201209206 六、發明說明： 【發明所屬之技術領域】 [麵]本發明涉及一種真空鍍膜件及其製備方法，尤其涉及一 種呈現綠色的真空鍍膜件及其製備方法。 【先前技術】 [0002] 真空鍍膜技術係一個非常環保的成膜技術。以真空鍍膜 的方式所形成的膜層具有高硬度、高耐磨性、良好的化 學穩定性、與基體結合牢固以及亮麗的金屬外觀等優點 _ ，因此真空鍍膜在裝飾性表面處理領域的應用越來越廣 〇 〇 .201209206 VI. Description of the Invention: [Technical Field] The present invention relates to a vacuum coating member and a method of manufacturing the same, and more particularly to a vacuum coating member which exhibits green color and a preparation method thereof. [Prior Art] [0002] Vacuum coating technology is a very environmentally friendly film forming technology. The film formed by vacuum coating has the advantages of high hardness, high wear resistance, good chemical stability, firm bonding with the substrate and a beautiful metallic appearance. Therefore, the application of vacuum coating in the field of decorative surface treatment is more The more widely it comes.
[〇〇〇3] 在裝飾性真空鍍膜領域中，對所鍍膜層的顏色的設計與 控制係一個非常關鍵的技術指標。目前採用真空鍍膜技 術能夠穩定地生產的顏色僅限於金色、銀色、黑色、玫 魂紅等少數色系，與烤漆、陽極處理等成膜工藝相比， 真空鍍膜在裝飾性表面處理領域;的競爭力不強。 【發明内容】 · Ο [°〇〇4] 有鑒於此，本發明提供一種呈現綠色的真空鍍膜件》 [0005] 另外，還提供一種上述真空鍍膜件的製備方法。 [0006] —種真空鍍膜件，包括一基體及一形成於基體上的顏色 層，該顏色層為一氧化鉻層，該顏色層呈現的色度區域 於CIE LAB表色系統的L*座標介於75至80之間，a*座標 介於-5至-10之間，b*座標介於15至20之間。 [00〇7] —種真空鍍膜件的製備方法，包括以下步驟： [0008] 提供一基體； 099127678 表單編號 A0101 第 3 頁/共 9 頁 0992048639-0 201209206 [0009] 使用一鉻乾，以5〜lOOsccm的流量通入純度為99. 99%的 氧氣，籍由磁控濺射鍍膜方法在基體上形成一顏色層， 該顏色層為一氧化鉻層，其厚度為0.5~3/zm，呈現的色 度區域於CIE LAB表色系統L*座標介於75至80之間，a* 座標介於-5至-10之間，b*座標介於15至20之間。 [0010] 相較於習知技術，上述真空鍍膜件的製備方法，籍由對 反應氣體氧氣的流量控制來改變顏色層的成分，即改變 顏色層中氧原子與鉻原子的比例，從而達到使顏色層呈 現出綠色的目的。以該方法所製得的真空鍍膜件可呈現 出具吸引力的綠色的金屬外觀，豐富了真空鍍膜層的顏 色，極大地提高了產品的外觀競爭力。 【實施方式】 [0011] 本發明的真空鍍膜件可為電子裝置外殼，亦可為眼鏡邊 框、鐘錶外殼、金屬衛浴件及建築用件。 [0012] 請參閱圖1，本發明較佳實施例的真空鍍膜件10包括一基 體11、一襯底層13及一顏色層15。襯底層13直接與基體 11結合，顏色層15形成於襯底層13〃的表面。 [0013] 基體11的材質可為金屬、玻璃、陶瓷或塑膠。 [0014] 襯底層13形成於基體11與顏色層15之間，以增強顏色層 15於基體11上的附著力。襯底層13可為一鉻層或其他可 提供附著效果的塗層。襯底層13的厚度大約為0. 0卜0. 1 /zra，優選厚度為0.05/zm。襯底層13的顏色以不影響顏 色層顏色的色調為佳，比如可為銀色、白色及灰白色等 淺色調。 099127678 表單編號A0101 第4頁/共9頁 0992048639-0 201209206 [0015] 顏色層15為一氧化鉻層。該顏色層15呈現的色度區域於 CIE LAB表色系統的L*座標介於78至83之間，a*座標介 於-5至-10之間，b*座標介於15至20之間，表現為綠色 。顏色層15的厚度大約為0.5〜3//m，優選厚度為2#m。 [0016] 上述真空鍍膜件10的製備方法主要包括如下步驟： [0017] 提供一基體11，並將基體Π放入盛裝有乙醇及/或丙酮溶 液的超聲波清洗器中進行震動清洗，以除去基體11表面 的雜質和油污。清洗完畢後烘乾備用。所述基體11的材 〇 質可為金屬、玻璃、陶瓷或塑膠。 [0018] 再對基體11的表面進行電漿清洗，進一步去除基體11表 面的油污，以改善基體11表面與後續塗層的結合力。對 基體11的表面進行電漿的方法包括如下步驟：將基體11 放入一磁控濺射鍍膜機的真空室内的工件架上，抽真空 至真空度為8. 0xl0_3Pa，以300~60 0sccm (標準狀態毫 升/分鐘）的流量向真空室内通入純度為99. 999%的氬氣 ，調節偏壓至-300〜-800V，對基體11表®進行電漿清洗 〇 ，清洗時間為5 ~ 10 m i η。 [0019] 採用磁控濺射的方式在基體11上形成一襯底層13。該襯 底層13為一鉻層。形成該襯底層13的具體操作方法及工 藝參數為：在所述電漿清洗完成後，調節氬氣流量至 100〜500sccm，加熱該真空室至120〜180°C，並設置工 件架的公轉轉速為2. 0~3. Orpm ;開啟已置於磁控濺射鍍 膜機中的鉻靶的電源，調節偏壓至-1 00 — 500V，沉積襯 底層13。沉積該襯底層13的時間為5〜15min。 099127678 表單編號A0101 第5頁/共9頁 0992048639-0 201209206 [0020] 形成該襯底層13後，以5〜lOOsccm的流量向真空室内通 入純度為99. 99%的氧氣，調節偏壓至-1 00 — 300V，對 基體11繼續鍍膜，以在襯底層13上鍍覆一顏色層15，該 顏色層15為一氧化鉻層。沉積該顏色層15的時間為 20〜60min 。 [0021] 所述顏色層15呈現的色度區域於CIE LAB表色系統的L* 座標介於78至83之間，a*座標介於-5至-10之間，b*座 標介於15至20之間。 [0022] 上述真空鍍膜件的製備方法，籍由對反應氣體氧氣的流 量控制來改變顏色層1 5的成分，即改變顏色層1 5中氧原 子與鉻原子的比例，從而達到使顏色層呈現出綠色的目 的。同時，籍由選擇合適的偏壓，控制氧原子及鉻原子 的沉積速率，可增強顏色層15的緻密性。另外，選擇合 適的氧氣流量與偏壓，能夠保證較高的沉積速率，從而 可進一步提高該真空鍍膜件10的生產效率。 【圖式簡單說明】 [0023] 圖1為本發明較佳實施例的真空鍍膜件的剖視示意圖。 【主要元件符號說明】 [0024] 真空鍍膜件：10 [0025] 基體：11 [0026] 襯底層：13 [0027] 顏色層：1 5 099127678 表單編號A0101 0992048639-0[〇〇〇3] In the field of decorative vacuum coating, the design and control of the color of the coated layer is a very important technical indicator. At present, the color that can be stably produced by vacuum coating technology is limited to a few colors such as gold, silver, black, and rose soul. Compared with the film forming process such as baking varnish and anodizing, the vacuum coating is in the field of decorative surface treatment; Not strong. SUMMARY OF THE INVENTION Ο [°〇〇4] In view of the above, the present invention provides a vacuum coating member that exhibits green color. [0005] Further, a method of preparing the above vacuum coating member is also provided. [0006] A vacuum coating member comprising a substrate and a color layer formed on the substrate, the color layer being a chromium oxide layer, the color layer exhibiting a chromaticity region in the L* coordinate of the CIE LAB color system. Between 75 and 80, the a* coordinate is between -5 and -10, and the b* coordinate is between 15 and 20. [00〇7] A method for preparing a vacuum coating member, comprising the following steps: [0008] providing a substrate; 099127678 Form No. A0101 Page 3 of 9 0992048639-0 201209206 [0009] Using a chrome stem to 5 The flow rate of ~100 sccm is passed through a purity of 99.99% of oxygen, and a color layer is formed on the substrate by a magnetron sputtering coating method. The color layer is a chromium oxide layer having a thickness of 0.5 to 3/zm. The chromaticity region is between 75 and 80 in the CIE LAB color system, the a* coordinate is between -5 and -10, and the b* coordinate is between 15 and 20. [0010] Compared with the prior art, the method for preparing the vacuum coating member described above changes the composition of the color layer by changing the flow rate of the oxygen of the reaction gas, that is, changing the ratio of oxygen atoms to chromium atoms in the color layer, thereby achieving The color layer appears to be green. The vacuum coated parts produced by this method can exhibit an attractive green metallic appearance, enrich the color of the vacuum coating layer, and greatly enhance the appearance competitiveness of the product. [Embodiment] The vacuum coating member of the present invention may be an electronic device casing, or may be a frame frame, a watch case, a metal bathroom member, and a building member. Referring to FIG. 1, a vacuum coating member 10 according to a preferred embodiment of the present invention includes a substrate 11, a substrate layer 13, and a color layer 15. The substrate layer 13 is directly bonded to the substrate 11, and the color layer 15 is formed on the surface of the substrate layer 13A. [0013] The material of the base 11 may be metal, glass, ceramic or plastic. [0014] A substrate layer 13 is formed between the substrate 11 and the color layer 15 to enhance the adhesion of the color layer 15 to the substrate 11. The substrate layer 13 can be a chrome layer or other coating that provides an adhesion. The thickness of the substrate layer 13 is about 0. 1 / zra, preferably 0.05 / zm. The color of the substrate layer 13 is preferably a color tone which does not affect the color of the color layer, and may be, for example, a light color such as silver, white or grayish white. 099127678 Form No. A0101 Page 4 of 9 0992048639-0 201209206 [0015] The color layer 15 is a chromium oxide layer. The color layer 15 exhibits a chromaticity region between 78 and 83 in the C* LAB color system, a* coordinates between -5 and -10, and b* coordinates between 15 and 20. , the performance is green. The color layer 15 has a thickness of about 0.5 to 3/m, preferably a thickness of 2#m. [0016] The preparation method of the vacuum coating member 10 mainly includes the following steps: [0017] A substrate 11 is provided, and the substrate is placed in an ultrasonic cleaner containing an ethanol and/or acetone solution for vibration cleaning to remove the substrate. 11 surface impurities and oil stains. After cleaning, dry and set aside. The material of the substrate 11 may be metal, glass, ceramic or plastic. [0018] The surface of the substrate 11 is further subjected to plasma cleaning to further remove the oil stain on the surface of the substrate 11 to improve the bonding force between the surface of the substrate 11 and the subsequent coating. The method for the plasma of the surface of the substrate 11 comprises the steps of: placing the substrate 11 in a workpiece holder in a vacuum chamber of a magnetron sputtering coating machine, and evacuating to a vacuum of 8. 0xl0_3Pa to 300~60 0sccm ( The flow rate of the standard state ML/min) is passed into the vacuum chamber to an argon gas having a purity of 99.999%, and the bias voltage is adjusted to -300 to -800 V, and the substrate 11 is subjected to plasma cleaning, and the cleaning time is 5 to 10 Mi η. [0019] A substrate layer 13 is formed on the substrate 11 by magnetron sputtering. The backing layer 13 is a chrome layer. The specific operation method and process parameters for forming the substrate layer 13 are: after the plasma cleaning is completed, adjusting the flow rate of the argon gas to 100 to 500 sccm, heating the vacuum chamber to 120 to 180 ° C, and setting the revolution speed of the workpiece holder. 2. 0~3. Orpm; Turn on the power supply of the chromium target placed in the magnetron sputtering coater, adjust the bias voltage to -100 to 500V, and deposit the substrate layer 13. The time for depositing the substrate layer 13 is 5 to 15 min. 0%, the pressure is adjusted to - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 1 00 - 300 V, the substrate 11 is continuously coated to plate a color layer 15 on the substrate layer 13, and the color layer 15 is a chromium oxide layer. The time for depositing the color layer 15 is 20 to 60 min. [0021] The color layer 15 presents a chrominance region with a L* coordinate between 78 and 83 in the CIE LAB color system, a* coordinates between -5 and -10, and b* coordinates between 15 and Between 20 and 20. [0022] The method for preparing the vacuum coating member is characterized in that the composition of the color layer 15 is changed by controlling the flow rate of the oxygen of the reaction gas, that is, the ratio of the oxygen atom to the chromium atom in the color layer 15 is changed, thereby achieving the color layer presentation. The purpose of green. At the same time, the compactness of the color layer 15 can be enhanced by selecting a suitable bias voltage and controlling the deposition rate of oxygen atoms and chromium atoms. In addition, the selection of a suitable oxygen flow rate and bias voltage ensures a high deposition rate, thereby further increasing the production efficiency of the vacuum coated member 10. BRIEF DESCRIPTION OF THE DRAWINGS [0023] FIG. 1 is a cross-sectional view showing a vacuum coating member according to a preferred embodiment of the present invention. [Main Component Symbol Description] [0024] Vacuum Coating Member: 10 [0025] Substrate: 11 [0026] Substrate Layer: 13 [0027] Color Layer: 1 5 099127678 Form No. A0101 0992048639-0