201217444 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種封閉膜，尤其是關於適用於具備有 機發光二極體等所需之光取出功能與封閉功能的封閉膜而 爲有效的技術。 【先前技術】 〇 有機發光二極體（Organic Light-Emitting Diode:以 下簡稱OLED)，係對薄膜之有機分子層注入電荷載體（ 電子及電洞），且在有機分子層內使電荷載體再結合，藉 此將電轉換成光的元件。 在薄膜之有機分子層中可採用半導體或是絕緣體，且 發光能量會按照分子之種類或其能隙而變化。因此，由於 藉由適當地選擇分子就可控制發光色，所以若使用顯示構 成光之三原色的紅、綠、藍之發光的分子就可構成彩色的 ❹ 發光元件。根據如此的理由，OLE D，已在世界中活躍地 進行以顯示裝置、照明裝置爲中心並以應用爲其目標的硏 究及開發。 在OLED之情況，電荷載體對有機分子層之注入，雖 然是分別從陰極注入電子而從陽極注入電洞，但是爲了要 提高注入效率，可在陰極與陽極採用不同的材料。典型上 ，作爲陽極材料，例如可採用如氧化銦錫（Indium Tin Oxide: IT Ο )、氧化銦鋅（Indium Zinc Oxide: IZO)之 具有5eV左右大小的工作函數之透明金屬氧化物導電體、 -5- 201217444 或如 PEDOT : PSS ( poly ( 3,4-ethylenedioxythiophene ) ：poly ( styrenesulfonate )(聚（3,4 -二氧乙基塞吩：聚 苯乙烯磺酸））之有機物導電體。又，作爲陰極材料，可 採用由工作函數較小的鹼金屬、鹼土類金屬及其等化合物 所構成的導電體。 O LED之有機分子層雖然是負責發光的層，但是通常 較少採用單層，除了發光層以外尙可適當地採用相應於載 體之種類的載體輸送層、載體阻隔層（carrier blocking layer )、載體產生層等。此等的層，基本上是以提高發 光效率爲目的，且在較多的情況是採用有機物。 如此，OLE D，其與發光有直接關係的部分較多是由 有機物所構成。一般而言，此等有機物相對於氧或水分呈 不安定狀態是爲人所周知的。同樣地，用於陰極的鹼金屬 或鹼土類金屬及其等的化合物相對於水分或氧呈不安定狀 態也是廣爲人所周知的。藉由與水分或氧反應，構成 Ο LED的有機分子就會使其功能鈍化，且失去發光功能。 又，陰極也會藉由與水分或氧反應而變化成不同的化合物 ，且失去作爲電荷載體注入電極的功能。 例如，在非專利文獻1中有就因將OLED置放於大氣 中的情況下所產生的陰極之劣化而引起的發光之鈍化加以 記載。因此，爲了迴避如此的影響，通常〇 LED元件是利 用水分或氧之穿透率極低的材料來加以封閉。例如在非專 利文獻2中，有如下記載：以有機物/無機物之積層構造 ，實現透濕度爲l(T7g/m2 · day之値的封閉膜’且將該封 -6- 201217444 閉膜應用於OLED中。 從OLED發出的光，係在發光層之有機分子內使電子 與電洞再結合，且朝有機分子之周圍全方向釋放出。 OLED，係由載體輸送層等之有機層、電極、封閉層等所 構成的多層結構，且由於各層之各個具有固有的折射率’ 所以被釋放出的光會按照朝各層之界面的入射角而反射及 折射。 0 第1圖中的（a)係顯示折射率不同的物質界面中之 光的反射及折射之樣態的示意圖。在光穿透折射率爲n i 之物質與n2之物質的界面之情況下，一般而言，光不會 在界面直接前進，而有一部分會反射，其餘的部分會折射 並穿透界面。 此時，在相對於界面之法線的入射角Θ i與折射角02之 間成立nisin0i=n2sin02之關係。因而’在ηι〉η2之情況 下，以比滿足之臨界角0c還更大的入射角 Q 來入射的光，可在界面全反射。 第1圖（b)係顯示光穿透二個界面之情況的示意圖 。由於在二個界面的光之入射角hi、θί2比全反射所產生 的臨界角6>c還小，所以光會從折射率爲η!之層穿透至折 射率爲η3之層。 第1圖（c)係顯示已穿透一個界面後的光在下一個 界面接受全反射之樣態的示意圖。由於位在折射率爲ηι 之層與n2之層的界面之入射角心比臨界角還小’所以 已穿透界面後的光可在折射率爲n2之層與113之層的界面 201217444 全反射。被全反射的光，只要入射於界面的入射角不因散 射而變化，就可被封閉在折射率爲〜之層與n2之層的內 部，且會因傳播於層內而衰減。 構成OLED之各層折射率的典型値，在有機分子各層 的情況爲1.7至1.8，在透明電極的情況爲2.0左右。在 將折射率爲1 . 5左右之一般的玻璃用於封閉材料的情況下 ，由於元件外部之空氣層的折射率爲1 . 〇，所以在光從作 爲發光層之有機分子層出來至空氣層爲止會在複數個界面 反覆進行反射及折射。 顯示該樣態的示意圖係爲第2圖。在第2圖之發光點 2 1發出的光，雖然是以發光點21爲中心而朝全方位放射 ，但是其中的一半會在基板10上之反射電極11反射。又 ，朝以路徑23表示的水平方向釋放出的光，只要不被散 射，就會傳播於有機分子層12內，且會在其端部因被反 射、穿透、散射而衰減，最終消滅。又，朝第2圖之上方 向放射的光（朝以路徑24、25、26、27表示的方向釋放 出的光）及在反射電極Π之表面反射的光（朝以路徑22 表示的方向釋放出的光），係在有機分子層12、透明電 極1 3、透明玻璃層（封閉層）1 4之各層的界面反射及折 射，且一部分會到達空氣層15。更且，殘留的光，係在 上述各層之界面反覆進行反射與折射並封閉在各層內，且 在空氣層15不會釋放出而會在〇 LED內部衰減及消滅、 或在OLED之端部朝元件之水平方向穿透。亦即，OLED 元件，係在未進行將光取出於外部的任何作業之情況下， -8 - 201217444 會發生只有已發出的光之一部分可朝外部取出的問題。例 如依據非專利文獻3 ’則在第2圖所示的構成之情況，只 有已發出的光之20%左右可取出於外部。 爲了解決上述問題，在應用Ο L E D的情況，係可進行 將已發出的光予以取出的作業。例如有如下方法：在第2 圖的透明玻璃層14與空氣層15之界面、或透明電極13 與透明玻璃層1 4之界面緊密地排列微透鏡，且改變在界 0 面的折射方向以增加光之取出量的方法；及同樣地在界面 製作微小的光柵，且藉由繞射來增加光之取出量的方法； 及將光子晶體形成於界面的方法；以及在使微粒子分散的 膜中利用光之散射的方法等。在非專利文獻3中係就如何 進行作業之例進行槪說。 如此，在應用OLED的情況時，會發生如下課題：防 止因水分或氧所引起的裝置之劣化；以及將容易在元件內 部損失的光有效地取出於外部。 〇 因此，在現狀中，例如如專利文獻1，可進行積層對 應上述各課題的層來解決各自的課題。又，如專利文獻2 及專利文獻3所揭示，亦進行：使金屬氧化物粒子與吸濕 物質同時分散於黏結劑或密封膠（sealant )，藉此提供利 用光散射之兼具光取出與吸濕性的膜。 在專利文獻4，係揭示一種有機發光元件，其在玻璃 基板上形成第1反射電極、電子輸送層、發光層、電洞輸 送層、電洞注入層及第2透明電極，且在第2透明電極上 形成由折射率2.6、平均粒徑150nm之二氧化鈦（titania -9 - 201217444 )粒子與矽膠構成之平均折射率爲1.4的光 將從發光層發出的光效率佳地取出於外部。 [專利文獻] (專利文獻1)日本特表2008-538155號 (專利文獻2)日本特開2006-286627號 (專利文獻3)日本特開2007-184279號 (專利文獻4)日本特開2010·067464號 [非專利文獻] (非專利文獻1 )表面科學誌第2 5卷第 年） (非專利文獻2 )國際顯示技術硏討會 1593 項(Proc. IDW，10、1 593 (201 0).) (非專利文獻3)光學材料誌第32卷: 2009 年）(Optical Materials 32, 22 1 (2005 ) 【發明內容】 (發明所欲解決之問題） 然而，積層對應各課題之層以解決各自之 文獻1之方法，會有因製程數增加、構件增力丨 造成本增加的問題。又，在將如非專利文獻 有機膜的積層膜用於封閉膜的情況，會發生g 層的折射率不一致，而在光取出之面產生較> 出層，藉此 公報 公報 公報 公報 6 2 項（2 0 0 4 2010年第 第221項（ •) :課題的專利 ]等而帶來製 2之無機膜/ 丨積層膜之各 :損失的問題 -10- 201217444 更且，在專利文獻2、3所揭示的方法中’並不一定 能解決關於OLED之上述課題的全部。亦即，分散於專利 文獻2、3中使用之黏結劑等的金屬氧化物粒子之大小， 爲了要保持膜之透明性，會被限定於平均1 OOnm以下。 然而，使如此的粒子分散於黏結劑等而得的分散組成物之 硬化膜，只會對從OLED發出之可視光的光帶來折射作用 。此是因粒子之大小相對於可視光之波長爲較小，故只會 0 產生幾乎可忽視因粒子而引起的散射之程度，且只有光可 感受到因混入有粒子而使黏結劑等之平均折射率產生變化 的效果之故。因此，作爲光取出功能只獲得因附加有折射 率大之膜而引起的效果，結果，其主要效果在於：與周邊 物質之折射率差產生變化而對光之封閉量帶來變化。又， 在較多的情況，由於黏結劑等之平均折射率會藉由金屬氧 化物粒子之混合而提高，且與周邊物質之折射率差會變大 ，所以從光取出的觀點來看，並無法期待太多的效果。 〇 本發明之目的係在於提供一種兼備有機發光二極體等 所需之光取出功能與吸濕功能的封閉膜。 本發明之前述暨其他的目的與新的特徵，可根據本說 明書之描述及所附圖式而明白。 (解決問題之手段） 本發明之封閉膜，係在有機膜中分散著第1粒子，且 藉由第1粒子之光散射而賦予光取出功能，並且在上述有 機膜中分散著由吸濕物質構成的第2粒子，藉此賦予水分 -11 - 201217444 或氧之封閉功能。 在本發明中使用的有機膜，較佳爲具有與透明且作爲 基底的材料所具有之折射率同程度的折射率者。藉此，不 必使穿透基底而到達與封閉膜之界面的光在上述界面反射 及折射就可取入於有機膜內。 又，上述有機膜，較佳爲藉由熱或光而硬化的樹脂。 由於在硬化時不使〇led蒙受損傷，所以在熱硬化的情況 下能在低溫進行儘量短時間的硬化’具體而言較佳爲可在 8 0至1 〇 〇 °C左右之溫度下硬化。在光硬化之情況也有必要 不使OLED之有機分子層蒙受損傷。在進行樹脂之光硬化 時一般雖然是利用UV光’但是短波長之UV光由於容易 蒙受損傷，所以較佳爲在長波長UV光下進行硬化。 爲了產生光散射而混合於有機膜的第1粒子之大小’ 係有必要爲將從OLED發出的光有效率地進行散射的大小 。因此，第1粒子之平均粒徑’較佳爲從光之波長的數分 之1至10倍左右。具體而言，較佳爲200nm至l〇//m， 更佳爲400nm至2//m。 第1粒子之材質，係只要爲透明’且折射率大於有機 膜即可。由於一般的有機樹脂之折射率至多爲丨_3至1 ·7 左右，所以只要爲1 · 8以上即可。高折射率之透明粒子’ 由於爲金屬氧化物所佔有’所以1 ·8至2.8左右爲現實的 値。 第1粒子之形狀’較佳爲球形或是與之接近的多面體 。但是，並不.一定有必要爲如立方體等之有規則的形狀’ -12- 201217444 只要整體在微粒子之特徵長度沒有較大的異向性即可，亦 可在表面具有凹凸。 有機膜中的第1粒子之濃度，雖然也依存於粒子對有 機膜之分散性，但是較佳大致爲2至50wt%，尤佳爲5 至30wt%，更佳爲10至25wt%。 封閉膜之厚度，雖然也取決於分散中的粒子之大小與 濃度、構成有機膜的組成物之黏性，但是較佳爲1至200 〇 /im，尤佳爲1至50//m，更佳爲1至10/zm左右。 藉由在此等的條件下形成封閉膜，就可將入射於封閉 膜，且在界面反射或是全反射而滯留於封閉膜內的光效率 佳地朝外部取出。 作爲爲了吸濕而分散於上述有機膜中的第2粒子，係 使用由鹼土金屬氧化物、鹼金屬氧化物、金屬鹵化物、金 屬硫酸鹽、金屬過氯酸鹽等具有吸濕性之物質所構成的粒 子。即便此中從處理、成本、吸濕能力等之觀點來看較佳 〇 爲鹼土金屬氧化物。一般而言，粉體係不取決於材料而是 具有易吸濕的性質。爲了吸濕而混合於樹脂的第2粒子， 較佳是儘量不吸濕者。即使從如此的觀點來看，由於CaO 也較容易取得酐（anhydride)，所以更佳。 第2粒子之直徑，由於當比光之波長還過小時就會帶 來對光改變樹脂之平均折射率的效果，所以在選定有機膜 時只要不考慮此效果，則不宜爲比光之波長還過小的粒徑 (具體而言粒徑大致未滿 200nm )之粒子。粒徑未滿 2 OOnm之粒子係具有如下優點：表面積對體積之比例較高 -13- 201217444 ，且在以相同之重量進行比較的情況時比起較大的粒徑’ 其吸濕的效率較高。但是，由於當粒徑變小時爲了分散而 有必要進行以有機分子來修飾表面等的處理’所以即使在 吸濕性方面也不佳。另一方面，過大的粒子（粒徑爲200 // m以上），也會因爲表面積對體積之比例變小而使吸收 效率降低，故而不佳。因而，第2粒子之平均粒徑較佳爲 2 0 0nm至2 00 /z m左右。更且，當考慮吸濕用之第2粒子 也具有光散射功能時，在控制光學功能方面較佳爲具有與 光散射用之第1粒子同程度之大小。 例如除了光散射用之粒子（第1粒子）以外，還考慮 :相對於有機樹脂之重量以20wt%之濃度使CaO之粒子 (第2粒子）分散於樹脂，藉此形成1 0 // m之膜厚的封 閉膜之情況。由於是將樹脂之密度設爲大致pP〜lg/cm3， 且CaO之密度爲〜3.35g/cm3，所以在CaO完全地吸收 水分的情況，就可每一單位面積吸收 747.4mg/m2 ( 41.5mol)。在現實上考慮，當所分散的粒子之i〇wt%左 右有助於吸濕時，就會吸收74.7mg/m2之水分。 例如在國際光學工程學會之學術討論會（Proceedings of Internati onal Society for Optical Engineering )第 4105 卷第 75 項（2001 年）（Pro c· SPIE 41.05、75(2001)·)中 ’有OLED裝置所容許的水蒸氣穿透率之試算。依據此則 在OLED裝置中被要求<i〇-5g/m2*day之透濕度。該文 獻，係以爲了用於OLED的陰極電極鈍化而所需的水分量 爲基礎而進行試算。因而，考慮實際上可預料被要求比該 -14- 201217444 試算還更嚴格的基準，並將OLED所要求的透濕率之基準 設爲 1 0_6g/m2 · day。 藉由積層有機膜及無機膜，就可獲得能符合要求規格 大致2年的積層型之封閉膜，該有機膜係分散著上述第i 及第2粒子’該無機膜係例如顯示水蒸氣穿透率爲10· 4g/m2 · day之透濕性，且可穿透可視光。又，將封閉膜厚 膜化、或提高分散著的粒子之濃度、或使無機膜之透濕度 〇 更降低，藉此可更提高吸濕性。如此，將封閉膜設爲有機 膜與無機膜之積層構造，藉此就可同時且輕易地達成封閉 功能之高性能化及長壽命化、與光取出功能之附加。 由於在上述無機膜中無法分散微粒子，所以在決定無 機膜之組成時，有必要選定考慮過光取出的折射率。本發 明中所用的無機膜之較佳的折射率爲1.5至2.2左右，密 度爲2.2至3.3 g/cm3左右。作爲如此的無機膜，例如可列 舉Si02、SiN、SiON等。此等的膜，爲人周知的是其膜 ^ 密度會依成膜方法或成膜條件而變化，隨之折射率也會變 化。例如在日本特開2003-262750號公報中，有揭示如下 內容：折射率依SiON膜成膜時的氮氣供給量而變化。更 且’由於SiN膜可從Si02至SiN廣泛地改變膜之組成所 以折射率之控制範圍也可擴大。 (發明效果） 在本案中所揭示的發明之中，若簡單說明依代表發明 所得的效果，則可如下所述。 -15- 201217444 可實現一種兼備OLED等所需之光取出功能、與水分 或氧之封閉功能的封閉膜。 【實施方式】 (實施形態1 ) 第3圖係顯示作爲本發明一實施形態之具備光取出功 能與封閉功能的封閉膜之剖面示意圖。 如第3圖所示，在基板10上，形成有由有機樹脂膜 31構成的封閉膜30，該有機樹脂膜31係分散著光散射用 之第1粒子3 2與吸濕用之第2粒子3 3。另外，第1粒子 3 2之粒徑及第2粒子3 3之粒徑，因分別具有分佈，故以 平均之粒徑爲中心會在粒徑上發生不均等現象。 在本實施形態1中，係將環氧樹脂使用於有機樹脂膜 31。首先，爲了使環氧單體（epoxy monomer)光硬化， 而對環氧單體100重量份混合氧產生劑5重量份與光增感 劑1重量份，如此獲得組成物。 分別在上述環氧單體中使用3,4-環氧環己基甲基3,4_ 環氧環已基甲酸醋（3,4-Epoxycyclohexylmethyl 3,4-epoxycyclohexanecarboxylate )，在氧產生劑中使用二苯 碑鐵六氟憐酸鹽（Diphenyliodonium hexafluorophosphate )，在光增感劑中使用 9,10-二丁氧基蔥 （9,10-dibutoxyanthracene)。於此處混合 25wt% 之第 1 粒子 32 ，且藉由旋轉攪拌、超音波處理而使粒子分散。 在第1粒子32分別使用Zr02 (平均粒徑0.57 // m、1 -16- 201217444 ym、及 2/zm) 、BaTi02(平均粒徑 400nm、及 l"m) 、Ti02 (平均粒徑2 // m)。另外，並未對第1粒子32之 表面進行任何處理。更且，作爲第2粒子3 3，係對單體 組成物之重量混合l〇wt%之酐CaO粒子（平均粒徑3 # m )，且同樣地使之分散。上述的操作，係爲了迴避吸濕而 在乾燥氮環境下進行。 將所獲得的混合物藉由旋轉塗佈機（spin coater)( 0 旋轉數5000rpm )成膜於玻璃製的基板10上之後，使用 UV-LED燈使膜硬化。UV-LED燈，係使用中心波長 3 7 5nm、輸出1 2mW/cm2，且照射60秒。此等的操作也是 在氮環境下進行。如此可獲得膜厚約爲1 〇 # m的封閉膜 30。其次，將該封閉膜30隔著折射率調整液安裝在形成 於玻璃基板上的底部發射型OLED元件之玻璃基板側。在 使用積分球來評估從玻璃基板有安裝封閉膜3 0的情況與 未安裝封閉膜30的情況之OLED釋放出的光之量時，有 〇 安裝的情況對未安裝的情況之光量的比，係如表1。 [表1] 平均粒徑 亮度比 Zr02 570ran 1.72 1 βνα 1.82 2/zm 1.84 BaTi02 400nm 1.73 1 /zm 1.66 Ti〇2 2/zm 1.58 -17- 201217444 在本實施形態1中，雖然於| 使用光硬化型的脂環式環氧樹脂， 是藉由短時間的U V光照射，不會 硬化的樹脂、或在1 〇 〇 °C左右之溫 穿透率爲90%以上的透明樹脂即 例如可列舉環氧系樹脂、丙烯酸系 脂、矽氧系樹脂等。環氧系樹脂， 受損傷’且有因光照射所引起的脫 都包含時可擴大硬化方法或硬化條 烯酸系樹脂及甲基丙烯酸系樹脂， 選項極多等的優點。矽氧系樹脂， 照射極爲安定的優點。除此之外也 酸乙酯系樹脂、纖維素系樹脂等的 光散射用之粒子（第1粒子 態1中所採用的3種。只要是透明 脂即可。作爲如此的粒子，例如 A1203等。就粒子的大小而言也非 。若平均粒徑爲200nm至10#m 範圍內的話’則大致可將光取出量 。若爲400nm至2 /z m的話則至少 就粒子的濃度而言也非被限定於上 樹脂的重量若爲2wt%至50wt%的 上的光取出量。更且，若爲5至 增力□ 1 . 4倍、若爲1 0至2 5 w t %的 爵脂（有機樹脂膜3 1 ) 但是並非限於此。只要 使OLED蒙受損傷而光 度下熱硬化的樹脂，且 可。作爲如此的樹脂， 樹脂、甲基丙烯酸系樹 係比較不易對光照射蒙 氣較少、及當連熱硬化 件之選項等的優點。丙 係有穿透率高且硬化之 係有透明性極高且對光 有乙烯系樹脂、胺基甲 選項。 32 )也非限於本實施形 、安定且折射率大於樹 可歹 IJ 舉 Ζ η Ο X ' Υ 2 〇 3 ' 被限定於上述所列舉者 之大小，且在下述濃度 至少增加至1 . 3倍左右 可增加至1 . 5倍左右。 述。粒子的濃度相對於 話，則可獲得1 .3倍以 30wt%的話則大致能夠 話則大致可增加1 . 5倍 -18- 201217444 以上的光取出量。粒子種、平均粒徑同樣並非被限定於單 一者，亦可混合有複數種之物。 又，吸濕用之粒子（第2粒子33)也非被限定於上 述。亦可爲除了 CaO以外的鹼土類金屬氧化物（例如 MgO、SrO、BaO)、鹼金屬氧化物（例如 Li20、Na20、 K20 )、金屬鹵化物（例如 CaCl2、MgCl2、SrCl2、YC12 、CuCl、CsF、TaF2 )、金屬硫化物（例如 Li2S04、 0 Na2S04、CaS04、MgS04)等其他具有吸濕性的物質。有 關於粒徑，雖然在本實施形態1中是使用平均粒徑爲3 β m之物，但是即便使用從光之波長的數分之1至1 0倍 左右的大小之粒子也是沒有問題。粒徑只要至少在該範圍 內、或分佈於該範圍內即可。更且，亦可就粒子之種類、 粒徑而包含複數種之如此的粒子。 有關封閉膜30之形成方法，雖然在本實施形態1中 使用旋轉塗佈機，但是也非被限定於此。 ❹ (實施形態2) 本實施形態2的封閉膜，係藉由賦予光取出功能與封 閉功能之有機膜與無機膜的積層膜而構成。第4圖係顯示 該構成之剖面示意圖。 首先，在玻璃製的基板10上以濺鍍法形成由Si ON 構成的無機膜41a。調節成膜時的氣體流量，且以膜中的 氧原子（〇)與氮原子（N)之比率（〇: N)大致成爲7 :3的方式而成膜。此時的膜密度爲3g/cm2，折射率爲 -19- 201217444 1.8。膜厚係大致設爲lOOnm。 其次，在無機膜4 1 a上與前述實施形態1同樣地形成 :分散著光散射用之粒子（第1粒子）與吸濕用之粒子（ 第2粒子）的有機樹脂膜31a。反覆進行該操作’可獲得 堆積有3層包含無機膜41a、41b、41c與有機樹脂膜31a 、31b、31c之群組的積層膜。最後，在該積層膜上同樣 地形成無機膜41d，如此獲得由有機膜與無機膜之積層構 造所構成的封閉膜40。 無機膜之組成並非限於SiON。膜之密度可藉由降低 氧原子（〇 )之比率而提高，且可提高障壁性，但相反地 則有產生著色的缺點。另一方面，膜之折射率可藉由提高 氧原子（〇)之比率而降低，且因在有機膜與無機膜之界 面反射而引起的損失會變少，但相反地，膜之密度會變小 ，且障壁性會降低。 又，無機膜41a、41b、41c、41d之各自的組成或膜 厚亦可在各層有所不同。藉此，例如可藉由事先提高與空 氣相接之側的無機膜之透濕性，來更加延長壽命。在該情 況下，藉由降低其他的無機膜之折射率，並進行將從 OLED之發光層側入射的光取入更多於封閉膜40的作業 ，就可減少因形成於與大氣相接之高折射率的無機膜與空 氣膜之間的較大之折射率差而引起的反射損失。更且，無 機膜之層數也非被限定於4層。 同樣地，有機樹脂膜3 I a、3 1 b ' 3 1 c之組成也沒有必 要在所有的層爲相同。例如，藉由在更接近發光層側之膜 -20- 201217444 設定高濃度之光散射用之粒子（第1粒子），且在更接近 空氣側之層設定高濃度之吸濕用之粒子（第2粒子）’就 不損散射功能，而可提高吸濕性。更且，有機樹脂膜之層 數也非被限定於3層。 又，在本實施形態2中，雖然是在基板10上最初形 成無機膜41a，但是亦可最初形成有機樹脂膜31a。在最 初形成無機膜的情況，會有如下優點：在形成有機樹脂膜 0 時，無機膜可起作爲對基底之障壁膜的作用。 (實施形態3 ) 第5圖係顯示使用前述實施形態2之封閉膜40的頂 部發射型OLED之構成的剖面示意圖。如第5圖所示，頂 部發射型OLED，係成爲在基板1〇上依序積層反射電極 11、包含有機發光層的有機分子層12、透明電極13、封 閉膜40的構成。構成陰極的反射電極1 1，係由如銀（Ag 0 )或A1 (鋁）之將光予以反射的金屬所構成，而構成陽 極的透明電極13，係由ITO或IZO等所構成。 上述OLED之形成順序，係按照專利文獻4 (日本特 開201 0-067464號公報）中記載於第2實施形態的方法而 進行。又，構成OLED的各層，係爲了要防止損傷，而在 真空裝置內成膜。其次，在透明電極13上形成封閉膜40 。惟，在前述實施形態2中，雖然是在玻璃基板上形成封 閉膜40，但是在本實施形態3中，係在透明電極13上形 成封閉膜40。在該情況下，最初成膜於透明電極1 3上者 -21 - 201217444 ’較佳是無機膜，而非爲有機膜。此是爲了可防止因形成 有機膜時之液狀單體與硬化時所照射的UV光而引起對基 底層（OLED )的損傷之故。 在OLED上形成封閉膜40的情況，由於透明電極13 可發揮作爲暫時封閉膜之功能，所以之後的有機膜之形成 也可在大氣下俐落地進行。但是，爲了要防止該時大氣中 的水分吸附於各膜之表面、或各膜進行吸濕，較期望是在 乾燥惰性氣體下進行。又，即使在真空層與乾燥惰性氣體 環境間進行搬運時，也較期望不暴露於大氣中而是移動於 真空裝置之負載鎖定室與乾燥惰性氣體環境間。 以上，雖然已根據實施形態具體地說明由本發明人所 開發完成的發明，但是在不脫離其要旨之範圍內可作各種 變更自屬當然。 本發明之封閉膜，並非僅是當作OLED之封閉膜，亦 可當作兼備有光取出功能、與水分或氧之封閉功能的功能 性膜而在各種領域中利用。 (產業上之可利用性） 本發明係可利用於具備有OLED等所需之光取出功能 與封閉功能的封閉膜。 【圖式簡單說明】 第1圖中的（a )係顯示折射率不同的物質界面中之 光的反射及折射之樣態的示意HI ;( b )係顯示光穿透二 -22- 201217444 個界面之情況的不意圖；（c)係顯示已穿透一個界面後 的光在下一個界面接受全反射之樣態的示意圖。 第2圖係顯示在〇LED之發光層內所發出的光是如何 傳播於OLED內的示意圖。 第3圖係顯示作爲本發明之實施形態1的封閉膜之剖 面示意圖。 第4圖係顯示作爲本發明之實施形態2的封閉膜之剖 〇 面示意圖。 第5圖係顯示使用本發明之封閉膜的頂部發射型 O LED之構成的剖面示意圖。 【主要元件符號說明】 1 0 :基板 1 1 :反射電極 12 :有機分子層 〇 1 3 :透明電極 1 4 :透明玻璃層（封閉層） 1 5 :空氣層 2 1 :發光點 2 2至2 7 :路徑 3 0 :封閉膜 31、31a至31c:有機樹脂膜 32 :第1粒子 3 3 :第2粒子 -23- 201217444 40 :封閉膜 4 1 a至4 1 d :無機膜 -24201217444 6. TECHNOLOGICAL FIELD OF THE INVENTION The present invention relates to a sealing film, and more particularly to a sealing film suitable for a light-removing function and a sealing function required for an organic light-emitting diode or the like. . [Prior Art] Organic Light-Emitting Diode (OLED) is a method of injecting a charge carrier (electrons and holes) into an organic molecular layer of a film, and recombining the charge carriers in the organic molecular layer. Thereby converting electricity into light components. A semiconductor or an insulator may be used in the organic molecular layer of the film, and the luminescent energy may vary depending on the kind of the molecule or its energy gap. Therefore, since the luminescent color can be controlled by appropriately selecting the molecules, a color luminescent element can be formed by using molecules which emit red, green and blue light which constitute the three primary colors of light. For this reason, OLE D has been actively engaged in research and development centering on display devices and lighting devices and targeting applications in the world. In the case of an OLED, the charge carrier is implanted into the organic molecular layer, although electrons are injected from the cathode and injected into the hole from the anode, respectively, but in order to increase the injection efficiency, a different material may be used for the cathode and the anode. Typically, as the anode material, for example, an indium tin oxide (IT Ο 5- 201217444 or an organic conductor such as PEDOT : PSS ( poly ( 3,4-ethylenedioxythiophene ) : poly ( styrenesulfonate ) (poly(3,4-diethoxyethylphene: polystyrenesulfonic acid)). As the cathode material, an electric conductor composed of an alkali metal having a small work function, an alkaline earth metal, and the like can be used. The organic molecular layer of the LED is a layer responsible for light emission, but usually a single layer is used. The carrier layer, the carrier blocking layer, the carrier generating layer, etc. corresponding to the kind of the carrier may be suitably used in addition to the light-emitting layer. These layers are basically for the purpose of improving luminous efficiency, and In many cases, organic matter is used. Thus, OLE D, which has a direct relationship with luminescence, is mostly composed of organic matter. Generally, these organic substances are relative to oxygen or It is well known that water is in an unstable state. Similarly, an alkali metal or alkaline earth metal used for a cathode and a compound thereof are also known to be unstable with respect to moisture or oxygen. When water or oxygen reacts, the organic molecules constituting the Ο LED will passivate its function and lose its luminescent function. Moreover, the cathode will change into a different compound by reacting with water or oxygen, and lose the injection electrode as a charge carrier. For example, Non-Patent Document 1 describes a passivation of luminescence caused by deterioration of a cathode caused by placing an OLED in the atmosphere. Therefore, in order to avoid such an influence, a 〇 LED element is usually used. In the case of Non-Patent Document 2, it is described that the moisture permeability is 1 (T7g/m2 · day) by the organic structure/inorganic material laminated structure. The sealing film' and the sealing film of -6-201217444 is applied to the OLED. The light emitted from the OLED is recombined with the electrons in the organic molecules of the luminescent layer, and The OLED is released in a omnidirectional manner around the organic molecule. The OLED is a multilayer structure composed of an organic layer such as a carrier transport layer, an electrode, a sealing layer, etc., and since each layer has an inherent refractive index, the emitted light is Reflected and refracted according to the incident angle of the interface of each layer. 0 (a) in Fig. 1 is a schematic diagram showing the reflection and refraction of light in the interface of a substance having a different refractive index. In the case of the interface between the substance of ni and the substance of n2, in general, light does not advance directly at the interface, and some of it will reflect, and the rest will refract and penetrate the interface. At this time, the relationship between nisin0i = n2sin02 is established between the incident angle Θ i and the refraction angle 02 with respect to the normal to the interface. Therefore, in the case of ηι > η2, light incident at an incident angle Q larger than the critical angle 0c satisfying can be totally reflected at the interface. Figure 1(b) is a schematic diagram showing the case where light penetrates the two interfaces. Since the incident angles hi, θί2 of the light at the two interfaces are smaller than the critical angle 6 > c generated by total reflection, the light penetrates from the layer having the refractive index η! to the layer having the refractive index η3. Figure 1(c) is a schematic diagram showing the state in which light that has penetrated an interface is totally reflected at the next interface. Since the incident angle of the interface at the interface of the layer of the refractive index ηι and the layer of n2 is smaller than the critical angle, the light that has penetrated the interface can be totally reflected at the interface of the layer of the refractive index n2 and the layer of 113. . The totally reflected light can be enclosed in the inner layer of the layer having the refractive index of ～ and n2 as long as the incident angle incident on the interface does not change due to scattering, and is attenuated by propagation in the layer. The typical enthalpy of the refractive index of each layer constituting the OLED is 1.7 to 1.8 in the case of each layer of the organic molecule, and about 2.0 in the case of the transparent electrode. In the case where a general glass having a refractive index of about 1.5 is used for the sealing material, since the refractive index of the air layer outside the element is 1. 〇, the light is emitted from the organic molecular layer as the light-emitting layer to the air layer. It will reflect and refract over and over at multiple interfaces. The schematic diagram showing this state is shown in Fig. 2. The light emitted from the light-emitting point 2 1 in Fig. 2 radiates in all directions with the light-emitting point 21 as the center, but half of it is reflected by the reflective electrode 11 on the substrate 10. Further, the light emitted in the horizontal direction indicated by the path 23 is propagated in the organic molecular layer 12 as long as it is not scattered, and is attenuated by reflection, penetration, and scattering at its end portion, and finally eliminated. Further, the light radiated in the upward direction of FIG. 2 (the light emitted in the direction indicated by the paths 24, 25, 26, 27) and the light reflected on the surface of the reflective electrode (released in the direction indicated by the path 22) The emitted light is reflected and refracted at the interface of each of the organic molecular layer 12, the transparent electrode 13 and the transparent glass layer (closed layer) 14 and partially reaches the air layer 15. Moreover, the residual light is reflected and refracted at the interface of the above layers and is enclosed in each layer, and is not released in the air layer 15 but is attenuated and destroyed inside the 〇LED, or at the end of the OLED. The horizontal direction of the component penetrates. That is, in the case where the OLED element is not subjected to any work for taking out the light to the outside, -8 - 201217444 may occur that only a part of the emitted light can be taken out to the outside. For example, in the case of the configuration shown in Fig. 2 according to Non-Patent Document 3', only about 20% of the emitted light can be taken out. In order to solve the above problem, in the case where Ο L E D is applied, an operation of taking out the emitted light can be performed. For example, there is a method of closely arranging the microlenses at the interface between the transparent glass layer 14 and the air layer 15 of FIG. 2 or the interface between the transparent electrode 13 and the transparent glass layer 14, and changing the refractive direction at the boundary 0 to increase a method of extracting light; and a method of fabricating a minute grating at the interface, and increasing the amount of light taken out by diffraction; and a method of forming a photonic crystal at an interface; and utilizing a film in which fine particles are dispersed Method of scattering light, etc. Non-Patent Document 3 is an example of how to perform work. As described above, in the case of applying an OLED, there is a problem in that deterioration of the device due to moisture or oxygen is prevented, and light that is easily lost inside the device is efficiently taken out. Therefore, in the current state of the art, for example, in Patent Document 1, it is possible to solve the respective problems by layering layers corresponding to the above problems. Further, as disclosed in Patent Document 2 and Patent Document 3, it is also carried out by dispersing metal oxide particles and a moisture-absorbing substance in a binder or a sealant at the same time, thereby providing light extraction and suction using light scattering. Wet film. Patent Document 4 discloses an organic light-emitting device in which a first reflective electrode, an electron transport layer, a light-emitting layer, a hole transport layer, a hole injection layer, and a second transparent electrode are formed on a glass substrate, and the second transparent layer is formed. Light having an average refractive index of 1.4, which is composed of titanium dioxide (titania -9 - 201217444) particles having a refractive index of 2.6 and an average particle diameter of 150 nm and tantalum, is formed on the electrode, and light emitted from the light-emitting layer is efficiently taken out. [Patent Document 1] Japanese Patent Publication No. 2008-538155 (Patent Document 2) Japanese Laid-Open Patent Publication No. 2006-286627 (Patent Document 3) Japanese Patent Laid-Open No. 2007-184279 (Patent Document 4) No. 067464 [Non-Patent Document] (Non-Patent Document 1) Surface Science Journal, Volume 25, Year (Non-Patent Document 2) International Display Technology Forum 1593 (Proc. IDW, 10, 1 593 (201 0) (Non-Patent Document 3) Optical Materials Journal, Vol. 32: 2009) (Optical Materials 32, 22 1 (2005) [Summary of the Invention] (Problems to be Solved by the Invention) However, layers are layered to solve each problem. The method of the respective document 1 has a problem of an increase in the number of processes and an increase in the strength of the member. Further, in the case where a laminate film of an organic film such as a non-patent document is used for a film, a refraction of the g layer occurs. The rate is inconsistent, and the layer is out of the light extraction surface, and the system is introduced in accordance with the bulletin of the Gazette, and the second paragraph (2, 0, 4, 2010, Item 221 (•): the subject patent) Each of the inorganic film / the hoarding film: the problem of loss - 201217444 Moreover, in Patent Document 2 In the method disclosed in the third aspect, it is not always possible to solve all of the above problems of the OLED, that is, the size of the metal oxide particles dispersed in the binders used in Patent Documents 2 and 3, in order to keep the film transparent. The properties are limited to an average of 100 nm or less. However, the cured film of the dispersed composition obtained by dispersing such particles in a binder or the like only refracts light of visible light emitted from the OLED. Since the size of the particles is small relative to the wavelength of the visible light, only 0 produces almost the degree of scattering caused by the particles, and only the light can sense the average refractive index of the bonding agent due to the incorporation of the particles. Therefore, as the light extraction function, only the effect caused by the addition of the film having a large refractive index is obtained, and as a result, the main effect is that the refractive index difference with the surrounding substance changes and the amount of light is blocked. In addition, in many cases, the average refractive index of the binder or the like is increased by the mixing of the metal oxide particles, and the refractive index difference with the surrounding material Since it is large, it is not expected to have much effect from the viewpoint of light extraction. The purpose of the present invention is to provide a sealing film which has a light extraction function and a moisture absorption function which are required for an organic light-emitting diode or the like. The above and other objects and novel features of the present invention can be understood from the description of the specification and the accompanying drawings. (The means for solving the problem) The sealing film of the present invention is characterized in that the first particle is dispersed in the organic film. Further, by the light scattering of the first particles, a light extraction function is provided, and the second particles composed of the moisture absorbing material are dispersed in the organic film to impart a sealing function of moisture -11 - 201217444 or oxygen. The organic film used in the present invention preferably has a refractive index of the same degree as the refractive index of a material which is transparent and serves as a substrate. Thereby, it is not necessary for the light which penetrates the substrate and reaches the interface with the sealing film to be reflected and refracted at the interface to be taken into the organic film. Further, the organic film is preferably a resin which is cured by heat or light. Since the ruthenium is not damaged during hardening, it can be hardened as short as possible at a low temperature in the case of heat hardening. Specifically, it is preferably hardened at a temperature of about 80 to 1 〇 〇 °C. In the case of photohardening, it is also necessary not to damage the organic molecular layer of the OLED. In the case of photocuring of a resin, although UV light is generally used, short-wavelength UV light is easily damaged by long-wavelength UV light because it is easily damaged. The size of the first particles mixed in the organic film in order to generate light scattering is necessary to efficiently scatter the light emitted from the OLED. Therefore, the average particle diameter ' of the first particles is preferably about 1 to 10 times the number of wavelengths of light. Specifically, it is preferably from 200 nm to 1 〇//m, more preferably from 400 nm to 2//m. The material of the first particles may be transparent and have a refractive index larger than that of the organic film. Since the refractive index of a general organic resin is at most about 丨3 to about 1.7, it is only required to be 1·8 or more. The transparent particles having a high refractive index are occupied by metal oxides, so that about 1.8 to 2.8 is a practical flaw. The shape of the first particle ' is preferably a spherical shape or a polyhedron close thereto. However, it is not necessary. It is necessary to have a regular shape such as a cube -12-201217444. As long as there is no large anisotropy in the characteristic length of the microparticles, it is also possible to have irregularities on the surface. The concentration of the first particles in the organic film depends on the dispersibility of the particles on the organic film, but is preferably from 2 to 50% by weight, particularly preferably from 5 to 30% by weight, more preferably from 10 to 25% by weight. The thickness of the sealing film, although depending on the size and concentration of the particles in the dispersion and the viscosity of the composition constituting the organic film, is preferably from 1 to 200 〇/im, particularly preferably from 1 to 50/m, and more preferably Good is about 1 to 10/zm. By forming a sealing film under such conditions, light incident on the sealing film and which is reflected or totally reflected at the interface and retained in the sealing film can be efficiently taken out to the outside. As the second particle dispersed in the organic film for moisture absorption, a hygroscopic substance such as an alkaline earth metal oxide, an alkali metal oxide, a metal halide, a metal sulfate or a metal perchlorate is used. The particles that make up. Even in this case, it is preferably an alkaline earth metal oxide from the viewpoints of handling, cost, moisture absorption ability and the like. In general, the powder system does not depend on the material but has a hygroscopic property. The second particles to be mixed with the resin for moisture absorption are preferably those which are not as hygroscopic as possible. Even from such a viewpoint, it is more preferable because CaO is easier to obtain an anhydride. The diameter of the second particle is an effect of changing the average refractive index of the resin when the wavelength of the light is too small. Therefore, when the organic film is selected, as long as the effect is not considered, it is not suitable for the wavelength of the light. Particles having too small a particle size (specifically, a particle diameter of approximately less than 200 nm). Particles with a particle size of less than 2,000 nm have the following advantages: surface area to volume ratio is higher -13 - 201217444, and in comparison with the same weight, the absorption efficiency is higher than that of the larger particle size. high. However, since it is necessary to perform a treatment of modifying the surface or the like with an organic molecule for the purpose of dispersion when the particle diameter is small, it is not preferable in terms of hygroscopicity. On the other hand, if the particles are too large (having a particle diameter of 200 // m or more), the absorption efficiency is lowered because the ratio of the surface area to the volume is small, which is not preferable. Therefore, the average particle diameter of the second particles is preferably about 200 nm to 200 m/z m. Further, when the second particle for moisture absorption also has a light scattering function, it is preferable to control the optical function to have the same size as the first particle for light scattering. For example, in addition to the particles for light scattering (first particles), it is also considered that the particles of CaO (second particles) are dispersed in the resin at a concentration of 20% by weight based on the weight of the organic resin, thereby forming 10 0 / m The case of a film with a film thickness. Since the density of the resin is approximately pP lg/cm 3 and the density of CaO is ～3.35 g/cm 3 , when CaO completely absorbs water, it can absorb 747.4 mg/m 2 ( 41.5 mol per unit area). ). In reality, when the i〇wt% of the dispersed particles contributes to moisture absorption, it absorbs 74.7 mg/m2 of water. For example, in the Proceedings of Internati onal Society for Optical Engineering, Vol. 4105, Item 75 (2001) (Pro c· SPIE 41.05, 75 (2001)·) Trial calculation of water vapor transmission rate. According to this, the moisture permeability of <i〇-5g/m2*day is required in the OLED device. This document is based on the amount of water required for the passivation of the cathode electrode for OLEDs. Therefore, it is actually expected that a more stringent benchmark than the -14-201217444 trial is required, and the moisture permeability rate required for OLED is set to 1 0_6g/m2 · day. By laminating an organic film and an inorganic film, a laminated type sealing film which can meet the required specifications for about two years can be obtained, and the organic film is dispersed with the i-th and second particles. The inorganic film exhibits, for example, water vapor permeation. The rate is 10 · 4g / m2 · day moisture permeability, and can penetrate visible light. Further, the thickness of the sealing film is increased, or the concentration of the dispersed particles is increased, or the moisture permeability of the inorganic film is further lowered, whereby the moisture absorption property can be further improved. In this way, the sealing film is a laminated structure of an organic film and an inorganic film, whereby the high-performance and long-life of the sealing function and the addition of the light extraction function can be simultaneously and easily achieved. Since the fine particles cannot be dispersed in the above inorganic film, when determining the composition of the inorganic film, it is necessary to select a refractive index which is taken out in consideration of light extraction. The inorganic film used in the present invention preferably has a refractive index of about 1.5 to 2.2 and a density of about 2.2 to 3.3 g/cm3. As such an inorganic film, for example, SiO 2 , SiN, SiON or the like can be cited. Such films are well known in that the film density varies depending on the film formation method or film formation conditions, and the refractive index also changes. For example, Japanese Laid-Open Patent Publication No. 2003-262750 discloses that the refractive index changes depending on the amount of nitrogen supplied during film formation of the SiON film. Further, since the SiN film can widely change the composition of the film from SiO 2 to Si N, the control range of the refractive index can also be expanded. (Effect of the Invention) Among the inventions disclosed in the present invention, the effects obtained by the representative invention will be briefly described as follows. -15- 201217444 A closed film that combines the light extraction function required for OLEDs and the sealing function with moisture or oxygen. [Embodiment] (Embodiment 1) FIG. 3 is a schematic cross-sectional view showing a sealing film having a light extraction function and a sealing function according to an embodiment of the present invention. As shown in FIG. 3, a sealing film 30 composed of an organic resin film 31 in which the first particles 3 2 for light scattering and the second particles for moisture absorption are dispersed is formed on the substrate 10. 3 3. Further, since the particle diameter of the first particles 3 2 and the particle diameter of the second particles 3 3 have a distribution, the unevenness occurs in the particle diameter centering on the average particle diameter. In the first embodiment, an epoxy resin is used for the organic resin film 31. First, in order to photoharden an epoxy monomer, 5 parts by weight of an epoxy generator and 5 parts by weight of an optical sensitizer are mixed with 100 parts by weight of the epoxy monomer, and a composition is obtained in this manner. 3,4-Epoxycyclohexylmethyl 3,4-epoxycyclohexanecarboxylate is used in the above epoxy monomer, and diphenyl is used in the oxygen generator. Diphenyliodonium hexafluorophosphate, 9,10-dibutoxyanthracene is used in the photosensitizer. Here, 25 wt% of the first particles 32 were mixed, and the particles were dispersed by spin stirring and ultrasonic treatment. Zr02 (average particle diameter 0.57 // m, 1 -16-201217444 ym, and 2/zm), BaTi02 (average particle diameter: 400 nm, and l" m), and Ti02 (average particle diameter 2 /) are used for the first particles 32, respectively. / m). Further, no treatment was applied to the surface of the first particle 32. Further, as the second particles 3 3, 100% by weight of anhydride CaO particles (average particle diameter 3 # m ) were mixed with the weight of the monomer composition, and dispersed in the same manner. The above operation was carried out in a dry nitrogen atmosphere in order to avoid moisture absorption. The obtained mixture was formed into a glass substrate 10 by a spin coater (0 rotation number: 5000 rpm), and then the film was cured using a UV-LED lamp. The UV-LED lamp used a center wavelength of 375 nm, an output of 12 mW/cm2, and was irradiated for 60 seconds. These operations are also carried out under a nitrogen atmosphere. Thus, a sealing film 30 having a film thickness of about 1 〇 # m can be obtained. Next, the sealing film 30 was attached to the glass substrate side of the bottom emission type OLED element formed on the glass substrate via a refractive index adjusting liquid. When the integrating sphere is used to evaluate the amount of light emitted from the OLED in the case where the sealing film 30 is mounted from the glass substrate and the OLED in the case where the sealing film 30 is not mounted, the ratio of the amount of light installed in the case of the mounting is not the case, As shown in Table 1. [Table 1] Average particle diameter luminance ratio Zr02 570ran 1.72 1 βνα 1.82 2/zm 1.84 BaTi02 400nm 1.73 1 /zm 1.66 Ti〇2 2/zm 1.58 -17- 201217444 In the first embodiment, although photohardening is used The alicyclic epoxy resin is a resin which does not harden by irradiation with short-time UV light, or a transparent resin having a temperature transmittance of about 90% or more at about 1 ° C, that is, for example, a ring An oxygen resin, an acryl resin, a fluorene resin, or the like. The epoxy resin is damaged and has a tendency to be removed by light irradiation, and the hardening method or the cured resin resin and the methacrylic resin can be expanded, and the options are extremely high. The oxygen-based resin has the advantage of extremely stable irradiation. In addition, particles for light scattering such as an acid ethyl ester resin or a cellulose resin (three types used in the first particle state 1 may be used as long as it is a transparent grease. Examples of such particles include A1203 and the like. In terms of the size of the particles, if the average particle diameter is in the range of 200 nm to 10 #m, the amount of light can be roughly taken out. If it is 400 nm to 2 /zm, at least the concentration of the particles is not The weight of the upper resin is limited to 2% by weight to 50% by weight of the light extraction amount. Moreover, if it is 5 to the force □ 1.4 times, if it is 10 to 2 5 wt% of the koji (organic The resin film 3 1 ) is not limited thereto. As long as the OLED is damaged, the resin is thermally cured under the luminosity, and as such a resin, the resin or the methacrylic tree is less likely to be less exposed to light, and Advantages such as the option of the heat-hardening member, etc. The system has a high transmittance and a high degree of transparency, and has a vinyl resin and an amine-based option. 32) It is not limited to this embodiment, and is stable. And the refractive index is greater than the tree 歹IJ Ζ η Ο X ' Υ 2 〇3 ' is limited The size of those mentioned above, and to increase in the following concentration of at least about 1.3 times increased to about 1.5 times. Said. When the concentration of the particles is relatively large, it is possible to obtain a light extraction amount of substantially 1.5 times -18-201217444 or more. The particle species and the average particle diameter are also not limited to a single one, and a plurality of kinds may be mixed. Further, the particles for moisture absorption (second particles 33) are not limited to the above. It may also be an alkaline earth metal oxide other than CaO (for example, MgO, SrO, BaO), an alkali metal oxide (for example, Li20, Na20, K20), a metal halide (for example, CaCl2, MgCl2, SrCl2, YC12, CuCl, CsF). , TaF2), metal sulfides (such as Li2S04, 0 Na2S04, CaS04, MgS04) and other hygroscopic substances. In the first embodiment, the average particle diameter is 3 β m. However, even if a particle having a size of about 1 to 10 times the wavelength of light is used, there is no problem. The particle diameter may be at least within the range or within the range. Further, a plurality of such particles may be contained in terms of the kind and particle diameter of the particles. In the method of forming the sealing film 30, the spin coater is used in the first embodiment, but it is not limited thereto. (Embodiment 2) The sealing film of the second embodiment is constituted by a laminated film of an organic film and an inorganic film which provide a light extraction function and a sealing function. Fig. 4 is a schematic cross-sectional view showing the configuration. First, an inorganic film 41a made of Si ON is formed on a glass substrate 10 by sputtering. The gas flow rate at the time of film formation was adjusted, and the film was formed so that the ratio (〇: N) of the oxygen atom (〇) to the nitrogen atom (N) in the film was approximately 7:3. The film density at this time was 3 g/cm 2 and the refractive index was -19 - 201217444 1.8. The film thickness is approximately set to 100 nm. Then, in the inorganic film 4 1 a, an organic resin film 31a in which particles for light scattering (first particles) and particles for moisture absorption (second particles) are dispersed is formed in the same manner as in the first embodiment. This operation is repeated, and a laminated film in which three layers including the inorganic films 41a, 41b, and 41c and the organic resin films 31a, 31b, and 31c are deposited can be obtained. Finally, the inorganic film 41d is similarly formed on the laminated film, and thus the sealing film 40 composed of the laminated structure of the organic film and the inorganic film is obtained. The composition of the inorganic film is not limited to SiON. The density of the film can be increased by lowering the ratio of oxygen atoms (〇), and the barrier property can be improved, but conversely, there is a disadvantage of coloring. On the other hand, the refractive index of the film can be lowered by increasing the ratio of oxygen atoms (〇), and the loss due to reflection at the interface between the organic film and the inorganic film becomes less, but conversely, the density of the film changes. Small, and the barrier properties will be reduced. Further, the composition or film thickness of each of the inorganic films 41a, 41b, 41c, and 41d may be different in each layer. Thereby, for example, the moisture permeability of the inorganic film on the side in contact with the air gas can be increased in advance to further extend the life. In this case, by reducing the refractive index of the other inorganic film and performing the operation of taking in more light from the side of the light-emitting layer of the OLED into the sealing film 40, it is possible to reduce the formation due to the atmosphere. A reflection loss caused by a large refractive index difference between the high refractive index inorganic film and the air film. Further, the number of layers of the inorganic film is not limited to four layers. Similarly, the composition of the organic resin film 3 I a, 3 1 b ' 3 1 c is not necessarily the same in all layers. For example, by setting a high-concentration particle for light scattering (first particle) on the film -20-201217444 closer to the light-emitting layer side, and setting a high-concentration moisture-absorbing particle on the layer closer to the air side (p. 2 particles) 'can not absorb the scattering function, but can improve the hygroscopicity. Further, the number of layers of the organic resin film is not limited to three layers. Further, in the second embodiment, the inorganic film 41a is initially formed on the substrate 10. However, the organic resin film 31a may be formed initially. In the case where the inorganic film is initially formed, there is an advantage that the inorganic film can function as a barrier film to the substrate when the organic resin film 0 is formed. (Embodiment 3) Fig. 5 is a schematic cross-sectional view showing the configuration of a top emission type OLED using the sealing film 40 of the second embodiment. As shown in Fig. 5, the top emission type OLED has a configuration in which a reflective electrode 11 , an organic molecular layer 12 including an organic light-emitting layer, a transparent electrode 13, and a sealing film 40 are sequentially laminated on a substrate 1A. The reflective electrode 1 1 constituting the cathode is made of a metal such as silver (Ag 0 ) or A1 (aluminum) that reflects light, and the transparent electrode 13 constituting the anode is made of ITO or IZO. The order of formation of the OLED described above is carried out in accordance with the method described in the second embodiment of Patent Document 4 (JP-A-201-067464). Further, each layer constituting the OLED is formed into a film in a vacuum apparatus in order to prevent damage. Next, a sealing film 40 is formed on the transparent electrode 13. However, in the second embodiment, the sealing film 40 is formed on the glass substrate. However, in the third embodiment, the sealing film 40 is formed on the transparent electrode 13. In this case, the film -21 - 201217444' which is initially formed on the transparent electrode 13 is preferably an inorganic film, not an organic film. This is to prevent damage to the underlayer (OLED) caused by the liquid monomer when the organic film is formed and the UV light irradiated during curing. In the case where the sealing film 40 is formed on the OLED, since the transparent electrode 13 functions as a temporary sealing film, the formation of the subsequent organic film can also be carried out in the atmosphere. However, in order to prevent the moisture in the atmosphere from being adsorbed on the surface of each film or the respective films to absorb moisture, it is more desirable to carry out the reaction under a dry inert gas. Further, even when transported between the vacuum layer and the dry inert gas atmosphere, it is more desirable to move between the load lock chamber of the vacuum apparatus and the dry inert gas atmosphere without being exposed to the atmosphere. The inventions developed by the inventors of the present invention have been specifically described above, but various modifications can be made without departing from the spirit and scope of the invention. The sealing film of the present invention is not only used as a sealing film for an OLED, but also can be used in various fields as a functional film having a function of light extraction and sealing with moisture or oxygen. (Industrial Applicability) The present invention is applicable to a sealing film having a light extraction function and a sealing function required for an OLED or the like. [Simple description of the drawing] (a) in Fig. 1 shows the HI of the reflection and refraction of light in the interface of substances with different refractive indices; (b) shows the penetration of light through two-22-201217444 The intention of the interface is not intended; (c) is a schematic diagram showing the state in which the light that has penetrated one interface receives total reflection at the next interface. Figure 2 is a schematic diagram showing how light emitted within the luminescent layer of the erbium LED propagates within the OLED. Fig. 3 is a schematic cross-sectional view showing a sealing film as a first embodiment of the present invention. Fig. 4 is a cross-sectional view showing the sealing film of the second embodiment of the present invention. Fig. 5 is a schematic cross-sectional view showing the configuration of a top emission type O LED using the sealing film of the present invention. [Description of main component symbols] 1 0 : Substrate 1 1 : Reflective electrode 12 : Organic molecular layer 〇 1 3 : Transparent electrode 1 4 : Transparent glass layer (closed layer) 1 5 : Air layer 2 1 : Light-emitting point 2 2 to 2 7 : Path 3 0 : Sealing film 31 , 31 a to 31 c : Organic resin film 32 : First particle 3 3 : Second particle-23 - 201217444 40 : Sealing film 4 1 a to 4 1 d : Inorganic film-24