mirror is inspected. As a better condition for making ruthenium (4), it is possible to reduce the amount of addition of substances other than oxidized fine. From the transparent conductive film with excellent properties, in addition to containing vaporized marriage: tin and the material selected from the group of materials f', the force has emulsification, so it is not easy to become crystalline. _Chemical stability and physics Durability, and only the surface part of the monthly (4) is crystalline, and the transparent plastic thin gland base material side is made of _ _ 1 〇 fully added optional material of the amorphous film, - The handwriting and the long-term test, the $ is fully added with the substance selected from the substance group, and there is fear that the transparent conductive film is completely peeled off. Therefore, we will concentrate on the research of the combination of chemistry and health. As a result, it has been found that a transparent conductive film is formed by continuously or stepwisely reducing the substance selected from the substance group 往 to the surface layer with respect to the film thickness direction of the transparent conductive film. The amount of the transparent conductive film on the surface layer side; the amount of the substance selected from the substance group A is 2% by mass or less' and the self-substance group A contained in the transparent conductive film on the transparent plastic film substrate side The amount of the selected material is more than 5 to 5 mass% of the transparent conductive film added to the surface side. Since the amount of substances selected from the substance group A is large, the transparent conductive film on the side of the plastic film substrate mainly serves to enhance the chemical virginity. Then, 'the transparent conductive film on the surface side which is added by the crystallization of the substance selected from the substance group A t is small, and the amount of the substance selected from the substance group A is continuously or stepwisely reduced to transparently conduct the transparent conductive film. The film is formed into a film. 'The internal stress is accompanied by BB彳 in the vicinity of the laminated interface of the transparent conductive film. Accurately accumulating '* increases the hardness of the transparent conductive film as a whole 12/56 201218218 -, which greatly improves handwriting wheel entry durability. It is understood that the transparent conductive film can achieve both chemical stability and durability. 'In one invention, 1 transparent conductive _ contains less tin oxide than 彳 - , which may cause a specific electrical limit greater than 2.5 χ 1 〇 -3 Ω · Cm 虞, : ^ think. In addition, when the tin oxide contained in the film selected from the substance selected from the substance group A is more than 5% by mass on average, the surface layer side of the transparent conductive layer is likely to be amorphous. Write a round, shouting is not very reasonable. More preferably, it is a transparent tomb + 〇Λ ”' ', and the tin oxide Γ Γ Γ Γ 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 若 若 若 若 若 若 若 若 若 若 若 若 若 若 若 若 若 若 若 若 若 若The average material is less than the self-substance group of the h, and the coverage of ITO is “==: the material selected from group A in group A is equal to the material group A = the film contains f love filling The ratio of the ratio of _: 1%, the transparency is 仏, 〇 Ω · cm, in practical two. It is more preferable that the transparent conductive film is used in the group of materials that are ignored by the \ 戟 戟 戟 戟 戟 〜 〜 〜 〜 〜 〜 〜 〜 〜 〜 〜 〜 〜 : : : : : : : : : : : : : : : : : : When the electric film is not "% by mass", the surface of the surface layer is not too large. It is not selected in the light-sensitive conductive film selected by the handwriting input durability, and the addition of the sapphire is set to 1% by mass or less. The material from the soil, the material group of the Tianming plastic film substrate side, the addition of the Cheby shell, the thickness of the Charpy table, the thickness of the f*〇/〇^ ^ is reduced, so that the internal shoulder force is low, and the hardness is also Reduced. The result is due to handwriting input

Ϊ3 /56 S 201218218 ~ Not ideal. If the amount of the material of the transparent plastic film substrate is more than that of the surface layer, the crystal lattice which is closer to the layer interface m of the group A in which the conductive film is selected is used to increase the permeability and the stress is concentrated in the transparent layer. When the conductive film is trapped and the internal handwriting wheel penetration durability test is increased, the transparent conductive film is easily damaged, and the defect in the inside is not preferable. Further, it is more preferably transparent and has a low durability, and the material selected from the substance group 8 is more than 1 to 4.5% by mass. In addition, the surface layer of ¥ t 恻 恻 恻 恻 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 85 In penetration 2::

The conductive film made of transparent conductive film is thin [the raw material of 7 H electric film becomes transparent conductive mass% tin oxide, and (Μ quality; Bu, also contains 〇·卜5 using 7 Η , , , L... The substance selected in the negative group A, the material is clear. (4) The edge-sputtering target 'from the substance selected from the substance group A is added to the scene." Temporary 1〇/, τ tt, 07 Film A material J· 〇, quality, sequential film formation in the transparent plastic group 2 tV is wider than the final film formation, the material selected from the substance group A contained in the material group A is 2% by mass or less, and the material selected from the substance group... =: From the group of substances most: into, splashing _ contains: shell 1, more than the last film formation ^is;; the amount of substances selected from the substance group a 沱, and use -1 When the transparent conductive film is formed, the substrate temperature is _6 〇 〜5 〇] 0 七 40 _ 3 = as a reactive gas for film formation, and partial pressure of oxygen is used to form a transparent film. Conductive film made of 14/56 201218218. It is a transparent conductive material containing (5) to 5% by mass of tin oxide and selected from substance group A in addition to containing oxide. The original number of the film = the number of sheets used for the remaining material, preferably 2 to 4 #. The order of using the above-mentioned ruthenium plating is preferably from the mass of the substance selected from the group of materials . Preferably, the substrate temperature is ·2〇~(The preferred range of the nip point partial pressure of the film is 2.0Χ〗 〇-3~30x]〇-3Pa. =Uplift at 85T, 85%R, H. The resistance under high temperature and high humidity conditions is: 疋, ^2 input private, transparent conductive film in addition to indium oxide = lead 2 contains an average. ·] ~ 5 quality _ blasting, and the average ... mass% of the self-material The material extracted from the group A. in addition to the substance selected from the substance group A is continuously or gradually reduced from the transmissive side to the surface layer in terms of the film thickness direction of the transmissive electric film. Further, the transparent conductive material on the surface side contains the substance selected from the substance group 2, and the material selected in the transparent conductive film on the side of the transparent plastic film substrate is selected from the group A. The reason why the amount of addition is more than that of the transparent conductive film on the surface side is that the above is a structure of the transparent conductive film of the present invention. In the way of forming, the selection of multiple ^^ materials, and the film formation order of their sputtering targets, etc. 乂面#巴 in order to improve the high temperature and high humidity conditions at 85 ° C, 85% RH · stability and handwriting input endurance Preferably, the substrate temperature when the transparent money guiding film is used is set at -60 to 5 (rc. Here, the substrate temperature is replaced by the temperature of the warming medium of the cooler which is = plate temperature. Transparent: substrate and Different from inorganic substrates such as glass and metal, it contains many bases, etc. Therefore, if the substrate temperature is higher than 5 (rc, then the penetration = and water 15/56 of the pancreas will be applied to the 201218218 film, since it will be from the transparent plastic film base. The material emits a large amount of organic gas and water, and these bodies react with the transparent conductive film to obtain an unstable non-uniform transparent conductive film. Therefore, the stability of the resistance value under the high temperature and high humidity conditions of 85 ° C and 85% R.H. deteriorates, and the durability of handwriting wheel penetration also deteriorates. If the substrate temperature is less than 5 CTC, it is difficult to release organic gas and water from the transparent plastic film substrate, and a stable and uniform transparent conductive film can be obtained, and the resistance value stability under high temperature and high humidity conditions of 85 ° C and 85% RH can be obtained. And the handwriting input has improved durability. Because the substrate temperature is lowered below 6 (the C is a general cooler, it is not economically suitable. It is better to use a substrate temperature of -20~(Γ C. The reason is as follows. When the melting point is below 〇 °C, the gas emission is very small. Moreover, the minimum temperature of the general-purpose cooler is -20 ° C or more, and the economical surface is preferably -20 ° C or more. °C, 85% RH high-temperature and high-humidity resistance stability and handwriting input durability, preferably using oxygen as a reactive gas for film formation. If oxygen is not introduced to form a film, 1 butyl ruthenium film is easy to become an unstable membrane with a lot of oxygen defects. If the ruthenium ruthenium film with more oxygen deficiency is placed under high temperature and high humidity conditions of 85 ° C and 85% RH, the reaction is performed due to the oxygen deficiency. With the increase of time, the I-butyl film with many oxygen defects is not easy to become crystalline. If the handwriting input durability test is carried out, the sliding portion of the pen will be whitened, which is not suitable from the viewpoint of electrical characteristics. Therefore, in order to reduce the Oxygen deficiency of the membrane, especially the use of oxygen as a membrane for reactivity The thickness of the transparent conductive film constituting the transparent conductive film of the present invention is preferably 10 to 200 nm. If the thickness of the transparent conductive film is less than 10 nm, the film tends to become uneven, and the resistance value stability under high temperature and high humidity conditions and The handwriting input durability may be insufficient and it may be insufficient. Moreover, if the thickness of the conductive film is selected to be thicker than 200 nm, the total light transmittance is likely to be low and it is ignored. 16/56 201218218 The total light transmittance of the transparent conductive film of the present invention is preferably from 65 to 95%. <Transparent plastic film substrate> The transparent plastic film substrate used in the present invention is an organic polymer which is melted and melted. Or the solution is extruded into a film shape, and a film which is stretched and cooled in the longitudinal direction and/or the width direction as needed is thermally fixed, and examples of the organic polymer include polyethylene, polypropylene, and polypyrene. Ethylene glycol diester, poly(ethylene dipyridyl hexate), poly(p-propyl phthalate), nylon 6, nylon 4, Nai 66, &gt; 4 ruthenium 2, poly-imine, polyamine醢imine, poly-salt, poly- ketone, polycarbonate, polyarylate, cellulose propionate Polyethylene, polyvinylidene chloride, polyvinyl alcohol, polyether phthalimide, polyphenylene sulfide 'poly stupid _, 聚本乙知, aligning polystyrene, reducing rare polymers, etc. Among these organic polymers, polyethylene terephthalate, propylene terephthalate, polyethylene 2,6-naphthyl phthalate, and para-polyethylene An olefinic polymer, a polyphthalate, a polyarylate, etc. Further, these organic polymers may be copolymerized with a small amount of a monomer of another organic polymer or blended with other organic polymers. The thickness of the transparent plastic film substrate is preferably in the range of ΚΚ300 μm, particularly preferably in the range of 70 to 260 μm. The thickness of the plastic film is less than ΙΟμηη, and the mechanical strength is insufficient, especially when used for a touch panel. On the other hand, when the thickness exceeds 300 μm, when the thickness is more than 300 μm, when the touch panel is used, the pen load for deforming the film is likely to become large and is less preferable. The transparent plastic film substrate used in the present invention can be subjected to corona discharge treatment on the film without damaging the scope of the present invention: glow discharge treatment, flame treatment, ultraviolet irradiation treatment, electron beam Irradiation treatment ^ Surface treatment such as ozone treatment. 17/56 201218218 The hardened resin layer is formed on a transparent plastic film base material, and the transparent conductive film is formed on the surface of the hardened resin layer which is embossed and embossed. This effect has two main points. The second point is to increase the adhesion between the transparent conductive film and the hardened resin layer, and to improve the pen sliding resistance due to the peeling of the transparent conductive film by the pen sliding. The pen slide reduces the contact area of the transparent conductive film when it comes into contact with the glass. 'The sliding property of the broken glass surface and the transparent conductive film is good: 1 improves the sliding durability of the pen. The details of the cured (four) lipid layer are described as &lt;hardened resin layer&gt; 'a.

Further, the above-mentioned hardening type resin used in the present invention is a resin which is hardened by the energy of f, ultraviolet, pure shot or illuminating, that is, a polysulfide resin, (iv) acid resin S trimeric amine Resin, paste, and substance = main ingredient;: Lai Lai 4, preferably by (4) line-hardening type Shusaki = UV-type resin of this type, for example, multi-functional (four) or f-based Aromatic styrene resin propyl isocyanate, polyol and acrylic acid or yttrium ~ σ from the second of the multi-functional amine carboxylic acid acrylic acid core / di- entence t and other polyfunctional resins added monofunctional monomer, Example == in the squama _ 1 base called acid W, benzene (10) _ _; 1 B field base and 'in order to enhance the transparent conductive old amine disk ^ β force, the surface of the hardened resin layer surface == attachment r: r For example, in order to increase the force, the base, the glow = discharge, the discharge treatment method, the chemical treatment method such as acid or treatment for increasing the amine group = light or a group. ^ pole base, etc. pole 18/56 201218218 UV-curing tree is usually used to add photopolymerization as a photopolymerization initiator, π μ tanning agent. "Ji's public;; JL all, using the extra-operative line to produce a variety of benzoin, benzophenones, diphenyls starting from the beginning of the amount of addition is usually better than 00 quality, small. 】 5 parts by mass. Berry ^External hardening type tree, in the hardened resin layer of the present invention, in addition to the main hydrazine, a small amount of the matrix-hardened resin = eutectic resin is used to produce phase separation, which will be non-phase. The solvent-dissolving resin is dispersed by a particle knife. By dispersing particles of the non-coherent resin, irregularities can be formed on the surface of the hardened type of the tree, and a wide range of surface particle size can be improved. - The hardening type resin is the ultraviolet curing resin. In the case of the g-phase-soluble resin, poly-lipid, polyglycolic resin, polystyrene-based resin, polyamidamine resin, etc. are exemplified. In the present invention, an ultraviolet curable resin is used as a curable resin. The hardening type resin of the main component is high in use as the high-insoluble moon-shaped μ which is incompatible with the hardening type resin, and the t±丄 门 刀 千 千 千 千 千 千 千 千The mother (10) parts by mass of the ultraviolet curable resin has 01 to resin, more preferably 0 .2~1Gf parts, particularly preferably 〇5~5 If the amount of the above-mentioned polyester resin is 1 〇〇 = less than: : parts by mass 'is formed in the hardened resin =::: pen '^ has convex The tendency of the salty ^' method to improve the surface roughness 'cannot be expressed' is more difficult than the step-by-step improvement effect. On the other hand, when the amount of the polyester resin is more than 20 parts by mass per 10 parts by mass of the ultraviolet curable resin 19/56 201218218, the strength of the curable resin layer is liable to lower, and the chemical resistance is likely to deteriorate. — In addition, the polyester resin has a difference in refractive index from the ultraviolet curable resin, and has a tendency to increase the haze value of the curable resin layer and deteriorate the transparency, d仏. On the other hand, the anti-glare film which is caused by the high-molecular-weight polyester resin/knife tip t can be actively used as an anti-glare machine having a high haze value. T1 The ultraviolet curable resin, the photopolymerization initiator, and the high molecular weight poly=resin are obtained by dissolving the co-touch solvent to obtain a coating liquid. The use of (4) is not particularly limited 'for example, it may be used alone or in combination, such as ethanol: a solvent such as acetic acid (10), a butyl acetate solvent, such as a solvent, such as methyl isotopyl, cyclohexanthene, etc. The ketone system is a combination of an aromatic hydrocarbon solvent such as a stupid, a dimethicone, and a solvent petroleum brain. Equivalent; = concentration of concentration ' can be considered corresponding to the degree of coating method, such as 1 Ze. For example, the ratio of the ultraviolet curable resin in the coating liquid, the photopolymerization 20, and the total amount of the molecular f poly(tetra) fat is usually - other materials are added. The coating liquid is applied to a transparent plastic film base fabric method, a reverse gravure coating method, and the like. Here = cloth = cloth liquid is removed by evaporation in the subsequent drying step. The particle 2 == high molecular weight polylysate in the liquid becomes precipitated in the scorpion of the scorpion. After the coating film is dried, it is formed by hard-hardening resin bridging/hardening, and the two molecular weight polyester resin particles 20/56 201218218' are fixed in the hard coating layer. (4) = Forming a protrusion on the surface of the hardened type of lining =: The second degree of the axial layer is preferred. .] ~] 5 range of pottery. Further, in the range of 〇~10μ1Ώ, the thickness of the resin layer is less than a, and on the other hand, in the case of exceeding 5%, it is difficult to form sufficient protrusions. Hey. The shape of μη1 is less than that of the embodiment from the viewpoint of productivity. The present invention will be described in detail, but the present invention is not limited thereto. The various evaluations of the various examples are as follows. (1) The total light transmittance is based on JIS-K71 (b 'Using Nippon Denshoku NDH-1001DP to measure the total light transmittance.) Clothing (2) Specific resistance The α 4 fixed system makes the ' ^ 夂 oil (share) system L0test AMCP_T400. The specific resistance is obtained by multiplying the surface resistance by the film thickness obtained in (3). (3) Thickness (film thickness) of the transparent conductive film The film sample sheet in which the transparent conductive film layer was laminated was cut into a size of 10 = m and embedded in an epoxy resin for electron microscopy. The sample holder of the fixed ultra-thin slicer _'amie coffee me' was prepared and made into a thin section of the short side of the sample piece of the buried thief. Then, the film of the sliced film is thermally damaged by the granule-type electron micromirror (assisted [company, 、, 20! 〇)] with an accelerating voltage of 2〇〇kV, and in the bright field (nine) Photographic photography was performed 10,000 times, and the film thickness was obtained from the obtained photograph. 21 / 56 201218218 (4) Temperature and humidity stability test In order to confirm the stability of the resistance value under high temperature and high humidity conditions, put it under the conditions of 85.. C, 85% R.H. for 1 000 hours. The temperature is managed at +2·τ, and the humidity is managed at d; 2%. Divided by the resistance value of 〇(8) hours at 85»c, 85% R.H· divided by 85. Under the condition of C and 85% R.H., the value of the resistance value (called the reliability coefficient) of 1 〇 (10) hours is placed to confirm the resistance value stability L. However, the resistance value after the temperature and humidity stability test was determined from 8 US dollars, ‘[, 85% R.H., the temperature and high humidity groove was taken out of the transparent conductive film, at 2^. After the state of % is placed for S 30 minutes, the resistance is measured. Reliability is the standard of (4) 〇·8~丨.2. ~ The input durability test uses a transparent conductive film as one side panel, and the other side is used on a glass substrate to electrically CVD*, with a thickness of 2 〇 · _ _ _ _ _ _ _ _ _ _ _ Tin content: 1% by mass) Transparent conductive layer formed (S5(]G) tb 2 panel made by Japan Soda Co., Ltd., transparent: 3: epoxy resin enamel卞乂F with f to make the touch panel. Then apply the load to the polystyred pen (front end, shape; 〇.8mmR), and perform a linear sliding test on the touch panel for 3〇5 people=back to I5禹) . The sliding distance at this time is set to , and the sliding speed is set to 6 〇 coffee / sec. After this sliding durability test, the first observation of the sliding portion was whitened. Next, the 0N resistance (movable electrode (thin film electrode) and the more time-sensitive resistance value) of the (4) pen ::: moving portion % was measured. (10) The resistance is preferably not less than Ω. More ideally] below OkO.

Determination of the average addition rate of the tin oxide contained in the material and the substance selected from the substance group A' 22/56 201218218 The sample (about 15 cm 2 ) was cut into a quartz flask and 2 ml of 6 mol/hydrochloric acid was added. In order to prevent the acid from volatilizing, the film is sealed. The mixture was occasionally shaken at room temperature for 9 days to dissolve the ITO layer. The remaining film was taken out, and hydrochloric acid in which ruthenium was dissolved was used as a measuring liquid. The dissolved solution, Sn, and substance group A are obtained by using the CP luminescence analyzer (manufacturer name: Rigaku, device model: CIROS-120 EOP), and are determined by the calibration curve method: the measurement wavelength of each element is selected. No interference, high sensitivity wavelength. Further, the standard solution was diluted with a commercially available standard solution of ln, Sn, and substance group A. (7) Measurement of the amount of addition of the substance group VIII in the film thickness direction of the transparent conductive film ESCA5801MC manufactured by ULVAC-PHI Co., Ltd. was used for the ash measurement. The material is placed in the measurement chamber after sufficient pre-venting. The evaluation was carried out with a photoelectron overflow of 45 degrees and an analysis diameter ^. Ions at the time of cooking: Classes use Αι* ions. The surface and the __composition ratio are different from the peaks such as the scales and the Anger peak, and the peaks with sufficient sensitivity are calculated. For example, & Publications 3d5/2, Ni2, etc. Further, the background value is based on the content of the material f selected from the material Α, which is calculated by the following substance group = substance in the arc. The surface of the transparent conductive film contained in the surface of the transparent conductive film is selected from the group of _, 疋-bean. Further, the transparent conductive material on the side of the transparent __ is equivalent to the measurement data at the time of (1) the thickness of the electric coffee maker (4). + &lt;The minimum value is less]m· Substance group A: Alumina (Al2〇〇, iron (10)), Oxidation record (called oxidized paste. 〇3),;=^ 23 / 56 201218218 +H(Hf 〇2), yttrium oxide (ZKV) m (CrA), oxygen system (called), gold uuw0 (8) iron (8) transparent guide film of the amorphous portion of the proportion of the crystalline portion of the electric 'gang layer pure _ cut into One size, the conductivity _ face to face, attached to the appropriate side. The technique of 苴 苴 祛 祛 一 一 一 々 々 々 々 々 々 々 ” ” ” ” ” / / / / / / 溥 溥 溥 溥 溥 溥 溥 溥 溥 溥 溥 溥 溥 溥 溥 溥 溥 溥 溥 溥 溥 溥 溥 溥 溥 溥 溥 溥 溥”, 1ΕΜ·2_ This slice, select the surface portion of the conductive film without obvious damage, and take a photo with a two-speed voltage fiber and a direct magnification of 40,000 times. Then, the crystal quality is observed under a transmission electron microscope. The area ratio of the portion to the amorphous portion. In the actual example and the comparative example, the transparent plastic film substrate is a two-axis alignment transparent enamel film of an easy-adhesion layer ( It is made of Toyobo Co., Ltd., Α434Α, thickness 188μηι). It is a hardened resin layer, which is 100 parts by mass of an acrylic resin containing a photopolymerization initiator (made by Otsuka Seika Co., Ltd., SE1KABEAM (registered trademark) EXF -01J) 3 parts by mass of a copolymerized polyester resin (BYRON (registered trademark) 2〇〇, weight average molecular weight 丨8, 〇〇〇) manufactured by Toyobo Co., Ltd., and benzene/MEK (as a solvent) 8/2: mass ratio) mixed The coating liquid of the hardened resin layer was prepared by mixing the solvent to the solid, and the mixture was stirred and uniformly dissolved to prepare a coating liquid of the cured resin layer. The coating liquid was coated with a wire rod (meyer bar) so that the thickness of the coating film was 5 μm. After drying for one minute at 80 便, the ultraviolet ray irradiation device (manufactured by Eyegraphics Co., Ltd., UB042-5AM-W type) was used to irradiate ultraviolet rays (light quantity: 300 mJ/cm 2 ) to cure the coating film. 24/56 201218218 (Example 1~ 119) -7. Further, the conditions for the production of the conductive film in each of the examples are as follows. The conditions of the common conditions described in the table examples are as follows: • The transparent plastic film is placed in a vacuum chamber and evacuated to 2 .Qxl (r4p introduces oxygen into the argon gas as an inert gas in such a manner as to become the partial pressure value of the emulsion, so that the total pressure becomes 〇.5Pa. /, W/Cm2 = power density applies electric power to Tin oxide-containing copper oxide sintered leather material, tin oxide-free oxide steel sintered dry material, or = oxidized steel sintered leather with material selected from substance group A, flat material = controlled plating method, coated with Hardening of transparent plastic film substrate = surface will be transparent conductive film At this time, in the manner of obtaining the 'two-two' method, as shown in "~7, various sputterings are selected to form a film. As for the speed at which the film is changed, the film is formed with a transparent conductive film. The film was subjected to measurement in each of the 12th generations. After the measurement, the measurement results were shown in Table 1. (Comparative Examples 1 to 124) The conditions of the dielectric materials of the recording examples are shown in Table 8 to 4. In the case of 124, the use of tin oxide-containing oxides and oxidized oxides is different, except that 'the fixed conditions described in the above examples are employed. The film in which the transparent conductive film was formed was placed on the mrc. The measurement of each evaluation was carried out. The measurement results are shown in Table 22~Tear 25/56 201218218 26 56 1 Η ί ί ί w —,1 H ί Η fr 5 5. fP 3: u&gt; 52 鸩r^ 5 Iodine?r· X c ? M ί 1 A i( i I job 5. O _ X —1 H it S ?! 11 1 V i »( if 5 r ί' t. P ή t, 严 P rr* r. r&gt; r- r: Γ Γ* Rr. rr t. s- ί nrtrnrrr* r· ¢- rr ε* R r KC fr· - λ t &gt;* t ?· it corpse, t* r (r &gt; i gi ^ ^ ^ ^ t; Λ r r1! »* * *1 m , Lu: rr U. «» »v &lt; « * ^ ~ »陬r r1! nr C ^ «: ^ -w篆*· * w. » »· » r pZ fnc: r r. ^ w. ►-» £ *,·minus &gt; » _ Γ· 0· C. tt 1.1 l- V £ * Λ Λ 1* »靡·*·,;· pp ς t K l&gt;vt^. ^ *Emirates, 姝^ » :ii r V. r P u. Ϊ· :;-·w _ 5 » ;· *· .· f *, C ?; r· £农r ^ » c , · i · • (a) r ?r P C. Λ ^ ^ P- F ^ « « 4 » * * or* Ϊ: «. Ϊ »&gt;&gt; *- ¢, * * « mmi· drrtfr z. 1 t ^ ΙΛ M Jj, »*. « « » · · / ϊ* ;rpr ^ rr Z. 5:ϋ E _ W爹« « « &lt; Λ * m i1· ^ .· pr ? r ς t ti E ·» j£ « « *1 t ··Bribe ί· ;··· rr $ η p ί δ〆u- u »· * m • * ·. V · / rf ^ ? r ς Ϊ JP. t L/. V&gt; ^ *·,·· • _·Chan/ ···· £ Ϊ.· r i-υ. ς * * * cj, w ^ - ϊ » « * ·, -;* nr ·Τ t ^ FF , t κ * «V ~螓i&quot;t*; t ί!? ί ^ is. ff £ ^ Λ rn fJ: ^ ·&gt; u. Rat 1^ ·ς »· »· m t. t -ί -· « • » ϊ-r -ί· Qin. η r Z ¢. t ^ --i: thief 氓 Mt ~ »靡:.:·, c: KE 蹰* m P 7»Z r σ £ K IT B ^ ί. IT &lt; Λ ». * · · · ;·, P ^ Si ε: -ί -1 * ** r C 1: ^ W ί. Beer fading: *- P tv· r Z, 5· RK ·- »-» » Λ ^ a; » » - σ ^ & ε u ^ minus _, · » ». ····———————— 1L 9C K »- ~ rf- c furnace f, K Lu flf A* 1 «c K w X· ·» · r p. Acoustic chbrp ^ rr π 炙 P P -.-* A : *jm • · / rr ”· rr^ ς, r $. ^ *&gt;·►·/ * * » » if/ r1 ς ^ Λ ,· Λ 〇in *; t · ^ • K *i K “ £· ' t β· Π k ,f\ ·&gt; - w ·» p rw V» C u&gt; - ,-/1 u - 'J\ f. tn c - ί 2. Ij s- i! ϊ ^ ^ r £ s: ε 5 t _ b c- · « «& »- τ cec (jc U· i· ;w • force c ί·Λ c&lt; ec· - s· ' β\ c (/. •c. -φ *; ϊ- 5 & m bu···&lt; •-Λ - weeec CM *A ~ w c- cec Ml £ • T b § kc· kccc C keccec· Ip fci ^ C wa &gt; ce 〇ο ? c — cwe “ e XO «. e &gt; e a. e ». o u. e *. • “ X • “ y. c· u- b know c know e *. u. b φ »; i *Production (/1 v&gt; Ut w» t/&gt; g C/l Ut (/1 1Λ vt = b » » •5» £ S· τ λ e IR ί* ( /&gt;c; LA z. β bed* =53⁄4 ·=·*/♦ C/l • • tn “ί =S2* t/&gt; * (X • ^ ^ e = S =5 β II R g K * s Κ» ss _s^ 1 * * &gt; two

201218218

5 % % s % % % S % 5 % % e ? Ϊ ^ ^ «以• From , ' u. ^ es ί ^ ¢- β V • * - If, - • • • * • V, Hi S^er Z to • * - ir. tr. V. «Λ V. • • U. 1/. (Λ wei wei S 5 % s 1/. *τ· xf. i/. 1/. % % % U, V If. tf. V· ^ βέτ'&quot; βί Φ b 乂c ··. &gt;; c &gt;: c ^9- -. έ ττ ·· L· ”··*, &gt;: « ^τ &gt; c — y. c ”· cc — e έ nc έ wc έ η C έ V ec , · e -τ — ^ tt cceeeeccce §? • *: =1= cc C c Κ) - ΙΛ V· cccc &lt ;*〇- V. ΙΛ心·, £|^ϋ c V. 5 «Λ r-ί eec ΓΊ· tr. c v&gt; ΓΊ ce CW i= S with zis ^ ^ J i * &amp; 15 (b) «/, «Λ f*» Μ. - IT. \f· fvj c IT. rM ci v. r-&gt; uv - V. 1/. often e哒峻崁史艺&quot;«· Λ2 觖S ' - - • ^.3⁄4 e英£ ^ g坺Sg • - • • • t»' 羾 soft s: ^ g or Xia V «哒«ί X ^ £ » 5Τ fe • • • * * ·· _: w ^ lc K ? « -g 5^ S 2 52 2 • • • • ^f¥,m 5: ~ -®S | ί 2 5 々安Ϊ: - 担 - * • * 埕 attack 5g *·«►!·« ^隹更^ r4 ^ g 提珀5 〇«Ο 525 迮 迮 Sg ?.-垤玟左~ eg $ g S 5 to • • 氐 笑 laugh r* r&gt;&lt; g $货3 〇·〇255 ·, _? g坺s ^ ··♦: ^ -埕This ♦·_:·« 〇s· ^ ^ g 5f JS S(一) ®ϊ # S &gt;P «ί篇;·· ♦· 〇*' r»4 *n ^ cc 5$ S Art ^ ^ ti*·· ~ 5 K ?' =' g §5 = s ·. S »: ^W 〇Igs .:53⁄4 ^ΡΓΚ §«-.«/· § Τ Τ; A) |52 &quot;Z·, §Step malaria 2 W * mm ^ Br » 2 ^ g Or car *S oJ X) 525 ^ W |C Contains - ^ $ S? 2 i? ^ s?·^ ^ K: « ^ ~ v, § s s ss *►· mm ^ κ » S? n v. g 5f S 5 〇〇5^5 P&gt;* r ϋ s to . Medium:·::ϊ g ®2 52^ ·:=»! ίί- s 3 5 ** βε 13⁄4 妄VV g Jf fee Zee *►'·:♦: ^ IE IK 5 η eg Ϊ ti 0 J〇Jj 525 ψ. m ? Μ «Τ. § ^ tέ Ί&gt; ee |C |K 妄fl -^ 5f ic Ti 252 € Shen;·; e^ fc |Κ B IN IT. ^ !f « ess + »·:_ ; ^ le 5 r« »/·, 5 $ ti _ϋ 〇 522 似命成八为^忠茳S' ^ ¢) i? ^ Vf «► Forget, θ £i « •4 W w S Love S Right S •O 2 〇 3 3 O 2 毎ο: 2 % X) 5 jJ 5 x&gt; s 〇J sgj〇16? s «? if '安«? € jj s Square 2 〇J 5 e- X «χ S s 杳n 5: Cui J5 Ann jy ιΛ v£ e 丧 4f 卜rj 鸯s *r % 3: 隹*r % Έ. 5 «Ε ♦r #Κ 隹♦t -f*-J -5 201218218 ?3 Τγλ-3;: ^^^--45

Tryst Ηίϋ'-·

Hff's37 d ^Ic.*

^teM tut*· xv*&quot;1** ^^^1^1°^ Mfk^^-i^ tcrAILtcK) mi 芦 ILt rtn*· t„tcr*i tLUu 芦一'·*'&quot; kr -'t 爹EJ ml tuLr 己*ur*-2 ^u.*'* f-1^ **义-'•z *·^ κ -?' κ»^· -'&quot;k&quot; «-y IKivr &quot;'I&quot; lu'-r^t*-·^^tL*-1-M*^·iu''*'-**^ r let €--^ ^-L*·'-·* *^ Iku.丨5**^· rtrRv,M t^ 1-MA » ^ ηΛ.11·''*'*«# 9°' Ktciic--1*'00· Producing trAifi^ ^tti^'* ····'*'· % ^--^^-2^--lucuc---'-^ ILlcKliJS i-^ttts**^ &quot;-tti·0*?0' r-rR ^ ^ strict Itrs*··*35 t-nii-i u*-npEI-*- r”rr *3*is ^PK·-**-fat 5**- ^tc ΐ £viK ^tc*-3Mts '·卜r v-ert*s rlr*'5 ΪΜ- -''•, rc.1'-1·'··'*·1-- ^t'-ryo**-rl,'*-u'** &gt;c It. let 5*··»-

Production "-•ry··*-*-J^r*-C.2*IS ^Irt S*MS r-ri--1-·?0' ILSLtF'-l!·-1^:.^= .2----- 3--烚钇 furnaceΒΛ *u,-t-'5*,*?; ^-(^2^-^-rlc1·-*··^ --016-1-rtn ·-*··― rr rtcu·1i 513--4 η·^Γ ^ ^ luttilii-^^.^2--- HKEi 箄: ^tr*-3 V*

nitEy5·' lut^1-* tutE'iK tatEV·-·· lutK2*'· tut*·''-* lute y6 IT luti;2* 芦itt·-* lutEv7* t^t*·'1-* '· ^1:.142-^^ --:.441^-^ rlccs·''&quot;-·^ JLtttz*1** ^^=1^- ^---'--^ΡΛΑ^^^ '--^&amp;ΛΙ

Kivc ί Ϊ 1?: ^1:.^3-^--1⁄2 ^'-tri-'·'*·- ^^•-•••^ΚΛΙ -^=^1^ =.2 28/56 = :3-畛圯&quot;于*衮t.ii ίϋ '-'-__ '2 Art 3'^*·'**1'-5 81*&quot;6·^1* (sf-i _^__ &lt;£--(ί ·'0 1-1'-re) ϋ£*ΜΕ λ=ξ&gt; *2* take 6&quot; ii£!fts Λ^Λ-=10 list with one ^^-4= 11- *4*λβλ κ£*λβ •c^iiuuul》叶*£*鲥ft~ΛΛf&gt; 201218218 s 衫巴一s % ss S % % s SS % S sss S i ¢- ? c M s ^ F ¢- * • • V. * tf, s ? ΐ^δ • • • . 1/. • • • 1 « V. ie ? |EI ES5 ' • V, 1/, 1/. V, */. * *f, V. «/· %f· V, ^ s ? 铎 3 ^ ^ «5· s S es */. u. V. */, V. % s 5 Vi *f, ν· w Tr ^ f, C e — c. , ccce ,* cc Ί·· ^ fX c 1 cccccccc swallow e? , ♦: ^ er. c C ce ir - ΙΛ ΙΛ ccccr*·, - ΙΛ ir. • J s V 5 # test E fee i, 2 El r·) *r. f«4 If. c fM c = C r«i IT, fst w. co 〇〇^ 11: ^ w £ ^ ΐ #ϊϊ ^ ^ ; Εΐ:^ ΓΊ V, 2 V, Ki V. - *f. V, rM ci V. Γ4 \r, t*i M, - «Λ «Λ 窠瑶硌^ X κ客* • * 垆1C thick or X3 ^ * 1 • 1 - € ^ 5g e 哒友衽$: 叙* * - *· *: »\ W 5C » ?--g S' if s to * ' * • • • * ^3 ^S ^ mm » |c » 甚n _ $ Φ forced e *ί*ί s 哒 哒 哒 « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « iJ oJ 5^5 ^ IB s:-&gt; 玟c ^ 层玟5g &lt; ♦: _; ^ IC w ^ ^ ^ g S' stroll 2 4? g 5 5 - * * *« 5:-&gt ; 玟 玟 mm goods. "荇荇·^~ g玫ί2 152 __· K铒s;- 埕迮2^ £ times g $ ^.p-:m ^ «Ε; thick &lt;S &lt;*&gt; E^s^i ^ee *? 1 «f ·,·:_{ ^ er. w 'ζ m r&gt;J t H « 42 *〇-〇〇J 555 so ^ = I; _ ·, 5 * rs B·雄办基 A3, 占ί : 〆*? *··:_! ^ W »s § «·« ^ S : Brunei iJ OJ |55 5 ΓΛ β g $ ίί 5(一) ·_ »: # J? »NW, g :r rose 5 s β ·· ·,: ^ It Ic #^-s ίί ii 5^4? »: ·:: 隹.®C 5C ^ U-. g S' ii II 0 · 0 555 NC: SO 2 〇N. ♦: 醎β苒P: 交~ «/·. g or male % ee ·» e铒*c 5 *NN $ C = g ^ cs to 5 by It «κ ^ ^ ^ si? ^ 5 5〆 *►: Ϊ· »W »Wl tE **. ts ? &quot; ^ sf « ^ 5 3 * »►;« ^ w ic 5 «Λ «Λ g 5£ « &lt;&lt;&lt; ♦· _: Shen: ^ |K ft s ^ « § Τι i) 03 ^ ®ρ ΪΚ 5 ~ 5 ί « ee *?*? _ ^ » K gi£ 7; 03 252 Hi ^ » lc 5 N g 5ff « *〇03 ^ 555 «►: Φ5 ^ ®ε » 5 Π *Λ g 5ί霜&lt;CC^ /&gt;x 涂忠玫^ ^ e Press ^ K·〆忘e sweep " 4 v ^ s 5S •O £ ^ e 2 4t jJ 2 &lt;i !〇5 ίί 3 5 4i Jj 2 5 &lt;x, jJ 5 &lt;5 x&gt; 5 ίϊ x&gt; 5 « x&gt; 5 s A) 5 χ&gt; s ta o3 «? 45 Jj 3£ 5 尨Λ3 2 S ί: Vi 丧** Bu w. τ 坨κ GC If· 雀 雀 ?. 5 Cui S s ♦* r^ 5: 运 2 * έ s έ 5: se &gt; £ % SS 卜 SS QC Province #K c^ τ 琢|κ 兰 r r* 省 t» -¢^ °ί/6ζ 201218218 L3····· IT芩°·&amp; Η»·ϊ 年 5-1 ··- ιτ'ϊ Μ Ϊ3-· 鸩輙5· 『&gt;Ls'r rlr&quot; ^-^- fuc&quot;Production-·'&quot; ίο'-ϋ·

Jonid ·?&quot; IL1Lr· ^tLU **1 nu.e2 n.t'-ti K.ttr'*'- 声芦*··- ιο'-α^ ^lc.1 Vj ?''t: tutuf R-nt w ^Icu1-

Produce pr-^o*1 Ktc*·'-·* ^ M - % ts ILlcr ί-υ rtc-rs-··· rt&amp;^u.··-* ^-tri··&quot;&quot; rlci* c··-·1 i.?'ft5*: r^rh w rFl· C.2&quot;, production-''^1·-* rtttd* ^1'·ϊ·2,η rulki 5* wide trE Vi *1 t^ra1-* 芦1·5&quot;^* t. tr Γ e rtrt i.1rr·· w--^ri « household t'-fr·-* l;.:''r'5* rrr · vu- ^11.^5- r~nKs* ^••'r·*·&quot;*1 k.tr*-5* lLu.ii c.'-·1 production t'·丨—•-° ·* cu mr^rK. ^ Λ IL-ti-* tits·'·-production-to-t.-'-cfce--1 rtcRp'2-' Λρ ΙΓ:ΛΑ*Λ ^-4.^--. ^^^ ν* ( u^Eiik. £-^^^=^ ^ii^ijju t,icE^-nt-LiA]* rpt1-*·· ^It&quot;'*'·* ^tcfr·-· -· production tc*-'-- PC f Λ wr,.rf « Λ nlc^】® iutKy·-·**- 芦SK3 s*- IL-C'5·0-^ tutfc2 Ϊ*- r^K ^ tjtri-i^ 芦?*;2·&quot;*^ UJtrs·6··^· t^tEf*1*^·' lut*··-·1'·;., ^•FK. ^ tutpv ?-1*-^ kjttili iy κ ^ ^ C Λ &gt;-Kle'K^

Jutrs--# ^rf ^ » y strict trut*1*^ w-pr ^ ?*·2β*^ ^••'Lkd - urm ••K-M'--^fi&quot;^ --^-^- 1-13⁄4^ tut*·'--'·-/ latcv··'- iLfdi*·'·^ a芩μ4--&gt;:ελα R^XJU^ 30/56

Is-- {*»·,'·) 0MC- 1- t Λ ; &quot;^il-u-

44£#Λ8&quot;ftft=5J «w^^eh λ^^--ε- *4* Β0Β£*ΜΕ -4·*£*Λ &lt;==-- '3·呤 target i-fr* s ϊϋ Ξ ^ ^ Mf ,^T » (Ϊ··-) §

201218218 Ο (i·) ϊ/ΐτ&quot;- Sample i,l?K&lt;4 (ul-^.^w 样一铪/113⁄4. &quot;^^^r* -m-^^w wwf^^e · * -=-^^^ s^il^^ we:^'E^ (a) (%**=&gt; ετ(- 5 ••^^νϋ若尨&quot;-哒-联&amp;£ ( %*:*=) *; Go bite ^-4|, **&lt;e eK*w cup like it*

哲-.*45 IVs^a5l&gt;KfeE ^wwf^^csg^e ^WB^荦zKfeEl 2-si %¥软-03-^ ϋζ.ϋ^ΊΙΛίί %*;4ί·66δ^2 ^^^^- 51433⁄4. s Ϊ5 yt^fj'-gg-^· ίζ.Ξ ru

9S-C %*:w c5-^ s ia-u %*«*-906^^ Γ55 ^.^^55^^ 'άϊλι*-*' yc^Mib6-^ %**- 2-^3⁄4 % *:*=~*-^. ^^^^6^-^ %*8ca'^ &lt;c,^^ ^is &lt;c.^^ ^52 %*;Β&quot;-6εΊί %ϊ z41 &quot; ^Hziqns -••'s egg1-^ ?55·

Vo* %*; Z55 865-u ^^ilc58-^ e\«« ^ &amp; 5^5 % 明*1啪έϋϊ-β e/u*·&quot;?6'^ % %* Z 35 %* Az=a-^ in-5 '/.sobgqs c/, ί 41^-3^u· -1⁄4^3⁄4^^5^ ^-3⁄43⁄4^3^^. e/uiileiin'-u % ieu-a- ^· c/-iziu y'-'^iigg1-^ ϋ s^ipvb5-^ 2&gt;u· v-iiitz^qfu .&lt;ik iu IITiqfu %iitu'a~^ y.sfsqs %*:s'u41 %面&amp;~=*-^ g'^M'-cdgyu· ^^81^49 y-iMz.usq-·^ yo'^a'-r10·181-'^ 5^^-=41 ^55 ' %*:*&quot;-"68^^ %^BS Umbrella%*:&=& shipped~^ &quot; ίίκ r41 eN^K- ^S5 eN«^ ^ s $s &lt;c ^ w ^ ^ &quot;^ilzsiqi %_ο&quot;-·'6ιϋη5 %渐*1如^54^61^^ v-'iiit4-^ %*Child 2*'^ ebgqs SJi «s us^Ka]£ Umbrella-v-^ Wg ^-t^^fe^^ 25 2&gt;u aq5 a-*u aq5 5fu 16&quot;

Z-E ^ X2te-

R6-5~K ^ ί^. yGNi18*· κ6ϊί?κ 665«** ϋϋιι^κ X5W_- xsw^ l*5Jt s^.

SI I4A A 201218218 32/56

Tr stupid £ I Ϊ _

I ILtc*·· ^ Η· ^ ^ i ^ Λ εΛ&quot;'-·4.··ηϊ:· siu^tt. t,'K*^tcg;) ^t'-Fvb*·· Production.· { .^-1-1 rpfc - Λ

R'-r-纟·' ioc like JnEIK lut-ri* ^*''*•1* r 5 1i-i iucRy'-* luLt'-·* r'5-*s' r^rr ί Λrl* *s ^-•'r £&quot;lutt1-·* ^^-1- ϊ « Ju'·&quot;'--1 E'3w-sf A r5**i; riLUV-**1 ^5^53⁄4丨ru.2*··- rlttis* rl·^ i f'&quot;*ir tjcfc 玄6w EC-* Ec.2-t &gt;c tutc2*' iaj·1-1^ lutd·*··· lut1 ·''·-* luttN?-tutK1-&quot; lutK 吝*1Jutiii*ε2*-: ¢1-6^7-1-1^ lutfti**^' t-tii-i*''&quot;*^ R-rr « Μ rl»*^ tj'-t V7&quot;iy;Γ-·Π*·3Ϊ*&gt;Γ· ^-^-4-^^^^ idK-iofrfe-tli=3'吟本^妒*4 t &gt;sff'*titt-· (**%) £ ______

Say "5· (Ml 'T 4.0*10』 10" luu -=- 5* 4.1* *.!^^*&quot;ϋ^ίιΐιΜ . • w _ ^ JP; Λ^/ι-Ξ- w2*ftB&gt ; κ£*Λ®ί Λ^Λ-ΙΙ- *3*Shame 8&quot;1&amp;£半葙s Λ^/iunm) ^*£*Λ -1- -龙呤&βΛΕΛs #J»^.it&amp ;s (*&quot;'···) _β_

201218218 [8 Φ 5 5 % 5 5 5 3 % % % £ % ^ g = » te: c • • - • - • • i: s ? BC te'' c • • • ' • • - - • - - I =sn as w • • ec C * * • c CC * * ^ *· «^ •ε smoke ej· % % % C c C % % % 5 sc C c ?, 5 % e^&lt;Rb. έ ,········································· « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « · e test · C_ «» ^ liC ecccecc = cccece C = c. &amp; e §5 Τ |cc = ee V. r- «: C cccccw, 卜 =: c. Ο cc &amp; 5 W ί 爷, £费*. £ s*:5 W ^ - 5f eev£ κ) r* :: 2 V. 2 tr. NC &gt;e ... Γ·» d 2 V. 2 *r. ¥ fe ^ ^ ε ; Ec 'O &gt;c βς 〇· c 2 1/. 5 V, sS &gt;c oc c&gt; e 2 V. 2 «% poor year X 9i Ζί fe c ' . * ' • • * • ' 1 • • «ί ϊ: ^ £. κ: £ t • • • • • * • S ~ at 9i $ * • » Pi sf 5l r-« g * 2 525 ^ ^ ☆ i^i 5-2 - • ' ' ' ^ έβ NO 荦oc 辑&quot;Έ£ 5 55 ν〇,:·:ϊ ^|S ^ ϊξ 5 α&gt; e? 3 2*^ $, 〇次申: Si- 琪53⁄4 •Λ - ^ 2s ^ ^ • • iz 11 ί times* ^ S: = 埕轚e^ • ·! 卜. 居坺:s ·* ·: Ϊ *. f*J _ 5Sl ^0.m &amp;铋fe K f- ^ g 5f ίί 7} J3 〇3 522 *► ·:? i 2fe Ϊ !fsi%i 5〆ί-if 妄IS ^ ϊ 2 2*^ ^ir a ^ Layer 玟* m ^ 9f * ng 6 卜g « S 42 ^ v= ^ 3 ^ 2 〇* PG g2g 申»: s o-§ 5t S s to ^ 16^ *' * Ϊ: %%e *;·,! 5 «·· ^ e ^ ^ 2" 孩.le ·ι =-2^ O' c ω. 尽玫 5 » ;^·« 5 S » £ « 5 Z e ^ ε: ^ g 5f :se; 〆• ·; *. rj s; ® g 坎 52 *-« κ »ζ Write: s 25 |c ** fc p, W ^ ._ ? i- «5* ±?i 2 ·» ^ic W 氐&gt;C *Λ g $坊3 〇〇£52 贫&lt;&lt;:«^ /-SF ^ -di? fS ^ H- *? ^ €t 矣W w皮爱茛柔¥ ft Press % by K • O 2 a jj 5 i£. X) 5 a 〇3 5 £x 03 S 〇3 5 Si 〇J This Sf x&gt; 5 玟-0 5 Grave A3 Tomb 3 δ 〇3 s « •Ο 2 tef ” δ ϊί X) 2 AJ s Έ. Si τ ε Si ^3 , 2 jj ί s £ £ Si3 Si i? ec uJ O' % oj e 芏jj £ 士 5 i? X 5 π £ ΙΛ \£ s ^ 3 Γ- 5 宕αί oc s: if c 5 j3 5 X i 〇3 201218218 3t 56 η »*i 3» iCtX^i Λ' ilH S*f UL K Λ J&gt; tt«W 3J tt-ttwi 33 ti .WW 32 i 5 V· ~1 it tlm ^ itnvi 2v tinvi 2s i tLfiiW :' II :c.Wvi ϊι. λ Kin «. 2 ·* iC fiiPi 2J J Γ- 5 瓤d £ ! ij 良 ilU 二n L· fc.ica tLi^ar ί f* iy* ir P % *UL* IJ rn » ί Liang Yi I n » lL billion fiber 7[ V % KtcA 厶 buckled in this *H4 tu i χ ΐ - « ΐ uf έίΰ Κ ccUA t.tc4 ) ^ ff 1&gt;C KiL·^ » V 1 y; t.ica s tr 4 iLxti* ί | λ. :l M &lt;» ff ft λ! KV.U U. 2 V t a. tktcU &gt;$ VK:CAl 5 Ϊ l/t S 4 5*4 i^tL a u.2 κ A ^ JLVci* v: ϊ 43⁄4 Kx^iA 3 « · ^ ϊ I ?〇Kica % i% \ iLtcU V ti ILIC.U &gt;0.8 St% 1 Ktcaiil^or F r* ct r ^ » ·&gt; ^ *1 Λ1 Λ » ·· * 'fi.t V f ^0 U.2 ) Js^tcjti 6 vi *4?〇k. tt,»A Ϊ 4 good tc off S )( lu'ca 6 ϊβ?ό Vi% k.iLi*· ϊ M ?〇«.ica 5 II yv.8 490 i u.2 tf 190 H.»C«97 f 1% lt.1C.l4 3 f 111⁄2 t.ti.i-1 vu.B ii 496 t.tc^ ul « Μ i. ILIA Si # X:dii Iiw υ.2 W t&gt;〇rp T. f* r L&quot; » ·&gt;&gt; 5 ^ » * ^ ^ ^ ?; KtcU^.& ii *90 u.2 v «&gt;&lt;: | ^ICA6 V t^o Since 政初成《之»ULCd9t&gt;.S Ϊ曼私fcJUfc J β iiW fc.^c.il ui Hi% *&gt;7.8 Ϊ In 良化 « tU S i % Kitil2 9 fL G1 *i6.S Ϊ feiLiA uJ ί M &gt;,:, 钇化人! • 良化 iayb.5 s量&lt;1 iLita 3 ϊ i ^ Rolling up ίο i shy | | IUt:idy7.8 ii * ;?«: IU 匕 " IU w ϋ tL Huada 2 5ί Mbiayt..8 k* *Ubtt u.2 w * ?ϋ j lLit»ft.3 S f&gt;sj II with Π 2鬌成&lt;year 4妗' 3 .t dkUC or kf)d^M «lL j kik»(ua ί Λ % S.· κ it - X: mt ^ Αν E h ,Λ e ►js O £ dr. 〇· 〇Cft tjt c = -c oc O' Ft »iM ash-receiving diamonds u λ ιή拗W it plus B (ft%) (U) c ►V ·** u· c Vi (M 9 o U\ c- k> *&gt;&gt ; c s.· v&gt; K/ &gt; ». M (Ϊ*%) _uu ceeei IJ&gt; ceceec· s (/ ee » £, 5 will cccce έ έ c έ e- ΙΑ CO c 4. UxlUJ c &gt;= c © c 4.0x10J A. \ o i. 矣,4.0xiOJ eeu 4» X e 4.ϋχΐϋ3 4.0xl0J •“ c X ^.UxlO1 c *« c XA &lt;,1* t Pk M 3 5 5 Λ »掸·&amp;£·« Λ 烟 ? Μ 9 =S£ f* * • ό &gt; o ό e The thickness of the second layer into the ut of the conductive ( (_ll»J • • • • ^ ^ 1 g S . 1 • * • • 1 The fourth step is the total Λ »»»»»»»»»»»»»»»»»»»»»»»»»»»» Mentor «fli thickness of (IIIU) s 201218218 I I r-- - = * - eirviu -ul- &quot; ^ v $ ^ s

-=£^·^&quot; we^*cK

I-^ir&quot; ϊ^^ίΛΪΫΪ ve^^ZK =*-^||/&gt; «ve^^2

GoeM (%WK) §-(- ^&quot;£雀年&quot;衽矣= 哒4**3*苽 ^)^^^^^^^1

§ (%**) *4*5;&quot;^** £ν£·ΕΜ*如石本s (%Ϊ5 •&quot;^^vit^iv&quot;· (成-^·*6-*?;s0 ,^e) £ ❖-V^VWJU ^-ii^iife4^ i §sc 5 X % % % % % 5 % 5 s % 5 % • • * ' * ' - ' - - * • * * ' - ' * • * • eec * • ' • cc 〇• • * c % C ce % 5 % s % eec SX ••i X ··· X ”· X — ». CX 'Τ r· c X ·». c X *&gt;T 'Τ C «». cc ,· ·· e to . oc 兮· —· c ”· e — ·*. ccccc c. cee Λ ccc V. 卜 c C. c = S c V,卜IT. &amp; - e SS &lt;cm /N V. c rsj e V, r&lt;j w. \C \c Λ fM w. e rJ C tr. fM *r. sf oc 〇· c N V. N V. sS &lt;c oc O' o tr. MC If, * * 1 * 1 * 1 - 1 1 • - • • * ' ' * • • * • * ' • Ϊ化1® *c ss 2 ^ σ· ' 50 ε*| ^ ^ \o ϊ*=« 52® macro sc attack* ί ^ ^ :$ Ε g 5 « |S5 with so *. M ^ = 2 5 2^ S 3 «2 g &gt; * N ill 55^ V·.~— s 2$ i? 5 3 隹» s- ΪΓ buried 5 e ^ |BK «η g Si e 555 •••: 安隹 ir甲 ec _. c 2 ^ Its c 2 ^ S τ 5 5 $ ·〇? S 5f «? *w « ^ g:= II Office. Capacity? pt se jj e ☆ 5p *· m φ{ ^ ί= ?cg « «Λ ^ Ϊ ST) i) A3 525 ^ ^ ^ 2 C+5 ^ ?s 巧5 ♦· m ^ fC ΪΒ £ w, S* g ί Iff 5 i? i? ^ ^ ^ ·:·:鋈Φ; c 2 ^ 〇^ -r gs 5 so Os Np g·:Mc 5 ^ *4 O' r«* S =玟«?蚌£宏技术铒垣珑ee Take « « fs, ? * 埕 • • ig tsr IK ^ ^ &nbsp; = g S 5 *? 5 5 ST $ «? i£ a) 5 ëà ;〇2 〇τ Si C £ i? £ i3 «f jj 〇3 4 5 V. 5: £ jj Write s: r~ TX a3 ec s •i Σ Z 〇3 f. «5 7. % Si 〇3 £ aJ jp si o3 荃4ί 〇J tr. V, τ & A3 &gt;c Σ S 9S/- s 201218218 36 έ η 3 X -1 , i ·. Γ* Ζ 3 ! ί ί ο &lt; £ r Z 3 c* 4r ?r 5 c- FZ S. e*. c· s: ?, Z S. e* Z 3 ί s ε r- z 5 shovel 1 ,! 3 j 1 jl· Z 5. ?· z 3 Γ £ £ ···· r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r r - P Tr : n- 芦r Γ: f* i P r&gt; r »T o IT r » t *- r ^ β ? &gt; U ^· i? -h *r «► f P· i Z f 4i rr ” rft fc ^ t/· » 5 KKH) 1» » · Φ mm Λ • y » 〆:才.κ R ^ ·1_就Μ _ _ tr ? ί W 一 *雕» * ,:〆-: rl r J l. t *臧• » *-* y ** · i 11 Z- mmh, T, r ^ rn ^ t *· f » V. ζ *" * 1*·痛 Up»' iif- * *· ~ &lt;0. V7 * 1» 0, " rr r. r&gt; r cr tr » - s ^· *· Λ # # » Γ, - £ Γ 9 〇. t !&lt;&gt;/ · r ^ r ?; Γ, ϊ· ^ v. Poor _甙· * * r% r* y: ft ^ ite Λ jq _ _ r C «遽* 鸥» n ? P n fr^r- i^i • « Λ Jr ii ** * ” r Γ· r Γ: i; 1; ^ ? - ? β &lt; m ** s ί ϊ. £ c-^s w- S: f. i? 5; ^ g ε· S £ ^ Λ r RC n lli w Λ y y _ r. U pr ί ί ^ t- 5 * * » w °' to ^ £ E &amp; t ^ ^ « - e, v:: Π= ? ί1 ϊ?£: IB Ρ w e. • ν _ C: κ E ;:- S « L * β V- ^ » &Ό.: S f ! P e· Cao-be m*' ^ T ^ » 3c Λ K- flt 7Γ -X * tV bch 矢ά *r. K «&lt; T ^ H, im· c #►. ^ Vi b hi «. K «: K -2: * t P&gt;. % %. b Λ c •Λ ec &lt;£ oc O' 〇•/1 c- •j&gt; e. &gt;w C &gt;c ac 〇9 - C SL *. t Ά ff- :ξ. 〇-* ^ ¢-t··,卜l 二卜SB•J. c •Α ce w. K&lt; (» 〇9- 'J&gt; £ t\ c C iyi 1-^ w 9- O' Μ &gt;3· *· a 5 Ridge: τ Λ * Z »» 二^j AS drop-t ^ ^ t· 5 κ _ c β e- eeeio 〇c C C cec c- -J ·/&gt; e CC c&quot; _ 7 二云έ ee C c e- c έ c Z i Ξ έ έ i 2 #于. c ε £ W *&gt; | w | ? Ί | | • “ c «· | | C- ξ _ “ g | 1 5 φ 芦 t 9κ μ> ε M sssss 如 保 • ia £ fr 体 取 = Λ » ΐ β A* oo &gt; ό ό O私 Private SS i » ® - - ' • • ?S £ 3 κ * • • * * • • Λ ^ * •fr £ s Μ 5 MMM s •4 -β» It* 201218218 f &gt;^i/v6'垆«iub#^ β uz uz uz uz =z =z cz s

UZ uz uz s =z uz uz s -ul--J/.^w ve^*''*^'

VS^*CK -lu-^^w ιώ^ίΒΫΪ •''w!^*^^ {ioiii/w ――^--ΐ^ϊϊ '''芪坫-迮ί%'. -X5 'ul: = Lxu,p [a) &quot;tt s-- •u- ΓΙΓ) (%e:®) *;Name no VM, King £V£.CK*Hail*

(e) (%*&amp;&gt;*4ei&quot;iii*£v&quot;·, •ajwg'^-^feE 哒£££5 ^V^^W-'K^^ 哒&quot;How^5 fve^ ^cκ^ε swev^~K矣El ^«Kia#-^ se:Bu iqs '-♦^'•苫ι6ιί?ι&lt;? SJi· -iil-u^qTU 1-1*1^1·11' 10181-1^ 96^^-=^-3⁄4 ^^¢1-^6^^^ ^35 sss s S5 times **·b 6gq&gt;^ -*:wrusqni 1-1**·1·!^16 -^. 9w/.e [(NI &lt;1 province 6*^5^ **-*9«-^ ^ s ss -^E-ae-u·

^11^9^-^ -^Esbini-U ^^M-uisu '-^m si· s*:it-=s-^ '-欹极-==653⁄4 -15^=-=^-^ % &quot;·;&amp;·66δ-°5 -•''-^-u -'Ap^-us*:il-=sqni. -Load iy^'u ^·#ϋ·? Write J5 times ϊκys-u 2 si -*:B'f66-^ 90*&amp;9 绞-政-^itii-u ^^'iiss-u -κϊϋ^-θ s S2- 9gwM-=66^^ ^ΪΒΓΟ^ϋί- % *1-=&amp;8^^ submv^ K s S5 -•ίΜ-ό^ε-Ί* -•••左运-^ -Ifii'uiwqfu· -*βκ-·:65-^ -tws*- ^ ^**6&quot;®-^· (^'ucg^ ^-^4^43⁄4 fi-°&gt;*u

2J-U 8s*· ίηέ sq5 s-°5 sq5 su s-°2 ¢-3⁄4. 5^3⁄4. 52 x£ ^ &lt;&gt;-*&gt;钇- 08^^- ls-m- 2- }钇- fax-*-- 1--^14- ☆Σε- y«ss-* 卜-*&gt;*- κ« Χ£Λ= υ61*ε- 16 I4*- ~6Nm- q 201218218 i 1 : z ' ?. \ zl | i ! i ^ 1 ε : ^ 1 rj* 3. c 9 r Z 5: 5. k 5 c ί· ! r- •i ! srir !*« 1 » — l 1 P忠 c rr z X 邑in C sr 3 &gt; £ R 5 ί plant z S &lt; Γ. Γ r K 3丨5 t | t η· I i | ★ K k&gt; rn 1: r* n· P r P: rr·&quot; r f. n F: f* 'ir ϊ 1 r i'- 1; p if 6 t* DV » tn π Ή — ^ r. (r ^ i: ^ r, a. w &lt;· M Fluorine * » 5 » « -t 〆iP' )* p - W.' - π c (:.t ·* M ew _ Λ * * _ « c- r. H ^ ^P'r :i.b; T Λί» *v *r* * -; • _ r ? * ti -^ r ^ ►. r fj c r. t W w· ^ »* Λ »; ©&quot; 1 » -1 £ ί * ^ \f* A « e ^ m rrt η π ς; r: ^ f. Λ » 2 « «Λ Λ » » _ n 5 a P: 1 It F ί: ^ * = « * V» r' ς ": « -i • Λ r ς Γμ歜c $ k Λ • » » rf; rc »- i * Λ » » r; ttc &lt; *-*-1 N&lt;- ** 1 〇y, r ? p Ϊ c *. s· T' ? έ » 1ft珣.' to irr ^ rr ^ rtr σ w_ 5 * « « ^ ►» i- solution · • away &quot;Ss *&gt;· ^ ί &amp; £ s. ft. t KI .1. ! _ π rn E '1 tc , force ν' * 乃, ν· * C * V 〇, ί, ΚΒ -1 ^ ^ 芦! ! -^ c « &quot; ς 〇, _._· rpZ ΓΪ C fr R f: E »· y »- 71 Cr £&ε ~ p S m** v ** » z%% I-, . C «二&quot; V · » Ί X in JR it « 1C -* * tf· jy fi ha: K- & KK ^ r ·» PP* 务 E Λ ΪΒ. % it: *c rr *- X : * r ► 9· E b TH ·*· ·*. e HJ C c ·£ 〇rc· ί/% cw •Λ _c - &gt;c. oc 〇〇F :. $ i a. T. ί SO二踅K ^ ·δ Λ cc· 1/1 »WW o- » u&gt; V» μ D. K&gt; w 〇p· Bu;:^ ? Bu, e fc· Λ史. Tf fc -&gt;ς Sr Κ c c. 〇ci ~4 •A eeeccct Ό U\ C cm Τ two se . eece C&gt; ccccccccc C ce Cl private | e e. cfc ? c £ c. 4&gt; 〇« · coc tr ? 9 4&gt; oo A. ec '; c b. u 〇oe· co «&gt; e K c 1 c- ΐ ^ η t 9ltpf M ό o Ξ 5 oesb Ά-» ^ &t- Array For cooking T Λ S2 l 9i f* * * o ό o Ξ •fe £ Ξ £s two s ^ • • =λ β έ S ® &lt;&gt; • 1 1 • 1 • e ft death li to 3- K ^ M Μ M g M Ki s K&gt; . ^ s« 冲λ 201218218

I ^^^6 ^^F-* lulu^.^v E'e'ii Fs -H-i/i/&quot;£栌---'长&quot;wi^^c^

-=-^.0 ff^il5^ we&quot;'*iK -Ξο^.ί/''' ^il-vlF&quot; δ § § &lt;%* for) 宕vetitf永ετ &lt;- (%*:κ *4 疫W ϋ*εν£' Busy &*&gt;捃氺£: ^£-^s ^^83⁄4/year t.^feul

¥&quot;E^^cKfeE Province&quot;·1^8 ^&quot;^^*2«&quot;^ Province £茗^5^ ?ό*;Β95 times-E'u*-^ ^^M'eGtans. -^^98 ίέ ^sg'-u -x··' ·= l· =1 =7--1 9W 6e -γ&amp;ε3 ^ϊ-ϋζΌί·0·-^ **:Η.·96 leather tiTi Si&amp;ts times ίΛη}*-^ ^^^-.165-3⁄4 ^«M-os -^ili'^'w ^ ^ si 0 ^^uu^qnA -**='-ubg-^ times 6w* Ss Ϊ5 times v-ill-u0·5-^ times iMC^-u -^^166^^ -*ilrcs ^^ϋ-ύό6'^· -^Mb·58 times眯*·0* «52 ^^M '&quot;5&quot;8-^ ^iiiiyi-tf si^ -«Hu^qru s*il-66 δ-u -^^2^-3⁄4 ^^^^-66161^3⁄4 ^ίίϋΓϋ*-^ ^^^ -665-^ ms S5 %**&quot;·665'-^ -^11^55 ^ϊϋ-ζϊ'^. -•&quot;a-tbbli-^ (sqie-sq&gt; ^*3 % ^'v^ 'wwe ^il^^fe'^ fte&lt; ~BP^

Ksr·* Ξ155- -11- $ε- εεΰ ss~ ss- ¢¢- ws- s£- -)^- X}*- r--i*- s 201218218 40 / 56 Μ % 3 » A year XH 〇«4 X 1 i. A branch \κ A 痄5: ·—— Qi 5: Iodine κ ί c ?r· ϊ OC OC 4 t Rock 5. p ?r· t Ϊ ?r· iw M &lt;r Ϊ 5: - ec 〇c 〇-J Μ &amp; oc •u &quot;c oe -ic oc 〇· oe 〇«e »1 c ge 9C 9· -l 〇cp , 》 K 〇•-I oc c gc c « μ 〇r C &amp; Pi D E e. c c. u V c &gt; C c V* c ·/· c CC -ic &gt; c *&gt; cc »· ccc Λ l ^ : e· : « b c- e ίν cj; &gt;&gt;* «;· r ,IT 鲥c D » cm ,玟ί V. B: £t ^ £ C.^^ tt ^ &gt;, K&gt; tt £ 5* *1 ll £ * 5* 5 5 cc &amp; £ * 53⁄4 M Technique 5 ^ ^ £ 5 - 5* c £ 5 * H */&gt;; £ z.. Iw , IP tt C' Gallium , rr 5 * i?. £ * Z a» , If Λ c Ϊ Pi· P £ wide » 5 ^ to ί ϊ: £l ξ · 5 ^ I 1 C &amp; n . rv ^ £ ^ £ &gt; ^ The sc £. E · 7, £ 5 · ί — C λ ? K c &gt; iv 卜 〇 u. cbb • j\ '/1 C pe Κ» NK - μ c ε w Vi e y. C e- F &amp; Right Xuan&quot;4B + Λ :E »\ 3: c呤^ P K&gt; b: e K 卜 0i e •j v&gt; \t* cey* c- • V z fj\ e M ΙΛ •»1 V* c· y» cc • s^ ,j&gt; eek/ 志志+ * * t fr # $ &gt; Λ =SEZ ίί·· Λ w of b S- c e- c M e V· c K« IX e ha C c· c t&gt; c- ey· ectt &gt; y 3. Z 呤 — —ymb 1» tb ft &amp; t and Μ y» •c u&gt; © Wv wbop y&gt; C· Κ» : Less c &lt;» cwcy» Cc rv y* cc· „ »f E Λ ^ * Λ ft β ^ * s: s. a -Ϊ c « « » t: ς * λ sit κ * &gt; is: •Λ C (/1 bbycwcee O c y&gt; b ΙΛ ebue 〇&gt; eo Φ ce *TC oeeop In opoooosoo In es iu a ang a- -.B» * « £ «-3⁄4 ^ Λ % Λ it S 6» [*151 s 201218218 [91 d 5 · t: V £ fe £r extension 2 Γ · · ° c ” c V. cc η· ccce V. ccf^. eec II: C苎cccc C- rS cc ?; c IT) C cccccccv: c tf; t茫&lt; 睁»e : ^ ¢: T g:· ^ c- i G c ^ ^ ^ ^ 6*: ?£W ; i 5^ w ac 5 r^ C &gt;/! cc vi ccw: Z c u. c kf: nea: fS c V: C &quot;i 1/! cw: 7: 垆t矣tfr 泠 £ VQ is w; _· s ^ 吒巴&lt; monument e茇r4 C c Ι/'; N cc V. ep»ice ?; /sc »/: ce r&gt;iccc £ W » sc 5t ^ «· «?·,▼, fe « jp; ^&lt; S ^ t ^ 矽e= r«idc *r, r»ic 5 ΙΛ ΙΛ S jr, «' ΙΛ V. Γ«ί μ e S cc V; |Λ ΙΛ r4 V. If. V. fM rs VII 1 *·: ¥ i£ phase er«J r~i C ir! 5 5 5 *〇β r«ir; Λί r&lt; cecw : c »») ce κί 0 V. M fS ^ « is ί &lt;&lt; z. • «i ^ sschen«ΐ农AJ £lt 2: -0 .G g:= =,*s &amp; £ T z fee si ^ I • S w ^ fl If *0 • CJ —. &amp; V. Furnace PZ 〇&lt;*» * s Ig 〇.aw ^ «? g « i^ « z 〇« C? « Ο Barren Μ g: !7. S Μ 柘! •3 Eg S έ « te&gt; .s 55 Z. z ^ 0 .c E _ II each « 7 ^ 0 .3 IS ^ 〇• CJ ^ ΙΛ Sr W «2 〇SS s* s * ci 57圬§ r « 2 〇• CJ £select € 2 fe· Ο a 隹«&lt; 4* = ccc ^ΐ好·ΰ £ X ri n· n fS c _X Γ«ί X r** XX benefit' © yc X e ^x_ e X ee X ee «6- ^g ϋ. cer^ r» r^ er^' ο r~ rr r~ 凄e 卜· 〇ς e £· r- \S βς r- 0 ch~ r ~ « r- r- e σ' S 崔% % 1 雀pj Έ 雀 K J3 sea J» V» ve | κ sc 索 S s 崔 £ 芑 5 aluminum sr*i »n •r • V, ve aluminum 201218218 42/56

Η It X Year Ϊ V i V» 丨1 &gt;J&gt; H is 5. w. s Year S. «. V year X year 1 i· σ hr •J&gt; If 5. 4- K 3: t K 1 *- 5: ?FS: «. e H Extension 5: ϊ βκ. Phosphorus 5: &lt;ϋ 00 X * ec «Γ « c K e*- •j Oc o &gt; cc *. c·· K c &lt ;/. c OC p '〇QC V. 〇· Or sc ee p- _-j K 9· ~.l oc •ο e oc •ο e A Go; t: ^ ♦ ►. cc c. © &gt; v U cc ·〆ce .1 VC c V c U cte 1-4 &gt; ccc » c • MI ^ c· c· : : : = c IV = - J; b* 钵1» C iii v ir 鲥c ^ * s · 5 « ? Hi J5 » =* 5 c- « , 氐Λ « ΰ $i 5£ C 2 y Qin s« si B * C ^ :l c_ * E · S £ c £ ε 51 C £ 5 · It &quot;t ^ £. 5 · C * ' ff Λ S Hi g £ / P 达 c c . c ϋ· 7 ft l ^ v. £ E · ς ^ Λ ΰ &amp; iC · 5 * k £ g * 一 1 i £ i &amp; c . 5* M f ΪΕ g £ g . C Bad: .i 妄&amp; 5 · I't ^ ft U&gt; £ E · ? ^ ί K f. &gt; v M M c j j j j sa sa sa sa sa sa ; Of r', £ K e bi cb! •c. e Ui •cc tv b: K c «/t tv bi ft bi C' c ΙΑ c M ^ ta i- ·δ £&gt; Z t ^ :ar. Ry Sf· a. *: of 卜it·C, c 〇N* C cj/* ew V· 'ee KJ ccc Κ» •C e 〇cy* •c. •c. »&lt;&lt; ^ Si &gt ; &gt; 3. m-2 s _ « -y Ml ί h tt & V * ^ t· *do V» b Ln &lt;S b C/ibu Φ Ui bc (Λ •e C ·-&lt;&gt ; jy· o ΙΛ 〇o ir u&gt; b J·/! C p hJ y&gt; ccr 卟ί fit _ S ^ Λ is S t * λ sa i SE _ * &gt; * S: w» ίΛ &lt;S&gt; Euu '〇O ooo ΙΛ e LA 〇b Ut b •u&gt; eoooe £2 oeepwoc (/1 ep * e e&gt; e ε oo Ιλ ep · “ e per S' &amp; anus built ax -S /♦ fi? S gE [&gt;&quot;

201218218 【81 &lt;1

邡 邡 比 比 比 比 比 比 比 比 比 比 比 比 c c c c 邡 邡 邡 邡 邡 邡 邡 邡 eco eco eco eco eco eco eco ] ] ] ] ] ] ] ] ] ] ] ] ] ] ] ] ] ] ] ] ] ] ] ] ] c c c c c c c c c c c c c c c c c c c c c c c c c c ·. ^; £ £. pg· ^ ¢- έ q 〇r- &lt;e .·, c' ^ S·· ^ *!%Z 长茗氺 53 Μ C c If'. fS c «: er〇 c V, ccc \i'. η C c vi cccw~: cc %/. c V, surface layer ii ii 导 t 轵 轵 杓 n n n n n n n n ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft N) Μ C u. ccu, e C fS s = c rj cv; r»» cw; cc fS c = c 客 W ^· \e ϊ &lt; Γ · i· fr &quot; = « u\ 5: IT tQ r»i If. ir. IT »&gt;4 C e ir) s jr. c »r. (N vv ci VV r&gt;i up to 1vui 苋 令 轧 轧 轧 ? ? 6 6 6 6 /; 5 c &lt;s ♦W c ΙΛ rvj rv« c ΓΊ 5 c 〆. er*ie r&gt;i ΙΛ r4 year 艿 Μ + + i i i i i i i i i on on on on on on on on on on on on on on on on on on on on on ;ίί 滑郎This q· ON tm9(H&lt;i2 滑郎选明·ON 电m 20kii; 'Bone movement that is illegal · on -^13⁄4. mft * S cr ^ li | 淆动逍明· ON Utm 5Wi 清逍明· ON Resistance fl.5k!i « c 罗伊炉@zo G forget furnace f 2: Ο Ο * SS! ΙΛ gi s _ u • g 5; H t i. 1? ^ o Sweep that into the Ming · ON limit WWi Sweep Lang transparent · ON 90k « Qing ye transparent · ON Resistance 0,2Wi;·骨勤那遑明·ON -3⁄4]3⁄4 5W2 Sliding evil transparent · ON 0.5I&lt;U • G Ιι 潸 sp炙叼· ON resistance 2Wi can also be used.tt 2c &lt;N Rj than electric m (Ω · cm) 1.5x10-' X ·» X ”· 2.2xt〇' Mxl&lt;&quot; 1 T· e times r4 7.0xl (lJ ί.7χ| O'1 c is F4 13⁄4 XZ c ,························ » cr~ r-· 运·r-· 运·cr^&quot; 妄 妄 r~ r~ 霄 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 ;0 Appreciation example &lt;il &lt;&gt;i Appreciation Example 63 -1 Cannon example fi4 霄艳例65 宝铯制 fiil tim f&gt;7 IT drag case iis 宝艳例69 t艳例7ft Ki£M 71 宝施例7Z 201218218 t / 56 it H £ OK 痄S: «; 齐Ϊ at HK 5. « ί( 5: V 't· if 5 0* Λ. i 匕H ft £ tK i « Iodine. Or e· 鸸5: -.1 year i K ϊ -i Σ HK % ·&gt;. Rocky 5l n year 5. oc 〇oc O' K p* oc c 〇cc on 〇-J -o Oc e CC 0C 〇-J oc p •, l tK. p ···〇λ c « C « 'jwb ΘΕ b ί &lt;&gt; V c • t &gt; cec Iw u· kc » c ta &gt; C .. «. C ·&gt;. &gt; to e -1 &gt;. ec &gt;. c tv w » ( &gt; f IV Bu C iv &gt; C- c- ·/· &gt; c II.;; ,Λ 1 ϊ c e- ·- = C - c- c •c two cc: f? C « v ir * house e ^ 伫 B: & gfk £ 5 ' C鎿y B-Λ ¢: iE & Efi k« £ ζ .. e * E- * ir i E - nci, s · · 〆 tr ^ ς ··*·! E · y IT g * C ii v P ^ r. t & ε£ i1 «3 ^ ff Λ ft w ^ 1/&gt; £ T⁄4 Λ 1 Ιί ζ. * ice £ 5 C a; :! Class I ? £ c . 5* t% t £ E · 5 ^ ® £ υ. £ E * %Tf b; μ cucbwc •j, c · j, ac »vcb: c. w is. « w •j&gt; eu· oce Π1 /Sr farm £ + Λ core set s* ί. m 〇f τ'η MK c M «/&gt; JV s w&gt ; y* cc K4 ·&gt; *ec is·» *J&gt; K e V** w» eu· e&gt; cl/lc xe security + -t. ^ ΐ C -Mi ί &gt; Λ 5 in br e. Ee K # c c. j» •c c. cc C cc MC &amp; V. e ·〇k&gt; y· p M t K: ^ &gt; i * ί How ε 7 ίτ: ^ β tb tt && Λ 〇 〇 Ui cb &lt;Jt bwcu, c P !/ C c »*» £ c· b J/&gt; owc J/l *〇e KJ V» o β M i Αν Λ £ 22 ^ « 5 -^ϊί2 £ S ^ λ c ^ r ε _ * &gt; ί. & (/1 eeoueec: o O Ul e CA bwbwboeo 〇«»τ 苎3 o c&gt; eowec v&lt; eeocoosos 9 eo 4U. ^&gt; - w ιε -.8= ^ « 5 «In every 2笤~弈S |Β &gt;01

201218218 [0CS41 βξ s· ♦' WV -j· fe K 2 S: Iff B£ S- 毋ccc If. eccceccc «/. c _·· ccc 丄♦: cccce Ό ct»&gt; c 5 5 ccecc ·* c 〆ce V. c If: ϊ: e &lt; · ft· T |q ^ ^ 5 *· &gt; ^^ S ^ ^ ^ 2 cv) 2 c *f. C f〇c «·: ccci/ fS cc «/: c 1/; cc : c V. c V! sir w 泠^ Q ^ ♦&gt;* ; *· £· ? 5 ^ w 定艺&lt;&lt; •茬s C-u· : 2 c Ι/': csccc rs cc V; 〇c r4 cec If W VO ^&lt;5 ..£ F t ^ 衫》= Ξ =. S c Ι/': M*. r~ d V» r&gt M o tf. s 2 5 2 jr, c if. r- r4 »Λ 1/. N r4 渐 t» si* 5 5· or 2 2 e ν', c »r; en O c rS 5 s 2 5 cw: cc r4 c K- c rJ 5 &lt; ^ « 5 -τ ^ f- ^ O • 3 5 Sr .C! g: C &lt;N ξ运* C • Ci s cold f ^ * 1 • 2 |2 %ζ ^ 〇W ^ After _ f Z fee • 2 II 1? Curtain % «ι&gt; « 2 ife c 飧岜&amp; ¢) « z fee ,1 f ^ * 0 I? *1 i! ^ 2· fro • ? ii * 1 £2 δ , 1 long £ «ζ ^ 0 i! _ c * C? poor c * CJ busy amp & go z * EO bar dry lr 2 c ^1 ·» . R4 3 X \ ,· c 4 rsi c \ c 卜·e «·. c «μ «Γ «5 c £ C r- * * ε έ έ x~- i. i £ c £ r- S ύ ύ « c r- 妄· ύ ύ 一 i 崔 £ £ £ £ « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « « ε 省 κ 201218218 46/56 Λ /r. i &lt;c fP £ OC M ί· 5: Year X i* 鸩K Ϊ _/· Iodine 5. Scale}f s. ^0- Scale if· i HK £ «&lt; £ © Λ (f. £ oo V c « '•h p. CC 〇· K •O' *-» κ c « c ot •c V- -1 c &amp;&gt; 1% CC cc -.* cc U cce ▲ c· • V c F ¢. z P· • ME » ;v ; rw : = j; PR 5* l» U £ E · it •,j&gt; ζ . C 7 ff Λ F pi £ Sb * Z ^ z er λ « ϊ » g * 5 ' ϊΙ Ιλ £ ζ - Λ « 疋 ε £ 5 ^ MS »w £ g * e £ £ · c £ 5 · 5 * 1% 〇 &gt; Si ε. &gt;» 十L. « ;a? r ^ y&gt; wc ts/ &gt;yi hc &lt;» cc •ct/· cy* •e. - £ Si £ h media ten Λ· :ffi ^ rec M u V* e »v V&gt;wb; c- b! IA p k&gt; Ut e. *. m ΐ K ^ &gt; Λ :» Ϊ if·* 3. ^ M; »fh ts: c e. ce *&gt;» ce v&lt; C e Κ» cc C ff: &gt;&gt; ί. ·κ Ϊ S· s p- * ^ 2,; ΐ £ —NT Λ Λ C* 匕 tt £ ^14» t单鲥c •c 1/· t/lcbl/ie yw by* •ec k&gt; y* cr &lt;+ S; & Λ £ 2 ί A* » » -5 2, * 4ίί it ί t λ λ eirr ^ * me Cs C/i • o LA eewe (•M b O e s&gt; e «c: S2 〇ecocpeo Ιλ op 'u £ E »a S £ » s $ 2 *Weifang ss〇52 two

201218218

Cl S i: ^ ξτ T After sound SC: » d ^ benzene * ce κ 8 卜. sS C cc ·? = ec 卜 \C c C e »τ - C _: cw ccec 5 ? (/. &amp; C eeeee v. cccccc «: ε ^ T ϊέ · r ; Q ^ ^ ^ S ί &gt; s* « ^ J w ^ ^ 5 ccc \s &gt;cc ec c O'· c #n c.' rj c «·· c -ic &lt; c 〇ς ca·' cr«« c «r! r&gt;i C c ν'. 忑tfr «κ 疙S ^ ^ Q ^ ^ 5 *· 5 x 玄氺运s 荦芝&lt; c. c 5 «· cnc rs »/. fN c: c &gt;/: cw) c SC. e &gt;cc _: e tl. r«ic 1/·: r4 c&quot; kind,. ^&lt; s ft* ^; 2. eoc si &gt;c if, V. *r. tr'. tf. &lt;«4 C cw: ccc SS %r. w: V, IT: %/. cc » S c tf: ΓΊ apricot ·: W ΪΤ e «Γ. M c tf'. r&gt;«' fsj C c 5 c \£ ol cw^ ΓΊ iM e C cc \6 5 Ϊ il as " ^ iF • s 2 e | M • s tl s: ^ 〇• 3 e^. •G5 Z %-舡Z ··' 0 M • si? % &lt;G 5 s£ € w *ζ z • 3 ^ t •E * ss · ' Φ .^ es •c * s鲈* Λ» Θ s •G - « £ *r ^ • C{ «艺^ Z * ? 1* gs邑^ y. • 3 «·· « J ^0 ^ 1 π 2 s- .9 £ii to 1 lean c « ? si •c * tr Z ^ 1 «ε * *r 2: ···O .5 s I -C &quot; |S • Production 1 Λ 2 T2 i I « s bud, • 3 «* g 沄蛘^ Z: barren • s 5 giant t ^ ιχ .swi ^ o .G si &lt;3 2 %i | 拓隹妗1^ e »Λ l/V ec C c \Z f»4 cr*i «Τ dad iw · ΰ Ci ». CXX ”' X Λ X rJ X two X oe • two · CX r> J c X , · c name r»J e X e Ri cr*ic κί c M: C ec ·&quot;. c «t- «ς € wcr—·芝· c 卜cr^&quot; cg· e & 卜e Bu VC er^&quot; 卜·r r- · 运 · ee K Cr« r» r- « ss IM £ n Si £ TT S a w. ΰ Si £ 卜 5 macro•i? 〇ς Si O' Si aJ c Jj ε Si jj r&gt;* X 〇J τ -ϊ £ M N£ S? ^3 r- ce ¢- £ % τ. «&lt; A3 -/卜寸201218218 九8--56

s A w, b· nz 5 ws Ϊ u Γ' Pt £ Iw IA Γ*- K 1 Ϊ u· L- fv 2 i: • V Γ, zir Σ is X »w fi ss: P 55 X •&lt; 4 ff ϊ r&gt; 2 i V, Γ' S Ϊ K&gt; 如Γν z ϊ M Γν K £ »v FZ 2: Ki « 9· x p- « ·.! = V. c oc e oe c oc ·. &gt; c «.( C OC. e·· ot --1 oc ec oc w —J oe •e. at oe C & ϊ% ♦ Ϊ C cc Ψ c v&gt; K ¥ u- &gt; c u- c. i· V cek C c P &gt;. ccc &gt;. e U&gt;&gt;· c •9 V. c •v &gt;: ,M 1 tt II u- .· ic- : ue 〇c •c · c 'cy » Ϊ ^ i σ C · »«&gt; i: c home & C £ c . C «1; ·, B: &amp;l&gt;· at 5δ· Λ 1 c &amp; C c? c ... s ? $ ϋ: « ^ 1 r? C * 5 ^ Λ ^ E -b· « ffi* § r5 g · 5 ^ λ苎?sy iii g household r . 〇· £ ε;. *yr c &amp; £ . C m ^ tr 疋& 5 ?iy* t: Γ ^ * 5 ^ Λ κ S § f Factory. » g P5 δ . S| B s * -{&amp;· E · ϊ « tr Γ &gt; O' c » cc = cce K&lt; V/i COO' c. p« bccu· e ο Μ c Ul C cr= &amp; Si & Θ + + Λ core & Λ 3; m 〇fr, Ncp u&Gt; e e- cl/&gt; (/· u&gt; ¢- ecl/ic u. p C- £ &lt;J&gt;(/&gt; (Λ » a .4S * ΐ K -» s &gt; Λ 2 « β ;»·· ^•' *6 of Λ » JA e «&gt; ccsc W cc fr c W* c- ct/lcci/&gt; Μ CW fr ies is t Ε ► &gt; a. * ϊ i _ ε ^ Ζ ^ b Βί 5 卜 尨 ^ Irt C c V» epe &lt; £ e oe O e* cc Vi C e yi '〇c 〇se 00 e 9·· 〇τ岭ε » ^ ^ h &amp; Λ ^ β -2 ? *· * * 匕:荩*t Λ β I &amp; R &gt;* ** maoeeo (/1 b Vi Φ eooooop 1/) •oo (/1 C 〇»τ 53 p 9· ce 4· eee 〇· e Ui 8 e oe oepoo £ p *«j 8 £ 奂ar =Β=建庠5* « ί? χ Λ Λ S S- gB

s 201218218 [The ratio of the amorphous t? part of the Η 郜 郜 OC OC ε r· c vS c; sc c&quot; VC C ec c 8 r- C \£ cccnc si c 丄 · " CC ί; c r -·ceee C ccc vl c r- ΙΛ cccccr Jc &lt; *. sv T s· _ t Q ^ ^ ^ w ί &gt; ^ ^ ^ κ K c Supervisor v 5 C Vi CS;· e ec c ©' Cccl/rj eev£ c S£ c oc c e&gt;&quot; ccc 1/: : cu·: ^ ϊτ -6 Sir IB;挎^ SWQ ^ ^ 5 *· ip S -^6 ® s_y C*E &lt;&lt;好友0 if. rv* e rj £ W ®*· \og ^χ· ^- -^. Jl §· ¢- ^ 〇\£ C &gt;C 1/. tr: V. «/] Vj c &lt;N| ccv! /M c tf) e vs e X£ v) ΙΛ IT: tr. e fs| ί: fN c vi Select the conductivity 胩Λ 平均 the average mass of the 铒 % 5 %) cf* 4 c C c β r4 rj C; er% C c 〇c «*· Handcuffs into durability test, whitening of the moving part, ON resistance 丨 50Wi, sliding 白 whitening · ON resistance Ronkii, diligence, whitening, on Limit smmn 轫 轫 轫 ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( This Ming·ON ¢13⁄4 t5U« 汫初邡¢一化&quot; ON 15; m. 3〇«&gt;kS&gt; 滑轫耶白化·ON -^ΓΛ 150UH sliding part whitening · ON ^msnakii -;f轫Whitening, ON ΐΓΛ Rnnun sliding Lang Baihua · ON electric limit R0 handsome Si slippery little whitening&quot; on utm 1 inun sliding section 叼 ON * ON 5k« E 言 sliding suburbs * * ON resistance 15Wi sliding part whitening · ON t (5l3〇nkii reliability system ft cecc &gt;c * r*·. Bron resistance (Ω · cm) 3.2x10·' 2.(;χ10λ 3.3x10 'X ·» ο 孟cc 4.3x10'1 β X ri -9 ri 3.2x10 ' c X r&gt;i 3.3x1 r&gt;' cr〇R.OxIft4 4.3x10·' e ri 4.flxlfl' 2.0x10' heat up first (%) C 卜cr~ 卜·芝* coe卜r~ 运' Ci r- 运· 0 Bu· 妄·ce 卜·βς cr~ 妄· r~ Comparative example 39 than school example 40 than nw 4i than nw 42 ratio school example « WfrM4 ratio ηΜπ ratio example ^ Than tffrl 47 than nfr^MR than case J*&gt; than n case than n case 5i than case 52 ttn^i 53 than n case 54 than n case 55 to tow 5 (i 201218218 50/56 ϊ 3· r 55 S: J5 Ϊ Γ' ic 3. 9 -£ r· y· 3 P &lt;n&gt; Γ- 1 c 1 卜KX o 〇Ϊ &lt;&gt; 5 〇&gt; r* X tr, X 3: g. ϊ. μ r· Z 3L «Λ Γν » u» on 匕X w C· Ρ» c 0( c at c· OC &lt;1 be O' oc - J c oe 〇e 〇e C 〇e oc e oc •, J oc e OC oe c B, ♦ 冢» ctcycck C u&lt;&gt; cc* c u&gt; 卜 c &gt;·« cce 卜J; e u. &gt; e V ec u&lt; * c U » e ·· * C u • si c- • two r' • mi ^ U : '· c c. : -' w •c. ;v '9 : = ie- a; P: 5* a· ^ W. ^ | ^ ΰ. i ·-. * .. ii t ± ε * c ^ M « jC £ C * 3 ? ΰ ?= c ... 〆-· Λ ^ [·rw 5, Λ ^ Ϊ ^ * n&gt; irr · iw 5 * o; 〇grr. C· w. V » A 5 Ε V -L- ^ r jr · V ^ u. ¢- gr £ * ca ; u&gt; ^ E * C ^ •y &quot;* *1 c & g . C 4 yc* ^ i: 疋》 t&gt;&gt; * E &gt;;n ?. E&gt; !: ^ _v . V. ^ M % Z ^ § r E · C .. &gt;. Brick Λ ^ «处5 · 5 κ ^ or卟1芦 5. * ϊ * _ n> ii ^ &gt; σ- 〇C ce C p w&gt; Cp K&gt; « O cc· y&gt; β &lt; £ *力e- £ fT 农£ A*雀 4 Λ Π « 3ι *分^ η 1/» •C. C k&gt; *Λ ie ek· e ie ( /1 t/l U ». C' j* & e M y&gt; cccs gas Λ (/· V· 〇3Λ Gi + ·β. i 2 t £ &gt; Μ * ^ R y, Τ 5. ' &gt;C峥h尨· y&gt; ce μ Ut ce '/* r&gt;* c y&gt; c 〇· c tx •ee u&gt; © M e th μ *ew •c. r fc &gt;&gt; ^r. * -5 * « Λ ft ί Λ if £ Valley " « t ¢ - Μ tft ο c Μ t / lcc • M c &gt;&lt;cc oe cp · c 〇 · c Ul be Ui b • o ts* e &gt; 〇ο pe Os ep· v .吟E Gi ίP £ 2« ^ « & V 5 J: &gt;* * 2£ αλ κ ipe ^ * &gt; aa: β β oc ό (A -J • c Vi C oceoeop In e J&gt;&gt; o 9 ΛΤ SB ο (»ν eee 9 oe '&gt;j 8 G Oe ee © o 〇cp 8 s τ!τ S' &amp; i=臧a S 6» &quot;25:1

201218218 [9&lt;Nd i: &amp; r fe &amp; ^ ^ y:猝蚝— s 桊oc cir· c C cec ” C :· \S cc· 8 Γ-· cc 死 s·· c «e 二· : cccv: cr·&quot; 1/. ccecece v&quot;, e K V. ccccx ^ &lt; *· 埯 友 friends t Sp ^ ^1,5 5 Ϊ &gt; es ί i :.c R w ? 5 w ^ 5 c &gt; £ 5 c K : σ cr*| c V, /MC :: c VC e NC c ec c 〇·! cecr·* cc !/·· 蛑t忑ϊ^ IK 疙ε^ ^ VQ ^ ^ J· 茗 定 w ¢=芑&lt; S e si ec 2 ci/! 2 c ν'. C \te NS 5 5 s 2 e w'. s 5, right W ^ ^ SC ^ « 1' Es : ? ϊ ϊ & « ,岑 wr «: 2 c V; 2 rj C c a ccc V6 c &gt; £ &lt;scw~: ceeeee VC ί right a ίπ ~ Sr ^ length 1 a cover! ifcr Z ·' oc ij a ij &amp;岜«垆if Si 宕体 € Z fe° • a sr fee Money If .aw ^ gi s: ^cc Ιί *cz -' C a ki 托 E c I! 贫cl! Jtr 2: ·' c !! «铃Tr 2: ' c *C Ξ li &amp; sample c · σ f ^ c .a %ts ^ ^ 1 .a 3 =. ei i: σ and I Sg _ z a G right 隹«&lt; includes tr eccc c. n ” cee cc ·, fsi c X b oc G- 5 c 5 XV 5 &lt;-, cb S b X n = 5 as έ 5 %Q phase z : « = £ £ ύ c 5 C ύ C- ir~ r- S c. £ r · 芝 · ® £ r- * £ 〇 £ c ε ύ t jl3 c Army Si p- a3 ee τ Si £ % ^ 3 S ^3 r&gt;i OC [ C i? s E £ a} M% π S£ 妄Si •ΰ at Si £ o| Ϊ £ Si jD «ί 〇3 5 A3 *~^ O' $ 42

9W IS

C 201218218 52/56 F J5 3L r· z 5 5 hz s. cur S 5 c. J5 S: % s X. s. FS 3: c P ff Ϊ ts 3: .= r 55 ϊ c Γ- jr £ c· PS X &lt;£ zs· 6r. R 5 « Factory, J5 5. ¢- b S £ i. P s £ cs 5: £ K or Q OC •mi DC •&gt;4 c OC yi C OC J • J 〇tc 9. 9 •, J OC c OC 〇 · '-J Ot ·.! c fle b 〇c •wj c K 0&quot; 〇eoc OC p- .二产ί c * c &gt; c Γ &gt; c u&gt;&gt; cbek C w Γ &amp; u L· c 1 shovel V. cw &gt; ce , c e- c tJ »· &gt; c 4» U&gt » c ' 〇re e- y* ». &lt; y- 卜 c rv p k. c W «•^ e· Sr* 1 Two U : ·- β' : • U e iw c : ic. 2 II k· P 5 ' KJ: i泞c · * i S . E · 二 ' ^ IT Λ ς c έ ϋ · £ b . .i: &gt;.ff Λ ^ r卟C r »-. Spider l »卟Sr : I produces 5 βτ Ο g cold ε · •w ·〆秦Ϊ ^ -E* ^ σ s, c :· _z蟓?| u must g· Π5 g · 5 « · | £ D . C Hi / IT ;^ ^ * c * Produce · ' κ (Γ λ J » v ε: r? ** . c ... Final Λ ^ cr卟i 芦 [. :,.· &gt; Μ Μ » 芘t * & · § household 0 ... ·/ dance ec . g ^ g · y · MJKJ -t •έ ? g · h 9- C 9 C ceucse :·/» e lv&gt; 〇· c _〇o &lt;^ι ο e &gt;we X·) ce Γ £ 卜雀+ Λ iTr SZ «. 3: _岭^ PC/&lt; ee MJ/I c M c (Λ ΙΛ ΙΛ Vt 9- »· c- ε e M ζ Pc 5, Ιλ t/t fr- c· if. Ά + *t * tt ^ % &gt; mi 5 E * t s. «=,Λ岭 h S e Kl tA C •c. e '/· tv c C e y&gt; &a Mp; »v e&gt; w S 卜 we Ρ» •c. P. rr) &gt; if. * 2 s呤ε *- yi *r Π &lt;» S Λ ¢- £ M «£ s- t Λ ec IM bc· o -co Qe O' '〇•分be MV» bpe •ce OD e »&gt; br ^ r ^ λ £ ΪΪΛ r * ^^ tt: !: ? -t λ » 1 Ε· E ^ &gt J. C ooo &amp; Ιλ •-J Vt •eoe O 〇oos Vt oo e&gt; »T 5b e O' G c · “ oec 〇» o '〇8 p be e b&gt; cp &amp; ob\ 9 Uj 8 p 00 «k ·*» Trr B =眹β a J *e Year of the house x Angstrom A* S Twist I» 27:

201218218 龙W « y έ: £· ί mine ic w s S. 彔 OC 2 r-· NS c CC ; v £ CCCC c ·/: 匕s 丄♦: C cc V. cr» &gt;/·. c CCC ccccccr ^ ^ s* ε. Τ £-^ t 5 Q sr s?r » ®N. .-^ ^ i II - Poverty ♦ 11 S5 c \£ e oc C c·' e NC i/I r&lt ; c tf] cccec ^ IT -3⁄4 社 w疙F £ VQ ^ ^ ^ κ - «? 5c &lt;&lt;Miaoyou « \e e&gt; 'C e 〆en v. MC 7; fsl e trl cecec Sc ^&lt;s F ΪΓ &quot; «Child c \C c &gt;c 1/. W; tf, tr. v. c N ?: fSJ CT ?: cocec buckle*: g £Γ fe3 fir «Γ W ¥ r·* es cw: - ri ccce »cec M c ri c Γ4 V, r4 is s&lt;&lt; G i 1 •Cl - I- &lt;r Z. ·,,c « • Λ e % il z ·.,ca • Λ e % tl .s I il *?.. ' O • m, es &lt;E - € S * s Write pan. *ΰ. ^ i:i * ? ξ I fe *1 * 2 s v. 15 1? c .? -I ^ 2 O έ=: —g a&lt; * s =: ii i J fr i » ? gr “, Ii !&amp; § • uniform j5 poor · § .G Gr c * c- * ^ right 44 lr c&gt; cce «•c· c ”· c ri O; c 1/: «Λ κΐ aw · i?5 ^x K&gt; r· c X «&gt ;&gt;ϊ ♦&lt;&gt; Iz X oc c X &quot;VXT〇XVX % ·*. c X cover c :· C ; M «Γ 2 phase 5 « cr·* «e Γ» \d oc o P~ r- g&quot; cr~ cer^* r~ 妄· v| cr^&quot; cr~* oe cgc 3 OC «5 n &lt;*i Z Si 〇3 *Λ £. J2 NS Guest Si 03 Bu Si 〇3 tc , 5 Si a3 e X Si o3 S! 〇3 ^3 2 3* »T s: ^3 -m 201218218 i Table 1 5 丨 5 5 own, poor example I ~ 丨丨 9 ; The reliability of the transparent conductive enamel film is 丨()~丨2, which is excellent in resistance stability under the conditions of high temperature and high f of 85., c, K5%R. In addition, the total light transmittance and specific resistance are also in accordance with the use of water (4), and the hand is also excellent in W. As for the results in Table -8, the results of 丫乂洌j~24 are less than the resistance, the stability of the resistance under wet conditions of μ η, the durability of handwriting, and the performance of the total permeable temple. good. The industrial applicability is as described above. 'Based on this issue, deduction, p. a from 7 is available for C and 85〇/uR.H for qualitative and machine, the use of the heart touch panel is quite voyage * Depends on the control panel and other [simple description of the schema] 〇 [main component symbol description] 益〇»»», 54 / 56

Claims (1)

201218218 Patent application scope: VII. 1. Transparent conductive thin enamel, transparent film on at least one side; in transparent plastic film substrate film, 1 special 忾 忾 驭 驭 透明 透明 透明 ^ ^ ^ ^ ^ ^ The average electric film contains indium oxide in addition to: the specific resistance of the electric film is anger, 2.5=4::., and the group of the substance is: oxygen Y ^ , 2 · nickel oxide, molybdenum oxide, tungsten oxide Oxidation: 匕f: iron oxide, free, chromium oxide, oxidized seam, gold, pin. , °, emulsification, oxidation, a transparent conductive thin abdomen, at least one side of the #.#, /, 仏 Ή 透明 透明 透明 透明 透明 透明 透明 透明 透明 透明 透明 透明 透明 透明 透明 透明 透明 透明 透明 透明 透明 透明 透明 透明 透明 透明 透明 透明 透明 透明 透明In addition to indium oxide, the membrane contains at least an average of 01 to 5 mass. ^ ν The transparent conductive film contains at least, and the tin-tellurized material, and the substance in the material, the amount of the substance added to the material group is reduced relative to the transparent source, and The side of the surface layer is continuously or stepwise, and the substance selected from the group A of the transparent substance on the surface of the sea surface is "added from the addition of the mountain heart to the shell: and the transparent conductive film substrate side is transparently conductive. The amount of addition on the side of the second layer is 0.5 to 5 mass%, and the ratio of (2) is 4 χ] 〇 4 to 2.5 x 】 n (10); I 蛉 之 之 其中 其中 其中 其中 其中 其中 其中 其中 其中 其中 其中 其中 其中 其中 其中# Nickel oxide, molybdenum oxide, oxidation _" gallium oxide, iron oxide, emulsified crane emulsified, oxidized, oxidized 55 / 56 201218218 &quot; chrome, chrome oxide 'manganese, gold, surface u 3. If you apply for a patent _ The transparent conductive film of the first or second item, wherein the transparent conductive entertainment has a thickness of 1 (), 2 〇〇 nm. ', 4. A method for producing a transparent conductive film, which is a method for producing a conductive film obtained by laminating a transparent conductive film on at least one surface of a transparent glazed film substrate, characterized by sputtering The film-forming material (which is used as a raw material of the transparent conductive film) (in addition to containing indium sulfide) also contains 0.1 to 5 mass rn: tin, and 〇 5% by mass of the selected material from the fresh Using two or more of the above, the amount of the substance selected from the substance group is high on the transparent plastic film substrate, and the last two::: material contained in the substance group A... 2% by mass or less, and the amount of the substance added in the initial ❹, ^ contains the substance selected from the substance group A: the political plating target: the medium is used for film formation (10) Erjiali, the substrate temperature at the time of film formation of the conductive film is ·6〇~5〇; quality &quot;%, and transparent oxygen]·0χ] 0 ~40X I 〇"pa ; - air knife I is the substance group Group A is: oxygen technology nickel oxide, molybdenum oxide, tungsten oxide, gas gallium, gallium oxide, iron oxide, palladium, Chromium oxide, manganese oxide, gold, platinum. 1. Oxidation error, oxidation 56 / 56 201218218 IV. Designation of representative drawings: (1) The representative figure of the case is: No (2) The symbol of the symbol of the representative figure is simple: • Benefits 5. If there is a chemical formula in this case, please reveal The chemical formula that best shows the characteristics of the invention: