TW201211577A - Optical glass rod, manufacturing method thereof, and laser generation device therewith - Google Patents

Optical glass rod, manufacturing method thereof, and laser generation device therewith Download PDF

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Publication number
TW201211577A
TW201211577A TW100113967A TW100113967A TW201211577A TW 201211577 A TW201211577 A TW 201211577A TW 100113967 A TW100113967 A TW 100113967A TW 100113967 A TW100113967 A TW 100113967A TW 201211577 A TW201211577 A TW 201211577A
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Taiwan
Prior art keywords
optical glass
glass rod
optical
assembly
end faces
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Application number
TW100113967A
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Chinese (zh)
Inventor
Koichi Kajiyama
Michinobu Mizumura
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V Technology Co Ltd
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Publication of TW201211577A publication Critical patent/TW201211577A/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • H01S3/08013Resonator comprising a fibre, e.g. for modifying dispersion or repetition rate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/0602Crystal lasers or glass lasers
    • H01S3/061Crystal lasers or glass lasers with elliptical or circular cross-section and elongated shape, e.g. rod
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/091Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/0915Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light
    • H01S3/092Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light of flash lamp
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/11Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
    • H01S3/1123Q-switching
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/16Solid materials
    • H01S3/163Solid materials characterised by a crystal matrix
    • H01S3/164Solid materials characterised by a crystal matrix garnet
    • H01S3/1643YAG

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

To provide an optical glass rod with antireflection films that secures a necessary length without being limited to a rod length short enough for storage in a vacuum deposition machine for forming antireflection films. An optical glass rod 6 having antireflection films 6a on both end surfaces is arranged on an optical path of a laser resonator comprising a rear mirror and a front mirror so as to make an optical optical-path length long. The optical glass rod 6 comprises a main-body member 6b and a pair of end portion members 6c whose overall length is shorter than that of the main-body member 6b and which each have an antireflection film 6a on one end surface, and both end surfaces of the end portion members 6c are bonded to both end surfaces of the main-body member 6b in optical contact. Consequently, even when the optical glass rod 6 needs to be too long to be stored in a general vacuum deposition machine, the optical rod 6 can be manufactured which has the antireflection films 6a on both the ends.

Description

201211577 六、發明說明: 【發明所屬之技術領域】 本發明係關於一種於兩端面具有反射防止膜之光 學玻璃棒、該光學玻璃棒之製造方法、還有具有該光學 玻璃棒之雷射產生裝置。 予 【先前技術】 自以往,控制雷射共振器内的光學性光線路徑長户 之機構已知有一種配置有高折射率媒質之雷射裝置(/ 酌例如日本特開2008-060317號公報)。 > 然而’由於雷射光的發光時間(脈衝寬度)與共振器 長度成比例而增加,因此若將光學玻璃棒(高折射率^ 質)配置在共振器内的光線路徑上,則可在不改變共振 器的幾何學長度之情況下增加光學性共振器長度,從而 增加雷射光的發光時間(脈衝寬度)。但,當雷射光在共 振器内所配置之光學玻璃棒的端面反射時,由於會產生 正規雷射發振以外的魏,導致光學零件被破壞或效率 降低,故必須於光學玻璃棒的兩端面形成反射防止臈。 ,然而,一般來說,反射防止膜雖係藉由真空蒸鍍所 形成,但由於置入真空蒸鍍機之光學玻璃棒的長度有其 極限’故會因真空蒸錢機的大小尺寸而決定了光學坡嗔 ,長度的極限’因而有難以在所需長度的光學玻璃棒兩 k升>成反射防止膜,而無法獲得所要求之雷射光的發 時間(脈衝寬度)之情況。 叱 3 201211577 【發明内容】 因此,本發明鑑於上述問題點,其目的在於提供一 種不會受到棒體長度必須是要能夠被收納於進行反射 防止臈的形成之真空蒸鍍機之限制,且可確保所需長度 之附有反射防止膜的光學玻璃棒及該光學玻璃棒之製 造方法,還有提供一種具有上述光學玻璃棒之雷射產生 裝置。 於疋,本發明之光學玻璃棒係於兩端面具有反射防 止膜之光學玻璃棒,其是由本體組件與全長較該本體組 件要短且於一端面具有反射防止膜之一對端部組件所 構成,並且分別於該本體組件的兩端面接合有該端部組 件的另一端面所構成。 上述結構係藉由分別於本體組件的兩端面接合有 於一端面具有反射防止膜之端部組件的另一端面(未具 有反射防止膜之面)’來形成兩端面具有反射防止膜之 光學玻璃棒。由於該本體組件不需形成有反射防止膜, 故不需為了形成反射防止膜而置入真空蒸鍍機,便可設 定為不能被收納於真空蒸鍍機之長度,另一方面,端部 組件的長度可設定為能夠被收納於真空蒸鍍機來形成 反射防止膜。 此處,可藉由光學性接觸來將該端部組件的另一端 面分別接合於該本體組件的兩端面。 另一方面,本發明之光學玻璃棒之製造方法係於兩 2〇1211577 端面具有反射防止膜之光學玻璃棒 以下步驟:分別於-對端雜件的^^ ’包含有 膜之步驟;及將购軸件的另1 =料反射防止 鲕h 且件要長之本體組件的兩端面之步驟。 上述結構係藉由於端部組件的— =面將:部組件的另-端面分別接合= 件 ^ ^面’來衣造兩端面具有反射防止膜之光學玻璃 :處,進行該接合之步驟係包含有以下步驟:研磨 该本體組件的兩端面之㈣;研赖料 由光學性接觸來將該端部叙件的另-端 面刀別接合於該本體組件的兩端面之步驟。 A ^述結構係研磨本體組件的兩端面,換言之為與端 核件之接合面,並研磨端部組件的另-端面(未設置 有反射防止膜之面),來將端部組件的另—端藉由光學 !·生接觸刀別接合於本體組件的兩端面,以形成兩端面具 有反射防止膜之光學玻璃棒。 ^然後,依據本發明之光學玻璃棒及光學玻璃棒之製 k方法由於係接合本體組件與一端面具有反射防止膜 之端部組件來構成光學麵棒,因此藉由真空蒸鍍來形 $反射防止膜時,便不需將本體組件設定為能夠置入真 工?^機之長度’從而可容易地確保兩端面具有反射防 止膜之光學玻璃棒的所需長度。 又’本發明之雷射產生裝置係由本體組件與全長較 5 201211577 f本體級件要短^•於—端面具有反射防止膜之-對端 部組件所構成,並於共振器内的光線路徑上配置有分別 於°亥本體組件的兩端面接合有該端部組件的另-端面 所構成之光學玻璃棒。 上述結構由於光學玻璃棒係由本體組件與具有反 射防止膜之端部組件所構成,而可將未形成有反射防止 膜之本體組件的長度蚊為所需長度,因此藉由將該光 學玻璃棒配置於共㈣_紐雜上,便可充分地增 加共振器的光學性光線路徑長度,並且,由於光學玻璃 棒係於兩端具有反射防止臈,因此可抑制通過光學破璃 棒之雷射光在光學玻璃棒的兩端面反射。 又,可於構成該雷射產生裝置的共振器之後鏡與前[Technical Field] The present invention relates to an optical glass rod having an antireflection film on both end faces, a method of manufacturing the optical glass rod, and a laser generating device having the optical glass rod . [Prior Art] Conventionally, a laser device equipped with a high refractive index medium has been known as a mechanism for controlling an optical ray path in a laser resonator (/, for example, Japanese Patent Laid-Open Publication No. 2008-060317) . > However, since the illuminating time (pulse width) of the laser light increases in proportion to the length of the resonator, if the optical glass rod (high refractive index) is placed on the ray path in the resonator, it is not Increasing the length of the optical resonator increases the geometric length of the resonator, thereby increasing the illumination time (pulse width) of the laser light. However, when the laser light is reflected by the end face of the optical glass rod disposed in the resonator, it is necessary to cause the optical component to be destroyed or the efficiency is lowered due to the fact that the laser beam other than the normal laser vibration is generated, so it is necessary to be on both end faces of the optical glass rod. Forming a reflection preventing flaws. However, in general, the anti-reflection film is formed by vacuum evaporation, but the length of the optical glass rod placed in the vacuum vapor deposition machine has its limit, which is determined by the size of the vacuum distillator. The optical grade, the limit of the length 'therefore, it is difficult to obtain an anti-reflection film of the optical glass rod of the desired length, and it is impossible to obtain the required emission time (pulse width) of the laser light.叱3 201211577 SUMMARY OF THE INVENTION Accordingly, the present invention has been made in view of the above problems, and an object thereof is to provide a vacuum vapor deposition machine that does not have to be subjected to a length of a rod to be accommodated in a reflection preventing flaw, and can be An optical glass rod with a reflection preventing film and a method of manufacturing the same, and a laser generating apparatus having the above optical glass rod are provided. In the present invention, the optical glass rod of the present invention is an optical glass rod having an anti-reflection film on both end faces, which is composed of a body assembly and a whole length shorter than the main body assembly and has an anti-reflection film on one end surface. And configured to be joined to the other end faces of the end assembly on both end faces of the body assembly. The above-mentioned structure is formed by forming the other end surface (the surface having no anti-reflection film) of the end portion having the anti-reflection film on one end surface of the body assembly, respectively, to form an optical glass having an anti-reflection film on both end faces. Baton. Since the body assembly does not need to be formed with the anti-reflection film, it is not necessary to be placed in the vacuum vapor deposition machine in order to form the anti-reflection film, and the length can be set to be not included in the length of the vacuum vapor deposition machine. The length can be set so as to be accommodated in a vacuum vapor deposition machine to form an anti-reflection film. Here, the other end faces of the end members can be joined to the end faces of the body assembly by optical contact, respectively. On the other hand, the manufacturing method of the optical glass rod of the present invention is the following steps of the optical glass rod having the anti-reflection film on the end faces of two 2〇1211577: the step of including the film in the ^-' of the opposite-end miscellaneous piece; The other step of purchasing the shaft member is to reflect the 两端h and the steps of the end faces of the body assembly. In the above structure, the optical glass having the antireflection film on both end faces is formed by the -= face of the end assembly, and the other end faces of the component are respectively joined to the surface of the component, and the step of performing the bonding includes There is the following steps: grinding the both end faces of the body assembly (4); the step of optically contacting the other end face of the end piece to the end faces of the body assembly. A is a structure in which the end faces of the body assembly are polished, in other words, the joint faces with the end core members, and the other end faces of the end assembly (the surface of the anti-reflection film are not provided) are used to join the end components. The ends are joined to both end faces of the body assembly by optical contact lenses to form optical glass rods having reflection preventing films on both end faces. Then, according to the optical glass rod and the optical glass rod of the present invention, the optical surface rod is formed by bonding the end body assembly and the end portion having the antireflection film on one end surface, thereby forming a reflection by vacuum evaporation. When the film is prevented, it is not necessary to set the body assembly to be able to be placed in the factory. The length of the machine is such that the desired length of the optical glass rod having the reflection preventing film on both end faces can be easily ensured. In addition, the laser generating device of the present invention is composed of a main body assembly and a full length of the main body of the body. The rear end portion has an antireflection film-to-end assembly and a light path in the resonator. An optical glass rod composed of a different end surface to which the end assembly is joined to both end faces of the body member is disposed. In the above structure, since the optical glass rod is composed of the body assembly and the end assembly having the anti-reflection film, the length of the body component in which the anti-reflection film is not formed can be a desired length, and thus the optical glass rod is used. The optical light path length of the resonator can be sufficiently increased by being disposed on the common (four)_News, and since the optical glass rod has reflection preventing flaws at both ends, the laser light passing through the optical broken rod can be suppressed. Both ends of the optical glass rod are reflected. Moreover, after the resonator constituting the laser generating device, the mirror and the front

鏡之間具備有Q開關、具有激發用燈之雷射棒、以及該 光學玻璃棒。 X 上述結構係藉由使激發用燈的光能聚集在雷射 棒,來從雷射棒放出光的分子,且藉由重複在^鏡盘前 鏡之間反射來產生雷射光發振,並使所發振之雷射光的 一部分從前鏡朝外部射出。此處,由於後鏡與前鏡之間 的光線路徑上係配置有兩端具有反射防止膜之光學玻 璃棒,因此可使後鏡與前鏡之間的光學性光線路彳f長产 變長,並且可抑制通過光學玻璃棒之雷射光在光 棒的兩端面反射。又,Q開關係藉由暫時堵住雷射光而 於蓄積能量後再輸出’來產生尖峰能量高的雷^光。 然後,由於依據本發明之雷射產生裝置,便可容易 6 201211577 地將共振器的光線路徑上所配署 設定為較長,因此可控制丘㈣置之光學玻璃棒的長度 長度,並充分地增加光幾何學上的光線路徑 射光的發光_(脈衝寬 ^減度,從而延長雷 端面係且有反I 又 ,由於光學玻璃棒的兩 棒的兩端::而止導膜免雷射光在先學玻璃 先予零件被破壞或效率降低。 【實施方式】 置(共振nt顯7^具有本發明光學破轉之雷射產生裝 之雷射棱:不二雷射產生裝置1係具有成為雷射發振源 、、义 卩激發该雷射棒之激發燈(閃光燈)3、後 、兄别鏡5、光學玻璃棒ό及Q開關7。 /雷射棒2可使用例如YAG棒等。然後,激發们 係相對於雷射棒2呈平行配置,在點啟該激發燈3後, 燈光的,量會聚集在雷射棒2,而當雷射棒2内成為充 分的月b星狀態後,光的分子便會從雷射棒2放出,藉由 在2個鏡4、5間重複反射而產生雷射發振。 相對於後鏡4為一種全反射鏡,前鏡5(輸出鏡)會 讓雷射光的一部分穿透,使得所發振之雷射光的一部分 從前鏡5朝外部射出。 Q開關7係藉由降低最初雷射共振器的q值來控制 雷射發振,在雷射棒2中處於激發狀態之粒子數變得十 分地大之時間點下,使共振器的Q值急速上升來產生雷 201211577 射發振,以產生尖峰能量高的雷射光。 光學玻璃棒6為一種光學玻璃製之棒狀組件,藉由 將高折射率媒質之光學玻璃棒6配置於會在2個鏡4、 5間重複反射之雷射光的光線路徑上,可在不改變2個 鏡4、5間的距離(幾何學的光線路徑長度)之情況下,增 加光學性光線路徑長度,藉以延長雷射光的發光時間 (脈衝寬度)。 ^亦即,由於雷射光的發光時間(脈衝寬度)係與共振 器長度L成比例而增加,因此藉由將光學玻璃棒6配置 於共振器内的光線路徑上,便可在不改變共振器的幾何 長度L之情況下,增長光學性共振器長度(光學性光線 路徑長度),從而延長雷射光的發光時間(脈衝寬度)。 此處’當雷射光在光學玻璃棒6的端面反射時,由 於會發正規雷射發振以外的發振,而造成光學零件被破 壞或效率降低,因此光學玻璃棒6係於其兩端面具備有 反射防止膜6a。 ” 反射防止膜6a係設置在光學玻璃棒6的端面來作 為一種折射率相異的層,其係使反射防止膜6a表面之 反射光與光學玻璃棒6端面之反射光的相位逆轉而抵 消來減少反射光,可使用例如Si〇2或Ti〇2或Ta2〇5等 無機材料,並藉由真空蒸鍍法來形成。 光學玻璃棒6如圖2所示,係包含有本體組件6b 與分別接合於該本體組件6b兩端之一對端部組件心所 構成" 8 201211577 山立端部組件6c的一端面係形成有反射防止膜6a,而 端^組件6c之未設置有反射防止膜6a_側的另一端面 貝]藉由光學性接觸來與本體組件6b的兩端面相接合。 此外’相對於端部組件6c的長度為例如1〇mm左 右’而本體組件6b的長度係超過例如50cm。 此處’參照圖3來概略地說明光學玻璃棒6之f造 方法。 " 首先’分別準備規定長度的光學玻璃製之棒體(本 體組件6b)與端部組件0c(步驟S11、步驟S21),並對本 體組件6b的兩端面進行精密研磨(步驟S12)。 另一方面’針對端部組件6c,係對設置有反射防止 膜6a之一端面進行研磨,並對未設置有反射防止膜如 之另一端面(與本體組件6b之接合面)進行精密研磨(步 驟S22),於上述研磨作業後,藉由真空蒸鍍法來於端ς 組件6c的一端面形成反射防止膜6a(步驟S23)。 本體組件6b的兩端面及端部組件6c的另一端面之 精密研磨中,係研磨至能夠藉由光學性接觸來進行接合 之面精密度,例如面精密度=1/1〇左右。此外,亦可^ 研磨步驟後再於端部組件6c形成反射防止膜6a。 於研磨及反射防止膜6a的形成結束後,使端部級 件6c的另一端面(未設置有反射防止膜6a 一側的端面 分別岔著於本體組件6b兩端面,並藉由光學性接觸來 加以接合,以於兩端面形成具備有反射防止膜以之 學玻璃棒6(步驟S13)。 201211577 此外,本體組件6b與端部組件6c的接合方法除 光學性接觸以外’亦可利用穿透性高且不會吸收雷射的 發振波長之uv接著劑(光學接著劑)等來進行接著。 但,如本實施形態般地藉由具備Q開關7來增加雷射 的尖峰功率之雷射產生裴置1中,由 合因雷射#而六且、、接〇面的接者劑 9因雷射先而谷易被破壞,因此如上所述,更佳地係 由光學性接觸(光學熔接)來將本體組件的與端部组曰 6c加以接合。 卞 依據上述光學玻璃棒6,由於本體組件6b未設置 有反射防止臈6a,故不需將本體組件奶置入直* ==組件此的長度不會受到置入真 你旦麻 制’從而可狀為共振器的光學性光線路 徑長度延長所要求之任意長度。 方面’端雜件&並非為了決定光學玻璃棒6 ϋίΐ ’而是為了於兩端設置反射防止膜如而被接合 ^右的=6b的兩端面’如上所述’只要有例如1 〇mm 左右的長度(厚度)即可’此為可輕易 ㈣之長度(大小尺寸)。 使光學玻璃棒6的長度被要求為難以置入 錢機的長度之情況,仍可形成於兩端且有藉 真:瘵鍍機所形成的反射防止膜6a之光學玻璃棒二 ,且件6只絲由光學性朗來進財體組件奶與端 生裝置二接合,則即便是產生高輪出雷射之雷射產 ^ 仍不會有接合面被破壞之情事,又,由於未 201211577 因此不會自接合面發生溶解或溶出,從而 可穩疋地產生雷射光。 再者,只要在共振器内的光線路徑上具 =棒6 ’便可將光學玻璃棒6的長度;定為能夠使 雷射光的發光時間(脈衝寬度)延長至要求程度之所需長 度,來射出要求發光時間的雷射光。 又’藉由光學玻璃棒6的兩端面所設置之反射防止 由於雷射光的反射在光學麵棒6兩端面會被抑 ^因此可防止產生正規雷射發振以外的發振,從而避 光子零件被破壞或效率降低。 此外,上述實施形態雖係於共振器内的光線路徑上 =有接合本脸件仍與具有反㈣止膜&之端部組 c所構成的光學玻璃棒6,但光學玻璃棒6的 未限定於共振器内。 罝 例如’藉由偏光束分割器等來將從雷射產生裝置i 、斤射出之雷射光分離成2道光束,而使分離後之其中一 光束的光線路徑長度較另—光束要長,以合成被賦予上 ,光線路㉟長度差之2道光朿’來延長雷射光的發 $ (脈衝寬度)之結構巾’可將上述光學玻璃棒6配置於 :皮!!予^長光線路徑長度的光束之光線路徑上,來賦予 交幾何學上的光線路徑長度差要長之光學性光線路徑 長度差。 ^ ^ ’於共振器内配置有光學玻璃棒6之情況,可為 共振器内未具備有QΜ之雷射產生裝置,又,亦可為 201211577 於共振器内的光線路徑上配置有SHG結晶或THG結晶 之雷射產生裝置。 【圖式簡單說明】. 圖1係顯示本發明實施形態之雷射產生裝置(共振 器)之圖式。 圖2係顯示本發明實施形態之光學玻璃棒之圖 式,(A)為分解圖,(B)係顯示接合狀態之圖式。 圖3係顯示本發明實施形態之光學玻璃棒的製造 步驟之圖式。 【主要元件符號說明】 1 雷射產生裝置 2 雷射棒 3 激發燈 4 後鏡 5 前鏡 6 光學玻璃棒 6a 反射防止膜 6b 本體組件 6 c 端部組件 7Q 開關 12A Q-switch, a laser rod having an excitation lamp, and the optical glass rod are provided between the mirrors. X The above structure emits light molecules from the laser rod by concentrating the light energy of the excitation lamp on the laser rod, and generates laser light by repeatedly reflecting between the mirror front mirrors, and A portion of the emitted laser light is emitted from the front mirror toward the outside. Here, since the optical glass rod having the anti-reflection film at both ends is disposed on the light path between the rear mirror and the front mirror, the optical optical line 彳f between the rear mirror and the front mirror can be prolonged and lengthened. And it is possible to suppress the reflection of the laser light passing through the optical glass rod on both end faces of the light rod. Further, the Q-open relationship generates a lightning energy with a high peak energy by temporarily blocking the laser light and accumulating energy and then outputting '. Then, according to the laser generating apparatus of the present invention, it is possible to easily set the length of the optical path of the resonator to be longer, so that the length length of the optical glass rod of the mound (four) can be controlled, and sufficiently Increasing the illuminance of the light path of the light geometry _ (pulse width ^ reduction, thereby extending the end face of the thunder and having an inverse I again, due to the two ends of the two rods of the optical glass rod:: the laser is free of the stop film First, the glass is first damaged or the efficiency is lowered. [Embodiment] (Resonance nt display 7) Laser ray having the optically broken laser of the present invention: the laser device 1 has a thunder The laser source, the excitation lamp (flash) 3, the rear, the brother glass 5, the optical glass rod ό and the Q switch 7. The laser rod 2 can be used, for example, a YAG rod, etc. Then The excitations are arranged in parallel with respect to the laser rod 2. After the excitation lamp 3 is turned on, the amount of the light will be concentrated on the laser rod 2, and when the laser rod 2 becomes a full moon b star state, The molecules of light will be released from the laser rod 2, with 2 mirrors 4 and 5 Repetitive reflection produces laser oscillation. Relative to the rear mirror 4 is a total reflection mirror, the front mirror 5 (output mirror) allows a part of the laser light to penetrate, so that a part of the laser light that is excited is directed from the front mirror 5 to the outside The Q switch 7 controls the laser oscillation by reducing the q value of the initial laser resonator, and the number of particles in the excited state of the laser rod 2 becomes very large, so that the resonator The Q value rises sharply to generate a lightning strike of 201211577 to generate laser light with high peak energy. The optical glass rod 6 is a rod-shaped component made of optical glass, and the optical glass rod 6 of high refractive index medium is disposed at the meeting. In the ray path of the repetitively reflected laser light between the two mirrors 4 and 5, the optical ray path length can be increased without changing the distance between the two mirrors 4 and 5 (the geometric ray path length). Therefore, the illuminating time (pulse width) of the laser light is extended. That is, since the illuminating time (pulse width) of the laser light is increased in proportion to the length L of the resonator, the optical glass rod 6 is disposed in the resonator. Ray path The optical resonator length (optical light path length) can be increased without changing the geometric length L of the resonator, thereby extending the illumination time (pulse width) of the laser light. Here, when the laser light is in the optical When the end face of the glass rod 6 is reflected, since the vibration is generated other than the normal laser oscillation, the optical component is broken or the efficiency is lowered. Therefore, the optical glass rod 6 is provided with an anti-reflection film 6a on both end surfaces thereof. The preventing film 6a is provided on the end surface of the optical glass rod 6 as a layer having a different refractive index, which counteracts the phase of the reflected light on the surface of the anti-reflection film 6a and the reflected light of the end face of the optical glass rod 6 to reduce the reflection. The light can be formed by using an inorganic material such as Si〇2 or Ti〇2 or Ta2〇5, and by vacuum evaporation. As shown in FIG. 2, the optical glass rod 6 includes a body assembly 6b and an end surface formed by a pair of end assembly members respectively bonded to the ends of the body assembly 6b. 8 201211577 Mountain end assembly 6c is formed. The anti-reflection film 6a is provided, and the other end face of the end portion 6c, which is not provided with the anti-reflection film 6a_ side, is bonded to both end faces of the body assembly 6b by optical contact. Further, the length relative to the end assembly 6c is, for example, about 1 mm, and the length of the body assembly 6b is more than, for example, 50 cm. Here, the method of manufacturing the optical glass rod 6 will be schematically explained with reference to Fig. 3 . " Firstly, a rod (the body unit 6b) of the optical glass having a predetermined length and the end unit assembly 0c are separately prepared (steps S11 and S21), and both end faces of the body unit 6b are precisely ground (step S12). On the other hand, the end portion 6c is subjected to polishing of one end surface provided with the anti-reflection film 6a, and the other end surface (the joint surface with the body assembly 6b) which is not provided with the anti-reflection film is precisely ground ( In step S22), after the above-described polishing operation, the anti-reflection film 6a is formed on one end surface of the end turn unit 6c by a vacuum deposition method (step S23). In the precision polishing of the both end faces of the main body unit 6b and the other end surface of the end unit assembly 6c, the surface precision by the optical contact is performed, for example, the surface precision is about 1/1 。. Further, the anti-reflection film 6a may be formed on the end portion 6c after the grinding step. After the formation of the polishing and anti-reflection film 6a is completed, the other end surface of the end portion member 6c (the end surface on the side where the anti-reflection film 6a is not provided is attached to both end faces of the body assembly 6b, respectively, and is optically contacted. The glass rods 6 provided with the antireflection film are formed on both end faces (step S13). In addition, the bonding method of the body assembly 6b and the end assembly 6c can be utilized in addition to optical contact. A uv adhesive (optical adhesive) that does not absorb the excitation wavelength of the laser is used to carry out the process. However, as in the present embodiment, the laser of the peak power of the laser is increased by providing the Q switch 7. In the generating device 1, the connector 9 of the junction surface is easily destroyed by the laser due to the laser beam, so as described above, it is more preferably optical contact (optical) The body assembly is joined to the end set 曰 6c. 卞 According to the optical glass rod 6 described above, since the body assembly 6b is not provided with the reflection preventing 臈 6a, it is not necessary to put the body assembly milk into the straight * == component The length of this will not be put into the true The system can be used to shape any length required for the optical path length of the resonator to be extended. The aspect of the end piece is not to determine the optical glass rod 6 ϋ ΐ , but to provide an anti-reflection film at both ends. The end faces of the joints of the right = 6b are as described above, as long as there is a length (thickness) of, for example, about 1 〇mm. This is an easy (four) length (size). The length of the optical glass rod 6 is required. In the case where it is difficult to insert the length of the money machine, it can still be formed at both ends and there is an optical glass rod 2 of the anti-reflection film 6a formed by the enamel plating machine, and the piece 6 is made of optical light. If the body component milk and the end device are engaged, even if the laser product that produces high-election lasers does not have the joint surface destroyed, and since it is not 201211577, it will not dissolve or dissolve from the joint surface. Therefore, the laser light can be stably generated. Furthermore, the length of the optical glass rod 6 can be set as long as the light rod in the resonator has a rod 6', so that the light-emitting time (pulse width) of the laser light can be extended. To the required level The required length is used to emit the laser light that requires the illuminating time. Further, the reflection provided by the both end faces of the optical glass rod 6 prevents the reflection of the laser light from being suppressed at both end faces of the optical surface rod 6, thereby preventing the regularity from being generated. In addition to the vibration of the laser, the photo-protection component is destroyed or the efficiency is reduced. In addition, although the above embodiment is based on the light path in the resonator, there is still a reverse (four) stop film & The optical glass rod 6 composed of the end group c, but the optical glass rod 6 is not limited to the resonator. For example, 'the laser light emitted from the laser generating device i and the jin is separated by a beam splitter or the like. Two beams are formed, and the length of the light path of one of the separated beams is longer than that of the other beam to synthesize the two apertures of the difference in length of the optical line 35 to extend the transmission of the laser light (pulse width) The structural towel ' can arrange the optical glass rod 6 on the ray path of the light beam length to give a long optical path length difference of the geometrical fiber path length difference. . ^ ^ 'In the case where the optical glass rod 6 is disposed in the resonator, the laser generating device without the QΜ in the resonator may be provided, or the SHG crystal may be disposed in the light path of the resonator in 201211577 or Laser generating device for THG crystallization. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing a laser generating device (resonator) according to an embodiment of the present invention. Fig. 2 is a view showing an optical glass rod according to an embodiment of the present invention, wherein (A) is an exploded view, and (B) is a view showing a joined state. Fig. 3 is a view showing a manufacturing step of an optical glass rod according to an embodiment of the present invention. [Main component symbol description] 1 Laser generator 2 Laser stick 3 Excitation lamp 4 Rear mirror 5 Front mirror 6 Optical glass rod 6a Anti-reflection film 6b Body assembly 6 c End assembly 7Q switch 12

Claims (1)

201211577 七 申請專利範圍 1. 2. 3. ;=:玻二棒’係於兩端面具有反射防止膜之光 _璃杯,其疋由本體組件與全長較該本體組件要 ^且於-端面具有反射防止膜之一對端部組件所 且分別於該本體組件的兩端面接合有該端 邛、、且件的另—端面所構成。 :申:專利範圍第1項之光學玻璃棒,其中係分別 ;〇體組件的兩端面藉由光學性接觸而接合有 該端部組件的另一端面。 -種光學玻璃棒之製造方法,係於兩端面具有反射 防止臈之光學破璃棒之製造方法,包含有以下步 驟: 分別於-對端部組件的一端面形成反射防止 膜之步驟;及 將該端部組件的另一端面分別接合於較該端 4組件要長之本體組件的兩端面之步驟。 4·如中π專觀圍第3項之光學玻璃棒之製造方 法’其中進行該接合之步驟係包含有以下步驟: 研磨該本體組件的兩端面之步驟; 研磨,端部組件的另-端面之步驟;及 、藉由光學性接觸來將該端部組件的另一端面 刀別接合於該本體組件的兩端面之步驟。 組t射產生農置,係由本體組件與全長較該本體 "要&且於-端面具有反射防业膜之一對端部 13 201211577 組件所構成,並於共振器内的光線路徑上配置有分 別於該本體組件的兩端面接合有該端部組件的另 一端面所構成之光學玻璃棒。 6. 如申請專利範圍第5項之雷射產生裝置,其係於構 成該雷射產生裝置的共振器之後鏡與前鏡之間具 備有Q開關、具有激發用燈之雷射棒、以及該光 學玻璃棒。201211577 Seven patent application scope 1. 2. 3. ;=: Glass rods are attached to the light-shielding cups with anti-reflection films on both end faces, and the body components and the full length of the body are compared with the body components. One end of the anti-reflection film is formed on the end faces of the body assembly, and the end faces of the body are respectively joined to the end faces of the body assembly. The invention relates to the optical glass rod of the first aspect of the patent, wherein the end faces of the body assembly are joined to the other end face of the end assembly by optical contact. - a method for producing an optical glass rod, comprising the steps of: forming an anti-reflection film on one end surface of a pair of end portions; and The other end face of the end assembly is respectively joined to the end faces of the body assembly which are longer than the end 4 assembly. 4. The method of manufacturing the optical glass rod of the third aspect of the present invention, wherein the step of performing the bonding comprises the steps of: grinding the both end faces of the body assembly; grinding, the other end face of the end assembly And the step of bonding the other end surface of the end assembly to the both end faces of the body assembly by optical contact. The group of shots produces a farmhouse, which is composed of a body component and a full length of the body "&<> and has a reflective anti-film one end portion 13 201211577 component, and is in the light path in the resonator An optical glass rod formed by joining the other end surface of the end assembly to the end faces of the body assembly is disposed. 6. The laser generating apparatus according to claim 5, wherein after the resonator constituting the laser generating device, a Q switch, a laser rod having an excitation lamp, and the mirror are provided between the mirror and the front mirror Optical glass rod.
TW100113967A 2010-04-23 2011-04-22 Optical glass rod, manufacturing method thereof, and laser generation device therewith TW201211577A (en)

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CN109478754A (en) * 2016-06-29 2019-03-15 瑞士Csem电子显微技术研发中心 The manufacturing method and its application of optical resonantor, optical resonantor

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JPS57206081A (en) * 1981-06-12 1982-12-17 Nec Corp Solid state laser rod
JPH01173679A (en) * 1987-12-28 1989-07-10 Toshiba Corp Mounting of mirror inside laser resonator
JPH01237602A (en) * 1988-03-18 1989-09-22 Nec Corp Optical fiber for transmission of light energy
JPH0569963U (en) * 1992-02-28 1993-09-21 ホーヤ株式会社 Solid-state laser medium and solid-state laser device using the same
JP2751867B2 (en) * 1995-05-16 1998-05-18 日本電気株式会社 Solid state laser oscillator
JPH09214024A (en) * 1996-02-02 1997-08-15 Fanuc Ltd Solid-state laser oscillator
JP5035789B2 (en) * 2006-08-31 2012-09-26 富士フイルム株式会社 Mode-locked laser device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109478754A (en) * 2016-06-29 2019-03-15 瑞士Csem电子显微技术研发中心 The manufacturing method and its application of optical resonantor, optical resonantor

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