201144461 六、發明說明： 【發明所屬之技術領域】 本創作係關於/種旋轉輕材組件’尤指一種藉由彈性元件將 靶材體與内襯管簡易緊密結合的中空狀靶材組件。 【先前技術】 旋轉乾材主要用於大面積的披覆’由於典型之平面乾材在藏 鐘製程中，乾材的利用率僅有1 5%至40%，以旋轉乾材取代 • 後，靶材利用率可提高達70%至90% ’進而降低製造成本，因 此使用旋轉乾材逐漸成為趨勢。 旋轉靶材的靶材體與内襯管之間的結合技術相當不易，由於 在濺鍍製程中，靶材體會產生大量的熱能，此熱能需藉由内概管 傳導至冷卻介質，因此靶材體與内襯管需要有良好的熱接觸。— 般的做法係將低熔點金屬作為焊料填入靶材體與内襯管間的門 隙’而將靶材體與内襯管接合，然而，此種方法之金屬焊料成本 高，且需將靶材體内表面及内襯管外表作金屬化處理，製程 ί 雜，另外，在濺鍍過程或冷卻時，因為内襯管與靶材體熱膨服係 數有差異，内襯管及靶材體之間會產生間隙，容易發生把材體與 内襯管脫落的情形。 為了改善上述問題’在美國第2008/0003385 Α1號專利汽 及歐洲第2009/036910 Α1號專利案中揭示，如圖7所示者， 將内襯管外表面形成波浪狀，再將靶材體以熱均壓或澆鑄的方弋 與内襯管緊密結合，但是，熱均壓製程的設備昂貴，會增加靶材 體製造的成本，且當靶材體與内襯管的熱膨脹係數差異過大時， 波浪狀局部應力太大，對靶材體造成損害；以澆鑄的方式製作靶 201144461 材體的方式，由於澆鑄所需要的溫度較高，需要較長時間的冷 卻，靶材内部容易產生縮孔，導致靶材體密度降低，且微觀組織 不均勻，進而影響到濺鍍薄膜的品質。 在美國第2008/0003385 A1號專利案中則揭露一種利用彈 性元件補足靶材體與内襯管因熱脹冷縮造成間隙的方法（如圖8所 示者），使靶材體與内襯管能夠緊密結合，但是，此技術主要仍 係依賴低熔點金屬焊料的接合力，阻止靶材體滑移，彈性元件僅 提供摩擦力，若是彈性元件數量不足，無法提供足夠的阻力，以 • 阻擋靶材體滑移，如何將足夠的彈性元件置入靶材體與内襯管之 間，以提供足以阻擋靶材底滑移的阻力，為一種過於複雜的技 術。 【發明内容】 本創作之目的在於提供一中空狀靶材組件，期望藉由此設 計，改善靶材組件成本高、製程複雜，靶材體與内襯管密著差， 濺鍍薄膜品質不佳等缺點。 為達成前揭目的，本創作設計一種中空狀靶材組件，其包 含： 一内概管，係包含有相對之一頭端及一尾端，分別在接近頭 端與尾端之外管壁上形成凹部； 一靶材體，至少包含有一第一中空靶材及一第二中空靶材， 第一中空靶材及第二中空靶材分別於其内管壁形成自其一端面沿 軸向延伸的凹槽，所述凹槽在端面上形成一開口，第一中空靶材 及第二中空靶材接續套設於該内襯管上，且其具凹槽之端面分別 朝向内襯管之頭端及尾端，使第一中空靶材及第二中空靶材内管[ 5 201144461 福…槽刀料應於内概管頭端與尾端外管壁上之凹部；以及 掸盥 中二靶材、第二中空靶材之凹 、該内襯管相對應的凹部中，藉以定位㈣管及Μ。 =中，該些彈性元件可為彈片，此時第_、第二中空乾材上 =自端面之軸向深度，需大於内觀管上凹部轴向底面至鄰近内 =心的深度’使該些彈性元件之—面貼合，該些㈣之凹槽 4係抵靠於内襯管凹部内部，同時内襯管凹部表緣性元 件亦有支撐》201144461 VI. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a rotating light material assembly, particularly a hollow target assembly in which a target body and an inner liner are simply and tightly coupled by an elastic member. [Prior Art] Rotating dry materials are mainly used for large-area coatings. Since typical flat dry materials are used in the Tibetan clock process, the utilization rate of dry materials is only 1 5% to 40%, replaced by rotating dry materials. Target utilization can be increased by 70% to 90%, which in turn reduces manufacturing costs, so the use of rotating dry materials is becoming a trend. The bonding technique between the target body and the inner liner of the rotating target is relatively difficult, because in the sputtering process, the target body generates a large amount of thermal energy, and the heat is transmitted to the cooling medium through the inner tube, so the target The body and the inner liner need to have good thermal contact. The general practice is to bond the target body to the inner liner by filling the low-melting-point metal as a solder into the gate gap between the target body and the liner. However, the metal solder of this method is costly and needs to be The surface of the target body and the surface of the inner liner are metallized, and the process is cumbersome. In addition, during the sputtering process or cooling, the inner tube and the target are different because of the difference in thermal expansion coefficient between the inner liner and the target body. A gap is formed between the bodies, and it is easy to cause the material and the inner liner to fall off. In order to improve the above problem, it is disclosed in the patents of the United States No. 2008/0003385 No. 1 and the European Patent No. 2009/036910, No. 1, as shown in Fig. 7, the outer surface of the inner liner is formed into a wave shape, and then the target body is formed. The hot equalizing or casting square is tightly combined with the inner liner. However, the equipment with the hot average pressing process is expensive, which increases the cost of manufacturing the target body, and when the difference between the thermal expansion coefficients of the target body and the inner liner is too large. The wavy local stress is too large, causing damage to the target body; the method of making the target 201144461 material by casting, because the temperature required for casting is high, it takes a long time to cool, and the inside of the target is easy to produce shrinkage holes. As a result, the density of the target body is lowered, and the microstructure is not uniform, thereby affecting the quality of the sputter film. In the US Patent No. 2008/0003385 A1, a method for supplementing a gap between a target body and a liner tube due to thermal expansion and contraction (such as shown in FIG. 8) by using an elastic member to expose the target body and the lining is disclosed. The tube can be tightly combined. However, this technology mainly relies on the bonding force of the low melting point metal solder to prevent the target body from slipping. The elastic element only provides friction. If the number of elastic elements is insufficient, it cannot provide sufficient resistance to block The sliding of the target body, how to place enough elastic elements between the target body and the inner liner to provide a resistance sufficient to block the bottom slip of the target is an overly complicated technique. SUMMARY OF THE INVENTION The purpose of the present invention is to provide a hollow target assembly, which is expected to improve the cost of the target assembly, the process complexity, the poor adhesion between the target body and the inner liner, and the poor quality of the sputter film. And so on. In order to achieve the above objective, the present invention designs a hollow target assembly comprising: an inner tube comprising a pair of opposite ends and a tail end, respectively formed on the wall of the tube near the end and the end a concave body; a target body comprising at least a first hollow target and a second hollow target, wherein the first hollow target and the second hollow target respectively form an axial extension of the inner tube wall from one end surface thereof a groove, the groove forming an opening on the end surface, the first hollow target and the second hollow target are successively sleeved on the inner liner, and the end faces of the groove respectively face the head end of the inner liner And the tail end, so that the first hollow target and the second hollow target inner tube [5 201144461 Fu... the grooved material should be on the inner tube end and the outer end of the outer tube wall; and the second target in the middle The concave portion of the second hollow target and the corresponding concave portion of the inner liner tube are used to position the (four) tube and the crucible. In the middle, the elastic members may be elastic pieces, and the axial depth of the first and second hollow dry materials from the end surface is greater than the axial bottom surface of the concave portion of the inner tube to the inner side = the depth of the heart. The elastic elements are surface-fitted, and the grooves 4 of the (4) are abutted against the inside of the recess of the inner liner tube, and the surface element of the inner liner is also supported.
其中’該些彈性元件可為彈簧，彈簧的兩端分別抵靠在減 凹槽底部與内襯管凹部底部。 該靶材體進一步包含有至少一個第三中空靶材，第三中空靶 材係"於第-中妹材及第二中空拓材之間套固在内襯管上。該 第三中空_亦可自其—端面沿軸向延伸在内管壁上形成凹槽， 内襯管於相對應位置上亦形成凹部，第三以乾材套固在内财 時，該具凹槽開σ端面朝著内襯管尾端。該第—中空乾材進一步 可自其另-端面亦在内管壁上形成沿軸向延伸凹槽，内襯管帅 對應位置上亦形成凹部，以增加靶材體與内襯管結合之支撐力。 在第一中空靶材套入内襯管後，將複數個彈性元件平均塞入 第一中空靶材與内襯管間的空間，再於靶材外施加一熱源，將該 靶材的溫度提升至金屬焊料之熔點以上，將熔融的金屬倒入第一 中空乾材與内襯管之間縫隙，直到溶融金屬填滿該縫隙，將熱 源’移除使金屬焊料慢慢凝固。 在濺鍍過程或冷卻時，雖然内襯管與靶材體與焊料金屬的熱 膨脹係數有差異，内襯管及靶材體之間會產生間隙，但是因為有 彈性元件的存在，内襯管與靶材體依舊有良好的密著，靶材體不 201144461 會產生相對位移。 【實施方式】 為了降低旋轉粗材組件的製造成本，以及改善乾材體與 管間的結合程度，本發明提出—射空狀材組件ip Γ件包含—中空狀之内襯管卜―乾材體2及複數個^元件 3 0 該中空狀之内襯管i係包含有相對_頭端iq k尾端^， 分別在接近頭端u)與尾端u之外f壁上形成凹部i2，該内概管 1之凹部12可為由車削加工等方式製成之連續環狀，且所述凹部 12之側視外觀可為矩形、三角形或其他任何形狀。 該靶材體2 ’包含第一中空靶材2〇及一第二中空靶材η， 該第-中蜂材20及第二中找材21分別自其—端面^内側 壁形成沿軸向延伸的凹槽23，該些凹槽23在端面22上分別形 成開口 24,第一中空靶材2〇及第二中空靶材21依序套設於該 内襯管1上’且其具凹槽23之端面22分別朝向内襯管i頭端 毛鸲11亦即，在靶材體2之兩末端面22分別設有凹槽 =’使第—中空乾材20及第二中空㈣21内管壁上的凹槽23 刀別對應於接近内襯管i頭端1()與尾端η彳管壁上之凹部 12 〇 該些彈性it件3係自第―、第二中空乾材2〇、21凹槽23之 ，24，置入s亥中空靶材凹槽23與該内襯管凹部12中藉以 接合内襯管1及靶材體2。 曰 ，在第中空乾材20套入内襯管1後，將複數個彈性元件3 平均分佈的方式塞入第一中空靶材2〇與内襯管】間的容置空間 201144461 4該谷置空間4主要係以凹槽23及凹部12所形成，再於第一 中空乾材20外部施加-熱源，將第一中空乾材2〇的溫度提升至 金屬焊料之炫點以上，將溶融的金屬倒入第一中空乾材2〇與内概 s 1之間的縫隙後，移除熱源，使金屬焊料慢慢凝固，接著以同 樣的方式，使第二中空糾21與_管i密合。在雜過程或 冷部時’雖然:内襯管1與乾材體2與焊料金屬的熱膨脹係數有差 異’内襯管1及乾材體2之間會產生間隙，但是因為有彈性元件 3的存在，内襯管丨與乾材體2依舊有良好的密著，乾材體2不 會產生相對位移。 該金屬焊料為低熔點金屬較佳，其中，該金屬焊料以銦更 佳。 該乾材體2進-步可包含有至少一個第三中空乾材25，在第 一中空乾材20套入内襯管1後’接著套入第三中空乾村託，最 後才將第二中空乾材21套入（如圖！及圖4所示者），第三中空 靶材25的數量可以依據内襯管丨的長度加以變化，因為第一中 % 二靶材及第二中空靶材21分別位於内襯管i的頭端1〇及尾 端11，且已被彈性元件3及金屬焊料所固定，因此，夹套在第一 中空乾材20及第二中空乾材21間的第三中空㈣25，亦可被 定位在内襯管1上，在製程中不會對内襯管i產生位移。 如圖2所示者，該些第三中空靶材25進一步亦可自其一端 面22内側壁形成沿軸向延伸的凹槽23，且於内襯管i相對應位 置上亦形成凹部12，將第三中空靶材25套至内襯管i時，具有 凹槽23之端面22需朝向内襯管1尾端u。如此—來，靶材體2 上的第一、第二、第三中空㈣20、21、25均有可供彈性元件 3定位之凹槽23，可加強靶材體2與内襯管！間的接合，提供更 201144461 有效的疋位結構及熱傳導效率。 在實施上，首先在内觀管i上套入第一中空崎2〇，在 空間4置入彈性元件3,在内襯fl與第—中空㈣2〇注入金屬 焊料’待其冷卻凝固，再依序套人第三中⑲材&及第二中空 乾並於每—第三中空純25或第二中空1^材21分別套 入内觀B i後’均需先個別將彈性元件3置入容置空間4，並待 主入金屬焊料冷卻凝固，才可套 二中空乾材21。 套入下”三中空乾材25或第 如圖3所示者，該第一中找犲2〇進一步自在其鄰近第三 把材内管壁上形成沿轴向延伸的 .^ 凹槽23，内襯管1於相對應位置 上亦形成凹部12’以增純材體2與内襯们結合之支撑力。 各個第-、第二、第三中空乾材20、21、25上之_提 供彈性元件3 -容置處，除了避免彈性 為可減少因彈性元件3塞入而對第一 移外’主㈣因 〇, 〇r ^ 乐 第一、第三中空靶材20、 k成的損壞，然而，凹槽Μ之尺+ 加工第-、第二、第三t空乾材2，需儘可能小，以降低 二、第三中_20、21、25造成二5時，對第-、第 一、第二、g - &成的衝擊應力，且可提高第 4 一/第二申工_ 2〇、以、25的利用率·該内觀管】上 之凹。P 12徑向深度至少為彈性元 阻力，避免彈性元件3位移。 厚度的—倍，以提供足夠的 如圖I至3所示者，該些彈性 件為彈片時，所述[、第：―、㈣ =彈繼，當彈性元 槽23自端面22的之軸向深户 〇、2卜25上凹 神门冰度，w大於内襯管 底面至鄰近㈣管丨端_㈣ °轴 貼合第一、第二 '第三中空乾材20、21—二^件3之一面分別 1 25之凹槽23 ’另一端r Γ τ 9 201144461 係抵靠於内襯管！凹部12内部，同時内概管i凹部i2表緣對彈 性元件3亦可有支樓。 如圖4所示者’該些彈性元件3為彈簀較佳，當彈性元件為 彈簧時，彈簧的兩端分別抵靠在第—、第二、第三中空_ 、 21、25凹槽23底部與内襯管1凹部12底部。 又’該些彈性元件3需提供支㈣功能，因此，該些彈性元 件3以具㈣度較佳，且該些彈性元件3需將熱能自糾體2傳 導自内襯管1，因此，該些彈性料3以具高導熱係'數較佳，其 • 中，該些彈性元件3以純銅材質製成較佳。 如圖5所示者，該乾材體2之第一、第二、第三中空乾材 2G、2卜25内筒壁上之凹槽23可為連續環狀，可由車削加工等 方式製作，以供彈片置入。 如圖6所示者，該乾材體2之第_、第二、第三中空乾材 20、21、25内筒壁上之凹槽23為間斷環狀，亦即第一、第二' 以 第三中空乾材20、2卜25内筒壁上形成複數個環狀凹槽23 供彈片或彈簧置入。 本發明之一較佳實施例如下： 包 以氧化铭鋅材質之乾材體2為外層雜材料，該乾材體 含-第-中空靶材20、-第二中空靶材21以及三節第三中空靶 材25，第一、第二、第二 —中二乾材2〇、21 ' 25外徑均為160毫 米，内徑為133毫米，每—c 母郎乾材之長度分別為280毫米，靶材 體之總長度共14GG毫米，分別自該第_中空㈣2Q及第二中空 乾材21之-端面22，在其内表面軸向以車削加>寬度1〇毫 米、軸向深度2毫米的環狀凹槽23，内襯管ι材質為不錄鋼 SUS304，其外徑為132. 5毫米，内徑為125毫书，長度為145〇 201144461 毫米，_管1之外難較㈣體2内师小Q 5毫米以利於 將乾材體2套設在内襯管i外側，於内襯管i外管壁上相隔 毫米處亦即在接近其頭端10尾端11兩端處，以車削加工一高 度3宅米’深度！毫米之三角環狀凹部12，該些彈性元件3為彈 片以純銅材質製成’厚度為i毫米，以習知之潤濕方法將銦潤濕 於第帛一、第三中空乾材20、2卜25之内表面與内襯管】 之外管壁上。 中空靶材20緩緩套入内襯管丨之外管壁Wherein the elastic members may be springs, and the two ends of the spring respectively abut against the bottom of the recess and the bottom of the inner tube recess. The target body further comprises at least one third hollow target, and the third hollow target is sleeved on the inner liner between the first middle and the second hollow. The third hollow _ may also extend from the end surface thereof in the axial direction to form a groove on the inner tube wall, and the inner liner tube also forms a concave portion at a corresponding position, and the third material is fixed in the inner material, the The groove opening σ end faces toward the end of the inner liner. The first hollow material can further form an axially extending groove from the other end surface of the inner tube wall, and a concave portion is formed at the corresponding position of the inner tube to increase the support of the target body and the inner liner. force. After the first hollow target is inserted into the inner liner, a plurality of elastic members are evenly inserted into the space between the first hollow target and the inner liner, and then a heat source is applied outside the target to raise the temperature of the target to Above the melting point of the metal solder, the molten metal is poured into the gap between the first hollow dry material and the inner liner until the molten metal fills the gap, and the heat source is removed to slowly solidify the metal solder. During the sputtering process or cooling, although there is a difference in the coefficient of thermal expansion between the inner liner and the target body and the solder metal, a gap is formed between the inner liner and the target body, but because of the presence of the elastic member, the inner liner and The target body still has a good adhesion, and the target body does not have a relative displacement in 201144461. [Embodiment] In order to reduce the manufacturing cost of the rotating thick metal component and improve the degree of bonding between the dry material and the pipe, the present invention proposes that the IG component of the hollow material component comprises a hollow inner liner tube - dry material The hollow body lining tube i includes a relative _ head end iq k end end ^, respectively forming a concave portion i2 near the head end u) and the tail end u outside the f wall, The recess 12 of the inner tube 1 may be a continuous ring made by turning or the like, and the side view of the recess 12 may be rectangular, triangular or any other shape. The target body 2 ′ includes a first hollow target 2 〇 and a second hollow target η , and the first middle middle material 20 and the second middle search material 21 respectively extend from the inner side wall of the end surface thereof to extend in the axial direction The recesses 23, the recesses 23 respectively form openings 24 on the end faces 22, and the first hollow target 2 and the second hollow target 21 are sequentially sleeved on the inner liner 1 and have grooves The end faces 22 of the end faces 22 are respectively oriented toward the end caps 11 of the inner liner tube, that is, the end faces 22 of the target body 2 are respectively provided with grooves = 'the first hollow dry material 20 and the second hollow (four) 21 inner inner wall The upper groove 23 corresponds to the concave portion 12 on the wall of the pipe end near the end of the inner liner 1 () and the end η, and the elastic member 3 is from the first and second hollow materials 2 The grooves 23, 24 are placed in the hollow target recess 23 and the inner tube recess 12 to engage the inner liner 1 and the target body 2.曰, after the first hollow material 20 is inserted into the inner liner 1, the manner in which the plurality of elastic members 3 are evenly distributed is inserted into the accommodating space between the first hollow target 2 and the inner liner; 201144461 4 4 is mainly formed by the groove 23 and the recess 12, and then a heat source is applied to the outside of the first hollow dry material 20 to raise the temperature of the first hollow dry material 2〇 to the bright point of the metal solder, and pour the molten metal. After entering the gap between the first hollow dry material 2 〇 and the inner s 1 , the heat source is removed to slowly solidify the metal solder, and then the second hollow tang 21 is brought into close contact with the tube i in the same manner. In the process of the miscellaneous process or the cold part, although there is a difference in the coefficient of thermal expansion between the inner liner 1 and the dry metal 2 and the solder metal, a gap is formed between the inner liner 1 and the dry material 2, but because of the elastic member 3 Existence, the inner liner tube and the dry material body 2 still have good adhesion, and the dry material body 2 does not have relative displacement. The metal solder is preferably a low melting point metal, wherein the metal solder is more preferably indium. The dry body 2 may include at least one third hollow dry material 25, after the first hollow dry material 20 is inserted into the inner liner 1 and then nested into the third hollow trunk, and finally the second hollow The dry material 21 is nested (as shown in Fig.! and Fig. 4), and the number of the third hollow target 25 can be varied according to the length of the inner liner, because the first medium and second targets and the second hollow target 21 is located at the head end 1〇 and the tail end 11 of the inner liner i, respectively, and has been fixed by the elastic member 3 and the metal solder. Therefore, the sleeve is sandwiched between the first hollow dry material 20 and the second hollow dry material 21 The three hollow (four) 25 can also be positioned on the inner liner 1, and the inner liner i is not displaced during the process. As shown in FIG. 2, the third hollow target 25 may further form an axially extending groove 23 from the inner side wall of the one end surface 22, and a recess 12 is also formed at a corresponding position of the inner liner i. When the third hollow target 25 is sleeved to the inner liner i, the end face 22 having the recess 23 needs to face the trailing end u of the inner liner 1. In this way, the first, second, and third hollows (four) 20, 21, and 25 on the target body 2 have grooves 23 for positioning the elastic member 3, which can strengthen the target body 2 and the inner liner! The joints provide more effective 201144461 clamping structure and heat transfer efficiency. In the implementation, firstly, the first hollow tube 2 is inserted into the inner tube i, the elastic element 3 is placed in the space 4, and the metal solder is injected into the inner liner fl and the first hollow (four) 2 ' to be cooled and solidified, and then In the third set of the 19th material & and the second hollow dry and after each of the third hollow pure 25 or the second hollow 1 ^ material 21 are respectively inserted into the internal view B i 'all need to individually insert the elastic element 3 The space 4 is accommodated, and the second hollow material 21 can be set after the main metal solder is cooled and solidified. Inserting the lower three hollow material 25 or as shown in FIG. 3, the first middle finding 2 further forms an axially extending groove 23 from the inner wall of the third material adjacent to the third material. The inner liner tube 1 also forms a concave portion 12' at a corresponding position to enhance the supporting force of the pure material body 2 and the inner liner. The respective first, second and third hollow dry materials 20, 21, 25 are provided. The elastic member 3 - the accommodating portion, in addition to avoiding the elasticity, can reduce the damage caused by the insertion of the elastic member 3 to the first outer 'main (four) 〇, 〇r ^ Le first and third hollow targets 20, k However, the groove Μ + + processing the first, second, third t empty dry material 2, need to be as small as possible to reduce the second, third _20, 21, 25 caused by two 5, on the first - , the first, second, g - & impact stress, and can improve the fourth / second application _ 2 〇, 、, the utilization of 25 · the internal view tube] concave. P 12 diameter The depth of penetration is at least the elastic element resistance, avoiding the displacement of the elastic element 3. The thickness is multiplied to provide sufficient ones as shown in Figures I to 3, and when the elastic members are elastic pieces, the [,::, (4) = Following When the elastic element groove 23 is deep from the axial direction of the end surface 22, the depth of the sun is shallow, and w is larger than the bottom surface of the inner liner to the adjacent (four) end of the tube _ (four) ° axis fits the first and second ' The third hollow dry material 20, 21 - one of the two parts 3 of the groove 25 of each of the 25' respectively, the other end r Γ τ 9 201144461 is against the inner liner tube! inside the recess 12, while the inner tube i concave i2 table The pair of elastic members 3 may also have a branch. As shown in Fig. 4, the elastic members 3 are preferably springs. When the elastic members are springs, the two ends of the spring respectively abut the first and second. The bottom of the third hollow _, 21, 25 groove 23 and the bottom of the recess 12 of the inner liner 1. Further, the elastic members 3 need to provide a function of the branch (four), and therefore, the elastic members 3 are preferably (four) degrees, and The elastic members 3 need to conduct the thermal self-correcting body 2 from the inner liner 1. Therefore, the elastic materials 3 have a high thermal conductivity, and the elastic members 3 are made of pure copper. Preferably, as shown in FIG. 5, the grooves 23 on the inner wall of the first, second, and third hollow dry materials 2G, 2b of the dry body 2 may be continuous rings and may be turned by It is made by means of work, etc., for the elastic sheet to be placed. As shown in Fig. 6, the grooves 23 on the inner wall of the first, second and third hollow dry materials 20, 21, 25 of the dry body 2 are intermittent. The annular shape, that is, the first and second portions, forms a plurality of annular grooves 23 on the inner wall of the third hollow dry material 20, 2, and 25 for the elastic piece or the spring to be placed. A preferred embodiment of the present invention is as follows : The dry material body 2 of the oxidized zinc material is an outer layer impurity material, and the dry material body includes a first hollow target 20, a second hollow target 21, and three third hollow targets 25, first and Second, the second-second two dry materials 2〇, 21' 25 outer diameter are 160 mm, the inner diameter is 133 mm, the length of each c-clang dry material is 280 mm, and the total length of the target body is 14 GG mm. From the first hollow end (4) 2Q and the second end surface 22 of the second hollow dry material 21, the inner surface of the inner surface is axially turned by the addition of an annular groove 23 having a width of 1 mm and an axial depth of 2 mm. ι material is not recorded steel SUS304, its outer diameter is 132. 5 mm, the inner diameter is 125 millibooks, the length is 145 〇 201144461 mm, _ tube 1 is difficult to compare (four) body 2 inner division small Q 5 millimeters In order to facilitate the setting of the dry material body 2 on the outer side of the inner liner tube i, at the outer wall of the inner liner tube i at a distance of a millimeter, that is, near the end of the end end 10 of the head end 10, for turning a height of 3 houses M' depth! The triangular-shaped annular recess 12 of the millimeter, the elastic members 3 are made of pure copper material and have a thickness of i mm, and the indium is wetted by the conventional wetting method to the first and third hollow dry materials 20 and 2 The inner surface of the 25 and the inner liner are on the outer wall. The hollow target 20 is slowly inserted into the wall of the inner liner
· p工 /叮υ调坪， 平均分佈塞於第一中空崎20與内襯管i之容置空間4中，4 後於第-中空乾材20外側覆蓋一加熱毯，在18(rc持溫3〇 ' 鐘以將第中空乾材2〇的溫度提升至焊料姻的炫點以上將炎 融的铜倒進第—中空轉2Q與内襯管1之間，再將加熱毯移除， 使銦逐漸凝111，之後依序將三節内表面未加工的第4空乾材、2! 套入内襯管卜再將第二中空_ 21套人内襯们上，並重複筹 一中空乾材20放置彈性元件3、加熱填充銦等步驟。 综合上述說明可得知，本發明之中空狀乾材組件，係藉由第 -：第二：第三中空乾材20、21、25内管壁上之凹㈣，與内 襯官I外管壁上的凹部12，形成可供彈性元件3放置的容置空間 内襯該=二…提供良好的熱傳導，並可使該_ 2與 官1之間㈣早、低成本的方式達到良好的密著。 【圖式簡單說明】 圖 圖1係本發㈣”糾組件第—較㈣施例之剖視 示意 實施例之剖視示意 圖2係本發明十空狀靶材組件第二較佳 201144461 圖。 圖3係本發明中空狀靶材組件第三較佳實施例之剖視示意 圖。 圖4係本發明中空狀靶材組件第四較佳實施例之剖視示意 圖。 圖5係本發明中空狀靶材組件第五較佳實施例之俯視示意 圖。 圖6係本發明中空狀靶材組件第六較佳實施例之俯視示意· p work / 叮υ 坪 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , Warm 3〇' bell to raise the temperature of the second hollow material 2〇 to the bright point of the solder marriage. Pour the molten copper into the first hollow between the 2Q and the inner liner 1, and then remove the heating blanket. Indium is gradually condensed 111, and then the third inner surface of the inner surface of the three sections is unprocessed, and the second hollow _ 21 sets of linings are placed, and the hollow lining is repeatedly prepared. 20: placing the elastic member 3, heating and filling the indium, etc. As can be seen from the above description, the hollow dry material assembly of the present invention is made up of the inner wall of the first: second: third hollow dry material 20, 21, 25. The upper recess (four), and the recess 12 on the outer tube wall of the inner liner I form an accommodating space for the elastic element 3 to lining the y 2 to provide good heat conduction, and can make the _ 2 and the official 1 In the early (four) early, low-cost way to achieve a good closeness. [Simple diagram of the diagram] Figure 1 is a cross-sectional view of the (4) "correction component" - (four) example 2 is a cross-sectional view of a third preferred embodiment of the hollow target assembly of the present invention. Fig. 3 is a schematic view of a hollow preferred embodiment of the hollow target assembly of the present invention. Figure 5 is a top plan view of a fifth preferred embodiment of the hollow target assembly of the present invention. Figure 6 is a sixth preferred embodiment of the hollow target assembly of the present invention. Overlooking
圖。 圖7係習用靶材之剖視示意圖。 圖8係習用靶材之剖視示意圖。 10頭端 12凹部 20第一中空靶材 22端面 24開口 【主要元件符號說明】 1内襯管 11尾端 2靶材體 21第二中空靶材 23凹槽 25第三中空靶材 3彈性元件 4容置空間 12Figure. Figure 7 is a schematic cross-sectional view of a conventional target. Figure 8 is a schematic cross-sectional view of a conventional target. 10 end 12 recess 20 first hollow target 22 end face 24 opening [main component symbol description] 1 inner liner 11 end 2 target body 21 second hollow target 23 groove 25 third hollow target 3 elastic element 4 accommodation space 12